TW200828484A - Gas supplying and collecting unit - Google Patents

Abstract

[Problem to be solved] To provide the gas supplying and collecting unit capable of making the base-foot space become smaller. [Solution] In the gas supplying and collecting unit 1 are disposed: the first gas units 72A, 72B, 72C used to control the supply of the first gas; the second gas unit 73, which is connected to the first gas units 72A, 72B, and 72C, and utilizes a plurality of fluid controllers 31-34, 38A-43A, 38B-43B and 38C-43C to control the cleaning gas converging to the said first gas unit; and overlapping layer modules 61A, 61B, 61C, which is overlapped with the first gas unit 72A, 72B, 72C in order that parts of the fluid controllers 38A, 38B, 38C are overlapped with the overlapping layer modules 61A, 61B, 61C.

Description

200828484 IX. Description of the Invention: [Technical Field] The present invention relates to a gas supply assembly unit unit and a cleaning gas unit according to the present invention. The person will use the 疋 疋 之 之 、 、 、 、 、 、 、 、 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The wafer system is supplied with a plurality of working gases, and the film-forming crystals are placed on the film. Because the flow rate of the working gas affects the film forming quality, the vehicle and the V body manufacturing device will be loaded with a plurality of treatments for controlling the supply of the working gas. The assembly sheet is placed on the upstream side of the processing chamber. 1' % In order to improve the film formation quality, it is necessary to strictly manage the components supplied to the wafer and the gas. Since @, the gas supply collecting unit connects the cleaning gas unit and each processing gas unit, and merges the cleaning gas, and then removes the working gas remaining in the flow path of the processing gas unit. Thus, the gas supply assembly unit can adjust the working gas to a predetermined component and supply it to the wafer. [Patent Document 1] Japanese Unexamined Patent Publication No. Hei No. Hei. No. Hei. No. Hei. No. 5, No. 5, No. 257, the disclosure of the present invention. Since the cleaning gas unit is arranged and arranged beside the gas unit, the footing space 2097-9172-PF 7 200828484 is large. The present invention has been made in order to solve the above problems, and it is intended to provide a gas supply collecting unit which can reduce the footing space. [Means for Solving the Problem] f The gas supply assembly unit of the present invention has the following structure. (1) A system-type gas supply assembly unit having: 帛i gas unit: controlling the supply of the second gas; the second gas unit ★ is connected to the first body 7C, and is controlled by a plurality of fluid controllers. a gas of 帛2 to the first body unit; and a laminate assembly that overlaps with the first gas sheet: the portion of the fluid controller and the stack assembly are 70. In addition, one of the fluid controllers For example, mass heart

, mass flow meter, check-off, ^丨π . . Βθ City J mouth M port, turbulence valve and other control air. One part of the fluid controller can also be a fluid controller with multiple fluid controllers. μ (2) In the invention of (1), the laminated assembly is provided in such a manner as to cover the piping included in the gas unit. (3) In the invention of (1), the laminated assembly has: a fixing system for fixing a lower flow path member to which the body control portion is placed; and a holding groove, the body and the 14th body unit Abut; install the heater. (4) In the invention of (1), one of the fluid controllers is a flow rate controller or a mass flow meter. The invention provides the gas supply assembly unit of the present invention having the above configuration, the layer assembly and the gas unit for controlling the first gas.

2097-9172-PF 8 200828484 Further, a part of the fluid controller constituting the second gas display - , ^ ^ and the laminated assembly are arranged in a large amount. Thus, because. One #八四楚1々再成弟" Kong Yi Zaoyuan's fluid controller' off unit becomes a two-stage structure, so the base space of the gas-sinking unit is small 4 fields & Body t, the city 1], and the ® layer components overlap the footer space. Thus, Manvo is made by the * body & The right gas intrusion according to the present invention - makes the foot space small. /, ... wooden mouth early, can be arranged in the piping of the gas supply unit of the present invention w:: because the first gas is disposed to cover the width of the first gas unit:::: In the gas supply assembly unit of the present invention, the fixed pair of the lower flow path assembly is fixed to the laminated assembly assembly. And stack the shore, and use the heater to transfer the element from the laminated assembly to the two ^rrr^1 gas single 1 gas in the first! The internal heat of the flow path of the gas unit can, for example, avoid the gas supply assembly unit according to the present invention: defective. Therefore, if the function of the lower flow path component is 4 °, one laminated component has a solid function. The heat of the heater is transmitted to the first gas unit, the gas supply assembly unit of the present invention, the mass flow controller or the mass flow meter and the genus~: the base space is greatly enlarged to make the base space of the unit as a whole two: In addition, the present invention is described below with reference to the drawings. The ritual i, one of the collection units

2097-9172-PF 200828484 <Circuit Description> Fig. 1 is a circuit diagram of a gas supply assembly unit. The gas supply unit 1 is provided between a gas tank (not shown) and a processing chamber (not shown), and is provided with a working gas (not shown) for supplying a working gas of a gas tank (not shown) to a processing chamber (not shown). The third to third process gas lines 2A, 2B, and 2C. Further, the gas supply collection unit 1 includes a cleaning gas line for cleaning the first to third process gas lines 2A, 2B, and 2C, and a plurality of fluid controllers are provided in the first to third process gas lines 2A and 2B. 2C. The manual valves 11A, 11B, and 11C are connected to the gas grooves (not shown) via the working gas input ports 3A, 3B, and 3C. Manual valves nA, UB, 11C are connected via a transitioner; [2A, 12B, 12C, pressure regulating valves i3A, 13B, 1 3C and pressure gauges 14A, 14B, 14C and first processing side pneumatic valves 1 μ, 15B, 15C . The first processing side pneumatic valve 1 5 A, 1 5 B, 1 5 C passes through the processing side mass flow 4 factory 1 6 A, 1 6 B, 1 6 C and the second processing side pneumatic valve 17 a, [ 7 B, 17C connection. The second processing side pneumatic valves 17A, 17B, and 17C are connected to the common output ports 4A, 4B, and 4C via the transitioners 18A, 18B, and 18C. The common output ports 4A, 4B, 4C are connected to a processing chamber not shown. Further, the processing-side mass flow controllers 1 6A, 16B, and 16C are also connected to the third processing-side pneumatic valves 19, 196, and 19 (: the third processing-side pneumatic valves 19, 19B, and 19C are processed via the processing side. The return valves 20A, 20B, 20C are connected to the exhaust ports 5A, 5B, 5C. The exhaust ports 5A, 5B, 5C and an exhaust flow path (not shown) are connected to 0 2097-9172-PF 10 200828484 and the cleaning gas line 6 A plurality of fluid controllers are also provided. The manual valve 31 is connected to a cleaning gas tank (not shown) via a cleaning gas inlet port 7. The manual reading 31 passes through the filter 32, the pressure regulating valve 33, the pressure gauge 34, and the first β washing side. The pneumatic valve 35 is connected. The first cleaning side pneumatic valve 35 is connected to the second cleaning side mass flow controller 36 and the second cleaning side pneumatic valve 37 and the cleaning gas exhaust port 8. The cleaning gas exhaust port 8 and not shown are shown. The exhaust gas flow path is connected to the second cleaning side mass flow controllers 38A, 38A, 38C. The second cleaning side mass flow controllers 38α, 38β, 38 (by the cleaning side check valve 39A) , 39B, 39C and third cleaning side pneumatic valves 4〇Α, 4〇β, 40C and first to third processing gas lines 2 The upstream side of the processing side mass flow controllers 16A, 16B, and 16C of 2Β and 2C are connected. The 'pressure gauge 34 is also connected to the fourth cleaning side pneumatic valves 41A, 41B, and 41C. The fourth cleaning side pneumatic valves 41A and 41B 41C passes through the third cleaning side mass flow controllers 42A, 42B, 42C and the fifth cleaning side pneumatic valves 43A, 43B, 43C and the third processing gas line 2Α, 2β, the sediment filter 18 A, 1 8 B The connection of the swimming side of 1 8 C. <Overall structure> Fig. 2 is a plan view showing the gas supply assembly unit 1 of the present invention in which the circuit shown in Fig. 1 is embodied. The first to third processing gas units (corresponding to "i-th gas unit") 72A that supply the working gas of one of the control systems "first gas" of the third to third processing gas lines 2A, 2B, and 2C, 72B, 72C, and the control system constituting the purge gas line 6

2097-9172-PF 200828484 "Gas" in one of the gases "a second gas unit") 73 is fixed to the U-hole body 70 (corresponding to the gas unit 72A, 72B, 72C: plate 9 because First to third places. Since the manufacturing system is the same, here, the 篦1 processing gas unit 7 2 A is taken as an example to describe the structure of the processing gas unit. Fig. 3 is a cross-sectional view taken along line A of Fig. 2 of the first processing gas. The input port of the pump valve 11A of the unit 72A communicates with the working gas wheel provided at the input unit 21, and the inlet 3A communicates with the input of the dummy gas. The manual valve 11A is processed by the wheel and the port is flowed through the V-shaped flow path. The component 9 9 is connected to the input port of the filter 1 2A. , , the cow 22 is over; the output port of the 1 2 A is connected via the input port of the V to the flow path component 2 2 and the pressure adjustment interval m Connected, and the effect of removing particles, etc., is adjusted to 13A. The output port of the pressure regulating valve m is connected by a wide wheel-in port, and the pressure of the rolling body is adjusted to a pressure of ten. A shows the set pressure. The output port of the force meter 14Α is formed by # ^ ^ ^ to form the L sub-sliding flow path group B 24 The flow path unit 23 and the first common flow path unit 25 are connected to the third port of the first processing side thin 15A. The i-th processing side pneumatic valve 1 5A is a two-way valve, and is controlled according to the valve opening and the valve opening size. The supply amount of the gas. The second port of the pneumatic side 15A of the processing side is connected via the 流 word channel assembly 22 and the wheel port of the processing side mass flow controller (10). The output port of the processing side mass flow controller 16A The flow rate of the entire gas is connected via the V-shaped flow path unit 22 and the second port of the second processing side pneumatics 7A. The second processing side pneumatic valve m is a three-way valve, since 2097-9172-PF 12 200828484 =: The supply amount of the control gas is controlled by the size of the mouth. The third port of the second processing side gas: A is connected via the input port of the second common flow path unit 26 and the v-shaped flow path &amp; filter 8 8A. The input 2 of 8 8A: the port and the common output provided in the wheel-out assembly 28 are connected to "a, and output the action gas from which the particles have been removed. ^ &lt; the gas unit 7 2 A will lower the flow path assembly 21, 2 2 , 2 3, 2 Lee: The screw test (not shown) inserted from r is fixed to the mounting plate 9. However, the person inserted above k is inserted. The plug V has the manual valve 11A, the transition device 12, the pressure chamber 13A, the pressure gauge UA, the first common flow path assembly... the sound ¥ ^ pneumatic valve 1 5A, the treatment side mass flow controller 1 6A, the second, the 1 The pneumatic valve 17A, the second common flow path assembly 26, and the merge assemblies 27, 18 are each fixed to the lower flow path assembly 2, 22, μ. Further, the ends of the f 24 are welded to the flow path assemblies 23, 23 And r, described by the $layer component 61. As shown in Fig. 2, the laminated assembly 61 is fixed by fastening four bolts VP and "VP" from above through four corners to the mounting plate 9. <Cleaning gas unit> The cleaning gas unit 73 will be a manual valve 31, a 2 32, a fortune adjustment valve 33, and a force meter "and the above-mentioned manual 阙Π A, filter; [2 A, 敕力调敕μ, 〇a 絚刀扪正The valve 13A and the pressure gauge UA are fixed to the mounting plate 9 in the same manner and communicate with each other. The force meter 34 is connected via the piping 44, the branching unit 45, and the &quot;bluewashing side gas 5 rounds. The output port of the first cleaning side pneumatic valve 35 is pneumatically driven via the first cleaning side mass flow controller 36 and the second cleaning side.

2097-9172-PP 200828484 The input port of valve 37 is connected. The output port of the second cleaning side pneumatic valve 37 is connected to the 'month scrubbing exhaust port 8. Therefore, the cleaning gas is deflated by the second cleaning side pneumatic cleaning gas exhaust port 8 by adjusting the flow rate of the cleaning gas that has passed through the i-th cleaning side pneumatic valve holder by the second cleaning side mass flow controller 36. The f \ branch assembly 45 is connected via a pipe 46 to the splitter assemblies 〇, 48. The flow dividing unit 47 forms a flow path for connecting the piping 46 connected to the upper side and the input ports of the fourth cleaning side pneumatic valves 41A and 41C. On the other hand, the flow dividing means 48 forms a flow path so as to be connected to the input port 46 of the upper portion 46 and the fourth cleaning side pneumatic port 41B. Further, the pipe μ is branched from the upper side of the branching unit 48 into an L shape, and is disposed in a V-shaped flow which is disposed adjacent to the third process gas lines 2A, 2B, and 2C (the dust force meters i4a, i4b, and 14C of Fig. n). The upper surfaces of the road components 22, 22, and 22 are connected. As shown in Fig. 3, the second cleaning side mass flow controller and 38A are disposed on the upper surface of the multilayer assembly 6U, which will be described later, from the [word flow path assembly 22, 22, the V-shaped flow path assemblies 22 and 22 are fixed to the laminated unit 6U by bolts (not shown). The second cleaning side mass flow controller ... is attached to the four bolts V, V, V, V which are inserted above the nail. v : 22, 22. 1 卞 and the second cleaning side mass flow control $ 38A input port with the v-shaped flow path assembly 22, using two bolts Vs, ^ connection ^ 仏 from the top, and the second cleaning side mass flow Control reading the output of the two V-shaped flow path assembly 22 'Use two bolts v, v 6 from the top to fix the 49. The upper part of the valve 49 and the cleaning side check valve 39A are connected, I, to prevent clearing 2097-9172 -PP 14 200828484 Reverse flow of washing gas. Cleaning side check valves 39A, 39B, 39C and q, main, ΠΑ Budi 3 cleaning side pneumatic valve 40 40 Β, 40C are mounted on the top of the common path assembly 25, μ μ. The input of the cleaning side check valves 39A, 39B, 39C and the third cleaning side pneumatic valves 40A, 40B, 40C The port is connected. The third, the side of the washing side of the pneumatic valve 40A, 40B, 40C and the mouth of the voice] month; the music 1 processing side pneumatic valve 1 5 A brother 1 port connection, and control the first丨~ ΟΛ 0 7 The 3rd cleaning gas supply of the gas line 〆2Α, 2Β, 2C (see the figure i) is on the other hand. On the other hand, the fourth cleaning side pneumatic chambers 41A, 41B, 41C shown in Fig. 2 The input port is connected to the shunt components 47, 48, and the output port and the third cleaning side mass flow controllers 42A, 42B, 42C are connected to each other. Since the shunting unit 47 outputs the cleaning gas in the reverse direction, The fourth cleaning side pneumatic valves 41A, 41C are reversely disposed via the flow dividing unit 47. | The fourth cleaning side pneumatic valves 41A, 41B, 41C are provided by the first mass flow controller 42A, and the fifth cleaning Side air "2, 43B, 43C input port connection, and adjust the cleaning gas *. Brother 5 cleaning side pneumatic valve 43A, sample, The round-out port is connected by the piping 5〇, 5卜52, and the processing side checkback _ 2〇A, 2〇b, 2〇c and the merged components 2?, 2 between the filters 18A, 18B, 18C The upper surface of the u is connected and the supply of the cleaning gas is controlled. The outer 'two first hole body early 兀 73 uses a bolt (not shown) to flow the V word, and the cow 22 or the branch assembly 45, the flow dividing assembly 47, 48 The lower flow path assembly, which is disposed between the fluid worker and the safety record 9, is fixed to the mounting plate 9. The fourth cleaning side pneumatic chambers 41A, 41B, 41C, 帛3 cleaning side mass flow 2097-9172-PF 15 200828484 controller 4 2 A, 4 2 B, 4 2 0 and the main, main 4 〇Γ. , ^, 苐5 4 Washing side pneumatic valves 43Α, 43β, 43C are hunt and will be fixed by inserting 22 from above. Tired (1) is locked to the V-shaped flow path assembly <Laminated component> ..., and the above-mentioned laminated components (1), (10), and (4) are explained. Since the structure of the stacked (1) bIL is the same, the laminated assembly 61A will be described here, and the description of the laminated assembly (four) and 61C will be omitted. Figure 4 is a plan view of the laminated assembly 6U. Fig. 5 is a view showing the laminated unit 6u as seen from the front direction B of the first to the middle. Figure 6 is a cross-sectional view of c-c in Figure 4.

〃Laminated component m is a metal (for example, Ming, etc.) or a resin material (for example, four gas (Pj*FE) velvet A... grows in a square shape. On the side, it will be positively associated with the official 24A. The first holding of the groove 64A is formed in an arch shape. At both ends of the laminated assembly 6U, the k holding groove 62A each forms a fixing hole 63. 63a is a female thread formed on the inner peripheral surface for fixing the V sub-machine units 22 and 22. Further, the two sides of the laminated cow 1A are spaced apart from the fixing holes 63A and 63A by the holding groove 62A. Inserting holes 64A, 64 for inserting the bolt Vp for fixing the laminated assembly 6U to the mounting plate 9. The reason why the insertion hole = formed on the outer side of the fixing hole 63A is to make it possible The laminate assembly 6U is treated for each of the second cleaning side mass flow control stomachs 38A to improve the usability or maintainability. Further, the laminate assembly 61A is mounted on the heaters 71, 71 (see Fig. 2), for example. , aluminum material with high thermal conductivity can be selected to make the heater 71,

The heat of 2097-9172-PF 16 200828484 71 is easily transmitted to the piping 24a through which the gas flows via the laminated assembly 61A. On the other hand, in the case where the heaters 71, 71 are not used, the laminated assembly 61A may be selected as a material of the laminated assembly 61A, such as stainless steel or fluororesin having a low thermal conductivity, so that the temperature change of the working gas becomes small. <Description of Operation> Next, the operation of the gas supply assembly unit 具有 having the above-described configuration will be described.

When the gas supply unit 1 supplies the working gas to the processing chamber (not shown) from the first processing gas line 2A, for example, the second processing side pneumatic valve 15A and the third processing side pneumatic valve 19A are opened. The first processing side pneumatic valves 15B and 15C, the second processing side pneumatic valves 17A, 17B, and 17C, the third processing side pneumatic valves 19B and 19C, and the third cleaning side pneumatic valve 4, 8, 40β, 40C, and The cleaning side pneumatic valves 4iA, 41B, and 41C and the fifth cleaning side pneumatic valves 43A, 43B, and 43C are in a closed state. The working gas supplied to the working gas input port 3A is adjusted by the manual valve k 1U, the filter 12A, the pressure regulating valve 13A, and the pressure gauge 14A. [The force flows to the dispensing chamber 2 4 and the first common flow path assembly 25, The jth processing side pneumatic valve 15A and the processing side mass flow controller 16A are adjusted. The working gas is exhausted from the processing-side mass flow controller i 6A to the exhaust flow path via the second processing-side pneumatic valve 17A, the third processing-side pneumatic reading 19A, and the processing-side check valve 20A. After the pressure and flow rate of the working gas are stabilized at a predetermined value, the second process side pneumatic valve 1 7A k is closed to the valve open state, and the third process side pneumatic valve ... is switched from the open state to the closed state. Therefore, the gas will be turned from the second treatment side by the gas of 2097-9172-pp 17 200828484, 7 Λ, the crying 1SA, and the turbulent valve 17A is supplied via the confluence unit 27 to remove the impurities. Processing chamber. "The same wheel outlet 4A is supplied not shown

Then, in the case where the first P ^ A treatment of the corpus callosum 2A is performed, the turmeric "2" side is operated under the condition of the first processing side pneumatic valve 15A and the second lye 彳 丨 * #*. Valve 17A is still set to open valve ^ ^ valve 19 Α, brother 3 cleaning side pneumatic valve 4 〇 α, brother 4 cleaning side pneumatic valve 4U to t and brother 5 π wash side pneumatic valve 43A switch from closed valve to open valve State. The cleaning gas supplied to the inlet 7 of the cleaning gas is turned off by manual

31. The filter 3, the pressure copper cymbal MQQ, the knife suffocating valve 33, and the pressure gauge 34 adjust the pressure, and then pass through the pipe 44, the branch assembly 45, the pipe 46, and the V-shaped flow path element 22 ί,, '. The α 2nd π wash side mass flow controller 38A adjusts the flow rate. Then, the cleaning gas is supplied to the peach road which is gripped by the action gas via the cleaning side check valve 39A, the third clear: , &quot;UA1 - the younger processing side pneumatic valve 15A'. The cleaning gas is supplied from the i-th processing side pneumatic valve 1μ to the second processing side pneumatic valve i7A via the processing side mass flow controller 16A. The portion of the cleaning gas is exhausted from the second processing side pneumatic valve 7A and the processing side check valve 2A through the third processing side pneumatic valve 19A to the exhaust flow path (not shown). The remaining cleaning gas is output from the second processing side pneumatic valve 17A to the processing chamber (not shown) via the second common flow path unit 26, the combination unit 27, the filter 18A, and the common output port 4A. By this cleaning operation, the flow path on the downstream side of the second processing side pneumatic valve 15A is cleaned.

2097-9172-PF 200828484 Side controller At this time, if the flow rate of the second cleaning side mass flow controller 16A is compared, the 1βΑ is abnormal. The flow rate controller 38Α and the process detectable treatment side mass flow control and the delta cleanup operation simultaneously pass the month's rolling trowel-sandwich member 47 via the first side pneumatic valve 41Α and the third cleaning side mass flow controller 42Α. The first/month wash L valve 43Α and the pipe 5〇 are supplied to the merger unit 27, and the unit 27 is rotated from the common output port 4α to the unillustrated line via the filter 18A. Therefore, the piping 5&quot; can be cleaned. At this time, the blockage of the transitioner 1 8 可 can be detected by measuring the flow rate of the brother/month wash side Berry flow controller 42. Further, since the operation of the working gas or the cleaning gas to the second and third processing body lines 2B and 2C is the same as the operation of the working gas or the cleaning gas flowing to the i-th processing gas line 2A, the description thereof is omitted. <Effects of Effect> Next, the effect of the gas supply collecting unit 具有 having this configuration will be described. Fig. 7 is a view showing a gas supply assembly unit ι of the unused laminate assemblies 61A, 61B, and 61C embodying the circuit shown in Fig. 。. As shown in Fig. 7, in the case where the laminated modules 61a, 61β, 61c are not used, the second cleaning side mass flow controllers 38A, 38β, 38C are disposed on the sides of the dispensers 24A, 24B, and 24C. The area pii set. In this case, the second cleaning-side mass flow controllers 38A, 38B, and 38C and the third cleaning-side mass flow controllers 42A, 42B, and 4 2 are each in the same column and the shunting assembly in order to suppress the foot space. 4 7, 4 7, 4 7 connections. The second cleaning side mass flow controllers 38A, 38B, 38C and the third cleaning side material 2097-9172-PF 19 200828484 The inner flow control units 42A, 42B, and 42C control the flow rate of the cleaning gas supplied from the piping ιοί. As shown in Fig. 2, when the laminated modules 61A, 6ib, and 61C are used, the second cleaning-side mass flow controllers 38A, 38β, and 38C are overlapped and disposed on the pipes 24A, 24B, and 24c. On the stacked components 61A, 61B, 61C. Therefore, the second cleaning-side mass flow controllers 38A, 38B, and 38 (: and the pipes 24A, 24B, and 24C have a two-stage structure. Therefore, in the case where the laminated components 61A, 61b, and 61C are not used, as shown in FIG. No, although the area pii for arranging the second cleaning side mass flow controllers 38A, 38B, 38C is required, the second cleaning can be performed as shown in FIG. 2 by using the lamination assemblies 61A, 61B, 61C. The side mass flow control states 38A, 38B, and 38C are disposed in the region P1 for arranging the pipes 24A, 24B, and 24C. Therefore, according to the gas supply assembly unit 1 of the present embodiment, the second cleaning side mass flow control can be reduced. The region P11 of the devices 38A, 38B, 38C can reduce the footprint of the foot. Further, 'by making the second cleaning side mass flow controllers 38A, 38B, 38C and the pipes 24A, 24B, 24C into a two-stage configuration, The area PI 1 shown in Fig. 7 becomes empty. Therefore, as shown in Fig. 2, the fourth cleaning side pneumatic valve 41A, the third cleaning side mass flow controller 42A, and the fifth cleaning side are pneumatically driven by the flow dividing unit 47. The valve 43 A is reversely arranged. Thus, the area P21 shown in Fig. 7 is shifted. In the region P2 shown in Fig. 2, the width of the gas supply collecting unit 1 can be made smaller by one line. Generally, in the semiconductor manufacturing apparatus, it is difficult to shorten the total length because the number of fluid controllers used is large. Therefore, it is preferable to make the width dimension small. Since 2097-9172-PF 20 200828484, the pipes 24A, 24B, and 24C and the second cleaning side mass flow controllers 38A, 38B, and 38C are constructed in two stages as described above. The empty space is generated, and the fourth cleaning side pneumatic valve 41, the third cleaning side f amount flow controller 'm, and the fifth cleaning side pneumatic valve 43A, which constitute the cleaning gas line 6, are disposed in the empty space, and It is advantageous to make the width dimension of the gas supply collecting unit i small. Further, as shown in Fig. 7, in the case where the laminated assemblies 61A, 61B, and 61C are not used, the second cleaning side mass flow controller 38a is used. (10), and 38C, the cleaning gas having the adjusted flow rate is supplied to the cleaning side check valves 39a, 39B, and 39C, and the pipes 1〇2, 1〇3, and 1〇4 are piped into the cleaning side check valves 39A and 39B, The top of the 39C is individually connected. Again, the fifth cleaning side pneumatic valves 43A, 43B, 4 3C pipes the pipes 1〇5, 106, and 1〇 into an L shape, and are respectively connected to the joining units 27, 27, and 27 of the third processing gas units 72A, 72B, and 72C. In the case where the laminated components 6ia, 61B, and 61C are used, since it is not necessary to strictly manage the supply amount of the cleaning gas, the 'pipe 46 is connected to the input ports of the second cleaning-side mass flow controllers 38A, 38β, and 38C, The output ports of the second cleaning side mass flow controllers 38a, 38B, and 38C are connected to the cleaning side check valves 39A, 39B, and 39C via the short pipes 49, 4g, and 49. Further, the pipe 5〇 is piped so that the fifth cleaning side pneumatic valve 43A provided opposite to the fifth cleaning side pneumatic valve 43B' 43C passes through the gap generated between the gas cells, and the i-th processing gas unit 72A The merge component 27 is connected. The pipes 51 and 52 are piped into an L shape for the fifth cleaning side pneumatic valves 43B and 43C'. 2097-9172-PF 21 200828484

Therefore, as shown in FIG. 2 and FIG. 3, the first cleaning unit 61A, 61B, and 61C are used, and the first to third processing gas units 72A, 72B, and 72C are configured in two stages, and the second cleaning side is used. The piping lengths of the mass flow controllers 38A, 38B, and 38C to the cleaning side check valves 39A, 39B, and 39C are shortened to control the cleaning gas by reducing the loss of the cleaning gas of the adjusted fluid. In addition, since the pipes 1 〇 2, 1 0 3, and 1 0 4 shown in Fig. 7 are integrated into one pipe 4 6 as shown in Fig. 2, the piping space can be made larger than that of Fig. 7 The gas supply collection unit shown is more reduced. Further, since the piping 5 is disposed by the gap between the gas cells, it is not necessary to separately provide the piping space required for the piping 50, and the size of the unit is not increased.

Further, as shown in FIGS. 2 and 3, the gas supply assembly unit 1 of the present embodiment has the laminated assembly 61A, 61B, and 61C disposed so as to cover the pipes 24A, 24B, and 24C, so that the laminated assembly 61A can be disposed. 61B and 61C are disposed within the width dimension of the third processing gas units 72A, 72B, and 72C. Further, in the gas supply assembly unit 1 of the present embodiment, as shown in Fig. 2, the laminated assembly 61A, 61B, 61C is fixed to the mounting board 9 by the bolt Vp inserted into the insertion hole 64A, and the V-shaped flow path assembly 22 will not be Each of the illustrated bolts is fixed to the fixing holes 63A of the laminated assemblies 61A, 61B, and 61C, and the second cleaning-side mass flow controllers 38A, 38B, and 38C are fixed to the V-shaped flow path unit 22 by bolts V, respectively. For example, when the third processing gas unit 72C is heated, the strip-shaped heaters 71 and 71 are attached to the manual valve uc, the filter 12C, the pressure 2097-9172-PF 22 200828484, the force adjustment valve 13C, and the pressure gauge 14C. The laminated unit 61C, the i-th common flow path unit 25, the first processing-side pneumatic valve 15C, the processing-side mass flow controller 16C, the second processing-side pneumatic valve 17C, and the second common flow path unit 27, and the assembly 27 and both sides of the filter i8C. Therefore, each fluid controller and the lower flow path unit disposed below it are heated, and the working gas does not condense in the flow path. At this time, the layered assembly 61C is heated by the heaters Η and Η which are in close contact with the both sides. This heat is transmitted to the piping 24C which is in contact with the holding groove 62c, and the pipe 24C is heated. Therefore, the working gas flowing through the pipe 24c does not condense in the pipe 24C. Therefore, according to the gas supply assembly unit 本 of the present embodiment, the work stacking unit 61 can have the functions of fixing the second cleaning side mass flow controller 38 and the v-shaped flow path assemblies 22 and 22 disposed at the lower portion thereof. And the function of transferring the heat of the heaters 7丨, 71 to the pipes 24A, 24B, and 24C. In other words, as shown in Fig. 7, in the case where the laminated unit 61C is not used, when the processing gas unit is heated, the heating unit 110 is fixed to the mounting board 9 so as to cover the piping 2, but the heating unit 110 cannot be effectively used. ^ Component 110. That is, as shown in Figs. 2 and 3, the laminated assembly 61 is effectively utilized by the function of heating the piping 24 and having the functions of the fixed v-shaped flow path assemblies 22, 22. And can make the footer space smaller. Further, as shown in FIGS. 2 and 3, the gas supply assembly unit of the present embodiment has the second cleaning side mass flow controllers 38A, 38B, and 38C and the lamination assemblies 61A and 61B having a large foot space. Since the 61C overlaps, the foot space of the entire unit can be efficiently reduced.

2097-9172-PF 200828484 Further, the present invention is not limited to the above-described embodiments, and various applications can be made. (1) For example, in the above embodiment, the third processing gas units 72A, 72B, and 72C through which the working gas flows are listed as "i-th gas unit", and the cleaning gas unit 73 is referred to as "second gas unit". "." Further, for example, a gas unit that controls the supply of the working gas may be referred to as an "i-th and second gas unit". (2) For example, in the above embodiment, the laminated assembly 61 is

The groove 6 2 is formed in an arch shape. However, as long as it is in contact with the outer surface of the pipe 24 and can transmit heat, it may be rectangular or triangular. (3) For example, in the above embodiment, the stacking unit μ is disposed to overlap the pipe 24, but may be overlapped with the flow path unit or the like. Further, for example, in the above-described embodiment, the third cleaning-side mass flow controller 3δ is disposed on the multilayer assembly 61, and other types of fluids such as valves or sensors may be controlled. The device is disposed above the stacked component Η. [Simple description of the drawing] Fig. 1 is a circuit diagram of a gas supply collection unit. The second diagram is a plan view of the gas supply assembly unit of the present embodiment in which the circuit shown in Fig. i is embodied. The Besch of X is a cross-sectional view of the a-A of Fig. 2. ^ 4 is a plan view of the laminated member shown in Fig. 2. Figure 5 shows the stack seen from the direction of the D + in the picture in Figure 4

2097-9172-PF 200828484 Diagram of layer components. Figure 6 is a cross-sectional view taken along line C-C of Figure 4. Fig. 7 is a view showing a gas supply assembly unit of the unused laminated member in which the circuit shown in Fig. 1 is embodied. [Main component symbol description]. 1 Gas supply assembly unit 24A, 24B, 24C piping / ^ 38A, 38B, 38C 2nd cleaning side mass flow controller (one part of fluid controller), 61A, 61B, 61C laminated assembly 63A , 63B, 63C fixing hole (fixing part) 71 heater 72A, 72B, 72C processing gas unit (first gas unit) 73 cleaning gas unit (second gas unit) 2097-9172-PF 25

Claims (1)

200828484 X. Patent Application Range: 1. A gas supply assembly unit, comprising: a first gas unit for controlling supply of a first gas; and a second gas unit connected to the first gas unit and using plural The fluid controller controls the second gas merged to the first gas unit; and the stacking assembly overlaps the first gas unit to overlap a portion of the fluid controller with the stack assembly. 2. The gas supply assembly unit of claim 1, wherein the laminate assembly is disposed to cover a pipe included in the first gas unit. 3. The gas supply assembly unit of claim 1, wherein the laminate assembly has a fixed portion for fixing a lower flow path component to which a portion of the fluid controller is placed; and a retaining groove The first gas is in contact with the first gas, and a heater is installed. 4. The gas supply assembly unit of claim 1, wherein one of the fluid controllers is a mass flow controller or a mass flow meter. 2097-9172-PF 26