200907318 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種測定透鏡等光學元件中、/ 偏心量測定裝置，尤指一種適用於測的待阅面的 5 J <田夕個透 的光學元件中的各待測面的偏心量測定裝置。 霉成 【先前技術】 卩往，這種偏心量測定裝置’已知的有適用被稱為自 準直法的測定單元（參照專利文獻1、2)。 10 纟自準直法中，使得待測光學元件的待測面的隹點面 與攝像面，透過待測面成為相互共輛位置關係而進行待測 面與光學系統的位置調整，使待測面圍著規定的旋轉轴旋 轉，並在待測面的焦點面形成規定形狀的指標像。立指標 像，透過待測面傳播形成在攝像面上，但此時若待測面偏 15心’則隨著待測面的旋轉指標像如畫圓形的執跡般移動， 因此透過計量此圓的半徑可求得待測面的偏心量。 纟以往的偏心量測定裝置’作為指標大多使用針孔， 但此時，有在圖像上難以指定針孔像為中心位置的問題。 因此’本申請人，透過使用十字形狀的分度線作為指標， 20提出在圖像上即可簡單指定指標像為中心位置的測定方 法，已向曰本特許靡申請（參照專利文獻3)。 【專利文獻1】日本專利公開第2005_552〇2號公報 【專利文獻2】日本專利公開第2〇〇7_ 1 743 1號公報 【專利文獻3】日本專利申請第2〇〇6_157198號說明書 200907318 Γ二而，在由多個透鏡等構成的光學元件中，有對各透 鏡面測定偏心量的必要性，但根據各透鏡的配置，有其他 透鏡面或遽光器等其他光學部件位於規定透鏡面的焦點面 (近軸曲率中心）的情況。 5 f ； 10 15 这種情況，若將上述規定的透鏡面作為待測面適用自 =法’除透過待測面形成在攝像面上的指標像（以下稱為 ^準像」）之外，在攝像面上可能形成：透過位於待測面 的…^面的其他透鏡面等被傳播的指標像（以下稱為「益用 像」）。 …、用 在以往的偏心量測定裝置中，有被組成為基於圖像濃 :值自動地&疋圖像上的指標像（標準像）的位置的装置，但 標準像與無用像同時被昭 了馓…、岍在圖像上時，難以相互區別這 些，所以未能進行標準像的位置指定。 因此，標準像與無用像同時被照映在圖像上時，操作 ^看圖像進行標準像與無韓的區別，遮蔽無轉等的工 乍被視為必要。通常，測定一個待測面的偏心量，因需要 、的互異位置的標準像的圖像，所以在各圖像报難 =上述的遮蔽等工作，另外測定所需時間也明顯增加、。 根據#作員的判斷’在偏心量測定時提供的圖像間 的距離被加大，測定精度也有可能降低。 【發明内容】 用自於上述問題而提出的，目的在於，提供適 疋偏心量時’即使除透過待測面形成的標準 20 200907318 像之外透過其他面形成的無用像也被照映在圖像上時，在 圖像上也可指定標準像的位置的偏心量測定裝置。 為達成上述目@，在本發明的偏心量敎裝置，著眼 於透過待測面以外的其他面形成的無㈣，即㈣轉待測 光學兀件’在各圖像上的位置或圖像濃度值也幾乎不變， 透過求得差圖像而消除無用像。200907318 IX. Description of the Invention: [Technical Field] The present invention relates to an apparatus for measuring an eccentricity of an optical element such as a lens, and more particularly to a method for measuring a surface to be read, 5 J < An eccentricity measuring device for each surface to be measured in the optical element. [Previous technique] A measurement unit called a self-alignment method is known as such an eccentricity measuring device (see Patent Documents 1 and 2). 10 纟 In the self-collimation method, the defect surface and the imaging surface of the surface to be tested of the optical component to be tested are adjusted to the position of the surface to be tested and the optical system through the position-to-measure relationship of the surface to be tested, so that the test is to be performed. The surface is rotated around a predetermined rotation axis, and an index image of a predetermined shape is formed on the focal plane of the surface to be measured. The image of the indicator is formed on the imaging surface through the surface to be measured, but if the surface to be measured is 15 hearts, then as the rotation index of the surface to be measured moves like a circular shape, The radius of the circle can be used to determine the amount of eccentricity of the surface to be measured. In the conventional eccentricity measuring device, pinholes are often used as indicators, but in this case, there is a problem that it is difficult to specify the pinhole image as a center position on the image. Therefore, the applicant has applied a measurement method in which the index image is simply centered on the image by using the cross-shaped index line as an index, and has applied to the 靡本靡 (see Patent Document 3). [Patent Document 1] Japanese Patent Laid-Open Publication No. 2005-552 No. 2 [Patent Document 2] Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. 2 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Further, in an optical element including a plurality of lenses or the like, there is a need to measure an eccentric amount for each lens surface. However, depending on the arrangement of the respective lenses, other optical components such as a lens surface or a chopper are located on a predetermined lens surface. The case of the focal plane (the center of the paraxial curvature). 5 f ; 10 15 In this case, if the lens surface specified above is used as the surface to be tested, the index image (hereinafter referred to as "image") formed on the imaging surface by the surface to be measured is applied. On the imaging surface, an index image (hereinafter referred to as "beneficial image") that is transmitted through another lens surface located on the surface of the surface to be measured may be formed. In the conventional eccentricity measuring device, there is a device that is configured to automatically & the position of the index image (standard image) on the image based on the image density value, but the standard image and the useless image are simultaneously It is difficult to distinguish these when it is on the image, so the position of the standard image cannot be specified. Therefore, when the standard image and the useless image are simultaneously imaged on the image, it is considered necessary to operate the image to distinguish the standard image from the non-Korean image. Usually, the amount of eccentricity of one surface to be measured is measured, and since the image of the standard image of the different positions is required, it is difficult to report each image = the above-mentioned masking, and the time required for measurement is also significantly increased. According to the judgment of the #人, the distance between the images provided during the measurement of the eccentricity is increased, and the measurement accuracy may be lowered. SUMMARY OF THE INVENTION The object of the present invention is to provide an image suitable for the eccentricity, even if it is formed by a surface other than the standard 20 200907318 formed by the surface to be tested. In the case of the image, the eccentricity measuring device of the position of the standard image can be specified on the image. In order to achieve the above object, in the eccentric amount measuring device of the present invention, attention is paid to the absence of (four) formed by other faces than the surface to be tested, that is, (four) the position or image density of the optical member to be tested on each image. The value is also almost constant, and the useless image is eliminated by finding the difference image.
即，本發明之偏心量測定裝置的特徵在於，具備：基 台’其以規定的旋轉軸為中心可旋轉地固定待測光學元 件，·照射用光學系統，其對固定於基台並以所述規定的旋 轉軸為中心而旋轉的待測光學元件的待測面，透過規定炉 狀的指標照射來自光源的光’並且將該指標的像形成在待 測面的焦點面；成像用光學系統，其將來自待測面的反射 光或穿透光5丨導在攝像面上，並將由反射^穿透光形成 的指標的標準像形成在攝像面上；攝像單元，其按待測光 學元件的互不相同的多個旋轉位置，取得分別照映有盥多 個旋轉位置相對應的標準像的多個圖像；解析單元，其基 於被攝像的多個圖像解析待測面的偏心量，解析單元之結 構為，透過求得多個圖像中規定的兩張圖像的差圖像； 圖像中消除由來自位於待測面之焦點面的規定面的反射光 或穿透光在攝像面上形成的指標的無用像。 在本發明之偏心量測定裝置中，解析單元之結構為， 透過在差圖像中進行將圖像濃度值成為正的區域以及成為 負的區域的任一方區域的圖像濃度值置為零的處理，而形 20 200907318 -_像位置指定用圖像，標準像位置指定用圖像僅昭映 兩張圖像令其中一方的圖像上的標準像。 ”、、 另外，解析單元之結構也可為，透過求得一方的圖像 準像位置指定用圖像之間的差圖像，以形成無用像除 5 去用圖像，其僅照映指標的無用像。 另外，解析單元之結構也可為，在標準像位置指定用 圖冑’按每像素線合計對應☆各像素的圖像濃度值，並基 於"亥口计值成為最大的像素線的坐標，指定標準像的申心 位置。 10 、. f要說明的是，在本發明中，所謂「圖像」是指，人 以視覺可忍識到的通常圖像以外，包括對應於構成這種圖 像的各像素的圖像濃度值的分佈數據等圖像信息的概念。 ，差圖像」是指，取兩張圖像之間的圖像濃度 值之差的圖像。 15 β根據本發明之偏心量測定裝置，適用自準直法測定偏 〜量時，除透過待測面形成的標準像之外，即使透過其他 面开y成的無用像照映在圖像上時，也因透過求得差圖像可 攸圖像上消除無用像，所以能夠在圖像上根據畫像濃度值 等指定標準像的位置。 口此在以在的偏心量測定裝置中被視為必要的、基 於操作者的無用像遮蔽的工作等變得不必要，所以可大幅 度縮短測疋時所需時間，並可防止測定精度的降低。 【實施方式】 200907318 照圖式邊進行詳細地 心量測定裝置的概略 以下，對本發明之實施方式邊參 說明。圖1為本發明的一實施方式之偏 構成圖。 圖1所示的偏心量測定裝置卜是適用自準直法測定作 5為相光學元件的透鏡體5的各待測面的偏心量，具備：測 定頭1G、可旋轉地固定透鏡體5的基㈣、進㈣於計算偏 .的各種運算等的解析運算部3〇、及可向圖中上下方向 移動地固定測定頭10的z軸載物台40。 Γ 敎頭1G具備：光源11，其輪出被照射在上述透鏡體5 10的光束；分度板12，其具有使從光源u輸出的光束通過的、 作為指標的十字形狀裂縫（以下稱為「分度線」）；光束 器13’其將來自分度板12的光束向圖中下方反射；準直透 鏡14 ’其使被入射的光束成為平行光束；物鏡透鏡^，盆 將平行光束會聚在光會聚點P。另外，此測定㈣，具備载 15持了 CCD或CMOS等攝影元件16的作為攝像單元的攝影機 但’在本實施方式中，由分度板12、光束分離器η、 ( 準直透鏡14、以及物鏡透鏡15等構成照射用光學系統，並 由物鏡透鏡15、準直透鏡14、光束分離器13等構成成像用 光學系統。 2〇 …另一方面，透鏡體5具備多個透鏡，以如下方式構成光 學元件··即在規定的透鏡面的焦點面存在其他透鏡面，將2 片透鏡51、52固定在鏡筒53内而成。另外之結構為：作為 待測面的各透鏡面51a、51b、52a、52b中，使透鏡51的圖 中上側的透鏡面51a位於透鏡52的圖中上側的透鏡面52a的 200907318 焦點面（透鏡面52a的焦點（近軸的曲率中心點）C3所處的 面：圖示省略）。 基台20具備：安裝有透鏡體5的載置構件21，支持此載 置構件21的χγ軸載物台22及旋轉載物台23而成。χγ軸載物 5 台22 ’在進行安裝在載置構件21的透鏡體5和測定頭1〇之間 •的位置調整時使用，並組成為：使得安裝在載置構件21的 . 透鏡體5能夠在與測定頭10的光軸Z大致垂直的面内移動。 另外方疋轉載物台23之結構為可使安裝在載置構件21的透 鏡體5以圖示的旋轉軸A為中心旋轉。 1〇 另外’載置構件21，可使用在其上方端面邊緣部支持 透鏡體5的圓筒形狀物體，也可使用如前述的專利文獻3的 圖3所示的由v塊與旋轉圓板而成的卡盤機構。 解析運算部30，具備以下元件：解析裝置31，其作為 進行在測定時被攝像的各圖像的解析，是由電腦組成的解 15 析單元；圊像顯示裝置32，其顯示解析結果或各圖像等； 輸入裝置33’其用於對於解析裝置31進行各種輸入。 Z軸載物台40具備.以下結構：支撐部41，其載置有基台 20 ;引導部42 ’其立設在此支撐部41 ;可動部43，其設置 成能夠沿著此引導部42向圖中上下方向移動，並固定測定 20 頭10。此Z軸載物台40，在測定透鏡體5的偏心量時，使得 測定頭10的光會聚點p分別位於各透鏡面5 1 a、5丨b、52a、 52b的焦點面（例如，測定透鏡面52a的偏心量時，使得光會 聚點P位於透鏡面52a的焦點面），並依次調整測定頭丨〇的高 度。 200907318 另外’當$則定偏心量時，較佳為將測定頭1〇的光軸z、 透鏡體5的光軸B、及基台2G(旋轉載物台咖）的旋轉轴a， 調1成相1致，但該些軸相互不—致時也可測定。關於 各軸不-致時的敎單元，在前述專敎獻2中有詳細記 其次j對基於本實施方式的偏心量測定裝置丨的透鏡體 5的偏心量測定順序，及偏心量測定I置1的作用進行說 明。假設測定頭10的光軸z、透鏡體5的光軸B、及基台2〇 f : 的旋轉軸A的相互間的位置調整已經結束。另外，在以下透In other words, the eccentricity measuring device according to the present invention includes: a base station rotatably fixing an optical element to be tested around a predetermined rotation axis, and an optical system for illumination, which is fixed to the base and fixed by The surface to be tested of the optical element to be tested, which is rotated about the predetermined rotation axis, illuminates the light from the light source through a predetermined furnace-shaped index and forms an image of the index on the focal plane of the surface to be measured; the optical system for imaging And the reflected light or the transmitted light from the surface to be tested is guided on the imaging surface, and a standard image of the index formed by the reflected light is formed on the imaging surface; the imaging unit is pressed by the optical element to be tested a plurality of mutually different rotational positions, obtaining a plurality of images respectively illuminating the standard images corresponding to the plurality of rotational positions; and an analyzing unit that analyzes the eccentricity of the surface to be tested based on the plurality of images being imaged The parsing unit is configured to obtain a difference image of two images specified in the plurality of images by removing reflected light or penetrating light from a predetermined surface located on a focal plane of the surface to be tested Camera Useless as indicators of formation. In the eccentricity measuring apparatus according to the present invention, the analyzing means is configured to set the image density value of the region where the image density value is positive and the negative region to be zero in the difference image. In the case of the image designation image, the standard image position designation image only shows the standard image on the image of one of the two images. In addition, the configuration of the analysis unit may be such that a difference image between the images for specifying the image position of one of the images is obtained to form an image for useless image, and only the image is reflected. In addition, the configuration of the analysis unit may be such that the image density value of each pixel corresponding to each pixel line is specified in the standard image position, and the pixel is the largest based on the " The coordinates of the line specify the position of the center of the standard image. 10, . f It should be noted that in the present invention, the term "image" refers to a normal image that the person can visually recognize, including corresponding to The concept of image information such as distribution data of image density values of each pixel constituting such an image. "Differential image" refers to an image in which the difference in image density values between two images is taken. 15 β According to the eccentricity measuring device of the present invention, when the deviation amount is measured by the collimation method, the useless image formed by the other surface is reflected on the image, except for the standard image formed by the surface to be tested. In addition, since the unnecessary image is removed from the image by obtaining the difference image, the position of the standard image can be specified on the image based on the image density value or the like. This is unnecessary in the eccentricity measuring device of the present, and it is unnecessary to perform the work based on the useless image of the operator, so that the time required for the measurement can be greatly shortened, and the measurement accuracy can be prevented. reduce. [Embodiment] 200907318 Outline of a detailed mass measurement apparatus according to the drawings Hereinafter, an embodiment of the present invention will be described. Fig. 1 is a partial structural view showing an embodiment of the present invention. The eccentricity measuring device shown in FIG. 1 is an eccentric amount for measuring each surface to be measured of the lens body 5 which is 5 as a phase optical element by a collimation method, and includes: a measuring head 1G that rotatably fixes the lens body 5 The analytic calculation unit 3A for calculating various calculations such as the basis and the z-axis stage 40 for fixing the measurement head 10 can be moved in the vertical direction in the drawing.敎 敎 1G includes a light source 11 that emits a light beam that is irradiated onto the lens body 510, and an indexing plate 12 that has a cross-shaped crack that serves as an index for passing a light beam output from the light source u (hereinafter referred to as "Division line"); the beamer 13' reflects the light beam from the indexing plate 12 downward in the figure; the collimating lens 14' makes the incident beam become a parallel beam; the objective lens ^, the basin converges the parallel beam Light converges on point P. In addition, this measurement (4) includes a camera as an imaging unit that carries an imaging element 16 such as a CCD or a CMOS, but in the present embodiment, the indexing plate 12, the beam splitter η, (the collimator lens 14, and The objective lens 15 or the like constitutes an optical system for illumination, and the objective lens 15, the collimator lens 14, the beam splitter 13, and the like constitute an imaging optical system. [2] On the other hand, the lens body 5 includes a plurality of lenses in the following manner. The optical element is configured such that the other lens surface exists on the focal plane of the predetermined lens surface, and the two lenses 51 and 52 are fixed in the lens barrel 53. The other configuration is: the lens surface 51a as the surface to be tested, In the 51b, 52a, and 52b, the lens surface 51a on the upper side in the drawing of the lens 51 is located at the 200907318 focal plane of the lens surface 52a on the upper side in the drawing of the lens 52 (the focal point (the center of curvature of the paraxial point) C3 of the lens surface 52a is located. The surface of the base 20 includes a mounting member 21 to which the lens body 5 is attached, and the χγ-axis stage 22 and the rotating stage 23 of the mounting member 21 are supported. 5 sets of 22' are installed in the mounting structure The position between the lens body 5 of the member 21 and the measuring head 1 is adjusted, and is configured such that the lens body 5 attached to the mounting member 21 can be substantially perpendicular to the optical axis Z of the measuring head 10. The inside of the transfer stage 23 is configured such that the lens body 5 attached to the mounting member 21 can be rotated about the rotation axis A shown in the figure. 1) The other mounting member 21 can be used above. The cylindrical body of the lens body 5 is supported by the edge portion of the end face, and a chuck mechanism composed of a v-block and a rotating circular plate as shown in Fig. 3 of Patent Document 3 can be used. The analysis computing unit 30 has the following components. The analysis device 31 is a resolution unit composed of a computer for performing analysis of each image captured during measurement, and the imaging display device 32 displays an analysis result or each image. The input device 33' It is used for various inputs to the analysis device 31. The Z-axis stage 40 has a structure in which a support portion 41 on which a base 20 is placed, a guide portion 42' which is erected on the support portion 41, and a movable portion 43 , which is arranged to be able to be along the guiding portion 42 The direction is moved, and the 20 heads 10 are fixedly measured. When the eccentric amount of the lens body 5 is measured, the Z-axis stage 40 is such that the light convergence point p of the measuring head 10 is located at each lens surface 5 1 a, 5 丨 b, The focal planes of 52a and 52b (for example, when measuring the amount of eccentricity of the lens surface 52a, the light convergence point P is located at the focal plane of the lens surface 52a), and the height of the measurement head is adjusted in turn. 200907318 In addition, 'when $ is the amount of eccentricity Preferably, the optical axis z of the measuring head 1〇, the optical axis B of the lens body 5, and the rotation axis a of the base 2G (rotating carrier) are adjusted to be phased, but the axes are preferably adjusted. It can also be measured when they are not in each other. The eccentricity of the lens body 5 based on the eccentricity measuring device of the present embodiment, and the eccentricity measurement I are set in detail in the above-mentioned section 2 in detail. The role of 1 is explained. It is assumed that the positional adjustment between the optical axis z of the measuring head 10, the optical axis B of the lens body 5, and the rotational axis A of the base 2〇f: has ended. In addition, in the following
的偏心量時為例進行說明。 < 1 >首先，使用Z轴載物台40，使得測定頭1 〇的光會聚 點P位於透鏡面52a的焦點面，而調整測定頭1〇的高度。 <2>其-人’從測定頭1 〇將測定光束照射在透鏡體$。照 15 射在透鏡體5的測定光束，會聚在光會聚點p，並在透鏡面 52a的焦點面形成分度線的像，同時其一部分透過透鏡51照 射在透鏡面52a。照射在透鏡面52a的光束中，來自透鏡面 52a的反射光束（特別是來自近軸區域的反射光束）的一部分 透過透鏡51在透鏡面52a的焦點面形成分度線影像，並入射 20 在測定頭10。被入射在測定頭10的來自透鏡面52a的反射光 束，通過物鏡透鏡透鏡15、準直透鏡14、光束分離器13入 射在攝影機17的攝影元件16，分度線影像（以下稱為「標準 像」）形成在此攝影元件16的攝像面上。 200907318 另一方面，被照射在透鏡體5的測定光束中來自透鏡面 51a的反射光束，通過物鏡透鏡15、準直透鏡μ、光束分離 器13入射在攝影機17的攝影元件16，在此攝影元件^攝 像面上形成與標準像不同的其他分度線影像（以下稱 5 用像」）。 ‘、… <3>接著，通過攝影機丨7 ,對一同照映有標準像及無用 像的圖像進行攝影。透鏡面52a的焦點面與攝像面，透過透 鏡面52a成為共輛位置關係。 ' 、<4>以下，使用旋轉載物台23，使透鏡體5(透鏡面52a) 10 m疋轉軸A為中心按規定角度旋轉’按每個旋轉位置，進行 上述<1>、<2>的處理，並對—併照映有標準像及無用像的 圖像進行攝影。另外，被攝影的各圖像信息，被依次儲存 在解析裝置31的儲存部。 圖2表不對應於各旋轉位置的多個圖像的一例。在圖2 15表不有使上述透鏡體5每旋轉30度攝影的共12張圖像 I!2(數字表示拍攝順序）。在各圖像h〜Ii2中，以將圖像割分 為四個的方式而拍攝的大十字形狀的像是無用像％〜 UCl2，拍攝旁邊的小十字形狀的像是標準像RCl〜RCl2。如 圖:’標準像RCl〜Rc〗2，在各圖像1丨〜1)2中的位置有相對 的變化，反之，無用像1^1〜1^12在各圖像〗1〜u的相對 位置及圖像濃度值基本沒有變化。 <5>其次，為了對被照映在上述各圖像込〜h上的標準 像Rci-Rc!2的中心位置進行指定的準備，進行從圖像上消 12 200907318 除上述無用像uCl〜uCl2的圖像處理。用於消除此無用像的 圖像處理在上述解析裝置31中自動進行。 在此，關於用於消除無用像的圖像處理的原理，使用 圖4及圖5進行說明。圖4顯示分別照映標準像及無用像的兩 5個圖像。而且，圖5是表示由圖4所示的兩個圖像消除無用 像時的圖像處理的作用的圖，圖⑷表示圖4所示的圖像工 中的沿剖面線6U的圖像濃度值的分佈’圖⑻表示圖4所示3 的圖像Ib中的沿剖面線61b的圖像濃度值的分佈。另外，圖 …（C)表示圖4所示的圖像Ia與圖像Ib間的差圖像的圖像濃产值 10 的分佈。 在圖4的圖像13上照映有標準像RCa及無用像Uca，在圖 像“上照映有標準像Rcb及無用像价^另外，如圖4及圖 5(A)、（B)所示，標準像RCa及尺％，在圖像之間相對位置變 化，反之，無用像UCa及％的相對位置及其圖像濃度值在 15圖像之間沒有變化。於是，求兩個圖像^的差圖像 b)在此差圖像△ I中，無用像队及叫被抵消並消除。 另外，求差圓像時，與在圖像Ib上所照映的標準 像RCb對應的^域的圖像濃度值成負，但在本實施方式中， 在此情況，進行將圖像濃度值成負的區域的圖像濃度值設 20 的處理’形成只照映圖像滚度值成正的區域(對應於標 準像Rca的區域）的標準像位置指定用圖像。另-方面，求差The eccentric amount is described as an example. <1 > First, the Z-axis stage 40 is used so that the light convergence point P of the measuring head 1 is positioned on the focal plane of the lens surface 52a, and the height of the measuring head 1 is adjusted. <2> The person-person's irradiation of the measuring beam from the measuring head 1 透镜 to the lens body $. The measurement beam incident on the lens body 5 is concentrated on the light convergence point p, and an image of the index line is formed on the focal plane of the lens surface 52a, and a part thereof is transmitted through the lens 51 to the lens surface 52a. Among the light beams that are irradiated on the lens surface 52a, a part of the reflected light beam from the lens surface 52a (especially the reflected light beam from the paraxial region) passes through the lens 51 to form an index line image on the focal plane of the lens surface 52a, and is incident on the measurement. Head 10. The reflected light beam incident on the lens surface 52a of the measuring head 10 is incident on the imaging element 16 of the camera 17 through the objective lens lens 15, the collimator lens 14, and the beam splitter 13, and the index line image (hereinafter referred to as "standard image" ") is formed on the imaging surface of the imaging element 16. 200907318 On the other hand, the reflected light beam from the lens surface 51a of the measurement beam irradiated on the lens body 5 is incident on the imaging element 16 of the camera 17 through the objective lens 15, the collimator lens μ, and the beam splitter 13, where the imaging element is ^The other index line image (hereinafter referred to as "image") which is different from the standard image is formed on the imaging surface. ‘, ... <3> Next, images of the standard image and the useless image are photographed by the camera 丨7. The focal plane of the lens surface 52a and the imaging surface are in a common positional relationship through the lens surface 52a. ', <4> Hereinafter, using the rotating stage 23, the lens body 5 (lens surface 52a) is rotated at a predetermined angle from the center of the rotation axis A 10 m. The above-mentioned <1>, <;2> processing, and photographing images with standard images and useless images. Further, each of the image information to be photographed is sequentially stored in the storage unit of the analysis device 31. FIG. 2 shows an example of a plurality of images corresponding to the respective rotational positions. In Fig. 2, there is shown a total of 12 images I! 2 (digitally indicating the shooting order) for photographing the lens body 5 every 30 degrees. In each of the images h to Ii2, the image of the large cross shape captured by dividing the image into four is the useless image % to UCl2, and the image of the small cross shape next to the image is the standard image RCl to RCl2. As shown in the figure: 'Standard like RCl~Rc〗 2, there is a relative change in the position of each image 1丨~1)2, otherwise, useless like 1^1~1^12 in each image 〖1~u The relative position and image density values did not change substantially. <5> Next, in order to specify the center position of the standard image Rci-Rc! 2 that is reflected on each of the above images 込 to h, the image is erased 12 200907318 except for the useless image uCl~ Image processing of uCl2. The image processing for eliminating this unnecessary image is automatically performed in the above-described analyzing device 31. Here, the principle of image processing for eliminating unnecessary images will be described with reference to Figs. 4 and 5 . Figure 4 shows two or five images of a standard image and a useless image, respectively. 5 is a view showing the action of image processing when the unnecessary images are erased by the two images shown in FIG. 4, and FIG. 4 is a view showing the image density along the hatching 6U in the image shown in FIG. 4. The distribution of values 'Fig. (8) shows the distribution of image density values along the section line 61b in the image Ib of 3 shown in Fig. 4. Further, Fig. (C) shows the distribution of the image rich value 10 of the difference image between the image Ia and the image Ib shown in Fig. 4 . The standard image RCa and the useless image Uca are imaged on the image 13 of Fig. 4, and the standard image Rcb and the useless image price are displayed on the image. In addition, as shown in Fig. 4 and Fig. 5(A), (B) As shown, the standard image RCa and the ruler % change the relative position between the images. Conversely, the relative positions of the useless UCA and % and their image density values do not change between the 15 images. Therefore, two figures are obtained. In the difference image Δ I of the difference image Δ I, the unnecessary image team and the call are canceled and eliminated. In addition, when the difference circle image is obtained, it corresponds to the standard image RCb imaged on the image Ib. The image density value of the ^ domain is negative, but in the present embodiment, in this case, the process of setting the image density value of the region where the image density value is negative is set to 'form only the image image roll value. The image of the standard image position specified in the positive area (corresponding to the area of the standard image like Rca).
Ib)時，進行將圖像濃度值成正的區域的圖像 為零的處理，並將圖像濃度值成負的區域的符號 13 200907318 變換為正’從而可以形成只照映有對應於標準像Rcb區域的 標準像位置指定用圖像。 透過把在此所述的用於消除無用像的圖像處理，適用 於圖2所示的各圖像間，無用像UCl〜Uc12被消除，形 5成分別只照映標準像％〜的標準像位置指定用圖像。 圖3表示標準像位置指定用圖像的一例。圖3所示的12 張標準像位置指定用圖像Δΐι〜A,根據圖2所示的各圖 像I〗〜1]2中互相鄰接的兩個圖像之間的差圖像（△ Ιη=Ιη_Ιη+1 ; η=1，…U)而形成的（此處，ΔίγυΟ。 1〇 <6>其次，在上述標準像位置指定用圖像△“〜△、 中，指定標準像RCl〜Rcu的中心位置。指定此中心位置 時，可使用前述專利文獻3所記載的方法。 另外，在標準像Rci〜Rcu小，或其圖像濃度值（在攝像 面上的受光量）小而難以指定中心位置的情況下 15如下順序指定中心位置。 過 例如，圖3所示的標準像位置指定用圖像△l中，按沿 γ方向（圖中縱向）排列的每像素線，計算將對應於各像素的 圖像漢度值合計&的值（參照下式⑴）’將計算出的值成最 大的像素線的Y坐標作為標準像RCi的中心位置的Y坐標。同 樣，按沿X方向（圖令橫向）排列的每像素線，計算將對應於 各像素的圖像濃度值的值（參照下式（2))合計後的值，將計 异出的值成為最大的像素線的又坐標作為標準像Rcl的中心 =置的X坐標。另外，下式（1)與（2)，對應於標準像位置指 定用圖像△11的像素數，橫縱都為512。 14 200907318 [數學式1] 511 rw=|^(x,y).. (2)In the case of Ib), a process of zeroing the image of the region in which the image density value is positive is performed, and the symbol 13 200907318 of the region in which the image density value is negative is converted into a positive ', thereby forming only the image corresponding to the standard image The image of the standard image position of the Rcb area is specified. By using the image processing for eliminating unnecessary images described herein, it is suitable for use between the images shown in FIG. 2, the useless images UC1 to Uc12 are eliminated, and the form 5 is only standard for the standard image %~. Image location specification image. FIG. 3 shows an example of an image for specifying a standard image position. The 12 standard image position specifying images Δΐι to A shown in FIG. 3 are based on the difference image between the two images adjacent to each other in the respective images I 〜1] 2 shown in FIG. 2 (Δ Ι η = Ι Ι Ι +1 +1; η = 1, ... U) (here, Δίγ υΟ 1 〇 < 6 > Next, in the above-mentioned standard image position specifying image Δ "~ △, in the specified standard image RCl ~ In the center position of the Rcu, the method described in the above Patent Document 3 can be used. The standard image Rci to Rcu is small, or the image density value (the amount of light received on the imaging surface) is small and difficult. When the center position is specified, the center position is specified in the following order. For example, in the standard image position specifying image Δ1 shown in FIG. 3, the calculation is performed for each pixel line arranged in the γ direction (the vertical direction in the drawing). The value of the total image sum value of each pixel (refer to the following formula (1))' is the Y coordinate of the pixel line whose maximum value is calculated as the Y coordinate of the center position of the standard image RCi. Similarly, pressing the edge X The per-pixel line of the direction (the horizontal direction of the figure), the calculation will correspond to each pixel The value of the value of the density value (refer to the following formula (2)) is the value of the pixel line whose maximum value is the maximum value, and the coordinate of the standard image Rcl is set to the X coordinate of the standard image Rcl. And (2), the number of pixels corresponding to the standard image position specifying image Δ11 is 512. 14 200907318 [Math 1] 511 rw=|^(x, y).. (2)
<7〉基於被指定的各標準像％的中心位置，使 二，的加權平均法等近似方法，求像中心的軌跡(通常成 的偏开曰根據此像中心的軌跡的半徑，計算上述透鏡面A 偏心1。 =於測定其他透鏡面51a、5ib、52b的偏心量也用同樣 10 '進行，但當無用像沒有被照映在圖像上時，可省$ 上述用於消除無用像的圖像處理。 略 被昭本實施方式之偏心量測定裝置，標準像與無用像 .·在圖像上時，也可透過求差圖像從圖像上㈣益用 因此可以指定圖像上的標準像的位置。另 過 二心量測定裝置，能夠高精度地測定待測面的偏心量，： 15 、也可大幅地縮短測定所需的時間。 需㈣明的是，作為本發明的“量敎裝置 於上述貫施方式，還可以進行各種形式的變更。 例如’在上述實施方式令’形成各標準像位置 個Γ寺，依次求得圖2所示的各圖像w,2中互相鄰接的兩 的差圖像’但還可以代替為，按以二兩<7> Based on the approximation method such as the center position of each of the designated standard image %, and the weighted average method of the second, the trajectory of the image center (the normal yoke is calculated based on the radius of the trajectory of the image center) The lens surface A is eccentric 1. The eccentricity of the other lens faces 51a, 5ib, 52b is also measured by the same 10', but when the useless image is not reflected on the image, the above-mentioned image can be saved for eliminating the useless image. Image processing. The eccentricity measuring device, the standard image and the useless image in the embodiment of the present invention can also be used to specify the image by using the difference image from the image (4). The position of the standard image. The two-hearted measuring device can accurately measure the amount of eccentricity of the surface to be measured, and: 15 can also greatly shorten the time required for the measurement. (4) It is obvious that the present invention The measuring device can be modified in various forms in the above-described manner. For example, in the above-described embodiment, each of the standard image positions is formed, and each image w, 2 shown in FIG. 2 is sequentially obtained. Difference image of two adjacent to each other' but still Instead of, according to twenty-two
無用像除去用圖像’其只照映無用像，利用此無用像除J 15 20 200907318 用圖像形成各標準像位置指定用圖像。圖6是以圖式表示無 用像除去用圖像的形成過程的圖。 首先，透過求得由圖2所示的各圖像中的規定的 5The image for useless image is removed. Only the useless image is imaged, and the image for each standard image position is formed by the image in addition to J 15 20 200907318. Fig. 6 is a view showing a process of forming an image for unnecessary image removal. First, by specifying the prescribed 5 in each image shown in FIG.
10 2個圖像（在圖6中圖像l與圖像w的差圖像而做成的標準像 位置指定用圖像（在圖6中圖3所示的標準像位置指定用圖 像△ L) ’與成為差圖像的來源的上述2個圖像中一方的圖像 (在圖6中圖像1〇之間的差圖像，從而形成無用像除去用圖 像Iuc ’其僅照映無用像。 ，、二人，透過分別求得圖2所示的各圖像L〜Ii2與上述無 用像除去關像IUe之間的差圖像，可形成與圖3所示的詩 準像位置指U圖像Δΐ2〜Δΐΐ2相同的各標準像位置指定不 用圖像(關於標準像位置指定用圖像ΔΙ!，已在前階段形 成）。 力 仕上述實施方式 15 I. 20 〜從用卞子形狀的分度線作a 指標、，此外，也可使用針孔等其他形狀之物作為指標。’、、、 並且’在上述實施方式中，在測定一個待 的偏心量時，使用使待測面的旋轉位置每观變化而拍 數，可適當改變。 的疑轉角度或拍攝的圖像張 另外，上述實施方式的偏心量測定裝置，是來自待測 面的反射光而形成的指標像進行觀察的還可 以來自待測面的穿透光而形成的 仁還了 型。 伯知像進仃觀察的光透射 16 200907318 【圖式簡單說明】 圖1是一實施方式之偏心量測定裝置的架構圖。 圖2是表示透鏡體的各旋轉位置中被拍攝的多個圖像的一 例的圖。 5 圖3是表示標準像位置指定用圖像的一例的圖。 圖4是表示分別照映標準像及無用像的2個圖像的圖。 圖5是表示消除無用像的圖像處理作用的圖。 圖6是以圖式表示無用像除去用圖像的形成過程的圖。 ·. 10 【主要元件符號說明】 5透鏡體（待測光學元件） 11光源 13光束分離器 15物鏡透鏡 17攝影機 21載置構件 23疑轉载物台 31解析裝置 33輸入裝置 41支樓部 43可動部 53鏡筒 61a' 61b剖面線 p光會聚點 1偏心量測定裝置 10測定頭 12分度板 14準直透鏡 16攝影元件 20基台 22 XY軸载物台 30解析運算部 32圖像顯示裝置 40 Z軸載物台 42引導部 51、52透鏡 51a、51b'52a、52b 透鏡面 C3焦點 17 200907318 - Z、B光軸 A旋轉軸 11〜11 2圖像 △ I2〜ΔΙ12標準像位置指定用圖像 Iuc無用像除去用圖像 RCl〜Rc12、Rca、Rcb 標準像 υ(^〜υί；12、Uca、Ucb 無用像 1810 images (standard image position specifying image created by the difference image between image 1 and image w in Fig. 6 (standard image position specifying image shown in Fig. 3 in Fig. 6) L) 'the image of one of the above two images that is the source of the difference image (the difference image between the images 1〇 in Fig. 6 to form the image for useless removal Iuc' The image of the poem quasi-image shown in FIG. 3 can be formed by separately obtaining the difference image between the images L to Ii2 shown in FIG. 2 and the unnecessary image to remove the image IUe. The position is a U-image Δΐ2 to Δΐΐ2, and each of the standard image position designation unnecessary images (for the standard image position designation image ΔΙ!, which has been formed in the previous stage). The above-described embodiment 15 I. 20~ The index line of the sub-shape is used as an index, and other shapes such as pinholes may be used as indicators. ', , and ' In the above embodiment, when an amount of eccentricity to be measured is measured, use is made. The number of rotations of the measuring surface can be changed as the number of shots changes. The suspected angle or the image taken is additionally In the eccentricity measuring device according to the above-described embodiment, the index image formed by the reflected light from the surface to be measured is observed and can be formed by the transmitted light from the surface to be measured. Fig. 1 is a block diagram showing an eccentricity measuring device according to an embodiment. Fig. 2 is a view showing an example of a plurality of images taken at respective rotational positions of a lens body. 3 is a view showing an example of a standard image position specifying image. Fig. 4 is a view showing two images of a standard image and a useless image, respectively. Fig. 5 is a view showing an image processing action for eliminating unnecessary images. Fig. 6 is a view showing a process of forming an image for unnecessary image removal. Fig. 10 [Description of main component symbols] 5 lens body (optical element to be tested) 11 light source 13 beam splitter 15 objective lens 17 camera 21 Setting member 23 Suspecting stage 31 Analysis device 33 Input device 41 Branch portion 43 Movable portion 53 Lens barrel 61a' 61b Section line p Light convergence point 1 Eccentricity measuring device 10 Measuring head 12 indexing plate 14 Collimating lens 16 Photographic element 20 Table 22 XY Axis Stage 30 Analysis Calculation Unit 32 Image Display Device 40 Z-Axis Stage 42 Guide Parts 51, 52 Lens 51a, 51b'52a, 52b Lens Surface C3 Focus 17 200907318 - Z, B Optical A A Rotation Axis 11 to 11 2 Image △ I2 to ΔΙ12 Standard image position designation image Iuc useless image removal image RCl to Rc12, Rca, Rcb Standard image ^ (^~υί; 12, Uca, Ucb useless image 18