CN109801479A - A kind of monitoring of semiconductor processes and early warning system and its control method - Google Patents
A kind of monitoring of semiconductor processes and early warning system and its control method Download PDFInfo
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Abstract
The present invention relates to a kind of monitoring of semiconductor processes and early warning systems, comprising: data acquisition node, for acquiring monitoring data；Embedded system platform connects data acquisition node, for generating warning information when monitoring data are more than preset threshold；Warning module connects embedded system platform, for issuing alarm signal according to warning information；Cloud Server connects embedded system platform, for receiving and storing monitoring data and warning information；Remote control terminal connects Cloud Server, for obtaining monitoring data and warning information.System proposed by the present invention, including multiple optional data acquisition nodes, are analyzed and are handled to monitoring data are collected by embedded system platform, when monitoring data are more than preset threshold, generate warning information；Warning module according to warning information can alarm in time, can meet in laboratory the needs of to laboratory apparatus monitoring and early warning simultaneously.
Description
Technical field
The invention belongs to semiconductors manufacture auxiliary monitoring fields, and in particular to a kind of monitoring of semiconductor processes and early warning
System and its control method.
Background technique
Semiconductor fabrication process is the manufacturing process of IC manufacturing key, is generally required in Superclean Lab and ultra-clean
It is carried out in equipment, in addition, the growth of material generally requires for a long time, engineers 24 hours continuous prisons to be needed during this
Control, when something unexpected happened, need emergent management.But engineers are difficult to meet 24 hours conditions on duty, simultaneously as
The requirement of ultra-clean process, staff are not easy to frequently enter and leave.
By taking CVD technology as an example, it will appear aura when Material growth is abnormal more and disappear, abnormal bright spot phenomenon, if
This exception cannot be found and handled in time, will cause the damage of material, influence the normal process of device.But existing growth is set
It is standby to cannot achieve real-time monitoring and early warning mostly；Meanwhile a large amount of special gas and material are will use in microelectronics laboratory
Material, if leakage occurs accidentally will will cause serious casualties.
Summary of the invention
In order to solve the above-mentioned problems in the prior art, the present invention provides a kind of semiconductor processes monitoring with
Early warning system and its control method.The technical problem to be solved in the present invention is achieved through the following technical solutions:
The embodiment of the invention provides a kind of monitoring of semiconductor processes and early warning systems, comprising:
Data acquisition node, for acquiring monitoring data；
Embedded system platform connects the data acquisition node, for handling and transferring the monitoring data, and in institute
When stating monitoring data more than preset threshold, warning information is generated；
Warning module connects the embedded system platform, for issuing alarm signal according to the warning information；
Cloud Server connects the embedded system platform, for receiving and storing the monitoring data and the early warning
Information；
Remote control terminal connects the Cloud Server, for obtaining the monitoring data and the warning information.
In one embodiment of the invention, the data acquisition node includes: semiconductor growing equipment Image Acquisition
In node, control equipment dial plate Image Acquisition child node, temperature data acquisition child node and special gas concentration acquisition child node
It is one or more.
In one embodiment of the invention, the semiconductor material growth apparatus Image Acquisition child node is the first high definition
Camera；
First high-definition camera is electrically connected embedded system platform, for acquiring the first image and by first figure
As being sent to the embedded system platform；
The embedded system platform is also used to handle the first image, and the first image transmits by treated
To Cloud Server.
In one embodiment of the invention, the control equipment dial plate Image Acquisition child node is the second high-definition camera
Head；
Second high-definition camera is electrically connected embedded system platform, for acquiring the second image and by second figure
As being sent to the embedded system platform；
The embedded system platform is also used to second image being sent to Cloud Server and handle.
In one embodiment of the invention, the temperature data acquisition child node is temperature sensor；
The temperature sensor is electrically connected embedded system platform, for monitoring the temperature of semiconductor growing equipment, generates
Temperature information, and the temperature information is sent to the embedded system platform；
The embedded system platform is also used to when the temperature information is more than first threshold, driving temperature warning device
Heat alarm is issued, while generating the first warning information and first warning information is sent to Cloud Server.
In one embodiment of the invention, the special gas concentration acquisition child node is special gas detector；
The special gas detector is electrically connected embedded system platform, for monitoring containing for special gas in laboratory
Amount generates content information, and the content information is sent to the embedded system platform；
The embedded system platform is also used to drive exceeded audio alert when the content information is more than second threshold
Device issues concentration alarm signal, while generating the second warning information and second warning information is sent to Cloud Server.
In one embodiment of the invention, the warning module includes: temperature alarming device and super-standard alarm device；
The temperature alarming device is electrically connected the embedded system platform, for issuing heat alarm；
The embedded system platform is also used to the system platform when temperature information is more than first threshold and drives the temperature
Warning device issues heat alarm, while generating the first warning information and first warning information is sent to cloud service
Device；
The super-standard alarm device is electrically connected the embedded system platform, for issuing content alarm signal；
The embedded system platform is used to drive the super-standard alarm device to send out when content information is more than second threshold
Content alarm signal out, while generating the second warning information and second warning information is sent to Cloud Server.
Another embodiment of the present invention provides the control method of a kind of semiconductor processes monitoring and early warning system, packet
It includes:
Acquire monitoring data；
The monitoring data are handled and transferred, and when the monitoring data are more than preset threshold, generate warning information；
Alarm signal is issued according to the warning information；
Receive and store the monitoring data and the warning information；
Obtain the monitoring data and the warning information.
Compared with prior art, beneficial effects of the present invention:
1. system proposed by the present invention, including multiple optional data acquisition nodes, pass through embedded system platform pair
It collects monitoring data to be analyzed and handled, when monitoring data are more than preset threshold, generates warning information；Warning module meeting
It is alarmed in time according to warning information progress, can meet in laboratory the needs of to laboratory apparatus monitoring and early warning simultaneously.
2. system proposed by the present invention, using semiconductor growing equipment Image Acquisition child node and control equipment dial plate image
The two-way video monitoring of child node is acquired, while being met in laboratory to laboratory apparatus internal control and control equipment dial plate image
The demand of reading data.And network monitoring terminal is added, the discrepancy quantity of lab assistant can be mitigated.
3. system proposed by the present invention, using digital image processing techniques in instrument and equipment Instrument image carry out it is different
The processing of demand, after edge filter can more intuitive discovery aura it is abnormal, identify abnormal bright point information, meet different video
The demand of flow monitoring.
Detailed description of the invention
Fig. 1 is the configuration diagram of a kind of semiconductor processes monitoring and early warning system provided in an embodiment of the present invention；
Fig. 2 is a kind of semiconductor processes monitoring provided in an embodiment of the present invention and bright spot processing abnormal in early warning system
Preceding effect picture；
Fig. 3 is a kind of semiconductor processes monitoring provided in an embodiment of the present invention and bright spot processing abnormal in early warning system
Effect picture afterwards；
Fig. 4 is that a kind of semiconductor processes monitoring provided in an embodiment of the present invention and mean filter in early warning system are single
The algorithm model figure of member；
Fig. 5 is that a kind of semiconductor processes monitoring provided in an embodiment of the present invention and embedded system in early warning system are flat
The configuration diagram for reading, calling and transmitting in platform；
Fig. 6 is that a kind of semiconductor processes monitoring provided in an embodiment of the present invention and embedded system in early warning system are flat
The configuration diagram of platform；
Fig. 7 is the stream of a kind of semiconductor processes monitoring and the control method of early warning system provided in an embodiment of the present invention
Journey schematic diagram.
Specific embodiment
Further detailed description is done to the present invention combined with specific embodiments below, but embodiments of the present invention are not limited to
This.
Embodiment one
Referring to Figure 1, Fig. 1 is the frame of a kind of semiconductor processes monitoring and early warning system provided in an embodiment of the present invention
Structure schematic diagram.
A kind of semiconductor processes monitoring provided in an embodiment of the present invention and early warning system, comprising:
Data acquisition node, for acquiring monitoring data；
Embedded system platform connects data acquisition node, for handling and transferring monitoring data, and it is super in monitoring data
When crossing preset threshold, warning information is generated；
Warning module connects embedded system platform, for issuing alarm signal according to warning information；
Cloud Server connects embedded system platform, for receiving and storing monitoring data and warning information；
Remote control terminal connects Cloud Server, for obtaining monitoring data and warning information.
Particularly, in the specific embodiment of the invention, data acquisition node includes: semiconductor growing equipment Image Acquisition sub- section
In point, control equipment dial plate Image Acquisition child node, temperature data acquisition child node and special gas concentration acquisition child node
It is one or more.
Particularly, in the specific embodiment of the invention, semiconductor material growth apparatus Image Acquisition node is that the first high definition is taken the photograph
As head；
First high-definition camera is electrically connected embedded system platform, transmits for acquiring the first image, and by the first image
To embedded system platform；
Embedded system platform is also used to handle the first image, and the first image is sent to Cloud Server by treated.
Specifically, semiconductor material growth apparatus Image Acquisition child node is the first high-definition camera, using CMOS high definition
Camera OV5640, embedded system platform use ZYNQ platform, and the PL module of ZYNQ platform includes: driving CMOS high-definition camera
The iic bus of head OV5640, the hardware circuit and image processing unit for receiving data；PS module include: (SuSE) Linux OS and
Application program.After the starting of ZYNQ platform, it can normally start according to the startup file being placed in SD card, use bit stream file
PL module inside initialization then starts the (SuSE) Linux OS of PS module.User is clicked by the touch screen of ZYNQ platform
It can star the application program on (SuSE) Linux OS, i.e. starting CMOS high-definition camera OV5640, start to semiconductor growing
Image in equipment is acquired, and the first image after acquisition first carries out frame buffer on the DDR3 of ZYNQ platform, then via
DMA channel is sent to the part PL of ZYNQ platform.The part PL includes the image processing unit initialized on startup, image
Processing unit includes one single for detecting abnormal edge detection for the mean filter subelement of smoothed image and one
Member.Different bright spots may be generated when accident occurs in semiconductor equipment production process, edge detection module helps to supervise
Survey personnel are easier to find itself and position location.
Specifically, mean filter subelement by using the pixel of an internal matrix around phase vegetarian refreshments RGB color
Coloured silk substitutes the RGB numerical value of original pixel after averaging, using 3*3 matrix, 9 pixel values in adjacency matrix are added, then will
Divided by 8 after this nine pixel values additions, divide operations can also be replaced using shifting function here, this is because in reality
In experience, can reasonably it ignore divided by 8 and divided by 9 gap.
As shown in Figures 2 and 3, edge detection subelement has the place of mutation to detect pixel in image, that is, finds out
The most apparent place of grey scale change on image.Edge is essential characteristic and the most abundant place of image information of image.Having
In body experiment, bright spot generally means that abnormal generation in other words at edge, therefore the edge detection for carrying out image is conducive to naked eyes
It notes abnormalities and positions and is abnormal.Sobel edge detection method is one of common edge detection scheme.Its algorithm be by one from
Scattered first difference operator, for calculating the First-order Gradient approximation of brightness of image.First-order difference is exactly first derivative in fact
Approximation, and derivative equipment be functional value variation speed, in the picture, the position of each pixel is equivalent to one two
The brightness value of dimension coordinate system and image is then equivalent to the functional value of corresponding position.It can be seen that after carrying out derivation to image,
The derivative is exactly the variation speed of the brightness of image of equipment.When its variation is bigger, it is meant that the point is exactly the position at edge
It sets.Sobel edge detection method includes the matrix operator of two 3*3, corresponds respectively to X and Y both direction.By image respectively with this
Two operators carry out can be obtained by image in the difference approximation value of X and Y-direction after convolution algorithm.When gradient calculates it
Afterwards, it would be desirable to which appropriate threshold is set, that is when brightness change have how soon can be considered as image edge.By what is set
Threshold value is compared with calculated gradient, when gradient is greater than threshold value, it is believed that marginal point when this carries out table using black
Show, when calculated gradient is less than the threshold value of setting, it is believed that the point is slick spot, is indicated using white point.Finally, just
An available black and white and the image for showing image border.
As shown in figure 4, illustrating the implementation of Sobel edge detection method by taking a picture element matrix as an example.
Fig. 2-A is the 3*3 matrix of some pixel of the picture of hypothesis, and Fig. 2-B is 3*3 matrix of the difference operator in X-direction
Gx, Fig. 2-C is the 3*3 matrix G of difference operator in the Y directiony.The operator of target and X and Y-direction are done into convolution respectively, had:
Gx=(P3+2P6+P9)-(P1+2P4+P7)
Gy=(P7+2P8+P9)-(P1+2P2+P3)
The calculating of gradient needs GxAnd GyTwo components, in order to which operation facilitates us to use simple algorithm:
| G |=| Gx|+|Gy|
To complete the realization of edge detection.
Particularly, in the specific embodiment of the invention, control equipment dial plate Image Acquisition node is the second high-definition camera；
Second high-definition camera is electrically connected embedded system platform, for acquiring the second image and being sent to the second image
Embedded system platform；
Embedded system platform is also used to the second image being sent to Cloud Server and handle.
Specifically, control equipment dial plate Image Acquisition child node is the second high-definition camera, using CMOS high-definition camera
OV5640；Embedded system platform uses ZYNQ platform, and the PL module of ZYNQ platform includes: driving CMOS high-definition camera
The iic bus of OV5640 and the hardware circuit for receiving data；The PS module of ZYNQ platform includes: (SuSE) Linux OS and application
Program.After the starting of ZYNQ platform, can normally it start according to the startup file being placed in SD card, it is initial using bit stream file
PL module inside changing, then starts (SuSE) Linux OS.User can star by the touch screen click of ZYNQ platform
Application program on (SuSE) Linux OS, i.e. starting CMOS high-definition camera OV5640 are to start to control equipment list to laboratory
Second image of disk is acquired.The second image after acquisition is sent into the DDR3 of the PS module of ZYNQ platform via DMA channel
Memory carries out frame buffer, then the second image after caching is sent to Cloud Server and is handled.
As shown in figure 5, since the application program on (SuSE) Linux OS is developed under QT environment, wherein calling across flat
Platform computer vision library OpenCV and web socket Socket.Therefore, the application program on (SuSE) Linux OS can be completed
The calling of hardware, wherein monitoring data reading is realized by OpenCV, and monitoring data use net to the transmission of Cloud Server
Network socket Socket is completed.
Particularly, in the specific embodiment of the invention, temperature data acquisition child node is temperature sensor；
Temperature sensor is electrically connected embedded system platform, for monitoring the temperature of semiconductor growing equipment, generates temperature
Information, and temperature information is sent to embedded system platform；
Embedded system platform is also used to when temperature information is more than first threshold, and driving temperature warning device issues temperature
Alarm signal, while generating the first warning information and the first warning information is sent to Cloud Server.
Particularly, in the specific embodiment of the invention, it is special gas detector that special gas concentration, which acquires child node,；
Special gas detector is electrically connected embedded system platform, raw for monitoring the content of special gas in laboratory
Embedded system platform is sent at content information, and by content information；
Embedded system platform is also used to drive exceeded phonetic alarm device to issue when content information is more than second threshold
Concentration alarm signal, while generating the second warning information and the second warning information is sent to Cloud Server.
Particularly, in the specific embodiment of the invention, warning module includes: temperature alarming device and super-standard alarm device；
Temperature alarming device is electrically connected embedded system platform, for issuing heat alarm；
Embedded system platform is also used to the system platform driving temperature warning device when temperature information is more than first threshold
Heat alarm is issued, while generating the first warning information and the first warning information is sent to Cloud Server；
Super-standard alarm device is electrically connected embedded system platform, for issuing content alarm signal；
Embedded system platform is also used to when content information is more than second threshold, and driving super-standard alarm device issues content
Alarm signal, while generating the second warning information and the second warning information is sent to Cloud Server.
Specifically, temperature data acquisition child node includes: temperature sensor；During testing progress, by temperature sensing
Device is attached to semiconductor growing appts wall, monitors the temperature conditions of laboratory semiconductor growing equipment in real time, when operator wants
When starting device, starting device is clicked at the touch screen interaction interface of ZYNQ platform, ZYNQ platform will start-up temperature sensor
Power supply and receive data, then judge that temperature whether in the first threshold of setting, and generates corresponding temperature information, if
Meet the temperature of setting, then normal temperature information is sent to Cloud Server and is recorded, Cloud Server records and saves this
Secondary Test condition, otherwise ZYNQ platform drives phonetic alarm device, plays " temperature anomaly " alarm, while generating the first early warning letter
Breath is sent to Cloud Server, and Cloud Server records and saves this experimental temperature changing condition.
Specifically, special gas concentration acquisition child node includes: special gas detector；It, will during testing progress
Special gas detector is mounted in laboratory, and real time monitoring tests indoor special gas content, when operator wants to open
When dynamic equipment, starting device is clicked at the touch screen interaction interface of ZYNQ platform, ZYNQ platform will will start special gas detection
The power supply of device simultaneously receives data, then judge special gas content whether in the second threshold of setting, and generate contain accordingly
Information is measured, if meeting the special gas concentration requirement of setting, normal content information is sent to Cloud Server and is remembered
Record, Cloud Server record and save this Test condition, and otherwise ZYNQ platform drives exceeded phonetic alarm device, and it is " special to play
Gas content is exceeded " alarm, while generating the second warning information and being sent to Cloud Server, Cloud Server records and saves this time real
Test temperature change situation.
The special gas used in microelectronics laboratory is more, is only monitored to chlorine and carbon monoxide in this experiment.
But a greater variety of special gas concentration sensors can be added in practical applications.Sensor is all made of iic bus and is connected to
On the iic bus interface of ZYNQ platform.It is used to read and write the number of the two sensors in ZYNQ platform containing an IIC driver
According to, and judge the threshold value of its data, start audio alert when the data of reading are more than given threshold, then uses socket
Socket transfers data to Cloud Server.
Particularly, first threshold and second threshold can meet simultaneously, i.e., when temperature data acquisition child node and special gas
When bulk concentration acquisition child node works at the same time, temperature information is compared with first threshold, and content information and second threshold carry out
Compare, when temperature information is more than first threshold, embedded system platform driving temperature warning device issues heat alarm,
When content information is more than second threshold, embedded system platform drives super-standard alarm device to issue content alarm signal, the two
Independently of each other.
As shown in fig. 6, embedded system platform uses ZYNQ embedded chip, it (can comprising PS (double-core ARM) module and PL
Programmed logic) module.PS module runs (SuSE) Linux OS and application program, and corresponding PL mould can be called after system electrification
Block, driving data acquisition node work normally and acquire data, while at the data acquired to different data acquisition node
After reason or it is conveyed directly to Cloud Server.
Particularly, remote monitoring terminal can be the intelligent movables equipment such as smart phone, plate, computer of network-connectable
And operate in application program in intelligent movable equipment.After starting terminal, if Cloud Server and embedded system platform are all
In Normal on state, start remote monitoring terminal, the application program on remote monitoring terminal will be received and be shown from cloud
The monitoring data of server.
Cloud Server is mounted on suitable network node, by taking Windows server platform as an example, software uses Qt+
OpenCV+Socket exploitation.The software operated on Cloud Server will receive the temperature information of ZYNQ platform, concentration information,
Treated the first image and the second image.Wherein, treated the video flowing of the FPGA by PL module in ZYNQ platform is located
The image in semiconductor growing equipment after reason will be sent to monitor terminal, and equipment Instrument image acquisition video flowing will be straight
It connects and is sent to Cloud Server.By the OpenCV function processing on Cloud Server, the data of extraction will be superimposed in the form of subtitles
Onto video flowing.
Remote monitoring terminal is opened, if Cloud Server and embedded system platform are opened all in Normal on state
Dynamic remote monitoring terminal, receives and shows the video flowing from Cloud Server.Operator can be different in different location in this way
Time monitors instrument and equipment in real time.
The information of above various feedbacks to corresponding controller can all be synchronized to Cloud Server, save in real time and record experiment
The situation of room.Another effect of various phonetic alarm devices is that operator is reminded to pay attention to the potential danger in experimentation, mentions
It is high vigilant, and while guarantee the driving automatically of the safety monitoring assembly each detection module defencive function failure, laboratory
Operator can also manually start corresponding detection device.
As shown in fig. 7, the present invention provide on the basis of the above embodiments a kind of monitoring of semiconductor processes with it is pre-
The control method of alert system, comprising:
Acquire monitoring data；
Processing and transfer monitoring data, and when monitoring data are more than preset threshold, generate warning information；
Alarm signal is issued according to warning information；
Receive and store monitoring data and warning information；
Obtain monitoring data and warning information.
Specifically, semiconductor growing equipment Image Acquisition child node is mounted on the spy window of semiconductor growing equipment to adopt
Collect its inner case, after equipment starting, embedded system platform can drive it to acquire the first image, flat by embedded system
After FPGA on platform carries out edge detection process, the first image of acquisition can be shown by HDMI interface external-connection displayer, together
When, embedded system platform can the first image be sent to Cloud Server by treated, and Cloud Server is responsible for preservation.
Control equipment dial plate Image Acquisition child node is mounted at face control equipment dial plate image to instrumented data
It is acquired, after equipment starting, embedded system platform can drive its to acquire the second image, and embedded system platform can be by the
Two images are constantly sent to Cloud Server, and Cloud Server is handled and saved to image.
The temperature sensor of temperature data acquisition child node is attached in semiconductor growing equipment, when operator wants to open
When dynamic equipment, starting device is clicked at the touch screen interaction interface of ZYNQ platform, ZYNQ platform will start-up temperature sensor
Power supply simultaneously receives data, then judges that temperature whether in the first threshold of setting, and generates corresponding temperature information, if symbol
Normal temperature information, then be sent to Cloud Server and recorded, Cloud Server records and saves this by the temperature for closing setting
Test condition, otherwise ZYNQ platform drives phonetic alarm device, plays " temperature anomaly " alarm, while generating the first warning information
It is sent to Cloud Server, Cloud Server records and saves this experimental temperature changing condition.
The special gas detector of special gas concentration acquisition child node is mounted in laboratory, when operator wants
When starting device, starting device is clicked at the touch screen interaction interface of ZYNQ platform, ZYNQ platform will special gas detector
Power supply and receive data, then judge that special gas content whether in the second threshold of setting, and generates corresponding content
Normal content information is sent to Cloud Server and is recorded by information if meeting the special gas concentration requirement of setting,
Cloud Server records and saves this Test condition, and otherwise ZYNQ platform drives exceeded phonetic alarm device, plays " special gas
Content is exceeded " alarm, while generating the second warning information and being sent to Cloud Server, Cloud Server, which records and saves, this time tests temperature
Spend changing condition.
Cloud Server be may be mounted at into suitable network node, Cloud Server uses liunx or windows platform.
Different software build versions is run using different platform.Software is developed using Qt+OpenCV+Socket.Operation and cloud service
Temperature information on embedded system platform, concentration information, treated the first image and second will be received in software on device
Image.Wherein, treated the video flowing of the FPGA by PL module in embedded system platform i.e. treated semiconductor growing
Image in equipment will be sent to monitor terminal, and equipment Instrument image acquisition video flowing will be conveyed directly to cloud service
Device.By the OpenCV function processing on Cloud Server, the data of extraction will be added on video flowing in the form of subtitles, then will
Video stream is to remote monitoring terminal.
The processing of OpenCV function is main to execute following operation:
Picture is pre-processed, including binarization of gray value and noise reduction operation；
Circulation cutting is carried out to picture, instrumented data is intercepted；
The number of extraction is identified according to the template of setting；
The data extracted after identifying are sent to remote monitoring terminal.
Mobile monitoring terminal application program is mounted in intelligent movable equipment, after starting terminal, if Cloud Server
With embedded control platform all in Normal on state, start remote monitoring terminal, the application program in intelligent movable equipment
It will receive and show the different information from Cloud Server.
System proposed by the present invention, including multiple optional data acquisition nodes, by embedded system platform to adopting
Collect monitoring data to be analyzed and handled, when monitoring data are more than preset threshold, generates warning information；Warning module can root
It alarms in time according to warning information progress, can meet in laboratory the needs of to laboratory apparatus monitoring and early warning simultaneously.
System proposed by the present invention is adopted using semiconductor growing equipment Image Acquisition child node, control equipment dial plate image
Collect the two-way video monitoring of child node, while meeting in laboratory to laboratory apparatus internal control and control equipment dial plate picture number
According to the demand of reading.And network monitoring terminal is added, the discrepancy quantity of lab assistant can be mitigated.
System proposed by the present invention, using digital image processing techniques in instrument and equipment Instrument image carries out different need
The processing asked, after edge filter can more intuitive discovery aura it is abnormal, identify abnormal bright point information, meet different video stream
The demand of monitoring；Comprising special gas detection device, most of monitor and detection requirements in laboratory can be completed with a set of equipment.
The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and it cannot be said that
Specific implementation of the invention is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs, exist
Under the premise of not departing from present inventive concept, a number of simple deductions or replacements can also be made, all shall be regarded as belonging to of the invention
Protection scope.
Claims (8)
1. a kind of semiconductor processes monitoring and early warning system characterized by comprising
Data acquisition node, for acquiring monitoring data；
Embedded system platform connects the data acquisition node, for handling and transferring the monitoring data, and in the prison
When measured data is more than preset threshold, warning information is generated；
Warning module connects the embedded system platform, for issuing alarm signal according to the warning information；
Cloud Server connects the embedded system platform, for receiving and storing the monitoring data and the warning information；
Remote control terminal connects the Cloud Server, for obtaining the monitoring data and the warning information.
2. system according to claim 1, which is characterized in that the data acquisition node includes: semiconductor growing equipment
Image Acquisition child node, control equipment dial plate Image Acquisition child node, temperature data acquisition child node and special gas concentration are adopted
Collect one of child node or a variety of.
3. system according to claim 2, which is characterized in that the semiconductor material growth apparatus Image Acquisition child node
For the first high-definition camera；
First high-definition camera is electrically connected embedded system platform, for acquiring the first image, and by the first image
It is sent to the embedded platform；
The embedded system platform is also used to handle the first image, and the first image is sent to cloud by treated
Server.
4. system according to claim 2, which is characterized in that the control equipment dial plate Image Acquisition child node is second
High-definition camera；
Second high-definition camera is electrically connected embedded system platform, for acquiring the second image, and by second image
It is sent to the embedded platform；
The embedded system platform is also used to second image being sent to Cloud Server and handle.
5. system according to claim 2, which is characterized in that the temperature data acquisition child node is temperature sensor；
The temperature sensor is electrically connected embedded system platform, for monitoring the temperature of semiconductor growing equipment, generates temperature
Information, and the temperature information is sent to the embedded system platform；
The embedded system platform is also used to when the temperature information is more than first threshold, and driving temperature warning device issues
Heat alarm, while generating the first warning information and first warning information is sent to Cloud Server.
6. system according to claim 2, which is characterized in that the special gas concentration acquisition child node is special gas
Detector；
The special gas detector is electrically connected embedded system platform, raw for monitoring the content of special gas in laboratory
The embedded system platform is sent at content information, and by the content information；
The embedded system platform is also used to drive exceeded phonetic alarm device when the content information is more than second threshold
Concentration alarm signal is issued, while generating the second warning information and second warning information is sent to Cloud Server.
7. system according to claim 1, which is characterized in that the warning module includes: temperature alarming device and exceeded
Warning device；
The temperature alarming device is electrically connected the embedded system platform, for issuing heat alarm；
The embedded system platform is also used to the system platform when temperature information is more than first threshold and drives the temperature alarming
Device issues heat alarm, while generating the first warning information and first warning information is sent to Cloud Server；
The super-standard alarm device is electrically connected the embedded system platform, for issuing content alarm signal；
The embedded system platform is used for when content information is more than second threshold, and the super-standard alarm device sending is driven to contain
Alarm signal is measured, while generating the second warning information and second warning information is sent to Cloud Server.
8. a kind of control method of semiconductor processes monitoring and early warning system characterized by comprising
Acquire monitoring data；
The monitoring data are handled and transferred, and when the monitoring data are more than preset threshold, generate warning information；
Alarm signal is issued according to the warning information；
Receive and store the monitoring data and the warning information；
Obtain the monitoring data and the warning information.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111858098A (en) * | 2020-07-24 | 2020-10-30 | 成都成信高科信息技术有限公司 | Data exchange method based on mass data |
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