JP2021104529A - Laser processing device - Google Patents

Abstract

To provide a laser processing device equipped with imaging means coaxialized with laser light for processing, which is improved in accuracy in search processing.SOLUTION: A laser processing device L comprises: a coaxial camera 6 that has an imaging optical axis A1 branching from a laser optical path P and generates a coaxial image Pw1; a whole camera 7 that has an imaging optical axis A2 independent from the laser optical path P and generates a whole image Pw2; a setting part 107 that sets a pattern region Rp and a search region Rs; an imaging selecting part 109 that selects either of the coaxial camera 6 and the whole cameral 7 on the basis of a size of the search region Rs; a control part 101 that newly generates an imaged image Pw on a new work-piece W' different from a work-piece W used in setting the pattern region Rp, by controlling the either selected by the imaging selection part 109; and a positional shift detecting part 105 that detects a positional shift between the work-pieces W and W', on the basis of the newly generated imaged-image Pw.SELECTED DRAWING: Figure 15

Description

The technique disclosed herein relates to a laser processing apparatus such as a laser marking apparatus that performs processing by irradiating a work piece with a laser beam.

Conventionally, a laser processing apparatus including an imaging unit such as a camera is known.

For example, Patent Document 1 includes a laser processing apparatus (laser) including a laser light source that emits a laser beam, a scanning means that scans the laser beam two-dimensionally, and an imaging means for imaging an object to be marked. Marking device) is disclosed.

The imaging means according to Patent Document 1 is configured such that its imaging optical axis is coaxial with the laser beam for processing. Specifically, the laser processing apparatus disclosed in Patent Document 1 includes an optical path branching means for branching an optical path between a laser light source and a scanning means, and the imaging means according to the same document is an optical path branching means. The optical axis toward the scanning means is provided so as to coincide with the optical axis of the laser beam.

Further, Patent Document 2 discloses a laser processing apparatus including a laser head that emits a laser beam for processing a work piece (work) and an observation optical system that images a machined surface of the work piece. ing.

The laser head according to Patent Document 2 accommodates a scanning means for scanning a laser beam on a machined surface, and the observation optical system according to the same document is located between the scanning means and the machined surface in the height direction. It is provided in. Specifically, the observation optical system disclosed in Patent Document 2 is arranged outside the laser head, and is attached from below with respect to the bottom surface of the laser head. This observation optical system is non-coaxial with the optical axis of the laser beam, and images the machined surface from diagonally above.

Further, a laser processing apparatus capable of correcting the processing position by laser light is also known.

For example, Patent Document 3 discloses that in a laser machining apparatus for drilling a work, the amount of deviation of the hole is calculated and the angle of the galvano mirror is corrected based on the calculated amount of deviation. Has been done.

Here, the laser processing apparatus according to Patent Document 3 includes an imaging apparatus in which the installation position and the imaging position are fixed. This imaging device images the work so that the pattern formed on the substrate of the work and the holes formed in the film covering the pattern are contained in one captured image. The laser processing apparatus according to Patent Document 3 further includes a control apparatus. This control device can calculate the amount of deviation of the hole based on the captured image generated by the imaging device.

Japanese Unexamined Patent Publication No. 2004-148379 JP 2015-44212 JP-A-2015-006674

However, since the control device disclosed in Patent Document 3 uses the entire captured image including the pattern and the hole, it takes a relatively long time to calculate the deviation amount.

Therefore, the inventors of the present application have come up with the idea of using only a part of the captured image in general, including the calculation of the deviation amount, without using the entire captured image. In this case, the imaging means is not coaxial with the processing laser beam as disclosed in Patent Document 2, but is coaxial with the processing laser beam as disclosed in Patent Document 1. It is conceivable to use a modified imaging means (hereinafter, referred to as a "coaxial camera" as a tentative name). In general, a coaxial camera has a narrow field of view and a high resolution, so that the search process can be performed accurately by using such a coaxial camera.

However, for example, when the area to be searched is wider than the imaging field of view of the coaxial camera, the search processing may not be properly executed outside the range of the imaging field of view. This is inconvenient from the viewpoint of the accuracy of the search process.

The technique disclosed here has been made in view of this point, and the purpose thereof is to improve the accuracy of search processing in a laser processing apparatus provided with an imaging means coaxial with a laser beam for processing. To let you do it.

Specifically, the first aspect of the present disclosure is to generate an excitation light based on an excitation light generation unit that generates excitation light and an excitation light generated by the excitation light generation unit, and emit the laser light. Laser light output unit and a laser light scanning unit that irradiates a work piece with laser light emitted from the laser light output unit and scans two-dimensionally within a processing region set on the surface of the work piece. The present invention relates to a laser processing apparatus including.

According to the first aspect of the present disclosure, the laser processing apparatus has an image pickup optical axis branched from the laser optical path from the laser light output unit to the laser light scanning unit, and via the laser light scanning unit. It has a first imaging unit that generates a first image including at least a part of the processed region by imaging the workpiece, and an imaging optical axis independent of the laser optical path, and the laser. A second imaging unit that generates a second image that has a wider field size than the first imaging unit and includes the entire processed region by imaging the work piece without the intervention of the optical scanning unit, and the above. A display unit for displaying the first or second image, a correction area searched for identifying the positional deviation of the workpiece on the first or second image displayed by the display unit, and a correction area. , The setting unit that sets the search area that defines the range in which the correction area is searched, the image information in the correction area set by the setting unit, and the search area set by the setting unit. It is provided with a storage unit for storing the position information of the image.

Then, the laser processing apparatus includes an image pickup selection unit that selects one of the first and second image pickup units based on the size of the search region set by the setting unit, and the first and second image pickup units. By controlling one of the second image pickup units selected by the image pickup selection unit, a new work piece different from the work piece used for setting the correction area can be referred to as the first or second work piece. The control unit that newly generates an image, the image information stored in the storage unit, and the area corresponding to the search area in the first or second image newly generated by the control unit are extracted. The control unit includes the first or first position deviation detecting unit for detecting the position deviation between the work piece and the new work piece based on the image information. When the first image pickup unit is selected by the image pickup selection unit when the two images are newly generated, the laser light scanning unit is controlled based on the position of the search region stored in the storage unit. In this state, the first image pickup unit newly generates the first image, while the second image pickup section newly generates the second image in the second image pickup section when the second image pickup section is selected by the image pickup selection section. To generate.

Here, the "image information" may be the captured image itself or the edge information extracted from the captured image.

Further, the first imaging unit includes an imaging means coaxial with the laser beam for processing. Although the field of view size of this first imaging unit is narrower than that of the second imaging unit, it can generate a first image in which the processed area is enlarged at a relatively high magnification, or the imaging area is two-dimensionally formed via a laser light scanning unit. You can scan and do it. The first imaging unit is used, for example, to locally magnify and image a part of the processed region.

On the other hand, the second imaging unit comprises an imaging means decoaxialized with the laser beam for processing. Although this second imaging unit cannot perform two-dimensional scanning via the laser light scanning unit, it has a wider field of view than the first imaging unit and generates a second image in which the processed area is imaged in a relatively wide field of view. Can be done. The second imaging unit is used, for example, to image the entire processed region at one time.

According to the above configuration, the setting unit sets a search area that defines a range in which the correction area should be searched. Next, the imaging selection unit selects either one of the first and second imaging units based on the size of the search area set by the setting unit.

Then, the control unit controls one of the first and second image pickup units selected by the image pickup selection unit to control a new work piece different from the work piece used for setting the correction area. A first or second image is newly generated.

In this way, by selecting the imaging unit based on the size of the search area, it is possible to automatically select the imaging unit suitable for the size. By generating an image by the image pickup unit selected in this way and performing a search process using the image, the search process can be executed within the range of the imaging field of view, and the accuracy of the search process is improved. Will be possible.

Further, according to the second aspect of the present disclosure, the laser machining apparatus is detected by a machining setting unit that sets a machining pattern indicating a machining content to be formed in the machining region and the position deviation detection unit. A position correction unit that corrects the position of the processing pattern based on the positional deviation may be further provided.

According to this configuration, the position correction unit corrects the position of the machining pattern based on the position deviation detected by the position deviation detection unit. This is advantageous in improving the processing accuracy of the workpiece.

Further, according to the third aspect of the present disclosure, the setting unit sets a distance measuring position on the first or second image for measuring the distance to the surface of the workpiece, and the above-mentioned The position correction unit corrects the distance measurement position of the workpiece based on the position deviation detected by the position deviation detection unit, and adjusts the focal position of the laser light emitted from the laser light output unit. A focus adjusting unit, a distance measuring light emitting unit that emits distance measuring light for measuring the distance from the laser processing apparatus to the surface of the workpiece, and a distance measuring light emitted by the distance measuring light emitting unit. However, the scanning control unit that controls the laser light scanning unit and the laser light scanning unit that is reflected on the surface of the workpiece so that the distance measuring position corrected by the position correction unit is irradiated. The distance from the laser processing device to the surface of the work piece is determined based on the distance measuring light receiving unit that receives the distance measuring light returned via the above and the receiving position of the distance measuring light in the distance measuring light receiving unit. The distance measuring unit further includes a distance measuring unit for measuring, and the focusing unit is a distance measuring unit in a state where the distance measuring position is corrected by the position correction unit prior to irradiation of the workpiece with laser light. The focal position may be adjusted based on the measurement result of.

According to this configuration, the laser machining apparatus can detect the positional deviation of the workpiece via the positional deviation detecting unit and correct the distance measuring position via the position correcting unit based on the detection result. can. Then, the laser processing apparatus corrects the focal position based on the measurement result by the distance measuring unit in a state where the distance measuring position is corrected by the position correcting unit prior to irradiating the workpiece with the laser beam.

In this way, by adjusting the focal position while the positional deviation of the workpiece is corrected, the machining accuracy can be maintained high even if the workpiece is displaced. ..

Further, according to the fourth aspect of the present disclosure, the laser processing apparatus indicates the first field of view size indicating the field of view size of the first imaging unit and the field of view size of the second imaging unit and the first field of view. An imaging attribute storage unit that stores a second field of view size wider than the size in advance is provided, and the imaging selection unit has the size of the search area and the first or first image based on the storage contents in the imaging attribute storage unit. The second visual field size may be compared, and one of the first and second imaging units may be selected based on the comparison result.

According to this configuration, the imaging selection unit selects the imaging unit by comparing the field of view size of each imaging unit with the size of the search area. This makes it possible to select the imaging unit more appropriately.

Further, according to the fifth aspect of the present disclosure, the image pickup selection unit may select the first image pickup unit when both the first and second visual field sizes are wider than the search area. good.

According to this configuration, when both the first and second imaging units can be selected, the imaging selection unit preferentially selects the first imaging unit. In general, the first imaging unit has a narrower field of view than the second imaging unit, and therefore has excellent resolution. Therefore, by preferentially selecting the first image pickup unit, a finer first image can be used, which is advantageous in improving the accuracy of the search process.

Further, according to the sixth aspect of the present disclosure, at least one of the first and second imaging units has a plurality of imaging modes having different visual field sizes, and the imaging selection unit is the search region. One may be selected from the plurality of imaging modes based on the size.

According to this configuration, it is advantageous to improve the accuracy of the search process.

As described above, according to the laser processing apparatus, the accuracy of the search process can be improved.

FIG. 1 is a diagram illustrating the overall configuration of a laser processing system. FIG. 2 is a block diagram illustrating a schematic configuration of a laser processing apparatus. FIG. 3A is a block diagram illustrating a schematic configuration of a marker head. FIG. 3B is a block diagram illustrating a schematic configuration of a marker head. FIG. 4 is a perspective view illustrating the appearance of the marker head. FIG. 5 is a diagram illustrating the configuration of the laser beam scanning unit. FIG. 6 is a diagram illustrating the configurations of a laser beam guide unit, a laser beam scanning unit, and a distance measuring unit. FIG. 7 is a cross-sectional view illustrating an optical path connecting the laser beam guide unit, the laser beam scanning unit, and the distance measuring unit. FIG. 8 is a perspective view illustrating an optical path connecting the laser beam guide unit, the laser beam scanning unit, and the distance measuring unit. FIG. 9 is a diagram illustrating a triangular ranging method. FIG. 10 is a flowchart showing how to use the laser processing system. FIG. 11 is a flowchart illustrating a procedure for creating print settings, search settings, and distance measurement settings. FIG. 12 is a diagram illustrating the relationship between the machining area and the set surface. FIG. 13 is a diagram illustrating the display contents in the display unit. FIG. 14A is a diagram illustrating a specific procedure for setting search conditions. FIG. 14B is a diagram illustrating a specific procedure for setting search conditions. FIG. 14C is a diagram illustrating a specific procedure for setting search conditions. FIG. 14D is a diagram illustrating a specific procedure for setting search conditions. FIG. 15 is a diagram illustrating a basic concept of an imaging selection process. FIG. 16 is a flowchart illustrating a specific process of the imaging selection process. FIG. 17 is a diagram illustrating a wide-angle mode and a standard mode. FIG. 18 is a diagram illustrating an imaging selection process incorporating a wide-angle mode and a standard mode. FIG. 19A is a diagram illustrating a specific procedure for setting the distance measuring condition. FIG. 19B is a diagram illustrating a specific procedure for setting the distance measuring condition. FIG. 19C is a diagram illustrating a specific procedure for setting the distance measuring condition. FIG. 19D is a diagram illustrating a specific procedure for setting the distance measuring condition. FIG. 20 is a flowchart illustrating an operation procedure of the laser processing apparatus. FIG. 21A is a diagram illustrating a specific procedure of the pattern search. FIG. 21B is a diagram illustrating a specific procedure of the pattern search. FIG. 21C is a diagram illustrating a specific procedure of the pattern search. FIG. 21D is a diagram illustrating a specific procedure of the pattern search. FIG. 21E is a diagram illustrating a specific procedure of the pattern search. FIG. 22 is a diagram illustrating the relationship between the positional deviation of the work and the focal position. FIG. 23 is a diagram illustrating a procedure for selecting a print block to be corrected for misalignment.

Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. The following description is an example.

That is, although the laser marker as an example of the laser processing apparatus will be described in the present specification, the technique disclosed herein can be generally applied to the laser application equipment regardless of the names of the laser processing apparatus and the laser marker.

Further, in the present specification, printing processing will be described as a typical example of processing, but the present invention is not limited to printing processing, and can be used in all processing processing using laser light such as image marking.

<Overall configuration>
FIG. 1 is a diagram illustrating the overall configuration of the laser processing system S, and FIG. 2 is a diagram illustrating a schematic configuration of the laser processing apparatus L in the laser processing system S. The laser processing system S illustrated in FIG. 1 includes a laser processing device L, an operation terminal 800 connected to the laser processing device L, and an external device 900.

Then, the laser processing apparatus L illustrated in FIGS. 1 and 2 irradiates the work W as a work piece with the laser light emitted from the marker head 1 and scans the work W three-dimensionally on the surface of the work W. It is processed by doing so. The "three-dimensional scanning" here means a two-dimensional operation of scanning the irradiation position of the laser beam on the surface of the work W (so-called "two-dimensional scanning") and adjusting the focal position of the laser beam. It refers to a concept that collectively refers to a combination of one-dimensional movement and.

In particular, the laser processing apparatus L according to the present embodiment can emit a laser beam having a wavelength in the vicinity of 1064 nm as a laser beam for processing the work W. This wavelength corresponds to the near infrared (Near-InfraRed: NIR) wavelength range. Therefore, in the following description, the laser beam for processing the work W may be referred to as "near-infrared laser beam" to distinguish it from other laser beams. Of course, laser light having another wavelength may be used for processing the work W.

Further, the laser processing apparatus L according to the present embodiment measures the distance to the work W (height of the work W) via the distance measuring unit 5 built in the marker head 1, and uses the measurement result. The focal position of the near-infrared laser beam can be adjusted.

As shown in FIGS. 1 and 2, the laser processing apparatus L includes a marker head 1 for emitting laser light and a marker controller 100 for controlling the marker head 1.

The marker head 1 and the marker controller 100 are separate bodies in this embodiment, are electrically connected via electrical wiring, and are optically connected via an optical fiber cable.

More generally, one of the marker head 1 and the marker controller 100 can be incorporated into the other and integrated. In this case, the optical fiber cable or the like can be omitted as appropriate.

The operation terminal 800 has, for example, a central processing unit (CPU) and a memory, and is connected to the marker controller 100. The operation terminal 800 functions as a terminal for setting various processing conditions (also referred to as printing conditions) such as print settings and showing information related to laser processing to the user. The operation terminal 800 includes a display unit 801 for displaying information to the user, an operation unit 802 for receiving operation input by the user, and a storage device 803 for storing various information.

Specifically, the display unit 801 is composed of, for example, a liquid crystal display or an organic EL panel. The display unit 801 displays the operating status and processing conditions of the laser processing apparatus L as information related to laser processing. On the other hand, the operation unit 802 is composed of, for example, a keyboard and / or a pointing device. Here, the pointing device includes a mouse and / or a joystick and the like. The operation unit 802 is configured to receive an operation input by the user, and is used to operate the marker head 1 via the marker controller 100.

The operation terminal 800 configured as described above can set the processing conditions in laser processing based on the operation input by the user. The processing conditions include, for example, a character string to be printed on the work W, the contents of figures such as a barcode and a QR code (registered trademark) (marking pattern), and an output required for laser light (target output). , The scanning speed (scanning speed) of the laser beam on the work W, and one or more of them are included.

Further, the processing conditions according to the present embodiment also include conditions and parameters related to the above-mentioned distance measuring unit 5 (hereinafter, these are also referred to as “distance measuring conditions”). Such distance measuring conditions include, for example, data associating a signal indicating a detection result by the distance measuring unit 5 with the distance to the surface of the work W.

The processing conditions set by the operation terminal 800 are output to the marker controller 100 and stored in the condition setting storage unit 102. If necessary, the storage device 803 in the operation terminal 800 may store the processing conditions.

The operation terminal 800 can be integrated by incorporating it into, for example, the marker controller 100. In this case, the name of the control unit or the like is used instead of the “operation terminal”, but at least in the present embodiment, the operation terminal 800 and the marker controller 100 are separated from each other.

The external device 900 is connected to the marker controller 100 of the laser processing device L as needed. In the example shown in FIG. 1, an image recognition device 901 and a programmable logic controller (PLC) 902 are provided as the external device 900.

Specifically, the image recognition device 901 determines, for example, the type and position of the work W transported on the production line. As the image recognition device 901, for example, an image sensor can be used. The PLC902 is used to control the laser machining system S according to a predetermined sequence.

In addition to the above-mentioned devices and devices, the laser processing device L can also be connected to devices for performing operations and controls, computers for performing various other processes, storage devices, peripheral devices, and the like. The connection in this case may be, for example, a serial connection such as IEEE1394, RS-232, RS-422 and USB, or a parallel connection. Alternatively, electrical, magnetic, or optical connections may be employed via networks such as 10BASE-T, 100BASE-TX, 1000BASE-T, and the like. In addition to the wired connection, a wireless LAN such as IEEE802 or a wireless connection using radio waves such as Bluetooth (registered trademark), infrared rays, optical communication, or the like may be used. Further, as a storage medium used for a storage device for exchanging data, storing various settings, and the like, for example, various memory cards, magnetic disks, magneto-optical disks, semiconductor memories, hard disks, and the like can be used.

Hereinafter, a description relating to the hardware configuration of each of the marker controller 100 and the marker head 1 and a configuration relating to the control of the marker head 1 by the marker controller 100 will be described in order.

<Marker controller 100>
As shown in FIG. 2, the marker controller 100 includes a condition setting storage unit 102 that stores the above-mentioned processing conditions, a control unit 101 that controls the marker head 1 based on the processing conditions stored in the condition setting storage unit 102, and laser excitation. It includes an excitation light generation unit 110 that generates light (excitation light).

(Condition setting storage unit 102)
The condition setting storage unit 102 is configured to store the processing conditions set via the operation terminal 800 and output the stored processing conditions to the control unit 101 as needed.

Specifically, the condition setting storage unit 102 is configured by using a volatile memory, a non-volatile memory, a hard disk drive (HDD), a solid state drive (SSD), and the like, and processing conditions. Information indicating the above can be temporarily or continuously stored. When the operation terminal 800 is incorporated in the marker controller 100, the storage device 803 can be configured to also serve as the condition setting storage unit 102.

(Control unit 101)
Based on the processing conditions stored in the condition setting storage unit 102, the control unit 101 includes at least the excitation light generation unit 110 in the marker controller 100, the laser light output unit 2 in the marker head 1, and the laser light guide unit 3. By controlling the laser light scanning unit 4, the distance measuring unit 5, the coaxial camera 6, and the overall camera (non-coaxial camera) 7, the work W is printed.

Specifically, the control unit 101 has a CPU, a memory, and an input / output bus, and receives a signal indicating information input via the operation terminal 800 and a processing condition read from the condition setting storage unit 102. A control signal is generated based on the indicated signal. The control unit 101 controls the printing process on the work W and the measurement of the distance to the work W by outputting the control signal thus generated to each unit of the laser processing device L.

For example, when starting the machining of the work W, the control unit 101 reads the target output stored in the condition setting storage unit 102 and outputs the control signal generated based on the target output to the excitation light source drive unit 112. , Control the generation of laser excitation light.

Further, when the work W is actually processed, the control unit 101 reads, for example, a processing pattern (marking pattern) stored in the condition setting storage unit 102, and lasers a control signal generated based on the processing pattern. It is output to the optical scanning unit 4 and two-dimensionally scanned the near-infrared laser light.

In this way, the control unit 101 can control the laser light scanning unit 4 so as to realize two-dimensional scanning of the near-infrared laser light. The control unit 101 is an example of the “scanning control unit” in the present embodiment.

(Excitation light generator 110)
The excitation light generation unit 110 is optically coupled to the excitation light source 111 that generates laser light according to the drive current, the excitation light source drive unit 112 that supplies the drive current to the excitation light source 111, and the excitation light source 111. It is provided with an excitation light condensing unit 113. The excitation light source 111 and the excitation light condensing unit 113 are fixed in an excitation casing (not shown). Although details are omitted, the excitation casing is made of a metal such as copper having excellent thermal conductivity, and heat can be efficiently dissipated from the excitation light source 111.

Hereinafter, each part of the excitation light generation part 110 will be described in order.

The excitation light source drive unit 112 supplies a drive current to the excitation light source 111 based on the control signal output from the control unit 101. Although details are omitted, the excitation light source drive unit 112 determines the drive current based on the target output determined by the control unit 101, and supplies the determined drive current to the excitation light source 111.

The excitation light source 111 is supplied with a drive current from the excitation light source drive unit 112, and oscillates a laser beam corresponding to the drive current. For example, the excitation light source 111 is composed of a laser diode (LD) or the like, and an LD array or LD bar in which a plurality of LD elements are linearly arranged can be used. When an LD array or LD bar is used as the excitation light source 111, the laser light oscillated from each element is output in a line shape and incident on the excitation light condensing unit 113.

The excitation light condensing unit 113 collects the laser light output from the excitation light source 111 and outputs it as laser excitation light (excitation light). For example, the excitation light condensing unit 113 is composed of a focusing lens or the like, and has an incident surface on which the laser light is incident and an exit surface on which the laser excitation light is output. The excitation light condensing unit 113 is optically coupled to the marker head 1 via the above-mentioned optical fiber cable. Therefore, the laser excitation light output from the excitation light condensing unit 113 is guided to the marker head 1 via the optical fiber cable.

The excitation light generation unit 110 can be an LD unit or an LD module in which the excitation light source driving unit 112, the excitation light source 111, and the excitation light condensing unit 113 are incorporated in advance. Further, the excitation light emitted from the excitation light generation unit 110 (specifically, the laser excitation light output from the excitation light condensing unit 113) can be unpolarized, thereby changing the polarization state. There is no need to consider it, which is advantageous in terms of design. In particular, regarding the configuration around the excitation light source 111, the LD unit itself, which bundles and outputs the light obtained from each of the LD arrays in which dozens of LD elements are arranged by an optical fiber, has a mechanism for unpolarizing the output light. It is preferable to prepare.

(Other components)
The marker controller 100 also has a distance measuring unit 103 that measures the distance to the work W via the distance measuring unit 5. The distance measuring unit 103 is electrically connected to the distance measuring unit 5, and is a signal related to the measurement result by the distance measuring unit 5 (at least, a signal indicating the light receiving position of the distance measuring light in the distance measuring light receiving unit 5B). Is said to be receivable.

Further, as will be described later, the laser processing apparatus L according to the present embodiment includes a coaxial camera 6 and an overall camera 7 as a non-coaxial camera. The laser processing device L can image the surface of the work W by operating at least one of the coaxial camera 6 and the wide area camera 7.

The marker controller 100 has a distance measurement unit 103, a feature amount extraction unit 104, a position deviation detection unit 105, and a position correction unit 108 in order to perform processing related to the captured image Pw generated by the coaxial camera 6 and the overall camera 7. And an image pickup selection unit 109.

The marker controller 100 also includes a setting unit 107 for setting information related to the marking pattern. The setting contents in the setting unit 107 are read and used by the control unit 101 as the scanning control unit.

The distance measurement unit 103, the feature amount extraction unit 104, the position deviation detection unit 105, the position correction unit 108, and the image pickup selection unit 109 may be configured by the control unit 101. For example, the control unit 101 may also serve as the distance measurement unit 103. Further, the position deviation detecting unit 105 may also serve as the position correction unit 108 or the like. Details of the distance measurement unit 103, the feature amount extraction unit 104, the position deviation detection unit 105, the position correction unit 108, and the imaging selection unit 109 will be described later.

<Marker head 1>
As described above, the laser excitation light generated by the excitation light generation unit 110 is guided to the marker head 1 via the optical fiber cable. The marker head 1 irradiates the surface of the work W with the laser light output unit 2 that amplifies and generates the laser light based on the laser excitation light and outputs the laser light, and the laser light output from the laser light output unit 2. Distance measurement that is projected and received through the laser light scanning unit 4 that performs dimensional scanning, the laser light guiding unit 3 that constitutes the optical path from the laser light output unit 2 to the laser light scanning unit 4, and the laser light scanning unit 4. It includes a distance measuring unit 5 for measuring the distance to the surface of the work W based on light, a coaxial camera 6 for photographing the surface of the work W, and an overall camera 7.

Here, the laser light guide unit 3 according to the present embodiment not only constitutes an optical path, but also has a Z scanner (focus adjustment unit) 33 that adjusts the focal position of the laser light, and a guide light source 36 that emits guide light. A plurality of members such as a coaxial camera 6 that captures an image of the surface of the work W are combined.

Further, the laser light guide unit 3 further joins the upstream side merging mechanism 31 for merging the near-infrared laser light output from the laser light output unit 2 and the guide light emitted from the guide light source 36, and the laser light scanning unit 4. It has a downstream merging mechanism 35 that merges the guided laser beam and the ranging light projected from the ranging unit 5.

3A to 3B are block diagrams illustrating the schematic configuration of the marker head 1, and FIG. 4 is a perspective view illustrating the appearance of the marker head 1. Of FIGS. 3A to 3B, FIG. 3A illustrates a case where the work W is processed by using a near-infrared laser beam, and FIG. 3B shows a case where the distance to the surface of the work W is measured by using the distance measuring unit 5. Is illustrated.

As illustrated in FIGS. 3A to 4, the marker head 1 includes at least a housing 10 in which a laser light output unit 2, a laser light guide unit 3, a laser light scanning unit 4, and a distance measuring unit 5 are provided inside. ing. The housing 10 has a substantially rectangular outer shape as shown in FIG. The lower surface of the housing 10 is partitioned by a plate-shaped bottom plate 10a. The bottom plate 10a is provided with a transmission window 19 for emitting laser light from the marker head 1 to the outside of the marker head 1. The transmission window 19 is configured by fitting a plate-shaped transparent member capable of transmitting near-infrared laser light, guide light, and ranging light into a through hole penetrating the bottom plate 10a in the plate thickness direction.

In the following description, the longitudinal direction of the housing 10 in FIG. 4 is simply referred to as the "longitudinal direction" or the "front-back direction", and the lateral direction of the housing 10 in the figure is simply referred to as the "minor direction" or It may be called "left-right direction". Similarly, the height direction of the housing 10 in FIG. 4 may be simply referred to as "height direction" or "vertical direction".

FIG. 5 is a perspective view illustrating the configuration of the laser beam scanning unit 4. Further, FIG. 6 is a cross-sectional view illustrating the configuration of the laser beam guiding unit 3, the laser beam scanning unit 4, and the ranging unit 5, and FIG. 7 is a cross-sectional view illustrating the configuration of the laser beam guiding unit 3, the laser beam scanning unit 4, and the ranging unit 5. FIG. 8 is a cross-sectional view illustrating the optical path connecting the laser beam guide unit 3, the laser beam scanning unit 4, and the distance measuring unit 5. FIG.

As illustrated in FIGS. 5 to 6, a partition portion 11 is provided inside the housing 10. The internal space of the housing 10 is partitioned into one side and the other side in the longitudinal direction by the partition portion 11.

Specifically, the partition portion 11 is formed in a flat plate shape extending in a direction perpendicular to the longitudinal direction of the housing 10. Further, the partition portion 11 is arranged so as to be closer to one side in the longitudinal direction (front side in FIG. 4) than the central portion of the housing 10 in the same direction in the longitudinal direction of the housing 10.

Therefore, the space partitioned on one side in the longitudinal direction in the housing 10 has a shorter dimension in the longitudinal direction than the space partitioned on the other side in the longitudinal direction (rear side in FIG. 4). Hereinafter, the space in the housing 10 partitioned on the other side in the longitudinal direction is referred to as the first space S1, while the space partitioned on one side in the longitudinal direction is referred to as the second space S2.

In this embodiment, the laser light output unit 2, some parts of the laser light guide unit 3, the laser light scanning unit 4, and the distance measuring unit 5 are arranged inside the first space S1. On the other hand, inside the second space S2, the main parts of the laser beam guiding unit 3 are arranged.

Specifically, the first space S1 is divided into a space on one side (left side in FIG. 4) and a space on the other side (right side in FIG. 4) in the lateral direction by a substantially flat base plate 12. .. In the former space, the parts constituting the laser beam output unit 2 are mainly arranged.

More specifically, among the components constituting the laser beam output unit 2, the optical component 21 such as an optical lens and an optical crystal, which is required to be sealed as airtightly as possible, is the one in the short direction in the first space S1. In the space on the side, it is arranged inside the accommodation space surrounded by the base plate 12 and the like.

On the other hand, among the parts constituting the laser beam output unit 2, for parts that are not necessarily required to be sealed, such as electrical wiring and the heat sink 22 shown in FIG. 5, the base plate 12 is sandwiched between the optical parts 21. It is arranged on the opposite side (the other side in the lateral direction in the first space S1).

Further, as illustrated in FIGS. 5 and 6, the laser beam scanning unit 4 can be arranged on one side in the lateral direction with the base plate 12 interposed therebetween, similarly to the optical component 21 in the laser beam output unit 2. .. Specifically, the laser light scanning unit 4 according to this embodiment is arranged adjacent to the above-mentioned partition portion 11 in the longitudinal direction and along the inner bottom surface of the housing 10 in the vertical direction.

Further, as shown in FIG. 6, the distance measuring unit 5 is arranged in the space on the other side in the lateral direction in the first space S1 like the heat sink 22 in the laser beam output unit 2.

Further, the parts constituting the laser beam guide unit 3 are mainly arranged in the second space S2. In this embodiment, most of the parts constituting the laser beam guide portion 3 are housed in a space surrounded by the partition portion 11 and the cover member 17 that partitions the front surface of the housing 10.

Among the parts constituting the laser beam guide unit 3, the downstream side merging mechanism 35 is arranged at a portion near the partition portion 11 in the first space S1 (see FIG. 5). That is, in this embodiment, the downstream merging mechanism 35 is located near the boundary between the first space S1 and the second space S2.

Further, the base plate 12 is formed with a through hole (not shown) that penetrates the base plate 12 in the plate thickness direction. Through this through hole, the laser beam guide unit 3, the laser beam scanning unit 4, and the distance measuring unit 5 are optically coupled.

Hereinafter, the configurations of the laser light output unit 2, the laser light guide unit 3, the laser light scanning unit 4, and the distance measuring unit 5 will be described in order.

(Laser beam output unit 2)
The laser light output unit 2 generates a near-infrared laser light for printing processing based on the laser excitation light generated by the excitation light generation unit 110, and transfers the near-infrared laser light to the laser light guide unit 3. It is configured to output.

Specifically, the laser light output unit 2 generates laser light having a predetermined wavelength based on the laser excitation light, and amplifies the laser light to emit near-infrared laser light from the laser oscillator 21a and the laser oscillator 21a. It includes a beam sampler 21b for separating a part of the oscillated near-infrared laser light, and a power monitor 21c for incident the near-infrared laser light separated by the beam sampler 21b.

Although details are omitted, the laser oscillator 21a according to the present embodiment is for pulse-oscillating a laser medium that emits a laser beam by performing induced emission corresponding to the laser excitation light and a laser beam emitted from the laser medium. It has a Q switch and a mirror that resonates the laser beam pulse-oscillated by the Q switch.

In particular, in this embodiment, a rod-shaped Nd: YVO ₄ (yttrium vanadate) is used as the laser medium. As a result, the laser oscillator 21a can emit a laser beam having a wavelength in the vicinity of 1064 nm (the above-mentioned near-infrared laser beam) as the laser beam. However, the present invention is not limited to this example, and as another laser medium, for example, rare earth-doped YAG, YLF, GdVO _{4 and the} like can be used. Various solid-state laser media can be used depending on the application of the laser processing apparatus L.

Further, it is also possible to combine a solid-state laser medium with a wavelength conversion element to convert the wavelength of the output laser light into an arbitrary wavelength. Further, a so-called fiber laser in which a fiber is used as an oscillator instead of the bulk may be used as the solid-state laser medium.

Further, a solid-state laser medium such as Nd: YVO ₄ and a fiber may be combined to form a laser oscillator 21a. In that case, as in the case of using a solid-state laser medium, a laser with a short pulse width is emitted to suppress thermal damage to the work W, while high output is realized as in the case of using a fiber. It is possible to realize faster printing processing.

The power monitor 21c detects the output of the near-infrared laser beam. The power monitor 21c is electrically connected to the marker controller 100, and its detection signal can be output to the control unit 101 or the like.

(Laser beam guide 3)
The laser light guide unit 3 forms at least a part of the laser light path P that guides the near-infrared laser light emitted from the laser light output unit 2 to the laser light scanning unit 4. The laser light guide unit 3 includes a Z scanner (focus adjustment unit) 33, a guide light source (guide light emission unit) 36, and the like, in addition to the bend mirror 34 for forming such a laser optical path P. All of these parts are provided inside the housing 10 (mainly in the second space S2).

The near-infrared laser light incident from the laser light output unit 2 is reflected by the bend mirror 34 and passes through the laser light guide unit 3. On the way to the bend mirror 34, a Z scanner 33 for adjusting the focal position of the near-infrared laser beam is arranged. The near-infrared laser light that has passed through the Z scanner 33 and is reflected by the bend mirror 34 is incident on the laser light scanning unit 4.

The laser optical path P composed of the laser light guide unit 3 can be divided into two with the Z scanner 33 as the focus adjustment unit as a boundary. Specifically, the laser optical path P composed of the laser light guide unit 3 includes an upstream optical path Pu from the laser light output unit 2 to the Z scanner 33 and a downstream optical path Pd from the Z scanner 33 to the laser light scanning unit 4. Can be divided into.

More specifically, the upstream optical path Pu is provided inside the housing 10 and reaches the Z scanner 33 from the laser beam output unit 2 via the upstream side merging mechanism 31 described above.

On the other hand, the downstream optical path Pd is provided inside the housing 10, and the laser light scanning unit 4 passes through the Z scanner 33, the bend mirror 34, and the downstream merging mechanism 35 in this order. It leads to the first scanner 41.

As described above, inside the housing 10, the upstream side merging mechanism 31 is provided in the middle of the upstream side optical path Pu, and the downstream side merging mechanism 35 is provided in the middle of the downstream side optical path Pd.

Hereinafter, the configurations related to the laser beam guide unit 3 will be described in order.

-Guide light source 36-
The guide light source 36 is provided in the second space S2 inside the housing 10, and emits a guide light for projecting a predetermined processing pattern onto the surface of the work W. The wavelength of the guide light is set so as to fall within the visible light range. As an example, the guide light source 36 according to the present embodiment emits a red laser beam having a wavelength in the vicinity of 655 nm as the guide light. Therefore, when the guide light is emitted from the marker head 1, the user can visually recognize the guide light.

In the present embodiment, the wavelength of the guide light is set to be at least different from the wavelength of the near-infrared laser light. Further, as will be described later, the ranging light emitting unit 5A in the ranging unit 5 emits ranging light having a wavelength different from that of the guide light and the near-infrared laser light. Therefore, the ranging light, the guide light, and the laser light have different wavelengths from each other.

Specifically, the guide light source 36 is arranged at substantially the same height as the upstream side merging mechanism 31 in the second space S2, and emits a visible light laser (guide light) toward the inside of the housing 10 in the lateral direction. It can be emitted. The guide light source 36 is also arranged so that the optical axis of the guide light emitted from the guide light source 36 intersects with the upstream merging mechanism 31.

The term "substantially the same height" as used herein means that the height positions are substantially the same when viewed from the bottom plate 10a forming the lower surface of the housing 10. In other descriptions, it also refers to the height seen from the bottom plate 10a.

Therefore, for example, when the guide light is emitted from the guide light source 36 in order to make the user visually recognize the processing pattern by the near infrared laser light, the guide light reaches the upstream side merging mechanism 31. The upstream side merging mechanism 31 has a dichroic mirror (not shown) as an optical component. As will be described later, this dichroic mirror reflects near-infrared laser light while transmitting guide light. As a result, the guide light transmitted through the dichroic mirror and the near-infrared laser light reflected by the mirror merge and become coaxial.

The guide light source 36 according to the present embodiment is configured to emit guide light based on the control signal output from the control unit 101.

-Upstream merging mechanism 31-
The upstream side merging mechanism 31 merges the guide light emitted from the guide light source 36 as the guide light emitting portion with the upstream side optical path Pu. By providing the upstream side merging mechanism 31, the guide light emitted from the guide light source 36 and the near infrared laser light in the upstream side optical path Pu can be made coaxial.

As described above, the wavelength of the guide light is set to be at least different from the wavelength of the near-infrared laser light. Therefore, the upstream side merging mechanism 31 can be configured by using, for example, a dichroic mirror as described above. The near-infrared laser light and the guide light coaxialized by the dichroic mirror propagate downward, pass through the Z scanner 33, and reach the bend mirror 34.

-Z scanner 33-
The Z scanner 33 as the focus adjustment unit is arranged in the middle of the optical path formed by the laser light guide unit 3, and can adjust the focal position of the near-infrared laser light emitted from the laser light output unit 2. ..

Specifically, the Z scanner 33 is provided inside the housing 10 in the middle of the optical path from the upstream side merging mechanism 31 as the guide light merging mechanism to the laser light scanning unit 4 in the laser optical path P.

Specifically, as shown in FIGS. 3A to 3B, the Z scanner 33 according to the present embodiment passes through the incident lens 33a that transmits the near-infrared laser light emitted from the laser light output unit 2 and the incident lens 33a. A collimating lens 33b that passes the near-infrared laser light, an emitting lens 33c that passes the near-infrared laser light that has passed through the incident lens 33a and the collimating lens 33b, and a lens driving unit 33d that moves the incident lens 33a. It has a lens 33a, a collimating lens 33b, and a casing 33e for accommodating the exit lens 33c.

The incident lens 33a is made of a plano-concave lens, and the collimating lens 33b and the emitting lens 33c are made of a plano-convex lens. The incident lens 33a, the collimating lens 33b, and the emitting lens 33c are arranged so that their optical axes are coaxial with each other.

Further, in the Z scanner 33, the lens driving unit 33d moves the incident lens 33a along the optical axis. As a result, the relative distance between the incident lens 33a and the emitted lens 33c is changed while keeping the optical axes of the incident lens 33a, the collimating lens 33b, and the emitting lens 33c coaxial with each other with respect to the near-infrared laser light passing through the Z scanner 33. can do. As a result, the focal position of the near-infrared laser beam applied to the work W changes.

Hereinafter, each part constituting the Z scanner 33 will be described in more detail.

The casing 33e has a substantially cylindrical shape. As shown in FIGS. 3A to 3B, openings 33f for passing near-infrared laser light are formed at both ends of the casing 33e. Inside the casing 33e, the incident lens 33a, the collimating lens 33b, and the emitting lens 33c are arranged in this order in the vertical direction.

Among the incident lens 33a, the collimating lens 33b, and the emitting lens 33c, the collimating lens 33b and the emitting lens 33c are fixed inside the casing 33e. On the other hand, the incident lens 33a is provided so as to be movable in the vertical direction. The lens driving unit 33d has, for example, a motor, and moves the incident lens 33a in the vertical direction. As a result, the relative distance between the incident lens 33a and the outgoing lens 33c is changed.

For example, it is assumed that the distance between the incident lens 33a and the outgoing lens 33c is adjusted to be relatively short by the lens driving unit 33d. In this case, since the focusing angle of the near-infrared laser beam passing through the emitting lens 33c is relatively small, the focal position of the near-infrared laser beam is moved away from the transmission window 19 of the marker head 1.

On the other hand, it is assumed that the distance between the incident lens 33a and the outgoing lens 33c is adjusted to be relatively long by the lens driving unit 33d. In this case, since the focusing angle of the near-infrared laser beam passing through the emitting lens 33c becomes relatively large, the focal position of the near-infrared laser beam approaches the transmission window 19 of the marker head 1.

In the Z scanner 33, of the incident lens 33a, the collimating lens 33b, and the emitting lens 33c, the incident lens 33a is fixed inside the casing 33e so that the collimating lens 33b and the emitting lens 33c can be moved in the vertical direction. good. Alternatively, the incident lens 33a, the collimating lens 33b, and the emitting lens 33c may all be movable in the vertical direction.

In this way, the Z scanner 33 as the focus adjusting unit functions as a means for scanning the near-infrared laser beam in the vertical direction. Hereinafter, the scanning direction by the Z scanner 33 may be referred to as "Z direction".

The near-infrared laser light passing through the Z scanner 33 is coaxial with the guide light emitted from the guide light source 36, as described above. Therefore, by operating the Z scanner 33, not only the near-infrared laser light but also the focal position of the guide light can be adjusted.

The Z-scanner 33 according to the present embodiment, particularly the lens driving unit 33d in the Z-scanner 33, is configured to operate based on the control signal output from the control unit 101.

-Bend mirror 34-
The bend mirror 34 is provided in the middle of the downstream optical path Pd, and is arranged so as to bend the optical path Pd and direct it rearward. As shown in FIG. 6, the bend mirror 34 is arranged at substantially the same height as the optical member 35a in the downstream merging mechanism 35, and reflects the near-infrared laser light and the guide light that have passed through the Z scanner 33. Can be done.

The near-infrared laser light and the guide light reflected by the bend mirror 34 propagate backward, pass through the downstream merging mechanism 35, and reach the laser light scanning unit (specifically, the first scanner 41) 4. ..

-Downstream side merging mechanism 35-
The downstream side merging mechanism 35 guides the distance measuring light emitted from the distance measuring light emitting unit 5A in the distance measuring unit 5 to the work W via the laser light scanning unit 4 by merging with the above-mentioned downstream side optical path Pd. .. In addition, the downstream side merging mechanism 35 guides the distance measuring light reflected by the work W and returning to the laser light scanning unit 4 and the downstream side optical path Pd in the order of the distance measuring light receiving unit 5B in the distance measuring unit 5.

By providing the downstream side merging mechanism 35, the distance measuring light emitted from the distance measuring light emitting unit 5A can be made coaxial with the near infrared laser light and the guide light in the downstream side optical path Pd. At the same time, by providing the downstream side merging mechanism 35, among the ranging light emitted from the marker head 1 and reflected by the work W, the ranging light incident on the marker head 1 is guided to the ranging light receiving unit 5B. be able to.

As described above, the wavelength of the ranging light is set to be different from the wavelength of the near-infrared laser light and the guide light. Therefore, the downstream side merging mechanism 35 can be configured by using, for example, a dichroic mirror, similarly to the upstream side merging mechanism 31.

Specifically, the downstream merging mechanism 35 according to the present embodiment has a dichroic mirror 35a that transmits one of the ranging light and the guide light and reflects the other (see FIGS. 6 and 7). More specifically, the dichroic mirror 35a is arranged at substantially the same height as the bend mirror 34 and behind the bend mirror 34, and is arranged in the space on the left side in the lateral direction in the housing 10.

As shown in FIG. 6 and the like, the dichroic mirror 35a is also fixed in a posture in which the mirror surface on one side thereof faces the bend mirror 34 and the mirror surface on the other side faces the base plate 12. Therefore, the near-infrared laser light and the guide light are incident on the mirror surface on one side of the dichroic mirror 35a, while the ranging light is incident on the mirror surface on the other side.

The dichroic mirror 35a according to the present embodiment can reflect the ranging light and transmit the near-infrared laser light and the guide light. As a result, for example, when the distance measuring light emitted from the distance measuring unit 5 is incident on the dichroic mirror 35a, the distance measuring light is merged with the downstream optical path Pd and made coaxial with the near infrared laser light and the guide light. Can be done. The near-infrared laser light, the guide light, and the ranging light thus coaxialized reach the first scanner 41 as shown in FIGS. 3A to 3B.

On the other hand, the ranging light reflected by the work W reaches the downstream optical path Pd by returning to the laser beam scanning unit 4. The ranging light returned to the downstream optical path Pd is reflected by the dichroic mirror 35a in the downstream merging mechanism 35 and reaches the ranging unit 5.

As shown in FIG. 7, both the distance measuring light incident on the dichroic mirror 35a from the distance measuring unit 5 and the distance measuring light reflected by the dichroic mirror 35a and incident on the distance measuring unit 5 are housings. It propagates along the left-right direction (the lateral direction of the housing 10) when the 10 is viewed in a plan view.

(Laser beam scanning unit 4)
As shown in FIG. 3A, the laser beam scanning unit 4 irradiates the work W with a laser beam (near infrared laser beam) emitted from the laser beam output unit 2 and guided by the laser beam guiding unit 3, and the work W thereof is irradiated with the laser beam. It is configured to perform a two-dimensional scan on the surface of the work W.

In the example shown in FIG. 5, the laser light scanning unit 4 is configured as a so-called biaxial galvano scanner. That is, the laser light scanning unit 4 includes a first scanner 41 for scanning the near-infrared laser light incident from the laser light guiding unit 3 in the first direction, and a near-infrared laser scanned by the first scanner 41. It has a second scanner 42 for scanning light in a second direction.

Here, the second direction refers to a direction substantially orthogonal to the first direction. Therefore, the second scanner 42 can scan the near-infrared laser beam in a direction substantially orthogonal to the first scanner 41. In the present embodiment, the first direction is equal to the front-rear direction (longitudinal direction of the housing 10), and the second direction is equal to the left-right direction (short direction of the housing 10). Hereinafter, the first direction is referred to as "X direction", and the second direction orthogonal to this is referred to as "Y direction". Both the X and Y directions are orthogonal to the Z direction described above.

The first scanner 41 has a first mirror 41a at its tip. The first mirror 41a is arranged at substantially the same height as the bend mirror 34 and the optical member 35a and behind the optical member 35a. Therefore, as shown in FIG. 5, the bend mirror 34, the optical member 35a, and the first mirror 41a are arranged in a row along the front-rear direction (longitudinal direction of the housing 10).

The first mirror 41a is also rotationally driven by a motor (not shown) built into the first scanner 41. This motor can rotate the first mirror 41a around a rotation axis extending in the vertical direction. By adjusting the rotational posture of the first mirror 41a, the reflection angle of the near-infrared laser light by the first mirror 41a can be adjusted.

Similarly, the second scanner 42 has a second mirror 42a at its tip. The second mirror 42a is arranged at substantially the same height as the first mirror 41a in the first scanner 41 and to the right of the first mirror 41a. Therefore, as shown in FIG. 6, the first mirror 41a and the second mirror 42a are arranged along the left-right direction (the lateral direction of the housing 10).

The second mirror 42a is also rotationally driven by a motor (not shown) built into the second scanner 42. This motor can rotate the second mirror 42a around a rotation axis extending in the front-rear direction. By adjusting the rotational posture of the second mirror 42a, the reflection angle of the near-infrared laser light by the second mirror 42a can be adjusted.

Therefore, when the near-infrared laser light is incident on the laser light scanning unit 4 from the downstream side merging mechanism 35, the near-infrared laser light is transmitted to the first mirror 41a in the first scanner 41 and the second mirror in the second scanner 42. It is reflected in order by the 42a and is emitted to the outside of the marker head 1 through the transmission window 19.

At that time, by operating the motor of the first scanner 41 and adjusting the rotational posture of the first mirror 41a, it becomes possible to scan the near-infrared laser beam in the first direction on the surface of the work W. .. At the same time, by operating the motor of the second scanner 42 to adjust the rotational posture of the second mirror 42a, it becomes possible to scan the near-infrared laser beam in the second direction on the surface of the work W.

Further, as described above, the laser beam scanning unit 4 is provided with not only the near-infrared laser beam but also the guide light that has passed through the optical member 35a of the downstream merging mechanism 35 or the distance measuring light reflected by the member 35a. Will also be incident. The laser light scanning unit 4 according to the present embodiment can two-dimensionally scan the incident guide light or ranging light by operating the first scanner 41 and the second scanner 42, respectively.

The rotational posture that the first mirror 41a and the second mirror 42a can take is basically that when the near-infrared laser light is reflected by the second mirror 42a, the reflected light passes through the transmission window 19. It is set within such a range (see also FIGS. 7 to 8).

In this way, the laser light scanning unit 4 according to the present embodiment is electrically controlled by the control unit 101 as a scanning control unit, so that the near-infrared laser light is applied to the processing region R1 set on the surface of the work W. Can be irradiated to form a predetermined processing pattern (marking pattern) in the processing region R1.

(Coaxial camera 6)
The coaxial camera 6 has an imaging optical axis A1 branched from the laser optical path P from the laser light output unit 2 to the laser light scanning unit 4 (see FIGS. 3A and 3B). The coaxial camera 6 can generate an image Pw including at least a part of the processing area R1 by photographing the work W through the laser light scanning unit 4. The coaxial camera 6 is an example of the “first imaging unit” in the present embodiment.

Hereinafter, among the captured image Pw, the captured image Pw generated by the coaxial camera 6 as the first imaging unit is referred to as a “coaxial image”, and the reference numeral “Pw1” is attached thereto. The coaxial image Pw1 is an example of the “first image”.

The coaxial camera 6 is configured as an imaging means coaxial with a near-infrared laser beam for processing. Although the coaxial camera 6 has a narrower field of view than the wide-area camera 7, it can generate a coaxial image Pw1 in which the processing region R1 is magnified at a relatively high magnification as an image captured image Pw, or via a laser light scanning unit 4. The imaging area can be scanned in two dimensions. The coaxial camera 6 is used, for example, to locally magnify and image a part of the processing region R1.

The captured image Pw generated by the coaxial camera 6 can be displayed on the display unit 801 in a state in which at least a part thereof is enlarged / reduced.

The coaxial camera 6 according to the present embodiment is built in the housing 10. Specifically, the coaxial camera 6 is arranged at substantially the same height as the bend mirror 34 in the laser beam guide unit 3. The coaxial camera 6 receives the reflected light incident on the laser light guide unit 3 from the laser light scanning unit 4. The coaxial camera 6 is configured such that the reflected light reflected at the printing point of the work W is incident on the bend mirror 34. The coaxial camera 6 can image the surface of the work W by forming an image of the reflected light thus incident. The layout of the coaxial camera 6 can be changed as appropriate. For example, the heights of the coaxial camera 6 and the bend mirror 34 may be different from each other.

The reflected light used by the coaxial camera 6 for imaging is branched and propagated from the downstream optical path Pd described above. Therefore, by appropriately operating the laser light scanning unit 4, the processing region R1 illustrated in FIG. 12 can be scanned two-dimensionally.

The coaxial camera 6 according to the present embodiment is configured to operate based on the control signal output from the control unit 101, similarly to the guide light source 36 and the like.

(Overall camera 7)
The overall camera 7 has an imaging optical axis A2 independent of the laser optical path P (see FIG. 12). By imaging the work W without the intervention of the laser light scanning unit 4, the overall camera 7 generates an image Pw that has a wider field of view than the image generated by the coaxial camera 6 and includes the entire processing region R1. can do. The overall camera 7 is an example of the “second imaging unit” in the present embodiment.

Hereinafter, among the captured image Pw, the captured image Pw generated by the overall camera 7 as the second imaging unit is referred to as an “overall image”, and the reference numeral “Pw2” is attached thereto. The whole image Pw2 is an example of the "second image".

The overall camera 7 is configured as an imaging means decoaxialized with a near-infrared laser beam for processing. Although the whole camera 7 cannot perform two-dimensional scanning via the laser light scanning unit 4, it has a wider field of view than the coaxial camera 6, and the whole image Pw2 obtained by capturing the processing region R1 in a relatively wide field of view as the captured image Pw. Can be generated. The whole camera 7 is used, for example, to take an image of the entire processing region R1 at one time.

The captured image Pw generated by the whole camera 7 can be displayed on the display unit 801 in a state in which at least a part thereof is enlarged / reduced. The display unit 801 displays the captured image Pw generated by the entire camera 7 and the captured image Pw generated by the coaxial camera 6 side by side, or selectively selects one of the two types of captured images Pw. Can be displayed and displayed.

The overall camera 7 according to the present embodiment is arranged directly above the transmission window 19, and is fixed in a posture in which the image pickup lens is directed downward. As described above, the imaging optical axis A2 of the overall camera 7 is not coaxial with the optical axis Az of the near-infrared laser beam described above (see FIGS. 3A, 3B and 12).

(Distance measuring unit 5)
As shown in FIG. 3B, the ranging unit 5 projects the ranging light through the laser beam scanning unit 4 and irradiates the surface of the work W with the ranging light. The ranging unit 5 also receives the ranging light reflected by the surface of the work W via the laser beam scanning unit 4.

The ranging unit 5 is mainly classified into a module for projecting the ranging light and a module for receiving the ranging light. Specifically, the distance measuring unit 5 includes a distance measuring light emitting unit 5A configured as a module for projecting distance measuring light, and a distance measuring light receiving unit configured as a module for receiving distance measuring light. It is equipped with 5B.

Of these, the ranging light emitting unit 5A is provided inside the housing 10, and the ranging light for measuring the distance from the marker head 1 to the surface of the work W in the laser processing apparatus L is the laser beam. It emits light toward the scanning unit 4.

On the other hand, the distance measuring light receiving unit 5B is provided inside the housing 10 like the distance measuring light emitting unit 5A, and is reflected on the surface of the work W to be reflected on the surface of the work W, and the laser light scanning unit 4 and the downstream side merging mechanism 35. Receives the range-finding light returned via.

Further, the distance measuring unit 5 includes a support base 50 that supports the distance measuring light emitting unit 5A and the distance measuring light receiving unit 5B from below, and is fixed to the inside of the housing 10 via the support base 50. There is.

As described above, the distance measuring unit 5 is provided in the space on the other side in the lateral direction in the first space S1. As shown in FIG. 7, the distance measuring unit 5 emits the distance measuring light forward along the longitudinal direction of the housing 10 and receives the ranging light propagating substantially rearward along the same longitudinal direction.

Further, the distance measuring unit 5 is optically coupled to the laser beam guiding unit 3 via the above-mentioned optical member 35a. As described above, the distance measuring unit 5 projects the distance measuring light along the longitudinal direction of the housing 10. On the other hand, the optical member 35a reflects the ranging light propagating along the lateral direction of the housing 10 instead of the longitudinal direction.

Therefore, a bend mirror 59 is provided inside the housing 10 in order to form an optical path connecting the distance measuring unit 5 and the optical member 35a (see FIGS. 6 and 7).

Therefore, the ranging light incident on the bend mirror 59 from the ranging light emitting unit 5A is incident on the optical member 35a reflected by the mirror 59. On the other hand, the distance measuring light returned to the laser light scanning unit 4 and reflected by the optical member 35a is incident on the bend mirror 59, and is reflected by the mirror 59 and incident on the distance measuring light receiving unit 5B.

Hereinafter, the configurations of the respective parts forming the distance measuring unit 5 will be described in order.

-Distance measuring light emitting part 5A-
The ranging light emitting unit 5A is provided inside the housing 10, and is configured to emit ranging light for measuring the distance from the marker head 1 in the laser processing apparatus L to the surface of the work W. ing.

Specifically, the distance measuring light emitting unit 5A is a pair of the distance measuring light source 51 and the light projecting lens 52 described above, a casing 53 accommodating them, and a pair of distance measuring lights focused by the light projecting lens 52. It has guide plates 54L and 54R. The distance measuring light source 51, the light projecting lens 52, and the guide plates 54L and 54R are arranged in order from the rear side of the housing 10, and the arrangement direction thereof is substantially the same as the longitudinal direction of the housing 10.

The casing 53 is formed in a tubular shape extending along the longitudinal direction of the housing 10 and the support base 50, and the ranging light source 51 is formed on one side in the same direction, that is, at one end corresponding to the rear side of the housing 10. Is attached, while the light projecting lens 52 is attached to the other end corresponding to the front side of the housing 10. The space between the distance measuring light source 51 and the light projecting lens 52 is sealed in a substantially airtight manner.

The ranging light source 51 emits ranging light toward the front side of the housing 10 according to the control signal input from the control unit 101. Specifically, the ranging light source 51 can emit a laser beam in the visible light region as the ranging light. In particular, the ranging light source 51 according to the present embodiment emits a red laser beam having a wavelength in the vicinity of 690 nm as the ranging light.

The ranging light source 51 is also fixed in such a posture that the optical axis Ao of the red laser beam emitted as the ranging light is along the longitudinal direction of the casing 53. Therefore, the optical axis Ao of the ranging light is along the longitudinal direction of the housing 10 and the support base 50, passes through the central portion of the light projecting lens 52, and reaches the outside of the casing 53.

The light projecting lens 52 is located between the pair of light receiving elements 56L and 56R in the ranging light receiving unit 5B and the light receiving lens 57 in the longitudinal direction of the support base 50. The projection lens 52 is arranged so that the optical axis Ao of the ranging light passes through.

The projectile lens 52 can be, for example, a plano-convex lens, and the spherical convex surface can be fixed in a posture facing the outside of the casing 53. The light projecting lens 52 collects the ranging light emitted from the ranging light source 51 and emits it to the outside of the casing 53. The ranging light emitted to the outside of the casing 53 reaches between the guide plates 54L and 54R.

The guide plates 54L and 54R are configured as a pair of members arranged in the lateral direction of the support base 50, and each of them can be a plate-like body extending in the longitudinal direction of the support base 50. A space for emitting ranging light is partitioned between one guide plate 54L and the other guide plate 54R. The ranging light emitted to the outside of the casing 53 passes through the space thus partitioned and is output.

Therefore, the ranging light emitted from the ranging light source 51 passes through the space inside the casing 53, the central portion of the projection lens 52, and the space between the guide plates 54L and 54R, and goes to the outside of the ranging unit 5. It is output. The distance measuring light output in this way is reflected by the bend mirror 59 and the optical member 35a in the downstream side merging mechanism 35, and is incident on the laser light scanning unit 4.

The ranging light incident on the laser beam scanning unit 4 is sequentially reflected by the first mirror 41a of the first scanner 41 and the second mirror 42a of the second scanner 42, and is reflected from the transmission window 19 to the outside of the marker head 1. Will be emitted to.

As described in the description of the laser light scanning unit 4, by adjusting the rotational posture of the first mirror 41a of the first scanner 41, the ranging light can be scanned in the first direction on the surface of the work W. .. At the same time, by operating the motor of the second scanner 42 to adjust the rotational posture of the second mirror 42a, it becomes possible to scan the ranging light in the second direction on the surface of the work W.

The ranging light thus scanned is reflected on the surface of the work W. A part of the distance measuring light reflected in this way (hereinafter, this is also referred to as “reflected light”) is incident on the inside of the marker head 1 through the transmission window 19. The reflected light incident on the inside of the marker head 1 returns to the laser light guide unit 3 via the laser light scanning unit 4. Since the reflected light has the same wavelength as the distance measuring light, it is reflected by the optical member 35a of the downstream side merging mechanism 35 in the laser light guide unit 3 and is incident on the distance measuring unit 5 via the bend mirror 59.

-Distance measuring light receiver 5B-
The ranging light receiving unit 5B is provided inside the housing 10 and receives the ranging light (equivalent to the above-mentioned “reflected light”) emitted from the ranging light emitting unit 5A and reflected by the work W. It is configured to do.

Specifically, the ranging light receiving unit 5B has a pair of light receiving elements 56L and 56R and a light receiving lens 57. The pair of light receiving elements 56L and 56R are respectively arranged at the rear end portion of the support base 50, while the light receiving lens 57 is arranged at the front end portion of the support base 50, respectively. Therefore, the pair of light receiving elements 56L and 56R and the light receiving lens 57 are substantially arranged along the longitudinal direction of the housing 10 and the support base 50.

The optical axes of the pair of light receiving elements 56L and 56R are arranged inside the housing 10 so as to sandwich the optical axis Ao of the ranging light in the ranging light emitting unit 5A. The pair of light receiving elements 56L and 56R receive the reflected light returned to the laser light scanning unit 4, respectively.

Specifically, the pair of light receiving elements 56L and 56R are arranged in a direction orthogonal to the optical axis Ao of the ranging light emitting unit 5A. In this embodiment, the arrangement direction of the pair of light receiving elements 56L and 56R is equal to the lateral direction of the housing 10 and the support base 50, that is, the left-right direction. In the same direction, one light receiving element 56L is arranged on the left side of the distance measuring light source 51, and the other light receiving element 56R is arranged on the right side of the distance measuring light source 51.

Each of the pair of light receiving elements 56L and 56R has a light receiving surface oriented obliquely forward, detects a light receiving position of reflected light on each light receiving surface, and indicates a signal (detection signal) indicating the detection result. Is output. The detection signals output from the light receiving elements 56L and 56R are input to the marker controller 100 and reach the distance measuring unit 103.

Examples of the elements that can be used as the light receiving elements 56L and 56R include a CMOS image sensor composed of a complementary MOS (CMOS), a CCD image sensor composed of a charge-coupled device (CCD), and an optical position. Examples include a sensor (Position Sensitive Detector: PSD).

In the present embodiment, the light receiving elements 56L and 56R are configured by using a CMOS image sensor. In this case, each of the light receiving elements 56L and 56R can detect not only the light receiving position of the reflected light but also the light receiving amount distribution (light receiving waveform) thereof. That is, when the light receiving elements 56L and 56R are configured by using the CMOS image sensor, the pixels are arranged at least in the left-right direction on each light receiving surface. In this case, each of the light receiving elements 56L and 56R can read a signal for each pixel, amplify it, and output it to the outside. The intensity of the signal in each pixel is determined based on the intensity of the reflected light at the spot when the reflected light forms a spot on the light receiving surface.

When each light receiving element 56L, 56R is configured by using an element capable of detecting the light receiving amount distribution (light receiving waveform) such as a CMOS image sensor, the magnitude of the light receiving amount in each light receiving element 56L, 56R is measured. The intensity of the distance light, that is, the intensity of the distance measurement light emitted from the distance measurement light emitting unit 5A (hereinafter, this is also referred to as “projected light amount”) and the gain when amplifying the signal for each pixel (hereinafter, this is referred to as this). It can also be adjusted using “light receiving gain”). In addition to the gain, the exposure time of each of the light receiving elements 56L and 56R can be used for adjustment.

The pair of light receiving elements 56L and 56R according to the present embodiment can detect at least the peak position indicating the light receiving position of the reflected light and the received amount of the reflected light. As an index indicating the received light amount, for example, the height of the peak in the received light amount distribution of the reflected light can be used. Instead of this, the total value, the average value, and the integrated value of the received light amount distribution may be used.

Further, as an index indicating the light receiving position of the reflected light, the peak position of the light receiving amount distribution (the peak position of the spot) is used in this embodiment, but instead of this, the center of gravity position of the light receiving amount distribution may be used. good.

The light receiving lens 57 is arranged inside the housing 10 so that the optical axes of the pair of light receiving elements 56L and 56R pass through. The light receiving lens 57 is also provided in the middle of the optical path connecting the downstream side merging mechanism 35 and the pair of light receiving elements 56L, 56R, and the reflected light passing through the downstream side merging mechanism 35 is transmitted to the pair of light receiving elements 56L, 56R. It can be focused on each light receiving surface.

The light receiving lens 57 collects the reflected light returned to the laser light scanning unit 4 and forms a spot of the reflected light on the light receiving surface of each of the light receiving elements 56L and 56R. Each of the light receiving elements 56L and 56R outputs a signal indicating the peak position of the spot thus formed and the light receiving amount to the distance measuring unit 103.

The laser processing device L basically measures the distance to the surface of the work W based on the light receiving position of the reflected light (the position of the peak of the spot in this embodiment) on the light receiving surface of each of the light receiving elements 56L and 56R. can do. As a distance measurement method, a so-called triangular distance measurement method is used.

-About the distance measurement method-
FIG. 9 is a diagram illustrating a triangular ranging method. In FIG. 9, only the distance measuring unit 5 is shown, but the following description is also common to the case where the distance measuring light is emitted via the laser beam scanning unit 4 as described above.

As illustrated in FIG. 9, when the distance measuring light is emitted from the distance measuring light source 51 in the distance measuring light emitting unit 5A, the distance measuring light is emitted to the surface of the work W. When the ranging light is reflected by the work W, the reflected light (particularly diffuse reflected light) propagates substantially isotropically if the influence of specular reflection is removed.

Although the reflected light propagating in this way contains a component incident on the light receiving element 56L via the light receiving lens 57, the incident light is transmitted to the light receiving element 56L according to the distance between the marker head 1 and the work W. The angle of incidence will increase or decrease. When the angle of incidence on the light receiving element 56L increases or decreases, the light receiving position on the light receiving surface 56a is displaced.

As described above, the distance between the marker head 1 and the work W and the light receiving position on the light receiving surface 56a are related to each other with a predetermined relationship. Therefore, by grasping the relationship in advance and storing it in the marker controller 100, for example, the distance between the marker head 1 and the work W can be calculated from the light receiving position on the light receiving surface 56a. Such a calculation method is nothing but a method using a so-called triangular ranging method.

That is, the distance measuring unit 103 measures the distance from the laser processing device L to the surface of the work W by the triangular distance measuring method based on the light receiving position of the distance measuring light in the distance measuring light receiving unit 5B.

Specifically, the above-mentioned condition setting storage unit 102 stores in advance the relationship between the light receiving position on the light receiving surface 56a and the distance from the marker head 1 to the surface of the work W. On the other hand, a signal indicating the light receiving position of the distance measuring light in the distance measuring light receiving unit 5B, specifically, the reflected light of the distance measuring light and the peak position of the spot formed on the light receiving surface 56a is input to the distance measuring unit 103. Will be done.

The distance measuring unit 103 measures the distance to the surface of the work W based on the signal thus input and the relationship stored in the condition setting storage unit 102. The measured value thus obtained is input to, for example, the control unit 101 and used for controlling the Z scanner 33 and the like by the control unit 101.

For example, the laser machining apparatus L automatically or manually determines a portion (printing point) to be machined by the marker head 1 on the surface of the work W. Subsequently, the laser processing apparatus L measures the distance to each printing point (more accurately, the distance measuring point set around the printing point) prior to executing the printing processing, and matches the measured distance. The control parameter of the Z scanner 33 is determined so as to be the focal position. The laser processing apparatus L operates the Z scanner 33 based on the control parameters thus determined, and then prints the work W with the near-infrared laser beam.

Hereinafter, a specific method of using the laser processing system S will be described.

<How to use the laser processing system S>
FIG. 10 is a flowchart showing how to use the laser processing system S. Further, FIG. 11 is a flowchart illustrating a procedure for creating a print setting, a search setting, and a distance measurement setting, FIG. 12 is a diagram illustrating the relationship between the machining area R1 and the setting surface R4, and FIG. 13 is a display. It is a figure which illustrates the display content in part 801.

14A to 14D are diagrams illustrating a specific procedure for setting search conditions, FIG. 15 is a diagram illustrating a basic concept of an imaging selection process, and FIG. 16 is a specific diagram of the imaging selection process. It is a flowchart which exemplifies a typical process.

Further, FIG. 17 is a diagram for explaining the wide-angle mode and the standard mode, and FIG. 18 is a diagram for explaining the imaging selection process incorporating the wide-angle mode and the standard mode.

Further, FIGS. 19A to 19D are diagrams illustrating a specific procedure for setting the distance measuring condition.

Further, FIG. 20 is a flowchart illustrating an operation procedure of the laser processing apparatus L, and FIGS. 21A to 21E are diagrams illustrating a specific procedure of pattern search.

The laser processing system S including the laser processing apparatus L configured as a laser marker can be installed and operated on a production line of a factory, for example. In its operation, first, prior to the operation of the production line, the installation position of the work W that will flow through the line, and the condition setting such as the output of the near-infrared laser light and the ranging light to irradiate the work W. Is created (step S1).

The setting contents created in step S1 are transferred to and / or stored in the marker controller 100 and / or the operation terminal 800 or the like, or read by the marker controller 100 immediately after creation (step S2).

Then, when the production line is operated, the marker controller 100 refers to the setting contents stored in advance or read immediately after the creation. The laser processing apparatus L is operated based on the referenced setting contents, and print processing is executed for each work W flowing on the line (step S3).

(Specific creation procedure for each setting)
FIG. 11 illustrates a specific process in step S1 of FIG. As illustrated in FIG. 11, in the present embodiment, the control process related to the print setting, the control process related to the search setting, and the control process related to the distance measurement setting are executed in order. ing. Each control process is configured as an independent process without overlapping each other.

First, in step S11, the coaxial camera 6 or the entire camera 7 built in the laser processing apparatus L generates an captured image Pw including at least a part of the processing region R1. The captured image Pw generated by the coaxial camera 6 or the wide area camera 7 is output to the operation terminal 800.

The display unit 801 of the operation terminal 800 displays the setting surface R4 associated with the processing area R1 and displays the coaxial image Pw1 or the entire image Pw2 as the captured image Pw on the setting surface R4. (See FIGS. 12 and 13).

Thereby, the coordinate system (printed coordinate system) defined on the setting surface R4 on the display unit 801 can be associated with the coordinate system (camera coordinate system) defined on the captured image Pw. For example, by designating a print point while looking at the captured image Pw, the user can print on the processing area R1 via the setting surface R4. The captured image Pw functions as a background image when various settings are made through the setting surface R4.

-Creating print settings-
In the following step S12, the setting unit 107 sets the machining conditions. The setting unit 107 sets the processing conditions by reading the stored contents in the condition setting storage unit 102 or the like or reading the operation input or the like via the operation terminal 800.

As an example of processing conditions, the setting unit 107 sets a printing pattern (marking pattern) Pm indicating the printing content (processing content) to be formed in the processing region R1 on the surface of the work W. The print pattern Pm is set via the setting surface R4 described above. The setting unit 107 is an example of the “machining setting unit” in the present embodiment.

The processing conditions include a print pattern Pm as a marking pattern and a print block B indicating the position of the print pattern Pm. The print block B can be used for adjusting the layout, size, rotation posture, etc. of the print pattern Pm. Further, the print block B is used in association with the distance measuring position I described later.

The display unit 801 can display the print pattern Pm and the print block B by superimposing them on the captured image Pw. For example, in FIG. 13, a print pattern Pm composed of the number “123” and a rectangular print block B surrounding the print pattern Pm are arranged on the surface of the work W on the setting surface R4, and the display unit 801 Displays the print pattern Pm and the print block B thus arranged so as to be superimposed on the captured image Pw.

The print pattern Pm is an example of a "processed pattern", and the print block B is an example of a "processed block". The names "print pattern" and "print block" are for convenience only and are not intended to limit their use.

Further, although not shown, a plurality of work Ws may be displayed on the setting surface R4, or only one work W may be displayed as illustrated in FIG. Further, a plurality of print blocks B may be arranged on one work W. As the print pattern Pm, a pattern other than a character string such as a QR code (registered trademark) can be used.

Returning to step S12 of FIG. 11, in the same step, for example, the user manually creates a print block B and arranges the print block B on the setting surface R4. Since the setting surface R4 and the captured image Pw are related as described above, the user can arrange the print block B while visually recognizing the captured image Pw.

Then, when one or more print blocks B are arranged, the user determines the print pattern Pm for each print block B. The determination of the print pattern Pm is executed, for example, by the user operating the operation unit 802 and the operation unit 802 inputting the print pattern Pm to the marker controller 100 based on the operation input at that time.

The setting unit 107 reads the print block B thus arranged and the print pattern Pm determined for each print block B, and sets them as processing conditions. The setting unit 107 according to the present embodiment temporarily or continuously stores the coordinates of the print block B (coordinates in the print coordinate system) and the like on the setting surface R4 in the condition setting storage unit 102 and the like.

As described above, since the setting surface R4 is displayed so as to be superimposed on the captured image Pw, the setting unit 107 according to the present embodiment sets the print block B so as to be superimposed on the captured image Pw. Become.

The processing conditions also include conditions related to near-infrared laser light (hereinafter referred to as "laser conditions"). These laser conditions include the emission position of the near-infrared laser light, the target output of the near-infrared laser light) laser power), the scanning speed (scan speed) of the near-infrared laser light by the laser light scanning unit 4, and the near-infrared. Of the repetition frequency of the laser beam (pulse frequency), whether to make the laser spot of the near-infrared laser beam variable (spot variable), and the number of times the near-infrared laser beam traces the print pattern Pm (number of prints). At least one of is included. As illustrated in the menu D1 displayed at the lower right of FIG. 13, such processing conditions can be set for each print block B.

-Creating search settings-
Further, in general, each work W to be sequentially machined when the production line is operated will be displaced in the X direction and the Y direction (XY direction), respectively. The laser processing apparatus L according to the present embodiment can correct such a positional deviation by using various methods.

Therefore, in step S13 following step S12, the setting unit 107 creates a condition setting (search setting) for correcting the positional deviation in the XY direction. The laser processing apparatus L according to the present embodiment is configured to use a pattern search as a search process as a method for correcting a positional deviation in the XY directions.

In order to use the pattern search, the setting unit 107 defines, as a condition (search condition) related to the pattern search, a pattern area Rp to be searched for specifying the positional deviation of the work W and a range in which the pattern area Rp is searched. The search area Rs to be used is set on the coaxial image Pw1 or the entire image Pw2 as the captured image Pw. The pattern region Rp is an example of the “correction region” in the present embodiment.

Further, the marker controller 100 includes a feature amount extraction unit 104 that extracts image information (feature amount) of the coaxial image Pw1 or the entire image Pw2 in the pattern region Rp in order to actually perform the pattern search (FIG. 2). reference). The feature amount extraction unit 104 according to the present embodiment cuts out the captured image Pw itself in the pattern region Rp as the image information of the coaxial image Pw1 or the entire image Pw2 as the captured image Pw. The setting unit 107 sets the image cut out by the feature amount extraction unit 104 as the pattern image Pp. The condition setting storage unit 102 stores the pattern image Pp set by the setting unit 107 (see FIG. 14D). The condition setting storage unit 102 is an example of the “storage unit” in the present embodiment. The condition setting storage unit 102 as a storage unit also stores the position information of the search area Rs set by the setting unit 107.

Hereinafter, a specific procedure for setting the search condition will be described with reference to FIGS. 14A to 14D.

First, in the first sub-step (step S131) in step S13, the print block B to be searched by the pattern search is determined. Specifically, in the example shown in FIG. 14A, by executing the pull-down operation on the dialog D2, it is determined whether all the print blocks B are the search targets or the specific print blocks B are the search targets. You can choose.

Subsequently, in the second sub-step (step S132) in step S13, the setting unit 107 sets the pattern region Rp on the captured image Pw. Specifically, in the example shown in FIG. 14B, the pattern region Rp corresponding to each print block B is set by executing a drag operation or the like on the captured image Pw.

In the example shown in FIG. 14B, the pattern area Rp is set so as to surround the print pattern Pm, but the setting is not limited to such a setting. The pattern area Rp can also be set so as not to surround the print pattern Pm.

Further, the feature amount extraction unit 104 cuts out the captured image Pp in the pattern region Rp and sets it in the image information (pattern image Pp) (see FIG. 14D). The pattern image Pp thus set is input to the setting unit 107 and the like.

Subsequently, in the third sub-step (step S133) in step S13, the setting unit 107 sets the search area Rs on the captured image Pw. Specifically, in FIG. 14C, by inputting a numerical value in the input field M1 provided on the dialog D3, the pattern area Rp is expanded in the horizontal direction and the vertical direction by the amount of the numerical value input in the input field M1. , The one that sets the expanded area in the search area Rs is exemplified. The set search area Rs is stored in the condition setting storage unit 102 or the like. For example, the search region Rs shown in FIG. 14C is an extension of the pattern region Rp by about 5 mm in the vertical and horizontal directions.

Further, as illustrated in FIG. 14D, by displaying the dialog D4 on the display unit 801 it is possible to confirm the pattern image Pp as the image information and to set the search setting in more detail.

For example, the user can select a mode (speed priority mode) in which the pattern area Rp and the pattern image Pp are reduced and the pattern search is executed at a higher speed by operating the pull-down menu of the search setting M2 on the dialog D4. , Select a mode (precision priority mode) to execute pattern search with higher accuracy without reducing the pattern area Rp and pattern image Pp, or prioritize the accuracy slightly over the speed priority mode as shown in the figure. However, it is possible to select or select an intermediate mode (balance mode) that gives priority to speed slightly over accuracy priority mode.

By the way, in order to perform a pattern search during the operation of the laser processing apparatus L, the work W'carried with the operation of the production line is imaged by the coaxial camera 6 or the entire camera 7, and the search area Rs is taken for each work W'. It is required to generate the region Rs'corresponding to.

In general, since the coaxial camera 6 has a narrow field of view and high resolution, the use of the coaxial camera 6 enables accurate pattern search. However, for example, when the search area Rs is wider than the field of view size F1 of the coaxial camera 6, the pattern search may not be properly executed outside the range of the field of view size F1. This is inconvenient from the viewpoint of improving the accuracy of the pattern search.

In order to solve such a problem, it is necessary to have a mechanism for properly using the coaxial camera 6 and the whole camera 7. Therefore, the marker controller 100 selects a camera to be used for generating the search area Rs in step S134 following step S133. This selection is executed by the imaging selection unit 109 provided in the marker controller 100. Specifically, the imaging selection unit 109 selects either the coaxial camera 6 or the overall camera 7 based on the size of the search area Rs set by the setting unit 107. The imaging selection unit 109 temporarily or continuously stores the selection result in the condition setting storage unit 102, or inputs a signal indicating the selection result to the control unit 101. Hereinafter, among the processes performed by the image pickup selection unit 109, the process related to camera selection is referred to as “imaging selection process”.

-Basic concept of imaging selection process-
Prior to the imaging selection process, the condition setting storage unit 102 has a first field of view size F1 indicating the field of view size of the coaxial camera 6 and a second field of view showing the field of view size of the entire camera 7 and wider than the first field of view size F1. The size F2 and the like are stored in advance. The condition setting storage unit 102 is an example of the “imaging attribute storage unit” in the present embodiment.

In the image pickup selection process, the image pickup selection unit 109 compares the size of the search area Rs with the first or second visual field sizes F1 and F2 based on the storage contents in the condition setting storage unit 102, and the comparison result. One of the coaxial camera 6 and the overall camera 7 is selected based on the above.

Specifically, in the image pickup selection process, the image pickup selection unit 109 selects at least one of the coaxial camera 6 and the entire camera 7 having a wider field of view than the search area Rs. For example, when the first field of view size F1 is narrower than the search area Rs and the second field of view size F2 is wider than the search area Rs as shown in FIG. Select. By selecting the whole camera 7, the reading area Rq can be accommodated in the second field of view size F2. In this case, the search area Rs will be generated by the entire image Pw2.

Here, when the search region Rs is larger than the state shown in FIG. 15B, the image pickup selection unit 109 holds the state in which the entire camera 7 is selected ((a) in FIG. 15). )).

However, when the search area Rs is smaller than the state shown in FIG. 15B, the first field of view size F1 in the coaxial camera 6 and the second field of view size F2 in the overall camera 7 are both search areas. It may be wider than Rs (see (c) in FIG. 15). In this case, regardless of which of the coaxial camera 6 and the overall camera 7 is selected, the reading area Rq can be contained in the first or second field of view sizes F1 and F2.

Therefore, the imaging selection unit 109 according to the present embodiment is configured to select the coaxial camera 6 having better resolution when both the first and second visual field sizes F1 and F2 are wider than the search area Rs. There is. In this case, the search region Rs will be generated by the coaxial image Pw1. By preferentially selecting the coaxial camera 6, a higher-definition coaxial image Pw1 can be generated.

By the way, in FIG. 15, it has been described on the premise that the first and second field of view sizes F1 and F2 are one, but at least one of the coaxial camera 6 and the whole camera 7 has a plurality of different field of view sizes. It may have an imaging mode. In fact, the coaxial camera 6 and the overall camera 7 according to the present embodiment each have two imaging modes (specifically, a wide-angle mode and a standard mode) having different field of view sizes.

-Wide-angle mode and standard mode-
As illustrated in FIG. 17, the coaxial camera 6 and the overall camera 7 according to the present embodiment each have an image sensor 61 provided with a plurality of pixels 61a. Although FIG. 17 illustrates only the image sensor 61 and the pixels 61a of the coaxial camera 6, the following description also describes the image sensor (not shown) of the overall camera 7 and its pixels (not shown). It is common.

In the present embodiment, the image pickup device 61 is composed of a CMOS image sensor made of a complementary MOS (CMOS). Although the number of pixels of the image sensor 61 is set to 1920 x 1200 pixels, it can be transferred to the display unit 801 only at 480 x 480 pixels due to the system limitation of the laser processing apparatus L.

In order to utilize such system restrictions, the imaging selection unit 109 according to the present embodiment can select two imaging modes for each of the coaxial image Pw1 in the coaxial camera 6 and the overall image Pw2 in the overall camera 7. ..

Specifically, the image pickup selection unit 109 compresses and displays the image Px1 generated by the pixels 61a in the predetermined first range Rx1 in the image pickup element 61, and the second wide-angle mode narrower than the first range Rx1. The standard mode for displaying the image Px2 generated by the pixels 61a in the range Rx2 can be used properly.

Specifically, the wide-angle mode is a mode in which the first range Rx1 set to 1200x1200 pixels is imaged, and the first range Rx1 is compressed to 480x480 pixels and displayed. The image Px1 generated by this wide-angle mode has a wider field of view than the image Px2 generated by the standard mode.

On the other hand, the standard mode is a mode in which the second range Rx2 set to 480x480 pixels is imaged and displayed without compression. The image Px2 generated by this standard mode has a narrower field of view than the image Px1 generated by the wide-angle mode, but has a relatively high resolution.

The field of view sizes F1 and F2 of the coaxial camera 6 and the overall camera 7 in FIG. 15 both refer to the field of view size of each camera in the wide-angle mode. In each of the coaxial camera 6 and the overall camera 7, the field of view size in the standard mode is narrower than the field of view size in the wide-angle mode. Further, the field of view size of the entire camera 7 in the standard mode is wider than the image field of view F1 of the coaxial camera 6 in the wide-angle mode.

Therefore, as shown in FIG. 18, in order from the one having the widest field of view size, the whole camera 7 in the wide-angle mode, the whole camera 7 in the standard mode, the coaxial camera 6 in the wide-angle mode, and the coaxial camera 6 in the standard mode. The image pickup selection unit 109 is configured to select one from the wide-angle mode and the standard mode for each camera based on such an arrangement order and the size of the search area Rs.

Although not shown, the resolutions are, in descending order of resolution, the coaxial camera 6 in the standard mode, the coaxial camera 6 in the wide-angle mode, the overall camera 7 in the standard mode, and the overall camera 7 in the wide-angle mode. ..

-Specific example of imaging selection process-
FIG. 15 is a specific example of the imaging selection process, and shows the specific process in step S134 of FIG. First, in step S401, the image pickup selection unit 109 reads the size of the search area Rs set in step S133 of FIG. Next, the imaging selection unit 109 compares the size of the search area Rs with the first field of view size (field of view size of the coaxial camera 6) F1 in the wide-angle mode, and the size of the search area Rs is equal to or less than the first field of view size F1. Determine if it exists. If this determination is YES, the process proceeds to step S402, while if NO, the process proceeds to step S406.

In step S402, the imaging selection unit 109 selects the coaxial camera 6 as the camera used to generate the search area Rs, and proceeds to step S403.

In step S403, the imaging selection unit 109 reads the first visual field threshold value stored in advance in the condition setting storage unit 102 or the like. The first field of view threshold is equal to the first field of view size F1 in standard mode. Next, the imaging selection unit 109 compares the size of the search region Rs with the first visual field threshold value, and determines whether or not the size of the search region Rs is equal to or less than the first visual field threshold value. If this determination is YES, the process proceeds to step S404, while if NO, the process proceeds to step S405.

In step S404, the image pickup selection unit 109 selects a standard mode (coaxial standard mode) as the image pickup mode of the coaxial camera 6 and returns. Further, in step S405, the image pickup selection unit 109 selects a wide-angle mode (coaxial wide-angle mode) as the image pickup mode of the coaxial camera 6 and returns.

Further, in step S406, the imaging selection unit 109 selects the entire camera 7 as the camera used to generate the search area Rs, and proceeds to step S407.

In step S407, the imaging selection unit 109 reads the second visual field threshold value stored in advance in the condition setting storage unit 102 or the like. The second field of view threshold is equal to the second field of view size F2 in standard mode. Next, the imaging selection unit 109 compares the size of the search region Rs with the second visual field threshold value, and determines whether or not the size of the search region Rs is equal to or less than the second visual field threshold value. If this determination is YES, the process proceeds to step S408, while if NO, the process proceeds to step S409.

In step S408, the image pickup selection unit 109 selects a standard mode (overall standard mode) as the image pickup mode of the entire camera 7 and returns. Further, in step S409, the image pickup selection unit 109 selects a wide-angle mode (overall wide-angle mode) as the image pickup mode of the entire camera 7 and returns.

Then, when the process shown in FIG. 16 is completed, the marker controller 100 adds the selection result of the camera by the image pickup selection process to the above-mentioned search condition. The search conditions set in this way are stored in the condition setting storage unit 102 or the like as search settings. When the creation of the search setting is completed, the setting unit 107 proceeds from step S13 to step S14.

-Measurement of distance measurement settings-
Further, in general, each work W to be sequentially machined when the production line is operated will be displaced in the Z direction. Such a misalignment is not desirable because it causes a misalignment of the focal position of the near-infrared laser beam. Since the laser machining apparatus L according to the present embodiment includes the distance measuring unit 5, it is possible to detect the positional deviation in the Z direction based on the distance to the surface of the work W. As a result, it is possible to correct the displacement in the Z direction and, by extension, the displacement of the focal position. Therefore, in step S14 following step S13, a condition setting (distance measurement setting) for correcting the positional deviation in the Z direction is created.

Specifically, in this step S14, the condition (distance measuring condition) relating to the distance measuring unit 5 is determined. As a distance measuring condition, the setting unit 107 according to the present embodiment sets at least the distance measuring position I for measuring the distance from the marker head 1 to the surface of the work W as the coaxial image Pw1 as the captured image Pw or the entire image. Set on Pw2 (see the star in FIG. 13). The distance measuring position I is basically set so as to overlap the surface of the work W, and indicates the coordinates to be irradiated with the distance measuring light.

When a plurality of print blocks B are set, the setting unit 107 can set distance measurement conditions for each print block B. In this case, the setting unit 107 can set the distance measuring position I in each print block B (see the star mark in FIG. 13). Instead of this, the setting unit 107 may set the distance measuring position I outside each print block B.

Hereinafter, a specific procedure for setting the distance measuring conditions will be described with reference to FIGS. 19A to 19D.

First, in the first sub-step (step S141) in step S14, the print block B to be the distance measurement target (distance measurement target) is determined. Specifically, in the example shown in FIG. 19A, by executing the pull-down operation on the dialog D5, all print blocks B are targeted for distance measurement, specific print blocks B are targeted for distance measurement, or , You can select whether to set the distance measurement target (no target). When "No object" is selected, the distance measurement is performed, but the measurement result is not used for the position correction in the Z direction.

Further, in the example shown in FIG. 19A, by executing the pull-down operation, the inclination of the work W can be detected instead of measuring the distance (height). When detecting the inclination of the work W, the distance measuring position I is set at least three places. By measuring the distance over three points, the inclination of the surface of the work W can be detected. The laser machining apparatus L can correct the inclination of the work W with respect to the XY plane in addition to the positional deviation of the work W in the Z direction.

Subsequently, in the second sub-step (step S142) in step S14, the setting unit 107 sets the distance measuring condition for each print block B. Specifically, as illustrated in FIG. 19B, there are two patterns on the dialog D6, one is to specify the identification number (block number) of the print block B, and the other is to specify arbitrary coordinates unrelated to the print block B. You can choose from one pattern. When the former pattern is selected, the setting unit 107 sets the central portion of the designated print block B at the distance measuring position I. On the other hand, when the latter pattern is selected, the setting unit 107 designates the sitting table designated by the user as the distance measuring position I.

Subsequently, in the third sub-step (step S143) in step S14, the setting unit 107 automatically adjusts the distance measuring condition (see FIG. 19C). Specifically, the setting unit 107 sets the distance measurement conditions as the amount of emitted light in the distance measuring light emitting unit 5A, the light projection time in the distance measuring light emitting unit 5A, the light receiving gain in the distance measuring light receiving unit 5B, and the distance measuring light receiving. At least one of the exposure times in part 5B is automatically adjusted for each print block B.

Further, as illustrated in FIG. 19D, by displaying the dialog D7 on the display unit 801 it is possible to manually change the created distance measurement conditions and set the distance measurement conditions in more detail. can.

For example, the user can change the reference height in the Z direction (that is, the coordinates of the origin in the Z direction) by inputting a number in the item "height coordinates" M3 on the dialog D7.

The distance measuring conditions set in this way are stored in the condition setting storage unit 102 or the like as the distance measuring settings. When the creation of the distance measurement setting is completed, the setting unit 107 proceeds from step S14 to step S15. The setting unit 107 returns from step S15 assuming that all the settings have been created.

(Execution of printing process)
FIG. 20 illustrates a specific process in step S3 of FIG. That is, the processes shown in FIG. 20 are sequentially executed for each work W that flows when the production line is operated.

First, as described with reference to step S1 of FIG. 10 and steps S11 to S15 of FIG. 11 prior to each step shown in FIG. 20, the marker controller 100 has a print pattern Pm for a predetermined work W. And the setting of the print block B and the like (print setting), the setting of the pattern image Pp and the search area Rs and the like (search setting), and the setting of the distance measuring position I and the like (distance measuring setting) are created in advance (FIG. 21A). See also).

When the creation of each setting is completed, the marker controller 100 is in a state in which the control process illustrated in FIG. 20 can be executed. This control process mainly executes a control process (steps S303 to S307) for executing XY tracking (pattern search in the XY direction) and Z tracking (height measurement in the Z direction). The configuration includes a control process (step S308 to step S312).

First, in step S301 of FIG. 20, the marker controller 100 operates the laser beam scanning unit 4. The marker controller 100 directs the imaging optical axis A1 of the coaxial camera 6 toward the center position of the search area Rs stored in the condition setting storage unit 102. When the wide area camera 7 is selected in the imaging selection process, step S301 becomes unnecessary.

In the subsequent step S302, when a trigger is input to the marker controller 100 from the PLC902 or the like, a new work W'different from the work W used for various settings including the pattern area Rp is conveyed.

By the way, the print block B corresponding to the print pattern Pm is set by the coordinate system defined on the setting surface R4. Further, the latter work W'may be displaced in the XY direction with respect to the first work W. As illustrated in FIG. 21B, when the position shift occurs in the XY direction, there is a possibility that the print pattern Pm cannot be formed at a desired position on the work W'.

It is conceivable to perform a pattern search in order to correct the positional deviation in the XY direction, but as described above, in order to execute the pattern search, each work W'to be conveyed corresponds to the search area Rs. It is necessary to generate the region Rs'. In order to generate the region Rs's, it is necessary to generate the captured image Pw for each work W'.

Therefore, the control unit 101 controls one of the coaxial camera 6 and the overall camera 7 selected by the image pickup selection unit 109, thereby relating to a new work W'different from the work W used for setting the pattern region Rp. , A captured image Pw'composed of the coaxial image Pw1 or the entire image Pw2 is newly generated, and a region Rs' corresponding to the search region Rs is generated based on the captured image Pw'(see FIGS. 21B to 21C). ..

Specifically, when the control unit 101 newly generates the coaxial image Pw1 or the entire image Pw2, if the coaxial camera 6 is selected by the imaging selection unit 109, the search stored in the condition setting storage unit 102 The coaxial camera 6 is made to newly generate the coaxial image Pw1 in a state where the laser light scanning unit 4 is controlled based on the position of the region Rs (particularly, the center position of the search region Rs).

On the other hand, when the control unit 101 newly generates the coaxial image Pw1 or the whole image Pw2, if the whole camera 7 is selected by the image pickup selection unit 109, the laser light as described in step S301 described above. With the scanning unit 4 uncontrolled, the entire camera 7 is made to newly generate the entire image Pw2.

Further, the marker controller 100 according to the present embodiment includes a position deviation detection unit 105 that executes a pattern search for a new work W'and a position correction unit 108 that performs position correction in the XY direction based on the search result. , Is provided.

Of these, the position shift detection unit 105 is used for the image information (pattern image Pp) stored in advance in the condition setting storage unit 102 and the search area Rs in the coaxial image Pw1 or the entire image Pw2 newly generated by the control unit 101. Based on the image information newly extracted in the corresponding region Rs', the positional deviation between the work W used for setting the pattern region Rp and the new work W'is detected.

Specifically, the misalignment detection unit 105 moves the pattern region Rp within the range of the region Rs'corresponding to the search region Rs so as to overlap with the newly generated captured image Pw'(see FIG. 21D). ). At substantially the same timing as the movement of the pattern region Rp by the position shift detection unit 105, the feature amount extraction unit 104 newly extracts the image information of the captured image Pw'in the pattern region Rp after the movement. In particular, the feature amount extraction unit 104 according to the present embodiment cuts out an image in the pattern region Rp after movement from the captured image Pw'and uses it as newly extracted image information.

The position shift detection unit 105 compares the image information (pattern image Pp) extracted in advance on the first work W with the image information newly extracted on a new work W'that is different from the image information (pattern image Pp). A region where the two image information coincides with each other higher than the other regions is found on the newly generated captured image Pw'.

The position shift detection unit 105 has the coordinates of the pattern region Rp before movement (coordinates on the setting surface R4) and the coordinates of the region where the two image information coincides higher than the other regions (as described above). The difference between the coordinates on the setting surface R4) and the difference is calculated, and the difference is regarded as the amount of deviation of the works W and W'in the XY directions. This amount of deviation can be detected, for example, in pixel units.

On the other hand, the position correction unit 108 corrects the position of the print block B and eventually the print pattern Pm based on the position deviation detected by the position deviation detection unit 105.

Specifically, the position correction unit 108 moves the print block B on the setting surface R4 based on the amount of deviation calculated by the position deviation detection unit 105 (see FIG. 21E). As a result, the print pattern Pm can be formed at a desired position on the newly conveyed work W'.

When the amount of deviation is detected in pixel units, the position correction unit 108 lengthens the pixel unit by using the resolution of the coaxial camera 6 in the wide-angle and standard modes and the resolution of the entire camera 7 in the wide-angle and standard modes. Convert to camera units (eg millimeters). The position correction unit 108 realizes the position correction of the print pattern Pm by using the deviation amount converted into the length unit.

Returning to the flow of FIG. 20, in step S303 following step S302, the marker controller 100 passes through the coaxial camera 6 or the whole camera 7, and the captured image (camera image) Pw'consisting of the coaxial image Pw1 or the whole image Pw2 Is generated, and the generated captured image Pw'is superimposed on the setting surface R4 and displayed.

Then, in step S304 following step S303, the marker controller 100 reads the search settings (search conditions) for each of the print blocks B to be searched.

In the subsequent step S305, the position shift detection unit 105 in the marker controller 100 executes the pattern search configured as described above. By executing the pattern search, the positional deviation in the XY direction between the work W used to create the print setting, the search setting, and the distance measurement setting and the work W'newly transported during operation is detected. NS.

However, at this point, the positional deviation between the works W and W'in the Z direction has not been eliminated. When the position shift occurs in the Z direction (when the height of the work W changes), the position shift in the XY direction further occurs due to the widening of the angle of view in the coaxial camera 6.

Therefore, simply moving the print block B based on the detection result obtained in step S305 may leave a positional deviation in the XY direction due to the height of the work W.

Therefore, in step S306 following step S305, the position correction unit 108 temporarily corrects the position deviation in the XY direction based on the detection result of step S305.

Specifically, the position correction unit 108 shifts the print coordinate system defined on the setting surface R4 in the direction of reducing the position deviation detected by the position correction unit 108. As a result, it is possible to convert from the initially set XY coordinates to temporary XY coordinates (temporary coordinates) in which the positional deviation is at least partially reduced.

Then, by converting the XY coordinates to the temporary coordinates, the position of the print block B set using the XY coordinates before the conversion moves with the conversion to the temporary coordinates (see FIG. 21E). ).

By the way, as described above, the distance measuring position I is set in association with each print block B. Therefore, when the XY coordinates are converted into the temporary coordinates in step S306, the distance measuring position I also moves along with the movement of the print block B. That is, the position correction unit 108 corrects the distance measurement position I on the new work W'corresponding to the distance measurement position I set by the setting unit 107.

As described above, the position correction unit 108 according to the present embodiment has the position of the print block B and the distance measuring position I for the new work W'different from the work W based on the detection result of the position deviation in the XY direction. And are configured to correct. Hereinafter, the corrected distance measuring position I is designated by the reference numeral I'(see FIG. 21E).

Then, in step S307 following step S306, the marker controller 100 determines whether or not the pattern search has been completed for all the print blocks B to be searched, and if the determination is YES, the process proceeds to step S308, while proceeding to step S308. If NO, the process returns to step S303.

In the following step S308, the marker controller 100 reads the distance measurement setting (distance measurement condition) for each of the print blocks B targeted for distance measurement.

In the subsequent step S309, the control unit 101 as the scanning control unit controls the laser light scanning unit 4 so that the distance measuring light is applied to the corrected distance measuring position I'. As a result, the distance from the marker head 1 to the distance measuring position I'reflecting the conversion to the temporary coordinate system can be measured.

In the subsequent step S310, the distance measuring unit 103 operates the distance measuring unit 5 to operate the distance measuring unit 5 to obtain the distance from the marker head 1 to the corrected distance measuring position I', and by extension, the work W'at the distance measuring position I'. Measure the height of.

In the subsequent step S311, the position shift detection unit 105 acquires the Z coordinate of the work W'at the distance measurement position I'based on the measurement result by the distance measurement unit 103, and the position shift of the work W'in the Z direction. Is detected. This positional deviation can be detected based on the difference between the acquired Z coordinate and the reference height (coordinate of the origin) in the Z direction.

The position correction unit 108 acquires the control parameters of the Z scanner 33 based on the positional deviation of the work W'in the Z direction. The control parameters acquired here correspond to the parameters (Z coordinates, correction value of the focal position) used when the Z scanner 33 corrects the focal position.

The parameters thus acquired are used for controlling the Z scanner 33 by the control unit 101 before executing the printing process on the work W'. That is, in the Z scanner 33 according to the present embodiment, the measurement result by the distance measuring unit 103 is in a state where the distance measuring position I is corrected by the position correcting unit 108 prior to the irradiation of the work W'with the near infrared laser beam. The focal position can be adjusted based on.

In step S312 following step S311 the position correction unit 108 converts the XY coordinates again based on the position deviation in the Z direction detected in step S311. In the reconversion here, both the positional deviation in the XY direction detected by the pattern search and the positional deviation in the XY direction due to the height of the work W are taken into consideration. As a result, the positional deviation of the work W'in the XY direction can be corrected with high accuracy, and the print pattern Pm can be formed at a desired position on the work W'.

Then, in step S313 following step S312, the marker controller 100 determines whether or not the height measurement has been completed for all the distance measurement positions I, and if the determination is YES, the process proceeds to step S314, while NO. In the case, the process returns to step S308.

In step S314, the position correction unit 108 corrects the emission position of the near-infrared laser beam in the XYZ directions. In this step S314, both the position correction in the XY direction in consideration of the influence of the height of the work W and the position correction in the Z direction based on the height of the work W (that is, the correction of the focal position) are considered. NS.

Then, in step S315 following from step S314, the marker controller 100 executes printing processing on the work W'via the marker head 1 and returns. Since the positional deviation in the XYZ directions has already been corrected, the control unit 101 as the scanning control unit approaches via the laser beam scanning unit 4 in a state of reflecting the position correction such as the print pattern Pm by the position correction unit 108. Two-dimensional scanning of infrared laser light can be performed.

As described with reference to FIG. 19A, when the inclination of the work W is set to be detected, height measurement is performed for at least three distance measuring positions I. In this case, in step S314 described above, in addition to the position correction in the XYZ direction, a correction (tilt correction) for reducing the tilt is executed. This tilt correction can be performed, for example, by using the keystone correction of the captured image Pw'.

<Camera selection>
As described above, the setting unit 107 sets the search area Rs that defines the range in which the pattern area Rp should be searched. Next, as illustrated in FIG. 15, the image pickup selection unit 109 selects either the coaxial camera 6 or the entire camera 7 based on the size of the search area Rs set by the setting unit 107.

Then, the control unit 101 controls one of the coaxial camera 6 and the overall camera 7 selected by the image pickup selection unit 109, so that the new work W'different from the work W used for setting the search area Rp , Coaxial image Pw1 or whole image Pw2 is newly generated.

In this way, by selecting a camera based on the size of the search area Rs, it is possible to automatically select a camera suitable for that size. By generating an image with the camera selected in this way and performing a pattern search using the image, it is possible to execute the pattern search within the range within the first field of view size F1 or the second field of view size F2. As a result, it becomes possible to improve the accuracy of the pattern search.

Further, as illustrated in FIG. 21E and the like, the position correction unit 108 corrects the position of the print pattern Pm based on the position deviation detected by the position deviation detection unit 105. This is advantageous in improving the processing accuracy of the work W'.

Further, as illustrated in FIG. 15, the imaging selection unit 109 executes camera selection by comparing the field sizes F1 and F2 of the coaxial camera 6 and the overall camera 7 with the size of the search area Rs. .. This makes it possible to select the camera more appropriately.

Further, as illustrated in FIG. 15, when both the coaxial camera 6 and the entire camera 7 can be selected, the imaging selection unit 109 preferentially selects the coaxial camera 6. In general, the coaxial camera 6 has a narrower field of view than the overall camera 7, and therefore has excellent resolution. Therefore, by preferentially selecting the coaxial camera 6, a finer coaxial image Pw1 can be used, which is advantageous in improving the accuracy of the pattern search.

<Relationship between position correction and focal length>
By the way, the position correction on the two-dimensional plane, such as the position correction in the XY direction, may reduce the machining accuracy when the work W having a height is targeted for machining.

For example, the focal position of the near-infrared laser light is located near the center of the processing region R1 set on the work W and near the edge of the processing region R1 when two-dimensional scanning is performed by the laser light scanning unit 4. It's different. Specifically, the focal position is separated from the processing region R1 from the central portion to the edge of the processing region R1. Therefore, in the position correction on the two-dimensional plane, the focal position may shift after the correction. This is inconvenient for maintaining high processing accuracy.

For example, as illustrated in FIG. 22, the near-infrared laser beam is applied to the first work W1 whose focal position Df is optimized and the second work W2 whose position is displaced in the XY direction with respect to the first work W1. Consider the case of irradiating.

Here, assuming that the irradiation position of the near-infrared laser beam has moved from S1 to S2 as a result of correcting the positional deviation in the XY direction in the second work W2, the focal position optimized for the first work W1. Df will be displaced by ΔD from the surface of the second work W2. If the focal position shifts, it is inconvenient to maintain high processing accuracy.

On the other hand, according to the present embodiment, as illustrated in step S306 of FIG. 29, the laser machining apparatus L detects the positional deviation of the work W'in the XY direction via the position correction unit 108, and detects the displacement. The ranging position I can be corrected based on the result. Then, as illustrated in step S311 of FIG. 20, the laser processing apparatus L is a distance measuring unit in a state where the distance measuring position I is corrected by the position correcting unit 108 prior to the irradiation of the work W'with the laser beam. The focal position is corrected based on the measurement result of 103.

In this way, by adjusting the focal position while the position deviation of the work W'is corrected, the processing accuracy can be maintained high even if the position deviation of the work W'is corrected. ..

Further, as illustrated in step S315 of FIG. 20, the control unit 101 executes a two-dimensional scan of the near-infrared laser beam in a state in which the positional deviation is taken into consideration. This is advantageous in maintaining high processing accuracy of the work W'.

Further, as illustrated in FIG. 21D, by correcting the position of the print block B using the search result of the pattern search, the distance measurement position I associated with the print block B can be corrected. This is advantageous in improving the processing accuracy of the work W'.

Further, as illustrated in FIG. 21A and the like, by setting the distance measuring position I in the print block B, the distance measuring position I can be set more appropriately, and by extension, the processing accuracy of the work W'is kept high. It will be advantageous.

<Selection of print block to be corrected for misalignment>
FIG. 23 is a diagram illustrating a procedure for selecting a print block to be corrected for misalignment.

The laser machining apparatus L according to the present embodiment can select whether or not to correct the positional deviation by the position correction unit 108 for each of the print blocks set on the setting surface R4.

As an example, as shown in FIG. 23, when three print patterns Pm1, Pm2, and Pm3 are displayed on the setting surface R4, for example, clicking the print block associated with the first print pattern Pm1. Then, the print pattern Pm1 is surrounded by the frame F1. The same applies to the other print patterns Pm2 to Pm3. Specifically, by clicking the print block associated with the second print pattern Pm2, the print pattern Pm2 is surrounded by the frame F2, and the print block associated with the third print pattern Pm2 is clicked. By doing so, the print pattern Pm3 is surrounded by the frame F3.

Then, by clicking the "Finish" button in the dialog D5 while clicking one or more print blocks, it is possible to set the print block to be corrected for the positional deviation.

<< Other Embodiments >>
In the above embodiment, both the coaxial camera 6 and the overall camera 7 are provided in the housing 10, but the present disclosure is not limited to such a configuration. For example, the entire camera 7 may be attached to the outer surface of the housing 10.

Further, in the above-described embodiment, the entire camera 7 as the second imaging unit is configured to image the entire processing region R1 at a time, but the present disclosure is not limited to that configuration. For example, the overall camera 7 may generate an image showing the entire processing region R1 by imaging the processing region R1 a plurality of times and displaying the imaging results side by side.

Further, in the above-described embodiment, two imaging modes (wide-angle mode and standard mode) are set for each of the coaxial camera 6 and the overall camera 7, but the number of imaging modes is not limited to this. For example, three or more imaging modes may be set according to the height of the field of view size of each camera.

Further, in the above-described embodiment, the pattern image Pp is used as the image information, but the configuration is not limited to the pattern image Pp. For example, the edge information of the pattern image Pp may be used as the image information. By using the edge information, it is possible to speed up the pattern search.

1 Marker head 2 Laser light output unit 3 Laser light guide unit 33 Z scanner (focus adjustment unit)
4 Laser light scanning unit 5 Distance measuring unit 5A Distance measuring light emitting unit 5B Distance measuring light receiving unit 6 Coaxial camera (first imaging unit)
7 Wide area camera (second imaging unit)
100 Marker controller 101 Control unit (scanning control unit)
102 Condition setting storage unit (storage unit, imaging attribute storage unit)
103 Distance measurement unit 104 Feature extraction unit 105 Position deviation detection unit 107 Setting unit (machining setting unit)
108 Position correction unit 109 Imaging selection unit 110 Excitation light generation unit 801 Display unit A1 Imaging optical axis of coaxial camera A2 Imaging optical axis of the entire camera Pm Print pattern (processing pattern)
B Print block (processing block)
F1 1st field of view size F2 2nd field of view size I Distance measurement position I'Corrected distance measurement position Pw Captured image Pw1 Coaxial image (1st image)
Pw2 whole image (second image)
Pw'Newly generated captured image R1 processing area Rp pattern area (correction area)
Rs Search area L Laser machining equipment S Laser machining system W, W'Work (workpiece)

Claims (6)

An excitation light generator that generates excitation light,
A laser light output unit that generates laser light based on the excitation light generated by the excitation light generation unit and emits the laser light.
A laser processing apparatus including a laser light scanning unit that irradiates a work piece with laser light emitted from the laser light output unit and scans two-dimensionally within a processing region set on the surface of the work piece. And
By having an imaging optical axis branched from the laser optical path from the laser light output unit to the laser light scanning unit and imaging the workpiece through the laser light scanning unit, at least one of the processed regions A first imaging unit that generates a first image including the unit, and
By having an imaging optical axis independent of the laser optical path and imaging the work piece without the intervention of the laser light scanning unit, the field of view size is wider than that of the first imaging unit and the processing region. A second imaging unit that generates a second image that includes the entire image,
A display unit that displays the first or second image, and
On the first or second image displayed by the display unit, a correction area searched for identifying the positional deviation of the work piece and a range in which the correction area is searched are defined. The setting part that sets the search area and
A storage unit that stores image information in the correction area set by the setting unit and position information of the search area set by the setting unit.
An imaging selection unit that selects either one of the first and second imaging units based on the size of the search area set by the setting unit.
By controlling one of the first and second imaging units selected by the imaging selection unit, a new work piece different from the work piece used for setting the correction area is described as described in the first. A control unit that newly generates the first or second image,
Based on the image information stored in the storage unit and the image information extracted in the area corresponding to the search area in the first or second image newly generated by the control unit, the said image information. A positional deviation detecting unit for detecting a positional deviation between the workpiece and the new workpiece is provided.
When the control unit newly generates the first or second image,
When the first imaging unit is selected by the imaging selection unit, the first imaging unit receives control of the laser light scanning unit based on the position of the search region stored in the storage unit. While the first image is newly generated,
A laser processing apparatus characterized in that when the second imaging unit is selected by the imaging selection unit, the second imaging unit newly generates the second image. In the laser processing apparatus according to claim 1,
A machining setting unit that sets a machining pattern indicating the machining content to be formed in the machining area, and a machining setting unit.
A laser machining apparatus further comprising a position correction unit that corrects the position of the processing pattern based on the position deviation detected by the position deviation detection unit. In the laser processing apparatus according to claim 2.
The setting unit sets a distance measuring position on the first or second image for measuring the distance to the surface of the work piece.
The position correction unit corrects the distance measurement position of the workpiece based on the position deviation detected by the position deviation detection unit.
A focus adjustment unit that adjusts the focal position of the laser light emitted from the laser light output unit, and a focus adjustment unit.
A ranging light emitting unit that emits ranging light for measuring the distance from the laser machining apparatus to the surface of the work piece,
A scanning control unit that controls the laser light scanning unit so that the distance measuring light emitted by the distance measuring light emitting unit is irradiated to the distance measuring position corrected by the position correction unit.
A distance measuring light receiving unit that receives the distance measuring light that is reflected on the surface of the work piece and returned through the laser light scanning unit, and a distance measuring light receiving unit.
A distance measuring unit for measuring the distance from the laser processing apparatus to the surface of the workpiece based on the light receiving position of the distance measuring light in the distance measuring light receiving unit is further provided.
The focus adjusting unit adjusts the focal position based on the measurement result by the distance measuring unit in a state where the distance measuring position is corrected by the position correcting unit prior to irradiating the workpiece with a laser beam. A laser processing device characterized by this. In the laser processing apparatus according to any one of claims 1 to 3.
An imaging attribute storage unit that stores in advance a first visual field size indicating the visual field size of the first imaging unit and a second visual field size indicating the visual field size of the second imaging unit and wider than the first visual field size. Prepare,
The imaging selection unit compares the size of the search area with the size of the first or second visual field based on the storage contents in the imaging attribute storage unit, and based on the comparison result, the first A laser processing apparatus characterized in that one of the second imaging unit and the second imaging unit is selected. In the laser processing apparatus according to claim 4,
The laser processing apparatus is characterized in that the imaging selection unit selects the first imaging unit when both the first and second visual field sizes are wider than the search region. In the laser processing apparatus according to any one of claims 1 to 5.
At least one of the first and second imaging units has a plurality of imaging modes having different visual field sizes.
The laser processing apparatus is characterized in that the image pickup selection unit selects one from the plurality of image pickup modes based on the size of the search area.

Images