200827260 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種防護薄膜組件收納容器，並可收响、保 在吾人製造半導體裝置、印刷基板或是液晶顯示器等產 口口訏作為防塵器使用的微影用防護薄膜組件。 【先前技術】 得用等半導體或是液晶顯示板等產品的製造中， 體，或液晶用原板以製作形成圖案，惟若此時 於該縮ΐ罩i以下僅稱光罩)有灰塵附著的話，由 邊缕㈣乂光’使光彎曲’故除了會使轉印的圖案變形、使 ί緣變粗_外，還會使基底污黑，並損壞尺寸、：;4 薄膜組件後再進“ 框架的下端設置為裝著於朵。=知面。接者，在防護薄膜組件 %:樹脂等物質所構成:“聚口 間雖然具有於光罩上後其所形成的封閉空 防_組件本身且在封閉“；效 200827260 著異物。因此，除了要求防護薄膜組件本身的高度清潔性以 更強烈要求保管、輸送時使用的防護薄膜組件收納容器也具有維 持該清潔性的性能。具體而言，要求其防止靜電性能^異了並由 文摩擦時發塵量少的材質所構成，且形成能儘量防止防護 ，與構成零件間之接觸的構造’以及施加外力時能夠防止變开;的 高剛性構造。 乂啊 防護薄膜組件收納容器通常係將丙烯腈—丁二烯—苯二 聚，（Acrylonitrile Butadiene sty職，ABS)樹脂、丙稀酸^ 二 以射出成形或是真空成形等方式製造而成。_該等成形方法，曰 具備表面平滑故異物附著或發塵的疑慮較少、 縫 量産性優異、成本低廉等優點。 ㈣也沾易k、 半導體用或印刷基板用的防護薄膜組件收納容器， 要求其具有岐外力施加時也難以變形的高難笨 200〜3〇Gmm的f薄膜組件收納容器而言少有H ，。原本，小型容ϋ就味容易確保翻彳性 心 式改變局部部㈣厚度，便可_補強重要部位成幵肩方 另-方面，主要用於液晶用防護薄膜組件 ^ 的大型防護薄膜組件收納容器，—般係對ABS ‘ : =材以真空成形方式所製造而成。這是 j ’其樹脂流動距離太長而會造成製作困 式，係在模具上覆蓋加熱過的樹脂片材形方 即使大型物品也能輕易製得。 竹乂具工及引成形， 的補 用該方式仍很難製得高剛性的物品。 々I成的而已，故使 ϋΓΓ:3ΓΓίί/ίf容11通常係_射出成形方Λ 2。如刖所述’為了保持防護薄臈組件收納容 二 故 200827260 的。該等肋部之例，就容器本體而言，如專利文獻丨等所例示 習知所用的補強用肋部，如圖5所 結卜形之對角線54a、54b的方向上的χ字型2 j設置於連 ΐϊίί x字型的肋部，與預期相反，因為其交又 59的存在，造成扭轉方向的剛性很低， :(連、 -方對角線扭轉彎曲，使相對頂點靠近。θ斤不的沿任何 在以真空成形法所製作之該等肋部中， , ::確保剛性’惟交叉(接續)之其他肋部切縱向 曲點（線），使變形度增大。 果”自身逛受成彎 因此，僅靠肋部無法確保足夠剛性，如專 必須與其他補題連駄確侧性。 判魏2所不的’ [專利文獻1]特開2000 —173887號公報 [專利文獻2]特願2005 — 081533號 【發明内容】 決的問顳 用上ϊΐΓί接利ΐ其他補強體時，雖能獲得足夠強度，但在運 曰產生各種不良的情況。其中最嚴重的 j保3的=在幾乎所有的情咖^ |。，、、、、後，由於重置增加，對捆包、運搬等處理造成極大的不方 太丄2補強體本身而已’還需要用來將補強體連結到容器 二及將其安裝於容11本體上的卫作流程，故比起 ，有μ本體的情況而言成本大幅增加。又，其他尚有補強體盥 谷益本體之間的間隙洗淨困難等關於乾淨度的問題存在。〃 古，Ξ1:目前並未存在一種未使用補強體而僅靠容器本體便具 有足夠剛性的防護薄膜組件收納容器。 200827260 K j以上所述，本發明之目的在於提供一種輕量化日m 膜組件收納容器，其未使用其他補強體1 ^本的 件的足夠剛性。 方止異物附者於内部收納之防護薄膜組 歷决吸題之技術丰鉛 本發明之防護薄膜組件收納容器， 載置防護薄膜組件；蓋體，其被覆防ίΐϋΐ: ί 切容器t趙外形的對角線，與t他置肋了^數叉的^^=横 (,=肋部與所横切之對角線所成角度』:求3?;)以上 他助=載㈤ …、、後，右在該肋部的各個之中， 高度區域（請求項4)的話 力一樣，具有不同 度剛性的優異形狀。 便4成可务揮雜部效果最大限200827260 IX. OBJECTS OF THE INVENTION: TECHNICAL FIELD The present invention relates to a protective film module storage container, which can be used as a dustproof device for the manufacture of semiconductor devices, printed substrates, or liquid crystal displays. A protective film assembly for lithography used. [Prior Art] In the manufacture of products such as semiconductors or liquid crystal display panels, the body or the original plate for liquid crystal is patterned, but if it is only called a mask under the shrink mask i), dust is attached. By Bian (4) Twilight 'bending the light', in addition to deforming the transfer pattern, making the 缘 edge thicker _, it will also make the substrate dirty, and damage the size, : 4; The lower end of the frame is arranged to be attached to the flower. = 知面. The receiver is composed of a material such as a pellicle component: resin: "The closed cavity formed by the splicing cavity after being formed on the reticle - the component itself In addition, the protective film assembly container which is used for the purpose of maintaining the cleaning property in addition to the high degree of cleanliness of the protective film module itself, which is required to be safely stored and transported, is also required to maintain the cleanability. Specifically, It is required to prevent the electrostatic performance from being different, and it is composed of a material having a small amount of dust when rubbed in the text, and is formed to prevent the protection as much as possible from being in contact with the constituent parts and to prevent the opening when the external force is applied; High-rigidity structure. The protective film unit storage container is usually made of acrylonitrile-butadiene-benzene dimerization, (Acrylonitrile Butadiene sty, ABS) resin, acrylic acid 2 by injection molding or vacuum forming. _ These forming methods, 曰 have the advantages of smooth surface, low foreign matter adhesion or dusting, excellent seam productivity, low cost, etc. (4) Protective film components for semiconductors, semiconductors or printed substrates In the storage container, it is required to have a high-difficult to be deformed when the external force is applied, and there is a small amount of H in the film assembly container of 200 to 3 mm Gmm. Originally, it is easy to ensure a tumultuous heart-shaped change. The thickness of the partial part (4) can be used to reinforce the important part into the shoulder and the other side. It is mainly used for the large protective film assembly storage container for the liquid crystal protective film assembly ^, generally for the ABS ': = material by vacuum forming method Manufactured. This is j 'the resin flow distance is too long and will cause the production to be trapped. It is easy to cover the heated resin sheet on the mold. Even large items can be easily used. It is still difficult to make high-rigidity items in the way of bamboo rafts and lead forming. It is only made of ,I, so that ΓΓ:3ΓΓίί/ίf容11 is usually _shot forming Λ2.刖In the case of the ribs, in the case of the ribs, the reinforcing ribs used in the container body, as exemplified in the patent document, etc., are as shown in Fig. 5. The χ-shaped type 2 j in the direction of the diagonal lines 54a, 54b of the embossed shape is set to the rib of the ΐϊίί x-shaped, contrary to expectations, because the existence of the intersection 59, the rigidity of the twisting direction is low, : (continuous, - square diagonal twisting, making the opposite vertices close. θ 斤 不 不 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在The rib cuts the longitudinal curvature point (line) to increase the degree of deformation. Therefore, it is impossible to ensure sufficient rigidity by the ribs alone. For example, it is necessary to be consistent with other supplementary questions. The judgment of Wei 2 is not [Patent Document 1] JP-A-2000-173887 [ Patent Document 2] Japanese Patent Application No. 2005-081533 [Summary of the Invention] When the reinforced ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ Bao 3 = in almost all of the emotional coffee ^ |.,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, The body is connected to the container 2 and the maintenance process is installed on the body of the volume 11. Therefore, the cost is greatly increased compared with the case of the μ body. In addition, the gap between the body and the body of the reinforcing body is also washed. There are problems with cleanliness such as net difficulty. 〃古,Ξ1: There is currently no pellicle container storage container that has sufficient rigidity without using a reinforcing body and only the container body. 200827260 K j Above, the present invention Purpose Providing a lightweight day m membrane module storage container, which is not rigid enough to use other reinforcing members. The protective film group that is attached to the internal body is used for the protection of the invention. The film component storage container is placed with the protective film component; the cover body is covered with the protection against the ΐϋΐ: ί The diagonal line of the container t-shaped shape is cut, and the t-shaped cross-section of the container is placed with the ^^= horizontal (, = rib and The angle formed by the diagonal line of the cross-cut: seeking 3?;) above, he helps = (5) ..., and then, right, among the ribs, the height area (request item 4) has the same force Excellent shape with different degrees of rigidity.
ΙΜΑΐίϋ術之功A ===納容器:低成本 容器時特別具有效果^ ° mm的大型防遵薄膜組件收納 脂片材成形4的麟限定要件，只要是以樹 的小型容哭也組件收納容器，即使是—邊長200mm 藉由構造i進一小型容器較無剛性的問題，但只要能 容器-樣ίί化步的話，便能使片材厚度更薄，跟大型 【實施方式】 下根據附圖|兄明本發明之防護薄膜組件收納容器一實施 200827260 形態。 例的表Γί發明之防護薄膜組件收納容器（本體）一實施 圖5俜且二m術護薄膜组件收納容器全體的立體圖。又， 之容器器本體，圖6係表示抬起圖5 器本體57朝上顺的力量時，該容 在交肋部53b應對抗該扭轉變形，惟因交叉肋部说 將該卿靖，故無法娜充分的抵抗力。 本身變得最容ίίί肋部53a與對角線54b幾乎一致，故該肋部 ΐϊ:ίί,圖6所示的成為變形基準點。 完2 絲_各_狀試作並比較檢討之後所 組件^^^’/^^組:㈣容器本體^上載置防護薄膜 本體2卜以勒貼)膠•等所f蓋。然後，蓋體22與容器 等連結工具固定。4 (未、_不）密封固定’或是以夾具23 又，專面向’則宜用真空成形法製作為佳。 中選擇適當材質#^^材^可從丙烯酸、ABS、PVC等樹脂 P方止靜電的射4 ; 少靜電所造成的異物附著，宜使用可 情況，容H本蓋體錢透明或半透明以便於確認内部 蓋體22 認是否有異物附著。 小，以防止里二=林體21的周緣部上，該間隙宜儘量縮 如圖1所示横:然後’容器本體^宜設置複數個 的肋部13。在圉谷厂體外形之對角線14，且未與其他肋部交又 根以上也沒有^之例中’該等肋部13設置了 4根，惟設置4 ,、’/、要因應容器本體大小或外形形狀適當設置 200827260 即可。 =’此時肋部13與對角線14所成角度3宜在卯 宜k置接近90度為佳。在扭轉方向的外 於^ 變二彎ϊ、ί 果變得極小’肋部本身也容易變成扭轉 置了亥^!己置的其他實施形態。其與圖1相同，也設 、i 33a、33b、33c、33d，該等肋部雖未 二if =端部與防護薄膜組件載置台座^以及其他 的端部連接，幾乎不會造成剛性降低的問題。 =使用的防護薄膜組件其外形長邊與短邊的比率，】幾乎 用有的It况下’以該等方式設計穩定性較好，也比圖！之例實 3 (a)之肋部说中’如A-A剖面端視圖（圖 的區=那樣，肋部的高度並非-定，宜具有不同高度 變形4以及圖6所示那樣其自身容易變成 部41中另設置其他表面（因段差部所 42亦 ’便能減少肋部本體的變形量。換言之，該表面 42亦可雜構朗來觀肋部41的其他補強肋部。 應所=的的寬、高度、配置、根數、剖面形狀等，因 中並S3:以及成形性適當設置即可，在該等圖示 實施例 止靜Gbs説 發明的實施例，惟本發明並非僅限於此。用防 4 (…色片材，以真空成形法製作出如圖8所示形狀 的防濩薄膜組件收納容器本體81。 該收納容器本體81的大小為外形69〇χ54〇_、高度 _、片材厚度3mm。各肋部的寬為20mm。除了横切對角線 200827260 H以外，更為了補強而在中央部設置與肋部83幾乎平行 置 84。 3〇mrTti3設置與圖4立體圖相同的段差，肋部全體高度為 30mm’段差部高度為20mm。 性則面與段差面的連接角度宜為直角’惟考慮成形 中防度。又，配置於中央部的肋部84，為了防止輸送 中防44膜搖晃接觸，高度降低到20mm。 之防了將防護薄膜組件固定於該容器本體内，配合收納 伽 件的位置將聚苯硫（p〇lyphenylene sulflde，PPS ) 85以及ABS製的插銷支撐部86用螺栓（未經圖 β廿Π子。固定插銷Μ插入插銷支撐部86中，以便受到支 撐，並^成可利用鎖定機構脱開的構造。 上之_自彡射#入設置在防_膜框架87側面 的面上ί#\(ίί圖不）的構造’且在與防護薄膜框架87接觸 之賴▲(杜邦公司製氣化橡膠 87載㈣用清淨的純水洗淨，實際將_薄膜組件 ί件載置Ίί成薄膜組件收納容器本體81的防護薄膜 、且仟戰置口 82上，並用固定插銷85固定。 抬起_水平固定盤上，試著朝上方稍微 Ϊ L胃_°結果’容11本體81幾乎沒有扭轉變 “上’ ：ίΐ的防護薄膜組件仍牢牢的固定在容器本體81的 表面上’並未發現任何變化。 栝入ϊΐί開固定插銷85，觀察防護薄膜框架87上固定插銷85 ^夾具孔，肚發__。紐，= 达較例1 f與上述實施爾目同，以真^顧彡法製作如® 9所 護薄膜組件收納容器本體91，並在該容器本體a9i 200827260 銷94以及插鎖支撐部95。之後，在無塵室内用清 淨，並實際將防護薄敝件96載置於準備完成之本的體屯 防護薄膜組件載置台92上，用固定插銷94固定。 、 评價方式與上述實施例相同，將該容器本體91 後，試著稍微朝上方抬起容器本體的i個角落部。結果，該 本體91沿肋部93產生如圖6所示的曲折。 此時，觀察載置於防護薄膜組件載置台92 件，發現其沿該方向（對角線方向）產生與容 的考曲’且在防護薄膜的一部份上產生鈹折。又，從防護組 # 孔將夕固定插鎖94拔出後，發現夹具孔内因為插銷強 2摩2而產生很，即使在螢光燈下也能立即辨認出來的異物 者，，、就保持乾淨度的要求而言是完全無法容許 、 比較例2 ,丨月 …，述實施例，與比較例i相同，以真空成形法製作如圖 不形狀的防護薄膜組件收納容器本體71，並斤 及插銷支樓部73。 文我U疋插銷72以 又，補強用的6000系鋁合金棒狀補強體乃、％ 厚度5mm)以日字型組合於該容器本體71外侧，abs ^ 插銷支樓部73、補強體固定具74以及容器本體71以螺=曰= : 圖不）牢固的連結在一起，容器本體便準備完成。”王人 之後’在無塵室内用清淨的純水洗淨，實際將防 77載置於準備完成的容||本體上，並麵定插銷72固定。、、、、 3實施例、比較例1相同，將防護薄膜組件收柄容 起平置棚定盤上，絲將本體的1個聽部朝上Ϊ 結果，容器本體幾乎沒有扭轉變形，又，所載置的 組件仍牢牢的固定在容器本體表面上，並未發現任何不 然後，從防護薄膜組件77的夾具孔將固定插銷72 t 暗室内用鹵素燈觀察，發現夾具孔周邊仍然很清淨。 ，在 12 200827260 倍以容器本體的重量為2.96kg ’與上述實施例比較是 【圖式簡單說明】 一實發社賴薄·件㈣容11賴其肋部構造 體圖圖2係表示本發明之防護_組件收納容器其全體構造的立 圖^係表示本發明之防護薄膜組件收 :其)他實施形態的平面圖⑷，以及 的立^絲林㈣之賴薄餘件㈣抑本肋部構造 施例ΚΙ表示料防㈣敵件收納抑本體其肋部構造一實 的立=日^示制^防㈣酿件收納抑本叙變形態樣 體其圖實 =^^她_題的暖薄敵做納容器本 的平=係表示本發明之防㈣酿件收納容器本體其-實施例 其-知肋繼的_膜組件收納容器本體 【主要元件符號說明】 11防護薄膜組件收納容器本體 12防護薄膜組件載置台 13肋部 14容器本體外形的對角線 13 200827260 a 肋部與所横切之對角線所成角度 21防護薄膜組件收納容器本體 22蓋體 23夾具 31防護薄膜組件收納容器本體 32防護薄膜組件載置台座 33a、33b、33c、33d 肋部 34肋部 35容器本體外形的對角線 41 肋部 42段差部所產生之平面 51 防護薄膜組件收納容器本體 52防護薄膜組件載置台 53a、53b 肋部 54a、54b 容器本體外形的對角線 55、56、57、58 容器本體角落部 59肋部的交叉部 71防護薄膜組件收納容器本體 72防護薄膜組件固定插銷 73插銷支撐部 74補強體固定具 75鋁合金製補強體（短） 76鋁合金製補強體（長） 77防護薄膜組件 81防護薄膜組件收納容器本體 82防護薄膜組件載置台 83 肋部 84肋部 85 (防護薄膜組件用）固定插銷 14 200827260 86插銷支撐部 87防護薄膜組件 91防護薄膜組件收納容器本體 92防護薄膜組件載置台 93 肋部 94 防護薄膜組件固定插銷 95插銷支撐部 96防護薄膜組件 15ΙΜΑΐ ϋ 之 A A === 纳 容器 容器 : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : Even if it is - the length of 200mm is less rigid by constructing a small container, as long as the container can be made thinner, the thickness of the sheet can be made thinner, and the large scale is as follows. | Brothers The protective film assembly container of the present invention is implemented in the form of 200827260. Example of the invention 防护 The protective film unit storage container (body) of the invention is implemented. Fig. 5 is a perspective view of the entire membrane package storage container. Further, in the container body, FIG. 6 is a view showing that when the force of the upper body 55 of the apparatus 5 is raised upward, the rib portion 53b is adapted to resist the torsional deformation, but the cross rib is said to be clear, so Unable to fully resist. The ribs 53a and the diagonal lines 54b are almost identical to each other, so the ribs ί: ίί, as shown in Fig. 6, become the deformation reference points. After the 2 silk _ each _ test and compare the components after the review ^ ^ ^ ' / ^ ^ group: (4) container body ^ placed protective film body 2 Bu Le) glue • etc. f cover. Then, the lid body 22 is fixed to a joining tool such as a container. 4 (not, _ no) sealing and fixing 'or the clamp 23 and the special face should be made by vacuum forming. Select the appropriate material #^^材^ can be used to stop the static electricity from the acrylic P, ABS, PVC and other resin P; less foreign matter caused by the adhesion of static electricity, should be used, Rong H cover body money transparent or translucent so that It is confirmed that the inner lid 22 recognizes whether or not foreign matter adheres. Small to prevent the inner side of the second body = the body 21, the gap should be as small as possible as shown in Fig. 1: then the container body should be provided with a plurality of ribs 13. In the case of the diagonal line 14 of the shape of the Shibuya factory, and not intersecting with other ribs, there are no such cases. In the case of the ribs 13, there are four ribs 13 provided, but the setting of 4, '/, depends on the container The size or shape of the body can be set to 200827260 as appropriate. =' At this time, it is preferable that the angle 3 between the rib 13 and the diagonal 14 is set to be close to 90 degrees. In the twisting direction, the ribs become extremely small, and the ribs themselves are easily twisted. It is the same as that of Fig. 1, and i 33a, 33b, 33c, and 33d are provided. These ribs are not connected to the pellicle mounting base and other end portions, and the rigidity is hardly lowered. The problem. = The ratio of the long side to the short side of the protective film module used, which is almost used in the case of It's better in this way, and better than the figure! Example 3 (a) The rib is said to be 'in the AA section end view (the area of the figure = the height of the rib is not fixed, it is preferable to have different height deformation 4 and as shown in Fig. 6 Another surface is provided in 41 (the section of the step 42 can also reduce the amount of deformation of the rib body. In other words, the surface 42 can also be used to view the other reinforcing ribs of the rib 41. The width, the height, the arrangement, the number of the roots, the cross-sectional shape, and the like may be appropriately set in the S3: and the formability, and the embodiment of the invention is described in the above-described illustrated embodiment, but the present invention is not limited thereto. The tamper-evident film unit storage container body 81 having the shape shown in Fig. 8 was produced by vacuum forming using a protective film of 4 (...). The size of the container body 81 was 69 〇χ 54 〇 _, height _, and sheet. The thickness of the material is 3 mm. The width of each rib is 20 mm. In addition to the cross-diagonal diagonal of 200827260 H, it is more reinforced and is disposed almost parallel to the rib 83 at the center. 84. 3rmrTti3 sets the same step as the perspective of Fig. 4. The height of the entire rib is 30mm' and the height of the step is 20mm. The connection angle between the surface of the surface and the step surface is preferably a right angle 'only considering the degree of resistance during forming. Moreover, the rib 84 disposed at the center portion is lowered to a height of 20 mm in order to prevent the film 44 from being shaken during transportation. The pellicle assembly is fixed in the container body, and the pin support portion 86 made of polyphenylene sulfide (PPS) 85 and ABS is bolted to the position where the garnish is stored (not shown in Fig. β. The cymbal is inserted into the latch support portion 86 so as to be supported and configured to be disengaged by the locking mechanism. The _ self- 彡射# is placed on the side of the side of the anti-membrane frame 87 ί#\(ίί图The structure 'and the contact with the pellicle frame 87 ▲ (DuPont's gasification rubber 87 (4) is cleaned with pure pure water, and the _ film component is actually placed in the film assembly container body 81 The protective film is placed on the mouth 82 and fixed by the fixing pin 85. Raise the _ horizontal fixed plate and try to slightly squat upwards. L stomach _ ° Result 'Capacity 11 body 81 hardly twisted "up": ΐThe protective film assembly is still strong Fixing on the surface of the container body 81 'No change was found. 栝 ϊΐ 开 Open the fixing pin 85, observe the fixing pin 85 on the protective film frame 87 ^ Fixing hole, belly hair __. New, = up to example 1 f In the same manner as the above-mentioned embodiment, the film assembly container body 91 such as the protective film assembly 91 is manufactured by the method of the method, and the container body a9i 200827260 is used for the pin 94 and the mortise support portion 95. Thereafter, it is cleaned in a clean room. And the protective thin member 96 is actually placed on the body protective pellicle assembly stage 92 to be completed, and fixed by the fixing pin 94. The evaluation method is the same as that of the above-described embodiment. After the container body 91 is placed, it is tried to lift the i corner portions of the container body slightly upward. As a result, the body 91 produces a meander as shown in Fig. 6 along the rib 93. At this time, the member placed on the pellicle frame mounting table 92 was observed, and it was found that the film was produced in the direction (diagonal direction) and a fold was formed on a part of the pellicle film. In addition, after the protective group # hole is removed from the fixed latch 94, it is found that the pin hole is strong because the pin is strong 2, and the foreign object can be immediately recognized even under the fluorescent lamp. In the case of the cleanliness requirement, it is completely unacceptable, and in the comparative example 2, in the same manner as in the comparative example i, the protective film unit storage container body 71 having the shape shown in the figure is formed by a vacuum forming method. The bolt branch portion 73. In the case of the U-pin 72, the 6000 series aluminum alloy rod reinforcement for reinforcement, % thickness 5mm) is combined on the outside of the container body 71 in a Japanese font, abs ^ bolt branch portion 73, reinforcing body fixture 74 and the container body 71 are firmly joined together by the screw = 曰 = : Fig.), and the container body is ready to be completed. After the "Wang Ren", it was cleaned with clean pure water in the clean room. Actually, the anti-77 load was placed on the prepared body||body, and the pin 72 was fixed. ., , , 3 Examples and Comparative Examples 1 is the same, the protective film assembly handle is received on the flat shed fixed plate, and the wire has the upper part of the body facing upwards. As a result, the container body has almost no torsional deformation, and the mounted components are still firmly fixed. On the surface of the container body, nothing was found. Then, from the fixture hole of the pellicle film assembly 77, the fixing pin 72 t was observed in the dark room with a halogen lamp, and it was found that the periphery of the jig hole was still clean. In 12 200827260 times the container body The weight is 2.96kg. 'Compared with the above embodiment is a brief description of the drawings. A real-life society is thinner. The fourth is a rib structure. FIG. 2 shows the protection of the present invention. The diagram of the protective film assembly of the present invention is shown in Fig. 4), the plan view of the embodiment (4), and the thin section of the vertical wire (4). (4) The structure of the rib structure is 施 料 料 料 四 四 四 四 四 四 四 四Accommodating the body's rib structure The real stand = day ^ show system ^ defense (four) brewing storage suppression of the narrative form of the figure of its figure = ^ ^ her _ title of the warm thin enemy to do the container of the flat = indicates the invention of the defense (four) brewing Storage container body - embodiment thereof - rib membrane assembly container body [main component symbol description] 11 protective film assembly storage container body 12 protective film assembly mounting table 13 rib 14 diagonal shape of the container body shape 13 200827260 a Angle between the rib and the diagonal line to be cut 21 Protective film assembly Storage container body 22 Cover 23 Clamp 31 Protective film assembly Storage container body 32 Protective film assembly Mounting pedestal 33a, 33b, 33c, 33d Rib 34 rib 35 diagonal line 41 of the outer shape of the container body rib 42 plane 51 generated by the step portion of the rib portion 42 the protective film unit storage container body 52 the protective film unit mounting table 53a, 53b ribs 54a, 54b diagonal line 55 of the outer shape of the container body , 56, 57, 58 container body corner portion 59 rib intersection portion 71 protective film assembly storage container body 72 protective film assembly fixing pin 73 pin support portion 74 reinforcing body fixing device 75 aluminum alloy reinforcing body (short 76 reinforcing body made of aluminum alloy (long) 77 protective film assembly 81 protective film unit storage container body 82 protective film assembly mounting table 83 rib 84 rib 85 (for protective film assembly) fixing pin 14 200827260 86 pin support 87 protection Membrane assembly 91 Protective film assembly Storage container body 92 Protective film assembly mounting table 93 Rib 94 Protective film assembly Fixing pin 95 Pin support portion 96 Protective film assembly 15