JP2020104160A - Laser processing device - Google Patents

Abstract

To easily determine a model image for pattern search in a laser processing device.SOLUTION: A laser processing device L comprises: a wide-area camera 6 generating a workpiece image Pw; a setting part 107 setting a printing block B including a printing pattern P so as to overlap with the workpiece image Pw; a model candidate extraction part 104 extracting plural model candidate images Pm associated with the printing block B and different from each other in size; a correlation value calculation part 105 calculating a correlation value concerning each model candidate image Pm in a search area R5 and also calculating the acutance of the correlation value in the search area R5; and a model image registration part 106 determining and storing a model image Px based on the acutance from the model candidate images Pm in the range in which the displacement of a workpiece W to the wide-area camera 6 is tolerated, and in addition to the above storage, storing the relative physical relationship of the model image Px with the printing block B corresponding to the model image Px.SELECTED DRAWING: Figure 14

Description

The technology disclosed herein relates to a laser processing apparatus, such as a laser marking apparatus, which performs processing by irradiating a workpiece with laser light.

Conventionally, a laser processing apparatus capable of correcting a processing position is known.

For example, in Patent Document 1, in a laser processing apparatus for drilling a workpiece, a shift amount of the center position of the hole is calculated, and the angle of the galvanometer mirror is calculated based on the calculated shift amount. Correcting is disclosed.

JP, 2005-006674, A

A method using pattern search is known as an algorithm for correcting the deviation as described in Patent Document 1. When this method is used, a model image for search is registered in advance, and a portion matching the model image is found from the work image obtained by imaging the workpiece, so that the correction parameter is set. It becomes possible to calculate.

Until now, in order to properly set the model image, an understanding of the algorithm for pattern search has been required. Without familiarity with this algorithm, setting the model image was difficult.

The technique disclosed here is made in view of such a point, and its purpose is to easily determine a model image for pattern search.

Specifically, the first aspect of the present disclosure is to generate a pump light and a laser light based on the pump light generated by the pump light generator, and to emit the laser light. And a laser beam scanning unit for irradiating the workpiece with the laser beam emitted from the laser beam output section and for two-dimensionally scanning within a processing region set on the surface of the workpiece. And a laser processing apparatus for forming a predetermined processing pattern in the processing region by controlling the laser beam scanning unit.

Then, according to the first aspect of the present disclosure, an imaging unit that generates a work image including at least a part of the machining area by imaging the workpiece, and a setting surface corresponding to the machining area. A display unit that displays the work image on the top, so as to overlap with the work image, a processing block setting unit that sets a processing block including the processing pattern, and by cutting out at least a part of the work image, A model candidate extraction unit that extracts a plurality of model candidate images that are associated with the processing block and have different sizes on the setting surface, and a predetermined search area in the work image for each of the plurality of model candidate images. A correlation value calculation unit that calculates a correlation value related to each model candidate image within the search area and a sharpness of the correlation value in the search region; and a positional deviation of the workpiece with respect to the imaging unit is allowed. Within the range, a model image is determined and stored from the plurality of model candidate images based on the sharpness, and the relative positional relationship between the model image and the processing block corresponding to the model image is stored. And a model image registration unit that also stores the work image for the workpiece of the same type as the workpiece used to determine the model image. And a position correction unit that corrects the position of the processing block to be set in the new work image based on the model image and the relative positional relationship corresponding to the model image. ..

When the size of the model image is large, the sharpness of the correlation value is higher than when it is small. Further, when the sharpness of the correlation value is high, the accuracy of the pattern search can be improved as compared with the case where the correlation value is low.

Therefore, in order to improve the accuracy of the pattern search, it is required to increase the size of the model image. However, if the size of the model image is excessively increased, for example, when operating the manufacturing line When a workpiece that is largely deviated with respect to the optical axis of the portion is carried, pattern search may be hindered.

Therefore, according to the above configuration, the model image registration unit determines the model image based on the sharpness within a range in which the positional deviation of the workpiece with respect to the imaging unit is allowed. With this configuration, it is possible to allow the deviation of the workpiece with respect to the imaging unit while accurately performing the pattern search.

In this way, it becomes possible to easily determine the model image for pattern search.

In addition, according to the second aspect of the present disclosure, the model image registration unit determines, among the plurality of model candidate images, the model candidate image having the highest sharpness within a range in which the positional deviation is allowed. It may be selected as a model image.

With this configuration, it is possible to secure the search accuracy in the pattern search as much as possible.

Further, according to the third aspect of the present disclosure, the model image registration unit has the smallest size on the setting surface within the range where the sharpness is a predetermined value or more among the plurality of model candidate images. A model candidate image may be selected as the model image.

With this configuration, it is possible to allow the positional deviation of the workpiece with respect to the imaging unit as much as possible.

Further, according to the fourth aspect of the present disclosure, the model image registration unit selects, from the plurality of model candidate images, the model candidate image having the highest sharpness within a range in which the positional deviation is allowed. A correlation value priority mode selected as a model image, and a model candidate image having the smallest size on the setting surface within the range where the sharpness is a predetermined value or more among the plurality of model candidate images is selected as the model image. The position shift priority mode to be selected may be configured to be selectable.

This configuration is advantageous in easily determining the model image for pattern search.

Further, according to the fifth aspect of the present disclosure, the model candidate extracting unit enlarges or reduces the size around a coordinate located at the center of the machining block or a coordinate on the outer edge of the machining block. Thus, a plurality of model candidate images having different sizes on the setting surface may be extracted.

This configuration is advantageous in easily determining the model image for pattern search.

As described above, the laser processing apparatus can easily determine the model image for pattern search.

FIG. 1 is a diagram illustrating an overall configuration of a laser processing system. FIG. 2 is a block diagram illustrating a schematic configuration of the laser processing apparatus. FIG. 3A is a block diagram illustrating a schematic configuration of the marker head. FIG. 3B is a block diagram illustrating a schematic configuration of the marker head. FIG. 4 is a perspective view illustrating the appearance of the marker head. FIG. 5 is a diagram illustrating the configuration of the laser light scanning unit. FIG. 6 is a diagram illustrating the configuration of the laser light guide unit, the laser light scanning unit, and the distance measuring unit. FIG. 7 is a cross-sectional view illustrating an optical path connecting the laser light guide unit, the laser light scanning unit, and the distance measuring unit. FIG. 8 is a perspective view illustrating an optical path connecting the laser light guide unit, the laser light scanning unit, and the distance measuring unit. FIG. 9 is a diagram for explaining the triangulation method. FIG. 10 is a flowchart showing a method of using the laser processing system. FIG. 11 is a flowchart illustrating a procedure for creating print settings. FIG. 12 is a flowchart illustrating an operating procedure of the laser processing apparatus. FIG. 13 is a diagram illustrating the relationship between the processing area of the work and the display unit. FIG. 14 is a flowchart illustrating a procedure for determining a model image for pattern search. FIG. 15 is a diagram illustrating a work image. FIG. 16 is a diagram illustrating a method of generating a model candidate image. FIG. 17 is a diagram illustrating reference points for generating a model candidate image. FIG. 18 is a diagram illustrating the size of the model candidate image and the correlation value distribution. FIG. 19 is a diagram illustrating a method of calculating the sharpness. FIG. 20A is a diagram illustrating a specific procedure of pattern search. FIG. 20B is a diagram illustrating a specific procedure of the pattern search. FIG. 20C is a diagram illustrating a specific procedure of pattern search. FIG. 21A is a diagram illustrating a display screen related to registration of a model image. FIG. 21B is a diagram illustrating a display screen related to registration of a model image. FIG. 22 is a diagram illustrating an example of the positional deviation allowable amount.

Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. The following description is an example.

That is, although the present specification describes a laser marker as an example of a laser processing apparatus, the technology disclosed herein can be applied to general laser application equipment regardless of the names of the laser processing apparatus and the laser marker.

Further, in the present specification, printing processing will be described as a typical example of processing, but the present invention is not limited to printing processing, and as long as a predetermined processing pattern is formed on the surface of a work W as a workpiece, an image can be formed. It can be used in all kinds of processing using laser light, such as marking.

<Overall structure>
FIG. 1 is a diagram illustrating an overall configuration of a laser processing system S, and FIG. 2 is a diagram illustrating a schematic configuration of a laser processing apparatus L in the laser processing system S. The laser processing system S illustrated in FIG. 1 includes a laser processing device L, an operation terminal 800 connected to the laser processing device L, and an external device 900.

Then, the laser processing apparatus L illustrated in FIGS. 1 and 2 irradiates the work W as the workpiece with the laser light emitted from the marker head 1 and three-dimensionally scans the surface of the work W. By doing so, processing is performed. The "three-dimensional scanning" referred to here is a two-dimensional operation of scanning the irradiation destination of the laser light on the surface of the workpiece W (so-called "two-dimensional scanning") and the focus position of the laser light. Refers to the general term for the combination of one-dimensional movements.

In particular, the laser processing apparatus L according to this embodiment can emit laser light having a wavelength near 1064 nm as the laser light for processing the work W. This wavelength corresponds to the near-infrared (NIR) wavelength range. Therefore, in the following description, the laser beam for processing the workpiece W may be referred to as "near infrared laser beam" to distinguish it from other laser beams. Laser light other than near infrared rays may be used for processing the work W.

Further, the laser processing apparatus L according to the present embodiment measures the distance to the work W via the distance measuring unit 5 built in the marker head 1 and uses the measurement result to measure the near infrared laser light. The focus position can be adjusted.

As shown in FIGS. 1 and 2, the laser processing apparatus L includes a marker head 1 for emitting a laser beam and a marker controller 100 for controlling the marker head 1.

The marker head 1 and the marker controller 100 are separate bodies in this embodiment, and are electrically connected via electrical wiring and optically coupled via an optical fiber cable.

More generally, one of the marker head 1 and the marker controller 100 may be incorporated into the other to be integrated. In this case, the optical fiber cable or the like can be omitted as appropriate.

The operation terminal 800 has, for example, a central processing unit (CPU) and a memory, and is connected to the marker controller 100. The operation terminal 800 functions as a terminal for setting various processing conditions such as print settings and showing information related to laser processing to the user. The operation terminal 800 includes a display unit 801 for displaying information to the user, an operation unit 802 for receiving an operation input by the user, and a storage device 803 for storing various information.

Specifically, the display unit 801 is composed of, for example, a liquid crystal display or an organic EL panel. The display unit 801 displays the operation status and processing conditions of the laser processing apparatus L as information related to laser processing. On the other hand, the operation unit 802 includes, for example, a keyboard and/or a pointing device. Here, the pointing device includes a mouse and/or a joystick. The operation unit 802 is configured to receive an operation input by the user, and is used to operate the marker head 1 via the marker controller 100.

The operation terminal 800 configured as described above can set processing conditions in laser processing based on an operation input by the user. The processing conditions include, for example, the content (marking pattern) of a character string or the like to be printed on the work W, the output required for the laser light (target output), and the scanning speed of the laser light on the work W (scan speed). ) Is included.

The processing conditions according to the present embodiment also include the conditions and parameters related to the distance measuring unit 5 described above (hereinafter, also referred to as “distance measuring conditions”). Such distance measuring conditions include, for example, data associating a signal indicating the detection result of the distance measuring unit 5 with the distance to the surface of the work W.

The processing conditions set by the operation terminal 800 are output to the marker controller 100 and stored in the condition setting storage unit 102. If necessary, the storage device 803 in the operation terminal 800 may store the processing conditions.

The operation terminal 800 can be integrated into the marker controller 100, for example. In this case, the name of the control unit or the like is used instead of the “operating terminal”, but in at least this embodiment, the operating terminal 800 and the marker controller 100 are separate entities.

The external device 900 is connected to the marker controller 100 of the laser processing apparatus L as needed. In the example illustrated in FIG. 1, an image recognition device 901 and a programmable logic controller (PLC) 902 are provided as the external device 900.

Specifically, the image recognition device 901 determines the type and position of the work W conveyed on the manufacturing line, for example. As the image recognition device 901, for example, an image sensor can be used. The PLC 902 is used to control the laser processing system S according to a predetermined sequence.

In addition to the above-described devices and devices, the laser processing device L can be connected to devices for operating and controlling, computers for performing various other processes, storage devices, peripheral devices, and the like. The connection in this case may be, for example, serial connection such as IEEE1394, RS-232, RS-422 and USB, or parallel connection. Alternatively, electrical, magnetic, or optical connection can be adopted through a network such as 10BASE-T, 100BASE-TX, 1000BASE-T. Besides the wired connection, a wireless LAN such as IEEE 802 or a wireless connection using radio waves such as Bluetooth (registered trademark), infrared rays, optical communication, or the like may be used. Further, as a storage medium used in a storage device for exchanging data and storing various settings, for example, various memory cards, magnetic disks, magneto-optical disks, semiconductor memories, hard disks, etc. can be used.

Hereinafter, a description of the hardware configurations of the marker controller 100 and the marker head 1 and a configuration of the control of the marker head 1 by the marker controller 100 will be sequentially described.

<Marker controller 100>
As shown in FIG. 2, the marker controller 100 includes a condition setting storage unit 102 that stores the above-described processing conditions, a control unit 101 that controls the marker head 1 based on the processing conditions stored therein, and laser excitation. An excitation light generation unit 110 that generates light (excitation light).

(Condition setting storage unit 102)
The condition setting storage unit 102 is configured to store the processing conditions set via the operation terminal 800, and to output the stored processing conditions to the control unit 101 as necessary.

Specifically, the condition setting storage unit 102 is configured by using a volatile memory, a non-volatile memory, a hard disk drive (Hard Disk Drive: HDD), etc., and temporarily or continuously stores information indicating a processing condition. can do. When the operation terminal 800 is incorporated in the marker controller 100, the storage device 803 can also be configured to serve as the condition setting storage unit 102.

(Control unit 101)
The control unit 101, based on the processing conditions stored in the condition setting storage unit 102, at least the excitation light generation unit 110 in the marker controller 100, the laser light output unit 2 in the marker head 1, the laser light guide unit 3, and the like. By controlling the laser beam scanning unit 4 and the distance measuring unit 5, printing work of the work W is executed.

Specifically, the control unit 101 has a CPU, a memory, and an input/output bus, and outputs a signal indicating information input via the operation terminal 800 and a processing condition read from the condition setting storage unit 102. A control signal is generated based on the signal shown. The control unit 101 controls the printing processing on the work W and the measurement of the distance to the work W by outputting the control signal thus generated to each unit of the laser processing apparatus L.

For example, the control unit 101 reads the target output stored in the condition setting storage unit 102 when starting the processing of the work W, and outputs the control signal generated based on the target output to the excitation light source driving unit 112, Controls the generation of laser excitation light.

Further, when actually processing the work W, the control unit 101 reads a processing pattern (marking pattern) stored in, for example, the condition setting storage unit 102, and outputs a control signal generated based on the processing pattern to the laser beam. The light is output to the scanning unit 4, and the near infrared laser light is two-dimensionally scanned. The control unit 101 exemplifies the “scanning control unit” in the present embodiment in that it controls the two-dimensional scanning of the near infrared laser light.

(Excitation light generation unit 110)
The pumping light generator 110 is optically coupled to the pumping light source 111 that generates a laser beam according to the driving current, the pumping light source driver 112 that supplies the driving current to the pumping light source 111, and the pumping light source 111. And the excitation light condensing unit 113. The excitation light source 111 and the excitation light condensing unit 113 are fixed inside an excitation casing (not shown). Although not described in detail, this excitation casing is made of metal such as copper having excellent thermal conductivity, and can efficiently radiate heat from the excitation light source 111.

Hereinafter, each part of the excitation light generator 110 will be described in order.

The excitation light source drive unit 112 supplies a drive current to the excitation light source 111 based on the control signal output from the control unit 101. Although not described in detail, the excitation light source drive unit 112 determines a drive current based on the target output determined by the control unit 101, and supplies the drive current thus determined to the excitation light source 111.

The excitation light source 111 is supplied with a drive current from the excitation light source drive unit 112 and oscillates a laser beam according to the drive current. For example, the excitation light source 111 is composed of a laser diode (LD) or the like, and an LD array or LD bar in which a plurality of LD elements are linearly arranged can be used. When an LD array or LD bar is used as the excitation light source 111, the laser light oscillated from each element is output in a line and enters the excitation light condensing unit 113.

The excitation light condensing unit 113 condenses the laser light output from the excitation light source 111 and outputs it as laser excitation light (excitation light). For example, the excitation light condensing unit 113 is composed of a focusing lens or the like, and has an incident surface on which the laser light is incident and an emission surface on which the laser excitation light is output. The excitation light condensing unit 113 is optically coupled to the marker head 1 via the above-mentioned optical fiber cable. Therefore, the laser excitation light output from the excitation light condensing unit 113 is guided to the marker head 1 via the optical fiber cable.

The pumping light generator 110 can be an LD unit or an LD module in which the pumping light source driver 112, the pumping light source 111, and the pumping light condensing unit 113 are incorporated in advance. Further, the pumping light emitted from the pumping light generation unit 110 (specifically, the laser pumping light output from the pumping light condensing unit 113) can be non-polarized, thereby changing the polarization state. There is no need to consider it, which is advantageous in design. In particular, regarding the configuration around the excitation light source 111, a mechanism for making the output light non-polarized is provided to the LD unit itself which bundles the light obtained from the LD array in which several dozen LD elements are arranged with an optical fiber and outputs the bundled light. It is preferable to provide.

(Other components)
The marker controller 100 also includes a distance measuring unit 103 that measures the distance to the work W via the distance measuring unit 5. The distance measuring unit 103 is electrically connected to the distance measuring unit 5 and is a signal related to the measurement result of the distance measuring unit 5 (at least a signal indicating the light receiving position of the distance measuring light by the distance measuring light receiving unit 5B). Is being received.

Further, as will be described later, the laser processing apparatus L according to this embodiment includes a narrow area camera 37 and a wide area camera 6 for imaging the surface of the work W. The marker controller 100 has a model candidate extraction unit 104, a correlation value calculation unit 105, a model image registration unit 106, and a position correction unit 108 in order to perform processing based on the image captured by the narrow-range camera 37 or the wide-range camera 6. And are equipped with.

The marker controller 100 also includes a setting unit 107 that sets information regarding the marking pattern. The control unit 101 serving as a scanning control unit reads and uses the setting contents of the setting unit 107.

The distance measurement unit 103, the model candidate extraction unit 104, the correlation value calculation unit 105, the model image registration unit 106, the setting unit 107, and the position correction unit 108 may be configured by the control unit 101. For example, the control unit 101 may also serve as the position correction unit 108. Alternatively, the model candidate extraction unit 104 may also serve as the model image registration unit 106 and the like.

Details of the distance measurement unit 103, the model candidate extraction unit 104, the correlation value calculation unit 105, the model image registration unit 106, the setting unit 107, and the position correction unit 108 will be described later.

<Marker head 1>
As described above, the laser excitation light generated by the excitation light generator 110 is guided to the marker head 1 via the optical fiber cable. The marker head 1 irradiates the surface of the work W with a laser light output unit 2 that amplifies/generates laser light based on laser excitation light and outputs the laser light, and a laser light output from the laser light output unit 2 A laser beam scanning unit 4 that performs dimensional scanning, a laser beam guiding unit 3 that forms an optical path from the laser beam output unit 2 to the laser beam scanning unit 4, and distance measurement that projects and receives light through the laser beam scanning unit 4. The distance measuring unit 5 for measuring the distance to the surface of the work W based on light.

Here, the laser light guide unit 3 according to the present embodiment not only constitutes an optical path, but also a Z scanner (focus adjustment unit) 33 for adjusting the focus position of the laser light, a guide light source for emitting guide light, and , A narrow-range camera 37 for capturing an image of the surface of the work W, and the like.

Further, the laser light guide unit 3 is further connected to an upstream merging mechanism 31 for merging the near infrared laser light output from the laser light output unit 2 and the guide light emitted from the guide light source 36, and the laser light scanning unit 4. It has a downstream merging mechanism 35 for merging the guided laser light and the distance measuring light projected from the distance measuring unit 5.

3A and 3B are block diagrams illustrating the schematic configuration of the marker head 1, and FIG. 4 is a perspective view illustrating the appearance of the marker head 1. 3A to 3B, FIG. 3A exemplifies a case where the work W is processed by using the near infrared laser light, and FIG. 3B shows a case where the distance to the surface of the work W is measured using the distance measuring unit 5. Is illustrated.

As illustrated in FIGS. 3A to 4, the marker head 1 includes a housing 10 in which at least a laser light output unit 2, a laser light guide unit 3, a laser light scanning unit 4, and a distance measuring unit 5 are provided. ing. The housing 10 has a substantially rectangular outer shape as shown in FIG. The lower surface of the housing 10 is partitioned by a plate-shaped bottom plate 10a. The bottom plate 10a is provided with a transmission window 19 for emitting laser light from the marker head 1 to the outside of the marker head 1. The transmissive window 19 is configured by fitting a plate-shaped member that can transmit near-infrared laser light, guide light, and distance measuring light into a through hole that penetrates the bottom plate 10a in the plate thickness direction.

In the following description, the longitudinal direction of the housing 10 in FIG. 4 is simply referred to as “longitudinal direction” or “front-back direction”, and the lateral direction of the housing 10 in FIG. 4 is simply referred to as “lateral direction” or It may be referred to as "left-right direction". Similarly, the height direction of the housing 10 in FIG. 4 may be simply referred to as “height direction” or “vertical direction”.

FIG. 5 is a perspective view illustrating the configuration of the laser light scanning unit 4. 6 is a cross-sectional view illustrating the configuration of the laser beam guide unit 3, the laser beam scanning unit 4, and the distance measuring unit 5, and FIG. 7 is the laser beam guide unit 3, the laser beam scanning unit 4, and the distance measuring unit 5. 9 is a cross-sectional view illustrating an optical path that connects the laser light guide unit 3, the laser light scanning unit 4, and the distance measuring unit 5. FIG.

As illustrated in FIGS. 5 to 6, a partition portion 11 is provided inside the housing 10. The internal space of the housing 10 is partitioned by the partition portion 11 into one side and the other side in the longitudinal direction.

Specifically, the partition part 11 is formed in a flat plate shape extending in a direction perpendicular to the longitudinal direction of the housing 10. Further, in the longitudinal direction of the casing 10, the partition portion 11 is arranged closer to one side in the longitudinal direction (front side in FIG. 4) than the central portion of the casing 10 in the same direction.

Therefore, the space partitioned into one side in the longitudinal direction in the housing 10 has a shorter dimension in the longitudinal direction than the space partitioned into the other side in the longitudinal direction (rear side in FIG. 4). Hereinafter, the space partitioned to the other side in the longitudinal direction in the housing 10 is referred to as a first space S1, while the space partitioned to the one side in the longitudinal direction is referred to as a second space S2.

In this embodiment, a laser beam output unit 2, a part of the laser beam guide unit 3, a laser beam scanning unit 4, and a distance measuring unit 5 are arranged inside the first space S1. On the other hand, inside the second space S2, main components of the laser light guide portion 3 are arranged.

Specifically, the first space S1 is partitioned by the substantially flat plate-shaped base plate 12 into a space on one side (left side in FIG. 4) in the lateral direction and a space on the other side (right side in FIG. 4). .. In the former space, the components forming the laser light output unit 2 are mainly arranged.

More specifically, among the components forming the laser light output unit 2, the optical component 21 such as an optical lens or an optical crystal that is required to be hermetically sealed as much as possible is provided in the short-side direction in the first space S1. In the side space, it is arranged inside the accommodation space surrounded by the base plate 12 and the like.

On the other hand, among the components of the laser light output unit 2, for components such as electric wiring and the heat sink 22 shown in FIG. 5, which are not necessarily required to be sealed, the base plate 12 is sandwiched between the optical components 21. It is arranged on the opposite side (the other side in the lateral direction of the first space S1).

Further, as illustrated in FIGS. 5 and 6, the laser light scanning unit 4 can be arranged on one side in the lateral direction with the base plate 12 sandwiched therebetween, as with the optical component 21 in the laser light output unit 2. .. Specifically, the laser beam scanning unit 4 according to this embodiment is adjacent to the partition unit 11 described above in the longitudinal direction, and is arranged along the inner bottom surface of the housing 10 in the vertical direction.

Further, as shown in FIG. 6, the distance measuring unit 5 is arranged in the space on the other side in the short-side direction of the first space S1, similarly to the heat sink 22 in the laser light output unit 2.

In addition, the components forming the laser light guide unit 3 are mainly arranged in the second space S2. In this embodiment, most of the components that make up the laser light guide portion 3 are housed in a space surrounded by the partition portion 11 and the cover member 17 that partitions the front surface of the housing 10.

Note that, of the components forming the laser light guide unit 3, the downstream merging mechanism 35 is arranged in a region near the partition unit 11 in the first space S1 (see FIG. 5). That is, in this embodiment, the downstream merging mechanism 35 is located near the boundary between the first space S1 and the second space S2.

Further, the base plate 12 is formed with a through hole (not shown) which penetrates the base plate 12 in the plate thickness direction. The laser light guide portion 3 and the laser light scanning portion 4 are optically coupled to the distance measuring unit 5 through the through hole.

Hereinafter, the configurations of the laser light output unit 2, the laser light guide unit 3, the laser light scanning unit 4, and the distance measuring unit 5 will be sequentially described.

(Laser light output unit 2)
The laser light output unit 2 generates near-infrared laser light for printing processing based on the laser excitation light generated by the excitation light generation unit 110, and directs the near-infrared laser light to the laser light guide unit 3. It is configured to output.

Specifically, the laser light output unit 2 generates a laser light having a predetermined wavelength based on the laser excitation light, amplifies the laser light, and emits near-infrared laser light, and a laser oscillator 21a. A beam sampler 21b for separating a part of the oscillated near infrared laser light, and a power monitor 21c on which the near infrared laser light separated by the beam sampler 21b is incident are provided.

Although not described in detail, the laser oscillator 21a according to the present embodiment is for lasing a laser medium that emits a laser beam by performing stimulated emission corresponding to the laser excitation light and a laser beam that is emitted from the laser medium. It has a Q switch and a mirror that resonates the laser light pulse-oscillated by the Q switch.

In particular, in this embodiment, rod-shaped Nd:YVO ₄ (yttrium vanadate) is used as the laser medium. As a result, the laser oscillator 21a can emit laser light having a wavelength near 1064 nm (the above-mentioned near infrared laser light) as the laser light. However, the laser medium is not limited to this example, and for example, YAG, YLF, GdVO ₄ or the like doped with a rare earth can be used as another laser medium. Various solid-state laser media can be used depending on the application of the laser processing apparatus L.

Further, a wavelength conversion element may be combined with the solid-state laser medium to convert the wavelength of the output laser light into an arbitrary wavelength. Further, a so-called fiber laser in which a fiber is used as an oscillator instead of a bulk as a solid-state laser medium may be used.

Furthermore, the laser oscillator 21a may be configured by combining a solid-state laser medium such as Nd:YVO ₄ and a fiber. In that case, while a solid laser medium is used, a laser with a short pulse width is emitted to suppress thermal damage to the work W, while high output is realized as when a fiber is used. It is possible to realize faster printing processing.

The power monitor 21c detects the output of near infrared laser light. The power monitor 21c is electrically connected to the marker controller 100 and can output the detection signal thereof to the control unit 101 and the like.

(Laser light guide 3)
The laser light guide unit 3 forms an optical path P that guides the near infrared laser light emitted from the laser light output unit 2 to the laser light scanning unit 4. The laser light guide unit 3 includes a Z mirror (focus adjustment unit) 33, a guide light source (guide light emission unit) 36, a narrow-range camera 37, and the like, in addition to the bend mirror 34 for forming the optical path P. .. All of these components are provided inside the housing 10 (mainly in the second space S2).

The near infrared laser light incident from the laser light output unit 2 is reflected by the bend mirror 34 and passes through the laser light guide unit 3. On the way to the bend mirror 34, a Z scanner 33 for adjusting the focus position of the near infrared laser light is arranged. The near-infrared laser light that has passed through the Z scanner 33 and reflected by the bend mirror 34 enters the laser light scanning unit 4.

The optical path P formed by the laser light guide unit 3 can be divided into two parts with the Z scanner 33 as a focus adjustment unit as a boundary. Specifically, the optical path P formed by the laser light guide unit 3 includes an upstream optical path Pu from the laser light output unit 2 to the Z scanner 33, and a downstream optical path Pd from the Z scanner 33 to the laser light scanning unit 4. Can be divided into

More specifically, the upstream optical path Pu is provided inside the housing 10, and reaches the Z scanner 33 from the laser light output unit 2 via the upstream merging mechanism 31 described above.

On the other hand, the downstream side optical path Pd is provided inside the housing 10, and in the laser beam scanning section 4 from the Z scanner 33 through the bend mirror 34 and the downstream side joining mechanism 35 in order. It reaches the first scanner 41.

As described above, inside the housing 10, the upstream merging mechanism 31 is provided in the middle of the upstream optical path Pu, and the downstream merging mechanism 35 is provided in the middle of the downstream optical path Pd.

Hereinafter, the configuration related to the laser light guide unit 3 will be sequentially described.

-Guide light source 36-
The guide light source 36 is provided in the second space S2 inside the housing 10 and emits guide light for projecting a predetermined processing pattern onto the surface of the work W. The wavelength of this guide light is set so that it falls within the visible light range. As an example thereof, the guide light source 36 according to the present embodiment emits red laser light having a wavelength near 655 nm as guide light. Therefore, when the guide light is emitted from the marker head 1, the user can visually recognize the guide light.

In addition, in the present embodiment, the wavelength of the guide light is set to be different from at least the wavelength of the near infrared laser light. Further, as described later, the distance measuring light emitting unit 5A of the distance measuring unit 5 emits distance measuring light having a wavelength different from that of the guide light and the near infrared laser light. Therefore, the distance measuring light, the guide light, and the laser light have different wavelengths.

Specifically, the guide light source 36 is disposed at substantially the same height as the upstream merging mechanism 31 in the second space S2, and emits a visible light laser (guide light) toward the inner side in the lateral direction of the housing 10. Can be emitted. The guide light source 36 is also arranged such that the optical axis of the guide light emitted from the guide light source 36 and the upstream merging mechanism 31 intersect.

The “substantially the same height” here means that the height positions are substantially the same when viewed from the bottom plate 10a that forms the lower surface of the housing 10. In other description, it also means the height viewed from the bottom plate 10a.

Therefore, for example, when the guide light is emitted from the guide light source 36 so that the user can visually recognize the processing pattern by the near infrared laser light, the guide light reaches the upstream merging mechanism 31. The upstream merging mechanism 31 has a dichroic mirror (not shown) as an optical component. As described later, this dichroic mirror reflects the near infrared laser light while transmitting the guide light. As a result, the guide light that has passed through the dichroic mirror and the near-infrared laser light that has been reflected by the mirror merge and become coaxial.

The guide light source 36 according to the present embodiment is configured to emit the guide light based on the control signal output from the control unit 101.

-Upstream merging mechanism 31-
The upstream merging mechanism 31 merges the guide light emitted from the guide light source 36 serving as a guide light emitting portion into the upstream optical path Pu. By providing the upstream merging mechanism 31, the guide light emitted from the guide light source 36 and the near infrared laser light in the upstream optical path Pu can be made coaxial.

As described above, the wavelength of the guide light is set to be at least different from the wavelength of the near infrared laser light. Therefore, the upstream merging mechanism 31 can be configured by using, for example, a dichroic mirror, as described above. The near-infrared laser light and the guide light coaxialized by the dichroic mirror propagate downward, pass through the Z scanner 33, and reach the bend mirror 34.

-Z scanner 33-
The Z scanner 33 as a focus adjustment unit is arranged in the optical path formed by the laser light guide unit 3 and can adjust the focus position of the near infrared laser light emitted from the laser light output unit 2. ..

Specifically, as shown in FIGS. 3A and 3B, the Z scanner 33 according to the present embodiment passes through the entrance lens 33a that transmits the near-infrared laser light emitted from the laser light output unit 2 and the entrance lens 33a. The collimator lens 33b that allows the near-infrared laser light to pass, the exit lens 33c that allows the near-infrared laser light that has passed through the entrance lens 33a and the collimator lens 33b to pass through, the lens drive unit 33d that moves the entrance lens 33a, and the entrance. It has a lens 33a, a collimating lens 33b, and a casing 33e that houses the emitting lens 33c.

The entrance lens 33a is a plano-concave lens, and the collimator lens 33b and the exit lens 33c are plano-convex lenses. The entrance lens 33a, the collimator lens 33b, and the exit lens 33c are arranged such that their optical axes are coaxial with each other.

In the Z scanner 33, the lens driving unit 33d moves the incident lens 33a along the optical axis. Thereby, while maintaining the optical axes of the incident lens 33a, the collimator lens 33b, and the exit lens 33c coaxial with the near-infrared laser light passing through the Z scanner 33, the relative distance between the entrance lens 33a and the exit lens 33c is changed. can do. As a result, the focus position of the near-infrared laser light with which the work W is irradiated changes.

Hereinafter, each part of the Z scanner 33 will be described in more detail.

The casing 33e has a substantially cylindrical shape. As shown in FIGS. 3A and 3B, openings 33f for passing near-infrared laser light are formed at both ends of the casing 33e. Inside the casing 33e, an entrance lens 33a, a collimator lens 33b, and an exit lens 33c are arranged in this order in the vertical direction.

The collimator lens 33b and the exit lens 33c among the entrance lens 33a, the collimator lens 33b, and the exit lens 33c are fixed inside the casing 33e. On the other hand, the entrance lens 33a is provided so as to be vertically movable. The lens driving unit 33d has, for example, a motor, and moves the incident lens 33a in the vertical direction. As a result, the relative distance between the entrance lens 33a and the exit lens 33c is changed.

For example, it is assumed that the distance between the entrance lens 33a and the exit lens 33c is adjusted to be relatively short by the lens driving unit 33d. In this case, since the converging angle of the near infrared laser light passing through the emission lens 33c becomes relatively small, the focus position of the near infrared laser light moves away from the transmission window 19 of the marker head 1.

On the other hand, it is assumed that the distance between the entrance lens 33a and the exit lens 33c is adjusted to be relatively long by the lens driving unit 33d. In this case, since the converging angle of the near-infrared laser light passing through the emission lens 33c becomes relatively large, the focus position of the near-infrared laser light approaches the transmission window 19 of the marker head 1.

In the Z scanner 33, of the entrance lens 33a, the collimator lens 33b, and the exit lens 33c, the entrance lens 33a may be fixed inside the casing 33e, and the collimator lens 33b and the exit lens 33c may be vertically movable. Good. Alternatively, all of the entrance lens 33a, the collimator lens 33b, and the exit lens 33c may be movable in the vertical direction.

In this way, the Z scanner 33 as a focus adjustment unit functions as a unit for scanning the near infrared laser light in the vertical direction. Hereinafter, the scanning direction of the Z scanner 33 may be referred to as the “Z direction”.

The near infrared laser light passing through the Z scanner 33 is coaxial with the guide light emitted from the guide light source 36 as described above. Therefore, by operating the Z scanner 33, not only the near infrared laser light but also the focus position of the guide light can be adjusted together.

The Z scanner 33 according to the present embodiment, particularly the lens driving unit 33d in the Z scanner 33, is configured to operate based on the control signal output from the control unit 101.

-Narrow area camera 37-
In the present embodiment, the narrow area camera 37 is arranged at substantially the same height as the bend mirror 34, and receives the reflected light incident from the laser light scanning unit 4 to the laser light guiding unit 3. The narrow area camera 37 according to the present embodiment is configured such that the reflected light reflected at the printing point of the work W enters through the bend mirror 34. The narrow-range camera 37 can form an image of the surface of the work W by forming an image of the reflected light thus entered. The layout of the narrow area camera 37 can be changed as appropriate. For example, the heights of the narrow area camera 37 and the bend mirror 34 may be different from each other.

The reflected light used for image formation by the narrow-range camera 37 propagates along the downstream optical path Pd described above. Therefore, by appropriately operating the laser beam scanning unit 4, it is possible to scan the imaging region R3 illustrated in FIG.

The narrow-range camera 37 according to the present embodiment is configured to operate based on the control signal output from the control unit 101, like the guide light source 36 and the like.

-Bend mirror 34-
The bend mirror 34 is provided in the middle of the downstream optical path Pd, and is arranged so as to bend the optical path Pd and direct it toward the rear. As shown in FIG. 6, the bend mirror 34 is disposed at substantially the same height as the dichroic mirror 35a in the downstream merging mechanism 35, and reflects the near infrared laser light and the guide light that have passed through the Z scanner 33. You can

The near infrared laser light and the guide light reflected by the bend mirror 34 propagate backward, pass through the downstream merging mechanism 35, and reach the laser light scanning unit (specifically, the first scanner 41).

-Downstream merging mechanism 35-
The downstream merging mechanism 35 guides the distance-measuring light emitted from the distance-measuring light emitting unit 5A of the distance-measuring unit 5 to the work W via the laser light scanning unit 4 by merging the distance-measuring light with the downstream optical path Pd. .. In addition, the downstream merging mechanism 35 guides the distance measuring light reflected by the work W and returning in the order of the laser light scanning unit 4 and the downstream optical path Pd to the distance measuring light receiving unit 5B in the distance measuring unit 5.

By providing the downstream merging mechanism 35, the distance measuring light emitted from the distance measuring light emitting unit 5A can be coaxial with the near infrared laser light and the guide light in the downstream optical path Pd. At the same time, by providing the downstream merging mechanism 35, out of the distance measuring light emitted from the marker head 1 and reflected by the work W, the distance measuring light incident on the marker head 1 is guided to the distance measuring light receiving portion 5B. be able to.

As described above, the wavelength of the distance measuring light is set to be different from the wavelengths of the near infrared laser light and the guide light. Therefore, the downstream merging mechanism 35 can be configured by using, for example, a dichroic mirror, similarly to the upstream merging mechanism 31.

Specifically, the downstream merging mechanism 35 according to the present embodiment has a dichroic mirror 35a that transmits one of the distance measuring light and the guide light and reflects the other (see FIGS. 6 and 7). More specifically, the dichroic mirror 35a is arranged at substantially the same height as the bend mirror 34 and behind the bend mirror 34, and is arranged in the space on the left side in the lateral direction within the housing 10.

As shown in FIG. 6 and the like, the dichroic mirror 35a is also fixed in a posture in which the mirror surface on one side faces the bend mirror 34 and the mirror surface on the other side faces the base plate 12. Therefore, the near infrared laser light and the guide light are incident on the mirror surface on one side of the dichroic mirror 35a, while the distance measuring light is incident on the mirror surface on the other side.

The dichroic mirror 35a according to this embodiment can reflect the distance measuring light and transmit the near infrared laser light and the guide light. Thus, for example, when the distance measuring light emitted from the distance measuring unit 5 is incident on the dichroic mirror 35a, the distance measuring light is merged with the downstream optical path Pd to be coaxial with the near infrared laser light and the guide light. You can The near-infrared laser light, the guide light, and the distance-measuring light thus coaxialized reach the first scanner 41 as shown in FIGS. 3A and 3B.

On the other hand, the distance measuring light reflected by the work W returns to the laser light scanning unit 4 and reaches the downstream optical path Pd. The distance measuring light returning to the downstream optical path P is reflected by the dichroic mirror 35 a in the downstream merging mechanism 35 and reaches the distance measuring unit 5.

It should be noted that, as shown in FIG. 7, both the distance measuring light that enters the dichroic mirror 35a from the distance measuring unit 5 and the distance measuring light that is reflected by the dichroic mirror 35a and enters the distance measuring unit 5 are The light is propagated along the left-right direction when viewed in plan view (the lateral direction of the housing 10 ).

(Laser light scanning unit 4)
As shown in FIG. 3A, the laser beam scanning unit 4 irradiates the work W with the laser beam (near infrared laser beam) emitted from the laser beam output unit 2 and guided by the laser beam guide unit 3, and The surface of the work W is configured to be two-dimensionally scanned.

In the example shown in FIG. 5, the laser beam scanning unit 4 is configured as a so-called biaxial galvano scanner. That is, the laser light scanning unit 4 includes a first scanner 41 for scanning the near infrared laser light incident from the laser light guiding unit 3 in the first direction, and a near infrared laser scanned by the first scanner 41. A second scanner 42 for scanning the light in the second direction.

Here, the second direction refers to a direction substantially orthogonal to the first direction. Therefore, the second scanner 42 can scan the near-infrared laser light in a direction substantially orthogonal to the first scanner 41. In the present embodiment, the first direction is equal to the front-rear direction (longitudinal direction of the housing 10) and the second direction is equal to the left-right direction (shorter direction of the housing 10). Hereinafter, the first direction will be referred to as the “X direction”, and the second direction orthogonal thereto will be referred to as the “Y direction”. Both the X direction and the Y direction are orthogonal to the Z direction described above.

The first scanner 41 has a first mirror 41a at its tip. The first mirror 41a is arranged at substantially the same height as the bend mirror 34 and the dichroic mirror 35a and behind the dichroic mirror 35a. Therefore, as shown in FIG. 5, the bend mirror 34, the dichroic mirror 35a, and the first mirror 41a are arranged in a line in the front-rear direction (longitudinal direction of the housing 10).

The first mirror 41a is also rotationally driven by a motor (not shown) built in the first scanner 41. This motor can rotate the first mirror 41a around a rotation axis extending in the vertical direction. By adjusting the rotation posture of the first mirror 41a, the reflection angle of the near infrared laser light by the first mirror 41a can be adjusted.

Similarly, the second scanner 42 has a second mirror 42a at its tip. The second mirror 42a is arranged at substantially the same height as the first mirror 41a in the first scanner 41 and to the right of the first mirror 41a. Therefore, as shown in FIG. 6, the first mirror 41a and the second mirror 42a are arranged side by side in the left-right direction (the lateral direction of the housing 10).

The second mirror 42a is also driven to rotate by a motor (not shown) built in the second scanner 42. This motor can rotate the second mirror 42a around a rotation axis extending in the front-rear direction. By adjusting the rotation attitude of the second mirror 42a, the reflection angle of the near infrared laser light by the second mirror 42a can be adjusted.

Therefore, when the near-infrared laser light enters the laser light scanning unit 4 from the downstream merging mechanism 35, the near-infrared laser light is the first mirror 41a in the first scanner 41 and the second mirror in the second scanner 42. 42a in turn, and is emitted to the outside of the marker head 1 through the transmission window 19.

At that time, by operating the motor of the first scanner 41 to adjust the rotation posture of the first mirror 41a, it becomes possible to scan the surface of the work W with the near infrared laser light in the first direction. .. At the same time, by operating the motor of the second scanner 42 to adjust the rotation posture of the second mirror 42a, it becomes possible to scan the surface of the work W with the near infrared laser light in the second direction.

Further, as described above, the laser light scanning unit 4 includes not only the near infrared laser light but also the guide light that has passed through the dichroic mirror 35a of the downstream merging mechanism 35 or the distance measuring light reflected by the mirror 35a. Will also be incident. The laser light scanning unit 4 according to the present embodiment can two-dimensionally scan the guide light or the distance measuring light thus entered by operating the first scanner 41 and the second scanner 42, respectively.

The rotational postures that the first mirror 41a and the second mirror 42a can take are basically such that when the near infrared laser light is reflected by the second mirror 42a, the reflected light passes through the transmission window 19. It is set within such a range (see also FIGS. 7 to 8).

In this way, the laser light scanning unit 4 according to the present embodiment is controlled by the control unit 101 serving as a scanning control unit, so that the predetermined processing region R1 is irradiated with the near infrared laser light as illustrated in FIG. Then, a predetermined processing pattern (marking pattern) can be formed in the region R1.

(Wide area camera 6)
As described above, the laser light guide unit 3 is provided with the narrow area camera 37. The marker head 1 according to this embodiment includes a wide area camera 6 in addition to the narrow area camera 37. The wide area camera 6 is arranged immediately above the transparent window 19 and is fixed in a posture in which its imaging lens is directed downward.

As illustrated in FIGS. 3A and 3B, the optical axis of the wide area camera 6 is not coaxial with the optical axis of the near infrared laser light. Therefore, although not scanned by the laser beam scanning unit 4, the imaging area R2 of the wide area camera 6 is wider than the imaging area R3 of the narrow area camera 37 as shown in FIG. That is, the wide area camera 6 can image the surface of the work W over a wider area than the narrow area camera 37.

Note that the narrow area camera 37 and the wide area camera 6 may be at least one of the cameras, which are used in the control mode described later. That is, only the narrow area camera 37 may be used, only the wide area camera 6 may be used, or both may be used in combination. Therefore, the configuration including both the narrow area camera 37 and the wide area camera 6 is not essential.

(Distance measuring unit 5)
As shown in FIG. 3B, the distance measuring unit 5 projects distance measuring light through the laser light scanning unit 4 and irradiates the surface of the work W with the distance measuring light. The distance measuring unit 5 also receives the distance measuring light reflected by the surface of the workpiece W via the laser light scanning unit 4.

The distance measuring unit 5 is mainly divided into a module for projecting distance measuring light and a module for receiving distance measuring light. Specifically, the distance measuring unit 5 is provided inside the housing 10, and measures the distance measuring light for measuring the distance from the marker head 1 in the laser processing apparatus L to the surface of the work W by the laser light scanning unit 4. Distance measuring light emitting section 5A that emits toward the camera, and the distance measuring light that is provided inside the housing 10 and that is emitted from the distance measuring light emitting section 5A and reflected by the work W is passed through the laser beam scanning section 4. The distance-measuring light receiving section 5B for receiving the light. Further, the distance measuring unit 5 further includes a support base 50 that supports the distance measuring light emitting unit 5A and the distance measuring light receiving unit 5B from below, and is fixed to the inside of the housing 10 via the support base 50. ing.

As described above, the distance measuring unit 5 is provided in the space on the other side in the lateral direction of the first space S1. As shown in FIG. 7, the distance measuring unit 5 emits the distance measuring light forward along the longitudinal direction of the housing 10 and receives the distance measuring light propagating substantially rearward along the longitudinal direction.

The distance measuring unit 5 is optically coupled to the laser light guide unit 3 via the dichroic mirror 35a described above. As described above, the distance measuring unit 5 projects distance measuring light along the longitudinal direction of the housing 10. On the other hand, the dichroic mirror 35a is configured to reflect the distance measuring light propagating not along the longitudinal direction of the housing 10 but along the lateral direction thereof.

Therefore, a bend mirror 59 is provided inside the housing 10 to form an optical path connecting the distance measuring unit 5 and the dichroic mirror 35a (see FIGS. 6 and 7).

Therefore, the distance measuring light that has entered the bend mirror 59 from the distance measuring light emitting unit 5A is reflected by the mirror 59 and enters the dichroic mirror 35a. On the other hand, the distance measuring light returning to the laser beam scanning unit 4 and reflected by the dichroic mirror 35a is incident on the bend mirror 59 and also reflected by the mirror 59 and incident on the distance measuring light receiving unit 5B.

Hereinafter, the configuration of each part of the distance measuring unit 5 will be described in order.

-Distance measuring light emitting section 5A-
The distance measuring light emitting unit 5A is provided inside the housing 10, and is configured to emit distance measuring light for measuring the distance from the marker head 1 in the laser processing apparatus L to the surface of the work W. ing.

Specifically, the distance measuring light emitting unit 5A includes the distance measuring light source 51 and the light projecting lens 52 described above, a casing 53 that houses them, and a pair of distance measuring lights that are guided by the light projecting lens 52. It has guide plates 54L and 54R. The distance measuring light source 51, the light projecting lens 52, and the guide plates 54L and 54R are arranged in order from the rear side of the housing 10, and the arrangement direction thereof is substantially the same as the longitudinal direction of the housing 10.

The casing 53 is formed in a cylindrical shape extending along the longitudinal direction of the housing 10 and the support base 50, and the distance measuring light source 51 is provided at one end in the same direction, that is, at one end corresponding to the rear side of the housing 10. On the other hand, a light projecting lens 52 is attached to the other end corresponding to the front side of the housing 10. The space between the distance measuring light source 51 and the light projecting lens 52 is sealed in a substantially airtight manner.

The distance measuring light source 51 emits distance measuring light toward the front side of the housing 10 in accordance with a control signal input from the control unit 101. Specifically, the distance measuring light source 51 can emit laser light in the visible light range as distance measuring light. In particular, the distance measuring light source 51 according to the present embodiment emits red laser light having a wavelength near 690 nm as distance measuring light.

The distance measuring light source 51 is also fixed such that the optical axis Ao of the red laser light emitted as the distance measuring light is along the longitudinal direction of the casing 53. Therefore, the optical axis Ao of the distance measuring light extends along the longitudinal direction of the housing 10 and the support base 50, passes through the central portion of the light projecting lens 52, and reaches the outside of the casing 53.

The light projecting lens 52 is located between the light receiving lens 57 and the pair of light receiving elements 56L and 56R in the distance measuring light receiving section 5B in the longitudinal direction of the support base 50. The light projecting lens 52 is in such a posture that the optical axis Ao of the distance measuring light passes through.

The light projecting lens 52 can be, for example, a plano-convex lens, and the spherical convex surface can be fixed in a posture facing the outside of the casing 53. The light projecting lens 52 condenses the distance measuring light emitted from the distance measuring light source 51 and emits it to the outside of the casing 53. The distance measuring light emitted to the outside of the casing 53 reaches the guide plates 54L and 54R.

The guide plates 54</b>L and 54</b>R are configured as a pair of members arranged in the lateral direction of the support base 50, and each can be a plate-shaped member extending in the longitudinal direction of the support base 50. A space for emitting the distance measuring light is defined between the one guide plate 54L and the other guide plate 54R. The distance measuring light emitted to the outside of the casing 53 passes through the space thus partitioned and is output.

Therefore, the distance measuring light emitted from the distance measuring light source 51 passes through the space inside the casing 53, the central portion of the light projecting lens 52, and the space between the guide plates 54L and 54R to the outside of the distance measuring unit 5. Is output. The distance measuring light thus output is reflected by the bend mirror 59 and the dichroic mirror 35a in the downstream merging mechanism 35, and enters the laser light scanning unit 4.

The distance measuring light incident on the laser light scanning unit 4 is sequentially reflected by the first mirror 41a of the first scanner 41 and the second mirror 42a of the second scanner 42, and is transmitted from the transmission window 19 to the outside of the marker head 1. Will be emitted to.

As described in the description of the laser beam scanning unit 4, by adjusting the rotation posture of the first mirror 41a of the first scanner 41, the surface of the work W can be scanned with the distance measuring light in the first direction. At the same time, the motor of the second scanner 42 is operated to adjust the rotational posture of the second mirror 42a, so that the surface of the work W can be scanned with the distance measuring light in the second direction.

The distance measuring light thus scanned is reflected on the surface of the work W. A part of the distance measuring light thus reflected (hereinafter, also referred to as “reflected light”) enters the inside of the marker head 1 through the transmission window 19. The reflected light that has entered the inside of the marker head 1 returns to the laser light guide unit 3 via the laser light scanning unit 4. Since the reflected light has the same wavelength as the distance measuring light, the reflected light is reflected by the dichroic mirror 35a of the downstream merging mechanism 35 in the laser light guide portion 3 and enters the distance measuring unit 5 via the bend mirror 59.

-Distance measuring light receiver 5B-
The distance measuring light receiving section 5B is provided inside the housing 10, and receives the distance measuring light (equivalent to the above-mentioned “reflected light”) emitted from the distance measuring light emitting section 5A and reflected by the work W. Is configured to.

Specifically, the distance measuring light receiving section 5B has a pair of light receiving elements 56L and 56R and a light receiving lens 57. The pair of light receiving elements 56</b>L and 56</b>R are arranged at the rear end of the support base 50, respectively, while the light receiving lens 57 is arranged at the front end of the support base 50. Therefore, the pair of light receiving elements 56L and 56R and the light receiving lens 57 are arranged substantially along the longitudinal direction of the housing 10 and the support base 50.

In the pair of light receiving elements 56L and 56R, the optical axes Al and Ar are arranged inside the housing 10 so as to sandwich the optical axis Ao of the distance measuring light in the distance measuring light emitting unit 5A. The pair of light receiving elements 56L and 56R respectively receive the reflected light returned to the laser light scanning unit 4.

Specifically, the pair of light receiving elements 56L and 56R are arranged in a direction orthogonal to the optical axis Ao of the distance measuring light emitting unit 5A. In this embodiment, the alignment direction of the pair of light receiving elements 56L and 56R is equal to the lateral direction of the housing 10 and the support base 50, that is, the horizontal direction. In the same direction, one light receiving element 56L is arranged on the left side of the distance measuring light source 51, and the other light receiving element 56R is arranged on the right side of the distance measuring light source 51.

Each of the pair of light receiving elements 56L and 56R has a light receiving surface directed obliquely forward, detects the light receiving position of the reflected light on each light receiving surface, and outputs a signal (detection signal) indicating the detection result. Is output. Detection signals output from the light receiving elements 56L and 56R are input to the marker controller 100 and reach the distance measuring unit 103.

Examples of elements that can be used as the light receiving elements 56L and 56R include, for example, a CMOS image sensor including a complementary MOS (CMOS), a CCD image sensor including a charge-coupled device (CCD), and an optical position. A sensor (Position Sensitive Detector: PSD) etc. are mentioned.

In this embodiment, each of the light receiving elements 56L and 56R is configured using a CMOS image sensor. In this case, each of the light receiving elements 56L and 56R can detect not only the light receiving position of the reflected light but also the light receiving amount distribution (light receiving waveform) thereof. That is, when each of the light receiving elements 56L and 56R is configured by using the CMOS image sensor, the pixels are lined up at least in the left-right direction on each light receiving surface a. In this case, each of the light receiving elements 56L and 56R can read out and amplify a signal for each pixel and output the signal to the outside. The intensity of the signal at each pixel is determined based on the intensity of the reflected light at the spot when the reflected light forms a spot on the light receiving surface 56a.

When each of the light receiving elements 56L and 56R is configured by using an element capable of detecting a light receiving amount distribution (light receiving waveform) such as a CMOS image sensor, the amount of light receiving in each of the light receiving elements 56L and 56R is measured. The intensity of the distance light, that is, the intensity of the distance measuring light emitted from the distance measuring light emitting unit 5A (hereinafter, also referred to as “projection light amount”) and the gain for amplifying the signal for each pixel (hereinafter, "Also referred to as "light-receiving gain"). In addition to the gain, the exposure time of each of the light receiving elements 56L and 56R can be used for adjustment.

The pair of light receiving elements 56L and 56R according to the present embodiment can detect at least the peak position indicating the light receiving position of the reflected light and the received light amount of the reflected light. As an index indicating the amount of received light, for example, the height of a peak in the received light amount distribution of reflected light can be used. Instead of this, a summed value, an average value, and an integrated value of the received light amount distribution may be used.

Although the peak position of the received light amount distribution is used as an index indicating the received light position of the reflected light in this embodiment, the position of the center of gravity of the received light amount distribution may be used instead.

The light receiving lens 57 is arranged inside the housing 10 so that the optical axes of the pair of light receiving elements 56L and 56R pass through. The light receiving lens 57 is also provided in the middle of the optical path connecting the downstream merging mechanism 35 and the pair of light receiving elements 56L and 56R, and reflects the reflected light that has passed through the downstream merging mechanism 35 into the pair of light receiving elements 56L and 56R. The light can be collected on each light receiving surface.

The light receiving lens 57 collects the reflected light returned to the laser light scanning unit 4 and forms a spot of the reflected light on the light receiving surface of each of the light receiving elements 56L and 56R. Each of the light receiving elements 56L and 56R outputs a signal indicating the peak position of the spot thus formed and the amount of received light to the distance measuring unit 103.

The laser processing apparatus L basically measures the distance to the surface of the work W based on the light receiving position (the peak position of the spot in this embodiment) of the reflected light on the light receiving surface of each of the light receiving elements 56L and 56R. can do. A so-called triangulation method is used as a distance measuring method.

<About distance measurement method>
FIG. 9 is a diagram for explaining the triangulation method. Although only the distance measuring unit 5 is shown in FIG. 9, the following description is also applicable to the case where the distance measuring light is emitted through the laser light scanning unit 4 as described above.

As illustrated in FIG. 9, when the distance measuring light is emitted from the distance measuring light source 51 in the distance measuring light emitting unit 5A, the distance measuring light is applied to the surface of the work W. When the distance measuring light is reflected by the work W, the reflected light (especially diffuse reflected light) propagates isotropically if the influence of specular reflection is removed.

The reflected light thus propagating includes a component that is incident on the light receiving element 56L via the light receiving lens 57, but the angle of incidence on the light receiving element 56L increases or decreases depending on the distance between the marker head 1 and the workpiece W. Will be done. When the incident angle on the light receiving element 56L increases or decreases, the light receiving position on the light receiving surface 56a increases or decreases.

In this way, the distance between the marker head 1 and the work W and the light receiving position on the light receiving surface 56a are associated with each other with a predetermined relationship. Therefore, the distance between the marker head 1 and the work W can be calculated from the light receiving position on the light receiving surface 56a by grasping the relationship in advance and storing it in the marker controller 100, for example. Such a calculation method is nothing but a method using a so-called triangulation method.

That is, the distance measuring unit 103 described above measures the distance from the laser processing device L to the surface of the workpiece W by the triangulation distance measuring method based on the light receiving position of the distance measuring light in the distance measuring light receiving unit 5B.

Specifically, the above-described condition setting storage unit 102 stores in advance the relationship between the light receiving position on the light receiving surface 56a and the distance between the marker head 1 and the surface of the work W. On the other hand, the distance measuring unit 103 is supplied with a signal indicating the light receiving position of the distance measuring light in the distance measuring light receiving unit 5B, specifically, the position of the peak of the spot formed by the reflected light on the light receiving surface 56a.

The distance measuring unit 103 measures the distance to the surface of the work W based on the signal thus input and the relationship stored in the condition setting storage unit 102. The measurement value thus obtained is input to, for example, the control unit 101, and is used by the control unit 101 to control the Z scanner 33 and the like.

For example, the laser processing apparatus L automatically/manually determines a portion (printing point) to be processed by the marker head 1 on the surface of the work W. Subsequently, the laser processing apparatus L measures the distance to each print point (more accurately, the distance measuring point set around the print point) before performing the print processing, and the focus corresponding to the distance is measured. The control parameter of the Z scanner 33 is determined so that the position becomes. The laser processing apparatus L operates the Z scanner 33 based on the control parameters thus determined, and then prints the work W with the near infrared laser light.

Hereinafter, a specific method of using the laser processing system S will be described.

<How to use the laser processing system S>
FIG. 10 is a flowchart showing how to use the laser processing system S. Further, FIG. 11 is a flowchart illustrating a procedure for creating print settings, and FIG. 12 is a flowchart illustrating an operating procedure for the laser processing apparatus L.

13 is a diagram illustrating the relationship between the processing region R1 of the work W and the display unit 801, and FIG. 14 is a flowchart illustrating the procedure for determining a model image for pattern search.

15 is a diagram illustrating the work image Pw, FIG. 16 is a diagram illustrating generation of the model candidate image Pm, and FIG. 17 is a diagram illustrating a reference point C for generating the model candidate image Pm. Is.

18 is a diagram illustrating the size of the model candidate image Pc and the correlation value distribution, FIG. 19 is a diagram illustrating a method of calculating the sharpness, and FIGS. 20A to 20C are specific patterns for pattern search. It is a figure which illustrates a procedure.

21A to 21B are views showing a display screen related to the registration of the model image Px, and FIG. 22 is a view showing an example of the positional deviation allowable amount.

The laser processing system S including the laser processing apparatus L configured as a laser marker can be installed and operated, for example, on a manufacturing line of a factory. Prior to the operation of the production line, first, the setting position of the work W that will flow through the line and the setting of conditions such as the output of the laser light and the distance measuring light that irradiate the work W (print setting) ) Is created (step S1).

The print setting created in step S1 is transferred to and stored in the marker controller 100 and/or the operation terminal 800, or is read by the marker controller 100 immediately after creation (step S2).

Then, when the manufacturing line is operated, the marker controller 100 reads the print setting that is stored in advance or that is read immediately after the creation. The laser processing apparatus S is operated based on the print setting and executes the print processing on each work W flowing on the line (step S3).

(Creating print settings)
FIG. 11 exemplifies the specific processing in step S1 of FIG.

First, in step S11, the narrow area camera 37 and the wide area camera 6 built in the laser processing apparatus L capture a work image Pw showing the processing area R1. As described above, the imaging area R2 of the wide area camera 6 is wider than the imaging area R3 of the narrow area camera 37.

Note that FIG. 15 illustrates an example in which the wide area camera 6 captures the work image Pw including a part of the processing region R1, but the invention is not limited to this example. For example, the work image Pw including the entire processing region R1 may be captured. Further, the image captured by the narrow range camera 37 may be used as the work image Pw.

The wide-area camera 6 and the narrow-area camera 37 are examples of the “imaging unit” in that they can generate the work image Pw including at least a part of the processing region R1 by imaging the work W. There is.

As a result, the display unit 801 of the operation terminal 800 displays the setting surface R4 corresponding to the processing region R1 and also displays the work image Pw on the setting surface R4. As a result, the coordinates on the processing region R1, that is, the coordinates on the surface of the work W and the coordinates on the setting surface R4 on the display unit 801 can be associated with each other.

In the following step S12, the installation position of the work W is corrected based on the work image Pw captured in step S11. Although details will be omitted, this step corrects the inclination of the surface of the work W with respect to the XY plane (the plane formed by the X direction and the Y direction described above), and the Z axis (in the Z direction described above) of this surface is corrected. The rotation (θ rotation) around an axis extending along the axis is corrected manually/automatically.

In the following step S13, the setting unit 107 sets the processing conditions. The setting unit 107 sets the processing condition by reading the stored contents in the condition setting storage unit 102 or the like, or by reading the operation input or the like via the operation terminal 800.

The processing conditions include a print pattern (marking pattern) indicating print content and the like, and a print block including the print pattern. The print block can be used to adjust the layout, size, rotation posture, etc. of the print pattern.

In the example shown in FIG. 15, a print pattern P composed of the letters “A” and a rectangular print block B containing the print pattern P are laid out on the surface of the work W, and the setting surface R4 is Is displayed through. Usually, the print block B is set so as to be superposed on the work image Pw.

Note that the print pattern is an example of a “processed pattern”, and the print block is an example of a “processed block”. When it is applied to laser processing other than printing processing, a name corresponding to it may be used.

Instead of the example shown in FIG. 15, a plurality of works W may be displayed on the setting surface R4. Further, a plurality of print blocks may be provided for each work W. Regarding the print pattern, for example, a character string such as “ABC” can be used, or a pattern other than the character string such as QR code (registered trademark) can be used.

As described above, the setting unit 107 according to the present embodiment exemplifies the “machining block setting unit” in that it can set the print block including the print pattern P so as to be superimposed on the work image Pw. ing.

In the following step S12, the installation position of the work W is corrected based on the work image Pw captured in step S11. As will be described later, this step corrects the inclination of the surface of the workpiece W with respect to the XY plane (the plane formed by the X direction and the Y direction described above), and the Z axis of this surface (along the Z direction described above). The rotation (θ rotation) about the extending axis is corrected manually/automatically.

In the following step S13, the setting unit 107 sets the processing conditions. The setting unit 107 sets the processing condition by reading the stored contents in the condition setting storage unit 102 or the like, or by reading the operation input or the like via the operation terminal 800.

The processing conditions include a print pattern (marking pattern) indicating print content and the like, and a print block including the print pattern. The print block can be used to adjust the layout, size, rotation posture, etc. of the print pattern.

The processing conditions also include laser conditions. The laser conditions include the target output (laser power) of the near infrared laser light, the repetition frequency of the near infrared laser light, and the scanning speed (scan speed) of the near infrared laser light by the laser light scanning unit 4. At least one of When laser oscillation is performed using the Q switch as in the laser processing apparatus L according to the present embodiment, the repetition frequency is substantially equal to the Q switch frequency.

In the following step S14, the print block is laid out. The coordinates (local coordinates) of the print block on the setting surface R4 are stored in the condition setting storage unit 102 or the like.

In general, each work W to be sequentially processed when the manufacturing line is operated is displaced in the X direction and the Y direction (XY direction). The laser processing apparatus L according to the present embodiment can correct such positional deviation by using various methods. Therefore, in step S15, condition setting for correcting the positional deviation in the XY directions is performed.

As a method for correcting the positional deviation in the XY directions, for example, pattern search can be used. In this case, in this step S15, the model image for pattern search is determined as the condition (search condition) related to the pattern search.

Further, in general, each work W to be sequentially processed when the manufacturing line is operated is displaced in the Z direction. Such a positional shift is not desirable because it causes a shift in the focal position of the near infrared laser light. Since the laser processing apparatus L according to this embodiment includes the distance measuring unit 5, it is possible to detect the positional deviation in the Z direction based on the distance to the surface of the work W. This makes it possible to correct the positional deviation in the Z direction, and consequently the focal position. Therefore, in step S16, condition setting for correcting the positional deviation in the Z direction is performed.

Specifically, in this step S16, the condition (distance measuring condition) related to the distance measuring unit 5 is determined. The setting unit 107 according to this embodiment sets the distance measurement condition as a distance measurement condition in at least the partial region where the print pattern is to be formed in the processing region R1 (the partial region corresponding to the print block including the print pattern). Determine the point. This distance measuring point indicates a coordinate at which the distance from the laser processing apparatus L is measured.

The partial region referred to here may be the entire surface of the work W, a part of the surface of the work W, or may be offset from the surface of the work W. The partial area may be at least an area associated with the print pattern to be formed.

In the subsequent step S17, the marker controller 100 completes the creation of the print settings.

(Execution of print processing)
FIG. 12 illustrates a specific process in step S3 of FIG. That is, the process shown in FIG. 12 is sequentially executed for each work W that flows when the manufacturing line is operated.

First, in step S31, the marker controller 100 reads print settings indicating details of print blocks and the like. Then, in step S32, the narrow area camera 37 and the wide area camera 6 built in the laser processing apparatus L image the image capturing areas R2 and R3 indicating at least a part of the processing area R1, so that the image capturing area R2, A work image Pw corresponding to R3 is generated.

In the following step S33, the marker controller 100 reads the search condition set in step S15 of FIG. Subsequently, in step S34, the marker controller 100 performs a pattern search based on the search condition read in step S33, and detects the positional deviation of the work W in the XY directions.

In subsequent step S35, the marker controller 100 reads the distance measuring condition set in step S16 of FIG. Subsequently, in step S36, the distance measuring unit 103 in the marker controller 100 measures the distance to the distance measuring point set as the distance measuring condition, and based on the measurement result, the positional deviation of the workpiece W in the Z direction is detected. In the subsequent step S37, the marker controller 100 corrects the positional deviation of the work W in the XY directions. Specifically, the setting unit 107 of the marker controller 100 corrects the coordinates (local coordinates) of the print block on the setting surface R4.

In the following step S38, the marker controller 100 corrects the positional deviation of the work W in the Z direction. Specifically, the Z scanner 33 in the marker controller 100 adjusts the focus position for each print block based on the measurement result in step S36.

In the following step S39, the marker controller 100 outputs the excitation laser light to the marker head 1 and executes the printing process by using the near infrared laser light generated based on this excitation light laser light.

(Details of model image for pattern search)
The details of the model image for pattern search will be further described below.

FIG. 15 is the above-described drawing, and the work image Pw including a part of the processing region R1 of the work W is displayed on the setting surface R4.

Here, when an instruction to create a model image for pattern search is given through a mouse operation or the like, the process shown in step S101 of FIG. 14 is executed.

In step S101, the setting unit 107 sets the positional deviation allowable amount of the model image. When the manufacturing line operates, the work W'of the same kind as the work W shown in FIG. 15 sequentially flows. Although each work W has substantially the same shape as each other, the relative position with respect to the laser processing apparatus L, particularly the wide area camera 6, may be different for each work W.

The positional deviation allowance is an index indicating how much each work W can be displaced with respect to the wide area camera 6 on the XY plane, and for example, the maximum positional deviation between the works W is assumed to be about 10 mm. In that case, the positional deviation allowable amount may be set to 10 mm. The value of the allowable positional deviation amount may be manually input by the user via the setting unit 107, or the value set in the initial state may be automatically read.

If the positional deviation allowance is set to 10 mm in each of the X direction and the Y direction, the area from which the model candidate image Pm described below can be extracted is 10 mm in each direction from the processing area R1 as illustrated in FIG. The area R5 is obtained by subtracting. In the present embodiment, this area R5 is an example of the “search area R5”. The search area R5 is set to be associated with at least the print block B.

As the positional deviation allowable amount, in addition to the displacement amounts in the X and Y directions, a rotation angle around a rotation axis perpendicular to the XY plane may be used.

In subsequent step S102, the model candidate extracting unit 104 extracts a plurality of model candidate images Pm having different sizes. More specifically, in step S102, the model candidate extracting unit 104 cuts out at least a part of the work image Pw, and thereby a plurality of model candidate images Pm that are associated with the print block B and have different sizes on the setting surface R4. To extract.

As illustrated in FIG. 16, the extraction of the model candidate image Pm can be executed within the search region R5 described above. More specifically, the model candidate image Pm can be extracted by gradually increasing the size of the print block B associated with the model candidate image Pm.

However, since the print block B is generally rectangular, when the size of the print block B is gradually increased, it becomes a problem which coordinate of the print block B is the center (reference point).

Therefore, the model candidate extracting unit 104 according to the present exemplary embodiment, for example, as shown in FIG. 16, sets the coordinates located at the center of the print block B as a reference point C, and enlarges or reduces the size around the coordinates. A plurality of model candidate images Pm having different sizes on the setting surface R4 can be extracted.

Instead of this, the model candidate extracting unit 104 enlarges or reduces the size around, for example, the coordinates on the outer edge of the print block B, so that the model candidate images Pm having different sizes on the setting surface R4 are different from each other. Can be extracted. In this case, the outer edge of the print block B may be selected from the four corners of the print block B as shown in the left diagram of FIG.

Instead of this, the model candidate extraction unit 104 extracts a plurality of model candidate images Pm having different sizes on the setting surface R4 by enlarging or reducing the size around the coordinates designated by the user. Can also

However, as can be seen from the comparison between the left diagram and the right diagram of FIG. 17, when the center C is set on the print block B, for example, compared with the case where the center C′ is selected outside the print block B, It is possible to suppress the error caused by the rotation of the model candidate images Pm and Pm′. Therefore, it is preferable to set the center on the print block B (in particular, the center or four corners of the print block B).

Alternatively, when a plurality of print blocks B are set on the work W, the print blocks B may be grouped as an integral block and then the coordinates common to the group may be set as the center. In subsequent step S103, the correlation value calculation unit 105 calculates the sharpness of each model candidate image Pm. Specifically, in step S103, the correlation value calculation unit 105 calculates the correlation value for each model candidate image Pm in the search region R5 in the work image Pm, and also in the search region R5 for each model candidate image Pm. Calculate the sharpness of the correlation value.

More specifically, the correlation value calculation unit 105 calculates the correlation value between each area in the search area R5 and each model candidate image Pm. As the “correlation value” here, an index used in so-called pattern search (also referred to as pattern matching) may be appropriately selected. For example, as the correlation value, ZNCC (Zero-mean Normalized Cross-Correlation) as shown in the following equation can be used.

In the above equation, A represents the brightness value of each pixel in the model candidate image Pm, and B represents the brightness value of each pixel in the area for which the correlation value is to be calculated. The symbol with a horizontal bar above A and B indicates the average value of A and B, respectively.

For example, if the area for which the correlation value is to be calculated includes an image that matches the feature portion included in the model candidate image Pm, the correlation value will be higher than if the image is not included. .. In particular, if the area for which the correlation value is calculated matches the area from which the model candidate image Pm is extracted, the correlation value will be approximately 100%.

On the other hand, if the region for which the correlation value is to be calculated does not include any image that matches the feature portion included in the model candidate image Pm, the correlation value is 0%. The “characteristic portion” here refers to a portion that characterizes the shape of the work W, such as unevenness and contour of the work W.

Then, in step S103, the correlation value calculation unit 105 calculates the sharpness of the correlation value by calculating the correlation value for each region in the search region R5. The sharpness is a degree that characterizes the increase/decrease width of the correlation value in the search region R5, and can be determined based on the slope of the correlation value, for example. This sharpness can be acquired by calculating the correlation value with the regions shown in the confirmation positions 1, 2, 3, and 4 defined in the search region R5, as shown in FIG. 19, for example.

The sharpness of the correlation value tends to be larger when the size of the model candidate image Pm is large than when it is small. That is, for example, when the size of the model candidate image Pm is small as shown in the left diagram of FIG. 18, the model candidate image Pm does not include many feature parts. The model candidate image Pm has a constant correlation value of approximately 100% except for the region including the outer edge of the work W.

On the other hand, for example, as shown in the central diagram and the right diagram of FIG. 18, when the size of the model candidate image Pm is large, the model candidate image Pm includes more feature parts such as the unevenness and the contour of the work W. Will be done. Therefore, in this case, the correlation value relatively fluctuates, and the sharpness also increases.

In order to perform the pattern search with high accuracy, it is recommended to use the model candidate image Pm having a higher sharpness. For example, if the model candidate image Pm shown in the right diagram of FIG. 18 is used and a region showing a tendency such that the correlation value has a maximum value can be searched for, the pattern search can be performed accurately. ..

However, if the size of the model candidate image Pm is excessively increased, it may not be possible to sufficiently cope with the positional deviation of the work W when the manufacturing line is operated. Therefore, the model image registration unit 106 according to the present embodiment performs processing that also considers the positional deviation of the workpiece W while considering the sharpness of the correlation value.

Specifically, the model image registration unit 106 according to the present embodiment, based on the sharpness, selects the model image Px from the plurality of model candidate images Pm within a range in which the positional deviation of the work W with respect to the wide area camera 6 is allowed. And the relative positional relationship between the model image Px and the print block B corresponding to the model image Px are stored together.

As a specific determination method, the model image registration unit 106 selects, as the model image Px, the model candidate image Pm having the highest sharpness within the range in which the positional deviation is allowed, among the plurality of model candidate images Pm. A priority mode and a position shift priority mode for selecting, as a model image Px, a model candidate image Pm having the smallest size on the setting surface R4 within a range in which the sharpness is a predetermined value or more among a plurality of model candidate images Pm, Is configured to be selectable.

For example, in the flowchart shown in FIG. 14, in step S104 following step S103, the model image registration unit 106 determines whether or not the correlation value priority mode is selected. If the determination is YES, the process proceeds to step S105, and the model image Px is selected based on the correlation value priority mode. Specifically, in step S105, the model image registration unit 106 selects the model candidate image Pm having the largest size from the plurality of model candidate images Pm and registers it as the model image Px. As a result, the model image Px having the highest sharpness can be used, and the pattern search can be performed accurately.

On the other hand, if the determination in step S104 is no, the process proceeds to step S106, and the model image Px is selected based on the position shift priority mode. Specifically, in step S106, the model image registration unit 106 selects the model candidate image Pm having the smallest size from the plurality of model candidate images Pm, and registers this as the model image Px. As a result, it becomes possible to use the model image Px that allows the positional deviation of the work W to the maximum.

In step S107 following step S105 or step S106, the model image registration unit 106 determines the relative positional relationship between the model image Px registered in step S105 or step S106 and the print block B corresponding to the model image Px. Store it together.

Note that, in step S105 to step S107 of FIG. 14, the model image registration unit 106 is configured to automatically select the optimum model candidate image Pm and register it as the model image Px. Is not limited to this. For example, a plurality of model candidate images Pm may be displayed on the display unit 801, and the user may be allowed to select a desired image from those images. Alternatively, it may be semi-automated instead of being completely manual. That is, after the model image registration unit 106 selects a part of the plurality of model candidate images Pm to display it on the display unit 801, the user is allowed to select a desired image from those images. May be.

21A and 21B are examples of display screens on the display unit 801. The screens shown in FIGS. 21A and 21B are adapted to be displayed on the display unit 801 when the model image is registered.

For example, in the screen shown in FIG. 21A, by operating the button B1, one of the “standard” mode and the above-mentioned “correlation value priority mode” or “positional deviation priority mode” is selected as the search setting. You can choose. The standard mode is a mode in which the sharpness is not set higher than that in the correlation value priority mode, and the model image Px is not set smaller in the position shift priority mode.

By operating the button B2, the angle range in the pattern search can be set. By increasing the value of the angle range, a wider range can be searched, but the amount of calculation also increases. In addition, the lower limit of the correlation value can be set by operating the button B3. The lower limit is a threshold value for determining that a region matching the model image Px is found when the pattern search is performed on the predetermined work W.

Then, by operating the button B4, it is possible to set the positional deviation allowable amount. In this example, as described above, it is set to 10 mm in both the X direction and the Y direction. By setting in this way, a search region R5 as illustrated in FIG. 22 can be obtained.

Further, as shown in the screen of FIG. 21B, a “automatic” mode for automatically setting the search region R5 and the model image Px and a “manual” mode for manually setting the search region R5 and the model image Px are selected. can do. When the latter mode is selected, the user can specify the search region R5 and the model image Px.

(Specific example of pattern search)
The following description shows a specific example of the pattern search, and exemplifies the process corresponding to step S15 in FIG. 11 and step S37 in FIG.

First, as shown in FIG. 20A, prior to the operation of the laser processing system S, the work W to be flown along the manufacturing line is imaged by the wide area camera 6, and the model image Px is determined based on the work image Pw. To do.

Then, when the operation of the laser processing system S is started, a work W′ of the same type as the work W used for determining the model image Px comes to flow. Here, in order to process the print pattern P at the same place as the first work W, the relative positional relationship between the print pattern P and the work W′ is the same as the relative positional relationship regarding the first work W. Hope to be the same.

On the other hand, in the print block B corresponding to the print pattern P, although the local coordinates on the setting surface R4 are determined, the latter work W'is displaced relative to the first work W (specifically, the wide area camera). Positioning based on the local coordinates is not sufficient because there is a possibility that the work W′ may be displaced with respect to No. 6 (see FIG. 20B).

Therefore, as shown in FIG. 20C, the position correction unit 108 newly captures the work image Pw′ by the wide area camera 6, and also corresponds to the new work image Pw′, the model image Pm, and the model image Pm. The position of the print block B to be set in the new work image Pw′ is corrected based on the relative positional relationship. That is, the position correction unit 108 uses the model image Pm to perform a pattern search on the new work image Pw'. Thereby, the local coordinates of the print block B can be corrected.

As described above, when the size of the model image Px is large, the sharpness of the correlation value is higher than when it is small. Further, when the sharpness of the correlation value is high, the accuracy of the pattern search can be improved as compared with the case where the correlation value is low.

Therefore, in order to improve the accuracy of the pattern search, it is required to increase the size of the model image Px. However, if the size of the model image Px is excessively increased, for example, when the manufacturing line is operated. When the work W, which is largely deviated from the optical axis of the wide area camera 6, is carried, the pattern search may be hindered.

Therefore, as illustrated in FIG. 16, the model image registration unit 106 determines the model image Px based on the sharpness in the search region R5 in which the positional deviation of the work W with respect to the optical axis of the wide area camera 6 is allowed. .. With such a configuration, it is possible to accurately perform the pattern search and allow the workpiece to be displaced with respect to the wide area camera 6.

<<Other Embodiments>>
In the embodiment, the case where one work W is displayed on the setting surface R4 has been described as an example, but the present invention is not limited to this case. The present disclosure can be applied even when a plurality of works W are displayed on the setting surface R4. In that case, the inclination may be corrected one by one for each of the plurality of works W.

Further, although the case where the wide area camera 6 is used as the imaging unit has been described in the above-described embodiment, the technique disclosed herein is not limited to the case where the wide area camera 6 is used, and it is not limited to the narrow area camera 37. It can also be applied to an imaging unit capable of two-dimensional scanning.

1 Marker Head 10 Housing 2 Laser Light Output Unit 3 Laser Light Guide Unit 4 Laser Light Scanning Unit 100 Marker Controller 101 Control Unit (Scanning Control Unit)
104 model candidate extraction unit 105 correlation value calculation unit 106 model image registration unit 107 setting unit 110 excitation light generation unit 800 operation terminal 801 display unit B printing block (processing block)
C reference point (center)
P print pattern (print pattern)
Pm Model candidate image Px Model image Pw Work image Pw' New work image R1 Processing area R4 Setting surface R5 Search area L Laser processing device S Laser processing system W Work (workpiece)
W'new work (workpiece of the same kind)

Claims (5)

A pumping light generator that generates pumping light;
While generating laser light based on the excitation light generated by the excitation light generation unit, a laser light output unit that emits the laser light,
A laser beam scanning unit for irradiating a laser beam emitted from the laser beam output unit to a workpiece and performing two-dimensional scanning within a processing region set on the surface of the workpiece;
A laser processing apparatus for forming a predetermined processing pattern in the processing region by controlling the laser light scanning unit,
An imaging unit that generates a work image including at least a part of the processing region by imaging the workpiece,
A display unit that displays the work image on a setting surface corresponding to the processing area,
A processing block setting unit that sets a processing block including the processing pattern so as to be superimposed on the work image,
By cutting out at least a part of the work image, a model candidate extraction unit that extracts a plurality of model candidate images that are associated with the processing block and have different sizes on the setting surface,
For each of the plurality of model candidate images, a correlation value calculation for calculating a correlation value for each model candidate image in a predetermined search region in the work image and calculating a sharpness of the correlation value in the search region Department,
Within a range in which positional deviation of the workpiece with respect to the imaging unit is allowed, a model image is determined and stored from the plurality of model candidate images based on the sharpness, and the model image and A model image registration unit that also stores a relative positional relationship with the processing block corresponding to the model image,
For the workpiece of the same type as the workpiece used to determine the model image, a new work image is captured by the imaging unit, and the new workpiece image, the model image, and the model image A laser processing apparatus comprising: a position correction unit that corrects the position of the processing block to be set in the new work image based on the corresponding relative positional relationship. The laser processing apparatus according to claim 1,
A laser processing apparatus, wherein the model image registration unit selects, as the model image, a model candidate image having the highest sharpness within a range in which the positional deviation is allowed, of the plurality of model candidate images. .. The laser processing apparatus according to claim 1,
Among the plurality of model candidate images, the model image registration unit selects, as the model image, a model candidate image having the smallest size on the setting surface within the range where the sharpness is a predetermined value or more. And laser processing equipment. The laser processing apparatus according to claim 1,
The model image registration unit,
Of the plurality of model candidate images, the correlation value priority mode for selecting the model candidate image with the highest sharpness as the model image within the range in which the positional deviation is allowed,
Among the plurality of model candidate images, the sharpness is within a predetermined range or more, and a position shift priority mode for selecting the model candidate image having the smallest size on the setting surface as the model image can be selected. A laser processing device characterized by being configured. The laser processing apparatus according to any one of claims 1 to 4,
The model candidate extracting unit expands or reduces the size around the coordinates located at the center of the machining block or the coordinates on the outer edge of the machining block, thereby making a plurality of sizes different from each other on the setting surface. A laser processing apparatus, which extracts a model candidate image of.