200840672 九、發明說明 【發明所屬之技術領域】 本發明是關於內部具有冷卻媒體或加熱媒體通過用之 流路的熱交換板。 • 【先前技術】 上述熱交換板，例如是於液晶製造裝置濺鍍作業中做 爲保持靶子時使用的支撐板（例如日本專利第3 8 1 8084號 馨公報）。 然而，上述日本專利第3 8 1 8 084號公報中所揭示的發 明，其加工在本體上面（表面）的流路（水路）剖面方向 形狀爲複雜形狀（T字形狀），因此在進行流路加工時需 要龐大的作業時間，以致有製造成本增加的問題點。 此外，於上述日本專利第3 8 1 8 0 8 4號公報中所揭示的 ^ 發明，亦揭示有可使加工在本體上面的流路剖面方向形狀 0 爲最單純形狀（矩形）的提案，但由於接合部會形成在流 路附近，所以恐怕接合部的焊接根部會進入流路。 * 【發明內容】 ‘ 本發明是有鑑於上述情況而爲的發明，以提供一種可 縮短加工所需作業時間，能夠實現製造成本降低，並且， 可防止接合部的焊接根部進入流路，能夠防止接合造成蓋 變形的熱交換板爲目的。 爲解決上述課題，本發明是採用以下手段。 -5- 200840672 本發明相關的熱交換板，具備··具有剖面方向呈矩形 之至少一條的第1溝槽是形成在其表面的平板狀本體；及 具有和上述第1溝槽大致相同平面方向形狀，於嵌入在上 述第1溝槽時，其背面是和上述第1溝槽的底面接觸，其 兩側面是和上述弟1溝槽的兩側面接觸的同時，其表面是 和上述本體的表面形成大致平整面的蓋，於上述背面中央 部設有沿著上述兩側面形成的第2溝槽，並且，上述蓋是 利用摩擦攪拌焊接接合在上述本體。 根據本發明相關的熱交換板時，因加工在本體上面 (表面）的第1溝槽剖面方向形狀具有最單純的形狀（矩 形），所以能夠縮短第1溝槽加工所需的作業時間，能夠 實現製造成本的降低。 此外，流路形成用的第2溝槽，因是形成在蓋的下面 (背面）中央部，所以可使本體和蓋形成接合時施加在蓋 上的載重，透過具有和第1溝槽深度大致相等高度的蓋周 緣部傳達至第1溝槽的底面即本體，因此能夠防止接合部 的焊接根部進入流路，並且，能夠防止接合造成蓋變形。 再加上，蓋的周緣部是形成爲具有和第1溝槽深度大 致相等的高度，所以能夠提高蓋全體的剛性，能夠增加第 2溝槽的寬度，能夠加大流路的寬度，能夠使流路的剖面 積形成較大。 本發明相關的熱交換板，具備：具有剖面方向呈矩形 之至少一條的第1溝槽是形成在其表面的平板狀本體；及 可覆蓋著上述本體表面全體的同時，於其背面形成有凸 -6- 200840672 部，形成當重疊配合在上述本體表面時，其頂面和上述第 1溝槽接觸，其兩側面是和上述第1溝槽的兩側面接觸的 平板狀蓋，於上述背面中央部設有沿著上述兩側面形成的 第2溝槽，並且，上述蓋是利用摩擦攪拌焊接接合在上述 本體。 根據本發明相關的熱交換板時，因加工在本體上面 (表面）的第1溝槽剖面方向形狀具有最單純的形狀（矩 形），所以能夠縮短第1溝槽加工所需的作業時間，能夠 竇現製造成本的降低。 此外，流路形成用的第2溝槽，因是形成在凸部的頂 面中央部，所以可使本體和蓋形成接合時施加在蓋上的載 重，透過具有和第1溝槽深度大致相等高度的蓋周緣部傳 達至第1溝槽的底面即本體，因此能夠防止接合部的焊接 根部進入流路，並且，能夠防止接合造成蓋變形。 再加上，凸部的周緣部是形成具有和第1溝槽深度大 致相等的高度，所以能夠提高蓋全體的剛性，能夠增加第 2溝槽的寬度，能夠加大流路的寬度，能夠使流路的剖面 積形成較大。 根據本發明時，能夠達到下述效果，即，可縮短加工 所需作業時間，能夠實現製造成本降低，並且，可防止接 合部的焊接根部進入流路，能夠防止接合造成蓋變形。 【實施方式】 [發明之最佳實施形態] 200840672 以下，參照圖面對本發明相關的實施形態進行說明 [第1實施形態] 以下，參照第1圖及第2圖的同時對本發明相關的 交換板第1實施形態進行說明。第1圖爲本實施形態相 的熱交換板槪略平面圖，第2圖爲第1圖的局部剖面圖 如第1圖所示，本實施形態相關的熱交換板（以下 「支撐板」）1，具備有本體2和蓋3。 本體2，例如是由無氧銅’或含有5 %以下的Zr或 的銅合金製成，形成長度爲23 50mm、寬度爲2010 mm 厚度爲15mm程度平面方向呈矩形的板狀構件。此外， 本體2上面（表面）2a是設有例如平面方向呈u字 狀、剖面方向呈矩形的（第1)溝槽4，或平面方向呈 形狀、剖面方向呈矩形的溝槽4。 蓋3是形成爲板狀的構件，其具有和溝槽4相同的 面方向形狀，並且，於嵌入在溝槽4內時’其下面（ 面）3a是和溝槽4的底面4a接觸，其兩側面3b是和 槽4的兩側面4b接觸的同時，其上面（表面）3〇是和 體2的上面2a形成爲平整面（形成爲同一平面）。 外，於該蓋3的下面3 a中央部設有沿著兩側面3 b形成 剖面方向成矩形的（第2)溝槽5。於是，蓋3嵌入在 槽4內時所形成的空間（更詳細地說，是由溝槽4的底 4 a和溝槽5所包圍的空間），就成爲冷卻媒體或加熱 體通過用的流路6。 熱 關 〇 稱 Cr 於 形 波 平 背 溝 本 此 5 溝 面 媒 -8 - 200840672 本體2和蓋3是利用摩擦攪拌焊接（Friction Stir Welding : FSW )形成接合。所謂摩擦攪拌焊接，如第 2 圖所示，其是一種將具備有凸肩部7及插銷部8的旋轉工 具9 一邊旋轉一邊插入本體2和蓋3的接縫（邊界：接合 線）的同時，將旋轉工具9沿著該接縫逐漸移動形成接合 的方法。 於是，當本體2和蓋3利用摩擦攪拌焊接形成接合 時，於支撐板1就會形成有各自獨立的複數條（於本實施 形態爲2條）流路6 (形成在「平面方向呈U字形狀的溝 槽4底面4a」和「平面方向呈U字形狀的蓋3下面3a所 形成的溝槽5」之間的流路6，及形成在「平面方向呈波 形狀的溝槽4底面4a」和「平面方向呈波形狀的蓋3下 面3 a所形成的溝槽5」之間的流路6 )。此外，接合後， 於各流路6的一端部設有冷卻媒體或加熱媒體的入口，於 各流路6的另一端部設有冷卻媒體或加熱媒體的出口。 根據本實施形態相關的支撐板1時，由於加工在本體 2上面2a的溝槽4的剖面方向形狀具有最單純的形狀 (矩形），所以能夠縮短溝槽4加工所需的作業時間，能 夠實現製造成本的降低。 此外，流路6形成用的溝槽5，因是形成在蓋3的下 面3 a中央部，所以可使本體2和蓋3接合時施加在蓋3 上的載重，透過具有和溝槽4深度大致相等高度的蓋3周 緣部傳達至溝槽4的底面4a即本體2，因此能夠防止接 合部的焊接根部進入流路6，並且，能夠防止接合造成蓋 -9- 200840672 3變形。 再加上，蓋3的周緣部是形成具有和溝槽4深度大致 相等的高度，所以能夠提高蓋3全體的剛性，能夠增加溝 槽5的寬度，能夠加大流路6的寬度，能夠使流路6的剖 面積形成較大。 [第2實施形態] 其次，根據第3圖對本發明相關的支撐板第2實施形 態進行說明。第3圖爲本實施形態相關的支撐板局部剖面 圖，其是和第2圖相同的圖。 本實施形態相關的支撐板，和上述第1實施形態不同 之處是以具備有蓋13取代蓋3。其他的構成要素因是和 第1實施形態相同，所以於此省略該等構成要素的說明。 另’對於其和上述第1實施形態相同的構件標示相同 圖號。 蓋13是覆蓋著本體2上面2a全體，形成長度爲 23 50mm、寬度爲2010mm之平面方向呈矩形的板狀構 件。此外，於該蓋13的下面（背面）13a，形成有凸部 Μ ’形成在蓋體13和本體2的上面2a重疊配合時，其頂 面14a是和溝槽4的底面4a接觸，其兩側面14b是和溝 槽4的兩側面4 b接觸。再加上，於凸部14的頂面1 4 a中 央部，設有沿著兩側面1 4b形成，剖面方向呈矩形的（第 2)溝槽5。於是，凸部14嵌入在溝槽4內時所形成的空 間（更詳細地說，是由溝槽4的底面4 a和溝槽5所包圍 -10- 200840672 的空間），就成爲冷卻媒體或加熱媒體通過用的流路6。 本體2和蓋13是利用摩擦攪拌焊接（Friction Stir Welding : FSW )形成接合。所謂摩擦攪拌焊接，如第3 圖所示，其是一種將具備有凸肩部7及插銷部8的旋轉工 具9 一邊旋轉一邊插入本體2和蓋13的接縫（邊界：接 合線）的同時，將旋轉工具9沿著該接縫逐漸移動形成接 合的方法。 於是，當本體2和蓋13利用摩擦攪拌焊接形成接合 時’於支撐板就會形成有各自獨立的複數條（於本實施形 態爲2條）流路6 (形成在平面方向呈U字形狀的溝槽4 底面4a和平面方向呈U字形狀的凸部14頂面14a所形成 的溝槽5之間的流路6，及形成在平面方向呈波形狀的溝 槽4底面4a和平面方向呈波形狀的凸部14頂面14a所形 成的溝槽5之間的流路6)。此外，接合後，於各流路6 的一端部設有冷卻媒體或加熱媒體的入口，於各流路6的 Μ 一端部設有冷卻媒體或加熱媒體的出口。 根據本實施形態相關的支撐板時，由於加工在本體2 上面2a的溝槽4的剖面方向形狀是具有最單純的形狀 (矩形），所以能夠縮短溝槽4加工所需的作業時間，能 多句實現製造成本的降低。 此外，流路6形成用的溝槽5，因是形成在凸部14 的頂面14 a中央部，所以可使本體2和蓋13接合時施加 在盖13上的載重’透過具有和溝槽4深度大致相等高度 的凸部14周緣部傳達至溝槽4的底面4a即本體2，因此 -11 - 200840672 能夠防止接合部的焊接根部進入流路6，並且，能夠防止 接合造成蓋1 3變形。 再加上，凸部14的周緣部是形成具有和溝槽4深度 大致相等的高度，所以能夠提高蓋1 3全體的剛性，能夠 增加溝槽5的寬度，能夠加大流路6的寬度，能夠使流路 6的剖面積形成較大。 另，於本實施形態中，在本體2和蓋13形成接合 後，也可對蓋1 3的上面（表面）進行硏削及硏磨直到成 爲第2圖所示的狀態，即，直到本體2的表面2a全體露 出爲止對蓋1 3進行硏削及硏磨，藉此減少板厚來使用。 此外，本發明相關的熱交換板，並不限於僅應用在上 述實施形態中所說明的支撐板，也可應用在陣列形成步驟 中具有相同構成及功能的熱交換板。 【圖式簡單說明】 第1圖爲本發明第1實施形態相關的熱交換板槪略平 面圖。 第2圖爲第1圖的局部剖面圖。 第3圖爲本發明第2實施形態相關的熱交換板局部剖 面圖，其是和第2圖相同的圖。 【主要元件符號說明】 1 :熱交換板（支撐板） 2 :本體 -12- 200840672 2a :上面（表面） 3 :蓋 3a :下面（背面） 3 b :兩側面 3c :上面（表面） 4 :溝槽（第1溝槽） 4 a :底面 4 b :兩側面[Technical Field] The present invention relates to a heat exchange plate having a cooling medium or a flow path through which a heating medium passes. [Prior Art] The heat exchange plate is, for example, a support plate used for holding a target in a sputtering operation of a liquid crystal manufacturing apparatus (for example, Japanese Patent No. 3 8 1 8084). However, the invention disclosed in Japanese Laid-Open Patent Publication No. 3 8 1 084 has a complicated shape (T-shape) in the cross-sectional direction of the flow path (water path) processed on the upper surface (surface) of the body, and thus the flow path is performed. The processing time requires a large amount of work time, so that there is a problem of an increase in manufacturing cost. In addition, the invention disclosed in the above-mentioned Japanese Patent No. 3 8 1 0 8 8 discloses that the shape of the flow path cross-sectional direction 0 which is processed on the main body is the simplest shape (rectangular shape), but Since the joint portion is formed in the vicinity of the flow path, it is feared that the welded root portion of the joint portion enters the flow path. According to the present invention, it is possible to reduce the manufacturing cost by shortening the processing time required for processing, and to prevent the welded root portion of the joint portion from entering the flow path, and can prevent the present invention. It is intended to join a heat exchange plate that causes deformation of the cover. In order to solve the above problems, the present invention employs the following means. -5-200840672 The heat exchange plate according to the present invention includes: a first groove having at least one of a rectangular cross-sectional direction; a flat plate body formed on a surface thereof; and a plane direction substantially the same as that of the first groove The shape is such that when the first groove is embedded in the first groove, the back surface thereof is in contact with the bottom surface of the first groove, and both sides thereof are in contact with both side faces of the groove of the first groove, and the surface thereof is the surface of the body A cover having a substantially flat surface is provided, and a second groove formed along the both side surfaces is provided at a central portion of the back surface, and the cover is joined to the main body by friction stir welding. According to the heat exchange plate according to the present invention, since the shape of the first groove in the cross-sectional direction of the upper surface of the main body (surface) has the simplest shape (rectangular shape), the work time required for the first groove processing can be shortened, and Achieve a reduction in manufacturing costs. Further, since the second groove for forming the flow path is formed at the central portion of the lower surface (back surface) of the lid, the load applied to the lid when the body and the lid are joined can be formed, and the depth of the first groove is substantially the same as that of the first groove. Since the peripheral edge portion of the cover having the same height is transmitted to the main body of the bottom surface of the first groove, it is possible to prevent the welded root portion of the joint portion from entering the flow path, and it is possible to prevent the cover from being deformed by the joint. Further, since the peripheral portion of the cover is formed to have a height substantially equal to the depth of the first groove, the rigidity of the entire cover can be increased, the width of the second groove can be increased, and the width of the flow path can be increased, and the width of the flow path can be increased. The cross-sectional area of the flow path is formed large. The heat exchange plate according to the present invention includes: a first groove having at least one of a rectangular cross-sectional direction; a flat plate body formed on a surface thereof; and a cover having a convex surface formed on the back surface thereof -6- 200840672 is formed so that when the surface of the main body is overlapped and fitted, the top surface thereof is in contact with the first groove, and both side surfaces thereof are flat lids that are in contact with both side surfaces of the first groove, and are in the center of the back surface The second groove formed along the both side surfaces is provided, and the cover is joined to the main body by friction stir welding. According to the heat exchange plate according to the present invention, since the shape of the first groove in the cross-sectional direction of the upper surface of the main body (surface) has the simplest shape (rectangular shape), the work time required for the first groove processing can be shortened, and The manufacturing cost of the sinus is reduced. Further, since the second groove for forming the flow path is formed at the central portion of the top surface of the convex portion, the load applied to the cover when the body and the lid are joined can be formed, and the transmission can be substantially equal to the depth of the first groove. Since the height of the cover peripheral edge portion is transmitted to the bottom surface of the first groove, that is, the main body, it is possible to prevent the welded root portion of the joint portion from entering the flow path, and it is possible to prevent the cover from being deformed by the joint. Further, since the peripheral portion of the convex portion is formed to have a height substantially equal to the depth of the first groove, the rigidity of the entire cover can be increased, the width of the second groove can be increased, and the width of the flow path can be increased, and the width of the flow path can be increased. The cross-sectional area of the flow path is formed large. According to the present invention, it is possible to reduce the work time required for the processing, reduce the manufacturing cost, and prevent the welded root portion of the joint portion from entering the flow path, thereby preventing the cover from being deformed by the joint. [Embodiment] [Best Embodiment of the Invention] 200840672 Hereinafter, an embodiment related to the present invention will be described with reference to the drawings. [First Embodiment] Hereinafter, an exchange related to the present invention will be described with reference to Figs. 1 and 2 The first embodiment of the panel will be described. 1 is a schematic plan view of a heat exchange plate of the embodiment, and FIG. 2 is a partial cross-sectional view of Fig. 1 as shown in Fig. 1. A heat exchange plate (hereinafter referred to as "support plate") according to the present embodiment 1 It has a body 2 and a cover 3. The body 2 is made of, for example, oxygen-free copper or a copper alloy containing 5% or less of Zr or the like, and is formed into a plate-like member having a length of 23 50 mm and a width of 2010 mm and a thickness of 15 mm. Further, the upper surface (surface) 2a of the main body 2 is provided with, for example, a (first) groove 4 having a u-shape in the planar direction and a rectangular cross-sectional direction, or a groove 4 having a rectangular shape in the planar direction and a rectangular cross-sectional direction. The cover 3 is a member formed in a plate shape having the same face-direction shape as the groove 4, and when it is embedded in the groove 4, its lower surface 3a is in contact with the bottom surface 4a of the groove 4, The both side faces 3b are in contact with the both side faces 4b of the groove 4, and the upper surface (surface) 3〇 is formed into a flat surface (formed in the same plane) with the upper surface 2a of the body 2. Further, a (second) groove 5 having a rectangular cross section along the side faces 3b is provided at a central portion of the lower surface 3a of the lid 3. Thus, the space formed when the cover 3 is embedded in the groove 4 (more specifically, the space surrounded by the bottom 4a of the groove 4 and the groove 5) becomes a flow for cooling medium or heating body. Road 6. The heat is Cr Cr Cr Cr Cr Cr Cr 于 于 于 本 本 5 5 5 5 5 5 5 5 5 5 5 5 -8 -8 -8 -8 -8 -8 -8 -8 -8 -8 -8 -8 -8 -8 -8 -8 -8 -8 -8 -8 -8 -8 -8 -8 -8 -8 -8 -8 -8 -8 -8 As shown in Fig. 2, the friction stir welding is a joint (edge: joint line) in which the rotary tool 9 including the shoulder portion 7 and the plug portion 8 is inserted while being inserted into the body 2 and the lid 3 A method of gradually moving the rotary tool 9 along the seam to form a joint. Then, when the main body 2 and the lid 3 are joined by friction stir welding, a plurality of independent (two in the present embodiment) flow paths 6 are formed on the support plate 1 (formed in the U direction in the plane direction). a flow path 6 between the bottom surface 4a" of the groove 4 of the shape and the groove 5 formed by the lower surface 3a of the U-shaped cover 3, and a bottom surface 4a of the groove 4 which is formed in a wave shape in the planar direction. And a flow path 6 between the groove 5 formed by the lower surface 3a of the cover 3 having a wave shape in the planar direction. Further, after joining, an inlet of a cooling medium or a heating medium is provided at one end of each flow path 6, and an outlet of a cooling medium or a heating medium is provided at the other end of each flow path 6. According to the support plate 1 according to the present embodiment, since the cross-sectional shape of the groove 4 processed on the upper surface 2a of the main body 2 has the simplest shape (rectangular shape), the work time required for the processing of the groove 4 can be shortened, and the operation time can be realized. Reduced manufacturing costs. Further, the groove 5 for forming the flow path 6 is formed in the central portion of the lower surface 3a of the cover 3, so that the load applied to the cover 3 when the body 2 and the cover 3 are joined can be transmitted through the depth of the groove 4 The peripheral edge portion of the cover 3 of substantially equal height is transmitted to the bottom surface 4a of the groove 4, that is, the body 2, so that the welded root portion of the joint portion can be prevented from entering the flow path 6, and the deformation of the cover -9-200840672 3 can be prevented. Further, since the peripheral portion of the cover 3 is formed to have a height substantially equal to the depth of the groove 4, the rigidity of the entire cover 3 can be increased, the width of the groove 5 can be increased, and the width of the flow path 6 can be increased, and the width of the flow path 6 can be increased. The cross-sectional area of the flow path 6 is formed to be large. [Second Embodiment] Next, a second embodiment of a support plate according to the present invention will be described based on Fig. 3 . Fig. 3 is a partial cross-sectional view of a support plate according to the embodiment, which is the same as Fig. 2; The support plate according to the present embodiment differs from the above-described first embodiment in that a cover 13 is provided instead of the cover 3. Since the other components are the same as those of the first embodiment, the description of the components will be omitted. The same members as those of the above-described first embodiment are denoted by the same reference numerals. The cover 13 is a plate-like member which covers the entire upper surface 2a of the main body 2 and is formed in a rectangular shape having a length of 23 50 mm and a width of 2010 mm. Further, a convex portion Μ ' is formed on the lower surface (back surface) 13a of the cover 13, and when the lid body 13 and the upper surface 2a of the body 2 are overlapped, the top surface 14a is in contact with the bottom surface 4a of the groove 4, The side surface 14b is in contact with both side faces 4b of the groove 4. Further, in the central portion of the top surface 14 a of the convex portion 14, a (second) groove 5 which is formed along both side faces 14b and has a rectangular cross section is provided. Thus, the space formed when the convex portion 14 is embedded in the groove 4 (more specifically, the space surrounded by the bottom surface 4 a of the groove 4 and the groove 5 - -10-200840672) becomes a cooling medium or The flow path 6 through which the medium passes is heated. The body 2 and the cover 13 are joined by friction stir welding (FSW). As shown in Fig. 3, the friction stir welding is a joint (edge: joint line) in which the rotary tool 9 including the shoulder portion 7 and the plug portion 8 is inserted while being inserted into the body 2 and the lid 13 while rotating. A method of gradually moving the rotary tool 9 along the seam to form a joint. Therefore, when the body 2 and the cover 13 are joined by friction stir welding, a plurality of independent (two in the present embodiment) flow paths 6 are formed on the support plate (formed in a U-shape in the planar direction). The flow path 6 between the bottom surface 4a of the groove 4 and the groove 5 formed by the top surface 14a of the U-shaped convex portion 14 in the plane direction, and the bottom surface 4a of the groove 4 formed in the wave direction in the planar direction and the plane direction are A flow path 6) between the grooves 5 formed by the top surface 14a of the wave-shaped convex portion 14. Further, after joining, an inlet of a cooling medium or a heating medium is provided at one end of each flow path 6, and an outlet of a cooling medium or a heating medium is provided at one end of each of the flow paths 6. According to the support plate according to the present embodiment, since the cross-sectional shape of the groove 4 processed on the upper surface 2a of the main body 2 has the simplest shape (rectangular shape), the working time required for the processing of the groove 4 can be shortened, and The sentence achieves a reduction in manufacturing costs. Further, the groove 5 for forming the flow path 6 is formed at the central portion of the top surface 14a of the convex portion 14, so that the load applied to the cover 13 when the body 2 and the cover 13 are joined can be transmitted through the groove and the groove. 4 The peripheral portion of the convex portion 14 having a substantially equal height is transmitted to the bottom surface 4a of the groove 4, that is, the body 2, and thus -11 - 200840672 can prevent the welded root portion of the joint portion from entering the flow path 6, and can prevent the joint 13 from being deformed by the joint . Further, since the peripheral portion of the convex portion 14 is formed to have a height substantially equal to the depth of the groove 4, the rigidity of the entire cover 13 can be increased, the width of the groove 5 can be increased, and the width of the flow path 6 can be increased. The cross-sectional area of the flow path 6 can be made large. Further, in the present embodiment, after the main body 2 and the lid 13 are joined, the upper surface (surface) of the lid 13 may be honed and honed until the state shown in Fig. 2, that is, up to the body 2 The cover 1 3 is boring and honing until the entire surface 2a is exposed, thereby reducing the thickness and using it. Further, the heat exchange plate according to the present invention is not limited to the use of only the support plate described in the above embodiment, and a heat exchange plate having the same configuration and function in the array forming step can be applied. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic plan view of a heat exchange plate according to a first embodiment of the present invention. Fig. 2 is a partial cross-sectional view of Fig. 1. Fig. 3 is a partial cross-sectional view showing a heat exchange plate according to a second embodiment of the present invention, which is the same as Fig. 2; [Main component symbol description] 1 : Heat exchange plate (support plate) 2 : Main body -12- 200840672 2a : Upper surface (surface) 3 : Cover 3a : Lower surface (back surface) 3 b : Both sides 3c : Upper surface (surface) 4 : Groove (first groove) 4 a : bottom surface 4 b : two sides
5 :溝槽（第2溝槽） 6 :流路 7 :凸肩部 8 ·插銷部 9 :旋轉工具 13 :蓋 13a :下面（背面） 1 4 :凸部 14a :頂面 1 4b :兩側面 -13-5 : Groove (2nd groove) 6 : Flow path 7 : Shoulder portion 8 · Latch portion 9 : Rotating tool 13 : Cover 13a : Lower surface (back surface) 1 4 : Projection portion 14a : Top surface 1 4b : Both sides -13-