JP7344791B2 - laser processing equipment - Google Patents

Description

The technology disclosed herein relates to a laser processing device, such as a laser marking device, that performs processing by irradiating a workpiece with laser light.

2. Description of the Related Art Conventionally, laser processing apparatuses equipped with an imaging unit such as a camera are known.

For example, Patent Document 1 describes a laser processing device (laser processing device) equipped with a laser light source that emits a laser beam, a scanning device that scans the laser beam two-dimensionally, and an imaging device that captures an image of an object to be marked. marking device) is disclosed.

The imaging means according to Patent Document 1 is configured such that its imaging optical axis is coaxial with a laser beam for processing. Specifically, the laser processing apparatus disclosed in Patent Document 1 includes an optical path branching means for branching an optical path between the laser light source and the scanning means, and the imaging means according to the document includes an optical path branching means. The optical axis directed toward the scanning means via the laser beam is provided so as to coincide with the optical axis of the laser beam.

Further, Patent Document 2 discloses a laser processing device that includes a laser head that emits a laser beam for processing a workpiece, and an observation optical system that images a processed surface of the workpiece. ing.

The laser head according to Patent Document 2 houses a scanning means for scanning a laser beam on a processed surface, and the observation optical system according to the same document accommodates a scanning means for scanning a laser beam on a processed surface, and an observation optical system according to the same document includes a scanning means for scanning a laser beam on a processed surface. It is set in. Specifically, the observation optical system disclosed in Patent Document 2 is disposed outside the laser head, and is attached from below to the bottom surface of the laser head. This observation optical system is non-coaxial with respect to the optical axis of the laser beam, and is configured to image the processed surface from diagonally above.

Japanese Patent Application Publication No. 2004-148379 Japanese Patent Application Publication No. 2015-44212

By the way, when trying to check the processing result by the laser processing device, it is a good idea to image the workpiece using the imaging unit disclosed in Patent Document 1 or 2 and check the image obtained by the imaging. It will be done.

Specifically, when the configuration according to Patent Document 1 is used, an imaging means coaxial with the laser beam for processing (hereinafter tentatively referred to as a "coaxial camera") is used, and the above-mentioned When the configuration according to Patent Document 2 is used, an imaging means (hereinafter tentatively referred to as a "non-coaxial camera") that is non-coaxial with the laser beam for processing is used.

However, in a laser processing apparatus equipped with both a coaxial camera and a non-coaxial camera, it is not easy for the user to judge which camera should be used. This is inconvenient from the viewpoint of usability of the laser processing apparatus.

The technology disclosed herein has been developed in view of these points, and its purpose is to improve usability when checking processing results in a laser processing device equipped with multiple types of cameras. .

Specifically, a first aspect of the present disclosure includes an excitation light generation unit that generates excitation light, and a laser beam that is generated based on the excitation light generated by the excitation light generation unit and that emits the laser beam. a laser beam output section that irradiates a workpiece with the laser beam emitted from the laser beam output section, and a laser beam scanning section that performs two-dimensional scanning within a processing area set on the surface of the workpiece. The present invention relates to a laser processing device comprising:

According to the first aspect of the present disclosure, the laser processing device has an imaging optical axis branched from a laser optical path from the laser beam output section to the laser beam scanning section, and has an imaging optical axis that branches from the laser beam path from the laser beam output section to the laser beam scanning section. a first imaging unit that generates a first image including at least a part of the processing area by imaging the workpiece using a first imaging unit; a second imaging unit that generates a second image having a wider field of view than the first imaging unit and including the entire processing area by imaging the workpiece without the intervention of an optical scanning unit; a machining setting unit that sets a machining pattern indicating the machining content to be formed in the machining area on the surface of the workpiece; and an imaging area including the machining pattern based on the setting content by the machining setting unit. and an imaging setting unit that defines the area on the surface of the workpiece and sets the imaging content including the position and size of the imaging area.

The laser processing apparatus includes an imaging selection unit that selects either the first imaging unit or the second imaging unit based on the size of the imaging area set by the imaging setting unit; a control unit that controls at least the laser beam scanning unit and the first and second imaging units; When the first imaging section is selected by While the imaging area is imaged, if the second imaging section is selected by the imaging selection section, the imaging area is imaged via the second imaging section.

Here, the first imaging section includes an imaging means that is coaxial with a laser beam for processing. This first imaging section has a narrower field of view than the second imaging section, but it can generate a first image that magnifies the processing area at a relatively high magnification, and can scan the imaging area in two dimensions through a laser beam scanning section. You can scan or. The first imaging unit is used, for example, to locally enlarge and image a part of the processing area.

On the other hand, the second imaging section includes an imaging means that is non-coaxial with the laser beam for processing. Although this second imaging section cannot perform two-dimensional scanning via the laser beam scanning section, it has a wider field of view than the first imaging section, and can generate a second image that captures the processing area with a relatively wide field of view. I can do it. The second imaging unit is used, for example, to image the entire processing area at once.

According to the above configuration, the imaging setting section defines the imaging area on the surface of the workpiece and sets the imaging content including the position and size of the imaging area. Next, the imaging selection section selects one of the first and second imaging sections based on the size of the imaging area set by the imaging setting section.

Then, the control unit images the imaging area via one of the first and second imaging units selected by the imaging selection unit. By imaging the imaging area, it is possible to generate the first or second image including the processing pattern. The user can confirm the processing result by the laser processing device by visually observing the first or second image thus generated.

In this way, by selecting an imaging unit based on the size of the imaging area, it is possible to automatically select an imaging unit suitable for the size. This saves the user's time and effort, and further improves usability when checking the processing results.

Further, according to the second aspect of the present disclosure, the laser processing device may be configured to perform the laser processing on the workpiece based on the first or second image generated by imaging the imaging area. It is also possible to include a reading section that reads the processing pattern.

According to this configuration, the reading section can read the processing pattern included in the first or second image. This configuration is effective in that it can improve the usability of the laser processing apparatus.

Further, according to the third aspect of the present disclosure, the imaging setting section defines the imaging area wider than the processing pattern by adding a predetermined margin around the processing pattern, and selects the imaging area. The section may select one of the first and second imaging sections, which has a larger field of view than at least the imaging area.

According to this configuration, the imaging selection section selects the imaging section by comparing the field of view size of each imaging section and the size of the imaging area. This makes it possible to more appropriately select an imaging unit.

According to the fourth aspect of the present disclosure, the imaging selection unit selects the first imaging unit when the field of view sizes of the first and second imaging units are both wider than the imaging area. It may be said to do.

According to this configuration, when both the first and second imaging units are selectable, the imaging selection unit preferentially selects the first imaging unit. Generally, the first imaging section has a narrower field of view than the second imaging section, and therefore has better resolution. Therefore, by preferentially selecting the first imaging unit, it is possible to use a more detailed first image, and as a result, it is possible to check the processing result more appropriately.

According to the fifth aspect of the present disclosure, the processing setting section sets a QR code (registered trademark) as the processing pattern, and the imaging setting section sets the outer periphery of the processing pattern as the imaging area. An area may be set in which a quiet zone to be enclosed and a margin to further surround the outer periphery of the quiet zone are added to the processing pattern.

According to this configuration, the imaging setting section defines an area in which a quiet zone and a margin are added to the processed pattern as a QR code. Set as the imaging area. By setting in this way, it is possible to reliably fit the machining pattern within the imaging area, and in turn, it becomes possible to check the machining result more appropriately.

Further, according to the sixth aspect of the present disclosure, at least one of the first and second imaging sections has a plurality of imaging modes each having a different field of view size, and the imaging selection section is configured to select one of the imaging areas. One of the plurality of imaging modes may be selected based on the size.

This configuration is advantageous for checking the machining results.

As explained above, according to the laser processing apparatus, usability when checking processing results can be improved.

FIG. 1 is a diagram illustrating the overall configuration of a laser processing system. FIG. 2 is a block diagram illustrating a schematic configuration of a laser processing device. FIG. 3A is a block diagram illustrating a schematic configuration of a marker head. FIG. 3B is a block diagram illustrating a schematic configuration of the marker head. FIG. 4 is a perspective view illustrating the appearance of the marker head. FIG. 5 is a diagram illustrating the configuration of the laser beam scanning section. FIG. 6 is a diagram illustrating the triangulation method. FIG. 7 is a flowchart showing how to use the laser processing system. FIG. 8 is a flowchart illustrating a procedure for creating print settings, search settings, and distance measurement settings. FIG. 9 is a diagram illustrating the relationship between the processing area and the setting surface. FIG. 10 is a diagram illustrating display contents on the display unit. FIG. 11 is a flowchart illustrating the operating procedure of the laser processing apparatus. FIG. 12 is a diagram illustrating a reading area as an imaging area. FIG. 13A is a diagram illustrating the display mode of the QR code. FIG. 13B is a diagram explaining the display mode of the QR code. FIG. 13C is a diagram illustrating the display mode of the QR code. FIG. 14 is a diagram illustrating the basic concept of imaging selection processing. FIG. 15 is a flowchart illustrating specific processing of the imaging selection processing. FIG. 16 is a diagram illustrating wide-angle mode and standard mode. FIG. 17 is a diagram illustrating an imaging selection process that incorporates a wide-angle mode and a standard mode. FIG. 18 is a diagram showing another example of the imaging area. FIG. 19 is a diagram illustrating the layout of print blocks. FIG. 20 is a diagram illustrating an imaging area including a plurality of print blocks. FIG. 21 is a flowchart showing another example of the operating procedure of the laser processing apparatus.

Embodiments of the present disclosure will be described below based on the drawings. Note that the following explanation is an example.

That is, although this specification describes a laser marker as an example of a laser processing device, the technology disclosed herein can be applied to laser application equipment in general, regardless of the name of the laser processing device or laser marker.

Further, in this specification, printing processing will be described as a representative example of processing, but the present invention is not limited to printing processing, and can be used in any processing using laser light, such as image marking.

<Overall configuration>
FIG. 1 is a diagram illustrating the overall configuration of a laser processing system S, and FIG. 2 is a diagram illustrating a schematic configuration of a laser processing apparatus L in the laser processing system S. The laser processing system S illustrated in FIG. 1 includes a laser processing device L, an operation terminal 800 and an external device 900 connected to the laser processing device L.

The laser processing apparatus L illustrated in FIGS. 1 and 2 irradiates a workpiece W as a workpiece with laser light emitted from the marker head 1, and performs three-dimensional scanning on the surface of the workpiece W. Processing is done by doing this. Note that "three-dimensional scanning" here refers to a two-dimensional operation of scanning the irradiation position of the laser beam on the surface of the work W (so-called "two-dimensional scanning") and adjusting the focal position of the laser beam. It refers to a concept that collectively refers to the combination of one-dimensional movement and.

In particular, the laser processing apparatus L according to this embodiment can emit a laser beam having a wavelength of around 1064 nm as a laser beam for processing the workpiece W. This wavelength corresponds to the near-infrared (NIR) wavelength range. Therefore, in the following description, the laser beam for processing the workpiece W may be referred to as "near-infrared laser beam" to distinguish it from other laser beams. Of course, laser beams having other wavelengths may be used to process the workpiece W.

Further, the laser processing apparatus L according to the present embodiment measures the distance to the workpiece W (height of the workpiece W) via the distance measuring unit 5 built into the marker head 1, and utilizes the measurement result. The focal position of the near-infrared laser beam can be adjusted by

As shown in FIGS. 1 and 2, the laser processing apparatus L includes a marker head 1 for emitting laser light and a marker controller 100 for controlling the marker head 1.

The marker head 1 and the marker controller 100 are separate bodies in this embodiment, and are electrically connected via electrical wiring and optically coupled via an optical fiber cable.

More generally, one of the marker head 1 and the marker controller 100 can be integrated into the other. In this case, optical fiber cables and the like can be omitted as appropriate.

The operation terminal 800 includes, for example, a central processing unit (CPU) and a memory, and is connected to the marker controller 100. This operating terminal 800 functions as a terminal for setting various processing conditions (also referred to as printing conditions) such as printing settings, and for showing information related to laser processing to the user. This operation terminal 800 includes a display section 801 for displaying information to the user, an operation section 802 for receiving operation input from the user, and a storage device 803 for storing various information.

Specifically, the display section 801 is configured by, for example, a liquid crystal display or an organic EL panel. The display unit 801 displays the operating status and processing conditions of the laser processing apparatus L as information related to laser processing. On the other hand, the operation unit 802 includes, for example, a keyboard and/or a pointing device. Here, the pointing device includes a mouse, a joystick, and the like. The operation unit 802 is configured to accept operation input from a user, and is used to operate the marker head 1 via the marker controller 100.

The operation terminal 800 configured as described above can set processing conditions for laser processing based on the operation input by the user. These processing conditions include, for example, the character string to be printed on the workpiece W, the content of graphics such as barcodes and QR codes (registered trademark) (marking patterns), and the output required for the laser beam (target output). , the scanning speed of the laser beam on the workpiece W (scanning speed), and one or more of the following.

Further, the processing conditions according to the present embodiment also include conditions and parameters related to the above-mentioned distance measuring unit 5 (hereinafter also referred to as "distance measuring conditions"). Such distance measurement conditions include, for example, data that associates the signal indicating the detection result by the distance measurement unit 5 with the distance to the surface of the workpiece W.

The processing conditions set by the operation terminal 800 are output to the marker controller 100 and stored in its condition setting storage unit 102. If necessary, the storage device 803 in the operation terminal 800 may store the processing conditions.

Note that the operation terminal 800 can be integrated into, for example, the marker controller 100. In this case, the term "control unit" or the like is used instead of "operation terminal," but at least in this embodiment, the operation terminal 800 and the marker controller 100 are separate from each other.

The external device 900 is connected to the marker controller 100 of the laser processing apparatus L as necessary. In the example shown in FIG. 1, an image recognition device 901 and a programmable logic controller (PLC) 902 are provided as the external device 900.

Specifically, the image recognition device 901 determines, for example, the type and position of the work W being transported on the manufacturing line. As the image recognition device 901, for example, an image sensor can be used. PLC902 is used to control the laser processing system S according to a predetermined sequence.

In addition to the devices and apparatuses described above, the laser processing apparatus L can also be connected to devices for operation and control, computers for performing various other processes, storage devices, peripheral devices, and the like. The connection in this case may be, for example, a serial connection such as IEEE1394, RS-232, RS-422, and USB, or a parallel connection. Alternatively, electrical, magnetic, or optical connections can be employed via networks such as 10BASE-T, 100BASE-TX, 1000BASE-T, etc. In addition to the wired connection, a wireless LAN such as IEEE802, or a wireless connection using radio waves such as Bluetooth (registered trademark), infrared rays, optical communication, etc. may be used. Further, as the storage medium used in the storage device for exchanging data and storing various settings, for example, various memory cards, magnetic disks, magneto-optical disks, semiconductor memories, hard disks, etc. can be used.

Hereinafter, the hardware configuration of each of the marker controller 100 and the marker head 1, and the configuration related to the control of the marker head 1 by the marker controller 100 will be described in order.

<Marker controller 100>
As shown in FIG. 2, the marker controller 100 includes a condition setting storage section 102 that stores the processing conditions described above, a control section 101 that controls the marker head 1 based on the processing conditions stored therein, and a laser excitation control section 102 that controls the marker head 1 based on the processing conditions stored therein. It includes an excitation light generation section 110 that generates light (excitation light).

(Condition setting storage unit 102)
The condition setting storage unit 102 is configured to store machining conditions set via the operation terminal 800 and output the stored machining conditions to the control unit 101 as necessary.

Specifically, the condition setting storage unit 102 is configured using a volatile memory, a non-volatile memory, a hard disk drive (HDD), a solid state drive (SSD), etc., and stores processing conditions. Information indicating the information can be stored temporarily or continuously. Note that when the operating terminal 800 is incorporated into the marker controller 100, the storage device 803 can be configured to also serve as the condition setting storage section 102.

(Control unit 101)
The control unit 101 controls at least the excitation light generation unit 110 in the marker controller 100, the laser light output unit 2, the laser light guide unit 3, and the laser light guide unit 3 in the marker head 1, based on the processing conditions stored in the condition setting storage unit 102. By controlling the laser beam scanning unit 4, the distance measuring unit 5, the coaxial camera 6, and the overall camera (non-coaxial camera) 7, printing processing and the like on the workpiece W are executed.

Specifically, the control unit 101 has a CPU, a memory, and an input/output bus, and receives signals indicating information input via the operating terminal 800 and processing conditions read from the condition setting storage unit 102. A control signal is generated based on the signal shown. The control unit 101 controls printing processing on the workpiece W and measurement of the distance to the workpiece W by outputting the control signal thus generated to each part of the laser processing apparatus L.

For example, when starting processing the workpiece W, the control unit 101 reads the target output stored in the condition setting storage unit 102 and outputs a control signal generated based on the target output to the excitation light source drive unit 112. , controlling the generation of laser excitation light.

Furthermore, when actually machining the workpiece W, the control unit 101 reads a machining pattern (marking pattern) stored in the condition setting storage unit 102, for example, and transmits a control signal generated based on the machining pattern to the laser beam. The near-infrared laser beam is outputted to the optical scanning section 4 and scanned two-dimensionally.

In this way, the control unit 101 can control the laser beam scanning unit 4 to realize two-dimensional scanning with near-infrared laser beams. The control unit 101 is an example of a "scanning control unit" in this embodiment.

(Excitation light generation unit 110)
The excitation light generation unit 110 is optically coupled to the excitation light source 111 with an excitation light source 111 that generates laser light according to a drive current, and an excitation light source drive unit 112 that supplies a drive current to the excitation light source 111. and an excitation light condensing section 113. The excitation light source 111 and the excitation light condenser 113 are fixed within an excitation casing (not shown). Although details are omitted, this excitation casing is made of a metal such as copper that has excellent thermal conductivity, and can efficiently radiate heat from the excitation light source 111.

Each part of the excitation light generation section 110 will be explained in order below.

The excitation light source drive unit 112 supplies a drive current to the excitation light source 111 based on the control signal output from the control unit 101. Although details will be omitted, the excitation light source drive unit 112 determines a drive current based on the target output determined by the control unit 101, and supplies the determined drive current to the excitation light source 111.

The excitation light source 111 is supplied with a drive current from the excitation light source drive unit 112 and oscillates laser light according to the drive current. For example, the excitation light source 111 is composed of a laser diode (LD) or the like, and an LD array or LD bar in which a plurality of LD elements are arranged in a straight line can be used. When an LD array or an LD bar is used as the excitation light source 111, laser light emitted from each element is output in a line shape and enters the excitation light condenser 113.

The excitation light condenser 113 condenses the laser beam output from the excitation light source 111 and outputs it as laser excitation light (excitation light). For example, the excitation light condenser 113 is composed of a focusing lens or the like, and has an entrance surface into which the laser beam is incident, and an exit surface through which the laser excitation light is output. The excitation light condenser 113 is optically coupled to the marker head 1 via the aforementioned optical fiber cable. Therefore, the laser excitation light output from the excitation light condenser 113 is guided to the marker head 1 via the optical fiber cable.

Note that the excitation light generation section 110 can be an LD unit or an LD module in which the excitation light source driving section 112, the excitation light source 111, and the excitation light condensing section 113 are incorporated in advance. Furthermore, the excitation light emitted from the excitation light generation section 110 (specifically, the laser excitation light output from the excitation light condensing section 113) can be made non-polarized, thereby preventing changes in the polarization state. There is no need to take this into account, which is advantageous in terms of design. In particular, regarding the configuration around the excitation light source 111, the LD unit itself, which bundles and outputs light obtained from an LD array in which several dozen LD elements are arranged using optical fibers, has a mechanism that makes the output light non-polarized. It is preferable to have one.

(other components)
The marker controller 100 also includes a distance measuring section 103 that measures the distance to the workpiece W via the distance measuring unit 5. The distance measurement section 103 is electrically connected to the distance measurement unit 5, and receives a signal related to the measurement result by the distance measurement unit 5 (at least a signal indicating the distance measurement light receiving position in the distance measurement light receiving section 5B). It is possible to receive.

Further, as will be described later, the laser processing apparatus L according to the present embodiment includes a coaxial camera 6 and an overall camera 7 as a non-coaxial camera. This laser processing apparatus L can image the surface of the workpiece W by operating at least one of the coaxial camera 6 and the overall camera 7.

The marker controller 100 includes a distance measuring section 103, an imaging setting section 104, an imaging selection section 105, and a reading section 106 in order to perform processing related to the captured image Pw generated by the coaxial camera 6 or the overall camera 7. We are prepared.

The marker controller 100 also includes a setting section 107 that sets information related to marking patterns. The settings in the setting unit 107 are read and used by the control unit 101 as a scanning control unit.

Note that the distance measurement section 103, the imaging setting section 104, the imaging selection section 105, and the reading section 106 may be configured by the control section 101. For example, the control unit 101 may also serve as the distance measurement unit 103. Furthermore, the imaging setting section 104 may also serve as the imaging selection section 105 or the like. Details of the distance measurement section 103, the imaging setting section 104, the imaging selection section 105, and the reading section 106 will be described later.

<Marker head 1>
As described above, the laser excitation light generated by the excitation light generation section 110 is guided to the marker head 1 via the optical fiber cable. This marker head 1 includes a laser beam output section 2 that amplifies and generates laser light based on laser excitation light and outputs it, and a laser beam output section 2 that irradiates the surface of a workpiece W with the laser beam outputted from the laser beam output section 2. A laser beam scanning unit 4 that performs dimensional scanning, a laser beam guide unit 3 that configures an optical path from the laser beam output unit 2 to the laser beam scanning unit 4, and a distance measuring unit that emits and receives light through the laser beam scanning unit 4. It includes a distance measuring unit 5 for measuring the distance to the surface of the workpiece W based on light, and a coaxial camera 6 and an overall camera 7 for capturing an image of the surface of the workpiece W.

Here, the laser light guide section 3 according to the present embodiment not only constitutes an optical path, but also includes a Z scanner (focus adjustment section) 33 that adjusts the focal position of the laser light, a guide light source 36 that emits guide light, A plurality of members, such as a coaxial camera 6 that captures an image of the surface of the workpiece W, are combined.

The laser beam guide section 3 further includes an upstream merging mechanism 31 for merging the near-infrared laser beam output from the laser beam output section 2 and the guide light emitted from the guide light source 36, and an upstream merging mechanism 31 for merging the near-infrared laser beam output from the laser beam output section 2 and the guide light emitted from the guide light source 36, and a laser beam scanning section 4. It has a downstream merging mechanism 35 for merging the guided laser beam and the distance measuring light projected from the distance measuring unit 5.

3A to 3B are block diagrams illustrating the schematic configuration of the marker head 1, and FIG. 4 is a perspective view illustrating the appearance of the marker head 1. 3A to 3B, FIG. 3A shows an example of processing a workpiece W using near-infrared laser light, and FIG. 3B shows a case of measuring the distance to the surface of the workpiece W using a distance measuring unit 5. is exemplified.

As illustrated in FIGS. 3A to 4, the marker head 1 includes a housing 10 in which at least a laser beam output section 2, a laser beam guide section 3, a laser beam scanning section 4, and a distance measuring unit 5 are provided. ing. This housing 10 has a substantially rectangular external shape as shown in FIG. The lower surface of the housing 10 is defined by a plate-shaped bottom plate 10a. The bottom plate 10a is provided with a transmission window 19 for emitting laser light from the marker head 1 to the outside of the marker head 1. The transmission window 19 is constructed by fitting a plate-shaped transparent member that can transmit near-infrared laser light, guide light, and distance measurement light into a through hole that penetrates the bottom plate 10a in the thickness direction.

In the following description, the longitudinal direction of the casing 10 in FIG. 4 will be simply referred to as the "longitudinal direction" or the "front-back direction," and the lateral direction of the casing 10 in FIG. This is sometimes referred to as the "left-right direction." Similarly, the height direction of the housing 10 in FIG. 4 may be simply referred to as the "height direction" or the "up-down direction."

FIG. 5 is a perspective view illustrating the configuration of the laser beam scanning section 4. As shown in FIG.

As illustrated in FIG. 5, a partition portion 11 is provided inside the casing 10. The internal space of the casing 10 is partitioned into one side and the other side in the longitudinal direction by the partition part 11.

Specifically, the partition portion 11 is formed into a flat plate shape extending in a direction perpendicular to the longitudinal direction of the housing 10 . Further, in the longitudinal direction of the housing 10, the partition portion 11 is arranged closer to one side in the longitudinal direction (the front side in FIG. 4) compared to the central portion of the housing 10 in the same direction.

Therefore, the space partitioned on one side in the longitudinal direction within the housing 10 has a shorter longitudinal dimension than the space partitioned on the other side in the longitudinal direction (the rear side in FIG. 4). Hereinafter, the space partitioned on the other side in the longitudinal direction within the housing 10 will be referred to as a first space S1, while the space partitioned on one side in the longitudinal direction will be referred to as a second space S2.

In this embodiment, a laser beam output section 2, some parts of the laser beam guide section 3, a laser beam scanning section 4, and a distance measuring unit 5 are arranged inside the first space S1. On the other hand, the main components of the laser beam guide section 3 are arranged inside the second space S2.

Specifically, the first space S1 is partitioned by the substantially flat base plate 12 into a space on one side in the transverse direction (the left side in FIG. 4) and a space on the other side (the right side in FIG. 4). . Parts constituting the laser light output section 2 are mainly arranged in the former space.

More specifically, among the parts constituting the laser beam output section 2, the optical parts 21, such as optical lenses and optical crystals, which are required to be sealed as airtight as possible, are fixed in the short direction in the first space S1. In the side space, it is arranged inside a housing space surrounded by the base plate 12 and the like.

On the other hand, among the parts constituting the laser beam output section 2, parts that do not necessarily need to be sealed tightly, such as electrical wiring and the heat sink 22 shown in FIG. It is arranged on the opposite side (the other side in the lateral direction in the first space S1).

Further, as illustrated in FIG. 5, the laser beam scanning section 4 can be arranged on one side in the lateral direction with the base plate 12 in between, similarly to the optical component 21 in the laser beam output section 2. Specifically, the laser beam scanning section 4 according to this embodiment is arranged adjacent to the partition section 11 described above in the longitudinal direction, and along the inner bottom surface of the housing 10 in the vertical direction.

Further, although not shown, the distance measuring unit 5 is arranged in the space on the other side in the lateral direction in the first space S1, similarly to the heat sink 22 in the laser light output section 2.

Furthermore, the components constituting the laser beam guide section 3 are mainly arranged in the second space S2. In this embodiment, most of the components constituting the laser beam guide section 3 are housed in a space surrounded by the partition section 11 and the cover member 17 that partitions the front surface of the housing 10.

Note that, among the parts constituting the laser beam guide section 3, the downstream side merging mechanism 35 is arranged in the vicinity of the partition section 11 in the first space S1 (see FIG. 5). That is, in this embodiment, the downstream merging mechanism 35 is located near the boundary between the first space S1 and the second space S2.

Further, the base plate 12 is formed with a through hole (not shown) that penetrates the base plate 12 in the thickness direction. The laser beam guide section 3 and the laser beam scanning section 4 are optically coupled to the distance measuring unit 5 through this through hole.

Hereinafter, the configurations of the laser beam output section 2, the laser beam guide section 3, the laser beam scanning section 4, and the distance measuring unit 5 will be explained in order.

(Laser light output section 2)
The laser light output unit 2 generates near-infrared laser light for printing based on the laser excitation light generated by the excitation light generation unit 110, and also sends the near-infrared laser light to the laser light guide unit 3. is configured to print.

Specifically, the laser beam output unit 2 includes a laser oscillator 21a that generates a laser beam having a predetermined wavelength based on laser excitation light, amplifies the generated laser beam, and emits a near-infrared laser beam, and a laser oscillator 21a that generates a laser beam having a predetermined wavelength based on the laser excitation light. It includes a beam sampler 21b for separating a part of the emitted near-infrared laser light, and a power monitor 21c into which the near-infrared laser light separated by the beam sampler 21b is incident.

Although details are omitted, the laser oscillator 21a according to the present embodiment includes a laser medium that performs stimulated emission corresponding to laser excitation light to emit laser light, and a laser medium that emits laser light by performing stimulated emission corresponding to laser excitation light, and a It has a Q switch and a mirror that resonates the laser light pulsed by the Q switch.

In particular, in this embodiment, rod-shaped Nd:YVO ₄ (yttrium vanadate) is used as the laser medium. Thereby, the laser oscillator 21a can emit a laser beam (the above-mentioned near-infrared laser beam) having a wavelength of around 1064 nm as a laser beam. However, the present invention is not limited to this example, and other laser media such as YAG, YLF, GdVO ₄ doped with rare earth elements, etc. can also be used. Various solid laser media can be used depending on the purpose of the laser processing apparatus L.

Furthermore, the wavelength of the output laser light can be converted to an arbitrary wavelength by combining a wavelength conversion element with the solid-state laser medium. Furthermore, a so-called fiber laser may be used in which a fiber is used as an oscillator instead of a bulk solid-state laser medium.

Furthermore, the laser oscillator 21a may be configured by combining a solid laser medium such as Nd:YVO ₄ and a fiber. In that case, as in the case of using a solid-state laser medium, a laser with a short pulse width is emitted to suppress thermal damage to the workpiece W, while, as in the case of using a fiber, high output can be achieved. This makes it possible to realize faster printing processing.

The power monitor 21c detects the output of the near-infrared laser beam. The power monitor 21c is electrically connected to the marker controller 100 and can output its detection signal to the control unit 101 and the like.

(Laser light guide section 3)
The laser beam guide section 3 forms at least a part of a laser beam path P that guides the near-infrared laser beam emitted from the laser beam output section 2 to the laser beam scanning section 4 . In addition to a bend mirror 34 for forming such a laser beam path P, the laser beam guiding section 3 includes a Z scanner (focus adjustment section) 33, a guide light source (guide light emitting section) 36, and the like. All of these parts are provided inside the housing 10 (mainly in the second space S2).

The near-infrared laser beam incident from the laser beam output section 2 is reflected by the bend mirror 34 and passes through the laser beam guide section 3. A Z scanner 33 is arranged on the way to the bend mirror 34 for adjusting the focal position of the near-infrared laser beam. The near-infrared laser beam that passes through the Z scanner 33 and is reflected by the bend mirror 34 enters the laser beam scanning section 4 .

The laser optical path P configured by the laser beam guide section 3 can be divided into two with the Z scanner 33 serving as a focus adjustment section as the boundary. Specifically, the laser beam path P configured by the laser beam guide section 3 includes an upstream optical path Pu from the laser beam output section 2 to the Z scanner 33, and a downstream optical path Pd from the Z scanner 33 to the laser beam scanning section 4. , can be divided into .

More specifically, the upstream optical path Pu is provided inside the housing 10 and extends from the laser beam output section 2 to the Z scanner 33 via the above-mentioned upstream merging mechanism 31.

On the other hand, the downstream optical path Pd is provided inside the casing 10, and passes from the Z scanner 33 through the bend mirror 34 and the aforementioned downstream merging mechanism 35 in order to the laser beam scanning section 4. The first scanner 41 is reached.

In this way, inside the housing 10, the upstream merging mechanism 31 is provided in the middle of the upstream optical path Pu, and the downstream merging mechanism 35 is provided in the middle of the downstream optical path Pd.

Hereinafter, the configuration related to the laser beam guide section 3 will be explained in order.

-Guide light source 36-
The guide light source 36 is provided in the second space S2 inside the housing 10, and emits guide light for projecting a predetermined machining pattern onto the surface of the workpiece W. The wavelength of the guide light is set to fall within the visible light range. As an example, the guide light source 36 according to the present embodiment emits red laser light having a wavelength of around 655 nm as the guide light. Therefore, when the guide light is emitted from the marker head 1, the user can visually recognize the guide light.

Note that in this embodiment, the wavelength of the guide light is set to be different from at least the wavelength of the near-infrared laser light. Further, as will be described later, the distance measurement light emitting section 5A in the distance measurement unit 5 emits distance measurement light having a wavelength different from that of the guide light and the near-infrared laser beam. Therefore, the ranging light, the guide light, and the laser light have different wavelengths.

Specifically, the guide light source 36 is arranged at approximately the same height as the upstream merging mechanism 31 in the second space S2, and emits a visible laser (guide light) toward the inside of the casing 10 in the transverse direction. Can be emitted. The guide light source 36 is also oriented such that the optical axis of the guide light emitted from the guide light source 36 and the upstream merging mechanism 31 intersect.

Note that "substantially the same height" as used herein means that the height positions are substantially the same when viewed from the bottom plate 10a forming the lower surface of the housing 10. In other descriptions, it refers to the height seen from the bottom plate 10a.

Therefore, for example, when guide light is emitted from the guide light source 36 in order to allow the user to visually recognize a processing pattern using near-infrared laser light, the guide light reaches the upstream merging mechanism 31 . The upstream merging mechanism 31 includes a dichroic mirror (not shown) as an optical component. As will be described later, this dichroic mirror reflects near-infrared laser light while transmitting guide light. As a result, the guide light that has passed through the dichroic mirror and the near-infrared laser light that has been reflected by the mirror merge and become coaxial.

Note that the guide light source 36 according to this embodiment is configured to emit guide light based on a control signal output from the control unit 101.

-Upstream side merging mechanism 31-
The upstream merging mechanism 31 causes the guide light emitted from the guide light source 36 serving as the guide light emitting section to merge into the upstream optical path Pu. By providing the upstream merging mechanism 31, the guide light emitted from the guide light source 36 and the near-infrared laser light in the upstream optical path Pu can be made coaxial.

As described above, the wavelength of the guide light is set to be different from at least the wavelength of the near-infrared laser light. Therefore, the upstream merging mechanism 31 can be configured using, for example, a dichroic mirror, as described above. The near-infrared laser beam and guide light coaxialized by the dichroic mirror propagate downward, pass through the Z scanner 33, and reach the bend mirror 34.

-Z Scanner 33-
The Z scanner 33 as a focus adjustment unit is disposed in the middle of the optical path constituted by the laser light guide unit 3, and can adjust the focal position of the near-infrared laser beam emitted from the laser light output unit 2. .

Specifically, the Z scanner 33 is provided inside the housing 10 in the middle of the optical path of the laser light path P from the upstream side merging mechanism 31 as a guide light merging mechanism to the laser beam scanning unit 4.

Specifically, as shown in FIGS. 3A and 3B, the Z scanner 33 according to the present embodiment includes an input lens 33a that transmits near-infrared laser light emitted from the laser light output section 2, and a laser beam that passes through the input lens 33a. a collimating lens 33b that allows the near-infrared laser beam to pass through, an output lens 33c that allows the near-infrared laser beam that has passed through the input lens 33a and the collimator lens 33b to pass, a lens drive unit 33d that moves the input lens 33a, It has a casing 33e that accommodates a lens 33a, a collimating lens 33b, and an exit lens 33c.

The entrance lens 33a is made of a plano-concave lens, and the collimating lens 33b and the exit lens 33c are made of a plano-convex lens. The entrance lens 33a, the collimating lens 33b, and the exit lens 33c are arranged so that their optical axes are coaxial with each other.

Furthermore, in the Z scanner 33, a lens driving section 33d moves the input lens 33a along the optical axis. This allows the relative distance between the input lens 33a and the output lens 33c to be changed while keeping the optical axes of the input lens 33a, collimator lens 33b, and output lens 33c coaxial with respect to the near-infrared laser beam passing through the Z scanner 33. can do. As a result, the focal position of the near-infrared laser beam irradiated onto the workpiece W changes.

Each part of the Z scanner 33 will be described in more detail below.

The casing 33e has a substantially cylindrical shape. As shown in FIGS. 3A and 3B, openings 33f for passing near-infrared laser light are formed at both ends of the casing 33e. Inside the casing 33e, the entrance lens 33a, the collimating lens 33b, and the exit lens 33c are vertically arranged in this order.

Of the entrance lens 33a, collimating lens 33b, and exit lens 33c, the collimating lens 33b and the exit lens 33c are fixed inside the casing 33e. On the other hand, the entrance lens 33a is provided so as to be movable in the vertical direction. The lens drive unit 33d includes, for example, a motor, and moves the entrance lens 33a in the vertical direction. This changes the relative distance between the entrance lens 33a and the exit lens 33c.

For example, assume that the distance between the input lens 33a and the output lens 33c is adjusted to be relatively short by the lens driving section 33d. In this case, since the convergence angle of the near-infrared laser beam passing through the output lens 33c becomes relatively small, the focal position of the near-infrared laser beam moves away from the transmission window 19 of the marker head 1.

On the other hand, it is assumed that the distance between the input lens 33a and the output lens 33c is adjusted to be relatively long by the lens driving section 33d. In this case, since the convergence angle of the near-infrared laser beam passing through the output lens 33c becomes relatively large, the focal position of the near-infrared laser beam approaches the transmission window 19 of the marker head 1.

Note that in the Z scanner 33, among the entrance lens 33a, collimating lens 33b, and exit lens 33c, the entrance lens 33a may be fixed inside the casing 33e, and the collimating lens 33b and the exit lens 33c may be movable in the vertical direction. good. Alternatively, the entrance lens 33a, collimator lens 33b, and exit lens 33c may all be movable in the vertical direction.

In this way, the Z scanner 33 as a focus adjustment section functions as a means for vertically scanning the near-infrared laser beam. Hereinafter, the scanning direction by the Z scanner 33 may be referred to as the "Z direction."

Note that the near-infrared laser beam passing through the Z scanner 33 is coaxial with the guide light emitted from the guide light source 36, as described above. Therefore, by operating the Z scanner 33, the focal position of not only the near-infrared laser beam but also the guide light can be adjusted.

Note that the Z scanner 33 according to this embodiment, particularly the lens drive section 33d in the Z scanner 33, is configured to operate based on a control signal output from the control section 101.

-Bend mirror 34-
The bend mirror 34 is provided in the middle of the downstream optical path Pd, and is arranged so as to bend the optical path Pd and direct it backward. Although not shown, the bend mirror 34 is arranged at approximately the same height as the optical member 35a in the downstream merging mechanism 35, and can reflect the near-infrared laser light and guide light that have passed through the Z scanner 33. can.

The near-infrared laser beam and guide light reflected by the bend mirror 34 propagate toward the rear, pass through the downstream merging mechanism 35, and reach the laser beam scanning section (specifically, the first scanner 41) 4. .

-Downstream merging mechanism 35-
The downstream merging mechanism 35 guides the distance measuring light emitted from the distance measuring light emitting section 5A in the distance measuring unit 5 to the workpiece W via the laser beam scanning section 4 by merging it into the aforementioned downstream optical path Pd. . In addition, the downstream merging mechanism 35 guides the distance measuring light reflected by the workpiece W and returning in the order of the laser beam scanning section 4 and the downstream optical path Pd to the distance measuring light receiving section 5B in the distance measuring unit 5.

By providing the downstream merging mechanism 35, the distance measuring light emitted from the distance measuring light emitting section 5A and the near-infrared laser beam and guide light in the downstream optical path Pd can be made coaxial. At the same time, by providing the downstream merging mechanism 35, among the distance measuring light emitted from the marker head 1 and reflected by the workpiece W, the distance measuring light incident on the marker head 1 is guided to the distance measuring light receiving section 5B. be able to.

As described above, the wavelength of the ranging light is set to be different from the wavelengths of the near-infrared laser light and the guide light. Therefore, the downstream merging mechanism 35 can be configured using, for example, a dichroic mirror, similarly to the upstream merging mechanism 31.

Specifically, the downstream merging mechanism 35 according to this embodiment includes a dichroic mirror 35a that transmits one of the ranging light and the guide light and reflects the other (see FIG. 5). More specifically, the dichroic mirror 35a is disposed at substantially the same height as the bend mirror 34 and behind the bend mirror 34, and is disposed in a space on the left side in the lateral direction within the housing 10.

The dichroic mirror 35a is also fixed in such a manner that one mirror surface thereof faces the bend mirror 34 and the other mirror surface faces the base plate 12. Therefore, the near-infrared laser beam and the guide light are incident on one mirror surface of the dichroic mirror 35a, while the ranging light is incident on the other mirror surface.

The dichroic mirror 35a according to this embodiment can reflect the distance measurement light and transmit the near-infrared laser light and the guide light. Thereby, for example, when the distance measurement light emitted from the distance measurement unit 5 enters the dichroic mirror 35a, the distance measurement light is merged into the downstream optical path Pd and made coaxial with the near-infrared laser light and the guide light. I can do it. The near-infrared laser light, guide light, and distance measurement light thus coaxially reach the first scanner 41 as shown in FIGS. 3A and 3B.

On the other hand, the distance measuring light reflected by the workpiece W returns to the laser beam scanning section 4 and reaches the downstream optical path Pd. The distance measuring light that has returned to the downstream optical path Pd is reflected by the dichroic mirror 35a in the downstream merging mechanism 35 and reaches the distance measuring unit 5.

Although not shown in the drawings, the distance measurement light that enters the dichroic mirror 35a from the distance measurement unit 5 and the distance measurement light that is reflected by the dichroic mirror 35a and enters the distance measurement unit 5, both of them are connected to the housing 10. It propagates along the left and right direction (the lateral direction of the housing 10) when viewed from above.

(Laser beam scanning section 4)
As shown in FIG. 3A, the laser beam scanning section 4 irradiates the workpiece W with a laser beam (near infrared laser beam) emitted from the laser beam output section 2 and guided by the laser beam guide section 3. It is configured to two-dimensionally scan the surface of the workpiece W.

In the example shown in FIG. 5, the laser beam scanning section 4 is configured as a so-called two-axis galvano scanner. That is, this laser beam scanning section 4 includes a first scanner 41 for scanning near-infrared laser beam incident from the laser beam guide section 3 in a first direction, and a near-infrared laser scanned by the first scanner 41. It has a second scanner 42 for scanning light in a second direction.

Here, the second direction refers to a direction substantially orthogonal to the first direction. Therefore, the second scanner 42 can scan with near-infrared laser light in a direction substantially orthogonal to the first scanner 41. In this embodiment, the first direction is equal to the front-rear direction (the longitudinal direction of the housing 10), and the second direction is equal to the left-right direction (the lateral direction of the housing 10). Hereinafter, the first direction will be referred to as the "X direction", and the second direction orthogonal thereto will be referred to as the "Y direction". Both the X direction and the Y direction are perpendicular to the above-mentioned Z direction.

The first scanner 41 has a first mirror 41a at its tip. The first mirror 41a is arranged at substantially the same height as the bend mirror 34 and the optical member 35a, and behind the optical member 35a. Therefore, as shown in FIG. 5, the bend mirror 34, the optical member 35a, and the first mirror 41a are arranged in a line along the front-back direction (the longitudinal direction of the housing 10).

The first mirror 41a is also rotationally driven by a motor (not shown) built into the first scanner 41. This motor can rotate the first mirror 41a around a rotation axis extending in the vertical direction. By adjusting the rotational attitude of the first mirror 41a, the angle of reflection of the near-infrared laser beam by the first mirror 41a can be adjusted.

Similarly, the second scanner 42 has a second mirror 42a at its tip. The second mirror 42a is located at approximately the same height as the first mirror 41a in the first scanner 41 and to the right of the first mirror 41a. Therefore, although not shown, the first mirror 41a and the second mirror 42a are arranged along the left-right direction (the lateral direction of the housing 10).

The second mirror 42a is also rotationally driven by a motor (not shown) built into the second scanner 42. This motor can rotate the second mirror 42a around a rotation axis extending in the front-rear direction. By adjusting the rotational attitude of the second mirror 42a, the angle of reflection of the near-infrared laser beam by the second mirror 42a can be adjusted.

Therefore, when near-infrared laser light enters the laser beam scanning unit 4 from the downstream merging mechanism 35, the near-infrared laser light is transmitted to the first mirror 41a in the first scanner 41 and the second mirror in the second scanner 42. 42a, and exit to the outside of the marker head 1 through the transmission window 19.

At this time, by operating the motor of the first scanner 41 and adjusting the rotational attitude of the first mirror 41a, it becomes possible to scan the surface of the workpiece W with the near-infrared laser beam in the first direction. . At the same time, by operating the motor of the second scanner 42 and adjusting the rotational attitude of the second mirror 42a, it becomes possible to scan the surface of the workpiece W with the near-infrared laser beam in the second direction.

Further, as described above, the laser beam scanning unit 4 receives not only the near-infrared laser beam but also the guide light that has passed through the optical member 35a of the downstream merging mechanism 35, or the distance measuring light that has been reflected by the optical member 35a. will also be incident. The laser beam scanning unit 4 according to the present embodiment can two-dimensionally scan the guide light or distance measurement light that has entered by operating the first scanner 41 and the second scanner 42, respectively.

Note that the rotational postures that the first mirror 41a and the second mirror 42a can take are basically such that when near-infrared laser light is reflected by the second mirror 42a, the reflected light passes through the transmission window 19. It is set within such a range.

In this way, the laser beam scanning section 4 according to the present embodiment is electrically controlled by the control section 101 as a scanning control section, so that the near-infrared laser beam is applied to the processing area R1 set on the surface of the workpiece W. A predetermined processing pattern (marking pattern) can be formed within the processing region R1 by irradiating the laser beam.

(Coaxial camera 6)
The coaxial camera 6 has an imaging optical axis A1 branched from a laser optical path P from the laser beam output section 2 to the laser beam scanning section 4 (see FIGS. 3A and 3B). The coaxial camera 6 can generate a captured image Pw including at least a part of the processing area R1 by capturing an image of the workpiece W via the laser beam scanning unit 4. The coaxial camera 6 is an example of the "first imaging unit" in this embodiment.

Hereinafter, among the captured images Pw, the captured image Pw generated by the coaxial camera 6 as the first imaging unit will be referred to as a "coaxial image" and will be given the symbol "Pw1". The coaxial image Pw1 is an example of a "first image".

The coaxial camera 6 is configured as an imaging means that is coaxial with a near-infrared laser beam for processing. Although the coaxial camera 6 has a narrower field of view than the overall camera 7, it can generate a coaxial image Pw1 in which the processing area R1 is enlarged at a relatively high magnification as the captured image Pw, and It is possible to perform two-dimensional scanning of the imaging area. The coaxial camera 6 is used, for example, to locally enlarge and image a part of the processing region R1.

The captured image Pw generated by the coaxial camera 6 can be displayed on the display unit 801 with at least a portion thereof enlarged or reduced.

The coaxial camera 6 according to this embodiment is built into a housing 10. Specifically, the coaxial camera 6 is arranged at approximately the same height as the bend mirror 34 in the laser light guide section 3 . The coaxial camera 6 receives reflected light that has entered the laser beam guide section 3 from the laser beam scanning section 4 . The coaxial camera 6 is configured so that the reflected light reflected at the printing point on the workpiece W enters through the bend mirror 34. The coaxial camera 6 can image the surface of the workpiece W by forming an image of the incident reflected light. Note that the layout of the coaxial camera 6 can be changed as appropriate. For example, the coaxial camera 6 and the bend mirror 34 may have different heights.

The reflected light used by the coaxial camera 6 for imaging is branched from the aforementioned downstream optical path Pd and propagated. Therefore, by operating the laser beam scanning section 4 appropriately, the processing region R1 illustrated in FIG. 9 can be two-dimensionally scanned.

Note that the coaxial camera 6 according to this embodiment is configured to operate based on a control signal output from the control unit 101, similarly to the guide light source 36 and the like.

(Overall camera 7)
The overall camera 7 has an imaging optical axis A2 independent of the laser optical path P (see FIG. 9). The overall camera 7 captures an image of the workpiece W without the intervention of the laser beam scanning unit 4, thereby generating a captured image Pw that has a wider field of view than the image generated by the coaxial camera 6 and that includes the entire processing area R1. can do. The overall camera 7 is an example of the "second imaging section" in this embodiment.

Hereinafter, among the captured images Pw, the captured image Pw generated by the overall camera 7 as the second imaging unit will be referred to as a "whole image" and will be given the symbol "Pw2". The entire image Pw2 is an example of a "second image."

The overall camera 7 is configured as an imaging means that is non-coaxial with a near-infrared laser beam for processing. Although the overall camera 7 cannot perform two-dimensional scanning via the laser beam scanning unit 4, it has a wider field of view than the coaxial camera 6, and as the captured image Pw, the entire image Pw2 is obtained by capturing the processing area R1 with a relatively wide field of view. can be generated. The entire camera 7 is used, for example, to image the entire processing region R1 at once.

The captured image Pw generated by the general camera 7 can be displayed on the display unit 801 with at least a portion thereof enlarged or reduced. The display unit 801 displays the captured image Pw generated by the overall camera 7 and the captured image Pw generated by the coaxial camera 6 side by side, or alternatively displays one of the two types of captured images Pw. can be displayed or displayed.

The overall camera 7 according to this embodiment is placed directly above the transparent window 19, and is fixed in a position with its imaging lens facing downward. As described above, the imaging optical axis A2 of the overall camera 7 is not coaxial with the optical axis Az of the near-infrared laser beam described above (see FIGS. 3A, 3B, and 9).

Note that the "imaging section" according to the present embodiment includes at least one of a coaxial camera 6 as a first imaging section and an overall camera 7 as a second imaging section. That is, the captured image Pw generated by the coaxial camera 6 or the overall camera 7 is used in the control mode described below, but the captured image Pw is generated using either the coaxial camera 6 or the overall camera 7. or a combination of both. A configuration including both the coaxial camera 6 and the overall camera 7 is not essential.

(Distance measurement unit 5)
As shown in FIG. 3B, the distance measuring unit 5 projects distance measuring light via the laser beam scanning section 4, and irradiates the surface of the workpiece W with the distance measuring light. The distance measuring unit 5 also receives distance measuring light reflected by the surface of the workpiece W via the laser beam scanning section 4.

The distance measurement unit 5 is mainly divided into a module for projecting distance measurement light and a module for receiving distance measurement light. Specifically, the ranging unit 5 includes a ranging light emitting section 5A configured as a module for projecting ranging light, and a ranging light receiving section configured as a module for receiving ranging light. It is equipped with 5B.

Of these, the distance measuring light emitting unit 5A is provided inside the housing 10, and emits the distance measuring light for measuring the distance from the marker head 1 to the surface of the workpiece W in the laser processing device L with the laser beam. The light is emitted toward the scanning section 4.

On the other hand, the distance measuring light receiving section 5B is provided inside the housing 10 similarly to the distance measuring light emitting section 5A, and is reflected on the surface of the workpiece W to the laser beam scanning section 4 and the downstream merging mechanism 35. It receives the distance measuring light that returns through the .

Hereinafter, the configuration of each part forming the ranging unit 5 will be explained in order.

-Distance measurement light emitting section 5A-
The distance measuring light emitting unit 5A is provided inside the housing 10 and is configured to emit distance measuring light for measuring the distance from the marker head 1 in the laser processing device L to the surface of the workpiece W. ing.

Specifically, the ranging light emitting section 5A includes the above-mentioned ranging light source 51 and light projecting lens 52.

The distance measurement light source 51 emits distance measurement light toward the front side of the housing 10 according to a control signal input from the control unit 101. Specifically, the distance measuring light source 51 can emit laser light in the visible light range as the distance measuring light. In particular, the ranging light source 51 according to this embodiment emits red laser light having a wavelength of around 690 nm as ranging light.

The light projection lens 52 can be, for example, a plano-convex lens, and can be fixed with a spherical convex surface facing the outside of a casing (not shown). The light projection lens 52 collects the distance measurement light emitted from the distance measurement light source 51 and emits it to the outside of the casing.

The distance measuring light emitted from the distance measuring light source 51 passes through the center of the projection lens 52 and is output to the outside of the distance measuring unit 5. The distance measuring light thus output is reflected by the bend mirror 59 and the optical member 35a in the downstream merging mechanism 35, and enters the laser beam scanning section 4.

The distance measuring light incident on the laser beam scanning unit 4 is reflected in order by the first mirror 41a of the first scanner 41 and the second mirror 42a of the second scanner 42, and is reflected from the transmission window 19 to the outside of the marker head 1. It will be emitted to.

As described in the description of the laser beam scanning unit 4, by adjusting the rotational attitude of the first mirror 41a of the first scanner 41, the surface of the workpiece W can be scanned with the distance measuring light in the first direction. . At the same time, by operating the motor of the second scanner 42 and adjusting the rotational attitude of the second mirror 42a, it becomes possible to scan the surface of the workpiece W with the distance measuring light in the second direction.

The distance measuring light thus scanned is reflected on the surface of the workpiece W. A part of the distance measuring light thus reflected (hereinafter also referred to as "reflected light") enters the inside of the marker head 1 through the transmission window 19. The reflected light that has entered the interior of the marker head 1 returns to the laser beam guide section 3 via the laser beam scanning section 4 . Since the reflected light has the same wavelength as the distance measuring light, it is reflected by the optical member 35a of the downstream merging mechanism 35 in the laser beam guide section 3 and enters the distance measuring unit 5 via the bend mirror 59.

-Distance measurement light receiving section 5B-
The distance measurement light receiving section 5B is provided inside the housing 10, and receives distance measurement light (equivalent to the above-mentioned "reflected light") emitted from the distance measurement light emission section 5A and reflected by the workpiece W. is configured to do so.

Specifically, the ranging light receiving section 5B includes a pair of light receiving elements 56L and 56R and a light receiving lens 57.

The pair of light-receiving elements 56L and 56R each have a light-receiving surface directed diagonally forward, detect the receiving position of reflected light on each light-receiving surface, and output a signal (detection signal) indicating the detection result. do. Detection signals output from each of the light receiving elements 56L and 56R are input to the marker controller 100 and reach the distance measuring section 103.

Examples of elements that can be used as the light receiving elements 56L and 56R include a CMOS image sensor made of a complementary MOS (CMOS), a CCD image sensor made of a charge-coupled device (CCD), and a light position sensor. Examples include a sensor (Position Sensitive Detector: PSD).

The light-receiving lens 57 is arranged inside the housing 10 so that the optical axes of the pair of light-receiving elements 56L and 56R pass through it. The light-receiving lens 57 is also provided in the middle of the optical path connecting the downstream merging mechanism 35 and the pair of light-receiving elements 56L, 56R. Light can be focused on each light receiving surface.

The light-receiving lens 57 collects the reflected light that has returned to the laser beam scanning section 4, and forms a spot of the reflected light on the light-receiving surface of each of the light-receiving elements 56L and 56R. Each light receiving element 56L, 56R outputs a signal indicating the peak position of the spot thus formed and the amount of received light to the distance measuring section 103.

The laser processing device L basically measures the distance to the surface of the workpiece W based on the light receiving position of the reflected light (in this embodiment, the peak position of the spot) on the light receiving surface of each of the light receiving elements 56L and 56R. can do. A so-called triangulation method is used to measure the distance.

-About distance measurement method-
FIG. 6 is a diagram illustrating the triangulation method. In FIG. 6, only the distance measuring unit 5 is illustrated, but the following explanation is also common to the case where the distance measuring light is emitted via the laser beam scanning section 4 as described above.

As illustrated in FIG. 6, when distance measuring light is emitted from the distance measuring light source 51 in the distance measuring light emitting section 5A, the surface of the workpiece W is irradiated with the distance measuring light. When the distance measuring light is reflected by the work W, the reflected light (particularly the diffuse reflected light) will propagate approximately isotropically if the influence of specular reflection is removed.

The reflected light that propagates in this way includes a component that enters the light receiving element 56L via the light receiving lens 57, but depending on the distance between the marker head 1 and the workpiece W, the amount of the incident light that enters the light receiving element 56L varies. The angle of incidence will increase or decrease. When the angle of incidence on the light-receiving element 56L increases or decreases, the light-receiving position on the light-receiving surface 56a shifts.

In this way, the distance between the marker head 1 and the workpiece W and the light receiving position on the light receiving surface 56a are related in a predetermined relationship. Therefore, by understanding this relationship in advance and storing it in the marker controller 100, for example, it is possible to calculate the distance between the marker head 1 and the workpiece W from the light receiving position on the light receiving surface 56a. Such a calculation method is nothing but a method using a so-called triangulation method.

That is, the distance measuring section 103 described above measures the distance from the laser processing device L to the surface of the workpiece W using a triangular distance measuring method based on the light receiving position of the distance measuring light in the distance measuring light receiving section 5B.

Specifically, the above-mentioned condition setting storage unit 102 stores in advance the relationship between the light receiving position on the light receiving surface 56a and the distance from the marker head 1 to the surface of the workpiece W. On the other hand, a signal indicating the light receiving position of the distance measuring light in the distance measuring light receiving section 5B, specifically, the peak position of the spot formed on the light receiving surface 56a by the reflected light of the distance measuring light is input to the distance measuring section 103. be done.

The distance measuring unit 103 measures the distance to the surface of the workpiece W based on the input signal and the relationship stored in the condition setting storage unit 102. The measured values thus obtained are inputted to, for example, the control unit 101 and used by the control unit 101 to control the Z scanner 33 and the like.

For example, the laser processing device L automatically or manually determines a portion (print point) to be processed by the marker head 1 on the surface of the workpiece W. Next, before executing the printing process, the laser processing device L measures the distance to each printing point (more precisely, the distance measuring point set around the printing point) and measures the distance corresponding to the measured distance. The control parameters of the Z scanner 33 are determined so that the focal position is achieved. The laser processing device L operates the Z scanner 33 based on the control parameters thus determined, and then performs printing processing on the workpiece W using a near-infrared laser beam.

Hereinafter, a specific method of using the laser processing system S will be explained.

<How to use the laser processing system S>
FIG. 7 is a flowchart showing how to use the laser processing system S. Further, FIG. 8 is a flowchart illustrating the procedure for creating print settings, search settings, and distance measurement settings, FIG. 9 is a diagram illustrating the relationship between processing area R1 and setting surface R4, and FIG. 8 is a diagram illustrating display contents in a section 801. FIG.

Moreover, FIG. 11 is a flowchart illustrating the operating procedure of the laser processing apparatus L.

Furthermore, FIG. 12 is a diagram illustrating the reading area Rq as an imaging area, FIGS. 13A to 13C are diagrams explaining the display mode of the QR code, and FIG. 14 is a diagram illustrating the basic concept of the imaging selection process. FIG. 15 is a flowchart illustrating specific processing of the imaging selection processing. Further, FIG. 16 is a diagram for explaining the wide-angle mode and the standard mode, and FIG. 17 is a diagram for explaining the imaging selection process incorporating the wide-angle mode and the standard mode.

A laser processing system S including a laser processing device L configured as a laser marker can be installed and operated on a production line in a factory, for example. In its operation, first, before starting the production line, conditions such as the installation position of the workpiece W that will flow through the line and the output of the near-infrared laser beam and distance measuring light that will be irradiated to the workpiece W are set. (Step S1).

The settings created in step S1 are transferred to and stored in the marker controller 100 and/or the operating terminal 800, or read by the marker controller 100 immediately after creation (step S2).

When the production line is in operation, the marker controller 100 refers to the setting contents that have been stored in advance or read immediately after creation. The laser processing device L is operated based on the referenced setting contents, and performs printing processing on each workpiece W flowing on the line (step S3).

(Specific creation steps for each setting)
FIG. 8 illustrates specific processing in step S1 of FIG.

First, in step S11, the coaxial camera 6 or the overall camera 7 built into the laser processing device L generates a captured image Pw that includes at least a part of the processing region R1. The captured image Pw generated by the coaxial camera 6 or the overall camera 7 is output to the operation terminal 800.

The display unit 801 in the operating terminal 800 displays a setting plane R4 associated with the processing area R1, and also superimposes at least one of the coaxial image Pw1 and the entire image Pw2 as the captured image Pw on the setting plane R4. (See Figures 9 and 10).

Thereby, the coordinate system (print coordinate system) defined on the setting surface R4 of the display unit 801 and the coordinate system (camera coordinate system) defined on the captured image Pw can be associated with each other. For example, by designating a printing point while viewing the captured image Pw, the user can print on the processing area R1 via the setting surface R4. The captured image Pw functions as a background image when performing various settings through the setting screen R4.

In the following step S12, the setting unit 107 sets processing conditions. The setting unit 107 sets processing conditions by reading out the contents stored in the condition setting storage unit 102 and the like, and by reading operation inputs etc. via the operation terminal 800.

As an example of processing conditions, the setting unit 107 sets a print pattern (marking pattern) Pm on the surface of the workpiece W indicating the print content (processing content) to be formed in the processing area R1. Setting of the print pattern Pm is performed via the above-mentioned setting surface R4. The setting section 107 is an example of a "processing setting section" in this embodiment.

The processing conditions include a print pattern Pm as a marking pattern as well as a print block B indicating the position of this print pattern Pm. The print block B can be used to adjust the layout, size, rotational posture, etc. of the print pattern Pm. Further, the print block B is used in association with a distance measurement position I, which will be described later.

The display unit 801 can display the print pattern Pm and the print block B superimposed on the captured image Pw. For example, in FIG. 10, a printing pattern Pm consisting of a QR code (registered trademark) and a rectangular printing block B surrounding it are arranged on the setting surface R4 on the surface of the workpiece W, and the display section 801 displays the thus arranged print pattern Pm and print block B superimposed on the captured image Pw.

Note that the print pattern Pm is an example of a "processing pattern", and the print block B is an example of a "processing block". The names "print pattern" and "print block" are merely for convenience and are not intended to limit their uses.

Further, although not shown, a plurality of workpieces W may be displayed on the setting surface R4, or only one workpiece W may be displayed as illustrated in FIG. 10. Further, a plurality of print blocks B may be arranged on one workpiece W. As for the print pattern Pm, patterns other than the QR code can also be used, such as character strings, barcodes, etc.

Furthermore, the display section 801 has two independent areas in which the captured image Pw can be displayed.

Specifically, the display unit 801 according to the present embodiment includes a first display area 801a that displays one selected from the coaxial image Pw1 and the entire image Pw2, and a second display area 801b that displays the entire image Pw2. have.

Of these, the first display area 801a is used to indicate the position and size of the print pattern Pm and print block B with the captured image Pw as a background image. The first display area 801a serves as a guide for setting the position and size of the print pattern Pm and the print block B.

On the other hand, the second display area 801b is used to indicate the positional relationship and size ratio between the captured image Pw displayed in the first display area 801a and the entire image Pw2 (that is, the entire processing area R1). used. The second display area 801b serves as a guide for knowing which part of the entire processing area R1 the captured image Pw displayed in the first display area 801a corresponds to.

Returning to step S12 in FIG. 8, in this step, for example, the user manually creates a print block B and arranges the print block B on the setting surface R4. As described above, since the setting surface R4 and the captured image Pw are associated with each other, the user can place the print block B while viewing the captured image Pw.

After one or more print blocks B are arranged, the user determines a print pattern Pm for each print block B. The determination of the print pattern Pm is executed, for example, by the user operating the operation unit 802 and the operation unit 802 inputting the print pattern Pm into the setting unit 107 based on the operation input at that time.

The setting unit 107 reads the print blocks B thus arranged and the print pattern Pm determined for each print block B, and sets them as processing conditions. The setting unit 107 according to the present embodiment temporarily or continuously stores the coordinates of the printing block B on the setting surface R4 (coordinates in the printing coordinate system) in the condition setting storage unit 102 or the like.

As described above, since the setting surface R4 is displayed superimposed on the captured image Pw, the setting section 107 according to the present embodiment prints a print block on the setting surface R4 so as to overlap the captured image Pw. B will be set.

Note that the processing conditions also include conditions related to near-infrared laser light (hereinafter referred to as "laser conditions"). These laser conditions include the emission position of the near-infrared laser beam, the target output (laser power) of the near-infrared laser beam, the scanning speed (scan speed) of the near-infrared laser beam by the laser beam scanning section 4, and the near-infrared laser beam Among the repetition frequency (pulse frequency) of the laser beam, whether or not to make the laser spot of the near-infrared laser beam variable (spot variable), and the number of times the near-infrared laser beam traces the printing pattern Pm (printing number) At least one of the following is included. As illustrated in the menu D1 displayed at the lower right of FIG. 13, these processing conditions can be set for each print block B.

Further, generally, when a production line is operated, each workpiece W that is sequentially processed will have a positional shift in the X direction and the Y direction (XY direction). The laser processing apparatus L according to the present embodiment can correct such positional deviation by using various techniques.

Therefore, in step S13 following step S12, the setting unit 107 creates condition settings (search settings) for correcting the positional deviation in the X and Y directions. The laser processing apparatus L according to the present embodiment can use, for example, a pattern search as a method for correcting positional deviation in the XY directions.

When using a pattern search, the setting unit 107 defines a pattern area (not shown) for specifying the position of the workpiece W and a movement range of the pattern area (not shown) as conditions related to the pattern search (search conditions). A search area (not shown) to be searched is set on the captured image Pw.

The search conditions set by the setting unit 107 are stored as search settings in the condition setting storage unit 102 or the like. When the creation of the search settings is completed, the setting unit 107 proceeds from step S13 to step S14.

Further, in general, when a production line is operated, each workpiece W that is sequentially processed will have a positional shift in the Z direction. Such a positional shift is undesirable because it causes a shift in the focal position of the near-infrared laser beam. Since the laser processing apparatus L according to this embodiment includes the distance measuring unit 5, it is possible to detect a positional shift in the Z direction based on the distance to the surface of the workpiece W. This makes it possible to correct positional deviations in the Z direction and, by extension, focal position deviations. For this purpose, in step S14 following step S13, condition settings (distance measurement settings) for correcting the positional deviation in the Z direction are created.

Specifically, in this step S14, conditions (distance measurement conditions) related to the distance measurement unit 5 are determined. The setting unit 107 according to the present embodiment sets at least a distance measurement position I for measuring the distance from the marker head 1 to the surface of the workpiece W on the captured image Pw as a distance measurement condition (see FIG. 10). (see asterisk). This distance measurement position I is basically set to overlap the surface of the workpiece W, and indicates the coordinates where the distance measurement light should be irradiated.

Note that when a plurality of print blocks B are set, the setting unit 107 can set distance measurement conditions for each print block B. In this case, the setting unit 107 can set the distance measurement position I within each print block B (see the asterisk in FIG. 10). Alternatively, the setting unit 107 may set the distance measurement position I outside each print block B.

The distance measurement conditions set by the setting unit 107 are stored in the condition setting storage unit 102 and the like as distance measurement settings. When the creation of the distance measurement settings is completed, the setting unit 107 proceeds from step S14 to step S15. The setting unit 107 returns from step S15 assuming that all settings have been created.

(Execution of printing processing)
FIG. 11 illustrates specific processing in step S3 of FIG. That is, the process shown in FIG. 11 is executed in order for each workpiece W flowing when the manufacturing line is operated.

First, prior to each step shown in FIG. 11, as explained using step S1 in FIG. 7 and steps S11 to S15 in FIG. The settings for the print block B, etc. (print settings), the settings for the pattern image, etc. (search settings), and the settings for the distance measurement position I, etc. (distance measurement settings) are created in advance.

By completing the creation of each setting, the marker controller 100 is in a state where it can execute the control process illustrated in FIG. 11. This control process includes, as main processes, a control process (steps S31 to S33) for executing XY tracking (pattern search in the XY directions) and Z tracking (height measurement in the Z direction), and The configuration includes a control process (steps S34 to S40) for executing printing processing that reflects tracking and checking the processing contents.

First, in step S31 of FIG. 11, a trigger is input to the marker controller 100 from the PLC 902 or the like. At this time, a workpiece W of the same type as the workpiece W used for various settings including distance measurement settings is transported.

In this step S31, the marker controller 100 images the same type of workpiece W via the coaxial camera 6 or the overall camera 7, and generates the captured image (camera image) Pw. The marker controller 100 displays the generated captured image Pw superimposed on the setting surface R4.

In the subsequent step S32, the marker controller 100 reads the search settings (search conditions) for each of the print blocks B that are search targets, and executes a pattern search based on the search settings. By executing the pattern search, a positional shift in the XY directions between the workpiece W used to create the print settings, search settings, and distance measurement settings and the workpiece W newly conveyed during operation is detected. .

Further, in step S32, the marker controller 100 reads the distance measurement settings (distance measurement conditions) for each of the print blocks B targeted for distance measurement, and operates the distance measurement unit 5 based on the distance measurement settings. , the distance from the marker head 1 to the distance measurement position I, and in turn, the height of the work W at the distance measurement position I.

Furthermore, in step S32, the marker controller 100 corrects the positional deviation of the workpiece W in the XY directions based on the detection results of the positional deviation in the same directions. Specifically, the marker controller 100 corrects the position of the print block B on the setting surface R4 so as to reduce the positional deviation of the workpiece W in the XY directions.

Furthermore, in step S32, the marker controller 100 corrects the positional deviation of the work W in the Z direction based on the measurement result of the height of the work W. Specifically, the marker controller 100 corrects the focal position of the near-infrared laser beam based on the positional shift of the workpiece W in the Z direction.

In this way, in step S32, the positional deviation of the print block B in the XYZ directions is corrected for each workpiece W that is transported as the production line operates.

In the following step S33, the marker controller 100 determines the details of the print pattern Pm. The information determined in step S33 includes information that is determined during actual operation (particularly at the timing after a trigger is input), such as the manufacturing date, expiration date, lot number, and count value.

Further, the laser processing apparatus L according to the present embodiment has a function of allowing the user to confirm the printed pattern Pm formed by the marker head 1, and a function of automatically reading the QR code when the printed pattern Pm is a QR code. It is equipped with.

In order to realize these functions, it is required that the coaxial camera 6 or the overall camera 7 image the actually formed print pattern Pm. In that case, it is conceivable to generate an image showing the entire print pattern Pm by capturing images once or multiple times. In order to generate an image showing the entire print pattern Pm, at least an index showing the area to be imaged is required.

Therefore, in step S34 following step S33, the marker controller 100 sets an imaging area Rq indicating the area to be imaged. This setting is executed by the imaging setting section 104 provided in the marker controller 100. Specifically, the imaging setting unit 104 defines an imaging area Rq including the print pattern Pm on the surface of the workpiece W based on the settings made by the setting unit 107. The imaging setting unit 104 sets the imaging content including the position and size of the thus defined imaging area Rq, and temporarily or continuously stores this in the condition setting storage unit 102.

Note that in this embodiment, since the area to be imaged by the coaxial camera 6 or the overall camera 7 and the area to be read by the reading unit 106, which will be described later, match, in the following description, " The "imaging area" will be referred to as the "reading area".

The imaging setting unit 104 defines the reading area Rq so as to include the entire print pattern Pm. Specifically, by adding a predetermined margin Zm around the print pattern Pm, the imaging setting unit 104 can define a reading area Rq that is wider in area than the print pattern Pm (see FIG. 12).

In this case, the margin Zm may be set as a blank area surrounding the print pattern Pm. Further, the specific dimension ΔWm2 of the margin Zm may be set manually by the user, or a numerical value stored in advance may be read and used.

Furthermore, as illustrated in FIG. 12, when a QR code is set as the print pattern Pm, it is also possible to set a reading area Rq that takes into account area settings specific to the QR code. Specifically, the imaging setting unit 104 adds a quiet zone Zq surrounding the outer periphery of the printed pattern Pm consisting of the QR code and a margin Zm further surrounding the outer periphery of the quiet zone Zq to the printed pattern Pm as the reading area Rq. Set the area.

In this case, the quiet zone Zq is set as a blank space located between the print pattern Pm and the margin Zm and along the outer edge of the print pattern Pm. Further, the specific dimension ΔWq of the quiet zone Zq is set for each cell forming the QR code according to the model specifications of the QR code. For example, in the case of QR code model 1 or QR code model 2, the quiet zone Zq is a blank area of 4 cells, and in the case of a micro QR code, the quiet zone Zq is a blank area of 2 cells. The details of the margin Zm are as described above.

Note that the size of the print pattern Pm as a QR code increases or decreases depending on the amount of information the QR code has and the size of each cell forming the QR code. For example, as shown in FIG. 13A, when a numerical value is input into the input field M1 in the dialog D2, a QR code (print pattern Pm) corresponding to the numerical value is generated.

Here, as shown in FIG. 13B, when the number of digits of the numerical value input in the input field M1 is increased, the number of cells composing the QR code increases by the amount of information of the QR code (print pattern Pm'). To increase. As a result, the size of the QR code (print pattern Pm') in FIG. 13B becomes larger than the size of the QR code (print pattern Pm) in FIG. 13A.

Furthermore, as shown in FIG. 13C, when the size of each cell is increased through the input field M2, the overall size of the QR code (print pattern Pm'') increases. Pm") is larger than the size of the QR code (print pattern Pm) in FIG. 13A.

By the way, in the laser processing apparatus L including both the coaxial camera 6 and the general camera 7 as in this embodiment, it is not easy for the user to determine which camera is used to capture the image of the reading area Rq. This is inconvenient from the viewpoint of usability of the laser processing apparatus L.

Therefore, the marker controller 100 automatically selects a camera to be used for imaging the reading area Rq in step S35 following step S34. This selection is executed by the imaging selection unit 105 included in the marker controller 100. Specifically, the imaging selection unit 105 selects either the coaxial camera 6 or the overall camera 7 based on the size of the reading area Rq set by the imaging setting unit 104. The imaging selection unit 105 temporarily or continuously stores the selection result in the condition setting storage unit 102 or inputs a signal indicating the selection result to the control unit 101. Hereinafter, among the processes performed by the imaging selection unit 105, the processing related to camera selection will be referred to as "imaging selection processing."

-Basic concept of imaging selection process-
Prior to the imaging selection process, the field of view size F1 of the coaxial camera 6 and the field of view size F2 of the overall camera 7 are stored in advance in the condition setting storage unit 102. The field of view size F2 of the overall camera 7 is wider than the field of view size F1 of the coaxial camera 6.

In the imaging selection process, the imaging selection unit 105 selects one of the coaxial camera 6 and the overall camera 7, which has at least a wider field of view than the reading area Rq. For example, as shown in FIG. 14(b), when the field of view size F1 of the coaxial camera 6 is narrower than the reading area Rq and the field of view size F2 of the overall camera 7 is wider than the reading area Rq, the imaging selection unit 105 , select the overall camera 7. By selecting the overall camera 7, the reading area Rq can be contained within the field of view size F2 of the overall camera 7.

Here, if the reading area Rq is larger than the state shown in (b) of FIG. ).

However, when the reading area Rq is smaller than the state shown in FIG. 14(b), the field of view size F1 of the coaxial camera 6 and the field of view size F2 of the overall camera 7 are both wider than the reading area Rq. (See FIG. 14(c)). In this case, regardless of which of the coaxial camera 6 and the overall camera 7 is selected, the reading area Rq can be accommodated within the field of view sizes F1 and F2 of each camera 6 and 7.

Therefore, when the field of view sizes F1 and F2 of the coaxial camera 6 and the overall camera 7 are both wider than the reading area Rq, the imaging selection unit 105 according to the present embodiment selects the coaxial camera 6 with better resolution. It is composed of By preferentially selecting the coaxial camera 6, higher definition images can be generated.

By the way, in FIG. 14, the description has been made on the assumption that the coaxial camera 6 and the overall camera 7 each have one field of view size F1, F2, but at least one of the coaxial camera 6 and the overall camera 7 has a field of view size of each. may have a plurality of different imaging modes. In fact, the coaxial camera 6 and the overall camera 7 according to this embodiment each have two imaging modes (specifically, a wide-angle mode and a standard mode) with different field of view sizes.

-About wide-angle mode and standard mode-
As illustrated in FIG. 16, the coaxial camera 6 and the overall camera 7 according to this embodiment each have an image sensor 61 provided with a plurality of pixels 61a. Although FIG. 16 only illustrates the image sensor 61 and pixel 61a of the coaxial camera 6, the following description also applies to the image sensor (not shown) of the overall camera 7 and its pixels (not shown). Common.

In this embodiment, the image sensor 61 is configured by a CMOS image sensor made of complementary MOS (CMOS). Although the number of pixels of the image sensor 61 is set to 1920x1200 pixels, only 480x480 pixels can be transferred to the display unit 801 due to system constraints of the laser processing apparatus L.

In order to utilize such system constraints, the imaging selection unit 105 according to the present embodiment can select two imaging modes for each of the coaxial image Pw1 in the coaxial camera 6 and the overall image Pw2 in the overall camera 7. .

Specifically, the imaging selection unit 105 selects a wide-angle mode in which the image Px1 generated by the pixels 61a within a predetermined first range Rx1 of the image sensor 61 is compressed and displayed, and a second mode narrower than the first range Rx1. A standard mode in which the image Px2 generated by the pixels 61a within the range Rx2 is displayed can be used.

Specifically, the wide-angle mode is a mode in which the first range Rx1 set to 1200x1200 pixels is imaged, compressed to 480x480 pixels, and displayed. The image Px1 generated in this wide-angle mode has a wider field of view than the image Px2 generated in the standard mode.

On the other hand, the standard mode is a mode in which the second range Rx2 set to 480x480 pixels is imaged and displayed without being compressed. Although the image Px2 generated in the standard mode has a narrower field of view than the image Px1 generated in the wide-angle mode, it has a relatively higher resolution.

The field of view sizes F1 and F2 of the coaxial camera 6 and the overall camera 7 in FIG. 14 both refer to the field of view size of each camera in wide-angle mode. In each of the coaxial camera 6 and the overall camera 7, the field of view size in the standard mode is narrower than the field of view size in the wide-angle mode. Further, the field of view size F2 of the overall camera 7 in the standard mode is wider than the imaging field of view F1 of the coaxial camera 6 in the wide-angle mode.

Therefore, as shown in FIG. 17, in descending order of field of view size, there are the overall camera 7 in wide-angle mode, the overall camera 7 in standard mode, the coaxial camera 6 in wide-angle mode, and the coaxial camera 6 in standard mode. The imaging selection unit 109 is configured to select one of the wide-angle mode and the standard mode for each camera based on the arrangement order and the size of the search area Rs.

Although not shown, the resolutions are, in descending order of resolution, the coaxial camera 6 in standard mode, the coaxial camera 6 in wide-angle mode, the entire camera 7 in standard mode, and the entire camera 7 in wide-angle mode. .

-Specific example of imaging selection process-
FIG. 15 is a specific example of the imaging selection process, and shows the specific process in step S35 of FIG. 11. First, in step S351, the imaging selection unit 105 reads the size of the reading area Rq set in step S34 of FIG. 11. Next, the imaging selection unit 105 compares the size of the reading area Rq with the field of view size F1 of the coaxial camera 6 in the wide-angle mode, and determines whether the size of the reading area Rq is smaller than or equal to the field of view size F1 of the coaxial camera 6. Determine. If this determination is YES, the process advances to step S352, while if NO, the process advances to step S356.

In step S352, the imaging selection unit 105 selects the coaxial camera 6 as the camera to be used for imaging the reading area Rq, and proceeds to step S353.

In step S353, the imaging selection unit 105 reads the first visual field threshold stored in the condition setting storage unit 102 or the like in advance. The first field of view threshold is equal to the field of view size F1 of the coaxial camera 6 in standard mode plus a predetermined margin. Next, the imaging selection unit 105 compares the size of the reading area Rq with the first visual field threshold and determines whether the size of the reading area Rq is less than or equal to the first visual field threshold. If this determination is YES, the process advances to step S354, while if NO, the process advances to step S355.

In step S354, the imaging selection unit 105 selects the standard mode (coaxial standard mode) as the imaging mode of the coaxial camera 6, and returns. Further, in step S355, the imaging selection unit 105 selects wide-angle mode (coaxial wide-angle mode) as the imaging mode of the coaxial camera 6, and returns.

Further, in step S356, the imaging selection unit 105 selects the overall camera 7 as the camera to be used for imaging the reading area Rq, and proceeds to step S357.

In step S357, the imaging selection unit 105 reads the second visual field threshold stored in advance in the condition setting storage unit 102 or the like. The second visual field threshold is equal to the visual field size F2 of the entire camera 7 in the standard mode plus a predetermined margin. Next, the imaging selection unit 105 compares the size of the reading area Rq with the second visual field threshold and determines whether the size of the reading area Rq is less than or equal to the second visual field threshold. If this determination is YES, the process advances to step S358, while if NO, the process advances to step S359.

In step S358, the imaging selection unit 105 selects the standard mode (overall standard mode) as the imaging mode of the overall camera 7, and returns. Further, in step S359, the imaging selection unit 105 selects wide-angle mode (overall wide-angle mode) as the imaging mode of the overall camera 7, and returns.

After completing the process shown in FIG. 15, the marker controller 100 proceeds from step S35 to step S36 in FIG. The control process after the imaging selection process will be described in detail below.

-Processing after camera selection-
First, in step S36, the marker controller 100 executes printing processing on the workpiece W via the marker head 1. By executing the printing process, the printing pattern Pm, which has been determined in detail in step S33, is formed on the surface of the workpiece W.

Next, in steps S37 to S39 following step S36, the marker controller 100 images the print pattern Pm using the camera selected through the imaging selection process. This process is mainly executed by the control unit 101.

Specifically, if the coaxial camera 6 is selected by the imaging selection unit 105 after the printing pattern Pm is processed on the workpiece W, the control unit 101 according to the present embodiment controls The reading area Rq is imaged through the coaxial camera 6 while the laser beam scanning unit 4 is controlled based on the position of the reading area Rq. If the overall camera 7 is selected by the imaging selection unit 105 after the printing pattern Pm is processed on the workpiece W, the control unit 101 also controls the processing of the printing pattern Pm through the overall camera 7 without controlling the laser beam scanning unit 4. to image the reading area Rq.

More specifically, in step S37 following step S36, the control unit 101 determines whether the imaging selection unit 105 has selected the coaxial camera 6. If this determination is YES, the process proceeds to step S38, while if NO, step S38 is skipped and the process proceeds to step S39.

In step S38, the control section 101 operates the first scanner 41 and the second scanner 42 in the laser beam scanning section 4. As a result, the imaging field of view F1 of the coaxial camera 6 moves so that an image centered on the center Pc of the reading area Rq is generated, as shown by the star in FIG. 14.

In step S39, the control unit 101 images the reading area Rq by operating one of the coaxial camera 6 and the overall camera 7 selected by the imaging selection unit 105 in a predetermined imaging mode. When the coaxial camera 6 is selected, a coaxial image Pw1 that captures the reading area Rq is generated, and when the entire camera 7 is selected, an entire image Pw2 that captures the reading area Rq is generated.

When the coaxial camera 6 or the overall camera 7 images the reading area Rq, it is possible to image the print pattern Pm included in the reading area Rq. By visually observing the imaged print pattern Pm, the user can confirm the print result.

Next, the marker controller 100 executes reading of the print pattern Pm in step S40 following step S39. This process is executed by the reading unit 106 included in the marker controller 100. Specifically, the reading unit 106 reads the print pattern Pm formed on the workpiece W based on the coaxial image Pw1 or the entire image Pw2 generated by imaging the reading area Rq. By reading the printed pattern Pm, information included in the QR code can be displayed on the display section 801 or the like.

<Effects, etc.>
As described above, the imaging selection unit 105 selects one of the coaxial camera 6 and the overall camera 7 based on the size of the reading area Rq set by the imaging setting unit 104, as illustrated in step S35 of FIG. Choose one.

Then, as illustrated in step S39 in FIG. 11, the control unit 101 images the reading area Rq via one of the coaxial camera 6 and the overall camera 7 selected by the imaging selection unit 105. By imaging the reading area Rq, a coaxial image Pw1 or an entire image Pw2 including the print pattern Pm can be generated. The user can check the printing result by the laser processing device L by visually viewing the coaxial image Pw1 or the entire image Pw2 generated in this way.

In this way, by selecting a camera based on the size of the reading area Rq, a camera suitable for the size can be automatically selected. This saves the user's time and effort, and further improves usability when checking the processing results.

Further, as illustrated in step S40 in FIG. 11, the reading unit 106 can read the print pattern Pm included in the coaxial image Pw1 or the entire image Pw2. This configuration is effective in that the usability of the laser processing apparatus L can be improved.

Further, as described using FIG. 14, the imaging selection unit 105 selects a camera by comparing the field of view sizes F1 and F2 of the coaxial camera 6 and the overall camera 7 with the size of the reading area Rq. Execute. This allows for more appropriate camera selection.

Further, as described using FIG. 14, when both the coaxial camera 6 and the overall camera 7 are selectable, the imaging selection unit 105 preferentially selects the coaxial camera 6. In general, the coaxial camera 6 has a narrower field of view than the overall camera 7, and therefore has superior resolution. Therefore, by preferentially selecting the coaxial camera 6, a finer coaxial image Pw1 can be used, and the processing result can be confirmed more appropriately.

Further, as illustrated in FIG. 13, the imaging setting unit 104 sets an area obtained by adding the quiet zone Zq and the margin Zm to the printing pattern Pm as a QR code as the reading area Rq. By setting in this way, it is possible to reliably fit the print pattern Pm within the reading area Rq, and as a result, it is possible to check the processing results more appropriately.

<Another example of reading area>
FIG. 18 is a diagram showing another example of the reading area Rq as the imaging area. Further, FIG. 19 is a diagram explaining the layout of the print block B, and FIG. 20 is a diagram illustrating an imaging area including a plurality of print blocks Ba, Bb, and Bc.

In the embodiment, the reading area Rq including the print pattern Pm consisting of a QR code is illustrated, but the present disclosure is not limited to such a reading area Rq. As illustrated in FIG. 18, a print pattern Pm2 that is a combination of a character string and a number sequence may be used, and a reading area Rq2 that includes the print pattern Pm2 may be set.

In that case, the margin Zm2 related to the reading area Rq2 may be set as a blank space arranged along the outer contour of the print pattern Pm2 so as to surround the print pattern Pm2. Further, the specific dimension ΔWm of the margin Zm2 may be set manually by the user, as in the previous embodiment, or may be read out and used as a numerical value stored in advance.

In addition, when setting the printing block B, as illustrated in FIG. It is possible to change the size of the print block B.

Further, as illustrated in FIG. 20, an imaging area can be set for each of the three print blocks Ba to Bc. Furthermore, two or more of the three print blocks Ba to Bc can be grouped into one block Bt. When three print blocks Ba to Bc are grouped, character strings and the like included in each print block Ba, Bb, and Bc can be set to the print pattern Pmt related to that block Bt. In this case, the imaging setting unit 104 sets the imaging area so that the entire print pattern Pmt is accommodated.

<Modified example of execution timing of imaging selection process>
FIG. 21 is a flowchart showing another example of the operating procedure of the laser processing apparatus L.

Although the imaging selection unit 105 according to the embodiment was configured to execute the imaging selection process before the printing process (see step S35 and step S36 in FIG. 11), the present disclosure It is not limited to the configuration. As illustrated in steps S34' and S36' in FIG. 21, the imaging selection process can also be executed after the printing process is executed.

Further, in FIG. 21, the order of step S34' and step S35' can be changed. In that case, the reading area Rq is set before the printing process is executed, and the imaging selection process is executed after the printing process is executed.

《Other embodiments》
In the embodiment, both the coaxial camera 6 and the overall camera 7 were provided within the housing 10, but the present disclosure is not limited to such a configuration. For example, the overall camera 7 may be attached to the outer surface of the housing 10.

Further, in the embodiment, the whole camera 7 as the second imaging unit was configured to image the entire processing region R1 at once, but the present disclosure is not limited to this configuration. For example, the overall camera 7 may generate an image showing the entire processing region R1 by capturing images of the processing region R1 multiple times and displaying the imaging results side by side.

Further, in the embodiment, two imaging modes (wide-angle mode and standard mode) are set for each of the coaxial camera 6 and the overall camera 7, but the number of imaging modes is not limited to this. For example, three or more imaging modes may be set depending on the height of the field of view size of each camera.

1 Marker head 2 Laser light output section 3 Laser light guide section 4 Laser light scanning section 6 Coaxial camera (first imaging section)
7 Overall camera (second imaging unit)
100 Marker controller 101 Control unit (scanning control unit)
104 Imaging setting section 105 Imaging selection section 107 Setting section (processing setting section)
108 Display control unit 108a Magnification adjustment unit 108b Area moving unit 108c Display switching unit 110 Excitation light generation unit 801 Display unit 801a First display area 801b Second display area P Laser optical path A1 Imaging optical axis A2 Imaging optical axis Pm Print pattern (processing) pattern)
B Printing block (processing block)
F1 Field of view size F2 Field of view size Pw Captured image Pw1 Coaxial image (first image)
Pw2 whole image (second image)
R1 Processing area R4 Setting surface Rq Reading area (imaging area)
Zq Quiet zone Zm Margin L Laser processing device S Laser processing system W Work (workpiece)

Claims (6)

an excitation light generation unit that generates excitation light;
a laser light output unit that generates laser light based on the excitation light generated by the excitation light generation unit and emits the laser light;
A laser beam scanning unit that irradiates a workpiece with a laser beam emitted from the laser beam output unit and performs two-dimensional scanning within a processing area set on the surface of the workpiece. And,
It has an imaging optical axis branching from a laser optical path from the laser beam output section to the laser beam scanning section, and images the workpiece through the laser beam scanning section. a first imaging unit that generates a first image including the part;
By having an imaging optical axis independent of the laser light path and imaging the workpiece without the intervention of the laser beam scanning section, the field of view size is wider than that of the first imaging section and the processing area is a second imaging unit that generates a second image including the entire image;
a machining setting unit that sets a machining pattern indicating machining content to be formed in the machining area on the surface of the workpiece;
an imaging setting unit that defines an imaging area including the processing pattern on the surface of the workpiece based on settings set by the processing setting unit, and sets imaging content including the position and size of the imaging area; and,
an imaging selection unit that selects one of the first and second imaging units based on the size of the imaging area set by the imaging setting unit;
comprising a control unit that controls at least the laser beam scanning unit and the first and second imaging units,
After the processing pattern is processed on the workpiece, the control section
When the first imaging section is selected by the imaging selection section, the first imaging section is controlled while the laser beam scanning section is controlled based on the position of the imaging area set by the imaging setting section. while imaging the imaging area via;
A laser processing apparatus characterized in that when the second imaging section is selected by the imaging selection section, the imaging area is imaged through the second imaging section. The laser processing apparatus according to claim 1,
A laser processing apparatus comprising: a reading section that reads the processing pattern formed on the workpiece based on the first or second image generated by imaging the imaging area. The laser processing apparatus according to claim 1 or 2,
The imaging setting section defines the imaging area having a larger area than the processing pattern by adding a predetermined margin around the processing pattern,
The laser processing apparatus is characterized in that the imaging selection section selects one of the first and second imaging sections, which has a larger field of view than at least the imaging area. In the laser processing apparatus according to claim 3,
The laser processing apparatus is characterized in that the imaging selection section selects the first imaging section when the field of view sizes of the first and second imaging sections are both wider than the imaging area. The laser processing device according to any one of claims 1 to 4,
The processing setting section sets a QR code (registered trademark) as the processing pattern,
The imaging setting section sets, as the imaging area, an area in which a quiet zone surrounding the outer periphery of the processing pattern and a margin further surrounding the outer periphery of the quiet zone are added to the processing pattern. Processing equipment. The laser processing apparatus according to any one of claims 1 to 5,
At least one of the first imaging unit and the second imaging unit has a plurality of imaging modes each having a different field of view size,
The laser processing apparatus is characterized in that the imaging selection unit selects one of the plurality of imaging modes based on the size of the imaging area.

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