200921186 九、發明說明 【發明所屬之技術領域】 本發明關於FPD (扁平面板顯示器）製造之玻璃基板 的熱處理、半導體製造過程之進行各種熱處理之際所使用 的溫度測量技術，更詳細而言’關於用來在爐內測量這些 玻璃基板等的被溫度測量體之溫度的溫度測量器用之耐熱 保護箱、溫度測量裝置及溫度測量方法。 【先前技術】 作爲這種被溫度測量體的溫度測量構造，以往以來’ 例如爲了預先調查矽晶圓等的被溫度測量體之加熱溫度分 佈，在調查用的矽晶圓表面之複數個部位設置有底的安裝 孔，在使熱電偶線前端或測溫阻抗體元件之感溫部位於此 安裝孔內的狀態下，以陶瓷膠著劑等的接著構件予以固 定，爲了線間之絕緣，使陶瓷製的絕緣材外包於熱電偶線 之溫度測量構造被提案並採用（參照例如專利文獻1至 4 )。 在例如FPD製造過程中之玻璃基板的熱處理，進行 預定條件之溫度設定後的險道式爐內’以輸送帶等的搬送 手段一邊搬送玻璃基板，一邊進行加熱處理，但，在這種 隧道式爐內進行調查用玻璃基板的溫度測定之情況時，具 有下述方法’即，爲了 一邊搬送一邊進行被温度測量體之 加熱溫度分佈，如上述般，將熱電偶、測溫阻抗體等連接 於被溫度測量體表面的複數個部位之配線，由隧道式爐出 -4- 200921186 入口拉引到外部，再連接至另外設置於爐外之溫度測量器 的方法。 若根據這種方法的話，連接至爐外的溫度測量器’可 遠距離地進行溫度測量，但’在將熱電偶、測溫阻抗體等 與被溫度測量體一同搬送於隧道式爐內之際，會產生有配 線之拖拉，又加上配線束之重量，伴隨著搬送，造成熱電 偶的線前端或測溫阻抗體元件的感溫部由被溫度測量體的 安裝孔浮起，產生了測量誤差，或者，完全被剝離之虞產 生。作爲對這種浮起、剝離等之解決對策，被提案有藉由 支承構件將複數條熱電偶予以束起，再固定於相同的被溫 度測量體上之方法（參照例如專利文獻5)，但，當熱電 偶等的條數增加時，則亦會有僅以支承構件無法承受之情 況產生，造成玻璃基板破裂之虞。又，在這種拉引出配線 之方法’由熱電偶至溫度測量器爲止之配線部分變長，亦 會成爲測量誤差之原因。 因此’被提案有，將無法承受高溫的溫度測量器收納 於耐熱保護箱’與被溫度測量體一同搬送於爐內的方法， 更具體而言’設置將由送信機、一次電池等的電池電源所 構成之溫度測量器插入至真空容器內，將此予以圍繞的方 式加以配設’用以防止真空容器內的溫度上升之耐熱保護 箱，與此耐熱保護箱與被溫度測量體一同搬送於爐內之方 法（參照例如專利文獻6 )。若根據此方法的話，配線的 拉出/拖拉會消失，解決了上述問題。 但’在近年的F P D玻璃基板的處理隧道式爐等，需 200921186 要大約可承受600 °C左右的高溫之耐熱保護箱，但，在上 述的耐熱保護箱，大約3 5 0 °C爲其界線，無法使用於FPD 製造。又，特別是在FPD的隧道式爐，用來對內部溫度 進行精密控制之爐的出入口被極力地設定成爲狹窄，在具 有上述這種真空容器、蓄熱材等之結構，高度也變高，造 成大型化，因此存在有無法加以利用的問題。又，爲了與 玻璃基板一同搬送’故，需要儘可能地將耐熱保護箱予以 小型化、輕量化。雖亦有將水槽置入於箱內之方法，但液 體不易處理。 [專利文獻1]日本實開平6-69785號公報 [專利文獻2]日本特開平1 0-9963號公報 [專利文獻3]日本特開2000-58406號公報 [專利文獻4 ]日本特開2 0 0 1 - 2 8 9 7 1 5號公報 [專利文獻5 ]日本特開2 0 0 0 - 8 1 3 5 3號公報 [專利文獻6]日本特開2002-304689號公報 【發明內容】 [發明所欲解決之課題] 因此，本發明是爲了解決上述情事而開發完成的發 明，其目的在於提供，即使長時間暴露於超過600 °C之高 溫下，也能將內部溫度維持於1 00 °C左右的低溫，能夠確 實地保護已收納的溫度測量器，並且即使在高度受限的玻 璃基板等之隧道式爐，也能夠毫無問題地加以使用，並薄 型緊緻且輕量，容易處理之耐熱保護箱、及使用該保護箱 -6- 200921186 之溫度測量裝置、以及溫度測量方法。 [用以解決課題之手段] 本發明爲了解決前述課題，提供一種溫度測量器的耐 熱保護箱，其係由：使用石膏材來成形，在內部具備收納 溫度測量器用的收納部之內側容器；使用隔熱材來成形’ 在內部供前述內側容器嵌入之外側容器；及連接於前述溫 度測量器的熱電偶或測溫阻抗體的拉出部所構成。 在此，前述隔熱材是由氣相式二氧化矽所構成爲佳。 又，在前述內側容器及外側容器的各側壁’形成有相 互連通的貫通溝槽，作爲前述拉出部爲佳。 特別理想爲，在前述外側容器的側壁，設有寬度廣的 嵌合溝槽，並且設有嵌入該嵌合溝槽的分割件，在該分割 件的下面形成前述貫通溝槽。 且，藉由具備前述收納部的上端開放之容器本體、及 封閉該容器本體的上端開口部之蓋體構成前述內側容器， 在該容器本體的上端開口部的周圍，圍繞設置有與該蓋體 卡合的凹凸卡合部爲佳。 又，藉由具備供前述內側容器嵌入的嵌合空間之上端 開放的容器本體、及封閉該容器本體的上端開口部之蓋體 構成前述外側容器，在該容器本體的上端開口部的周圍， 圍繞設置有與該蓋體卡合的凹凸卡合部爲佳。 又，本發明亦提供一種溫度測量裝置，其係在上述本 發明之溫度測量器的耐熱保護箱，收納溫度測量器，並且 200921186 將連接於被溫度測定體的預定部位之單個或複數個熱電偶 或測溫阻抗體透過前述拉出部來連接到前述溫度測量器。 在此，將由耐熱纖維所構成的耐熱蓋予以上下分割而 構成，並且在一方或雙方的分割蓋形成用來拉出熱電偶或 測溫阻抗體的缺口部，將收納前述溫度測量器的耐熱保護 箱收納至前述耐熱蓋內爲佳。 又，本發明亦提供一種溫度測量方法，是藉由申請專 利範圍第7項之溫度測量裝置，測量在加熱爐內搬送中的 被溫度測定體的溫度之溫度測量方法，其特徵爲：將由前 述耐熱保護箱透過前述拉出部延伸出來的前述溫度測量器 的單個或複數個熱電偶或測溫阻抗器連接至前述被溫度測 定體的預定部位，將該耐熱保護箱與前述被溫度測定體一 同搬送於加熱爐內。 在此，將前述被溫度測定體的溫度測定區域分成爲2 個以上的複數個區域，藉由在一區域的預定部位連接單個 或複數個熱電偶或測溫阻抗體，且在其他區域載置前述耐 熱保護箱的狀態下，將該被溫度測量體搬送於加熱爐內， 來進行一區域的溫度測量，針對其他區域也依次同樣地進 行溫度測量，用以進行所有區域的溫度測量爲佳。 [發明效果] 若根據以上本發明之溫度測量器的耐熱保護箱的話， 藉由外側容器，即使在某種程度的高溫下，也能抑制內側 容器的溫度上升，並且即使內側容器的溫度上升，也由於 -8 - 200921186 該內側容器係由石膏材所構成’故，藉由內部所 水之熱分解能’能夠抑制溫度上升，容器內部可 持於結晶水的蒸發溫度之1 00°C左右，能夠確實 被收納於內部之溫度測量器。又’不需要另外 材、水槽等，容器本身具有抑制昇溫（穩定水 能，因此，能夠提供可將收納部等的尺寸抑制到 限度，薄型、輕量、緊緻且容易處理之耐熱保護 又，在外側容器的隔熱材爲由氣相式二氧化 者，能夠將外側容器本身構成爲，具有限制空氣 動之細微的微孔構造之隔熱構造，即使在600 °C 溫下，也能有效地遮斷對內部之傳熱，使耐熱性 又，由於藉由具備前述收納部的上端開放 體、及封閉該容器本體的上端開口部之蓋體構成 容器’在該容器本體的上端開口部的周圍，圍繞 該蓋體卡合的凹凸卡合部；及藉由具備供前述內 入的嵌合空間之上端開放的容器本體、及封閉該 的上端開口部之蓋體構成前述外側容器，在該容 上端開口部的周圍，圍繞設置有與該蓋體卡合的 部’故，能夠做成爲藉由這些凹凸卡合部，能夠 體與蓋體之間隙，確實地遮斷對內部之傳熱，並 高度之薄型主體。 又’因在外熱容器的外面’形成有飛散防 層’所以，可防止構成外側容器的隔熱材對爐內 污染，能夠迴避對製造品質所造成之壞影響。 含的結晶 長時間維 地保護已 設置蓄熱 準）之功 所需最小 箱。 矽所構成 分子的運 以上的高 提升。 之容器本 前述內側 設置有與 側容器嵌 容器本體 器本體的 凹凸卡合 由容器本 且抑制了 止用被覆 的飛散、 -9- 200921186 又，將被溫度測量體的溫度測量區域分成2個以上的 複數個區域，於一個區域的預定部位連接單個或複數個熱 電偶或測溫阻抗體，且在其他的區域，載置有前述耐熱保 護箱的狀態下，藉由將該被溫度測量體搬送於加熱爐內， 進行一個區域的溫度測量，針對其他區域，亦依次地同樣 進行溫度測量，利用進行所有的區域之溫度測量，不需要 另外設置用來搬送耐熱保護箱的基台，可將載置於被溫度 測量體上有效地進行溫度測量。 【實施方式】 其次，根據圖面，說明關於本發明的實施形態。 圖1是顯示本發明之耐熱保護箱及溫度測量裝置的分 解立體圖，圖1至4是顯示第1實施形態，圖5、圖6是 顯示第2實施形態，圖中，符號S爲溫度測量裝置，1爲 耐熱保護容器（箱）’ 2爲內側容器’ 3爲外側容器，4 爲拉出部，5爲溫度測量器，6爲熱電偶。 本發明之溫度測量器的耐熱保護箱1是如圖1及圖2 所示，由：使用石膏材來成形’在內部具備收納溫度測量 器5用的收納部2 G之內側容器2 ;使用隔熱材來成形’ 在內部供前述內側容器2嵌入之外側容器3 ;及連接於前 述溫度測量器5的熱電偶6或測溫阻抗體的拉出部4所構 成。內側容器2是以石膏所含有的水分之氣化熱’來抑 制：藉由構成外側容器3的隔熱材所無法完全抑制之熱造 成內部的收納部20之100°C以上的溫度上升。 -10- 200921186 又，本發明之溫度測量裝置S係將溫度測量器5收納 於前述耐熱保護箱1 ’並且連接於被溫度測量體的預定部 位之單個或複數個熱電偶6或溫度阻抗體’透過前述拉出 部4連接於內部的前述溫度測量器5 ’在本實施例’將在 溫度測量器5預先連接有熱電偶6的測量體’構成透過拉 出部4可將溫度測量器5收納於收納部2 0，但本發明不 限於此形態。 再者，在以下的實施形態，以在FPD製造的隧道式 爐內之調查用玻璃基板的溫度測量爲例進行說明’但作爲 本發明之被溫度測量體’不限於這種的玻璃基板’在半導 體製造裝置之調查用的矽晶圓等之其他者皆可’除了一邊 搬送於爐內一邊調查被溫度測量體的加熱溫度分佈者外’ 在載置於真空室內的狀態下進行加熱者、與製品一同地將 調查用被溫度測量體置入到爐內之情況，亦可同樣地加以 利用。又，在本實施例，作爲收納於耐熱保護箱內的溫度 測量器5，使用以記憶熱電偶所收集的溫度測量資料’然 後連接至電腦並輸出資料之資料記錄器（例如日本Gram (股）製的耐熱溫度記錄器T系列「LT-3L/LT-3H等」） 之情況爲例進行說明，但亦可爲其他方式的溫度測量器’ 例如亦可爲對設置於爐外的接收器’無線傳送資料之傳送 器，在此情況，在耐熱保護箱形成有使天線延伸的延伸溝 槽爲佳。 首先，根據圖1至圖4’說明關於本發明的第1實施 形態。 -11 - 200921186 內側容器2爲以石膏材所成形的盒，由具備有收納部 20的上端開放之容器本體21;及用來封住該容器本體21 的上端開口部21 a之蓋體22所構成，於該容器本體2 1的 上端開口部21a之周圍，圍繞設置有與該蓋體22所卡合 的凹凸卡合部2a。凹凸卡合部2a，更詳細而言，在容器 本體21的側壁23上端面，朝外側形成有階差狀凹槽 24，並且，沿著蓋體22的內面外周部，突設有與前述凹 槽24嵌合的突條25，藉由此凹凸卡合部2a，可有效地防 止熱氣由容器本體21與蓋體22之間隙所侵入。此凹凸卡 合部2 a不限於本實施例這種以凹槽2 4與突條2 5所構成 者，能夠採用各種構造。又，這樣的凹凸卡合部2 a，如 本實施例般形成於全周爲佳，但，亦可僅構成於一部分。 又，對構成凹凸卡合部2a的凹槽24或突條25進行導角 加工，預先防止安裝時的損害之構造亦佳。 內側容器2的容器本體21及蓋體22分別使用石膏材 所成形。對此石膏材，混合纖維等的補強材或其他成份加 以成形爲佳。本發明的內側容器2，由於以這種的石膏材 所構成，故，在曝露於100 °c以上的高溫之際，藉由含於 內部之2 0重量％以上的結晶水之熱分解能，來抑制溫度 上升，可將收納部20維持於結晶水的蒸發溫度之1 〇〇°C 左右，能夠確實地保護已收納的溫度測量器5。 外側容器3爲以隔熱材所構成之隔熱盒，直接承受來 自於加熱爐的熱，遮斷熱朝內側容器2之移動。具體而 言，與上述內側容器2的構造同樣地，由具備供內側容器 -12- 200921186 2嵌入的嵌合空間3 0之上端開放的容器本體3 1、及用來 封住該容器本體3 1的上端開口部3 1 a之蓋體32所構成， 於該容器本體31的上端開口部31a之周圍，圍繞設置有 與該蓋體32卡合的凹凸卡合部3a。再者，外側容器3, 除了本實施例這種以容器本體31與蓋體32所構成者外， 例如亦可爲構成朝側方開口之筒狀，由該開口部拉出內側 容器的構造。在此情況，能夠採用例如於內側容器的前後 面，預先黏貼以與外側容器相同的隔熱材所構成之面板， 插裝至前後開口之筒狀的外側容器等各種構造。又，嵌合 空間3 0在本實施例，設定成爲可幾乎無間隙地供內側容 器2嵌入的空間尺寸，但亦可設定成爲維持有稍許間隙。 凹凸卡合部3 a，更詳細而言，於容器本體3 1的側壁 3 3上端面，朝外側形成有階差狀的凹槽3 4，並且沿著蓋 體32的內面外周部，圖設有與前述凹槽34嵌合的突條 35所構成’藉由凹凸卡合部3a，可有效地防止熱氣由容 器本體31與蓋體32之間隙侵入。此凹凸卡合部3a是與 內側容器2的情況同樣地，不限於凹槽3 4與突條3 5所構 成者，能夠採用各種構造。又，這種的凹凸卡合部3a， 是如本實施例般形成於全周爲佳，但亦可僅形成於一部 分。又’對構成凹凸卡合部3a的凹槽34或突條35進行 導角加工’預先防止安裝時的損壞等產生之構造爲佳。在 本實施例’在凹槽34的挖取角部形成導角部34b，防止 與突條35接觸時產生破損。 外側容器3的容器本體3 1與蓋體3 2分別使用隔熱材 -13- 200921186 來成形的，爲此隔熱材，理想爲由氣相式二 者，更詳細而言，藉由對氣相式二氧化矽的 〜30nm左右的球狀微粒子予以壓縮成形， 器3本身形成爲限制空氣分子運懂之細微的 熱構造，即使在6 0 0°C以上的高溫下，也能 傳熱，並且若作成爲這種氣相式二氧化矽 話，能夠吸收從以石膏材所成形的內側容器 氣’並且將其放出至外部，能夠將內側容器 維持於1氣壓，可確實地防止溫度上升。 具體而言，100 °c以上之物質的傳熱： 熱’故，除氣相式二氧化矽以外，混合作爲 透過的物質之高純度氧化锆等的紅外線吸收 者爲佳，例如使用 Proextherm Daammstoffe 的「Proextherm WDS (註冊商標）」加以成 對這種由氣相式二氧化矽所構成之隔熱材， 材料’又作爲隔熱材，除了氣相式二氧化矽 例如矽酸鈣、陶瓷纖維等的習知隔熱材所成 在構成外側容器3的容器本體31及蓋體32 形成作爲飛散防止用被覆層之陶瓷和紙之被 其外側進行了熱處理的不銹鋼盒進行保言: 不）。在本實施例，如後述，藉由收納於二 來防止飛散產生。 在內側容器2及外側容器3的各側壁 有相互連通的貫通槽41 '42作爲熱電偶6 氧化砂所構成 微粒子例如5 能夠將外側容 微孔構造之隔 遮斷對內部之 之微孔構造的 2所釋出之蒸 2內部的壓力 £要爲放射傳 不會使紅外線 材並加以成形 Gmbh公司製 形者。當然， 能夠使用其他 以外，以能以 形者。再者， 之外面全體， 覆膜，或以將 I爲佳（未圖 氧化砍蓋內， 23 、 33 ，形成 之拉出部4， -14- 200921186 在外側容器3，連通於貫通槽42之貫通槽43亦形成於蓋 體3 2。更具體而言’穿設有朝內側容器2的側壁2 3之上 端面開放並貫通於內外方向之貫通槽41 ’在外側容器3 的側壁3 3也同樣地，穿設有朝上端面開放並貫通於內外 方向之貫通槽42，在本實施例，由於貫通槽42的深度關 係，而朝凹槽34的上部開放，故，進一步在蓋體32的突 條3 5，亦穿設有朝旗下端面開放並貫通於內外方向之貫 通槽43。在本實施例，僅形成一條拉出部4，但，形成複 數條亦佳。在圖1的例子，收納有3個溫度測量器5 ’連 接有3條的熱電偶，但，將熱電偶6的途中部總括成爲1 條後插裝至拉出部4。但，當然亦可不總括成爲1條’而 將3條並排於縱方向後插裝至拉出部4內，或形成3條拉 出部4，將3條熱電偶一條條地插裝至拉出部。 在本實施例，作爲拉出部4，穿設朝上端面或下端面 開放的貫通槽4 1〜43所構成者，但特別是貫通槽42、43 分別以深的溝槽所構成，於穿通有熱電偶6的狀態下所開 放之上端面側、下端面側分別會產生剩餘空間。因此，爲 了欲使密接性更好、提高隔熱性，如圖3所示，在切削了 側壁33之缺口部36的底部，形成淺的貫通槽42，並且 在蓋體32內面之與前述缺口部36對應的位置，設置與該 缺口部36嵌合之突起部37，在該突起部37的前端面， 形成相同淺的貫通槽43，藉由該突起部37與缺口部36， 不會有剩餘空間地夾持內裝於貫通槽42、43之熱電偶6 t，同樣地，在將突條3 5切削之缺口部3 8的底 -15- 200921186 部，延伸設置有從前述突起部37延伸的淺貫通槽43，並 且在容器本體31的凹槽34上面之與前述缺口部38對應 的位置，設置與該缺口部38嵌合的突起部39，在該突起 部39的上端面，延伸設置有由前述缺口部36底面延伸的 淺貫通槽42，藉由該突起部39與缺口部38，不會有剩餘 空間地夾持內裝於貫通槽42、43之熱電偶6爲佳。再 者，在本實施例，藉由突起部3 7與缺口部3 6的組合、及 突起部3 9與缺口部3 8的組合，分別夾持熱電偶6，但， 作爲僅由其中任一方的組合所構成之構造，另一方亦可形 成如圖1所示的深貫通槽。又’作爲其他例，雖需要使熱 電偶6屈曲，但如圖4所示，沿著容器本體31之具備凹 槽3 4的側壁3 3之外面形狀’形成淺開放槽60，不會有 剩餘空間地裝設熱電偶6，以與蓋體3 2之間加以夾持亦 佳。 又，在本實施例，作爲拉出部4，穿設朝上端面或下 端面開放的貫通槽41〜43所構成者，但，亦能以作爲不 開放的孔來構成。其他，除了穿設於側壁2 3、3 3者以 外，亦可爲在蓋體22、32連續設置貫通孔者。且，在本 實施例，僅在一方向設置拉出部4，但’亦可分別設置在 複數方向的側壁2 3、3 3 ’能夠將熱電偶6朝複數方向拉 出。且，亦可採用下述構造’即，內側容器2的貫通槽與 外側容器3的貫通槽不會相互連通的構造，例如，由內側 容器2的蓋體22拉出’且由外側容器3的側壁33拉出 者。 -16- 200921186 在本實施例，將內側容器2及外側容器3構成在平面 視角呈方形，但，亦可構成爲多角形、橢圓形、圓形、異 形等之其他形狀。又，特別是外側容器，亦可構成爲例如 半球形狀、圓錐梯形、角錐梯形等。 其次，根據圖5、6，說明關於本發明的第2實施形 幾巨 〇 在本實施形態，如圖5所示，內側容器2同樣地由具 有凹凸卡合部2a的容器本體2 1與蓋體22所構成，在側 壁23形成有作爲拉出部4之貫通槽41，但，在蓋體22 的內面之與前述貫通槽41對應的位置，突設有與該貫通 槽41嵌合之突起部26，藉此，利用前述突起部26與貫 通槽4 1能夠不會有剩餘空間地夾持通過貫通槽4 1之熱電 偶6，可使密接性提昇，能夠更有效地防止熱氣進入。 又，外側容器3是與第1實施形態同樣地，由具有凹 凸卡合部3a的容器本體31與蓋體32所構成，在本實施 例，形成爲剖面視角大致呈梯形狀，使得構成凹凸卡合部 3 a的凹槽3 4與突條3 5相互連接成錐狀。此錐狀作成較 上述第1實施形態作過說明的導角部3 4 b更大，呈錐狀地 構成傾斜面，如此藉由兩者呈錐狀抵接並卡合，使得當開 關容器時，相互接觸的該凹凸卡合部3a不易破損。 且在本實施例’設置使凹槽34連通至內部的嵌合空 間3 0側之寬度廣的嵌合槽6 1來代替在外側容器3的側壁 33設置貫通槽42’並且’設置嵌入至該嵌合槽61的分割 塊62，在該分割塊62形成有用來使熱電偶6通過的貫通 -17- 200921186 槽63。貫通槽63示朝分割塊62的下面62a開放並設 置，藉由將分割塊62嵌入至嵌合槽61，可作爲一邊使熱 電偶6通過貫通槽63內一邊保持密接性之壁部來發揮功 能。在此’前述分割塊62與嵌合槽61是構成爲上方抵接 成寬度廣的錐狀’但亦可爲其他形狀。如本實施例，藉由 使用分割塊62來構成熱電偶6的拉出部4，亦如圖6的 斷面圖所示，能將內側容器2裝設至外側容器3的嵌合空 間30內，通過寬度廣的嵌合槽61拉出熱電偶6並與以自 由地配線後，由上方安裝分割塊62，一邊將熱電偶6收 納至貫通槽6 3內一邊加以簡單地封鎖，能夠預先防範因 對玻璃基板等進行熱電偶的配線時之熱電偶的移動造成拉 出部4的角部破損等的問題。再者，亦可例如在分割塊 62設置複數條貫通槽63。 其次，根據圖7〜9，說明關於藉由本發明之溫度測 量裝置S，測量在加熱爐內搬送中的被溫度測量體之溫度 的溫度測量方法。 本例的溫度測量是將由耐熱保護箱1透過拉出部4所 延伸出來的複數個熱電偶6分別連接至作爲被溫度測量體 之玻璃基板7的預定複數個部位’耐熱保護箱1與玻璃基 板7 —同搬送於加熱爐內。受到加熱爐所加熱的玻璃基板 7之複數個部位的溫度是藉由熱電偶6記錄至作爲溫度測 量器5的資料記錄器，進行測量後’將從爐內取出的該資 料記錄器連接至另外的電腦’讀取所記錄之資料’以該電 腦進行解析。 -18- 200921186 熱電偶6等對玻璃基板7之連接，是能夠採用以往以 來在矽晶圓等亦被廣泛採用的構造，在本實施例，在複數 部位設置有底的安裝孔7 〇，以陶瓷黏合劑等的黏合構件 予以固定’但不限於這種方法。當然，除了熱電偶線外， 亦能以測溫阻抗體進行測量。又，熱電偶本身未有任何限 定，可採用例如使前端的溫接點露出於護套外之露出型、 連接於護套前端之接觸型等其他各種構造者。 在本實施形態，如圖7所示，採用下述方法，即，將 作爲被溫度測量體之玻璃基板7的溫度測量區域分成2個 區域71、72，首先將熱電偶6分別連接於一個區域71之 預定部位（安裝孔70 )，並且在另一方區域載置收納有 連接著前述熱電偶6的溫度測量器5 (資料記錄器）之耐 熱保護箱，在此狀態下，將該玻璃基板7搬送於加熱爐 內，進行一方的區域7 1之溫度測量後，接著同樣地，將 熱電偶6連接至區域72，並且將耐熱保護箱載置到區域 71，進行溫度測量，藉此，使雙方的區域71、72之溫度 測量結束的方法。再者，在本實施例，分成爲2個區域， 但，亦可分成3個以上的區域，依次地同樣地進行溫度測 量，用以進行所有區域之溫度測量。 又，本發明之耐熱保護箱1亦可直接設置，但，理想 爲如圖9所示，收納並設置於由二氧化矽纖維等的耐熱纖 維所構成之耐熱蓋8內，用以未然防止構成耐熱保護箱1 之特別是由隔熱材所構成的外側容器的細微碎片等的不純 物飛散。在本實施例，是以分割呈上下之分割蓋8 1、8 2 -19- 200921186 (下側的分割蓋82具有拉出熱電偶的缺口部）所構成， 但亦可爲其他形態之蓋。 又，本發明除了這樣將耐熱保護箱載置於玻璃基板上 進行測量之方法以外’亦可如圖8(a) 、（ b )所示，將 耐熱保護箱搬送至玻璃基板7旁進行測量。圖8 ( a )是 夾持玻璃基板7的方式在搬送方向的前後兩鄰分別配置耐 熱保護箱1、1地加以搬送，使其擔當進行大致各一半區 域的測量之例子，圖8 ( b )是僅在玻璃基板7的前後單 側旁配置耐熱保護箱1地進行搬送，使其擔當進行所有區 域的測量。 以上說明了關於本發明的實施形態，但本發明不限於 這些實施形態，在不超出本發明的技術思想範圍內可進行 各種變更實施。 [實施例] 其次，說明關於針對本發明的實施例之耐熱保護箱@ 耐熱特性（收納部的溫度特性）進行實驗的結果° 實驗中所使用的耐熱保護箱（實施例）是具有胃®1 1、2所示的第1實施形態相同構造，外側容器3設定爲 高度80mm、長200mm、寬300mm。又，在內側谷器2的 收納部20內配置溫度計，在大氣鎳鉻爐（爐內尺寸400x 400x 1 000mm、灼熱範圍 3 00x3 90x 800mm)加熱至 600 °C 爲止，保持1 0分鐘後，予以空冷，此循環反復進行1 〇 次。將該10次的各循環之收納部20的最高溫度顯示於下 -20- 200921186 述表1。 丄J 循環 收納部的最高溫度（°C ) 第 1 次 100 第 2 次 103 ...... 第 3 次 94 第 4 次 95 第 5 次 97 第 6 次 100 第 7 次 118 第 8 次 115 ―― 第 9 次 129 第 10 次 13 0 由上述實驗結果得知’若將收納於收納部的溫度測量 器（亦包含蓄電池等）的耐熱溫度作成爲大約100的 話，本發明的耐熱保護容器即使在上升至600°c左右之情 況’亦能夠使用到第6次。無法抑制在第7次以後溫度上 升的理由，考量爲應是構成內側容器的石膏材所含有的結 晶水已經出盡之故。因此’在實際使用時，藉由在第6次 更換內側容器2，使得即使在第7次後亦可反復使用。 又，在另外進行的600 °C連續加熱實驗’箱內溫度可3小 時保持於l〇〇°C。 【圖式簡單說明】 圖1是顯示本發明的第1實施形態之耐熱保護箱及溫 度測量裝置的分解斜視圖。 -21 - 200921186 圖2是其縱斷面圖。 圖3是顯示拉出部的變形例之局部縱斷面圖。 圖4是顯示拉出部的其他變形例之局部縱斷面圖。 圖5是顯示本發明的第2實施形態之耐熱保護箱及溫 度測量裝置的分解斜視圖。 圖6(a) 、 （b)是其縱斷面圖。 圖7(a) 、 ( b )是顯示藉由溫度測量裝置測量被溫 度測量體的溫度之溫度測量方法的說明圖。 圖8(a) 、（ b )是顯示同爲溫度測量方法的變形例 之說明圖。 圖9是顯示將耐熱保護箱收納於耐熱蓋內的溫度測量 裝置之斜視圖。 【主要元件符號說明】 S :溫度測量裝置 1 :耐熱保護箱 2 :內側容器 2a :凹凸卡合部 3 ·’外側容器 4 :拉出部 5 :溫度測量器 6 :熱電偶 7 :玻璃基板 8 :耐熱蓋 -22- 200921186 2 0 :收納部 21 :容器本體 2 1 a :開口部 22 :蓋體 2 3 :側壁 24 :凹槽 2 5 :突條 2 6 :突起部 3 0 :嵌合空間 31 :容器本體 3 1 a :開口部 36 :蓋體 3 7 :側壁 3 8 :凹槽 34b :導角部 3 9 :突條 40 :缺口部 41 :突起部 42 :缺口部 43 :突起部 41、42、43 :貫通槽 6 0 :開放槽 61 :嵌合槽 62a :下面 -23- 200921186 63 ： 70 ： 71、 81 、 貫通槽 安裝孔 72 :區域 82 :分割蓋 -24-200921186 IX. Description of the Invention [Technical Fields of the Invention] The present invention relates to a temperature measurement technique used for heat treatment of a glass substrate manufactured by an FPD (flat panel display) and various heat treatments in a semiconductor manufacturing process, and more specifically A heat-resistant protective case, a temperature measuring device, and a temperature measuring method for a temperature measuring device for measuring the temperature of a temperature measuring body such as a glass substrate in a furnace. [Prior Art] As a temperature measurement structure of such a temperature measuring body, for example, in order to investigate in advance the heating temperature distribution of a temperature measuring body such as a silicon wafer, a plurality of portions of the surface of the germanium wafer for investigation are provided. The bottomed mounting hole is fixed by a bonding member such as a ceramic adhesive in a state where the temperature of the thermocouple wire front or the temperature sensing portion of the temperature measuring resistor element is in the mounting hole, and the ceramic is insulated for the line. A temperature measuring structure in which the insulating material is overlaid on the thermocouple wire is proposed and used (see, for example, Patent Documents 1 to 4). For example, in the heat treatment of the glass substrate in the FPD manufacturing process, the heat treatment is performed while the glass substrate is conveyed by a conveyance means such as a conveyor belt after the temperature setting of the predetermined condition is performed. In the case where the temperature of the glass substrate for the investigation is measured in the furnace, the method described below is to connect the thermocouple, the temperature measuring resistor, and the like to the heating temperature distribution of the temperature measuring body while being conveyed. The wiring of the plurality of parts on the surface of the temperature measuring body is drawn to the outside by the tunnel type furnace exit 04 200921186, and then connected to a temperature measuring device additionally provided outside the furnace. According to this method, the temperature measuring device connected to the outside of the furnace can perform temperature measurement at a long distance, but 'when the thermocouple, the temperature measuring resistor, and the like are carried together with the temperature measuring body in the tunnel furnace There will be a drag of the wiring, and the weight of the wiring harness, accompanied by the transfer, causing the temperature front of the front end of the thermocouple or the temperature sensing part of the temperature measuring body element to float from the mounting hole of the temperature measuring body, resulting in measurement The error, or, is completely caused by the detachment. As a solution to such lifting, peeling, and the like, a method in which a plurality of thermocouples are bundled by a support member and fixed to the same temperature measuring body is proposed (see, for example, Patent Document 5). When the number of thermocouples or the like is increased, there is a case where the support member cannot be received, and the glass substrate is broken. Further, in the method of pulling and drawing the wiring, the wiring portion from the thermocouple to the temperature measuring device becomes long, which causes a measurement error. Therefore, 'there is a proposal to store a temperature measuring device that cannot withstand high temperatures in a heat-resistant protective case' with a temperature measuring body, and more specifically, to set a battery power source that will be supplied by a transmitter, a primary battery, or the like. The temperature measuring device is inserted into the vacuum container, and the heat-resistant protection box for preventing the temperature rise in the vacuum container is disposed in a manner to surround the heat-resistant protection box, and the heat-resistant protection box is carried in the furnace together with the temperature measuring body. The method (see, for example, Patent Document 6). According to this method, the pull-out/pull of the wiring disappears, and the above problem is solved. However, in recent years, the treatment of tunnel furnaces for FPD glass substrates, etc., requires 200921186 to be able to withstand high temperature heat protection boxes of about 600 °C, but in the above heat resistant protection box, about 350 °C is the boundary Cannot be used in FPD manufacturing. In addition, in the tunnel type furnace of the FPD, the inlet and outlet of the furnace for precisely controlling the internal temperature are set to be narrow as much as possible, and the structure such as the vacuum vessel or the heat storage material described above is also high in height. Larger, there is a problem that cannot be utilized. Further, in order to be transported together with the glass substrate, it is necessary to reduce the size and weight of the heat-resistant protective case as much as possible. Although there is also a method of placing the water tank in the tank, the liquid is not easy to handle. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. 2000-58406 (Patent Document 3) Japanese Patent Laid-Open Publication No. 2000-58406 (Patent Document 4) [Patent Document 5] Japanese Patent Laid-Open Publication No. JP-A-2002-304689 (Patent Document No. JP-A-2002-304689) Problem to be Solved The present invention has been developed in order to solve the above problems, and an object thereof is to provide an internal temperature of 100 ° C even when exposed to a high temperature exceeding 600 ° C for a long period of time. The low temperature on the left and right sides can reliably protect the stored temperature measuring device, and can be used without any problem even in a tunnel furnace such as a glass substrate with a limited height, and is thin, compact, and lightweight, and easy to handle. Heat-resistant protective case, temperature measuring device using the protective box-6-200921186, and temperature measuring method. [Means for Solving the Problems] In order to solve the above problems, the present invention provides a heat-resistant protective case for a temperature measuring device which is formed by using a gypsum material and having an inner container for accommodating a storage portion for a temperature measuring device therein; The heat insulating material is formed by inserting the inner container into the outer container; and the thermocouple or the temperature measuring resistor connected to the temperature measuring device. Here, the heat insulating material is preferably composed of a gas phase cerium oxide. Further, a through groove which is interconnected is formed in each of the side walls ' of the inner container and the outer container, and the pull-out portion is preferable. It is particularly preferable that a side wall of the outer container is provided with a wide fitting groove, and a dividing member fitted in the fitting groove is provided, and the through groove is formed on the lower surface of the divided piece. Further, the inner container having the upper end of the storage portion opened and the lid closing the upper end opening of the container body constitute the inner container, and the cover is provided around the upper end opening of the container body. The engaged concave and convex engagement portion is preferred. Further, the outer container is formed by a container body having an upper end of the fitting space in which the inner container is fitted, and a lid body closing the upper end opening of the container body, and surrounds the upper end opening of the container body. It is preferable to provide a concave-convex engaging portion that engages with the cover. Further, the present invention also provides a temperature measuring device which is attached to the heat-resistant protection case of the temperature measuring device of the present invention, which houses a temperature measuring device, and 200921186 which is connected to a single or a plurality of thermocouples which are predetermined portions of the temperature measuring body. Or the temperature measuring resistor is connected to the aforementioned temperature measuring device through the aforementioned pull-out portion. Here, the heat-resistant cover made of the heat-resistant fiber is vertically divided, and the one or both of the divided covers form a notch portion for pulling out the thermocouple or the temperature-measuring resistor, and the heat-resistant protection of the temperature measuring device is accommodated. It is preferable that the case is housed in the heat-resistant cover. Moreover, the present invention also provides a temperature measuring method for measuring a temperature of a temperature measuring body conveyed in a heating furnace by a temperature measuring device according to claim 7 of the patent application, characterized in that: a heat-resistant protective case is connected to a predetermined portion of the temperature measuring body by a single or a plurality of thermocouples or temperature measuring resistors of the temperature measuring device extending through the drawing portion, and the heat-resistant protective case is combined with the temperature measuring body Transfer to the furnace. Here, the temperature measurement region of the temperature measuring body is divided into two or more plural regions, and a single or a plurality of thermocouples or temperature measuring resistors are connected to a predetermined portion of a region, and are placed in other regions. In the state of the heat-resistant protective case, the temperature-measuring body is transported in the heating furnace to measure the temperature of one region, and the temperature measurement is performed in the same manner for other regions, and it is preferable to perform temperature measurement in all regions. [Effect of the Invention] According to the heat-resistant protective case of the temperature measuring device of the present invention, the temperature rise of the inner container can be suppressed even if the temperature of the inner container rises even if the outer container is heated to some extent. Also, -8 - 200921186, the inner container is made of gypsum material, so the temperature of the inside of the container can be suppressed by the thermal decomposition energy of the water inside, and the inside of the container can be held at about 100 ° C of the evaporation temperature of the crystal water. It is indeed stored in the internal temperature measuring device. In addition, there is no need for additional materials, water tanks, etc., and the container itself is capable of suppressing the temperature rise (stable water can be provided. Therefore, it is possible to provide a heat-resistant protection that can reduce the size of the storage portion and the like, and is thin, lightweight, compact, and easy to handle. The heat insulating material of the outer container is a gas phase type dioxide, and the outer container itself can be configured to have a heat insulating structure that restricts the fine pore structure of the air movement, and is effective even at a temperature of 600 ° C. In order to block the heat transfer to the inside, the heat-resistant property is formed by the upper end opening body including the storage portion and the lid body closing the upper end opening portion of the container body, and the container is formed in the upper end opening portion of the container body. a concave-convex engaging portion that surrounds the lid body; and a container body that has an upper end that is open to the fitting space that is inserted therein, and a lid body that closes the upper end opening portion, and the outer container is configured The portion around the opening of the upper end is surrounded by the portion that is engaged with the lid. Therefore, the gap between the body and the lid can be reliably covered by the concave-convex engaging portion. The heat transfer to the inside and the thin body of the height. The 'scattering layer is formed on the outside of the outer heat container', so that the heat insulating material constituting the outer container can be prevented from being contaminated in the furnace, and the manufacturing quality can be avoided. The bad effect. The crystal containing the long-term dimension protects the minimum tank required for the work of the heat storage. The composition of the numerators is higher than that of the above. The inner side of the container is provided with a concave portion that is engaged with the concave-convex portion of the side container-embedded container main body, and the scattering of the stop coating is suppressed by the container, -9-200921186, and the temperature measurement region of the temperature measuring body is divided into two or more. a plurality of regions, a single or a plurality of thermocouples or temperature measuring resistors are connected to predetermined portions of one region, and the temperature measuring body is transported in a state where the heat resistant protective case is placed in another region In the heating furnace, the temperature measurement of one area is performed, and for other areas, the temperature measurement is performed in the same manner, and the temperature measurement of all the areas is performed, and the base for transporting the heat-resistant protection box is not separately provided, and the load can be carried. Placed on the temperature measuring body to effectively measure the temperature. [Embodiment] Next, an embodiment of the present invention will be described based on the drawings. 1 is an exploded perspective view showing a heat-resistant protective case and a temperature measuring device according to the present invention, and FIGS. 1 to 4 show a first embodiment, and FIGS. 5 and 6 show a second embodiment, in which a symbol S is a temperature measuring device. 1 is a heat-resistant protective container (box) '2 is an inner container' 3 is an outer container, 4 is a pull-out portion, 5 is a temperature measuring device, and 6 is a thermocouple. As shown in Fig. 1 and Fig. 2, the heat-resistant protective case 1 of the temperature measuring device of the present invention is formed by using a gypsum material and having an inner container 2 for accommodating the accommodating portion 2 G for the temperature measuring device 5 therein; The hot material is molded. The inside container 2 is internally fitted with the outer container 3; and the thermocouple 6 connected to the temperature measuring device 5 or the pull-out portion 4 of the temperature measuring resistor is formed. The inside container 2 is suppressed by the heat of vaporization of moisture contained in the gypsum: the temperature of the internal storage unit 20 at 100 ° C or higher is increased by the heat which cannot be completely suppressed by the heat insulating material constituting the outer container 3 . -10-200921186 Further, the temperature measuring device S of the present invention accommodates the temperature measuring device 5 in the heat-resistant protective case 1' and is connected to a single or a plurality of thermocouples 6 or temperature-resistance bodies of a predetermined portion of the temperature measuring body. The temperature measuring device 5' connected to the inside through the pull-out portion 4 is configured to receive the temperature measuring device 5 by arranging the measuring body' of the thermocouple 6 in the temperature measuring device 5 in the present embodiment. The storage unit 20 is not limited to this embodiment. In the following embodiments, the temperature measurement of the glass substrate for investigation in the tunnel furnace manufactured by FPD will be described as an example. However, the temperature measurement body of the present invention is not limited to such a glass substrate. Others such as the ruthenium wafer for the investigation of the semiconductor manufacturing apparatus can perform the heating in the state of being placed in the vacuum chamber, except for the case where the temperature of the temperature measurement body is distributed while being transported in the furnace. When the product is placed in the furnace together with the temperature measuring body, the product can be used in the same manner. Further, in the present embodiment, as the temperature measuring device 5 housed in the heat-resistant protective case, a data logger that stores the temperature measurement data collected by the thermocouple and then connects to the computer and outputs the data is used (for example, Japan Gram) The case of the heat-resistant temperature recorder T series "LT-3L/LT-3H, etc." is described as an example, but other types of temperature measuring devices may be used, for example, for a receiver disposed outside the furnace. In the case of a transmitter for wirelessly transmitting data, it is preferable that the heat-resistant protection case is formed with an extending groove for extending the antenna. First, a first embodiment of the present invention will be described with reference to Figs. 1 to 4'. -11 - 200921186 The inner container 2 is a box formed of a gypsum material, and is provided with a container body 21 having an upper end that is provided with the accommodating portion 20, and a lid body 22 for sealing the upper end opening portion 21a of the container body 21. The concave-convex engaging portion 2a that is engaged with the lid body 22 is provided around the upper end opening portion 21a of the container body 2 1 . The uneven contact portion 2a, more specifically, a stepped groove 24 is formed on the upper end surface of the side wall 23 of the container body 21 toward the outer side, and is formed along the outer peripheral portion of the inner surface of the cover 22 The protrusion 25 to which the groove 24 is fitted can effectively prevent the intrusion of hot air from the gap between the container body 21 and the lid body 22 by the uneven contact portion 2a. The concave-convex engaging portion 2a is not limited to the one formed by the recess 24 and the rib 25 in the present embodiment, and various configurations can be employed. Further, such a concave-convex engaging portion 2a is preferably formed over the entire circumference as in the present embodiment, but may be formed only in a part. Further, the groove 24 or the ridge 25 constituting the concave-convex engaging portion 2a is subjected to a corner forming process, and the structure for preventing damage during mounting is also excellent. The container body 21 and the lid body 22 of the inner container 2 are each formed of a gypsum material. It is preferable to form a reinforcing material such as a gypsum material or a mixed fiber or other components. Since the inner container 2 of the present invention is composed of such a gypsum material, when exposed to a high temperature of 100 ° C or higher, the thermal decomposition energy of the crystal water contained in the interior is 20% by weight or more. When the temperature rise is suppressed, the accommodating portion 20 can be maintained at about 1 〇〇 ° C of the evaporation temperature of the crystallization water, and the stored temperature measuring device 5 can be reliably protected. The outer container 3 is a heat insulating box made of a heat insulating material, and directly receives heat from the heating furnace to block the movement of heat toward the inner container 2. Specifically, similarly to the structure of the inner container 2, the container body 3 1 having the upper end of the fitting space 30 in which the inner container -12-200921186 2 is fitted is opened, and the container body 3 1 is sealed. The lid body 32 of the upper end opening portion 31a is formed around the upper end opening portion 31a of the container body 31 so as to surround the concave-convex engaging portion 3a that is engaged with the lid body 32. Further, the outer container 3 may have a tubular shape that is open to the side, and may have a structure in which the inner container is pulled out from the opening, in addition to the container body 31 and the lid body 32. In this case, for example, a panel formed of a heat insulating material similar to the outer container may be attached to the front and rear surfaces of the inner container, and various structures such as a cylindrical outer container that is opened before and after may be inserted. Further, in the present embodiment, the fitting space 30 is set to a space size in which the inner container 2 can be fitted with almost no gap, but it is also possible to maintain a slight gap. The concave-convex engaging portion 3 a, more specifically, the end surface of the side wall 33 of the container body 31 is formed with a stepped groove 34 toward the outside, and along the outer peripheral portion of the inner surface of the cover 32, The protrusion 35 which is fitted to the groove 34 is formed to be formed by the uneven contact portion 3a, and the intrusion of hot air from the gap between the container body 31 and the lid 32 can be effectively prevented. Similarly to the case of the inner container 2, the concave-convex engaging portion 3a is not limited to the groove 34 and the ribs 35, and various structures can be employed. Further, such a concave-convex engaging portion 3a is preferably formed over the entire circumference as in the present embodiment, but may be formed only in one portion. Further, it is preferable that the groove 34 or the ridge 35 constituting the concave-convex engaging portion 3a is subjected to a corner forming process to prevent damage during mounting or the like in advance. In the present embodiment, the lead portion 34b is formed at the cutout corner portion of the recess 34 to prevent breakage when it comes into contact with the ridge 35. The container body 3 1 and the lid body 3 2 of the outer container 3 are respectively formed using a heat insulating material-13-200921186, and the heat insulating material is preferably made of a gas phase type, and more specifically, by a gas phase. The spherical fine particles of about 30 nm of the phase cerium oxide are compression-molded, and the device 3 itself is formed into a fine thermal structure that restricts the understanding of the air molecules, and can transmit heat even at a high temperature of 60 ° C or higher. Further, in the case of such a gas phase type cerium oxide, the inner container gas formed by the gypsum material can be absorbed and released to the outside, and the inner container can be maintained at 1 atmosphere, and the temperature rise can be surely prevented. Specifically, the heat transfer of a substance having a temperature of 100 ° C or higher is as follows: in addition to the gas phase cerium oxide, it is preferable to mix an infrared ray absorbing agent such as high-purity zirconia as a permeated substance, for example, using Proextherm Daammstoffe. "Proextherm WDS (registered trademark)" is a pair of heat-insulating materials composed of vapor-phase cerium oxide. The material is used as a heat insulating material, in addition to gas phase cerium oxide such as calcium silicate, ceramic fiber, etc. In the container body 31 and the lid body 32 constituting the outer container 3, the conventional heat insulating material is formed into a stainless steel case in which the ceramics and the paper as the scattering preventing coating layer are heat-treated on the outer side thereof. In the present embodiment, as will be described later, scattering is prevented by the inclusion of two. The through grooves 41'42 which communicate with each other on the side walls of the inner container 2 and the outer container 3 as the thermocouples 6 are composed of oxidized sand, for example, 5, which can block the outer microporous structure from the microporous structure of the inner side. 2 The pressure inside the steamed 2 is released. For the radiation, the infrared material will not be formed and formed by the company. Of course, you can use other than the other to be able to shape. Furthermore, the outer layer, the film, or I is preferred (not shown in the oxidized cap, 23, 33, the drawn portion 4, -14-200921186 is formed in the outer container 3, communicating with the through groove 42 The through groove 43 is also formed in the lid body 32. More specifically, the through groove 41' which is open to the upper end surface of the side wall 23 of the inner container 2 and penetrates in the inner and outer directions is also provided in the side wall 3 of the outer container 3 Similarly, the through groove 42 that is open to the upper end surface and penetrates the inner and outer directions is provided. In the present embodiment, the depth of the through groove 42 is opened toward the upper portion of the groove 34, so that the cover 32 is further provided. The ribs 35 are also provided with through grooves 43 that open toward the end faces and penetrate the inner and outer directions. In the present embodiment, only one pull-out portion 4 is formed, but it is also preferable to form a plurality of strips. In the example of Fig. 1, Three thermocouples are connected to the three temperature measuring devices 5'. However, the middle of the thermocouple 6 is integrated into one and then inserted into the pull-out portion 4. However, of course, it may not be a single one. Inserting three strips in the longitudinal direction and inserting them into the pull-out portion 4, or forming three pull-out portions 4 The three thermocouples are inserted into the pull-out portion one by one. In the present embodiment, the pull-out portion 4 is formed by penetrating grooves 4 1 to 43 which are open to the upper end surface or the lower end surface, but are particularly penetrated. Each of the grooves 42 and 43 is formed by a deep groove, and the remaining space is formed on the upper end side and the lower end side in the state in which the thermocouple 6 is inserted. Therefore, in order to improve the adhesion and improve the heat insulation, As shown in FIG. 3, a shallow through groove 42 is formed in the bottom portion of the notch portion 36 on which the side wall 33 is cut, and the notch portion 36 is provided at a position corresponding to the notch portion 36 on the inner surface of the lid body 32. The fitting projection 37 has the same shallow through groove 43 on the front end surface of the projection 37, and the projection 37 and the notch 36 are sandwiched and inserted into the through groove 42 without any remaining space. The thermocouple 6 t of 43 is similarly provided with a shallow through-groove 43 extending from the above-mentioned protrusion 37 at the bottom -15 - 200921186 of the notch portion 38 cut by the ridge 35, and in the container body 31 a position corresponding to the notch portion 38 above the groove 34, and the gap is provided The fitting projection 39 of the 38 is provided with a shallow through groove 42 extending from the bottom surface of the notch portion 36 on the upper end surface of the protruding portion 39. By the protruding portion 39 and the notch portion 38, there is no remaining space. Preferably, the thermocouple 6 incorporated in the through grooves 42 and 43 is sandwiched. Further, in the present embodiment, the combination of the projection portion 37 and the notch portion 36, and the projection portion 39 and the notch portion 38 are provided. The thermocouples 6 are respectively sandwiched, but the structure is composed of only one of them, and the other may form a deep through groove as shown in Fig. 1. Further, as another example, it is necessary to make a thermocouple 6 buckling, but as shown in FIG. 4, a shallow open groove 60 is formed along the outer surface shape of the side wall 33 of the container body 31 having the groove 34, and the thermocouple 6 is not installed with a remaining space to cover the cover. It is also preferable to hold between the bodies 3 and 2. Further, in the present embodiment, the pull-out portion 4 is formed by penetrating grooves 41 to 43 which are open to the upper end surface or the lower end surface, but may be formed as a hole which is not opened. Other than the ones that are provided on the side walls 23, 3, or the through holes may be continuously provided in the lids 22, 32. Further, in the present embodiment, the drawing portions 4 are provided only in one direction, but the side walls 2 3 and 3 3 ' in the plural directions can be pulled out in the plural direction. Further, a configuration may be adopted in which the through grooves of the inner container 2 and the through grooves of the outer container 3 do not communicate with each other, for example, the lid 22 of the inner container 2 is pulled out and the outer container 3 is The side wall 33 is pulled out. In the present embodiment, the inner container 2 and the outer container 3 are formed in a square shape in a plan view, but may be formed in other shapes such as a polygonal shape, an elliptical shape, a circular shape, and an outer shape. Further, in particular, the outer container may be configured, for example, in a hemispherical shape, a conical trapezoidal shape, or a pyramidal trapezoidal shape. Next, a second embodiment of the present invention will be described with reference to Figs. 5 and 6. In the present embodiment, as shown in Fig. 5, the inner container 2 is similarly provided with the container body 2 1 and the cover having the concave-convex engaging portion 2a. The body 22 is formed with a through groove 41 as the drawing portion 4 in the side wall 23, but a fitting portion of the inner surface of the lid body 22 corresponding to the through groove 41 is formed to be fitted to the through groove 41. By the protrusions 26 and the through grooves 41, the thermocouples 6 that pass through the through grooves 41 can be held by the protruding grooves 26, and the adhesion can be improved, and the entry of hot air can be prevented more effectively. In the same manner as the first embodiment, the outer container 3 is composed of the container main body 31 having the concave-convex engaging portion 3a and the lid body 32. In the present embodiment, the cross-sectional viewing angle is substantially trapezoidal, so that the concave-convex card is formed. The groove 3 4 of the joint portion 3 a and the protrusion 3 5 are connected to each other to be tapered. This tapered shape is larger than the guide portion 34b which has been described in the first embodiment, and is formed in a tapered shape so as to be tapered and abutted by the both, so that when the container is opened and closed The concave-convex engaging portion 3a that is in contact with each other is less likely to be damaged. Further, in the present embodiment, a fitting groove 61 having a wide width in which the groove 34 is communicated to the inner fitting space 30 side is provided instead of providing the through groove 42' in the side wall 33 of the outer container 3 and the setting is embedded therein. The divided block 62 of the fitting groove 61 is formed with a through--17-200921186 groove 63 for passing the thermocouple 6 through the divided block 62. The through groove 63 is opened and provided to the lower surface 62a of the partitioning block 62. By fitting the divided block 62 to the fitting groove 61, the thermocouple 6 can function as a wall portion that maintains the adhesion while passing through the inside of the groove 63. . Here, the divided block 62 and the fitting groove 61 are formed such that they are abutted to have a wide tapered shape, but may have other shapes. As in the present embodiment, the drawing portion 4 of the thermocouple 6 is configured by using the dividing block 62, and as shown in the cross-sectional view of Fig. 6, the inner container 2 can be mounted in the fitting space 30 of the outer container 3. The thermocouple 6 is pulled out by the fitting groove 61 having a wide width, and after the wiring is freely wired, the divided block 62 is attached from above, and the thermocouple 6 is easily housed in the through-groove 6 3 and can be easily blocked. There is a problem that the corner portion of the drawing portion 4 is broken due to the movement of the thermocouple when the thermocouple is wired to the glass substrate or the like. Further, for example, a plurality of through grooves 63 may be provided in the dividing block 62. Next, a temperature measuring method for measuring the temperature of the temperature measuring body carried in the heating furnace by the temperature measuring device S of the present invention will be described with reference to Figs. In the temperature measurement of the present example, a plurality of thermocouples 6 extending from the heat-resistant protective case 1 through the drawing portion 4 are respectively connected to a predetermined plurality of portions of the glass substrate 7 as the temperature measuring body, the heat-resistant protective case 1 and the glass substrate. 7—Transfer in the heating furnace. The temperature of the plurality of portions of the glass substrate 7 heated by the heating furnace is recorded by the thermocouple 6 to the data recorder as the temperature measuring device 5, and after the measurement, the data recorder taken out from the furnace is connected to the other The computer 'read the recorded data' is parsed by the computer. -18- 200921186 The connection of the thermocouple 6 to the glass substrate 7 is a structure which has been widely used in a conventional wafer or the like. In the present embodiment, a bottom mounting hole 7 设置 is provided in a plurality of portions to The adhesive member such as a ceramic adhesive is fixed 'but is not limited to this method. Of course, in addition to the thermocouple wire, it can also be measured with a temperature measuring resistor. Further, the thermocouple itself is not limited in any way, and for example, other types of structures such as an exposed type in which the temperature contact of the tip end is exposed outside the sheath and a contact type connected to the tip end of the sheath can be used. In the present embodiment, as shown in FIG. 7, the temperature measurement region of the glass substrate 7 as the temperature measuring body is divided into two regions 71 and 72, and the thermocouples 6 are first connected to one region. A predetermined portion (mounting hole 70) of 71 is placed, and a heat-resistant protective case containing a temperature measuring device 5 (data logger) to which the thermocouple 6 is connected is placed in the other region, and in this state, the glass substrate 7 is placed. After being transported in the heating furnace and measuring the temperature of one of the regions 71, the thermocouple 6 is connected to the region 72 in the same manner, and the heat-resistant protective case is placed in the region 71 to measure the temperature. The method of measuring the temperature of the regions 71, 72 ends. Further, in the present embodiment, the two regions are divided into three regions, but they may be divided into three or more regions, and temperature measurement is sequentially performed in the same manner to perform temperature measurement in all regions. Further, the heat-resistant protective case 1 of the present invention may be directly provided, but it is preferably housed and placed in a heat-resistant cover 8 made of heat-resistant fibers such as cerium oxide fibers as shown in Fig. 9 to prevent the formation. In the heat-resistant protective case 1, in particular, impurities such as fine fragments of the outer container made of the heat insulating material are scattered. In the present embodiment, the split cover 8 1 , 8 2 -19 - 200921186 (the split cover 82 on the lower side has a notch portion for pulling out the thermocouple) is divided, but may be a cover of another form. Further, in addition to the method of measuring the heat-resistant protective case placed on the glass substrate in this manner, the heat-resistant protective case can be transported to the side of the glass substrate 7 as shown in Figs. 8(a) and 8(b). Fig. 8 (a) shows an example in which the glass substrate 7 is sandwiched between the front and rear sides of the transport direction, and the heat-resistant protective cases 1 and 1 are placed and transported to perform measurement of substantially half of each area, and Fig. 8 (b) The heat-resistant protective case 1 is placed only on one side of the front and rear sides of the glass substrate 7, and is transported to perform measurement in all areas. The embodiments of the present invention have been described above, but the present invention is not limited to the embodiments, and various modifications can be made without departing from the spirit and scope of the invention. [Examples] Next, the results of experiments conducted on the heat-resistant protective case @ heat-resistant characteristic (temperature characteristic of the accommodating portion) of the embodiment of the present invention will be described. The heat-resistant protective case (Example) used in the experiment has the stomach®1 The first embodiment shown in Figs. 1 and 2 has the same structure, and the outer container 3 is set to have a height of 80 mm, a length of 200 mm, and a width of 300 mm. Further, a thermometer is placed in the accommodating portion 20 of the inner damper 2, and is heated to 600 ° C in an atmospheric nickel-chromium furnace (400 x 400 x 1 000 mm in the furnace, and a hot range of 300 rpm, 90 x 800 mm), and then kept for 10 minutes. Air cooling, this cycle is repeated 1 time. The maximum temperature of the accommodating portion 20 for each of the ten cycles is shown in Table 1-2 of the next -20-200921186.丄J Maximum temperature (°C) of the circulating storage unit 1st 100 2nd 103... 3rd 94 4th 95 5th 97 6th 100 7th 118 8th 115 - 9th 129th 10th 13 0 According to the above experimental results, the heat-resistant protective container of the present invention is even if the heat-resistant temperature of the temperature measuring device (including a battery or the like) accommodated in the storage portion is about 100. In the case of ascending to about 600 ° C, the sixth time can be used. The reason why the temperature rises after the seventh time cannot be suppressed is considered to be that the crystal water contained in the gypsum material constituting the inner container has been exhausted. Therefore, in actual use, the inner container 2 is replaced at the sixth time, so that it can be repeatedly used even after the seventh time. Further, in a separate continuous heating test at 600 °C, the temperature inside the chamber was maintained at 10 ° C for 3 hours. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is an exploded perspective view showing a heat-resistant protective case and a temperature measuring device according to a first embodiment of the present invention. -21 - 200921186 Figure 2 is a longitudinal section view. Fig. 3 is a partial longitudinal sectional view showing a modified example of the pull-out portion. Fig. 4 is a partial longitudinal sectional view showing another modification of the pull-out portion. Fig. 5 is an exploded perspective view showing the heat-resistant protective case and the temperature measuring device according to the second embodiment of the present invention. Figures 6(a) and (b) are longitudinal sectional views. Fig. 7 (a) and (b) are explanatory views showing a temperature measuring method for measuring the temperature of the temperature measuring body by the temperature measuring means. 8(a) and 8(b) are explanatory views showing a modification of the same temperature measuring method. Fig. 9 is a perspective view showing a temperature measuring device for housing a heat-resistant protective case in a heat-resistant cover. [Description of main component symbols] S: Temperature measuring device 1: Heat-resistant protective case 2: Inner container 2a: Concavo-convex engaging portion 3 · 'Outer container 4: Pull-out portion 5: Temperature measuring device 6: Thermocouple 7: Glass substrate 8 : Heat-resistant cover-22- 200921186 2 0 : Storage part 21 : Container main body 2 1 a : Opening part 22 : Cover body 2 3 : Side wall 24 : Groove 2 5 : Brace 2 6 : Projection part 3 0 : Fitted space 31: container body 3 1 a : opening portion 36 : cover body 3 7 : side wall 3 8 : groove 34b : guide portion 3 9 : protrusion 40 : notch portion 41 : protrusion portion 42 : notch portion 43 : protrusion portion 41 , 42, 43 : through groove 6 0 : open groove 61 : fitting groove 62a : lower -23 - 200921186 63 : 70 : 71 , 81 , through groove mounting hole 72 : area 82 : split cover - 24 -