TW200916753A - Method of measuring three-dimensional shape - Google Patents

Method of measuring three-dimensional shape Download PDF

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Publication number
TW200916753A
TW200916753A TW097138642A TW97138642A TW200916753A TW 200916753 A TW200916753 A TW 200916753A TW 097138642 A TW097138642 A TW 097138642A TW 97138642 A TW97138642 A TW 97138642A TW 200916753 A TW200916753 A TW 200916753A
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TW
Taiwan
Prior art keywords
measured
shape
probe
axis
axis direction
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TW097138642A
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Chinese (zh)
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TWI396825B (en
Inventor
Kenichiro Hatta
Hideki Tsutsumi
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Panasonic Corp
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Publication of TWI396825B publication Critical patent/TWI396825B/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/20Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/04Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring contours or curvatures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0242Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/025Testing optical properties by measuring geometrical properties or aberrations by determining the shape of the object to be tested
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/25Tubes for localised analysis using electron or ion beams
    • H01J2237/2505Tubes for localised analysis using electron or ion beams characterised by their application
    • H01J2237/2555Microprobes, i.e. particle-induced X-ray spectrometry
    • H01J2237/2577Microprobes, i.e. particle-induced X-ray spectrometry atomic

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)

Abstract

This invention provides a three-dimensional shape measurement method for obtaining high precision measuring data of an object to be measured which is even nonspheric. This three-dimensional shape measurement method scans the measured face of the object to be measured along a predetermined path with a probe movably supported in Z axis direction by a moving body which is driven in the direction of X and Y axes orthogonal to each other to measure the shape of the object to be measured. In case that a circle tangential to the facial shape of the object to be measured at a position on the surface of the object to be measured is obtained becomes an approximate circle with an intersectional point of the line drawn in the normal direction of the measured face of the object to be measured at every scanning position obtained from the acquired shape data of the object to be measured and the central line of the object to be measured as its center, the sampling pitch for obtaining the measured data of an object to be measured is calculated from the radius of such an approximate circle. Thereby, the measuring data can be obtained at a fixed pitch along the facial shape of the object to be measured can be obtained.

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200916753 九、發明說明: 【發明所屬之技術領域】 本發明係有關於一種三次元形狀測量方法’其掃描非 球面透鏡等之光學元件或模具等之被測量物的表面’並超 高精度地進行被測量物之形狀測量或粗糙度測量等。 【先前技術】 作爲掃描光學元件或模具等之被測量物的表面’並高 精度地測量被測量物之形狀的方法,已廣知利用三次元形 狀測量裝置。一般,三次元形狀測量裝置係一面使接觸式 或非接觸式的探針接近被測量物使兩者變成大致固定的距 離或大致固定的力之方式控制探針位置,一面使該探針沿 著該被測量物之測量面移動,並測量該被測量物的測量面 形狀。 如這種三次元形狀測量裝置之一係利用雷射測距器和 基準平面鏡的三次元形狀測量裝置,例如特開2006 一 1 05 7 1 7號公報已有揭示。茲利用第9圖說明此三次元形狀 測量裝置。 三次元形狀測量裝置20以使朝向X軸方向、γ軸方向 以及Z軸方向自由移動之原子間力探針5的前端追蹤設置 於平台1上之透鏡等被測量物2之測量面2a,並測量被測 暈物2的測量面形狀之方式構成。在此,於裝載被測量物 2之平台1之上’經由X工作台9及Y工作台丨〇之上放置 朝向X軸方向及Y軸方向自由移動的移動體3,並且移動 體3之上安裝有朝向Z軸方向自由移動之z軸移動體n, 200916753 而原子間力探針5則安裝於此Z軸移動體1 1上。再來,在 使移動體3朝向X軸方向、γ軸方向移動時,藉此z軸移 動體1 1及原子間力探針5朝向Z軸方向移動,而追蹤被測 量物2之測量面2 a的形狀,並可掃描原子間力探針5。 於平台1之上,經由支持部而配置X參照鏡、Y參照 鏡以及Z參照鏡,而且將雷射測距光學系統4設置於移動 體3 ’並根據已知的光干涉法,可分別測量以X參照鏡6 爲基準之探針5的X座標、以Y參照鏡7爲基準之探針5 ' 的γ座標以及Z參照鏡8爲基準之探針5的Z座標等探針 5的各座標。 以下說明這種三次元形狀測量裝置20之三次元形狀的 - 測量步驟。首先,將關於在被測量物2之測量面2 a的形狀 之設計資訊輸入附屬於三次元形狀測量裝置20之的計算 處理裝置。接著,使探針5以固定的測量壓力追蹤被測量 物2的測量面2 a,根據特開平2 - 2 5 4 3 0 7號公報所記載的 方法等’決定測量面2 a之中心。然後,在測量面2 a上, ί_ " 使探針5朝向二次元方向(X軸及γ軸方向)進行面掃描或 一次元方向(X軸方向或Υ軸方向)進行線掃描,並求得高 度方向資料(Ζ),而測量被測量物2之測量面2a的形狀。 在測量形狀時’預先設定沿著探針5的掃描方向之一 定的已固定之取樣間距’並對各取樣間距取得測量資料。 在此所指之探針5的掃描方向係指二次元方向(X軸及γ軸 方向)或一次元方向(X軸方向或γ軸方向),係χ—γ平面 上的移動距離。例如在朝向僅X軸方向之一次元方向進行 線掃描的情況,根據探針5朝向X軸方向所移動的距離對 200916753 各既定値取入測量資料。 如上述所示,在預設沿著探針5之掃描方向的取樣間 距後測量的情況,和被測量物2之形狀無關,根據固定的 取樣間距取得測量資料。即,即使在測量例如反射鏡般具 有接近平面之形狀的被測量物2的情況,或是在測量例如 透鏡般測量面的傾斜角具有超過6 0度之角度的被測量物2 的情況,都根據一樣(固定)之取樣間距取入測量資料。 可是,在此情況,在測量如反射鏡般具有接近平面之 形狀的被測量物2的情況,若將沿著探針5之掃描方向的 取樣間距固定爲既定値,被置換成沿著表面形狀的取樣間 距時亦根據固定的間隔取得測量資料,但是在測量如透鏡 般測量面的傾斜角具有超過例如60度之角度的被測量物2 的情況’將朝向探針5的行進方向以固定之間距所固定的 取樣問距’置換成沿著被測量物2之表靣形狀的取樣間距 時’根據以對X — Y平面之被測量物2的表面形狀之傾斜 所表示的傾斜角度,而實際上探針5移動之三次元的取樣 間距有所變化,傾斜角度愈大的部分,取樣間距變成愈大。 例如’思考朝向X軸方向進行線掃描而測量如第1 〇 圖所示半徑R = 5 mm的球面的情況。在此,一面使移動體3 朝向僅X軸一次元方向移動,一面利用探針5掃描的情況, 若設疋探針5之行進方向的X軸以s 0. 1 m m之等間距進行 取樣時,根據s’二sl’= S2,=…=sn’的條件取得測量資料。 在被測量物2之球面的頂點之傾斜角度比較小的附近,沿 著表面方向之間距s 1亦可看成約0 · 1 m m的間距。可是,從 頂點朝向X軸方向移動4.3 m m的情況,雖然被測量物表面 200916753 之傾斜角度變成約60度,但是將在該位置之取樣間距sn, 置換成沿著被測量物2之表面方向的間距sn時,間距sn 擴大至0.2 m m。這意指被測量物2之表面的傾斜角度愈大, 沿著表面之間距(移動量)變成愈寬,變成在實際之探針5 的移動有變動之狀態測量被測量物2的表面形狀,而測量 不佳。 作爲可應付這種不良之決定取樣間距的別種方法,例 如於特開2005 — 345 1 23號公報,記載因應於被測量物之表 面狀態的判定結果而決定參數的方法。 在此,表面狀態係指沿著探針的行進方向之該被測量 物表面的表面方向變化率、曲率半徑、粗糙度、起伏之至 少任一個,除了取樣間距以外,亦藉由因應於表面狀態的 判定結果而調整探針的行進速度等,導至測量時間的縮短 或測量精度的提高。 在專利文獻3,記載將係表面狀態之一的曲率半徑用 作決定取樣間距的參數,例如在將球面朝向X軸方向進行 線掃描並測量的情況,思考將係表面狀態之一的曲率半徑 用作決定取樣間距之參數的情況,因爲對係探針之行進的 X軸方向總是保持固定的曲率半徑,所以在將沿著表面之 掃描位置作爲座標的情況,可一面使沿著表面之取樣間距 變成定値一面測量。 可是,將如第11圖所示之具有非球面形狀的透鏡作爲 一例,思考朝向X軸方向進行線掃描並測量的情況,難沿 著表面形狀以固定的取樣間距取得測量資料。關於這一點 如以下所述。所舉例之透鏡具有以通過係頂點之原點的法 200916753 線爲中心軸之旋轉對稱的非球面形狀’而直徑爲1 9mm、Z 軸方向之變化量約3.5 mm的透鏡。求此透鏡在各掃描位置 之曲率半徑時,如第1 2圖所示,曲率半徑逐漸變化,中心 附近之曲率半徑係約1 6mm,而外周附近的曲率半徑變成約 8 m m,曲率半徑變化至約一半。在此,在第1 2圖的橫軸表 示非球面形狀之被測量物的徑向位置(座標)。根據該方法 所決定之取樣間距如第1 3圖所示,因爲因應於從Rmin至 Rmax之曲率半徑而逐漸變化,所以和接近中心之曲率半徑 ; 大的部分之取樣間距相比,遠離中心之曲率半徑小的部分 之取樣間距變小,而難沿著表面形狀以固定的取樣間距取 得測量資料。 在此,在第 13 圖,(1)在假設 Rmin = 8mm、Rmax=16mm、 取樣間距L m i η = 0 .1 m m、L m a X二0.2 m m的情況,及(2)在假設 R m i η = 8 m m ' R m a x = 1 6 m m ' 取樣間距 L m i n = 0.0 9 m m、 L m a x = 0 . 1 1 m m的情況,對第1 1圖所示之具有非球面形狀的 透鏡朝向X軸方向進行線掃描並測量時,變成在取樣間距 ( 如第14圖所示變化下進行測量。藉由改變取樣間距的設 定,雖然能以接近等間距的形狀測量,但是難沿著表面形 狀以固定的取樣間距取得測量資料。 如上述所示,在以往之測量方法,對於在光學元件或 模具等中具有非球面形狀的被測量物2,因爲無法沿著被 測量物2之表面形狀設定成固定的取樣間距,所以難高精 度地取得測量資料。 【發明内容】 本發明的目的在於提供一種三次元形狀測量方法’解 200916753 決上述之課題,其即使係被測量物具有非球面形狀者,亦 可極高精度地取得測量資料。 爲了解決上述之課題,本發明的三次元形狀測量方法 ’爲了對於取得測量資料之取樣間距,可從設計資料等之 被測量物的既得形狀資訊,沿著被測量物的表面形狀根據 固定的間隔而取得測量資料,逐次算出沿著探針之掃描方 向的取樣間距,並使用根據該値所決定的取樣間距而取得 測量資料。 即,其特徵爲:將從被測量物的既得形狀資訊所得之 在掃描上的各位置之被測量物的測量面之法線方向所畫的 直線、和被測量物之中心線的交點作爲中心,並將在被測 量物之表面上的位置和被測量物之表面形狀相切的圓作爲 近似圓,再從該近似圓的半徑,算出被測量物之測量資料 的取樣間距。 更詳細說明之,作爲可從設計資料等之被測量物的既 得形狀資訊,沿著被測量物的表面形狀根據固定的間隔而 取得測量資料之取樣間距的算出方法,係從在探針所掃描 之各位置的被測量物之表面形狀的傾斜角度、和在位置所 近似地求得之近似圓的半徑算出的方法。作爲求得近似圓 的方法,製作在探針所掃描之各位置的表面形狀之法線、 和從被測量物的設計資料等得知之通過被測量物的原點之 法線的交點,再以該點爲中心,將在被測量物之表面上的 各位置和表面形狀相切的圓決定爲近似圓。使用此近似圓的 半徑計算取得下一測量資料的位置’再從計算結果依序決定 -10- 200916753 係探針的掃描方向之χ - γ平面上的取樣間距下去。即, 以相當於近似圓之圓弧的部分之距離變成與沿著表面形狀 的距離相等之距離的方式算出中心角的角度’再根據該角 度,將從表面之位置沿著近似圓僅前進既定距離的位置作 爲下一取樣間距的點’而求得探針的取樣間距。藉此’可 設定成沿著被測量物之表面形狀的間距變成定値。 若依據本發明之三次元形狀測量方法,因爲即使在被 測量物之形狀爲非球面形狀的情況,亦能和測量位置之傾 斜角度無關,而沿著表面形狀以固定的取樣間距取入資料 ,所以可極高精度地取得測量資料。 【實施方式】 以下’一面參照圖面一面說明本發明之實施例的三次 元形狀測量方法。此外,關於此三次元形狀測量方法所使 用之三次元形狀測量裝置的構造,因爲係和第9圖所示之 以往的三次元形狀測量裝置一樣,所以省略其說明。又, 對三次元;形狀測量裝置之各構成元件賦予相同的符號。 使用第1圖所示之流程圖,說明本發明之三次元形狀 '測量方法°首先’向計算處理裝置輸入被測量物2的設計 資訊(包含有形狀資訊)、沿著χ 一 γ軸方向的速度、掃描範 圍1等之探針5的動作條件、以及沿著表面形狀之取樣間距 等(步驟S1~S3)。接著,作爲形狀測量的前階段,使探針5 以固定的測量壓力追蹤被測量物2的測量面,根據掃描被 '測量牧J 2之中心附近的結果和設計資料等之形狀資訊,決 定中心(步驟S 4)。決定中心後,進行形狀測量。此形狀測 200916753 量係根據所預設之速度等的動作條件,驅動X工作台9及 Y工作台10’而使移動體3朝向X—Y軸方向移動(步驟 S5),而該移動體3支持探針5朝向Z軸方向自由移動。因 而’追蹤被測重物2之Z軸方向的形狀變化,而使探針5 朝向Z軸方向移動(步驟S6)。將此時之X軸、γ軸、2軸 之各軸方向的座標値’根據預先所預設之取樣間距逐次取 得測量資料(步驟S7、S8)。 是那時之測星資料的取得方法,如第2圖所示,在取 得(輸入)被測量物2之設計資訊(步驟S 1丨)後,首先,在測 量前決定(輸入)沿著被測量物2之表面形狀的取樣間距(步 驟S 1 2 ),根據以沿著被測量物之表面形狀的間距所設定之 取樣間距s,預先置換成對朝向係探針之行進方向的χ 一 γ 軸方向所移動之距離的取樣間距s ’ ,在實際測量時根據 s’ ,並根據使探針5朝向X — γ軸方向所移動的距離,逐 次取得測量資料。 在此’對於在設定成以沿著被測量物2之表面形狀的 固定的取樣間距s取入測量資料的情況,說明被置換成朝 向係探針5之行進方向的χ一 γ軸方向所移動之距離的取 樣間距s ’之決定方法。首先’說明使探針5朝向僅χ軸方 向的一次元方向進行線掃描’而取得測量資料時的方法。 如第3圖所示’爲了決定被置換成朝向係探針5之行 進方向的X - Y軸方向所移動之距離的取樣間距s ’ ,首 先’想到從作爲沿著被測量物2之表面形狀的距離所設定 之取樣間距s、從設計資料等之被測量物2的既得表面形狀 資訊所計算之被測量物2的表面形狀之傾斜角度0 、以及 -12- 200916753 朝向表面形狀之切線方向所畫的直線求得取樣間距S ’的情 況。在此,對於使探針5朝向X軸方向進行線掃描並測量 的情況,說明該取樣間距s ’的算出方法。具體而言,首先, 對表面形狀的某位置畫切線。接著,從畫該切線的位置向 取得下一測量資料之位置的方向,求得切線之長度變成和 取樣間距s相等的位置,再將至此位置之探針5的移動距 離決定爲被置換成朝向X - Y軸方向所移動之距離的取樣 間距s ’。 即,若計算在被測量物2之傾斜角度爲0的位置之行 進方向的移動量(取樣間距)s ’,如下式之關係成立。 s! = s · c 〇 s Θ 從該數學式,因應於被測量物2的傾斜角度0 ,而可 從簡單的計算進行沿著行進方向之取樣間距S ’的設定。 可是,在根據該數學式而設定取樣間距S ‘的情況,所 取得之測量資料在被測量物2之傾斜角度愈大時沿著實際 之表面形狀的取樣間距變成愈大,而與所設定之取樣間距 的誤差變成愈大。例如,設想測量半徑5 mm之球面的情況。 作爲此時之條件,設想沿著X軸方向之僅一方向的線掃描 的情況,並設想將沿著表面形狀之取樣間距設定成0.1mm 並測量的情況。如第4圖所示,因爲隨著傾斜角度0變大, 而沿著表面形狀之實際的取樣間距s之誤差變大,所以即 使僅根據被測量物2之表面的傾斜角度Θ決定取樣間距 s ’,亦難進行沿著表面形狀之等間距的測量。 因此’在本發明之三次元形狀測量方法,除了使用該 被測量物2之表面的傾斜角度0而算出以外(步驟S 1 3),設 -13- 200916753 定在畫表面之切線的位置和表面形狀相切的近似圓’再使 用該近似圓的半徑R,進行被置換成朝向χ—γ軸方向所移 動之距離的取樣間距s,之計算(步驟S 1 4 ~ s 1 6)。因而,能以 更接近等間距測量(步驟s丨7)。 更詳細說明此方法,在此情況亦一樣,說明使探針5 朝向X軸方向進行線掃描並測量的情況。如第5圖所示, 首先’從被測量物2之設計資料等的形狀資訊’求得在表 面之位置(X i、Z,)的傾斜角度0 i。至此爲止和上述的方法 一樣。接著’參照在表面之位置(X,、Z i)的傾斜角度Θ ,, 求得法線方向的直線。又,求得通過被測量物2之原點的 被測量物2之中心線τ,再產生這2條直線的交點。將此 點作爲P i (0、Z。,),以這點p i爲中心,製作在被測量物2 之表面的位置(Χι、Z,)和被測量物2的表面相切的圓,並將 此圓作爲近似圓。因爲中心點P , ( 0、Z 0 ,)和表面的位置(X 1、 Z.)之距離成爲近似圓的半徑R,’ ,所以可從下式算出半徑[Technical Field] The present invention relates to a three-dimensional shape measuring method that scans the surface of an object such as an optical element or a mold such as an aspherical lens and performs it with high precision. Shape measurement or roughness measurement of the object to be measured. [Prior Art] As a method of scanning the surface of an object to be measured such as an optical element or a mold and measuring the shape of the object to be measured with high precision, it has been known to use a three-dimensional shape measuring device. Generally, the three-dimensional shape measuring device controls the position of the probe while the contact or non-contact probe is brought close to the object to be brought into a substantially fixed distance or a substantially fixed force, while the probe is placed along the probe. The measuring surface of the object to be measured moves, and the measuring surface shape of the object to be measured is measured. One such three-dimensional shape measuring device is a three-dimensional shape measuring device using a laser range finder and a reference plane mirror, and is disclosed, for example, in Japanese Laid-Open Patent Publication No. Hei. The three-dimensional shape measuring device will be described using Fig. 9. The ternary shape measuring device 20 traces the leading end of the interatomic force probe 5 that is freely movable in the X-axis direction, the γ-axis direction, and the Z-axis direction to the measuring surface 2a of the object 2 to be measured such as a lens provided on the stage 1, and The measurement is performed in such a manner as to measure the shape of the measuring surface of the measured smudge 2. Here, on the platform 1 on which the object 2 is loaded, 'the moving body 3 that is freely moved in the X-axis direction and the Y-axis direction is placed over the X table 9 and the Y table ,, and above the moving body 3 A z-axis moving body n that is free to move in the Z-axis direction is mounted, and 200916753 is attached to the Z-axis moving body 1 1 . When the moving body 3 is moved in the X-axis direction and the γ-axis direction, the z-axis moving body 1 1 and the inter-atomic force probe 5 are moved in the Z-axis direction, and the measuring surface 2 of the object 2 is tracked. The shape of a, and can scan the interatomic force probe 5. On the platform 1, the X reference mirror, the Y reference mirror, and the Z reference mirror are disposed via the support portion, and the laser ranging optical system 4 is disposed on the moving body 3' and can be separately measured according to a known optical interference method. The X coordinate of the probe 5 based on the X reference mirror 6, the γ coordinate of the probe 5' based on the Y reference mirror 7, and the probe 5 such as the Z coordinate of the probe 5 based on the Z reference mirror 8 are used. coordinate. The measurement step of the three-dimensional shape of the three-dimensional shape measuring device 20 will be described below. First, design information about the shape of the measuring surface 2a of the object 2 to be measured is input to the calculation processing device attached to the three-dimensional shape measuring device 20. Then, the probe 5 is caused to follow the measurement surface 2a of the object 2 by a fixed measurement pressure, and the center of the measurement surface 2a is determined in accordance with the method described in Japanese Laid-Open Patent Publication No. Hei 2 - 2 5 4 3 7 or the like. Then, on the measuring surface 2a, ί_ " the probe 5 is scanned in the direction of the secondary element (X-axis and γ-axis directions) or in the primary direction (X-axis direction or Υ-axis direction), and The height direction data (Ζ) is obtained, and the shape of the measurement surface 2a of the object 2 to be measured is measured. When the shape is measured, 'the fixed sampling pitch along the scanning direction of the probe 5' is set in advance and the measurement data is acquired for each sampling interval. The scanning direction of the probe 5 referred to herein means the secondary direction (X-axis and γ-axis direction) or the primary direction (X-axis direction or γ-axis direction), and the moving distance in the χ-γ plane. For example, in the case of performing line scanning in the primary direction only in the X-axis direction, the measurement data is taken in accordance with the distance moved by the probe 5 in the X-axis direction for each of the predetermined numbers of 200916753. As described above, the measurement is performed after the sampling interval along the scanning direction of the probe 5 is preset, and the measurement data is acquired based on the fixed sampling interval regardless of the shape of the object 2 to be measured. That is, even in the case of measuring the object 2 having a shape close to a plane like a mirror, or in the case of measuring the object 2 having an angle of, for example, a lens-like measuring surface having an angle of more than 60 degrees, The measurement data is taken in according to the same (fixed) sampling interval. However, in this case, in the case of measuring the object 2 having a shape close to a plane like a mirror, if the sampling pitch along the scanning direction of the probe 5 is fixed to a predetermined 値, it is replaced along the surface shape. The sampling interval is also obtained based on the fixed interval, but in the case of measuring the inclination angle of the measuring surface such as a lens having an angle of more than, for example, 60 degrees, the object 2 will be fixed toward the traveling direction of the probe 5. When the sampling distance fixed by the pitch is 'replaced into the sampling pitch along the shape of the surface of the object 2 to be measured', the angle of inclination expressed by the inclination of the surface shape of the object 2 to be measured on the X-Y plane is actually The sampling interval of the three-dimensional element of the upper probe 5 is changed, and the larger the inclination angle is, the larger the sampling pitch becomes. For example, 'Thinking about performing a line scan toward the X-axis direction and measuring a spherical surface with a radius R = 5 mm as shown in Fig. 1 '. Here, when the moving body 3 is moved in the unitary direction of the X-axis only while the probe 5 is being scanned, if the X-axis of the traveling direction of the probe 5 is set to be equally spaced by s 0. 1 mm. The measurement data is obtained according to the condition of s' two sl'= S2, =...=sn'. In the vicinity of the inclination angle of the apex of the spherical surface of the object 2 to be measured, the distance s 1 along the surface direction can also be regarded as a pitch of about 0 · 1 m m . However, when the apex moves toward the X-axis direction by 4.3 mm, although the inclination angle of the object surface 200916753 becomes about 60 degrees, the sampling pitch sn at the position is replaced with the surface direction of the object 2 to be measured. When the pitch is sn, the pitch sn is expanded to 0.2 mm. This means that the larger the inclination angle of the surface of the object 2 to be measured, the wider the distance (movement amount) along the surface becomes, and the surface shape of the object 2 is measured in a state where the movement of the actual probe 5 is changed. The measurement is not good. As a method of determining the sampling pitch of such a defect, a method of determining a parameter in accordance with the determination result of the surface state of the object to be measured is described in Japanese Laid-Open Patent Publication No. 2005-345 1-23. Here, the surface state refers to at least one of the surface direction change rate, the radius of curvature, the roughness, and the undulation of the surface of the object to be measured along the traveling direction of the probe, in addition to the sampling pitch, and also by the surface state As a result of the determination, the traveling speed of the probe or the like is adjusted to lead to a shortening of the measurement time or an improvement in the measurement accuracy. Patent Document 3 describes that the radius of curvature of one of the surface states is used as a parameter for determining the sampling pitch. For example, when the spherical surface is scanned and measured in the X-axis direction, it is considered that the radius of curvature of one of the surface states is used. In the case of determining the parameters of the sampling pitch, since the X-axis direction of the traveling of the probe always maintains a fixed radius of curvature, the sampling along the surface can be performed while the scanning position along the surface is used as a coordinate. The pitch becomes a fixed side measurement. However, as an example of a lens having an aspherical shape as shown in Fig. 11, it is considered that the line scanning is performed in the X-axis direction and measurement is performed, and it is difficult to obtain measurement data at a fixed sampling pitch along the surface shape. This is as follows. The lens exemplified has a lens having a rotationally symmetrical aspherical shape ' with a center line of the origin of the apex of the system, and a diameter of 19 mm and a variation of about 3.5 mm in the Z-axis direction. When the radius of curvature of the lens at each scanning position is obtained, as shown in Fig. 2, the radius of curvature gradually changes, the radius of curvature near the center is about 16 mm, and the radius of curvature near the outer periphery becomes about 8 mm, and the radius of curvature changes to About half. Here, the horizontal axis of Fig. 2 shows the radial position (coordinate) of the object to be measured having an aspherical shape. The sampling interval determined according to the method is as shown in Fig. 3, because it gradually changes in accordance with the radius of curvature from Rmin to Rmax, so it is far from the center compared with the radius of curvature near the center; The sampling pitch of the portion having a small radius of curvature becomes small, and it is difficult to obtain measurement data at a fixed sampling pitch along the surface shape. Here, in Fig. 13, (1) assumes that Rmin = 8 mm, Rmax = 16 mm, sampling interval L mi η = 0.1 mm, L ma X = 0.2 mm, and (2) assumes R mi η = 8 mm ' R max = 1 6 mm ' When the sampling distance L min = 0.0 9 mm and L max = 0 . 1 1 mm, the lens having the aspherical shape shown in Fig. 1 is oriented in the X-axis direction. When the line is scanned and measured, it becomes measured at the sampling pitch (as shown in Fig. 14. By changing the setting of the sampling pitch, although it can be measured in a shape close to the equidistance, it is difficult to perform a fixed sampling along the surface shape. As described above, in the conventional measurement method, the object 2 having an aspherical shape in an optical element, a mold, or the like cannot be set to a fixed sampling along the surface shape of the object 2 to be measured. In addition, it is difficult to obtain measurement data with high precision. SUMMARY OF THE INVENTION An object of the present invention is to provide a method for measuring a three-dimensional shape, which solves the above-mentioned problem, and even if the object to be measured has an aspherical shape, The measurement data is obtained with high precision. In order to solve the above problems, the three-dimensional shape measurement method of the present invention can obtain the obtained shape information of the object to be measured, such as the design information, from the measurement object, along the object to be measured. The surface shape acquires measurement data according to a fixed interval, successively calculates a sampling pitch along the scanning direction of the probe, and obtains measurement data using a sampling interval determined according to the enthalpy. That is, it is characterized in that it will be measured. The acquired shape information of the object is obtained by centering on the intersection of the straight line drawn by the normal direction of the measuring surface of the object to be measured at each position on the scanning and the center line of the object to be measured, and will be on the surface of the object to be measured. The circle whose position is tangent to the surface shape of the object to be measured is an approximate circle, and the sampling pitch of the measurement data of the object to be measured is calculated from the radius of the approximate circle. More specifically, it can be measured from design data or the like. The acquired shape information of the object, and the sampling interval of the measurement data is obtained according to the surface shape of the object to be measured according to a fixed interval. The calculation method is a method of calculating the inclination angle of the surface shape of the object to be measured at each position scanned by the probe, and the radius of the approximate circle obtained by the position approximated. The normal line of the surface shape at each position scanned by the probe, and the intersection point of the normal point passing through the origin of the object to be measured, which is known from the design data of the object to be measured, and then centered on the point, will be measured The circle on each surface of the object and the shape of the surface are tangent to the approximate circle. The radius of the approximate circle is used to calculate the position of the next measurement data'. The calculation results are sequentially determined. -10- 200916753 Probe scanning The direction of the χ - the sampling interval on the gamma plane goes down. In other words, the angle of the central angle is calculated such that the distance from the portion corresponding to the arc of the approximate circle becomes the distance equal to the distance along the surface shape, and based on the angle, the position from the surface is only advanced along the approximate circle. The position of the distance is taken as the point ' of the next sampling interval' to determine the sampling interval of the probe. Thereby, it can be set to become a constant pitch along the pitch of the surface shape of the object to be measured. According to the three-dimensional shape measuring method of the present invention, since the shape of the object to be measured is aspherical, it is possible to take in data at a fixed sampling interval along the surface shape regardless of the inclination angle of the measurement position. Therefore, measurement data can be obtained with extremely high precision. [Embodiment] Hereinafter, a three-dimensional shape measuring method according to an embodiment of the present invention will be described with reference to the drawings. Further, the structure of the three-dimensional shape measuring device used in the three-dimensional shape measuring method is the same as that of the conventional three-dimensional shape measuring device shown in Fig. 9, and therefore the description thereof will be omitted. Further, for the three-dimensional element, the constituent elements of the shape measuring device are given the same reference numerals. The three-dimensional shape 'measurement method of the present invention is first used to input design information (including shape information) of the object 2 to be measured, along the γ-axis direction, using the flowchart shown in FIG. The operating conditions of the probe 5 such as the speed, the scanning range 1, and the like, and the sampling pitch along the surface shape (steps S1 to S3). Next, as the pre-stage of the shape measurement, the probe 5 is caused to track the measurement surface of the object 2 with a fixed measurement pressure, and the center is determined based on the shape of the result near the center of the measurement and the design data. (Step S4). After determining the center, shape measurement is performed. The shape measurement 200916753 is based on the predetermined operating conditions such as the speed, and drives the X table 9 and the Y table 10' to move the moving body 3 in the X-Y axis direction (step S5), and the moving body 3 The support probe 5 is free to move in the Z-axis direction. Therefore, the shape of the measured weight 2 in the Z-axis direction is tracked, and the probe 5 is moved in the Z-axis direction (step S6). The coordinates 値' in the respective axial directions of the X-axis, the γ-axis, and the 2-axis at this time are successively obtained as measurement data in accordance with the sampling interval preset in advance (steps S7, S8). It is the method of obtaining the star data at that time. As shown in Fig. 2, after obtaining (inputting) the design information of the object 2 to be measured (step S1丨), first, it is determined (input) along the The sampling pitch of the surface shape of the measuring object 2 (step S 1 2 ) is preliminarily replaced with χ γ to the traveling direction of the probe according to the sampling pitch s set at a pitch along the surface shape of the object to be measured. The sampling interval s ' of the distance moved in the axial direction is obtained by taking the measurement data sequentially according to s' in the actual measurement and according to the distance moved by the probe 5 toward the X-γ axis direction. Here, the case where the measurement data is taken in at a fixed sampling pitch s set along the surface shape of the object 2 is described as being shifted in the γ-axis direction which is displaced toward the traveling direction of the probe 5 The method of determining the sampling interval s ' of the distance. First, a method of obtaining a measurement data by linearly scanning the probe 5 in the primary direction of the x-axis direction will be described. As shown in Fig. 3, 'in order to determine the sampling pitch s ' of the distance moved in the X-Y axis direction toward the traveling direction of the probe 5, first, it is thought of as the surface shape along the object 2 to be measured. The sampling interval s set by the distance, the inclination angle 0 of the surface shape of the object 2 to be measured calculated from the acquired surface shape information of the object 2 such as the design data, and the tangential direction of the surface shape of -12-200916753 The drawn line finds the sampling interval S '. Here, a method of calculating the sampling pitch s' will be described for the case where the probe 5 is subjected to line scanning in the X-axis direction and measured. Specifically, first, a tangent is drawn to a certain position of the surface shape. Then, from the position where the tangent is drawn to the direction in which the next measurement data is obtained, the length of the tangent is determined to be equal to the sampling pitch s, and the moving distance of the probe 5 to the position is determined to be replaced by the orientation. The sampling interval s ' of the distance moved by the X-Y axis direction. In other words, when the amount of movement (sampling pitch) s ' in the traveling direction of the position where the inclination angle of the object 2 is 0 is calculated, the relationship of the following expression holds. s! = s · c 〇 s Θ From this mathematical expression, the sampling interval S ′ along the traveling direction can be set from a simple calculation in accordance with the inclination angle 0 of the object 2 to be measured. However, in the case where the sampling interval S′ is set according to the mathematical expression, the larger the inclination angle of the measured material to be measured 2 becomes, the larger the sampling pitch along the actual surface shape becomes, and the set The error in the sampling pitch becomes larger. For example, consider the case of measuring a spherical surface with a radius of 5 mm. As a condition at this time, a case of scanning in a line in only one direction along the X-axis direction is assumed, and a case where the sampling pitch along the surface shape is set to 0.1 mm and measured is assumed. As shown in Fig. 4, since the error of the actual sampling pitch s along the surface shape becomes larger as the inclination angle 0 becomes larger, the sampling interval s is determined even based on the inclination angle Θ of the surface of the object 2 to be measured. 'It is also difficult to make measurements of equal spacing along the surface shape. Therefore, in the three-dimensional shape measuring method of the present invention, except that the inclination angle 0 of the surface of the object 2 to be measured is used (step S1 3), it is assumed that the position and surface of the tangent of the drawing surface are set to be -13-200916753. The approximate circle tangentially shaped 'the radius R of the approximate circle is used to calculate the sampling pitch s displaced by the distance moved toward the χ-γ axis direction (step S 1 4 to s 16). Therefore, it can be measured at a closer interval (step s丨7). The method will be described in more detail, and in this case as well, the case where the probe 5 is subjected to line scanning and measurement in the X-axis direction will be described. As shown in Fig. 5, first, the inclination angle 0 i at the position (X i, Z,) of the surface is obtained from the shape information of the design data of the object 2 to be measured. So far, the same method as above. Then, with reference to the inclination angle Θ at the position (X, Z i ) of the surface, a straight line in the normal direction is obtained. Further, the center line τ of the object 2 passing through the origin of the object 2 is obtained, and the intersection of the two lines is generated. Taking this point as P i (0, Z., ), a circle tangent to the surface of the object 2 to be measured is made at the position (Χ, Z, Z) of the surface of the object 2 to be measured, and Use this circle as an approximate circle. Since the distance between the center point P, (0, Z 0 ,) and the position of the surface (X 1 , Z.) becomes the radius R,' of the approximate circle, the radius can be calculated from

Ri,。 R>’= Xi/sin0 i 當作此圓可近似地表示被測量物2的形狀,以相當於圓弧 之部分的距離變成與作爲沿著表面形狀之距離所設定的取 樣間距同一距離的方式算出角度〇:。取樣間距s、近似圓半 徑R’以及角度α具有如下之關係。 S= R,- α 根據依此方式所算出之角度α,從表面的位置(X ·、ζ;} 沿著半徑R,之圓前進僅距離s的位置爲下一取樣間距的點 (X…、Z, +,),並求得此値。因爲此位置和被測量物之表面 -14- 200916753 的位置嚴格上有偏差,所以將x (的座標設爲取得下一測量 資料的點。依此方式’被置換成朝向X 一 Y軸方向所移動 之距離的取樣間距S,變成下式, S 9 = X i + I — X i 藉由依序重複此計算下去,而可決定被置換成朝向X-γ 軸方向所移動之距離的取樣間距s ’ 。 在此’將具有如第1 1圖所示之非球面形狀的透鏡作爲 被測量物2的一例,設想朝向X軸方向進行線掃描並測量 的情況。被列舉爲此被測量物2之一例的透鏡,具有以通 過係頂點之原點的法線爲中心軸之旋轉對稱的非球面形 狀。具有這種形狀之被測量物2,因爲通過原點的法線和 中心軸一致,所以近似圓的中心變成(〇、Z。i)。 該表面座標(X:、Z,)若以近似圓之中心爲原點之新的座 標思考,則變成(R,’,Sin S 、R,,. cos 9 )。在思考以近似半 徑之中心爲原點的角度α之旋轉的情況,如下之取樣位置 的計算式變成下式。Ri,. R>'= Xi/sin0 i as this circle can roughly represent the shape of the object 2 to be measured, and the distance corresponding to the portion of the arc becomes the same distance as the sampling pitch set as the distance along the surface shape. Calculate the angle 〇:. The sampling pitch s, the approximate circular radius R', and the angle α have the following relationship. S= R, - α According to the angle α calculated in this way, from the position of the surface (X ·, ζ; } along the radius R, the circle advances only the position of the distance s is the point of the next sampling interval (X... , Z, +,), and find this. Because this position is strictly different from the position of the surface of the object to be measured-14-200916753, the coordinate of x is set to the point at which the next measurement data is obtained. In this way, the sampling interval S, which is replaced by the distance moved in the X-Y-axis direction, becomes the following expression, and S 9 = X i + I - X i is repeated by sequentially repeating this calculation, and it can be decided to be replaced by the orientation. The sampling interval s ' of the distance moved by the X-γ axis direction. Here, as an example of the object 2 having the aspherical shape shown in FIG. 1 , it is assumed that the line scan is performed in the X-axis direction. In the case of the measurement, the lens which is exemplified as one of the objects to be measured 2 has a rotationally symmetrical aspherical shape centered on the normal line passing through the origin of the apex of the system. The object 2 having such a shape is because The center of the origin is changed by the normal of the origin and the central axis. (〇, Z.i). If the surface coordinates (X:, Z,) are considered as new coordinates with the center of the circle as the origin, then (R, ', Sin S , R,,. cos 9 ) In the case of thinking about the rotation of the angle α with the center of the approximate radius as the origin, the calculation formula of the sampling position as follows becomes the following formula.

cosa -sin a Ri-sin Θ A, _ sin a oosa _Ri- oosO 在此,從自上式所導出的表面座標X i + 1,和上述一樣地求 得在表面座標X , +,之被測量物2的近似圓之曲率半徑及傾 斜角度,再根據此値決定下一取樣位置X , w下去。依序重 複這種計算下去,藉由據此預先變換成沿著X — Y軸方向 的間距後測量,而能以更接近等間距取得測量資料。 在依此方式決定取樣間距時,關於和沿著非球面之表 -15- 200916753 面形狀的間距之誤差,一面和習知例比較一面圖示於第6 圖。在此,將具有第1 1圖所示之非球面形狀的透鏡作爲被 測量物2的對象,係具有以通過係頂點之原點的法線爲中 心軸之旋轉對稱的非球面形狀,而直徑爲1 9mm、Z軸方向 之變化量約3.5 mm的透鏡。對於進行沿著X軸方向之僅一 方向的線掃描之情況檢討探針5的掃描方法。在第6圖之 習知例(1 ),係預先以定値設定沿著係探針5之掃描方向的 X軸方向之取樣間距,並對各取樣間距取得測量資料之以 往的方法,係將取樣間距固定爲〇. 1 mm並取得測量資料時 的結果。習知例(2),係從被測量物之表面的曲率半徑一面 改變取樣間距一面取得測量資料的方法,係在將第1 3圖之 0又疋値設定爲 Rmin:=8mm、Rmax = 16mm、取樣間距 Lmin = 0.〇9mm ' Lmax = 0. 1 1mm If R ^ M% S'J M % S ^ B 果。丽’在設定沿著表面形狀之取樣間距時以該方法變換 成沿著X - Y軸方向之間距後取得測量資料的情況,在測 量具有非球面形狀之透鏡時,實際上由於測量資料取得位 ®的誤差’而發生奈米等級的誤差,但是能以大致固定的 間距高精度地取得測量資料。 又’關於該測量方法的說明,雖然說明如使探針5和 X軸平行地移動,或者使探針5和γ軸平行地移動般使探 針5朝向僅一方向掃描之線掃描測量的情況,但是亦可適 用於其他的掃描方法,首先’作爲第1種方法,如第7 (a)、 (b)圖所不’有藉由圓周狀地重複測量而掃描表面形狀的方 法。此測量在測量和與χ 一 γ軸方向彼此正交之z軸平行 地具有旋轉對稱軸,並具有以該軸爲中心之旋轉對稱的形 -16- 200916753 狀之被測量物2的情況,係有效的測量方法。在此測量, 探針5以旋轉對稱軸爲中心,如畫圓般地移動,根據所預 設之取樣間距而取得測量資料。此時所設定之取樣間距, 亦可係設定成探針5之朝向X - Y軸方向的移動距離變成 定値’或者也可以預先將取樣間距設定成將探針5朝向X 一 Y軸方向移動之軌跡所畫的圓進行等分割之方法。若繞 完1圈’沿著探針5移動之軌跡所畫的圓之法線方向僅移 動定量’然後’又一面如探針5之軌跡畫圓般掃描一面取 得測量資料下去。將此時沿著探針5移動之軌跡所畫的圓 之法線方向僅移動定量的量稱爲進給量。在探針5僅移動 進給量後’又和剛才一樣地如繞原點畫圓般將X工作台9 及Y工作台10移動下去。 在此測量的情況,作爲係朝向在掃描時所製作之圚的 法線方向之移動量的進給量,藉由利用上述之算出取樣間 距的方法而設定因應於傾斜角度的進給量,而可沿著被測 量物2的表面形狀設定固定的進給量。 作爲具體的方法,使圓周狀地掃描時之起點從X軸上 之+側開始’在X — Y平面上進行朝向反時鐘方向畫圓的掃 描。在繞1圈後至探針5再移至X軸上的時刻,使其僅移 動既定之進給量,又,從X軸上之+側開始圓周上的掃描, 而在此時之進給量的決定,係由根據在此X軸上之起點的 決定’將從被測量物2之傾斜角度和近似圓所算出的量決 定爲進給量。利用此方法,例如在X _ Z平面製作截面的情 況’將截面上之測量位置相連下去時,和上述之工作台僅 -17- 200916753 朝向軸向移動時一樣’可沿著表面形狀以固定的取樣間距 取入測量資料。 接著’作爲第2種方法’例如如第8圖所示,在γ軸 方向固定之狀態使探針5僅朝向X軸方向移動,並根據所 預設之取樣間距而取得測量資料。若既定之區間的測量結 束’使探針5朝向Y軸方向僅移動定量。將此移動量稱爲 進給量。然後’和剛才一樣,重複地使探針5朝向χ軸方 向移動並測量下去。 關於此時之取樣間距的決定方法,例如在第8圖的情 況’在通過掃描時所製作之線段的χ 一 Ζ平面製作截面,藉 由求得在該截面上所算出之傾斜角度和近似圓的半徑,而 可決定在各線段上之取樣間距下去。 又’關於此時的進給量,和上述之圓周狀地測量之第 1種方法一樣,亦可利用上述之算出取樣間距的方法而決 定對應於傾斜角度的進給量。 此外’上述實施例,雖然說明在既得設計資訊上使用 設計資料之形狀資訊的情況,但是未限定如此,亦可在既 得設計資訊上使用藉由測量被測量物而得到之形狀資料的 資訊。 本發明之三次元形狀測量方法,除了三次元形狀測量 裝置以外’亦可利用於表面粗糙度測量機等。 【圖式簡單說明】 第1圖係用以說明本發明之實施例的三次元形狀測量 方法之流程圖。 -18- 200916753 第2圖係本發明的實施形態之決定用以沿著表面形狀 以固定間隔取得測量資料的取樣間距之流程圖。 第3圖係示意地表示僅根據在被測量物之各位置的傾 斜角度變換取樣間距之方法的圖。 第4圖係表示在利用僅根據在被測量物之各位置的傾 斜角度變換取樣間距之方法測量球面的情況所產生之取樣 間距的誤差量之圖。 第5圖係示意地表示從在被測量物之各位置的傾斜角 度、近似圓變換取樣間距之方法的圖。 第6圖係表示利用從在被測量物之各位置的傾斜角度 、近似圓變換取樣間距之方法實際上測量非球面時所產生 的誤差量之圖。 第7(a)及(b)圖係各自示意地表示圓周狀地測量被測量 物之方法的立體圖及平面圖。 第8(a)及(b)圖係各自示意地表示一面使被測量物朝向 Y軸方向移動爲固定量,一面朝向X軸方向重複地測量之 方法的立體圖及平面圖。 第9圖係表示三次元形狀測量裝置之構造例的立體圖 〇 第1 0圖係表示利用以往之三次元形狀測量方法取得 測量資料的情況之取樣間距的圖。 第1 1圖係具有非球面形狀之透鏡的一例之立體圖。 第12圖係表示第11圖所示之透鏡的曲率半徑之變化 的圖。 -19- 200916753 第1 3圖係表示在以往之方法的曲率半徑和取樣間距 之關係的圖。 第1 4圖係在設定第1 3圖所示之各種條件的情況,表 示探針的移動量和取樣間距之關係的圖。 【主要元件符號說明】 1 平台 2 被測量物 2a 測量面 3 移動體 4 雷射測距光學系統 5 探針 6 X參照鏡 7 Y參照鏡 I f T f Λ ir,· « Ζ篸照癍 9 X工作台 10 Υ工作台 11 Ζ軸移動體 20 三次元形狀測量裝置 -20-Cosa -sin a Ri-sin Θ A, _ sin a oosa _Ri- oosO Here, the surface coordinates X i + 1, derived from the above formula are obtained as described above in the surface coordinates X, +, which are measured The radius of curvature of the approximate circle of the object 2 and the angle of inclination, and then the next sampling position X, w is determined according to this. This calculation is repeated in sequence, and the measurement data can be obtained at a closer interval by pre-converting the measurement to the pitch along the X-Y axis. When the sampling pitch is determined in this manner, the error with respect to the pitch of the surface shape along the surface of the aspheric surface -15-200916753 is shown in Fig. 6 as compared with the conventional example. Here, the lens having the aspherical shape shown in FIG. 1 as the object to be measured 2 has a rotationally symmetrical aspherical shape centered on the normal line passing through the origin of the apex of the system, and the diameter is It is a lens with a variation of about 3.5 mm in the Z-axis direction of about 9 mm. The scanning method of the probe 5 is reviewed for the case of performing line scanning in only one direction along the X-axis direction. The conventional example (1) of Fig. 6 is a conventional method of setting a sampling pitch in the X-axis direction along the scanning direction of the probe 5 in advance, and obtaining measurement data for each sampling interval. The pitch is fixed at 〇. 1 mm and the results of the measurement data are obtained. The conventional example (2) is a method of obtaining measurement data while changing the sampling pitch from the radius of curvature of the surface of the object to be measured, and setting the first and second graphs to 0, Rmin:=8 mm, Rmax = 16 mm. , sampling interval Lmin = 0. 〇 9mm ' Lmax = 0. 1 1mm If R ^ M% S'J M % S ^ B fruit. In the case of setting the sampling pitch along the surface shape, the method is to convert the measurement data into the distance between the X-Y axis directions to obtain the measurement data. When measuring the lens having the aspherical shape, the measurement data is actually obtained. The error of the ® is caused by the error of the nanometer level, but the measurement data can be obtained with high precision at a substantially constant pitch. Further, regarding the description of the measuring method, the case where the probe 5 and the X-axis are moved in parallel or the probe 5 and the γ-axis are moved in parallel so that the probe 5 is scanned in a line scanning in only one direction is described. However, it is also applicable to other scanning methods. First, as the first method, as in the case of the seventh (a) and (b), there is a method of scanning the surface shape by repeating the measurement in a circumferential direction. This measurement is a case where the measurement and the object 2 having a rotational symmetry axis parallel to the z-axis orthogonal to each other in the γ-axis direction and having the rotationally symmetrical shape of the shape -16-200916753 centered on the axis are used. Effective measurement method. In this measurement, the probe 5 is centered on the axis of rotational symmetry, and moves as a circle to obtain measurement data based on the preset sampling pitch. The sampling interval set at this time may be set such that the moving distance of the probe 5 in the X-Y axis direction becomes constant 或者 or the sampling pitch may be set in advance to move the probe 5 toward the X-Y axis direction. The method of dividing the circle drawn by the trajectory into equal divisions. If the normal direction of the circle drawn along the trajectory of the movement of the probe 5 is only shifted by one circumstance, then the other side is scanned as shown by the trajectory of the probe 5 to obtain the measurement data. The amount by which the normal direction of the circle drawn along the trajectory of the probe 5 is moved by a certain amount at this time is referred to as a feed amount. After the probe 5 has only moved the feed amount, the X table 9 and the Y table 10 are moved as if just rounded around the origin. In the case of the measurement, the feed amount corresponding to the movement amount in the normal direction of the crucible produced at the time of scanning is set by the method of calculating the sampling pitch described above, and the feed amount in accordance with the inclination angle is set. A fixed feed amount can be set along the surface shape of the object 2 to be measured. As a specific method, the starting point at the time of circumferential scanning is scanned from the + side on the X-axis toward the counterclockwise direction on the X-Y plane. At the time when one turn is made until the probe 5 is moved to the X-axis again, it is moved only by the predetermined feed amount, and the scan on the circumference is started from the + side on the X-axis, and the feed is made at this time. The determination of the amount is determined as the feed amount from the inclination angle of the object 2 to be measured and the approximate circle based on the determination of the starting point on the X-axis. With this method, for example, when the section is made in the X_Z plane, the measurement position on the section is connected, as in the case where the above-mentioned table is only -17-200916753 moving toward the axial direction, 'can be fixed along the surface shape. The sampling interval is taken into the measurement data. Then, as a second method, for example, as shown in Fig. 8, the probe 5 is moved only in the X-axis direction in a state where the γ-axis direction is fixed, and measurement data is acquired based on the preset sampling pitch. If the measurement end of the predetermined section is made, the probe 5 is moved by only a certain amount toward the Y-axis direction. This amount of movement is called the feed amount. Then, as before, the probe 5 is repeatedly moved toward the x-axis direction and measured. Regarding the method of determining the sampling pitch at this time, for example, in the case of Fig. 8, a section is formed on the χ-plane of the line segment produced by the scanning, and the inclination angle and the approximate circle calculated on the section are obtained. The radius of the line can be determined by the sampling interval on each line segment. Further, the feed amount at this time is the same as the first method of measuring the above-described circumferential shape, and the feed amount corresponding to the inclination angle can be determined by the above-described method of calculating the sampling pitch. Further, in the above embodiment, the case where the shape information of the design data is used in the design information is described. However, the information of the shape data obtained by measuring the object to be measured may be used in the existing design information. The three-dimensional shape measuring method of the present invention can be utilized for a surface roughness measuring machine or the like in addition to the three-dimensional shape measuring device. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a flow chart for explaining a three-dimensional shape measuring method of an embodiment of the present invention. -18- 200916753 Fig. 2 is a flow chart for determining the sampling pitch of measurement data at regular intervals along the surface shape according to the embodiment of the present invention. Fig. 3 is a view schematically showing a method of changing the sampling pitch based only on the inclination angle at each position of the object to be measured. Fig. 4 is a view showing the amount of error of the sampling pitch which is generated by measuring the spherical surface by the method of measuring the sampling pitch only based on the inclination angle at each position of the object to be measured. Fig. 5 is a view schematically showing a method of shifting the sampling pitch from an approximate inclination angle at each position of the object to be measured. Fig. 6 is a view showing the amount of error generated when the aspherical surface is actually measured by the method of tilting the sampling pitch from the respective positions of the object to be measured and approximating the pitch of the circle. The seventh (a) and (b) drawings each schematically show a perspective view and a plan view of a method of measuring the object to be measured in a circumferential direction. Each of Figs. 8(a) and 8(b) is a perspective view and a plan view schematically showing a method of repeatedly measuring the object to be measured in the Y-axis direction while moving the object to the Y-axis direction by a fixed amount. Fig. 9 is a perspective view showing a configuration example of a three-dimensional shape measuring device. Fig. 10 is a view showing a sampling pitch in a case where measurement data is obtained by a conventional three-dimensional shape measuring method. Fig. 1 is a perspective view showing an example of a lens having an aspherical shape. Fig. 12 is a view showing a change in the radius of curvature of the lens shown in Fig. 11. -19- 200916753 Fig. 1 3 is a view showing the relationship between the radius of curvature and the sampling pitch in the conventional method. Fig. 14 is a view showing the relationship between the amount of movement of the probe and the sampling pitch in the case where various conditions shown in Fig. 3 are set. [Description of main component symbols] 1 Platform 2 Object to be measured 2a Measuring surface 3 Moving body 4 Laser ranging optical system 5 Probe 6 X Reference mirror 7 Y reference mirror I f T f Λ ir,· « 照照癍9 X table 10 Υ table 11 Ζ axis moving body 20 three-dimensional shape measuring device -20-

Claims (1)

200916753 十、申請專利範圍: 1 . 一種三次元形狀測量方法,係使探針(5 )在被測量物(2)之 測量面(2 a)沿者既定之路徑掃描,並測量被測量物(2)的 形狀’而該探針(5)係由被驅動於彼此正交之X軸方向及 Y軸方向的移動體(1)支持成朝向Z軸方向自由移動,該 方法之特徵爲: 將從被測量物(2)的既得形狀資訊所得之在掃描上的 各位置之朝向被測量物(2)的測量面(2a)之法線方向所畫 的直線、和被測量物(2)之中心線的交點作爲中心,並將 在被測量物(2)之表面上的位置和被測量物(2)之表面形 狀相切的圓作爲近似圓,再從該近似圓的半徑,算出取 得被測量物(2)之測量資料的取樣間距。 2. 如申請專利範圍第1項之三次元形狀測量方法,其中以 相當於近似圓之圓弧的部分之距離變成與沿著表面形$ 的距離相等之距離的方式算出中心角的角度,再根據$ 算出之角度’將從表面之位置沿著近似圓僅前進旣定^ 離的位置作爲下一取樣間距的點,而求得探針(5)的取牛素 間距。 3. 如申請專利範圍第丨或2項之三次元形狀測量方丨去, 中在設定測量資料的取樣間距時所使用之被測量物的既 得形狀資訊係被測量物(2)之設計資料的形狀資訊。 4 ·如申請專利範圍第丨〜3項中任一項之三次元形狀測量方 法,其中被測量物(2)具有非球面形狀。 5 ·如申請專利範圍第丨〜4項中任一項之三次元形狀測量方 -21 - 200916753 法,其中係以一面以旋轉對稱軸爲中心畫圓般地使探針 (5)移動’一面測量被測量物(2)之形狀的探針(5)之朝向χ 一 Y軸方向的移動距離變成定値之方式,或探針(5)朝向 χ - γ軸方向移動之軌跡所畫的圓等分割之方式,設定取 樣間距。 6. —種三次元形狀測量裝置’係在進行申請專利範圍第1〜5 項中任一項之二次兀形狀測量方法時所使用,其特徵爲 具備有:工作台(9、1 〇) ’係在設置被測量物(2)的測 量座(1)上朝向水平且彼此正交之χ軸方向及γ軸方向移 動;Z軸移動體(1 1)’係朝向與χ軸及γ軸彼此正交之z 軸方向上下移動;探針(5),係安裝於Z軸移動體(n)並 測量被測量物的表面;以及測量資料取入手段,係取入χ 軸、Y軸以及Z軸之座標値,並作爲測量資料。 \ •22-200916753 X. Patent application scope: 1. A three-dimensional shape measurement method, which is to make the probe (5) scan along the measured path of the object (2) of the object to be measured (2) and measure the object to be measured ( 2) The shape of the probe (5) is supported by the moving body (1) driven in the X-axis direction and the Y-axis direction orthogonal to each other to move freely in the Z-axis direction. The method is characterized in that: The straight line drawn from the normal direction of the measurement surface (2a) of the object to be measured (2) obtained from the acquired shape information of the object to be measured (2), and the object to be measured (2) The intersection of the center line is the center, and a circle tangent to the surface shape of the object to be measured (2) and the surface of the object to be measured (2) are approximated, and the radius is calculated from the radius of the approximate circle. The sampling interval of the measurement data of the measured object (2). 2. The method of measuring the three-dimensional shape of the first item of the patent application, wherein the distance of the portion corresponding to the arc of the approximate circle becomes the distance equal to the distance along the surface shape $, and the angle of the central angle is calculated. According to the angle calculated by $, the position of the surface of the probe is taken from the position of the surface along the approximate circle as the point of the next sampling interval, and the distance of the probe (5) is determined. 3. If the three-dimensional shape measurement method of the second or second patent application scope is applied, the acquired shape information of the measured object used in setting the sampling interval of the measurement data is the design data of the measured object (2). Shape information. 4. The three-dimensional shape measuring method according to any one of claims 1-3, wherein the object to be measured (2) has an aspherical shape. 5 · The three-dimensional shape measuring method - 21,610,753 method of any one of the patent application scopes 1-4 to 4, wherein the probe (5) is moved in a circle with one side centered on the axis of rotational symmetry The direction of the probe (5) that measures the shape of the object to be measured (2) χ The moving distance in the Y-axis direction becomes a constant ,, or the circle drawn by the trajectory of the probe (5) toward the χ-γ axis direction, etc. Set the sampling interval by dividing it. 6. A three-dimensional shape measuring device is used in the method of measuring a secondary flaw shape according to any one of claims 1 to 5, characterized in that it is provided with: a table (9, 1 〇) 'The movement moves in the x-axis direction and the γ-axis direction which are horizontal and orthogonal to each other on the measuring seat (1) where the object to be measured (2) is placed; the Z-axis moving body (1 1)' is oriented toward the x-axis and the γ-axis The z-axis direction is orthogonal to each other; the probe (5) is mounted on the Z-axis moving body (n) and measures the surface of the object to be measured; and the measuring data acquisition means is taken into the χ axis, the Y axis, and The coordinate of the Z axis is used as the measurement data. \ •twenty two-
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