TW200901269A - Cluster management system, semiconductor manufacturing device and information processing method - Google Patents

Abstract

A group management system, a semiconductor manufacturing device and an information processing method are provided. The existing group management system and other systems have the problem that the energy source check cannot be correctly executed in short time. The group management system is provided with more than one semiconductor manufacturing device and a server connected with the more than one semiconductor manufacturing device. The semiconductor manufacturing device is provided with an energy source acquiring part for acquiring energy source information which represents the information of the values of more than one energy source used in the semiconductor manufacturing technology, and a sending part which can sending the energy source information acquired by the energy source acquiring part. The server is provided with a receiving part for receiving the energy source information sent from the semiconductor manufacturing device, a server judging part for judging whether the energy source value represented by the energy source information received by the receiving part is a prescribed value, and a server output part for outputting the judge result of the server judging part.

Description

200901269 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to systems and the like that are employed in semiconductor manufacturing processes. [Prior Art] Electricity or water or gas is used in the semiconductor manufacturing process. At the application site of the semiconductor manufacturing apparatus, for example, it is possible to periodically check whether the usable energy supplied to the apparatus is in a state suitable for the operation of the semiconductor demanding apparatus. Usually, the state of the usable energy is measured by a measuring device such as a sensor (s_r), and is periodically represented by a manager such as a semiconductor manufacturing device, for example, by the measurement results. The value, and the temple of the temple, is used to monitor the available energy. In addition, it is known that a variety of materials transmitted from the measuring device are received by the group management system of the conventional semiconductor manufacturing apparatus (see, for example, Patent Document 1). In addition, it has been known to be useful for detecting a semi-conventional structure and the like (for example, refer to Patent Document 2). & Device Differences In addition, a batch type vertical heat treatment device is constructed to constitute a conventional group management system (for example, see Document 4). <..., the patent document 3 and the special-in addition, the management of the conventional semiconductor manufacturing process shows that the electronic mail is placed in a state where the fault is detected (for example, refer to Patent Document 5). .卫 卫 454 454 454 454 454 454 454 454 454 454 454 454 454 454 454 454 454 454 454 454 454 454 454 454 454 454 454 454 454 454 454 454 454 454 454 454 454 — — — — — — — — — — — — — — — — — — — — — — [Patent Document 3] Japanese Patent No. 3,543,996 (P. 1, etc.) [Patent Document 4] Japanese Laid-Open Patent Publication No. Hei. No. 2-25997 (page 1, etc.) [Patent Document 5] Japanese Special Table 2〇〇6_5〇168〇 Bulletin (page 1, picture

[Summary of the Invention] [Problems to be Solved by the Invention] Conventionally, the value indicated by the sensor for determining the state of available energy is confirmed by the examiner by visual inspection and recorded in a checklist, etc. And the report is made. However, in the production of semiconductor devices, many of them are usually ordered by batch processing, and in a factory where semiconductor devices are manufactured, etc., in order to mass-produce, a plurality of semiconductor devices having the same number of semiconductors are often provided. It is very time consuming to perform the inspection of the available energy separately supplied to so many semiconductor manufacturing devices every day, and it is also prone to recording errors such as measurement values. For example, if it takes time to test, the time for each semiconductor manufacturing device to pass the test of available energy will be greatly unsatisfactory, so it is difficult to say that all the available energy can be checked at almost the timing: timing. 35 = The value of the available energy is uneven, and it does not cause the abnormality of the available energy, or the time offset 128454.do, 200901269. It is difficult to say that the correct test has been carried out. In addition, in the factory, due to the fact that several identical semiconductor manufacturing devices are arranged side by side, the inspector will not be able to determine where the device is used in the inspection according to the difference of the inspection method * τ β, etc. The test result was incorrectly recorded in 'and the correct record could not be obtained. Further, depending on the usable energy supplied to the semiconductor manufacturing apparatus, the person to be measured during the operation of the semiconductor manufacturing apparatus and the one to be measured when the semiconductor manufacturing apparatus is not in operation, i.e., idling. For example, regarding the supply of voltage to the semiconductor manufacturing device as a usable energy source, the value of the semiconductor manufacturing device is in a normal range, which is extremely important in the semiconductor process. In the case where the semiconductor manufacturing apparatus is in a state of being rotated, even if the value is not in the range of positive f, there is a case where it is judged that there is no problem. On the other hand, for example, regarding the vacuum exhaust pressure, etc., the pressure at the time of the turbulent rotation rises abnormally, and the air flows back from the vacuum exhaust pipe to the semiconductor manufacturing device. Therefore, there is a possibility that the semiconductor manufacturing device is contaminated by dust, so that it is also measured. The value at the time of twirling is better. However, since it is conventionally not considered that each of the semiconductor manufacturing apparatuses is in an operating state or in a non-operating state, and the like, the inspection is performed on a purely periodic basis, and therefore, it is necessary to sufficiently perform the semiconductor manufacturing apparatus. The problem of the situation of the inspection. [Technical means for solving the problem] The group management system of the present invention includes one or more semiconductor manufacturing through-holes, which are performed on a substrate to be processed by a specific semiconductor manufacturing T2 servo device, and the one or more semiconductors The manufacturing device connector. The semiconductor manufacturing device includes an available energy information acquisition unit, which is 128454.doc 200901269, which obtains a value indicating that more than one of the available months is used in the semiconductor manufacturing process. And the transmitting unit transmits the available energy information obtained by the available energy acquisition unit to the (4) device; the word processor device includes: a receiving unit that receives the semiconductor from the semiconductor The available energy information transmitted by the manufacturing device; the feeding device side determining unit, the basin t' determines the value of the available energy indicated by the available energy information received by the receiving unit, and is a special value 'and a server side output portion' And outputting the output corresponding to the judgment result of the above-mentioned feeding machine side #断部. According to this configuration, the user does not need to patrol the available usable months b by visual inspection or the like, and can perform the inspection for whether or not the usable energy used in the semiconductor manufacturing apparatus is abnormal or not in the short-term. Further, a plurality of tests which can be used for a plurality of semiconductor manufacturing apparatuses can be performed almost simultaneously at a predetermined time. Further, by automating the inspection of the available energy, it is possible to eliminate the omission or the error of the measurement value of the available energy or the like. The second Buben Maoming group management system is based on the group management system order, the available energy information acquisition department determines the state of the device itself, and obtains the aforementioned available energy information according to the state of the device itself. According to this configuration, the test for each can be surely checked, and the field can be entered τ> Further, depending on the state of the semiconductor manufacturing apparatus, the available At times > ^ .. ^ , x is used for the month b, whereby the collection of the usable energy data can be waited for the semiconductor manufacturing apparatus to be in a specific state. In addition, in the group management system of the present invention, in the group management system, the available energy information acquisition unit obtains the specific makeup energy + in the state specified in advance, and obtains the shape and does not vibrate. The aforementioned available energy information. 128454.doc 200901269 According to this kind of defect ', -r ▲ t has become a time when the field of the available energy is specified for the winter season... 々 田 之 之 , , 确 确 确 确 确 确 确 确 确 々 々 々 The test of k 'for example, the periodic test and the correct test. Former group management system, in the above group management system, " Salty Essence acquisition department in its own device for each of the available designation of the shape of the Get all the available energy information under your heart. According to this configuration, the semi-conductor and the skin-like p-m ν body manufacturing apparatus can transmit only the assets required for the inspection to the server device f, and can be reduced. , not the delivery of the required information. - the group management system of the present invention is in the group management system, and the semiconductor manufacturing apparatus further includes a state information acquisition unit that reads: information indicating the state of the device itself, that is, status information; The available energy information obtained by the available energy information acquisition unit and the state information will be described. (5) the status information of the f is sent to the server device; the receiving unit receives the available energy information f status information transmitted from the semiconductor manufacturing device; and the feeding device further includes a server side obtaining unit 'According to the status information received by the receiving unit, obtaining the available energy information received by the receiving unit; the server side determining unit of the server device determines the available energy information received by the receiving unit The server and the device side obtain the value of the available energy indicated by the available energy information. According to the configuration, the server device can only determine the data required for the inspection and take the vacancy, and does not need to select I. The processing of the data carried out by the semiconductor manufacturing apparatus can reduce the processing performed by each semiconductor manufacturing apparatus. Further, the configuration for selecting such data can be omitted. 128454.doc •10- 200901269 In the group management system of the invention, the server-side acquisition unit acquires each semiconductor manufacturing device in a predetermined designation The available energy information, and the available energy information corresponding to the state information indicating that each semiconductor manufacturing device is in a specific state. According to this configuration, the timing of the time and the like can be surely deduced for each available energy. The inspection, for example, the periodic inspection, etc., and the correct inspection can be performed. In addition, according to the state of the semiconductor manufacturing device, (4) the available energy information can be obtained, so that the available energy data can be collected to the semiconductor m to be in a specific state. In addition, in the group management system of the present invention, in the group management system, the status of the servo (four) acquisition material sent by each semiconductor manufacturing apparatus is not specified by each available energy information. In the case of the present, the available energy information corresponding to the status information is obtained. - According to the composition, the available energy information can be obtained according to the available energy information, and the correct test can be performed. For a semiconductor manufacturing process that performs a special process on a substrate to be processed, I includes: an available energy information acquisition unit, which obtains a representation The information for the value of the i or more usable energy used in the semiconductor manufacturing process can be used as the energy information; the judging unit judges whether the value of the available energy indicated by the available energy information obtained by the available energy information obtaining unit is μ. The fixed value and the output unit perform an output corresponding to the judgment result. According to the configuration, the user does not need to perform the inspection by visual inspection or the like, and can perform the short-time and correct operation. The use of the semiconductor manufacturing apparatus 128454.doc 200901269 can be used to test whether an abnormality or the like can be generated. Further, a plurality of tests usable for a plurality of semiconductor manufacturing apparatuses can be simultaneously performed at a predetermined time. In addition, the semiconductor manufacturing apparatus of the present invention is in the semiconductor manufacturing apparatus described above, and the available energy information acquisition unit determines that it is disposed. State, and obtain the aforementioned available energy information according to the state of the device itself. According to this configuration, it is possible to surely perform an inspection for the appropriate state for each available energy and to perform the correct test. Further, the information on the available energy is obtained based on the half state: the information can be used to wait for the usable energy; the collection of the semiconductor manufacturing device becomes a specific state. Further, the half (four) material preparation of the present invention is set as described above, and the available energy information acquisition unit acquires the available energy information when the state of the predetermined timed device is a specific state. According to this configuration, it is possible to specify the timing of the time or the like under the (4) appropriate for each available energy, for example, the periodic inspection of the temple and the correct inspection can be performed. Further, in the semiconductor manufacturing apparatus of the present invention, the available energy information is obtained in a state in which the semiconductor usable energy information acquisition unit is in a state in which the device itself is in accordance with each available energy. i Based on this composition, the appropriate available energy can be obtained based on the available energy information, and the correct test can be performed. b. [Effects of the Invention] The semiconductor manufacturing apparatus 128454.doc 200901269 according to the present invention can be tested for available energy in a short time and correctly. [Embodiment] Hereinafter, embodiments of a semiconductor manufacturing apparatus and the like will be described with reference to the drawings. In the embodiment, the same components are denoted by the same reference numerals, and the description thereof will be omitted. (Embodiment 1)

Ο FIG. 1 is a conceptual diagram of a group management system of the present embodiment. The group management system is, for example, a system for managing a manufacturing device such as a semiconductor manufacturing device or a liquid crystal panel manufacturing device. Further, the group management system includes one or more semiconductor manufacturing apparatuses U (from the semiconductor manufacturing apparatus 11a to the semiconductor manufacturing apparatus 11n) (only η means an arbitrary number), the server apparatus 12, and i or more clients (clients). Device 13 (client split (1) to client device - (only the claws represent any number)). One or more semiconductor manufacturing apparatuses 丨丨 and the server apparatus 12, and one or more of the client apparatus 13 and the server apparatus 12 are connected via a communication line, respectively, and information can be transmitted and received. Each device may be connected by, for example, a network such as an Internet, a wireless or wired L AN (Local Area Network), or may be connected by a Bluetooth (10) e t_h) (registered trademark) or the like. It is connected by wireless communication. In addition, it can be connected by a bus (10) 1 knal Bus, a universal bus bar, or an iieei 394 (standard bus interface). However, the connection method between the devices is not limited. In addition, the organization that transmits and receives information may be a communication organization or a communication organization. 128454.doc 200901269 Semiconductor Manufacturing 1 is a device for performing a specific semiconductor manufacturing process on a substrate to be processed, an exemplary wafer, or the like. The semiconductor device 11 is, for example, a film formation process. A conductor is subjected to various processes such as a film formation process, an etching process, and a thermal oxidation process. In the case of the semiconductor manufacturing apparatus u, the example of the semiconductor manufacturing apparatus 11 is shown in FIG. 2 in Patent Document 2, Patent Document 3, and the like. The semi-conductor manufacturing apparatus U is a so-called preload (lGad lGek) which is closably attached to the other chambers as a 1 (-g) chamber and is supplied with a vacuum gas as an inert sound producing gas. ) The device of the chamber structure. The semiconductor system is composed of the following main parts: a process chamber of the processing chamber (10) which is specially treated for the wafer of the object to be processed; and as a preload to h, it is provided for insertion and removal. As a transfer mechanism g of a wafer b of the holding body, the holding system accommodates a plurality of wafers w, for example, 100 wafers, with respect to the process conduit ;; and is carried out into the chamber core for relative to the preload The chamber h is moved out of the wafer w; the E box (the coffee box is called the 哭 容 埠 〇 (P〇rt) ac, which is formed in the unloading room ab; the take-in mechanism is used for this purpose. The box storage container is taken into the loading and unloading chamber: a container storage stage af for temporarily storing the taken-in box storage container ad; the box removing platform is called for receiving In the box storage container ad, if each r name · iv & I a 匣 C C is taken out; the container transfer mechanism ah, in the loading and unloading room ab into the (four) box storage container ad receiving and receiving; and the holder body The chamber ai' will be placed in the wafer boat between the preloading chamber h and the loading and unloading chamber a to accommodate. In addition, regarding the semi-guide in Fig. 2 The other parts and operations in the example of the manufacturing apparatus W are known in the prior art (refer to the patent literature), so the province 128454.doc • 14-200901269 is described in detail. In addition, in order to constitute a semiconductor manufacturing, it is patented. In the case of the outside of the chamber of the first embodiment, in the present embodiment, it is preferable that the above is not limited to the semiconductor manufacturing device 11a to the semiconductor device. The manufacturing device for processing may also be a feeding device. The manufacturing process of the same process is carried out, for example, the process parameters (re, '曰曰) for the information of the specific process. The parameter is controlled, and the semiconductor manufacturing device U system can be used to process the measurement information of the semiconductor device and detect the abnormality, and the device and the message are sent to the server device 12, which constitutes a bad "曰+ Γ about +conductor The manufacturing apparatus 11 has a measurement information for performing measurement in the semiconductor manufacturing and manufacturing apparatus n, and detects or processes the information in the semiconductor to send the mm device to == omit the description. The device 12 is a so-called group management system that uses a group of a plurality of semiconductor manufacturing devices, and the feeder device (10) can receive and store the semiconductor manufacturing device from (10) or more. u The information of various measurement information and the like transmitted, and has a function of performing frequent detection with respect to the measurement information. The feeder device 12 may have a semiconductor manufacturing device for storing or performing processing from the semiconductor manufacturing device u. In addition, the configuration in which the server device 12 processes the measurement information in the semiconductor manufacturing device U to detect an abnormality is described in the following description, and the description is omitted here, 128454.doc 200901269. In addition, the client device 13 is an information processing device that is sent to the field and is abnormally sent to receive the processing result of the different lifting detection issued by the device 12. And the order corresponding to the processing result is 3: The block diagram of the group management system of this embodiment. In addition, for the sake of convenience of explanation, although it is half-baked, „ 置 及 11 and the customer she signed 13 as a case for the first meaning, only half of the body to make farmland 1〗; 3 end of the device 13 Can be plural.

The semiconductor manufacturing apparatus U includes an H available energy information acquisition unit 112 and a transmission unit 113. ^ One (1), sensor (1) is used to detect more than one of the available energy used in the semiconductor manufacturing process. The sensor 丨u ° is the measured physical temperature, or the physical quantity of pressure, flow, voltage, current, etc., :r sense _ is the second check: = the amount of detection is converted into appropriate information, example 2: also; It has the composition of outputting these. The output of the sensor (1) is a value information or a digital signal. The so-called available from i ^ ^ analog 仏唬 ' 〇 This refers to the semiconductor manufacturing process for the semiconductor manufacturing equipment called < electricity or gas, water and so on. Here, the exhaust pressure for supply and exhaust or the suction pressure for 1 m ρ ~ is also considered to be applicable. Usually, each sensor is inspected by a '4,1 a ^ -T m Λ, and the minute-conductor manufacturing apparatus 11 transmits the detected amount and the like to the body manufacturing apparatus, respectively. One or more sensing uses...+J J疋 The measuring object is different from the sensor of the same structure, and may also be a sensor including phase, ', and °. In general, 128454.doc -16- 200901269, although the sensor m repeatedly detects the amount of change at a specific timing of -determined or irregular, it can also be based on the indication that the amount of change outputted by the body acquisition unit ιΐ2 or the like is available. To detect the amount of change. Further, since the structure of the sensor is generally known as a power meter, a flow meter, a pressure gauge, etc., the description thereof is omitted here.

The U available energy information acquisition unit 112 is configured to acquire available energy information as information indicating the value of the available energy of (10) or more used in the semiconductor manufacturing process. Specifically, the available energy information acquisition unit 112 is configured to acquire available energy information as information indicating the value of the available energy detected by each sensor. The available energy information acquisition unit 112 receives, for example, information indicating the detection amount output from each sensor (1), and converts the detection amount into information indicating the value of the available energy to obtain the available energy information. In addition, in the case where each sensor 111 outputs information for indicating the detected value, the detected value can be directly obtained as the available energy information. In addition, the available energy information may include an identifier for indicating the available energy information. The available energy information obtaining unit 112 may also indicate the amount of change taken by each sensor ln. The poor news is obtained directly from each sensor 丨11, and can also be read:: the information indicating the amount of change output by each sensor m is accumulated in the memory. The available energy information acquisition unit 112 obtains the available energy information from the sensor 1" according to a predetermined specific: % or a specific trigger. = The energy information acquisition unit 112 obtains the available energy information from the sensor lu. Too: Triggering or the like is not limited. The available energy information acquisition unit (1) is judged to determine the state of the semiconductor manufacturing device n, and it is preferable to take the available energy information according to the "device" itself. The state of the so-called self-disposal, I28454.doc 200901269, "This (4) stock operation mode (4) is the state of the tumbling state" The body I is placed in a state in which a predetermined treatment is performed in advance. According to the status of the farmer's day and night, it can be specified in the state of its own device to become π~, clear, with or without the available energy information. Also: in the state of its own device has not become In the case of the specified status, 'with or without the available energy information. In particular, when the energy can be === pre-specified timing, and the state of the device itself is, in the case of the state of the device, the available energy information is taken to be a specific time point (time) ), for example, 19 knives in the morning or a specific period, such as the period from the last (four) to the morning, such as 1 in the morning. The concept of time and later. 2% of the time when the worker Wei f and so on ^ ' can also be referred to by the user ^. In the case where the available energy information acquisition unit 2 is set to be at 6 o'clock in the morning before the time of the pre-designation, when the available energy information is taken at the initial time of the operation, it becomes 6 o'clock in the morning. In the case of the device itself = turn state, the available energy information is obtained at that time. 2. At 2 o'clock in the morning, if the device itself is not in operation, the available energy information is obtained at the beginning of the operation state, and the energy information acquisition unit 112 is based on the available energy information. In the case of the information, the dream J is used in the case where the shape of the monthly device is individually specified, and the information is used in the case where the device is designated according to the available energy information. In addition, $ hours, etc. can be specified individually. The above (4) 2 uses the semi-conductor f system, and the sturdy and sturdy day-to-day search system can make the time ί = 1 (the clock) (10), which is not shown, rotate, "to detect. In addition, users can also wait. Operation input 128454.doc -38- 200901269 The time of the device, etc., for example, the specified timing. It can be judged by the date of the #1 1 day, etc. For example, the method of detecting the device itself, which is not shown, can also be used to display the operational status of the control body of the status information, and the operation status of the process parameters. The input of the energy, the "韭-Xuansi's obstacle$$" is judged to be in the running state, the turning state (turning state), or it can be judged whether the information of the person who has been outputted as = state is from its own device. It is judged whether Ζ is in the running state or not in the running state. In addition, the second break is not 1 1 - ή - όΓ Α 用 用 用 用 匕 112 112 112 112 112 112 112 112 112 112 112 112 112 112 112 To determine the status of the device itself. - "The work performed by the gums (task) Pui pay information can take part in any way to identify one or more sensors can ⑴. In the second example, more than one input terminal is associated with the sensor lu, and ^ is used to indicate the information of the detection amount of the person input from each wheel terminal, and the second is determined to be associated with the input terminal. The information of the person input by the device (1) may also be used to identify that the information of the sensor (1) is included in the information indicating the test. The connection between each sensor (1) and the available energy information port IU 12 may be a wired connection or a wireless connection. It is preferable to include information for indicating the time at which the available energy information is obtained, or to establish a correspondence first, in the available month t*. The information for indicating the time is obtained from, for example, a block (not shown) of the semiconductor manufacturing apparatus. Further, the identification information of the available energy for identifying the object to be inspected may be included in the available energy information, or the identification information for detecting the available sensing: § 111 may be included or the correspondence may be established. The available energy information acquisition unit 112 can usually be implemented from an MPU (Micr〇_Pr〇cess〇r Unit, Micro Device 128454.doc -19-200901269) or memory. The processing order of the available energy information obtaining unit U2 is usually implemented in software, and the soft system is recorded in R〇M (Read

Recording media such as Memory, read only memory). However, it can also be implemented by hardware (dedicated circuit).

The transmitting unit 113 is configured to transmit the usable information obtained by the available energy information obtaining unit 112 to the server farmer 12. The fine 113 may also transmit the available energy information after obtaining the available energy information, or obtain all the sensors I at the available energy acquisition unit 112. The time when the available information can be sent, the timing of the transmission, etc. are not limited. Further, the transmitting unit 113 can determine the available energy information transmitted by the semiconductor manufacturing device by the feeding device 12, and can also read the identification information of the device or the like from a storage unit (not shown). Take, ^ and the available energy information to establish (4) system materials. The material part 113 is realized by a (four) fine wireless or wired communication mechanism, but can also be realized by a communication mechanism. The server device 12 includes a receiving unit 121, a feeder side determining unit 122, and a server side output unit 123. The server device U is connected to a semiconductor manufacturing device that performs a specific semiconductor manufacturing process for a substrate to be processed via a network or the like. The receiving unit 121 is configured to receive the usable information transmitted from the semiconductor manufacturing apparatus U. The available energy information received is, for example, temporarily stored in a memory or the like. The receiving unit m can also receive the identification information of the semiconductor manufacturing apparatus u transmitted in association with the usable energy-supplied information from each of the semiconductor manufacturing apparatuses u. In this case, the available energy information can also be correlated with the identification information of the semiconductor manufacturing device and (10). The receiving unit (2) is usually implemented by a wireless or wired communication mechanism by means of 128454.doc -20. 200901269, but it can also be realized by a mechanism for receiving and transmitting. The server side determining unit 122 determines whether or not the value of the available energy indicating the available energy information received by the receiving unit 121 is a specific value. The specific value is specifically the value indicating the value of the available energy information that is different from the usable energy information, or the range of the value. For example, the upper or lower limit of the range of the specific value or the threshold value of both of them is stored in advance in a storage unit such as a memory (not shown), and the server side determination unit 122 is used for reading and receiving. The threshold information corresponding to the available energy information received by the unit 121 is determined, and it is determined whether the available energy information received by the receiving unit 121 falls within the range indicated by the read threshold. The threshold value distinguished by the available energy information may also be set to a value different from that of the semiconductor manufacturing apparatus. The available information S is about which of the available energy sources, for example, based on the identification information of the available energy contained in the available energy information. Further, the threshold value for the above-mentioned abnormality is not limited to a specific value specified in advance. For example, as a determination process as to whether or not the m value is the same, the value of the usable energy for indicating the usable energy information received by the receiving unit m may be the same as that obtained from the other one or more semiconductor manufacturing devices. The energy information can be used to perform (10), and the operation of 帛(4) (such as coffee) is performed to determine whether or not any of the comparison results is within the range of the normal display. The server side determination unit 122 is usually implemented by Mpu, memory, or the like. The processing order of the feeding device side judging unit 122 is usually implemented by software, and the soft system is recorded on a recording medium such as R〇M. However, it can also be implemented by hardware (dedicated circuit). 128454.doc • 21 · 200901269 The server side output unit 12 3 is output based on the judgment result of the server side determination unit 12 2 . The output based on the judgment result is, for example, a representation of an alarm indicating that an abnormality has occurred. In addition, the judgment can be used to indicate that the semiconductor manufacturing device is terminated based on the abnormality of the available energy! 】 The manufacturing process, or the output of an alarm, etc., the command of the conductor manufacturing device i 1 (c〇mmand) 2 is transmitted. In addition, an e-mail indicating that an abnormality is generated in the available energy is transmitted to the pre-designated client device 13. In addition, the state of the k-device 11 is abnormally detected during the execution of the process. The output may be used to indicate that the semiconductor system/process (wafer standby) or interrupt (wafer discharge) or device stop: etc. is temporarily stopped. In addition, the state of the semiconductor manufacturing device u is 怠The output of the case of the transition = U detection can also be used to indicate the command (i 〇 ck) or the stop of the device, etc., such as the coincidence of the output chain 123, for example, from the correlation with the available energy information. The identification information determines the half of the abnormality of the judged usable energy = ^ set 11. The output described herein includes the printing of the (4) Ding printer, the sound wheel, and the external pen. For example, the output of the semiconductor manufacturing device u can be considered, for example, the concept of including the σ σ, etc. The output device of the speaker or the like. The side wheel of the feeding device can be output! II = display or ::: Body, or output-driver software device and The device driver or the like device or the client device 13 includes a guest-receiving portion and a guest 128454.doc and a client-side 200901269 output portion 132. The client-side receiving portion 131 is configured to receive the slave-feed device H. The information of the judgment result of the sent-on-service device side judging unit 122 is transmitted. For example, the client-side receiving unit j 3 i is configured to receive information indicating that an abnormality is generated in the available e-mail transmitted by using the e-mail. 'It is also possible to receive a testimony as to which of the semiconductor manufacturing devices u have developed, and whether it is a matter of concern about whether or not the available energy is available. The emails described herein include

The so-called WEB mail. Macro cold, mountain, a, & |Λ_ A _ customer knowing side receiving unit (3) is realized by wired or wireless step\. In addition, 'in the abnormal notification information using e-mail: down' may also include e-mail software, etc., or to compose the MPU or memory. The client ^ output unit 132 is for outputting the abnormality notification information received by the client side receiving unit (3). Here, the display of < input + # &, externally, the concept of the transmission of the display, the storage of the memory medium, and the like. For example, you can wait for the memory..., the poverty alleviation is accumulated on the hard disk, and the abnormal notification information of the 'steps 撼 - - 4, ΔΡ 7 is displayed on the display, etc. 'This accumulation can be considered to include Or the test shore does not include the output part of the output unit 132, and the output side of the output side of the output unit is 32. It can be realized by the driver software and the output device of the dedicated device device of the device. The human body or the output will be described with reference to the flowchart of FIG. 4, and the semiconductor manufacturing device will be described as an example. It is assumed that the semiconductor manufacturing device can use the integer π or more of the system to detect 丄 < The sensor k (l gkgs) of the sensor is used by the second H 4 available energy information I28454.doc -23- 200901269 The department 112 obtains information about the available energy of the kth . (Step S401) The available energy information acquisition unit 112 substitutes j into the counter k. (Step S 4 0 2 ) The available energy information acquisition unit 2 determines whether or not the timing of acquiring the kth available energy information is obtained. For example, it is judged whether or not the time specified as the time for obtaining the kth available energy information has passed. If the timing of the kth available energy information is obtained, the process proceeds to step S4〇3, and if it is not the timing, the process proceeds to step 84〇6. In addition, in the case where the available energy information is repeatedly obtained periodically or irregularly, the kth available energy information may be obtained after the kth available energy information is obtained at the timing of obtaining the kth available energy information until a new kth available energy is obtained. When the timing of the information arrives, it is judged that it is not the timing for obtaining the kth available energy information. (Step S403) The available energy information acquisition unit i丨2 determines whether or not the state of the kth available energy information is obtained by the semiconductor manufacturing apparatus 1 1 of the own device. For example, when the available information is obtained, information indicating whether or not the state in which the semiconductor manufacturing apparatus 11 is required is stored in a memory or the like (not shown), and the information of the memory and the like and the state of the representation itself are set.乂Compare information to determine if it is the status of the available energy information. If the state of the kth available energy information is to be obtained, the process proceeds to step S4〇4, and if the right is not the state to be acquired, the process proceeds to step S406 〇a (step S4〇4). The information acquisition unit 112 obtains the first available energy X, the body 5, and obtains information indicating the available detection amount output by the kth sensor 111, and converts the obtained information into, for example, a number. 128454.doc -24 - 200901269 Value, etc., to obtain available energy information. In the available energy information, the information of the kth available energy information is included in the information, or the correspondence is established. When the date when the information is available is available (step S405), the transmitting unit 113 transmits the information to the server device 12 in step s4. The service is available (step S406) the available energy information obtaining unit 112 sets the counter.

(Step S407) The available energy information acquisition unit 112 determines the counter J

Big. If it is larger than s, return to the step just now, if it is s or less: 乂: Next, return to step S402. In addition, the semiconductor manufacturing device may include a receiving control unit (not shown) and the like, and when receiving information such as a command from the server device 12, the receiving device of the semiconductor manufacturing device 11 or the like receives the feeding device. The information of the command or the like transmitted by the device is based on the processing of the command or the like: it is executed by the control unit of the semiconductor manufacturing apparatus 11 or the like. For example, in the case where the server device 12 outputs a command for indicating an alarm that an abnormality is generated in the usable energy used by the semiconductor manufacturing device, the receiving unit may receive the command and control it. The semiconductor manufacturing apparatus U outputs an alarm by the control of the part. In addition, here, although the available energy information obtained is sent to the server device 12 at the time of obtaining the available energy information, the available energy can be obtained at the time when the plurality of available energy is available. The information is sent to the server device 12 in batches. Further, in the flowchart of Fig. 4, the processing is terminated by the power-off (〇 ff) or the interruption of the processing. 128454.doc -25- 200901269 The specific operation of the server device of the present embodiment will be described below using the flowchart of Fig. 5. (Step S501) The receiving unit 121 determines whether or not the available energy information is received. If there is reception, the process proceeds to step S5〇2, and if it is not received, the process returns to step S501. η (Step S502) The server side determination unit 122 reads the upper limit value and the lower limit value of the threshold value corresponding to the available energy information received in step S501, which is stored in advance in a memory medium or the like that is not shown. . In the case where only one of the upper or lower limit is specified, only the square is read. The threshold corresponding to the available energy information is obtained by using the identification information indicating the available energy or the identification information of the semiconductor manufacturing apparatus U included in the available energy information as a search key or the like. (Step S503) The server side judging section 122 judges whether or not the value indicated by the usable energy information received in the step s5〇i is equal to or higher than the lower limit value read in the step (4). When the value is equal to or greater than the lower limit value, the process proceeds to step S504. If the process is not lower than the lower limit value, the process proceeds to step S5〇5. In addition, in the case where the unread & π Λ u wood λ is taken to the lower limit in step S502, here

Omitted. J (step S504) the server 丨 丨 i ^ / J 断 β 122 is judged that the available energy information received in step S5 所 is represented by < value 疋 is the upper limit value read in step S502 the above. If it is the upper limit, in the case of s^〇1 ? ^, the process returns to the step, and if the right is not the upper limit of the upper limit value, the process proceeds to step S505. In addition, it is not read in step S502, and is omitted. In the case where the upper limit is not taken, the process is (step S505) that the server side rim 12 is to be able to receive the available energy information in step S5CU, for example, by e-mail or the like 128454.doc *26-200901269. The information on the abnormality of the usable energy used by the corresponding semiconductor manufacturing apparatus 11 is transmitted to the client device specified in advance. (Step S506) The servo thief-side output unit 23 transmits the semiconductor manufacturing apparatus corresponding to the available energy information received in step S5〇1 for execution and execution in the semiconductor manufacturing apparatus. The information of the specific processing order, etc., in the case of an abnormality. The command is, for example, a command for outputting an alarm indicating that an abnormality has occurred in the semiconductor manufacturing apparatus u, or a command for causing the semiconductor manufacturing apparatus u to stop an abnormality. Then, it returns to step S501. Further, in the flowchart of Fig. 5, the processing is terminated by the interruption of the power supply or the interruption of the processing. / / Briefly explain the action of the client device 13. The client side receiving unit 131 repeatedly determines whether or not the information corresponding to the determination result of the server side determining unit 122 transmitted from the server device 12 has been received, and if there is reception, the client side output unit is 32. The output client side receiving unit 131 receives and frequently notifies the beacon. In addition, the client side receiving unit 13 1 receives the information transmitted by the server device 12 by, for example, an e-mail or the like; and: causes the client system output unit 132 to display the message indicating that the e-mail has been received. Thereafter, the information transmitted from the server device 12 is displayed when the user or the like is received by a receiving unit or the like (not shown). Next, a specific example of the group management system of the present embodiment will be described. The schematic diagram of the group management system is the same as that of Fig. 1. In this case, it is assumed that i semiconductor manufacturing apparatuses u have a plurality of senses 128454.doc 27· 200901269 detector 111. Each of the sensors n1 is configured to repeat the measurement of the usable month b utilized in the semiconductor manufacturing apparatus 11 at specific time intervals, for example, at intervals of one second, and to indicate the amount of available energy detected. The information is output to the available energy information acquisition unit U2 and the like after a detection. Figure 6 is an energy management table for managing the correspondence between the plurality of sensors (1) and the available energy measured by each of the sensors (1). The available energy management table has the identification information of the "sensing H name" as the sensing information of each sensing 11111, and the available energy of each sensing °r ° 1 kg test, which is available as the name of the available energy. "This name", as a unit of the usable energy value obtained from the available energy output from each sensor, I 乂6Ώ μ sheep position", and as input terminals respectively connected with respective sensing benefits in (not The "input terminal number" is compiled as an attribute. ^In addition, FIG. 7 is the acquisition of the state of the semiconductor device 11 for specifying the timing of obtaining the available energy information and obtaining the available energy information. The timing state is obtained. The timing state is obtained. The system has the above-mentioned "sensor name", the "疋寺" as the timing to be obtained, and the designation (V, + conductor manufacturing). The "state" of the state of the device is attributed to the "state" of the greed, as the genus of the genus. The "timing" is the time of the daily 拄 (2). In addition, the "characteristic energy" will be in the obtained timing state management table. , — "', from the class - you / 曰 圮 之 之 之 之 「 及The "form ~," table is not used to indicate the amount of available energy output from each sensor corresponding to "111 钤山> 偷 ”, such as the timing and semiconductor of Beixun. In the case of manufacturing equipment, it is also called: «· 4 , Λ 5 哉 Do not want to measure the available energy of the shellfish, although it is used in the available energy of the moon, it is also listed in the center. Use "sense crying", but as long as the available energy can be identified, ^°° can also use the above-mentioned "available energy 128454.doc -28· 200901269 name", or "input terminal number, 篝, v &峒10, glaze is now found, U replaces the “sensor 庠 庠 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , For the time when the "timed" attribute has been _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ , obtaining information indicating the operating state of the target = engraving - 11 and comparing the status of the recording instructing representation and the table Specifically, the current time of the asset status is set to "take: part" and 2 will first obtain the timing status management table: 'the most available energy information' "timing" attribute and the current time: "The recording of the first time has been recorded" "Timed sensor available:: The Feng conductor manufacturing device 11 does not currently execute the process parameters, and the information on the operating state indicated by the current half obtained by the Bayer acquisition unit 112 If it is set to "Device u 「 "心得尹", then it is judged whether the "status" attribute of the record "Sex: two s: °:" is ~Γ11 Note, that is, "怠转申,.扃士和I, 々 In the case of "S001 1", the "sensor state of the semiconductor device manufacturing device u" is broken, and the target energy information acquisition unit (1) determines that the "sensory name" is obtained. In this case, the detection amount of the available energy outputted by the device (1) is "S00lj. Next, from the management table shown in Fig. 6, the name J is the record W of "S001". Detect "Into I28454.doc" in the "_ Record" of the "Sensor Terminal Number". Further, via the eight-terminal terminal, the wheel 2 -29-200901269: information indicating the amount of detection of the available energy that is detected by the thief 111 connected to the input terminal of the number of the "P001". Further, the information indicating the detected amount is converted into the detected value of the unit indicated by the "record" attribute of the same record t. Here, for example, the detection value obtained by the conversion of the detection amount is set to 4 "95". Furthermore, the composition includes the following available energy information: the detection value · 'the sensor name of the same record I'; and the current date, "2_5/22 G9: GG: 1G" information. Thereby, the available energy information of the sensor 111 is obtained. The available energy information of the available energy information acquisition unit 112 is transmitted to the server device 12. In addition, it is assumed that "TE5G1" which is the identification information of the semiconductor manufacturing apparatus η as the transmission destination is added to the available energy information. Here, as an example 1, a case will be described in which each of the available energy information can be acquired and transmitted to the server device 12. However, after a plurality of messages are temporarily accumulated in the memory or the like, the batch transmits a plurality of available monthly information to the server device 丨2: The second available energy information obtaining unit 112 compares the acquired timing state management^ I have recorded the "timing" attribute and the current time, and judged that the "timing" attribute of the column "" has not been executed before the semiconductor manufacturing device 11 §, and is not available. If the information of the operating state of the device U in the unit 112 is set to "the second = the name of the tester" is the record of "the coffee", and the judgment attribute, that is, the "h" attribute is consistent. "S002," determines that the "sensor name" is... the "status" attribute of the record is "turning to the middle", and the operating state of the semiconductor manufacturing device n before the display 128454.doc -30·200901269 Inconsistent attributes. Thereby, the available energy information acquisition unit 112 determines the detection amount of the available energy output from the sensor 1U whose "sensor name" is "S002" at the current time point. Then, the available energy information acquisition unit 112 compares the attribute of the "fixed car Μ M a ^ 疋 day f" of the next record of the material state management table with the current time, and determines the "sensor name" 4 "S003". The "timing" attribute of the record is not related to the current moment, nor is it a moment before the current moment. Thereby, the usable energy acquisition unit 112 determines that the detection amount of the usable energy output from the sensor lu having the "sensor name" of "S〇〇3" is not obtained at the current time. The same process repeats the same process for the record of the available energy information that has not been acquired after the entire record of the obtained timing state management table is repeated. Here, it is assumed that the time has elapsed and the time is "9: 〇5", and at this time, the semiconductor manufacturing facility is started!

Further, in this case, by repeating the above-described processing by the available energy information acquisition unit 112, the record of the sense state name "^ rs〇〇2" of the acquisition timing state management table is obtained. The "timing" attribute is better than the current one. The available energy information acquisition unit 112 determines that the % of the "timing" genre L matches the current time. Then, since the semiconductor manufacturing apparatus U is configured to execute the process parameters, the information indicating the operating state of the semiconductor manufacturing apparatus 11 currently received by the usable information acquiring unit 112 is "in operation". Furthermore, it is judged whether the "sensor name" is "s" = the "status" attribute of the recorded status is "the attribute", that is, "in operation", the "sensor name" is determined as I28454.doc of the record "S002" • 31 - 200901269 The state of the operation is "the attribute of the operation state of the operation φ, and the operating state of the operation state" is determined by the current semiconductor manufacturing equipment 112. The detection amount of the "supplied from S002" outputted by the sensor name detector 111 is used. Then, from the record list of the pipe name "_2" shown in FIG. 6, the "sensor terminal is replaced by the search sensor" and the "input code number" included in the record is obtained. , 俶 口 mouth ra - + ton in 丨 P002" and used to indicate that the input terminal of the "^ n, ^ . ”, flat #u is sensed as the output of the available energy output of m Wei, 丨 夕 1 1 3 Furthermore, the detection value of the early position indicated by the property of Beixun 'converted to phase % recognition, 乂 冋 s recorded early position' in the test. Here, the example ^ is set to "19" by detecting the detection value obtained by the conversion. Going again, the subject> A person constitutes the following available energy information: the detected value; the attribute value of the "salty, 4 nickname" attribute of the same record; and the current date of "2007/05/22 〇9 · η ^ z(10).〇5 . 15" information. In this way, you can get the information about "S002", the purpose, 丨 gg,,, Λ m. Available energy

The information obtained by the L acquisition unit 112 is transmitted to the feeding device 12°. Further, when the time is set to "9:1", the semiconductor manufacturing apparatus 11 continues the execution of the process parameters. Then, as described above, the available energy information of the sensor lu for "S003" is obtained and transmitted to the server device 12. In the server device 12, the available energy information including the sensor name of "Give" transmitted from the semiconductor manufacturing device 11 is first received by the receiving portion 121. Then, the memory corresponding to the received available 35 information is read from the memory 豸, etc. 128454.doc -32· 200901269 to specify the upper limit value of the upper limit value of the value indicated by the available energy information. The upper limit value or the like is set to be pre-designated by the user or the like. Fig. 8 is a positive management table for managing information for specifying a range of normal values. The normal range management table has the "spot identification information" as the identification information of the semiconductor manufacturing industry, and the "lower limit" of the lower limit of the range of the normal value as the upper limit of the upper limit of the range of the normal value. The "value" is used as the unit of the usable energy. The server side determining unit 122 searches for the half-turn manufacturing of the usable energy information received by the receiving unit 121, which is added to the normal range pipe. In the record of "TE501" and "Device J", the attribute of the sensory benefit name included in the available energy information is the same as the "sensor name". Record. Furthermore, the "lower limit value" and the upper limit value of the record must be read. Here, the first step is to read the "9 〇" / port "F two lower limit values and "125 | as the upper limit value" by receiving the information of the available energy of the s piano name. The server side judgment unit 122 is a comparison unit. Read the value of "90" of the limit m" and the usable energy received by the receiving unit 1 2 1 by 95" of the value indicated by the month b. Here, it is judged that it is a lower limit or more. Next, the server side determining unit 122 compares the "upper limit value" of the discounted item 5 with the "25" of the available second team received by the receiving unit 121. . Here, it is judged that it is below the lower limit. Thereby, it is judged that the value indicated by the available energy information received by the receiving unit 121 is a normal value. Therefore, the server side judging sections 122 128454.doc - 33 and 200901269 judge that the usable energy detected by the sensing 1 § 111 corresponding to the sensor name "S001" of the semiconductor manufacturing apparatus 11 is normal. The servo 1 s side output unit 丨 23 is an available energy information received by the storage unit 1 and stored in a storage unit (not shown), and a determination result of the usable energy information by the server side determination unit 122. Figure 9 is a diagram showing the available energy information received by the receiving unit 121 and the judgment of the result of the judgment of the available &

: Results management table. The judgment result management table has "device identification information" as identification information attached to the semiconductor manufacturing device capable of enabling information, and the above-mentioned "sensor name" included in the available energy information, as the available information. The "date" of the information on the date of the available energy information, the "value" of the available energy as the available energy information, and the value indicating whether the value indicated by the usable energy information is normal. The "evaluation" of information, and as an attribute. In addition, the "evaluation" is the positive rain. The value indicated by the unavailable energy information is the normal value range, and "flat 4" and "abnormal" indicate that the value indicated by the available energy information is out of the normal range. In the same manner, in the same manner, the server side judging unit 122 continues the same judgment with respect to the available energy corruption sequentially received by the receiving unit i2i. The available energy information of the sensor name including the "received" received by the receiving unit 121 is "4 (SCcm) for the available energy information, and = is the lower limit obtained from the normal range management table. The value is "5", and the value indicated by the available energy information is not the normal range. In this case, the word server side output unit 123 is as shown in FIG. 9 and accumulates the result of the judgment of the servo-cry when the usable information of 128454.doc • 34· 200901269 is available. And the semiconductor manufacturing device "ΤΕ501 ^ sensor "S003" detects the ΤΕ5〇1" of 13 by the electronic )). The "send to the pre-designated client device in the client device 13 is transmitted by the side notification to the exception generating portion 131 for receiving (10) the email, as shown in the figure: and output by the client side. The part shown in Figure 10 is shown in the figure.

即可 It can be used for the operation of the customer's "fourth" semi-conductor "TE501" sensor. * In the test object /, hang, you can also use the available energy information in advance. Name, and the service „12 indicates that the abnormal information together will detect the abnormality, and the available energy name included in the pair can be sent to the client device 13', thereby making an abnormality in which available energy. Displayed on the client device. The 'feeder side output portion 123 is for transmitting the detected energy to the semiconductor manufacturing device u corresponding to the available energy information and the identification information, and transmitting the sensor 111 named by the sensor named S003. An abnormal message, such as an instruction. In semiconductor manufacturing equipment! In the case of i, the command transmitted from the server device 12 is received by a receiving unit (not shown), and the control unit (not shown) executes the command to make the sensor named "S003". U1 indicates that the warning display using the abnormality is displayed on the control panel or the like, whereby the user operating the semiconductor manufacturing apparatus can notify the sensor S003" of the available energy as the detection target. An exception was generated. 128454.doc -35· 200901269 The above is based on the aspect of the present embodiment, the information on the usable energy is obtained from the semiconductor manufacturing device U, and the server device 12 uses one or more + conductors to manufacture the available energy. The information is used to determine whether an abnormality has occurred in the available energy, and the determination result is rotated, so that the user can use the semiconductor manufacturing device in a short time without having to patrol the available energy without visual inspection or the like. Available energy test m = system: Gong Wei, etc. 'Because there is configuration 2. . In the case of Taiwan's left and right semiconductor manufacturing , ,, if the user checks the available energy by visual inspection, it is almost impossible to simultaneously test the available energy, the formation of the :: form, which can be almost the same as the = = test at the preset time. . In addition, by "automating the inspection of available energy":; eliminating the omission of the measured value of the available energy, etc., or the error or the like. In addition, according to the semiconductor manufacturing device, it is possible to reliably perform the test for each available energy. For example, for the present, the value in the shape of the appropriate shape is important. In the case of the operating state of the device, the device can be made in the state of the device U to obtain the b: The second: the external pull is based on the data of the semiconductor manufacturing energy, until the "b" can wait for it to be available until the device becomes a specific state. The state of the available energy can be judged by the (four) device 12, whereby the judgment processing means 12 of the state of the available energy of the lamp is simplified. In addition, the word + conductor manufacturing device]] 11-face will obtain the available energy timing ¥ body 1 agricultural sigh, etc. set one by one in each semiconductor 128454.doc -36 - 200901269 manufacturing device, but in a server Since the setting is set in the device 12, the trouble of setting and the like can be simplified. Further, by configuring the semiconductor manufacturing apparatus U to perform the measurement of the usable energy used by the own apparatus, it is possible to automatically measure the usable energy at the same time as the setting of the semiconductor manufacturing apparatus ii. The composition is imported 'so that it is easy to introduce the composition for measuring the usable energy.

A modification of this embodiment will be described below with reference to Fig. 11 . In this modification, in the above-described embodiment, the server device 12 is omitted, and in the above-described semiconductor manufacturing device 11, the same judgment as that of the server side determining unit 122 of the server device 12 is performed. The determination unit 124 is provided with an output unit 125 similar to the server side output unit 123 instead of the transmission unit 113. The determination unit 124 performs the information on the available information with respect to the available energy information acquisition unit 112 and the server side. The same judgement of the judgment unit is the same as the method of determining the other means, the configuration, and the like. The determining unit m is configured to determine whether the value of the published energy indicated by the available energy information obtained by the available energy acquisition unit (1) is specific two, and the output object is the same as the server side output unit 123: , for the second: in the usual::, or by e-mail for example, the client is not the same as the other, the same as the other structure 123. However, the wheel-out unit 125 is a sensor that is ':, what is the output side of the sensor side sensor'. The semiconductor manufacturing device of the device 1 is itself turned off = the sensor that detects the abnormality!] The abnormality of the available energy is detected as long as it is indicated. . Displayed on the control surface 128454.doc -37- 200901269 board, etc. That is, the result corresponds to the rounded-out side of the shape 11 of the process H in the process of the first part of the 125 system can be used in the semiconductor manufacturing device itself for the case of the (four) test, the discharge or stop, etc. (wafer standby) or interrupt (out-of-wafer, semiconductor command, etc. output to the device itself. The state of this ^ 11 is constantly detected during the transition, and in the case of In the case of the above-mentioned tenth, the detection of the stop, etc., is performed by the ten-person execution process chain or the device 4 U or the command, etc. In the modification, the same as in the first embodiment In addition, since the server device is not required, centralized management of the device cannot be performed, but the setting for communication at the time of setting the semiconductor manufacturing device can be simplified and can be easily introduced to detect such (Embodiment 2) The group management system according to the present embodiment is configured to detect the available energy from the semiconductor manufacturing apparatus in the group management system according to the above embodiment. Information, in order The available energy information is sent to the server device, and the server device obtains the available energy information obtained at a specific timing from among the available energy information, and the semiconductor manufacturing device is in a specific state. The abnormality of the semiconductor manufacturing apparatus is detected using the available energy information. Fig. 12 is a block diagram showing the group management system of the present embodiment. In the same manner as in the first embodiment, one or more semiconductor manufacturing apparatuses 21, server apparatus 22, and more than 128454.doc-38-200901269 are placed 13 in order to simplify the description. Therefore, the semiconductor manufacturing equipment and the customer are devices. The configuration of the client device 13 will be described as an example. The configuration of the client device 13 is the same as that of the first embodiment, and the description thereof will be omitted. The first conductor manufacturing device 21 includes one or more sensors 111 and usable energy information. The acquisition unit 212, the transmission unit 213, and the status information acquisition unit 214. The configuration of the sensor 111 is the same as that of the above-described embodiment i. This is omitted. f - ί uses this as the information acquisition; f is used to indicate the available energy information for the information about the value of the available energy above Hgl used in the semiconductor manufacturing process, and has the same embodiment 1 above. The available energy information acquisition unit 112 is similarly configured. The available information acquisition unit does not selectively acquire the available energy information from the information output from the respective sensors 111 at a specific timing, but from the respective sensors for detecting the available energy. 1 According to the information that each sensor outputs in order at a specific timing, the available energy information is sequentially obtained. The available information of y state is different from that of 2. In addition, it can be judged that the available energy information has been obtained. The timing is such that the information indicating the moment when the available energy information has been obtained is included in the information, or the corresponding Guan·Sun' is established first. Other than this, it is the same as that of the above-described embodiment i, and therefore, it will be omitted. The status information acquisition unit 2U is for acquiring status information indicating the status of the own device, that is, the state of the semiconductor manufacturing device 21. Specifically, the status information indicates the state of the state in which the semiconductor manufacturing apparatus 21 is in the timing at which the available energy information is acquired by the available energy information acquiring unit 212. 128454.doc -39· 200901269 The status information is, for example, information indicating the state of the semiconductor manufacturing apparatus 2 and the information indicating the correspondence between the information at the time when the state is determined. The information at the time when the state is judged can be obtained from a clock or the like not shown. Or = the status information acquisition unit 214 can obtain the information 2 of the information indicating the state of the device itself at the time when the available energy information acquisition unit 2 can use the available energy information acquisition unit 212. The available energy and the state information of the state of the semiconductor manufacturing at the time when the available energy information is available are transmitted and transmitted. The state in which the conductors are formed 21 is the same as the state of the semiconductor device w described in the above-described embodiment K. The status information acquisition unit 214 can also obtain the repeated status information at a specific timing that is constant or not, and can also use the state change of the semiconductor manufacturing apparatus 21 as a trigger to acquire the status information. In addition, it is also possible to obtain the amount of money that is lost when the available energy information acquisition unit 212 obtains the available energy information. The available energy information acquisition unit 212 can also be used to access the information indicating the station of the device itself and the state of the device. For example, it is also possible to output information indicating the situation, such as information indicating the operation state of =, etc., in the control unit or the like, for example, to determine whether it is an operation state or an operation state (rapid state). If the state is obtained, it can be judged that it is clear that it is the operating state: this = pay indicates the state information of the state. The status information acquisition system can be viewed from the MPU or the memory, etc. The order is usually implemented in software. The status information acquisition unit 214 is the same as the recording medium. The soft system is recorded in the hardware (dedicated circuit). 128454.doc 200901269 The transmitting unit 21 3 is configured to transmit the status information to the server unit 1 13 in addition to the available energy information in the transmitting unit 1 13 described in the above embodiment. The other configuration is the same as that of the above-described embodiment, and therefore the description thereof will be omitted. The server device 22 includes a receiving unit 221, a server side acquiring unit 224, a server side determining unit 222, and a server side output unit 丨23.

The configuration of the server-side output unit 123 is the same as that of the first embodiment except that the output corresponding to the determination result of the server-side determination unit 222 is performed. The receiving unit 221 is configured to receive the status information in addition to the available energy information in the receiving unit 12A described in the above embodiment. The status information received by the receiving unit is stored, for example, in a memory medium or the like. The other configurations are the same as those of the above-described embodiment, and therefore the description will be omitted. The server side acquisition unit 2 2 4 acquires the available energy information received by the receiving unit 221 based on the status information received by the receiving unit 2 2 . The information acquisition is based on the state information, and the state in which each of the semiconductor manufacturing apparatuses 21 acquires each state information is determined based on the status information, and is obtained in accordance with the state of each semiconductor manufacturing apparatus. Specifically, the (4) device side acquisition unit 224 obtains the state energy of the specific state that is specified in advance by the receiving unit 221, and the usable energy corresponding to the state in which the device is not specified in advance. News. In this case, the information corresponding to the status information is too ten, k j is used, for example, the acquired time is the same as the status information, or almost ^ 丄 ^ J is used for information. For example, 'the server side acquisition unit 224 obtains the name of the stem of the table... The status of the waiter is not the specific state 128454.doc -41 · 200901269 The information of the time when the status information is obtained, and The information of the moment establishes the available energy information of the corresponding relationship. Or, in the case of establishing a correspondence between the available information and the information obtained at the time of obtaining the available energy information, the available energy information corresponding to the state information indicated as the specific state of sadness may also be obtained. . Further, in particular, the server side acquisition unit 224 may be configured to acquire available energy information 'obtained at a predetermined timing of each semiconductor manufacturing apparatus 丨1 and to correspond to status information indicating that each semiconductor manufacturing apparatus is in a specific state. Can information. The timing described here is the same as that of the Dingri Temple described in the description # of the usable information acquisition unit U2 in the above-described embodiment. The server side acquisition unit 224 is usually implemented from an MPU, a memory, or the like. The processing sequence of the server side acquisition unit 224 is usually implemented by software, and the soft system is recorded on a ROM-specific recording medium. However, it can also be implemented by hardware (dedicated circuit). The server side determination unit 222 has the above-described embodiment except that it is determined whether or not the value of the available energy indicated by the available energy information acquired by the server side acquisition unit 224 is a specific value! The server side determining unit 22 has the same configuration. Therefore, the description will be omitted here. Next, the operation of the semiconductor manufacturing apparatus will be described using the flowchart of FIG. Here, it is assumed that there are three sensors (3 integers or more) for detecting the available energy, and each sensor is repeatedly outputted at a preset timing to indicate the detection amount. Information person. (Step SI301) The available energy information acquisition unit 212 is connected! Substitute in the counter. (Step S1302) The available energy information acquisition unit 212 determines whether or not the information indicating the detection amount of the available energy output by the kth sensor 111 is received. In the case of accepting 128454.doc • 42- 200901269, proceeding to step sl3〇3' and in the case of not accepting to step S1306 (step (10) 3), the available energy information obtaining unit 212 converts the information accepted in step (10) 2, for example. For numerical values, etc., and obtain available energy information. In this case, the information is set such that the available energy information includes the date when the available energy information is obtained. In addition, it may be set such that the available energy information order includes information indicating the kth available energy information or the like, or a correspondence relationship is established. (Step S1304) The status information acquisition unit 214 acquires status information. Further, 'here as an example' temporarily stores the acquired status information in a memory or the like which is associated with the available energy information acquired in step S1303. For example, 'status information and available energy information are managed by the same record of the database used to manage the information. In addition, although it is set to obtain status information at the time of obtaining the available energy information, it is also possible to determine whether it is the period in which the status information is to be obtained, and to obtain the available energy information at different times when the available energy information is to be obtained. (Step S1305) The transmitting unit 213 transmits the available information received in step sn3 and the status information acquired in step S1304 to the servo device 22. In this case, the available energy can be sent to the corresponding state. (Step S1306) The available energy information acquisition unit 212 increments the counter k by i ^ (step S1 307). The available energy information acquisition unit 112 determines whether or not the counter k is larger than s. If it is larger than s, the process returns to step S4〇1, and if it is s or less, the process returns to step S402. In addition, the semiconductor manufacturing apparatus 21 may include a receiving unit, a control unit, and the like (not shown), similarly to the semiconductor manufacturing apparatus of the above-described embodiment, 128454.doc-43-200901269. Although it is hereby sighing that the available energy information and status information are sent to the server device 22 at the time of obtaining the available energy information and status information, it is also possible to provide a plurality of available energy information or status information. The hour point is sent to the server device 22 for the available energy information and status information batches obtained. In addition, as long as the correspondence between the available energy information and the status information can be judged, the available energy information and the status information can also be separately transmitted. Further, in the flowchart of Fig. 13, the processing is terminated by the interruption of the power supply or the end of the processing. The specific operation of the server device in the present embodiment will be described using the flowchart of Fig. 14. (Step S14G1) The receiving unit 221 determines whether or not the available energy information and the status information have been received. In the case of reception, the available energy information and the status information are accumulated in a memory medium or the like (not shown), and the process proceeds to step S1402, and in the case of non-receiving, the process returns to step S4. (Step S1402) The server side acquisition unit 224 reads the information indicating the timing of obtaining the available I information corresponding to the available energy information received in step S1401 from a memory medium or the like (not shown), and indicates that the acquisition is available. The information on the status of semiconductor manufacturing m. In a memory medium (not shown), it is assumed that information indicating the timing at which the available energy information is not obtained in advance corresponding to each available energy or each sensor 11 1 and semiconductor manufacturing indicating that the available energy information is obtained are stored. The information of the status of the device 21. (Step S1403) The server side acquisition unit 224 determines whether or not the time indicated by the information indicating the time at which the available energy information is obtained by the available energy information received in 128454.doc - 44 - 200901269 in step Si4〇i is represented. The time at which the timing indicated by the information of the timing of the available energy information obtained in step S1402 is obtained, that is, whether the available energy is obtained at the timing indicated by the information indicating the timing. In the case of engraving, the process proceeds to step s 1404, and if it is not the time within the timing, the process returns to step s14. In addition, in the case of recurring or non-scheduled repetitive access to available energy information, etc., the timing of obtaining an available energy § hole is once obtained after the available energy information is obtained, until the time when the available energy information is regained. Up to now, it is judged that it is not the timing for obtaining the available energy information. (Step S1404) The server side acquisition unit 224 determines the state of the semiconductor manufacturing apparatus 2 indicated by the status information corresponding to the available energy information received in step sl4〇i, and indicates that the acquisition is performed in step s丨4〇2. Whether the state indicated by the information of the state of the semiconductor manufacturing apparatus 21 at the time of the usable energy information obtained is the same, that is, whether it is the usable energy information obtained by the state indicated by the information indicating the state. This agreement can be set to be partially consistent, and the like. In the case of consistency, the process proceeds to step S14〇5, and if it is inconsistent, the process returns to step S1 4 01. (Step S1405) The server side acquisition unit 224 acquires the available energy information received in step SH〇i. (Step S1406) The server side determining unit 222 reads the upper limit value of the threshold corresponding to the available energy information received in step s 14〇1, which is stored in advance in a memory medium (not shown), and the like. Limit. In the case where only one of the upper limit value or the lower limit value is specified, only one party is read. The corresponding 128454.doc -45- 200901269 limit corresponding to the available energy information is obtained by using the identification information for indicating the available energy or the identification information of the semiconductor manufacturing device π included in the available energy information as the search key =/ (step S1407) The server side determination unit 222 determines whether or not the value indicated by the available energy information acquired in step si4〇5 is equal to or greater than the lower limit value read in step si4〇6. If the value is equal to or greater than the lower limit value, the process proceeds to step S1408. If the value is equal to or greater than the lower limit value, the process proceeds to step §14〇9. Further, in the case where the lower limit value is not read in step S1406, this processing is omitted.

C Ο (Step S1408) The server side determination unit 222 determines whether or not the value indicated by the available energy information received in the step Si4〇5 is equal to or less than the upper limit value read in the step s 5 〇 2 . When the value is equal to or lower than the upper limit value, the process returns to step SM〇1, and if it is equal to or lower than the upper limit value, the process proceeds to step si4〇9. Otherwise, in the case where the upper limit value is not read in step S1406, this processing is omitted. (Step S1409) The server-side output unit 123 transmits information indicating an abnormality in the available energy used by the semiconductor manufacturing apparatus corresponding to the available energy information received in step S, for example, by e-mail or the like to the advance. The specified client device. (Step SMiO) The server side output unit 123 generates a difference between the transmission and the available energy used in the semiconductor manufacturing apparatus 21 for the semiconductor manufacturing apparatus (4) corresponding to the available energy information received in step §1. : Shape: Information such as the order of handling of special features. The command example 2 shows an alarm indicating that an abnormality has occurred in the semiconductor manufacturing apparatus n or an instruction to stop the semiconductor manufacturing apparatus 21 from stopping an abnormality. 128454.d〇i • 46- 200901269 Then, it returns to step S1401. Further, in the above-described flowchart, in step S401, the available information of the storage medium or the like may be accumulated in the receiving unit 221 in step S1401, and the processing from steps 81402 to 1410 may be sequentially repeated to perform the processing. b is judged by the available energy information received by the receiving unit 221, and the like. Further, in the flowchart of Fig. 14, the processing is terminated by the interruption of the power supply or the interruption of the processing.具体 Next, a specific example of the group management system of the present embodiment will be described. The schematic diagram of the group management system is the same as that of the group management system shown in the figure, in which the semiconductor manufacturing apparatus is replaced with the semiconductor manufacturing apparatus 21 and the feeder apparatus is replaced with the server apparatus 22. First, in this case, as in the specific embodiment of the above-described embodiment, a semiconductor manufacturing apparatus 21 has a variable measurement of the usable energy used in the semiconductor manufacturing apparatus 11 at a specific time interval, for example, a pseudo second. A plurality of sensors 1 1 1 . The first/T energy information acquisition unit 212 sequentially determines whether the information of the detection amount of the two unavailable energy has been output from each sensor (1), and uses the information that is rotated in the output two to constitute the available energy. The information of the value indicates that the information output of the Ketian At times and the quantity is obtained: the information of the engraving, including the detection of the indication. The available energy information of the identification information of the sensor 111 obtained by the sensor 111 is obtained, for example, temporarily stored in a memory or the like. At the time of the news, the department 214 obtains status information indicating that the available energy is used as the information indicating the operational state of the operational manufacturing device 21 and the information of the state of the configuration. Furthermore, the status information of 128454.doc •47-200901269 is simultaneously established with the available energy information obtained in step SI303, and the status information is temporarily memorized in the memory or the like. The transmitting unit 213 reads the available energy information temporarily stored in the memory or the like, and the status information associated with the available energy information, and transmits the status information to the server device together with the device identification information as the identification information of the semiconductor manufacturing device 21. twenty two. For example, as shown in Fig. 15, the information of the available energy information and the state information for establishing the correspondence relationship may be transmitted to the server device 22 in a manner of maintaining the correspondence relationship. (In the server device 22, the receiving unit 22 receives the available energy information transmitted from the semiconductor manufacturing device 21, the status information associated with the available energy information, and the identification information of the semiconductor manufacturing device 21, and The manner in which the corresponding relationship is maintained is temporarily stored in a memory or the like (not shown). Here, it is assumed that the available energy value indicated by the received usable energy information is "95", and the sensing included in the available energy information is included. The identification information of the device is S001", and the time at which the usable energy information is available is "9: u 〇〇. 〇〇", and the status of the semiconductor manufacturing device 21 indicated by the status information is "turning to the middle" In addition, the device identification information of the semiconductor manufacturing apparatus 21 is "TE 5 01." Next, the server side acquisition unit 224 obtains a correspondence relationship with the available energy information received by the first receiving unit 22i. The device identification information "TE501" of the semiconductor manufacturing device 21 and the usable energy information received by the receiving unit 221 and detecting the available energy corresponding to the available energy information 1 Identification information "S001" of Fig. 16. Fig. 16 is a semiconductor manufacturing apparatus and a sensor of the semiconductor manufacturing apparatus 21, which are stored in a storage unit (not shown) stored in the server device 22. (1) Each-combination indicates the information indicating the timing at which the available energy information is to be obtained in advance, and the correspondence indicating the state of the body manufacturing device 21 to obtain the available energy information. (4) The n-side acquisition timing state management table The server side acquires the timing state, and the device has the attributes of "identification information", "sensor name", "timing", and "state". The device identification value tfL" is the identification information of the manufacturing device. The server name acquisition unit 224 is the same as the acquisition timing state management table shown in Fig. 7. The server side acquisition unit 224 is in the server side acquisition timing state management table shown in Fig. 16 . By searching for the record of "spot identification information" as "Ding coffee" and "factory sensor name" as "_", the "time" attribute value and the "status" attribute value of the detected record are obtained. . In this case, the attribute value of the "9:(10)"& value of the "timer" attribute value is obtained. The genus! The servo n-side acquisition unit 224 first compares and indicates that the receiving unit 221 = "9: 〇〇·· _", which is the information of the time included in the energy information, and the "timing" attribute value of the timing status management table obtained by the server side shown in Fig. 16. "9: 〇 〇 , , , , , , , 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The time is set to not be performed - the middle is then compared with the "turn" of the status information received by the receiving unit 22 1 and the server side acquisition timing state management table shown in Fig. 16 is taken as 128454.doc. • 49- 200901269 The "status" attribute value is "in transit" and is judged to be consistent. As a result, the server side acquisition unit 224 determines that the available energy information received by the receiving unit 221 is the available energy information 'obtained at a predetermined timing of each semiconductor manufacturing apparatus' and is expressed as each semiconductor manufacturing apparatus. The available energy information corresponding to the status information of a specific state. The server side acquisition unit acquires the available energy information received by the receiving unit 22 1 . Next, the server side determination unit 222 uses the device identification information "te5〇i" of the received semiconductor manufacturing device 21 corresponding to the available energy information: and the identification information of the sensor ln included in the available energy information. In the same manner as the specific example of the above-described embodiment, the upper limit value of the value indicated by the available energy information acquired by the server side acquisition unit 224 is obtained. lower limit. In addition, the use of the obtained upper limit value and the lower limit value, similar to the specific example of the above-described embodiment, is whether the value indicated by the available energy information obtained by the server side acquisition unit has been generated in the available energy. Judgment of abnormality, etc. In addition, the processing after the processing performed by the servo 四(4)-breaking unit 222 is the same as the above-described specific example (4), and therefore, the description is omitted here, and the receiving unit 221 is represented by the usable energy information received from the semiconductor manufacturing apparatus_ The available energy value is "19", the identification information of the sensor (1) included in the available energy information is "class 2", and the available energy is available: the time at which the available energy is not available is "9: 〇〇: 4", and the state of the semiconductor manufacturing apparatus 21 indicated by the status information is "turning to the middle". The == part 224 is configured to establish a correspondence relationship with the available energy information, and the device identification information "TE5G1" of the device 21 is available in the available energy information received by the receiving unit 128454.doc • 50-200901269 22i. The identification information "s〇〇2" of the sensor lu that can be used for the information. The server side acquisition unit 224 is configured to acquire the timing state management table on the server side of the map 16 by the search, and the "spot identification "flying" is deleted and the "sensor name" is "_". Record. Furthermore, the "timing" attribute value and the "status" attribute value of the detected record are obtained. In this case, you get the attribute value of "9:" value of "Time" attribute value. Further, the server side acquisition unit 224 first compares the information indicating the time included in the available energy information received by the receiving unit 221.

J 15", and the timing state management table = "9: 00" of the "timing" attribute value obtained from the server side shown in Fig. 16 and judged as timing. In this case, an example is given for a period of less than one second, which is set to be a failure to make a judgment. In addition, in the case where the time when the "timing" attribute value is "9: 〇〇" is displayed, it is determined that the timing is the same. Here, in the case where the "timing" attribute value indicates the time after "9: 01", it is determined that the timing is not coincident, and the determination processing for the available energy information received by the receiving unit 221 is the same. end. ^ Then, the "in progress" of the status information received by the receiving unit 221 and the "in operation" of the J "status" attribute value obtained from the server side as shown in FIG. 16 are compared, and it is judged. Inconsistent. Thereby, the usable information obtained at the time when the semiconductor manufacturing apparatus 21 is in the state of the material is judged, and the judgment processing of the available energy information received by the receiving unit 221 is completed. ^ 128454.doc -51- 200901269 Next, it is assumed that the receiving unit 221 has a difficult value from the semiconductor manufacturing energy information. "The identification information of the available sensor (1) received by 19 1 is "Caf 2": ^ The time at which the available energy is indicated by the package is "9 ·· Q5" # The state of the semiconductor manufacturing device 21 that can be used by the company is "in operation", and the state information indicates the use of the server side acquisition unit 224 16 = g± ^ m ^ ^ * If the server side does not obtain the "table", the "in-time" attribute value of the "9: 〇〇" and "status" attribute values of the "timing" attribute value is obtained in the same manner as above. . Further, the feeder side acquisition unit 224 first compares "9 n 15" indicating the information of the time included in the available energy information received by the receiving unit 221, and acquires the timing state from the server side shown in FIG. The management table takes the "time:" attribute value of "9: (8)" and judges that the timing is the same. Then, the "in progress" of the status information received by the receiving unit 221 is compared, and the "state" attribute value obtained by the feeding device side of the feeding device side shown in Fig. 16 is "in operation", and is judged. For consistency. As a result, the feeder-side acquisition unit 224 determines that the available energy information received by the receiving unit 221 is the available energy that is obtained by each semiconductor manufacturing apparatus U at a predetermined timing, and is specific to each semiconductor manufacturing apparatus. The state information of the state corresponds to the available energy information. The server side acquisition unit ... obtains the available energy information received by the interface unit 221. In the same manner as described above, the server side judgment unit 222 determines whether or not an abnormality has occurred in the available energy. Thereafter, the same processing is repeated, and the judgment of the abnormality of the usable energy, the notification of the abnormality, and the like are performed. 128454.doc •52- 200901269 Above, according to this embodiment, it is set to! More than one semiconductor manufacturing device obtains the information of the available energy, and whether the abnormality is generated by the feeding device _ breaking in the available energy and outputting the judgment result, so that the user can no longer need to patrol the available & The sourcing and the use of the enamel can be performed in a short time and correctly for the usability of the semiconductor manufacturing device. Further, by setting (4) of the light-weight conductor manufacturing apparatus 21 and obtaining the Z energy = information, it is possible to surely perform the appropriate field for each available energy. The next test. Further, by setting the information of the available energy in accordance with the state of the semiconductor manufacturing apparatus u, it is possible to wait for the collection of the available energy until the semiconductor manufacturing apparatus 21 is in a specific state. In addition, the (four) server device 22 is configured to obtain the available energy information that is transmitted at a predetermined timing and that is available in the state information indicating that the semiconductor manufacturing device is in a specific state. The device performs judgment processing for obtaining available energy information, determination processing of the state of available energy, and the like, and simplifies the configuration of each semiconductor manufacturing apparatus η. In the first embodiment, as in the second embodiment, the 匕月匕贝Λ知知112 receives the available energy information sequentially from the sensors of the respective sensors 111 that detect the available energy. And by using the same information as the processing of obtaining the above-mentioned available energy information in the obtained monthly information, the available energy information obtained by the specific timing of the soil/纟, and is used for the semiconductor & The usable energy information obtained in the case of the state of the special state can be stored, for example, in a memory not shown. 128454.doc -53 - 200901269 In this case, as in the second embodiment, the status information acquisition unit 2 1 4 that acquires status information indicating the status of the device itself, that is, the state of the semiconductor manufacturing device can be provided. The semiconductor manufacturing apparatus establishes a correspondence relationship between the state information acquired by the state information obtaining unit 214 and the available energy information, and uses the state information to determine whether the available energy information obtained by the available energy information acquiring unit 112 is The information available on the semiconductor manufacturing equipment in the case of a particular state.

Furthermore, the processing of this embodiment can also be realized by software. Furthermore, the software can also be distributed by software download or the like. Further, the software may be recorded on a recording medium such as CD_RQM. In addition, this point is also the same in other embodiments of the present specification. Further, the soft system for realizing the information processing apparatus of the present embodiment is the following program. In other words, the program is a program for causing a computer to execute the semiconductor manufacturing over-conductor manufacturing device for performing (4) on the substrate to be processed, so that the computer obtains the value of the d or more usable energy used in the semiconductor manufacturing device. The available information of the available information of the information can be obtained, and the available information obtained in the step of obtaining the available energy information can be sent to the server for transmission. Further, the program is for the electric service. The program for processing the servo device connected to the semiconductor manufacturing device of the semiconductor manufacturing device of the specific semiconductor manufacturing device, and the program for performing the following steps is received from the aforementioned one. The steps of (a) available for transmission by more than one of the abundance conductor manufacturing devices; determining the received in the aforementioned receiving step

The server can use the value indicated by the information to determine whether the value is a specific value of the server 128454.doc -54- 200901269 side judgment step; the server side output step of the output corresponding to the break result. In addition, the program is a program for causing a computer to execute a semiconductor manufacturing device that performs a semiconductor manufacturing device for a substrate to be processed: the following formula: and a program for causing the computer to perform the following steps: obtaining as a representation: in the semiconductor The available energy information acquisition step of the available energy information of the information available in the manufacturing process; determining the available energy represented by the available energy information obtained in the above-mentioned available information acquisition step = Whether it is a judgment step of a specific value; and a rotation step of output corresponding to the judgment result of the aforementioned judgment step ^. In the single (four) form, each process (each function) can be realized by a dispersion process. ...by a number of devices ▲ In addition, in the above program, the receiving step of transmitting the f-message step, etc. 'does not include by hard: ^ Jt. l . , _ Ding '^ processing', for example, sent by I The processing performed by the data machine or mediator in the step).处理The processing of the order (the computer that only binds the above program by the hardware can be singular. That is, the ensemble can be performed in addition to the above-mentioned various embodiments.) The upper communication unit (transmission unit) Etc.) Physicality::-:*Settings This is self-evident. The ground is implemented by a medium, and the present invention is not limited to the above, and is also included in the scope of the present invention, H, and can be variously changed' In the <target range, this is self-evident. 128454.doc • 55- 200901269 (Industrial Applicability) As described above, the group operation system of the present invention is utilized in a semiconductor manufacturing apparatus. , used to test the system 箸, 1 to test the use of the most applicable ones, especially for the system, etc. The available energy in the I 褒 【 【 【 简单 简单 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图The balance of the buried system is shown in Figure 2 as the same group ^.

j w g attack the system of this half of the example. One of the conductor reconstitution devices 11 is a block diagram of the same group management system. _ is a half flow chart illustrating the same group management system. Figure 5 of each action of the exhibition is a flow illustrating the action of the vocabulary device of the same group management system. Figure 6 is a chart showing the available energy management table of the same group management system.

Picture. Fig. 7 is a timing chart showing the acquisition of the same group management system. FIG. 8 is a diagram showing a normal range management table of the same group f system. Fig. 9 is a view showing a judgment result management table of the same group management system. Fig. 1 is a display example of a customer material set 13 of the same group management system. Fig. 1 is a block diagram of a variant of the same group management system. Figure 12 is a block diagram of the group management system of the second embodiment. Fig. 13 is a flow chart showing the operation of the semiconductor manufacturing apparatus of the same group management system, 128454.doc - 56 - 200901269. Figure 14 is a diagram illustrating the same group. Flow of the operation of the server device of the fresh system Fig. 15 is a schematic diagram showing the information of the same group of tubes. Figure 16 is a diagram showing the same group management table. The server side acquisition timing state tube of the processing system transmitted by the semiconductor manufacturing device of the control system [Description of main component symbols] 13 client device 11, 21 semiconductor manufacturing device 12, 22 server device 112, 212 available energy information obtaining portion 111 Sensors 113 and 213 Transmitting units 121 and 221 Connecting units 122 and 222 Serving side judging unit 123 Serving side output unit 124 Judging unit 125 output unit 131 Client side receiving unit 132 Client side output unit 214 Status information acquisition Part 224 Server side acquisition unit 128454.doc -57-

Claims (1)

200901269 X. Patent application scope: 1. A group management system, which includes more than one semiconductor manufacturing jujube, which performs specific semiconductor manufacturing on the substrate to be processed, and the device is attached to the device. The plurality of semiconductor manufacturing apparatuses are remotely connected; and the semiconductor manufacturing apparatus includes: (a) information acquisition unit, which obtains the value of one or more available energy used in the semiconductor manufacturing process. The information can be used as the energy information; and the transmitting unit, (4) the available energy information obtained by the front feed is sent to the server device; the server device includes: the receiving portion is received from the semiconductor manufacturing device. [Information]; < The server side judgment unit determines whether the value of the available energy indicated by the available unit received by the receiving unit is a specific value, and the judgment of the server side output unit and the sender system The output corresponding to the server side judgment unit 2. For example, the group management system of item 1, wherein: the available energy information acquisition unit determines the data itself The state of the dress is taken and the situation is worn, and according to 3. Please fail. The available energy information is described to the escort. For example, the group management system of the item 2, wherein the state of the device is a predetermined timing, and the aforementioned available energy information is obtained under the shape of the moon. 128454.doc 200901269 4. In the group management system of claim 2 or 3, the above-mentioned available energy information acquisition unit is in the case where the body is set to the state specified by each available energy information. (4) The group management system of claim 1, wherein the semiconductor manufacturing device obtains information indicating that the device is in a state of state, that is, status information; The information obtained by the Department of Access is sent to the server device; the recipient of the goods receives the previous energy information and status information; The server device may further include a server side acquisition unit, wherein the server side acquisition unit receives the available energy information received and received by the receiving unit, and obtains the servo of the receiving unit. The available energy of the server is received by the server. The judgment is received by the receiving department. The available information indicated by the server side of the data is displayed on the server side. J uses this value to determine whether it is a specific 6. The group management system of claim 5, wherein the value is obtained. The above-mentioned feeding machine side acquisition department obtains the available energy information obtained at the timing specified by each half, and the disk table is in advance. The state information of the device is in a specific state. Table 1 is a semiconductor system. The group management system of the item 5 or 6 is used for the towel. The server side acquisition unit is in each half state information table. The information on the available energy corresponding to the status information is obtained under the condition that the status is not specified by the available energy information. 128454.doc 200901269 Obtains the available energy information corresponding to the status information. The semiconductor manufacturing device performs specific processing on the processed substrate. The semiconductor manufacturing process includes: σ n nfL acquisition unit, which obtains information on the value of one or more available energy used in semiconductor manufacturing. The information can be used; & ^' Whether the value of the available energy indicated by the available energy information obtained by the 35 information acquisition unit is a specific value; and 'the department performs the input corresponding to the judgment result of the foregoing judgment unit. The semiconductor manufacturing apparatus of claim 8, wherein the available salt-to-acquisition acquisition unit determines the state of the device itself, and obtains the aforementioned available energy information according to the state of the device itself. 10. The semiconductor manufacturing device of claim 9, wherein The available energy information acquisition unit obtains the available energy information at a predetermined timing and the state of the own clothing is in a specific state. 11· ★ π-item 9 or 10 semiconductor manufacturing apparatus, wherein the aforementioned available energy information The acquisition unit obtains the available energy information in a state in which the device is in accordance with the state of the available energy information. The processing method is a semiconductor manufacturing device that performs a specific semiconductor manufacturing process on the substrate to be processed. Executed by the executor, and includes the following steps: Steps to obtain the information about the available energy used in the semiconductor manufacturing process can be obtained by using the information of 128454.doc 200901269 And the sending step, which will be paid in the above-mentioned second round of Atta At. The available information is sent to the feeding device. 13. A kind of information processing method, A semi-conducting 俨#", in the m-n^Wxb of the specific bobconduct manufacturing process for the substrate to be processed, the servo-connected device is connected to the servo device. The executor includes the following steps: a receiving step of receiving available energy information transmitted by more than one semiconductor manufacturing device from the ^^^^-r; ^ server side determining step, Α ^ m ^ , one In the receiving step, the receiving At 々 表示 所 所 , , , , , , , sil sil sil sil sil sil sil sil sil sil sil sil sil sil sil sil sil sil sil sil sil sil sil sil sil sil sil sil sil sil sil sil sil sil sil sil And an output corresponding to the judgment result of the server side judging step. 14 · An information processing method, performed on a semi-conductor performing a specific semiconductor manufacturing process on a substrate to be processed, performed in a 劁+conductor manufacturing apparatus, and including The following steps: The available information can be used to obtain the steps, the _ used in the manufacturing process, and the information on the value of the available energy in the semiconductor. The judgment step can be used. J: You are born i &am p; ^ /糸 determines whether the value of the available energy information obtained in the available energy information obtaining step is not a specific value; and... The output of Xiaomachi should be 15 · " kind of recorded, Gan β 4 is recorded in the system to enable the computer to perform a specific manufacturing process for the processing of the US board for the semiconductor manufacturing process of 128454. Doc 200901269 is a % of the processing, and the program is used to enable the computer to perform the following steps: The available information can be obtained (4), which is indicative of information about the value of more than one available energy used in the semiconductor manufacturing process. That is, the available energy information; and / send step 'the system will send the available energy information obtained in the pre-material energy information obtaining step to the server device. 16. - The recording medium 'is recorded to enable the computer to execute A program for processing a H device that is connected to one or more semiconductor manufacturing devices that perform a specific semiconductor manufacturing process on a processed r substrate, and the program is used to make a computer The following steps are: receiving a step of receiving the available energy information transmitted from the i or more semiconductor manufacturing apparatuses; and a server side determining step of determining the available energy indicated by the available energy information received in the receiving step Whether the value is a specific value; and a server side output step, which is an output corresponding to the judgment result of the aforementioned feeding machine side judgment step. 17_ A record "There is a record that causes the computer to execute by being processed The substrate is executed by the semiconductor manufacturing device of the semiconductor manufacturing process, and the program is used to cause the computer to perform the following steps: The semiconductor system can use the information of the value of more than one available energy used in the private use; the determining step is to determine the available energy indicated by the available energy blame in the aforementioned available energy information obtaining step. Whether the value is a specific value; and 128454.doc 200901269 output step, which is performed with the judgment result of the foregoing judgment step Corresponding output. (128454.doc