KR100967254B1 - A heat exchanging plate - Google Patents

Abstract

Industrial Applicability The present invention can shorten the working time required for processing, reduce the manufacturing cost, prevent the penetration bead from entering the flow path, and deform the cover by joining. It is about preventing. At least one first groove having a rectangular shape at the time of cross-sectional observation has a flat body formed on the surface thereof, and has a shape at the time of planar observation substantially the same as the first groove, and is inserted into the first groove. It has a cover which is formed so that the rear surface is in contact with the bottom surface of the first groove, both sides thereof are in contact with both sides of the first groove, and the surface thereof is substantially flush with the surface of the main body (same plane). A second groove formed along the both side surfaces is provided in the central portion of the rear surface, and the lid is joined to the main body by friction stir welding.

Description

Heat exchange plate {A HEAT EXCHANGING PLATE}

The present invention relates to a heat exchanger plate having a flow passage through which a cooling medium or a heating medium passes.

As such a heat exchange plate, there is a backing plate used for holding a target material in the sputtering process of a liquid crystal manufacturing apparatus (for example, Japanese Patent No. 3818084). report).

However, in the invention disclosed in Japanese Patent No. 3818084, since the shape at the time of cross-sectional observation of the flow path (water channel) processed on the upper surface (lower surface) of the main body has a complicated shape (T-shape), the flow path is processed. There is a problem in that it takes a lot of work time, the manufacturing cost is increased.

Further, in the invention disclosed in Japanese Patent No. 3818084, it is proposed to make the shape at the time of cross-sectional observation of the flow path processed on the upper surface of the main body as the simplest shape (square shape), but the junction is formed in the vicinity of the flow path. There exists a possibility that the penetration bead may enter a flow path.

This invention is made | formed in view of the said situation, It is possible to shorten the working time required at the time of a process, can aim at reduction of a manufacturing cost, and can also prevent that the wave of a junction part enters a flow path, An object of the present invention is to provide a heat exchanger plate that can prevent deformation of a cover.

MEANS TO SOLVE THE PROBLEM In order to solve the said subject, this invention employ | adopted the following means.

The heat exchanger plate according to the present invention has at least one first groove having a rectangular shape in cross-sectional observation, a flat body formed on the surface thereof, and a shape in planar observation substantially the same as the first groove. When it fits in the groove, its back surface is in contact with the bottom surface of the first groove, its both sides are in contact with both sides of the first groove, and its surface is substantially flush with the surface of the main body (same plane). ), And a second groove formed along the both sides is provided at the center of the rear surface, and the lid is joined to the main body by friction stir welding.

According to the heat exchanger plate according to the present invention, since the shape at the time of cross-sectional observation of the first groove processed on the upper surface (surface) of the main body has the simplest shape (square shape), the work required when machining the first groove. Time can be shortened and manufacturing cost can be reduced.

Moreover, since the 2nd groove | channel which forms a flow path is formed in the center part of the lower surface (back surface) of a cover, the cover which has the height applied to the cover when a main body and a cover are joined is about the same height as the depth of a 1st groove | channel. It can be transmitted to the bottom surface of the first groove, that is, the main body via the periphery of, can prevent the wave of the joining portion from entering the flow path, and can prevent the deformation of the cover due to the joining.

In addition, since the periphery of the lid is formed to have a height approximately equal to the depth of the first groove, the rigidity of the entire lid can be increased, the width of the second groove can be widened, and the width of the flow path can be expanded, The cross-sectional area of the flow path can be increased.

In the heat exchanger plate according to the present invention, at least one first groove having a rectangular shape during cross-sectional observation covers a flat body formed on the surface thereof and an upper surface of the main body, and the rear surface thereof is superimposed on the upper surface of the main body. And a flat lid having a convex portion formed such that its top surface is in contact with the bottom surface of the first groove, and both sides thereof are in contact with both sides of the first groove, and is formed along the both sides at the center of the top surface. A second groove is provided, and the lid is joined to the main body by friction stir welding.

According to the heat exchanger plate according to the present invention, since the shape of the first groove processed on the upper surface (surface) of the main body has the simplest shape (square shape), the working time required when the first groove is processed. Can be shortened and manufacturing cost can be reduced.

Moreover, since the 2nd groove which forms a flow path is formed in the center part of the top surface of a convex part, the load applied to a cover when a main body and a cover are joined is passed through the periphery of the convex part which has a height substantially equal to the depth of a 1st groove. It can transmit to the bottom surface of a 1st groove, ie, a main body, can prevent the wave of a junction part from entering a flow path, and can also prevent the deformation | transformation of the cover by joining.

In addition, since the periphery of the convex portion is formed to have a height substantially equal to the depth of the first groove, the rigidity of the entire lid can be increased, the width of the second groove can be widened, and the width of the flow path can be expanded, The cross-sectional area of the flow path can be increased.

According to the present invention, the working time required during processing can be shortened, the manufacturing cost can be reduced, the wave of the joint can be prevented from entering the flow path, and the deformation of the cover due to the bonding can be prevented. It shows the effect that can be done.

EMBODIMENT OF THE INVENTION Below, embodiment which concerns on this invention is described with reference to drawings.

[First Embodiment]

EMBODIMENT OF THE INVENTION Hereinafter, 1st Embodiment of the heat exchanger plate which concerns on this invention is described, referring FIG. 1 and FIG. 1 is a schematic plan view of a heat exchanger plate according to the present embodiment, and FIG. 2 is a partial cross-sectional view of FIG. 1.

As shown in FIG. 1, the heat exchanger plate (hereinafter referred to as "back plate") 1 according to the present embodiment includes a main body 2 and a lid 3.

The main body 2 is, for example, a plate-shaped member that exhibits a rectangular shape when observed in planar view with a length of 2350 mm, a width of 2010 mm, and a thickness of about 15 mm made of oxygen-free copper or a copper alloy containing 5% or less of Zr or Cr. to be. In addition, the upper surface (surface) 2a of the main body 2 includes, for example, a first groove 4 that exhibits a U-shape during planar observation and a rectangular shape when observing a cross-section, and a waveform shape and cross-sectional observation during planar observation. The groove 4 which shows a visual square shape is provided.

The lid 3 has the same shape as the groove 4 at the time of observation, and when the lid 3 is inserted into the groove 4, the lower surface (back surface) 3a is formed at the bottom surface 4a of the groove 4. The upper surface (surface) 3c is flush with the upper surface 2a of the main body 2 (to form the same plane) while the two side surfaces 3b are in contact with the two side surfaces 4b of the groove 4. It is a formed plate-shaped member. Moreover, the 2nd groove | channel 5 which shows the square shape at the time of cross-sectional observation is formed in the center part of the lower surface 3a of this cover 3, and is formed along the both side surfaces 3b. Therefore, the space formed when the lid 3 is inserted into the groove 4 (more specifically, the space surrounded by the bottom surface 4a and the groove 5 of the groove 4) is a cooling medium or It becomes the flow path 6 through which a heating medium passes.

The main body 2 and the lid 3 are joined by friction stir welding (FSW). As shown in Fig. 2, the friction stir welding means that the joints of the main body 2 and the lid 3 are rotated while the rotary tool 9 including the shoulder portion 7 and the pin portion 8 is rotated. And a rotary tool 9 to move along the joint, and to join.

And when the main body 2 and the cover 3 are joined by friction stir welding, the backplate 1 has the flow path 6 of two independent lines (two in this embodiment) (U-shaped at the time of a plane observation). The flow path 6 formed between the bottom surface 4a of the groove | channel 4 which has a shape, the groove | channel 5 formed in the lower surface 3a of the cover 3 which has a U-shape at the time of planar observation, and the plane observation. A flow path 6 formed between the bottom surface 4a of the groove 4 having a wave shape and the groove 5 formed in the bottom surface 3a of the cover 3 having a wave shape in plan view. . Further, after joining, one end of each flow path 6 is provided with an inlet of a cooling medium or a heating medium, and the other end of each flow path 6 is provided with an outlet of the cooling medium or a heating medium, respectively.

According to the back plate 1 which concerns on this embodiment, since the cross section observation shape of the groove | channel 4 processed by the upper surface 2a of the main body 2 will have the simplest shape (square shape), the groove | channel 4 ) Can shorten the working time required and reduce the manufacturing cost.

Moreover, since the groove | channel 5 which forms the flow path 6 is formed in the center part of the lower surface 3a of the lid | cover 3, the load applied to the lid | cover 3 when the main body 2 and the lid | cover 3 are joined. Can be transmitted to the bottom surface 4a of the groove 4, that is, the main body 2, via the periphery of the lid 3, which has a height approximately equal to the depth of the groove 4, and the wave of the joining portion passes through the flow path 6 ) Can be prevented, and deformation of the lid 3 due to joining can be prevented.

In addition, since the periphery of the lid 3 is formed to have a height approximately equal to the depth of the groove 4, the rigidity of the entire lid 3 can be increased, and the width of the groove 5 can be widened, so that the flow path The width of (6) can be enlarged and the cross-sectional area of the flow path 6 can be enlarged.

Second Embodiment

A second embodiment of the back plate according to the present invention will be described with reference to FIG. 3. 3 is a partial cross-sectional view of the back plate according to the present embodiment, and is a view in the same form as in FIG. 2.

The back plate according to the present embodiment is different from the first embodiment described above in that the lid 13 is provided instead of the lid 3. Other components are the same as those of the first embodiment described above, and therefore descriptions of those components are omitted here.

In addition, the same code | symbol is attached | subjected to the same member as 1st Embodiment mentioned above.

The lid 13 covers the entire upper surface 2a of the main body 2 and is fitted into the first groove 4, and is a plate-shaped member that exhibits a rectangular shape during planar observation with a length of 2350 mm and a width of 2010 mm. . Moreover, the part of the cover 13 in which the convex part 14 formed in the lower surface (rear surface) 13a of this cover 13 is not provided, and the part of the cover 13 in which this convex part 14 is not formed is the upper surface ( 2a), the convex portion 14 is in contact with the bottom surface 4a of the groove 4 when the lid 13 and the upper surface 2a of the main body 2 are stacked. The convex portion 14 is formed so that both side surfaces 14b of the convex portion 14 of the lid 13 come into contact with both side surfaces 4b of the groove 4. Moreover, the 2nd groove | channel 5 which shows the square shape at the time of cross-sectional observation is formed in the center part of the top surface 14a of the convex part 14 along the both sides 14b. The space formed when the convex portion 14 is inserted into the groove 4 (more specifically, the space surrounded by the bottom surface 4a and the groove 5 of the groove 4) is a cooling medium. Or it becomes the flow path 6 through which a heating medium passes.

The main body 2 and the lid 13 are joined by friction stir welding (FSW). As shown in FIG. 3, the friction stir welding means a main body 2 and a cover extending along the plate thickness direction while rotating the rotary tool 9 including the shoulder portion 7 and the pin portion 8. It inserts into the seam (boundary line: junction line) of 13), and moves the rotary tool 9 along the seam, and joins.

And when the main body 2 and the cover 13 are joined by friction stir welding, the back plate has a plurality of independent flow paths 6 (two in the present embodiment) having a U-shape at the time of planar observation. A flow path 6 formed between the bottom surface 4a of the groove 4 and the groove 5 formed in the top surface 14a of the convex portion 14 having a U shape in planar view, and the waveform shape in planar view. And a flow path 6 formed between the bottom surface 4a of the groove 4 having the groove 4 and the groove 5 formed in the top surface 14a of the convex portion 14 having the wave shape in plan view. Further, after joining, one end of each flow path 6 is provided with an inlet of a cooling medium or a heating medium, and the other end of each flow path 6 is provided with an outlet of the cooling medium or a heating medium, respectively.

According to the back plate which concerns on this embodiment, since the shape at the time of cross-sectional observation of the groove | channel 4 processed by the upper surface 2a of the main body 2 will have the simplest shape (square shape), the groove | channel 4 will be processed. The work time required for the operation can be shortened, and the manufacturing cost can be reduced.

Moreover, since the groove | channel 5 which forms the flow path 6 is formed in the center part of the top surface 14a of the convex part 14, it is applied to the cover 13 when the main body 2 and the cover 13 are joined. The load can be transmitted to the bottom surface 4a of the groove 4, that is, the main body 2, via the periphery of the convex portion 14 having a height approximately equal to the depth of the groove 4, and the wave of the joint portion is a flow path. It can be prevented from entering (6), and the deformation | transformation of the cover 13 by joining can be prevented.

Further, since the periphery of the convex portion 14 is formed to have a height approximately equal to the depth of the groove 4, the rigidity of the entire lid 13 can be increased, and the width of the groove 5 can be widened. The width of the flow path 6 can be enlarged and the cross-sectional area of the flow path 6 can be enlarged.

In addition, in this embodiment, after joining the main body 2 and the lid | cover 13, the upper surface (surface) of the lid | cover 13 to the state shown in FIG. 2, ie, the surface 2a of the main body 2, is shown. It may be used to grind and polish until the whole is exposed and to reduce the plate thickness.

In addition, the heat exchanger plate which concerns on this invention is not applicable only to the back plate demonstrated by embodiment mentioned above, It is applicable also to what has the same structure and function in an arrangement formation process.

1 is a schematic plan view of a heat exchanger plate according to a first embodiment of the present invention;

2 is a partial cross-sectional view of FIG.

FIG. 3 is a partial cross-sectional view of a heat exchanger plate according to a second embodiment of the present invention, and FIG.

Explanation of symbols for the main parts of the drawings

2: body 2a: top

3: cover 3a:

3a: both sides 3b: top

4: groove 4a: bottom surface

4b: Both sides 6: Euro

7: shoulder part 8: pin part

9: rotary tool

Claims (2)

At least one first groove having a rectangular shape is provided with a flat plate-shaped body formed on the upper surface, and a lid, The cover has the same shape as that of the first groove in a plan view, and when the cover is fitted into the first groove, the rear surface of the cover contacts the bottom surface of the first groove, and both sides of the cover are formed of the first groove. While contacting both sides, the surface of the cover is formed to be flush with the surface of the main body, A second groove is provided at the center of the rear surface, and the lid is joined to the main body by friction stir welding. Heat exchanger plate. At least one first groove having a rectangular shape is provided with a flat plate-shaped body formed on the upper surface, a flat plate cover, The cover covers the upper surface of the main body and is fitted into the first groove, and includes a convex portion formed on the rear surface of the cover, and a portion of the cover on which the convex portion is not formed covers the upper surface of the main body. And the convex portion is formed such that when the cover is stacked on the upper surface of the main body, the top surface of the cover contacts the bottom surface of the first groove, and both side surfaces of the cover portion contact the both side surfaces of the first groove. A convex portion is formed, A second groove is provided at the center of the top surface, and the lid is joined to the main body by friction stir welding. Heat exchanger plate.

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