KR20090023097A - Heat-resisting protection box for thermometer, measuring apparatus of temperature thereof and method of measuring temperature - Google Patents

Abstract

A heat-resisting protection box for thermometer, measuring apparatus of temperature thereof and method of measuring temperature are provided to authentically protect the temperature measuring instrument. The heat-proof protection box(1) is comprised of the inner side container(2) of plaster, the outer container(3) of an adiabatic material, and the leader(4) of the thermocouple(6) or the measurement resistor. The inner side container comprises the receiving portion(20) for receiving the temperature measuring instrument(5). The inner side container is inserted inside the outer container. The leader of thermocouple or the measurement resistor is connected to the temperature measuring instrument. One of the temperature measuring instrument or the plurality of thermocouples or the measurement resistor is connected to the predetermined place of the object to be measured. The heat-proof protection box is returned into the heating furnace with the object to be measured.

Description

Heat-resisting protection box of thermometer and measuring device and method for measuring thermometer using same {HEAT-RESISTING PROTECTION BOX FOR THERMOMETER, MEASURING APPARATUS OF TEMPERATURE THEREOF AND METHOD OF MEASURING TEMPERATURE}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermometer-side technique used for heat treatment of glass substrates in FPD (flat panel display) manufacturing and various heat treatments in a semiconductor manufacturing process. The present invention relates to a heat-resistant protective box, a thermometer measuring device, and a thermometer measuring method for a temperature measuring instrument for measuring the temperature of a measuring body in a furnace.

As a thermometer-side structure of this kind of temperature measuring object, a plurality of places on the surface of a silicon wafer for irradiation are conventionally used to irradiate a heating temperature distribution of a temperature measuring object such as a silicon wafer in advance. An attachment hole having a bottom surface is formed, and the temperature sensing portion of the thermocouple element wire and the resistance thermometer is formed in the attachment hole. In the state where is placed, it is fixed or fixed with an adhesive member such as ceramic cement, and the thermometer side structure which surrounds the outer side of the thermocouple element wire with the ceramic insulating material for insulation between element wires is proposed or employ | adopted (for example, patent documents 1-4). Reference).

By the way, for example, in the heat treatment of the glass substrate in the FPD manufacturing process, the heat treatment is performed while conveying the glass substrate by a conveying means such as a belt in a tunnel furnace set to a temperature of a predetermined condition. As in the case of measuring the temperature of the glass substrate for irradiation in the tunnel furnace, in order to examine the heating temperature distribution of the temperature measurement object while conveying, a thermocouple or a resistance thermometer is applied to a plurality of places on the surface of the temperature measurement object as described above. There is a method of drawing the connected wiring to the outside from the entrance to the tunnel and connecting it to a temperature measuring instrument separately installed outside the furnace.

According to this method, it is possible to remotely measure the thermometer by connecting to a temperature measuring device outside the furnace. However, when the thermocouple or the resistance thermometer is conveyed in the tunnel furnace together with the temperature measuring object, the wiring is pulled out. The weight also increased, and the conveyance of the element wire of the thermocouple or the temperature-sensitive portion of the RTD element floated from the mounting hole of the temperature-measuring body, resulting in measurement error or peeling off completely. As a solution to such injuries and peelings, a method of collecting a plurality of thermocouples and the like by means of a support member and fixing them on the same temperature measuring object is proposed (see Patent Document 5, for example). The lower surface may not be able to stand only by a support member, and there exists a possibility that a glass substrate may be broken. In this method of drawing out the wiring, the wiring portion from the thermocouple to the temperature measuring instrument becomes long, which causes a measurement error.

Therefore, a temperature measuring instrument that cannot withstand high temperatures is stored in a heat-resistant protective box and conveyed together with a temperature measuring object in a furnace. More specifically, a temperature measuring instrument comprising a battery power source such as a transmitter or a primary battery is inserted into a vacuum vessel. A method has been proposed in which a heat-resistant protective box configured to prevent a temperature rise in a vacuum vessel by installing a heat storage material so as to surround it, and conveying it in a furnace together with a temperature measurement object (for example, has been proposed). Patent document 6). According to this method, the above problem is solved because the drawing out / drawing of the wiring is eliminated.

However, in recent heat treatment tunnel furnaces and the like of FPD glass substrates, a heat resistant protective box that can withstand a high temperature of about 600 ° C. is required. However, in the heat resistant protective box described above, 350 ° C. is a limit and cannot be used in the manufacture of FPD. In addition, especially in the tunnel path of the FPD, the entrance and exit of the furnace are set to be extremely narrow in order to precisely control the internal temperature, and in the configuration having the vacuum vessel or the heat storage material as described above, the height is high and the volume is not available. There is also. Moreover, in order to convey with a glass substrate, it is necessary to comprise a heat resistant protective box as small and light weight as possible. You can also put the tank in a box, but the liquid is difficult to handle.

Patent Document 1 Japanese Unexamined Utility Model Publication No. HEI 6-69785

Patent Document 2: Japanese Unexamined Patent Application Publication No. 10-9963

Patent Document 3: Japanese Unexamined Patent Publication No. 2000-58406

Patent Document 4: Japanese Unexamined Patent Publication No. 2001-289715

Patent Document 5: Japanese Unexamined Patent Publication No. 2000-81353

Patent Document 6: Japanese Unexamined Patent Publication No. 2002-304689

Therefore, the present invention is intended to solve in view of the above situation, the internal temperature can be maintained at a low temperature of about 100 ℃ even if exposed for a long time under a high temperature of more than 600 ℃ can reliably protect the stored temperature measuring instrument Thin, small, lightweight, easy-to-handle heat-resistant protective box, a thermometer-measuring device using the same, and a thermometer-measuring method that can be used without problems even in a tunnel path such as a glass substrate having a limited height. To provide.

The present invention, in order to solve the above problems, an inner container which is formed using a gypsum material and having a housing for accommodating a temperature measuring instrument therein, and an outer side that is molded using a heat insulating material and the inner container is inserted therein. A heat resistant protective box of a temperature measuring instrument comprising a container and a lead portion of a thermocouple or a resistance thermometer connected to the temperature measuring device is provided.

It is preferable that the said heat insulating material consists of fumed silica here.

Moreover, it is preferable to form through-holes which communicate with each other in each side wall of the said inner container and an outer container as said lead-out part.

In particular, it is preferable to form a wider coupling groove on the side wall of the outer container as well as to install a split piece inserted into the coupling groove, and to form the through groove on the bottom surface of the split piece.

In addition, the inner container includes a container body having an upper opening including the housing portion, and a lid closing the upper opening of the container body, and an uneven coupling portion is formed around the upper opening of the container body to engage the lid. It is desirable to.

The outer container may include a container body having an upper opening having a coupling space into which the inner container is inserted, and a lid for closing an upper opening of the container body, the lid being around the upper opening of the container body. It is preferable to form the uneven coupling portion to bond.

Moreover, this invention accommodates a temperature measuring instrument in the heat-resistant protection box which concerns on this invention mentioned above, and connects one or several thermocouples or resistance thermometers to the predetermined place of a temperature measurement object, and the said temperature measuring instrument is carried out through the said drawing part. Also provided is a thermometer measuring device connected to the apparatus.

Here, the heat-resistant cover made of a heat-resistant sheet is divided up and down, and a cutting groove for drawing a thermocouple or a resistance thermometer is formed in one or both of the divided covers, and the heat-resistant protective box for storing the temperature measuring instrument is provided with the heat-resistant protective box. It is desirable to store inside.

Moreover, this invention is a thermometer measuring method which measures the temperature of the temperature measurement object conveyed in a heating furnace by the thermometer measuring apparatus which concerns on said invention, Comprising: The said temperature measuring device extended from the said heat-resistant protection box through the said drawing-out part. A thermometer measuring method is also provided in which one or a plurality of thermocouples or resistance thermometers is connected to a predetermined place of the temperature measurement object, and the heat-resistant protection box is conveyed together with the temperature measurement object in a heating furnace.

Here, the temperature measurement area of the temperature measurement object is divided into two or more areas, one or more thermocouples or resistance thermometers are connected to a predetermined place in one area, and the heat-resistant protection box is placed in other areas. It is preferable to carry out the thermometer side of one area | region by conveying the said temperature measuring body in a heating furnace in one state, and to perform the thermometer side similarly about the other area | region sequentially, and to make the thermometer side of all area | regions.

According to the heat-resistant protective box of the temperature measuring instrument which concerns on this invention made as mentioned above, the inner container can suppress the temperature rise of an inner container at a certain high temperature in an outer container, and even if an inner container rises in temperature, Since it is made of gypsum material, the temperature rise is suppressed by the thermal decomposition energy of the crystal water contained therein, and the inside of the container is maintained for about a long time at about 100 ° C., which is the evaporation temperature of the crystal water. It can be reliably protected. Since the container itself has a function of temperature suppression (plateau) without separately installing a heat storage material or a water tank, it is thin, lightweight, simple and easy to handle by suppressing the size of the storage part to the minimum necessary. One heat protection box can be provided.

Moreover, since the heat insulating material of an outer container consists of fumed silica, the outer container itself can be comprised by the heat insulation structure provided with the fine micro bore structure which restricts the movement of an air molecule, and is made under the high temperature of 600 degreeC or more. The heat resistance is improved by effectively blocking the heat transfer to the inside.

In addition, the inner container is composed of a container body of the upper opening having the accommodating portion, and a lid closing the upper opening of the container body, and forming an uneven portion engaging with the lid around the upper opening of the container body. And an outer container comprising a lid body having a top opening having a coupling space into which the inner container is inserted, and a lid closing the top opening of the container body, wherein the lid is wrapped around the top opening of the container body. By forming the concave-convex coupling portion to be coupled with the concave-convex coupling portion, heat transfer to the inside can be reliably blocked from the gap between the container main body and the lid, and the height can be reduced. have.

Moreover, since the coating layer for scattering prevention was formed in the outer surface of an outer container, the scattering / contamination to the furnace of the heat insulating material which comprises an outer container can be prevented, and the bad influence on manufacturing quality can be avoided.

The temperature measurement area of the temperature measurement body is divided into two or more areas, one or more thermocouples or resistance thermometers are connected to a predetermined place in one area, and the heat-resistant protection box is placed in other areas. In order to convey the heat-resistant protective box separately by carrying out the thermometer side of one area | region by carrying out the said temperature measuring body in a heating furnace, and also carrying out the thermometer side similarly about the other area | region sequentially, The base is not required, and the temperature can be efficiently measured by being mounted on the temperature measurement body.

EMBODIMENT OF THE INVENTION Next, the Example of this invention is described in detail based on attached drawing.

1 is an exploded perspective view showing a heat-resistant protective box and a thermometer-side device according to the present invention, wherein FIGS. 1 to 4 show a first embodiment, FIGS. The measuring apparatus, 1 is a heat-resistant protection container, 2 is an inner container, 3 is an outer container, 4 is a drawer, 5 is a temperature measuring instrument, and 6 is a thermocouple.

The heat-resistant protective box 1 of the temperature measuring instrument according to the present invention is molded using a gypsum material as shown in Figs. 1 and 2, and an accommodating portion for accommodating the temperature measuring instrument 5 therein. The inner container 2 provided with the 20, the outer container 3 shape | molded using a heat insulating material, and the said inner container 2 inserted in the inside, and the said temperature measuring device 5 are connected. It consists of the lead-out part 4 of the thermocouple 6 or a resistance thermometer. Inner container 2 is 100 degreeC by the heat which vaporization of the moisture which gypsum contains, and heat which cannot be totally suppressed by the heat insulating material which comprises outer container 3 is 100 degreeC. The rise to the above temperature is suppressed.

And the thermometer side apparatus S which concerns on this invention accommodates the temperature measuring device 5 in the heat-resistant protection box 1 mentioned above, and is connected to the predetermined place of the temperature measurement object, 1 or several thermocouples 6 Or the RTD is connected to the internal temperature measuring device 5 through the drawing part 4, and in this embodiment, the measuring object in which the thermocouple 6 is connected to the temperature measuring device in advance is taken out. Although it is comprised so that the temperature measuring device 5 can be set in the accommodating part 20 via the part 4, it is not limited to this form at all.

In addition, in the following Example, although the temperature measurement of the glass substrate for irradiation in the tunnel furnace of FPD manufacture is demonstrated as an example, it is never limited to such a glass substrate as a temperature measurement body in this invention. In addition, a silicon wafer for irradiation in a semiconductor manufacturing apparatus or the like can, of course, be used. In addition to examining the heating temperature distribution of the temperature measurement object while being conveyed in a furnace, it is heated or placed in a chamber. In addition, of course, it can be used similarly also when the temperature measurement object for irradiation is put in a furnace. In the present embodiment, a data logger (5) which is stored in a heat-resistant protective box, which stores temperature measurement data collected by a thermocouple or the like, and later connects to a computer to output data (for example, For example, a case using a heat-resistant temperature logger LT series (LT-3L / LT-3H, etc.) manufactured by Gram Co., Ltd. will be described as an example. However, a temperature measuring instrument of another type may be used, for example, a receiver installed outside a furnace. The transmitter may wirelessly transmit data with respect to the antenna. In this case, it is also preferable to form an extension groove for extending the antenna to the heat-resistant protective box.

First, the first embodiment of the present invention will be described with reference to Figs.

The inner container 2 is a case molded by a gypsum material, and has an upper opening container main body 21 having an accommodating portion 20 and an upper opening 21a of the container main body 21. Consists of a lid 22 to be closed, and the concave-convex coupling portion 2a engaging with the lid 22 is formed around the upper end opening 21a of the container body 21. More specifically, the concave-convex coupling portion 2a forms a step-shaped concave groove 24 on the outer side of the upper surface of the side wall 23 of the container body 21, and the inner surface of the lid 22. The protrusion 25 is formed to protrude along the outer circumferential portion 24, and is opened from the gap between the container body 21 and the lid 22 by the uneven coupling portion 2a. ) Effectively prevents intrusion. The concave-convex coupling portion 2a is not limited to the concave groove 24 and the protrusion 25 as in the present embodiment, and can adopt various structures. In addition, although the uneven | corrugated coupling part 2a is preferably formed in the whole periphery like this embodiment, you may form only in part. Moreover, the structure which bevels the concave groove 24 or the protrusion part 25 which comprise the uneven coupling part 2a, and prevents the defect at the time of attachment is also preferable.

The container body 21 and the lid 22 of the inner container 2 are each molded using a gypsum material. It is also preferable to shape | mold and shape | mold reinforcement materials, such as a fiber, and other components to this gypsum material. Since the inner container 2 of this invention is comprised with gypsum material in this way, when it is exposed to the high temperature of 100 degreeC or more, temperature rise is suppressed by the thermal decomposition energy of the crystal water contained 20 weight% or more inside. Since the housing | casing part 20 can be maintained at about 100 degreeC which is the evaporation temperature of crystal water, it is comprised so that the stored temperature measuring device 5 can be reliably protected.

The outer container 3 is a heat insulating case made of a heat insulating material, and receives heat from a direct heating furnace, but blocks the movement of heat to the inner container 2. Specifically, as in the structure of the inner container 2 described above, the container body 31 of the upper end having the coupling space 30 into which the inner container 2 is inserted, and the upper end of the container body 31. It consists of the lid 32 which closes the opening part 31a, and the uneven | corrugated engagement part 3a which engages with the said lid 32 is formed in the circumference | surroundings of the upper end opening 31a of the said container main body 31. As shown in FIG. In addition, the outer container 3 is comprised by the container main body 31 and the lid 32 like this embodiment, for example, is comprised by the cylindrical shape which opens to the side, and draws out an inner container from the said opening part. The same structure may be sufficient. In this case, various structures, such as the structure which attaches the panel which consists of heat insulating materials, such as an outer container, to the front and back surfaces of an inner container, and inserts into the cylindrical outer container opening back and forth, for example can be employ | adopted. In addition, although the coupling space 30 is set to the space dimension in which the inner container 2 is inserted in this embodiment without a substantially gap, you may set so that some space | interval may be maintained.

More specifically, the concave-convex coupling portion 3a forms a step-shaped concave groove 34 on the outer side in the upper end face of the side wall 33 of the container body 31, and furthermore, the inner surface outer periphery of the lid 32. The protrusion 35 is formed to protrude from the concave groove 34 so that the heat is infiltrated from the gap between the container body 31 and the lid 32 by the uneven coupling portion 3a. It is preventing. The concave-convex coupling portion 3a is not limited to the concave groove 34 and the protruding portion 35 as in the case of the inner container 2, and various structures can be adopted. In addition, although the uneven coupling portion 3a is preferably formed over the entire circumference as in this embodiment, it may be configured only in part. In addition, the structure which prevents defects at the time of attachment by beveling in the concave groove 34 or the protrusion part 35 which comprise the uneven coupling part 3a is also preferable. In this embodiment, the beveling part 34b is formed in the corner part where the recessed groove 34 starts, and is prevented from being damaged in contact with the protrusion part 35.

The container body 31 and the lid 32 of the outer container 3 are each molded using a heat insulator, and the heat insulator is preferably made of fumed silica, and more specifically, fumed silica. Microparticles, such as spherical fine particles of about 5 to 30 nm, are compressed and molded so that the outer container 3 itself has a fine microbore structure that restricts the movement of air molecules. The inner container 2 formed of a gypsum material can be constituted by a heat insulating structure, and can block heat transfer to the inside even under a high temperature of 600 ° C. or higher. In addition to absorbing the vapor discharged from the outside, it can be discharged to the outside, and the temperature rise is maintained by maintaining the pressure inside the inner container 2 at 1 atm. Silhage it can be prevented.

Specifically, the heat transfer of the material at 100 ° C. or higher is dominant in radiative heat transfer. Therefore, infrared absorbers such as high-purity zirconia are mixed as a material that does not transmit infrared rays other than fumed silica. It is preferable to shape | mold and it can shape | mold using "Porextherm WDS (trademark)" made from Porextherm Daammstoffe GmbH, for example. Of course, another thing may be used as a heat insulating material which consists of such a fumed silica, or what shape other than fumed silica as a heat insulating material, for example, may be shape | molded by well-known heat insulating materials, such as a calcium silicate and ceramic fiber. Furthermore, in the whole outer surface of the container main body 31 and the lid 32 which comprise the outer container 3, the coating film of ceramic paper (paper mixed with ceramic) is formed as a coating layer for scattering prevention, It is a preferable example to protect the outer side with the heat-treated stainless case (both are not shown in the figure). In the present embodiment, scattering is prevented by accommodating in the silica cover as described later.

In each of the side walls 23 and 33 of the inner container 2 and the outer container 3, through grooves 41 and 42 communicating with each other are formed as the lead portions 4 of the thermocouple 6, and the outer container 3 ), A through groove 43 communicating with the through groove 42 is also formed in the lid 32. More specifically, through grooves 41 are released to the upper end surface of the side wall 23 of the inner container 2 and penetrate in and outward, and the side wall 33 of the outer container 3 is similarly formed. The through groove 42 is formed to be released to the upper end and penetrates in and outward direction, and in the present embodiment is opened to the upper portion of the concave groove 34 because of the relationship between the depth of the through groove 42, the projection of the lid 32 Also in the 35, the through groove 43 is formed, which is released to its lower end surface and penetrates in and outward. In the present embodiment, only one lead portion 4 is formed, but a plurality of lead portions 4 are also preferably formed. In the example of FIG. 1, although three temperature measuring instruments 5 are accommodated and three thermocouples are connected, it is comprised so that the middle of the thermocouple 6 may be gathered into one and inserted in the lead-out part 4. As shown in FIG. However, it is also possible to configure the three to be inserted into the withdrawal portion 4 side by side in the longitudinal direction without forming as one, or to form three withdrawal portions 4 to insert one by one.

In the present embodiment, as the lead portion 4, the through grooves 41 to 43 released to the upper or lower surface, respectively, are formed and configured. In particular, the through grooves 42 and 43 are each composed of deep grooves. Surplus spaces are generated on the upper and lower surface sides that are released in the state where the thermocouple 6 is inserted. Therein, in order to improve the airtightness and increase the thermal insulation property, as shown in FIG. 3, a shallow through groove 42 is formed at the bottom of the groove portion 36 from which the side wall 33 is cut, and the inner surface of the lid 32 is formed. In the position corresponding to the groove portion 36, the projection portion 37 is formed to be coupled to the groove portion 36, a shallow through groove 43 is similarly formed on the front end surface of the projection portion 37, the projection portion It is preferable that the thermocouple 6 embedded in the through grooves 42 and 43 is inserted by the 37 and the grooves 36 without excess space, and the grooves 38 in which the projections 35 are similarly cut. The groove portion 38 extends a shallow through groove 43 extending from the protrusion portion 37 at the bottom of the groove, and at a position corresponding to the groove portion 38 on the upper surface of the concave groove 34 of the container body 31. Turning combined to) A portion 39 is formed, and a shallow through groove 42 extending from the bottom surface of the groove portion 36 is extended to an upper end surface of the protrusion portion 39, and the through portion is formed by the protrusion portion 39 and the groove portion 38. It is preferable to set it as the structure which inserts the thermocouple 6 built in 42 and 43 without surplus space. In the present embodiment, the thermocouple 6 is inserted by the combination of the protrusions 37 and the grooves 36 and the combination of the protrusions 39 and the grooves 38, but the structure is composed of only one combination. The other may form a deep through groove shown in FIG. As another example, the thermocouple 6 needs to be bent, but as shown in FIG. 4, the opening is shallow along the outer surface of the side wall 33 having the concave groove 34 in the container body 31. It is also preferable to form the thermocouple 6 so that the thermocouple 6 is mounted without excess space and inserted between the lid 32.

In addition, although the through-holes 41-43 formed as the lead-out part 4 in the upper end surface or the lower end surface were formed, respectively, in this embodiment, it can also be comprised as a hole which is not released. In addition to this, in addition to being formed in the side walls 23 and 33, the lids 22 and 32 may be formed so as to be formed so that the through holes are continuous. In addition, although the drawing part 4 is formed only in one direction in this embodiment, you may comprise so that the thermocouple 6 may be drawn out in multiple directions by respectively forming in the side wall 23, 33 of multiple directions. In addition, the through-groove of the inner container 2 and the through-groove of the outer container 3 do not communicate with each other, for example, withdraw from the lid 22 of the inner container 2, and the side wall 33 of the outer container 3 is also removed. It is also possible to adopt a structure such as to withdraw from.

In the present embodiment, the inner container 2 and the outer container 3 are each formed in a quadrangle in plan view, but may be configured in a polygon, an ellipse, a circle, a mold, or other shapes. Moreover, it is also preferable to comprise especially an outer container in hemispherical shape, a cone trapezoidal shape, a pyramidal trapezoidal shape, etc., for example.

Next, a second embodiment of the present invention will be described with reference to Figs.

In this embodiment, as shown in Fig. 5, the inner container 2 is composed of a container body 21 and a lid 22, which are similarly provided with an uneven coupling portion 2a, and has a lead portion (2) on the side wall 23. 4) the through groove 41 is formed, but the projections 26 engaging the through groove 41 are formed to protrude at positions corresponding to the through grooves 41 on the inner surface of the lid 22. Accordingly, the thermocouple 6 passing through the through groove 41 can be inserted without the surplus space by the protrusion 26 and the through groove 41, thereby improving the airtightness and more reliably preventing the ingress of heat. have.

In addition, the outer container 3 is comprised from the container main body 31 and the lid 32 which have the uneven coupling part 3a like 1st Example, and comprises the uneven coupling part 3a in this embodiment. The concave groove 34 and the projection 35 are formed in a substantially trapezoidal shape when viewed in cross section so as to be in a tapered shape with each other. The tapered shape is a tapered shape in which the beveling portion 34b described in the first embodiment is enlarged, and the tapered shape is formed in such a manner that the concave-convex coupling portions which are brought into contact with each other at the time of opening and closing the container by contacting with each other in a tapered shape ( 3a) is not easily broken.

In addition, in the present embodiment, instead of forming the through groove 42 in the side wall 33 of the outer container 3, a wide coupling groove for passing the concave groove 34 to the inner coupling space 30 side ( In addition to forming a 61 and a split piece 62 is inserted into the coupling groove 61, a through groove 63 for passing the thermocouple 6 through the split piece 62 is formed. The through groove 63 is provided by being released to the lower surface 62a of the divided piece 62 and the thermocouple 6 is inserted into the through groove 63 by inserting the divided piece 62 into the engaging groove 61. It functions as a wall that maintains airtightness while passing through it. Here, the divided piece 62 and the engaging groove 61 are configured to be in contact with each other in a wide tapered shape, but may be of other shapes. In addition, although the through groove 63 through which the thermocouple 6 passes is formed in the lower surface 62a of the divided piece 62, it is of course possible to configure it as a hole which is not released to the upper surface or the upper and lower surfaces. By constructing the lead portion 4 of the thermocouple 6 using the split piece 62 as in the present embodiment, as shown in the cross-sectional view of FIG. After the container 2 is mounted and the thermocouple 6 is drawn out and freely wired through the wide coupling groove 61, the split piece 62 is attached from above to install the thermocouple 6 in the through groove 63. Can be easily closed while storing, and the problem that the edge of the lead portion 4 is damaged due to the movement of the thermocouple during the wiring of the thermocouple in a glass substrate or the like can also be prevented. In addition, for example, a plurality of through grooves 63 may be formed in the divided pieces 6.

Next, the thermometer measuring method which measures the temperature of the temperature measurement object conveyed in a heating furnace by the thermometer measuring apparatus S which concerns on this invention based on FIGS. 7-9 is demonstrated.

The thermometer side of this embodiment connects the plurality of thermocouples 6 extending from the heat-resistant protection box 1 via the lead-out part 4 to predetermined predetermined places of the glass substrate 7 which is a temperature measurement body, respectively, The heat resistant protective box 1 is conveyed in a heating furnace with the glass substrate 7. The temperature of the plural places of the glass substrate 7 heated by the heating furnace is recorded in the data logger which is the temperature measuring device 5 by the thermocouple 6, and the data logger taken out from the furnace after the measurement is transferred to a separate computer. When connected, the recorded data is read out and analyzed by the computer.

The connection of the thermocouple 6 etc. to the glass substrate 7 can employ | adopt the structure widely employ | adopted conventionally also in a silicon wafer etc. In this embodiment, the attachment hole which has a bottom face in several places. Although 70 is formed and the thermosensitive part of a thermocouple wire is being fixed by the adhesive member, such as ceramic cement, it is not limited to this method at all. Of course, in addition to a thermocouple element wire, you may measure with a resistance thermometer. In addition, the structure of the thermocouple itself is not limited at all, for example, the exposed type of exposing the hot contact point of the tip to the outside of the sheath, the contact type connected to the sheath tip, and various other structures. It can employ | adopt.

In this embodiment, as shown in Fig. 7, the temperature measurement area of the glass substrate 7 as the temperature measurement body is divided into two areas 71 and 72, and first, a predetermined place in one area 71 is obtained. The thermocouple 6 is connected to the attachment hole 70, and a heat-resistant protective box for storing the temperature measuring instrument 5 (data logger) to which the thermocouple 6 is connected to the other region 72 is placed. In this state, the glass substrate 7 is transported in the heating furnace to perform the thermometer side of one region 71, and then similarly, the thermocouple 6 is connected to the region 72 at the same time. ) And the thermometer side is mounted and the thermometer side of both area | regions 71 and 72 is terminated. In addition, in this embodiment, although divided into two areas, it is also possible to divide into three or more areas in order to perform the thermometer side in the same manner to perform the thermometer side of all areas.

In addition, although the heat-resistant protective box 1 of this invention can be installed as it is, it is preferably accommodated in the heat-resistant cover 8 which consists of heat-resistant fibers, such as a silica fiber, as shown in FIG. It is prevented that impurities, such as fine debris of the outer container which comprise the heat-resistant protective box 1 and which comprise the heat insulating material especially, are scattered. In the present embodiment, the cover is divided into upper and lower divided covers 81 and 82 (the lower divided cover 82 is provided with a cutting groove for drawing out the thermocouple).

In addition, the present invention, in addition to the method of placing and measuring the heat-resistant protective box on the glass substrate in this way, for example, as shown in Figs. 8 (a) and (b), the heat-resistant protective box is placed near the glass substrate 7. Of course, you may convey and measure. FIG. 8A is an example in which the heat-resistant protective boxes 1 and 1 are arranged so as to surround the glass substrate 7 so as to be arranged near both front and rear in the conveying direction, and are configured to be in charge of measuring approximately half the area. FIG. 8B is an example in which the heat-resistant protective box 1 is disposed only near one of the front and rear sides of the glass substrate 7 so as to be in charge of measuring all regions.

As mentioned above, although the Example of this invention was described, this invention is not limited at all to this Example, Of course, it can be implemented in various forms in the range which does not deviate from the summary of this invention.

Specific Example

Next, the result of having tested the heat resistance characteristic (temperature characteristic of a storage part) of the heat resistant protective box which concerns on the specific Example of this invention is demonstrated.

The heat-resistant protective box (Example) used for the test was provided with the structure similar to Example 1 shown in FIG. 1, 2, and the outer container 3 was set to 80 mm in height, 200 mm in length, and 300 mm in width. Then, a thermometer is placed in the housing 20 of the inner container 2, and the temperature is 600 ° C by atmospheric nichrome furnace (size in the furnace; 400 × 400 × 1000 mm, heating range: 300 × 390 × 800 mm). After heating to hold for 10 minutes, the heat cycle of air cooling was repeated 10 times. The maximum temperature of the accommodating part 20 in each of these 10 cycles is shown in Table 1 below.

Table 1

 cycle  Maximum temperature of storage part (℃)  1st time  100  2nd  103  3rd  94  4th  95  5th  97  6th  100  7th  118  8th  115  9th  129  10th  130

From the above test results, if the heat resistance temperature of the temperature measuring device (including the battery, etc.) housed in the housing is about 100 ° C, the heat-resistant protection container of this embodiment can be used up to the sixth time even when the temperature rises to about 600 ° C. You can see that. The reason that the temperature rise of the storage portion could not be suppressed after the seventh time is considered to have evaporated all the crystal water contained in the gypsum material constituting the inner container. Therefore, it turns out that the inner container 2 is replaced by the 6th shot at the time of actual use, and can be used repeatedly after the 7th shot. In addition, in the 600 degreeC continuous heating test performed separately, the temperature in a box was kept at 100 degreeC for 3 hours.

1 is an exploded perspective view showing a heat-resistant protective box and a thermometer measuring device according to a first embodiment of the present invention.

2 is a longitudinal cross-sectional view described above.

3 is an exploded perspective view showing a modification of the lead portion.

4 is a longitudinal sectional view of a main portion showing another modified example of the lead portion;

5 is an exploded perspective view showing a heat-resistant protective box and a thermometer measuring device according to a second embodiment of the present invention.

6A and 6B are the longitudinal cross-sectional views described above.

7 (a) and 7 (b) are explanatory diagrams showing a thermometer measuring method of measuring the temperature of a temperature measurement object by a thermometer measuring device.

8 (a) and 8 (b) are explanatory views similarly showing a modification of the thermometer measuring method.

Fig. 9 is a perspective view showing a thermometer side device in which a heat resistant protective box is housed in a heat resistant cover.

*** Explanation of symbols for main parts of drawing ***

S Thermometer side 1 Thermal protection box

2 inner container 2a uneven joint

3 Outer container 3a Uneven joint

4 Drawer 5 Temperature Gauge

6 thermocouple 7 glass substrate

8 Heat resistant cover 20 compartment

21 Container Body 21a Opening

22 lid 23 sidewall

24 Concave groove 25 Protrusion

26 protrusion 30 coupling space

31 Container body 31a opening

32 lid 33 sidewall

34 Recessed groove 34b Beveling section

35 Protrusion 36 Groove

37 Protrusion 38 Groove

39 Protrusions 41, 42, 43 Through Groove

60 Opening groove 61 Coupling groove

62a bottom 62 split piece

63 Through Hole 70 Mounting Hole

71, 72 Zone 81 Split Cover

82 split covers

Claims (10)

An inner container molded using gypsum material and having an accommodating portion for storing a temperature measuring instrument therein; An outer container molded using a heat insulating material and having the inner container inserted therein; To the lead-out part of a thermocouple or a resistance thermometer connected to the said temperature measuring instrument Heat-resistant protective box of a temperature measuring instrument constituted by The method of claim 1, Heat-resistant protective box, characterized in that the heat insulating material is made of fumed silica (fumed silica). The method according to claim 1 or 2, The heat-resistant protective box as said lead-out part, the through-holes which mutually communicate with each other were formed in each side wall of the said inner container and an outer container. The method of claim 3, Heat resistance is formed by forming a wide coupling groove on the side wall of the outer container, installing a split piece to be inserted into the coupling groove, and forming the through groove on the lower surface of the split piece. Protective box. The method according to claim 1 or 2, The inner container is constituted by a container body of the upper opening provided with the housing portion, and a lid closing the upper opening of the container body, A heat-resistant protective box comprising a concave-convex coupling portion that engages with the lid around a top opening of the container body. The method according to claim 1 or 2, The outer container is composed of a container body of the upper opening having a coupling space into which the inner container is inserted, and a lid closing the upper opening of the container body, Heat-resistant protective box, characterized in that the concave-convex coupling portion is formed around the top opening of the container body to engage with the lid. The temperature measuring device is housed in the heat-resistant protective box according to claim 1 or 2, and one or more thermocouples or resistance thermometers connected to a predetermined place of the temperature measurement body are connected to each other via the drawer. A thermometer measuring device comprising a temperature measuring device. The method of claim 7, wherein The heat-resistant cover made of heat-resistant fibers is divided up and down, and a cutting groove for drawing a thermocouple or a resistance thermometer is formed on one or both of the divided covers, and the temperature measuring instrument Thermometer side device characterized in that the heat-resistant protective box for receiving the housed in the heat-resistant cover. A thermometer measuring method for measuring the temperature of a temperature measuring object being conveyed in a heating furnace by the thermometer measuring device of claim 7 One or a plurality of thermocouples or resistance thermometers of the temperature measuring instrument extending from the heat-resistant protective box through the lead-out unit are connected to a predetermined place of the temperature-measuring body, and the heat-resistant protective box together with the temperature-measuring body A thermometer measuring method, which is carried in a heating furnace. The method of claim 9, The temperature measurement area of the temperature measurement body is divided into two or more areas, one or more thermocouples or resistance thermometers are connected to a predetermined place in one area, and the heat-resistant protection box is placed in other areas. The thermometer side method of carrying out the temperature measurement body of one area | region by conveying the said temperature measuring body in a heating furnace, and also performing the thermometer side similarly about the other area | region sequentially, and performing the thermometer side of all area | regions.

Images