TW200849319A - Uniformly pressurizing device for micro-nano transfer printing - Google Patents
Uniformly pressurizing device for micro-nano transfer printing Download PDFInfo
- Publication number
- TW200849319A TW200849319A TW96120519A TW96120519A TW200849319A TW 200849319 A TW200849319 A TW 200849319A TW 96120519 A TW96120519 A TW 96120519A TW 96120519 A TW96120519 A TW 96120519A TW 200849319 A TW200849319 A TW 200849319A
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- ring
- pressure equalizing
- micro
- piston
- Prior art date
Links
- 238000010023 transfer printing Methods 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 claims abstract description 58
- 238000003825 pressing Methods 0.000 claims description 30
- 238000000465 moulding Methods 0.000 claims description 27
- 239000007788 liquid Substances 0.000 claims description 22
- 238000007789 sealing Methods 0.000 claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 239000012530 fluid Substances 0.000 abstract description 6
- 230000004308 accommodation Effects 0.000 abstract 4
- 238000007493 shaping process Methods 0.000 abstract 4
- 239000000463 material Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 5
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- 210000004709 eyebrow Anatomy 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 210000003128 head Anatomy 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 210000003625 skull Anatomy 0.000 description 1
Landscapes
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW96120519A TW200849319A (en) | 2007-06-07 | 2007-06-07 | Uniformly pressurizing device for micro-nano transfer printing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW96120519A TW200849319A (en) | 2007-06-07 | 2007-06-07 | Uniformly pressurizing device for micro-nano transfer printing |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200849319A true TW200849319A (en) | 2008-12-16 |
TWI337371B TWI337371B (enrdf_load_stackoverflow) | 2011-02-11 |
Family
ID=44824138
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW96120519A TW200849319A (en) | 2007-06-07 | 2007-06-07 | Uniformly pressurizing device for micro-nano transfer printing |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW200849319A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI395655B (zh) * | 2009-01-16 | 2013-05-11 | Chenming Mold Ind Corp | Microstructure forming device and method thereof |
-
2007
- 2007-06-07 TW TW96120519A patent/TW200849319A/zh not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI395655B (zh) * | 2009-01-16 | 2013-05-11 | Chenming Mold Ind Corp | Microstructure forming device and method thereof |
Also Published As
Publication number | Publication date |
---|---|
TWI337371B (enrdf_load_stackoverflow) | 2011-02-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4578517B2 (ja) | インプリント装置およびインプリント方法 | |
EP1434261B1 (en) | Circuit device mounting method and press | |
JP2006128582A5 (enrdf_load_stackoverflow) | ||
KR101719097B1 (ko) | 연마 헤드, 화학 기계적 연마 시스템 및 기판 연마 방법 | |
TW200902332A (en) | Imprinting jig and imprinting apparatus | |
EP1293271A3 (en) | Method and device for pressing workpiece | |
US8256372B2 (en) | Apparatus for applying deglossing paint on peripheral inactive portion including a slidable holder and elastically disposed carrier | |
JP2009208214A5 (enrdf_load_stackoverflow) | ||
JP6592659B2 (ja) | ローラ式加圧装置、インプリント装置およびローラ式加圧方法 | |
JP2017105207A (ja) | インプリント用型を用いたインプリント方法 | |
TW200849319A (en) | Uniformly pressurizing device for micro-nano transfer printing | |
KR20170022873A (ko) | 시트 부착 장치 및 부착 방법 | |
JP2001179605A5 (enrdf_load_stackoverflow) | ||
CN212396768U (zh) | 热压键合夹具和热压键合系统 | |
JP4907638B2 (ja) | マイクロナノインプリント工程において使用される均等プレス装置 | |
FR2971969A1 (fr) | Outillage de marquage a chaud | |
CN103963497B (zh) | 正反面薄膜印泥 | |
JP4618825B2 (ja) | ブレーキシューの製造方法及び装置 | |
CN208452293U (zh) | 贴膜设备 | |
WO2007052469A1 (ja) | インプリント装置及びインプリント方法 | |
EP1962284A3 (en) | Transfer method, transfer apparatus, and recording medium | |
TW200948576A (en) | Press forming device for optical element | |
CN205311057U (zh) | 一种简易烫金测试装置 | |
JP2001267275A (ja) | シリコンウェハ研磨装置 | |
CN214928108U (zh) | 一种瓶盖烫金装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |