CN202369121U - Automatic conveying device for mask plate - Google Patents
Automatic conveying device for mask plate Download PDFInfo
- Publication number
- CN202369121U CN202369121U CN2011205016915U CN201120501691U CN202369121U CN 202369121 U CN202369121 U CN 202369121U CN 2011205016915 U CN2011205016915 U CN 2011205016915U CN 201120501691 U CN201120501691 U CN 201120501691U CN 202369121 U CN202369121 U CN 202369121U
- Authority
- CN
- China
- Prior art keywords
- storage box
- sub
- primary storage
- handgrip
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000003860 storage Methods 0.000 claims abstract description 106
- 230000008878 coupling Effects 0.000 claims description 8
- 238000010168 coupling process Methods 0.000 claims description 8
- 238000005859 coupling reaction Methods 0.000 claims description 8
- 239000002245 particle Substances 0.000 abstract description 6
- 238000011179 visual inspection Methods 0.000 abstract description 3
- 238000007664 blowing Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 3
- 238000010926 purge Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Images
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- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
The utility model discloses an automatic conveying device for a mask plate, which comprises a box body, wherein a main storage box and a sub storage box are arranged side by side on the platform of the box body; an inspecting table is arranged between the main storage box and the sub storage box; a main storage box gripper is movably arranged above the main storage box, and is movably arranged in a main storage box gripper rail through the connecting end of the main storage box gripper; and a sub storage box gripper is movably arranged on one side of the sub storage box, and is movably arranged in a sub storage box gripper rail through the connecting end of the sub storage box gripper. Through the adoption of the automatic conveying device, the mask plate can be conveyed automatically between the main storage box and the sub storage box, as well as between the main storage box or the sub storage box and the inspecting table; and when the mask plate is placed on the inspecting table, visual inspection and blowing can be conducted on particles on the mask plate.
Description
Technical field
The utility model relates to a kind of lithographic equipment of semi-conductor integrated circuit, is specifically related to a kind of auto-conveying apparatus of mask.
Background technology
In the manufacturing process of semi-conductor integrated circuit; Because the kind of product is numerous; Employed mask also has nothing in common with each other; Therefore need ceaselessly between primary storage box (Master case) and sub-storage box (Sub case), to carry out the conveyance of mask, and need often mask to be carried out particle inspection and purging.
At present, generally adopt manual mode to realize the conveyance of mask between primary storage box and sub-storage box.The phenomenon that mask drops takes place in this conveyance mode easily in the conveyance process, perhaps cause generation of defects.
The utility model content
The utility model technical matters to be solved provides a kind of auto-conveying apparatus of mask, and it can realize the automatic conveyance of mask.
For solving the problems of the technologies described above, the technical solution of the auto-conveying apparatus of the utility model mask is:
Comprise casing, be arranged side by side primary storage box, sub-storage box on the platform of casing, be provided with inspecting stand between primary storage box and the sub-storage box; The top of primary storage box is movably set with primary storage box handgrip, and primary storage box handgrip is movably set in the primary storage box handgrip track through its coupling end; One side of sub-storage box is movably set with sub-storage box handgrip, and sub-storage box handgrip is movably set in the sub-storage box handgrip track through its coupling end.
The table top of said primary storage box is provided with a plurality of position-limited troughs, and the relative position of a plurality of position-limited troughs matches with the size of mask.
Said position-limited trough is provided with sensor.
Said primary storage box handgrip comprises four jaws, and wherein two is stationary jaw, and two other is movable jaw.
Said sub-storage box handgrip comprises two pressure pins.
The upper surface of said pressure pin is provided with vacuum cup.
The technique effect that the utility model can reach is:
The utility model takes out mask/puts into through primary storage box handgrip and sub-storage box handgrip, and utilizes inspecting stand to accept, thereby realizes the automatic conveyance between primary storage box and the sub-storage box.
The utility model not only can be realized the automatic conveyance of mask between primary storage box and sub-storage box, and can realize the automatic conveyance of mask between primary storage box or sub-storage box and inspecting stand; When mask is on inspecting stand, can also carry out particle visual inspection and particle purging to the mask plate on the inspecting stand.
Description of drawings
Below in conjunction with the accompanying drawing and the specific embodiment the utility model is done further detailed explanation:
Fig. 1 is the scheme drawing of the auto-conveying apparatus of the utility model mask;
Fig. 2 is the scheme drawing of the primary storage box of the utility model;
Fig. 3 is the scheme drawing of the primary storage box handgrip of the utility model;
Fig. 4 is the scheme drawing of the sub-storage box handgrip of the utility model.
Description of reference numerals among the figure:
1 is casing, and 2 is the primary storage box,
3 is sub-storage box, and 4 is primary storage box handgrip,
41 is primary storage box handgrip coupling end, and 42 is jaw,
5 is sub-storage box handgrip,
51 is sub-storage box handgrip coupling end, and 52 is pressure pin,
6 is primary storage box handgrip track,
7 is sub-storage box handgrip track, and 8 is inspecting stand,
10 is mask.
The specific embodiment
As shown in Figure 1, the auto-conveying apparatus of the utility model mask comprises casing 1, has been arranged side by side primary storage box 2, sub-storage box 3 on the platform of casing 1, is provided with inspecting stand 8 between primary storage box 2 and the sub-storage box 3; The top of primary storage box 2 is movably set with primary storage box handgrip 4, and primary storage box handgrip 4 is movably set in the primary storage box handgrip track 6 through coupling end 41; One side of sub-storage box 3 is movably set with sub-storage box handgrip 5, and sub-storage box handgrip 5 is movably set in the sub-storage box handgrip track 7 through coupling end 51;
As shown in Figure 2, the relative position that the table top of primary storage box 2 is provided with 21, four position-limited troughs 21 of position-limited trough matches with the size of mask 10, and mask 10 is positioned between the position-limited trough 21; Position-limited trough 21 is provided with sensor, and sensor is used to detect whether be placed with mask 10 on the primary storage box 2;
As shown in Figure 3, primary storage box handgrip 4 comprises four jaws 42, and wherein two is stationary jaw, and two other is movable jaw, makes four distances between the jaw 42 adjustable;
As shown in Figure 4, sub-storage box handgrip 5 comprises two pressure pins 52, and the upper surface of pressure pin 52 is provided with vacuum cup.
The principle of work of the utility model is:
Driving is positioned at the jaw 42 of the primary storage box handgrip 4 of primary storage box 2 tops, makes primary storage box handgrip 4 grasp the mask 10 on the primary storage box 2; Primary storage box handgrip 4 is moved along primary storage box handgrip track 6; Clamping has primary storage box handgrip 4 tops from primary storage box 2 of mask 10 to move to the top of inspecting stand 8; Primary storage box handgrip 4 is positioned over mask 10 on the inspecting stand 8, on inspecting stand 8, mask plate 10 is carried out particle visual inspection and particle purging;
Driven element storage box handgrip 5 makes sub-storage box handgrip 5 supports play the mask 10 on the inspecting stand 8; Sub-storage box handgrip 5 is moved along sub-storage box handgrip track 7; Support has the sub-storage box handgrip 5 of mask 10 to move to a side of sub-storage box 3 from the top of inspecting stand 8; Sub-storage box handgrip 5 inserts mask 10 in the sub-storage box 3, realizes the automatic conveyance of mask 10 from primary storage box 2 to sub-storage box 3;
The said process reverse operating can be realized the automatic conveyance of mask 10 from sub-storage box 3 to primary storage box 2.
Claims (6)
1. the auto-conveying apparatus of a mask is characterized in that: comprise casing, be arranged side by side primary storage box, sub-storage box on the platform of casing, be provided with inspecting stand between primary storage box and the sub-storage box; The top of primary storage box is movably set with primary storage box handgrip, and primary storage box handgrip is movably set in the primary storage box handgrip track through its coupling end; One side of sub-storage box is movably set with sub-storage box handgrip, and sub-storage box handgrip is movably set in the sub-storage box handgrip track through its coupling end.
2. the auto-conveying apparatus of mask according to claim 1, it is characterized in that: the table top of said primary storage box is provided with a plurality of position-limited troughs, and the relative position of a plurality of position-limited troughs matches with the size of mask.
3. the auto-conveying apparatus of mask according to claim 2, it is characterized in that: said position-limited trough is provided with sensor.
4. the auto-conveying apparatus of mask according to claim 1, it is characterized in that: said primary storage box handgrip comprises four jaws, and wherein two is stationary jaw, and two other is movable jaw.
5. the auto-conveying apparatus of mask according to claim 1, it is characterized in that: said sub-storage box handgrip comprises two pressure pins.
6. the auto-conveying apparatus of mask according to claim 5, it is characterized in that: the upper surface of said pressure pin is provided with vacuum cup.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205016915U CN202369121U (en) | 2011-12-06 | 2011-12-06 | Automatic conveying device for mask plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205016915U CN202369121U (en) | 2011-12-06 | 2011-12-06 | Automatic conveying device for mask plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202369121U true CN202369121U (en) | 2012-08-08 |
Family
ID=46592835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011205016915U Expired - Fee Related CN202369121U (en) | 2011-12-06 | 2011-12-06 | Automatic conveying device for mask plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202369121U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106672660A (en) * | 2017-03-09 | 2017-05-17 | 合肥京东方光电科技有限公司 | Metal pattern plate loading device and display panel preparation system |
| WO2018019226A1 (en) * | 2016-07-29 | 2018-02-01 | 上海微电子装备（集团）股份有限公司 | Levellable mask repository device |
| CN108335989A (en) * | 2018-01-29 | 2018-07-27 | 京东方科技集团股份有限公司 | Metal fragment detection device and metal mask version carrying device |
| CN110941137A (en) * | 2019-12-29 | 2020-03-31 | 无锡中微掩模电子有限公司 | Multi-layer feeding box for mask process |
| CN115477138A (en) * | 2022-09-16 | 2022-12-16 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Mask transfer device and mask transfer system |
| CN115682962A (en) * | 2022-10-13 | 2023-02-03 | 长飞光纤光缆股份有限公司 | System and method for measuring outline dimension of photomask substrate |
| CN116002277A (en) * | 2022-12-30 | 2023-04-25 | 联合微电子中心有限责任公司 | A mask plate manual removal device and manual removal method thereof |
-
2011
- 2011-12-06 CN CN2011205016915U patent/CN202369121U/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018019226A1 (en) * | 2016-07-29 | 2018-02-01 | 上海微电子装备（集团）股份有限公司 | Levellable mask repository device |
| US10976673B2 (en) | 2016-07-29 | 2021-04-13 | Shanghai Micro Electronics Equipment (Group) Co., Ltd. | Levellable mask repository device |
| CN106672660A (en) * | 2017-03-09 | 2017-05-17 | 合肥京东方光电科技有限公司 | Metal pattern plate loading device and display panel preparation system |
| CN108335989A (en) * | 2018-01-29 | 2018-07-27 | 京东方科技集团股份有限公司 | Metal fragment detection device and metal mask version carrying device |
| CN110941137A (en) * | 2019-12-29 | 2020-03-31 | 无锡中微掩模电子有限公司 | Multi-layer feeding box for mask process |
| CN115477138A (en) * | 2022-09-16 | 2022-12-16 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Mask transfer device and mask transfer system |
| CN115682962A (en) * | 2022-10-13 | 2023-02-03 | 长飞光纤光缆股份有限公司 | System and method for measuring outline dimension of photomask substrate |
| CN116002277A (en) * | 2022-12-30 | 2023-04-25 | 联合微电子中心有限责任公司 | A mask plate manual removal device and manual removal method thereof |
| CN116002277B (en) * | 2022-12-30 | 2025-07-25 | 联合微电子中心有限责任公司 | Manual mask removing device and manual mask removing method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20131230 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20131230 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Patentee after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Patentee before: Shanghai Huahong NEC Electronics Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120808 Termination date: 20151206 |
|
| EXPY | Termination of patent right or utility model |