TWI327639B - - Google Patents

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Publication number
TWI327639B
TWI327639B TW96119269A TW96119269A TWI327639B TW I327639 B TWI327639 B TW I327639B TW 96119269 A TW96119269 A TW 96119269A TW 96119269 A TW96119269 A TW 96119269A TW I327639 B TWI327639 B TW I327639B
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TW
Taiwan
Prior art keywords
point
line
center
image
light
Prior art date
Application number
TW96119269A
Other languages
Chinese (zh)
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TW200745506A (en
Inventor
Sun Ping
Saito Takayuki
Original Assignee
Fujinon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2006157198A priority Critical patent/JP4774332B2/en
Application filed by Fujinon Corp filed Critical Fujinon Corp
Publication of TW200745506A publication Critical patent/TW200745506A/en
Application granted granted Critical
Publication of TWI327639B publication Critical patent/TWI327639B/zh

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0242Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0257Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested
    • G01M11/0264Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested by using targets or reference patterns
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0221Testing optical properties by determining the optical axis or position of lenses

Description

1327639 113 is formed by the ccd camera 121 of the imaging surface from which the light of the lens to be inspected is observed. When the eccentricity measurement device is used to measure the eccentricity, the light from the light source}丄〇5 after passing through the index plate 112 is irradiated to the inspection lens 110 by the measurement optical system 131'. At this time, the objective lens is moved. The light of the lens 115 converges at the position p, and the light converging position P coincides with the center of curvature of the examined surface (upper surface) of the lens 110 to be inspected. The light incident on the surface to be inspected of the inspection lens 11A can be regarded as equivalent to the light emitted from the center of curvature of the surface to be inspected, and therefore reflected from the surface to be inspected in opposition to the path of the reflection. This reflection is incident on the CCD camera 12 through the beam splitter 113, and when the base image is rotated while the base 122 is rotated, the reflected image from the detected lens 110 is observed, and when there is eccentricity, the image of the pinhole is observed. The trajectory is drawn as a circle, and the eccentricity of the lens 1 to be inspected can be calculated by measuring the radius of the circle. Here, the lower inspection surface (installation surface) in the opposite direction to the upper inspection surface of the inspection lens is supported on the base. Since the lower inspection surface is also a spherical surface, even if the inspection lens 110 is substantially displaced on the base 122, the position of the center of curvature of the lower inspection surface is not changed enough. Therefore, in such an eccentricity measuring device, the obtained eccentricity measurement value 20 is used as the final eccentric amount with respect to the surface to be inspected. [Japanese Patent Laid-Open No. 1] No. 2005_55202. However, in order to calculate the eccentric amount of the lens 110 to be inspected by the above method, it is necessary to specify the radius of the circle formed by the trajectory of the image of the pinhole, but since the image of the pinhole has a certain area, it is difficult to specify the correct 6 1327639 The reflected or transmitted light of the examined surface is imaged on the imaging surface. Calculating a light intensity distribution on two second lines extending substantially in the same direction with respect to an image of a substantially cross shape imaged on the image plane, and taking the maximum intensity position on each line of the first line as point A and Point B, 5 calculates the light intensity distribution on the two second lines that intersect the first line of the two and extend in substantially the same direction, and the maximum intensity position on each line of the second line As point C and point D. Next, a straight line connecting the point A and the point B is taken as a third line, and a straight line connecting the point C and the point D is taken as a fourth line, and the third line and the said line are The intersection of the fourth line is designated, and the center point R of the index line image is determined based on the intersection. Thereafter, each time the optical element to be inspected is rotated about the axis by the rotation of the base, the center point R of the index line image in the rotational position is determined, Next, a center point tracking circle is specified based on the determined 15 plurality of center points R, a diameter of the center point trajectory circle is calculated, and an eccentric amount of the detected surface is entered based on the determined diameter. A staring operation. In addition, although the center point R of the index line image may be the position of the intersection point, it is more preferable that the center point R of the index line image is centered by 20 pairs of positions of the intersection point The light intensity of each pixel in the predetermined area is subjected to weighted averaging processing to specify the position of the center of gravity. In addition, the so-called "great cross shape" does not mean that the two lines are vertical, but the intersection angle of the two lines is 9 〇. Other angles, such as 3 1J2/639 is 45. Such an X shape. In addition, the two lines of the intersection are not equal in thickness. In the eccentricity measuring method according to the present invention, the measuring optical system inserts a substantially cross-shaped index line, and the substantially cross-shaped indexing 5-line image is imaged on the imaging surface, and then, the indexing By performing the geometric processing described above and specifying the center point R of the index line image, it is possible to specify the center position of the index line image with extremely simple and high precision, and to perform simple and high-precision Eccentricity measurement. In addition, the center position of the 1st geometry of the index line image obtained by the above-described geometric processing is used as the center position of the index line image as it is, but each of the predetermined areas centering on the geometric center position is used. The pixel performs the light intensity weighted averaging process to obtain the center of gravity position, and the center of gravity position is used as the center position of the index line image, whereby the measurement accuracy can be further improved. [Embodiment] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. First, a schematic configuration of a reflection type eccentricity measuring device for carrying out the eccentricity measuring method according to the embodiment of the present invention will be described with reference to Fig. 2 . The eccentricity measuring device 1 is a device for measuring the amount of eccentricity of the lens 10 to be inspected, and includes a light source 11 that irradiates light onto a reticule plate 12 that becomes an upper surface 10A and a lower surface 10B of the surface to be inspected. By transmitting the light beam from the light source u and including the cross-shaped slit, and the measuring optical system 9 1327639 by rotating the rotating circular plate 52, the detected lens is rotated, and the detected image can be accurately detected. The position of the lens 1〇 is determined. Further, when the test lens 1 is placed by one of the methods, it is preferable to adjust the position such that the rotation axis of the lens 10 to be inspected coincides with the light axis 5 of the lens 1 to be inspected. Here, the definition of the eccentric amount Ec is performed using FIG. In other words, if both surfaces of the lens 1 to be inspected (the upper surface 1 is the surface to be inspected and the lower surface 10B is the installation surface), the center of curvature C1 of the upper surface 10A is located on the upper surface 1 On the optical axis of 〇A, the center of curvature C:2 of the lower surface i〇b 10 is located on the optical axis of the lower surface i〇B. A straight line connecting the two centers of curvature q, <:2 is the optical axis z of the lens 10 to be inspected, and if the axis of rotation W of the lens 1〇 to be inspected coincides with the optical axis of the lower surface i〇B, the lens to be inspected is When the optical axis z of the 1〇 and the optical axis of the lower surface 10B are kept at an angle and intersect, the length of the vertical line from the curvature center Ci of the upper surface 10A to the optical axis 15 of the lower surface 10B is defined as the eccentric amount Ec. . In the case where the rotation axis W of the lens 10 to be inspected does not coincide with the optical axis of the lower surface i〇B, the length from the center of curvature C1 of the upper surface i〇a to the axis of rotation of the axis of rotation of the lens 1被 to be inspected 'Defined as the eccentricity Ec. However, when the image of the index of the reflected light 20 from the upper surface 10A or the lower surface 10B on the imaging surface is formed into a circular shape, it is difficult to specify the center of the image of the index, which is difficult to find the accuracy of the measurement of the eccentricity. Come up. Therefore, in the present embodiment, as described above, the cross-shaped line of the indexing plate 12 is formed by the slit of the cross shape, so that the cross-shaped plate as shown by the indexing plate 11 1327639 (B) imaged on the image forming surface The image also becomes the image of Figure 5 (A) 'Fig. It is easy to specify the designation of the heart of the 7G (four). The following image analysis processing is performed on the image taken by the CCD camera 21 (including the image of the crosshair: the image of the second line 7 〇), and the designation of the geometric center from the sickle line image 70 is performed. . In addition, in the present embodiment, 'the weighted average processing of the pixels is performed in the n-pixel milk pixel region centered on the center position of the (4) geometry after calculating the geometric center position of the index line image 7G. The position of the center of gravity obtained is the position of the center of gravity of the image as the above-described plate, whereby the measurement accuracy can be improved. Hereinafter, the embodiment will be specifically described using the flowchart of Fig. 1. t First, as the initial setting, the size of the region where the light intensity weighted average processing is performed is set in the step u (su) to be described later (S1). Since the area is the size of the xn pixel of the Π pixel, the length of one side of the square area is set in this step 1 (si). The numerical value of η can be appropriately selected by the user'. However, the number of the above-described η is at least such that the outline of the cross shape is sharp (the focus is the same). Further, in the case where the center point of the image is taken as the geometric center of the cross-shaped line image 70 of the cross shape (in the case where the light intensity weighted averaging processing is not performed), the step 1 (S1) becomes unnecessary. Next, the number of measurements N (S2) is set as the initial setting. In other words, the center position of the cross-shaped line image 70 of the cross shape is measured for the degree of the rotation operation for rotating each of the inspected lenses 10 at a predetermined angle, and the number N of the measurement is set. The number of n can be appropriately selected by the user, and specifically, it is at least 2 or more, preferably 3 or more, but may be several tens of degrees depending on the level of measurement accuracy. Further, in the steps of performing the above-described initial setting steps (SI) and (S2), the light amount adjustment of the light source 11 and the focus adjustment of the cross-shaped index line image 70 are performed. Then, the detected lens 10 is set to a predetermined rotation angle position by rotationally driving the detected lens rotation driving mechanism 23 (S3). Then, as shown in Fig. 5(A), the two horizontal lines PI and P2 extending in the horizontal direction in the drawing are set so that the image vertical line 70A of the cross-shaped index line image 70 intersects (S4). Next, as shown in the Fig. 5 (B), the two vertical lines Q1 and Q2 extending in the longitudinal direction in the drawing are set such that the vertical line 70B of the cross-shaped index line image 70 intersects (S5). Thereafter, the peak positions of the light intensities on the two horizontal lines P1 and P2 are designated, and as shown in Fig. 5(A), the designated points are referred to as eight points and B points (S6). Next, the peak position of the light intensity on the two vertical lines QhQ2 is specified, and as shown in Fig. 5(B), the designated point is taken as point c and point D (S7). Next, the cross vertical line (line 80A in Fig. 6) is determined by connecting the points A and B specified in step 6 (S6) (S8). The point and the point D are determined. Next, the connection step 7 (S7) The c crosshair specified in the line (line 80B in Fig. 6) (S9). 1327639 In addition, Fig. 6 is a diagram showing the figure of Fig. 5 and the width R. The center area of () (8) is enlarged and the second is: =8 (S8) The cross vertical line 8〇A and the step (sl〇. (4) Cross-crossing line 35(4)(4) Μ The intersection point 8〇c obtained by the step Μ(3)CO t can also be used as the tenth The shape of the index line is determined as 7G. In the present embodiment, the light intensity weighted averaging processing as follows may be performed to improve the accuracy, and the cross-shaped index line image 7 is calculated. = the position of the center of gravity of the light intensity, and this is specified as the center point R of the cross shape. Also = set the intersection area 80C obtained by the step 1〇(S1〇) = the square area 9G of the n pixel xn pixels of the heart, and consider The light intensity of each pixel in the 15 20, and the position of the center of gravity of the intensity in the square area % is specified as a cross The index line of the shape is like the middle = Chuan (1) of 70. That is to say, for example, the light intensity in the square area 9〇 is multiplied, and the position of the center of gravity is calculated by the addition of the respective products. The position of the center point of the 7G. Next, select 'to reduce the measurement time set in the initial setting of step 2 (S2) by 1 (S12)' and judge whether the number of measurements N is 〇 (offence). If it is 0 (N〇), the process returns to step 3 (S3), and the process of "~ is repeated. On the other hand, if M 〇 (YES), the process proceeds to the next step 14 (S14). 14 λ!, step 14 In (SM), based on each center point R, a well-known roundness is used: an approximation method such as multiplication is performed as shown in Fig. 7 after the operation image center is executed, and is obtained in step 丨4 (S14). The half-turn of the center-performing circle % is taken as the eccentric amount Ec of the upper surface 10A (S15). Thus, in the present embodiment, the cross-sectional line image 7G of the cross shape is imaged on the image plane, and then, Geometrically processing the index line image 70, and performing light intensity weighted averaging processing, and designating the center point R of the index line image, It is possible to specify the center line position of the branching line image 70 & the position of the branching line image with a very simple and high precision, and to perform the measurement of the eccentricity in a simple and highly accurate manner. Further, in the present embodiment, the cross shape is used as the index line, so When the intersection adjustment or the like is performed at the time of initial setting, the slight adjustment of the tilt of the optical system can be easily performed based on the change in the thickness of each line constituting the cross image. 15 Further, as described above, the light source 11 is performed at the initial setting stage. It is preferable that the light amount adjustment is set such that the light amount adjustment is performed automatically. That is, according to the parameters of the lens, the amount of light condensed at the center position of the index line image 70 for each of the detected lens faces is different, and therefore it is preferable to perform feedback control in such a manner that the above steps i The light intensity in the position of the center of gravity of the light intensity obtained in (S11) is measured, and the driving power source of the light source 11 is adjusted so that the light intensity becomes a predetermined value. Further, the method of measuring the eccentric amount of the present invention is not limited to the contents of the above-described embodiments, and other various modifications are also possible. 15 Although the index line and its image shape are in the shape of a cross in the above embodiment, it is also possible to substitute the angle of the two lines to be 90. The angle 以外 outside is, for example, 45. The scale line of such a 形状 shape and its shape. In addition, as the shape, the thickness and length of the two lines which are used are different from each other. Further, in the above embodiment, in step S4, the two sides extending in the horizontal direction in Fig. 5(A) are added. The horizontal lines ρι and ρ2 are set, and in the step, the two vertical lines q 1 and Q2 extending in the longitudinal direction in Fig. 5 ( Β ) are set, but the two horizontal lines and the two vertical lines are also They may not be parallel to each other, and the horizontal and vertical lines are not necessarily vertical. Further, the surface to be inspected as the observation object may be not only the upper surface of the lens to be inspected but also the lower surface. In this case, the upper surface of the lens to be inspected is used as the installation surface. Further, in the above description, the light reflection type has been mainly described as the apparatus used in the present embodiment, and a light transmission type apparatus may be used instead. The above-described embodiments are merely examples for the convenience of the description, and the scope of the claims is intended to be limited by the scope of the claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a flow chart for explaining a method of measuring an eccentric amount according to an embodiment of the present invention. 1327639 80B cross horizontal line 95 like center track circle R center point 80C intersection point 90 square area .112 index board (pinhole plate) 122 base station P1, P2 horizontal line Q1, Q2 vertical line

Claims (1)

  1. X. Patent Application Range: 1. A method for measuring an eccentricity, comprising: providing an optical element to be inspected on a rotating base centered on a predetermined axis, and detecting a surface of the optical element to be inspected By illuminating the light from the light source by the measuring optical system including the index of the predetermined shape, the reflected light or the transmitted light from the detected surface is guided to the image forming surface, and the optical element to be inspected provided on the base is The predetermined axis is rotated centrally and observing the movement trajectory of the image of the index formed on the imaging surface by the reflected light or transmitted light, thereby measuring the eccentric amount of the detected surface; The index of the predetermined shape is an index line having a substantially cross shape; the optical element to be inspected is provided on the base; and the optical system for measurement and the light of the inspection surface along the optical system for measurement are placed The axial direction is relatively moved and adjusted to cause reflected or transmitted light from the examined surface to be imaged on the imaging surface; for a substantially cross imaged on the imaging surface The image of the shape calculates the light intensity distribution on the two first lines extending substantially in the same direction, and the maximum intensity position on each line of the first line is taken as point A and point B, and the two points are The light intensity distribution of the two second lines intersecting each other in the substantially same direction is calculated, and the maximum intensity position on each line of the second line is taken as point C and point D; A straight line of the point A and the point B is taken as a third line, and a straight line connecting the point C and the point D is taken as a fourth line; and an intersection of the third line and the fourth line is performed Designation; 1327639 '7? year $ month to repair (3⁄4 is replacing the page and determining the center point r of the index line image based on the intersection; thereafter, each time by rotating the base at a prescribed angle When the optical element to be inspected rotates around the axis, the center point R of the index line image in the rotational position thereof is determined; 5 Next, the center is specified based on the determined plurality of center points R Point track circle; calculate the diameter of the circle point of the center point; based on the obtained The method of measuring the eccentricity of the surface to be inspected according to the method of claim 1, wherein the center point R of the index line image is the 3. The method of measuring the eccentricity according to the scope of the patent application, wherein the center point R of the index line image is within a predetermined area centering on the position of the intersection point The light intensity of each pixel is weighted and processed to specify the position of the center of gravity.
TW96119269A 2006-06-06 2007-05-30 TWI327639B (en)

Priority Applications (1)

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JP2006157198A JP4774332B2 (en) 2006-06-06 2006-06-06 Eccentricity measurement method

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TWI327639B true TWI327639B (en) 2010-07-21

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KR (1) KR100923059B1 (en)
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JP5362431B2 (en) * 2008-06-10 2013-12-11 富士フイルム株式会社 Eccentricity measurement method
JP5359048B2 (en) * 2008-06-20 2013-12-04 株式会社ニコン Eccentricity measuring apparatus and eccentricity measuring method
JP5317619B2 (en) * 2008-10-06 2013-10-16 富士フイルム株式会社 Eccentricity measurement method
JP2010230578A (en) 2009-03-27 2010-10-14 Fujifilm Corp Method of measuring amount of eccentricity
JP5222796B2 (en) * 2009-06-08 2013-06-26 富士フイルム株式会社 Optical element eccentricity adjustment assembly method and eccentricity adjustment assembly apparatus
JP2010281792A (en) * 2009-06-08 2010-12-16 Fujifilm Corp Method and apparatus for measuring aspherical surface object
JP2011069797A (en) * 2009-09-28 2011-04-07 Saxa Inc Displacement measuring device and displacement measuring method
CN102879182B (en) * 2012-09-27 2014-12-24 中国科学院长春光学精密机械与物理研究所 Method for measuring off-axis aspheric surface eccentricity by laser tracker
CN104101482B (en) * 2013-04-10 2016-08-10 致茂电子(苏州)有限公司 Light emitting module detection device and light emitting module detection method
CN103940377B (en) * 2014-03-26 2017-01-04 中国科学院长春光学精密机械与物理研究所 Optical lens centre of sphere deviation measurement device
KR101538129B1 (en) * 2014-10-24 2015-07-23 한국표준과학연구원 Standard lens for eye refractometer
CN104406547B (en) * 2014-12-09 2017-11-07 上海新跃仪表厂 The eccentric measuring device and its measuring method of a kind of optical element
CN108139205B (en) 2015-10-23 2020-01-03 卡驰诺光电系统股份有限公司 Optical element characteristic measuring device
CN107339955A (en) * 2017-01-07 2017-11-10 深圳市灿锐科技有限公司 A kind of inclined detecting instrument in high-precision lenses center and its measuring method
CN107843213A (en) * 2017-10-23 2018-03-27 北京理工大学 Confocal auto-collimation center partially and curvature radius measurement method and device

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JP2007327771A (en) 2007-12-20
CN100567888C (en) 2009-12-09
TW200745506A (en) 2007-12-16
JP4774332B2 (en) 2011-09-14
CN101086445A (en) 2007-12-12
KR100923059B1 (en) 2009-10-22
KR20070116721A (en) 2007-12-11

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