CN202369121U - Automatic conveying device for mask plate - Google Patents

Automatic conveying device for mask plate Download PDF

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Publication number
CN202369121U
CN202369121U CN2011205016915U CN201120501691U CN202369121U CN 202369121 U CN202369121 U CN 202369121U CN 2011205016915 U CN2011205016915 U CN 2011205016915U CN 201120501691 U CN201120501691 U CN 201120501691U CN 202369121 U CN202369121 U CN 202369121U
Authority
CN
China
Prior art keywords
storage box
sub
mask
handgrip
primary storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2011205016915U
Other languages
Chinese (zh)
Inventor
徐哲峰
薛俊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Huahong Grace Semiconductor Manufacturing Corp
Original Assignee
Shanghai Huahong NEC Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Huahong NEC Electronics Co Ltd filed Critical Shanghai Huahong NEC Electronics Co Ltd
Priority to CN2011205016915U priority Critical patent/CN202369121U/en
Application granted granted Critical
Publication of CN202369121U publication Critical patent/CN202369121U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

The utility model discloses an automatic conveying device for a mask plate, which comprises a box body, wherein a main storage box and a sub storage box are arranged side by side on the platform of the box body; an inspecting table is arranged between the main storage box and the sub storage box; a main storage box gripper is movably arranged above the main storage box, and is movably arranged in a main storage box gripper rail through the connecting end of the main storage box gripper; and a sub storage box gripper is movably arranged on one side of the sub storage box, and is movably arranged in a sub storage box gripper rail through the connecting end of the sub storage box gripper. Through the adoption of the automatic conveying device, the mask plate can be conveyed automatically between the main storage box and the sub storage box, as well as between the main storage box or the sub storage box and the inspecting table; and when the mask plate is placed on the inspecting table, visual inspection and blowing can be conducted on particles on the mask plate.

Description

The auto-conveying apparatus of mask
Technical field
The utility model relates to a kind of lithographic equipment of semi-conductor integrated circuit, is specifically related to a kind of auto-conveying apparatus of mask.
Background technology
In the manufacturing process of semi-conductor integrated circuit; Because the kind of product is numerous; Employed mask also has nothing in common with each other; Therefore need ceaselessly between primary storage box (Master case) and sub-storage box (Sub case), to carry out the conveyance of mask, and need often mask to be carried out particle inspection and purging.
At present, generally adopt manual mode to realize the conveyance of mask between primary storage box and sub-storage box.The phenomenon that mask drops takes place in this conveyance mode easily in the conveyance process, perhaps cause generation of defects.
The utility model content
The utility model technical matters to be solved provides a kind of auto-conveying apparatus of mask, and it can realize the automatic conveyance of mask.
For solving the problems of the technologies described above, the technical solution of the auto-conveying apparatus of the utility model mask is:
Comprise casing, be arranged side by side primary storage box, sub-storage box on the platform of casing, be provided with inspecting stand between primary storage box and the sub-storage box; The top of primary storage box is movably set with primary storage box handgrip, and primary storage box handgrip is movably set in the primary storage box handgrip track through its coupling end; One side of sub-storage box is movably set with sub-storage box handgrip, and sub-storage box handgrip is movably set in the sub-storage box handgrip track through its coupling end.
The table top of said primary storage box is provided with a plurality of position-limited troughs, and the relative position of a plurality of position-limited troughs matches with the size of mask.
Said position-limited trough is provided with sensor.
Said primary storage box handgrip comprises four jaws, and wherein two is stationary jaw, and two other is movable jaw.
Said sub-storage box handgrip comprises two pressure pins.
The upper surface of said pressure pin is provided with vacuum cup.
The technique effect that the utility model can reach is:
The utility model takes out mask/puts into through primary storage box handgrip and sub-storage box handgrip, and utilizes inspecting stand to accept, thereby realizes the automatic conveyance between primary storage box and the sub-storage box.
The utility model not only can be realized the automatic conveyance of mask between primary storage box and sub-storage box, and can realize the automatic conveyance of mask between primary storage box or sub-storage box and inspecting stand; When mask is on inspecting stand, can also carry out particle visual inspection and particle purging to the mask plate on the inspecting stand.
Description of drawings
Below in conjunction with the accompanying drawing and the specific embodiment the utility model is done further detailed explanation:
Fig. 1 is the scheme drawing of the auto-conveying apparatus of the utility model mask;
Fig. 2 is the scheme drawing of the primary storage box of the utility model;
Fig. 3 is the scheme drawing of the primary storage box handgrip of the utility model;
Fig. 4 is the scheme drawing of the sub-storage box handgrip of the utility model.
Description of reference numerals among the figure:
1 is casing, and 2 is the primary storage box,
3 is sub-storage box, and 4 is primary storage box handgrip,
41 is primary storage box handgrip coupling end, and 42 is jaw,
5 is sub-storage box handgrip,
51 is sub-storage box handgrip coupling end, and 52 is pressure pin,
6 is primary storage box handgrip track,
7 is sub-storage box handgrip track, and 8 is inspecting stand,
10 is mask.
The specific embodiment
As shown in Figure 1, the auto-conveying apparatus of the utility model mask comprises casing 1, has been arranged side by side primary storage box 2, sub-storage box 3 on the platform of casing 1, is provided with inspecting stand 8 between primary storage box 2 and the sub-storage box 3; The top of primary storage box 2 is movably set with primary storage box handgrip 4, and primary storage box handgrip 4 is movably set in the primary storage box handgrip track 6 through coupling end 41; One side of sub-storage box 3 is movably set with sub-storage box handgrip 5, and sub-storage box handgrip 5 is movably set in the sub-storage box handgrip track 7 through coupling end 51;
As shown in Figure 2, the relative position that the table top of primary storage box 2 is provided with 21, four position-limited troughs 21 of position-limited trough matches with the size of mask 10, and mask 10 is positioned between the position-limited trough 21; Position-limited trough 21 is provided with sensor, and sensor is used to detect whether be placed with mask 10 on the primary storage box 2;
As shown in Figure 3, primary storage box handgrip 4 comprises four jaws 42, and wherein two is stationary jaw, and two other is movable jaw, makes four distances between the jaw 42 adjustable;
As shown in Figure 4, sub-storage box handgrip 5 comprises two pressure pins 52, and the upper surface of pressure pin 52 is provided with vacuum cup.
The principle of work of the utility model is:
Driving is positioned at the jaw 42 of the primary storage box handgrip 4 of primary storage box 2 tops, makes primary storage box handgrip 4 grasp the mask 10 on the primary storage box 2; Primary storage box handgrip 4 is moved along primary storage box handgrip track 6; Clamping has primary storage box handgrip 4 tops from primary storage box 2 of mask 10 to move to the top of inspecting stand 8; Primary storage box handgrip 4 is positioned over mask 10 on the inspecting stand 8, on inspecting stand 8, mask plate 10 is carried out particle visual inspection and particle purging;
Driven element storage box handgrip 5 makes sub-storage box handgrip 5 supports play the mask 10 on the inspecting stand 8; Sub-storage box handgrip 5 is moved along sub-storage box handgrip track 7; Support has the sub-storage box handgrip 5 of mask 10 to move to a side of sub-storage box 3 from the top of inspecting stand 8; Sub-storage box handgrip 5 inserts mask 10 in the sub-storage box 3, realizes the automatic conveyance of mask 10 from primary storage box 2 to sub-storage box 3;
The said process reverse operating can be realized the automatic conveyance of mask 10 from sub-storage box 3 to primary storage box 2.

Claims (6)

1. the auto-conveying apparatus of a mask is characterized in that: comprise casing, be arranged side by side primary storage box, sub-storage box on the platform of casing, be provided with inspecting stand between primary storage box and the sub-storage box; The top of primary storage box is movably set with primary storage box handgrip, and primary storage box handgrip is movably set in the primary storage box handgrip track through its coupling end; One side of sub-storage box is movably set with sub-storage box handgrip, and sub-storage box handgrip is movably set in the sub-storage box handgrip track through its coupling end.
2. the auto-conveying apparatus of mask according to claim 1, it is characterized in that: the table top of said primary storage box is provided with a plurality of position-limited troughs, and the relative position of a plurality of position-limited troughs matches with the size of mask.
3. the auto-conveying apparatus of mask according to claim 2, it is characterized in that: said position-limited trough is provided with sensor.
4. the auto-conveying apparatus of mask according to claim 1, it is characterized in that: said primary storage box handgrip comprises four jaws, and wherein two is stationary jaw, and two other is movable jaw.
5. the auto-conveying apparatus of mask according to claim 1, it is characterized in that: said sub-storage box handgrip comprises two pressure pins.
6. the auto-conveying apparatus of mask according to claim 5, it is characterized in that: the upper surface of said pressure pin is provided with vacuum cup.
CN2011205016915U 2011-12-06 2011-12-06 Automatic conveying device for mask plate Expired - Fee Related CN202369121U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011205016915U CN202369121U (en) 2011-12-06 2011-12-06 Automatic conveying device for mask plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011205016915U CN202369121U (en) 2011-12-06 2011-12-06 Automatic conveying device for mask plate

Publications (1)

Publication Number Publication Date
CN202369121U true CN202369121U (en) 2012-08-08

Family

ID=46592835

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011205016915U Expired - Fee Related CN202369121U (en) 2011-12-06 2011-12-06 Automatic conveying device for mask plate

Country Status (1)

Country Link
CN (1) CN202369121U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106672660A (en) * 2017-03-09 2017-05-17 合肥京东方光电科技有限公司 Metal pattern plate loading device and display panel preparation system
WO2018019226A1 (en) * 2016-07-29 2018-02-01 上海微电子装备(集团)股份有限公司 Levellable mask repository device
CN108335989A (en) * 2018-01-29 2018-07-27 京东方科技集团股份有限公司 Metal fragment detection device and metal mask version carrying device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018019226A1 (en) * 2016-07-29 2018-02-01 上海微电子装备(集团)股份有限公司 Levellable mask repository device
US10976673B2 (en) 2016-07-29 2021-04-13 Shanghai Micro Electronics Equipment (Group) Co., Ltd. Levellable mask repository device
CN106672660A (en) * 2017-03-09 2017-05-17 合肥京东方光电科技有限公司 Metal pattern plate loading device and display panel preparation system
CN108335989A (en) * 2018-01-29 2018-07-27 京东方科技集团股份有限公司 Metal fragment detection device and metal mask version carrying device

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
COR Change of bibliographic data

Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI

ASS Succession or assignment of patent right

Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING

Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI

Effective date: 20131230

C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20131230

Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399

Patentee after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation

Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge

Patentee before: Shanghai Huahong NEC Electronics Co., Ltd.

EXPY Termination of patent right or utility model
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20120808

Termination date: 20151206