TW200906509A - Device for treating a band-shaped substrate with a liquid - Google Patents

Device for treating a band-shaped substrate with a liquid Download PDF

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Publication number
TW200906509A
TW200906509A TW097105788A TW97105788A TW200906509A TW 200906509 A TW200906509 A TW 200906509A TW 097105788 A TW097105788 A TW 097105788A TW 97105788 A TW97105788 A TW 97105788A TW 200906509 A TW200906509 A TW 200906509A
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Taiwan
Prior art keywords
strip
winding
pulley
pulley mechanism
shaped substrate
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Application number
TW097105788A
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Chinese (zh)
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TWI460032B (en
Inventor
Peter Jacobus Gerardus Loermans
Peter Johannes Maria Huvenaars
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Meco Equip Eng
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B21MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21CMANUFACTURE OF METAL SHEETS, WIRE, RODS, TUBES OR PROFILES, OTHERWISE THAN BY ROLLING; AUXILIARY OPERATIONS USED IN CONNECTION WITH METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL
    • B21C47/00Winding-up, coiling or winding-off metal wire, metal band or other flexible metal material characterised by features relevant to metal processing only
    • B21C47/26Special arrangements with regard to simultaneous or subsequent treatment of the material
    • B21C47/265"helicofil" systems
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/06Wires; Strips; Foils
    • C25D7/0614Strips or foils

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)

Abstract

The present invention relates to a device for treating a band-shaped substrate with a liquid, said device comprising a conveying system for conveying the band-shaped substrate, which conveying system comprises a winding system for guiding the band-shaped substrate in a spiral path around the winding system with at least one winding, which winding system comprises first pulley means being rotatable about a first axis of rotation for guiding said at least one winding of the band-shaped substrate through a first angle of deflection around part of the circumference of the first pulley means, and second pulley means for guiding said at least one winding of the band-shaped substrate through a second angle of deflection around part of the circumference of the second pulley means, which second pulley means comprises a second pulley, which is rotatable about a second axis of rotation, for each winding, said device further comprising a bath of the liquid, wherein the band-shaped substrate extends through the liquid in the bath over at least part of the length of said at least one winding. The second axis of rotation of each second pulley makes an angle with the first axis of rotation.

Description

200906509 九、發明說明 【發明所屬之技術領域】 本發明係有關一以液體處理帶形基版的裝置,該裝置 包括一用來運送帶形基版之運送系統,該運送系統包括一 捲繞系統’用來藉至少一捲繞,繞運送系統,將帶形基版 導入一螺旋路徑,該捲繞系統包括:第1帶輪機構,其可 繞一第1旋轉軸旋轉,繞第1帶輪機構之圓周的一部分, 成一第1偏轉角度導引帶形基版之該至少一捲繞繞經第! 帶輪機構之圓周的一部分;以及第2帶輪機構,用來繞第 2帶輪機構之圓周的一部分,成一第2偏轉角度,導引帶 形基版之該至少一捲繞繞經第2帶輪機構之圓周的一部分 :該第2帶輪機構包括一第2帶輪,其可對每一捲繞,繞 一第1旋轉軸旋轉;該裝置進一步包括一液槽,其中,帶 形基版延伸通過液槽中的液體達該至少一捲繞之長度的至 少一部分。 【先前技術】 德國早期公開文獻DE 20 34 751揭示一種用於電鍍 金屬線之裝置。於該裝置中,金屬線繞一驅動滾輪及一配 置於該驅動滾輪下方之下滾輪,被導入導入一螺旋路徑。 驅動滾輪設有一用於每一捲繞之周槽,而下滾輪則包括一 用於每一捲繞之可獨立旋轉導輪,諸導輪同樣各設有一用 於一金屬線捲繞之周槽。驅動滾輪及下滾輪(並因此諸導 輪)之中心軸水平定向並相互平行。下滾輪配置於一流電 -4- 200906509 液槽中。或多或少,於DE 20 34 751中附帶提及系爭裝置 亦適用於處理帶形材料。惟,一重要缺點在於,於帶形基 版轉送至驅動滾輪與下滾輪間之螺旋形狀內的次一溝槽造 成,於帶形材料之處理期間內,較高應力可能橫向產生於 帶形材料中。該應力可能導致起皺,或者,甚至於更糟的 是,導致裂痕形成於帶形材料中,這可能對電鍍處理產生 極大負面效果。使用習知裝置之另一缺點在於,此裝置不 適合於帶形基版一側電鍍。由於在帶形基版延伸於液槽的 液體中而不接觸下滾輪下,帶形基版二側均處理,惟在帶 形基版於液槽中與下滾輪接觸下,即實質上於一側,亦即 外側處理,因此,事實上,此裝置不太適合於帶形基版兩 側電鍍。受處理內側因帶形基版與下滾輪監間的該接觸而 有損壞之虞,復由於帶形基版會因以上理由而易於位移越 過下滾輪之表面,因此,情況更糟。基於甚多理由,結果 導致沉積於帶形基版之外側及內側之諸層彼此不同。 西方電技術文摘1970年10月第20號,XP002453277 XP00 1 3 3 3 20 8之伯考斯基等人之“多通道電線處理設備” 亦揭示一種連續螺旋地捲繞於一接觸滾筒、一第1組槽輪 之槽輪及一第2組槽輪之槽輪之電線處理裝置。各組槽輪 之槽輪可同軸繞一相對於接觸滾筒之旋轉軸歪斜之共軸旋 轉。各組槽輪之槽輪具有不同直徑。 美國專利 US 2,682,3 3 5揭示一種帶處理設備,其使 用二個具有相等直徑及長度之圓筒,一帶材螺旋地繞其捲 繞。一圓筒之軸相對於另一圓筒之軸成角度位移。 -5- 200906509 【發明內容】 本發明之目的在於提供一種如於前言中所指之裝置, 藉此可使用一液體,以極小型方式,處理一帶形基版,爲 達到此目的,帶形基版於一螺旋輸送路徑中移動,且其中 發生於帶形基版的應力受到限制,俾將帶形基版發生起皺 或裂痕之風險減至最小。爲達到此目的,各第2帶輪之第 2旋轉軸與第1旋轉軸成一角度α。這導致以下極重大優 點,即帶形基版僅須繞一中立線扭轉有限程度,亦依材料 性質及帶形基版的尺寸而定,帶形基版在橫切縱向之方向 發生的拉力及壓力將低到起皺或裂痕之風險最小,或甚至 可全部排除。除此,可防止帶形基版於第1帶輪機構或第 2帶輪機構上橫向位移的傾向,此傾向會導致帶形基版之 縱緣額外負載,而這可能因以液體處理帶形基版而造成沉 積於其上之材料的損壞。 爲增加能力,較佳地,第2帶輪機構具有許多第2帶 輪。 而且,諸第2帶輪以具有相等直徑較佳。這提供以下 優點,即於捲繞系統僅包括第1帶輪機構及第2帶輪機構 ’且不包括諸如後面將說明之一較佳實施例中之第3帶輪 機構之任何額外帶輪機構情形下,第2帶輪之例如1 80度 之極精確偏轉角度可達成帶形基版對抗相關帶輪機構的極 佳控制之軸承。結果,這導致作用於帶形基版上的最小機 械負載。 -6- 200906509 基於構造簡單性的理由,較佳係與諸個別第2帶輪有 關的第2旋轉軸相互平行延伸。因此’該較佳實施例排除 與諸個別第2帶輪有關的第2旋轉軸相互成一直線的可能 性,此可能性會導致在防止帶形基版之內部(橫向)應力 方面,帶形基版材料的導引低於最佳狀況。 而且,爲提高以上優點,較佳係第1帶輪機構於該至 少一捲繞被第1帶輪機構導引處具有第1直徑D1,各第2 帶輪於一捲繞被第1帶輪所導引之相關位置具有第2直徑 D2,其中第2直徑D2大於第1直徑D1,且其中進一步較 佳的是第2直徑D2之尺寸等於被cos ( α )所分之第1 直徑D1的尺寸。 根據一極有利較佳實施例,特別是採取捲繞系統僅包 括第1帶輪機構及第2帶輪機構,且不包括諸如後面將說 明之一較佳實施例中之第3帶輪機構之任何額外帶輪機構 ’第1偏轉角度及第2偏轉角度均爲180度’因爲這可以 簡單方式達成帶形基版自第1帶輪機構接近第2帶輪機構 的方向平行於帶形基版沿第1帶輪機構之方向離開第2帶 輪機構的方向,雖則位於次一捲繞的高度。 爲可實現本發明裝置之小型構造,有利的是捲繞系統 包括第3帶輪機構,其用來繞第3帶輪機構之圓周的一部 分,成一第3偏轉角度,導引帶形基版之該至少一捲繞, 該第3帶輪機構包括一用於各捲繞,可繞一第3旋轉軸旋 轉之第3帶輪,各第3帶輪平行於一相關第2帶輪延伸, 其中進一步較佳的是第1偏轉角度與第2偏轉角度的總和 200906509 爲180度,及/或其中第2帶輪機構及第3帶輪機構均與 第1帶輪機構隔相同距離。 依本發明之用途而定,可能非常有利是液槽設於第1 帶輪機構與第2帶輪機構之間,其中基版材料直線延伸於 液槽中’且該基版材料可藉液槽中的液體多側處理。 替代地’且特別是於帶形基版僅在一側處理情況下, 有利的是’液槽沿第1偏轉角的一部分延伸於第1帶輪機 構之外側上。 精確地說,爲於一側處理帶形基板,在此方面較佳的 是’第1帶輪機構於液槽中對面朝第1帶輪機構之帶形基 版側形成一掩模,俾帶形基版藉液體,僅在遠離第1帶輪 機構的一側處理帶形基版。 帶形基版與第1帶輪機構的良好連接可以有利的方式 連接實現,即第1帶輪機構包括一用於各捲繞之接觸表面 ,此接觸表面於帶形基版之縱緣向上傾斜。確保縱緣適當 地抵接接觸表面的向上傾斜部分,因液槽之液體之液壓而 施加於帶形基版上的壓力及帶形基版中的拉伸應力有助於 此種抵接,俾可保證液密密封。 特別是爲了以液體電化學地處理帶形基版,較佳係第 1帶輪機構包括一溝槽,其具有一底部及二個連結該底部 ,用於各捲繞之直立緣,其中帶形基版抵接底部,且帶形 基版之縱緣較佳地不接觸諸直立緣。諸直立緣依次有助於 內有電化學處理發生之電場的均一化。 爲有助於該電場的均一化,較佳地,於帶形基版之縱 -8- 200906509 緣與溝槽之直立緣間有最大1 mm的間隙, 特別是若帶形基版之供應以帶形基版 之方式發生,該方式例如係帶形基版自一 之滾筒解捲實例,較佳即係第1旋轉軸具 一最大偏離10度的定向。另一重要優點 少實質上由於第1旋轉軸,且較佳地亦包 垂直定向’諸捲繞會延伸於彼此上方,且 如爲更換電解液槽中的陽極材料,容易進 或外側上的空間。 惟,替代地,若第1旋轉軸具有水平 非常有利,於此情況下,帶形基版可自上 ,俾於帶形基版進入及離開液槽之位置不 密封液槽,液槽可爲簡單構造。 特別是於第1旋轉軸具有至少實質上 ’較佳係至少一通道設在液槽之至少一壁 通過該通道,而且,較佳地,配置該通道 通過而不與其接觸。此後一態樣具有帶形 一壁上之通道通過,不會負面影響以液體 處理之優點。 較佳地,本裝置設置一滴盤於該通道 一側上。 又較佳地,設置一循環機構,與此一 入滴盤之液體經由一通道回到液槽,俾液 率地處理。 之橫向垂直定向 具有垂直旋轉軸 有一垂直定向或 在於,由於,至 含第2旋轉軸之 爲保養工作,例 出諸捲繞之內側 定向,即亦可能 方導入導出液槽 需要任何設施來 垂直定向情況下 上,帶形基版可 以容許帶形基版 基版經由液槽之 對帶形基版所作 遠離液槽內部之 滴盤組合,使進 體可盡可能有效 -9- 200906509 根據本發明之一極重要較佳實施例,配置捲繞系統, 俾以許多捲繞,繞捲繞系統,將帶形基版導入一螺旋路徑 中,其中,配置第1帶輪機構及第2帶輪機構,以導引於 許多相鄰位置隔開一間距的許多捲繞。因此,以液體對帶 形基版所作處理可以極小型方式發生,惟,發生於帶形基 版之應力最小。 角度α以在2度與30度之間較佳,其中最佳角度亦 依材料性質及帶形基版之尺寸而定。 又,爲盡可能減少拉伸應力及帶形基版中滑動的發生 ,一般而言,較佳係第1帶輪機構包括一 1帶輪機構,其 可對各捲繞,繞一第1旋轉軸旋轉,其中,個別第1旋轉 軸同軸。許多個別第1帶輪機構之使用的優點在於其等無 須正好等角速度,俾無須對當帶形基版沿帶形基版之縱向 滑過第1帶輪機構時發生之帶形基版的延長予以補償。 又,爲達成以上優點,較佳亦係運送機構包括一驅動 機構,用來可旋轉驅動一單一第1帶輪,又,較佳地,單 一第1帶輪係一最外面第1帶輪。當第1旋轉軸具有,至 少實質上具有垂直定向時,此一最外面第1帶輪由第1帶 輪機構之最下面帶輪或最上面帶輪形成。 特別是若帶形基版僅於一側以液體處理,較佳即係帶 形基版僅在捲繞系統內之一側上與形成該捲繞系統之一部 分之該帶輪機構接觸。於此情況下,以液體處理之一側位 於外側,而帶形基版則以內側抵接捲繞系統之帶輪機構。 業已以液體處理之帶形基版之外側不會因帶形基版與帶輪 -10- 200906509 機構之接觸而負載。 本發明之優點特別是應用於有關帶形基版之流電處理 。於此架構中’另一較佳實施例之特徵在於液槽爲一流電 液槽。 本發明亦有關二個上述本發明之連續裝置之組合,其 中’從平行於有關個別裝置之第1旋轉軸之方向看來,帶 形基版沿相反方向移動。以此方式,可沿一進給方向,將 帶形基版進給至組合中的第1裝置,其中該第1方向與該 第2方向相互成一直線’這使得該組合極適合倂入生產線 中。 根據本發明之另一態樣,本發明提供一種以液體處理 帶形基版的方法’包括藉一運送系統,將帶形基版運送通 過一液槽之步驟’該運送系統包括一捲繞系統,用來以至 少一捲繞’繞捲繞系統’將帶形基版導入一螺旋路徑中, 該捲繞系統包括:一第1帶輪機構,其可繞一第1旋轉軸 旋轉,用來繞第1帶輪機構之圓周的一部分,成—第1偏 轉角度導引帶形基版之至少一捲繞,以及一第2帶輪機構 ,用來繞第2帶輪機構之圓周的一部分,成—第2偏轉角 度導引帶形基版之至少一捲繞’該第2帶輪機構包括一第 2帶輪,其可對各捲繞’繞一第2旋轉軸旋轉,該裝置進 一步包括一液槽,其中帶形基版通過液槽中之液體,延伸 越過該至少一捲繞之長度的至少一部分,且其中,各第2 帶輪之第2旋轉軸與第1旋轉軸成一角度^^。使用此〜裝 置所取得優點業已解釋於以上本發明之說明中。 -11 - 200906509 爲盡可能有效率地利用可用空間,較佳係帶形基版繞 具有許多捲繞之捲繞系統,被導入一螺旋路徑中。 本發明之方法特別適合用於製造太陽能面板。習知技 術通常使用矽面板作爲基版材料。惟,替代地,亦可使用 由諸如特別是銅及不銹鋼之金屬製成,其上至少沉積一銦 、硒或鎵層的帶形基版。特別是於此架構中,較佳係帶形 基版經過流電處理,帶形基版由不銹鋼或銅製成,及/或 於液槽中銦、硒或鎵層沉積於帶形基版上。 一般而言,較佳係帶形基版以每分2米的速度通過液 槽。 現在將藉參考以下圖式所作本發明裝置之二較佳實施 例之說明,更詳細解釋本發明。 【實施方式】 圖1 a及1 b示意顯示一生產線1,其用來電解地/流電 地電鍍一可撓帶形基版2。帶形基版2在藉生產線1,以 電解液處理後,被自供應側3供至生產線1,並於排出側 4自生產線1排出。於供應側3,帶形基版2可例如自一 供應捲軸(未圖示)解捲,而帶形基版2則於排出側4捲 至一貯存捲軸(未圖示)。帶形基版2於生產線1之供應 側、排出側及中央的以9標示之部分相互成一直線。帶形 基版2定向成帶形基版2之橫向沿垂直方向於供應側3及 排出側4的位置延伸。 生產線1包括四個連續流電生產單元,其均被視爲本 -12- 200906509 發明裝置之較佳實施例。最先二個生產單元5,6係本裝置 第1型之較佳實施例’而最後二個生產單元7,8係本裝置 第2型之較佳實施例。後面將分別參考圖2,3及圖4_n, 更詳細說明第1型生產單元5,6及第2型生產單元7,8。 生產單元5包含一捲繞系統11’該系統包括一第1帶 輪機構12及一第2帶輪機構13。第1帶輪機構12包括五 個具有相同直徑D1之第1帶輪14,其等之中心軸定向成 同軸且垂直。第2帶輪機構13包括五個同樣具有相同直 徑D2之第2帶輪15。如圖3所示,諸第2帶輪μ直接 配置於彼此上方,惟各具有一與垂直線成一角度α之中心 軸16。與第2帶輪15有關之諸中心軸16相互平行延伸。 諸第2帶輪15可自由繞其等之中心軸16旋轉,爲此,第 2帶輪1 5可旋轉安裝於一固定配置之轂構件丨9,該轂構 件1 9具有一垂直中心軸。 帶形基版2依次分別越過第1帶輪機構12及第2帶 輪機構13之帶輪14,15,繞諸第1帶輪14及繞諸第2帶 輪15之偏轉角15爲180度。帶輪14及15之相對位置經 過選擇,俾偏轉角始於一第2帶輪15上之入口 21(圖lc )點之位置位於與帶形基版2離開帶輪1 4之位置相同的 垂直高度。進一步選擇角度α及直徑 D2,俾(D2 = D1/co s (α))若成上述偏轉角,位於第2帶輪15之偏 轉角端部的出口點2 2即處在和位於上方的帶輪1 4 (圖1 c 中之14,)相同之垂直高度。結果,帶形基版2只要延伸 於連續帶輪〗4,1 5間,即僅繞帶形基版之中立線成一角度 -13- 200906509 α扭轉,惟該中立線持續正好水平延伸。於本較佳實施例 中’角度α之大小爲3度。最佳角度部分取決於材料性質 及帶形基版2之尺寸。明確地說,由於第2帶輪i 5之偏 轉角爲180度,因此,儘管第2帶輪15傾斜定向,帶形 基版2仍不僅正好沿水平方向接近第2帶輪1 5,且在偏轉 1 80度之後,正好沿水平方向離開第2帶輪1 5。 如以上說明選擇尺寸及方位之重要優點在於,除了沿 帶形基版2之縱向略微承受拉力外,僅於帶輪14,15間承 受扭力。更具體而言,無力量橫向作用於帶形基版2的平 面中,該力量可能導致帶形基版2於其垂直於帶形基版2 之縱向的平面中移動越過帶輪14,15,這導致帶形基版2 的高度穩定導引,並顯著減少或者甚至於排除起皴的任何 傾向。 驅動機構2 5設在第1帶輪機構1 2下方以驅動帶形基 版2,該驅動機構僅旋轉第1帶輪機構12之最上位帶輪 14。一方面,帶輪14,15好比是被帶形基版2拉動,該帶 形基版2藉某些拉力越過個別帶輪14,15,另一方面,其 等被帶輪14,15間的有限磨擦驅動。由於帶形基版2不可 避免地拉長,因此,各種帶輪14,15不會以相同角速度移 動,俾大體上,無需帶形基版2與帶輪14,15間的滑動。 因此,此種滑動儘管達到極有限程度,卻發生於相鄰帶輪 14,15 間。 圖2顯示捲繞系統5容納於一箱型容器27中的方式 ,於該容器27之端面,分別在供應側3及排出側4設置 -14- 200906509 諸開口 28,29,使帶形基版2可通過該等開口 28,29,其中 帶形基版2於相同垂直平面,延伸於開口 28,29中,惟, 帶形基版2位於開口 29中較開口 28更高處。如熟於此技 藝人士觀看圖lb當知,此高度的不同於生產單元6中再 度完全消除。 一電解槽30設於箱型容器27之長度的半途,帶輪機 構1 2,1 3間,於該槽中,在使用時,一電解液達到帶形基 版2之最上位捲繞上側之上方的液面3 1。通道3 4,3 5及 36,37設在電解槽30之端壁32,33,此等通道於圖2中具 有較實務所期望更大的寬度。實務上,選擇通道3 4-3 7的 寬度,俾帶形基版2可正好通過通道34-37而不會與其等 接觸。 滴盤3 8,3 9分別設在壁3 2,3 3與第1帶輪機構1 2及第 2帶輪機構13間,以承接來自槽30,經由通道34-3 7而 從此槽漏出的液體。藉循環機構(未圖示)使該液體退回 至槽3 0。 鼓風機構40,4 1設在滴盤38,3中通道34及37之位置 ’亦即帶形基版2離開槽3 0以風乾帶形基版2兩側處, 俾該帶形基版2在乾燥或至少略微乾燥狀態下,與第1帶 輪14或第2帶輪15之一接觸。 熟於此技藝人士當知’使用一第1型生產單元5於一 極小型裝置中,可於槽30中,以高生產速率,電化學沉 積一層於帶形基版2之任一側。熟於此技藝人士充分熟悉 電解處理,並因此無需進一步解釋。縱使沒必要,亦請僅 -15- 200906509 注意一陽性材料可出現於槽3 0中,其溶解於液槽之液體 中,並沉澱於帶形基版2之諸側上。替代地,陽性材料亦 可溶解於槽3 0外。爲刺激陽性材料之沉澱’一負電壓經 由可例如構成帶輪14,15之一部分的接觸機構(未圖示) 施加於帶形基版2。 生產單元6大部分類似於生產單元5,其不同點在於 帶形基版2之行進路徑中的垂直變化發生於個別生產單元 5,6之相反方向中,這就是爲何於生產單元6中’僅第1 帶輪機構1 2之最下位帶輪1 4被驅動,而非如於生產單元 5實例中最下位帶輪14被驅動的理由。 圖4-11更詳細顯示第2較佳實施例之一生產單元7。 有鑑於生產單元7,8的極大類似性,幾乎無須對業已硏讀 過生產單元7之說明之熟稔人士解釋生產單元8。 生產單元7包括一捲繞系統51,該系統包括第1帶輪 機構52、第2帶輪機構53及第3帶輪機構54。第1帶輪 機構5 2在包括許多個第1帶輪5 5,其中心軸同軸且垂直 定向的意義上,相當於生產單元5之第1帶輪機構12。僅 最上位帶輪5 5可旋轉地被驅動馬達5 6驅動。 第2帶輪機構53及第3帶輪機構54依次在其分別各 包括許多個第2帶輪57及第3帶輪58,就各帶輪機構 53,54而言直接配置於彼此上方的意義上,相當於生產單 元5之第2帶輪機構13。與第2帶輪57及第3帶輪58有 關的中心軸各與垂直線成約3度的角度α ,並相互平行延 伸。第2帶輪5 7及第3帶輪5 8相對於彼此如此定位,俾 -16- 200906509 於圖1 1之視圖中,個別帶輪5 7,5 8相互成直線。帶輪 57,58進一步設有接觸機構(未圖示),用來將負電壓施 加於帶形基版2以進行電鍍處理。 帶形基版2以繞第丨帶輪55成180度的偏轉角度及 繞第2帶輪5 7和第3帶輪5 8成90度的偏轉角度輪流越 過個別帶輪機構52,53,54之帶輪55,57,58。因此,第2帶 輪5 7及第3帶輪5 8的偏轉角度相加成爲1 8 0度。 選擇帶輪5 5與5 7的相對位置,俾帶形基版2 (之中 立線)只要延伸於連續帶輪5 5,5 7之間,即正好水平延伸 ’並僅約成角度〇:,在此範圍內扭轉。由於連續帶輪5 7 及5 8相互成直線(圖丨丨),且個別偏轉角度爲9 0度,帶 形基版2向上傾斜(無任何扭力)於帶輪5 7,5 8之間,隨 後再度於帶輪5 8之90度偏轉角度端部沿正好方向離開帶 輪58。因此’事實上,帶輪57,58共同具有與有關生產單 元5之帶輪丨5相同的功能,亦即,將帶形基版2移至更 高(或者,對生產單元6,8而言,更低)高度,俾形成次 一捲繞’而不會於帶形基版2中醞釀任何橫向力量。相較 於一帶輪機構13之使用,二帶輪機構53,54之使用優點 特別是在於二帶輪機構53,54之使用需要有限的空間量。 捲繞系統5 1容納於一方形箱型容器7 1中。開口 6 1 ( 圖6),62(圖4)相互成直線設於箱型容器71之對置壁 中’以容許帶形基版2通過。一至少實質上C形液槽72 設在容器71內中央處,對第1帶輪55而言,180。偏轉角 度之一部分的外側。第i帶輪機構5 2之外側形成C形液 -17- 200906509 槽72內側上之直立壁的一部分’而c形外側上液槽72之 壁的一部分以參考號碼73標示。液槽72之圓周進一步以 諸端壁74界定’此等端壁74自第1帶輪機構52延伸並 連結外壁7 3。 於液槽72中設置一例如呈球形之陽極籃7 5,以保持 陽極材料。該陽極材料經由陽極連接器7 6陽極連接。於 使用中,液槽7 2注滿電解液至高於帶形基版2之最上面 捲繞之高度。於液槽72中,沿液槽72長度之較大部分延 伸之弧曲、水平延伸之諸屏蔽帶7 7設在距諸帶輪5 5之外 側較短距離,諸屏蔽帶7 7可通過其間之轉換處。 如於圖7、9、10中特別顯示,第丨帶輪55環周設有 諸溝槽7 9,其等之底部由一彈性、帶形遮罩體8 〇製成, 該遮罩體80沿溝槽79之全周延伸。遮罩體80例如由橡 膠製成。溝槽79之寬度略大於帶形基版2之寬度,結果 ’一具有約〇.3mm寬度之間隙出現於溝槽79之直立壁與 帶形基版2之縱緣間。遮罩體80之與帶形基版2抵接之 一側於縱緣具有一向上傾斜部8 2 (參考圖1 0 ),該部正 好在帶形基版2之寬度內開始,從而確保帶形基版2與遮 罩體80之適當抵接,結果,帶形基版2之電解處理僅發 生於帶形基版2之外側,於圖7,9,10中帶形基版2遠厚於 實際使用者。 於遠離液槽72之一側,生產單元7設有滴盤91,其 事實上於第1帶輪52下方形成一共用滴盤。該滴盤用來 從液槽72承接經由諸端面壁74之向內定向端與第1帶輪 -18- 200906509 52之外側間的間隙漏出液槽72的液體。該液體藉一循環 機構(未圖示)抽回液槽72。 諸密封板8 3設在第1帶輪5 2之外側上,二者位於圖 8,9,10所示諸段部並接近諸端面壁74,帶形基版2可正好 通過而不與其接觸。諸密封板83設有伸入溝槽79內之諸 突起84。諸密封板83之尺寸及位置定成一小間隙出現於 包含帶形基版2與包含諸密封板83之第1帶輪52間。接 近諸端面壁74之諸密封板83擬減少自液槽72漏洩,而 圖8,9,10所示諸密封板83則擬防止撥濺液體自滴盤91通 過此等密封。 熟稔人士於精硏生產單元7之以上說明後,亦瞭解生 產單元8之操作及構造。於生產單元8內,帶形基版2回 到與帶形基版2接近生產單元7之高度相同之垂直高度。 於生產單元8中,最下面第1帶輪55取代最上面第1帶 輪5 5被可旋轉驅動。 如熟於此技藝人士當知,本發明不限於上述本發明之 較佳實施例,惟,本發明之範圍首先由隨附申請專利範圍 所決定。替代地’亦可於本發明之架構內例如使用第1、 第2及可能的話第3帶輪機構,其等之相關旋轉軸水平而 非(實質上)垂直定向。第2旋轉軸(諸軸)及可能的話 第3旋轉軸(諸軸)包含一自俯視圖看來,與第1旋轉軸 所成角度’第2帶輪機構且可能的話第3帶輪機構以設在 第1帶輪機構上方較佳。雖然於較佳實施例之以上說明中 一貫地提及一捲繞系統,帶形基版被以許多捲繞,繞該捲 -19- 200906509 繞系統,導入一螺旋路徑中’惟,替代地,例如(不過, 非唯一)爲使帶形基版通過一沖洗液槽,亦極可能於本發 明之架構內使用一捲繞系統,帶形基版被僅以一捲繞,繞 該捲繞系統,導入一螺旋路徑中。 【圖式簡單說明】 圖1 a及1 b分別俯視及側視示意顯示一用來以液體處 理帶形基版的生產線,該生產線包括二個本發明之較佳實 施例; 圖lc係根據二個第1帶輪及一個第2帶輪於圖lb中 之箭頭1 c之示意、透明視圖; 圖2係第1較佳實施例之部分剖開等角視圖; 圖3係沿圖2中III-III線之誇大比例之剖視圖; 圖4係第2較佳實施例之部分剖開等角視圖; 圖5係圖4之俯視圖; 圖6係沿圖5中VI - V I線之剖視圖; 圖7顯示圖6之細節; 圖8係沿圖5中VIII-VIII線之剖視圖; 圖9顯示圖8之細節; 圖1 0顯示圖9之細節;以及 圖1 1係沿圖5中XI-XI線之剖視圖。 【主要元件符號說明】 1 :生產線 -20- 200906509 2 :帶形基版 3 :供應側 4 :排出側 5,6 :生產單元 7,8 :生產單元 1 1 :捲繞系統 12 :第1帶輪機構 1 3 :第2帶輪機構 1 4 :第1帶輪 15 :第2帶輪 1 9 :轂構件 2 1 :入口點 22 :出口點 25 :驅動機構 28,29 :開口 3 〇 :電解機構 3 1 :液面 3 2,3 3 :端壁 34,35 :通道 3 6,3 7 :通道 38,39 :滴盤 5 1 :捲繞系統 5 2 :第1帶輪機構 5 3 :第2帶輪機構 -21 200906509 5 4 :第3帶輪機構 55 :第1帶輪 5 6 :驅動馬達 57 :第2帶輪 5 8 :第3帶輪 6 1 , 6 2 :開口 7 1 :箱型容器 72 :液槽 7 3 : C形之外側 74 :端面壁 75 :陽極籃 7 7 :屏蔽帶 79 :溝槽 80 :遮罩體 8 1 :間隙 8 2 :傾斜部 8 3 :密封板 84 :突起 -22200906509 IX. INSTRUCTIONS OF THE INVENTION [Technical Field] The present invention relates to a device for processing a tape-shaped substrate in a liquid, the device comprising a transport system for transporting a belt-shaped substrate, the transport system comprising a winding system 'Used to introduce a belt-shaped substrate into a spiral path by at least one winding, around the transport system, the winding system comprising: a first pulley mechanism rotatable about a first axis of rotation, around the first pulley A portion of the circumference of the mechanism, the first deflection angle guides the at least one winding of the strip-shaped base plate by the first! a portion of the circumference of the pulley mechanism; and a second pulley mechanism for winding a portion of the circumference of the second pulley mechanism to form a second deflection angle, and guiding the at least one winding of the belt-shaped base plate to the second winding a portion of the circumference of the pulley mechanism: the second pulley mechanism includes a second pulley that is rotatable about a first axis of rotation for each winding; the device further includes a liquid tank, wherein the belt base The plate extends through the liquid in the liquid reservoir for at least a portion of the length of the at least one winding. [Prior Art] German Patent Publication No. DE 20 34 751 discloses a device for electroplating metal wires. In the apparatus, a wire is wound around a drive roller and a roller disposed below the drive roller, and is introduced into a spiral path. The drive roller is provided with a circumferential groove for each winding, and the lower roller includes an independently rotatable guide wheel for each winding, and the guide wheels are also each provided with a circumferential groove for a wire winding. . The central axes of the drive roller and the lower roller (and therefore the guide wheels) are oriented horizontally and parallel to each other. The lower roller is placed in the first-class electric -4- 200906509 tank. More or less, the accompanying device in DE 20 34 751 is also suitable for the treatment of strip-shaped materials. However, an important disadvantage is that the transfer of the strip-shaped substrate to the next groove in the spiral shape between the drive roller and the lower roller causes higher stresses to be generated laterally in the strip material during the processing of the strip material. in. This stress may cause wrinkling or, even worse, cause cracks to form in the strip material, which may have a very negative effect on the plating process. Another disadvantage of using conventional devices is that the device is not suitable for plating on one side of the strip-shaped substrate. Since the strip-shaped base plate extends in the liquid in the liquid tank without contacting the lower roller, the strip-shaped base plate is processed on both sides, but the strip-shaped base plate is in contact with the lower roller in the liquid tank, that is, substantially The side, that is, the outer side treatment, therefore, in fact, this device is not suitable for plating on both sides of the strip-shaped base plate. The treated inner side is damaged by the contact between the strip-shaped base plate and the lower roller monitor, and the situation is even worse because the belt-shaped base plate is easily displaced over the surface of the lower roller due to the above reasons. For many reasons, the results result in layers that are deposited on the outside and inside of the strip-shaped substrate being different from each other. Western Electric Technology Digest No. 20, October 1970, XP002453277 XP00 1 3 3 3 20 8 "The multi-channel wire processing equipment" of Berkowski et al. also discloses a continuous spiral winding on a contact roller, a first A wire processing device for a set of sheaves of a sheave and a sheave of a second set of sheaves. The sheaves of each set of sheaves can be coaxially rotated about a common axis with respect to the axis of rotation of the contact roller. The sheaves of each set of sheaves have different diameters. U.S. Patent No. 2,682,3, 3,5, discloses a tape processing apparatus which uses two cylinders of equal diameter and length around which a strip is helically wound. The axis of one cylinder is angularly displaced relative to the axis of the other cylinder. -5- 200906509 SUMMARY OF THE INVENTION It is an object of the present invention to provide a device as referred to in the preamble whereby a strip-shaped substrate can be processed in a very small manner using a liquid, for this purpose, a strip-shaped base The plate moves in a helical transport path, and the stresses that occur in the strip-shaped substrate are limited, minimizing the risk of wrinkling or cracking of the strip-shaped substrate. To achieve this, the second rotating shaft of each of the second pulleys is at an angle ? with the first rotating shaft. This leads to the great advantage that the strip-shaped base plate only has to be twisted around a neutral line to a limited extent, depending on the nature of the material and the size of the strip-shaped base plate, the tensile force of the strip-shaped base plate in the transverse direction and The pressure will be as low as the risk of wrinkles or cracks, or even all can be ruled out. In addition, the tendency of the belt-shaped base plate to be laterally displaced on the first pulley mechanism or the second pulley mechanism can be prevented, which tends to cause an extra load on the longitudinal edge of the belt-shaped base plate, which may be due to the liquid-treated belt shape. The base plate causes damage to the material deposited thereon. In order to increase the capacity, preferably, the second pulley mechanism has a plurality of second pulleys. Moreover, the second pulleys are preferably of equal diameter. This provides the advantage that the winding system includes only the first pulley mechanism and the second pulley mechanism' and does not include any additional pulley mechanism such as the third pulley mechanism in a preferred embodiment to be described later. In the case of the second pulley, for example, an extremely precise deflection angle of 180 degrees can achieve a bearing with an excellent control of the belt-shaped base plate against the associated pulley mechanism. As a result, this results in a minimum mechanical load acting on the strip-shaped substrate. -6- 200906509 For the reason of the structural simplicity, it is preferable that the second rotating shafts associated with the individual second pulleys extend in parallel with each other. Thus, the preferred embodiment eliminates the possibility of the second axis of rotation associated with the individual second pulleys being aligned with each other, which may result in a band-shaped base in preventing internal (lateral) stress of the strip-shaped substrate. The guidance of the plate material is lower than the best condition. Further, in order to improve the above advantages, it is preferable that the first pulley mechanism has the first diameter D1 at the position where the at least one winding is guided by the first pulley mechanism, and each of the second pulleys is wound by the first pulley. The guided position has a second diameter D2, wherein the second diameter D2 is greater than the first diameter D1, and it is further preferred that the size of the second diameter D2 is equal to the first diameter D1 divided by cos(α) size. According to a preferred embodiment of the invention, in particular the winding system comprises only the first pulley mechanism and the second pulley mechanism, and does not comprise a third pulley mechanism, such as in a preferred embodiment, which will be described later. Any additional pulley mechanism 'the first deflection angle and the second deflection angle are both 180 degrees' because this can be achieved in a simple manner. The direction of the strip-shaped base plate from the first pulley mechanism close to the second pulley mechanism is parallel to the strip-shaped base plate. The direction away from the second pulley mechanism in the direction of the first pulley mechanism is located at the height of the next winding. In order to achieve a compact construction of the apparatus of the present invention, it is advantageous for the winding system to include a third pulley mechanism for guiding a portion of the circumference of the third pulley mechanism to a third deflection angle for guiding the belt-shaped base plate The at least one winding, the third pulley mechanism includes a third pulley for each winding and rotatable about a third rotating shaft, each of the third pulleys extending parallel to an associated second pulley, wherein More preferably, the sum of the first deflection angle and the second deflection angle is 180,906,509, and/or the second pulley mechanism and the third pulley mechanism are both at the same distance from the first pulley mechanism. Depending on the application of the invention, it may be highly advantageous that the liquid bath is disposed between the first pulley mechanism and the second pulley mechanism, wherein the base material extends linearly in the liquid tank and the base material can be used in the tank The liquid is processed in multiple sides. Alternatively, and particularly where the strip-shaped substrate is only treated on one side, it is advantageous that the liquid bath extends over a portion of the first deflection angle on the outer side of the first belt mechanism. To be precise, in order to process the strip substrate on one side, it is preferable in this respect that the first pulley mechanism forms a mask in the liquid tank opposite to the strip-shaped plate side of the first pulley mechanism, and the tape is formed. The base plate borrows the liquid and processes the strip-shaped base plate only on the side away from the first pulley mechanism. A good connection of the strip-shaped base plate to the first pulley mechanism can be achieved in an advantageous manner, ie the first pulley mechanism comprises a contact surface for each winding, the contact surface being inclined upwards on the longitudinal edge of the strip-shaped base plate . It is ensured that the longitudinal edge appropriately abuts the upwardly inclined portion of the contact surface, and the pressure applied to the belt-shaped base plate due to the hydraulic pressure of the liquid of the liquid tank and the tensile stress in the belt-shaped base plate contribute to such abutment, Liquid tight seal is guaranteed. In particular, in order to electrochemically treat the strip-shaped substrate with a liquid, preferably the first pulley mechanism comprises a groove having a bottom and two connecting the bottom for the upright edge of each winding, wherein the strip shape The base plate abuts the bottom and the longitudinal edges of the strip-shaped base preferably do not contact the upstanding edges. The erect edges in turn contribute to the homogenization of the electric field within which electrochemical treatment takes place. In order to contribute to the homogenization of the electric field, it is preferable to have a gap of at most 1 mm between the edge of the longitudinal base of the strip-shaped base plate and the vertical edge of the groove, especially if the supply of the strip-shaped base plate is A strip-shaped substrate occurs in the form of, for example, a strip-shaped substrate from a roll unwinding example, preferably with the first rotating shaft having an orientation that is maximally offset by 10 degrees. Another important advantage is that the windings will extend over each other substantially due to the first axis of rotation, and preferably also the vertical orientation, and the space on the outside or on the outside, as in the replacement of the anode material in the electrolyte bath. . However, if the first rotating shaft has a horizontal level, it is very advantageous. In this case, the strip-shaped base plate can be sealed from the upper side, and the liquid-shaped groove can be sealed from the position where the strip-shaped base plate enters and leaves the liquid tank. Simple construction. In particular, the first rotating shaft has at least substantially 'better than at least one channel disposed in the liquid channel through the passage, and preferably, the passage is configured to pass without being in contact therewith. The latter aspect has a passage through the wall of the strip, which does not adversely affect the advantages of liquid treatment. Preferably, the device is provided with a drop of disc on one side of the channel. Further preferably, a circulation mechanism is provided, and the liquid entering the drip tray is returned to the liquid tank via a passage, and is treated at a liquid level. The transverse vertical orientation has a vertical orientation of the vertical axis of rotation or, because, for maintenance work with the second axis of rotation, such as the inner orientation of the windings, that is, it is also possible to introduce the outlet tank to any facility for vertical orientation. In this case, the strip-shaped base plate can allow the strip-shaped base plate to make the drip tray combination away from the inside of the liquid tank through the liquid tank to the strip-shaped base plate, so that the incoming body can be as effective as possible. -9-200906509 According to the present invention In a very preferred embodiment, the winding system is configured to introduce a belt-shaped substrate into a spiral path by a plurality of windings, around the winding system, wherein the first pulley mechanism and the second pulley mechanism are disposed, A plurality of windings are provided that are spaced apart by a distance from a plurality of adjacent locations. Therefore, the treatment of the strip-shaped substrate with a liquid can occur in a very small manner, but the stress occurring in the strip-shaped substrate is minimal. The angle α is preferably between 2 and 30 degrees, wherein the optimum angle is also dependent on the nature of the material and the size of the strip-shaped base. Further, in order to minimize the tensile stress and the occurrence of sliding in the belt-shaped base plate, in general, it is preferable that the first pulley mechanism includes a one pulley mechanism that can rotate around each of the first windings. The shaft rotates, wherein the individual first rotating shafts are coaxial. The advantage of the use of many individual first pulley mechanisms is that they do not have to be exactly angular velocity, and there is no need to extend the strip-shaped base plate that occurs when the strip-shaped substrate slides across the first pulley mechanism in the longitudinal direction of the strip-shaped substrate. To be compensated. Further, in order to achieve the above advantages, preferably, the transport mechanism includes a drive mechanism for rotatably driving a single first pulley, and preferably, the single first pulley is an outermost first pulley. When the first rotating shaft has at least substantially vertical orientation, the outermost first pulley is formed by the lowermost pulley or the uppermost pulley of the first pulley mechanism. In particular, if the belt-shaped base plate is treated with liquid only on one side, it is preferred that the belt-shaped base plate is in contact with the pulley mechanism forming part of the winding system only on one side of the winding system. In this case, one side of the liquid treatment is located on the outer side, and the belt-shaped base plate abuts the pulley mechanism of the winding system on the inner side. The outer side of the strip-shaped substrate that has been treated with liquid will not be loaded by the contact of the strip-shaped substrate with the pulley -10-200906509 mechanism. The advantages of the invention are particularly applicable to galvanic treatment of strip-shaped substrates. Another preferred embodiment in this architecture is characterized in that the liquid bath is a first-class electro-hydraulic tank. The invention is also directed to a combination of two of the above-described continuous devices of the present invention wherein the strip-shaped substrate moves in the opposite direction as viewed in a direction parallel to the first axis of rotation of the individual device. In this way, the strip-shaped substrate can be fed to the first device in the combination in a feeding direction, wherein the first direction and the second direction are in line with each other' which makes the combination extremely suitable for breaking into the production line. . According to another aspect of the present invention, there is provided a method of processing a tape-shaped substrate in a liquid process comprising the steps of transporting a tape-shaped substrate through a liquid tank by means of a transport system comprising a winding system For guiding the strip-shaped substrate into a spiral path by at least one winding 'winding system', the winding system comprising: a first pulley mechanism rotatable about a first rotation axis for a portion of the circumference of the first pulley mechanism, at least one winding of the first deflection angle guiding the belt-shaped base plate, and a second pulley mechanism for winding a portion of the circumference of the second pulley mechanism Forming a second deflection angle to guide at least one winding of the belt-shaped base plate. The second pulley mechanism includes a second pulley that is rotatable about each of the windings about a second axis of rotation. The apparatus further includes a liquid bath in which the strip-shaped substrate extends through at least a portion of the length of the at least one winding through the liquid in the liquid bath, and wherein the second rotating shaft of each of the second pulleys forms an angle with the first rotating shaft ^ ^. The advantages obtained using this apparatus have been explained in the above description of the present invention. -11 - 200906509 In order to utilize the available space as efficiently as possible, a preferred belt-shaped base plate is introduced into a spiral path around a winding system having a plurality of windings. The method of the invention is particularly suitable for use in the manufacture of solar panels. Conventional techniques typically use a tantalum panel as the base material. Alternatively, a strip-shaped base made of a metal such as copper or stainless steel, on which at least one layer of indium, selenium or gallium is deposited, may alternatively be used. In particular, in this architecture, the preferred strip-shaped substrate is galvanically treated, the strip-shaped substrate is made of stainless steel or copper, and/or a layer of indium, selenium or gallium in the bath is deposited on the strip-shaped substrate. In general, a preferred belt-shaped base plate passes through the liquid tank at a rate of 2 meters per minute. The invention will now be explained in more detail by way of the following description of a preferred embodiment of the apparatus of the invention. [Embodiment] Figs. 1a and 1b schematically show a production line 1 for electrolytically/currently electroplating a flexible strip-shaped base plate 2. The strip-shaped base plate 2 is supplied to the production line 1 from the supply side 3 by the production line 1 after being treated with the electrolytic solution, and is discharged from the production line 1 on the discharge side 4. On the supply side 3, the strip-shaped base 2 can be unwound, for example, from a supply reel (not shown), and the strip-shaped base 2 is wound on the discharge side 4 to a storage reel (not shown). The strip-shaped base plate 2 is in line with each other on the supply side, the discharge side and the center of the line 1 in a portion indicated by 9. The belt-shaped base plate 2 is oriented such that the lateral direction of the belt-shaped base plate 2 extends in the vertical direction at the positions of the supply side 3 and the discharge side 4. Line 1 comprises four continuous galvanic production units, each of which is considered to be a preferred embodiment of the apparatus of the invention -12-200906509. The first two production units 5, 6 are the preferred embodiment of the first type and the last two production units 7, 8 are preferred embodiments of the second type of the apparatus. The first type production unit 5, 6 and the second type production unit 7, 8 will be described in more detail later with reference to Figs. 2, 3 and 4_n, respectively. The production unit 5 includes a winding system 11' which includes a first pulley mechanism 12 and a second pulley mechanism 13. The first pulley mechanism 12 includes five first pulleys 14 having the same diameter D1, and the central axes thereof are oriented coaxially and vertically. The second pulley mechanism 13 includes five second pulleys 15 which also have the same diameter D2. As shown in Fig. 3, the second pulleys μ are disposed directly above each other, but each has a central axis 16 at an angle α to the vertical. The central shafts 16 associated with the second pulley 15 extend parallel to each other. The second pulleys 15 are free to rotate about their central axis 16. For this purpose, the second pulleys 15 are rotatably mounted to a fixedly disposed hub member 丨9 having a vertical central axis. The belt-shaped base plate 2 sequentially passes over the pulleys 14, 15 of the first pulley mechanism 12 and the second pulley mechanism 13, respectively, and the deflection angle 15 around the first pulleys 14 and the second pulleys 15 is 180 degrees. . The relative positions of the pulleys 14 and 15 are selected such that the yaw deflection angle starts at the point of the entrance 21 (Fig. 1c) on the second pulley 15 at the same vertical position as the belt-shaped base 2 leaves the pulley 14. height. Further, the angle α and the diameter D2 are further selected, and if 俾(D2 = D1/co s (α)) is the above-described deflection angle, the exit point 2 2 located at the end of the deflection angle of the second pulley 15 is at the upper and upper bands. Wheel 1 4 (14 in Figure 1 c) has the same vertical height. As a result, the strip-shaped base plate 2 extends only between the continuous pulleys 4, 15 , i.e., only at an angle of -13 - 200906509 α around the neutral line of the belt-shaped base plate, but the neutral line continues to extend exactly horizontally. In the preferred embodiment, the magnitude of the angle α is 3 degrees. The optimum angle depends in part on the nature of the material and the size of the strip-shaped base plate 2. Specifically, since the deflection angle of the second pulley i 5 is 180 degrees, the belt-shaped base plate 2 is not only approaching the second pulley 15 in the horizontal direction, but in the horizontal direction, despite the oblique orientation of the second pulley 15 After the deflection of 180 degrees, the second pulley 15 is released in the horizontal direction. An important advantage of selecting the size and orientation as described above is that, except for slightly pulling the tensile force along the longitudinal direction of the belt-shaped base 2, only the pulleys 14, 15 are subjected to the torsion. More specifically, no force acts laterally on the plane of the strip-shaped base 2, which force may cause the strip-shaped base 2 to move across the pulleys 14, 15 in a plane perpendicular to the longitudinal direction of the strip-shaped base 2, This results in a highly stable guiding of the strip-shaped base plate 2 and significantly reduces or even eliminates any tendency to crepe. The drive mechanism 25 is disposed below the first pulley mechanism 1 2 to drive the belt-shaped substrate 2, and the drive mechanism rotates only the uppermost pulley 14 of the first pulley mechanism 12. On the one hand, the pulleys 14, 15 are like being pulled by the belt-shaped base plate 2, which passes over the individual pulleys 14, 15 by some pulling force, and on the other hand, the belt pulleys 14, 15 Limited friction drive. Since the belt-shaped base plate 2 is inevitably elongated, the various pulleys 14, 15 are not moved at the same angular velocity, and substantially, the sliding between the belt-shaped base plate 2 and the pulleys 14, 15 is not required. Therefore, such sliding, although extremely limited, occurs between adjacent pulleys 14,15. Figure 2 shows the manner in which the winding system 5 is housed in a box type container 27. On the end faces of the container 27, openings - 29, 29 are provided on the supply side 3 and the discharge side 4, respectively, so that the strip-shaped base plate is provided. 2 can pass through the openings 28, 29, wherein the strip-shaped base 2 extends in the openings 28, 29 in the same vertical plane, except that the strip-shaped base 2 is located higher in the opening 29 than the opening 28. As will be appreciated by those skilled in the art, as seen in Figure lb, this height is completely eliminated from the production unit 6. An electrolytic cell 30 is disposed halfway between the length of the box-shaped container 27, and between the pulley mechanisms 12, 13 in which an electrolyte reaches the uppermost winding upper side of the strip-shaped base plate 2 in use. Above the liquid level 3 1. Channels 3 4, 3 5 and 36, 37 are provided at the end walls 32, 33 of the electrolytic cell 30, which have a greater width than would be expected in Figure 2. In practice, the width of the channel 3 4-3 7 is selected, and the ribbon-shaped base plate 2 can pass through the channels 34-37 without being in contact with it. The drip trays 3 8, 3 9 are respectively disposed between the walls 3 2, 3 3 and the first pulley mechanism 12 and the second pulley mechanism 13 to receive from the slots 30 and leak from the slots through the passages 34-3 7 liquid. The liquid is returned to the tank 30 by a circulation mechanism (not shown). The air blowing mechanism 40, 4 1 is disposed at the position of the channels 34 and 37 in the drip tray 38, 3, that is, the strip-shaped base plate 2 leaves the slot 30 to air-dry the strip-shaped base plate 2 at both sides, and the strip-shaped base plate 2 It is in contact with one of the first pulley 14 or the second pulley 15 in a dry or at least slightly dry state. It is known to those skilled in the art that the use of a Type 1 production unit 5 in a very small device can electrochemically deposit a layer on either side of the strip-shaped substrate 2 at a high production rate in the tank 30. Those skilled in the art are well acquainted with the electrolytic treatment and therefore need no further explanation. Even if it is not necessary, please only -15-200906509. Note that a positive material can be present in the tank 30, which dissolves in the liquid in the tank and settles on the sides of the strip-shaped base plate 2. Alternatively, the positive material can also be dissolved outside of the tank 30. A negative voltage for stimulating the positive material is applied to the strip-shaped substrate 2 via a contact mechanism (not shown) which may, for example, form part of the pulleys 14, 15. The production unit 6 is mostly similar to the production unit 5, with the difference that the vertical variation in the path of travel of the strip-shaped substrate 2 takes place in the opposite direction of the individual production units 5, 6, which is why in the production unit 6 only The lowermost pulley 14 of the first pulley mechanism 12 is driven instead of the reason why the lowermost pulley 14 is driven as in the example of the production unit 5. Figures 4-11 show in more detail one of the production units 7 of the second preferred embodiment. In view of the great similarities of the production units 7, 8, it is almost unnecessary to explain the production unit 8 to those skilled in the art who have read the description of the production unit 7. The production unit 7 includes a winding system 51 including a first pulley mechanism 52, a second pulley mechanism 53, and a third pulley mechanism 54. The first pulley mechanism 52 is equivalent to the first pulley mechanism 12 of the production unit 5 in the sense that a plurality of first pulleys 5 5 are provided with a central axis coaxial and vertically oriented. Only the uppermost pulley 5 5 is rotatably driven by the drive motor 56. The second pulley mechanism 53 and the third pulley mechanism 54 sequentially include a plurality of the second pulleys 57 and the third pulleys 58 in this order, and the respective pulley mechanisms 53 and 54 are directly disposed above each other. The upper portion corresponds to the second pulley mechanism 13 of the production unit 5. The central axes associated with the second pulley 57 and the third pulley 58 each have an angle α of about 3 degrees with respect to the vertical line and extend in parallel with each other. The second pulley 5 7 and the third pulley 58 are positioned relative to each other, 俾 -16- 200906509. In the view of Fig. 11, the individual pulleys 5, 5 8 are in line with each other. The pulleys 57, 58 are further provided with a contact mechanism (not shown) for applying a negative voltage to the strip-shaped base plate 2 for plating treatment. The belt-shaped base plate 2 alternately passes the individual pulley mechanisms 52, 53, 54 at a deflection angle of 180 degrees around the second pulley 55 and a deflection angle of 90 degrees around the second pulley 57 and the third pulley 58. Pulleys 55, 57, 58. Therefore, the deflection angles of the second pulley 57 and the third pulley 58 are added to become 180 degrees. Selecting the relative positions of the pulleys 5 5 and 5 7 , the ribbon-shaped base plate 2 (the neutral line) extends as long as it extends between the continuous pulleys 5 5, 5 7 , ie just horizontally 'and only about an angle 〇: Reversed within this range. Since the continuous pulleys 5 7 and 5 8 are in line with each other (Fig. ,), and the individual deflection angles are 90 degrees, the belt-shaped base plate 2 is inclined upward (without any torque) between the pulleys 5, 5 8 , The pulley 58 is then again exited in the right direction again at the 90 degree deflection angle end of the pulley 58. Thus, the fact that the pulleys 57, 58 together have the same function as the pulley rim 5 of the associated production unit 5, that is, the belt-shaped base plate 2 is moved higher (or, for the production units 6, 8) , lower) height, 俾 forming a second winding' without brewing any lateral forces in the strip-shaped base 2. The advantages of the use of the two pulley mechanisms 53, 54 are in particular that the use of the two pulley mechanisms 53, 54 requires a limited amount of space compared to the use of a pulley mechanism 13. The winding system 51 is housed in a square box type container 71. The openings 6 1 (Fig. 6) and 62 (Fig. 4) are disposed in line with each other in the opposing wall of the box-shaped container 71 to allow the belt-shaped base plate 2 to pass therethrough. An at least substantially C-shaped liquid channel 72 is provided at the center of the container 71, and is 180 for the first pulley 55. The outside of one of the deflection angles. The outer side of the i-th pulley mechanism 5 2 forms a C-shaped liquid -17-200906509 a part of the upright wall on the inner side of the groove 72 and a part of the wall of the c-shaped outer upper liquid tank 72 is denoted by reference numeral 73. The circumference of the reservoir 72 is further defined by end walls 74. These end walls 74 extend from the first pulley mechanism 52 and join the outer wall 73. An anode basket 75, for example spherical, is disposed in the liquid bath 72 to hold the anode material. The anode material is anodically connected via an anode connector 76. In use, the liquid bath 72 is filled with electrolyte to a level higher than the uppermost winding of the strip-shaped substrate 2. In the liquid tank 72, the arcuate, horizontally extending shielding strips 7 extending along a larger portion of the length of the liquid tank 72 are disposed at a shorter distance from the outer sides of the pulleys 55, through which the shielding strips 7 can pass. The conversion place. As particularly shown in Figures 7, 9, and 10, the second pulleys 55 are circumferentially provided with grooves 7 9 and the bottoms thereof are formed of an elastic, band-shaped shield 8 which is formed by a resilient, tape-shaped shield 8 Extending along the entire circumference of the groove 79. The mask body 80 is made of, for example, rubber. The width of the groove 79 is slightly larger than the width of the strip-shaped base 2, with the result that a gap having a width of about 0.3 mm appears between the upright wall of the groove 79 and the longitudinal edge of the strip-shaped base 2. One of the mask bodies 80 abutting the strip-shaped base plate 2 has an upward inclined portion 8 2 (refer to FIG. 10 ) on the longitudinal edge, which starts within the width of the strip-shaped base plate 2, thereby ensuring the belt. The base plate 2 is properly abutted with the mask body 80. As a result, the electrolytic treatment of the strip-shaped base plate 2 occurs only on the outer side of the strip-shaped base plate 2, and the strip-shaped base plate 2 is far thicker in FIGS. 7, 9, and 10. For actual users. On the side remote from one side of the liquid tank 72, the production unit 7 is provided with a drip pan 91 which in fact forms a common drip tray below the first pulley 52. The drip tray is used to receive liquid from the liquid tank 72 through the gap between the inwardly directed end of the end face wall 74 and the outer side of the first pulley -18-200906509 52. The liquid is withdrawn into the tank 72 by a circulation mechanism (not shown). Sealing plates 83 are disposed on the outer sides of the first pulleys 5 2, which are located at the segments shown in Figs. 8, 9, and 10 and are adjacent to the end wall 74, and the strip-shaped base plate 2 can pass therethrough without being in contact therewith. . The sealing plates 83 are provided with projections 84 that extend into the grooves 79. The size and position of the sealing plates 83 are defined as a small gap between the belt-shaped base plate 2 and the first pulley 52 including the sealing plates 83. The sealing plates 83 adjacent the end face walls 74 are intended to reduce leakage from the liquid reservoir 72, and the sealing plates 83 shown in Figures 8, 9, 10 are intended to prevent splashing liquid from passing through the drip pan 91. The skilled person understands the operation and construction of the production unit 8 after the above description of the fine production unit 7. In the production unit 8, the strip-shaped base 2 is returned to the same vertical height as the strip-shaped base 2 is close to the height of the production unit 7. In the production unit 8, the lowermost first pulley 55 is rotatably driven in place of the uppermost first pulley 55. The invention is not limited to the preferred embodiments of the invention described above, but the scope of the invention is first determined by the scope of the appended claims. Alternatively, it is also possible to use, for example, the first, second and possibly third pulley mechanisms within the framework of the invention, such that the associated axis of rotation is horizontal rather than (substantially) vertically oriented. The second rotating shaft (the shafts) and, if possible, the third rotating shaft (the shafts) comprise a second pulley mechanism and, if possible, the third pulley mechanism, as viewed from a plan view, at an angle to the first rotating shaft It is preferably above the first pulley mechanism. Although a winding system has been consistently referred to in the above description of the preferred embodiment, the strip-shaped substrate is wound in a number of windings around the system -19-200906509 into a spiral path 'only, alternatively, For example (but not exclusively) for the strip-shaped substrate to pass through a rinsing bath, it is highly likely that a winding system will be used within the framework of the invention, the strip-shaped substrate being wound around only one winding, around the winding system , import into a spiral path. BRIEF DESCRIPTION OF THE DRAWINGS Figures 1a and 1b show a production line for treating a tape-shaped substrate with a liquid, as viewed from a top and side, respectively, which comprises two preferred embodiments of the invention; Figure 1 is a partially cutaway isometric view of the first preferred embodiment; Figure 3 is a cross-sectional view of the first preferred embodiment of the first preferred embodiment of the first preferred embodiment of the present invention; Figure 4 is a partially cutaway isometric view of the second preferred embodiment; Figure 5 is a plan view of Figure 4; Figure 6 is a cross-sectional view taken along line VI-VI of Figure 5; Figure 7 Figure 8 is a cross-sectional view taken along line VIII-VIII of Figure 5; Figure 9 shows the detail of Figure 8; Figure 10 shows the detail of Figure 9; and Figure 11 is taken along line XI-XI of Figure 5. Cutaway view. [Main component symbol description] 1 : Production line -20- 200906509 2 : Strip-shaped base plate 3 : Supply side 4 : Discharge side 5, 6 : Production unit 7, 8 : Production unit 1 1 : Winding system 12 : 1st belt Wheel mechanism 1 3 : 2nd pulley mechanism 1 4 : 1st pulley 15 : 2nd pulley 1 9 : Hub member 2 1 : Entry point 22 : Exit point 25 : Drive mechanism 28, 29 : Opening 3 〇: Electrolysis Mechanism 3 1 : liquid level 3 2, 3 3 : end wall 34, 35 : channel 3 6, 3 7 : channel 38, 39 : drip tray 5 1 : winding system 5 2 : first pulley mechanism 5 3 : 2 pulley mechanism-21 200906509 5 4 : 3rd pulley mechanism 55 : 1st pulley 5 6 : Drive motor 57 : 2nd pulley 5 8 : 3rd pulley 6 1 , 6 2 : Opening 7 1 : Box Type container 72: liquid tank 7 3 : C-shaped outer side 74: end wall 75: anode basket 7 7 : shielding belt 79: groove 80: mask body 8 1 : gap 8 2 : inclined portion 8 3 : sealing plate 84 : Protrusion-22

Claims (1)

200906509 十、申請專利範圍 1· 一種以液體處理帶形基版的裝置,該裝置包括一運 送系統’用來運送該帶形基版,該運送系統包括一捲繞系 統,用來以至少一捲繞,繞該捲繞系統,將該帶形基版導 入一螺旋路徑中,該捲繞系統包括:第1帶輪機構,其可 繞一第1旋轉軸旋轉,用來繞該第1帶輪機構之圓周的一 部分’成一第1偏轉角度導引該帶形基版之該至少一捲繞 ’以及第2帶輪機構,用來繞該第2帶輪機構之圚周的一 部分,成一第2偏轉角度導引該帶形基版之該至少一捲繞 ,該第2帶輪機構包括一第2帶輪,其可就各捲繞,繞一 第2旋轉軸旋轉,該裝置進一步包括一液槽,其中該帶形 基版通過該液槽中之液體,延伸越過該至少一捲繞之長度 的至少一部分,其特徵在於,各第2帶輪之第2旋轉軸與 第1旋轉軸成一角度α。 2. 如申請專利範圍第1項之裝置,其中,該第2帶輪 機構包括許多第2帶輪。 3. 如申請專利範圍第2項之裝置,其中’該等第2帶 輪具有相等直徑。 4. 如申請專利範圍第1項之裝置’其中’與該等個別 第2帶輪有關之第2旋轉軸相互平行延伸。 5. 如申請專利範圍第1項之裝置’其中’該第1帶輪 機構於該至少一捲繞被該第1帶輪機構所導引處具有一第 1直徑D1,各該第2帶輪於一捲繞被該第2帶輪所導引之 相關位置具有一第2直徑D2,其中第2直徑D2大於第1 -23- 200906509 直徑D 1。 6 ·如申請專利範圍第5項之裝置,其中,第2直徑D 2 之尺寸等於被cos( α )所分之第1直徑D1的尺寸。 7·如申請專利範圍第1項之裝置,其中,第丨偏轉角 度及第2偏轉角度均等於180度。 8 _如申請專利範圍第1項之裝置,其中,該捲繞系統 包括第3帶輪機構,用來繞第3帶輪機構之圓周的一部分 ’成一第3偏轉角度導引該帶形基版之該至少一捲繞,該 第3帶輪機構包括一用於各捲繞,可繞一第3旋轉軸旋轉 之第3帶輪,各該第3帶輪平行於一相關第2帶輪延伸。 9.如申請專利範圍第8項之裝置,其中,第2偏轉角 度與第3偏轉角度的總和等於180度。 1 〇 ·如申請專利範圍第8項之裝置,其中,該第2帶 輪機構及該第3帶輪機構均與該第1帶輪機構隔相同距離 〇 1 1 .如申請專利範圍第1項之裝置,其中,該液槽設 於該第1帶輪機構與該第2帶輪機構之間。 12. 如申請專利範圍第1項之裝置,其中,該液槽沿 第1偏轉角的一部分延伸於該第1帶輪機構之外側上。 13. 如申請專利範圍第12項之裝置,其中,該第1帶 輪機構於該液槽中對面朝該第1帶輪機構之該帶形基版側 形成一掩模,俾該帶形基版藉該液體,僅在遠離該第1帶 輪機構的一側處理帶形基版。 14. 如申請專利範圍第12項之裝置,其中,該第1帶 -24- 200906509 輪機構包括一用於各捲繞之接觸表面,該接觸表面於該帶 形基版之縱緣向上傾斜。 15.如申請專利範圍第12項之裝置,其中,該第1帶 輪機構包括一溝槽’其具有一底部及二個連結該底部,用 於各捲繞之直立緣’其中該帶形基版抵接該底部,且該帶 形基版之縱緣以不接觸諸直立緣較佳。 1 6 ·如申請專利範圍第1 5項之裝置,其中,於該帶形 基版之縱緣與該溝槽之直立緣間有最大1 mm的間隙。 1 7.如申請專利範圍第1項之裝置,其中,該第1旋 轉軸具有一垂直定向或一最大偏離10度的定向。 1 8 ·如申請專利範圍第1項之裝置,其中,該第1旋 轉軸具有一水平定向。 1 9 _如申請專利範圍第1項之裝置,其中,至少一通 道設在該液槽之至少一壁上’該帶形基版可通過該通道。 2 〇 ·如申請專利範圍第1 9項之裝置,其中,配置該通 道以容許該帶形基版通過而不與其接觸。 2 1 _如申請專利範圍第1 9項之裝置,其中,一滴盤設 在該通道遠離該液槽內部之一側上。 2 2 _如申請專利範圍第21項之裝置,其中,設置一循 環機構’俾進入該滴盤之該液體經由一通道回到該液槽。 23.如申請專利範圍第1項之裝置,其中,配置該捲 繞系統,俾以許多捲繞’繞該捲繞系統,將該帶形基版導 入一螺旋路徑中,其中’配置該第1帶輪機構及該第2帶 輪機構,以導引於許多相鄰位置隔開一間距的許多捲繞。 -25- 200906509 2 4 ·如申請專利範圍第1項之裝置,其中,該角度α 在2與3 0度間的範圍內。 2 5 ·如申請專利範圍第1項之裝置,其中,該第1帶 輪機構包括一第1帶輪’其可供各捲繞,繞一第1旋轉軸 旋轉’其中’個別之第1旋轉軸同軸。 2 6.如申請專利範圍第25項之裝置,其中,該運送機 構包括一驅動機構,用來可旋轉驅動一單一第1帶輪。 27.如申請專利範圍第26項之裝置,其中,該單一第 1帶輪係一最外面的第1帶輪。 2 8 ·如申請專利範圍第1項之裝置,其中,該帶形基 版僅在該捲繞系統之一側上與形成該捲繞系統之一部分之 該該帶輪機構接觸。 2 9.如前述申請專利範圍任一項之裝置,其中,該液 槽係電化學槽。 3 0 . —種二個連續的如前述申請專利範圍任一項之裝 置的組合,其特徵在於,從平行於有關個別裝置之第1旋 轉軸之方向看來,帶形基版沿相反方向移動。 3 1 . —種以液體處理帶形基版的方法’包括藉一運送 系統,將帶形基版運送通過一液槽之步驟’該運送系統包 括一捲繞系統,用來以至少一捲繞’繞該捲繞系統’將該 帶形基版導入一螺旋路徑中’該捲繞系統包括:第1帶輪 機構,其可繞一第1旋轉軸旋轉,用來繞該第1帶輪機構 之圓周的一部分,成一第1偏轉角度導引該帶形基版之該 至少一捲繞,以及第2帶輪機構,用來繞該第2帶輪機構 -26- 200906509 之圓周的一部分,成一第2偏轉角度導引該帶形基版之該 至少一捲繞,該第2帶輪機構包括一第2帶輪,其可供各 捲繞,繞一第2旋轉軸旋轉,該裝置進一步包括一液槽, 其中該帶形基版通過該液槽中之液體,延伸越過該至少一 捲繞之長度的至少一部分,其特徵在於,各第2帶輪之第 2旋轉軸與第1旋轉軸成一角度α。 32. 如申請專利範圍第31項之方法,其中,以許多捲 繞’繞該捲繞系統,將該帶形基版導入一螺旋路徑中。 33. 如申請專利範圍第32項之方法,其中,該帶形基 版經過電鍍處理。 34. 如申請專利範圍第32項之方法,其中,該帶形基 版由不銹鋼或銅製成。 35. 如申請專利範圍第32項之方法,其中,於該液槽 中’銦、硒或鎵沉積於該帶形基版上。 36·如申請專利範圍第32-3 5項中任一項之方法,其中 ’該帶形基版以每分至少2米的速度移動通過該液槽。 -27-200906509 X. Patent Application Scope 1 A device for processing a strip-shaped substrate in liquid, the device comprising a transport system for transporting the strip-shaped substrate, the transport system comprising a winding system for at least one roll Winding around the winding system, the tape-shaped substrate is introduced into a spiral path, the winding system comprising: a first pulley mechanism rotatable about a first rotation axis for winding around the first pulley a portion of the circumference of the mechanism 'the first deflection angle guides the at least one winding of the strip-shaped base plate' and the second pulley mechanism for winding a portion of the circumference of the second pulley mechanism to form a second The deflection angle guides the at least one winding of the strip-shaped substrate, the second pulley mechanism includes a second pulley that is rotatable about a second axis of rotation for each winding, the device further comprising a liquid a groove, wherein the strip-shaped substrate extends through the liquid in the liquid tank over at least a portion of the length of the at least one winding, wherein the second rotating shaft of each of the second pulleys is at an angle to the first rotating shaft α. 2. The device of claim 1, wherein the second pulley mechanism comprises a plurality of second pulleys. 3. The device of claim 2, wherein the second pulleys have equal diameters. 4. The second rotating shaft associated with the individual second pulleys of the device of the first application of the patent application is parallel to each other. 5. The apparatus of claim 1, wherein the first pulley mechanism has a first diameter D1 at which the at least one winding is guided by the first pulley mechanism, and each of the second pulleys The second diameter D2 is greater than the first -23-200906509 diameter D1 at a relevant position guided by the second pulley. 6. The device of claim 5, wherein the size of the second diameter D 2 is equal to the size of the first diameter D1 divided by cos(α). 7. The apparatus of claim 1, wherein the second deflection angle and the second deflection angle are equal to 180 degrees. The apparatus of claim 1, wherein the winding system includes a third pulley mechanism for guiding the strip-shaped base plate at a third deflection angle around a portion of the circumference of the third pulley mechanism The at least one winding, the third pulley mechanism includes a third pulley for each winding and rotatable about a third rotating shaft, each of the third pulleys extending parallel to an associated second pulley . 9. The device of claim 8, wherein the sum of the second deflection angle and the third deflection angle is equal to 180 degrees. The device of claim 8, wherein the second pulley mechanism and the third pulley mechanism are separated from the first pulley mechanism by the same distance 〇1 1 . The device is provided between the first pulley mechanism and the second pulley mechanism. 12. The device of claim 1, wherein the liquid tank extends along a portion of the first deflection angle on an outer side of the first pulley mechanism. 13. The device of claim 12, wherein the first pulley mechanism forms a mask on the strip-shaped base side of the first pulley mechanism facing the first pulley mechanism, and the strip-shaped base With the liquid, the strip-shaped base plate is treated only on the side away from the first pulley mechanism. 14. The device of claim 12, wherein the first belt -24-200906509 wheel mechanism includes a contact surface for each winding, the contact surface being inclined upwardly at a longitudinal edge of the strip substrate. 15. The device of claim 12, wherein the first pulley mechanism comprises a groove having a bottom and two connecting the bottom for each winding upright edge, wherein the strip base The plate abuts the bottom and the leading edge of the strip-shaped substrate is preferably not in contact with the slanting edges. A device according to claim 15 wherein there is a gap of at most 1 mm between the longitudinal edge of the strip-shaped substrate and the erect edge of the groove. The device of claim 1, wherein the first rotating shaft has a vertical orientation or an orientation that is offset by a maximum of 10 degrees. The device of claim 1, wherein the first rotating shaft has a horizontal orientation. The apparatus of claim 1, wherein at least one passage is provided on at least one wall of the liquid tank. The belt-shaped base plate can pass through the passage. 2. A device as claimed in claim 19, wherein the channel is configured to allow the strip-shaped substrate to pass without being in contact therewith. 2 1 The apparatus of claim 19, wherein a drop of the disc is disposed on a side of the passage away from the interior of the tank. The apparatus of claim 21, wherein a circulation mechanism is provided, and the liquid entering the drip tray is returned to the liquid tank via a passage. 23. The apparatus of claim 1, wherein the winding system is configured, and the plurality of windings are wound around the winding system to introduce the strip-shaped substrate into a spiral path, wherein 'the first one is configured The pulley mechanism and the second pulley mechanism are configured to guide a plurality of windings spaced apart by a plurality of adjacent positions. -25- 200906509 2 4 The apparatus of claim 1, wherein the angle α is in a range between 2 and 30 degrees. The apparatus of claim 1, wherein the first pulley mechanism includes a first pulley 'which is available for winding, and rotates around a first rotation axis 'in particular one of the first rotations The shaft is coaxial. 2. The apparatus of claim 25, wherein the transport mechanism includes a drive mechanism for rotatably driving a single first pulley. 27. The device of claim 26, wherein the single first pulley is an outermost first pulley. The apparatus of claim 1, wherein the strip-shaped substrate is in contact with the pulley mechanism forming a portion of the winding system only on one side of the winding system. A device according to any one of the preceding claims, wherein the tank is an electrochemical cell. A combination of two consecutive devices according to any of the preceding claims, characterized in that the strip-shaped substrate moves in the opposite direction from a direction parallel to the first axis of rotation of the individual device concerned . 3 1 . A method for treating a strip-shaped substrate in a liquid process comprising the steps of transporting a strip-shaped substrate through a liquid bath by means of a transport system comprising a winding system for winding at least one 'Rolling the strip-shaped substrate into a spiral path around the winding system'. The winding system includes: a first pulley mechanism rotatable about a first rotating shaft for winding the first pulley mechanism a portion of the circumference that guides the at least one winding of the strip-shaped base plate at a first deflection angle, and a second pulley mechanism for winding a portion of the circumference of the second pulley mechanism -26-200906509 into one The second deflection angle guides the at least one winding of the strip-shaped base plate, and the second pulley mechanism includes a second pulley that is rotatable about each of the second rotating shafts, the device further comprising a liquid tank, wherein the strip-shaped substrate extends through at least a portion of the length of the at least one winding through the liquid in the liquid tank, wherein the second rotating shaft and the first rotating shaft of each of the second pulleys At an angle α. 32. The method of claim 31, wherein the strip-shaped substrate is introduced into a spiral path by a plurality of windings around the winding system. 33. The method of claim 32, wherein the tape substrate is electroplated. 34. The method of claim 32, wherein the strip-shaped substrate is made of stainless steel or copper. 35. The method of claim 32, wherein the indium, selenium or gallium is deposited on the strip substrate in the bath. The method of any one of claims 3 to 3, wherein the strip-shaped substrate moves through the liquid bath at a speed of at least 2 meters per minute. -27-
TW097105788A 2007-02-20 2008-02-19 Device for treating a band-shaped substrate with a liquid TWI460032B (en)

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NL1033429A NL1033429C2 (en) 2007-02-20 2007-02-20 Device for treating a band-shaped substrate with liquid.

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