TW200911389A - Nozzle keeping device and coating device - Google Patents

Abstract

The invention relates to a device for keeping a nozzle and a coating device. The nozzle-keeping device keeps the nozzle which sprays liquid from an outlet to inferior part and comprises a projection part, a supplying piping, a storage mechanism and a cleaning fluid supplier. The projection part is configured on the position opposite with the nozzle outlet on top of a supplying port. The supplying piping communicates a supplying source for supplying the cleaning fluid and the supplying port. The storage mechanism is connected to the piping, and can store the cleaning fluid in the position of the storage mechanism which is closer to the upper part than top of the projection. The cleaning fluid supplier supplies the cleaning fluid from the supplying source, so that the nozzle-keeping device is in a state as below: the projection top is filled with the cleaning fluid and the storage mechanism is stored with the cleaning fluid.

Description

[Technical Field] The present invention relates to a nozzle storage device and a coating device, and more particularly to a nozzle storage for storing a nozzle when a nozzle for discharging a liquid is not discharged. A device, and a coating device using the same. [Prior Art] Conventionally, a liquid is applied to a coating device such as a substrate, and the liquid is discharged.

The nozzle performs the technique of washing. For example, in the patent document 1 (Japanese Laid-Open Patent Publication No. 2005-3433), a nozzle for cleaning the nozzle by supplying a cleaning solution for supplying a cleaning liquid to a nozzle to be cleaned is disclosed. Wash the device. The spray net cleaning device, the cleaning wire supply means is placed at a position near the side of the mouth to form a droplet of the cleaning liquid, and the droplet is sent from the side to the nozzle, and the supplied droplet It is recovered by suction using a suction means disposed near the nozzle. j test f in the coating device is not shipped (four) the nozzle wire condition. In order to prevent the drying of the coating liquid from clogging the nozzle hole, etc., in order to prevent the nozzle tip portion from being dried, it is necessary to impregnate the tip end portion of the liquid in the liquid. In the case of a tube nozzle, the village uses, Lee = wash the nozzle wire. However, it is necessary to supply liquid (washing liquid) frequently in the cleaning of the feed 1 and cause a problem of a large amount of official liquid. [Description of the Invention] 97125545 200911389 The purpose of the present invention is to provide a nozzle storage device and a coating device which can efficiently store a nozzle using a liquid for storage. The present invention adopts the following configuration in order to solve the above problem. In other words, the first aspect of the present invention is a nozzle storage device that stores a discharge X when the discharge liquid is discharged downward from the discharge σ. The nozzle storage device includes a protrusion member, a supply pipe, a storage mechanism, and a cleaning liquid supply means. The projecting member is disposed at a position where the upper surface of the supply port is opposed to the nozzle discharge port. The supply piping is connected from the supply supply to the supply σ. The storage mechanism is connected to the supply pipe, and the cleaning liquid can be stored above the protrusion member. The cleaning liquid supply means supplies the cleaning liquid from the supply source in a state in which the cleaning liquid is stored on the upper surface of the protruding member and the storage means stores the cleaning liquid. In the second aspect, the nozzle storage device may further include a cleaning liquid suction means for sucking the cleaning liquid from the supply pipe via the storage means. In the third aspect, the nozzle storage device may further include: means for detecting and storing (the amount of the cleaning liquid stored in the J mechanism). At this time, the cleaning liquid supply means detects the amount of liquid according to the detection means. The cleaning liquid is supplied from the supply source. In the fourth sample, the nozzle storage device may further include at least a nozzle and a protruding member so that the lower surface of the nozzle and the upper surface of the canine member are opposed to each other at a predetermined interval. The mobile moving means. At this time, the cleaning liquid supply means is to supply the washing liquid to the supply port in a manner that the nozzle is rushed to wash the cleaning liquid onto the upper surface of the protruding member, and the nozzle is washed. When the cleaning liquid on the upper surface of the protruding member only contacts the underside of the nozzle, the predetermined interval is set. 97125545 200911389 In the fifth aspect, the diameter of the protruding member may be smaller than the diameter below the nozzle. The sixth type of sample towel is directly sucked from the supply port, and the material is stored in a safe manner. The surface of the surface is covered with a cleaning liquid. low The sloping surface can also be an organic muscle material or a hole transporting material. 3 There is a solvent containing a solvent solution in New Zealand. In addition, the invention has a nozzle with the above-mentioned δ 秘 secret. The form of the coating device for discharging the coating liquid from the nozzle to the substrate. # According to the first aspect, when the nozzle is stored, the upper surface of the protruding member is mounted in a net recording state. This can be used to feed the cleaning liquid according to the discharge port of the nozzle, and it is not necessary to supply the cleaning liquid frequently, so that the cleaning liquid can be used efficiently. a-step 'according to the first aspect' even The washing liquid in the loaded state has evaporated, and the amount of the washing liquid in the loaded state can be maintained by the storage mechanism for storing the washing liquid on the upper surface of the protruding member. That is, the upper surface of the protruding member can be Keep the cleaning solution for a long time, and keep the nozzle for a long time. • According to the second secret 'cleaning and suction method, the cleaning liquid adhering to the nozzle during storage can be removed from the nozzle. Further step-by-step, because the cleaning liquid suction means is supplied from the storage mechanism Since the washing liquid is sucked in the mouth, it is not necessary to separately provide a suction port for suction or a pipe for suction. Therefore, the structure of the coating 97125545 5 200911389 can be simplified. The amount of washing liquid stored in the storage mechanism, profit == Into: Test 'can detect the disappearance (or less) of the original washing liquid on the upper surface of the protruding member. The amount of liquid detected by the means has been smashed, and even if the washing liquid on the upper part of the protruding member has been steamed, the nozzle can be kept safely. == 'Follow the washing on the upper part of the protruding member. The liquid can be removed only by the cleaning solution attached to the =1 surface. According to the 5th secret, because the upper diameter is set to be smaller than

Therefore, even if the interval between the upper surface and the lower surface is relatively small, the cleaning liquid from the supply port L does not adhere to the nozzle liquid and adheres to the nozzle side. 1 Therefore, it is possible to prevent the washing from being in the '5th aspect'. When the nozzle cleaning device has the sixth aspect of the washing "liquid suction means, the suction action of the cleaning liquid is supplied. The closer the distance between the mouth and the nozzle, the greater the job suction effect will be. In this case, the root _ is isolated, because the distance between the supply port and the mouth can be very close, so that the suction can be sufficiently performed. According to the younger brother and the 6 sadness, the washing liquid adhered to the spray f during washing can be removed from the mouthpiece by the washing liquid suction means. Further, since the cleaning liquid suction means suctions the washing liquid from the supply port of 97125545 200911389, it is not necessary to additionally provide a suction port for performing the pumping. Therefore, the structure of the coating device can be simplified. According to the seventh aspect, since the projecting member has the shape of the inclined surface, the projecting member can reduce the diameter of the upper surface, and at the same time, the thickness of the entire member can be ensured, and the strength of the projecting member can be ensured. + According to the eighth aspect, in order to store the nozzle for applying the organic EL material or the hole transporting material, a nozzle storage device can be applied.

Further, when the present invention is provided by the application of the application, the nozzle storage device can be applied to a coating device that applies a coating liquid to the substrate by discharging the coating liquid from the nozzle, and the coating device can be applied. The nozzles coated with the scent are stored in an efficient use of the cleaning solution. The above description of the present invention, as well as other objects, ships, miscellaneous, and effects, will be more apparent from the following detailed description. [Embodiment] 第 (1st Embodiment) (1) Structure of a coating apparatus Hereinafter, the nozzle storage I will be described with respect to the present invention. ^1 Embodiment The Wei nozzle storage device constitutes a coating device (which is used for manufacturing an EL (electr luminescence) display device). The coating device stores a substrate on which the substrate is placed, and a coating liquid such as an organic EL material or a hole transporting material is discharged from the nozzle to be painted in a predetermined pattern shape. Further, the coating apparatus can be exemplified by, for example, an organic EL material, an electric material, a fine material (4), and a representative organic EL material as a coating liquid. First, FIG. 1 and FIG. 2 will explain the overall structure of the coating apparatus. Figure 1 shows a detailed record of 1G fresh. The coating apparatus 10 shown in the drawing is viewed from the top, and the old (b) coating apparatus 10 is viewed from the side in the positive direction of the Y-axis. Further, Fig. 2 is a view showing a connection relationship between each part of the coating apparatus 1G and the control unit. Furthermore, as shown in FIG. 2, the coating apparatus 1G is equipped with the control part 7. control

As shown in Fig. 1, the coating device 10 is equipped with a nozzle unit! The nozzle moving mechanism 2, the storage unit 3aA3b, the liquid receiving portion, the ceremony, the platform 5, and the platform moving mechanism 6. In the following, when the two storage units are not added, they are simply referred to as "storage unit 3". When the other two liquid receiving units 4R and 4L are not used, the liquid receiving unit 4 is simply referred to as the liquid receiving unit 4. "." The portion 7 is electrically connected to the nozzle unit, the nozzle movement transmission, the stage moving mechanism 6, the cleaning liquid supply unit 8, and the wire # portion moving mechanism 9. As shown! As shown in the figure, there is a coating (only) substrate W. A plurality of grooves are formed in parallel with the substrate W in the X-axis direction. The coating device ίο uses the organic EL material to be ejected into the groove, and the organic EL material flows into the Caozhong. Further, although not shown, a heating mechanism and an adsorption mechanism are provided on the stage 5. In the heating mechanism, the substrate w coated with the organic EL material is subjected to preheat treatment on the stage 5. The adsorption mechanism is used to attach and attach the substrate Wd to the stage 5. The platform moving mechanism 6 will be connected to the underside of the platform 5. Specifically, the platform 疋 moving 97125545 8 200911389 is provided with a rotating portion 61, a parallel moving platform 62, a rail receiving portion, and a nine member 64. The rail member 64 is extended and fixed in the z-axis direction shown in Fig. 1 by the nozzle moving mechanism 2. The guide rail receiving portion is provided on the guide rail member 64 field, and the guide rhyme (4) is set. Flat = movable flat 62 is fixed on the upper surface of the rail receiving portion (10). Parallel movement = from the internal __ power can move towards ^. The rotating portion 61 is fixed to the 61 of the parallel moving platform 62 and transmits the driving force from the internal motor (not shown). The platform 5 is fixed to the upper portion of the rotating portion. : 2 = wide platform moving mechanism 6 rotates in the center of the γ-axis direction. The workpiece axis rotates (see the arrow shown in Fig. 1(a)). Further, the operation of the flat moving mechanism 6 is controlled by the control unit 7. 1. The W moving mechanism 2 has a slide 21 extending in the z-axis direction (parallel direction of the flat surface), and the nozzle moving mechanism 2 is supported by the nozzle. The mouthpiece unit is a coating mechanism that applies a coating to the substrate by using ^φ^^, for example, three nozzles of the X-ray organic EL material coating liquid, each nozzle 1H3 according to the coating liquid Spit direction 2

The method is disposed on the lower side of the nozzle unit. The D B is arranged in the direction of the pumping. The mouth "13" is placed in the Μ direction, spaced apart from the substrate; the gaps formed in the 5' nozzles 1 are formed at intervals of 列 97125545 200911389 length in the axial direction). The movement of the nozzle unit and the discharge of the organic rainbow material of (4) are controlled by the control unit 7. ^ The slide rail 21 is formed longer in the X-axis direction than the substrate W'. The nozzle unit i can be wider in the # direction than the width of the substrate w. That is, when the nozzle unit is in the manner of traversing the substrate W from the tilting of the substrate W of the opposite end of the jetting unit 1, the eight-flying advance movement is performed. So 'borrowing (four) mouth unit 1 from slippery 21

By moving toward the other end, the coating of the organic EL material can be applied from one end of the substrate w to the other in the x-axis direction. However, when the nozzle unit 移动 moves from the slide rail 21 $ to the other end, if the organic EL material is ejected from each nozzle m, not only the substrate w is coated with the ship material, but also the outer side of the substrate w is subject to organic Spit of EL material. Therefore, the liquid receiving portion 4 and the storage portion 3 are provided on the outer side of the substrate w for the purpose of receiving the discharge liquid. The liquid receiving liquid P & 4 3 is disposed on the inner side of the nozzle (see FIG. 移动). The liquid is further disposed. The p 4 is disposed on both sides of the substrate w in the X-axis direction. The liquid receiving portion 4 The upper part 41R, the connecting part is micro, and the lower part is slightly. The upper part is formed in a box-like shape having a slit right, and the slit is extended in the X-axis direction. The upper part is configured to be Each of the nozzles 1 is a. The liquid discharged from the soil passes through the slit. The lowest position of the bottom surface of the upper portion 41R is provided with a discharge (9) "· (not shown) from the coating liquid received in the upper portion 41R. The discharge flow path is discharged to the lower stage portion 43R. The coating liquid discharged from the nozzle m remains in the liquid column shape after the soil is discharged from the 97125545 200911389 n'j (the coating liquid is in a straight rod shape), but The distance from the discharge position is elongated and dripped and even atomized (more finely dropletized state). Therefore, in the present embodiment, before the coating liquid is dropletized and atomized, it is convenient to use the upper portion. 41R recovers the coating liquid. In addition, even if the coating liquid is sprayed in the upper section, it is because of the upper section. 41R has a slit collision, so that the atomized coating liquid can be prevented from flying toward the outside of the upper portion 41R. Further, the lower portion 43R is coupled to the upper portion 41R by the connecting portion 42R. The lower portion 4 is configured to collect the coating liquid that cannot be recovered by the upper portion 41R while discharging the coating liquid from the discharge flow path of the upper portion 41R. For example, from the upper portion and the substrate w The coating liquid leaking toward the lower portion is recovered by the lower portion 43R. Further, a discharge flow path (not shown) is provided at the lowest position of the bottom surface of the lower portion 43R, and the coating liquid recovered in the lower portion 43R is discharged from the lower portion 43R. The discharge flow path is discharged to the outside. Further, the liquid receiving portion 4L has the same structure as the liquid receiving portion 4R.

The upper portion 411 of the U 4L corresponds to the upper portion 41R of the liquid receiving portion 4R, and the lower portion 43L of the liquid receiving portion 4L corresponds to the lower portion 43R of the liquid receiving portion 4R. The liquid receiving portion is detached from the liquid receiving portion 4R except that the length in the X-axis direction is different from that of the liquid receiving portion 4R. In the storage unit 3, the nozzles 1 to 13 are stopped (the period in which the coating is not applied), and the nozzles u to 13 are stored so that the tips of the nozzles 11 to 13 are not dried. In other words, when the coating device 10 is stopped, each of the nozzles 1M3 is disposed above the storage unit 3, and the storage unit 3 supplies a cleaning liquid for cleaning the nozzles π to 13 to be supplied to the nozzle 9725545 11 200911389, the mouth 1M3. Each front end. Further, in the case of a solution, it is known that the cleaning liquid is, for example, a pure solvent which is coated with an organic solvent. Specifically, the use of a mixture is stupid. The solvent of the liquid 4 is toluene', and the cleaning liquid can be disposed in the storage unit 3 outside the liquid receiving portion 4L with the substrate w and the rabbit center. In addition, it is possible to completely support the coating liquid which is discharged from each nozzle, and the smear angles 11 to 13 are preferably in the sneakers. !,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, In the present embodiment, the two storage units are used separately from the north. The two storage units 3a and 3b are used in combination with the type of the coating liquid to be used for the nail washing. That is, the storage unit 3a is, for example, a discharge water hole. In the nozzle storage/cleaning of the material, the warranty unit 3b is used, for example, when the solvent-based organic EL material is discharged, and the storage unit 3a and 3b are arranged in the γ-axis direction. By moving in the direction of the x-axis, the storage unit is disposed at a position immediately below the discharge port of each of the nozzles 11 to 13 (a position at which the coating liquid can be ejected from the nozzle). As shown in Fig. 1, the storage unit is arranged as needed. As in the present embodiment, it is easy to provide a plurality of storage units. Fig. 3 is a perspective view showing the structure of the storage unit 3. Fig. 4 is a cross-sectional view showing the storage unit 3, and the storage unit % and the storage unit % have the same structure. Therefore, in FIG. 3 and FIG. 4, only one of the storage units and the storage unit 97125545 12 200911389 is shown as the storage unit 3. As shown in Fig. 3, the security department 3 is provided with a liquid recovery unit 30. The protrusion members 31 to 33 and the reservoirs 37 to 39. The % distribution & 34 to 36, and the storage mechanism liquid recovery unit 30 are for discharging the discharge liquid (five) from the nozzles (four) or from the protrusions. A member for recovering the cleaning liquid supplied from the member 3b. The liquid recovery part 3G has a box shape having an inclined bottom surface. The bottom surface has a flat portion extending in the X-axis direction. At the lowermost position of the bottom surface, a coating liquid and a cleaning liquid which are attached to the bottom surface (not shown) are provided, and are discharged through the inclined bottom surface. Further, although not shown, a member having the same function as the lower portion 43L of the liquid receiving portion 4L, that is, the coating liquid discharged from the liquid back "3" may be provided below the liquid recovery portion 30. At this time, the coating liquid that cannot be recovered by the liquid recovery unit 3 is collected. The member has a box shape with a bottom surface, and a discharge flow path is provided at the lowest position of the bottom surface. The coating liquid in the member () is discharged from the discharge flow path to the outside. In other embodiments, the lower portion 43L of the liquid receiving portion 4L may be set to the negative side of the yaw axis = the gradation is large. The lower portion of the liquid recovery unit 3 is covered by the lower portion 43L. - Three projection members 3 are provided on the bottom surface of the liquid recovery portion 30. The three projections 3 and 33 correspond to the three mouths η~ 13. The corresponding nozzles are separately stored. That is, the protrusion member 31 corresponds to the nozzle Η, the protrusion member & the nozzle 12, and the protrusion member 33 corresponds to the nozzle 13. Further, the discharge height of each nozzle (Position in the Z-axis direction) is the same, 3 protruding members 97125545 13 200911389 31 The upper surface 33a of the 33 is the same position in the Z-axis direction. The three projection members 31 to 33 are arranged substantially in a row along the X-axis square 士士# Fu glaze direction, similarly to the nozzle 1M3, in the Y The projection member 31 has a slightly staggered arrangement. The projection member 31 has a supply port on the upper surface of the yoke when the wire is placed on the wire. Although it is described in detail later, during storage, the kou, the supply is washed. The cleaning solution* is attached to the front end of the nozzle 11.

Hg 34 is connected to the supply from the supply source (not shown) for supplying the cleaning liquid (the supply of the member 31 is fine. When the cleaning liquid is supplied from the supply source, the cleaning liquid is supplied to the supply port through the supply pipe 34. Further, the supply officer 34 is connected to the storage mechanism 37. In addition, in the case of Fig. 4, in the case of Fig. 4, it is only indicated that the storage mechanism is corrected by 9 - the knife is already included. In the present embodiment, the centering and the middle supply pipe 34 branch out of the storage mechanism 37, so that when the cleaning liquid is supplied from the surface, the age is clean and the storage mechanism 37 is also provided. (The cleaning solution 37. The storage mechanism 37 is located on the upper surface of the protruding member μ - 31a. The structure of the cleaning liquid can be stored above the phenanthrene. Specifically, as shown in Fig. 4: no storage mechanism 37 has a configuration In the upper surface of the projecting member w, the storage surface 37a at the upper portion of the projecting member w is further provided. The storage mechanism of the present embodiment includes a pipe branched from the supply pipe 34 and a storage tank (10)' connected thereto. Other real-purpose towels can also constitute a structure without (4) storage slots 37a. The storage mechanism 37 may be configured to store the cleaning liquid above the upper surface 3la of the protruding member 31, or may be constituted only by the piping 97125545 200911389 branched from the supply pipe %. The above-described construction of the protruding member 31 is performed. Note that the structures of the projecting members 32 and 33 are also the same as those of the projecting member 31. That is, the projecting members 32 and 33 have an upper surface 33 opposite to the nozzles 12 and 13 respectively during storage. There are one supply ports for each of the coffee companies. The supply company 35 is connected from the above supply source to the supply port of the top coffee, and the supply pipe 36 is connected to the supply source to connect to the supply port of the top coffee. The piping 35 is connected to the storage mechanism 38, and is connected to the supply piping. The storage machines (10) and 39 are located above the protruding members 32 and the coffee, respectively, and can store the cleaning liquid. Specifically, the storage unit 1 has a configuration 1 In addition, the cleaning liquid supply unit 8 is provided with a cleaning liquid from a supply source in accordance with a command from the control unit 7 by a pump or the like provided in each of the supply pipes 34 to 36. supply Further, as described above, the storage unit 3 can be moved in parallel by the storage unit moving mechanism 9. In the present embodiment, the storage unit 3 rides the execution surface of the liquid recovery unit 30 in the respective nozzles. In the lower position, when the storage device 10 stops operating, the upper part of each of the protruding members ^: the coffee moves to the opposite side of the corresponding nozzle _, and the silk portion 3 is secreted. (4) The coating liquid of the person is used for the purpose of washing. That is, the coating liquid which is attached to the nozzle 1 is attached to the vicinity of the discharge σ, and thus the storage portion 97125545^15 200911389 will be from the respective protruding members 3 The washing liquid poured out from each of the supply ports of 33 is sprayed to the respective nozzles 11 to 13, and the nozzles 1M3 can be washed. (2) Coating operation of the coating device Next, the operation of the coating device 1 configured as described above will be described. First, an outline of the coating operation of the coating device will be described. The coating target substrate W of the coating device 10 is placed on the stage 5 by being carried in the coating device 1 by a transfer robot or the like (not shown). The substrate w is placed thereon (the plurality of grooves are placed in parallel with the X-axis direction. Further, the substrate w loaded into the coating device 10 has an anode and a hole transport layer formed thereon. When the substrate w loaded in the coating apparatus 10 is fixed to the stage 5, the #7 section 7 causes the stage_mouth unit_ to be initially placed. The frequency section 7 causes the stage 5 to be predetermined for each substrate_to The initial position simultaneously moves the nozzle unit 1 to the slider 2. In addition, the initial position Si of the platform 5

U

St: The position of the nozzle which is the most positive of the nozzle on the positive side of the Y-axis. As described above, when the flat: 5 = the positive side of the axis ^ * The field 10 σ 5 and the nozzle unit 1 are arranged, and the ° is set, the control unit 7 starts the coating operation. In the coating operation, first, the control mechanism 6 performs control to move the nozzle unit _ early heart and the platform. In other words, the control unit 7 starts the moving of the second and the lowering mechanisms 6 and the grounding of the platform. In this case, the nozzle unit 97125545 卞 16 200911389 moves in the direction of movement in the axial direction (the third motion) and the gamma motion (the second motion) in the platform 5 is repeated. Γ'

Specifically, first, the first! The action is to discharge the red material from the nozzles of the nozzle unit i, and the nozzle unit 1 moves from the 21st end to the other end on the same day. Further, as described above, each of the nozzles 11 is arranged to be spaced apart from each other on the substrate w in the Y-axis direction. Therefore, in the first operation of the first time, the two rows of grooves are sequentially applied to each of the two rows of grooves. Thereby, the groove formed on the substrate W is coated in three stages. Next, in the second operation, the stage 5 is pitch-fed in the positive direction of the γ-axis in accordance with the interval of 9 rows of the grooves formed on the substrate W. Thereafter, the first operation and the second operation are performed by the money, and the substrate W is recorded in three rows at a time. In this case, the organic EL material is applied in a stripe shape on the substrate wjl. The first operation and the second operation are performed before the organic EL material is applied to the effective region (the region of the shaped groove) of the substrate W. In addition, at this time, in addition to the substrate in the X-axis direction? The coating of the organic EL material is also applied to the remaining portion other than the effective region, but the organic EL material applied in the region other than the effective region is removed by the removal treatment described later. According to the above, the coating operation for one substrate w is completed. The other two "ends the substrate w of the coating process of the coating device 10, * the unmanned transporter is removed from the coating device 1Q. With respect to the substrate W that has been carried out, the organic EL material applied in the region other than the political region on the substrate W is removed. The removal treatment may be any method that can remove the organic EL material on the substrate W by the method 97125545 17 200911389, and any method can be 'for example, the method of using the laser abrasion to remove the organic germanium material=may be a pre-wire area The method of attaching the cover tape. • The substrate w whose end of the process has been removed is subjected to a drying process (baking process). From the top, the red organic EL material is coated and dried. Then, the substrate W' is coated and dried with respect to the green and blue organic EL materials in the same manner as in the case of red. That is, the coating treatment of the green organic EL material, the drying treatment of the applied green organic EL material, the coating treatment of the blue organic enamel material, and the application of the applied blue organic EL material are carried out in sequence. Reason. Thus, the red, green, and M-color organic EL materials were coated and dried to form a light-emitting layer of the organic EL display device. Further, an organic EL display device can be obtained by forming a cathode electrode on a light-emitting layer by, for example, a vacuum evaporation method on a substrate on which a light-emitting layer has been formed. (3) Operation of the coating device in the standby state The coating device 10 is in the standby state when the coating operation is not performed (when the device is not operating). In this standby state, the nozzle unit 丨 is retracted to a predetermined position, and the nozzle 1Μ3 is stored in contact with the washing liquid. Hereinafter, an operation from the operation state to the standby state and an operation from the standby state to the operation state will be described. Fig. 5 is a flow chart showing the flow of the operation of the coating device 10 in the transition from the operating state to the standby state and from the standby state to the operating state. The flow chart shown in Fig. 5 shows the operation of the coating device 10 after the application of the stop device to the coating device 1 in the application operation. 97125545 18 200911389 First, in step Si, the nozzle unit W μ s t 控制 of the control unit 7 会 is moved by the V-stop. Further, the nozzle unit is stopped at the end of the two ends t located at 佯瞢#q ^+ and the moving mouth of the moving nozzle 2 is stationary (the left end shown in Fig. 1 (4)). According to the specificity, the mouth of the mouth is more related to the nozzles, and the positions of the protrusions in the (4) direction are the same positions in the axial direction. Here, at this position, the unit 1 lifts the fresh portion 7 to stop the coating of the respective materials 11 to 13 by the nozzles. In the intermediate system p_3, the position of the storage unit 3 is switched by moving the storage unit. Specifically, the control unit moves in such a manner that the bottom surface of the liquid recovery unit 30 is located immediately below each nozzle 3, and moves so that each of the projection members (4) is located immediately below each of the nozzles n to 13 = step S4. The control unit 7 supplies a control command to the cleaning liquid supply #8, and supplies the cleaning liquid to the supply port of each of the projection members 33 from the supply pipes. At this time, the cleaning liquid supply unit 8 supplies the cleaning liquid to the upper surface 31a to the coffee of each of the protruding members 31 to 33, and stores the degree of cleaning. Hereinafter, the details of the steps & will be described by taking the protruding member 31 as an example. In the following description, the protruding members 31 of the three protruding members 31 to 33 will be described as an example, and the other protruding members 32 and μ are also the same as the protruding members 31. Fig. 6 is a view showing the state of the storage unit 3 after the supply of the cleaning liquid at the time of storage. In addition, in FIG. 6, although the state in which the washing member (4) is supplied to the protrusion member 31 in the three protrusion members 31 to 33 is shown, the state of the cleaning liquid is in the same manner as in other members. 97125545 19 200911389 and 33 6 _ status. _, in the step (4), the cleaning solution is supplied by the L co-receiving portion 8, and the upper surface 31a of the protruding member 31 is mounted on the upper surface 31a of the protruding member 31, and the yin liquid L, which is compliant with the upper surface, is supplied with a predetermined amount of cleaning 供应. In the case of the cleaning liquid, the washing liquid is in a state of being protruded from the upper surface 31a by the surface tension (loaded state). In step S4, the cleaning liquid supply unit 8 supplies the cleaning liquid until the 3L state of the upper 3U wall of the protrusion 31 is ___, and the supply is stopped, and the cleaning liquid supply unit should It is sufficient to stop the supply of the cleaning liquid t containing the amount of the washing liquid H on the upper surface 31a. In addition, if the amount of the miscellaneous amount is too large, the state of the hemispherical surface is collapsed due to the surface tension, and from the above 31a, the cleaning liquid may overflow the silk, and the cleaning liquid supply unit 8 preferably does not The supply of scented < ^ is the supply of 7 liquids. As described above, according to the present embodiment, it is not necessary to supply (4) the cleaning liquid, so that the amount of the washing liquid consumed can be reduced, and the cleaning liquid can be used efficiently.

Si S4 towel' When the supply of the cleaning liquid is supplied, the supply port of the cleaning liquid is supplied to the storage mechanism π. Then, if it is stored in the top of the raised member Μ Μ 洗 ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^^ =^ The pressure of the cleaning liquid in the structure 37 and the surface tension _ on the upper surface of the cleaning liquid L are balanced and (according to the degree and size). Under step (4) - step w, the control unit 97125545 20 200911389 7 provides a control command to the storage unit moving mechanism 9 to move the storage unit 3 upward. The storage unit 3 moves relative to the discharge ports of the respective nozzles 11 to 13 corresponding to the upper surfaces 318 to 33 of the respective projecting members 31 to 33 at predetermined intervals. The predetermined interval is preset, and specifically, the cleaning liquid contained in the upper surfaces 31a to 33a of the respective projecting members 3 can at least contact the intervals below the nozzles. In other words, the predetermined interval is set to be smaller than the height of the washing liquid contained above. In addition, depending on the type and type of the cleaning liquid (using PTFE (polytetrafluoroethylene), etc.), the height and size of the washing liquid are also dependent on the size and storage of the supply port. The piping thickness of the mechanism, etc. In addition, in the present embodiment, each of the sprays is used during storage (the same applies to washing materials described later).

As a result, it is impossible to apply milk in the coating action.

Here, the cleaning liquid L that has been centered on the top is evaporated. Therefore, the passage between the leaves, the above 31a to 33a, then, if the washing liquid L is not assumed to be provided with a means for replenishing the washing liquid, the amount of the washing liquid L that is filled with time is gradually reduced. When Tie Ming ^ 97125545 200911389 is less than a certain place (the liquid level of the washing liquid in the storage mechanism 37 to 39 is lower than a certain position), the discharge port of the nozzle will not come into contact with the washing liquid. Accordingly, if the means for replenishing the cleaning liquid is not provided, there is a problem that the nozzle cannot be stored while being in contact with the cleaning liquid. In order to solve this problem, in the third embodiment, the configuration in which the storage mechanisms 37 to 39 are provided is adopted. In other words, in the first embodiment, since the cleaning liquid is stored in the storage mechanisms 37 to 39 to a position higher than the upper surfaces 31a to 33a, when the cleaning liquid 1 contained on the upper surfaces 31a to 33a is reduced, Then, the cleaning liquid is supplied to the supply port of each of the protruding members 31 33 through the pressure of the cleaning liquid in the storage mechanisms 37 to 39. Therefore, in the first embodiment, even if the cleaning liquid evaporates, the upper surface 31a to 33a can maintain the loaded state, and the nozzle can be stored for a longer period of time than when the storage mechanism is not provided. Referring to the description of Fig. 5, in the next step π of step %, the control unit 7 will judge whether or not the coating apparatus is operated from the user. When there is an operation instruction, the control unit 7 executes the operation of step S7 described later. On the other hand, if there is no operation instruction, the control unit 7 performs the operation of step S6 again, and repeats the operation of step s6 at predetermined time intervals until there is an operation instruction. That is, the control unit 7 waits until there is an operation instruction, and if there is an operation instruction, the operation of step S7 is executed. When the instruction to operate the coating device is set to 1 turn, the k-cloth is set to 1 〇 by performing steps S7 and S8 々 to change from the standby state to the operating state. That is, in the step, the control 47 supplies a control command to the storage unit moving mechanism 9, thereby returning the storage unit 3 to the lower position (the position before the step S5 is executed). Thereby, since the 97125545 22 200911389 = part 3 is moved to a position far from the nozzles η to 13, the coatings 11 to 13 are moved in the coating, and the nozzles 11 to 13 and the storage unit 3 are still not in phase. collision. Then, the control unit 7 shifts the U-engineering day to the storage unit, thereby switching the position of the storage unit 3. Specifically, control = Γ: '33 The storage unit 3 located immediately below the mouth 1W3 moves in such a manner that the nozzle 1Μ3 is directly below, and the part 3 towel coating liquid pays the scale. The operation of the coating device 10 up to == ’ is completed by the above steps S1 to S8. After the operation, the coating device 10 can start the coating process again. In the second embodiment, the nozzles u to 13 are held in the nozzles 1-3 to 33a, and the discharge ports are placed on the surfaces 3ia to 33a. The discharge ports of the nozzles 11 to 13 are in contact with the state of the cleaning liquid. At the same time, it is not necessary to supply the cleaning liquid frequently, and it is possible to further improve the cleaning liquid stored in the storage mechanisms 37 to 39 by the storage mechanism u according to the first embodiment. : Face: The rise and fall between the washing liquids can make the length of the material _ miscellaneous. As a result, the cleaning liquid can be stored on the top surface of the coffee container, and the nozzles u to i3 can be stored for a longer period of time. In addition, the storage unit 3 can be used for washing 97105545 of each nozzle 1W3. Specifically, when the cleaning operation is performed, the control unit 7 first performs the same operation as 23 200911389 (the above steps si to S3. Next, the control unit provides a control knitting order to the cleaning liquid supply unit 8, and the secret washing is performed. The cleaning liquid supply unit 8 executes the cleaning liquid supply 1 , and the cleaning liquid supply unit 8 flushes the cleaning liquid from the (four) and the mouth of each of the protruding members 3 of the storage unit 3. Correction, she (4) is not used for storage. Then, the control unit 7 performs the same operation as the above-described steps: Thereby, the respective protruding members 31 to 31a to 33a of the storage unit 3 are disposed in correspondence with the respective nozzles 1 The discharge port of the nozzle U is in contact with the discharge position (four) state. The wire, each of the materials u to l3 is washed by the cleaning liquid, and at the time of washing, from the surface member 3 The washing liquid from the supply port is discharged from the bottom of each of the three parts of the body, and is discharged from the bottom of the collection unit (4), and is discharged from the discharge unit 3G. Washing (4) - setting the Weiding time, thereby ending the nozzle After the washing of the nozzle is completed, the control unit 7 performs the above-described operations of steps S7 and S8. In addition, the washing: the treatment system can be carried out before or after the day of the coating device 1G: the application can also be carried out at the time of each meal, and the separation can be carried out. The cleaning process may be started after the instruction is given by the H-hand or the movement control unit 7, and may be automatically started by the control unit 7 in accordance with the predetermined conditions. As described above, the warranty department may be used according to the present embodiment. (3) The second operation is performed in the second embodiment (the second embodiment). Listening to the nozzle nozzle wash 97125545 24 200911389 ~13 There is a possibility of residual adhesion of the cleaning liquid. Therefore, it is set to remove the residual # of each nozzle ^ from the supply state, as the cleaning liquid ～ 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Swing the connection between the various parts and the control department. Material, 8 Seoul 2__ silk Fig. 8 is a cross-sectional view corresponding to Fig. 4. Fig. 8 is a state of the storage unit 3 in a standby state. In addition, in Fig. 7 and Fig. 8, for Fig. 2 and Fig. 4 In the second embodiment, the coating device (nozzle storage device) is further provided with the same reference numerals as in FIG. 2 and FIG. 4, and the detailed description is omitted. In addition, as shown in Fig. 8, the storage mechanism 37 of the storage unit 3 has a structure in which the suction pipe is moved. The cleaning liquid suction unit m is constituted by an extraction pump or the like, and its operation system is The control unit 7 controls the suction pipe 37b to connect the storage tank 37a to the cleaning liquid suction unit ι〇. In addition, the coating apparatus structure of the second embodiment other than the above is the same as the configuration. 〃 Λ Next, the operation of the second embodiment will be described in the same manner as in the first embodiment. Second, when the operation state is changed to the standby state 97125545 25 200911389, the operations of steps S1 to S5 shown in Fig. 5 are executed. The state of the storage unit 3 is in the state shown in Fig. 8 by the action of the step illusion. At the time of storage, the storage of the nozzles 11 to 13 is performed in this state. In addition, in the second embodiment, when the operation state is changed from the standby state to the operation state, the "cleaning liquid adhered to each of the nozzles 11 to 13 is sucked by the cleaning liquid suction portion". The first embodiment. Referring to Fig. 8 as an example, the cleaning solution of each storage mechanism 37 is sucked by the 彳-cleaning liquid suction unit 101 under the slight machine wire of Fig. 8 when the operation is instructed by the latter. Thereby, the washing liquid (the washing liquid on the _ (four) mouth 11) L which is filled in the above is sucked to the mouth of the f and recovered. In the above description, the large rising member 31 of the three protruding members 31 to 33 will be described as an example. However, the remaining protruding members π and I3 perform the same operations as those of the protruding member 31. As described above, it is formed in the second embodiment. In this case, the cleaning material which has been discharged from each of the nozzles 11 to 13 can be removed by the cleaning liquid suction unit 101. Specifically, after the result of the defeat of S6 shown in 5:5, the control unit 7 supplies the control liquid to the cleaning liquid suction unit 1G1, and the silk liquid suction unit is sucked. In other words, the cleaning liquid suction unit 101 suctions the cleaning liquid from the supply pipes 34 to 36 via the storage mechanisms 37 to 39. Thereby, the washing liquid on each of the upper surfaces 31a to 33a is called to be thinned. In the second embodiment of the county towel, the operation of step (4) is performed by performing the pumping and tapping using the cleaning liquid suction unit. U liquid pumping 1G1 (five) pumping action is performed at the end of the washing process; it is executed before the sputum coating operation is resumed. That is, in the washing process, 97125545 26 200911389 If the washing liquid is poured out for a predetermined predetermined time, the washing liquid supply unit 8 is supplied. Then, the washing liquid is pumped _ m when performing "two = do. By means of the axial suction action, the money material can be sucked from each protrusion:: The mouth should be sucked in each nozzle u~l3 1~ guilty of the supply will be in each nozzle When the "cleaning liquid" attached to 11 to 13 is ready for washing, the control unit 7 executes the above-described steps to perform the above-described suction operation. (4) and the operation of S8, in which the application can be carried out in the form of a second application, since the cleaning liquid attached to each of the τ"~13 can be removed by the cleaning liquid, so when the second and second are performed, The cleaning solution will not remain on the crucible. Further, 2: in the form of application, the second suction is performed by the cleaning liquid suction unit m: the mechanism is displayed. That is, it is not necessary to separately provide the west for performing suction, and thus the structure of the coating device can be made. Heart thus (different 3 implementation)

U! Really sharp:: = mine device says ". In the above-mentioned cleaning liquid, the storage mechanism is less washed by evaporation, and as a result, if the amount of the cleaning liquid that is erroneously decreased, the liquid level is gradually reduced to a certain height, and the upper part is (=) Washing (usually, if the storage mechanism does not show the washing liquid on the above 31a~33a, it will not be used for '=(6) degrees, then:: No storage mechanism is set~, although two or two = 200911389 After a certain period of time, the nozzle cannot be stored. In the third embodiment, the amount of the cleaning liquid stored in the storage mechanisms 37 to 39 is detected, and the cleaning is again supplied before the cleaning liquid is placed on the upper surfaces 31a to 33a. In this way, the time limit of the storage nozzle can be eliminated. The details of the third embodiment will be described below with respect to the difference from the i-th embodiment. A diagram showing the connection relationship between each part of the coating apparatus and the control unit. In addition, in FIG. 9, the same components are attached to FIG.

2 the same component symbol, and the detailed description is omitted. As shown in Fig. 9, in the third embodiment, the "application device (nozzle storage device) further includes a liquid amount detecting port 102. The liquid detecting portion 1 2 is provided in each of the storage mechanisms. The amount of liquid in each of the storage mechanisms 37 to 39 is detected. Specifically, the amount of washing stored in the inspection mechanism π is up to a certain level (the night surface of the cleaning agent of the storage mechanism has reached a certain degree or less). The detection result ' performed by the liquid amount measuring unit (10) is notified to the control unit 7. That is, if the amount of the any-washing liquid stored in the storage means 3 is less than the preset amount of mosquitoes, the liquid amount detecting unit (10) notifies the control unit 7. Fig. 10 is a flow chart showing the operation flow of the coating apparatus of the third embodiment. In addition, in FIG. 10, the step of performing the phase shown in FIG. 10 is given to the step of FIG. 5, and the detailed description is omitted. The == mode is also the same as that of the i-th embodiment, and when the operation state is changed to the standby state, the operations of steps S1 to S5 are executed. In the third embodiment of the F, the operation of the step SU is performed after the step. That is, in step S11, the control unit 7 97125545 28 200911389 is determined to be a feed. In this period, the fixed-frequency slave detection unit 102 issues a notification that the contents are Du-, the sputum m, and the storage mechanism 37, and any liquid sputum remaining in the sputum has reached the preset n-valley cleaning, ±. When the above-described notification is made from the liquid amount detecting unit 102, the control unit 7 performs the operation of the step by re-sending the cleaning liquid, and the other steps are performed. The control unit 7 determines that the notification is not performed. On the other hand, the cleaning liquid is supplied again, and in steps S6 and S12, Λ7 is batch-produced. In the case of the cleaning solution supply unit δ, the cleaning liquid is supplied to the cleaning liquid supply unit δ. The supply of μ washing liquid supplied in step S12! Can be a preset amount. By using the steps of the steps 37 to 39, the cleaning and storage structure is stored in the upper and lower portions, and the operation of step S6 is performed. The operation of the step % in the third heart (four) is also the same as in the first embodiment. In other words, it is determined whether or not the operation of the coating device is instructed by the user, and when the operation is performed, the operation of step S7 described later is executed. On the other hand, when there is no operation, the operation of step Sn is performed again. Therefore, the control unit 7 performs the operation of repeating the execution of the step S1U at the same time as before the operation instruction. In other words, the control unit 7 is in the standby state until the operation instruction is issued, and when it is determined that it is necessary to supply the cleaning liquid again ("YEs" in the step su), the cleaning liquid is again supplied: Further steps S7 and S8 The action and the first! The embodiment is the same. As described above, according to the third embodiment, the case of 97125545 29 200911389 in which the nozzle storage is impossible is detected (that is, the amount of the cleaning liquid stored in the storage mechanism 37 to 39 is less than the predetermined amount), and the inspection is performed _ The situation is for m night. Under the premise that the supply of the cleaning solution has not been exhausted, the mouth can be kept safely. According to the third embodiment, even when the nozzle is stored for a long period of time (for example, 丨曰), the cleaning liquid of the upper surface does not disappear. Further, in the third embodiment, the cleaning liquid suction means shown in the second embodiment is not provided. However, the cleaning liquid suction means may be provided in the third embodiment. As a result, in the same manner as in the second embodiment, the cleaning liquid adhering to each of the nozzles 11 to 13 can be removed with a simple structure. Further, in the third embodiment, the storage unit 3 can be additionally supplied with the cleaning_pipe (pipe). Fig. n is a structural diagram showing the storage unit 3 of the third embodiment. As shown in Fig. U, in the third embodiment, a valve 103 is provided between the branch portion of the supply pipe 34 and the storage mechanism 37 and the supply source. Further, a supply pipe 阀c that connects the supply pipe between the valve 103 and the supply source and the storage tank 37& is provided. Further, the opening and closing of the valve 103 is controlled by the control unit 7. Further, in Fig. u, only the structure of the protruding member 31 is shown. However, the other protruding members 32 and 33 are also provided with a valve and a resupply pipe in the same manner as in Fig. n. In the modification shown in Fig. 11, when the cleaning liquid is supplied in the above step S4, the control unit 7 opens _1〇3. Therefore, the washing liquid supplied from the supply source is supplied to the supply port of the projecting member 31 through the supply pipe 34. On the other hand, when the cleaning liquid is again supplied in the above-described step S12, the control unit 7 closes 97125545 30 200911389 阙103. Therefore, the washing liquid supplied from the supply source is supplied to the storage tank 37a via the resupply (four) 37c. As described above, when the washing is again supplied during storage, the washing liquid can be directly supplied from the supply source to the storage tank. Further, in the above description, only the phase of the protrusion member 31 will be described, but the operation of the other members 32 and 33 is also the same as that of the protrusion member 31 (the fourth embodiment).

Next, the nozzle storage device according to the fourth embodiment will be described. In the fourth embodiment, the coating device (nozzle fresh) is subjected to the cleaning operation of the nozzle in addition to the above-described 対_tube operation. Hereinafter, the details of the fourth embodiment will be described centering on the difference from the second real surface state. The coating apparatus structure of the fourth embodiment has the same structure as the nozzle holder of the second real state except for the storage unit (more specifically, the projection member of the storage unit). Hereinafter, the configuration of the storage unit will be described with reference to Figs. 12 and 13 . U Fig. 12 is a perspective view showing the structure of the storage unit in the fourth embodiment. In the fourth embodiment, similarly to the storage unit 3& and the storage unit 第 of the second embodiment, the application device includes two storage units, and since the two storage units have the same structure, in FIG. One of the two storage units is shown in the storage unit 110. As shown in FIG. 12, the storage unit 11 includes a liquid recovery unit, projection members 111 to 113, supply pipes 34 to 36', and storage mechanisms 37 to 39. It is to be noted that the same components as those in Fig. 3 are denoted by the same reference numerals as those in Fig. 3, and the detailed description thereof will be omitted. 97125545 31 200911389 As shown in FIG. 12, in the fourth embodiment, the shape of each protruding member 11M13

As an example, the structure of the protruding member will be described.

In the same way, when the sister net is configured, it is opposite to the lower side of the nozzle n (the surface of the discharge port is provided) Ua. In addition, the supply port ρ is provided on Ilia above, and the cleaning liquid is supplied from the supply port to the cleaning liquid. σ. As will be described later in detail, the front end of the nozzle 11 is touched during washing. Further, the dog-inducing member 111 has a cylindrical outer shape, and the upper llla is slightly

Wherein the diameter of the front end of the projection member m is smaller than the front end of the nozzle u. That is, the diameter φ 1 of the above Ilia is smaller than the lower 11& diameter of the nozzle 办 2 . For example, the ratio of the two diameters is set to φ 丨: φ 2 = 3 : 5, specifically, when the diameter φ 1 of the upper surface 111a is φ ΐ = 3 [deleted], the lower surface 11 & diameter ¢ 2 of the nozzle η Set to φ2=5[πιιη]. Further, the protruding member ηι is provided with an inclined surface mb which gradually decreases toward the outer circumference around the upper nia. By setting the shape having the inclined surface mb, the protruding member lu can reduce the diameter of the upper Ula while ensuring the thickness of the entire protruding member 111 and ensuring the strength. The above-described configuration of the protruding member 111 will be described, and the configuration of the protruding members 112 and 113 is also the same as that of the protruding member 1U shown in Fig. 13. That is, the projecting members 112 and 113 have upper faces ma and 113a which are disposed opposite to the nozzles 12 and 13 and are provided with 97125545 32 200911389, respectively. Set one supply port on each of the above (10). Further, the projecting member 彳 112 is provided with an inclined surface 112b which is gradually lowered toward the outer periphery of the upper surface 112a, and the protruding member m is provided with an inclined surface U3b which gradually decreases toward the outer periphery around the upper surface U3a. Next, the operation of the coating device (nozzle storage device) in the fourth embodiment is the same as the operation in the fourth embodiment. In the fourth embodiment, the coating device performs an operation of washing the nozzle in addition to the coating operation and the storage operation of the nozzle. Hereinafter, the reference 14 ’ will be described for the cleaning operation. Fig. 14 is a flow chart showing the flow of the cleaning operation of the fourth embodiment. Further, the device can be carried out at a predetermined time interval before the start of the day-to-day operation or after the mother-person performs the coating process on the predetermined number of substrates. Further, the operator at the washing station manually instructs the control unit 7 to automatically start the operation by the control unit 7. ", can be in accordance with the predetermined article." First, in the step (2), the control unit 7 stops the nozzle unit i that is moving during the coating process. In the second end, the storage unit κ is on the side of the nipple moving mechanism. Stop. More specifically, V: set one end (Fig. 1 (a) is shown on the left side - /,., the nozzle unit 1 stops at each mouth, and the member of the dog is positioned in the X-axis direction. ,, - The retreat position of the nozzle unit! Then, at the position where the position is ϋ ϊ, the control unit calls the control command early, so that the test is performed by each nozzle 9711. In the next step S23 of the step S22, the control unit 7 shifts the US control command to the storage unit, and switches the position of the storage unit 11A. Specifically, the unit 7 places the bottom surface of the liquid recovery unit 30. The storage unit UG that is directly below the respective nozzles ΐ3 is moved so that the respective projection members U1 to U3 are positioned at the position immediately below the respective nozzles ΐ3: In the next step (4), the control unit 7 supplies the cleaning liquid supply unit 8 Material control command, 峨 supply source supply π supply to each protruding member 1H13 via each supply arrangement f Fig. 15 shows a projection member (1) when the step is performed. Fig. 15 is a cross-sectional view taken along line BB of the storage unit (7) shown in Fig. 12. Hereinafter, the projection member m is taken as an example, and the step is performed. Further, the τ plane is described by taking the projection member 111 of the member ιη to ι 3 on three sides as an example, but the H3 is also the same as the projection member (1). The member 112 and the supply source pair are as shown in Fig. 15 The supply port of the protrusion member in is supplied with the cleaning liquid '峨 supply π medium_washing liquid. At this time, the cleaning liquid supply unit 8 controls the station in such a manner that the cleaning liquid L is discharged to a predetermined height h from the upper surface llla. (4) The height h of the cleaning solution depends on (4) of the protruding member and the nozzle, the cleaning type, the size of the supply port, the supply flow rate, etc. Here, the material of the protruding member is set to PTFE. (polytetrafluoroethylene), the material of the nozzle is made of acrylonitrile, the cleaning liquid is made into an organic solvent (f benzene, etc.), and the supply pore size is set to 2 [mm] 'The supply money is set to 1G to 25 [ml/min]. This implementation is 97125545 34 200911389 in the form of sadness, because it must be washed The supply is controlled, and the flow adjustment for the wash adjustment supply (4) is preferably provided with a micro-bevel (10) re-flowing, and the night Wei should be able to flow through the dumping outlet. The bottom surface of the '__ is returned from the bottom surface and then returned to the description with reference to Fig. 14. In the lower part 7 of the step (10), in the storage unit moving machine step 25, the control is directed to ± square smoke S Μ, control command, Thereby, the storage unit 110 is moved to the side. The storage unit 11 moves relative to the discharge port of each nozzle corresponding to each of the protrusions (1) to (1) by a predetermined interval d. Fig. 16 shows the projecting member 1U when the 2 = two action is performed. W R R, m of Fig. 16 is a β-Β cross-sectional view of the storage unit 11〇 shown in Fig. 12. Hereinafter, the empty member, the meat six, and the member 111 will be described as an example, and the description will be given for the step S25. In addition, the protrusion member (1) in the middle is an example:: _16: The three protrusions and 113 are also the same as the protrusion member lu.仵... In the step milk, the upper surface of the protruding member lu is moved in a relative manner by a predetermined interval from the discharge port of the nozzle. In the predetermined interval d, specifically, as shown in Fig. 16, the cleaning liquid L discharged from the upper (1) & (4) contacts the interval 11a of the nozzle n 11 . That is, the predetermined interval d is set in such a manner that it is smaller than the height 匕 of the cleaning liquid l which is ejected from the upper surface 11la. For example, when the cleaning liquid is an organic solvent (for example, toluene), the upper surface ma diameter φ1 of the protruding member m is set to 3 mm, and the fine opening diameter is set to 97125545 35 200911389. (4) The lower surface 11a of the nozzle 11 has a diameter φ2 of 5 [mm]. When the supply amount of the cleaning liquid is 2G [ml/mln], it is understood that it is preferable to set the predetermined interval to (4).5 [Caf]. In other words, it is understood that the above-described conditions are set, and the cleaning liquid L that has been discharged from above is brought into contact with the lower mountain of the spray, and the nozzle 11 is washed. r' Further, in the present embodiment, the diameter Φ1 of the upper Φ111 & is smaller than the diameter Φ2 of the lower surface 11a of the nozzle 11. Therefore, the cleaning liquid adheres only to the lower surface (1) of the nozzle u and the cleaning liquid L which is thirsty from the supply port does not adhere to the side surface of the nozzle u. By the operation of the above step S25, the upper surfaces 111a to 113a' of the respective projection members of the storage portion 11 are placed at positions facing the discharge ports of the respective nozzles u to 13, and the discharge ports of the respective nozzles 1 and 13 are Contact with the state of the cleaning solution (Figure 16). Thereby, each of the nozzles 11 to 13 can be washed with the cleaning liquid. Further, in the present embodiment, since the nozzles u to 13 are not in contact with the respective projecting members 111 to 113 at the time of cleaning, the contact between the respective nozzles 1W3 and the respective projecting members 111 to 113 does not occur. Each of the nozzles u to 13 is displaced. In other words, it is possible to prevent the positional shift of each nozzle 3, and as a result, it is impossible to apply the coating liquid to the correct position during the coating operation. Further, the washing = (four) supply system continues from the start of the washing (starting from the end of the operation of step S25) for a predetermined predetermined time. Then, the action of step S26 is performed. Returning to the day and month of Fig. 14, the control unit 7 supplies a control command to the cleaning liquid supply unit 8 at the next step of step S25, and stops supplying the liquid 97125545 36 200911389 from the supply source. In the next step S27, the cleaning_suction portion 1Q1 starts the suction of the cleaning liquid by supplying the (four) command to the cleaning liquid suction unit. Thereby, the cleaning liquid in the vicinity of the supply port of each of the protruding members m to 113 is sucked by the storage mechanisms 37 to 39, and the cleaning liquid near the supply σ is removed. That is, the cleaning liquid on the upper surfaces 11la to U3a of the rising members 111 to 11; 3 and the cleaning liquid adhered to the respective nozzles are sucked and removed. Further, as described above, in the present embodiment, the cleaning liquid is adhered only to the lower surface of each of the nozzles u to 13. Therefore, even when the cleaning liquid is attached to the nozzle 丨1, the cleaning can be easily performed four times. Suction action. When the cleaning liquid suction unit 101 is operated for a predetermined predetermined time, the suction operation is terminated. In the above step 7, the action of step S28 is performed. The command is at I: two control (10) ^ ^ returning to the lower position (performing the position before step S25)

C. This is because the wire portion 110 is moved to the position where it is placed, so that even if the nozzles 11 to 13 move while the nozzles 11 to 13 are moved, the nozzle portion = 0 does not: collide. Then in step _, control the position. When the body mechanism 9 provides a control difficulty, the storage unit 11 switches the storage unit 11 and the control unit 7 causes the storage unit 11 at the position of the nozzles u to n to be in the liquid, ' 11~13 is in the lower position, and the bottom surface is located in the nozzle to make it from the nozzles 11 to 13; the cloth: the movement is bad, and the liquid is splashed during the coating process. The coating is applied to the storage unit 110, and the operation is terminated by the above steps S21 to S29 97125545 37 200911389. After the washing action, apply the treatment. As described above, according to the present embodiment, the coating surface (4) is contacted with the cleaning liquid to be washed. According to this, in the pumping __, because only the cleaning of the nozzle attached to the nozzle can be removed (deactivated), _ she can easily and surely perform the pumping in the case where the washing liquid is attached to the side of the nozzle. Suction action. That is, it can be removed by using the cleansing liquid. In the present embodiment, the upper diameter 01 is smaller than the lower surface of the nozzle, and the cleaning liquid which is ejected from the supply port does not adhere to the nozzle side surface even if the predetermined interval is small. On the other hand, the cleaning liquid suction operation in step S27 is such that the closer the distance between the fine and the nozzle is, the larger the suction effect is. According to the present embodiment, the distance between the supply nozzles is made close to each other. The knife knows how to pump, and the purpose is to perform the pumping action. In the fourth (fourth) state, in the second embodiment, when the coating device includes the cleaning domain 1Q1, the cleaning operation performed by the device (the nozzle storage device) is described, even if In the coating-spreading coating apparatus of the third embodiment and the third embodiment, the cleaning liquid suction unit m is not provided, and the coating apparatus can perform the cleaning operation. Section, subsidiary, (4) The device may not be executed. Step S27 (step 7 is skipped), and step S28 is performed after the step is moved. (Variation of the protrusion member) The structure of the variation of the protrusion member 97125545 38 200911389 of the above-described fourth embodiment will be described with reference to Figs. 17 to 20'. Further, in Fig. 17 to Fig. 20, the structure of the one of the three protruding members provided in the coating device is shown as an example, but the other two protruding members have the same structure as the protruding member shown. Fig. 17 and Fig. 18 are views showing the structure of a projection member according to a modification of the above embodiment. The upper surface 121a of the projection member 121 in Figs. 17 and 18 has a diameter larger than the diameter of the lower surface 11a of the nozzle 11. Further, in the present modification, the supply port aperture provided in the upper surface 12a is smaller than the Ua diameter of the lower surface of the nozzle u. In the present modification, when the interval d is too small, as shown in Fig. 18, the cleaning liquid L also comes into contact with the side surface of the nozzle 11. Therefore, at the time of washing, the interval d' between the upper surface 121a and the lower surface 11a is set such that the washing liquid L which is thirsty from the supply port provided on the upper surface 121a contacts only the distance of 1 ia below. Here, the shape of the shouting surface is slightly rounded when the washing liquid L «water level (parallel surface of the χγ plane) is discharged from the supply port, and the above kd may be set to be, for example, larger than the distance from the i2ia. y (washing liquid at the horizontal plane from the d [section diameter, smaller than the diameter of Ua below). As described above, the diameter of the upper surface 121a of the protruding member 121 may be set to be smaller; the lower diameter ila diameter 'in this case' of the bird 11 may also be on the side of the nozzle 11 by appropriately spacing the above-mentioned spacing d δ Washing is carried out without attaching the cleaning solution. 19 and 81 are structural diagrams of the protruding members of other variations of the system. The upper surface 131a of the large lifting member 131 in Fig. 19 has a concave curved surface. Further, in Fig. 2A, the upper surface 41a of the member 141 is a convex curved surface. Further, the upper surface 131a of the cantilever member 131 in Fig. 5 and the figure is larger in diameter than the lower surface of the nozzle η. 97125545 39 200911389 lla The diameter of the upper surface 141a of the protrusion member 141 is larger than the diameter of the lower surface 11a of the nozzle u. Further, the supply port aperture ' provided on the upper surface 131a or 141a is smaller than the diameter of the lower surface 11a of the nozzle 11. As shown in Figs. 19 and 2B, the upper surface of the projecting member may be a non-planar surface and may be a curved surface. In the modification shown in Fig. 19 and Fig. 2', during the cleaning, the interval d between the supply port of the upper surface 131a or 141a and the lower surface 11a of the nozzle 11 is set to be the same as the modification shown in Figs. 17 and 18, and is set to The cleaning liquid from the supply port provided on the upper 131a or 141a [only Γ'' touches the distance of the lower lla. For example, the interval d may be set to a distance d' from the supply port of the upper surface 131a or 141a (the cross-sectional diameter of the cleaning liquid L at the horizontal plane at the distance d' is smaller than the diameter of the lower 11a). Further, as shown in FIG. 2A, when the upper surface 141a of the protruding member 141 is a convex curved surface, the height of the cleaning liquid L held on the upper mia is smaller than the case where the upper surface of the protruding member is flat. . Therefore, since the above-described interval d becomes smaller, the suction effect when the washing liquid L is sucked from the supply port becomes larger. Further, as in the fourth embodiment of the above-described ij state, even if the upper surface H1 of the projection member U1 is smaller than the lower surface 11a of the nozzle n, the upper surface can be formed into a curved surface. Thereby, the same effects as those of the above embodiment can be obtained. (Other changes) In the above-described fourth embodiment, when the nozzles are cleaned, the storage unit 3 (or 110) is moved to move the respective protruding members 3 (or The upper surfaces 31a to 33a (or 1Ua to 11a) of m to 113) are disposed at positions facing the respective nozzles 11 to 13. Here, in other embodiments, 97125545 40 200911389 each of the protruding members 31 to 33 (or ln + , fly 11M13) is relatively moved to each of the mouthpieces u~13, that is, it can also be substituted for the protection section 3 (or UQ). In the movement, the nozzles 11 to (3) are sprayed K1), and the retaining portion 3 (or (10) and the nozzles 11 to 13 (nozzle unit 1) are moved in both directions. In the form, the coating is applied by applying the coating liquid to the three nozzles 1 and 13 , and the storage unit 3 has three protruding members 31 to 33 corresponding to the respective nozzles u to 13 (or (10). Here, In other embodiments, the number of the squealing sounds may be set to any number. In the above embodiment, the case where the nozzle storage device and the coating device of the present invention form a body structure will be described as an example, but the nozzle storage device may be used. In addition, in the above-described embodiment, the coating liquid is an organic EL material or a hole transporting material as a coating liquid, and the manufacturing apparatus (coating apparatus) of the organic display device is an example. Description of the Invention The nozzle storage device of the present invention can also be used for other coating splitting. For example, the nozzle storage device can be used for a device that applies a resist liquid, s〇G (Spin G liquid, or a fluorescent material used in the production of a PDP (Electronic Display Panel). The liquid crystal color display is displayed in color. The device for applying the color material used for manufacturing the color filter formed in the liquid crystal cell can also be used in the nozzle storage device. Further, when the coating device is washed based on the nozzle In the case of the configuration, the coating device may have a structure as follows: The coating device (nozzle cleaning device) may include a protruding member, a cleaning liquid supply means, and a moving means. The protruding member is provided with a supply port. The cleaning liquid supply means that the cleaning liquid is supplied from the upper surface of the protruding member to the upper surface of the protruding member 97125545 41 200911389 for supplying the cleaning liquid. (4) The means is to make the nozzle ordering surface, "according to the predetermined interval, so that the nozzle or The projecting member 8 is moved. Further, the moving means sets the predetermined interval so that the washing liquid sucked on the upper surface of the projecting member is only below the nozzle. For the purpose of storing a job, etc., it is possible to use, for example, a coating device used in the manufacture of an organic rainbow display device. The present invention will be described in detail, but all the matters in the above description are only handles. (4) The present invention is not limited to the scope of the present invention, and various modifications and changes can be made without departing from the scope of the invention. [Fig. 1 (a) and (b) are coating apparatus 1 Fig. 2 is a perspective view showing the connection between each part of the coating apparatus 1 and the control unit. Fig. 3 is a perspective view showing the structure of the storage unit 3. Fig. 4 is a cross-sectional view of the storage unit 3 taken along line AA. Fig. 5 is a flow chart showing the flow of the operation of the coating device in the transition from the operating state to the standby state and from the standby state to the connected state. Fig. 6 is a view showing a state of the storage unit 3 after the supply of the cleaning liquid during storage. Fig. 7 is a view showing a quick-change relationship between each part of the coating apparatus and the control unit according to the second embodiment. Fig. 8 is a cross-sectional view showing the structure of the storage unit 3 according to the second embodiment. Fig. 9 is a view showing a quick-disconnection relationship between each part of the coating apparatus and the control unit according to the third embodiment. 97125545 42 200911389 Fig. 10 is a flow chart showing the operation flow of the coating device of the third embodiment. Fig. 11 is a structural diagram of a storage unit 3 according to a modification of the third embodiment. FIG. 12 is a schematic perspective view showing the structure of the storage unit 110. Fig. 13 is a view showing the projecting member 111 and the nozzle 11 shown in Fig. 12. Fig. 14 is a flow chart showing the flow of the washing operation of the coating device of the fourth embodiment. Fig. 15 is a view showing the projection member 111 at the time of performing the operation of step S24. Fig. 16 is a view showing the projection member 111 at the time of performing the operation of step S25. Fig. 17 is a structural view showing a projection member according to a modification of the fourth embodiment. Fig. 18 is a structural view showing a projection member according to a modification of the fourth embodiment. Fig. 19 is a configuration diagram of a protruding member of another modification. Fig. 20 is a configuration diagram of a protruding member of another modification. [Description of main component symbols] 1 nozzle unit 2 nozzle moving mechanism 3, 3a ' 3b storage unit 4, 4R ' 4L liquid receiving unit 5 platform 6 platform moving mechanism 7 control unit 8 cleaning liquid supply unit 9 storage unit moving mechanism 10 Cloth device 97125545 200911389 11-13 Nozzle 11a Lower 21 Slide rail 30 Liquid recovery portion Projection member upper surface 31 to 33, m, 112, 113, m, m, 141 31a, 32a, 33a, Ilia, 112a, 113a, 121a, 131a 141a 34-36 Supply piping 37 to 39 Storage mechanism 37a Storage tank 37b Suction piping 37c Resupply piping 41R Upper section 42R Connecting section 43L, 43R Lower section 〇44R 61 62 63 64 Slot rotation part parallel movement platform guide receiving part Rail member 101 Cleaning liquid suction portion 102 Liquid amount detecting portion 103 Valve 97125545 44 200911389 Inclined surface 111b, 112b, 113b L Cleaning liquid W Substrate c. 97125545 45

Claims (1)

200911389 VII. Scope of application for patents: ^A type of sprayed material, which is stored from (4) the mouth of the mouth. (4) The nozzle storage device used by the liquid bird to enter the sergeant; it has: spray: placed, set to supply - the nozzle 仏Supply of the official, from the supply of cleaning liquid supply _ light above the supply port. = liquid supply solution section, above the 骇 构 (4) above the loading of the cleaning liquid. In addition, the above-mentioned financial machine has the money κ of the cleaning liquid, and the cleaning liquid is supplied from the upper source. 2. The nozzle storage device according to the first aspect of the invention, further comprising: a cleaning liquid suction means for sucking the cleaning liquid from the supply pipe via the storage means. 3. The nozzle storage device of claim 1 of the patent No. 1 of the first embodiment, wherein the detection means for detecting the net inspection of the shame frequency surface structure is further provided; θ, the supply of the night supply & The cleaning liquid is supplied from the supply source in the liquid detected by the detecting means. The nozzle storage device according to the first aspect of the invention, wherein the nozzle retaining surface moves at least at a predetermined interval between the nozzle facing surface and the projection member, and moves at least the nozzle and the protruding member. Hand 97125545 46 200911389 2. When the nozzle is washed, the cleaning solution is supplied to the supply port in a manner of cleaning (4) on the upper surface of the upper and lower canine members; the above moving means washes the nozzle (4), and Between the above-mentioned protruding members, the cleaning is only connected to the upper-spotting pair, and the predetermined 5th, such as the fourth-nozzle nozzle holding material, is set, wherein the upper surface of the protruding member is smaller than the nozzle diameter of. 6. In the case of the nozzle storage device of the fourth or fifth aspect of the application, the cleaning means for sucking the cleaning liquid from the above-mentioned fine suction liquid is further provided. 7. The nozzle holding material of claim 4, wherein the protruding member has an inclined surface that is low toward the outer circumference (four) around the upper surface. 8. If you apply for a patent scope! The nozzle is stored in the nozzle, wherein the discharge liquid is an organic EL material or a hole transporting material; and the cleaning liquid contains the same solvent as the solvent contained in the upper sputum liquid. 9. A coating device, such as a tube, which is dedicated to a tube device; a coating solution is applied to the substrate from the nozzle to coat the substrate. 97125545 47