JP2010032471A - Image measuring apparatus and computer program - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an image measuring apparatus and a computer program, capable of precisely, simply and quickly measuring a shape of an object to be measured in accordance with the size of a part of the object to be measured, by using an image obtained at a low or high power in magnification, without mechanically changing any optical system. <P>SOLUTION: The apparatus includes; a display means 332 for displaying a low-magnification image or a high-magnification image photographed concentrically with the low-magnification image, such that view field centers of both images are positioned on the approximate center of its screen; an edge part receiving means 333 for receiving a designation of an edge part on the low-magnification image or the high-magnification image; a determining means 334 for determining whether or not an image representing the designated edge part is included in one high-magnification image, when moving the image representing the edge part to the approximate center of the low-magnification image; and a measurement value calculating means 335 for calculating a measurement value of the object to be measured, based on a coordinate value of an edge point of the edge part obtained on the one high-magnification image, in the case the determination is made that the image is included in the one high-magnification image. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an image measurement apparatus and a computer program that accurately measure the shape of a measurement object using image data acquired by switching between a low magnification and a high magnification.

  Conventionally, as a device for measuring the shape of a measurement object, the measurement object is irradiated with light, and the transmitted light or reflected light of the irradiated light is received by a light receiving lens, CCD (Charge Coupled Device), CMOS (Complementary Metal-Oxide Semiconductor) There is an image measurement device that obtains an image by forming an image on an imaging element such as) and measures the shape of a measurement object by computer processing the obtained image.

  The image of the measurement object can be made to have a very accurate similarity to the measurement object by the light receiving lens. By calibrating the dimensions on the image with the magnification of the light receiving lens, the dimensions on the image can be accurately associated with the dimensions of the actual measurement object. Therefore, by accurately specifying the shape of the measurement object on the image, the shape of the actual measurement object can be accurately measured. The measurement object on the image is specified by detecting a boundary part (hereinafter referred to as an edge part) between the measurement object and the background image. FIG. 15 is an illustration of an edge detection region designated on a conventional image. FIG. 16 is a view showing an example of a shape specified by a least square method based on a conventional edge point. FIG. 17 is an explanatory diagram for explaining a circle obtained by fitting a conventional edge point to a geometric figure.

  When an edge is detected on the image, an edge detection area is designated by surrounding the edge portion with a mouse cursor by clicking or dragging as shown in FIG. The edge portion is a portion where the luminance value changes sharply between the pixel of the measurement object and the pixel of the background image, and the computer determines that the luminance difference between adjacent pixels is a predetermined value in the image data of the specified area, for example. Larger locations (between pixels) are acquired as a plurality of edge points as shown in FIG. The obtained plurality of edge points are fitted to a linear geometric figure as shown in FIG. 16 by a regression analysis method such as a least square method, and the calculated straight line is detected as an edge. Even if the straight line is a point, it can be similarly detected. As in the case of a straight line, a circular shape can also be obtained as a plurality of points where the luminance value changes rapidly between adjacent pixels as shown in FIG. 17 and can be calculated by the least square method or the like.

  The size of the measurement object itself and the size of the measurement target part are various. For example, when the measurement target portion has a relatively small circular shape and an image (hereinafter referred to as a low-magnification image) is acquired at a low magnification, the number of obtained edges is reduced, so that a correct circular shape cannot be calculated. Even when the measurement target area is relatively small and the number of edges that can be calculated with a low-magnification image can be obtained, an image acquired at a higher magnification (hereinafter referred to as high magnification) Image). On the other hand, as the magnification increases, the image area that can be acquired at one time is narrowed, and if the measurement target portion is relatively large, the entire image of the measurement target portion may not be displayed as a high-magnification image at a time. is there. In addition, when measuring a small measurement target part, the measurement target part is measured at a high magnification, but the whole measurement target object is viewed at a low magnification and the positional relationship of the measurement target part in the whole measurement target object is confirmed. It is necessary to measure. Therefore, it is required to use both images acquired at a low magnification and a high magnification according to the size of the measurement target portion.

  In order to acquire a low-magnification image and a high-magnification image with an image measurement device, it is necessary to switch between a low magnification and a high magnification. For example, there are methods of mechanically switching the optical system, such as a method of exchanging a light receiving lens (objective lens), a method of using a switch such as a revolver, and a method of using a zoom lens. When measuring a small measurement target part as described above, when looking down on the entire measurement object, switch the optical system to a low magnification, check the position of the measurement object with a wide field of view, align the optical system, By switching to a high magnification, a small measurement target portion can be measured at a high magnification while overlooking the whole.

  However, when there are multiple small parts to be measured, the optical system is switched many times, such as positioning at low magnification, switching to high magnification, measuring again, and positioning again by switching to low magnification. This requires a complicated operation and requires a considerable amount of time for measurement. Therefore, measurement omission, measurement position designation error, and the like are likely to occur.

  Therefore, as an image measurement device that switches between a low magnification and a high magnification without mechanically switching the optical system, for example, in Patent Document 1, while having the same optical axis, an image of the measurement object on the stage is set to a low magnification. A position measurement apparatus including a two-lens two-magnification projection optical system that can be individually projected at a high magnification is disclosed. In Patent Document 1, a predetermined first mark and a second mark smaller than the first mark are attached to a predetermined position on the surface of the measurement object, the first mark is imaged at a low magnification, and based on the low magnification image. By moving the projection optical system relative to the stage, the second mark is arranged in the high magnification field of view of the projection optical system.

Further, Patent Document 2 discloses an optical measurement apparatus having a mechanism for switching and using two optical paths. As shown in Patent Document 2, an objective lens and one CCD camera are used. A structure is shown in which an optical path between them is branched by a beam splitter, a low-magnification lens is inserted in the optical path, and a high-magnification lens is inserted in the branched optical path. In addition, a structure in which light of an optical path branched and inserted with a high magnification lens is incident on another CCD camera is also illustrated.
JP 2000-346618 A JP-A-9-304682

  In the above-described position measurement apparatus of Patent Document 1, since the surface of the measurement object is marked, when the measurement object moves on the stage when switching from low magnification to high magnification, the measurement object is again low. The projection optical system must be moved relative to the stage and rearranged based on the magnification image. Moreover, the first mark for low magnification and the second mark for high magnification need to be attached to the surfaces of all measurement objects in advance according to the respective magnifications. Since some measurement objects cannot be used, the scope of application is limited.

  Further, in Patent Document 2 described above, even when there are a plurality of small measurement target portions, it is not necessary to mechanically switch the optical system, so that it does not take time to switch the optical system. However, it takes time to measure and repeats the troublesome work of positioning at low magnification, switching to high magnification, and then switching to low magnification and positioning again. It does not solve the problem that is likely to occur.

  The present invention has been made in view of such circumstances, and using an image acquired at a low magnification or a high magnification without mechanically switching the optical system, the measurement object is measured according to the size of the measurement object portion. It is an object of the present invention to provide an image measuring apparatus and a computer program capable of measuring a shape with high accuracy and simply and quickly.

  In order to achieve the above object, an image measurement apparatus according to a first aspect of the present invention is an image measurement apparatus that measures a measurement object based on an image obtained by imaging the measurement object, and that receives light applied to the measurement object as a light receiving lens. A low-magnification side imaging means for imaging light in one direction out of the light branched in two directions from the light-receiving lens on the imaging element through a low-magnification low-magnification imaging lens, and bifurcating in the two directions A high-magnification side imaging means for imaging light in the other direction of the obtained light on an imaging device through a high-magnification high-magnification side imaging lens, a low-magnification image captured by the low-magnification side imaging means, or the low-magnification image A high-magnification image captured by the high-magnification side imaging unit on the same axis, and a display unit that displays the image so that the center of the field of view of both images is located at the approximate center of the screen; Edge part reception that accepts specification of edge part And an image showing a plurality of edge portions whose designation is received by the edge portion receiving means are moved to substantially the center of the low-magnification image, the images showing the edge portions are included in one high-magnification image. A determination unit that determines whether or not the image is included, and the edge acquired on the one high-magnification image when the determination unit determines that an image showing the plurality of edge portions is included in the one high-magnification image Measurement value calculation means for calculating the measurement value of the measurement object based on the coordinate value of the edge point of the part is provided.

  The image measuring apparatus according to a second aspect of the present invention determines whether or not a predetermined number of edge points can be acquired on the low-magnification image for each of a plurality of edge portions for which designation has been received. And a plurality of the edge portions can be displayed in one high-magnification image when it is determined that the predetermined number of edge points cannot be obtained on the low-magnification image. Image determining means for determining whether or not it is possible, wherein the determining means displays an image showing a plurality of edge portions determined to be displayed in one high-magnification image by the image judging means. When the image is moved to substantially the center of the image, it is determined whether or not an image showing a plurality of the edge portions is included in one high-magnification image, and the measured value calculation means is the edge point determination means On a low-magnification image A plurality of the edges acquired on the low-magnification image when it is judged that it is possible to obtain a wedge point, or when it is judged by the image judgment means that it cannot be displayed in one high-magnification image The measurement value of the measurement object is calculated based on the coordinate value of the edge point of the part.

  The image measurement apparatus according to a third aspect of the present invention is the first or second aspect of the present invention, in the first or second aspect, when the determination unit determines that an image showing the plurality of edge portions is included in the one high-magnification image, the low-magnification image Switching means for switching to the high-magnification image.

  The image measurement device according to a fourth aspect of the present invention is the image measurement apparatus according to any one of the first to third aspects, wherein the edge portion on the low-magnification image, the measurement object, Based on the stored relative position information, an image showing a plurality of the edge portions is included in the one high-magnification image based on the stored relative position information. Guiding display means for displaying on the low-magnification image a guidance sign for guiding and moving an image showing the measurement object.

  The image measurement device according to a fifth invention is the image measurement device according to the fourth invention, wherein the measurement value calculation means calculates a distance measured using a plurality of edge portions that cannot be displayed in one high-magnification image. The calculation is based on the coordinate values of the edge points for each of the plurality of edge portions acquired on the image and the stored relative position information.

  Next, in order to achieve the above object, a computer program according to a sixth aspect of the present invention receives light applied to a measurement object with a light receiving lens, and in one direction out of the light branched in two directions from the light receiving lens. Low-magnification imaging means for imaging light on the image sensor through a low-magnification low-magnification imaging lens, and imaging light in the other direction of the light branched in the two directions through the high-magnification high-magnification imaging lens It is possible to execute in an image measuring apparatus that includes a high-magnification side imaging unit that forms an image on an element and measures the measurement object based on an image obtained by imaging the measurement object with the low-magnification side imaging unit and the high-magnification side imaging unit In this computer program, the image measuring device is a low-magnification image captured by the low-magnification side imaging means, or a high-magnification image that is coaxial with the low-magnification image and is imaged by the high-magnification side imaging means. On screen Display means for displaying in the center, edge portion receiving means for receiving designation of a plurality of edge portions on the low-magnification image or the high-magnification image, and a plurality of edge portions for which designation is accepted by the edge portion receiving means A determination unit that determines whether or not a plurality of images indicating the edge portion are included in one high-magnification image when the image indicating the image is moved to approximately the center of the low-magnification image; and When it is determined that an image showing a plurality of edge portions is included in the one high-magnification image, based on the coordinate values of the edge points of the edge portion acquired on the one high-magnification image, the measurement object It functions as a measurement value calculation means for calculating a measurement value.

  According to a seventh aspect of the present invention, in the sixth aspect, the computer program can acquire the predetermined number of edge points on the low-magnification image for each of a plurality of edge portions for which the designation has been received. An edge point determination unit that determines whether or not a predetermined number of edge points cannot be acquired on the low-magnification image by the edge point determination unit. An image showing a plurality of edge portions that are judged to be able to be displayed in one high-magnification image by the image judging means. Is moved to approximately the center of the low-magnification image, and functions as a means for determining whether or not an image showing a plurality of the edge portions is included in one high-magnification image, and the measurement value calculation means, When it is determined by the edge point determination means that a predetermined number of edge points can be acquired on the low-magnification image, or when it is determined by the image determination means that it cannot be displayed in one high-magnification image , And functioning as means for calculating a measurement value of the measurement object based on coordinate values of edge points of the plurality of edge portions acquired on the low-magnification image.

  According to an eighth aspect of the present invention, in the sixth or seventh aspect, the image measuring apparatus determines that the image indicating the plurality of edge portions is included in the one high-magnification image by the determining unit. In this case, the low-magnification image is made to function as switching means for switching to the high-magnification image.

  According to a ninth aspect of the present invention, there is provided a computer program according to any one of the sixth to eighth aspects, wherein the image measurement device is configured to cause the edge portion on the low-magnification image to be displayed for each image indicating the plurality of edge portions. Based on the stored relative position information, position storage means for storing relative position information regarding the relative positional relationship with the measurement object, and an image showing a plurality of edge portions is included in the one high-magnification image. As included, a guide sign for guiding and moving an image showing the measurement object is caused to function as a guide display means for displaying on the low-magnification image.

  The computer program according to a tenth aspect of the present invention is the computer program according to the ninth aspect, wherein the measured value calculation means calculates the distance measured using a plurality of edge portions that cannot be displayed in a single high-magnification image. It is made to function as a means to calculate based on the coordinate value of the edge point for every said some edge part acquired above, and the said relative position information memorize | stored.

  In the first and sixth inventions, a low-magnification image or a high-magnification image captured on the same axis is displayed such that the center of the field of view of both images is located at the approximate center on the screen, so the relationship with the stage position should be considered. In addition, the positional relationship between the measurement target portion of the measurement target on the low-magnification image and the measurement target portion on the high-magnification image can be easily grasped. In addition, when a plurality of edge portions are specified on a low-magnification image or a high-magnification image, and the image indicating the received plurality of edge portions is moved to the approximate center of the low-magnification image, the plurality of edge portions are indicated. When the image is included in one high-magnification image, the measurement value of the measurement object is calculated based on the coordinate value of the edge point of the edge portion acquired on the one high-magnification image. This eliminates the need for alignment each time switching between the low-magnification image and the high-magnification image, and allows the edge portion to be measured in the high-magnification image to be reliably displayed and measured in one high-magnification image. The measurement object can be measured accurately and simply according to the size of the object.

  In the second invention and the seventh invention, when it is determined that a plurality of edge portions that have received designations can acquire a predetermined number of edge points on the low-magnification image, and cannot be acquired By determining whether or not multiple edge parts can be displayed in a single high-magnification image, the operator can specify the multiple edge parts and simply measure the edges in the high-magnification image. It is not necessary to determine whether or not it is a portion, and when necessary, it can be correctly measured on a high-magnification image. Also, when it is determined by the edge point determination means that a predetermined number of edge points can be acquired on the low-magnification image, or when it is determined by the image determination means that it cannot be displayed in one high-magnification image By calculating the measurement value of the measurement object based on the coordinate values of the edge points of the multiple edge parts acquired on the low-magnification image, the multiple edge parts that can be measured appropriately in the low-magnification image are low. Accurate and quick measurement can be performed with a double image.

  In the third invention and the eighth invention, when the judging means judges that an image showing a plurality of edge portions is included in one high-magnification image, the low-magnification image is switched to the high-magnification image, thereby making measurement easier and faster. The target part can be measured.

  In the fourth and ninth inventions, the relative position information relating to the relative positional relationship between the edge part and the measurement object on the low-magnification image is stored for each image showing a plurality of edge parts, and the stored relative Based on the position information, a guide sign for guiding and moving the image indicating the measurement target is displayed on the low-magnification image so that the image showing the plurality of edge portions is included in one high-magnification image. Therefore, a plurality of edge portions can be accurately arranged in one high-magnification image simply by moving the measurement object according to the guidance sign. In particular, even when the edge portion exists outside one low-magnification image, the edge portion is not searched for and can be easily arranged. In addition, when there are a plurality of measurement target portions, a guidance sign is displayed, so that it is possible to check a plurality of edge portions used for the measurement target portion being measured and to prevent the measurement from being forgotten. .

  In the fifth and tenth inventions, the distance measured using a plurality of edge portions that cannot be displayed in one high-magnification image is expressed as the coordinate value of the edge point for each of the plurality of edge portions on the high-magnification image. And calculated from the stored relative position information. Accordingly, the coordinate values of the edge points for each of the plurality of edge portions acquired in the separate high-magnification image, and relative position information regarding the relative positional relationship between the edge portion on the low-magnification image stored and the measurement object, Based on the above, it is possible to accurately measure the distance measured using a plurality of edge portions that cannot be displayed in one high-magnification image simply and quickly. In particular, even a distance measured using a plurality of small edge portions that are difficult to measure with a low-magnification image can be measured with high accuracy.

  According to the above configuration, the positional relationship between the measurement target portion on the low magnification image and the measurement target portion on the high magnification image can be easily grasped without considering the relationship with the stage position. Without aligning each time the image is switched to the high-magnification image, the edge portion that is desired to be measured with the high-magnification image can be reliably displayed in the single high-magnification image and accurately measured. Accordingly, it is possible to measure the measurement object accurately and simply.

  Hereinafter, an image measuring device according to an embodiment of the present invention will be specifically described with reference to the drawings.

(Embodiment 1)
FIG. 1 is a schematic diagram showing a configuration of an image measurement apparatus according to Embodiment 1 of the present invention. As shown in FIG. 1, the image measurement apparatus 1 according to the first embodiment includes a measurement unit 2 and a control unit 3. The control unit 3 calculates image data captured by the measurement unit 2. Process and measure the dimensions of the desired shape.

  In the measurement unit 2, two sets of illumination devices are installed with a stage 21 that moves the measurement object 20 to the measurement part. First, a ring-shaped epi-illumination device 22 that illuminates the measurement object 20 on the stage 21 from above is installed in the light receiving lens unit 23. The light irradiated by the epi-illumination device 22 is reflected by the surface of the measurement object 20 and returns to the light receiving lens unit 23. Thereby, the unevenness | corrugation of the surface of the measurement target object 20, a pattern, etc. can be imaged.

  A transmission illumination device 24 that illuminates the measurement target 20 from below is installed below the stage 21. The transmitted illumination device 24 includes at least a light source 241, a reflection mechanism 242, and a lens 243. The light emitted from the light source 241 is reflected by the reflection mechanism 242 toward the stage 21, and the lens 243 reflects the stage 21. To be converted into parallel light in a direction substantially perpendicular to each other. Thereby, only the light of the position where the measuring object 20 does not exist can be transmitted and imaged.

  The light receiving lens unit 23 includes at least a light receiving lens 231, a beam splitter 232, a high magnification side imaging lens unit 233, and a low magnification side imaging lens unit 236. The high-magnification side imaging lens unit 233 includes a slit 234 for imaging and a high-magnification side imaging lens 235, and the low-magnification side imaging lens unit 236 includes a slit 237 for imaging and a low-magnification side imaging. A lens 238 is used. The beam splitter 232 is a prism that branches light from the light receiving lens 231 in two directions. For example, a cube type or a plate type can be used. Compared with the plate type, the cube type beam splitter is preferable because the light passing through the beam splitter is not refracted, the optical axis is not shifted, and alignment adjustment of the branch angle is easy.

  In FIG. 1, the light emitted from the epi-illumination device 22 is reflected by the measurement object 20 and the light emitted from the transmission illumination device 24 and transmitted through the measurement object 20 is divided into the high-magnification imaging lens unit 233 and the low magnification. An example of guiding to the side imaging lens unit 236 is shown. The light in two directions branched by the beam splitter 232 is guided to both the low magnification side imaging lens unit 236 and the high magnification side imaging lens unit 233.

  The high-magnification side imaging device 25 forms an image of light guided to the high-magnification side imaging lens unit 233 with an imaging element 251 such as a CCD or CMOS, and transmits the image to the control unit 3 as high-magnification image data. Similarly, the low-magnification side imaging device 26 causes the light guided to the low-magnification side imaging lens unit 236 to be imaged by an imaging element 261 such as a CCD or CMOS, and transmits the image to the control unit 3 as low-magnification image data. With the above-described configuration of the two-branch optical system including the light receiving lens 231 and the beam splitter 232, high-magnification image data and low-magnification image data can be acquired simultaneously without mechanically switching the optical system. Both image data can be electronically switched and displayed on one screen, or can be displayed separately on two screens simultaneously.

  FIG. 2 is a block diagram showing the configuration of the control unit 3 of the image measurement apparatus 1 according to Embodiment 1 of the present invention. As shown in FIG. 2, the control unit 3 of the image measuring apparatus 1 according to the first embodiment connects at least a CPU (central processing unit) 33, a storage device 34 such as a memory, communication means 35, and the above-described hardware. An internal bus 36 is used. Via an internal bus 36, the input device is also connected to a mouse 32, a keyboard 31, and a display device 27, which is an output device.

  The CPU 33 is connected to the hardware units as described above of the control unit 3 through the internal bus 36, controls the operation of the hardware units described above, and according to the computer program stored in the storage device 34. Perform various software functions. The storage device 34 is composed of, for example, a volatile memory such as SRAM or SDRAM, and a load module is developed when the computer program is executed, and stores temporary data generated when the computer program is executed.

  The communication means 35 is connected to the internal bus 36, is connected to the high-magnification side imaging device 25 and the low-magnification side imaging device 26 via a communication line, and is imaged by the high-magnification side imaging device 25 and the low-magnification side imaging device 26. Receive image data. Further, by being connected to an external network such as the Internet, a LAN, or a WAN, data can be transmitted / received to / from an external computer or the like. Note that the computer program stored in the storage device 34 is downloaded from an external computer via the communication means 35.

  The CPU 33 of the control unit 3 stores the low-magnification image data of the low-magnification image captured by the low-magnification side imaging device 26 and the high-magnification image data of the high-magnification image captured by the high-magnification side imaging device 25 that is coaxial with the low-magnification image. Means 331, display means 332 for displaying a low-magnification image or high-magnification image on the display device 27, edge part reception means 333 for accepting designation of a plurality of edge parts on the low-magnification image or high-magnification image, and a plurality of designations accepted When it is determined that the edge point determination unit 336 determines whether or not a predetermined number of edge points can be acquired in the low-magnification image for each edge part, and the edge point determination unit 336 cannot acquire the edge points. The image determination unit 337 determines whether or not a plurality of edge portions can be displayed in one high-magnification image.

  In addition, when the CPU 33 moves the image indicating the plurality of edge portions determined to be displayed by the image determination unit 337 to the approximate center of the low-magnification image, the image indicating the plurality of edge portions is one. If the determination unit 334 determines whether or not the image is included in the high-magnification image, the coordinate values of the edge points of the plurality of edge portions acquired on the switched high-magnification image are determined. On the basis of the measurement value calculation means 335 for calculating the measurement value of the measurement object, and the determination means 334, if it is determined that an image showing a plurality of edge portions is included in one high-magnification image, the low-magnification image is It also functions as switching means 338 for switching to an image.

  Further, the CPU 33 is based on the position storage unit 341 that stores relative position information related to the relative positional relationship between the measurement object 20 on the low-magnification image of the image showing the plurality of edge portions, and the stored relative position information. Thus, it also functions as a guidance display means 342 for displaying a guidance sign for guiding and moving an image showing the measurement object so that an image showing a plurality of edge portions is included in one high-magnification image. To do.

  The storage unit 331 stores the high-magnification image data and the low-magnification image data in the storage device 34 in a state where they are aligned with each other. Here, the low-magnification image and the high-magnification image are obtained by dividing the light from the same light-receiving lens 231 in two directions by the beam splitter 232 into light in one direction, respectively. Since it is obtained by forming an image on the image pickup elements 251 and 261 through the image lens 238, the image is taken coaxially. That is, the image is captured so that the center of the field of view of the low-magnification image matches the center of the field of view of the high-magnification image. The storage means 331 does not need to particularly align the low-magnification image and the high-magnification image, and the designation is made by storing the image data of the low-magnification image and the image of the high-magnification image with the same center position as they are. Appropriate image data can be selected according to the accepted edge portion.

  The display unit 332 displays a low-magnification image captured by the low-magnification side imaging device 26, and a high-magnification image that is coaxial with the low-magnification image and that is captured by the high-magnification side imaging device 25. It is displayed so that it is located at. The display unit 332 displays the low-magnification image data or the high-magnification image data received by the communication unit 35 as a low-magnification image or a high-magnification image on the display device 27 such as an LCD or an organic EL display. FIG. 3 is an exemplary diagram illustrating a positional relationship between a high magnification field of a high magnification image and a low magnification field of a low magnification image. FIG. 4 is an illustration of an image displayed by switching between a low-magnification image and a high-magnification image. 4A is a low-magnification image, and FIG. 4B is a high-magnification image.

  As described above, since the low-magnification image and the high-magnification image are captured coaxially, as shown in FIG. 3, the center of the low-magnification field range a which is an image area that can be acquired at a low magnification at one time (low-magnification field center) C) coincides with the center (high magnification visual field center) d of the high magnification visual field range b, which is an image region that can be acquired at a high magnification at a time. Therefore, by displaying the low-magnification image and the high-magnification image so that the respective visual field centers of the low-magnification image and the high-magnification image are positioned at the approximate center on each image, the visual field centers of the low-magnification image and the high-magnification image are substantially the same. Displayed in a consistent and aligned state. Note that the entire low-magnification field of view a is displayed on the low-magnification image screen so that there is no area that is not displayed.

  When switching from a low-magnification image to a high-magnification image and displaying it on the same screen, the image displayed at the central portion e in the low-magnification image as shown in FIG. 4A is as shown in FIG. 4B. The high-magnification image is enlarged and displayed, and the same part is displayed in the central part on the low-magnification image and the central part on the high-magnification image. Note that the measurement target portion 201 indicates a portion of the measurement target whose dimension is to be measured. In addition, the image indicating the measurement target 20 displayed on the low-magnification image or the high-magnification image may be described as the measurement target 20 with the “image indicating” omitted hereinafter.

  As shown in FIG. 4 (a), the edge portion of the circle for measuring the measurement target portion 201 is displayed small on the low-magnification image, and the number of obtained edges is small. Not only can it be done, it also becomes difficult to measure as a circle. As shown in FIG. 4B, on the high-magnification image, the number of edges, for example, 10 or more can be acquired at the edge portion of the circle for measuring the measurement target portion 201, so that an accurate circle can be measured. . On the other hand, the measurement target portion 201 shown in FIG. 3 is difficult to measure because the entire measurement target portion 201 is not displayed on the high-magnification screen, and corresponds to the positions of both ends of the measurement target portion 201 on the low-magnification screen. Since the edge position to be performed can be secured, measurement is performed on a low-magnification image.

  The measurement method of the measurement target portion 201 can be set by a known method. In setting the measurement method, not only the setting of a plurality of edge portions used for measuring the measurement target portion 201, but also which edge portion of the measurement target 20 is used for measuring the specified measurement target portion 201. It also includes settings for how to detect and use them. Measurement setting data such as a template stored in advance may be read and measured. The measurement target portion 201 is set on a low-magnification image that makes it easy to grasp the measurement target portion 201 by looking down over the entire measurement target 20, but is set on the high-magnification image when the measurement target portion 201 is small. May be. When setting the measurement method of the measurement target portion 201, there is no need to be aware of whether or not a plurality of edge portions for measuring the measurement target portion 201 can be appropriately measured on the high-magnification image. Set by the method. After the measurement method of the measurement target part 201 is set, the edge part receiving unit 333 receives designation of a plurality of edge parts for measuring the distance of the measurement target part 201.

  It is determined whether or not the plurality of edge portions for measuring the measurement target portion 201 that has received the designation are edge portions that can be appropriately measured on the high-magnification image. Specifically, it is determined whether or not a predetermined number of edge points can be acquired on the low-magnification image, and when it is determined that the edge points cannot be acquired, the edge portion is displayed in one high-magnification image. It is determined whether or not The edge portion determined to be displayed in one high-magnification image is defined as an edge portion (high-magnification target edge portion) that can be appropriately measured on the high-magnification image. For multiple edge parts that can be measured on both low-magnification images and high-magnification images, if the measurement accuracy requirement is high, set a large number of edge points as a reference, and request measurement accuracy. The standard can be set according to the degree of the.

  FIG. 5 is a view showing an example of a low-magnification image that notifies the measurement target portion 201 to be measured using the edge portion that the image judging means 337 has determined to be the high-magnification target edge portion. As shown in FIG. 5, in the measurement object 20 displayed as a low-magnification image, four measurement target portions 201 are indicated by arrows, and a broken-line arrow is a high-magnification image and is measured using a high-magnification target edge portion. A portion 201 (high-magnification target portion g) is shown, and a solid line arrow indicates a measurement target portion 201 (low-magnification target portion h) that is measured using an edge portion that can acquire a predetermined number or more edge points in a low-magnification image. Show. The notification method of the high-magnification target part g is not particularly limited as long as it can be notified that the measurement target part 201 is measured using the high-magnification target edge part. It may be displayed or highlighted.

  The setting of the measurement target portion 201 and the determination as to whether or not the measurement target portion 201 is a high-magnification target edge portion are performed on one low-magnification image captured for the entire measurement target 20. Relative position information relating to the relative positional relationship of the high-magnification target edge part used for measurement of the high-magnification target part g on the low-magnification image with respect to the measurement object 20 is stored in the storage device 34 by the position storage unit 341. Further, the low magnification target portion h is measured on the low magnification image. After measuring the low-magnification target part h, the high-magnification image target edge part used for measuring the high-magnification target part g is moved to the approximate center of the low-magnification image.

  Specifically, the operator moves the stage 21, or moves the measurement object 20 itself placed on the stage 21 on the stage 21. The measurement object 20 is used for measuring the high-magnification target part g. The image showing the high-magnification target edge portion is moved to the center portion e. Therefore, the operator can directly grasp the positional relationship between the measurement target portion and the field-of-view range of the high-magnification image on the low-magnification image, and does not indirectly obtain the positional relationship from the position of the stage 21. There is no need to know the position of the. Since it does not depend on the position of the stage 21, an error occurs such as inadvertently moving the stage 21 due to carelessness or the like, or erroneously moving the measurement target 20 placed on the stage 21 on the stage 21. Even so, it is not necessary to re-recognize the positional relationship with the stage 21, and the measurement can be continued as it is.

  Therefore, the stage 21 does not need to be electrically operated, and a linear scale for grasping the position of the stage 21 and a jig for positioning on the stage 21 are not necessary. Therefore, the image measuring apparatus 1 can be provided at a low cost with a simple configuration. In order to confirm the moving state, a low-magnification image obtained by continuously imaging (monitoring) the measurement object 20 placed on the stage 21 is displayed on the screen.

  FIG. 6 is an illustration of a guide sign that moves the high-magnification target portion g to the central portion e. FIG. 6A shows a state where the high-magnification target part g is separated from the central part e, and FIG. 6B shows a state where the high-magnification target part g is near the central part e. As shown in FIG. 6 (a), when the high-magnification target part g1 that is far from the central part e starts to move in the direction of the central part e, a guide sign arrow that guides and moves the high-magnification target part g1 to the central part e i is displayed. As the high-magnification target portion g1 approaches the center portion e, the arrow i of the guidance sign is displayed smaller as shown in FIG. Note that it is necessary to move to the central portion e, not the high magnification target portion g itself, that is, the portion corresponding to the distance of the high magnification target portion g, but in the vicinity of the high magnification target portion g and measure the high magnification target portion g. The high-magnification target edge portion used in the above is described as moving the high-magnification target portion g. Similarly, description of the subsequent movement may be omitted in the same way.

  The arrow i is displayed so as to always point from the high-magnification target part g1 to the center part e while moving. As a method for tracking the movement of the high-magnification target portion g1 on the low-magnification image in real time, a known method such as high-speed pattern search or inter-frame difference monitoring can be employed. FIG. 7 is an exemplary diagram of a tracking target image when tracking the movement of the high-magnification target portion g1. FIG. 7A shows a state at the start of tracking, and FIG. 7B shows a state in which the high-magnification target part g1 is close to the central part e.

  When the high-magnification target part g1 is moved to the central part e as shown in FIG. 7A, the vicinity of the high-magnification target part g2 of the measurement target 20 is outside the low-magnification image as shown in FIG. As described above, since the entire low-magnification visual field range a is displayed on the screen of the low-magnification image, it is naturally outside the range of the low-magnification visual field range a. In the method of tracking the movement of the high-magnification target portion g1 described above, when the entire measurement target 20 is a tracking target image, a part of the measurement target 20 is out of the low-magnification visual field range a and cannot be tracked. An image showing the region j in the vicinity of the high-magnification target portion g1 is set as a tracking target image. Since the region j is in the vicinity of the high-magnification target part g1, while the high-magnification target part g1 tracks the movement of moving to the central part e, it exists in the range of the low-magnification field of view a as long as it moves normally. .

  With the guide sign such as arrow i, the operator can accurately grasp the moving direction while confirming the high-magnification target portion g1 being moved. Further, by changing the size of the guide sign as shown by the arrow i in accordance with the distance between the high-magnification target portion g1 and the central portion e, the operator can intuitively grasp the length of the distance to be moved. Furthermore, by limiting the tracking target image to an image showing the region j in the vicinity of the high-magnification target part g1, even if a part of the measurement object 20 is present outside the low-magnification visual field range a, the high-magnification is not affected. The movement of the target portion g1 can be tracked.

  The high-magnification target part g1 is moved to substantially the center of the low-magnification image, and it is determined whether the high-magnification object edge part used for measurement of the high-magnification object part g1 is included in one high-magnification image, that is, the central part e. It is judged by. FIG. 8 is a view showing an example of a high-magnification image switched by the switching unit 338 from a low-magnification image. FIG. 8A shows a low-magnification screen before switching, and FIG. 8B shows a high-magnification screen after switching. As shown in FIG. 8A, when the high-magnification target part g1 is moved to the central part e on the low-magnification image and the judgment unit 334 determines that the high-magnification target part g1 exists in the central part e, FIG. As shown in (b), the switching means 338 switches the low-magnification image to the high-magnification image. Then, the measurement value calculation unit 335 measures the measurement target portion 201 based on the coordinate value of the edge point of the high magnification target edge portion of the measurement target portion 201 (high magnification target portion g1) on the high magnification screen. Calculate the value.

  In the first embodiment, when the determining unit 334 determines that the high-magnification target edge portion used for the measurement of the high-magnification target portion g1 is included in one high-magnification image (center portion e), the switching unit 338 converts the high-magnification image into the high-magnification image. Switching may be performed by the operator pressing a switch input button, a mouse button, or the like. Similarly, the operator may start measurement by the measurement value calculation means 335.

  After the high-magnification target portion g1 is measured on the high-magnification image, the image is switched to the low-magnification image. FIG. 9 is an exemplary view of a low-magnification image in the process of moving the high-magnification target part g2 to the central part e after the measurement of the high-magnification target part g1. FIG. 9A shows a low-magnification image switched immediately after measurement of the high-magnification target portion g1, and FIG. 9B shows a low-magnification image in which the high-magnification target portion g2 enters the low-magnification field range a. As shown in FIG. 9A, in the low-magnification image switched from the high-magnification image after measurement of the high-magnification target portion g1, the high-magnification target portion g2 exists outside the low-magnification image.

  As described above, the position storage unit 341 stores the relative position information related to the relative positional relationship of the edge portions of the high-magnification target portions g1 and g2 on the low-magnification image 20 with respect to the measurement target object 20 in the storage device 34. Based on the stored positional relationship, the guidance display means 342 guides and moves the high-magnification target portion g2 as shown in FIG. 9A so that the high-magnification target portion g2 exists within the range of the central portion e. The arrow k of the guidance sign to be displayed is displayed. The arrow k of the guide sign is displayed in the same manner as the arrow i of the guide sign shown in FIG. In addition, the arrow k of the guide sign may change the color to be displayed according to the case where the high-magnification target part g2 exists outside and within the low-magnification visual field range a. The guidance sign does not exclude characters and the like.

  Therefore, the plurality of edge portions of the measurement target portion can be accurately arranged in one high-magnification image (center portion e) only by moving the measurement target object 20 according to the guidance sign. In particular, even when the high-magnification target edge part of the high-magnification target part g2 exists outside the low-magnification image, the high-magnification target edge part of the high-magnification target part g2 can be easily located without being searched. In addition, when there are a plurality of high-magnification target portions g1 and g2, a guidance sign is displayed so that the high-magnification target edge portion used for the high-magnification target portion g2 being measured can be confirmed. Can be prevented.

  The operation of the image measuring apparatus 1 having the above-described configuration will be described in detail based on a flowchart. FIG. 10 is a flowchart showing a processing procedure of the CPU 33 of the control unit 3 of the image measuring device 1 according to the first embodiment of the present invention.

  As illustrated in FIG. 10, the CPU 33 of the control unit 3 acquires a high-magnification image obtained by imaging the measurement object 20 with the high-magnification side imaging device 25, and images the same measurement object 20 with the low-magnification side imaging device 26. Then, a low-magnification image obtained by capturing the entire measurement object 20 is acquired (step S1001). The CPU 33 stores the low-magnification image data, which is the image data of the obtained low-magnification image, in the storage device 34 (step S1002). Thereafter, the CPU 33 always acquires a low-magnification image and a high-magnification image captured on the same axis, and can display the low-magnification image or the high-magnification image at any time.

  The CPU 33 displays the stored low-magnification image on the display device 27 (step S1003). The CPU 33 accepts designation of a plurality of edge portions used for measurement of the plurality of measurement target portions g1, g2,... On the measurement target 20 on the low-magnification image displayed as shown in FIG. 5 (step S1004). ). Note that the CPU 33 accepts designation of which edge part is used and the like as well as designation of the edge part.

  The CPU 33 determines, for each edge part of the measurement target part that has received the designation, whether or not the edge part can acquire a predetermined number of edge points in the low-magnification image (step S1005). When the CPU 33 determines that a predetermined number of edge points can be acquired (step S1005: YES), the CPU 33 can acquire a predetermined number of edge points in the displayed low-magnification image. For the measurement target portion determined to be, the measurement value of the measurement target portion is calculated based on the coordinate value of the edge point of the edge portion (step S1006), and the process ends.

  When the CPU 33 determines that a predetermined number of edge points cannot be acquired (step S1005: NO), the CPU 33 determines whether the edge portion can be displayed in one high-magnification image (step S1005). S1007). When the CPU 33 determines that the image cannot be displayed (step S1007: NO), the CPU 33 determines that the edge portion can acquire a predetermined number of edge points in the displayed low-magnification image. For the target portion, the measurement value of the measurement target portion is calculated based on the coordinate value of the edge point of the edge portion (step S1006), and the process ends.

  When the CPU 33 determines that the edge portion can be displayed in one high-magnification image (step S1007: YES), the CPU 33 determines that all edge portions determined to be displayed in the one high-magnification image ( The relative position information related to the relative positional relationship between the measurement object 20 on the low-magnification image of the high-magnification target edge portion) is stored in the storage device 34 (step S1008).

  The CPU 33 displays the captured low-magnification image on the display device 27 (step S1009), and stores the high-magnification target edge portion g stored in the relative position information of the high-magnification target portion g stored for the high-magnification target portion g. Based on, for example, as shown in FIG. 6, an arrow i of a guidance sign for guiding and moving the measurement target 20 is displayed so that the high-magnification target part g1 is included in one high-magnification image (center part e). (Step S1010). In accordance with the guidance sign, the operator moves the measurement object 20 by moving the stage 21 or the like.

  The CPU 33 moves the high-magnification target edge portion to approximately the center of the low-magnification image, and determines whether the high-magnification target edge portion is included in one high-magnification image (center portion e) (step S1011). When the CPU 33 determines that the high-magnification target edge portion used for measurement of the high-magnification target portion g1 is not included in one high-magnification image (center portion e) (step S1011: NO), the CPU 33 determines that it is included. The process of step S1011 is repeated. Specifically, for example, the determination is made every time the coordinate value of the image indicating the measurement object 20 displayed by moving the measurement object 20 changes.

  When the CPU 33 determines that the high-magnification target edge part used for the measurement of the high-magnification target part g1 exists in the central part e as shown in FIG. 8 (step S1011: YES), the CPU 33 switches the low-magnification image to the high-magnification image. Then, the high-magnification target portion g1 is displayed on the display device 27 (step S1012). The CPU 33 calculates the measurement value of the high magnification target portion g1 based on the coordinate value of the edge point of the high magnification target edge portion used for the measurement of the high magnification target portion g1 on the high magnification image (step S1013). CPU33 judges whether the measured value of all the high magnification object parts g was calculated (step S1014).

  When the CPU 33 determines that the measurement values of all the high magnification target portions have not been calculated (step S1014: NO), the CPU 33 returns the process to step S1010 and repeats the above-described process. When the CPU 33 determines that the measurement values of all the high magnification target portions have been calculated (step S1014: YES), the CPU 33 ends the process.

  As described above, according to the first embodiment, the measurement target portion on the low-magnification image and the measurement target portion on the high-magnification image without considering the relationship between the low-magnification image, the high-magnification image, and the position of the stage 21. Can be easily grasped. In addition, it is not necessary to perform alignment each time switching between the low-magnification image and the high-magnification image, and the operator determines whether or not the edge portion can be appropriately measured on the high-magnification image only by specifying the edge portion. There is no need. Therefore, the edge part to be measured in the high-magnification image can be reliably displayed and measured in one high-magnification image, and the measurement object can be measured accurately and simply according to the size of the measurement object part. be able to.

(Embodiment 2)
Since the configuration of the image measuring apparatus 1 according to the second embodiment of the present invention is the same as that of the first embodiment, detailed description thereof is omitted by attaching the same reference numerals. FIG. 11 is a block diagram showing the configuration of the control unit 3 of the image measuring device 1 according to the second embodiment of the present invention. As shown in FIG. 11, the hardware configuration of the control unit 3 of the image measurement apparatus 1 according to the second embodiment is the same as that of the first embodiment. Is omitted.

  However, in the second embodiment, the CPU 33 of the control unit 3 does not function as the edge point determination unit 336 and the image determination unit 337 as in the first embodiment, but functions as the edge portion reception unit 333. The edge part receiving unit 333 receives designation of a plurality of edge parts and displays the received edge parts on the high-magnification image. Further, unlike the first embodiment, the measurement value calculation means 335 calculates the distance measured using a plurality of edge portions that cannot be displayed in one high-magnification image as a plurality of edge portions ( It is calculated from the coordinate value of the edge point for each high magnification target edge portion) and the stored relative position information.

  FIG. 12 is an exemplary diagram of a process of measuring the distance m measured using a plurality of edge portions (high-magnification target edge portions n1, n2) that cannot be displayed in one high-magnification image. 12A shows a low-magnification image that accepts designation of two high-magnification target edge portions n1 and n2, FIG. 12B shows a high-magnification image that measures one high-magnification target edge portion n1, and FIG. FIG. 12D shows a high-magnification image obtained by measuring the other high-magnification target edge portion n2, and FIG. 12E shows two high-magnification target edge portions. Low-magnification images for measuring the distance m of the measurement target portion between n1 and n2 are shown.

  As shown in FIG. 12 (a), the distance m of the measurement target portion is a distance measured using the edge portions n1 and n2 of two small circles, so that the center positions of the edge portions n2 and n1 are not determined. Without it, it cannot be measured. The edge portions n1 and n2 of the small circle are edge portions (high-magnification target edge portions n1 and n2) from which a predetermined number of edge points cannot be obtained in the low-magnification image, and cannot be accurately measured in the low-magnification image. . Further, as shown in FIGS. 12B and 12E, since the high-magnification target edge portions n1 and n2 cannot be displayed in one high-magnification image, naturally, the entire distance m of the measurement target portion is also one high-magnification image. The distance m of the measurement target portion cannot be measured on the high-magnification image.

  Therefore, as shown in FIGS. 12A to 12E, the distance m of the measurement target portion is switched between the low-magnification image and the high-magnification image, and the high-magnification target edge portions n1 and n2 are separated into high-magnification images one by one. After obtaining the coordinate value of the edge point, from the coordinate value of the edge point of each edge portion and the relative position information on the low magnification image of the high magnification target edge portions n1 and n2 stored in the storage device 34, The distance m of the measurement target part is calculated. The relative position information on the low-magnification image of the high-magnification target edge portions n1 and n2 is, for example, information on the relative positional relationship with the measurement object 20 on the low-magnification image near the high-magnification target edge portion n2. Information on the relative positional relationship in the vicinity of both ends of the distance m of the measurement target portion is stored.

  The operation of the image measuring apparatus 1 having the above-described configuration will be described in detail based on a flowchart. FIG. 13 is a flowchart showing a processing procedure of the CPU 33 of the control unit 3 of the image measuring device 1 according to the second embodiment of the present invention.

  As shown in FIG. 13, the CPU 33 of the control unit 3 acquires a high-magnification image obtained by imaging the measurement object 20 with the high-magnification side imaging device 25, and images the same measurement object 20 with the low-magnification side imaging device 26 on the same axis. Then, a low-magnification image obtained by capturing the entire measurement object 20 is acquired (step S1201). The CPU 33 stores low-magnification image data, which is image data of the obtained low-magnification image, in the storage device 34 (step S1202). Thereafter, the CPU 33 always acquires a low-magnification image and a high-magnification image captured on the same axis, and can display the low-magnification image or the high-magnification image at any time.

  The CPU 33 displays the stored low-magnification image on the display device 27 (step S1203). The CPU 33 accepts designation of two high-magnification target edge portions n1 and n2 on the low-magnification image displayed as shown in FIG. 12 (step S1204). The CPU 33 accepts designation of how to use the high magnification target edge portions n1 and n2 to measure the distance m as well as designation of the high magnification target edge portions n1 and n2.

  The CPU 33 stores, in the storage device 34, relative position information regarding the relative positional relationship between the two high-magnification target edge portions n1 and n2 that have received the designation and the measurement target 20 on the low-magnification image (step S1205). .

  The CPU 33 displays the low-magnification image captured and acquired on the display device 27 (step S1206), and based on the relative position information of the high-magnification target edge portion n1 stored for the high-magnification target edge portion n1, for example, FIG. As shown to (a), the arrow i of the guidance mark which guides and moves the measurement target object 20 is displayed so that the high-magnification object edge part n1 may be included in one high-magnification image (center part e) (step) S1207). In accordance with the guidance sign, the operator moves the measurement object 20 by moving the stage 21 or the like.

  The CPU 33 moves the high-magnification target edge portion n1 to the approximate center of the low-magnification image, and determines whether or not the high-magnification target edge portion n1 is included in one high-magnification image (center portion e) (step S1208). When the CPU 33 determines that the high-magnification target edge portion n1 is not included in one high-magnification image (center portion e) (step S1208: NO), the process of step S1208 is repeated until it is determined that it is included. Specifically, for example, the determination is made every time the coordinate value of the image indicating the measurement object 20 displayed by moving the measurement object 20 changes.

  When the CPU 33 determines that the high-magnification target portion n1 is present in the central portion e (step S1208: YES), the CPU 33 switches the low-magnification image to the high-magnification image and displays the high-magnification target portion n1 on the display device 27 (step S1208). S1209). CPU33 acquires the coordinate value of the edge point of the high magnification object edge part n1 on a high magnification image (step S1210). CPU33 judges whether the coordinate value of the edge point of all the high magnification object edge parts n1 and n2 was acquired (step S1211).

  When the CPU 33 determines that the coordinate values of the edge points of all the high-magnification target edge portions have not been acquired (step S1211: NO), the CPU 33 returns the processing to step S1207 and repeats the above-described processing. When the CPU 33 determines that the coordinate values of all the high magnification target edge portions have been acquired (step S1211: YES), the CPU 33 stores the coordinate values of the edge points of the two high magnification target edge portions n1 and n2. From the relative position information, the distance m of the measurement target portion between the two high-magnification target edge portions n1 and n2 is calculated (step S1212).

  As described above, according to the second embodiment, the coordinate value of the edge point for each of the plurality of edge portions acquired in the separate high-magnification image, the edge portion on the low-magnification image stored, the measurement object, and the like. It is possible to accurately measure the distance measured using a plurality of edge portions that cannot be displayed in one high-magnification image simply and quickly from the relative position information regarding the relative positional relationship. In particular, even a distance measured using a plurality of small edge portions that are difficult to measure with a low-magnification image can be measured with high accuracy.

  In the second embodiment, the edge portion designated and received by the operator is displayed and measured as a high-magnification image. However, as in the first embodiment, an edge point determination unit and an image determination unit are provided. It may be determined whether the received edge portion is an edge portion that can be appropriately measured in the high-magnification image.

  In Embodiments 1 and 2, the low-magnification image and the high-magnification image are switched and displayed on one screen. However, the low-magnification image and the high-magnification image are separately displayed on two screens provided in parallel. May be displayed. Since both images can be actually compared, it becomes easier to grasp the positional relationship between the two images, and it becomes easier when the measurement object is placed on the stage.

  FIG. 14 is a schematic diagram illustrating a configuration of another image measurement apparatus 1. As shown in FIG. 14, the image measurement apparatus 1 includes a measurement unit 2 and an external computer 4, and the image data captured by the measurement unit 2 is arithmetically processed by the external computer 4 to obtain a desired value. Measure the dimensions of the shape.

  Since the configuration and function of the measurement unit 2 are the same as those in the first and second embodiments described above, detailed description is omitted by attaching the same reference numerals. The external computer 4 includes at least a CPU (not shown) and a storage device (not shown) such as a memory, and is connected to a display device 41, a keyboard 42, and a mouse 43. The CPU (not shown) acquires image data from the high-magnification side imaging device 25 and the low-magnification side imaging device 26, and executes the same processing as the CPU 33 of the control unit 3 in the first and second embodiments described above.

  In addition, the present invention is not limited to Embodiments 1 and 2 described above, and it goes without saying that various modifications and replacements are possible within the scope of the present invention.

It is a schematic diagram which shows the structure of the image measuring device which concerns on Embodiment 1 of this invention. It is a block diagram which shows the structure of the control unit of the image measuring device which concerns on Embodiment 1 of this invention. It is an illustration figure explaining the positional relationship of the high magnification visual field of a high magnification image, and the low magnification visual field of a low magnification image. It is an illustration figure of the image which switches and displays a low magnification image and a high magnification image. It is an illustration figure of the low magnification image which notifies the measurement object part measured using the edge part which the image judgment means judged to be a high magnification object edge part. It is an illustration figure of the guidance label | marker which moves a high magnification object part to the visual field range of a high magnification image. It is an illustration figure of the tracking object image at the time of tracking the movement of a high magnification object part. It is an illustration figure of the high magnification image which the switching means switched from the low magnification image. It is an illustration figure of the low magnification image of the process of moving a high magnification object part to the visual field range of a high magnification image after measurement of a high magnification object part. It is a flowchart which shows the process sequence of CPU of the control unit of the image measuring device which concerns on Embodiment 1 of this invention. It is a block diagram which shows the structure of the control unit of the image measuring device which concerns on Embodiment 2 of this invention. It is an illustration figure of the process of measuring the distance measured using the some edge part which cannot be displayed within one high magnification image. It is a flowchart which shows the process sequence of CPU of the control unit of the image measuring device which concerns on Embodiment 2 of this invention. It is a schematic diagram which shows the structure of another image measuring device. It is an illustration figure of the edge detection area designated on the conventional image. It is an illustration figure of the shape specified by the least squares method based on the conventional edge point. It is explanatory drawing for demonstrating the circle | round | yen obtained by fitting the conventional edge point to a geometric figure.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Image measuring device 2 Measuring part 3 Control unit 20 Measurement object 21 Stage 25 High magnification side imaging device 26 Low magnification side imaging device 27 Display device 31 Keyboard 32 Mouse 33 CPU
34 storage device 35 communication unit 36 internal bus 331 storage unit 332 display unit 333 edge portion reception unit 334 determination unit 335 measurement value calculation unit 336 edge point determination unit 337 image determination unit 338 switching unit 341 position storage unit 342 guidance display unit

Claims (10)

In an image measurement device that measures a measurement object based on an image obtained by imaging the measurement object,
The light irradiated to the measurement object is received by a light receiving lens, and light in one direction out of the light branched in two directions from the light receiving lens is imaged on the image sensor through a low magnification side imaging lens with a low magnification. Low magnification side imaging means;
High-magnification side imaging means for imaging light in the other direction of the light branched in the two directions through the high-magnification high-magnification imaging lens on the imaging element;
A low-magnification image captured by the low-magnification side imaging means or a high-magnification image that is coaxial with the low-magnification image and imaged by the high-magnification side imaging means is displayed so that the center of the field of view of both images is located at the approximate center on the screen Display means to
Edge part receiving means for receiving designation of a plurality of edge parts on the low-magnification image or the high-magnification image;
Whether an image showing a plurality of edge portions is included in one high-magnification image when an image showing a plurality of edge portions whose designation has been received by the edge portion accepting unit is moved to the approximate center of the low-magnification image A determination means for determining whether or not,
When it is determined by the determining means that an image showing a plurality of edge portions is included in the one high-magnification image, based on the coordinate values of the edge points of the edge portion acquired on the one high-magnification image, An image measurement apparatus comprising: a measurement value calculation unit that calculates a measurement value of a measurement object. Edge point determination means for determining whether or not a predetermined number of edge points can be obtained on the low-magnification image for each of a plurality of edge portions for which designation has been received;
When it is determined by the edge point determination means that a predetermined number of edge points cannot be acquired on the low-magnification image, it is determined whether or not a plurality of the edge portions can be displayed in one high-magnification image. Image judging means, and
The determination means includes
When an image showing a plurality of edge portions determined to be displayed in one high-magnification image by the image judging means is moved to the approximate center of the low-magnification image, an image showing the plurality of edge portions is obtained. And whether it is included in one high-magnification image,
The measurement value calculation means includes
When it is determined by the edge point determination means that a predetermined number of edge points can be acquired on the low-magnification image, or when it is determined by the image determination means that it cannot be displayed in one high-magnification image 2. The image measurement according to claim 1, wherein a measurement value of the measurement object is calculated based on coordinate values of edge points of the plurality of edge portions acquired on the low-magnification image. apparatus.   The switching means for switching the low-magnification image to the high-magnification image when the judgment unit judges that an image showing a plurality of edge portions is included in the one high-magnification image. 2. The image measuring device according to 2. Position storage means for storing relative position information relating to a relative positional relationship between the edge portion on the low-magnification image and the measurement object for each image indicating a plurality of the edge portions;
Based on the stored relative position information, a guide sign that guides and moves the image showing the measurement object so that the image showing the plurality of edge portions is included in the one high-magnification image, The image measurement apparatus according to claim 1, further comprising: a guidance display unit that displays on the low-magnification image.   The measurement value calculating means is a coordinate value of edge points for each of the plurality of edge portions acquired on the high-magnification image, with distances measured using a plurality of edge portions that cannot be displayed in one high-magnification image. The image measurement apparatus according to claim 4, wherein the calculation is performed based on the stored relative position information. The light irradiated to the measurement object is received by the light receiving lens, and light in one direction out of the light branched in two directions from the light receiving lens is imaged on the image sensor through the low magnification side imaging lens. A double-side imaging unit, and a high-magnification side imaging unit that forms an image on the imaging element through the high-magnification-side imaging lens with a high magnification in the other direction among the light branched in the two directions,
In a computer program that can be executed by an image measurement device that measures a measurement object based on an image obtained by imaging the measurement object by the low magnification side imaging unit and the high magnification side imaging unit,
The image measuring device;
A low-magnification image captured by the low-magnification side imaging means or a high-magnification image that is coaxial with the low-magnification image and imaged by the high-magnification side imaging means is displayed so that the center of the field of view of both images is located at the approximate center on the screen Display means,
Edge portion receiving means for receiving designation of a plurality of edge portions on the low-magnification image or the high-magnification image,
When an image showing a plurality of edge portions whose designation is received by the edge portion receiving means is moved to the approximate center of the low-magnification image, a plurality of images showing the edge portions are included in one high-magnification image. Determining means for determining whether or not an image showing a plurality of the edge portions is included in the one high-magnification image by the judging means, the edge portion acquired on the one high-magnification image A computer program that functions as measurement value calculation means for calculating a measurement value of the measurement object based on a coordinate value of an edge point. The image measuring device;
Edge point determination means for determining whether or not a predetermined number of edge points can be acquired on the low-magnification image for each of a plurality of edge portions for which designation has been received, and the edge point determination means on the low-magnification image When it is determined that a predetermined number of edge points cannot be acquired, the plurality of edge portions function as image determination means for determining whether or not they can be displayed in one high-magnification image,
The determination means is
When an image showing a plurality of edge portions determined to be displayed in one high-magnification image by the image judging means is moved to the approximate center of the low-magnification image, an image showing the plurality of edge portions is obtained. Function as a means to determine whether it is included in one high-magnification image,
The measurement value calculation means,
When it is determined by the edge point determination means that a predetermined number of edge points can be acquired on the low-magnification image, or when it is determined by the image determination means that it cannot be displayed in one high-magnification image The computer program according to claim 6, wherein the computer program functions as means for calculating a measurement value of the measurement object based on coordinate values of edge points of the plurality of edge portions acquired on the low-magnification image. . The image measuring device;
The function as switching means for switching the low-magnification image to the high-magnification image when the judgment unit judges that an image showing a plurality of edge portions is included in the one high-magnification image. Or the computer program of 7. The image measuring device;
Position storage means for storing relative position information relating to a relative positional relationship between the edge portion and the measurement object on a low-magnification image for each image showing a plurality of the edge portions, and the stored relative position information Based on the above, a guide sign for guiding and moving the image showing the measurement object is displayed on the low-magnification image so that an image showing the plurality of edge portions is included in the one high-magnification image The computer program according to any one of claims 6 to 8, wherein the computer program is caused to function as guidance display means. The measurement value calculation means,
The distance measured using a plurality of edge portions that cannot be displayed in one high-magnification image is stored with the coordinate values of the edge points for each of the plurality of edge portions acquired on the high-magnification image. The computer program according to claim 9, wherein the computer program functions as means for calculating based on relative position information.

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