TW200911038A - Atmosphere plasma reaction apparatus - Google Patents
Atmosphere plasma reaction apparatus Download PDFInfo
- Publication number
- TW200911038A TW200911038A TW96130264A TW96130264A TW200911038A TW 200911038 A TW200911038 A TW 200911038A TW 96130264 A TW96130264 A TW 96130264A TW 96130264 A TW96130264 A TW 96130264A TW 200911038 A TW200911038 A TW 200911038A
- Authority
- TW
- Taiwan
- Prior art keywords
- power supply
- electrode
- atmospheric plasma
- plasma reactor
- bias
- Prior art date
Links
- 238000006243 chemical reaction Methods 0.000 title abstract description 8
- 230000005611 electricity Effects 0.000 claims description 3
- 238000010891 electric arc Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 13
- 238000004381 surface treatment Methods 0.000 abstract description 10
- 230000009977 dual effect Effects 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 6
- 230000008569 process Effects 0.000 abstract description 6
- 230000004913 activation Effects 0.000 abstract description 4
- 239000011248 coating agent Substances 0.000 abstract description 4
- 238000000576 coating method Methods 0.000 abstract description 4
- 238000011282 treatment Methods 0.000 abstract description 4
- 238000009832 plasma treatment Methods 0.000 abstract description 2
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 description 12
- 230000000694 effects Effects 0.000 description 7
- 239000007789 gas Substances 0.000 description 5
- 238000001994 activation Methods 0.000 description 3
- 229910052500 inorganic mineral Inorganic materials 0.000 description 3
- 239000011707 mineral Substances 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011267 electrode slurry Substances 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000003116 impacting effect Effects 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000003345 natural gas Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- Plasma Technology (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96130264A TW200911038A (en) | 2007-08-16 | 2007-08-16 | Atmosphere plasma reaction apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96130264A TW200911038A (en) | 2007-08-16 | 2007-08-16 | Atmosphere plasma reaction apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200911038A true TW200911038A (en) | 2009-03-01 |
| TWI355866B TWI355866B (cs) | 2012-01-01 |
Family
ID=44724543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW96130264A TW200911038A (en) | 2007-08-16 | 2007-08-16 | Atmosphere plasma reaction apparatus |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200911038A (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI755292B (zh) * | 2021-02-26 | 2022-02-11 | 友威科技股份有限公司 | 可單面或雙面電漿製程機台 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI728569B (zh) | 2019-11-25 | 2021-05-21 | 馗鼎奈米科技股份有限公司 | 放電極化設備 |
-
2007
- 2007-08-16 TW TW96130264A patent/TW200911038A/zh not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI755292B (zh) * | 2021-02-26 | 2022-02-11 | 友威科技股份有限公司 | 可單面或雙面電漿製程機台 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI355866B (cs) | 2012-01-01 |
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Legal Events
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|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |