TW200915443A - Manufacturing process and structure for a thermally enhanced package - Google Patents

Manufacturing process and structure for a thermally enhanced package Download PDF

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Publication number
TW200915443A
TW200915443A TW96143608A TW96143608A TW200915443A TW 200915443 A TW200915443 A TW 200915443A TW 96143608 A TW96143608 A TW 96143608A TW 96143608 A TW96143608 A TW 96143608A TW 200915443 A TW200915443 A TW 200915443A
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Taiwan
Prior art keywords
prepreg
wafer
heat
substrate
substrate unit
Prior art date
Application number
TW96143608A
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English (en)
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TWI375996B (en
Inventor
Ho-Ming Tong
Shin-Hua Chao
Ming-Chiang Lee
Tai-Yuan Huang
Chao-Yuan Liu
Yung-Cheng Huang
Teck-Chong Lee
Jen-Chieh Kao
Jau-Shoung Chen
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Advanced Semiconductor Eng
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Priority to TW96143608A priority Critical patent/TWI375996B/zh
Publication of TW200915443A publication Critical patent/TW200915443A/zh
Application granted granted Critical
Publication of TWI375996B publication Critical patent/TWI375996B/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
    • B32B37/16—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating
    • B32B37/22—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating involving the assembly of both discrete and continuous layers
    • B32B37/223—One or more of the layers being plastic
    • B32B37/226—Laminating sheets, panels or inserts between two continuous plastic layers
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    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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    • Y10T428/31678—Of metal

Description

200915443 九、發明說明： 【發明所屬之技術領域】 本發明係有關於-種封裝製程，特別係有關於一種散 熱型晶片封裝製程。 【先前技術】 習知封裳步驟中需進行一灌模製程以密封保護晶 片-所需之機台成本及模具成本較高，且所包含之技術 内谷複雜’ s而高額之成本與技術卻與封裝完成之產品品 質並非正比關係，徒然造成生產成本之浪費。 【發明内容】 ,本毛明之主要目的係在於提供一種散熱型晶片封裝 製矛首先&供一基板條，該基板條係包含有至少一基 板單元，接著，②置—晶片於該基板單元，該晶片之複數 個凸塊係電性連接該基板單元之複數個連接墊·，之後，提 供-第-預浸材及一散熱金屬層’該第_預浸材係具有一 第一表面及一第二表面，該散熱金屬層係設置於該第一表 面忒第一表面係朝向該晶片之一背面；最後，壓合該第 一預浸材及該基板單元’以使該第一預浸材覆蓋該晶片。 本發明係以壓合該第一預浸材以形成封裝構造之步驟取 代習知灌模填入封膠體以形成封裝構造之步驟，其係具有 穩定度高及降低成本之功效。 本發明之次一目的係在於提供一種基板製程，其係可 另包含有··提供並壓合一第二預浸材於該基板單元，該第 一預次材係位於該第一預浸材與該基板單元之間，該第二 6 200915443 預浸材之至少一開口係對準於該晶片，壓合該第一預漫 材、該第二預浸材及該基拓s — 、，a # 丞板早兀以包覆該晶片並降低氣泡 存在之機率。 【實施方式】 請參閱帛mm®，依據本發明之一具體實施例係 揭示-種散熱型晶片封屐製程，首先，請娜ia圖， 提供-基板條H)’該基板條1G係包含有複數個基板單元 no,每-基板單it "〇係具有一上表面m、一下表面 112、複數個第—連接塾113及複數個第二連接塾m，該 二第連接墊U 3係形成於該上表面1 1 1，該些第二連接 墊114係形成於該下表面112;接著’請參閱第⑶圖，設 置複數個晶片120於該些基板單元11〇之該些上表面 Hi母日日片I20係具有一主動面121、一背面122及複 數個凸塊123，該些晶片12〇之該些凸塊123係電性連接 。亥些基板單元110之該些第一連接墊113;之後，請參閱 第1C圖，形成一底膠i3〇( underfill )於該些上表面1 η， 该底膠130係用以包覆該些主動面121及該些凸塊丨23， 且該底膠130係可顯露該些晶片12〇之該些背面122，該 底膠130係用以加強該些晶片12〇與該些基板單元ιι〇之 接合強度，接著，請參閱第i D圖，提供一第—預浸材丄 及一散熱金屬層150，該第一預浸材140係具有一第一表 面141及一第二表面142，該第二表面142係朝向該些晶 片120之該些背面122，該散熱金屬層15〇係設置於該第 預π材140之該第一表面141，該散熱金屬層ι5〇之材 200915443 質係為銅或係—經過表面處理之銅層，在本步驟中，係另 包含提供一第二預浸材160,該第二預浸材16〇係可由複 數個預材預先堆疊而成，或者，在另一實施例中，該第 二預浸材160係與該第一預浸材14〇係一體成型，或已結 δ成體，该第二預浸材1 60係位於該第一預浸材丨4〇與 該些基板單元110之間，且該第二預浸材16〇係具有一第 二表面161、一第四表面102與複數個開口 163，該第三 表面161係朝向該第一預浸材14〇之該第二表面142，且 該些開口 163係形成於該第四表面162，較佳地，該些開 口 163係貫穿該第三表面161與該第四表面162 ,且該些 開口 163係對準於該些晶片12〇，在本實施例中，該第一 預浸材140與該第二預浸材16〇係具有B stagei特性， 該第一預浸材140與該第二預浸材16〇係為半固化膠態， 以使該第一預浸材140與該第二預浸材16〇具有流動性； 之後，請參閱第1E圖，利用一夾具2〇同時壓合半固化膠 態之該第一預浸材140、該散熱金屬層15〇、半固化膠態 之該第二預浸材1 6 0及該些基板單元丨丨〇，此外，在壓合 該第一預次材1 4 0、该散熱金屬層丄5 〇、該第二預浸材】6 〇 及該些基板單元110之過程中亦可進行加熱之步驟，以使 該第一預浸材1 40與該第二預浸材丨6〇固化；接著’請參 閱第1F圖，壓合步驟完成後’該第一預浸材14〇係覆蓋 該些晶片120 ’該第二預浸材160係被壓合附著於該些基 板單元110之該些上表面111，且該第二預浸材16〇係包 覆該底膠1 3 0，接著設置複數個銲球丨7〇於該些基板單元 200915443 110之該些下表面112，該些銲球17〇係連接該些第二連 接墊114 ;最後，請參閱第1(3圖，切割該基板條1〇以形 成複數個單離之封裝構造i 〇〇。由於該第一預浸材丨4〇與 該第二預浸材丨60内係含有玻纖材料或填充劑（fiUer)，可 增加與該些基板單元1 1 〇之結構強度及信賴性。 請參閱第2圖，依據本發明之一具體實施例係揭示一 種散熱型晶片封裝構造1 〇〇，其係包含一基板單元丨丨〇、 一晶片120、一第一預浸材14〇以及一散熱金屬層15〇， 該基板單元11 〇係具有一上表面丨丨丨、一下表面〗丨2、複數 個第一連接墊113及複數個第二連接墊114，該些第一連 接墊113係形成於該上表面！丨1，該些第二連接墊丨丨4係 形成於該下表面11 2 ’該晶片i 2〇係設置於該基板單元u 〇 之該上表面111 ’該晶片1 20係具有一主動面1 2 1、一背 面122及複數個凸塊123 ’該些晶片丨2〇之該些凸塊1 23 係電性連接該些基板單元110之該些第一連接塾113，該 第一預浸材丨4〇係具有一第一表面141及一第二表面 1 42，該第一預浸材1 40係覆蓋該晶片1 2〇，該散熱金屬層 1 5 0係設置於該第一預浸材1 4 0之該第一表面1 41以增進 散熱’較佳地’該散熱型晶片封裝構造1 〇〇係另包含有一 底膠130 ( underfill )、一第二預浸材16〇及複數個銲球 1 7 0，該底膠1 3 0係形成於該上表面111以包覆該主動面 121及該些凸塊123，該第二預浸材16〇係具有一第三表 面161、一第四表面162及一開口 } 63，該開口 163係形 成於該第四表面1 62 ’在本實施例中，該開口 1 63係貫穿 200915443 該第三表面1 61與該第四表面1 62，該第二預浸材1 60係 位於該第一預浸材140與該基板單元110之間，該晶片12〇 係位於該開口 1 63中，且該第二預浸材1 60之該第三表面 1 6 1係連接該第一預浸材〗40之該第二表面1 42以完整包 覆該晶片1 20，在另一實施例中，該第二預浸材丨60係與 該第一預浸材140 —體成型，或已預先結合成一體，在本 實施例中，該第二預浸材i 60係被壓合附著於該基板單元 110之該上表面111，且該第二預浸材160係包覆該底膠 1 3 0 ’該些銲球1 70係設置於該基板單元丨i 〇之該下表面 112，且該些銲球170係連接該些第二連揍墊114，以外接 一電路板（圖未繪出）。 此外，請參閱第3圖，在另一實施例中，該散熱型晶 片封裝構造i⑻係另包含有至少一鍍通孔18〇，該鍍通孔 180係形成於該第一預浸材14〇及該第二預浸材16〇中， 該基板單A UG係另具有複數個第三連接塾ιΐ5，該些第 三連接墊115係形心該㈣—連接& ιι3外側，該鑛通 孔180係連接該散熱金屬層15G與該H三連㈣心 較佳地，當該散熱金屬層i 5 〇係 於§亥散熱金屬層iso上方設置另 並藉由該鍍通孔1 80電性導通兮 封裝構造100。 可 )， 片 為一圖案化線路層時， —封裝構造（圓未繪出 封裝構造與該散熱型晶 請參閱第4A至4F 係揭示另一種散熱型晶 圖，提供一基板條3 0， 圖依據本發明之另一具體實施例 ^封裝製程，首先，請參閱第4A 玄基板條30係包含有複數個基板 10 200915443 單元210’每一基板單元210係具有一上表面211、—下 表面212、複數個形成於該上表面211之第一連接墊213 及複數個形成於該下表面212之第二連接墊214;接著， 請參閱第4B圖’設置複數個晶片220於該些基板單元2 i 〇 之該些上表面2 11，每一晶片220係具有一主動面22 1、 一背面222及複數個凸塊223，該些晶片220之該些凸塊 223係電性連接該些基板單元2 1 0之該些第一連接墊 213，之後’請參閱第4C圖，提供一第一預浸材230及一 散熱金屬層240,該第一預浸材230係具有一第一表面231 及一第二表面232，該第二表面232係朝向該些晶片220 之該些背面222，該散熱金屬層240係設置於該第一預浸 材230之該第一表面23 1 ’該散熱金屬層240之材質係為 銅或係一經過表面處理之銅層，在本步驟中，係另包含提 供一第二預浸材250，該第二預浸材250係可由複數個預 浸材預先堆疊而成，或者，在另一實施例中，該第二預浸 材250係與該第一預浸材230係為一體成型，該第二預浸 材250係位於該第一預浸材23〇與該些基板單元21〇之 間’且該第二預浸材250係具有一第三表面251、一第四 表面252與複數個開口 253 ’該第三表面251係朝向該第 一預浸材230之該第二表面232 ’且該些開口 253係形成 於§玄第四表面2 5 2，較佳地，該些開口 2 5 3係貫穿該第三 表面2 5 1與該第四表面2 5 2，且該些開口 2 5 3係對準於該 些晶片220 ’在本實施例中’該第一預浸材23〇與該第二 預浸材250係具有B-stage之特性，該第一預浸材23〇與 11 200915443 盥第—預/又材250係為半固化膠態，以使該第一預浸材23〇 與該j二預浸材250具有流動性；接著，請參閱第圖， ▲沒夾具2〇同時壓合半固化膠態之該第一預浸材230、 Λ月’、、、金屬’ 240 '半固化膠態之該第二預浸材250及該 ^基板早几210 ’此外’在壓合該第一預浸材230、該散 ’’、、金屬層240、该第二預浸材25〇及該些基板單丨21〇之 過程中亦可進行加熱及抽真空之步驟，以使該第一預浸材 〇 ” 4第一預浸材250固化，且使該第一預浸材23〇與 ，第二預浸材250可順利填充於該些晶片22〇與該婪基板 單凡2 1 〇之間；之後，請參閲第4E圖，壓合步驟完成後， °亥第預浸材230係覆蓋該些晶片220,該第二預浸材250 係被壓合附著於該些基板單元21〇之該些上表面211，且 4第一預次材25〇係包覆該些凸塊223，接著設置複數個 鲜球260於該些基板單元210之該些下表面212，該些銲 球260係連接該些第二連接墊2丨4 ;最後，請參閱第4F 圖’切割該基板條30以形成複數個單離之封裝構造2〇〇。 由於該第一預浸材230與該第二預浸材25〇内係含有玻纖 材料或填充劑（filler) ’可增加與該些基板單元2 1 〇之結構 強度及信賴性。 請參閱第5圖’依據本發明之另一具體實施例係揭示 另一種散熱型晶片封裝構造200，其係包含一基板單元 21〇、一晶片220、一第一預浸材23〇以及一散熱金屬層 240,該基板單元210係具有一上表面211、一下表面212、 複數個形成於該上表面2 11之第一連接墊2 1 3及複數個形 12 200915443 成於該下表面2 1 2之第二連接墊2 1 4，該晶片22〇係設置 於該基板單元210之該上表面211，該晶片220係具有一 主動面221、一背面222及複數個凸塊223，該晶片22〇 之該些凸塊223係電性連接該基板單元2 1 0之該些第一連 接墊213，該第一預浸材230係具有一第一表面231及一 第二表面232，該第一預浸材230係覆蓋該晶片22〇，該 散熱金屬層240係設置於該第一預浸材230之該第一表面 23 1以增進散熱，較佳地，該散熱型晶片封裝構造2〇〇係 另包含有一第二預浸材250及複數個銲球26〇，該第二預 浸材250係具有一第三表面251、一第四表面252及一開 口 253，該開口 253係形成於該第四表面252，在本實施 例中，該開口 253係貫穿該第三表面25! 251與該第四表面
—實施例中，該散熱型晶 —鍍通孔270，該鍍通孔 此外，請參閱第6圖，在另 片封裝構造200係另包含有至少 13 200915443 270係形成於該第-預浸材23〇及該第二預浸材25〇中， 該基板單元21〇係另具有複數個第三連接墊215，該此第 三連接塾215係形成料些第—連接墊⑴外側，該鍍通 孔270係連接該散熱金屬^ 24〇與該些第三連接塾215。 較佳地，當該散熱金屬| 24G係為—圖案化線路層時，可 於該散熱金屬層240上方設置另—封裝構造（圖未繪出）， 並藉由該鍍通孔270電性導通該封裝構造與該散熱型晶片 封裝構造200。 請參閱第7A至几圖，依據本發明之再一具體實施例 係揭示另一種散熱型晶片封農製程，首先，請參閱第Μ 圖，提供一基板條40,該基板條4〇係包含有複數個基板 單元310,每一基板單元31〇係具有一上表面3ΐι、一下 表面312、複數個形成於該上表面311之第一連接墊313 及複數個形成於該下表面312之第二連接墊314 •，接著， 請參閱第7B圖，設置複數個晶片32〇於該些基板單元3 i 〇 之該些上表面3 11，並形成至少一銲線3 3 〇以電性連接該 些μ片3 20與s玄些基板單元3丨〇 ’在本實施例中，該銲線 330鍵合於該些晶片320與該些基板單元31〇之該些第一 連接塾313之弧度係為超低弧度（ultra i〇w 1〇〇p)，且該銲 線3 3 0之弧度係符合該些晶月3 2 0之邊緣；之後，請參閱 第7C圖’提供一第一預浸材34〇及一散熱金屬層3 5〇，該 第一預浸材340係具有一第一表面341及一第二表面 342 ’ s亥第一表面342係朝向該些晶片320之複數個主動 面321 ’該散熱金屬層350係設置於該第一預浸材34〇之 14 200915443 該第一表面341，該散熱金屬層350之材質係為銅或係一 經過表面處理之銅層，在本步驟中，係另包含提供—第二 預浸材36G ’該第二預浸材36()係具有一第三表面加、 一第四表面362與複數個開口如，該第二預浸材36〇係 可由複數個預浸材預先堆疊而成，或者，該第二預浸材⑽ 係可與該第-預浸材34()_體成型，該第二預浸材_係 位於該第一預浸材340與該些基板單元3丨〇之間，且該第 二表面361係朝向該第一預浸材34〇之該第二表面, 该些開口 363係形成於該第四表面362，較佳地，該些開 口 3 63係貫穿該第三表面361與該第四表面362，且該些 開口 363係對準於該些晶片32〇，該第一預浸材34〇與該 第二預浸材360係具有B_stage之特性，該第一預浸材3扣 與該第二預浸材36〇係為半固化膠態，以使該第一預浸材 3 40與該第二預浸材360具有流動性；之後，請參閱第7D 圖’利用一爽具20同時壓合半固化膠態之該第一預浸材 340、該散熱金屬層350、半固化膠態之該第二預浸材36〇 及該些基板單元3 1 0，以使該第一預浸材340及該第二預 浸材360包覆該些晶片320及該些銲線330，以取代習知 之模封製程’此外，在壓合該第一預浸材34〇、該散熱金 屬層350、該第二預浸材36〇及該些基板單元31〇之過程 中亦可進行加熱之步驟，以使該第一預浸材340與該第二 預浸材360固化；接著，請參閱第7E圖，設置複數個銲 球370於該些基板單元310之該些下表面312，該些銲球 3 70係連接該些第二連接墊314 ;最後，請參閱第7F圖， 15 200915443 切割該基板條40 m彡成複數料離之料構造跡由於 該第-預浸材340與該第二預浸材_内係含有玻纖材料 或填充劑⑼㈣，可增加與該基板單元3iq之結構強度。 請參閱第8圖，依據本發明之再—具體實施例係揭示 另一種散熱型晶片封裝構造3〇〇 K系包含一基板單元 310、 —晶片32G、至少—銲線330、—第-預浸材340以 及-散熱金屬I 350’該基板單元31〇係具有一上表面 311、 一下表面312、複數個形成於該上表面3ιι之第一連 接墊313及複數個形成於該下表面312之第二連接墊 314，該晶片320係設置於該基板單元31〇之該上表面 3 U ’該晶片320係以該銲線33〇電性連接該基板單元3⑺ 之該些第一連接墊313，該第—預浸材34〇係具有一第一 表面3M及一第二表面3U，該第一預浸材34〇係覆蓋該 晶片320，該散熱金屬層350係設置於該第一預浸材34〇 之該第一表面3 41以增進散熱，較佳地，該散熱型晶片封 裝構造300係另包含有一第二預浸材36〇及複數個銲球 370,該第二預浸材360係具有一第三表面361、—第四表 面362及一開口 363，該開口 363係形成於該第四表面 362，在本實施例中，該開口 363係貫穿該第三表面 與该第四表面362 ’遠苐二.預浸材360係位於該第一預浸 材340與該基板單元3 10之間，該晶片32〇係位於該開口 3 63中，且該第二預浸材360之該第三表面361係連接該 第一預浸材340之該第二表面342以完整包覆該晶片 3 20 ’在另一實施例中’該第二預浸材36〇係可與該第一 16 200915443 預浸材340 —體成型或已預先結合成一體，在本實施例 中，該第二預浸材360係被壓合附著於該基板單元3 10之 該上表面311，該些銲球370係設置於該基板單元31〇之 s玄下表面312’且該些鲜球370係連接該些第二連接墊 3 14，以外接一電路板（圖未繪出）。 此外’請參閱第9圖’在另一實施例中，該散熱型晶 片封裝構造300係另包含有至少一鍍通孔38〇，該鍍通孔 3 80係形成於該第一預浸材340及該第二預浸材3 6〇中， 該基板單元310係另具有複數個第三連接墊315，該些第 三連接墊315係形成於該些第一連接墊313外側，該鍍通 孔380係連接該散熱金屬層350與該些第三連接墊315。 較佳地，當該散熱金屬層350係為一圖案化線路層時，可 於該散熱金屬| 350上方設置另一封裝構造（圖未繪出）， 並藉由該鍵通孔3 8 0電性導兮4+壯-Ht 1 电庄¥通δ玄封裝構造與該散熱型晶片 封裝構造300。 附之申請專利範圍所界定 在不脫離本發明之精神和 ’均屬於本發明之保護範 本發明之保護範圍當視後 者為準，任何熟知此項技藝者， 範圍内所作之任何變化與修改 圍。 【圖式簡單說明】 一具體實施例，一種散 之截面示意圖。 一具體實施例，該散熱 第1A至ig圖：依據本發明之—第 熱型晶片封裝製裎 第2 圖：依據本發明之一第
之截面示意圖 晶片封裝構造 17 200915443 第 3 圖.依據本發明之第二具體實施例，另一種散 熱型晶片封裝構造之截面示意圖。 第4A至4F圖.依據本發明之一第三具體實施例，另一種 散熱型晶片封裝製程之截面示意圖。 第 5 圖.依據本發明之一第三具體實施例，該散熱 型晶片封裝構造之截面示意圖。 第 6 圖.依據本發明之第四具體實施例’另一種散 熱型晶片封裝構造之截面示意圖。 第7 A至7F圖：依據本發明之一第五具體實施例，另一種 散熱型晶片封裝製程之截面示意圖。 第 8 圖：依據本發明之一第五具體實施例，該散熱 型晶片封裝構造之截面示意圖。 第 9 圖：依據本發明之第六具體實施例，另一種散 熱型晶片封裝構造之截面示意圖。 【主要元件符號說明】 10基板條 20夾具 30基板條 40 基板條 100 散熱型晶 片封 裝構造 110 基板單元 111 上 113 第一連接 墊 114 第 120 晶片 121 主 123 凸塊 130 底 141 第一表面 1 42 第 160 第二預浸 材 161 第 表面 112 下表面 二連接墊 115 第三連接墊 動面 122 背面 膠 140 第一預浸材 二表面 150 散熱金屬層 三表面 162 第四表面 18 200915443 163 開口 170 鲜球 180 200 散熱型晶片 封裝構造 210 基板單元 211 上表面 212 213 第一連接墊 214 第二連接墊 215 220 晶片 221 主動面 222 223 凸塊 230 第一預浸材 23 1 232 第二表面 240 散熱金屬層 250 251 第三表面 252 第四表面 253 260 鮮球 270 鍍通孔 300 散熱型晶片 封裝構造 3 10 基板單元 311 上表面 3 12 3 13 第一連接墊 314 第二連接墊 3 15 320 晶片 321 主動面 330 340 第一預浸材 341 第一表面 342 350 散熱金屬層 360 第二預浸材 361 362 第四表面 363 開口 370 380 鍍通孔 鑛通孔 下表面 第三連接墊 背面 第一表面 第二預浸材 開口 下表面 第三連接墊 銲線 第二表面 第三表面 鲜球 19

Claims (1)

  1. 200915443 十、申請專利範圍： 1、一種散熱型晶片封裝製程，其係包含： 提供一基板條，該基板條係包含有至少一基板單元， 該基板單元係具有一上表面及一下表面； 设置至少一晶片於該基板單元之該上表面，該晶片係 電性連接該基板單元； 提供一第一預浸材及一散熱金屬層，該第一預浸材係 具有一第一表面及一第二表面，該散熱金屬層係設置 於該第一表面，該第一預浸材之該第二表面係朝向該 晶片；以及 壓合該第一預浸材及該基板單元，以使該第一預浸材 覆蓋該晶片。 2如申清專利範圍第1項所述之散熱型晶片封裝製程， 其另包含有：提供一第二預浸材，該第二預浸材係位 於該第一預浸材與該基板單元之間，該第二預浸材係 具有一第三表面、一第四表面與至少一開口，該開口 係形成於該第四表面，該第三表面係朝向該第一預浸 材之該第二表面，且該開口係對準於該晶片。 3、 如申請專利範圍第2項所述之散熱型晶片封裝製程， 、中D玄開口係貝穿該第三表面與該第四表面。 4、 如申請專利範圍第2項所述之散熱型晶片封裝製程， 其另包含有：同時壓合該第二預浸材，以使該第二預 浸材附著於該基板單元。 5如申請專利範圍第丨項所述之散熱型晶片封裝製程， 20 200915443 其中該基板單元係另具有複數個第一連接墊，該晶片 係具有一主動面、一背面及複數個凸塊，該些凸塊係 連接該些第一連接塾。 6、如申請專利範圍第5項所述之散熱型晶片封裝製程， 其另包含有：形成一底膠（underfill )，該底膠係包覆 該晶片之該些凸塊’且該底膠係顯露該晶片之該背 面。 7 、如申請專利範圍第2項所述之散熱型晶片封裝製程， 其中該晶片係具有複數個凸塊，該第二預浸材係包覆 遠些Λ塊。 8、 如申請專利範圍第1項所述之散熱型晶片封裝製程， 其中該基板單元係另具有複數個第二連接墊，該些第 二連接墊係形成於該下表面。 9、如申請專利範圍第8項所述之散熱型晶片封裝製程， 其另包含有：設置複數個銲球於該基板單元之該下表 面’該些銲球係連接該些第二連接墊。 1 〇、如申請專利範圍第1項所述之散熱型晶片封裝製程， 其另包含有’·切割該基板條以形成複數個單離之封妒 構造。 11、 如申請專利範圍第1項所述之散熱型晶片封襞製裎， 其另包含有：形成至少一銲線以電性連接該晶片與該 基板單元。 S 12、 i 、如申請專利範圍第7項所述之散熱型晶片封裝製程， 其另包含有：進行一抽真空步驟，以使該第二預浸材 21 200915443 13、 14、 15、 16 17 18 填充於忒晶片與該基板單元之間並包覆該些凸塊。 種散熱型晶片封裝構造’其係包含： 板單元’其係具有一上表面及一下表面； 曰曰片，其係設置於該上表面，該晶片係電性連接該 基板； 第預浸材’其係具有一第一表面及一第二表面， 該第一預浸材係覆蓋該晶片；以及 一散熱金屬層，其係設置於該第一預浸材之該第一表 面。 如申请專利範圍第i 3項所述之散熱型晶片封裝構造， "另匕3有一第一預浸材’該第二預浸材係位於該.第 一預浸材與該基板之間，該第二預浸材係具有一第三 表面、一第四表面與至少一開口，該開口係形成於該 第四表面’該第三表面係連接該第一預浸材之該第二 表面’且該晶片係位於該開口中。 如申請專利範圍第1 4項所述之散熱型晶片封裝構造， 其中該開口係貫穿該第三表面與該第四表面。 如申請專利範圍第1 3項所述之散熱型晶片封裝構造， 其中該基板係另具有複數個第一連接墊，該晶片係具 有複數個凸塊，該些凸塊係連接該些第一連接墊。 如申請專利範圍第1 6項所述之散熱型晶片封裝構造， 其另包含有一底膠（underfill )，該底膠係包覆該晶片 之該些凸塊。 如申請專利範圍第14項所述之散熱型晶片封裝構造， 22 200915443 其中該晶片係具有複數個凸塊’該第二預浸材係戶覆 該些凸塊。 19、如申請專利範圍第13項所述之散熱型晶片封裝構造， 其中§亥基板係另具有複數個第二連接墊，該歧第-連 接墊係形成於該下表面。 20、如申請專利範圍第19項所述之散熱型晶片封裝構造， 其另包含有複數個銲球，該些銲球係設置於該基板之 該下表面，該些銲球係連接該些第二連接墊。 2 1、如申請專利範 _ 一…、一 —''β衣稱适， 、另包含有至少—鍍通孔，其係形成於該第一預浸材 及該第二預浸材中。 22、 =V!專利範圍第21項所述之散熱型晶片封袭構造， /…亥基板係另I有複數個第三連接$，該 接墊係形成於該此 一弟一逯 二連接墊外側，該鍍通孔係連接 放熱金屬層與該些第三連接塾。 23、 如申請專利範圍笛丨^ s 其另包含有至少：所述之散熱型晶片封裝構造， 該基板單元。4，該銲線係電性連接該晶片與 23
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