200929421 九、發明說明： 【發明所屬之技術領域】 本發明係有關於-種晶圓轉移裝置’特別是有關於—種可在晶圓 過程中確保晶圓安全且提高效率之轉移裝置。 【先前技術】 積體電路(IC ’integratedcircuit)的生產流程係多層級的分工架構，包括 T design)^ IS t it(wafer manufacturing)^ a% g) ^^(circuit200929421 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to a wafer transfer apparatus, and more particularly to a transfer apparatus that ensures wafer safety and improves efficiency during wafer processing. [Prior Art] The production process of IC 'integrated circuits is a multi-level division of labor structure, including T design)^ IS t it(wafer manufacturing)^ a% g) ^^(circuit
Probing)、封裝(assemWing)以及最終測試(_。隨著半導體製程技 術能力不_上提升，也追求生產解陳高，麟提高㈣速度也就能 夠提高獲利與增加競爭力。 曰現今半導體生產過程’待處理的晶圓會被妥善的放置於晶舟巾並藉由 晶圓盒送到下游處理端’下游處理端會在接收到晶圓盒後將晶舟移出，若晶 舟不符合處職台醜辦，處理勤無法對晶舟㈣業。所以必須 利用晶圓轉移裝置將晶圓轉移至適當的晶舟，使處_台順利作業。 如第1圖所示，傳統的晶圓轉移裝置100包括一埠1〇2、一推動裝置ι〇4 與-推桿1G6;將來自上游端的第—晶舟1G與符合規格的第二晶舟％放置 在痒1〇2上，當推動裝置104被推動時，推桿1〇6會將第一晶舟财的晶 圓移往第二晶舟2〇，鄉二晶舟2G可送至機台進行作業。 上述的晶圓轉移裝置會將第—晶舟中的晶圓全部轉移至第二晶舟，所以這 批晶圓會被送到-具機台進行作業，沒有辦法以多個機台進行同步處理，作 業速度受到限制，也就沒有辦法提高出貨效率。 目前針對關題有兩簡決方法H是操作使収筆㈣哪 pencil)吸取單片晶圓’但吸筆可能會造成晶圓的刮傷。另―種方法是利用自 動選取器(sorter)取出所須單片晶圓，但自動選取器造價高昂。這兩種方法每 次皆只能取ij料晶®，餅速度無法提升。 200929421 若第-晶舟與第二晶舟未被放置在正確位置，晶_移裝置卻啟動， 則晶圓會祕或因碰撞而損傷，必須仰賴操作人員的細心方能解決此問題。 以改ΐί於以上缺失，本發明所提供之晶圓轉移裝置，75針對先前驗加 【發明内容】 基於解決上述先術之缺失，本發晴提供之晶圓裝置可避免不安 全的操作’並且可以選擇性的將部分晶圓自第一晶舟移往第二晶舟。 ❹ Ο =發明之一目的在於提供一晶圓轉移裝置，係可安全的將晶圓在兩晶 舟中移動，不會有掉落或損傷。 =發明之又-目的在於提供—晶圓轉移裝置，係可選擇性的將部分或 全部的晶圓自一晶舟轉移至另一晶舟。 本發明之另一目的在於提供一晶圓轉移裝置係構造簡單且成本低廉 f 0 讲之再—目的在於提供—晶圓轉移裝置，係可使晶圓轉移速度加 快’增進生產效能者。 2明之晶圓轉移裝置係用以將第一晶舟中部份或全部的晶圓轉移至 Β其晶細及第二晶舟具有—預歧定 :包2放置第一晶舟與第二晶舟的璋、-推動裝置與複數個可拆= ^ ^ ^推捍可相對於該推動裝置直線移動或樞接於推練置上轉動 位置之間;當推動裝置移動時，位於第-位置的推桿可將 m^z 貞舟轉移至紅晶舟；第二位置的轉職法將對應的晶 圓自該第一晶舟轉移至該第二晶舟。 另外這些推桿亦可相對於該推動裝置移動於第一位置與第二位置之 間，當推桿自該第二位置軸至該第—位置時，可騎應的純自第一晶舟 6 200929421 轉移至第二晶舟。 本個之晶_移裝置鱗可包含至少—第―防綠置，設於痒 置=第一晶舟以及第二晶舟其中之一，第一防呆裝置可移動於第-防呆位 與第-防雜置，當晶舟被置鱗上-預先設定位置時， =於山第-防呆位置’則晶圓轉移裝置可將第—晶舟中的晶圓轉移至第3 舟，备晶舟未被置於琿上之預先設定位置時，第一防呆裝置位 ^ 置，使晶圓轉移裝置無法推動晶圓。 、弟一防呆位 ❹ 本發明之晶HI轉移裝置的柯包含—推動裝置，係與 裝置上配置複數個推桿，推桿可相對於推動裝置改變位」2推= 片所組成，其中壓桿係套裝於埠之中且阻制之—端抵住推動裝置之一端阻擋 【實施方式】 由於本發明係揭露-種晶圓轉移裝置，其 圓轉繼之主要結構與原理，屬於該領域 〇 圖式，係表達與本發明特徵有關之結構文中所對照之 完整繪製，闔先敘明。 "、未亦不需要依據實際尺寸 根據本發明-較佳實施例，請參見第2a圖， =之=Z=包 =202、—推動裝置2°4心推動裝置 可拆卸組裝：。推請係 ，·#至少—個推桿206調整至適當位置（例如推桿 所不之位置）後·，可藉由推動推動裝置m來使得推桿料行直線 7 200929421 移動。 繼續請參考第2a圖，當晶圓轉移裝置操作時，可以先將第一晶舟ι〇 與第二晶舟20會被放置在埠2〇2上，然後調整推桿2〇6，使得某些推桿能 夠被調整至第-位置’如推桿驗所示之位置，且具有一個預先設定之相 對位置，此預先設定之相對位置係配合晶圓轉移裝置2⑽所設定。接著， 推動裝置⑽祕時’位郷—位置的推桿施會將第—晶舟iq中與推桿 2〇6a對應之至少—晶圓轉移至第二晶舟2();很_地位於第二位置的推 桿206b則無法推動第一晶舟1〇中與推桿況砧對應的晶圓。 ❹ 姆本個之再—健實酬，首先，請參見第3a ®，本發明提供一 晶圓轉移裝置300,此晶圓轉移裝置包括一埠3〇2、一推動裝置3〇4與設置 在推動裝置3〇4上之複數個轉3〇6，其中埠3〇2用以承載至少一個晶舟。 在本實施例中’埠302絲動裝置304之間的位置是固定的，而推桿3〇6 係可直線移動於第-位置(如306a)與第二位置(如遍)之間。當進行晶圓轉 移裝置操作時，可以先將第一晶舟1〇與第二晶舟2()會被放置在蜂迎上， 然後直接推動推桿自第二位置移動到第一位置時(如3〇6a)，如第外圖所示， 會將第-晶舟ω中與推桿3〇6a對應之至少一晶圓，轉移至第二晶舟2〇。 〇 為了確保推動裝置2G4在晶圓轉移裝置操作過程中，不會任意地被移 動’本發明進一步於上述之晶圓轉移裝置的埠202與推動裝置2〇4之間加 入至少-防呆裝置。首先’本發明之第—防呆裝置，請參見第如圖及第仙 圖。如第4a圖所示，第一防呆裝置41〇係配置於晶圓轉移裝置的蜂2〇2的 了側邊附近，由-壓桿412與一阻擔片414所組成，其情桿412係穿透 並凸出於谭202的表面，而阻播片414則與一固定裝置416插接且阻撞片 414之-端抵住推動裝置4〇4或是抵住與推動裝置4⑽連接在成一趙的另一 物體（未顯示於圖中），故此時的推動裝置4〇4是不能被移動的。而當屢桿 化被-外力下塵至與谭4〇2成一平面時阻播片似可依固定震置仙作 横桿移動’即在塵桿412被下驗，阻擋# 414會在#直方向移動使得 8 200929421 阻播# 414脫離推動裝置4〇4之抵住端，故此時推動裝置4〇4即可移動， 如第4b圖所示。在本實施例中，固定裝置416可配置於埠2〇2的底部。 當進行晶圓轉移裝置操作時，第一晶舟1〇與第二晶舟2〇會被放置在 埠202上’此時，第一晶舟10會下壓抵靠防呆裝置410巾的壓桿412，使 壓桿412被下壓並使得阻播片414脫離推動裝置4〇4之抵住端，很明顯地， 此時阻擋片414不能阻播推動裝置4〇4的移動，推動裝置4〇4即可自由移 動’如第4b圖所示。而當第一晶舟1〇未被放置在預先設定的位置時則 防呆裝置41〇會依槓桿原理會灰復至凸出於4 2〇2表面的位此時阻撐片 ❹ 414會抵住並阻播推動裝置404的移動，故推動裝置404也就無法移動晶圓。 再接著，請參考第5a圖及第5b圖，係本實補之第二賴裝置之實施 例之示意圖。第二防呆裝置420係配置於第一防呆裝置之另一相對侧邊附 近（即位於晶圓轉移裝置的埠2〇2的一側邊附近），由一壓桿似與一阻撐 片424所組成’其中磨桿422係穿透並凸出於埠4〇2的表面，而阻播片似 則與-固定裝置426 (可選擇配置於痒2〇2的一侧邊上）框接且阻撞片似 之-端抵住推動裝置404，故此時的推動裝置4〇4是不能被移動的如第 5a圖所不。而當壓桿422被一外力下壓至與料2成一平面時，阻播片似 可依固定裝置416作槓桿移動，即在壓桿422被下壓後，阻擔;^ 424會在 〇 妓方向移動，使得阻撞片424脫離推動裝置404之抵住端，故此時推動 裝置404即可移動，如第5b圖所示。 當進行晶圓轉移裝置操作時，第一晶舟1〇與第二晶舟2〇會被放置在 埠2〇2上，此時，第二晶舟2〇會下壓抵靠防呆裝置伽中的麼桿似 壓=422被下壓並使得阻擋片414脫離推動裝置4〇4之抵住端，很明顯地， 此時阻擒片414不能阻槽推動裝置404的移動，推動裝置404即可自由移 動，如第5b圖所示。而當第一晶舟1〇未被放置在預先設定的位置時，則 防呆裝置410會依槓桿原理會恢復至凸出於埠2〇2表面的位此時阻 414會抵住並阻檔推動裝置4〇4的移動，故推動裝置如4也就無法移動晶圓。 9 ❹ Ο 200929421 上述之防呆裝置係分別配置在不同的位置上，故可以選擇將第一防呆 裝置以及第二防呆裝置同時配置在蟀202的兩相對侧邊附近，以同時作為 第-晶舟及第二晶舟在啟動操作時的防呆裝置。例如，當我們選用第一晶 舟10作為啟動防呆裝置的晶舟時，可以選擇使用第4a圖中的防呆裝置 410，而當我們選用第二晶舟20作為啟動防呆裝置的晶舟時，可以選擇使 用第5a圖中的防呆裝置42〇。很明顯地，也可以選擇同時將防呆|置仙 及防呆裝置420同時配置在料2上，如此必須確定第一晶舟ι〇及第二晶 舟20均已放置於默位置後，推動裝置4(H才能夠移動其動作過程與前 述相同，故不再贅述之。 防呆裝置係配合晶舟結構設置於痒上，如第6圖所示，當晶舟3〇的妹 構具有-個突起Η型橫娜㈣32，根據本發明—較佳實施例之第一防呆 裝置或第二防呆裝置可設置於Η賴桿料的接觸處藉以增加 的正確性。 综上所述’本發明提供之晶圓轉移裝置的結構簡單，可使製造成本低 廉；推桿的設計可選擇性將晶舟中的部份或全部晶圓轉移至另__ 藉 以增加作業效率；防呆裝置可避免因晶舟放置位置失當而 晶圓造成損傷的情形。 顯然地’依照上面實施例中的描述，本發明可能有許多的修正與 因此需要在其附加的權利要求項之内加以理解，除了上述詳細的 外，本發明還可以廣泛地在其他的實施例中施行4述僅為本發明之 實施例而已，並非用以限林發明之中請專利範圍；凡其 所揭示之精神下所完成的·改變紐飾，均聽含在下述中請專利範圍 200929421 【圖式簡單說明】 第1圖係習知之晶圓轉移裝置之示意圖。 第2a圓係本發明一較佳實施例之晶圓轉移裝置示意圖。 第2b圖係本發明一較佳實施例之晶圓轉移裝置示意圖。 第3a圖係本發明一較佳實施例之晶圓轉移裝置示意圖。 第3b圖係本發明一較佳實施例之晶圓轉移裝置示意圖。 第4a圖係本發明一較佳實施例晶圓轉移裝置之防呆裝置示意圖。 第4b圖係本發明一較佳實施例晶圓轉移裝置之防呆裝置示意圖。 © 第5a圖係本發明一較佳實施例晶圓轉移裝置之防呆裝置示意圖。 第5b圖係本發明一較佳實施例晶圓轉移裝置之防呆裝置示意圖。 第6圖係本發明一較佳實施例配合之晶舟。 【主要元件符號說明】 10 第一晶舟 20 第二晶舟 30 晶舟 32 Η型橫桿 100 晶圓轉移裝置 102 埠 104 推動裝置 106 推桿 200 晶圓轉移裝置 202 埠 204 推動裝置 11 200929421Probing), package (assemWing) and final test (_. With the improvement of semiconductor process technology capabilities, it also pursues the production of high-definition, and the increase in speed (4) speed can increase profitability and increase competitiveness. 曰 Today's semiconductor production The process 'processed wafers will be properly placed in the wafer boat and sent to the downstream processing end by the wafer cassette. 'The downstream processing end will remove the wafer boat after receiving the wafer cassette, if the boat does not match The ugly office is not able to handle the boat (4) industry. Therefore, the wafer transfer device must be used to transfer the wafer to the appropriate wafer boat to make the operation smoothly. As shown in Figure 1, the traditional wafer transfer The device 100 includes a 埠1〇2, a urging device ι〇4 and a push rod 1G6; and the first wafer boat 1G from the upstream end and the second crystal boat 5% according to the specification are placed on the itch 1〇2, when the pushing device When 104 is pushed, the push rod 1〇6 will move the wafer of the first wafer boat to the second boat 2〇, and the 2G boat can be sent to the machine for operation. The above wafer transfer device will The wafers in the first boat are all transferred to the second boat, so this batch of wafers will It is sent to the machine to carry out the work, there is no way to synchronize the processing with multiple machines, the operation speed is limited, there is no way to improve the shipping efficiency. At present, there are two simple methods for the problem H is the operation to make the pen (4) Which pencil) draws a single wafer 'but the suction pen may cause scratches on the wafer. Another method is to use an automatic picker to remove the required single wafer, but the auto-selector is expensive. These two methods can only take ij material crystals every time, and the cake speed cannot be improved. 200929421 If the first boat and the second boat are not placed in the correct position, the crystal shifting device is activated, the wafer will be secreted or damaged by the collision, and the operator's carefulness must be relied upon to solve the problem. In order to improve the above-mentioned defects, the wafer transfer apparatus provided by the present invention, 75 is directed to the prior inspection. [Inventive content] Based on solving the above-mentioned lack of the prior art, the wafer device provided by the present invention can avoid unsafe operation 'and A portion of the wafer can be selectively moved from the first wafer boat to the second wafer boat. ❹ Ο = One of the objectives of the invention is to provide a wafer transfer device that safely moves the wafer in the two crystal boats without dropping or damage. = Invented again - the objective is to provide a wafer transfer device that selectively transfers some or all of the wafer from one boat to another. Another object of the present invention is to provide a wafer transfer apparatus which is simple in construction and low in cost. In addition, it is intended to provide a wafer transfer apparatus which can accelerate wafer transfer speed to improve production efficiency. 2 The wafer transfer device is used to transfer some or all of the wafers in the first wafer boat to the fine crystals thereof and the second wafer boat has a pre-discrimination: the package 2 places the first wafer boat and the second crystal The rafting and pushing device of the boat and the plurality of detachable = ^ ^ ^ pushing slidables can be linearly moved or pivoted relative to the urging device to the rotational position; when the pushing device moves, the locating position The push rod can transfer the m^z boat to the red boat; the transfer method in the second position transfers the corresponding wafer from the first boat to the second boat. In addition, the push rods may also move between the first position and the second position relative to the pushing device, and when the push rod is from the second position axis to the first position, the rider may be purely from the first boat 6 200929421 Transfer to the second boat. The crystal _ shifting device scale may include at least - the first - anti-green, set in the itch position = one of the first boat and the second boat, the first foolproof device can be moved to the first - anti-staying position The first - anti-missing, when the boat is placed on the scale - pre-set position, = Yushan - anti-stay position 'the wafer transfer device can transfer the wafer in the first boat to the third boat, ready for crystal When the boat is not placed in the preset position on the raft, the first foolproof device is positioned so that the wafer transfer device cannot push the wafer. The first embodiment of the crystal HI transfer device of the present invention comprises a pusher device, and the device is provided with a plurality of push rods, and the push rod can be changed with respect to the push device. The rod system is set in the crucible and the end of the rod is blocked against the end of the pushing device. [Embodiment] Since the present invention discloses a wafer transferring device, the main structure and principle of the circle transfer are in the field. The drawings are a complete depiction of the structures in the context of the features of the present invention, which are described first. ", does not need to be based on the actual size. According to the present invention - a preferred embodiment, please refer to Figure 2a, = = Z = package = 202, - push device 2 ° 4 push device detachable assembly:. Push the system, ·# at least one of the push rods 206 is adjusted to the appropriate position (for example, the position of the push rod), and the pusher line can be moved by the pushing device m to move the line 7 200929421. Continuing to refer to Figure 2a, when the wafer transfer device is operated, the first boat and the second boat 20 may be placed on the 埠2〇2, and then the pusher 2〇6 is adjusted to make a certain The pushers can be adjusted to the first position 'as indicated by the push bar test and have a predetermined relative position which is set in conjunction with the wafer transfer device 2 (10). Then, the pushing device of the pushing device (10) is positioned to position at least the wafer corresponding to the push rod 2〇6a in the first wafer boat iq to the second wafer boat 2 (); The push rod 206b in the second position cannot push the wafer corresponding to the pusher anvil in the first boat 1〇. ❹ 本 本 — 健 健 健 健 健 健 健 健 健 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先 首先Pushing a plurality of turns 3〇6 on the device 3〇4, wherein the 埠3〇2 is used to carry at least one boat. In the present embodiment, the position between the '埠 302 spinning devices 304 is fixed, and the push rods 3〇6 are linearly movable between the first position (e.g., 306a) and the second position (e.g., the pass). When performing the wafer transfer device operation, the first boat 1 〇 and the second boat 2 () may be placed on the bee first, and then the push rod is directly pushed from the second position to the first position ( For example, 3〇6a), as shown in the external figure, at least one wafer corresponding to the push rod 3〇6a of the first-boat ω is transferred to the second wafer boat 2〇. 〇 In order to ensure that the pushing device 2G4 is not arbitrarily moved during the operation of the wafer transfer device, the present invention further adds at least a foolproof device between the crucible 202 of the wafer transfer device and the pushing device 2〇4. First, the first of the present invention - the anti-dwelling device, please refer to the figure and the figure. As shown in FIG. 4a, the first foolproof device 41 is disposed near the side of the bee 2〇2 of the wafer transfer device, and is composed of a press bar 412 and a resistive sheet 414. Passing through and protruding from the surface of the tan 202, the blocking piece 414 is inserted into a fixing device 416 and the end of the blocking piece 414 is against the pushing device 4〇4 or is connected to the pushing device 4 (10). Another object that is a Zhao (not shown in the figure), so the pushing device 4〇4 at this time cannot be moved. And when the external rod is pulled out to the plane with Tan 4〇2, the obstruction piece seems to be able to move according to the fixed shocking position. That is, the dust rod 412 is tested, blocking # 414 will be in #直The direction movement causes 8 200929421 to block the #414 off the end of the pushing device 4〇4, so the pushing device 4〇4 can be moved at this time, as shown in Fig. 4b. In this embodiment, the fixture 416 can be disposed at the bottom of the 埠2〇2. When the wafer transfer device is operated, the first wafer boat 1〇 and the second wafer boat 2〇 are placed on the crucible 202. At this time, the first wafer boat 10 is pressed down against the pressure of the foolproof device 410. The rod 412 causes the pressing rod 412 to be depressed and causes the blocking piece 414 to be disengaged from the abutting end of the pushing device 4〇4. Obviously, the blocking piece 414 cannot block the movement of the pushing device 4〇4 at this time, and the pushing device 4 is pushed. 〇4 is free to move as shown in Figure 4b. When the first boat 1〇 is not placed in the preset position, the foolproof device 41〇 will be grayed up to the position protruding from the surface of the 4 2〇2 according to the lever principle, and the blocking piece 414 will be reached. The movement of the pushing device 404 is stopped and blocked, so that the pushing device 404 cannot move the wafer. Next, please refer to Figures 5a and 5b, which are schematic diagrams of embodiments of the second device. The second foolproof device 420 is disposed near the other opposite side of the first foolproof device (ie, near the side of the side of the wafer transfer device), and is formed by a pressing bar and a resisting piece. 424 consists of 'the grinding rod 422 penetrates and protrudes from the surface of the crucible 4〇2, and the obstruction piece is connected with the fixing device 426 (optionally arranged on the side of the itching 2〇2) And the bumper-like end is against the pushing device 404, so the pushing device 4〇4 at this time cannot be moved as shown in Fig. 5a. When the pressing rod 422 is pressed by an external force to form a plane with the material 2, the blocking piece may be moved by the lever 416, that is, after the pressing rod 422 is pressed, the resistance is blocked; ^ 424 will be in the 〇妓The direction of movement causes the blocking piece 424 to disengage from the abutment end of the pushing device 404, so that the pushing device 404 can be moved at this time, as shown in Fig. 5b. When the wafer transfer device is operated, the first wafer boat 1〇 and the second wafer boat 2〇 are placed on the crucible 2〇2, and at this time, the second wafer boat 2〇 is pressed down against the foolproof device. The lever-like pressure = 422 is depressed and the blocking piece 414 is disengaged from the abutting end of the pushing device 4〇4. Obviously, the blocking piece 414 cannot block the movement of the pushing device 404, and the pushing device 404 It can move freely, as shown in Figure 5b. When the first boat 1〇 is not placed in a preset position, the foolproof device 410 will return to the position protruding from the surface of the 埠2〇2 according to the lever principle, and the resistance 414 will resist and block the gear. The movement of the device 4〇4 is pushed, so that the pushing device such as 4 cannot move the wafer. 9 ❹ Ο 200929421 The above-mentioned foolproof devices are respectively arranged at different positions, so that the first foolproof device and the second foolproof device can be arranged at the same time near the opposite sides of the 蟀202, at the same time as the first- The crystal boat and the second boat are the foolproof device at the time of starting operation. For example, when we select the first boat 10 as the boat for starting the foolproof device, we can choose to use the foolproof device 410 in Figure 4a, and when we use the second boat 20 as the boat for starting the foolproof device. At the time, you can choose to use the foolproof device 42〇 in Figure 5a. Obviously, it is also possible to select both the foolproof and the foolproof device 420 on the material 2 at the same time, so it must be determined that the first boat and the second boat 20 have been placed in the silent position, and then pushed The operation of the device 4 (H can move the same as the above, so it will not be described again. The anti-stay device is arranged on the itch with the structure of the boat, as shown in Fig. 6, when the sister of the boat 3 has - According to the present invention, the first foolproof device or the second foolproof device may be disposed at the contact of the bar to increase the correctness. The wafer transfer device provided by the invention has a simple structure and can be manufactured at a low cost; the push rod is designed to selectively transfer some or all of the wafers in the wafer boat to another __ to increase work efficiency; the foolproof device can be avoided A situation in which the wafer is damaged due to a misplaced position of the boat. Obviously, the present invention may have many modifications and thus need to be understood within the scope of the appended claims, in addition to the above detailed description. Outside, this It is also possible to implement the invention in a wide range of other embodiments only as an embodiment of the present invention, and not to limit the scope of the invention in the invention; BRIEF DESCRIPTION OF THE DRAWINGS The following is a schematic diagram of a conventional wafer transfer apparatus. Fig. 2a is a schematic diagram of a wafer transfer apparatus according to a preferred embodiment of the present invention. A schematic diagram of a wafer transfer apparatus according to a preferred embodiment of the present invention. FIG. 3a is a schematic diagram of a wafer transfer apparatus according to a preferred embodiment of the present invention. FIG. 3b is a schematic diagram of a wafer transfer apparatus according to a preferred embodiment of the present invention. 4A is a schematic diagram of a foolproof device of a wafer transfer device according to a preferred embodiment of the present invention. FIG. 4b is a schematic diagram of a foolproof device of a wafer transfer device according to a preferred embodiment of the present invention. A schematic diagram of a foolproof device of a wafer transfer device according to a preferred embodiment. FIG. 5b is a schematic view of a foolproof device of a wafer transfer device according to a preferred embodiment of the present invention. FIG. 6 is a view of a preferred embodiment of the present invention. . [10] The main element REFERENCE SIGNS 20 first boat boat boat 30 is a second port 202 204 100 urging means Η crossbar type wafer transfer device 102 port ram 104 pushing apparatus 200 of the wafer transfer device 106 3211200929421
206 推桿 206a 推桿 206b 推桿 300 晶圓轉移裝置 302 埠 304 推動裝置 306 推桿 402 琿 404 推動裝置 410 第一防呆裝置 412 壓桿 414 阻擋片 416 固定裝置 420 第二防呆裝置 422 壓桿 424 阻擋片206 push rod 206a push rod 206b push rod 300 wafer transfer device 302 埠 304 push device 306 push rod 402 珲 404 push device 410 first foolproof device 412 pressure bar 414 blocking piece 416 fixing device 420 second foolproof device 422 pressure Rod 424 blocking piece