CN101190723A - Vessel for containing protection thin film components - Google Patents
Vessel for containing protection thin film components Download PDFInfo
- Publication number
- CN101190723A CN101190723A CNA200710196223XA CN200710196223A CN101190723A CN 101190723 A CN101190723 A CN 101190723A CN A200710196223X A CNA200710196223X A CN A200710196223XA CN 200710196223 A CN200710196223 A CN 200710196223A CN 101190723 A CN101190723 A CN 101190723A
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- CN
- China
- Prior art keywords
- film assembly
- vessel
- protective film
- flank
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
The invention provides a light and low cost protective film container. The container has sufficient rigidity to bear external force during protecting and transmitting, and prevents foreign matters from attaching to the protective film components contained in the inner part without using other reinforcements. To achieve the aims, the protective film component container is made up of resin plates, and a plurality of costal parts is arranged on the container body. The costal part crosscuts the diagonal of the container without intersecting with other costal parts. The costal part has high resistance against torsional deflection and doesn't cause the distortion. As a result, the rigidity especially the rigidity at the torsional direction of the container is improved greatly without reinforcement to produce light protective film container of high rigidity at a low cost.
Description
Technical field
The invention relates to a kind of protective film assembly container, the little shadow protection film assembly that uses as dust excluder when it can take in, takes care of, carry products such as making semiconductor device, printed base plate or Liquid Crystal Display (LCD) at us.
Background technology
In the manufacturing of products such as quartz conductors such as LSI, super LSI or LCD panel, use up irradiation semiconductor crystal wafer or liquid crystal and form pattern to make with raw sheet, only if this moment employed light shield or first minification shade (the following light shield that the only claims) words that have dust to adhere to, because this dust can absorb light, make bendingof light, so except meeting make transfer printing pattern deformation, make the edge roughen, also can make substrate dirty black, and damage size, quality, outward appearance etc.
Therefore, these operations are normally carried out in dust free room, only even so desire often to keep photomask clean still quite difficult.So the contriver exposes behind the protection film assembly of light shield surface attaching as the usefulness of dust excluder again.At this moment, foreign matter is not directly to be attached on the light shield surface, but is attached on the protection film assembly, so as long as will be in focus in little shadow step on the mask pattern, the foreign matter on the protection film assembly just can not impact transfer printing.
Generally speaking, this protection film assembly constitutes transparent protection film with materials such as the good nitrocellulose of light transmission, cellulose acetate or fluorine resins, and, this protection film is attached the upper surface that is attached to this protection film assembly framework with materials such as aluminium, corrosion-resistant steel, polyethylene formation protection film assembly framework.Then, be set to adorning in the lower end of protection film assembly framework on light shield and by adhesion layers that material constituted such as polybutene resin, polyvinyl acetate resins, acrylic resins, and the release layer (isolation part) of protection adhesion layer.
Yet, though its formed enclosure space of back has the foreign matter of preventing from outside intrusion in-to-in effect on the light shield in that protection film assembly is attached at, only if foreign matter is to be attached to protection film assembly itself and when enclosure space is inner, just to be difficult to prevent light shield surface attachment foreign matter.Therefore, except the height spatter property that requires protection film assembly itself, more strong request keeping, the protective film assembly container that uses when carrying also have the performance of keeping this spatter property.Particularly, require it to prevent the antistatic property excellence, and the few material of powder amount is constituted when being rubbed, and formed the structure that contacts that can as far as possible prevent between protection film assembly and constituent part, and can be prevented the high rigid construction of being out of shape when applying external force.
Normally (Acrylonitrile Butadiene Styrene, ABS) resin such as resin, acrylic acid forms with mode manufacturings such as injection molding or vacuum formings protective film assembly container with acrylonitrile-butadiene-benzene diene copolymers.Utilize these manufacturing process, though possess surface smoothing thus foreign matter adhere to or send out that the doubt of dirt is less, integrally formed non-joint is so send out dirt or the less contoured article complexity of allotrylic doubt also can be made easily, production excellence, advantage such as with low cost.
The protective film assembly container that quartz conductor is used or printed base plate is used, about the about 200～300mm of its profile length of side, these containers normally utilize the injection molding mode to make and form.As previously mentioned, in order to keep the clean of protective film assembly container, even and also be difficult to the high rigidity of being out of shape when requiring it to have external force and apply, only the problem for the rare rigidity of protective film assembly container of these length of sides 200～300mm exists.Originally, small containers is just than being easier to guarantee its rigidity, and changes the thickness of part, the just wall thickness of reinforcement significant points easily with the mode of injection molding.
On the other hand, being mainly used in liquid crystal and surpassing the large-scale protective film assembly container of 500mm with protection film assembly and the length of side, generally is that synthetic resin sheet materials such as ABS, acrylic acid are formed with the manufacturing of vacuum forming mode.This is because if use from a place or several local gates inject injection molding mode in the mould with the resin at high speed, its resin flows distance is oversize and can cause difficulty in the making.The vacuum forming mode is to cover the resin sheet that heated on mould, is shaped with vacuum attraction, so even large item also can make easily again.
Yet the vacuum forming mode can't form heavy wall, though available flank is done the reinforcement of some degree, the sheet material that only is crooked identical thickness of slab basically is made, so this mode of use still is difficult to make the article of high rigidity.
The example of these flanks, with regard to vessel, illustrated as patent documentation 1 etc.
Existing used reinforcement flank as shown in Figure 5, is the X font member that is arranged on the direction of diagonal line 54a, 54b of binding profile basically.Yet the flank of this cross one another X font againsts one's expectation, and the existence of (portion continuously) 59 causes the rigidity of torsional direction very low because its cross part, pallet as shown in Figure 6 along either party diagonal line torsional bending, make relative summit close.
In these flanks with vacuum forming method made, flank is guaranteed rigidity because of the longitudinal direction face of warpage, and only other flanks of intersection (continuing) have cut off this longitudinal direction face.Then, this flank not only cuts off the object flank and has strangled effect, himself also becomes point of inflection (line), and degree of deformation is increased.
Therefore, only depend on flank can't guarantee enough rigidity, shown in patent documentation 2, must link to guarantee rigidity with other reinforcing body.
[patent documentation 1] spy opens the 2000-173887 communique
[patent documentation 2] is special is willing to 2005-081533 number
Summary of the invention
The problem that invention institute desire solves
As mentioned above, when utilizing other reinforcing body,, in utilization, can produce various condition of poor though can obtain sufficient intensity.Wherein the most serious is the increase of weight, and in order to ensure enough rigidity, reinforcing body can also weigh by the container body under nearly all situation.Then, because weight increases, processing such as bale packing, haulage are caused great inconvenience.
Again, reinforcing body itself not only also needs to be used for reinforcing body is attached to part on the vessel, and it is installed on workflow on the vessel, so significantly increase compared with the situation cost that vessel is only arranged.Again, other still have gap between reinforcing body and the vessel to clean difficulty etc. to exist about the problem of clean degree.
Yet, do not exist at present and a kind ofly do not use reinforcing body and only depend on vessel just to have the protective film assembly container of enough rigidity.
According to the above, the object of the present invention is to provide a kind of lightweight and protective film assembly container cheaply, it does not use other reinforcing body, just has the external impacts in the keeping of bearing, the conveying, prevents that foreign matter is attached to enough rigidity of the protection film assembly of taking in inside.
The technological means of dealing with problems
Protective film assembly container of the present invention is made of following member: vessel, its mounting protection film assembly; Lid, its protection film assembly that is covered, and end with the mutual chimeric card of circumference with vessel, it is characterized by: vessel is to be shaped with resin sheet, and on vessel, be provided with a plurality of flanks, the diagonal line of this flank crosscut vessel profile, and do not intersect (scheme 1) with other flanks.
At this, the diagonal line angulation of this flank and institute's crosscut should be more than 30 degree (scheme 2).Again, this flank can not intersect with other flanks, but the end can be connected (scheme 3) with the pedestal of other flanks or mounting protection film assembly.
Then, if among each of this flank, the flank height is different, has differing heights zone (scheme 4), just can form to bring into play this flank effect excellent shape of rigidity to greatest extent.
The effect of contrast prior art
If according to the present invention, by suitable flank configuration, need not use reinforcing body also can significantly improve the rigidity of the rigidity, particularly torsional direction of vessel, so can make light weight and possess the protective film assembly container of high rigidity with low cost.
The present invention is applicable to that a length of side has effect especially when surpassing the large-scale protective film assembly container of 500mm.Yet, its size and non-limiting important document, so long as the protective film assembly container that is shaped and forms with resin sheet, even the small containers of a length of side 200mm also can be suitable for.Though small containers does not have the problem of rigidity, as long as can further improve rigidity by structure, just can make sheet thickness thinner, with the same lightweight of tun, cost-cutting.
Description of drawings
Fig. 1 is the skeleton diagram that expression its flank of protective film assembly container body of the present invention is constructed an embodiment.
Fig. 2 is the block diagram of its all structure of expression protective film assembly container of the present invention.
Fig. 3 is the planar view (a) of other examples of its flank structure of expression protective film assembly container body of the present invention, and A-A line section-drawing (b) (a).
Fig. 4 is the block diagram of its flank structure of expression protective film assembly container body of the present invention.
Fig. 5 is the planar view that existing its flank of protective film assembly container body of expression is constructed an embodiment.
Fig. 6 is the perspective illustration of the distortion aspect of the existing protective film assembly container body of expression explanation.
Fig. 7 is the planar view that the protective film assembly container body one embodiment of existing aluminum reinforcing body is used in expression.
Fig. 8 is the planar view of expression protective film assembly container body one embodiment of the present invention.
Fig. 9 is the planar view that the protective film assembly container body one embodiment of existing flank structure is used in expression.
Main description of reference numerals
11 protective film assembly container bodies
12 protection film assembly mounting tables
13 flanks
The diagonal line of 14 vessel profiles
The diagonal line angulation of a flank and institute's crosscut
21 protective film assembly container bodies
22 lids
23 anchor clamps
31 protective film assembly container bodies
32 protection film assembly mounting pedestals
33a, 33b, 33c, 33d flank
34 flanks
The diagonal line of 35 vessel profiles
41 flanks
The plane that 42 segment difference sections are produced
51 protective film assembly container bodies
52 protection film assembly mounting tables
53a, 53b flank
The diagonal line of 54a, 54b vessel profile
55,56,57,58 vessel corner portions
The cross part of 59 flanks
71 protective film assembly container bodies
72 protection film assembly Fixed latches
73 latch support portions
74 reinforcing body are tool fixedly
75 aluminum alloy system reinforcing body (weak point)
76 aluminum alloy system reinforcing body (length)
77 protection film assemblies
81 protective film assembly container bodies
82 protection film assembly mounting tables
83 flanks
84 flanks
85 (protection film assembly is used) Fixed latches
86 latch support portions
87 protection film assemblies
91 protective film assembly container bodies
92 protection film assembly mounting tables
93 flanks
94 protection film assembly Fixed latches
95 latch support portions
96 protection film assemblies
The specific embodiment
Below, protective film assembly container one example of the present invention is described with reference to the accompanying drawings.
Fig. 1 is the skeleton diagram of expression protective film assembly container of the present invention (body) embodiment, and Fig. 2 is all block diagrams of protective film assembly container.Again, Fig. 5 is the vessel that possesses existing used flank structure, the distortion aspect when Fig. 6 is the bight of the expression vessel that lifts Fig. 5.
In existing protective film assembly container body 51 (Fig. 5), when torsional direction applied external force, for example, when applying bight 57 towards the strength that lifts the top, this vessel 51 can be along diagonal line 54b complications.
At this moment, original flank 53b should resist this torsional deflection, only because of intersection flank 53a cuts off this flank in cross part 59 parts, so can't bring into play sufficient resistibility.
And, because it is almost consistent with diagonal line 54b to intersect flank 53a, the easiest bending so this flank itself becomes, as shown in Figure 6 become the distortion bench mark.
In view of this present invention studies and relatively examines afterwards and finish through different shape.
In Fig. 2, mounting protection film assembly on the protective film assembly container body 21 (without diagram), and covered by lid 22.Then, lid 22 and vessel 21 with (without diagram) sealing and fixing such as adhesive tape of paste, or are fixed with binding instruments such as anchor clamps 23.
Again, the material of lid, vessel can be selected suitable material from resins such as acrylic acid, ABS, PVC, only adheres in order to reduce the foreign matter that static causes, and should use can prevent the material of static.Then, lid is preferably transparent or semitransparent so that confirm inner case, and vessel is preferably whether black is for confirmation has foreign matter to adhere to.
Again, this moment, flank 13 should be more than 30 degree with diagonal line 14 angulation a, more suitable trying one's best near 90 degree to good.External force at torsional direction acts under the situation of vessel, and the cornerwise angle of flank crosscut is 90 can bring into play maximum resistibility when spending, if become minimum at 30 degree with next not only effect, flank itself also becomes the wiggle of torsional deflection easily.
Fig. 3 represents other examples of this flank configuration.It is identical with Fig. 1, also is provided with flank 33a, 33b, 33c, the 33d of crosscut diagonal line 35, though these flanks do not intersect with other flanks, the end is connected with protection film assembly mounting pedestal 32 and other flanks.End at flank connects, the problem that can cause rigidity to reduce hardly.
The ratio of long limit of general its profile of the protection film assembly that uses and minor face, better with these mode design stabilities under nearly all situation, also practical than the example of Fig. 1.
Moreover in the flank 33c of Fig. 3 (a), as A-A section end view (Fig. 3 (b)) or Fig. 4, the height of flank is not certain, and the zone that should have differing heights is good.
During the flank torsional deflection, as Fig. 4 and himself become the curved of distortion as shown in Figure 6 easily, only if other surfaces (because of the plane 42 that the segment difference section produced) are set in flank 41 in addition, just can reduce the deflection of flank body by line.In other words, also can say so and be configured to other reinforcement flanks of reinforcement flank 41 in this surface 42.
Then, these flanks wide, highly, configuration, radical, section shape etc., suitably be provided with in response to needed vessel rigidity and formability and get final product, in these graphic forms, do not do any qualification.
Embodiment
Below, embodiments of the invention are described, only the present invention is not limited only to this.With preventing static ABS (black) sheet material, produce the protective film assembly container body 81 of shape as shown in Figure 8 with the vacuum forming method.
The size of this accommodating container body 81 is profile 690 * 540mm, height 30mm, sheet thickness 3mm.The wide of each flank is 20mm.Except the cornerwise flank 83 of crosscut, more for reinforcement at central portion setting and flank 83 flank 84 of configured in parallel almost.
Then, for protection film assembly being fixed in this vessel, (polyphenylene sulfide, PPS) the latch support portion 86 usefulness bolts of Zhi Fixed latches 85 and ABS system (without diagram) install with polyphenylene sulfide in the position of the protection film assembly that cooperation is taken in.Fixed latches 85 inserts in the latch support portion 86, so that supported, and forms the structure that can utilize lockout mechanism to throw off.
The front end of Fixed latches 85 forms the structure that can insert the anchor clamps cave (without diagram) that is arranged on pellicle frame 87 sides, and with face that pellicle frame 87 contact on the buffer component (without illustrating) of viton (trade mark of the E.I.Du Pont Company's system Viton) system of the ring-type that is used for preventing sending out dirt has been installed.
Afterwards, clean at dustless indoor peace and quiet pure water, actual with protection film assembly 87 mountings on the protection film assembly mounting table 82 of the protective film assembly container body 81 that is ready to complete, and fix with Fixed latches 85.
Then, vessel 81 is placed on the horizontal fixed dish 1 corner portion of the body of trying to lift a little towards the top.As a result, vessel 81 does not almost have torsional deflection, and again, the protection film assembly of institute's mounting still is fixed on the surface of vessel 81 firmly, does not find any variation.
Again, dismantle Fixed latches 85, observe the anchor clamps hole that Fixed latches 85 inserts on the pellicle frame 87, do not find any pollution.Then, this vessel weight is 1.38kg.
Comparative example 1
Same as the previously described embodiments, make the protective film assembly container body 91 of shape as shown in Figure 9 with the vacuum forming method, and on this vessel 91, install and fix latch 94 and latch support portion 95.Afterwards, clean at dustless indoor peace and quiet pure water, and actual with protection film assembly 96 mountings on the protection film assembly mounting table 92 of the vessel 91 that is ready to complete, fixing with Fixed latches 94.
Evaluation method is same as the previously described embodiments, after these vessel 91 levels are left standstill, and 1 corner portion of the vessel of trying to lift towards the top a little.As a result, this vessel 91 is along flank 93 generations complications as shown in Figure 6.
At this moment, observe the protection film assembly 96 of mounting on protection film assembly mounting table 92, find its (diagonal) generation bending identical in the direction, and on the some of protection film, produce fold with the vessel distortion.Again, after from the anchor clamps hole of protection film assembly 96 Fixed latches 94 being extracted, even find that producing the foreign matter that much also can recognize immediately because of the powerful friction of latch under fluorescent lamp in the anchor clamps hole adheres to, it is the thing that can't allow fully with regard to the requirement that keeps clean degree.
Comparative example 2
The foregoing description, identical with comparative example 1, make the protective film assembly container body 71 of shape as shown in Figure 7 with the vacuum forming method, and install and fix latch 72 and latch support portion 73.
Again, reinforcement use 6000 are bar-shaped reinforcing body 75,76 of aluminum alloy (wide 40mm * thickness 5mm) with day font be combined in this vessel 71 outsides, fixedly tool 74 and vessel 71 are with firm the linking together of bolt (without diagram) for the latch support portion 73 of ABS resin system, reinforcing body, and vessel just is ready to complete.
Afterwards, clean at dustless indoor peace and quiet pure water, actual with protection film assembly 77 mountings on the vessel that is ready to complete, and fix with Fixed latches 72.
Identical with the foregoing description, comparative example 1 then, protective film assembly container body 71 levels are placed on the reaction plate, try 1 corner portion of body is lifted a little towards the top.
As a result, vessel does not almost have torsional deflection, and again, the protection film assembly of institute's mounting still is fixed on the vessel surface firmly, does not find any bad variation.
Then, Fixed latches 72 is extracted, observed, find that anchor clamps hole periphery is still very peace and quiet at dark indoor halide torch from the anchor clamps hole of protection film assembly 77.
Yet the weight of this vessel is 2.96kg, with the foregoing description relatively be weight more than 2 times.
Claims (4)
1. protective film assembly container comprises:
Vessel is in order to the mounting protection film assembly;
Lid in order to the covered protection film assembly, and ends with the mutual chimeric card of circumference with vessel,
It is characterized by:
Vessel is shaped with resin sheet and forms, and is provided with a plurality of flanks on vessel, the diagonal line of these flank crosscut vessel profiles, and do not intersect with other flanks.
2. protective film assembly container according to claim 1, wherein,
The diagonal line angulation of described flank and institute's crosscut is more than 30 degree.
3. protective film assembly container as claimed in claim 1 or 2, wherein,
The end of described flank is connected with the pedestal of other flanks or mounting protection film assembly.
4. protective film assembly container as claimed in claim 1 or 2, wherein,
In each described flank, the height of flank is not certain, and has the zone of differing heights.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP323616/06 | 2006-11-30 | ||
| JP2006323616A JP4796946B2 (en) | 2006-11-30 | 2006-11-30 | Pellicle storage container |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101190723A true CN101190723A (en) | 2008-06-04 |
| CN101190723B CN101190723B (en) | 2010-06-09 |
Family
ID=39485952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200710196223XA Active CN101190723B (en) | 2006-11-30 | 2007-11-30 | Vessel for containing protection thin film components |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP4796946B2 (en) |
| KR (1) | KR101389868B1 (en) |
| CN (1) | CN101190723B (en) |
| HK (1) | HK1113121A1 (en) |
| TW (1) | TWI398389B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102169847A (en) * | 2010-02-10 | 2011-08-31 | 信越化学工业株式会社 | Dustproof film assembly receiving container |
| CN102236249A (en) * | 2010-04-23 | 2011-11-09 | 信越化学工业株式会社 | Receiving container for dustproof thin film component |
| CN103224099A (en) * | 2013-05-13 | 2013-07-31 | 深圳市华星光电技术有限公司 | Liquid crystal glass packaging device |
| CN105035466A (en) * | 2014-04-17 | 2015-11-11 | 信越化学工业株式会社 | Dustproof thin film assembly storage container |
| CN107561869A (en) * | 2016-06-30 | 2018-01-09 | 上海微电子装备（集团）股份有限公司 | A kind of work stage locking stopping means and the work stage using the device |
| CN108330448A (en) * | 2017-01-20 | 2018-07-27 | 佳能株式会社 | Pressure reduction vessel, processing unit, processing system and the method for manufacturing flat-panel monitor |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4796946B2 (en) * | 2006-11-30 | 2011-10-19 | 信越化学工業株式会社 | Pellicle storage container |
| KR101133566B1 (en) * | 2009-08-26 | 2012-04-04 | 김성태 | Carrier box for polarizer |
| JP5626850B2 (en) * | 2010-05-10 | 2014-11-19 | 旭化成イーマテリアルズ株式会社 | Pellicle storage container |
| JP5710370B2 (en) * | 2010-05-10 | 2015-04-30 | 旭化成イーマテリアルズ株式会社 | Pellicle storage container |
| JP6030136B2 (en) * | 2012-08-02 | 2016-11-24 | 三井化学株式会社 | Pellicle |
| JP6433206B2 (en) * | 2014-09-03 | 2018-12-05 | アキレス株式会社 | Wafer tray with tape frame |
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| JPH08133382A (en) * | 1994-11-09 | 1996-05-28 | Shin Etsu Polymer Co Ltd | Pillicle container |
| JPH10114388A (en) * | 1996-10-07 | 1998-05-06 | Nikon Corp | Pellicle container |
| JP3815701B2 (en) * | 1997-04-11 | 2006-08-30 | 信越ポリマー株式会社 | Pellicle storage container stacking structure |
| JP2000173887A (en) * | 1998-12-02 | 2000-06-23 | Asahi Kasei Denshi Kk | Pellicle housing case |
| AU5655302A (en) * | 2000-12-20 | 2002-07-01 | Yoshino Kogyosho Co Ltd | Container made of synthetic resin |
| JP2004240010A (en) * | 2003-02-04 | 2004-08-26 | Asahi Kasei Electronics Co Ltd | Method of housing pellicle |
| JP2004361705A (en) * | 2003-06-05 | 2004-12-24 | Asahi Kasei Electronics Co Ltd | Method for housing large pellicle |
| JP4236535B2 (en) * | 2003-07-31 | 2009-03-11 | 旭化成エレクトロニクス株式会社 | Large pellicle storage container |
| JP4391435B2 (en) * | 2005-03-22 | 2009-12-24 | 信越化学工業株式会社 | Pellicle storage container |
| JP4796946B2 (en) * | 2006-11-30 | 2011-10-19 | 信越化学工業株式会社 | Pellicle storage container |
-
2006
- 2006-11-30 JP JP2006323616A patent/JP4796946B2/en active Active
-
2007
- 2007-11-06 KR KR1020070112592A patent/KR101389868B1/en active IP Right Grant
- 2007-11-30 CN CN200710196223XA patent/CN101190723B/en active Active
- 2007-11-30 TW TW096145724A patent/TWI398389B/en active
-
2008
- 2008-08-08 HK HK08108779.2A patent/HK1113121A1/en not_active IP Right Cessation
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102169847A (en) * | 2010-02-10 | 2011-08-31 | 信越化学工业株式会社 | Dustproof film assembly receiving container |
| CN102169847B (en) * | 2010-02-10 | 2013-08-14 | 信越化学工业株式会社 | Dustproof film assembly receiving container |
| CN102236249A (en) * | 2010-04-23 | 2011-11-09 | 信越化学工业株式会社 | Receiving container for dustproof thin film component |
| CN103224099A (en) * | 2013-05-13 | 2013-07-31 | 深圳市华星光电技术有限公司 | Liquid crystal glass packaging device |
| CN103224099B (en) * | 2013-05-13 | 2015-09-02 | 深圳市华星光电技术有限公司 | The packing device of liquid-crystalline glasses |
| CN105035466A (en) * | 2014-04-17 | 2015-11-11 | 信越化学工业株式会社 | Dustproof thin film assembly storage container |
| CN105035466B (en) * | 2014-04-17 | 2017-12-08 | 信越化学工业株式会社 | Pellicle container kit |
| CN107561869A (en) * | 2016-06-30 | 2018-01-09 | 上海微电子装备（集团）股份有限公司 | A kind of work stage locking stopping means and the work stage using the device |
| CN107561869B (en) * | 2016-06-30 | 2019-10-25 | 上海微电子装备（集团）股份有限公司 | A kind of work stage locking limiting device and the work stage using the device |
| CN108330448A (en) * | 2017-01-20 | 2018-07-27 | 佳能株式会社 | Pressure reduction vessel, processing unit, processing system and the method for manufacturing flat-panel monitor |
| CN108330448B (en) * | 2017-01-20 | 2020-08-11 | 佳能株式会社 | Pressure reducing container, processing apparatus, processing system, and method of manufacturing flat panel display |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4796946B2 (en) | 2011-10-19 |
| JP2008139417A (en) | 2008-06-19 |
| KR101389868B1 (en) | 2014-04-29 |
| TW200827260A (en) | 2008-07-01 |
| CN101190723B (en) | 2010-06-09 |
| TWI398389B (en) | 2013-06-11 |
| KR20080049616A (en) | 2008-06-04 |
| HK1113121A1 (en) | 2008-09-26 |
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