200918429 九、發明說明： 【發明所屬之技術領域】 本發明’係關於氣浮搬送裝置之噴氣構造體及噴氣單 兀、以及氣浮搬送裝置，藉由空氣而使液晶顯示面板用玻 璃基板等薄板上浮來搬送該薄板。 【先前技術】 習知，於氣浮搬送裝置之噴氣構造體，為了使來自氣 洋搬送裝置之噴氣部（以既定間隔形成有多數個噴出孔） 之空氣之流速或流量於整面上較為均勻，在上壁材之噴出 孔之下面側配置有多孔質材料（參照專利文獻丨、圖丨、圖 2) ° »亥上壁材係用來對不具有剛性與平面度之多孔質材料 進行補強與保護。 圖11係表示習知之氣浮搬送裝置F之作為空氣室之室 ιοί與多孔質材料102、上壁材1〇3之配置的示意圖。圖η 表示藉由多孔質材料102之壓力損耗，室1〇1内之壓力變 得均勻，藉由整體均勻喷出之空氣而使玻璃基板1〇4均勻 上浮的狀態。 然而’於習知之使用多孔質材料102、上壁材103之上 浮搬送，當玻璃基板104碎裂時，如圖12所示，存在難以 進行除去破損基板之碎片】05及清掃上壁材1〇3之維護作 業的問題。亦即’於專利文獻】中，例如使用如下之金屬 板作為上壁材103,該金屬板之厚度足以產生可對被上浮物 進行支撐之強度，且於該金屬板上，以既定間隔且呈鋸齒 200918429 狀形成有多數個小徑、例如孔徑為卜⑺丽左右之空氣喷 出孔H。因此，如圖12所示，於習知之氣浮搬送裝置f， 當除去碎丨1G5時，即使嘗試利用掃帚1Q6般之掃除工具 來清掃碎片⑽’碎片…亦會進入至噴氣孔H中而難以被 完全除去。 又，於該氣浮搬送裝Μ吏玻璃基板之兩端部與配置 於玻璃基板兩側之複數個搬送減觸，邊㈣送輕承_ 基板之自重的-部分邊使搬送輥轉動，藉此，於使該玻璃 基板上浮之狀態下進行搬送。 然而，藉由使玻璃基板上浮，搬送報所承載之基板之 自重變得極低。因&，當縮短搬送時間時，若加快該輥之 搬送速度或突然降低搬送速度，則於啟動或停止時會產生 打滑，基板之定位精度降低，因此存在如下問題，即，益 法改善（提高）搬送輥對基板進行㈣時之加減速度，難 以縮短搬送時間。 專利文獻1 :日本特開2〇〇4_345744號公報 【發明内容】 —本發月之目的在於’提供易於維護之氣浮搬送裝置之 喷氣構冑&具有该噴氣構造體之氣浮搬送裝置之噴氣 單元、以及包含其之氣浮搬送裝置。 …、 一本發明之氣浮搬送裝置之噴氣構造體，係藉由空氣來 使薄板上浮以進行搬送，其特徵在於： 由配置於構造體最上部之編織金屬網、與配置於該 織金屬網下部且具有多孔性之補強構件所構成。 ^ 200918429 網下部之補強構件與該編 疊織金屬網或綾疊織金屬 較佳為，配置於該編織金屬 織金屬網相接合。 較佳為，該編織金屬網為平 網。 較佳為’該補強構件具有多層構造。 較佳為，於該補強構件之一個使用有穿孔金屬。 m 較佳為，該編織金屬網之網眼之有效開口尺寸為 〜200 // m。 μ f 又，本發明之氣浮搬送裝置之錢單元，其特徵在於 上述氣序搬达裝置之噴氣構造體；錢室，配設於 該喷氣構造體之下方，且由對兮哈 財耵4噴軋構造體之周邊部進行 固定之外壁所包圍；以及軸流 平田成風扇，用以將空氣送入該 氣室。 較佳為，於該噴氣室上具備用以除去該空氣中之塵埃 之過濾器。 ' 進而’本發明之氣浮搬送奘荖，廿&胤+ 丁狐适展置，其特徵在於具備：單 元群，並排設置有複數個該噴痛置；.^± 1礼早70，搬送輥，於該單元 群之兩側部之位置之該薄板的搬送方向上排列有複數個； 驅動手段，用以使該搬送親驅動；以及吸引單元，於該單 元群之兩側端面與該搬送輥之問 视 < 間’對该薄板之兩端部賦予 吸引力。 較佳為，該吸引單元具備.明备摄 开W 吸虱構造體，由配置於吸 入側最上部之編織金屬網 '與配置於該編織金屬網下部且 具有多孔性之補強構件所構成；吸引室，配設於該吸氣構 200918429 ia體之下方，且由對該吸氣構造體之周邊部進行固定之外 壁所包圍，以及軸流風扇，設置於該吸引室中且對空氣進 行吸引。 較佳為，於該軸流風扇處具備用以除去該空氣中之塵 埃之過濾器。 根據本發明，與使用在最上部具有較大之以上之 孔之材料的習知喷氣構造體相比，配置於最上部之編織金 屬網係網眼之有效開Π尺寸極小之構造，因此，對玻璃基 板碎片進行除去清掃時之維護作業變得容易。 々又’若使用本發明之喷氣單元，則與以f知之方式將 B加以連接並藉由大容量之鼓風機或壓縮機來供應空氣 ::形相比1需使用特別之空氣配管，因此，氣浮搬送 :、之製造變得容易。又，若具備軸流風扇，則可確保低 =低電力條件下之流量，因此，氣浮搬送裝置可節省能 源。又，可安靜地運轉。 進而，根據本發明之氣浮搬 之兩端部賦予吸引力之…、f 仏置對薄板 實地與搬送輥接觸。因：夠使薄板之兩端部確 而可縮短薄板之搬送時間搬送輕之加減速度，從 【實施方式】 氣浮I:::氣::送裝置之噴氣構造體可適用於如下之 與配置於該編織金;:下置:::有 200918429 藉由搬送輥來搬送該薄板。 此處，對本發明中所使用之用語之意思加以說明.。本 發明中，所謂氣浮搬送裝置，包括具備如下單元之裝置、 及具備該單元且還藉由搬送輥來進行搬送之裝置，該該單 兀係以非接觸之方式’使液晶顯示面板及電漿顯示面板等 之平板顯示器所使用之大型且非常薄的玻璃基板上浮支 撐。 f 所謂噴氣構造體，係指以能將噴氣單元之室内壓力空 氣朝單元上面薄板之下面側）供應之方式而具有多孔 性之構造體。 所謂薄板，係指如液晶顯示面板用之破璃基板或電裝 顯示器用之玻璃基板般之、厚度相對於縱橫尺寸極小且彎 曲量大之平板材料。 所謂搬送輥，係指對已受到空氣上浮支樓之玻璃基板 之兩端部的下面進行支撐並進行驅動搬送的旋轉體。 所謂編織金屬網，係指平織金屬網、綾織金屬網、平 =織金屬肖、及綾疊織金I網等。將編織金屬網用作多孔 :材料之理由在於，與樹脂製及陶兗製之多孔質材料相 口=織金屬網之價格低廉且變&(線#或網眼之有效開 寸）豐富，因此，易於設計上浮所需之空氣流量。 卜：謂平織金屬網’係指邊使縱線與橫線保持固定間 ^邊將縱線與橫線逐根交叉編織而成之金屬網。 織金屬網’係指邊使縱線與橫線保持固定間 m t母-根以上之縱線與橫線交又編織而成之金屬網。 200918429 所明平*4織金屬網，係指藉由以使橫線相接之方式排 列且逐根交又之編織方法，縱向之網眼少於橫向之網眼， 且縱線於筆直之狀態下進行編織而橫線以榻榻米表面之方 式相鄰並進行編織而成之金屬網。 所謂綾疊織金屬網，传扣^ , 薄』係私藉由以使橫線相接方式排列 且使每兩根以上之線彼此交替之編織方法，縱向之網眼少 於橫方向之網眼，且縱線於筆直之狀態下進行編織，橫線 以榻榻米表面之方式相鄰進行編織而成之金屬網。 —所謂具有多孔性之補強構件，係指用以增強配置於上 子側最上部之編織金屬網之強度 .^ 心涵度之具有多數個貫穿於板厚 方向之通氣孔的網狀體或板狀體。例如，該具有多孔性之 補強構件係指伸縮金屬、穿孔金屬、及金屬網。 所謂網眼之有效開σ尺寸，係指藉由使粒子透過由縱 :與:讀所形成之平面性網眼、與三維形狀之網眼的測 忒，例如粒子95%通過時之有效直徑。 人主t發明’作為將編織金屬網與補強構件加以結合之接 二二除了藉由黏著劑或熔接來進行結合之外，還可列 加工而使該編織金屬網與補強構件整體一體化 入：散接…所謂擴散接合係指固相接合法，該固相接 空或惰性氣體中，以不使母材溶融且於固相狀 LIU 性變形之程度’對該母材進行加熱與加壓 里占可韓Γΐ原盥子擴散，藉此進行接合。該擴散接合之優 结==’與炼接結合相比更為美觀’與點著劑相比， 、牛固且均勾，因此，結合之可靠性較高，且壓力 200918429 損耗之不均較小，從而# ^ 所神「 使二氣均勻地分散於整面上。 ^ ^ 層構化」，係指與最上部之編織 王屬，.罔相比，該有效開口 更大之金屬網重疊數片、A之編織金屬網或開口部 合而成之構i 1 歹1如2至5片左右），並加以接 错今^ 金屬組合於重疊有既定片數之該編 、屬網之構造而成的構造；於重聶有既+ 金屬網之構造，進—步重最/重疊有既疋片數之該編織 A ± ^ u ^ 且穿孔金屬而成的構造；或於重 f。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Lift up to transport the sheet. [Prior Art] Conventionally, in the air jet structure of the air-floating conveying device, in order to make the flow velocity or flow rate of the air from the air-jet portion of the air-transporting device (a plurality of discharge holes are formed at predetermined intervals), the flow rate or the flow rate is uniform over the entire surface. A porous material is disposed on the lower side of the discharge hole of the upper wall material (refer to the patent document 丨, 丨, Fig. 2) ° » The upper wall material is used to reinforce the porous material without rigidity and flatness. And protection. Fig. 11 is a schematic view showing the arrangement of the chamber ιοί as an air chamber and the porous material 102 and the upper wall member 1〇3 of the conventional air flotation conveying device F. Fig. η shows a state in which the pressure in the chamber 1〇1 is made uniform by the pressure loss of the porous material 102, and the glass substrate 1〇4 is uniformly floated by the air uniformly discharged as a whole. However, when the porous material 102 and the upper wall material 103 are floated and transported, when the glass substrate 104 is broken, as shown in FIG. 12, it is difficult to remove the fragments of the damaged substrate. 05 and the upper wall material is cleaned. 3 maintenance problems. That is, in the 'patent literature', for example, a metal plate is used as the upper wall material 103, the thickness of the metal plate is sufficient to generate a strength capable of supporting the suspended object, and at the predetermined interval on the metal plate The sawtooth 200918429 is formed with a plurality of small diameters, for example, air ejection holes H having a hole diameter of about 7 inches. Therefore, as shown in Fig. 12, in the conventional air-floating conveying device f, when the smashing 1G5 is removed, even if it is attempted to clean the debris (10) 'shards by the broom 1Q6 cleaning tool, it will enter the air blast hole H and it is difficult. Was completely removed. Further, at the both end portions of the air-floating and transporting glass substrate and a plurality of transports and reductions disposed on both sides of the glass substrate, the transport roller is rotated while the (4) portion of the light-supporting substrate is lifted. The glass substrate is transferred while being floated. However, by floating the glass substrate, the self-weight of the substrate carried by the transfer newspaper becomes extremely low. When the conveyance time is shortened, if the conveyance speed of the roller is increased or the conveyance speed is suddenly lowered, slippage occurs at the time of starting or stopping, and the positioning accuracy of the substrate is lowered. Therefore, there is a problem that the profit is improved ( Increasing the acceleration/deceleration rate of the transfer roller to the substrate (4) makes it difficult to shorten the transfer time. [Patent Document 1] Japanese Patent Application Laid-Open No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. The jet unit and the air flotation device including the same. The air-jet structure of the air-floating conveying device of the present invention is configured to float and transport the sheet by air, and is characterized in that it is disposed on the woven metal mesh disposed at the uppermost portion of the structure and disposed on the woven metal mesh. The lower part is made of a porous reinforcing member. ^ 200918429 The reinforcing member at the lower portion of the net and the woven metal mesh or the woven metal are preferably joined to the woven metal mesh. Preferably, the woven metal mesh is a flat mesh. Preferably, the reinforcing member has a multilayer construction. Preferably, a perforated metal is used for one of the reinforcing members. Preferably, the effective opening size of the mesh of the woven metal mesh is ~200 // m. Further, the money unit of the air-floating conveying device of the present invention is characterized in that the air-jet structure of the gas-sequence-transporting device; the money chamber is disposed below the air-jet structure, and is sprayed by the The peripheral portion of the rolled structure is surrounded by a fixed outer wall; and the axial flow is turned into a fan for feeding air into the air chamber. Preferably, the jet chamber is provided with a filter for removing dust in the air. ' Further' the air-floating transport of the present invention, 廿 & 胤 + Ding Hu Shi, which is characterized in that it has a unit group, and a plurality of such squirting pains are arranged side by side; a plurality of rollers are arranged in a conveying direction of the thin plate at a position of both sides of the unit group; a driving means for driving the conveying force; and a suction unit at the both end faces of the unit group and the conveying The problem of the roller < between the two sides gives attraction to both ends of the sheet. Preferably, the suction unit includes a clear-spray W suction structure, and is composed of a woven metal mesh disposed at the uppermost portion on the suction side and a reinforcing member disposed at a lower portion of the woven metal mesh and having porosity; The chamber is disposed below the suction structure 200918429 ia body, and is surrounded by a fixed outer wall of the suction structure, and an axial fan is disposed in the suction chamber to attract air. Preferably, the axial fan is provided with a filter for removing dust in the air. According to the present invention, the structure of the woven metal mesh mesh disposed at the uppermost portion has an extremely small opening size as compared with the conventional air jet structure using the material having the larger hole at the uppermost portion, and therefore, It is easy to perform maintenance work when the glass substrate chips are removed and cleaned.若 ' 'If the use of the jet unit of the present invention, the B is connected to the B and the air is supplied by a large-capacity blower or compressor: the shape requires a special air pipe to be used, therefore, the air float Transport: It is easy to manufacture. Moreover, if an axial fan is provided, the flow rate under low = low power conditions can be ensured, so that the air flotation device can save energy. Also, it can be operated quietly. Further, according to the present invention, the suction force is applied to both ends of the air-floating load, and the sheet is placed in contact with the conveyance roller. Because: the end of the thin plate can be shortened, the transfer time of the thin plate can be shortened, and the speed of the transfer can be shortened. [Embodiment] The air-jet structure of the air-float I::: gas:: delivery device can be applied to the following configuration. In the weaving gold;: lower::: 200918429 The sheet is conveyed by a conveying roller. Here, the meaning of the terms used in the present invention will be explained. In the present invention, the air-floating conveying device includes a device including the following means, and a device including the unit and transported by a conveying roller, and the unit is used to make the liquid crystal display panel and the electricity in a non-contact manner. A large and very thin glass substrate used for a flat panel display such as a slurry display panel is supported by a floating support. f The so-called "air-jet structure" refers to a structure having a porous structure in such a manner that the indoor pressure air of the air-jet unit can be supplied to the lower side of the thin plate on the unit. The term "thin plate" refers to a flat plate material such as a glass substrate for a liquid crystal display panel or a glass substrate for an electric display, and having a thickness which is extremely small with respect to the vertical and horizontal dimensions and a large amount of bending. The conveying roller is a rotating body that supports and drives the lower surface of both end portions of the glass substrate that has been subjected to the air floating support. The so-called woven metal mesh refers to a flat woven metal mesh, a woven metal mesh, a flat woven metal shawl, and a woven woven gold I mesh. The reason why the woven metal mesh is used as the porous material is that it is rich in the price of the porous material made of the resin and the ceramic enamel = the woven metal mesh is low and the ampere (the effective opening of the wire # or the mesh) is rich. Therefore, it is easy to design the air flow required for floating.卜: The plain woven metal mesh refers to a metal mesh in which the vertical and horizontal lines are fixed together, and the vertical and horizontal lines are woven together. The woven metal mesh refers to a metal mesh in which the vertical and horizontal lines are fixed, and the vertical and horizontal lines above the root and the root are woven. 200918429 The flat metal woven metal mesh is a weaving method in which the horizontal lines are arranged in a manner to be connected one by one, and the longitudinal mesh is smaller than the horizontal mesh, and the vertical line is in a straight state. A metal mesh which is woven and the horizontal line is adjacent to the tatami surface and woven. The so-called woven metal mesh, the buckle, the thin lining is a woven method in which the horizontal lines are arranged in a manner such that the two or more lines alternate with each other, and the longitudinal mesh is smaller than the horizontal mesh. And the vertical line is woven in a straight state, and the horizontal line is woven by a tatami surface adjacent to the metal mesh. - the term "reinforcing member having porosity" means the strength of the woven metal mesh for reinforcing the uppermost portion disposed on the upper side, and the mesh or plate having a plurality of vent holes penetrating the thickness direction of the plate. Shape. For example, the porous reinforcing member refers to a stretchable metal, a perforated metal, and a metal mesh. The effective opening sigma size of the mesh refers to the measurement of the particle diameter through the planar mesh formed by the longitudinal reading and the three-dimensional mesh, for example, the effective diameter when the particles pass 95%. In addition to the combination of the woven metal mesh and the reinforcing member, in addition to bonding by adhesive or welding, the woven metal mesh and the reinforcing member can be integrally integrated into the following: The term "diffusion bonding" refers to a solid phase bonding method in which the solid phase is emptied or inert gas, and the base material is heated and pressurized without melting the base material and at the extent of solid phase LIU deformation. The share of the original 盥 占 占 , , , , , , ,. The superiority of the diffusion bonding ==' is more beautiful than the combination of the refining and bonding. Compared with the pointing agent, the cow is solid and evenly hooked. Therefore, the reliability of the combination is high, and the unevenness of the loss of the pressure 200918429 is higher. Small, thus #^ The god "distributes the two gases evenly over the entire surface. ^ ^ Layer formation" means that the metal mesh of the effective opening is larger than the uppermost woven king. a number of pieces, a woven metal mesh of A or an opening made of i i 歹1, such as 2 to 5 pieces), and connected to the wrong metal, combined with a predetermined number of pieces of the structure of the woven mesh The structure is formed; the structure of the metal mesh is the same as that of the metal mesh, and the structure of the weave A ± ^ u ^ and the perforated metal is the most overlapped with the number of the slabs;
L 數之該編織金屬網與金屬網之構造，進一步重 之不均較小，從…氣用多層構造，壓力損耗 進行設計。項Μ地分散。又，易於對空氣流 所謂「於補強構件之—個使用穿孔金屬」， =屬單獨料㈣構件；切多㈣造之㈣構件之情 網之門與f孔金屬—併使㈣口部大於最上部之編織金屬 肩之開口部的金屬網。 「編織金屬網之網眼之有效開口尺寸為丨心〜細^ 1之理由在於，當該有效開口尺寸未達時，難以確 保使玻璃基板上浮所需之流量，且因此需要比較高之壓力^ 於網眼之有效開口尺寸超過2〇〇”之情形，當玻璃基 板碎裂時’細小之玻璃碎片會進入至喷氣部之孔，難以除 去已碎裂之玻璃。又，難以使室内之壓力均勻化。 所謂喷氣單元，係指具備喷氣構造體且使玻璃基板上 >予之單元。又’所謂噴氣單元，係指具備將空氣送入該喷 乳單元之轴流風扇之構成’或係指具備該軸流風扇與用以 200918429 除去空氣中之塵埃之過濾器之構成。 所謂用以除去空氣中之塵埃之過濾器，係指於無塵室 内用以抑制因驅動噴氣單元之風扇而產生之灰塵之裝置， 且較佳為 HEPA 過濾、器（High Efficiency Particulate AirThe L-number of the woven metal mesh and the metal mesh structure are further unevenly weighted, and are designed from a multi-layer structure with a pressure loss. The items are scattered. Moreover, it is easy to use the so-called "perforated metal in the reinforcing member", = a separate material (four) member; cut the (four) made (four) member of the love net door and the f-hole metal - and (4) the mouth is larger than the uppermost A metal mesh that woven the opening of the metal shoulder. "The reason why the effective opening size of the mesh of the woven metal mesh is 丨心〜细^1 is that when the effective opening size is not reached, it is difficult to ensure the flow required for the glass substrate to float, and therefore a relatively high pressure is required ^ In the case where the effective opening size of the mesh exceeds 2 〇〇", when the glass substrate is broken, fine glass fragments enter the hole of the air jet portion, and it is difficult to remove the broken glass. Moreover, it is difficult to make the pressure in the room uniform. The term "jet unit" means a unit having a jet structure and a glass substrate. Further, the term "jet unit" means a configuration including an axial fan that supplies air to the emulsion unit or a filter including the axial fan and a filter for removing dust from the air in 200918429. The filter for removing dust in the air means a device for suppressing dust generated by driving a fan of the jet unit in the clean room, and is preferably a HEPA filter (High Efficiency Particulate Air).
Filter’高效率微粒空氣過濾器：能除去99·7%以上之〇.3以 m之粒子的過濾器）、或ULPA過濾器（Ultra Low Penetration Air Filter，超低滲透空氣過濾器：能除去99·999%以上之 之粒子的過濾器）。再者’過濾器可安裝於室之外， 亦可内設於室中。 所謂室，係指用以於整個喷氣部中使供應至噴氣單元 内之空氣流量均勻化的空氣室、或將空氣吸引至吸引單元 内之空氣室。 以下，根據圖式對發明加以說明。圖1係表示本發明 之氣浮搬送裝置F之喷氣單元U之實施例的概略截面圖。 圖2係圖丨之噴氣部之放大圖，表示本發明之氣浮搬送裝 置？之喷氣構造體之概略截面圖。 圖1及圖2中，在固定於形成噴氣室丨之外壁w之上 面的噴氣構造體，藉由自空氣導入口 8所導入之空氣（已 利用則頭對空氣之流動進行了圖示），而使作為薄板之玻 璃基板4上浮。於上浮侧最上部配置編織金屬網3，於該上 '于側下部配置作為具有多孔性之補強構件2之穿孔金屬。 此處’編織金屬網3係使用疊織金屬網。疊織金屬網 與平織金屬網相比，係利用複數根金屬線材（橫絲線材叫 來支撐以車交大曲率彎曲之金屬線材（例如縱絲線材3珏）， 12 200918429 因此’不存在如—护 口部」（網眼w:::c金域屬網般之平面性「網眼之開 剛,Ht古日7：且趟 一維之開口 °Ρ (網眼），故而具有 剛性同且不易變形之 夕方4贫梂认沾 進而’褕絲線材3b以2點接觸 之方式山接於縱絲線材3a， 之2倍，@此，_“^、有之錢為—般4織金屬網 且織金屬網係最為緻密且牢固之金屬網。 圖3係表示氣浮搬 之柵略哉&胃^ I戒罝F之噴氧構造體之另一構造 之概略截面圖。圖3，於 、予“最上邛配置編織金屬網3， 於該上汙侧下部配置具 ^ ^ „ 性之補強構件2。此處之補強 構件成為金屬網2A與穿：?丨厶s⑽Λ 士 ,At 之積層構造。於本實施Filter' high-efficiency particulate air filter: filter that removes more than 99.7% of 〇.3 particles of m), or ULPA filter (Ultra Low Penetration Air Filter: ultra-low permeability air filter: can remove 99 · Filters for particles over 999%). Furthermore, the filter can be installed outside the chamber or can be built into the chamber. The term "chamber" means an air chamber for homogenizing the flow of air supplied to the air injection unit throughout the air jet portion, or an air chamber for drawing air into the suction unit. Hereinafter, the invention will be described based on the drawings. Fig. 1 is a schematic cross-sectional view showing an embodiment of a jet unit U of the air flotation conveying device F of the present invention. Fig. 2 is an enlarged view of the jet portion of the cymbal, showing the air-floating conveying device of the present invention? A schematic cross-sectional view of the jet structure. In Fig. 1 and Fig. 2, the air jet structure fixed to the upper surface w of the outer wall of the jet chamber is introduced by the air introduced from the air introduction port 8 (the flow of the air is illustrated by the head). The glass substrate 4 as a thin plate is floated. The woven metal mesh 3 is disposed on the uppermost portion of the upper floating side, and the perforated metal as the reinforcing member 2 having porosity is disposed on the upper side. Here, the woven metal mesh 3 uses a woven metal mesh. Compared with the plain woven metal mesh, the woven metal mesh uses a plurality of metal wires (the horizontal wire is called to support the metal wire bent by the vehicle with a large curvature (for example, the vertical wire 3 珏), 12 200918429 Therefore, 'there is no protection "Mouth" (mesh w:::c gold domain is a flat-like "web opening", Ht ancient day 7: and one-dimensional opening °Ρ (mesh), so it is rigid and not easy On the eve of the deformation, the 4th is poor and the 褕 进而 褕 褕 褕 褕 线 线 线 线 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕 褕The woven metal mesh is the most compact and strong metal mesh. Fig. 3 is a schematic cross-sectional view showing another structure of the gas blasting structure of the air blasting valve & stomach I I ring 。 F. Fig. 3, The woven metal mesh 3 is disposed at the topmost layer, and the reinforcing member 2 is disposed on the lower portion of the upper staining side. Here, the reinforcing member is a laminated structure of the metal mesh 2A and the wearer: 丨厶s(10) ,, At. In this implementation
形恶’使用平織金屬網來作A 勾J术1乍馮該金屬網2A，但於本發明， 該金屬網2A並不限定於該平織金屬網。 此處，作為將編織金屬網與補強構件加以結合之接合 手段’藉由燒結加工而使該編織金屬網與補強構件整體一 體化。 i. 藉此，與熔接結合相比更為美觀，與點著劑相比，結 合更為牢固且均勻，因此，壓力損耗之不均較小，從而使 空氣均勻地分散於整面上。 圖4表示除去本發明之實施形態之喷氣構造體中之玻 璃基板的碎片15之狀態。於噴氣構造體最上部不存在大於 1mm之孔，因此，與習知相比，極容易利用掃帚w之類之 知除工具來清掃並除去玻璃基板之碎片。 以下，對使用有該等構成之情形時之動作加以說明。 圖卜在固定於形成噴氣室】之外壁w之上面的嘴氣 13 200918429 而對作為薄板之玻璃基 構造體，藉由圖5所示之搬送輥R 板4進行搬送。 此時，如圖1所示，藉， 逆入办女 由軸机風扇7而自空氣導入口8 k入二矾，利用過濾器6 t , 术除去工虱中之塵埃，經過喷氣 織金屬網強構件2及配置於上浮«上部之編 :浮，3的空氣(以箭頭表示空氣之流向)使玻璃基板4 _ :者’對於本發明之氣浮搬送裝置F之喷氣"内之 藉由作為補強構件2之穿孔金屬及編織金屬網3 ^植，室内之壓力變得均句，藉由均勾喷出至整面 氧而使玻璃基板均勻上浮。 ^下’對使用有該噴氣構造體及喷氣單元u之氣浮搬 F加以說明。圖5係、表示使用有本發明之噴氣單元u 氣浮搬送裝置F之實施形態的概略側視圖。又，圖6係 氣浮搬送裝置F之實施形態之概略俯視圖。 · 圖5，於設置框架（未圖示）中排列有5個噴氣單元u， 各個噴氣單元U成為K丨心之構成H所排列之單 凡U之兩端具備搬送輥R，藉由搬送輥R之轉動而對 基板4進行搬送。此處，使各個喷氣單元u所具備之轴流 風扇7驅動之後，軸流風扇7送入空氣。已被過濾器6除 去塵埃之空氣經過喷氣室卜具有多孔性之補強構件2及配 置於上浮側最上部之編織金屬網3，從而使破螭基板4上 浮。以箭頭表示該空氣之流向。 進而，若使用本發明之喷氣單元U，則無需使用特別之 14 200918429 空氣配管’氣浮搬送裝4 F之製造變得容易，並且能確保 低麗、低電力條件下之流量，因此，氣浮搬送裝置F可節 省月b '原進而，由於具備軸流風扇，故而僅改變各單元之 軸流風扇之轉速，便可容易地對空氣流進行調整。 又，若使用軸流風扇，則可使用lkpa以下之較低之壓 縮空氣，因此，可抑制壓縮空氣源之電力而降低成本。又， 若使用軸流風扇，則可安靜地運轉。 再者，成為本發明之薄板之對象之玻璃基板的大小， 係自縱橫300mm左右至縱橫3m以上之尺寸，但本發明尤. 佳為應用於縱橫為2m以上之大型玻璃基板之用途。 其次，根據圖7〜圖10，對使用有該喷氣單元u之本 發明之氣浮搬送裝置F加以說明。 本實施形態之氣浮搬送裝置F具備：單元群G，於設置 框架（未圖示）並排設置有5台該喷氣單元u;搬送輥r， 於該單元群（}之_部Ga、Gb之位置之該薄板4的搬送 方向S上排列有複數個；驅動手段D，肖以使該搬送輕r 驅動；以及吸引單元V，於該單元群G之兩側端面Gia、The smear is made of a plain woven metal mesh for the A mesh, but in the present invention, the metal mesh 2A is not limited to the plain woven metal mesh. Here, as a joining means for joining the woven metal mesh and the reinforcing member, the woven metal mesh and the reinforcing member are integrally formed by sintering. i. Thereby, it is more aesthetically pleasing than the fusion bonding, and the bonding is more firm and uniform than the dispensing agent, so that the unevenness of the pressure loss is small, so that the air is uniformly dispersed over the entire surface. Fig. 4 shows a state in which the fragments 15 of the glass substrate in the air jet structure of the embodiment of the present invention are removed. Since there is no hole larger than 1 mm in the uppermost portion of the air jet structure, it is extremely easy to clean and remove the debris of the glass substrate by a known tool such as a broom w compared with the conventional one. Hereinafter, the operation when the configuration is used will be described. The nozzle is fixed to the mouth of the outer wall w of the forming of the jet chamber 13 200918429, and the glass base structure as a thin plate is conveyed by the conveying roller R plate 4 shown in Fig. 5 . At this time, as shown in Fig. 1, by means of the reverse machine, the fan is driven from the air inlet 8k into the second port, and the filter 6t is used to remove the dust from the workpiece and pass through the air-jet metal mesh. The strong member 2 and the arrangement of the upper part «upper part: float, 3 air (the direction of the air flow by an arrow) makes the glass substrate 4 _: the 'air jet of the air-floating conveying device F of the present invention' As the perforated metal and the woven metal mesh of the reinforcing member 2, the pressure in the room becomes uniform, and the glass substrate is uniformly floated by uniformly ejecting the entire surface oxygen. The lower part will be described with respect to the air floating movement F using the air jet structure and the air jet unit u. Fig. 5 is a schematic side view showing an embodiment in which the air-jet unit u air-floating conveying device F of the present invention is used. Fig. 6 is a schematic plan view showing an embodiment of the air flotation conveying device F. In Fig. 5, five jet units u are arranged in a mounting frame (not shown), and each of the jet units U is arranged in a K-shaped core. The ends of the U are provided with transport rollers R, and the transport rollers are provided by the transport rollers. The substrate 4 is transported by the rotation of R. Here, after the axial fan 7 provided in each of the jet units u is driven, the axial fan 7 sends air. The air which has been removed by the filter 6 passes through the jet chamber to have a porous reinforcing member 2 and a woven metal mesh 3 which is disposed at the uppermost portion of the floating side, thereby causing the broken substrate 4 to float. The direction of the air is indicated by arrows. Further, when the jet unit U of the present invention is used, it is not necessary to use the special 14 200918429 air piping, the air-floating conveyor 4 F is easy to manufacture, and the flow rate under low and low electric power conditions can be ensured. The conveying device F can save the month b'. Further, since the axial fan is provided, the air flow can be easily adjusted by changing only the rotational speed of the axial fan of each unit. Further, if an axial fan is used, a lower compressed air of lkpa or less can be used, so that the power of the compressed air source can be suppressed and the cost can be reduced. Moreover, if an axial fan is used, it can operate quietly. Further, the size of the glass substrate to be used for the sheet of the present invention is from about 300 mm in length to 3 m in length and width. However, the present invention is preferably applied to a large glass substrate having a width of 2 m or more. Next, the air-floating conveying device F of the present invention using the jet unit u will be described with reference to Figs. 7 to 10 . The air-floating conveying apparatus F of the present embodiment includes a unit group G, and five of the jet units u are arranged side by side in a installation frame (not shown); and the conveying roller r is in the unit group (the part of the unit group Ga, Gb) a plurality of positions are arranged in the transport direction S of the thin plate 4; the driving means D is configured to drive the transport light r; and the suction unit V is disposed on both end faces Gia of the unit group G,
Gib與該搬魏R之間，對該薄板4之兩端部賦予 吸引力。 該吸引單元V只要係對薄板4之兩端部4a、4b進行吸 引以提高與搬送輥R之接觸力（摩擦力）的構造，則於本 發明中無特別之限定，但於本實施形態，該吸引單元v由 吸氣構造體VI、配設於該吸氣構造體V1之下方之吸引室 、及該吸引室21所具備之吸引用轴流風扇。所構成。 15 200918429 孔之吸氣構造體V1 ’亦可使用形成有金屬網或通氣 :板材等，但於本實施形態，可設為 ： 使用之喷氣構造體相同之構成。亦即，該吸氣構造體;^ 入側最上部之編織金屬網3、與配置 由 網3下部且具有多孔性之補強構件2所構成。織金屬 該吸引室2丨可設為如下構造，即，由對該 νι之周邊部進行固定之外壁w 、化體 喷出口” 所包圍，且於下部形成有 …戶^又，於該喷出口…組裝有該軸流風扇22。， =風扇22只要係對线進行吸引之構成，則無特別Μ 進而’ ^本實施形態，與該噴氣單元u同樣地，㈣ 轴流風扇22處具備用以除去該空氣中之塵埃之過攄考Ζ 又，該搬送輥R之親軸R1轴頸支撐於轴承L該轴 ^5設置於固定框架24。又，於外周槽Μ設有彈性體， 例如肷設有〇形環26,以提高與薄板4接觸所產生之摩擦 力。而且’作為該搬送輥R之驅動手段D，於本發明中並 無特別之限定，但於本實施形態’為了確保潔淨度而使用 非接觸式之磁鐵驅動輸送機Μ。 該磁鐵驅動輸送機Μ構成為如下，使於各搬送輕尺之 輥間距配置有磁鐵31之i根驅動軸32’以配置於該驅動軸 端之馬達33驅動旋轉’從而使配置於與該驅動軸μ之上 部正交之方向上的各搬送較R之輥轴R1上所安裝:磁鐵 3 4從動旋轉。 例如’如圖10所示，該磁鐵S1之構造為，n極與s 16 200918429 極具有磁性之永久磁鐵以既定傾斜角呈螺旋狀設於該驅動 軸32之外周。又，該磁鐵34，係於該輥軸尺丨之外周上具 有與該磁鐵3 1相同之構造。 於該磁鐵31與磁鐵34之間存在間隙，當藉由兩個磁 鐵之間產生之磁力而使驅動軸3 2轉動時，搬送親R以非接 觸之方式而相對於驅動軸3 2轉動。 如以上之說明，由於本實施形態之氣浮搬送裝置F具 備吸引單元V，故而可使薄板4之兩端部物、仆與搬送輥 尺確實接觸，提高搬送時之摩擦力，因此，可提高搬送概汉 之加減速度，從而可縮短薄板4之搬送時間。 本申請案係根據在曰本於2007年8月24日提出申請 之特願2007-218205號、以及於2008年2月15日提出申請 之特願2008-033881號，其内容作為本案之内容而形成本案 之一部分。 又’根據本說明書之詳細說明，應當能進一步完全地 理解本發明。然而，詳細說明以及特定之實施例係本發明 之較佳實施形態，且係僅為了進行說明而揭示者。同業者 顯然能根據該詳細說明來進行各種變更及修改。 申請人並未意圖將所揭示之實施形態中之任一者對公 2讓出，在所揭示之修改及代替案中有可能在語言上不包 含於申請專利範圍内者亦為均等論下之發明之一部分。 於本說明書或申請專利範圍之揭示，只要無特別之指 不，或只要根據上下文之連貫性並不明確地否定，則名詞 及同樣之指代詞之使用應當解釋為包含單數及複數此兩 17 200918429 「等說月曰中所提供之任-例示或例示性之用語（例如 之使用，亦僅旨在便於對本發明進行說日月，只要 加限制。1_，則不會對本發明之範圍施 【圖式簡單說明】 圖1係表示本發明之氣浮搬送農置之噴氣單元之實施 例的概略截面圖。 |& ，圖係、圖1之噴氣部之放大圖，表示本發明之氣浮搬 达裝置之噴氣構造體之概略截面圖。 圖3係表示氣浮搬送裝置之噴氣部之另一構造之概略 圖4係本發明之氣浮搬送裝置之喷氣部之清掃時的截 面概略圖。 圖5係表不使用有本發明之噴氣單元之氣浮搬送裝置 之貝細例的概略側視圖。 圖6係表示使用本發明之噴氣單元之氣浮搬送襄置之 實施例的概略俯視圖。 圖7係表不本發明之實施形態之氣浮搬送裝置之概略 俯視圖。 圖8係圖7之概略側視圓。 圖9係將圖8之要部放大後之截面圖。 圖 係對圖9之搬送輥與驅動軸之磁鐵進行說明之 圖。 圖係$知之氣浮搬送裝置之喷氣部之截面概略圖。 18 200918429 圖1 2係習知之氣浮搬送裝置之喷氣部之清掃時的截面 概略圖。 【主要元件符號說明】 1 喷氣室 2 補強構件 3 編織金屬網 4 薄板 4a、4b 缚板之兩端部 6 ' 23 過濾、器 7 ' 22 軸流風扇 21 吸引室 21a 喷出口 26 0形環 31、34 磁鐵 32 驅動軸 33 馬達 D 驅動手段 F 氣浮搬送裝置 G 單元群 Ga、Gb 單元群之兩側部 Gla、Gib 單元群之兩側端面 M 磁鐵驅動輸送機 R 搬送輥 R1 搬送輥之輥軸 19 200918429 u 喷氣單元 V 吸引單元 VI 吸氣構造體 W、W1 外壁 20Between the Gib and the transferer R, the end portions of the thin plate 4 are attracted. The suction unit V is not particularly limited in the present invention as long as it is configured to attract the end portions 4a and 4b of the thin plate 4 to increase the contact force (frictional force) with the conveying roller R. However, in the present embodiment, The suction unit v includes an intake structure VI, a suction chamber disposed below the intake structure V1, and an axial fan for suction provided in the suction chamber 21. Composition. 15 200918429 The hole-intake structure V1' may be formed by forming a metal mesh or a ventilating plate or the like. However, in the present embodiment, the structure may be the same as that of the used air-jet structure. That is, the getter structure is composed of the woven metal mesh 3 at the uppermost portion of the entry side and the reinforcing member 2 having a porous portion disposed at the lower portion of the mesh 3. The woven metal can be configured such that the peripheral portion of the νι is surrounded by the outer wall w and the chemical discharge port, and the lower portion is formed with the lower portion. The axial fan 22 is assembled. If the fan 22 is configured to attract the wire, the fan 22 is not particularly defective. In the present embodiment, similarly to the jet unit u, the fourth axial fan 22 is provided. Further, the dust in the air is removed, and the shaft R1 of the conveying roller R is journaled on the bearing L. The shaft 5 is disposed on the fixed frame 24. Further, an elastic body such as 肷 is provided in the outer circumferential groove. The 〇 ring 26 is provided to increase the frictional force generated by the contact with the thin plate 4. Further, the driving means D as the conveying roller R is not particularly limited in the present invention, but in the present embodiment, "to ensure cleanliness" The conveyor Μ is driven by a non-contact type magnet. The magnet drive conveyor Μ is configured such that the i drive shaft 32 ′ of the magnet 31 is disposed at a roll pitch of each transfer weight to be disposed at the drive shaft end. The motor 33 drives the rotation 'so that the configuration is Each of the transport shafts 51 in the direction orthogonal to the upper portion of the drive shaft μ is mounted on the roller shaft R1 of R: the magnets 34 are driven to rotate. For example, as shown in Fig. 10, the magnet S1 is constructed such that n poles and s 16 200918429 A permanent magnet having a magnetic pole is spirally disposed at an outer circumference of the drive shaft 32 at a predetermined inclination angle. Further, the magnet 34 has the same configuration as the magnet 31 on the outer circumference of the roller shaft. There is a gap between the magnet 31 and the magnet 34. When the drive shaft 32 is rotated by the magnetic force generated between the two magnets, the transporting pro R rotates relative to the drive shaft 32 in a non-contact manner. As described above, since the air-floating conveying apparatus F of the present embodiment includes the suction unit V, the both ends of the thin plate 4 and the conveyance roller can be surely brought into contact with each other, and the frictional force at the time of conveyance can be improved, so that the conveyance can be improved. The acceleration and deceleration of the Han Dynasty can shorten the transportation time of the thin plate 4. This application is based on the special request 2007-218205 filed on August 24, 2007 and the application on February 15, 2008. Special wish 2008-033881, its content The present invention has been described in detail in the context of the present disclosure. The detailed description and specific embodiments of the present invention are intended to It is obvious that the same person can make various changes and modifications according to the detailed description. The applicant does not intend to give any of the disclosed embodiments to the public, in the modified and replaced cases disclosed. It is also possible that the language is not included in the scope of the patent application. It is also part of the invention under the singularity. The disclosure of this specification or the scope of the patent application, as long as there is no special reference, or as long as the context is not consistent The use of nouns and the same referenced pronouns shall be construed as including the singular and plural plural. The meanings of the singular and plural referents are used in the singular and plural terms. It is convenient to say the day and the month of the present invention as long as the limit is imposed. 1_, the scope of the present invention will not be described. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic cross-sectional view showing an embodiment of an air-floating and transporting agricultural unit of the present invention. Fig. 1 is a schematic cross-sectional view showing the air jet structure of the air flotation carrying device of the present invention. Fig. 3 is a schematic cross-sectional view showing another structure of the air-jet portion of the air-floating conveying device. Fig. 4 is a schematic cross-sectional view showing the air-jet portion of the air-floating conveying device of the present invention. Fig. 5 is a schematic side view showing a detail of a bellows conveying apparatus in which the jet unit of the present invention is not used. Fig. 6 is a schematic plan view showing an embodiment of an air-floating transporting apparatus using the air-jet unit of the present invention. Fig. 7 is a schematic plan view showing an air-floating conveying apparatus according to an embodiment of the present invention. Figure 8 is a schematic side view of Figure 7. Fig. 9 is a cross-sectional view showing an enlarged main portion of Fig. 8. The figure will be described with respect to the conveying roller of Fig. 9 and the magnet of the drive shaft. The figure is a schematic cross-sectional view of the air jet portion of the known air floating conveying device. 18 200918429 Fig. 1 2 is a schematic cross-sectional view showing the cleaning of the air jet portion of the conventional air-floating conveying device. [Description of main components] 1 Jet chamber 2 Reinforcement member 3 Braided metal mesh 4 Thin plates 4a, 4b Both ends of the binding plate 6 ' 23 Filter, 7 ' 22 Axial fan 21 Suction chamber 21a Ejection port 26 O-ring 31 34 Magnet 32 Drive shaft 33 Motor D Drive means F Air float conveyor G Unit group Ga, Gb Sides of the unit group Gla, Gib Unit group side end faces M Magnet drive conveyor R Transfer roller R1 Roller roller Shaft 19 200918429 u Jet unit V Suction unit VI Suction structure W, W1 Outer wall 20