JP2020104162A - Laser processing device - Google Patents

Abstract

To save trouble due to an inclination of a work-piece to improve usability of a laser processing device.SOLUTION: A laser processing device L comprises: a ranging light emitting part 5A that emits ranging light; a ranging light receiving part 5B that receives ranging light reflected by a work-piece W; a distance measuring part 103 that measures a distance up to a surface of the work-piece W by a triangulation method, on the basis of a position where the ranging light is received in the ranging light receiving part 5B; a setting part 107 that sets a plurality of ranging points on a camera image Pw; a display control part 105 that performs visual display on the camera image Pw, on the basis of distances up to the ranging points; and a correction parameter calculating part 108 that determines an inclination of the work-piece W on the basis of the distances to the ranging points and calculates a correction parameter for correcting the inclination. The display control part 105 updates the visual display on the basis of the correction parameter, and a Z scanner 33 as a focus adjusting part adjusts a focus position of near-infrared laser light on the basis of the correction parameter.SELECTED DRAWING: Figure 14

Description

The technology disclosed herein relates to a laser processing apparatus, such as a laser marking apparatus, which performs processing by irradiating a workpiece with laser light.

Conventionally, a laser processing device capable of measuring a distance to a workpiece is known.

For example, in Patent Document 1, an objective light condensing lens that condenses a processing laser light (pulse laser light) emitted from a laser light source, the objective light condensing lens, and a workpiece (workpiece) There is disclosed a laser processing apparatus that includes a distance measuring sensor that measures the distance and an actuator that adjusts the focus position of laser light based on the measurement result of the distance measuring sensor.

Further, in Patent Document 2, as another example of the distance measuring sensor according to Patent Document 1, a displacement that emits distance measuring light (measuring laser light) for measuring a distance to a workpiece (working object) A laser processing apparatus including a sensor is disclosed.

The laser processing device disclosed in Patent Document 2 irradiates the workpiece mounted on the stage with the distance measuring light from the displacement sensor, and detects the reflected light by the displacement sensor as appropriate. It is designed to measure the distance to the work piece.

It is also widely known that the laser processing apparatus as disclosed in Patent Documents 1 and 2 described above also uses a camera or the like for capturing an image of the surface of a workpiece.

Specifically, for example, Patent Document 3 discloses a laser processing apparatus including an imaging unit (imaging device) including a CCD camera. The imaging unit according to the same document can image the surface of a workpiece by using visible light incident on a laser beam scanning unit (scanning unit) for scanning a laser beam.

JP, 2006-315031, A JP, 2008-215829, A JP, 2016-032831, A

By the way, in the laser processing apparatus according to Patent Document 2, for example, when an imaging unit as described in Patent Document 3 is used, a region (imaging region) imaged by the imaging unit and an object to be processed It is conceivable to arrange the workpiece such that the surface and the surface are substantially parallel to each other. With such an arrangement, it is possible to suppress a distance measurement error and accurately adjust the focus position.

On the other hand, when the surface of the workpiece is tilted with respect to the above-described imaging region, in order to adjust the focus position with high accuracy, the installation condition of the workpiece is adjusted so as to correct this tilt. It is possible. However, it has been newly found that there is room for improvement in terms of usability of the device because such work takes time and effort.

The technique disclosed here is made in view of such a point, and an object of the technique is to save the trouble caused by the inclination of the workpiece and improve the usability of the laser processing apparatus.

Specifically, the first aspect of the present disclosure is to generate a pump light and a laser light based on the pump light generated by the pump light generator, and to emit the laser light. A laser light output unit, a focus adjustment unit that adjusts the focus position of the laser light emitted from the laser light output unit, and irradiates the workpiece with the laser light whose focus position is adjusted by the focus adjustment unit. And a laser beam scanning unit for two-dimensionally scanning within a processing region set on the surface of the workpiece.

Then, according to the first aspect of the present disclosure, the laser processing device directs distance-measuring light for measuring a distance from the laser processing device to the surface of the workpiece toward the laser light scanning unit. A distance-measuring light emitting unit that emits the distance-measuring light, and a distance-measuring light receiving unit that receives the distance-measuring light emitted from the distance-measuring light emitting unit and reflected by the workpiece through the laser light scanning unit, At least one of a distance measuring unit that measures a distance from the laser processing device to the surface of the workpiece by a triangulation method based on a light receiving position of the distance measuring light in the distance measuring light receiving unit, and at least one of the processing regions. An image pickup unit that generates a picked-up image corresponding to the picked-up region by picking up an picked-up image region, a display unit that displays the picked-up image, and a plurality of measurement units in the picked-up region via the picked-up image. A setting unit that determines the distance measuring point, a scanning control unit that controls the laser light scanning unit so that the distance from the laser processing device to each of the plurality of distance measuring points is measured, and a plurality of distance measuring points Based on the distance to each, on the captured image, a display control unit that performs a visual display reflecting the length of the distance, and based on the distance to each of the plurality of focus detection points, the image in the captured image. And a correction parameter calculation unit that calculates a correction parameter for correcting the tilt of the surface of the workpiece, and the display control unit updates the visual display based on the correction parameter. The focus adjustment unit adjusts the focus position of the laser light based on the correction parameter.

According to this configuration, when measuring the distance from the laser processing device to the surface of the workpiece, the distance measuring light emitting section emits the distance measuring light. The distance-measuring light emitted from the distance-measuring light emitting unit is applied to the workpiece through the laser light scanning unit. The distance-measuring light applied to the work piece is reflected by the work piece, and then moves backward through the laser beam scanning section to reach the distance-measuring light receiving section. The distance measuring unit measures the distance to the surface of the workpiece based on the light receiving position of the distance measuring light in the distance measuring light receiving unit.

The display unit also displays the captured image generated by the image capturing unit. This picked-up image is an image corresponding to the picked-up area showing at least a part of the processed area. The setting unit can determine a plurality of distance measuring points via the captured image.

The scanning control unit measures the distance with respect to each of the distance measuring points thus determined, and the display control unit performs a visual display reflecting the length of each distance. In this way, by displaying the distance to each part of the processing area, the user can grasp the inclination of the workpiece.

Then, a correction parameter for correcting this inclination is calculated by the correction parameter calculation unit, the display control unit updates the visual display based on the correction parameter, and the focus adjustment unit uses the laser based on the correction parameter. Adjust the light focus position.

By adopting such a configuration, it is possible to save the trouble for correcting the inclination of the workpiece. Thereby, the usability of the laser processing apparatus can be improved.

Further, according to the second aspect of the present disclosure, the setting unit may divide the imaging area into a plurality of blocks and set one or more focus detection points in each block.

According to this configuration, the distance measuring point can be set appropriately, which is advantageous in improving the usability of the laser processing apparatus.

Further, according to the third aspect of the present disclosure, the scan control unit measures a distance to a focus detection point set in each of the plurality of blocks, and the display control unit uses the scan control unit. The display color of each of the plurality of blocks may be different according to the length of the measured distance.

According to this configuration, the user can more appropriately grasp the inclination of the workpiece, which is advantageous in improving the usability of the laser processing apparatus.

Further, according to the fourth aspect of the present disclosure, the display control unit may perform trapezoidal correction on the captured image based on the correction parameter.

According to this configuration, the trouble of correcting the inclination of the workpiece can be saved, which is advantageous in improving the usability of the laser processing apparatus.

Further, according to the fifth aspect of the present disclosure, the display control unit may correct the captured image by rotating the captured image around a rotation axis orthogonal to the imaging region.

According to this configuration, elements other than the inclination of the workpiece can be corrected, which is advantageous in improving the usability of the laser processing apparatus.

Further, according to the sixth aspect of the present disclosure, the correction parameter calculation unit may obtain the inclination of the surface of the workpiece with respect to the plane formed by the scanning direction of the laser light by the laser light scanning unit. ..

According to this configuration, the inclination of the workpiece can be obtained more appropriately, which is advantageous in improving the usability of the laser processing apparatus.

Further, according to the seventh aspect of the present disclosure, the scan control unit may correct the scanning direction of the laser light by the laser light scanning unit based on the correction parameter.

According to this configuration, the inclination of the workpiece can be corrected more appropriately, which is advantageous in improving the usability of the laser processing apparatus.

As described above, according to the laser processing apparatus, it is possible to save the trouble caused by the inclination of the workpiece and improve the usability of the laser processing apparatus.

FIG. 1 is a diagram illustrating an overall configuration of a laser processing system. FIG. 2 is a block diagram illustrating a schematic configuration of the laser processing apparatus. FIG. 3A is a block diagram illustrating a schematic configuration of the marker head. FIG. 3B is a block diagram illustrating a schematic configuration of the marker head. FIG. 4 is a perspective view illustrating the appearance of the marker head. FIG. 5 is a diagram illustrating the configuration of the laser light scanning unit. FIG. 6 is a diagram illustrating the configuration of the laser light guide unit, the laser light scanning unit, and the distance measuring unit. FIG. 7 is a cross-sectional view illustrating an optical path connecting the laser light guide unit, the laser light scanning unit, and the distance measuring unit. FIG. 8 is a perspective view illustrating an optical path connecting the laser light guide unit, the laser light scanning unit, and the distance measuring unit. FIG. 9 is a diagram for explaining the triangulation method. FIG. 10 is a flowchart showing a method of using the laser processing system. FIG. 11 is a flowchart illustrating a procedure for creating print settings. FIG. 12 is a flowchart illustrating an operating procedure of the laser processing apparatus. FIG. 13 is a diagram illustrating the relationship between the processing area of the work and the display surface. FIG. 14 is a flowchart illustrating a procedure for adjusting the installation position of the work. FIG. 15A is a diagram illustrating a captured image of a work. FIG. 15B is a diagram exemplifying a measurement region for detecting the inclination of the work W. FIG. 15C is a diagram exemplifying how distance measurement is performed on each block obtained by dividing the measurement region. FIG. 15D is a diagram illustrating a visual display before position adjustment on the display unit. FIG. 15E is a diagram illustrating a visual display after position adjustment on the display unit. FIG. 16 is a diagram illustrating an example of updating the visual display on the display unit. FIG. 17 is a diagram illustrating the θ rotation correction of the captured image.

Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. The following description is an example.

That is, although the present specification describes a laser marker as an example of a laser processing apparatus, the technology disclosed herein can be applied to general laser application equipment regardless of the names of the laser processing apparatus and the laser marker.

Further, in the present specification, printing processing will be described as a typical example of processing, but the present invention is not limited to printing processing, and as long as a predetermined processing pattern is formed on the surface of a work W as a workpiece, an image can be formed. It can be used in all kinds of processing using laser light, such as marking.

<Overall structure>
FIG. 1 is a diagram illustrating an overall configuration of a laser processing system S, and FIG. 2 is a diagram illustrating a schematic configuration of a laser processing apparatus L in the laser processing system S. The laser processing system S illustrated in FIG. 1 includes a laser processing device L, an operation terminal 800 connected to the laser processing device L, and an external device 900.

Then, the laser processing apparatus L illustrated in FIGS. 1 and 2 irradiates the work W as the workpiece with the laser light emitted from the marker head 1 and three-dimensionally scans the surface of the work W. By doing so, processing is performed. The "three-dimensional scanning" referred to here is a two-dimensional operation of scanning the irradiation destination of the laser light on the surface of the workpiece W (so-called "two-dimensional scanning") and the focus position of the laser light. Refers to the general term for the combination of one-dimensional movements.

In particular, the laser processing apparatus L according to this embodiment can emit laser light having a wavelength near 1064 nm as the laser light for processing the work W. This wavelength corresponds to the near-infrared (NIR) wavelength range. Therefore, in the following description, the laser beam for processing the workpiece W may be referred to as "near infrared laser beam" to distinguish it from other laser beams. Laser light other than near infrared rays may be used for processing the work W.

Further, the laser processing apparatus L according to the present embodiment measures the distance to the work W via the distance measuring unit 5 built in the marker head 1 and uses the measurement result to measure the near infrared laser light. The focus position can be adjusted.

As shown in FIGS. 1 and 2, the laser processing apparatus L includes a marker head 1 for emitting a laser beam and a marker controller 100 for controlling the marker head 1.

The marker head 1 and the marker controller 100 are separate bodies in this embodiment, and are electrically connected via electrical wiring and optically coupled via an optical fiber cable.

More generally, one of the marker head 1 and the marker controller 100 may be incorporated into the other to be integrated. In this case, the optical fiber cable or the like can be omitted as appropriate.

The operation terminal 800 has, for example, a central processing unit (CPU) and a memory, and is connected to the marker controller 100. The operation terminal 800 functions as a terminal for setting various processing conditions such as print settings and showing information related to laser processing to the user. The operation terminal 800 includes a display unit 801 for displaying information to the user, an operation unit 802 for receiving an operation input by the user, and a storage device 803 for storing various information.

Specifically, the display unit 801 is composed of, for example, a liquid crystal display or an organic EL panel. The display unit 801 displays the operation status and processing conditions of the laser processing apparatus L as information related to laser processing. On the other hand, the operation unit 802 includes, for example, a keyboard and/or a pointing device. Here, the pointing device includes a mouse and/or a joystick. The operation unit 802 is configured to receive an operation input by the user, and is used to operate the marker head 1 via the marker controller 100.

The operation terminal 800 configured as described above can set processing conditions in laser processing based on an operation input by the user. The processing conditions include, for example, the content (marking pattern) of a character string or the like to be printed on the work W, the output required for the laser light (target output), and the scanning speed of the laser light on the work W (scan speed). ) Is included.

The processing conditions according to the present embodiment also include the conditions and parameters related to the distance measuring unit 5 described above (hereinafter, also referred to as “distance measuring conditions”). Such distance measuring conditions include, for example, data associating a signal indicating the detection result of the distance measuring unit 5 with the distance to the surface of the work W.

The processing conditions set by the operation terminal 800 are output to the marker controller 100 and stored in the condition setting storage unit 102. If necessary, the storage device 803 in the operation terminal 800 may store the processing conditions.

The operation terminal 800 can be integrated into the marker controller 100, for example. In this case, the name of the control unit or the like is used instead of the “operating terminal”, but in at least this embodiment, the operating terminal 800 and the marker controller 100 are separate entities.

The external device 900 is connected to the marker controller 100 of the laser processing apparatus L as needed. In the example illustrated in FIG. 1, an image recognition device 901 and a programmable logic controller (PLC) 902 are provided as the external device 900.

Specifically, the image recognition device 901 determines the type and position of the work W conveyed on the manufacturing line, for example. As the image recognition device 901, for example, an image sensor can be used. The PLC 902 is used to control the laser processing system S according to a predetermined sequence.

In addition to the above-described devices and devices, the laser processing device L can be connected to devices for operating and controlling, computers for performing various other processes, storage devices, peripheral devices, and the like. The connection in this case may be, for example, serial connection such as IEEE1394, RS-232, RS-422 and USB, or parallel connection. Alternatively, electrical, magnetic, or optical connection can be adopted through a network such as 10BASE-T, 100BASE-TX, 1000BASE-T. Besides the wired connection, a wireless LAN such as IEEE 802 or a wireless connection using radio waves such as Bluetooth (registered trademark), infrared rays, optical communication, or the like may be used. Further, as a storage medium used in a storage device for exchanging data and storing various settings, for example, various memory cards, magnetic disks, magneto-optical disks, semiconductor memories, hard disks, etc. can be used.

Hereinafter, a description of the hardware configurations of the marker controller 100 and the marker head 1 and a configuration of the control of the marker head 1 by the marker controller 100 will be sequentially described.

<Marker controller 100>
As shown in FIG. 2, the marker controller 100 includes a condition setting storage unit 102 that stores the above-described processing conditions, a control unit 101 that controls the marker head 1 based on the processing conditions stored therein, and laser excitation. An excitation light generation unit 110 that generates light (excitation light).

(Condition setting storage unit 102)
The condition setting storage unit 102 is configured to store the processing conditions set via the operation terminal 800, and to output the stored processing conditions to the control unit 101 as necessary.

Specifically, the condition setting storage unit 102 is configured by using a volatile memory, a non-volatile memory, a hard disk drive (Hard Disk Drive: HDD), etc., and temporarily or continuously stores information indicating a processing condition. can do. When the operation terminal 800 is incorporated in the marker controller 100, the storage device 803 can also be configured to serve as the condition setting storage unit 102.

(Control unit 101)
The control unit 101, based on the processing conditions stored in the condition setting storage unit 102, at least the excitation light generation unit 110 in the marker controller 100, the laser light output unit 2 in the marker head 1, the laser light guide unit 3, and the like. By controlling the laser beam scanning unit 4 and the distance measuring unit 5, printing work of the work W is executed.

Specifically, the control unit 101 has a CPU, a memory, and an input/output bus, and outputs a signal indicating information input via the operation terminal 800 and a processing condition read from the condition setting storage unit 102. A control signal is generated based on the signal shown. The control unit 101 controls the printing processing on the work W and the measurement of the distance to the work W by outputting the control signal thus generated to each unit of the laser processing apparatus L.

For example, the control unit 101 reads the target output stored in the condition setting storage unit 102 when starting the processing of the work W, and outputs the control signal generated based on the target output to the excitation light source driving unit 112, Controls the generation of laser excitation light.

Further, when actually processing the work W, the control unit 101 reads a processing pattern (marking pattern) stored in, for example, the condition setting storage unit 102, and outputs a control signal generated based on the processing pattern to the laser beam. The light is output to the scanning unit 4, and the near infrared laser light is two-dimensionally scanned. The control unit 101 exemplifies the “scanning control unit” in the present embodiment in that it controls the two-dimensional scanning of the near infrared laser light.

(Excitation light generation unit 110)
The pumping light generator 110 is optically coupled to the pumping light source 111 that generates a laser beam according to the driving current, the pumping light source driver 112 that supplies the driving current to the pumping light source 111, and the pumping light source 111. And the excitation light condensing unit 113. The excitation light source 111 and the excitation light condensing unit 113 are fixed inside an excitation casing (not shown). Although not described in detail, this excitation casing is made of metal such as copper having excellent thermal conductivity, and can efficiently radiate heat from the excitation light source 111.

Hereinafter, each part of the excitation light generator 110 will be described in order.

The excitation light source drive unit 112 supplies a drive current to the excitation light source 111 based on the control signal output from the control unit 101. Although not described in detail, the excitation light source drive unit 112 determines a drive current based on the target output determined by the control unit 101, and supplies the drive current thus determined to the excitation light source 111.

The excitation light source 111 is supplied with a drive current from the excitation light source drive unit 112 and oscillates a laser beam according to the drive current. For example, the excitation light source 111 is composed of a laser diode (LD) or the like, and an LD array or LD bar in which a plurality of LD elements are linearly arranged can be used. When an LD array or LD bar is used as the excitation light source 111, the laser light oscillated from each element is output in a line and enters the excitation light condensing unit 113.

The excitation light condensing unit 113 condenses the laser light output from the excitation light source 111 and outputs it as laser excitation light (excitation light). For example, the excitation light condensing unit 113 is composed of a focusing lens or the like, and has an incident surface on which the laser light is incident and an emission surface on which the laser excitation light is output. The excitation light condensing unit 113 is optically coupled to the marker head 1 via the above-mentioned optical fiber cable. Therefore, the laser excitation light output from the excitation light condensing unit 113 is guided to the marker head 1 via the optical fiber cable.

The pumping light generator 110 can be an LD unit or an LD module in which the pumping light source driver 112, the pumping light source 111, and the pumping light condensing unit 113 are incorporated in advance. Further, the pumping light emitted from the pumping light generation unit 110 (specifically, the laser pumping light output from the pumping light condensing unit 113) can be non-polarized, thereby changing the polarization state. There is no need to consider it, which is advantageous in design. In particular, regarding the configuration around the excitation light source 111, a mechanism for making the output light non-polarized is provided to the LD unit itself which bundles the light obtained from the LD array in which several dozen LD elements are arranged with an optical fiber and outputs the bundled light. It is preferable to provide.

(Other components)
The marker controller 100 also includes a distance measuring unit 103 that measures the distance to the work W via the distance measuring unit 5. The distance measuring unit 103 is electrically connected to the distance measuring unit 5 and is a signal related to the measurement result of the distance measuring unit 5 (at least a signal indicating the light receiving position of the distance measuring light by the distance measuring light receiving unit 5B). Is being received.

Further, the marker controller 100 executes various processes based on the measurement result by the distance measuring unit 103. Specifically, the marker controller 100 includes a display control unit 105 that controls the display mode on the display unit 801 based on the measurement result by the distance measuring unit 103.

The marker controller 100 also includes a setting unit 107 that sets information related to the marking pattern, and a correction parameter calculation unit 108 that calculates a correction parameter related to the installation position of the work W. The control unit 101 serving as a scanning control unit reads and uses the setting contents of the setting unit 107.

The distance measuring unit 103, the display control unit 105, the setting unit 107, and the correction parameter calculation unit 108 may be configured by the control unit 101. For example, the control unit 101 may also serve as the display control unit 105. Alternatively, the distance measuring unit 103 may also serve as the correction parameter calculating unit 108 and the like.

Details of the distance measurement unit 103, the display control unit 105, the setting unit 107, and the correction parameter calculation unit 108 will be described later.

<Marker head 1>
As described above, the laser excitation light generated by the excitation light generator 110 is guided to the marker head 1 via the optical fiber cable. The marker head 1 irradiates the surface of the work W with a laser light output unit 2 that amplifies/generates laser light based on laser excitation light and outputs the laser light, and a laser light output from the laser light output unit 2 A laser beam scanning unit 4 that performs dimensional scanning, a laser beam guiding unit 3 that forms an optical path from the laser beam output unit 2 to the laser beam scanning unit 4, and distance measurement that projects and receives light through the laser beam scanning unit 4. The distance measuring unit 5 for measuring the distance to the surface of the work W based on light.

Here, the laser light guide unit 3 according to the present embodiment not only constitutes an optical path, but also a Z scanner (focus adjustment unit) 33 for adjusting the focus position of the laser light, a guide light source for emitting guide light, and , A narrow-range camera 37 for capturing an image of the surface of the work W, and the like.

Further, the laser light guide unit 3 is further connected to an upstream merging mechanism 31 for merging the near infrared laser light output from the laser light output unit 2 and the guide light emitted from the guide light source 36, and the laser light scanning unit 4. It has a downstream merging mechanism 35 for merging the guided laser light and the distance measuring light projected from the distance measuring unit 5.

3A and 3B are block diagrams illustrating the schematic configuration of the marker head 1, and FIG. 4 is a perspective view illustrating the appearance of the marker head 1. 3A to 3B, FIG. 3A exemplifies a case where the work W is processed by using the near infrared laser light, and FIG. 3B shows a case where the distance to the surface of the work W is measured using the distance measuring unit 5. Is illustrated.

As illustrated in FIGS. 3A to 4, the marker head 1 includes a housing 10 in which at least a laser light output unit 2, a laser light guide unit 3, a laser light scanning unit 4, and a distance measuring unit 5 are provided. ing. The housing 10 has a substantially rectangular outer shape as shown in FIG. The lower surface of the housing 10 is partitioned by a plate-shaped bottom plate 10a. The bottom plate 10a is provided with a transmission window 19 for emitting laser light from the marker head 1 to the outside of the marker head 1. The transmissive window 19 is configured by fitting a plate-shaped member that can transmit near-infrared laser light, guide light, and distance measuring light into a through hole that penetrates the bottom plate 10a in the plate thickness direction.

In the following description, the longitudinal direction of the housing 10 in FIG. 4 is simply referred to as “longitudinal direction” or “front-back direction”, and the lateral direction of the housing 10 in FIG. 4 is simply referred to as “lateral direction” or It may be referred to as "left-right direction". Similarly, the height direction of the housing 10 in FIG. 4 may be simply referred to as “height direction” or “vertical direction”.

FIG. 5 is a perspective view illustrating the configuration of the laser light scanning unit 4. 6 is a cross-sectional view illustrating the configuration of the laser beam guide unit 3, the laser beam scanning unit 4, and the distance measuring unit 5, and FIG. 7 is the laser beam guide unit 3, the laser beam scanning unit 4, and the distance measuring unit 5. 9 is a cross-sectional view illustrating an optical path that connects the laser light guide unit 3, the laser light scanning unit 4, and the distance measuring unit 5. FIG.

As illustrated in FIGS. 5 to 6, a partition portion 11 is provided inside the housing 10. The internal space of the housing 10 is partitioned by the partition portion 11 into one side and the other side in the longitudinal direction.

Specifically, the partition part 11 is formed in a flat plate shape extending in a direction perpendicular to the longitudinal direction of the housing 10. Further, in the longitudinal direction of the casing 10, the partition portion 11 is arranged closer to one side in the longitudinal direction (front side in FIG. 4) than the central portion of the casing 10 in the same direction.

Therefore, the space partitioned into one side in the longitudinal direction in the housing 10 has a shorter dimension in the longitudinal direction than the space partitioned into the other side in the longitudinal direction (rear side in FIG. 4). Hereinafter, the space partitioned to the other side in the longitudinal direction in the housing 10 is referred to as a first space S1, while the space partitioned to the one side in the longitudinal direction is referred to as a second space S2.

In this embodiment, a laser beam output unit 2, a part of the laser beam guide unit 3, a laser beam scanning unit 4, and a distance measuring unit 5 are arranged inside the first space S1. On the other hand, inside the second space S2, main components of the laser light guide portion 3 are arranged.

Specifically, the first space S1 is partitioned by the substantially flat plate-shaped base plate 12 into a space on one side (left side in FIG. 4) in the lateral direction and a space on the other side (right side in FIG. 4). .. In the former space, the components forming the laser light output unit 2 are mainly arranged.

More specifically, among the components forming the laser light output unit 2, the optical component 21 such as an optical lens or an optical crystal that is required to be hermetically sealed as much as possible is provided in the short-side direction in the first space S1. In the side space, it is arranged inside the accommodation space surrounded by the base plate 12 and the like.

On the other hand, among the components of the laser light output unit 2, for components such as electric wiring and the heat sink 22 shown in FIG. 5, which are not necessarily required to be sealed, the base plate 12 is sandwiched between the optical components 21. It is arranged on the opposite side (the other side in the lateral direction of the first space S1).

Further, as illustrated in FIGS. 5 and 6, the laser light scanning unit 4 can be arranged on one side in the lateral direction with the base plate 12 sandwiched therebetween, as with the optical component 21 in the laser light output unit 2. .. Specifically, the laser beam scanning unit 4 according to this embodiment is adjacent to the partition unit 11 described above in the longitudinal direction, and is arranged along the inner bottom surface of the housing 10 in the vertical direction.

Further, as shown in FIG. 6, the distance measuring unit 5 is arranged in the space on the other side in the short-side direction of the first space S1, similarly to the heat sink 22 in the laser light output unit 2.

In addition, the components forming the laser light guide unit 3 are mainly arranged in the second space S2. In this embodiment, most of the components that make up the laser light guide portion 3 are housed in a space surrounded by the partition portion 11 and the cover member 17 that partitions the front surface of the housing 10.

Note that, of the components forming the laser light guide unit 3, the downstream merging mechanism 35 is arranged in a region near the partition unit 11 in the first space S1 (see FIG. 5). That is, in this embodiment, the downstream merging mechanism 35 is located near the boundary between the first space S1 and the second space S2.

Further, the base plate 12 is formed with a through hole (not shown) which penetrates the base plate 12 in the plate thickness direction. The laser light guide portion 3 and the laser light scanning portion 4 are optically coupled to the distance measuring unit 5 through the through hole.

Hereinafter, the configurations of the laser light output unit 2, the laser light guide unit 3, the laser light scanning unit 4, and the distance measuring unit 5 will be sequentially described.

(Laser light output unit 2)
The laser light output unit 2 generates near-infrared laser light for printing processing based on the laser excitation light generated by the excitation light generation unit 110, and directs the near-infrared laser light to the laser light guide unit 3. It is configured to output.

Specifically, the laser light output unit 2 generates a laser light having a predetermined wavelength based on the laser excitation light, amplifies the laser light, and emits near-infrared laser light, and a laser oscillator 21a. A beam sampler 21b for separating a part of the oscillated near infrared laser light, and a power monitor 21c on which the near infrared laser light separated by the beam sampler 21b is incident are provided.

Although not described in detail, the laser oscillator 21a according to the present embodiment is for lasing a laser medium that emits a laser beam by performing stimulated emission corresponding to the laser excitation light and a laser beam that is emitted from the laser medium. It has a Q switch and a mirror that resonates the laser light pulse-oscillated by the Q switch.

In particular, in this embodiment, rod-shaped Nd:YVO ₄ (yttrium vanadate) is used as the laser medium. As a result, the laser oscillator 21a can emit laser light having a wavelength near 1064 nm (the above-mentioned near infrared laser light) as the laser light. However, the laser medium is not limited to this example, and for example, YAG, YLF, GdVO ₄ or the like doped with a rare earth can be used as another laser medium. Various solid-state laser media can be used depending on the application of the laser processing apparatus L.

Further, a wavelength conversion element may be combined with the solid-state laser medium to convert the wavelength of the output laser light into an arbitrary wavelength. Further, a so-called fiber laser in which a fiber is used as an oscillator instead of a bulk as a solid-state laser medium may be used.

Furthermore, the laser oscillator 21a may be configured by combining a solid-state laser medium such as Nd:YVO ₄ and a fiber. In that case, while a solid laser medium is used, a laser with a short pulse width is emitted to suppress thermal damage to the work W, while high output is realized as when a fiber is used. It is possible to realize faster printing processing.

The power monitor 21c detects the output of near infrared laser light. The power monitor 21c is electrically connected to the marker controller 100 and can output the detection signal thereof to the control unit 101 and the like.

(Laser light guide 3)
The laser light guide unit 3 forms an optical path P that guides the near infrared laser light emitted from the laser light output unit 2 to the laser light scanning unit 4. The laser light guide unit 3 includes a Z mirror (focus adjustment unit) 33, a guide light source (guide light emission unit) 36, a narrow-range camera 37, and the like, in addition to the bend mirror 34 for forming the optical path P. .. All of these components are provided inside the housing 10 (mainly in the second space S2).

The near infrared laser light incident from the laser light output unit 2 is reflected by the bend mirror 34 and passes through the laser light guide unit 3. On the way to the bend mirror 34, a Z scanner 33 for adjusting the focus position of the near infrared laser light is arranged. The near-infrared laser light that has passed through the Z scanner 33 and reflected by the bend mirror 34 enters the laser light scanning unit 4.

The optical path P formed by the laser light guide unit 3 can be divided into two parts with the Z scanner 33 as a focus adjustment unit as a boundary. Specifically, the optical path P formed by the laser light guide unit 3 includes an upstream optical path Pu from the laser light output unit 2 to the Z scanner 33, and a downstream optical path Pd from the Z scanner 33 to the laser light scanning unit 4. Can be divided into

More specifically, the upstream optical path Pu is provided inside the housing 10, and reaches the Z scanner 33 from the laser light output unit 2 via the upstream merging mechanism 31 described above.

On the other hand, the downstream side optical path Pd is provided inside the housing 10, and in the laser beam scanning section 4 from the Z scanner 33 through the bend mirror 34 and the downstream side joining mechanism 35 in order. It reaches the first scanner 41.

As described above, inside the housing 10, the upstream merging mechanism 31 is provided in the middle of the upstream optical path Pu, and the downstream merging mechanism 35 is provided in the middle of the downstream optical path Pd.

Hereinafter, the configuration related to the laser light guide unit 3 will be sequentially described.

-Guide light source 36-
The guide light source 36 is provided in the second space S2 inside the housing 10 and emits guide light for projecting a predetermined processing pattern onto the surface of the work W. The wavelength of this guide light is set so that it falls within the visible light range. As an example thereof, the guide light source 36 according to the present embodiment emits red laser light having a wavelength near 655 nm as guide light. Therefore, when the guide light is emitted from the marker head 1, the user can visually recognize the guide light.

In addition, in the present embodiment, the wavelength of the guide light is set to be different from at least the wavelength of the near infrared laser light. Further, as described later, the distance measuring light emitting unit 5A of the distance measuring unit 5 emits distance measuring light having a wavelength different from that of the guide light and the near infrared laser light. Therefore, the distance measuring light, the guide light, and the laser light have different wavelengths.

Specifically, the guide light source 36 is disposed at substantially the same height as the upstream merging mechanism 31 in the second space S2, and emits a visible light laser (guide light) toward the inner side in the lateral direction of the housing 10. Can be emitted. The guide light source 36 is also arranged such that the optical axis of the guide light emitted from the guide light source 36 and the upstream merging mechanism 31 intersect.

The “substantially the same height” here means that the height positions are substantially the same when viewed from the bottom plate 10a that forms the lower surface of the housing 10. In other description, it also means the height viewed from the bottom plate 10a.

Therefore, for example, when the guide light is emitted from the guide light source 36 so that the user can visually recognize the processing pattern by the near infrared laser light, the guide light reaches the upstream merging mechanism 31. The upstream merging mechanism 31 has a dichroic mirror (not shown) as an optical component. As described later, this dichroic mirror reflects the near infrared laser light while transmitting the guide light. As a result, the guide light that has passed through the dichroic mirror and the near-infrared laser light that has been reflected by the mirror merge and become coaxial.

The guide light source 36 according to the present embodiment is configured to emit the guide light based on the control signal output from the control unit 101.

-Upstream merging mechanism 31-
The upstream merging mechanism 31 merges the guide light emitted from the guide light source 36 serving as a guide light emitting portion into the upstream optical path Pu. By providing the upstream merging mechanism 31, the guide light emitted from the guide light source 36 and the near infrared laser light in the upstream optical path Pu can be made coaxial.

As described above, the wavelength of the guide light is set to be at least different from the wavelength of the near infrared laser light. Therefore, the upstream merging mechanism 31 can be configured by using, for example, a dichroic mirror, as described above. The near-infrared laser light and the guide light coaxialized by the dichroic mirror propagate downward, pass through the Z scanner 33, and reach the bend mirror 34.

-Z scanner 33-
The Z scanner 33 as a focus adjustment unit is arranged in the optical path formed by the laser light guide unit 3 and can adjust the focus position of the near infrared laser light emitted from the laser light output unit 2. ..

Specifically, as shown in FIGS. 3A and 3B, the Z scanner 33 according to the present embodiment passes through the entrance lens 33a that transmits the near-infrared laser light emitted from the laser light output unit 2 and the entrance lens 33a. The collimator lens 33b that allows the near-infrared laser light to pass, the exit lens 33c that allows the near-infrared laser light that has passed through the entrance lens 33a and the collimator lens 33b to pass through, the lens drive unit 33d that moves the entrance lens 33a, and the entrance. It has a lens 33a, a collimating lens 33b, and a casing 33e that houses the emitting lens 33c.

The entrance lens 33a is a plano-concave lens, and the collimator lens 33b and the exit lens 33c are plano-convex lenses. The entrance lens 33a, the collimator lens 33b, and the exit lens 33c are arranged such that their optical axes are coaxial with each other.

In the Z scanner 33, the lens driving unit 33d moves the incident lens 33a along the optical axis. Thereby, while maintaining the optical axes of the incident lens 33a, the collimator lens 33b, and the exit lens 33c coaxial with the near-infrared laser light passing through the Z scanner 33, the relative distance between the entrance lens 33a and the exit lens 33c is changed. can do. As a result, the focus position of the near-infrared laser light with which the work W is irradiated changes.

Hereinafter, each part of the Z scanner 33 will be described in more detail.

The casing 33e has a substantially cylindrical shape. As shown in FIGS. 3A and 3B, openings 33f for passing near-infrared laser light are formed at both ends of the casing 33e. Inside the casing 33e, an entrance lens 33a, a collimator lens 33b, and an exit lens 33c are arranged in this order in the vertical direction.

The collimator lens 33b and the exit lens 33c among the entrance lens 33a, the collimator lens 33b, and the exit lens 33c are fixed inside the casing 33e. On the other hand, the entrance lens 33a is provided so as to be vertically movable. The lens driving unit 33d has, for example, a motor, and moves the incident lens 33a in the vertical direction. As a result, the relative distance between the entrance lens 33a and the exit lens 33c is changed.

For example, it is assumed that the distance between the entrance lens 33a and the exit lens 33c is adjusted to be relatively short by the lens driving unit 33d. In this case, since the converging angle of the near infrared laser light passing through the emission lens 33c becomes relatively small, the focus position of the near infrared laser light moves away from the transmission window 19 of the marker head 1.

On the other hand, it is assumed that the distance between the entrance lens 33a and the exit lens 33c is adjusted to be relatively long by the lens driving unit 33d. In this case, since the converging angle of the near-infrared laser light passing through the emission lens 33c becomes relatively large, the focus position of the near-infrared laser light approaches the transmission window 19 of the marker head 1.

In the Z scanner 33, of the entrance lens 33a, the collimator lens 33b, and the exit lens 33c, the entrance lens 33a may be fixed inside the casing 33e, and the collimator lens 33b and the exit lens 33c may be vertically movable. Good. Alternatively, all of the entrance lens 33a, the collimator lens 33b, and the exit lens 33c may be movable in the vertical direction.

In this way, the Z scanner 33 as a focus adjustment unit functions as a unit for scanning the near infrared laser light in the vertical direction. Hereinafter, the scanning direction of the Z scanner 33 may be referred to as the “Z direction”.

The near infrared laser light passing through the Z scanner 33 is coaxial with the guide light emitted from the guide light source 36 as described above. Therefore, by operating the Z scanner 33, not only the near infrared laser light but also the focus position of the guide light can be adjusted together.

The Z scanner 33 according to the present embodiment, particularly the lens driving unit 33d in the Z scanner 33, is configured to operate based on the control signal output from the control unit 101.

-Narrow area camera 37-
In the present embodiment, the narrow area camera 37 is arranged at substantially the same height as the bend mirror 34, and receives the reflected light that has entered the laser light guide unit 3 from the laser light operation unit 4. The narrow area camera 37 according to the present embodiment is configured such that the reflected light reflected at the printing point of the work W enters through the bend mirror 34. The narrow-range camera 37 can form an image of the surface of the work W by forming an image of the reflected light thus entered. The layout of the narrow area camera 37 can be changed as appropriate. For example, the heights of the narrow area camera 37 and the bend mirror 34 may be different from each other.

The reflected light used for image formation by the narrow-range camera 37 propagates along the downstream optical path Pd described above. Therefore, by appropriately operating the laser beam scanning unit 4, it is possible to scan the imaging region R3 illustrated in FIG.

The narrow-range camera 37 according to the present embodiment is configured to operate based on the control signal output from the control unit 101, like the guide light source 36 and the like.

-Bend mirror 34-
The bend mirror 34 is provided in the middle of the downstream optical path Pd, and is arranged so as to bend the optical path Pd and direct it toward the rear. As shown in FIG. 6, the bend mirror 34 is disposed at substantially the same height as the dichroic mirror 35a in the downstream merging mechanism 35, and reflects the near infrared laser light and the guide light that have passed through the Z scanner 33. You can

The near infrared laser light and the guide light reflected by the bend mirror 34 propagate backward, pass through the downstream merging mechanism 35, and reach the laser light scanning unit (specifically, the first scanner 41).

-Downstream merging mechanism 35-
The downstream merging mechanism 35 guides the distance-measuring light emitted from the distance-measuring light emitting unit 5A of the distance-measuring unit 5 to the work W via the laser light scanning unit 4 by merging the distance-measuring light with the downstream optical path Pd. .. In addition, the downstream merging mechanism 35 guides the distance measuring light reflected by the work W and returning in the order of the laser light scanning unit 4 and the downstream optical path Pd to the distance measuring light receiving unit 5B in the distance measuring unit 5.

By providing the downstream merging mechanism 35, the distance measuring light emitted from the distance measuring light emitting unit 5A can be coaxial with the near infrared laser light and the guide light in the downstream optical path Pd. At the same time, by providing the downstream merging mechanism 35, out of the distance measuring light emitted from the marker head 1 and reflected by the work W, the distance measuring light incident on the marker head 1 is guided to the distance measuring light receiving portion 5B. be able to.

As described above, the wavelength of the distance measuring light is set to be different from the wavelengths of the near infrared laser light and the guide light. Therefore, the downstream merging mechanism 35 can be configured by using, for example, a dichroic mirror, similarly to the upstream merging mechanism 31.

Specifically, the downstream merging mechanism 35 according to the present embodiment has a dichroic mirror 35a that transmits one of the distance measuring light and the guide light and reflects the other (see FIGS. 6 and 7). More specifically, the dichroic mirror 35a is arranged at substantially the same height as the bend mirror 34 and behind the bend mirror 34, and is arranged in the space on the left side in the lateral direction within the housing 10.

As shown in FIG. 6 and the like, the dichroic mirror 35a is also fixed in a posture in which the mirror surface on one side faces the bend mirror 34 and the mirror surface on the other side faces the base plate 12. Therefore, the near infrared laser light and the guide light are incident on the mirror surface on one side of the dichroic mirror 35a, while the distance measuring light is incident on the mirror surface on the other side.

The dichroic mirror 35a according to this embodiment can reflect the distance measuring light and transmit the near infrared laser light and the guide light. Thus, for example, when the distance measuring light emitted from the distance measuring unit 5 is incident on the dichroic mirror 35a, the distance measuring light is merged with the downstream optical path Pd to be coaxial with the near infrared laser light and the guide light. You can The near-infrared laser light, the guide light, and the distance-measuring light thus coaxialized reach the first scanner 41 as shown in FIGS. 3A and 3B.

On the other hand, the distance measuring light reflected by the work W returns to the laser light scanning unit 4 and reaches the downstream optical path Pd. The distance measuring light returning to the downstream optical path P is reflected by the dichroic mirror 35 a in the downstream merging mechanism 35 and reaches the distance measuring unit 5.

It should be noted that, as shown in FIG. 7, both the distance measuring light that enters the dichroic mirror 35a from the distance measuring unit 5 and the distance measuring light that is reflected by the dichroic mirror 35a and enters the distance measuring unit 5 are The light is propagated along the left-right direction when viewed in plan view (the lateral direction of the housing 10 ).

(Laser light scanning unit 4)
As shown in FIG. 3A, the laser beam scanning unit 4 irradiates the work W with the laser beam (near infrared laser beam) emitted from the laser beam output unit 2 and guided by the laser beam guide unit 3, and The surface of the work W is configured to be two-dimensionally scanned.

In the example shown in FIG. 5, the laser beam scanning unit 4 is configured as a so-called biaxial galvano scanner. That is, the laser light scanning unit 4 includes a first scanner 41 for scanning the near infrared laser light incident from the laser light guiding unit 3 in the first direction, and a near infrared laser scanned by the first scanner 41. A second scanner 42 for scanning the light in the second direction.

Here, the second direction refers to a direction substantially orthogonal to the first direction. Therefore, the second scanner 42 can scan the near-infrared laser light in a direction substantially orthogonal to the first scanner 41. In the present embodiment, the first direction is equal to the front-rear direction (longitudinal direction of the housing 10) and the second direction is equal to the left-right direction (shorter direction of the housing 10). Hereinafter, the first direction will be referred to as the “X direction”, and the second direction orthogonal thereto will be referred to as the “Y direction”. Both the X direction and the Y direction are orthogonal to the Z direction described above.

The first scanner 41 has a first mirror 41a at its tip. The first mirror 41a is arranged at substantially the same height as the bend mirror 34 and the dichroic mirror 35a and behind the dichroic mirror 35a. Therefore, as shown in FIG. 5, the bend mirror 34, the dichroic mirror 35a, and the first mirror 41a are arranged in a line in the front-rear direction (longitudinal direction of the housing 10).

The first mirror 41a is also rotationally driven by a motor (not shown) built in the first scanner 41. This motor can rotate the first mirror 41a around a rotation axis extending in the vertical direction. By adjusting the rotation posture of the first mirror 41a, the reflection angle of the near infrared laser light by the first mirror 41a can be adjusted.

Similarly, the second scanner 42 has a second mirror 42a at its tip. The second mirror 42a is arranged at substantially the same height as the first mirror 41a in the first scanner 41 and to the right of the first mirror 41a. Therefore, as shown in FIG. 6, the first mirror 41a and the second mirror 42a are arranged side by side in the left-right direction (the lateral direction of the housing 10).

The second mirror 42a is also driven to rotate by a motor (not shown) built in the second scanner 42. This motor can rotate the second mirror 42a around a rotation axis extending in the front-rear direction. By adjusting the rotation attitude of the second mirror 42a, the reflection angle of the near infrared laser light by the second mirror 42a can be adjusted.

Therefore, when the near-infrared laser light enters the laser light scanning unit 4 from the downstream merging mechanism 35, the near-infrared laser light is the first mirror 41a in the first scanner 41 and the second mirror in the second scanner 42. 42a in turn, and is emitted to the outside of the marker head 1 through the transmission window 19.

At that time, by operating the motor of the first scanner 41 to adjust the rotation posture of the first mirror 41a, it becomes possible to scan the surface of the work W with the near infrared laser light in the first direction. .. At the same time, by operating the motor of the second scanner 42 to adjust the rotation posture of the second mirror 42a, it becomes possible to scan the surface of the work W with the near infrared laser light in the second direction.

Further, as described above, the laser light scanning unit 4 includes not only the near infrared laser light but also the guide light that has passed through the dichroic mirror 35a of the downstream merging mechanism 35 or the distance measuring light reflected by the mirror 35a. Will also be incident. The laser light scanning unit 4 according to the present embodiment can two-dimensionally scan the guide light or the distance measuring light thus entered by operating the first scanner 41 and the second scanner 42, respectively.

The rotational postures that the first mirror 41a and the second mirror 42a can take are basically such that when the near infrared laser light is reflected by the second mirror 42a, the reflected light passes through the transmission window 19. It is set within such a range (see also FIGS. 7 to 8).

In this way, the laser light scanning unit 4 according to the present embodiment is controlled by the control unit 101 serving as a scanning control unit, so that the predetermined processing region R1 is irradiated with the near infrared laser light as illustrated in FIG. Then, a predetermined processing pattern (marking pattern) can be formed in the region R1.

(Wide area camera 6)
As described above, the laser light guide unit 3 is provided with the narrow area camera 37. The marker head 1 according to this embodiment includes a wide area camera 6 in addition to the narrow area camera 37. The wide area camera 6 is arranged immediately above the transparent window 19 and is fixed in a posture in which its imaging lens is directed downward.

As illustrated in FIGS. 3A and 3B, the optical axis of the wide area camera 6 is not coaxial with the optical axis of the near infrared laser light. Therefore, although not scanned by the laser beam scanning unit 4, the imaging area R2 of the wide area camera 6 is wider than the imaging area R3 of the narrow area camera 37 as shown in FIG. That is, the wide area camera 6 can image the surface of the work W over a wider area than the narrow area camera 37.

Note that the narrow area camera 37 and the wide area camera 6 may be at least one of the cameras, which are used in the control mode described later. That is, only the narrow area camera 37 may be used, only the wide area camera 6 may be used, or both may be used in combination. Therefore, the configuration including both the narrow area camera 37 and the wide area camera 6 is not essential.

(Distance measuring unit 5)
As shown in FIG. 3B, the distance measuring unit 5 projects distance measuring light through the laser light scanning unit 4 and irradiates the surface of the work W with the distance measuring light. The distance measuring unit 5 also receives the distance measuring light reflected by the surface of the workpiece W via the laser light scanning unit 4.

The distance measuring unit 5 is mainly divided into a module for projecting distance measuring light and a module for receiving distance measuring light. Specifically, the distance measuring unit 5 is provided inside the housing 10, and measures the distance measuring light for measuring the distance from the marker head 1 in the laser processing apparatus L to the surface of the work W by the laser light scanning unit 4. Distance measuring light emitting section 5A that emits toward the camera, and the distance measuring light that is provided inside the housing 10 and that is emitted from the distance measuring light emitting section 5A and reflected by the work W is passed through the laser beam scanning section 4. The distance-measuring light receiving section 5B for receiving the light. Further, the distance measuring unit 5 further includes a support base 50 that supports the distance measuring light emitting unit 5A and the distance measuring light receiving unit 5B from below, and is fixed to the inside of the housing 10 via the support base 50. ing.

As described above, the distance measuring unit 5 is provided in the space on the other side in the lateral direction of the first space S1. As shown in FIG. 7, the distance measuring unit 5 emits the distance measuring light forward along the longitudinal direction of the housing 10 and receives the distance measuring light propagating substantially rearward along the longitudinal direction.

The distance measuring unit 5 is optically coupled to the laser light guide unit 3 via the dichroic mirror 35a described above. As described above, the distance measuring unit 5 projects distance measuring light along the longitudinal direction of the housing 10. On the other hand, the dichroic mirror 35a is configured to reflect the distance measuring light propagating not along the longitudinal direction of the housing 10 but along the lateral direction thereof.

Therefore, a bend mirror 59 is provided inside the housing 10 to form an optical path connecting the distance measuring unit 5 and the dichroic mirror 35a (see FIGS. 6 and 7).

Therefore, the distance measuring light that has entered the bend mirror 59 from the distance measuring light emitting unit 5A is reflected by the mirror 59 and enters the dichroic mirror 35a. On the other hand, the distance measuring light returning to the laser beam scanning unit 4 and reflected by the dichroic mirror 35a is incident on the bend mirror 59 and also reflected by the mirror 59 and incident on the distance measuring light receiving unit 5B.

Hereinafter, the configuration of each part of the distance measuring unit 5 will be described in order.

-Distance measuring light emitting section 5A-
The distance measuring light emitting unit 5A is provided inside the housing 10, and is configured to emit distance measuring light for measuring the distance from the marker head 1 in the laser processing apparatus L to the surface of the work W. ing.

Specifically, the distance measuring light emitting unit 5A includes the distance measuring light source 51 and the light projecting lens 52 described above, a casing 53 that houses them, and a pair of distance measuring lights that are guided by the light projecting lens 52. It has guide plates 54L and 54R. The distance measuring light source 51, the light projecting lens 52, and the guide plates 54L and 54R are arranged in order from the rear side of the housing 10, and the arrangement direction thereof is substantially the same as the longitudinal direction of the housing 10.

The casing 53 is formed in a cylindrical shape extending along the longitudinal direction of the housing 10 and the support base 50, and the distance measuring light source 51 is provided at one end in the same direction, that is, at one end corresponding to the rear side of the housing 10. On the other hand, a light projecting lens 52 is attached to the other end corresponding to the front side of the housing 10. The space between the distance measuring light source 51 and the light projecting lens 52 is sealed in a substantially airtight manner.

The distance measuring light source 51 emits distance measuring light toward the front side of the housing 10 in accordance with a control signal input from the control unit 101. Specifically, the distance measuring light source 51 can emit laser light in the visible light range as distance measuring light. In particular, the distance measuring light source 51 according to the present embodiment emits red laser light having a wavelength near 690 nm as distance measuring light.

The distance measuring light source 51 is also fixed such that the optical axis Ao of the red laser light emitted as the distance measuring light is along the longitudinal direction of the casing 53. Therefore, the optical axis Ao of the distance measuring light extends along the longitudinal direction of the housing 10 and the support base 50, passes through the central portion of the light projecting lens 52, and reaches the outside of the casing 53.

The light projecting lens 52 is located between the light receiving lens 57 and the pair of light receiving elements 56L and 56R in the distance measuring light receiving section 5B in the longitudinal direction of the support base 50. The light projecting lens 52 is in such a posture that the optical axis Ao of the distance measuring light passes through.

The light projecting lens 52 can be, for example, a plano-convex lens, and the spherical convex surface can be fixed in a posture facing the outside of the casing 53. The light projecting lens 52 condenses the distance measuring light emitted from the distance measuring light source 51 and emits it to the outside of the casing 53. The distance measuring light emitted to the outside of the casing 53 reaches the guide plates 54L and 54R.

The guide plates 54</b>L and 54</b>R are configured as a pair of members arranged in the lateral direction of the support base 50, and each can be a plate-shaped member extending in the longitudinal direction of the support base 50. A space for emitting the distance measuring light is defined between the one guide plate 54L and the other guide plate 54R. The distance measuring light emitted to the outside of the casing 53 passes through the space thus partitioned and is output.

Therefore, the distance measuring light emitted from the distance measuring light source 51 passes through the space inside the casing 53, the central portion of the light projecting lens 52, and the space between the guide plates 54L and 54R to the outside of the distance measuring unit 5. Is output. The distance measuring light thus output is reflected by the bend mirror 59 and the dichroic mirror 35a in the downstream merging mechanism 35, and enters the laser light scanning unit 4.

The distance measuring light incident on the laser light scanning unit 4 is sequentially reflected by the first mirror 41a of the first scanner 41 and the second mirror 42a of the second scanner 42, and is transmitted from the transmission window 19 to the outside of the marker head 1. Will be emitted to.

As described in the description of the laser beam scanning unit 4, by adjusting the rotation posture of the first mirror 41a of the first scanner 41, the surface of the work W can be scanned with the distance measuring light in the first direction. At the same time, the motor of the second scanner 42 is operated to adjust the rotational posture of the second mirror 42a, so that the surface of the work W can be scanned with the distance measuring light in the second direction.

The distance measuring light thus scanned is reflected on the surface of the work W. A part of the distance measuring light thus reflected (hereinafter, also referred to as “reflected light”) enters the inside of the marker head 1 through the transmission window 19. The reflected light that has entered the inside of the marker head 1 returns to the laser light guide unit 3 via the laser light scanning unit 4. Since the reflected light has the same wavelength as the distance measuring light, the reflected light is reflected by the dichroic mirror 35a of the downstream merging mechanism 35 in the laser light guide portion 3 and enters the distance measuring unit 5 via the bend mirror 59.

-Distance measuring light receiver 5B-
The distance measuring light receiving section 5B is provided inside the housing 10, and receives the distance measuring light (equivalent to the above-mentioned “reflected light”) emitted from the distance measuring light emitting section 5A and reflected by the work W. Is configured to.

Specifically, the distance measuring light receiving section 5B has a pair of light receiving elements 56L and 56R and a light receiving lens 57. The pair of light receiving elements 56</b>L and 56</b>R are arranged at the rear end of the support base 50, respectively, while the light receiving lens 57 is arranged at the front end of the support base 50. Therefore, the pair of light receiving elements 56L and 56R and the light receiving lens 57 are arranged substantially along the longitudinal direction of the housing 10 and the support base 50.

In the pair of light receiving elements 56L and 56R, the optical axes Al and Ar are arranged inside the housing 10 so as to sandwich the optical axis Ao of the distance measuring light in the distance measuring light emitting unit 5A. The pair of light receiving elements 56L and 56R respectively receive the reflected light returned to the laser light scanning unit 4.

Specifically, the pair of light receiving elements 56L and 56R are arranged in a direction orthogonal to the optical axis Ao of the distance measuring light emitting unit 5A. In this embodiment, the alignment direction of the pair of light receiving elements 56L and 56R is equal to the lateral direction of the housing 10 and the support base 50, that is, the horizontal direction. In the same direction, one light receiving element 56L is arranged on the left side of the distance measuring light source 51, and the other light receiving element 56R is arranged on the right side of the distance measuring light source 51.

Each of the pair of light receiving elements 56L and 56R has a light receiving surface directed obliquely forward, detects the light receiving position of the reflected light on each light receiving surface, and outputs a signal (detection signal) indicating the detection result. Is output. Detection signals output from the light receiving elements 56L and 56R are input to the marker controller 100 and reach the distance measuring unit 103.

Examples of elements that can be used as the light receiving elements 56L and 56R include, for example, a CMOS image sensor including a complementary MOS (CMOS), a CCD image sensor including a charge-coupled device (CCD), and an optical position. A sensor (Position Sensitive Detector: PSD) etc. are mentioned.

In this embodiment, each of the light receiving elements 56L and 56R is configured using a CMOS image sensor. In this case, each of the light receiving elements 56L and 56R can detect not only the light receiving position of the reflected light but also the light receiving amount distribution (light receiving waveform) thereof. That is, when each of the light receiving elements 56L and 56R is configured by using the CMOS image sensor, the pixels are lined up at least in the left-right direction on each light receiving surface a. In this case, each of the light receiving elements 56L and 56R can read out and amplify a signal for each pixel and output the signal to the outside. The intensity of the signal at each pixel is determined based on the intensity of the reflected light at the spot when the reflected light forms a spot on the light receiving surface 56a.

When each of the light receiving elements 56L and 56R is configured by using an element capable of detecting a light receiving amount distribution (light receiving waveform) such as a CMOS image sensor, the amount of light receiving in each of the light receiving elements 56L and 56R is measured. The intensity of the distance light, that is, the intensity of the distance measuring light emitted from the distance measuring light emitting unit 5A (hereinafter, also referred to as “projection light amount”) and the gain for amplifying the signal for each pixel (hereinafter, "Also referred to as "light-receiving gain"). In addition to the gain, the exposure time of each of the light receiving elements 56L and 56R can be used for adjustment.

The pair of light receiving elements 56L and 56R according to the present embodiment can detect at least the peak position indicating the light receiving position of the reflected light and the received light amount of the reflected light. As an index indicating the amount of received light, for example, the height of a peak in the received light amount distribution of reflected light can be used. Instead of this, a summed value, an average value, and an integrated value of the received light amount distribution may be used.

Although the peak position of the received light amount distribution is used as an index indicating the received light position of the reflected light in this embodiment, the position of the center of gravity of the received light amount distribution may be used instead.

The light receiving lens 57 is arranged inside the housing 10 so that the optical axes of the pair of light receiving elements 56L and 56R pass through. The light receiving lens 57 is also provided in the middle of the optical path connecting the downstream merging mechanism 35 and the pair of light receiving elements 56L and 56R, and reflects the reflected light that has passed through the downstream merging mechanism 35 into the pair of light receiving elements 56L and 56R. The light can be collected on each light receiving surface.

The light receiving lens 57 collects the reflected light returned to the laser light scanning unit 4 and forms a spot of the reflected light on the light receiving surface of each of the light receiving elements 56L and 56R. Each of the light receiving elements 56L and 56R outputs a signal indicating the peak position of the spot thus formed and the amount of received light to the distance measuring unit 103.

The laser processing apparatus L basically measures the distance to the surface of the work W based on the light receiving position (the peak position of the spot in this embodiment) of the reflected light on the light receiving surface of each of the light receiving elements 56L and 56R. can do. A so-called triangulation method is used as a distance measuring method.

<About distance measurement method>
FIG. 9 is a diagram for explaining the triangulation method. Although only the distance measuring unit 5 is shown in FIG. 9, the following description is also applicable to the case where the distance measuring light is emitted through the laser light scanning unit 4 as described above.

As illustrated in FIG. 9, when the distance measuring light is emitted from the distance measuring light source 51 in the distance measuring light emitting unit 5A, the distance measuring light is applied to the surface of the work W. When the distance measuring light is reflected by the work W, the reflected light (especially diffuse reflected light) propagates isotropically if the influence of specular reflection is removed.

The reflected light thus propagating includes a component that is incident on the light receiving element 56L via the light receiving lens 57, but the angle of incidence on the light receiving element 56L increases or decreases depending on the distance between the marker head 1 and the workpiece W. Will be done. When the incident angle on the light receiving element 56L increases or decreases, the light receiving position on the light receiving surface 56a increases or decreases.

In this way, the distance between the marker head 1 and the work W and the light receiving position on the light receiving surface 56a are associated with each other with a predetermined relationship. Therefore, the distance between the marker head 1 and the work W can be calculated from the light receiving position on the light receiving surface 56a by grasping the relationship in advance and storing it in the marker controller 100, for example. Such a calculation method is nothing but a method using a so-called triangulation method.

That is, the distance measuring unit 103 described above measures the distance from the laser processing device L to the surface of the workpiece W by the triangulation distance measuring method based on the light receiving position of the distance measuring light in the distance measuring light receiving unit 5B.

Specifically, the above-described condition setting storage unit 102 stores in advance the relationship between the light receiving position on the light receiving surface 56a and the distance between the marker head 1 and the surface of the work W. On the other hand, the distance measuring unit 103 is supplied with a signal indicating the light receiving position of the distance measuring light in the distance measuring light receiving unit 5B, specifically, the position of the peak of the spot formed by the reflected light on the light receiving surface 56a.

The distance measuring unit 103 measures the distance to the surface of the work W based on the signal thus input and the relationship stored in the condition setting storage unit 102. The measurement value thus obtained is input to, for example, the control unit 101, and is used by the control unit 101 to control the Z scanner 33 and the like.

For example, the laser processing apparatus L automatically/manually determines a portion (printing point) to be processed by the marker head 1 on the surface of the work W. Subsequently, the laser processing apparatus L measures the distance to each print point (more accurately, the distance measuring point set around the print point) before performing the print processing, and the focus corresponding to the distance is measured. The control parameter of the Z scanner 33 is determined so that the position becomes. The laser processing apparatus L operates the Z scanner 33 based on the control parameters thus determined, and then prints the work W with the near infrared laser light.

Hereinafter, a specific method of using the laser processing system S will be described.

<How to use the laser processing system S>
FIG. 10 is a flowchart showing how to use the laser processing system S. Further, FIG. 11 is a flowchart illustrating a procedure for creating print settings, and FIG. 12 is a flowchart illustrating an operating procedure for the laser processing apparatus L.

13 is a diagram illustrating the relationship between the processing region R1 of the work W and the display unit 801, and FIG. 14 is a flowchart illustrating the procedure for adjusting the installation position of the work W.

15A is a diagram illustrating a captured image Pw of the work W, FIG. 15B is a diagram illustrating a measurement region R6 for detecting the inclination of the work W, and FIG. 15C is a block Bi obtained by dividing the measurement region R6. 15D is a diagram illustrating a state in which distance measurement is performed on the display unit 801, FIG. 15D is a diagram illustrating a visual display before position adjustment on the display unit 801, and FIG. 15E is a visual display after position adjustment on the display unit 801. It is a figure which illustrates.

Further, FIG. 16 is a diagram illustrating update of the visual display on the display unit 801, and FIG. 17 is a diagram illustrating θ rotation correction of the captured image Pw.

The laser processing system S including the laser processing apparatus L configured as a laser marker can be installed and operated, for example, on a manufacturing line of a factory. Prior to the operation of the production line, first, the setting position of the work W that will flow through the line and the setting of conditions such as the output of the laser light and the distance measuring light that irradiate the work W (print setting) ) Is created (step S1).

The print setting created in step S1 is transferred to and stored in the marker controller 100 and/or the operation terminal 800, or is read by the marker controller 100 immediately after creation (step S2).

Then, when the manufacturing line is operated, the marker controller 100 reads the print setting that is stored in advance or that is read immediately after the creation. The laser processing apparatus S is operated based on the print setting and executes the print processing on each work W flowing on the line (step S3).

(Creating print settings)
FIG. 11 exemplifies the specific processing in step S1 of FIG.

First, in step S11, the narrow area camera 37 and the wide area camera 6 built in the laser processing apparatus L capture a camera image Pw showing the processing area R1. As described above, the imaging area R2 of the wide area camera 6 is wider than the imaging area R3 of the narrow area camera 37.

Note that FIG. 15A shows an example in which the wide area camera 6 captures the camera image Pw including the entire processing region R1, but the example is not limited to this example. For example, the narrow area camera 37 may capture a camera image Pw showing a part of the processing region R1.

The wide area camera 6 and the narrow area camera 37 can generate camera images (captured images) corresponding to the image capturing areas R2 and R3 by capturing the image capturing areas R2 and R3 indicating at least a part of the processing area R1. The “imaging unit” is illustrated in that it is possible.

As a result, the display unit 801 of the operation terminal 800 displays the setting surface R4 corresponding to the processing region R1 and the camera image Pw on the setting surface R4. As a result, the coordinates on the processing region R1, that is, the coordinates on the surface of the work W and the coordinates on the setting surface R4 on the display unit 801 can be associated with each other.

In the example shown in FIG. 13, the display unit 801 displays the entire processing region R1 as the setting surface R4, but the display mode is not limited to this. It suffices to include at least a part of the processed region R1.

In the subsequent step S12, the installation position of the work W is corrected based on the camera image captured in step S11. As will be described later, this step corrects the inclination of the surface of the workpiece W with respect to the XY plane (the plane formed by the X direction and the Y direction described above), and the Z axis of this surface (along the Z direction described above). The rotation (θ rotation) about the extending axis is corrected manually/automatically.

In the following step S13, the setting unit 107 sets the processing conditions. The setting unit 107 sets the processing condition by reading the stored contents in the condition setting storage unit 102 or the like, or by reading the operation input or the like via the operation terminal 800.

The processing conditions include a print pattern (marking pattern) indicating print content and the like, and a print block including the print pattern. The print block can be used to adjust the layout, size, rotation posture, etc. of the print pattern.

The processing conditions also include laser conditions. The laser conditions include the target output (laser power) of the near infrared laser light, the repetition frequency of the near infrared laser light, and the scanning speed (scan speed) of the near infrared laser light by the laser light scanning unit 4. At least one of When laser oscillation is performed using the Q switch as in the laser processing apparatus L according to the present embodiment, the repetition frequency is substantially equal to the Q switch frequency.

In the following step S14, the print block is laid out. The coordinates (local coordinates) of the print block on the setting surface R4 are stored in the condition setting storage unit 102 or the like.

In general, each work W to be sequentially processed when the manufacturing line is operated is displaced in the X direction and the Y direction (XY direction). The laser processing apparatus L according to the present embodiment can correct such positional deviation by using various methods. Therefore, in step S15, condition setting for correcting the positional deviation in the XY directions is performed.

As a method for correcting the positional deviation in the XY directions, for example, pattern search can be used. In this case, in this step S15, the model image for pattern search is determined as the condition (search condition) related to the pattern search.

Further, in general, each work W to be sequentially processed when the manufacturing line is operated is displaced in the Z direction. Such a positional shift is not desirable because it causes a shift in the focal position of the near infrared laser light. Since the laser processing apparatus L according to this embodiment includes the distance measuring unit 5, it is possible to detect the positional deviation in the Z direction based on the distance to the surface of the work W. This makes it possible to correct the positional deviation in the Z direction, and consequently the focal position. Therefore, in step S16, condition setting for correcting the positional deviation in the Z direction is performed.

Specifically, in this step S16, the condition (distance measuring condition) related to the distance measuring unit 5 is determined. The setting unit 107 according to this embodiment sets the distance measurement condition as a distance measurement condition in at least the partial region where the print pattern is to be formed in the processing region R1 (the partial region corresponding to the print block including the print pattern). Determine the point. This distance measuring point indicates a coordinate at which the distance from the laser processing apparatus L is measured.

The partial region referred to here may be the entire surface of the work W, a part of the surface of the work W, or may be offset from the surface of the work W. The partial area may be at least an area associated with the print pattern to be formed.

In the subsequent step S17, the marker controller 100 completes the creation of the print settings.

(Execution of print processing)
FIG. 12 illustrates a specific process in step S3 of FIG. That is, the process shown in FIG. 12 is sequentially executed for each work W that flows when the manufacturing line is operated.

First, in step S31, the marker controller 100 reads print settings indicating details of print blocks and the like. Then, in step S32, the narrow area camera 37 and the wide area camera 6 built in the laser processing apparatus L image the image capturing areas R2 and R3 indicating at least a part of the processing area R1, so that the image capturing area R2, A camera image Pw corresponding to R3 is generated.

In the following step S33, the marker controller 100 reads the search condition set in step S15 of FIG. Subsequently, in step S34, the marker controller 100 performs a pattern search based on the search condition read in step S33, and detects the positional deviation of the work W in the XY directions.

In subsequent step S35, the marker controller 100 reads the distance measuring condition set in step S16 of FIG. Subsequently, in step S36, the distance measuring unit 103 in the marker controller 100 measures the distance to the distance measuring point set as the distance measuring condition, and based on the measurement result, the positional deviation of the workpiece W in the Z direction is detected. In the subsequent step S37, the marker controller 100 corrects the positional deviation of the work W in the XY directions. Specifically, the setting unit 107 of the marker controller 100 corrects the coordinates (local coordinates) of the print block on the setting surface R4.

In the following step S38, the marker controller 100 corrects the positional deviation of the work W in the Z direction. Specifically, the Z scanner 33 in the marker controller 100 adjusts the focus position for each print block based on the measurement result in step S36.

In the following step S39, the marker controller 100 outputs the excitation laser light to the marker head 1 and executes the printing process by using the near infrared laser light generated based on this excitation light laser light.

(Details of work W setting position correction)
Hereinafter, the details of the installation position correction of the work W will be further described.

FIG. 15A is the above-described drawing, and the camera image Pw including the entire processing region R1 of the work W is displayed on the setting surface R4.

Here, when the button for starting the installation position correction of the work W is pressed by a mouse click or the like, the processing shown in step S101 of FIG. 14 is executed.

In step S101, the setting unit 107 sets a plurality of focus detection points in the imaging region R2 via the camera image Pw displayed on the display unit 801. The “plurality of distance measuring points” here are distance measuring points for correcting the installation position, and are generally different from the distance measuring points used when the laser processing apparatus L is operated.

Specifically, in step S101, the setting unit 107 sets the measurement region R6 to be the installation position correction target on the camera image Pw by dragging the setting surface R4. In the example shown in FIG. 15B, the measurement region R6 matches the imaging region R2 and the processing region R1. Then, the setting unit 107 divides the imaging region R2 into a plurality of blocks Bi and sets one or more focus detection points in each block.

In the example illustrated in FIG. 15B, the setting unit 107 divides the measurement region R6 that coincides with the imaging region R2 into blocks Bi (i=1, 2,..., 20) of 5 rows and 4 columns, and 1 for each block Bi. Set the distance measuring points point by point.

In step S102 subsequent to step S101, the control unit 1001 as the scanning control unit controls the laser beam scanning unit 4 so that the distance from the laser processing device S to each distance measuring point set in the imaging region R2 is measured. To control. As a result, the control unit 101 can measure the distance to the distance measuring point set in each block Bi.

As the scanning direction at this time, as illustrated in FIG. 15C, the scanning may start from the outer edge of the work W and scan so as to draw a vortex. Further, the distance measurement pitch, that is, the number of divisions of the measurement region R6 can be arbitrarily changed. For example, the number of divisions may be changed, or the size of each block may be changed.

The distance measuring points may be set so that two or more points are measured in the measurement region R6 in each of the X direction and the Y direction. For example, the four corners of the surface of the work W may be measured.

In the following step S103, the display control unit 105 performs visual display that reflects the length of the distance to each distance measuring point on the camera image Pw based on the distance to each distance measuring point. In the example shown in FIG. 15C, a block Bi having a relatively long distance is displayed with a relatively dark shaded portion, and a block Bi having a shorter distance than that is displayed with a slightly lighter shaded portion, and Blocks with a shorter distance are indicated by relatively thin shaded areas. These shaded areas indicate the display color of each block Bi. The display color of each block Bi can be a semi-transparent color. This allows the distance between the blocks Bi to be grasped while visually recognizing the surface shape of the work W.

In this way, the visual display that reflects the length of the distance can be performed in block Bi units. At this time, the display control unit 105 can change the display color of each block Bi according to the length of the distance measured by the scan control unit 101.

The visual display timing on the camera image Pw may be the timing immediately after the distance is measured for each block Bi, as shown in FIG. 15C. Alternatively, the measurement may be performed for all blocks Bi. The timing may be after the completion.

In subsequent step S104, the correction parameter calculation unit 108 obtains the inclination of the surface of the work W in the camera image Pw based on the distance to each distance measuring point, and calculates the correction parameter for correcting the inclination.

Specifically, the correction parameter calculation unit 108 obtains the inclination of the surface of the work W with respect to the plane formed by the laser beam scanning direction of the laser beam scanning unit 4, that is, the XY plane described above. As illustrated in FIG. 15D, the calculation result by the correction parameter calculation unit 108 may be displayed on the display unit 801. In the example shown in FIG. 15D, the rotation axis A1 of the inclination and the rotation angle θ1 formed by the surface of the work W with respect to the XY plane Pxy are displayed as the correction parameters.

In the following step S105, the display control unit 108 updates the visual display based on the correction parameter. Specifically, in the subsequent processing (for example, the step after step S13 in FIG. 11 and each step in FIG. 12), the control unit 101 causes the laser light scanning unit 4 to perform the near-red light based on the correction parameter. The scanning directions of the outer laser light and the distance measuring light are corrected. That is, the control unit 101 corrects the X direction and the Y direction based on the correction parameter, and corrects the XY plane Pxy so as to correct the inclination of the work W.

This allows the Z scanner 33 to adjust the focal position of the near-infrared laser light along the direction perpendicular to the corrected XY plane.

After correcting the XY plane, the control unit 101 again measures the distance to the surface of the work W, and the display control unit 108 updates the visual display of the display unit 801 based on the measurement result. As a result, as shown in FIG. 15E, the display colors of the blocks Bi match. At this time, the camera image Pw displayed on the setting surface R4 may be captured again, or the camera image Pw may be trapezoidally corrected based on the correction parameter and the image after the keystone correction may be displayed. ..

Although the method illustrated in step S105 is a process automatically performed by the marker controller 100, the inclination of the work W may be manually adjusted as shown in FIG. 16, for example. As described above, as soon as the inclination of the work W is adjusted, the control unit 101 performs the measurement of the distance to the surface of the work W again, and based on the measurement result, the display control unit 108 visually displays the display unit 801. To update. Also in this case, the Z scanner 33 can adjust the focal position of the near infrared laser light along the direction perpendicular to the corrected XY plane.

In subsequent step S106, the display control unit 108 corrects the camera image Pw by rotating the camera image Pw around the rotation axis A2 orthogonal to the imaging region R2 (so-called θ rotation correction). In step S106, the user can specify the four points on the setting surface R4, and the display of the camera image Pw can be updated so that the four points become the four corners.

As described above, in the laser processing device L according to the present embodiment, as illustrated in FIG. 15C, the distance is measured with respect to each distance measuring point defined on the camera image Pw, and Visual display that reflects the short and long. In this way, by displaying the distance to each part of the processing region R2, the user can grasp the inclination of the work W.

Then, as shown in FIG. 15D, a correction parameter for correcting the inclination of the work W is calculated, and the visual display is updated and the focus position of the near infrared laser light is adjusted based on the correction parameter.

By adopting such a configuration, the labor for correcting the inclination of the work W can be saved. Thereby, the usability of the laser processing apparatus L can be improved.

<<Other Embodiments>>
In the embodiment, the case where one work W is displayed on the setting surface R4 has been described as an example, but the present invention is not limited to this case. The present disclosure can be applied even when a plurality of works W are displayed on the setting surface R4. In that case, the inclination may be corrected one by one for each of the plurality of works W.

Further, although the case where the wide area camera 6 is used as the imaging unit has been described in the above-described embodiment, the technique disclosed herein is not limited to the case where the wide area camera 6 is used, and it is not limited to the narrow area camera 37. It can also be applied to an imaging unit capable of two-dimensional scanning.

Further, in the embodiment, as illustrated in FIG. 15B, the measurement region R6 matches the imaging region R2 and the processing region R1, but the present disclosure is not limited to this. The measurement region R6 may be a part of the imaging region R2 or a part of the processing region R1.

For example, the measurement region R6 can be set for all or a part of the print block. In this case, the tilt correction is performed in the print block associated with the measurement region R6, and the correction parameter for correcting the tilt is calculated. The calculated correction parameters are stored in the memory (such as the condition setting storage unit 102) as the distance measuring condition or the processing condition of the print block. Then, the inclination correction for each print block is realized by referring to the actual distance measurement or the processing.

With such a configuration, for example, when a part of the upper surface of the work W is an inclined surface and the other part is a horizontal surface, print blocks are set on each of the inclined surface and the horizontal surface. The correction parameters described above can be stored in association with the set print block. As a result, partial tilt correction can be realized for one work W.

1 Marker Head 10 Housing 2 Laser Light Output Section 3 Laser Light Guide Section 33 Z Scanner (Focus Adjustment Section)
4 laser beam scanning section 5 ranging unit 5A ranging light emitting section 5B ranging light receiving section 56L receiving element 56R receiving element 100 marker controller 101 control section (scanning control section)
103 distance measurement unit 105 display control unit 107 setting unit 108 correction parameter calculation unit 110 excitation light generation unit 800 operation terminal 801 display unit A1 rotation axis (correction parameter)
θ1 rotation angle (correction parameter)
Bi block Pw Captured image Pxy XY plane R1 Processing area R2 Imaging area R3 Imaging area R4 Setting surface L Laser processing device S Laser processing system W Workpiece (workpiece)

Claims (7)

A pumping light generator that generates pumping light;
While generating laser light based on the excitation light generated by the excitation light generation unit, a laser light output unit that emits the laser light,
A focus adjustment unit that adjusts the focus position of the laser light emitted from the laser light output unit,
A laser beam scanning unit that irradiates a workpiece with a laser beam whose focus position is adjusted by the focus adjustment unit, and that two-dimensionally scans a processing area set on the surface of the processing object A processing device,
Distance-measuring light for measuring the distance from the laser processing device to the surface of the workpiece, a distance-measuring light emitting unit for emitting toward the laser-light scanning unit,
A distance-measuring light receiving unit that receives the distance-measuring light emitted from the distance-measuring light emitting unit and reflected by the workpiece through the laser light scanning unit,
A distance measuring unit that measures the distance from the laser processing device to the surface of the workpiece based on the light receiving position of the distance measuring light in the distance measuring light receiving unit by a triangulation distance measuring method;
An imaging unit that generates a captured image corresponding to the imaging region by capturing an imaging region showing at least a part of the processing region,
A display unit for displaying the captured image,
A setting unit that determines a plurality of distance measuring points in the imaging area via the captured image;
A scanning control unit that controls the laser light scanning unit so that distances from the laser processing device to each of the plurality of distance measuring points are measured;
A display control unit that performs a visual display reflecting the length of the distance on the captured image based on the distance to each of the plurality of distance measuring points;
A correction parameter calculation unit that calculates the correction parameter for correcting the inclination of the surface of the workpiece in the captured image based on the distance to each of the plurality of distance measuring points. Prepare,
The display control unit updates the visual display based on the correction parameter,
The laser processing apparatus, wherein the focus adjustment unit adjusts the focus position of the laser light based on the correction parameter. The laser processing apparatus according to claim 1,
The laser processing apparatus, wherein the setting unit divides the imaging region into a plurality of blocks and sets one or more distance measuring points in each block. The laser processing apparatus according to claim 2,
The scan control unit measures a distance to a focus detection point set in each of the plurality of blocks,
The laser processing apparatus, wherein the display control unit changes the display color of each of the plurality of blocks according to the length of the distance measured by the scan control unit. The laser processing apparatus according to any one of claims 1 to 3,
The laser processing apparatus, wherein the display control unit performs trapezoidal correction on the captured image based on the correction parameter. The laser processing apparatus according to any one of claims 1 to 4,
The laser processing apparatus, wherein the display control unit corrects the captured image by rotating the captured image around a rotation axis orthogonal to the imaging region. The laser processing apparatus according to any one of claims 1 to 5,
The laser processing apparatus, wherein the correction parameter calculation unit obtains an inclination of a surface of the workpiece with respect to a plane formed by a scanning direction of laser light by the laser light scanning unit. The laser processing apparatus according to claim 6,
The laser processing apparatus, wherein the scanning control unit corrects a scanning direction of laser light by the laser light scanning unit based on the correction parameter.