TW200948576A - Press forming device for optical element - Google Patents

Press forming device for optical element Download PDF

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Publication number
TW200948576A
TW200948576A TW098113520A TW98113520A TW200948576A TW 200948576 A TW200948576 A TW 200948576A TW 098113520 A TW098113520 A TW 098113520A TW 98113520 A TW98113520 A TW 98113520A TW 200948576 A TW200948576 A TW 200948576A
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TW
Taiwan
Prior art keywords
mold
pressure
die
forming apparatus
press forming
Prior art date
Application number
TW098113520A
Other languages
Chinese (zh)
Inventor
Sunao Miyazaki
Keisuke Yoshikuni
Eiji Yamamoto
Kimiyuki Sakai
Masatoshi Oyama
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Asahi Glass Co Ltd
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Publication of TW200948576A publication Critical patent/TW200948576A/en

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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06Construction of plunger or mould
    • C03B11/08Construction of plunger or mould for making solid articles, e.g. lenses
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/12Cooling, heating, or insulating the plunger, the mould, or the glass-pressing machine; cooling or heating of the glass in the mould
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/16Gearing or controlling mechanisms specially adapted for glass presses
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/005Transporting hot solid glass products other than sheets or rods, e.g. lenses, prisms, by suction or floatation
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00Press-moulding glass
    • C03B2215/60Aligning press die axes
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00Press-moulding glass
    • C03B2215/61Positioning the glass to be pressed with respect to the press dies or press axis
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00Press-moulding glass
    • C03B2215/66Means for providing special atmospheres, e.g. reduced pressure, inert gas, reducing gas, clean room
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00Press-moulding glass
    • C03B2215/69Controlling the pressure applied to the glass via the dies
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00Press-moulding glass
    • C03B2215/80Simultaneous pressing of multiple products; Multiple parallel moulds
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

Abstract

A press forming device for an optical element for forming an optical element by pressing a glass material between a plurality of upper dies and a plurality of lower dies forming pairs with the upper dies, the device comprising a means for imparting a pressure to the plurality of lower dies, a body mold into which the plurality of pairs of upper dies are inserted from above and the plurality of pairs of lower dies are inserted from below and which guides the relative position of the upper and lower dies, a pressure generating means for pressing the body mold upward, and an upper die pressure distribution means for pressing each upper die downward as the body mold is moved upward by a pressing force generated by the pressure generation means and applying a pressure independently to each upper die, characterized in that the upper die pressure distribution means; comprises an upper cylinder receiving a load by a pressure acting on an upper die, and an upper rocking member arranged to be able to rock on a fulcrum and having one end abutting on the upper end of the upper die and the other end coupled with the upper cylinder; regulates a pressure being applied from the upper cylinder to each upper die through the upper rocking member in a process for moving the body mold upward by the pressure generation means; and presses the lower die upward by the means for imparting a pressure to the lower dies.

Description

200948576 六、發明說明: 【發明所屬之技術領域】 本發明係關於一種光學元件之衝壓成形裝置,特別係關 於一種在將非球面透鏡等之高精度光學元件衡壓成形時所 使用之光學元件之衝壓成形裝置。 【先前技術】 近年來’一種將玻璃透鏡等之光學玻璃元件衝壓成形後BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a press forming apparatus for an optical element, and more particularly to an optical element used in the form of a high-precision optical element such as an aspherical lens. Stamping and forming device. [Prior Art] In recent years, a type of optical glass element such as a glass lens has been formed by press forming

便直接使用而並不對成形面進行研磨加工等之精密衝壓成 形法受到關注。通常,於此種成形中,使用有如下的光學 兀件之衝壓成形裝置:其係於胴模内,使用相對於胴模而 滑動之成形用模(上模、下模),對處於軟化狀態之玻璃素 材在上模與下模之間進行衝壓,從而於玻璃素材上形成與 模之成形面對應之光學功能面。於此,重要的是,當製品 為比較小型的情況下,若利们台衝壓成形機藉由i組模來 成形,則生產性較低。因此,提倡將複數個模安裝於1台 衝壓成形機上以同時生成複數個光學元件之方式(參照日 本專利第2815037號公報)。 ^對複數個模同時進行加壓時’必需設法尋求一種用以 獲得成形精度高的光學元件之方^作為該方法,首要考 慮的是使用與模之滑動方向正交地固定於一根加麗軸上之 平板等之擠壓構件來對複數個模進行加壓之方法。若採用 該方法,則會以複數個模中行程最短之模作為基準來決定 所有模之行程。因此,在將以微米為單位而要求壁厚尺寸 及面之傾斜精度之光學元件 厚尺寸 午成形時,為了使行程全部限於 139984.doc 4 200948576 規格内,必需對各模之尺寸、擠壓構件之尺寸、擠麼構件 之安裝、加壓時之傾斜、擠堡構件與模之接觸部之磨損、 變形進行充分的管理,伸於盔 仁於數百c之成形條件下,亦會包 含成形機變形之情況,從而近乎不可能進行管理。因此, 必需使作為成形用模具之上模碰觸到胸模,並藉由上模與 胴挺及其他模之構成構件之精度而保證上述之精度。 然而,於上述加壓方法巾,行程對於所有模均相同,故 根據”上述相同之理由,總是將所有模壓到極限同樣近乎 不可=又亦考慮於具有某種程度之自由度之狀態下進 行堊之方法以便使擠壓構件隨動於行程而不固定,但 對於複數個模、特別對於4個以上之模同時進行加麼時, 右C到極限時之各模之高度並非全部在同一個平面上,則 無法將所有模壓到極限。 由於成形素材之尺寸不均、或加壓時各模間之微妙 的溫度差等,會使得加壓開始之位置及成形之速度(玻璃 之變形速度)於各模間存在差異,故會頻繁地產生擠壓構 件在相重子於核之滑動#向而傾斜之狀態下受到加壓之情 況。因此,於模之滑動方向以外亦會有加壓力之作用從 而谷易導致模之刮損或破損,進而,模與擠壓構件之接觸 部總疋刮擦而容易磨&,特別在上述高溫之狀態下磨耗會 加劇,該磨耗之結果會導致反覆出現進一步助長模之刮損 或破損之惡性循環。 又,於上述成形裝置中,為了進行衝壓成形過程中之玻 璃素材之溫度控制,必需以相當大的高低溫度差來對胴 139984.doc 200948576 、、及下模進行加熱.冷卻。所以,利用大致相同 之熱膨脹係數之材料而構成胴模、上模、及下模,並且設 置有用以確保上模、下模相對於胴模之滑動之間隙。& 因此’例如當使上模下降並在其與下模之 . 糊屢成形時,若未對上模之中心施刚力= • #在胴模内滑動之期間產生傾斜,從而無法在上模與下模 之成形面彼此正確地對應之狀態下對玻璃素材進行衝壓成 春=。進而,於極端之情形時,在胴模與上模之間會產生到 損,從而無法將上模相對於胴模而完全閉合, 常之誠。換言之,其结果會導致已成形之光學 學功能面之中心與光軸不―致。x,為了自模中取出成形 品而提昇上模時,若提昇力偏離上模之中心,則上模會傾 斜,在胴模與上模之間會產生到損,從而無法進行上模之 開閉。在實際使用之條件下’特別在胴模與上模之滑勤部 之間隙為10 μιη以下較小時,且因加熱中使用之關係因 〇 而上述成形裝置存在於更容易產生上述刮損之環境中。 於日本專利第281 5037號公報中記載有一種成形裝置, • 作為於某種程度上解決了上述先前技術之缺點之^例。曰 * 本專利第2815037號公報之成形裝置中’在對上模施加衝 壓力之衝壓軸與上模之間,堆疊配置有複數個盤簧,藉 此,即便加壓時模之高度不同,亦可利用盤簧之變形而= 收該高度之差,從而對各模均勻地施加衝壓力。 【發明内容】 [發明所欲解決之問題] 139984.doc 200948576 然而’於日本專利第2815037號公報之成形裳置中,由 於盤簧存在於上模附近之部分,故盤簧暴露於高溫中而存 在鬆弛之問題。 又,為了彌補該缺點,需要對盤簧之部分進行水冷,但 為了進行水冷而會新產生構件大型化、複雜化之問題。 進而,水冷後之構件在成形時會接觸於上模而使上模之 皿度急遽下降,從而亦有已成形之玻璃之溫度變得不穩定 之缺點。 又,為了降低成本而將複數個上模、下模設置於丨台胴 模中,故從經濟上考慮不可能加大各模組間之距離。因 此,各模組間之距離即便較大,通常亦僅為數十毫米,必 需在對應於該間隔之一根根的軸上設置盤簧。通常,玻璃 衝壓成形所需之壓力對於#18之模具為49 kN左右,故用 於盤簧之彈簧之強度必需為4.9 kN以上。收納於數十毫米 之空間中之4.9 kN之捲繞彈簧通常並不存在。 因此,曰本專利第2815037號公報中使用有盤簧,但即 便對於盤簧’若要讓狹窄之空間成為4.9咖容量者,亦必 需將複數《簧大量㈣’由此會產生使彈簧機構之部分 長度變得非常長的缺陷,從而存在成形裝置大型化之問 題。 又,當要衝Μ之透鏡之大小與當初之預定有所不同而產 生了需要大幅變更衝塵力之情形時,必需更換盤簧以改變 彈簣常數’但將收納有所堆疊之盤菁之零件分解來更換宜 中之盤簧時,會耗費大量的勞力及工時。如上所述,曰本 139984.doc 200948576 專利第2815037號公報之成形裝置亦仍存在上述問題。 再者’日本專利第2815〇37號公報中,並沒有關於下模 :胴模内滑動並衝壓時之壓力分配之記載,因而推測由下 模進行衝壓時之機構為不進行壓力分配之機構。 本發明健於上述情況而完成,其目的在於提供―種已 將上述問題解決之光學元件之衝壓成形裝置。 [解決問題之技術手段] 本發明之第1實施態樣係以如下方式解決上述問題:一 種光學元件之衝壓成形裝置’其係在複數個上模及與該上 模成對之複數個下模之間對玻璃素材進行㈣而成形出光 學元件者,其包括:下模壓力織予機構,其對上述複數個 下模賦予壓力;胴模,其將上述複數對中之上模自上方插A precision press forming method which is used as it is, and which does not perform a grinding process on a forming surface, has been attracting attention. Usually, in such forming, a press forming apparatus for an optical element is used which is attached to a mold, and a forming mold (upper mold, lower mold) that slides relative to the mold is used, and the pair is softened. The glass material is pressed between the upper mold and the lower mold to form an optical functional surface corresponding to the molding surface of the mold on the glass material. Here, it is important that when the product is relatively small, if the sheet press molding machine is formed by the i-die, the productivity is low. Therefore, a method in which a plurality of dies are mounted on one press forming machine to simultaneously generate a plurality of optical elements is proposed (refer to Japanese Patent No. 2815037). ^When a plurality of dies are simultaneously pressurized, it is necessary to seek a method for obtaining an optical element having high forming precision as the method, and the primary consideration is to use a ridge that is fixed orthogonally to the sliding direction of the mold. A method of pressing a plurality of dies by pressing members such as flat plates on a shaft. If this method is used, the stroke of all the modes will be determined based on the mode with the shortest stroke in the plurality of modes. Therefore, when forming an optical element having a thickness of a wall and a tilting precision of the surface in micrometers, in order to make the stroke all limited to the specification of 139984.doc 4 200948576, it is necessary to size the respective molds and the extruded member. The size, the installation of the extruded member, the inclination during pressurization, the wear and deformation of the contact portion between the squeeze member and the mold are fully managed, and the forming machine is also included under the forming conditions of the helmet. The situation of deformation makes it almost impossible to manage. Therefore, it is necessary to make the upper mold as the molding die touch the chest mold, and the above precision is ensured by the precision of the upper mold and the constituent members of the jaw and the other mold. However, in the above-mentioned press method towel, the stroke is the same for all the molds, so according to the same reason as above, all the molds are always pressed to the limit, and the degree of freedom is also considered. The method of squeezing so that the pressing member follows the stroke without fixing, but for a plurality of dies, especially for more than 4 dies, the heights of the modules from the right C to the limit are not all in the same On the flat surface, it is impossible to mold all of them to the limit. Due to the uneven size of the formed material or the subtle temperature difference between the molds during pressurization, the position at which the pressurization starts and the speed of forming (the deformation speed of the glass) are caused. There is a difference between the respective molds, so that the pressing member is frequently pressed in a state where the phase weight is tilted in the direction of the slip of the core. Therefore, there is a pressure application in addition to the sliding direction of the mold. Therefore, the valley is liable to cause scratching or breakage of the mold, and further, the contact portion between the mold and the pressing member is scratched and easily rubbed, and the wear is particularly intensified in the above-mentioned high temperature state. As a result of the wear, a vicious cycle that further contributes to the scratching or breakage of the mold is caused. Further, in the above-mentioned forming apparatus, in order to control the temperature of the glass material during the press forming process, it is necessary to have a relatively large temperature difference.胴 139984.doc 200948576 , and the lower mold is heated and cooled. Therefore, the mold, the upper mold, and the lower mold are formed by using materials having substantially the same thermal expansion coefficient, and are provided to ensure the upper mold and the lower mold relative to the crucible. The gap between the sliding of the mold. & Therefore, for example, when the upper mold is lowered and the paste is formed in the same manner as the lower mold, if the center of the upper mold is not applied, the force is not caused during the sliding of the upper mold. Therefore, the glass material cannot be pressed into the spring in a state in which the molding surfaces of the upper mold and the lower mold are correctly matched with each other. Further, in an extreme case, damage may occur between the mold and the upper mold, and thus it is impossible to The upper mold is completely closed with respect to the die, which is often true. In other words, the result is that the center of the formed optical functional surface and the optical axis are not. x, in order to be in the mold When the molded product is taken out and the upper mold is lifted, if the lifting force deviates from the center of the upper mold, the upper mold is inclined, and damage occurs between the mold and the upper mold, so that the upper mold cannot be opened and closed. In the case where the gap between the die and the upper part of the upper mold is 10 μm or less, and the use of the heating is caused by the above-mentioned forming apparatus, the above-mentioned forming apparatus exists in an environment where the above-mentioned scratching is more likely to occur. Patent Document No. 281 5037 discloses a forming apparatus, as an example of solving the above-described disadvantages of the prior art to some extent. 曰 * In the forming apparatus of the patent No. 2815037, 'the stamping is applied to the upper mold. Between the punching shaft and the upper die of the force, a plurality of coil springs are arranged in a stack, whereby even if the height of the die is different during pressurization, the deformation of the coil spring can be utilized to determine the difference between the heights, thereby uniformizing the respective modes. Apply pressure to the ground. [Problem to be Solved by the Invention] 139984.doc 200948576 However, in the forming skirt of Japanese Patent No. 2815037, since the coil spring exists in the vicinity of the upper mold, the coil spring is exposed to high temperature. There is a problem of slack. Further, in order to compensate for this drawback, it is necessary to water-cool a portion of the coil spring, but in order to perform water cooling, there is a problem that the member is increased in size and complexity. Further, the member after water cooling contacts the upper mold at the time of molding, and the degree of the upper mold is drastically lowered, so that the temperature of the formed glass becomes unstable. Further, in order to reduce the cost, a plurality of upper and lower dies are placed in the stencil, so it is economically impossible to increase the distance between the modules. Therefore, even if the distance between the modules is large, it is usually only several tens of millimeters, and it is necessary to provide a coil spring on the shaft corresponding to one of the roots of the interval. Generally, the pressure required for glass press forming is about 49 kN for the #18 mold, so the spring used for the coil spring must have a strength of 4.9 kN or more. A 4.9 kN wrap spring housed in a space of tens of millimeters does not usually exist. Therefore, in the patent No. 2815037, a coil spring is used, but even if the space for the coil spring is to be 4.9 cc, it is necessary to make a plurality of "springs" (four) which will cause the spring mechanism. A defect in which a part of the length becomes very long causes a problem that the forming apparatus is enlarged. Moreover, when the size of the lens to be washed differs from the original schedule and a situation in which the dusting force needs to be greatly changed, it is necessary to replace the coil spring to change the magazine constant 'but the parts of the stacked disc will be accommodated. When it is decomposed to replace the coil spring of Yizhong, it will consume a lot of labor and working hours. As described above, the above-mentioned problem still exists in the forming apparatus of the Japanese Patent Publication No. 289, 1984. Further, in the Japanese Patent Publication No. 2815〇37, there is no description of the pressure distribution at the time of sliding the dies in the dies, and it is presumed that the mechanism for pressing the dies is a mechanism that does not perform pressure distribution. The present invention has been made in view of the above circumstances, and an object thereof is to provide a press forming apparatus for an optical element which has solved the above problems. [Technical means for solving the problem] The first embodiment of the present invention solves the above problems in a manner in which a press forming apparatus for an optical element is attached to a plurality of upper molds and a plurality of lower molds paired with the upper mold The optical component is formed by performing (four) on the glass material, and includes: a lower die pressure woven mechanism that applies pressure to the plurality of lower dies; and a dies that insert the plurality of upper dies from above

賦予機構而朝上方擠壓上述下模。The lower mold is pressed upward by the mechanism.

\各上模並對上述各上模獨立地施加壓力;上述上槿 139984.doc 200948576 本發明之第2實施態樣係以如下方式解決上述問題:如 上述第1實施態樣之上述衝壓成形裝置,其中包括至少將 上述上模、上述下模及上述胴模收納於内部之框體;上述 上部缸體及上述上部擺動構件配置於上述框體之上表面。 木發明之第3實施態樣係以如下方式解決上述問題:如 上述第1或第2實施嘘樣之上述衝壓成形裝置,其中上述下 模壓力賦予機構係隨著上述胴模於上述壓力產生機構之擠 壓力之作用下向上移動而朝上方擠壓上述複數個下模。 ❹ 本發明之第4實施態樣係以如下方式解決上述問題:如 上述第3實施態樣之上述衝壓成形裝置,#中上述下模壓 力賦予機構包括:下部缸體,纟承受作用於上述下模上之 壓力所產生之負載,·及下部擺動構件,其經由支點而擺動 自如地配置,且其一端與上述下模之下端部抵接,另一端 部與上述下部缸體連結;藉由使上述下部擺動構件以上述 支點為中心進行擺自’而冑整上述下部缸體對各下模之麗 力。 、 ❹ 本發明之第5實施態樣係以如下方式解決上述問題:如 上返第1至第4實施態樣中任_者之上述衝壓成形裝置,其 中包括複數個調芯機構’其係在使上述胴模於上述壓力產 生機構之擠壓力之作用下向上移動之過程中,對上述上模 相對於上述胴模之位置進行調芯,上述複數個調㈣構各 自含有:球面軸承’其使上述上模可轉動’以便在對上述 胴模進行朝上方之擠壓動作時,使上述上模之軸線相對於 上述胴模之移動軸線-致;及上模支持構件,其係形成為 139984.doc 200948576 支持上述球面軸承之外側,並藉由朝上述上方之擠壓動作 而使上述球面轴承分離。 本發明之第6實施態樣係以如下方式解決上述問題如 上述第i至第5實施態樣中任—者之上述衝壓成形裝置,其 中上述上模壓力分配機構中,上述支點在上述上部擺動構 件之長度方向之連結位置為可變,根據上述支點之連結位 e 置與上述上部擺動構件之全長之比率而調整作用於上述上 模上之壓力。 本發明之第7實施態樣係以如下方式解決上述問題:如 上述第4實施態樣之上述衝塵成形裝置,其中上述下模麼 力賦予機構中,上述支點在上述下部擺動構件之長度方向 之連結位置為可變,根據上述支點之連結位 擺動構件之全長之比率而調整作用於上述下模之壓力 明之第8實施態樣係以如下方式解決上述問題:如 述幻至第5實施態樣中任—者之上述㈣成形裝置,其 I上述上㈣力分配機構中,上述上部缸體内 :可變’根據上述填充塵力而調整作用於上述上模上= 力。 上之第9實施態樣係以如下方式解決上述問題:如 力構施中態樣之上述衝塵成形裝置,其中上述下模麼 上述填充壓Λ i述下部缸體内之填充塵力為可變,根據 这填充壓力而調整作用於上述下模上之壓力。 上= 月之Γ°實施態樣係以如下方式解決上述問題:如 2、及第8實施態樣中任-者之上述衝壓成形 139984.doc 200948576 f置’其中上述上部缸體為内部填充有特㈣力之氣體之 氣虹體’以此解決上述問題。 本發明之第U實施形態如上述第4或第9實施態樣之上述 衝墨成形裝置,其中上述下部缸體為内部填充有特定塵力 之氣體之氣紅體。 本發明之第12實施態樣係以如下方式解決上述問題:如 上述第1至第11實施態樣中任一者之上述衝壓成形裝置, 其中匕括定中心構件,其係於衝壓之前插入於上述上模與 上述下模之間,並將載置於上述下側之上述玻璃素材之位 置中心自兩側對準於上述下模之中心,上述定中心構件係 在對上述破璃素材進行衝壓而成形出光學元件之後使上述 胴模下降,並且朝下方擠壓上述光學元件之周緣部。 本發明之第13實施態樣係以如下方式解決上述問題:如 上述第i至第12實施態樣中任一者之上述衝壓成形裝置, 其中包括:吸附手,其係於上述框體之内部移動而將上述 玻璃素材载置於上述胴模内之上述下模的成形面上,並自 上述胴模中取出經衝壓後之上述光學元件;手保持機構, 其將上述吸附手保持於水平狀態;及驅動部,其經由上述 手保持機構而驅動上述吸附手;上述手保持機構係藉由具 有彈性之複數個橡膠構件而保持上述吸附手。 本發明之第14實施態樣係以如下方式解決上述問題:如 上述第i至第12實施態樣中任一者之上述衝壓成形裝置, 其中包括:吸附手,其係於上述框體之内部移動而將上述 玻璃素材載置於上述洞模内之上述下模之成形面上,並自 139984.doc -12· 200948576 上述胴模中取出經衝壓後之上述光學元件;手保持機構’ 其將上述吸附手保持於水平狀態;及驅動部,其經由上述 手保持機構而驅動上述吸附手;上述手保持機構係藉由線 性導執而於上下方向上被導引。 - [發明之效果] . 、根據本發明’在藉由壓力產生機構而使胴模向上移動之 過程中錳由上部擺動構件而調整上部缸體對各上模之壓 Φ 力並且藉由下模壓力賦予機構而朝上方擠壓下模,因此 與先剛將複數個盤簧疊合而成者相比,可更減輕作用於上 部缸體之壓力而使上部缸體更小型化,並且不必設置用以 進行水冷之冷卻機構即可,亦無需採取防止在有冷卻水浅 漏時對模造成腐蝕等之對策。 又’藉由调整上部缸體之壓力,亦可容易地應對施加於 '之加左力之變化,與先前進行變更盤簧片數之作業 ΙΊΆ相比,可更容易地進行壓力之變更。 ❹ *而,切明之光學元件之衝壓成形裝置具有槓桿機 構,其係將上模之麗力經由以支點為中心進行擺動之擺動 . 構件而傳遞至虹體,因此,當具有複數個導引孔之月同模相 ‘ 丨於^數個上模進行滑動動作而對玻璃素材進行衝壓成形 夺可將所有的上模完全壓到極限,而且即便由於成形素 句、或加壓時各模間之微妙的溫度差等而使得 加壓開始之位署十> / 置或成形之速度(玻璃之變形速度)於各模間 存在差異,亦可應對該等差異而容易地進行調整,故可取 仔成形口口之精度良好、生產性亦有所提高等之許多效果。 139984.doc -13- 200948576 根據本發明之光學元件之衝a成㈣置,因其具有調怒 機構故在以複數個上模、下模同時進行衝壓成形時,對 •模施加之力總疋會將各上模支持於其所在位置,在對洞 模進行上壓動作時可朝向胴模之移動軸線之中心而作用, 從而不存在到損等之不良情形,可高效率地製造光學功能 面相對於絲而位於正確位置之精度高的光學元件。 【實施方式】 以下’參照圖式’對本發明之較佳實施形態進行具體說 明。 圖1係表示實施形態之衝壓成形裝置之全體構成之示 圖如圖1所7F,衝麼成形裝置1〇含有:用以成形光學元 件之真空腔室(框體)2G,·及用以對真空腔室2G供給玻璃素 材並取出已成形之光學元件之儲料室%。 真空腔室2G含有:成形用模具單元4();搬人玻璃素材並 取出已成形之光學元件之爐内手機構50;對搬人至成形用 模具單元40中之玻射材進行定&、及使光學元件與上 模分離之定中心·刮刀機構6〇;以及於成形前對玻璃素材 進行加熱之加熱器單元70。 真空腔室20係由真空腔室架台22所支持,於該真空腔室 架台22上’設置有··朝上方擠屋成形用模具單元4〇之胴模 42及下模44之壓力產生機構8〇 ;對上模之軸線進行調芯之 調芯機構90 ;及於成形時對上模46之壓力進行分配之上模 歷力分配機構(上模加壓調整機構)1〇〇。 壓力產生機構80含有升壓缸體81,其係由固定於真空腔 139984.doc 200948576 室20下表面之支持基座82所支持。於升壓缸體81之壓力作 用下進行升降之升降驅動轴84經由支持構件85而連結於支 持胴模42之升降基座43,於該升降基座43上,搭載有下模 壓力賦予機構370。 * 又’健料室30含有:載置有玻璃素材之托板台110;吸 . 附並移送托板台110上之玻璃素材之標量型機械手120;用 以搬入.搬出玻璃素材及光學元件之置換室13〇 ;使置換室 _ 130之移位器140移動之移位器移動機構150;及對連通置 換室130與真空腔室20之間之連通路丨32進行開閉之閘閥 160。進而’於支持儲料室3〇之儲料室架台32之下部,設 置有真空泵單元170,於儲料室30之上表面,設置有向儲 料室30供給潔淨空氣之過濾單元18〇。 又’於真空腔室20上,連接有供給高壓空氣之空氣配管 190、供給氮氣氣體之氮氣配管2〇〇、冷卻用氮氣配管 210、及進行與真空有關之空氣抽吸之真空配管22〇,於儲 φ 料至30上,連接有供給高壓空氣之空氣配管190及真空配 管 220。 . 而且,於空氣配管190上,配置有控制高壓空氣之供給 - 之電磁閥V21〜V25。又,於氮氣配管200上,配置有控制 氮氣氣體之供給之電磁閥Vl4,於冷卻用氮氣配管21〇上, 配置有控制冷卻用氮氣之供給之電磁閥V丨9、V2〇。另 外,於真空配管22〇上,配置有電磁閥V1〜V9、 V11〜V16、V18' V26。再者,電磁閥VU)設置於繞過真空 腔室20與置換室13G之間之管路⑶上,藉由開閥而使真空 139984.doc -15· 200948576 腔室20之壓力與置換室13〇之壓力均壓化。 又’於真空腔室20之側壁及底部上,連接有排氣用之電 磁閥V17 ' V27。各電磁閥V1〜V27例如包含藉由螺線管之 勵磁而開閥並藉由螺線管之退磁而閉閥之常閉型的2埠2位 閥。 又,於真空腔室20之下方,配置有提昇搬入至真空腔室 2〇内之玻璃素材之提昇單元25〇 ;及對爐内手機構5〇之吸 附手52進行與真空有關之空氣抽吸之吸附控制單元260。 衝壓成形裝置10係以如下方式構成:將玻璃素材(玻璃 毛胚)裝填於成形用模具單元4〇内,利用壓力產生機構8〇 將胴模42上壓,藉此進行衝壓成形。又,衝壓成形較佳為 將氮氣氣體等之惰性氣體填充於氣密構造之真空腔室2〇之 内部從而於惰性氣體環境中進行。 圖2係表示衝壓成形裝置1〇之控制系統之構成之方塊 圖。如圖2所示,衝壓成形裝置1〇之控制裝置300對以下部 分進行控制:上述爐内手機構50、定中心.刮刀機構60、 加熱器單元70、壓力產生機構8〇、上模壓力分配機構 1〇0軚量型機械手120、真空泵單元170、高壓空氣用之 電磁間V21〜V25、真空用之電磁閥V1〜V16、、v26、 及排氣用之電磁閥V17、V27。 又除上述部分以外,控制裝置300還對以下部分進行 雨壓空氣供給單元3 10、閘閥開閉機構320、置換室 :壓力調整單元330、腔室内壓力調整單元34〇、氮氣供給 0氮氣冷卻單元36〇、及下模壓力賦予機構370。 139984.doc 200948576 高壓空氣供給單元3 10含有空氣壓縮機,其向空氣配管 190供給高壓空氣。閘閥開閉機構32〇含有氣缸體322,其 以如下方式而驅動:當藉由電磁閥V21之開閥而供給高壓 空氣時’使閘閥160向上移動以打開置換室13〇之連通路 . 132 ° . 又,置換室内壓力調整單元330係以如下方式而作動: 藉由電磁閥V9之開閥而將真空泵單元17〇所生成之真空導 入至置換室130内,於玻璃素材搬入時不讓空氣進入到腔 室2 0内。 氮氣供給單元350係在對玻璃素材進行衝壓成形時,藉 由電磁閥V14之開閥而將氮氣氣體供給至腔室2〇内。 氮氣冷卻單元360係在對玻璃素材進行衝壓成形時,藉 由電磁閥V19、V20之開閥而供給對成形用模具單元仂之 上模及下模進行冷卻之低溫氮氣氣體。 下模壓力賦予機構370包含下模加壓調整機構,其係在 Φ 壓力產生機構80所產生之壓力之作用下使胴模42向上移動 而進行衝壓成形時,朝上方對各下模44進行加壓。下模壓 • 力賦予機構370如下所述,含有下部槓捍機構、及包含氣 • &體之下部紅體,其控制线壓以便產生與作用於下模44 上之壓力相對應之加壓。 圖3A及圖3B係表示於衝壓成形裝置1〇中進行之各步驟 之順序之示圖。於此,參照圖3A及圖3B,對光學元件之 製造方法進行說明。再者,於前次之最終步驟中,移位器 移動機構150之水平移動台152移動而打開置換室13〇 ,並 139984.doc -17- 200948576 且藉由移位器移動機構150之氣缸體154而使移位器140自 真空腔室20移動至置換室130。 於圖3 A所示之順序1中,藉由移位器移動機構1 50而關閉 置換室130。接著,啟動真空泵單元170,並且將電磁閥V9 開閥而經由置換室13〇使真空腔室20内成為真空。 於順序2中,使電磁閥V14開閥而將氮氣氣體供給至已成 真空之真空腔室20内《關閉閘閥160而將置換室130與真空 腔室20之間隔斷。 於順序3中’將載置有複數個玻璃素材之托板112搬入至 儲料室30内之托板台110上。再者,該托板之搬入亦可與 上述順序2同時進行。 於順序4中’驅動儲料室30内之標量型機械手1 2〇以使真 空夾盤122移動至托板Π2上’並使電磁閥11開閥而吸附托 板112上之玻璃素材。 於順序5中,打開置換室130,並且使標量型機械手ι2〇 之臂124旋轉而使真空夾盤122移動至收納於置換室13〇内 之移位器140之上方。然後,使電磁閥vu閉閥而解除真空 夾盤122之吸附,將玻璃素材載置於移位器140上之特定位 置(本實施形態中,為4個部位)。 於順序6中,密閉置換室130,並使電磁閥V9開閥而使置 換室130成為真空。接著,使電磁閥vl〇開閥而將真空腔室 20内之氮氣導入至置換室130中,將置換室13〇内置換為氮 氣,並且使真空腔室20之壓力與置換室13〇之壓力均壓 化0 139984.doc •18· 200948576 於順序7中,使電磁閥V21開閥,藉由空氣壓之供給而打 開閘閥160。接著,使移位器移動機構15〇之水平移動台 152及氣缸體154作動而使移位器140水平移動至真空腔室 20之内部。 • 於順序8中’驅動爐内手機構50而使吸附手52移動至移 . 位器140之上方。吸附手52上設置有4個吸附墊,藉由電磁 閥VI〜V4之開閥而同時吸附移位器ι4〇上之*個玻璃素材。 ©此時,藉由電磁閥V25之開閥而驅動提昇單元25〇,使移位 器140上升以便讓移位器140上之玻璃素材接近吸附手52。 於順序9中,藉由壓力產生機構8〇之升壓缸體81而使胴 模42向上移動,將胴模42之側面開口部之高度位置調整為 適於插入吸附手52之最適位置。又,在吸附手52插入至胴 模42之内部後,調整胴模42之高度,以便成為適合將吸附 於吸附手52下表面側之各玻璃素材載置於各下模之上端之 高度位置。 φ 於順序10中’使電磁閥VI〜V4閉閥,解除插入至胴模42 内部之爐内手機構50之吸附手52對於4個玻璃素材之吸 附。藉此,由吸附手52所搬入之各玻璃素材被載置於胴模 42内之下模44上。此時,上模46及下模44例如預先被加溫 至玻璃黏度為1016 dPa.s左右之溫度。 於順序11中,使爐内手機構50之吸附手52返回至移位器 140 侧。 於順序12中’使電磁閥V1 5、V16、V26開閥,將定中 心·刮刀機構60自側方插入至成形用模具單元4〇之胴模42 139984.doc -19- 200948576 内,並且將載置於下模44上之各玻璃素材之載置位置中心 對準於下模44之中心(軸線上)。 於順序13,使定中心.刮刀機構6〇從成形用模具單元4〇 脫離。 於順序14中,使電磁閥V18打開,將加熱溫度已設定為 900 C之加熱器單元70自側方插入至成形用模具單元4〇之 胴模42内,並且對載置於下模44上之玻璃素材進行加熱。 再者,胴模42受到其他加熱機構之加熱,下模44、上模46 藉由來自胴模42之熱傳導而間接地受到加熱。 於順序15中,在經加熱器單元7〇加熱後之玻璃素材之黏 度例如成為ΙΟ7 dPa.s時,停止加熱器單元7〇之加熱,使加 熱器單元70從成形用模具單元4〇之胴模上脫離。 於順序16中,使壓力產生機構8〇之升壓缸體“作動以使 成形用模具單元40之胴模42及下模44上升。藉此,玻璃素 材在上模46與下模44之間受到衝壓。上模46相對於上下方 向之軸線而由調芯機構9〇之球面軸承可調芯地支持。 於順序17中,於上述衝壓步驟時,#由㈣機構90之球 面轴承而調怒成使得上模46之軸線與下模44之軸線一致。 於順序18中,將玻璃素材在下模44與上模料之間進行特 定時間衝壓而成形為光學元件(非球面透鏡)。 於’丨員序19中,衝壓力係經由上模壓力分配機構⑽之上 部槓桿機構H)2而傳遞至上部氣缸體1()4,從而氣缸體ι〇4 上作用有壓縮負載’利用上部氣虹體1〇4内之空氣壓上升 而緩衝上模46之壓力。又,利用三向閥V30之切換,根據 139984.doc -20· 200948576 對上模46之衝壓力之增減來控制上部氣缸體1〇4内之空氣 【又,將朝上方擠麼胴模42之升麼缸體81之衝壓力控制 為固定。 於圖3B所示之順序20中’使電磁閥V19、v2〇開閥,對 . 下模44及上模96供給冷卻氮氣,從而使所成形之光學元件 與下模44及上模46 —併冷卻。 於順序21中,玻璃素材因冷卻而收縮,從而施加於玻璃 φ 素材上之壓力消失,因此使下模壓力賦予機構370之下部 缸體610(參照圖1〇)作動而使下模44略微上升。藉此,可使 光學元件之形狀穩定化。 於順序22中’使電磁閥V15、V16、V26開閥,將定中 心.刮刀機構60自側方插入至成形用模具單元4〇之胴模42 内。此時,將定中心·刮刀機構6〇之插入高度位置設定為 光學元件周緣部之上方。 於順序23中,當下模44及上模46之溫度下降至特定溫度 參 後,使下模壓力賦予機構370之下部缸體61 〇(參照圖1〇)作 動而使成形用模具單元40之下模44下降。 • 於順序24中,使壓力產生機構80之升壓缸體81作動而使 _ 胴模42與定中心·刮刀機構60下降。藉此,下模44從上模 46上分離,附著於上模46上之光學元件(成形品)藉由定中 心.刮刀機構60而從上模46上分離並載置於下模44上。 於順序25中,使定中心·刮刀機構6〇脫離成形用模具單 元40。 於順序26中,使爐内手機構5〇之吸附手52插入至成形用 139984.doc -21· 200948576 模具單元40之胴模42内,利用壓力產生機構8〇之升壓缸體 81而使胴模42上下移動,以將下模44之高度位置調整為適 於及附手5 2吸附經衝壓後之光學元件之最適位置。繼而, 使電磁閥VI〜V4開閥,將已衝壓成形之4個光學元件吸附 於吸附手52之各吸附墊53上。然後,使吸附手52向移位器 140侧移動。藉由電磁閥25之開閥而驅動提昇單元25〇,使 移位器140之上表面接近於被吸附手52所吸附之光學元 件。 於順序27中,使電磁閥V1〜V4閉閥而解除對4個光學元 件之吸附。藉此,由吸附手52所移送之各光學元件被載置 於移位器140上。 於順序28中’利用移位器移動機構15〇之氣缸體154而使 移位器140滑動並返回至置換室丨3 〇内,使閘閥i 6〇進行關 閉動作’將置換室130與真空腔室2〇之間的連通路132隔 斷。 於順序29中’打開置換室13〇而將空氣導入至置換室13〇 内。 於順序30中,驅動標量型機械手12〇以使真空夾盤122移 動至置換室130之移位器140之上方,使電磁閥vi 1開閥, 利用真空失盤122來吸附移位器140上之4個光學元件(成形 品)。 於順序31中’驅動標量型機械手12〇而使真空夾盤122移 動至托板112之上方’使電磁閥vi 1閉閥以解除對各光學元 件之吸附’並將各光學元件載置於托板丨丨2上。至此,衝 139984.doc •22· 200948576 壓成形裝置10所進行的光學元件之衝壓成形之製造步驟結 束。於衝壓成形裝置10中,重複上述順序1〜31而可高效率 地量產出光學元件。 接著’對如上所述衝壓成形出光學元件之衝壓成形裝置 . 10之各部分之構成加以說明。 • [成形用模具單元40之構成] 圖4係表示成形用模具單元4〇、調芯機構9〇、上模壓力 φ 刀配機構100之構成之縱剖面圖。如圖4所示,成形用模具 單元40構成為利用胴模42而導引下模44與上模46。胴模42 中’其下部具有可插通4個下模44之4個下部導引孔42a, 其上。卩具有可插通4個上模46之4個上部導引孔42b。又, 於胴模42之中央部,設置有可插入下模44之上端(下成形 4 )44a與上杈46之下端(上成形部)46a之成形空間42c。該 成形空間42c連通於胴模42之左右侧面上所開口之開口 42d,自左側之開口 42d插入有爐内手機構5〇之吸附手或 φ 加熱器單元70,自右側之開口 42d插入有定中心·刮刀機構 60 ° • 如圖5所示’胴模42之下部導引孔及上部導引孔42b • 係於X、γ方向上各並列設置兩個,並配置成於任一方向 上均關於軸線而對稱。藉此,4個下模44及上模46各自於 衝璧成开/時所產生之熱被均勻地傳導’從而由溫度所導致 之各模之差異受到抑制。 又,於胴杈42之上下表面上,設置有用以使冷卻用氮氣 氣體通過之冷卻用槽48。於衝壓成升多時,對冷卻用槽48供 139984.doc •23· 200948576 給冷卻氮氣氣體,藉此冷卻胴模42。 返回至圖4進行說明。下模 r棋44係對包含超硬合金之圓棒 材加工而成者,於其上端44 % 4a上形成有用以對光學元件進 行衝Μ之成形用凹部1該成形用凹部中,載置有上述玻 璃素材(例如玻璃球)。再者,成形用凹部之形狀被加工成 與所要成形之非球面透鏡之表㈣狀㈣錢R(_nd, 圓形)形狀。 又下模44中,於其下部具有朝半徑方向突出之大徑部 44b ° 在配置於胴模42下方之胴模基底壓板437之上部,積層 有隔熱材438及底板439,於底板439上,緊固有胴模42。 又’於底板439上,設置有用以使冷卻氮氣氣體流過時之 氮氣氣體逃逸之槽(圖4中隱匿不見)。 於胴模42之底部42g上形成有缺口部42h,該缺口部42h 内分別配置有間隔構件4〇〇。於各間隔構件4〇〇上載置有各 下模44。各間隔構件400係調整各下模44之軸線方向上之 尺寸精度之不均者。即’間隔構件4〇〇抵接於各下模44之 大徑部44b之下表面’並構成為使各下模44之成形面之高 度一致。 於真空腔室20之底板20a上形成有4個貫穿孔603a,各下 模加壓桿602插通於各貫穿孔603a中。各下模加壓桿602於 衝壓成形時利用真空腔室20之底板20a之下表面側所配置 之下模壓力賦予機構370(參照圖10)而朝上方加壓。 另一方面,於胴模基底壓板437、隔熱材438、及底板 139984.doc -24- 200948576 439之中央’設置有向冷卻用槽48供給冷卻用氮氣氣體之 通路49 ^於該通路49上,連接有供給冷卻氮氣氣體之氮氣 供給管435 ’於氮氣供給管435上配置有電磁閥vi 9。 又’於導引上模46之胴模42之上表面,亦設置有冷卻用 • 槽48 ’該冷卻用槽48中供給有來自氮氣供給管436之冷卻 用氮氣氣體’該氮氣供給管436上配置有電磁閥V20。因 此,胴模42係藉由對形成於其上下表面上之冷卻用槽4〇供 給冷卻用鼠氣氣體而被冷卻。 ® [調芯機構9G之構成] 接著,參照圖6,對上模46之調芯機構90之構成進行說 明。 如圖6所示,調芯機構9〇含有可自如擺動地支持上模46 上端之球面軸承92、及保持球面軸承92外周之軸承保持構 件94。軸承保持構件94之周緣部94a載置於自真空腔室 之頂板20b懸吊下來之吊下構件312上。 φ 上模46係對包含超硬合金之圓棒材加工而成者,於其下 端46a上形成有用以對光學元件進行衝壓之成形用凹部或 ' 《形用凸部。再者,成形用凹部及成形用凸部之形狀被加 工成與所要成形之非球面透鏡之表面形狀相對應的曲面形 狀。 少 又,上模46中,於其上端附近朝半徑方向突出有大徑部 46b,向大徑部46b之下方延伸之下部46c插通於胴模ο之 上部導引孔42b_。又,上模46具有向大徑部4的之上方延 伸之上部46d,該上部46d插通於球面軸承92中從而保持為 J39984.doc •25· 200948576 於任一方向均擺動自如。 進而’於上模46上部46d之外周上,卡止有防止自球面 轴承92脫落之止位環47。又,於上模化上部偏之上端 所開口之軸孔4以中,插入有具有相較上部彻之外徑更大 之頭部之鉚釘形狀的壓力傳遞構件49。該磨力傳遞構件49 係由超硬合金所形成,其承受對上模“之負載,因此於變 形或磨耗之前會定期更換。 球面軸承92含有:嵌合於上模粕之上部_之外周中的 球體(内輪)95;及具有讓球體95之外周滑動之球面凹部的 球體支承部(外輪)96。球體95相對於球體支承部96之球面 凹部而無間隙地滑接’且滑動阻力減輕。因此,例如當上 杈46之軸線相對於胴模42之上部導引孔仙而偏離時,若 之下部仏於半徑方向之外力作用於上模46,則球 體95會朝負載較小的方向旋動。 能以使上模46之袖線與胴模42之上部㈣孔杨 ❹ =相:致的方式進行調芯動作。於圖”,左側之上 古表;:相對於袖線而傾斜有0角度之調芯動作中之狀 I,右側之上模46表示調怒結束之狀態。 ^球體95與球體支承部96之球面凹部之相同曲率之球 面彼此滑接’故球體95向任—方向均可旋動。 圖7係表示厕模p a l立々# 圖。如圖7所示,上模46為i衝麼成形狀態之縱剖面 49…Γ 模42上升時,力傳遞構件 49之頭中心焚到衝壓力。 i39984.doc -26 - 200948576 吊下構件3 12係用以將軸承保持構件94於真空腔室2〇内 懸吊下來之構件’其下端鉤部312a卡合於自軸承保持構件 94之外周突出成凸緣狀之周緣部94a,其上端鉤部3 12b係 與女装於真空腔室2〇之頂板20b上之支持構件303可卡合地 . 構成。再者,支持構件303於圖4中省略。 • 又於衝壓成形時’在壓力產生機構80之升壓缸體81之 擠壓力之作用下,胴模42向上移動而使下模44之上端44a φ 抵接於上模46之下端46a,並略微(例如數mm)向上方提昇 上模46,以此對玻璃素材進行加壓。此時,軸承保持構件 4亦向上移動,故轴承保持構件之周緣部9“向下端鉤 °P312a之上方離開。藉此而變化為對球面軸承92之束缚被 解除之狀態,從而成為球體95與球體支承部96之調芯動作 不會受到阻礙之自由動作狀態。 又播壓上模46之壓力被介在於胴模42之上表面42f與 上模46之大徑部46b之間的環狀間隔件91所承受,故該壓 Φ 力會傳遞至上模加壓桿302,該上模加壓桿302係與螺入上 模46上端之壓力傳遞構件49之頭部抵接。因此,成為球面 • 軸承92上並無衝壓力作用之構成。 , 於該狀態時,當上模46之軸線相對於胴模42之上部導引 孔42b而偏離時,藉由球面軸承92之旋動動作而可進行流 暢的調芯動作。如此,對軸承保持構件94而言,於胴模% 上下移動時,上模46在球面軸承92之調芯作用下而自如地 移動,故可對應胴模42之移動而自動地修正相對於抽線之 傾斜。藉此,在使胴模42上下移動時,可防止上模粍相對 I39984.doc -27- 200948576 於胴模42之軸線而傾斜,從而可防止於胴模42滑動時產生 「刮損」。 又,在以吊下構件3 12而保持有上模46之狀態下使胴模 42下降,取出成形品後,再次將玻璃素材g載置於各下模 44上並再次進行加壓成形,於此情形時,在以吊下構件 312而保持有上模46之狀態下使胴模仏上升。藉此,胴模 42—面由其導引孔導引上模46而與之滑接,一面經由軸承 保持構件94、球面軸承92而上升。此時,上模46被固定於 大致其所在位置而不動作。此時,必需在4個上模46與綱 模42不產生「刮損」之情況下使胴模42滑動移動,而利用 球面軸承92之上述作用將使其成為可能。 於胴模42已下降之狀態下,在軸承保持構件料、球面轴 承92之作用下’各上模46相對於軸線之水平面保持為正交 狀態。若自該狀態使胴模42上升,則上模46、抽承保持構 件94、及球面軸承92會因自重而保持於大致其所在位置, 於胴模42上升時保持有上述正交狀態,故可防止「刮 損」。 如此’為了至少於上模46之中心、處作用有與胴模42之滑 動面平行之衝壓力,並且於上述上模46之中心處作用有下 降力,而形成為被吊下構件312所懸吊支持之轴承保持構 件94經由調芯機構9〇之球面轴承似行連動之構成,因此 在對玻璃素材G進行衝屢成形時、以及使已成形之光學元 件成形品脫模時,可使對上模46施加之胴模上下構件之力 總是以貫通上模46之中心之方式而作用,從而可高效地製 139984.doc -28- 200948576 •光學功能面相對於光軸而位於正確位置之高精度的光學 元件。 [上模壓力分配機構(上模加壓調整機構)100之構成] 接著’參照圖4 ’對上模壓力分配機構1〇〇之構成進行說 明。上模壓力分配機構i 00係設置於真空腔室2〇之頂板2〇b 上表面之上模46的加壓調整機構,其係由分別對應於各上 模46而配設之4個上部槓桿機構1〇2、及4個上部缸體1()4所 構成。再者,圖4中上述構件各顯示2個。 上部槓桿機構102係由以螺栓等而緊固於真空腔室2〇之 頂板20b上之上部支點構件105、及經由連結銷1〇5&而連結 於上部支點構件105上端之上部擺動構件1〇6所構成。上部 支點構件105相對於頂板2〇b之上表面之安裝構件108而可 滑動地緊固。因此,可藉由變更連結銷丨〇5a相對於上部擺 動構件106上所設置之複數個孔106a之插通位置,並且藉 由變更上部支點構件105相對於安裝構件108之緊固位置, 而調整上部槓桿機構102之壓力。 以貫通真空腔室20之頂板20b之方式而於上下方向上延 伸之上模加壓桿3 02之上端,經由連結銷1 〇9而連結於上部 擺動構件106之一端。又,上部擺動構件106之另一端經由 連結銷107而連結於上部缸體1 〇4之活塞桿1 〇4a。因此,於 上述衝壓成形時’當朝上方擠壓上模46時,因其向上移動 所造成之壓力會經由上模加壓桿3 02而傳遞至上部擺動構 件106,從而上部擺動構件1〇6以上部支點構件105為令心 進行擺動而向壓縮方向驅動上部缸體104之活塞桿i〇4a。 139984.doc -29- 200948576 上部缸體104包含氣缸體,於缸體内部填充有高廢空 氣。因此,若將壓縮負載施加於活塞桿1 〇4a上,則活塞桿 104a會向下方滑動,並且空氣被壓縮而使得朝上方擠壓活 塞桿104a之壓力增大。該壓力會根據與依上部擺動構件 1 〇 6及上部支點構件1 〇 5之連結位置而決定之連結銷1 〇 7、 l〇5a、109各自之距離相對應的比率而增大。 因此’上部缸體1 04所產生之壓力藉由上部槓桿機構i 〇2 而增大並經由上模加壓桿3〇2而傳遞至上模46。由此,上 模46會承受藉由下模44而朝上方擠壓之壓力,並且會在上 部缸體1 04所產生之壓力之作用下朝下方擠壓,故保持於 使兩方向之壓力平衡之穩定狀態。因此,在下模44與上模 46之間已衝壓成形之玻璃素材會在無間隙地密著於下模 之上端44a與上模46之下端46a之表面之狀態下受到加壓, 從而成形為與上端44a及下端46a之間所形成之空間形狀相 對應的非球面透鏡。 於该情形時,較理想的是構成為使壓力產生機構8〇之擠 壓力(例如,總負載為19.6 kN)對各上模46均等地作用有 4.9 kN之負載,若對各上模46之分布負載產生不均,則會 =4個成形品(光學元件)之品質(例如由擠壓所導致之透鏡 厚度之不均、或者形狀、精度之不均)造成影響。又,當 然亦存在有4組中各組之下模44、上模46、上模加壓桿3 等之尺寸上之不均,因此,於壓力產生機構8〇之擠壓力作 用下各模被壓到極限之行程會產生差異。 為了對玻璃材料進行加熱加壓而成形出高精度光學元 139984.doc 200948576 件,必需使較高的壓力(3.92〜5·88 kN)作用於各上模鈈。 進而,在反覆地進行將玻璃材料於模内加熱至特定溫度 (400〜800°C)並於加壓成形後取出成形品(光學元件)之製$ 之方法所用的裝置中,因反覆進行成形品、模構件、綱模 . 等之加熱·冷卻,故要求縮短加熱-冷卻-加熱之週期,因此 . ^必需縮小模裝置全體之熱容量,從而必需謀求裝置之小型 化。 參 進而’於實施例之裝置中’為了利用4個模構件而獲得 相同之成形品、例如獲得相同厚度尺寸之透鏡,藉由圖7 所示之上模加壓桿302與上升之胴模42而擠壓上模仏,使 胴模42之上表面42f經由間隔件91而壓到上模钧之大徑部 46b之下端面,以限制胴模42之移動位置,以此規定成形 品之厚度尺寸。 換言之,使胴模42之上表面42f經由間隔件91而碰觸到 所有的4個上模46,此為獲得4個成形品之厚度尺寸之必要 Φ 條件。因此,必需使擠壓力獨立地作用於4個上模46之每 個上,且使胴模42之上表面42f完全碰觸到各上模46, . 進而使充分之擠壓力作用於上模46。 於本實施形態_,藉由上部槓桿機構102而使由配置於 真空腔室20之頂板2〇b上之上部缸體1〇4所產生之壓力增 大,使胴模42之擠壓力作用於上模46,藉此可獲得對上模 46之充刀之擠壓力。又,上模壓力分配機構中,藉由 將J; 缸體1 〇4配置於真空腔室2〇之外側而可使真空腔室 20小型化,且藉由使用上部槓桿機構1〇2而謀求上部缸體 139984.doc •31- 200948576 1〇4自身之小型化。 再者,於本實施形態中,列舉將氣缸體應用於上部缸體 1 04之構成之例進行了說明’但並不限定於此’亦可為填 充有空氣以外之氣體之缸體裝置,或者設置有油壓缸體之 加壓機構(積蓄器等)者。 若自壓力產生機構80之升壓缸體81對胴模42作用有擠壓 力,則在與胴模42—併上升之下模44與上模46之間開始進 行衝壓成形。利用該擠壓動作並經由上模46而對上模加壓 桿302進行上壓,並且對上部槓桿機構1〇2之擺動構件1〇6 響 之一端進行上壓。藉此,上部缸體i 〇4受到壓縮。 隨著衝壓之進行,上模46滑接於胴模42之導引孔42b並 移動且直至載置於胴模42上表面42f上之間隔件91抵接 於上模46之大徑部46b為止,一直進行胴模2之移動。此 處,於4個模具組中,當其中3個的上模牝之大徑部4仍上 抵接有間隔件91之狀態時,試想於另一個的上模46之大徑 部46b上未抵接間隔件91之狀態。於該情形時,藉由來自 壓力產生機構80之擠壓並經由上模加壓桿3〇2而使上部缸 ❹ 體1〇4壓縮,由此可使上述未抵接之上模牝上亦壓有間隔 件91。藉此,4個上模46之所有位置可總是保持於固定位 置,因而可確保所有成形品之厚度尺寸。 接著,對上模壓力分配機構1〇〇之具體例進行說明。對 如下構成進行說明:當上部缸體丨〇4使用一個最大負載為 N之氣缸體時,將支持擺動構件1 之上 ⑻之位置設定為使其至上模加壓桿皿之㈣及至上^ 139984.doc •32· 200948576 體i〇4之距離之比為i: 1〇 ,且將上述各構件組裝所成之構 成。其結果可構成利用損桿原理而承受上部缸體1〇4之最 負載之10倍貞載(此次為5.68 kN)的加壓調整機構。將該 力二壓調整機構以對應於各上模46之方式而組裝4個,二 • $成4個操作用之加壓調整機構(能承受之總壓力為22 7 )由此,與將盤簧組裝入真空腔室2〇内之專利第 以:5〇37號公報之成形裝置相比較,因無需組裝大量的盤 Φ *從而無需進行盤簧調整作業,又因其設置於真空腔室20 之外側,故空間餘裕而容易設計。 又’因無需如使用有盤簧之上述先前裝置般要對上部缸 體104進行冷卻,故亦無需設置用以供給冷卻水之配管 等。即’於本實施形態中,不設置用以對上部缸體刚進 打冷卻之冷卻機構即可,且亦無需採取防止在有冷卻水茂 漏夺對由超硬合金製作之上模46、下模44造成腐钱 策。 ❿ 進而,僅藉由變更對上部缸體104所供給之空氣壓力即 可與各種衝壓力對應,從而無需如專利第期〇37號公報 . 料將盤I部分進行分解並調整。變更上部支點構#1〇5 <位置以代替對上部缸體1〇4之空氣供給氣壓進行變更, 藉此亦可與各種衝壓力對應,該方法相較專利第2815037 號公報中之方式更容易進行調整。 於該狀態時,將壓力產生機構8〇之升壓缸體81之推力 (施加於4個上模46之總加壓力)設定為〗9 6 kN並測定各上 模加壓桿302間之廢力不均後,可確認不均之範圍限於% 139984.doc •33· 200948576 N。其後,使用已將到達間隔件91之高度不均調整為 mm以内之模組’利用成形條件之一的19.6 kN之胴模上升 壓力而成形出成形品尺寸φ1〇ηιιη、中心厚度35mm、透鏡 面之曲率分別為15 mm、2〇 mm之攝像機用透鏡時,並不 會4台模一併大致同時產生刮損等之不良情形,而是完全 壓到極限,所完成之成形品亦與由各模所形成之模穴空間 70全一致,由此獲得充分滿足厚度精度與光學上之面傾斜 之容許值的成形品。 [爐内手機構50之構成] 接著,參照圖8A、圖8B,對爐内手機構5〇之構成進行 說明。如圖8A、圖8B所示,於爐内手機構5〇之臂54之前 端上具有將吸附手52水平保持之水平保持機構%。又爐 内手機構50於真空腔室20之頂板2〇b之上表面具有氣缸體 5〇a,藉由氣缸體50a而使旋轉軸5〇b旋轉驅動。於旋轉轴 50b之下端上,連結有臂54,吸附手52與臂54一同旋動, 進而於吸附手52之下表面側設置有4個真空吸附墊μ。 各真空吸附墊53之間隔與下模44之間隔相同。 又,於吸附手52之下表面,設置有設於胴模42上之一對 定位銷43所嵌合之一對定位孔51。使該一對定位孔51中嵌 5有對疋位銷43,以此將4個真空吸附塾53定位於與胴 模42内之各下模44相對向之位置。 水平保持機構56具有:一對板構件57,其連結於臂54之 則端下表面上所固定之上部基座55a與中間基座55b之側 面,4根螺栓58,其連結於中間基座與下部基座55〇之 I39984.doc 200948576 間;及4個螺旋彈簧59,其捲裝於各螺栓58之外周。下部 基座55c固定於吸附手52之基部523上,且於4根螺旋彈簧 59之彈力作用下保持於水平狀態。吸附手52係於基部上表 面上緊固有下部基座55c,其與下部基座55c一同保持於水 • 平狀態。 . 又,水平保持機構56係利用一對板構件57而水平地保持 有中間基座55b,並利用配置於中間基座55b之下表面側之 ❿ 4個螺旋彈簧59之壓縮變形,而以向z方向及繞χ軸、丫軸 可移位之方式保持有下部基座55()。 各螺栓58安裝成貫通中間基座55b並螺入下部基座55c, 其頭部比中間基座55b之孔徑大從而不會自中間基座55b脫 落又,^下部基座55c上作用有朝上方之外力時,螺栓 58以向中間基座55b之上方突出之方式而動作並且螺旋 彈簧59受到壓縮,從而下部基座55c可向上方移位。而 且,若無外力,則下部基座55e在各螺旋彈簧59之彈力作 _ 用下恢復為水平狀態。 又,若對吸附手52施加傾斜方向之外力,則4根螺栓58 - 之任者均會朝比中間基座55b更上方突出而吸收該傾 . 斜。而且,若無外力,則在螺旋彈簧59之彈力作用下恢復 為原來之水平狀態,吸附手52水平地保持。 又,在上述吸附手52與定位銷43之間,配置有限制上下 動作量之碰觸構件。再者,為了防止因熱震而導致成形品 破裂,吸附塾53係用熱傳導率低之材料所製造,且為了吸 附高溫成形品而利用具有耐熱性之材料所製造。舉出一例 139984.doc -35- 200948576 為t酿_亞胺樹脂。 又’爐内手機構50係以如下方式而發揮功能:在吸附墊 53上吸附有玻璃素材〇之狀態下,藉由於氣缸體5〇b之旋轉 控制下之旋轉軸50a之旋動動作、及胴模之上下定位機構 而將吸附墊53導入至胴模42内,又,在利用吸附墊53之吸 附力而吸附有成形品之狀態下,藉由胴模42之上下定位機 構及旋轉軸50b之反向旋動動作而自胴模42内取出成形 品0 [爐内手機構50之吸附配管路徑] 圖9係表示連接於各吸附墊53上之吸附控制單元26〇之配 官路徑之示圖。如圖9所示,於各吸附墊53上,連接有吸 附控制單元260之各抽吸配管501〜504,各抽吸配管 501〜504連接於2根分歧配管5〇6、507。各抽吸配管 5 01〜5 04上配設有壓力感測器5丨丨〜5丨4及吸附用之電磁閥 V1 〜V4 〇 又,於分歧配管506、507上,配設有流量調整用之可變 即流閥516、517。進而,氮氣配管521〜524上設有流量調 整用之可變節流閥53 1〜534及電磁閥V5〜V8。 各吸附塾5 3構成為藉由電磁閥V1〜V4之開閥而可分別對 應於4個下模44來獨立地進行吸附、或解除吸附,吸附源 為真空泵單元17〇。並成為如下構成:讓自真空泵單元17〇 分歧之抽吸配管501〜504連通於各吸附墊53,並以對4根抽 吸配管501〜504中之每2根而配置丨個之比例來配置進行流 量調整的可變節流閥516、517,半獨立地控制4根抽吸配 139984.doc -36- 200948576 管501〜504各自之抽吸壓力。於4根抽吸配管5〇1〜5〇4上分 別配備有壓力感測器5 11〜5 14 ’故即便在抽吸壓力半獨立 之情況下亦可毫無問題地進行保持壓力控制。為了實施用 以解除吸附力之真空破壞而安裝有逆噴射氮氣之機構,且 為了於各線上可獨立地控制逆噴射力,在4根氮氣配管 521〜524上分別配置有可變節流閥531、532、533、534。 因此’於本實施形態中,可利用可變節流閥516、517而 控制4個吸附墊53各自之吸附力,與在各抽吸配管5〇 ^04 上分別設置有可變節流閥之情形相比,可以更少數量之節 流閥來進行控制,因而於成本方面亦有利。 [下模壓力賦予機構370之構成] 圖10係表示下模壓力賦予機構(下模加壓調整機構)37〇 之構成之示圖。圖10所示之下模壓力賦予機構37〇係設置 於將壓力產生機構80之升壓缸體81所產生之壓力傳遞至胴 模42的支持構件85上。支持構件85形成為矩形,其具有: 連結有升壓缸體81之升降驅動轴84之下部基座85a;自下 部基座85a之兩側朝上方延伸之支柱85b ;及連結於支柱 85 b上端之上部基座85c。 下模壓力賦予機構370係由安裝於支持構件85之上部基 座85c之下表面上的4個下部槓桿機構6〇〇 '及4個下部紅體 6 1 〇所構成。各下部槓桿機構600及各下部缸體61 〇係分別 對應於各個下模4 4而設置。 下部槓桿機構600係由以下部分構成:自下方擠壓各下 139984.doc -37· 200948576 模44之4根下模加壓桿602 ;緊固於上部基座85c之下表面 上之下部支點構件604 ;及以下部支點構件604之連結銷 604a為中心而可擺動地被支持之下部擺動構件606。 下部支點構件.604係相對於上部基座85c之下表面之安裝 構件608而可滑動地緊固。因此,藉由變更連結銷6〇4&相 對於下部擺動構件606上所設置之複數個孔6064之插通位 置’並且藉由變更下部支點構件604相對於安裝構件6〇8之 緊固位置,而可調整下部槓桿機構6〇〇之壓力。 下部缸體610包含氣缸體’於缸體内部填充有高壓空 氣。若將壓縮負載施加於活塞桿61 〇a上,則活塞桿6丨〇a會 向下方滑動,並且空氣被壓縮而使得朝上方擠壓活塞桿 610a之壓力增大。該壓力會根據與依下部擺動構件6〇6及 下部支點構件604之連結位置而決定之連結銷6〇7、6〇4&及 凹部606b各自之距離相對應的比率而增大。 下模加壓桿602之下端嵌合於下部擺動構件6〇6之一端上 所設置的凹部606b。又,下部擺動構件6〇6之另一端經由 連結銷607而連結於下部缸體61〇之活塞桿61〇&之下端部。 於進行上述衝壓成形時,若將壓力產生機構8〇之升降驅 動軸84朝上方擠壓,則下模壓力賦予機構37〇會與支持構 件85、升降基座43、及胴模42—併朝上方擠壓。 下模壓力賦予機構370於藉由胴模42之向上移動而使得 下模44接近於上模46之狀態下,增大對下部缸體61〇之壓 力。藉此,下部缸體610朝下方驅動活塞桿6i〇a,且經由 下部擺動構件606而使下模加壓桿6〇2向上移動。然後,下 139984.doc -38- 200948576 模加壓桿602朝上方擠壓下模44。由該下模加壓桿6〇2之向 上移動所產生之壓力,將成為下模44相對於載置於下模44 與上模46之間的玻璃素材之衝壓力。 在下模44與上模46之間經衝壓成形之玻璃素材,以無間 . 隙地密著於下模44之上端44a之成形面與上模46之下端46a • 之成形面之表面的狀態而受到加壓,從而成形為與上端 44a及下端46a之間所形成之空間形狀相對應的非球面透 鏡。 ❹ [定中心.到刀機構60之構成] 圖11A係表示定中心.刮刀機構6〇於動作前之狀態之俯視 圖。圖11B係表示定中心·刮刀機構6〇於動作前之狀態之侧 視圖。如圖UA及圖11B所示,定中心.到刀機構6〇含有:2 組插入部710,其具有於水平方向(γ方向)上延伸之4根插 入桿7〇〇·’桿支持部720,其支持插入部71〇並且使各插入 桿700於又方向振動;2軸驅動部73〇,其使桿支持部72〇於 « Z方向移動;移動台740,其支持z轴驅動部73〇; γ軸方向 驅動部750’其使移動台74〇於γ方向移動;及安裝台了⑼, . 其支持γ軸方向驅動部75 0。 安裝台760緊固於載置固定有胴模42之洞模基底壓板437 上。又,插入部710之插入桿700自水平方向插入於月同模C 之成形空間42c中。 插入桿700係將在Y方向上平行配設之每一對配置為一 組,於桿支持部,上,設置有桿驅動機構,其係都定 中心時使-對插入桿朝相互之接近方向或分離方向進 139984.doc -39· 200948576 行開閉移動之方式加以驅動。作為該桿驅動機構,可使用 由空氣壓所驅動之氣缸體,或者亦可使用由空氣壓所驅動 之擺動式致動器。 一對插入桿7〇〇藉由如剪刀般相互接近、分離之方式進 灯振動’而可自兩侧同時擠壓載置於下模44上之玻璃素 材。 又’於一對插入桿700之相互接近之側面上,設置有與 玻璃素材之直徑對應之凹部7〇〇a、7〇〇b。又,凹部700a、 700b中心之間隔設定為與γ方向之各下模44之分開距離相 同的距離。 圖12Α係表示定中心.刮刀機構6〇於動作中之狀態之俯視 圖。圖12Β係表示定中心.刮刀機構6〇於動作中之狀態之側 視圖。如圖12Α及圖12Β所示’定中心·刮刀機構6〇搭載於 支持胴模42之升降基座43上,藉由Z轴驅動部730而調整插 入杯700相對於胴模42之高度位置,並藉由γ軸方向驅動部 750而將插入桿7〇〇插入於胴模42之成形空間42c中。 圖13係表示定中心刮刀機構6〇之定中心動作之俯視 圖。如圖13所示,在將玻璃素材〇載置於下模44上後,將 各插入桿7〇〇插入於胴模42之成形空間42c中。然後,使各 插入桿700之凹部700a、700b下降,以使其位於下模捎之 上端上所载置之玻璃素材G之兩側。再者,於本例中,衝 壓前之玻璃素材G並非為球形,而是預先形成為與所要成 形之光學元件相似之橢圓形狀,因此難以轉動。 於該插入狀態下,若使各插入桿700於X方向上振動,則 139984.doc -40- 200948576 各插入杯700之凹部7〇〇a、7〇〇b會於相互接近方向(關閉方 向)上反覆進行複數次移動。例如,如圖14A所示,將玻璃 素材G載置於自形成於下模44上端44a上之成形面(成形凹 4 )之中心位置(一點鏈線所示之位置)朝半徑方向偏離的位 置(以實現表不)上’對於此時之定中心、動作進行說明。如 上所述,各插入桿7〇〇之凹部7〇〇&、7〇〇1?於乂方向往復移動 而將玻璃素材G之外周向中心側擠壓。藉此,玻璃素材G 會焚到振動之各插入桿7〇〇之凹部7〇〇a、7〇〇b的擠壓而向 形成於下模44上端44a上之成形面(成形凹部)之中心移動。 圖14B中顯示有藉由上述各插入桿7〇〇之往復移動而使玻璃 素材G之中心對準於成形面(成形凹部)之中心之調整後的 狀態。 藉此,玻璃素材G自吸附墊53上分離而載置於下模44之 上端44a之後,即便載置於偏離下模44之軸心之位置上 時’亦可利用各插入桿700之凹部700a、700b而自兩側同 時擠壓來進行定中心’以使玻璃素材G位於下模44之軸 心 ° [加熱器單元70之構成] 圖15 A係表示加熱器單元7 0於動作前之狀態之俯視圖。 圖15B係表示加熱器單元70於動作中之狀態之俯視圖。如 圖15A所示,加熱器單元70包含玻璃加熱器8〇〇及驅動部 804。玻璃加熱器800内置有複數個卡匣式加熱器8〇2,並 連接於獨立的溫度調節機,控制藉由插入於玻璃加熱器 800中之熱電偶803而檢測出溫度之加熱溫度。複數個卡匿 139984.doc • 41 200948576 式加熱器802各自形成為圓筒形狀,且於平板狀加熱器部 80 1之内部以朝相同方向延伸之趨勢而並列設置。 又,玻璃加熱器800被設定為高溫(例如900°C ),故其係 由耐高溫之材質所作成(例如SKD(Steel Kogu Dice)61、 SKD62、赫史特合金(HASTELLOY),更佳為Anviloy、超 硬合金)。 驅動部804與加熱器部801之間係藉由連結部805而連 結。驅動部804例如包含氣缸體,在藉由電磁閥V 1 8之開閥 而供給之空氣壓之作用下,自胴模42之側面開口 42d插入 玻璃加熱器800。 而且,如圖15B所示,複數個卡匣式加熱器802係於通電 而發熱之狀態下對加熱器部801進行加熱,並將保持於一 定溫度(加熱溫度)之加熱器部801插入於胴模42之成形空間 42c 中。 於此,對將玻璃素材G進行加熱之步驟、及衝壓成形之 步驟之動作加以說明。 如圖16A所示,載置於下模44上端44a上之玻璃素材G位 於加熱器部801之下方,故其係藉由自加熱器部801所放射 之熱而被加熱至玻璃黏度例如為1 〇7 dPa·s為止。 接著,將藉由卡匣式加熱器802而保持於900°C之加熱器 部801自胴模42之開口 42d插入至下模44與玻璃素材G之上 方且上模46之下方之間。玻璃加熱器800與玻璃素材G之距 離可藉由調整胴模42之上升位置而自如地設定。上模46與 下模44係藉由插入於胴模42中之卡匣式加熱器而被加熱至 139984.doc -42- 200948576 例如玻璃黏度為109 dPa.s左右之溫度。另一方面,玻璃素 材G精由玻璃加熱器8〇〇而被加熱至例如玻璃黏度為1 〇7 dPa,s左右之溫度。以所需之時間將玻璃素材〇、上模46及 下模44加溫之後(例如90秒),使加熱器單元7〇之缸體機構 . 72(參照圖丨)作動而自胴模42中抽出玻璃加熱器800。 其後,如圖16B所示’利用壓力產生機構80之升壓缸體 81之壓力使胴模42上升,進行衝壓成形。 φ 上模45之大徑部46b經由間隔件91而充分接觸於胴模42 之上端之後(例如10秒鐘之後),對胴模42之冷卻用槽48供 給冷卻介質(例如氮氣氣體),於玻璃黏度例如為1〇10·5 dPa.s至1〇13 dPa.s左右之間,下部缸體61〇之壓力經由下部 槓桿機構600而朝上方擠壓下模44,從而自下模44施加衝 壓力(例如,總壓力為3 KN)。 在壓力產生機構80之壓力作用下,下模44與胴模42一同 向上移動,在下模44之上端44a與上模46之下端46a之間對 φ 玻璃素材〇進行衝壓後,玻璃素材G成形為與成形面之特 定形狀(例如橢圓形狀)對應之形狀。又,上模46中,於下 . 端46a之外周上形成有小徑段部46c。\Each upper mold and independently apply pressure to each of the above upper molds; the above upper 槿 139984. Doc 200948576 The second embodiment of the present invention solves the above-described problems as described in the first aspect of the present invention, characterized in that the press molding apparatus includes at least the upper mold, the lower mold, and the mold. The upper body and the upper swinging member are disposed on an upper surface of the casing. According to a third aspect of the invention, in the above-described first or second embodiment, the press molding apparatus according to the first or second aspect, wherein the lower mold pressure applying mechanism is in accordance with the above-described pressure generating mechanism The pressing force is applied upward to press the plurality of lower molds upward. According to a fourth aspect of the present invention, in the above-described press forming apparatus according to the third embodiment, the lower die pressure applying mechanism includes a lower cylinder, and the crucible is subjected to the above-mentioned action. a load generated by the pressure on the mold, and a lower swinging member that is slidably disposed via a fulcrum, and one end of which is in contact with the lower end portion of the lower mold, and the other end portion is coupled to the lower cylinder; The lower swinging member swings from the fulcrum to adjust the force of the lower cylinder to the lower mold. 。 The fifth embodiment of the present invention solves the above-mentioned problems by the above-described press forming apparatus according to any one of the first to fourth embodiments, which includes a plurality of aligning mechanisms During the upward movement of the die by the pressing force of the pressure generating mechanism, the position of the upper die relative to the die is aligned, and the plurality of four (4) configurations each include: a spherical bearing The upper mold is rotatable 'to make the axis of the upper mold relative to the moving axis of the mold when the upward pressing action is performed on the upper mold; and the upper mold supporting member is formed as 139984. Doc 200948576 supports the outer side of the above spherical bearing and separates the spherical bearing by the pressing action toward the upper side. According to a sixth aspect of the present invention, in the above-described press forming apparatus of any one of the above-mentioned i-th to fifth aspect, in the above-mentioned upper-die pressure distribution mechanism, the fulcrum is swung in the upper portion The connection position in the longitudinal direction of the member is variable, and the pressure acting on the upper mold is adjusted in accordance with the ratio of the joint position e of the fulcrum to the total length of the upper swing member. According to a seventh aspect of the present invention, in the dust forming apparatus of the fourth aspect, the fulcrum is in the longitudinal direction of the lower swinging member. The connection position is variable, and the eighth embodiment of the pressure acting on the lower mold is adjusted according to the ratio of the total length of the joint swinging member of the fulcrum to solve the above problem in the following manner: as described in the fifth embodiment In the above-mentioned (four) force-distributing mechanism, in the above-mentioned upper (four) force distribution mechanism, the upper cylinder body may be changed to "force" acting on the upper mold according to the filling dust force. The ninth embodiment of the present invention solves the above problems in the following manner: for example, the above-described dust forming device in a state in which the lower mold is filled, and the filling force in the lower cylinder is The pressure applied to the lower mold is adjusted in accordance with the filling pressure. The above-mentioned problem is solved in the following manner: 2, and the above-mentioned stamping forming of any of the eighth embodiment 139984. Doc 200948576 f The above-mentioned problem is solved by the above-mentioned upper cylinder being a gas-filled body in which a gas of a special (four) force is filled. According to a fifth aspect of the invention, in the ink forming apparatus of the fourth or ninth aspect, the lower cylinder is a gas red body in which a gas of a specific dust force is filled. According to a twelfth aspect of the present invention, the above-described press forming apparatus according to any one of the first to eleventh aspect, wherein the centering member is inserted before the punching Between the upper mold and the lower mold, the center of the position of the glass material placed on the lower side is aligned with the center of the lower mold from both sides, and the centering member presses the glass material After the optical element is formed, the mold is lowered, and the peripheral portion of the optical element is pressed downward. According to a thirteenth aspect of the present invention, the above-described press forming apparatus according to any one of the above-described first to twelfth embodiments includes: an adsorption hand attached to the inside of the casing Moving, the glass material is placed on the molding surface of the lower mold in the mold, and the punched optical element is taken out from the mold; and a hand holding mechanism that holds the adsorption hand in a horizontal state And a driving unit that drives the suction hand via the hand holding mechanism; the hand holding mechanism holds the suction hand by a plurality of elastic rubber members. According to a fourteenth aspect of the present invention, the above-described press forming apparatus according to any one of the above-described first to twelfth embodiments includes: an adsorption hand attached to the inside of the casing Moving, the glass material is placed on the forming surface of the lower mold in the cavity mold, and from 139984. Doc -12· 200948576 The punched optical element is taken out from the mold; the hand holding mechanism 'holds the suction hand in a horizontal state; and the driving portion drives the suction hand via the hand holding mechanism; the hand The holding mechanism is guided in the up and down direction by a linear guide. - [Effects of invention].  According to the present invention, in the process of moving the die upward by the pressure generating mechanism, the manganese is adjusted by the upper swinging member to press the upper die against the upper die and is pressed upward by the lower die pressure imparting mechanism. Since the mold is pressed, the pressure acting on the upper cylinder can be more reduced, the upper cylinder can be further miniaturized, and the cooling mechanism for water cooling is not required, as compared with the case where a plurality of coil springs are just superposed. It is not necessary to take measures to prevent corrosion of the mold when there is a shallow leak of cooling water. Further, by adjusting the pressure of the upper cylinder, it is possible to easily cope with the change in the left-hand force applied to the ', and the pressure can be more easily changed than the previous operation of changing the number of the coil springs. ❹ * The cut-and-form optical device has a lever mechanism that swings the force of the upper mold by swinging around the fulcrum.  The member is transferred to the rainbow body. Therefore, when the plurality of guide holes have the same mode, the sliding of the glass material is performed, and all the upper molds are completely pressed to the limit. And even if there is a difference in temperature between the molds, or the subtle temperature difference between the molds during pressurization, etc., the speed at which the press is started, the speed at which the forming or forming (the deformation speed of the glass) is different between the modes It is also possible to easily adjust the difference, and it is possible to take many effects such as good precision of the mouth of the formation and improvement of productivity. 139984. Doc -13- 200948576 According to the optical element of the present invention, since it has an anger mechanism, when a plurality of upper and lower dies are simultaneously formed by stamping, the force exerted on the dies is Each of the upper molds is supported at its position, and can act toward the center of the movement axis of the mold during the upward pressing operation of the mold, and can efficiently manufacture the optical functional surface relative to the wire from the non-existence to the damage. An optical component with high precision at the correct position. [Embodiment] Hereinafter, preferred embodiments of the present invention will be specifically described with reference to the drawings. Fig. 1 is a view showing the overall configuration of a press forming apparatus according to an embodiment. Fig. 1 is a view showing a vacuum chamber (frame) 2G for forming an optical element, and a pair of The vacuum chamber 2G supplies the glass material and takes out the storage chamber % of the formed optical element. The vacuum chamber 2G includes: a molding die unit 4 (); an in-furnace hand mechanism 50 for moving the glass material and taking out the formed optical element; and setting the glass material to be transferred to the molding die unit 40. And a centering/scraping mechanism 6 that separates the optical element from the upper mold; and a heater unit 70 that heats the glass material before forming. The vacuum chamber 20 is supported by a vacuum chamber gantry 22 on which a pressure generating mechanism 8 for squeezing the mold 42 and the lower mold 44 of the mold unit 4 for squeezing the upper side is provided.调; a aligning mechanism 90 for aligning the axis of the upper die; and distributing the pressure of the upper die 46 to the upper die force distribution mechanism (upper die pressurizing mechanism) 1 〇〇 during forming. The pressure generating mechanism 80 includes a boosting cylinder 81 which is fixed to the vacuum chamber 139984. Doc 200948576 Supported by the support base 82 on the lower surface of the chamber 20. The lift drive shaft 84 that is lifted and lowered by the pressure of the booster cylinder 81 is coupled to the lift base 43 of the support die 42 via the support member 85, and the lower die pressure applying mechanism 370 is mounted on the lift base 43. . * Further, the health chamber 30 includes: a pallet 110 on which glass material is placed;  A scalar robot 120 attached to the glass material on the pallet 110; used to carry in. a displacement chamber 13 that carries out the glass material and the optical element; a shifter moving mechanism 150 that moves the shifter 140 of the replacement chamber _130; and a communication path 32 between the communication replacement chamber 130 and the vacuum chamber 20 Open and close gate valve 160. Further, a vacuum pump unit 170 is provided at a lower portion of the storage compartment frame 32 supporting the storage chamber 3, and a filter unit 18A for supplying clean air to the storage chamber 30 is provided on the upper surface of the storage chamber 30. Further, in the vacuum chamber 20, an air pipe 190 for supplying high-pressure air, a nitrogen pipe 2 for supplying nitrogen gas, a nitrogen pipe 210 for cooling, and a vacuum pipe 22 for performing vacuum suction are provided. An air pipe 190 and a vacuum pipe 220 for supplying high-pressure air are connected to the φ material to 30. .  Further, on the air pipe 190, solenoid valves V21 to V25 for controlling the supply of high-pressure air are disposed. Further, a solenoid valve V14 for controlling the supply of nitrogen gas is disposed in the nitrogen gas pipe 200, and solenoid valves V丨9 and V2〇 for controlling the supply of nitrogen gas for cooling are disposed on the nitrogen gas pipe 21 for cooling. Further, solenoid valves V1 to V9, V11 to V16, and V18' V26 are disposed on the vacuum piping 22'. Furthermore, the solenoid valve VU) is disposed on the pipeline (3) between the vacuum chamber 20 and the displacement chamber 13G, and the vacuum is opened by opening the valve 139984. Doc -15· 200948576 The pressure of the chamber 20 is equalized with the pressure of the displacement chamber 13〇. Further, an electromagnetic valve V17 'V27 for exhausting is connected to the side wall and the bottom of the vacuum chamber 20. Each of the solenoid valves V1 to V27 includes, for example, a normally closed type 2埠2-position valve that is opened by a solenoid and is closed by a demagnetization of a solenoid. Further, below the vacuum chamber 20, a lifting unit 25 that lifts the glass material loaded into the vacuum chamber 2 is disposed; and vacuum suction is performed on the suction hand 52 of the hand mechanism 5 of the furnace. The adsorption control unit 260. The press forming apparatus 10 is configured by loading a glass material (glass blank) into a molding die unit 4, and pressing the die 42 by a pressure generating mechanism 8 to perform press forming. Further, the press forming is preferably carried out by filling an inert gas such as a nitrogen gas into the inside of the vacuum chamber 2 of the airtight structure in an inert gas atmosphere. Fig. 2 is a block diagram showing the configuration of a control system of the press forming apparatus 1A. As shown in Fig. 2, the control device 300 of the press forming apparatus 1 controls the following parts: the above-mentioned furnace hand mechanism 50, centering. The scraper mechanism 60, the heater unit 70, the pressure generating mechanism 8〇, the upper die pressure distribution mechanism 1〇0軚 type manipulator 120, the vacuum pump unit 170, the electromagnetic chamber V21 to V25 for high-pressure air, and the solenoid valve V1 for vacuum ~V16, v26, and solenoid valves V17 and V27 for exhaust. Further, in addition to the above, the control device 300 performs a rain pressure air supply unit 3 10, a gate valve opening and closing mechanism 320, a replacement chamber, a pressure adjustment unit 330, a chamber pressure adjustment unit 34, a nitrogen gas supply, and a nitrogen gas cooling unit 36. The 〇 and the lower mold pressure imparting mechanism 370. 139984. Doc 200948576 The high-pressure air supply unit 3 10 contains an air compressor that supplies high-pressure air to the air piping 190. The gate valve opening and closing mechanism 32 includes a cylinder block 322 which is driven in such a manner that when the high pressure air is supplied by the opening of the solenoid valve V21, the gate valve 160 is moved upward to open the communication passage of the replacement chamber 13A.  132 ° .  Further, the replacement chamber pressure adjusting unit 330 is operated by introducing the vacuum generated by the vacuum pump unit 17A into the replacement chamber 130 by opening the solenoid valve V9, and does not allow air to enter when the glass material is carried in. Within the chamber 20. The nitrogen gas supply unit 350 supplies the nitrogen gas into the chamber 2 by opening the valve of the electromagnetic valve V14 when the glass material is press-formed. In the nitrogen cooling unit 360, when the glass material is press-formed, the low-temperature nitrogen gas for cooling the upper mold and the lower mold of the molding die unit 供给 is supplied by opening the solenoid valves V19 and V20. The lower die pressure applying mechanism 370 includes a lower die pressurizing adjustment mechanism that applies the pressure generated by the Φ pressure generating mechanism 80 to move the die 42 upward to perform press forming, and applies the lower die 44 upward. Pressure. Lower Molding Force The force applying mechanism 370, as described below, includes a lower lever mechanism and a red body including a lower portion of the gas body, which controls the line pressure to generate a pressurization corresponding to the pressure acting on the lower mold 44. Figs. 3A and 3B are views showing the sequence of steps performed in the press forming apparatus 1A. Here, a method of manufacturing an optical element will be described with reference to Figs. 3A and 3B. Furthermore, in the last final step, the horizontal moving stage 152 of the shifter moving mechanism 150 moves to open the replacement chamber 13〇, and 139984. Doc -17- 200948576 and the shifter 140 is moved from the vacuum chamber 20 to the displacement chamber 130 by the cylinder block 154 of the shifter moving mechanism 150. In the sequence 1 shown in Fig. 3A, the replacement chamber 130 is closed by the shifter moving mechanism 150. Next, the vacuum pump unit 170 is activated, and the solenoid valve V9 is opened to open the vacuum chamber 20 via the replacement chamber 13 . In the sequence 2, the solenoid valve V14 is opened to supply the nitrogen gas into the vacuum chamber 20 which has been vacuumed. "The gate valve 160 is closed to separate the displacement chamber 130 from the vacuum chamber 20. In the sequence 3, the pallet 112 on which a plurality of glass materials are placed is carried into the pallet 110 in the storage chamber 30. Further, the loading of the pallet can be performed simultaneously with the above sequence 2. In the sequence 4, the scalar type robot 1 2 in the stock chamber 30 is driven to move the vacuum chuck 122 onto the pallet 2 and the solenoid valve 11 is opened to adsorb the glass material on the pallet 112. In the sequence 5, the replacement chamber 130 is opened, and the arm 124 of the scalar robot ι 2 旋转 is rotated to move the vacuum chuck 122 above the shifter 140 housed in the replacement chamber 13A. Then, the solenoid valve vu is closed to release the suction of the vacuum chuck 122, and the glass material is placed at a specific position on the shifter 140 (in the present embodiment, four locations). In the sequence 6, the replacement chamber 130 is sealed, and the solenoid valve V9 is opened to open the chamber 130 to a vacuum. Next, the solenoid valve v1 is opened to introduce the nitrogen gas in the vacuum chamber 20 into the replacement chamber 130, the replacement chamber 13 is replaced with nitrogen gas, and the pressure of the vacuum chamber 20 and the pressure of the replacement chamber 13 are replaced. Pressure equalization 0 139984. Doc •18· 200948576 In sequence 7, the solenoid valve V21 is opened and the gate valve 160 is opened by the supply of air pressure. Next, the horizontal moving stage 152 and the cylinder block 154 of the shifter moving mechanism 15 are actuated to move the shifter 140 horizontally to the inside of the vacuum chamber 20. • In the sequence 8 'drives the hand mechanism 50 to move the suction hand 52 to the shift.  Above the bit 140. The adsorption hand 52 is provided with four adsorption pads, and the glass materials of the shifters ι4 are simultaneously adsorbed by the valves of the electromagnetic valves VI to V4. © At this time, the lift unit 25 is driven by the opening of the solenoid valve V25, and the shifter 140 is raised to bring the glass material on the shifter 140 close to the suction hand 52. In the sequence 9, the die 42 is moved upward by the pressure generating mechanism 81 of the pressure generating mechanism 8 to adjust the height position of the side opening of the die 42 to an optimum position for inserting the suction hand 52. Further, after the adsorption hand 52 is inserted into the inside of the mold 42, the height of the mold 42 is adjusted so as to be suitable for placing the respective glass materials adsorbed on the lower surface side of the adsorption hand 52 at the upper end of each lower mold. φ is in the sequence 10, and the solenoid valves VI to V4 are closed, and the suction hand 52 of the hand mechanism 50 inserted into the inside of the mold 42 is released from the suction of the four glass materials. Thereby, the respective glass materials carried by the adsorption hand 52 are placed on the lower mold 44 in the die 42. At this time, the upper mold 46 and the lower mold 44 are, for example, previously heated to a glass viscosity of 1016 dPa. The temperature around s. In the sequence 11, the suction hand 52 of the hand mechanism 50 of the furnace is returned to the side of the shifter 140. In the sequence 12, the solenoid valves V1 5, V16, and V26 are opened, and the centering and scraper mechanism 60 is inserted from the side to the mold 42 of the forming die unit 4 139 139984. Doc -19- 200948576, and the center of the placement position of each glass material placed on the lower mold 44 is aligned with the center (on the axis) of the lower mold 44. In order 13, make the centering. The doctor blade mechanism 6 is detached from the molding die unit 4'. In the sequence 14, the solenoid valve V18 is opened, and the heater unit 70 whose heating temperature has been set to 900 C is inserted from the side into the mold 42 of the forming mold unit 4, and is placed on the lower mold 44. The glass material is heated. Further, the die 42 is heated by other heating means, and the lower die 44 and the upper die 46 are indirectly heated by heat conduction from the die 42. In the sequence 15, the viscosity of the glass material after heating by the heater unit 7 is, for example, ΙΟ7 dPa. In the case of s, the heating of the heater unit 7 is stopped, and the heater unit 70 is detached from the mold of the molding die unit 4〇. In the sequence 16, the pressure generating mechanism 8's boosting cylinder is "activated to raise the die 42 and the lower die 44 of the forming die unit 40. Thereby, the glass material is between the upper die 46 and the lower die 44. Pressed. The upper die 46 is supported by the spherical bearing of the aligning mechanism 9 with respect to the axis of the up-and-down direction. In the sequence 17, in the above-mentioned punching step, # is angered by the spherical bearing of the (4) mechanism 90 The axis of the upper mold 46 is made coincident with the axis of the lower mold 44. In the sequence 18, the glass material is stamped at a specific time between the lower mold 44 and the upper mold material to form an optical element (aspherical lens). In the order 19, the pressing force is transmitted to the upper cylinder block 1 () 4 via the upper lever mechanism H) 2 of the upper die pressure distributing mechanism (10), so that a compressive load acts on the cylinder block ι 4 'Using the upper gas rainbow body The air pressure in 1〇4 rises to buffer the pressure of the upper mold 46. Again, the switching of the three-way valve V30 is used, according to 139984. Doc -20· 200948576 The air in the upper cylinder block 1〇4 is controlled by the increase or decrease of the punching force of the upper mold 46. [In addition, the punching force of the cylinder block 81 is controlled to be fixed upward by the upward pressing of the die 42. In the sequence 20 shown in Fig. 3B, the solenoid valves V19, v2 are opened, and the valve is closed.  The lower mold 44 and the upper mold 96 supply cooling nitrogen gas, thereby cooling the formed optical element with the lower mold 44 and the upper mold 46. In the sequence 21, the glass material shrinks due to cooling, so that the pressure applied to the glass φ material disappears, so that the lower mold pressure is applied to the lower cylinder 610 (see FIG. 1A) to lower the lower mold 44. . Thereby, the shape of the optical element can be stabilized. In sequence 22, the solenoid valves V15, V16, and V26 are opened and the center is set. The blade mechanism 60 is inserted into the mold 42 of the forming die unit 4 from the side. At this time, the insertion height position of the centering/scraping mechanism 6 is set to be above the peripheral portion of the optical element. In the sequence 23, after the temperature of the lower mold 44 and the upper mold 46 is lowered to a specific temperature, the lower cylinder pressure 61 〇 (refer to FIG. 1A) is actuated to lower the molding die unit 40. The die 44 is lowered. • In the sequence 24, the boosting cylinder 81 of the pressure generating mechanism 80 is actuated to lower the 胴 die 42 and the centering/scraper mechanism 60. Thereby, the lower mold 44 is separated from the upper mold 46, and the optical member (molded article) attached to the upper mold 46 is centered by the center. The blade mechanism 60 is separated from the upper die 46 and placed on the lower die 44. In the sequence 25, the centering/scraping mechanism 6 is released from the molding die unit 40. In the sequence 26, the suction hand 52 of the hand mechanism 5 of the furnace is inserted into the forming 139984. Doc -21· 200948576 In the die 42 of the die unit 40, the die 42 is moved up and down by the boosting cylinder 81 of the pressure generating mechanism 8 to adjust the height position of the lower die 44 to fit and attach 5 2 Adsorption of the optimum position of the stamped optical component. Then, the solenoid valves VI to V4 are opened, and the four optical elements that have been press-formed are attracted to the respective adsorption pads 53 of the adsorption hand 52. Then, the suction hand 52 is moved toward the shifter 140 side. The lift unit 25 is driven by the opening of the solenoid valve 25 so that the upper surface of the shifter 140 is close to the optical element adsorbed by the adsorbent 52. In the sequence 27, the solenoid valves V1 to V4 are closed to release the adsorption of the four optical elements. Thereby, the optical elements transferred by the adsorption hand 52 are placed on the shifter 140. In the sequence 28, the shifter 140 is slid and returned to the replacement chamber 丨3 利用 by the cylinder block 154 of the shifter moving mechanism 15 ,, so that the gate valve i 6 〇 is closed. The replacement chamber 130 and the vacuum chamber are replaced. The communication path 132 between the chambers 2 is blocked. In the sequence 29, the replacement chamber 13 is opened to introduce air into the replacement chamber 13A. In sequence 30, the scalar robot 12 is driven to move the vacuum chuck 122 above the shifter 140 of the replacement chamber 130, the solenoid valve vi 1 is opened, and the vacuum disc 122 is used to adsorb the shifter 140. Four optical components (molded products). In the sequence 31, 'the scalar type robot 12 is driven to move the vacuum chuck 122 above the tray 112', the solenoid valve vi 1 is closed to release the adsorption of the optical elements' and the optical elements are placed The pallet is on the raft 2. At this point, rushed 139,984. Doc •22· 200948576 The manufacturing steps of the press forming of the optical element by the press forming apparatus 10 are completed. In the press forming apparatus 10, the above-described order 1 to 31 is repeated, and the optical element can be efficiently produced. Next, a press forming apparatus for forming an optical element by press forming as described above.  The composition of each part of 10 is explained. [Configuration of the molding die unit 40] Fig. 4 is a longitudinal cross-sectional view showing the configuration of the molding die unit 4, the alignment mechanism 9A, and the upper die pressure φ. As shown in Fig. 4, the molding die unit 40 is configured to guide the lower die 44 and the upper die 46 by the die 42. The lower portion 42 of the die 42 has four lower guide holes 42a through which four lower molds 44 can be inserted. The crucible has four upper guide holes 42b through which four upper molds 46 can be inserted. Further, a molding space 42c into which the upper end (lower forming 4) 44a of the lower mold 44 and the lower end (upper forming portion) 46a of the upper cymbal 46 are inserted is provided in the central portion of the cymbal mold 42. The forming space 42c communicates with the opening 42d opened on the left and right side faces of the die 42, and the suction hand or the φ heater unit 70 of the furnace hand mechanism 5 is inserted from the opening 42d on the left side, and the opening 42d is inserted from the right side. Center and doctor mechanism 60 ° • As shown in Fig. 5, the lower guide hole and the upper guide hole 42b of the die 42 are arranged in parallel in the X and γ directions, and are arranged in any direction. Symmetrical to the axis. Thereby, the heat generated by each of the four lower molds 44 and the upper mold 46 at the time of punching/on is uniformly conducted, so that the difference in the modes caused by the temperature is suppressed. Further, on the upper surface of the upper surface of the crucible 42, a cooling tank 48 for allowing the nitrogen gas for cooling to pass therethrough is provided. When punching into a lot, the cooling tank 48 is provided for 139,984. Doc •23· 200948576 The nitrogen gas is cooled, thereby cooling the die 42. Returning to Fig. 4, the description will be made. The lower die r chess 44 is formed by processing a round bar including a super-hard alloy, and a forming concave portion 1 for punching the optical element is formed on the upper end 44% 4a, and the forming concave portion is placed thereon. The above glass material (for example, a glass ball). Further, the shape of the concave portion for forming is processed into a shape of (4) shape (4) money R (_nd, circular) of the aspherical lens to be formed. Further, in the lower mold 44, a large-diameter portion 44b which protrudes in the radial direction at a lower portion thereof is disposed above the die base platen 437 disposed below the die 42, and a heat insulating material 438 and a bottom plate 439 are laminated on the bottom plate 439. , the mold 42 is fastened. Further, on the bottom plate 439, a groove for escaping the nitrogen gas when the cooling nitrogen gas flows is provided (obscured in Fig. 4). A notch portion 42h is formed in the bottom portion 42g of the die 42, and a spacer member 4b is disposed in each of the notch portions 42h. Each of the lower molds 44 is placed on each of the spacer members 4''. Each of the spacer members 400 adjusts the dimensional accuracy of the lower molds 44 in the axial direction. In other words, the spacer member 4A abuts against the lower surface ′ of the large-diameter portion 44b of each of the lower molds 44, and is configured such that the heights of the molding surfaces of the lower molds 44 match each other. Four through holes 603a are formed in the bottom plate 20a of the vacuum chamber 20, and the lower die pressing rods 602 are inserted into the respective through holes 603a. Each of the lower mold pressurizing rods 602 is pressed upward by the lower mold pressure applying mechanism 370 (see Fig. 10) disposed on the lower surface side of the bottom plate 20a of the vacuum chamber 20 at the time of press forming. On the other hand, the die base plate 437, the heat insulating material 438, and the bottom plate 139984. Doc - 24 - 200948576 439 is provided with a passage for supplying cooling nitrogen gas to the cooling tank 48. The passage 49 is connected to a nitrogen gas supply pipe 435' for supplying a cooled nitrogen gas to the nitrogen supply pipe 435. There is a solenoid valve vi 9. Further, the upper surface of the die 42 of the upper mold 46 is also provided with a cooling tank 48. The cooling tank 48 is supplied with a nitrogen gas for cooling from the nitrogen gas supply pipe 436. It is equipped with a solenoid valve V20. Therefore, the dies 42 are cooled by supplying the cooling gas for cooling to the cooling grooves 4 形成 formed on the upper and lower surfaces thereof. ® [Configuration of the aligning mechanism 9G] Next, the configuration of the aligning mechanism 90 of the upper mold 46 will be described with reference to Fig. 6 . As shown in Fig. 6, the aligning mechanism 9A includes a spherical bearing 92 that rotatably supports the upper end of the upper mold 46, and a bearing holding member 94 that holds the outer periphery of the spherical bearing 92. The peripheral portion 94a of the bearing holding member 94 is placed on the hanging member 312 suspended from the top plate 20b of the vacuum chamber. The φ upper mold 46 is formed by processing a round bar containing a super-hard alloy, and a concave portion for forming or a shape convex portion for pressing the optical element is formed on the lower end 46a. Further, the shape of the concave portion for molding and the convex portion for molding is processed into a curved shape corresponding to the surface shape of the aspherical lens to be formed. Further, in the upper mold 46, a large diameter portion 46b is protruded in the radial direction near the upper end thereof, and a lower portion 46c extending downward from the large diameter portion 46b is inserted into the upper guide hole 42b_ of the die. Further, the upper mold 46 has an upper portion 46d extending above the large diameter portion 4, and the upper portion 46d is inserted into the spherical bearing 92 to be maintained as J39984. Doc •25· 200948576 Swing freely in either direction. Further, on the outer circumference of the upper portion 46d of the upper mold 46, a stopper ring 47 for preventing the self-spherical bearing 92 from coming off is locked. Further, a pressure transmitting member 49 having a rivet shape having a larger outer diameter than the upper portion is inserted into the shaft hole 4 which is opened at the upper end of the upper portion of the upper mold. The friction transmitting member 49 is formed of a super-hard alloy which is subjected to the load on the upper mold and is periodically replaced before deformation or wear. The spherical bearing 92 includes: fitted into the upper part of the upper mold _ in the outer circumference A spherical body (inner wheel) 95; and a spherical body supporting portion (outer wheel) 96 having a spherical recess that slides the outer periphery of the spherical body 95. The spherical body 95 is slidably connected to the spherical concave portion of the spherical body supporting portion 96 without a gap, and the sliding resistance is reduced. Therefore, for example, when the axis of the upper jaw 46 deviates from the upper guide hole of the die 42, if the lower force acts on the upper die 46 outside the radial direction, the ball 95 will rotate in a direction in which the load is smaller. The core can be adjusted in such a manner that the sleeve of the upper mold 46 and the upper portion of the mold 42 are in the same manner as in the upper part of the mold 42. In the figure, the upper left side is old; the tilt is 0 with respect to the sleeve line. The shape I in the angle adjustment operation, and the upper mold 46 on the right side indicate the state in which the anger is over. The spheres of the same curvature of the spherical body 95 and the spherical recess of the spherical support portion 96 are slidably coupled to each other. Therefore, the spherical body 95 can be rotated in any direction. Fig. 7 is a view showing a toilet mold p a l 々 々. As shown in Fig. 7, the upper mold 46 is a longitudinal section 49 of the forming state. When the mold 42 is raised, the center of the head of the force transmitting member 49 is burned to the pressing force. I39984. Doc -26 - 200948576 The hanging member 3 12 is a member for suspending the bearing holding member 94 in the vacuum chamber 2', and the lower end hook portion 312a is engaged with the outer periphery of the bearing holding member 94 to protrude into a flange The peripheral portion 94a of the shape has an upper end hook portion 13bb that is engageable with the support member 303 of the top plate 20b of the vacuum chamber 2A.  Composition. Furthermore, the support member 303 is omitted in FIG. • At the time of press forming, the die 42 is moved upward by the pressing force of the boosting cylinder 81 of the pressure generating mechanism 80, so that the upper end 44a φ of the lower die 44 abuts against the lower end 46a of the upper die 46, The glass material is pressurized by slightly raising the upper mold 46 upward (for example, several mm). At this time, the bearing holding member 4 also moves upward, so that the peripheral edge portion 9 of the bearing holding member is separated from the upper end hook °P 312a. Thereby, the state in which the restraint of the spherical bearing 92 is released is changed, thereby becoming the sphere 95 and The aligning operation of the ball supporting portion 96 is not hindered by the free-moving state. The pressure of the squeezing upper die 46 is interposed between the upper surface 42f of the dies 42 and the large-diameter portion 46b of the upper die 46. The piece 91 is received, so that the pressure Φ is transmitted to the upper die pressing rod 302, and the upper die pressing rod 302 abuts against the head of the pressure transmitting member 49 screwed into the upper end of the upper die 46. Therefore, it becomes a spherical surface. The bearing 92 has no punching force. In this state, when the axis of the upper die 46 is deviated from the upper guide hole 42b of the die 42, the rotation of the spherical bearing 92 can be performed. In the case of the bearing holding member 94, when the die % is moved up and down, the upper die 46 is freely moved by the aligning of the spherical bearing 92, so that the movement of the die 42 can be performed. The tilt relative to the draw line is automatically corrected. Thereby, when the die 42 is moved up and down, the upper die can be prevented from being relative to I39984. Doc -27- 200948576 is tilted on the axis of the die 42 to prevent "scratch" when the die 42 slides. Moreover, the mold 42 is lowered while the upper mold 46 is held by the hanging member 312, and after the molded product is taken out, the glass material g is again placed on each lower mold 44 and pressure-molded again. In this case, the cymbal cymbal is raised while the upper mold 46 is held by the hanging member 312. Thereby, the die 42 is guided by the guide hole 46 to be guided by the guide hole, and is slidably connected thereto, and is raised by the bearing holding member 94 and the spherical bearing 92. At this time, the upper mold 46 is fixed at substantially its position without acting. At this time, it is necessary to slide the die 42 without causing "scratch" in the four upper molds 46 and the mold 42, and the above-described action by the spherical bearing 92 makes it possible. In a state where the mold 42 has been lowered, the upper mold 46 is maintained in an orthogonal state with respect to the horizontal plane of the axis by the bearing holding member material and the spherical bearing 92. When the mold 42 is raised from this state, the upper mold 46, the suction holding member 94, and the spherical bearing 92 are held at substantially their positions by their own weight, and the orthogonal state is maintained when the mold 42 is raised. It can prevent "scratch". Thus, in order to apply a pressing force parallel to the sliding surface of the die 42 at least at the center of the upper die 46, and a lowering force acts on the center of the upper die 46, it is formed to be suspended by the hanging member 312. Since the bearing holding member 94 of the hanging support is configured to be interlocked by the spherical bearing of the aligning mechanism 9 ,, when the glass material G is repeatedly formed and the molded optical element molded article is released, the pair can be made The force of the upper and lower members of the die applied by the upper die 46 always acts to penetrate the center of the upper die 46, so that 139984 can be efficiently produced. Doc -28- 200948576 • High-precision optical components with the optical functional surface in the correct position relative to the optical axis. [Configuration of Upper Die Pressure Distribution Mechanism (Upper Die Pressure Adjustment Mechanism) 100] Next, the configuration of the upper mold pressure distribution mechanism 1A will be described with reference to Fig. 4'. The upper die pressure distribution mechanism i 00 is a pressurizing adjustment mechanism provided on the upper surface of the top plate 2〇b of the vacuum chamber 2〇, which is composed of four upper levers respectively corresponding to the upper molds 46. The mechanism 1〇2 and the 4 upper cylinders 1()4 are formed. Furthermore, in Fig. 4, two of the above members are displayed. The upper lever mechanism 102 is fastened to the upper fulcrum member 105 on the top plate 20b of the vacuum chamber 2 by bolts or the like, and is coupled to the upper swinging member 1 at the upper end of the upper fulcrum member 105 via the joint pin 1〇5& 6 components. The upper fulcrum member 105 is slidably fastened with respect to the mounting member 108 on the upper surface of the top plate 2〇b. Therefore, the insertion position of the coupling pin 5a with respect to the plurality of holes 106a provided in the upper swinging member 106 can be changed, and the fastening position of the upper fulcrum member 105 with respect to the mounting member 108 can be adjusted. The pressure of the upper lever mechanism 102. The upper end of the upper die pressing rod 312 extends in the up-and-down direction so as to penetrate the top plate 20b of the vacuum chamber 20, and is coupled to one end of the upper swinging member 106 via the joint pin 1 〇9. Further, the other end of the upper swinging member 106 is coupled to the piston rod 1 〇 4a of the upper cylinder block 1 to 4 via a joint pin 107. Therefore, when the upper mold 46 is pressed upward as in the above press forming, the pressure due to the upward movement thereof is transmitted to the upper swinging member 106 via the upper mold pressing rod 302, so that the upper swinging member 1〇6 The upper fulcrum member 105 is a piston rod i 〇 4a that drives the upper cylinder 104 in the compression direction by swinging the core. 139984. Doc -29- 200948576 The upper cylinder block 104 contains a cylinder block filled with high waste air inside the cylinder block. Therefore, if a compressive load is applied to the piston rod 1 〇 4a, the piston rod 104a slides downward, and the air is compressed to increase the pressure of pressing the piston rod 104a upward. This pressure is increased in accordance with the ratio of the respective distances of the joint pins 1 〇 7 , 1 〇 5 a , and 109 determined by the joint positions of the upper swinging member 1 〇 6 and the upper fulcrum member 1 〇 5 . Therefore, the pressure generated by the upper cylinder 104 is increased by the upper lever mechanism i 〇 2 and transmitted to the upper die 46 via the upper die pressing lever 3 〇 2 . Thereby, the upper die 46 is subjected to the pressure which is pressed upward by the lower die 44, and is pressed downward by the pressure generated by the upper cylinder 104, so that the pressure is balanced in both directions. Stable state. Therefore, the glass material which has been press-formed between the lower mold 44 and the upper mold 46 is pressed against the surface of the lower end 44a of the lower mold and the lower end 46a of the upper mold 46 without a gap, thereby being formed into a shape An aspherical lens corresponding to the shape of the space formed between the upper end 44a and the lower end 46a. In this case, it is preferable to constitute the squeezing pressure of the pressure generating mechanism 8 (for example, the total load is 19. 6 kN) has an equal effect on each upper mold 46. If the load of 9 kN is uneven for the distributed load of each upper mold 46, it will be the quality of 4 molded articles (optical components) (for example, unevenness of lens thickness caused by extrusion, or shape and precision) Uneven) causes an impact. Further, of course, there are also unevenness in the dimensions of the lower mold 44, the upper mold 46, the upper mold pressurizing rod 3, and the like in each of the four groups, and therefore, the respective molds are pressed by the pressing force of the pressure generating mechanism 8 The strokes that are pushed to the limit will make a difference. In order to heat and press the glass material to form a high precision optical element 139984. Doc 200948576 pieces, must make higher pressure (3. 92~5·88 kN) acts on each upper die. Further, in the apparatus for repeatedly heating the glass material to a specific temperature (400 to 800 ° C) and taking out the molded article (optical element) after press molding, the forming is repeated. Product, mold component, model.  After heating and cooling, it is required to shorten the cycle of heating-cooling-heating.  ^ It is necessary to reduce the heat capacity of the entire mold device, and it is necessary to reduce the size of the device. In the apparatus of the embodiment, in order to obtain the same molded article by using four mold members, for example, to obtain a lens of the same thickness, the upper die pressing rod 302 and the rising die 42 shown in FIG. The upper mold 42 is pressed, and the upper surface 42f of the mold 42 is pressed to the lower end surface of the large diameter portion 46b of the upper mold by the spacer 91 to restrict the moving position of the mold 42 to define the thickness of the molded product. size. In other words, the upper surface 42f of the dies 42 is brought into contact with all of the four upper dies 46 via the spacers 91, which is a necessary Φ condition for obtaining the thickness dimensions of the four molded articles. Therefore, it is necessary to cause the pressing force to independently act on each of the four upper dies 46, and the upper surface 42f of the dies 42 completely touches the upper dies 46, .  Further, a sufficient pressing force acts on the upper mold 46. In the present embodiment, the pressure generated by the upper cylinder block 1〇4 disposed on the top plate 2〇b of the vacuum chamber 20 is increased by the upper lever mechanism 102, and the pressing force of the die 42 is acted upon. In the upper mold 46, the pressing force for the filling of the upper mold 46 can be obtained. Further, in the upper mold pressure distribution mechanism, the vacuum chamber 20 can be miniaturized by disposing the J; cylinder 1 〇 4 on the outer side of the vacuum chamber 2, and the upper lever mechanism 1〇2 is used. Upper cylinder 139984. Doc •31- 200948576 1〇4 itself is miniaturized. In the present embodiment, an example in which the cylinder block is applied to the configuration of the upper cylinder 104 is described. However, the present invention is not limited thereto, and may be a cylinder device filled with a gas other than air, or A pressurizing mechanism (accumulator, etc.) of the hydraulic cylinder is provided. If the pressurizing cylinder 81 of the pressure generating mechanism 80 exerts a pressing force on the die 42, the press forming is started between the die 44 and the upper die 46 while rising from the die 42. The upper die pressing lever 302 is pressed up by the upper die 46 by the pressing operation, and one end of the swinging member 1〇6 of the upper lever mechanism 1〇2 is pressed. Thereby, the upper cylinder block i 〇 4 is compressed. As the stamping progresses, the upper mold 46 is slidably guided to the guide hole 42b of the dies 42 and moved until the spacer 91 placed on the upper surface 42f of the dies 42 abuts against the large diameter portion 46b of the upper mold 46. , has been moving the model 2. Here, in the four mold sets, when the large diameter portion 4 of the upper molds of the three upper molds is still in contact with the spacer 91, it is conceivable that the large diameter portion 46b of the upper mold 46 of the other one is not The state of the abutment spacer 91 is abutted. In this case, the upper cylinder block 1〇4 is compressed by the pressing from the pressure generating mechanism 80 and via the upper die pressing rod 3〇2, whereby the above-mentioned unfed upper die can also be A spacer 91 is pressed. Thereby, all the positions of the four upper molds 46 can be always maintained at a fixed position, thereby ensuring the thickness dimensions of all the molded articles. Next, a specific example of the upper die pressure distribution mechanism 1A will be described. The following configuration will be described: when the upper cylinder block 4 uses a cylinder block having a maximum load of N, the position of the upper portion (8) of the support swing member 1 is set to be (4) and up to 139984 to the upper mold pressurizing rod. . Doc •32· 200948576 The ratio of the distances of the body i〇4 is i: 1〇, and the above components are assembled. As a result, it can constitute 10 times the load of the uppermost cylinder 1〇4 by the principle of the damage bar (this time is 5. 68 kN) pressure adjustment mechanism. The force two-pressure adjustment mechanism is assembled in such a manner as to correspond to each of the upper molds 46, and the pressure adjustment mechanism for four operations is used (the total pressure that can be withstood is 22 7 ). The spring assembly is incorporated in the vacuum chamber 2〇. In comparison with the forming device of the Japanese Patent Publication No. 5〇37, since it is not necessary to assemble a large number of discs Φ*, it is not necessary to perform the coil spring adjustment work, and it is disposed in the vacuum chamber 20 On the outside, it is easy to design because of the space. Further, since it is not necessary to cool the upper cylinder 104 as in the above-described prior art apparatus using a coil spring, it is not necessary to provide a piping for supplying cooling water or the like. That is, in the present embodiment, the cooling mechanism for cooling the upper cylinder is not provided, and it is not necessary to prevent the cooling of the water jacket from being formed by the super-hard alloy. Mold 44 causes a corrupt policy. Further, it is possible to correspond to various punching pressures only by changing the air pressure supplied to the upper cylinder block 104, so that it is not necessary to use the publication No. 37 of the Patent No. 37.  The disc I part is decomposed and adjusted. Change the upper fulcrum structure #1〇5 The position is changed in place of the air supply air pressure of the upper cylinder block 〇4, thereby being compatible with various punching pressures, and the method is easier to adjust than the method of Patent No. 2815037. In this state, the thrust of the boosting cylinder 81 of the pressure generating mechanism 8 (the total applied pressure applied to the four upper molds 46) is set to 〖9 6 kN and the waste between the upper die pressing levers 302 is measured. After the uneven force, the range of unevenness can be confirmed to be limited to % 139984.doc •33· 200948576 N. Then, using a module which has adjusted the height unevenness of the spacer 91 to within mm, the molded product size φ1〇ηιιη, the center thickness of 35 mm, is formed by using a mold raising pressure of 19.6 kN which is one of the forming conditions. When the curvature of the mirror surface is 15 mm or 2 mm for the camera lens, the four molds do not have the same problem of scratching at the same time, but are completely pressed to the limit, and the finished molded product is also The cavity spaces 70 formed by the respective molds are all identical, thereby obtaining a molded article which sufficiently satisfies the allowable value of the thickness precision and the optical surface tilt. [Configuration of Furnace Hand Mechanism 50] Next, a configuration of the furnace hand mechanism 5A will be described with reference to Figs. 8A and 8B. As shown in Figs. 8A and 8B, the front end of the arm 54 of the furnace is provided with a horizontal holding mechanism % for holding the suction hand 52 horizontally. Further, the hand mechanism 50 has a cylinder block 5〇a on the upper surface of the top plate 2〇b of the vacuum chamber 20, and the rotary shaft 5〇b is rotationally driven by the cylinder block 50a. On the lower end of the rotating shaft 50b, an arm 54 is coupled, and the suction hand 52 is rotated together with the arm 54, and four vacuum suction pads μ are disposed on the lower surface side of the adsorption hand 52. The interval between the vacuum suction pads 53 is the same as the interval between the lower molds 44. Further, on the lower surface of the suction hand 52, a pair of positioning holes 51 to which the pair of positioning pins 43 are fitted is provided on the die 42. The pair of positioning holes 51 are fitted with the pair of clamping pins 43 so that the four vacuum suction jaws 53 are positioned opposite to the lower molds 44 in the die 42. The horizontal holding mechanism 56 has a pair of plate members 57 coupled to the side surfaces of the upper base 55a and the intermediate base 55b fixed to the lower end surface of the arm 54, and four bolts 58 coupled to the intermediate base and The lower base 55 is I39984.doc 200948576; and four coil springs 59 are wound around the outer circumference of each bolt 58. The lower base 55c is fixed to the base 523 of the suction hand 52, and is held in a horizontal state by the elastic force of the four coil springs 59. The suction hand 52 is fastened to the upper surface of the base by a lower base 55c which is held in a water level together with the lower base 55c. Further, the horizontal holding mechanism 56 holds the intermediate base 55b horizontally by the pair of plate members 57, and is compressed and deformed by the four coil springs 59 disposed on the lower surface side of the intermediate base 55b. The lower base 55 () is held in the z direction and in such a manner that the winding axis and the cymbal axis are displaceable. Each of the bolts 58 is mounted to penetrate the intermediate base 55b and screwed into the lower base 55c, the head of which is larger than the diameter of the intermediate base 55b so as not to fall off from the intermediate base 55b, and the lower base 55c acts upwardly. When the force is external, the bolt 58 is moved to protrude above the intermediate base 55b and the coil spring 59 is compressed, so that the lower base 55c can be displaced upward. Further, if there is no external force, the lower base 55e is restored to the horizontal state by the elastic force of each of the coil springs 59. Further, when an external force in the oblique direction is applied to the suction hand 52, any of the four bolts 58 - will protrude upward from the intermediate base 55b to absorb the inclination. Further, if there is no external force, the original state is restored by the elastic force of the coil spring 59, and the suction hand 52 is horizontally held. Further, a contact member that restricts the amount of vertical movement is disposed between the suction hand 52 and the positioning pin 43. Further, in order to prevent cracking of the molded article due to thermal shock, the adsorbent crucible 53 is produced from a material having a low thermal conductivity, and is produced by using a material having heat resistance in order to adsorb the high-temperature molded article. For example, 139984.doc -35- 200948576 is a t-imine resin. In addition, the furnace hand mechanism 50 functions to rotate the rotation shaft 50a under the control of the rotation of the cylinder block 5〇b in a state in which the glass material is sucked on the adsorption pad 53 and The upper and lower positioning mechanisms and the rotary shaft 50b of the die 42 are introduced into the die 42 by the positioning mechanism above and below the die, and the molded article is adsorbed by the adsorption force of the adsorption pad 53. In the reverse rotation operation, the molded article 0 is taken out from the die 42. [Adsorption pipe path of the hand mechanism 50 in the furnace] FIG. 9 is a view showing the distribution path of the adsorption control unit 26 connected to each of the adsorption pads 53. Figure. As shown in Fig. 9, each of the suction pipes 53 is connected to each of the suction pipes 501 to 504 of the suction control unit 260, and each of the suction pipes 501 to 504 is connected to the two branch pipes 5?6 and 507. Each of the suction pipes 5 01 to 5 04 is provided with pressure sensors 5丨丨 to 5丨4 and electromagnetic valves V1 to V4 for adsorption, and flow regulating is provided on the branch pipes 506 and 507. Variable flow valves 516, 517. Further, the nitrogen pipes 521 to 524 are provided with variable throttle valves 53 1 to 534 for flow rate adjustment and solenoid valves V5 to V8. Each of the adsorption ports 5 3 is configured to be independently adsorbed or desorbed by the four lower molds 44 by opening the solenoid valves V1 to V4, and the adsorption source is the vacuum pump unit 17A. In the configuration, the suction pipes 501 to 504 which are different from the vacuum pump unit 17 are connected to the respective adsorption pads 53, and are arranged in a ratio of two of the four suction pipes 501 to 504. Variable throttle valves 516, 517 for flow adjustment are used to semi-independently control the respective suction pressures of the four suction ports 139984.doc - 36 - 200948576 tubes 501 - 504. The pressure sensing devices 5 11 to 5 14 ' are respectively provided on the four suction pipes 5 〇 1 to 5 〇 4, so that the holding pressure control can be performed without any problem even if the suction pressure is semi-independent. In order to implement a mechanism for depressurizing nitrogen gas to release the adsorption force, and to independently control the reverse injection force on each line, a variable throttle valve 531 is disposed on each of the four nitrogen pipes 521 to 524, 532, 533, 534. Therefore, in the present embodiment, the adsorption forces of the four adsorption pads 53 can be controlled by the variable throttle valves 516 and 517, and the variable throttle valves are respectively provided on the respective suction pipes 5〇04. In comparison, a smaller number of throttles can be used for control, which is also advantageous in terms of cost. [Configuration of Lower Mold Pressure Supply Mechanism 370] Fig. 10 is a view showing a configuration of a lower mold pressure application mechanism (lower mold pressure adjustment mechanism) 37A. The lower mold pressure applying mechanism 37 shown in Fig. 10 is disposed on the support member 85 that transmits the pressure generated by the boosting cylinder 81 of the pressure generating mechanism 80 to the die 42. The support member 85 is formed in a rectangular shape, and has: a base 85a below the elevation drive shaft 84 to which the booster cylinder 81 is coupled; a support 85b extending upward from both sides of the lower base 85a; and a top end connected to the support 85b Upper base 85c. The lower die pressure applying mechanism 370 is composed of four lower lever mechanisms 6'' and four lower red bodies 6 1 '' mounted on the lower surface of the upper base 85c of the support member 85. Each of the lower lever mechanism 600 and each of the lower cylinders 61 is provided corresponding to each of the lower molds 4 4 . The lower lever mechanism 600 is composed of: a lower die pressing lever 602 which presses each lower 139984.doc -37·200948576 die 44 from below; and a lower fulcrum member fastened to the lower surface of the upper base 85c The lower swing member 606 is swingably supported by the joint pin 604a of the lower fulcrum member 604 and the lower portion. The lower fulcrum member .604 is slidably fastened relative to the mounting member 608 on the lower surface of the upper base 85c. Therefore, by changing the insertion position of the plurality of holes 6064 provided in the lower swing member 606 with respect to the insertion pin 6〇4 & and by changing the fastening position of the lower fulcrum member 604 with respect to the mounting member 6〇8, The pressure of the lower lever mechanism 6〇〇 can be adjusted. The lower cylinder 610 includes a cylinder block 'filled with high pressure air inside the cylinder. If a compressive load is applied to the piston rod 61 〇a, the piston rod 6丨〇a slides downward, and the air is compressed to increase the pressure of pressing the piston rod 610a upward. This pressure is increased in accordance with the ratio of the distance between the coupling pins 6?7, 6?4& and the recess 606b determined by the connection position of the lower swinging member 6?6 and the lower fulcrum member 604. The lower end of the lower die pressing lever 602 is fitted to the recess 606b provided on one end of the lower swinging member 6〇6. Further, the other end of the lower swinging member 6〇6 is coupled to the lower end portion of the piston rod 61〇& of the lower cylinder 61 by the joint pin 607. When the press forming is performed, when the lifting/lowering drive shaft 84 of the pressure generating mechanism 8 is pressed upward, the lower die pressure applying mechanism 37 is coupled to the supporting member 85, the lifting base 43, and the die 42. Squeeze above. The lower die pressure applying mechanism 370 increases the pressure against the lower cylinder 61 by the upward movement of the die 42 to bring the lower die 44 close to the upper die 46. Thereby, the lower cylinder 610 drives the piston rod 6i〇a downward, and the lower mold pressing rod 6〇2 is moved upward via the lower swinging member 606. Then, the lower 139984.doc -38- 200948576 mold pressurizing rod 602 presses the lower mold 44 upward. The pressure generated by the upward movement of the lower mold pressing rod 6〇2 will become the pressing force of the lower mold 44 with respect to the glass material placed between the lower mold 44 and the upper mold 46. The glass material which is press-formed between the lower mold 44 and the upper mold 46 is adhered to the surface of the upper surface 44a of the lower mold 44 and the surface of the lower surface 46a of the upper mold 46 without gaps. The pressure is formed into an aspherical lens corresponding to the shape of the space formed between the upper end 44a and the lower end 46a. ❹ [Centering. Configuration of the knife-to-tool mechanism 60] Fig. 11A is a plan view showing the centering state of the doctor blade mechanism 6 before the operation. Fig. 11B is a side view showing the state of the centering/scraping mechanism 6 before the operation. As shown in FIG. UA and FIG. 11B, the centering-to-tool mechanism 6A includes: two sets of insertion portions 710 having four insertion rods 7·' rod support portions 720 extending in the horizontal direction (γ direction). The support portion 71 is supported and the insertion rods 700 are vibrated in the other direction; the 2-axis drive portion 73 is configured to move the rod support portion 72 in the «Z direction; and the movement table 740 supports the z-axis drive portion 73. The γ-axis direction driving unit 750' moves the moving stage 74 in the γ direction; and the mounting stage (9) supports the γ-axis direction driving unit 75 0 . The mounting table 760 is fastened to the die base platen 437 on which the dies 42 are mounted. Further, the insertion rod 700 of the insertion portion 710 is inserted into the molding space 42c of the moon mold C from the horizontal direction. The insertion rod 700 is configured as a pair of each pair arranged in parallel in the Y direction, and a rod driving mechanism is disposed on the rod supporting portion, and the centering of the insertion rods is in the approach direction of each other. Or the direction of separation into the 139984.doc -39 · 200948576 line to open and close the way to drive. As the rod drive mechanism, a cylinder block driven by air pressure may be used, or a swing actuator driven by air pressure may be used. The pair of insertion rods 7 are vibrated by the light-receiving means by approaching and separating them like scissors, and the glass material placed on the lower mold 44 can be simultaneously pressed from both sides. Further, recessed portions 7a, 7b corresponding to the diameter of the glass material are provided on the side faces of the pair of insertion rods 700 which are close to each other. Further, the interval between the centers of the concave portions 700a and 700b is set to be the same distance as the separation distance between the lower molds 44 in the γ direction. Fig. 12 is a plan view showing the centering state of the doctor blade mechanism 6 in the operation. Fig. 12 is a side view showing the state in which the doctor blade mechanism 6 is in motion. As shown in FIGS. 12A and 12B, the 'centering/scraping mechanism 6' is mounted on the lifting base 43 of the supporting die 42, and the height position of the insertion cup 700 with respect to the die 42 is adjusted by the Z-axis driving portion 730. The insertion rod 7A is inserted into the molding space 42c of the mold 42 by the γ-axis direction driving portion 750. Fig. 13 is a plan view showing the centering operation of the centering blade mechanism 6''. As shown in Fig. 13, after the glass material is placed on the lower mold 44, each of the insertion rods 7A is inserted into the molding space 42c of the mold 42. Then, the recesses 700a, 700b of the respective insertion bars 700 are lowered so as to be positioned on both sides of the glass material G placed on the upper end of the lower die. Further, in this example, the glass material G before the pressing is not spherical, but is formed in advance in an elliptical shape similar to the optical element to be formed, and thus is difficult to rotate. In the inserted state, if the insertion rods 700 are vibrated in the X direction, the recesses 7〇〇a, 7〇〇b of the insertion cups 700 of each of the 139984.doc -40-200948576 will approach each other (closed direction). Repeat multiple moves on the top. For example, as shown in Fig. 14A, the glass material G is placed at a position deviated in the radial direction from the center position (the position indicated by the one-point chain line) of the forming surface (forming recess 4) formed on the upper end 44a of the lower mold 44. (To achieve the table), the description will be given for the centering and operation at this time. As described above, the recessed portions 7〇〇&, 7〇〇1 of the respective insertion rods 7 are reciprocated in the weir direction to press the outer side of the glass material G toward the center side. Thereby, the glass material G is burned to the center of the forming surface (forming recess) formed on the upper end 44a of the lower mold 44 by the pressing of the concave portions 7〇〇a, 7〇〇b of the respective insertion rods 7 of the vibration. mobile. Fig. 14B shows an adjusted state in which the center of the glass material G is aligned with the center of the forming surface (forming recess) by the reciprocating movement of each of the insertion rods 7''. Thereby, the glass material G is separated from the adsorption pad 53 and placed on the upper end 44a of the lower mold 44, and even when placed at a position offset from the axis of the lower mold 44, the recess 700a of each insertion rod 700 can be utilized. , 700b is simultaneously squeezed from both sides to perform centering so that the glass material G is located at the axis of the lower mold 44. [Configuration of the heater unit 70] Fig. 15 A shows the state of the heater unit 70 before the operation. Top view. Fig. 15B is a plan view showing a state in which the heater unit 70 is in operation. As shown in Fig. 15A, the heater unit 70 includes a glass heater 8A and a driving portion 804. The glass heater 800 incorporates a plurality of cassette heaters 8〇2 and is connected to an independent temperature controller to control the heating temperature of the temperature by the thermocouple 803 inserted in the glass heater 800. A plurality of jams 139984.doc • 41 200948576 The heaters 802 are each formed in a cylindrical shape and are arranged side by side in a tendency to extend in the same direction inside the flat heater portion 80 1 . Further, since the glass heater 800 is set to a high temperature (for example, 900 ° C), it is made of a material resistant to high temperatures (for example, SKD (Steel Kogu Dice) 61, SKD 62, HASTELLOY, and more preferably Anviloy, super hard alloy). The drive unit 804 and the heater unit 801 are connected by a joint portion 805. The drive unit 804 includes, for example, a cylinder block, and is inserted into the glass heater 800 from the side opening 42d of the die 42 by the air pressure supplied by the opening of the solenoid valve V18. Further, as shown in FIG. 15B, the plurality of cassette heaters 802 heats the heater portion 801 while being energized and heated, and the heater portion 801 held at a constant temperature (heating temperature) is inserted into the crucible. The molding space 42c of the mold 42. Here, the steps of heating the glass material G and the steps of press forming will be described. As shown in Fig. 16A, the glass material G placed on the upper end 44a of the lower mold 44 is located below the heater portion 801, so that it is heated to a glass viscosity of, for example, 1 by heat radiated from the heater portion 801. 〇7 dPa·s. Next, the heater portion 801 held at 900 °C by the cartridge heater 802 is inserted from the opening 42d of the die 42 between the lower die 44 and the glass material G and below the upper die 46. The distance between the glass heater 800 and the glass material G can be freely set by adjusting the rising position of the mold 42. The upper mold 46 and the lower mold 44 are heated by a cassette heater inserted in the mold 42 to a temperature of 139,984.doc -42 - 200948576, for example, a glass viscosity of about 109 dPa.s. On the other hand, the glass material G is heated by a glass heater 8 to a temperature of, for example, a glass viscosity of about 1 〇 7 dPa,s. After the glass material crucible, the upper mold 46, and the lower mold 44 are heated for a desired period of time (for example, 90 seconds), the cylinder unit mechanism 72 of the heater unit 7 (refer to FIG. 作) is actuated from the mold 42. The glass heater 800 is withdrawn. Thereafter, as shown in Fig. 16B, the die 42 is raised by the pressure of the boosting cylinder 81 of the pressure generating mechanism 80, and press forming is performed. After the large diameter portion 46b of the φ upper mold 45 sufficiently contacts the upper end of the dies 42 via the spacer 91 (for example, after 10 seconds), a cooling medium (for example, nitrogen gas) is supplied to the cooling grooves 48 of the dies 42 to The glass viscosity is, for example, between 1 〇 10·5 dPa·s and about 1 〇 13 dPa·s, and the pressure of the lower cylinder 61 挤压 is pressed upward by the lower lever mechanism 600 to be pressed upward from the lower mold 44 . Punching pressure (for example, total pressure is 3 KN). Under the pressure of the pressure generating mechanism 80, the lower mold 44 moves upward together with the dies 42, and after the φ glass material 冲压 is pressed between the upper end 44a of the lower mold 44 and the lower end 46a of the upper mold 46, the glass material G is formed into A shape corresponding to a specific shape of the forming surface (for example, an elliptical shape). Further, in the upper mold 46, a small diameter portion 46c is formed on the outer circumference of the lower end 46a.

如圖17A所示,在經過對上述玻璃素材G進行衝壓成形 之特定時間後’將插入桿700插入至上述定中心.刮刀機構 60之上模46之下端上所形成的小徑段部46(^此時,插入 桿700之插入高度藉由γ軸方向驅動部75〇(參照圖12B)而調 整為小徑段部46c之高度位置。因此’插入桿700以不會接 觸於玻璃素材G之高度而插入,.從而以不損傷玻璃素材G I39984.doc -43· 200948576 之方式插入。 ^各插入杯700於每一對桿彼此相互接近之X方向上受 到驅動,從而凹部700a、7〇〇b接近於小徑段部46c。於該 插入狀態下,各插入桿7〇〇係與成形為橢圓形狀之玻璃素 材G(光學元件)之周緣部為非接觸。 如圖17B所不,於胴模42及下模44下降而脫模時,搭載 於升降基座43上之定中心.刮刀機構6〇之插入桿7〇〇亦下 降。因此,該插入桿700之下表面會接觸於已成形之光學 凡件G之周緣部而朝下方擠壓光學元件G。光學元件g係於 上述被加熱之狀態下衝壓成形,故其密著於上模46之成形 面’有時無法僅於其自重作用下而落下。 因此’在貼靠於上模46之小徑段部46c而對定中心·刮刀 機構60之插入桿7〇〇進行脫模動作時,藉由插入桿7〇〇與胴 模42—同下降而可將光學元件載置於下模料上。藉此,於 自胴模42之成形空間42c中取出成形後之光學元件時,驅 動爐内手機構50 ’使安裝於臂54前端上之吸附手52插入於 洞模42之成形空間42c中。並且,根據吸附手52之高度位 置而將胴模42之高度位置調整為易於吸附之位置之後,讓 電磁閥V1〜V4開閥,對吸附手52之各吸附墊5 3供給由真空 泵單元170所生成之真空。 藉此,吸附手52之各吸附墊53吸附載置於下模44上之光 學元件,藉由臂54之旋動而自胴模42中取出已成形之光學 元件。然後’光學元件藉由爐内手機構50之動作而被移送 至移位器140,於移動至移位器140上之特定位置之時點, J39984.doc -44 - 200948576 解除吸附墊53之吸附而將光學元件载置於移位器上。 之後’光學元件在移位器移動機構150之驅動下與移位器 140—同被回收於置換室130内,進而藉由標量型機械手 120之回收動作而被移送至储料室3〇之托板η]上。 . [變形例] . 於此,對變形例進行說明。圖18係表示上模壓力分配機 構100之變形例之縱剖面圖。如圖18所示,在上部缸體1〇4 於縱向上具有較長尺寸時’使上部缸體1〇4之本體1〇仆之 端部連結於上部擺動構件1 〇6之另一端。又,上部缸體丨〇4 之活塞桿104a朝相較本體1 〇4b端部之更下方延伸,且藉由 固定構件101而被固定於真空腔室2〇之頂板2〇b上。 因此,當上部擺動構件1 〇6以上部支點構件j 〇5為令心而 擺動時,本體l〇4b相對於活塞桿i〇4a而上下移動從而將負 載賦予上部缸體104。藉此,上部缸體1 〇4所產生之壓力經 由上部擺動構件106而賦予上模加壓桿3〇2。因此,上模46 ❹ 在上部缸體之壓力作用下自下模44之下方緩衝擠壓 力,並且對下模44賦予擠壓力。 • 再者’於該變形例中,上模壓力分配機構1〇〇之作用、 . 效果與上述圖4所示者相同,故省略其說明。 圖19A係表示爐内手機構5〇之吸附手52之變形例i之側視 圖。圖19B係表示爐内手機構50之吸附手52之變形例1之俯 視圖。如圖19A及圖19B所示,吸附手52之基部52a藉由水 平保持機構900而保持為總是維持水平狀態,上述水平保 持機構900配設於上述基部52a與固定於臂54下表面之上部 139984.doc •45- 200948576 基座55a之間。該水平保持機構9⑽㈣為所謂位置錯誤斤 正機構,在上部安裝部_與下部安裝部904之間配設有^ 心軸並在其周圍於圓周方向上以12{)度間隔而配設有 3個彈性構件920。3個彈性構件920各自之下端安裝於自中 心軸910傾斜之方向上。因此’當吸附手52受到外力而向X 軸周圍或者Y軸周圍傾斜時,3個彈性構件92〇之任一者將 承受壓縮負載,從而可使吸附手52恢復至各彈性構件“Ο 以均等之力對吸附手52進行賦能之方向、即水平狀態。 圖20A係表示爐内手機構5〇之吸附手52之變形例2之側視 圖。圖20B係表示爐内手機構5〇之吸附手52之變形例2之俯 視圖。如圖20A所示,吸附手52之基部52a係藉由線性導軌 950而可升降地被支持。線性導執95〇係由以下部分構成: 導執952,其自臂54之下表面朝鉛直方向延伸;及滑塊 954,其以包圍導軌952之3個面(正面及左右側面)之方式形 成為「:?」字狀(自上方觀察之形狀)。 於導軌952上,設置有於上下方向上驅動滑塊^^々之乙軸 驅動機構。該Ζ軸驅動機構例如具有滾珠螺桿或者線性馬 達等,可適當選擇。 吸附手52之基部52a結合於滑塊954,故僅可於滑塊954 之驅動方向即上下方向(Z方向)上移動。又,藉由臂54之 廻旋動作而可使吸附手52於水平方向旋動。 如圖20B所示,在使吸附塾53吸附玻璃素材G時,可藉 由使滑塊954下降而使吸附手52維持水平狀態而下降,從 而可以使各吸附墊53與玻璃素材G之位置不產生偏移之方 139984.doc -46- 200948576 式進行吸附動作。又,可僅使吸附手52升降而並不使臂54 升降,故亦可使吸附手5 2快帶升降從而縮短吸附動作時 間。 [產業上之可利用性] _ 根據本發明’可提供一種耐久性及與光學玻璃之脫模性 • 優異且適於精密衝壓成形法之光學玻璃用成形模。又,可 使用本模對光學玻璃進行衝壓成形從而製造出成形後無需 ❹ 研磨等之各種光學元件,因此可提供一種具有量產性、且 原價方面亦有利之光學元件製造法。 已參照詳細而特定之實施態樣對本發明進行了說明,在 不脫離本發明之精神與範圍之情況下可實施各種變更或修 正’此對於本領域技術人員而言已明確瞭解。本申請案係 基於2008年4月23日提出申請之日本專利申請案(日本專利 特願2008-113006)者’其内容在此作為參照而併入。 【圖式簡單說明】 φ 圖1係表示本實施形態之衝壓成形裝置之全體構成之示 圖。 • 圖2係表示衝壓成形裝置1 0之控制系統之構成之方塊 圖。 圖3A係表示於衝壓成形裝置1〇中進行之各步驟之順序 1〜19之示圖。 圖3B係表示於衝壓成形裴置1〇中進行之各步驟之順序 20〜32之示圖。 圖4係表示成形用模具單元4〇、調芯機構9〇、上模壓力 139984.doc •47· 200948576 分配機構1 〇〇之構成之縱剖面圖。 圖5係自上方觀察胴模42之成形空間42c之内部構造之示 圖。 圖6係放大表示調芯機構9〇之構成之縱剖面圖。 圖7係表示㈣模向上移動後之衝壓成形狀態之縱剖面 圖。 圖8A係表示爐内手機構5〇之構成之立體圖。 圖8B係表示爐时機構5G之水平保持機構%之侧視圖。 圖9係表示連接於各吸附墊„之吸附配管路徑之示圖。 圖1 〇係放大表示下模壓力賦予機構3 7 〇之構成之前視 圖。 圖11A係表示定中心·刮刀機構6〇於動作前之狀態之俯視 圖。 圖11B係表示定中心.刮刀機構6G於動作前之狀態之側視 圖。 圖12A係表示定中心·刮刀機構6G於動作中之狀態之俯視 圖。 圖12 B係表示定中心.刮刀機構6 〇於動作中之狀態之側視 圖。 圖13係表示定中心.刮刀機構6〇之定中心動作之俯視 圖。 圖係將疋中心.刮刀機構60進行定中心動作前之玻璃 素枋之狀態故大表示之縱剖面圖。 圖14B係將定中心·别刀機構6〇進行定中心動作後之破璃 139984.doc 200948576 素材之狀態放大表示之縱剖面圖。 圖15A係表示加熱器單元70於動作前之狀態之俯視圖。 圖15B係表示加熱器單元70於動作中之狀態之俯視圖。 圖16A係將加熱器單元70對玻璃素材進行加熱之狀態放 大表示之縱剖面圖。 圖16B係將對加熱後之玻璃素材進行衝壓成形之狀態放 大表示之縱剖面圖。 圖17A係將定中心.刮刀機構60之插入桿7〇〇插入於玻璃 素材上方之狀態放大表示之縱剖面圖。 圖17B係將使定中心.刮刀機構60之插入桿700下降而讓 玻璃素材與上模46分離之狀態放大表示之縱剖面圖。 圖1 8係表示上模壓力分配機構100之變形例之縱剖面 圖。 圖19A係表示爐内手5〇之吸附手52之變形例1之侧視圖。 圖19B係表示爐内手機構5〇之吸附手52之變形例1之俯視As shown in Fig. 17A, after a specific time for press forming the above-mentioned glass material G, the insertion rod 700 is inserted into the above-mentioned centering. The small diameter portion 46 formed on the lower end of the upper mold 46 of the doctor mechanism 60 ( At this time, the insertion height of the insertion rod 700 is adjusted to the height position of the small diameter portion 46c by the γ-axis direction driving portion 75 (see FIG. 12B). Therefore, the insertion rod 700 is not in contact with the glass material G. Inserted in height, so as to be inserted without damaging the glass material G I39984.doc -43· 200948576. ^ Each insertion cup 700 is driven in the X direction in which each pair of rods are close to each other, so that the recesses 700a, 7〇〇 b is close to the small diameter portion 46c. In this inserted state, each of the insertion rods 7 is non-contact with the peripheral portion of the glass material G (optical element) formed into an elliptical shape. As shown in Fig. 17B, When the mold 42 and the lower mold 44 are lowered and released from the mold, the insertion rod 7 is mounted on the lifting base 43. The insertion rod 7 of the blade mechanism 6 is also lowered. Therefore, the lower surface of the insertion rod 700 is in contact with the formed surface. The outer edge of the optical member G is pressed downward toward the optical The optical element g is press-formed in the above-described heated state, so that the molding surface which is adhered to the upper mold 46 may not fall under the action of its own weight. Therefore, it is placed against the upper mold 46. When the small diameter portion 46c is used to perform the mold release operation on the insertion rod 7 of the centering and scraper mechanism 60, the optical member can be placed in the lower mold by the insertion rod 7 and the lower mold 42. Thereby, when the formed optical element is taken out from the molding space 42c of the dies 42, the furnace hand mechanism 50' is driven to insert the adsorption hand 52 attached to the front end of the arm 54 into the molding space of the cavity mold 42. 42c. Further, after adjusting the height position of the die 42 to a position easy to adsorb according to the height position of the suction hand 52, the solenoid valves V1 to V4 are opened, and the suction pads 53 of the adsorption hand 52 are supplied by the vacuum pump. The vacuum generated by unit 170. Thereby, each of the adsorption pads 53 of the adsorption hand 52 adsorbs the optical element placed on the lower mold 44, and the formed optical element is taken out from the mold 42 by the rotation of the arm 54. Then the 'optical element is moved by the action of the hand mechanism 50 in the furnace. To the shifter 140, at the time of moving to a specific position on the shifter 140, J39984.doc -44 - 200948576 releases the adsorption of the adsorption pad 53 and places the optical element on the shifter. Then the 'optical element is The shifter moving mechanism 150 is driven by the shifter 140 in the replacement chamber 130, and is transferred to the tray η of the storage chamber 3 by the recovery operation of the scalar robot 120. [Modification] Here, a modification will be described. Fig. 18 is a longitudinal sectional view showing a modification of the upper mold pressure distribution mechanism 100. As shown in Fig. 18, when the upper cylinder block 〇4 has a long dimension in the longitudinal direction, the end portion of the body 1 of the upper cylinder block 〇4 is coupled to the other end of the upper rocking member 1 〇6. Further, the piston rod 104a of the upper cylinder block 4 extends downward from the end of the body 1 〇 4b, and is fixed to the top plate 2〇b of the vacuum chamber 2 by the fixing member 101. Therefore, when the upper oscillating member 1 〇 6 is pivoted by the fulcrum member j 〇 5, the main body 10b moves up and down with respect to the piston rod i 〇 4a to impart a load to the upper cylinder 104. Thereby, the pressure generated by the upper cylinder block 〇4 is given to the upper die pressing rod 3〇2 via the upper swinging member 106. Therefore, the upper mold 46 缓冲 cushions the pressing force from below the lower mold 44 under the pressure of the upper cylinder, and applies a pressing force to the lower mold 44. Further, in this modification, the action of the upper mold pressure distribution mechanism 1 is the same as that shown in Fig. 4, and the description thereof will be omitted. Fig. 19A is a side elevational view showing a modification i of the suction hand 52 of the hand mechanism 5 of the furnace. Fig. 19B is a plan view showing a modification 1 of the suction hand 52 of the hand mechanism 50 in the furnace. As shown in FIGS. 19A and 19B, the base portion 52a of the suction hand 52 is always maintained in a horizontal state by the horizontal holding mechanism 900, and the horizontal holding mechanism 900 is disposed on the base portion 52a and fixed to the upper surface of the lower surface of the arm 54. 139984.doc •45- 200948576 Between bases 55a. The horizontal holding mechanism 9 (10) (4) is a so-called position error correcting mechanism, and a mandrel is disposed between the upper mounting portion_ and the lower mounting portion 904, and is disposed at intervals of 12{) degrees in the circumferential direction thereof. The elastic members 920. The lower ends of the three elastic members 920 are respectively mounted in a direction oblique from the central axis 910. Therefore, when the suction hand 52 is subjected to an external force and is inclined around the X-axis or around the Y-axis, either of the three elastic members 92 will be subjected to a compressive load, so that the adsorption hand 52 can be restored to each elastic member "Ο to be equalized The force is applied to the direction in which the adsorption hand 52 is energized, that is, the horizontal state. Fig. 20A is a side view showing a modification 2 of the adsorption hand 52 of the hand mechanism 5 of the furnace. Fig. 20B is a view showing the adsorption of the hand mechanism 5 of the furnace. A plan view of a modified example 2 of the hand 52. As shown in Fig. 20A, the base portion 52a of the suction hand 52 is supported by the linear guide 950. The linear guide 95 is composed of: a guide 952, which The lower surface of the arm 54 extends in the vertical direction; and the slider 954 is formed in a ":?" shape (a shape viewed from above) so as to surround the three faces (front surface and left and right side surfaces) of the guide rail 952. On the guide rail 952, an E-axis driving mechanism for driving the slider in the up and down direction is provided. The spindle drive mechanism has, for example, a ball screw or a linear motor, and can be appropriately selected. Since the base portion 52a of the suction hand 52 is coupled to the slider 954, it can move only in the vertical direction (Z direction) of the driving direction of the slider 954. Further, the suction hand 52 can be rotated in the horizontal direction by the twisting operation of the arm 54. As shown in FIG. 20B, when the adsorption material 53 is adsorbed to the glass material G, the slider 954 can be lowered to lower the adsorption hand 52 while maintaining the horizontal position, so that the positions of the adsorption pads 53 and the glass material G can be prevented. The offset is generated by 139984.doc -46- 200948576. Further, since only the suction hand 52 can be raised and lowered without raising and lowering the arm 54, the suction hand 5 2 can be quickly raised and lowered to shorten the adsorption operation time. [Industrial Applicability] According to the present invention, it is possible to provide a mold for optical glass which is excellent in durability and mold release property from optical glass and which is excellent in precision press forming. Further, since the optical glass can be press-formed by using the mold to produce various optical elements such as polishing without being subjected to molding, it is possible to provide an optical element manufacturing method which is advantageous in terms of mass productivity and advantageous in terms of original price. The present invention has been described with reference to the specific embodiments thereof, and various modifications and changes can be made without departing from the spirit and scope of the invention. The present application is based on Japanese Patent Application No. 2008-113006, filed on Apr. 23, 2008, the content of which is hereby incorporated by reference. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing the overall configuration of a press forming apparatus according to the present embodiment. Fig. 2 is a block diagram showing the configuration of a control system of the press forming apparatus 10. Fig. 3A is a view showing the steps 1 to 19 of the respective steps performed in the press forming apparatus 1A. Fig. 3B is a view showing the sequence of steps 20 to 32 of each step performed in the press forming apparatus. Fig. 4 is a longitudinal sectional view showing the configuration of the forming die unit 4, the core adjusting mechanism 9, and the upper die pressure 139984.doc • 47· 200948576. Fig. 5 is a view showing the internal structure of the forming space 42c of the dies 42 as viewed from above. Fig. 6 is an enlarged longitudinal sectional view showing the configuration of the aligning mechanism 9'. Fig. 7 is a longitudinal sectional view showing the state of press forming after (4) the mold is moved upward. Fig. 8A is a perspective view showing the configuration of the hand mechanism 5 of the furnace. Fig. 8B is a side view showing the horizontal holding mechanism % of the furnace timing mechanism 5G. Fig. 9 is a view showing the path of the adsorption pipe connected to each of the adsorption pads. Fig. 1 is an enlarged front view showing the configuration of the lower die pressure applying mechanism 37. Fig. 11A shows the centering/scraping mechanism 6 in action. Fig. 11B is a side view showing a state in which the doctor blade mechanism 6G is in a state before the operation. Fig. 12A is a plan view showing a state in which the centering and blade mechanism 6G is in operation. Fig. 12B shows a centering state. A side view of the state in which the doctor mechanism 6 is in operation. Fig. 13 is a plan view showing the centering operation of the centering and scraper mechanism 6〇. Fig. 13 is a glass element before the centering operation of the centering mechanism. Fig. 14B is a vertical cross-sectional view showing the state of the material after the centering and the different tool mechanism 6〇 is centered. 139984.doc 200948576 The state of the material is enlarged. Fig. 15B is a plan view showing a state in which the heater unit 70 is in operation. Fig. 16A is a state in which the heater unit 70 heats the glass material. Fig. 16B is a longitudinal sectional view showing a state in which the heated glass material is press-formed. Fig. 17A is a centering. The insertion rod 7 of the doctor blade mechanism 60 is inserted above the glass material. Fig. 17B is an enlarged longitudinal sectional view showing a state in which the insertion rod 700 of the centering blade mechanism 60 is lowered to separate the glass material from the upper mold 46. Fig. 1 shows the upper mold. Fig. 19A is a side view showing a modification 1 of the suction hand 52 of the hand 5 of the furnace. Fig. 19B is a modification of the suction hand 52 of the hand mechanism 5 of the furnace. 1 overlook

圖2〇A係表示爐内手機構50之吸附手52之變形例2之惻視 圖。 圖2〇B係表示爐内手機構50之吸附手52之變形例2之俯視 圖0 【主要元件符號說明】 10 衝壓成形裝置 20 真空腔室(框體) 30 儲料室 139984.doc •49- 200948576 40 成形用模具單元 42 胴模 42c 成形空間 43 升降基座 44 下模 44a 上端 46 上模 46a 下端 46b 大徑部 46c 小徑段部 48 冷卻用槽 49 壓力傳遞構件 50 爐内手機構 52 吸附手 53 吸附墊 60 定中心·刮刀機構 70 加熱器單元 80 壓力產生機構 81 升壓缸體 84 升降驅動軸 85 支持構件 90 調怒機構 91 間隔件 92 球面轴承 139984.doc -50- 200948576 參 94 轴承保持構件 94a 周緣部 100 上模壓力分配機 102 上部槓桿機構 104 上部氣缸體 104a 活塞桿 105 上部支點構件 106 上部擺動構件 110 托板台 120 標量型機械手 122 真空夾盤 130 置換室 132 連通路 140 移位器 150 移位器移動機構 154 氣缸體 160 閘閥 170 真空泵單元 190 空氣配管 200 氮氣配管 210 冷卻用氮氣配管 220 真空配管 260 吸附控制單元 300 控制裝置 139984.doc -51. 200948576 302 上模加壓桿 303 支持構件 310 高壓空氣供給單元 312 吊下構件 312a 下端鉤部 312b 上端鉤部 320 閘閥開閉機構 330 置換室内壓力調整單元 340 腔室内壓力調整單元 350 氮氣供給單元 360 氮氣冷卻單元 370 下模壓力賦予機構(下模加壓調整機構) 435 氮氣供給管 600 下部槓桿機構 602 下模加壓桿 604 下部支點構件 606 下部擺動構件 608 安裝構件 610 下部缸體 610a 活塞桿 700 插入桿 700a、700b 凹部 800 玻璃加熱器 802 卡匣式加熱器 139984.doc -52- 200948576 900 水平保持機構 950 線性導軌 952 導軌 954 滑塊 V1-V27 電磁閱Fig. 2A is a perspective view showing a modification 2 of the suction hand 52 of the hand mechanism 50 in the furnace. Fig. 2B is a plan view showing a modification 2 of the suction hand 52 of the hand mechanism 50 in the furnace. [Description of main components] 10 Press forming apparatus 20 Vacuum chamber (frame) 30 Storage chamber 139984.doc • 49- 200948576 40 Molding unit 42 Molding 42c Forming space 43 Lifting base 44 Lower die 44a Upper end 46 Upper die 46a Lower end 46b Large diameter portion 46c Small diameter section 48 Cooling groove 49 Pressure transmitting member 50 Furnace hand mechanism 52 Adsorption Hand 53 Adsorption pad 60 Centering · Scraper mechanism 70 Heater unit 80 Pressure generating mechanism 81 Boost cylinder 84 Elevating drive shaft 85 Support member 90 Harming mechanism 91 Spacer 92 Spherical bearing 139984.doc -50- 200948576 Reference 94 bearing Holding member 94a Peripheral portion 100 Upper mold pressure distributor 102 Upper lever mechanism 104 Upper cylinder block 104a Piston rod 105 Upper fulcrum member 106 Upper swing member 110 Pallet table 120 Scaling type robot 122 Vacuum chuck 130 Displacement chamber 132 Communication path 140 Shifter 150 shifter moving mechanism 154 cylinder block 160 gate valve 170 vacuum pump unit 190 empty Piping 200 Nitrogen piping 210 Cooling nitrogen piping 220 Vacuum piping 260 Adsorption control unit 300 Control device 139984.doc -51. 200948576 302 Upper mold pressure rod 303 Support member 310 High pressure air supply unit 312 Suspension member 312a Lower end hook portion 312b Upper end Hook portion 320 gate valve opening and closing mechanism 330 replacement chamber pressure adjusting unit 340 chamber pressure adjusting unit 350 nitrogen gas supply unit 360 nitrogen gas cooling unit 370 lower mold pressure imparting mechanism (lower mold pressure adjusting mechanism) 435 nitrogen gas supply pipe 600 lower lever mechanism 602 Die pressurizing rod 604 lower fulcrum member 606 lower swinging member 608 mounting member 610 lower cylinder 610a piston rod 700 insertion rod 700a, 700b recess 800 glass heater 802 cassette heater 139984.doc -52- 200948576 900 horizontal retention mechanism 950 Linear Guide 952 Guide 954 Slider V1-V27 Electromagnetic Reading

139984.doc 53 ·139984.doc 53 ·

Claims (1)

200948576 七、申請專利範圍: 1· 一種光學元件之衝壓成形裝置,其係在複數個上模及與 該上模成對之複數個下模之間對玻璃素材進行衝壓而成 形出光學元件者,其特徵在於包括: 下模壓力賦予機構,其對上述複數個下模賦予壓力; 胴模,其將上述複數對中之上模自上方插入,將上述 複數對中之下模自下方插入,並導引上述上模與上述下 模之相對位置; 壓力產生機構,其朝上方擠壓上述胴模;及 上模壓力分配機構’其係用以隨著上述胴模於該壓力 產生機構之擠壓力之作用下向上移動,而朝下方擠壓上 述各上模並對上述各上模獨立地施加壓力;且 上述上模壓力分配機構包括: 上部缸體,其承受作用於上述上模上之壓力所造成之 負載;及 上部擺動構件,其經由支點而擺動自如地配置,且其 一端與上述上模之上端部抵接,另一端部與上述上部缸 體連結; 在藉由上述壓力產生機構而使上述胴模向上移動之過 程t ’經由上述上部擺動構件而調整上述上部缸體對各 上模之壓力,並且藉由上述下模壓力賦予機構而朝上方 擠壓上述下模。 2.如晴求項1之光學元件之衝壓成形裝置,其中 包括至少將上述上模、上述下模及上述胴模收納於内 139984.doc 200948576 部之框體; 上述上部缸體及上述上部擺動構件配置於上述框體之 上表面。 3. 如請求項1之光學元件之衝壓成形裝置,其中 上述下模壓力賦予機構係隨著上述胴模於上述壓力產 生機構之擠壓力之作用下向上移動而朝上方擠壓上述複 數個下模。 4. 如請求項3之光學元件之衝壓成形裝置,其中 上述下模壓力賦予機構包括·· 下部紅體,其承受作用於上述下模上之壓力所產生之 負載;及 下部擺動構件’其經由支點而擺動自如地配置,且其 k/、上述下模之下端部抵接,另一端部與上述下部赶 體連結; 藉由使上述下部擺動構件以上述支點為中心進行擺 動,而調整上述下部缸體對各下模之壓力。 5.如請求項1之光學元件之衝壓成形裝置,其中 包括複數個調怒機構,其係在使上述胴模於上述虔力 產生機構之擠壓力之作用下向上移動之過程中,對上述 上模相對於上述胴模之位置進行調芯, 上述複數個調芯機構各自含有: 球面軸承,其使上述上模可轉動,以便在對上述月同模 進行朝上方之擠㈣作時,使上述上模之轴線相對於上 述胴模之移動轴線一致;及 I39984.doc 200948576 上模支持構件’其係形成為支持上述球面軸承之外 側’並藉由朝上述上方之擠壓動作而使上述球面軸承分 離。 6. 如請求項1之光學元件之衝壓成形裝置,其中 • 上述上模壓力分配機構中’上述支點在上述上部擺動 構件之長度方向之連結位置為可變,根據上述支點之連 、、Ό位置與上述上部擺動構件全長之比率而調整作用於上 述上模上之壓力。 φ 7. 如凊求項4之光學元件之衝壓成形裝置,其中 上述下模壓力賦予機構中,上述支點在上述下部擺動 構件之長度方向之連結位置為可變,根據上述支點之連 、、’Q位置與上述下部擺動構件全長之比率而調整作用於上 述下模上之壓力。 8. 如請求項1之光學元件之衝壓成形裝置,其中 上述上模壓力分配機構中,上述上部缸體内之填充壓 © 力為可變,根據上述填充壓力而調整作用於上述上模上 之壓力。 ' 9.如請求項4之光學元件之衝壓成形裝置,其中 上述下模壓力賦予機槿φ,卜;+. 僻偁甲,上述下部缸體内之填充壓 力為~Γ變’根據上述壤奋厭六而味杜从β 具兄&力而調整作用於上述下握卜 之壓力。 10.如請求項1之光學元件之衝壓 上述上部缸體為内部填充 成形裝置,其中 有特定壓力之氣體 之氡缸 139984.doc 200948576 11. 如切求項4之光學元件之衝壓成形裝置,其中 上述下部缸體為内部填充有特定壓力之氣體之氣缸 體。 12. 如明求項丨之光學元件之衝壓成形裝置,其中 包括疋中心構件,其係於衝壓之前插入於上述上模與 上述下模之間,並將載置於上述下側之上述玻璃素材之 位置中心自兩側對準於上述下模之中心, •^述疋中心構件係在對上述玻璃素材進行衝壓而成形 出光學元件之後使上述胴模下降,並且朝下方擠壓上述 光學元件之周緣部。 13. 如凊求項丨之光學元件之衝壓成形裝置,其中 包括: 吸附手,其係於上述框體之内部移動而將上述玻璃素 材載置於上述胴模内之上述下模之成形面上,並自上述 胴模中取出經衝職之上述光學元件; 手保持機構’其將上述吸附手保持於水平狀態;及 驅動。P,其經由上述手保持機構而驅動上述吸附手; 上述手保持機構係藉由具有彈性之複數個橡膠構件而 保持上述吸附手。 如請求項1之光學元件之衝壓成形裝置,其中 包括: 吸附手,其係於上述框體之内部移動而將上述玻璃素 材載置於上述胴模内之上述下模之成形面上,並自上述 胴模中取出經衝壓後之上述光學元件; 139984.doc 200948576 手保持機構,其將上述吸附手保持於水平狀態;及 驅動部,其經由上述手保持機構而驅動上述吸附手; 上述手保持機構係藉由線性導軌而於上下方向上被導 引。200948576 VII. Patent application scope: 1. A stamping and forming device for optical components, which is formed by pressing a glass material between a plurality of upper molds and a plurality of lower molds paired with the upper mold to form an optical component. The method comprises: a lower die pressure imparting mechanism that applies pressure to the plurality of lower die; a die inserting the plurality of upper die uppers from above, inserting the plurality of centering lower die from below, and Guiding the relative position of the upper mold and the lower mold; a pressure generating mechanism that presses the mold upward; and an upper mold pressure distribution mechanism 'which is used to squeeze the mold according to the pressure generating mechanism Moving upwardly, pressing the upper molds downward and applying pressure independently to the upper molds; and the upper mold pressure distribution mechanism comprises: an upper cylinder that receives the pressure acting on the upper mold The load caused by the upper swing member is oscillatingly disposed via the fulcrum, and one end thereof abuts the upper end portion of the upper mold, and the other end portion is opposite to the above The cylinder block is coupled; the process t' of moving the die upward by the pressure generating mechanism to adjust the pressure of the upper cylinder to the upper die via the upper swinging member, and the lower die pressure applying mechanism The upper die is pressed upwards. 2. The press forming apparatus for an optical component according to claim 1, comprising: a housing in which at least the upper mold, the lower mold, and the mold are housed in a portion 139984.doc 200948576; the upper cylinder and the upper portion swing The member is disposed on the upper surface of the frame. 3. The press forming apparatus of the optical component of claim 1, wherein the lower die pressure imparting mechanism is configured to upwardly press the plurality of lower ones as the die is moved upward by the pressing force of the pressure generating mechanism mold. 4. The press forming apparatus of the optical component of claim 3, wherein the lower die pressure imparting mechanism comprises: a lower red body that receives a load generated by a pressure acting on the lower die; and a lower rocking member' The fulcrum is slidably disposed, and k/, the lower end portion of the lower mold abuts, and the other end portion is coupled to the lower body; and the lower swing member is swung around the fulcrum to adjust the lower portion The pressure of the cylinder against each lower die. 5. The press forming apparatus of the optical component of claim 1, comprising a plurality of anger mechanisms in the process of moving the ram under the squeezing force of the force generating mechanism, The upper mold is aligned with respect to the position of the die, and the plurality of aligning mechanisms each include: a spherical bearing that rotates the upper mold to perform the upward pressing (four) of the moon mold The axis of the upper die is aligned with respect to the axis of movement of the die; and I39984.doc 200948576 The upper die support member 'is formed to support the outer side of the spherical bearing' and is caused by the upward pressing action The above spherical bearings are separated. 6. The press forming apparatus for an optical element according to claim 1, wherein: in the upper mold pressure distribution mechanism, a connection position of the fulcrum in a longitudinal direction of the upper swing member is variable, according to a position of the fulcrum The pressure acting on the upper mold is adjusted in proportion to the total length of the upper swinging member. Φ 7. The press forming apparatus of the optical element according to claim 4, wherein the fulcrum pressure imparting means has a connection position in the longitudinal direction of the lower swinging member, and is connected to the fulcrum according to the fulcrum The pressure acting on the lower mold is adjusted by the ratio of the Q position to the total length of the lower swing member. 8. The press forming apparatus of the optical component according to claim 1, wherein in the upper mold pressure distribution mechanism, the filling pressure of the upper cylinder is variable, and the pressing force is adjusted according to the filling pressure to act on the upper mold. pressure. 9. The press forming apparatus of the optical component of claim 4, wherein the lower mold pressure is given to the machine 槿φ, 卜; +. secluded armor, the filling pressure in the lower cylinder is ~ ' change according to the above Tired of six, and tastes the pressure from the β brother & 10. The stamping of the optical component of claim 1 wherein the upper cylinder is an internal filling forming device having a gas of a specific pressure 139984.doc 200948576 11. The stamping forming apparatus of the optical component of claim 4, wherein The lower cylinder is a cylinder block in which a gas of a specific pressure is filled. 12. The press forming apparatus for an optical component according to the present invention, comprising: a crucible center member inserted between the upper mold and the lower mold before being punched, and the glass material placed on the lower side The center of the position is aligned with the center of the lower mold from both sides. The central member is formed by pressing the glass material to form the optical element, and then lowering the mold and pressing the optical element downward. Peripheral department. 13. The press forming apparatus for an optical component according to the present invention, comprising: an adsorbing hand that moves inside the frame to load the glass material on a forming surface of the lower mold in the die And extracting the above-mentioned optical component from the above-mentioned model; the hand holding mechanism 'maintains the above-mentioned adsorption hand in a horizontal state; and drives. P, which drives the suction hand via the hand holding mechanism; the hand holding mechanism holds the suction hand by a plurality of elastic rubber members. A press forming apparatus for an optical component according to claim 1, comprising: an adsorbing hand that moves inside the frame to load the glass material on a forming surface of the lower mold in the die, and The stamped optical element is taken out from the mold; 139984.doc 200948576 hand holding mechanism that holds the suction hand in a horizontal state; and a driving portion that drives the suction hand via the hand holding mechanism; The mechanism is guided in the up and down direction by linear guides. 139984.doc139984.doc
TW098113520A 2008-04-23 2009-04-23 Press forming device for optical element TW200948576A (en)

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