DE102015114187B4 - Continuous film processing system of vertically aligned substrates - Google Patents

Abstract

Continuous film treatment plant for the treatment of flexible, belt-shaped substrates (2) under vacuum conditions, the plant comprising the following components
a dispensing section (16) having a dispensing roller (7) for dispensing a substrate (2) and
- A receiving portion (17) having a receiving roller (8) for receiving the substrate (2),
with at least one treatment section (1) for the treatment of the substrate (2) running through the installation between the delivery section (16) and the receiving section (17),
with a substrate transport device with guide rollers (3) for transporting the substrate (2) through the installation and for holding the substrate (2) in a substantially vertical orientation at least during transport in the treatment section (1),
- wherein the substrate (2) extends from one to the next guide roller (3) without a guide, characterized in that
- The treatment section (1) and the guide rollers therein (3) are arranged to each other such that the transport path (4) of the substantially vertically aligned substrate (2) as a curve β following traverse (6) is formed
- Wherein the guide rollers (3) are arranged on one side and the treatment device (11) on the other side of the transport path (4),
- Wherein the discharge roller (7) and the receiving roller (8) are arranged horizontally and
- In the discharge portion (16) and the receiving portion (17) each have a deflection device with at least one deflection roller (9) is arranged, for deflecting the substrate (2) from the horizontal to the vertical orientation and vice versa.

Description

The invention relates to a continuous film treatment plant, also referred to as a plant, for the treatment of flexible, belt-shaped substrates under vacuum conditions, wherein the substrates are oriented substantially vertically.

Such a system, generically, at the beginning of the system, referred to herein as a delivery section, is a delivery roller for delivery and exit of the system, here referred to as a receiving section, a take-up roller for receiving a substrate, at least one treatment chamber having one or more treatment sections for treatment between dispensing and receiving section through the plant running substrate and a substrate transport device for transporting the substrate through the system and for holding the substrate in a substantially vertical orientation during transport and during the treatment. The substrate thereby passes over guide rollers of the substrate transport device, which define the transport path of the substrate and position the substrate thereon.

A "chamber" is usually referred to a chamber enclosed by chamber walls, which is delimited to the surrounding space and often also lockable. A treatment facility may have one or more treatment chambers, depending on the amount of treatments and the size of the substrate. A treatment chamber may comprise a single treatment section, or may itself be subdivided into a plurality of functionally distinguishable sections by incorporating internals within the chamber to confine the respective section to adjacent sections. The scope of the demarcation depends in particular on the respective functions of the sections and can also be pressure-limiting to vacuum-tight. Insofar as a "section" is referred to below, it is thus possible, unless explicitly stated otherwise, to have in common both a section of several in one chamber or a chamber with only one section.

As functional sections of a film treatment plant or comparable systems for the treatment of substrates, in addition to the treatment section, those sections are also known which do not serve directly the treatment but are required for the overall process, such as sections for evacuation of one or more sections, sections for gas separation or sections for changing the substrate transport mode or the substrate transport direction, wherein in a section also several of the functions can be realized.

Such film processing equipment serves for the differential, subtractive or modifying treatment of the surface of the substrate, which may also include treatment of the substrate itself, for example heat treatment, pretreatments such as cleaning or activation processes and others within the equipment. Additive treatments include a wide variety of coatings. Subtractive treatments include complete or partial removal of surface layers, whether parasitic or previously applied, particularly with physical or chemical processes, and also mechanical treatments. As a modification, changes in the structure or composition of a surface layer are known, for example, by heat or plasma or chemical treatments.

Such a treatment plant is generally referred to as a continuous or inline system when the plant is divided into several stations and the substrate to be treated is moved along a transport path through the system, so that it successively passes through the stations that in any Contribute to the treatment.

As a film band-shaped substrates are referred to, the band length is much longer than the transport path through the plant and are flexible so that they can go through harmless curved transport routes. Both metallic and dielectric as well as complex plastic or composite films are treated. Such belt-shaped substrates are usually unwound at the beginning of the system from a delivery roller, transported through the system and thereby treated and the output of the system again wound up on a take-up roll until the entire substrate has passed through the system.

There are several types of film processing equipment, initially differentiated according to the orientation of the substrate. In a horizontal orientation, the substrate is perpendicular to gravity. In order to achieve a defined position of the substrate with respect to the coating source, either the substrate can be tensioned by means of the guide rollers ( DE 10 2008 029 379 A1 ) or the substrate is guided over large drums with horizontal axis, the lateral surface and thus the substrate surface opposite the treatment stations, such as coating or plasma sources, are arranged.

In order to be able to pass through several stations in succession, large drums are needed and possibly the entire circumference for the Stations used. Consequently, with the location of the treatment station, ie, its angular position relative to the drum, the direction of treatment between treatment source and substrate changes from horizontal to increasingly vertical. Such a Rollcoater is for example in the DE 101 57 186 C1 described.

The treatment direction has an influence on the success of the treatment. For example, there is a risk in the coating that particles and flaked layer flakes fall onto the substrate.

A disadvantage of this system concept is further the limited number of treatment sections. An exchange or a supplement is only conditionally possible. Since the treatment sections are located close to each other, the separation of adjacent sections, in particular with regard to the process atmospheres, is low.

It is also known to operate such drum systems with vertical orientation of the substrate by the drum axes are perpendicular. In the EP 2 773 165 A1 Both transport variants are combined with each other, with a drum whose axis is vertical, so that a rotation of the substrate between the two transport systems takes place and the coating direction over the drum surface remains the same and runs horizontally.

Although the contamination of the substrate by particles and layer flakes is reduced, but the limitation on the treatment sections and the separation remains. However, such types of equipment are mainly used on a laboratory scale or only for small substrate widths with less treatment effort.

Treatment facilities with a linear transport path offer the possibility of arranging a plurality of treatment chambers and / or treatment sections successively along the transport path. The insertion of separating sections between two treatment sections is also possible, as is known from the coating of plate-shaped substrates. Such systems may have long lengths in complex treatments, especially coatings. For strip-shaped substrates results in this type of equipment, the requirement to transport the substrate over the entire length of the plant in one plane, if possible, in order to achieve a uniform treatment or coating result. This is realized by guide roll systems before and / or after each treatment station, over which the substrate is guided and held in the plane, with the requirements increase with increasing plant length. This inevitably also the contact of the previously treated side of the substrate, generally referred to as good side, linked to the guide rollers.

From the WO 2007/108952 A2 is a continuous film-coating machine described in which the substrate is also vertically aligned and is held by means of magnetic guide elements and a stabilization of the substrate edge in its path. However, such a system limits the substrate to be treated and the free substrate area.

The invention has for its object to provide a continuous treatment plant, which allows for vertically oriented, with respect to the material and substrate size variable substrates even in complex treatment processes, especially in complex coating, a high substrate throughput.

The film substrate should be positioned in such a system for a uniform treatment result along the entire transport path in a defined for each treatment device location. In this case, the Gutseitenberührung of the substrate along the transport path through the continuous treatment plant should be at least further reduced. Preferably, the system should be able to be operated entirely without Gutseitenberührung.

In addition, the system should be able to be supplemented variably by further treatment sections and / or functional sections.

The continuous film treatment plant should in particular be suitable for producing multilayer coating systems by means of physical or chemical, also plasma-supported, vacuum coating, which consist of a larger number of metallic and oxidic individual layers.

The system should be variably adaptable to the production of different layer combinations with improved separation of adjacent treatment sections, whereby also other than treatment sections, for example for substrate pretreatment or substrate or layer modification, suitable treatment sections should be integrated.

Furthermore, the plant concept should allow a minimization of the plant and the treatment chamber volume adapted to the variability in the layer combination, in order to reduce plant, energy and time expenditure.

To solve the problems, a continuous coating plant according to claim 1 is proposed. The referring to dependent claims represent advantageous embodiments.

According to the invention, the treatment section and the guide rollers located there are arranged relative to one another such that the transport path of the substrate in that region in which the substrate is oriented substantially vertically is designed as a traverse following a curve. This implies that, in the case of multiple treatment sections and / or other complementary sections, the transport path through these sections is also part of this traverse.

The curve shall be taken to mean a non-rectilinear line defined by the points of contact of a point of the substrate with each guide roller on its way through the treatment sections. The direction of the curvature of the curve β preferably remains the same throughout the transport path. Thus, it is possible according to an embodiment of the continuous film treatment system to avoid any Gutseitenberührung. Because this makes it possible to arrange all the guide rollers of the substrate transport device on the same side of the substrate.

The direction of the curvature of the curve β can optionally also change. This includes a free to be designed polygon, which according to the invention should not be a continuous straight line, as well as a polygon, which follows a circular and an elliptical arc or a combination of these variants.

In this case, the axes of the guide rollers represent the corner points of a polygonal course which lie on a curve β 'extending next to the curve β. Due to the position of the guide rollers, at least in a region of the same direction of curvature of the curves β and β ', on one side of the transport path, such a transport path is generated, that the voltage applied to all guide rollers substrate receives a mechanical stress, which fixation of the substrate on the Transport path and thus ensured in the desired position to the treatment devices for each treatment section. If the direction of curvature of the curve β is to change, two guide rollers, one on each side of the substrate, are required at the reversal point in order to generate the substrate tension over the guide rollers for the subsequent segment of the traverse. Thus, very variable polygons and thus variable transport routes can be realized.

The tension of the substrate can be made variable by means of the guide rollers by their pressure on the substrate, provided that one or more guide rollers are displaceable perpendicular to the substrate surface according to an embodiment of the continuous film treatment system.

According to the treatment process region and also regularly the treatment device on the guide rollers opposite side of the transport path, so that along a curved portion of the transport path with the same direction of curvature no guide rollers for clamping and deflection of the substrate or other guide elements are required to touch the good side of the substrate.

The arrangement of the guide rollers, viewed from the treatment process area, behind the substrate has, in addition to the improved layer quality due to the lack of Gutseitberührung the further advantage that longer life can be realized for the guide rollers, since they are shielded by the substrate to the treatment process area as far as possible.

Although the invention according to a preferred embodiment, refers to a transport path in which all the guide rollers on a substrate surface and all Behandlungsprozessbereiche are arranged over the opposite substrate surface, the invention also includes a possible change of the direction of curvature in the course of the transport path due to the combination of two curves, provided that the associated Gutseitekontakt after the change is harmless for the already treated substrate surface. This can be, for example, after a suitable substrate treatment or only immediately before the take-up roll.

The course of the transport path is realized as stated above by the arrangement of the guide rollers relative to each other. Since the transport path is determined by the guide rollers and the substrate passes from one to the next guide roller without guide, it is easy to see that the transport path is not a curve, but each formed by a plurality of vertices of a polygon, from which each guide roller a corner Are defined. Accordingly, it is possible, but not required, to make the treatment section or sections curved. These can accompany the traverse through straight walls on both sides of the transport route. Only to clarify the course of the transport path and the associated voltage and fixation of the substrate is here the description using curves.

The subdivision of the transport path into individual functional sections further offers the advantage that the volume in the treatment sections can be kept small. This allows in Combination with the arrangement of vacuum pumps on and between the treatment sections, in particular a low base pressure, ie the minimum achievable pressure without the admission of process gas, as well as a fast evacuation time.

As is known, depending on the process requirements, gas separation systems may be present between adjacent treatment sections to ensure efficient separation between the process atmospheres. Also on the gas separation of adjacent treatment sections compared to the drum systems described above compact system concept has a positive effect due to the possibility of establishing at least one pump section between adjacent treatment sections. This can be done by other built-in devices as a special gas separation section. By stringing together gas separation sections, very high gas separation ratios can be achieved. A small volume of the pump or gas separation sections combined with their high length extension in the substrate transport direction supports the effect of the gas separation.

The position of the substrate as in the "substantially vertical" includes not only the vertical orientation but also small deviations thereof, which preclude neither the generation of the substrate tension required for the substrate fixation on the transport path nor the undisturbed substrate treatment. The latter relates in particular to the above-described interfering particles and flocs, which, taking into account the distance of the substrate from the treatment device or the chamber wall, should not fall on the surface of the substrate to be treated and also not on the treatment device. This will be achievable for a variety of coating processes and coating materials with deviations of up to +/- 15 ° from the vertical position. Those guide rollers of the system according to the invention, which realize this substantially vertical orientation of the substrate, are here also referred to simply as vertical guide rollers.

In contrast, according to the invention, the dispensing and receiving rollers are arranged horizontally. Due to the inherent weight of the film substrate, it is thus possible to stabilize the windings on the rollers both during ongoing operation of the system and during insertion and removal of the full rollers. This proves to be advantageous over substantially vertical discharge and output rollers, in which the windings drift apart especially in vacuum generation in the environment of these roles and create undefined substrate layers. In addition, it facilitates the handling of large rolls, especially in the case of wide and long substrates, when the transport of the rolls and their installation or removal takes place in the system in a horizontal position of the roll. It will be appreciated that from the horizontal position such deviations are included for which these benefits are still achievable.

In order to divert the substrate after its unwinding from a horizontally mounted roller to the substantially vertical orientation and / or in the reverse direction of the system, the plant comprises according to the invention a deflection device with at least one guide roller for deflecting the substrate or a plurality of such guide rollers, which in combination with each other serve to deflect the substrate. The guide rollers which serve to deflect the substrate generally fall under the definition of a guide roller described above with respect to the prior art. For better distinction, in the description of the invention, those guide rollers should be referred to as "pulleys" which together serve to deflect the substrate between its two principal orientations, those on the delivery and / or take-up rollers and the substantially vertical orientation.

The number of deflection rollers can be different depending on the particular type of substrate, its width and the position of the delivery or take-up roll to the first vertical guide roller. Number and position of the pulleys are then determined that each parallel to the Substrattransportrichtung running strip of the substrate between the dispensing or pick-up roller and the nearest, substantially vertically arranged guide roller is the same length and as a result is equally tense. By means of adjacent to the discharge or take-up roll and / or to the nearest vertical guide roller lying pulleys also a defined takeover and / or transfer of the substrate can be ensured on these roles.

The deflection device will preferably lie with such a distance before the substrate is introduced into the first treatment chamber and / or following the last treatment chamber, that the substrate can be moved largely uninfluenced by the deflection through the respective treatment chamber.

Under the abovementioned proviso of the same length of substrate strip said at least one guide roller in one embodiment of the system in such a position in the space between the discharge or take-up roll and the nearest vertical guide roller, in which they have a first angle α to the axis of the delivery roller or to the take-up roll and a second angle γ to Has axis of the nearest vertical guide roller. Both angles are in the range 0 ° ≦ α ≦ 90 °, preferably between 30 ° and 60 °, on the condition that at least one of the angles α and γ deviates from 0 ° and from 90 °. Because of the need to guide the substrate in its path and the references of the angles α and γ to a substantially horizontal line, the axis of the take-up roll, and to a vertical or deviating line at a known angle, The latter is the axis of the nearest vertical guide roller, the position of the guide roller in the space by means of both angles to define. The above angular relationship allows for such a position of the one or more diverting pulleys which deviates from at least one of the following planes, that regular horizontal in which the delivery reel lies and a substantially vertical one in which the closest vertical guide reel lies.

Since said rollers are distributed in space, so that there is not always an intersection of the axes forming said angles, the measurement of the angles between the axis of the pulley and said planes can be made. As a result, angle α lies between the axis of the diverting pulley and the vertical projection of this axis on the plane passing horizontally through the axis of the dispensing roll. Angle γ is clearly determinable by the angle measurement between the axis of the guide roller and its vertical projection on the plane passing through the axis of the nearest vertical guide roller plane to which the axis of the discharge or take-up roller is perpendicular.

In 1A is an example of the position of the various roles relative to each other and angle γ shown in a side view. There are the delivery roller with the reference numeral 7, the exemplary and non-limiting used two pulleys with 9 and 9 ', the nearest substantially vertically oriented guide roller with 3, the substrate with 2 and the axes of the rollers 18. Further, the directions of rotation of the rollers 3, 7, 9, 9 'are illustrated about their axes 18 and the direction of movement of the substrate 2 by arrows. The illustration is analogous to the take-up rollers taking into account the reverse direction of movement of the substrate 2 and directions of rotation of the rollers.

The band-shaped substrate 2 is unwound from the delivery roller 7 and over a first guide roller 9 ', whose axis 18 is parallel to the axis 18 of the delivery roller, unwound. This first guide roller 9 'positions the substrate 2 for the further course over the deflection roller 9, which by its position obliquely in the space defined by the angle α and γ, performs the actual deflection from horizontal to vertical. For this purpose, the substrate 2 is guided by the deflection roller 9 'further over the deflection roller 9 to the first vertical guide roller 3. From there, it continues to travel along the transport path defined by the remaining guide rollers (shown only next) to the last guide roller 3. There it is guided in an analogous manner via the deflection rollers 9 and 9 'on the take-up reel 8. Angle γ can be represented in the drawing plane directly between the two axes 18 of the guide roller 9 and the first vertical guide roller 3. Such a diversion continuously avoids the Gutseitekontakt.

1B shows the deflection of the 1A Due to the position of the axis 18 of the first guide roller 9 'parallel to the axis 18 of the delivery roller 7, the angle α can be indicated to the two axes 18 in a side view with a viewing direction corresponding to the direction of the development of the substrate. Further alternative spatial arrangements of the roles involved are possible. A reflection of the 1A and 1B on a vertical mirror axis (not shown), this configuration would represent the receiving section at the end of the system.

In one embodiment, the angles α and γ are variable by the deflection roller is pivotable in at least one of the angles. Alternatively or additionally, the deflection roller is displaceable relative to the nearest guide roller. Thus, the deflection of the substrate is tunable with the various parameters of the substrate transport that can be realized by the system, such as, for example, its actual alignment with the vertical, the substrate tension or the position of the delivery roller with respect to the first guide roller. This embodiment also supports the avoidance or at least reduction of Gutseitenkontakts for the embodiments of the system described here. Such displaceability is also advantageous if more than one deflection roller is used, so that the effect of each deflection roller is variable. The displaceability may be formed for one or all pulleys.

According to a further embodiment of the invention, the angle between each two segments of the polygon are limited by each two adjacent segments of the polygon have an angle δ in the range of 90 ° <δ <180 °. In this way, while maintaining the substrate tension, it is possible to give the curve a slightly curved shape and thus make the treatment conditions for the substrate along the transport path comparable to those in linear system types in which the above-defined angle δ would be 180 °. For example, excessive stresses or voltage changes in the substrate are avoided.

In one embodiment, the system includes additional functional sections adjacent to the one or more treatment sections, as set forth in the introductory description. These should be referred to here as a supplementary section. Such supplementary sections are, for example, sections for evacuation, for gas separation, for adaptation of the system curvature to the direction of transport direction change or others, wherein more than one function can also be implemented in a supplementary section.

bilden. Zur Lage des Winkels δ' wird auf die unten stehende Beschreibung zu den 5A und 5B verwiesen.For example, a supplementary section for adapting the system curvature to the transport direction change between two adjacent sections, treatment and / or supplementary sections in which an angle δ different from 180 ° exists between the adjacent traverse segments of the transport path can be inserted. By means of such a supplementary section, the angle δ, which is formed by the two successive partial sections of the transport path, can be carried out in terms of plant technology. Such a supplementary section, which is located between two sections with preferably in plan view rectangular cross-section, has for it in the plan view of a trapezoidal or triangular cross-section with end faces having an angle δ 'with $$\mathrm{\delta }\text{'}\mathrm{=\; 180\; °\; -\delta }$$

form. For the position of the angle δ 'is to the description below to the 5A and 5B directed.

Such a supplementary section for adapting the system curvature to the transport direction change may have different equipment levels. For example, it may be formed only as an intermediate flange, in which the standing at an angle δ 'end faces are the sealing surfaces of the flange. The sealing surfaces are those with which the connection to the adjacent sections is made. A higher degree of equipment of such a supplementary section can be formed by a contained guide roller for the active direction of transport direction change.

Alternatively, such a supplementary section may additionally have components and internals that are needed indirectly or directly for the treatment process. For example, it can have a vacuum connection and / or suction openings to adjacent sections. In such a section can also be done heating or cooling of the substrate and much more. It may have one or more guide rollers or be equipped without a guide roller, for example, if the nearest guide rollers in the adjacent sections are immediately adjacent to the respective passage.

In both options, viewed in the substrate transport direction, located at the beginning and end of the supplementary portion lying end or sealing surfaces are not parallel to each other. They include the angle δ ', for which preference is given, that is to say that in the neighboring sections of the relevant supplemental section described here the above relation to δ holds.

In an alternative to such an angled supplementary section, the angle δ in the transport path can also be implemented by the system itself by means of the adjacent treatment and / or supplementary sections lying on these two partial sections of the transport path. For this purpose, their end faces preferably each have an angle δ '' = δ / 2 to their part of the transport path. In asymmetric design, other angles can be performed.

With these embodiments, it is possible for the portions of the curve to follow β and its traverse without having bent walls. Also, the modularity of the system is supported, since by means of the angular positions of the end or sealing surfaces of the polygon can be adapted to a changed section or chamber length or vice versa. By using said supplemental sections for adapting the curvature of the machine to changes in direction of transport, it is also possible to use more modular treatment or supplementary sections.

If, according to an embodiment described above, the angle δ is to be in the range between 90 ° and 180 °, the angles δ 'and δ "in the range of 0 ° <δ' <90 ° and 45 ° <δ" 'result therefrom 90 °.

The variability of the system is also applicable to dispensing or take-up roll. As stated above, their installation and removal in the dispensing or the receiving section takes place in a horizontal position. It goes without saying that this orientation too can include purely technical deviations.

For the installation and removal of the rollers of the dispensing and / or the receiving portion may be arranged in each case a separate vacuum-tight against the system lockable chamber, so that it is possible that a change of the dispensing or receiving rollers while maintaining the Vacuum conditions can be performed in the system.

As an alternative, the dispensing and receiving sections can also be included in the vacuum system by being closed to the environment in a vacuum-tight manner and connected to the respectively adjacent first or last treatment section by slot locks. With the latter, pressure levels between adjacent sections or chambers can be realized. In both embodiments can be dispensed with the use of belt locks and here a Gutseitenberührung be avoided.

In a further embodiment of the invention, the treatment sections and / or the supplementary sections are of modular design in that they are technically similar in terms of their geometry and their interfaces to the adjacent treatment or supplemental section. The term "technically similar" describes such a chamber design that one chamber may be replaced by one or more others, or vice versa, without having to change the adjacent chambers in their position or structure. In terms of geometry, that means that the section width and section height are substantially coincident and the section length is subject to a pitch matched to the curvature of the curve β and / or a reasonable number of smaller sections to be placed on a section location. Thus, for example, supplementary sections for reducing the size of the plant can be shorter in function than their function.

The modular structure should in particular be designed such that the transport path can be extended or shortened by the system by inserting or removing at least one modular treatment or supplementary section between delivery section and receiving section. A shortening or lengthening is achieved by sections can be added or removed at the beginning or end of the transport path, the dispensing and receiving sections are always arranged again at the ends of the transport path. But also a change of the section sequence in the central region of the transport path can be realized if modular sections are replaced by others and / or the remaining sections along the curve β are movable, for example on a rail system.

At least for the completion and removal of sections, it may be necessary to complete or remove entire chambers, wherein a chamber may have one or more sections. A chamber has input and / or output side vacuum valves to the vacuum-tight closure, so that the chambers of each other vacuum technology and / or physically separable. Such a vacuum separation is also advantageous for the non-modular design of the system, for example for maintenance, for changing the treatment device or for replacing the entire treatment chamber. The dispensing and receiving sections described above may also be included in the modularity. Alternatively, the replacement is also partially possible due to the modularity.

Thanks to its modular design, the system can be quickly adapted for retrofitting for future applications. According to the modular design concept, as far as possible technically similar section or chamber modules with modified fixtures and peripheral devices are used for the same but basically different processes. This enables the achievement of high plant availability and process stability through the use of technical and technological synergies. Uniform tool and spare parts sets as well as efficient maintenance work can also be used and thus lower total operating costs can be achieved.

The modularity of the plant further presents some advantages with respect to the process. A pretreatment section may be inserted between the receiving section and the subsequent process section and carried out separately, thereby providing high flexibility to the user, different pretreatment processes to optimize treatment quality to drive.

The system described can be used with the various configurations, in particular for PVD coatings by means of sputtering or CVD coatings, these also with plasma assistance. In such continuous flow systems, increasingly complex layer systems with numerous layers of different compositions will be sequentially deposited. This system can also be used for plasma treatments of film substrates. Accordingly, the plant is configured with its treatment and usually also supplementary sections for these processes. For example, in the treatment sections, one or more treatment devices, such as e.g. Sputter sources or plasma sources arranged.

• 1A, 1B Beispielhafte Anordnungen der Abgaberolle, Umlenkrolle und nächstliegenden Führungsrolle relativ zueinander,
• 2 eine Draufsicht einer erfindungsgemäßen Durchlauf-Folienbehandlungsanlage,
• 3 eine Darstellung eines Teilstücks des Transportwegs des Substrats gemäß 2,
• 4 ein Abgabeabschnitt mit Umlenkeinrichtung während des Betriebs der Anlage,
• 5A, 5B Darstellung von Ausgestaltungen eines Ergänzungsabschnitts für die Anpassung der Anlagenkrümmung an die Transportrichtung des Substrates und
• 6 Darstellung einer Reihe von Abschnitten der Anlage mit Stirnflächen, die in der Draufsicht keinen rechten Winkel mit der Transportrichtung bilden.

The invention will be explained in more detail with reference to an embodiment. The accompanying drawings show in

• 1A . 1B Exemplary arrangements of the delivery roller, deflection roller and nearest guide roller relative to each other,
• 2 a top view of a continuous film treatment plant according to the invention,
• 3 a representation of a portion of the transport path of the substrate according to 2 .
• 4 a discharge section with deflection during operation of the system,
• 5A . 5B Representation of embodiments of a supplementary section for the adaptation of the system curvature to the transport direction of the substrate and
• 6 Representation of a series of sections of the system with end faces, which do not form a right angle with the transport direction in the plan view.

The illustrations in the figures are only schematic for understanding the invention. You make no claim to completeness or scale.

In 2 the basic structure of a continuous film treatment plant according to the invention is shown schematically. The description will be described by way of example but not limitation with reference to a sputter coating apparatus.

A plurality of treatment sections 1 and supplementary sections 20 are arranged side by side such that they form, by way of example but not limitation, a circular arc. The plant is shown with upwardly open chambers, so that the vertically oriented substrate 2 in the form of a line, the view direction and thus also vertically oriented guide rollers 3 for transporting the substrate 2 and the transport route 4 on which the substrate 2 through the plant in transport direction, in 2 from left to right, is moved, are representable.

The treatment sections 1 and supplementary sections 20 , also referred to as sections below 1 . 20 Insofar as not explicitly distinguished, are by means of vacuum valves (not shown) or partitions with slots 19 connected to each other, leaving the substrate 2 through the open valves or slots 19 (in 2 not shown) can be moved through. The subdivision of the plant into chambers is the 2 not to be taken. Accordingly, in 2 also not distinguish between chamber and partitions within a chamber. Both are configured using common parameters.

The sections 1 . 20 all, the same side of the substrate 2 opposite, in the chamber lid 14 forming chamber wall mounted vacuum connections 10 for evacuation of the equipment or vertically oriented pretreatment equipment 13 and treatment devices 11 on. These may be exemplary, but not limited to plasma sources for pretreatment and sputter sources for coating. Some of the sections 1 . 20 neither with vacuum connections 10 still with pretreatment or treatment device 13 . 11 can be illustrated, the gas separation and / or pre- or post-treatment of the substrate 2 serve.

In some treatment sections 1 are on the treatment device 11 opposite side of the substrate 2 and on this adjacent guide rollers 3 arranged. By means of the guide rollers 3 of which at least some are driven by geared motors become the substrate 2 moved through the plant. The extending in the viewing direction lines of contact between the lateral surfaces of the guide rollers 3 and the substrate 2 define the vertices 5 of the traverse 6 the transport route 4 and thus the curve β , in the illustrated embodiment, due to the arrangement of the sections 1 . 20 , only with slight deviations at different distances between the guide rollers 3 , is a circular arc and which is the polygon 6 through the entire plant follows. Parallel to the curve (circular arc) β towards a smaller radius, the axes of the guide rollers form the second curve β ', which is necessarily a circular arc as well. In the following description of the embodiment, the curves β and β 'therefore be referred to as a circular arc.

The leadership roles 3 are in the embodiment only in the sections 1 . 20 arranged in which no sputtering source is present. They are located there immediately before the entrance to a treatment section 1 , In the embodiment with a sputter source as a treatment device 11 equipped and for concretization as a coating section 12 designated, and after its output, leaving a coating of the guide rollers 3 throughout the plant can be avoided. The distances thus achieved between two guide rollers 3 are different, but small enough to a defined position of the substrate on the transport route 4 also in the coating sections 12 to ensure.

The sections 1 . 20 are modular in that they all have the same width and a uniform interface (not shown) to the adjacent section 1 . 20 exhibit. By means of a service car 15 let the chamber lid 14 for equipment and maintenance of the system, for example, to replace the treatment device 11 , open or the sections 1 . 20 to change the system.

The input and output of the continuous film processing system is in each case a dispensing and receiving section 16 . 17 , These also provide the loading station of the delivery roller 7 or the unloading station of the take-up roll 8th are and by a vacuum-tight valve (not shown) at the beginning of the first or output of the last section 1 . 20 from all intervening sections 1 . 20 separable by vacuum technology.

Between the dispensing or receiving section 16 . 17 and the vacuum-tight valve in each case such a special supplementary section is arranged, which serves to change the transport direction and here to distinguish as supplementary and direction section 21 should be designated. In this embodiment, a first or last leadership role in the embodiment 3 arranged. With the latter and with those in dispensing and receiving section 16 . 17 arranged pulleys 9 becomes the substrate 2 from its horizontal position on the delivery roller 7 on the vertical alignment on the first guide roller 3 deflected and vice versa at the end of the system. To redirect the position of the individual roles to each other is to the above comments 1A and 1B directed.

Further service cars 15 serve to replace the full and empty rolls of film 9 at the delivery section 16 and recording section 17 input or output of the system. In 2 is only one at the delivery section 16 shown.

In the embodiment according to 2 lies between the receiving section 16 and before the first coating section 12 a first process area with a plasma source for the surface treatment of the substrate. The process in this pretreatment area provides high bond strength of the coatings and, for some processes, ensures the cleaning and activation of the subsequent surface of the substrate to be coated 2 in the following coating sections 12 , Their chamber lid 14 are adapted to the particular needs of the coating processes and carry the magnetrons as sputter sources. This process area also contains the necessary media supplies for the magnetron sources, such as gas and water pipes, electronics and media interfaces.

3 shows a section of the transport route 4 of the substrate 2 through the system according to 2 for the representation of the circular arcs β and β 'with respect to the guide rollers 3 whose traverse 6 ' and the substrate 2 , Also, this illustration is a plan view, so that the mounted in vertical alignment guide rollers 3 only visible as a circle and the vertically aligned substrate 2 only as a line.

The leadership roles 3 The continuous film treatment plant, of which only three are shown, are arranged along an elongated circular arc β '. The axes 18 the leadership roles 3 form the cornerstones 5 of a polygon 6 ' which follows the circular arc β 'by the vertices 5 lie on the circular arc β '. The angle between two adjacent sections of the transport path 4 , which is defined by the curvature of the circular arc β ', is with δ designated.

The lateral surfaces of the guide rollers 3 form a parallel elongated circular arc β , This circular arc β Following is the substrate 2 of leadership 3 to leadership 3 guided so that this a second traverse 6 forms, relative to the traverse 6 ' the leadership roles 3 lies outside. Due to its outer position is the polygon 6 suitable, in conjunction with tensile forces along the substrate transport direction and positioning of special, guide rollers (tension rollers) perpendicular to the substrate surface, the mechanical stress of the substrate 2 and the normal pressure forces of the substrate 2 to the leadership roles 3 to create. Due to the curvature of the circular arcs β and β ', therefore, a parameter for varying the intensity of the voltage is available. It may already be sufficient up to an experimentally or computationally determined length of the transport path, only in the start and end of the transport route 4 of the substrate 2 the circular arcs β and β 'to bend more by only the delivery roller 7 (not shown) and the take-up reel 8th (not shown) are moved in the direction of the center of the circular arcs.

4 exemplifies the delivery role 7 in the delivery section 16 while doing the transport. The explanations too 4 are in a similar way to the take-up roll 8th in the recording section 17 transferable.

4 shows the front part of the continuous film processing machine with the local part of the substrate transport device with a non-empty dispensing roller 7 , This is horizontal in the delivery section 16 ,

The deflecting device arranged there has two deflection rollers in the exemplary embodiment 9 . 9 ' on, a pulley 9 ' right after the delivery roll 7 and in parallel to this a subsequent second deflection roller 9 which in the Embodiment realized the actual deflection. From the delivery roll 7 becomes the substrate 2 unrolled (represented by an arrow) and the first, horizontal Umlenkkrolle 9 ' guided. Then it will, how to 1A described to the second, for example, diagonal pulley 9 until the first vertical guide roller 3 guided. The latter lies in a first supplementary and direction change section immediately following the delivery section 21 or alternatively in a section 1 . 20 , But you can also still in the delivery section 16 lie. From the first vertical guide roller 3 out becomes the substrate 2 guided in a vertical orientation through the plant.

To the delivery section 16 closes a first supplementary and direction change section 21 at. This includes a leadership role 3 and is, as well as the subsequent first supplementary section 20 with a vacuum connection 10 fitted. During loading of the discharge section 16 with a new delivery role 7 is the delivery section 16 in the area of access of the service car 15 open and to the supplementary and direction change section 21 closed by a vacuum valve, wherein the end of the preceding substrate film is clamped vacuum-tight in the vacuum valve so that it protrudes into the discharge section and the beginning of the following substrate film can be attached to the end. In this way, the system area can be kept under vacuum from the closed vacuum valve, in particular the high vacuum area of the treatment sections, during the change of the delivery roller. This makes it possible to significantly reduce the duration of the plant shutdown due to the delivery roll change, ie, from shutting down the plant from normal operation to resuming normal operation. Normal operation is characterized by transport and treatment processes.

Alternatively, the supplementary and direction change section 21 to the following first supplementary section 20 be performed vacuum-tight closable, so that the following sections 1 . 20 can remain under vacuum. With this embodiment, it is possible to connect a new role in the supplementary and direction change section 21 instead of as described above in the delivery section 16 , After completion of the discharge roll change including connection of the substrate ends, the process vacuum is set in the previously vented sections and the plant is ready for normal operation.

Such systems for transporting a belt-shaped substrate through the system are known. The unwinder (not shown) of the delivery roller 7 usually consists mainly of a vibration unit (not shown) and a film adjusting device (not shown). The vibrating unit ensures a smooth process and stable substrate handling conditions. A substrate edge measuring device (not shown) continuously checks the substrate position and a control system (not shown) adjusts the position of the delivery roller 7 with respect to the vibrating unit to ensure a perfect insertion of the film strip into the transport system.

The substrate guide in the sections 1 . 20 takes place as described above by the contact with the guide rollers 3 , all on the non-treated side of the substrate 2 who are good side, and do not come in contact with this.

At the end of the transport system (not shown) is in the receiving section, a further deflection device (not shown) for deflecting the substrate from the vertical orientation in the horizontal orientation of the take-up roll, as described above. In the receiving section is further a take-up unit (not shown), which consists mainly of a vibration unit and substrate adjustment. A foil strip edge measuring device also continuously checks the substrate position and the control system adjusts the position of the take-up roll 8th (not shown) with respect to the vibrating unit to ensure perfect winding of the substrate into a roll.

Also in the receiving section are high vacuum conditions during the treatment of the film available. After completion of the winding, the vacuum valve (not shown), which is analogous to the input to the system output of the last section 1 . 20 is arranged in front of the adjoining supplementary and direction change section (not shown), closed with the film end clamped in, the receiving section ventilated and opened to the service trolley for unloading the take-up reel. Then, the film strip is separated and it can be picked up and transported away, the pickup roller, which is in a horizontal position by a service car.

In the 5A . 5B and 6 are embodiments for the change of direction of the transport path 4 around the angle δ shown in plan view. The substrate 2 is along the transport route 4 , which by the traverse 6 is defined by the sections 1 . 20 . 21 transported, wherein in their front and sealing surfaces 22 . 23 slots 19 are arranged, which are just large enough to a contactless transport of the substrate 2 through the slots 19 to ensure.

The embodiments of the 5A . 5B and 6 show symmetrical sections to change the transport direction. Alternatively, asymmetric versions are possible.

In the embodiments of the 5A and 5B becomes a supplementary and direction change section 21 between two treatment or supplementary sections 1 . 20 , which each have a rectangular in cross-section, arranged. The supplementary and direction change section 21 , which has a triangular or trapezoidal cross-section in the plan view, is as a supplementary section with a vacuum connection 10 and a leadership role 3 ( 5B ) or alternatively as an intermediate flange without further installations ( 5B ). The faces 22 and in the same way the sealing surfaces 23 of the supplementary and direction change section 21 are at an angle δ 'to each other, which due to the adjacent, perpendicular to the transport path 4 standing faces 22 With δ by the formula δ '= 180 ° - δ is linked.

The in the 5A and 5B sections shown 1 . 20 . 21 Some have vacuum connections 10 on, with which the respective section and over suction openings 24 in the face or sealing surfaces 22 . 23 also the adjacent section can be evacuated. The arrangement of the vacuum connections and suction openings is made only as an example and not restrictive.

6 shows an alternative in which the treatment or supplementary sections themselves end faces 22 have, in a deviating from 90 ° angle δ '' to the transport path 4 stand. Exemplary and not limiting is a treatment section 1 between two supplementary sections 20 for evacuating adjacent sections via suction openings 24 in the faces 22 shown. All illustrated faces 22 the sections 1 . 20 have an angle δ '' to the transport path 4 on, due to the symmetrical arrangement always δ / 2 is. In the treatment facility 1 are two leadership roles 3 arranged as is preferred in other than coating sections.

LIST OF REFERENCE NUMBERS

1

treatment section

2

substratum

3

leadership

4

transport

5

vertices

6, 6 '

traverse

7

delivery roller

8th

up roll

9, 9 '

idler pulley

10

vacuum connection

11

treatment device

12

coating section

13

pretreatment section

14

chamber cover

15

service car

16

dispensing portion

17

receiving portion

18

axis

19

slot

20

supplement section

21

Supplementary and directional change section

22

face

23

sealing surface

24

suction opening

β, β '

Curve, circular arc

α

Angle between the dispensing or pick-up roller and deflection roller

γ

Angle between pulley and adjacent guide pulley

δ

Angle between two sections of the transport route

δ '

Angle between end walls of an angled supplementary section

δ "

Angle between end wall of a treatment or supplementary section and transport path

Claims (11)

A continuous film processing installation for treating flexible, belt-shaped substrates (2) under vacuum conditions, the installation comprising the following components: a delivery section (16) having a delivery roller (7) for discharging a substrate (2) and a receiving section (17) a take-up roll (8) for receiving the substrate (2), with at least one treatment section (1) for treating the substrate (2) running through the system between the delivery section (16) and receiving section (17), with a substrate transport device with guide rollers (8) 3) for transporting the substrate (2) through the plant and for holding the substrate (2) in a substantially vertical orientation at least during transport in the treatment section (1), wherein the substrate (2) extends from one to the next guide roller (3) without a guide, characterized in that - the treatment section (1) and the guide rollers (3) located therein are arranged relative to one another such that the transport path (4) of the substantially vertically oriented substrate (2) is formed as a following a curve β traverse (6), - wherein the guide rollers (3) on one side and the treatment device (11) on the other side of the transport path (4) are arranged, - Dispensing roller (7) and the receiving roller (8) are arranged horizontally and - in the dispensing section (16) and the receiving portion (17) each having a deflection device with at least one guide roller (9) is arranged, for deflecting the substrate (2) from the horizontal on the vertical orientation and vice versa. Continuous film treatment plant after Claim 1 , characterized in that the axis (18) of the at least one deflection roller (9) is an angle 0 ° ≤ α ≤ 90 ° to the axis (18) of the delivery roller (7) or to the axis (18) of the take-up roll (8) and an angle 0 ° ≤ γ ≤ 90 ° to the axis (18) of the nearest, substantially vertically oriented guide roller (3) is arranged, wherein at least one of the angles α and γ deviates from 0 ° and 90 °. Continuous film treatment plant after Claim 1 or 2 , characterized in that the deflection device has a further deflection roller (9 ') whose axis (18) with an angle 0 ° ≤ α ≤ 90 ° to the axis (18) of the delivery roller (7) or the axis (18) of the take-up roll ( 8) and an angle 0 ° ≤ γ ≤ 90 ° to the axis (18) of the nearest, substantially vertically oriented guide roller (3) is arranged. Continuous film treatment plant according to one of the preceding claims, characterized in that at least one deflection roller (9, 9 ') is displaceable relative to the nearest guide roller (3) displaceable and / or to change at least one of the angles α or γ. Continuous film treatment plant according to one of the preceding claims, characterized in that adjacent segments of the polygon (6) are arranged at an angle δ in the range of 90 ° <δ <180 ° to each other. Continuous film treatment plant according to one of the preceding claims, characterized in that at least one guide roller (3) is displaceable perpendicular to the substrate surface. Continuous film treatment installation according to one of the preceding claims, characterized in that the installation comprises at least one additional functional section which does not serve the treatment and is subsequently referred to as a supplementary section (20). Continuous film treatment installation according to one of the preceding claims, characterized in that the angle δ between two adjacent sections of the polygonal line (6) of the transport path (4) is formed by the end faces (22) of the adjacent treatment sections (1) lying on these two sections. and / or supplementary sections (20) which each have an angle δ '' to their part of the transport path (4) or by a supplementary and direction change section (21) whose end faces (22) form an angle δ`. Continuous film treatment installation according to one of the preceding claims, characterized in that the transport path (4) can be extended or shortened by the installation by inserting or removing at least one modular treatment section (1) and / or supplementary section (20) between delivery section (16) and receiving section (17) and that the modularity is formed by a technically similar geometry and technically similar interfaces to adjacent treatment sections (1) or supplementary sections (20). Continuous film treatment installation according to one of the preceding claims, characterized in that the deflection rollers (9, 9 ') and all guide rollers (3) of the substrate transport device are arranged on the same side of the substrate (2). A continuous film processing installation according to one of the preceding claims, characterized in that the installation is configured for at least one of the following processes: PVD, PACVD and plasma treatment.

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