200826468 九、發明說明： 【發明：屬之技術領域】 本發明係有關於一種線性超音 具有結構簡單、宏互 ^^ 尤"疋扣一種 點，良由於且士易小蜇產生電磁波、無噪音之優 1 有高推力與高靜保持力的特性，可不 相亩綠、㈣a 象物’並由早相信號驅動達到正反 之線性超音波㈣結構麟設計者。-則貝值性 【先前技術】200826468 IX. Description of the invention: [Invention: Technical field of genus] The present invention relates to a linear supersonic having a simple structure, a macro mutual ^^ 尤 quot 疋 一种 一种 一种 一种 一种 一种 一种 一种 一种 一种 一种 一种 一种 一种 一种 且 且 且 且 且 且 蜇The superiority of noise 1 has the characteristics of high thrust and high static retention. It can be phased green, (4) a elephant' and driven by the early phase signal to reach the linear supersonic (4) structural design. - then the value of the shell [previous technology]
按 1電材料構成的超音波馬達，主要是利用壓電 結構的共振頻率進彳t驅動，使超音波馬収子上產生= 動错由磨擦作用轉變成馬達的直線運㈣者轉動運動；發 明人曾利肢音波馬達的麟原理，形定子結構^ 合⑺動子的組合構造，創作了一種「超音波馬達」，且於 94年10月19日向鈞局提出新型專利申請〔申請案號 94218037〕’並經核准專利同時公告於95年2月1日之專 利公報上〔證書號數·· M286995〕。 該「超音波馬達」結構即如第十四圖現有之超音波馬 達結構示意圖所示，其係包括橢圓形定子（51)、滑動子 (52)、支撐預壓機構（53)及馬達底座（54);其中，令該支 撐預壓機構（53)定位於馬達底座（54)上，並在支撐預壓機 構（53)上設立橢圓形定子（51)，請再一併參閱第十五圖現 有之超音波馬達的橢圓形定子結構示意圖所示，該橢圓形 定子（51)由壓電致動元件（511)、（512)與橢圓形彈性體 (513)所構成，該壓電致動元件（511)、（512)設於橢圓形 5 200826468 彈性體（513)内部，且在該橢圓形彈性體（513)的外周對應 欲驅動對象之滑動子（52)的端面處設有一突出的作用塊 (514);使得於施行使用上，當對橢圓形定子（51)之壓電 致動元件（511)、（512)施以高頻之正弦波電壓時，便可在 橢圓形彈性體（513)之作用塊（514)處產生橢圓形之運動 執跡，再藉由支撐預壓機構（53)的彈性施力作用，將橢圓 形定子（51)推向滑動子（52)進行直線運動。 然而，上述「超音波馬達」雖可達到其既定之預期功 效，但也在其實際施行使用上發現，該結構的驅動主要是 靠著橢圓形定子結構的高頻變形運動，藉由橢圓形定子與 滑動子間的磨擦現象推動滑動子進行直線運動，橢圓形定 子與滑動子之間傳遞的力量大小直接影響到該超音波馬 達的負載能力，以現有的超音波馬達的橢圓形定子與滑動 子之間僅以單點接觸的方式並不理想；因此，若能改變原 先橢圓形定子與滑動子間的接觸方式，必能大幅提高超音 波馬達的負載能力或是輸出力，也能增加超音波馬達的靜 態保持力，提高超音波馬達性能。 另一方面，上述「超音波馬達」係於滑動子之一側設 置橢圓形定子與支撐預壓機構所構成，如此一來，整個超 音波馬達的組成結構顯得較為複雜，而且整個超音波馬達 所佔的體積龐大，在應用上具有相當的不便利性；從使用 者的角度來思考，會希望超音波馬達的製造商能夠將該橢 圓形定子與滑動子由原先結構上的兩個單元結合成一個 單元，一方面讓超音波馬達的結構簡單化、體積小而容易 應用；另一方面也可以將如此的技術革新，看成是市售滑 台的改良式設計，讓滑台由沒有驅動能力的狀態提升為内 6 200826468 附驅動馬達的滑台，並且在體積上沒有增加太多的改變 者0 【發明内容】 今，發明人即是鑒於上述現有之超音波馬達於實際實 施使用上的缺失之處，而加以修正、改良，同時本著求好 之精神及理念，並藉由專業之知識、經驗的輔助，以及在 多方巧思、試驗後，方創設出本發明之線性超音波馬達， 以提供一種相較於傳統電磁式馬達具有結構簡單、容易小 型化、不產生電磁波、無噪音之優點，而且相較於先前的 超音波馬達具有較高推力、高靜態保持力、結構簡單的特 性，可不需搭配減速機構直接驅動對象物之單相信號驅動 型線性超音波馬達。 ^即本發明之目的主要係將線性超音波馬達的橢圓形 =子與，動子合而為-’在組成結構上結合成—個結構簡 ^匕之早疋，有效縮小馬達結構的整體體積，以增加應 此外’在線性超音波馬達的橢圓形定子與滑 ，子間的接觸情形’希望透過改良結構設計的方式 線性超κ馬達在驅動時之騎力與^ 是讓橢圓形定子能在正弦波電麵於、，^方法 動執跡’該橢圓形運動軌跡能夠同時磨捧:動i: 子的兩側内緣，使線性超立油 了八推動，月動 :靜態保持力;而“音與較高 向的直線運動，橢圓形定子上 、、、b句進仃正反 旋轉除了能夠以雙相電壓信號進二==跡:正反向 :由所驅動的壓電致動元件對象的簡單㈣動作； 7 200826468 而本發明之目 其係包括馬達 功效係由以下之技術所達成： 子；其中，令橢圓^座、橢圓形定子、預壓機構及滑動 位於馬達底座上，子固定於滑動子中央，預壓機構定 住滑動子上的橢圓置於馬達底座的預壓機構從兩側夾 到磨擦運動所需的圯定子，使橢圓形定子的兩對應外緣受 動元件與一個二圓力；該橢圓形定子係由二個壓電致 橢圓形彈性體内；％，性體所構成，該壓電致動元件設於 高頻之正弦波電壓田對橢圓形定子之壓電致動元件施以 產生橢圓形之運動軌便可在橢圓形彈性體之兩側端點處 作用，透過橢圓开，…跡’再藉由兩側預壓機構的彈性施力 用，推動滑動子進’彳疋子與預壓機構之兩侧擋板的磨擦作 r且綠運動。 另外，以雙相#2 令滑動子進行正;^二^區動線性超音波馬達的條件下，為 致動元件之正㈣^ 7直線運動時，可利用改變輸入壓電 產生反向旋轉之:動，：相位，使橢圓形定子的運動執跡 反向，二進而達到受其驅動之對象物以 動子進行超;:皮馬達的條件下’要令滑 構中之兩個壓電致動元刀換施加於橢圓形定子結 【實施方式】 回’員之正弦波電壓即可。 為令本發明所運用之技術内 功效有更完整且清楚的揭露，# 、毛明目的及其達成之 併芩閱所揭之圖式及圖號：么；下詳細說明之，並請一 首先，請參閱第一圖本笋 圖本發明之結構立體 2夂結構立體分解圖及第二 、所^切日狀線性超音波馬 8 200826468 達係包括馬達底座（1)、橢圓形定子（2)、滑動子（3)及預 壓機構（4)所組成；其中： 該馬達底座（1)，其係作為支撐整個線性超音波馬達 系統的基座，於馬達底座（1)中央處設有一凹槽座（11)， 且於該凹槽座（11)下方中央面上分別凹設有兩個相對應 之凹陷區（12)，另於凹槽座（11)之中央左右兩側分別貫^ 開設有相對應之穿透槽（13) ’又於凹槽座（11)上端面兩側 分別設有相對應之滑軌座（14)。 該橢圓形定子（2)，其由相對應之壓電致動元件 (21)、橢圓形彈性體（22)及固定柱（23)所組成，該壓電致 動元件（21)係呈相對應的設立在橢圓形彈性體（22)内 部，並在壓電致動元件（21)之間設立固定柱（23)。 該滑動子（3)，其係設立於對應馬達底座d)之上方， 於該滑動子（3)兩侧下端對應馬達底座（1)之滑軌座（μ) 設有長滑執（31)，以能透過該長滑執（31)與馬達底座（1) 之間相嵌合，另於滑動子（3)底端面則可供橢圓形定子（2) 之固定柱（23)固接結合。 該預壓機構（4)，其具有兩相對應之擋板（41)、（42)， 且於擋板（41)、（42)底面兩端皆分別固接有滑執（411)、 (421)，以供與馬達底座（1)之凹陷區（12)彼此對應嵌合， 於該擋板（41)、（42)内侧對應該橢圓形定子（2)處，皆貼 附有耐磨耗材（43)、（44)，以減少其與橢圓形定子（2)間 的磨耗現象，另於擋板（41)、（42)兩端皆開設有相對應之 穿透孔（412)、（422)，該穿透孔（412)、（422)可供導引桿 (45)穿透，且以螺帽（46)螺制該導引桿（45)，並將預壓彈 性元件（47)組立定位在該導引桿（45)上，同時令該擋板 9 200826468 (41)、（42)受該預壓彈性元件（47)的彈性頂推而具備一預 壓力，並能藉由該螺帽（46)調整預壓力值。 如此一來，即可於該馬達底座（1)之滑執座（14)上供 與滑動子（3)之長滑執（31)相嵌接結合，且同時令橢圓形 定子（2)以固定柱（23)固接結合於滑動子（3)之底端面，並 將預壓機構（4)之擋板（41)、（42)以滑執（411)、（421)供 與馬達底座（1)之凹陷區（12)彼此對應嵌合，令該擋板 (41)、（42)恰設於馬達底座（1)之穿透槽（a)内，播板 (41)、（42)内侧貼附之耐磨耗材（43)、（44)恰對應於橢圓 形定子（2)處，再導引桿（45)穿過穿透孔（412)、（422)且 以螺帽（46)螺制該導引桿（45)，並將預壓彈性元件（47)組 立定位在該導引桿（45)上，而令該擋板（41)、（42)受該預 壓彈性元件（47)的彈性頂推具備一預壓力，並可藉由調整 該螺帽（46)於導引桿（45)上的位置，同時調節該預壓彈性 元件（47)施加於橢圓形定子（2)兩側之預壓力，調整預壓 力值、調整容易。 、 而本發明之預壓機構（4)其擋板（41)、（42)可同時與 橢圓形定子⑵進行磨擦接觸，増加橢圓形定子⑵與滑動 子（3)之間傳遞的力量’進而提高本發明之負載能力 態保持力。 〃 另，請再一併參閱第三圖本發明之橢圓形定子盘滑動 子組合立體圖㈣，該滑動子（3)可隨著本發明所欲 的作動性能，而可設計成單彡好⑵赌動子 之組合設計’或可設計成兩個分開之橢圓形定子⑵料 滑動子⑶之組合設計〔請-併參閱第四圖本發明之擴圓Λ 形定子與賴子另，組合謂圖㈣〕，或可設計成兩個 200826468 重疊之橢圓形定子（2)與該滑動子（3)之組合設計〔請一併 參閱第五圖本發明之橢圓形定子與滑動子又一組合立體 圖所示〕，亦或設計成兩組由兩個重疊之橢圓形定子（2)與 該滑動子（3)之組合設計〔請一併參閱第六圖本發明之橢 圓形定子與滑動子再一組合立體圖所示〕，以達到改善橢 圓形定子（2)與滑動子（3)間接觸方式的目的，有效提高本 發明馬達的輸出性能。 又，本發明主要的設計目的在於讓壓電致動元件（21) 能夠因為周期性的驅動電壓使之產生周期性微小變形運 動，進而擠拉橢圓型彈性體（22)而產生變形，並且讓橢圓 形彈性體（22)上之兩外側端面處，能夠產生足夠大小的橢 圓形運動執跡，如此便可透過預壓機構（4)、從橢圓形定 子（2)兩外側向内施加正向力，將橢圓形定子（2)兩外側的 變形運動執跡用來推動預壓機構（4)之擋板（41)、（42)， 以反作用力的方式促使滑動子（3)進行直線運動。 請再一併參閱第七圖本發明之雙相信號驅動型橢圓 形定子結構示意圖及第八圖本發明之單相信號驅動型橢 圓形定子結構示意圖所示，其係為施加電壓於橢圓形定子 (2)使其形成橢圓形變形運動的兩種方法，該第七圖所示 者係同時驅動兩個壓電致動元件（21)的型式，而該第八圖 所示者則係在同一運動方向只驅動單一壓電致動元件（21) 的型式；該同時驅動兩個壓電致動元件（21)的型式，此型 驅動方式是利用輸入具有90度相位差的正弦波電壓於兩 個各別的壓電致動元件（21)，用以激發橢圓形彈性體（22) 兩側產生橢圓形運動軌跡，當要改變橢圓形運動執跡的旋 轉方向時，只要將這兩個驅動電源互換或是改變其相位差 11 200826468 即可，如此一來，便可以領先90度相位差與落後90度相 位差的控制方式，操控滑動子（3)的移動方向。 請一併參閱第九圖本發明之雙相信號驅動型之橢圓 形定子在驅動下的橢圓形運動執跡實驗數據圖所示，在相 同電壓驅動的情況下，逐一改變兩電壓信號的相位差，隨 著相位差的變化由0度經過90度、180度、270度到原來 的0度，橢圓形運動軌跡的橢圓形主軸之傾斜角會依序改 變，本發明之線性超音波馬達則採用相位差90度與270 度之驅動條件，做為線性超音波馬達正反向運動時驅動電 壓，主要是其運動執跡之旋轉方向相反。 請一併參閱第十、十一圖本發明之單相信號驅動型之 橢圓形定子在驅動下的橢圓形運動執跡實驗數據圖所 示，各別對單一壓電致動元件（21)施加電壓驅動時，當所 施加正弦波電壓的電壓變大時，橢圓形定子（2)端點的橢 圓型運動執跡會隨著擴大；當施加電壓於第一壓電致動元 件（21)〔PZT1〕時，橢圓形定子（2)的上端點運動執跡的 旋轉方向為逆時針轉，下端點運動執跡的旋轉方向為順時 針轉；當施加電壓於第二壓電致動元件（21)〔PZT2〕時， 結果剛好相反，上端點運動執跡的旋轉方向為順時針轉， 下端點運動執跡的旋轉方向為逆時針轉。因此，單相信號 驅動可透過施加電壓的切換改變線性超音波馬達的直線 運動方向。 此外，本發明之線性超音波馬達驅動方式的優點為可 採用雙相信號驅動與單相信號驅動兩種方式，當採用單相 信號驅動時，一次只要驅動一個壓電致動元件（21)即可讓 線性超音波馬達產生運動的目的，讓產生驅動電壓信號的 12 200826468 驅動電路得到相對的簡化。 山至於對本創作線性超 吕，*效電路分析法是較容 二1動刀析而 達機電系統之動作形態與個線性超音波馬 圖本發明之線性超音、/ ，明併翏閱第十二 擴圓形定子（2)主要是利用^子等=電路模型圖所示，該 應:將電能轉換為機械能，如第：=21_)的逆屋電效 f愿〆所表示的輸人電能（電功率:的電流/與 定子⑵接觸點的推力，與變 _ ，纟為擔圓形 由於壓電致動元二代的 的緣故，使得低電壓驅動電係數不高 用擴圓形定子⑵的結構練爾形量，利 的常用方法。等效電路中的電阻^ 振動變形量 換係數/7值決定了橢圓形定子 電容C與轉 ^達設計上則是調整；P、Z、H ，因此 的動態特性’而等效電路中的f、z的翏數以得到較佳 用的壓電致動元件(21)參數與尺寸參二芑都是由所採 :綠性超音波馬達機電系統中所發生的心：条也就是說 電路中是以皮小r的來表現。 、振見象’在等效 ^請再一併參閱第十三圖本發明之綠批” 政電路模型圖所示，橢圓形定子（ a 知·曰波馬達等 3超f波馬達後，滑動子⑶會構以電(3合構成 饯械阻抗^而整個線性超音波 ^Μ路中所示的 到版抗么的影響極大。而橢u形定子(、㉟出性能與欵率受 檫接觸方式與型態則會影響這個阻與滑動子（3)的摩 音波馬達的輪出力與移動速度，還有 ^而影響線性超 能 13 、…生超音波馬達的 200826468 量轉換效率。等效電路模型中的機械阻抗厶由於和橢圓形 定子（2)與滑動子（3)之間的摩擦接觸現象相關，實際上為 非線性，若要充份表現預壓彈簧所施加的預壓力與接觸狀 態的互動情形，則會形成更複雜的等效電路，在此為了簡 化說明起見，只以厶來做表示。 綜上所述，本發明實施例確能達到所預期之使用功 效，又其所揭露之具體構造，不僅未曾見諸於同類產品 中，亦未曾公開於申請前，誠已完全符合專利法之規定與 要求，爰依法提出發明專利之申請，懇請惠予審查，並賜 准專利，則實感德便。 14 200826468 【圖式簡單說明】 f一圖：本發明之結構立體分解圖 第=圖：本發明之結構立體組合圖 與滑動子組合立體圖 =.ίΓΓ橢圓形定子與滑動子另-組合立體圖 =:=之橢圓形定子與滑動子又-組合立體: 圖.本發明之橢_定子舆滑動子再—^ ，圖··本發明之雙相信號驅動型橢圓形定子;= 弟八圖：本發明之單姉號驅動型橢 弟九圖：t發明之雙相信號驅動型之橢 第十圖橢圓形運動執跡實驗數據圖 θ 之單相域驅動型之擴圓形定子在驅 動下的橢圓形運動執跡實疋子在驅 第十-圖：本發明之單相㈣數據圖〔ρζτι〕 乜旒驅動型之橢圓形定子在 =〕的_形運動執跡實驗數 第十二圖：本/圖明之線性超音波馬達定子等效電路模 第十三圖：本發明之線性超音 ί t有之=波馬達結構示意^«電路模型圖 元件符號^單說明】超曰’皮馬達的摘圓形定子結構示意圖 (1) (12) (14) (21) (11) (13) (2) (22) 馬達底座 凹陷區 滑執座 壓電致動元件 15 凹槽座 穿透槽 橢圓形定子 橢圓形彈性體 200826468 (23) (31) (41) (412) (421) (43) (45) (47) (511) (513) (52) (54) 固定柱 (3) 滑動子 長滑執 (4) 預壓機構 擋板 (411) 滑執 穿透孔 (42) 擋板 滑軌 (422) 穿透孔 耐磨耗材 (44) 财磨耗材 導引桿 (46) 螺帽 預壓彈性元件 (51) 橢圓形定子 壓電致動元件 (512) 壓電致動元件 橢圓形彈性體 (514) 作用塊 滑動子 馬達底座 (53) 支撐預壓機構 16The ultrasonic motor composed of 1 electric material is mainly driven by the resonance frequency of the piezoelectric structure, so that the ultrasonic wave is generated on the ultrasonic receiver. The turbulence is converted into the linear motion of the motor by the frictional action. The principle of the human body, the structure of the stator, the structure of the stator, and the combination of the mover, created a kind of "supersonic motor", and filed a new patent application with the bureau on October 19, 1994 (application number 94218037) 〕 'And approved patents were also announced in the patent gazette on February 1, 1995 [certificate number · M286995]. The structure of the "ultrasonic motor" is as shown in the structural diagram of the ultrasonic motor of the fourteenth embodiment, which includes an elliptical stator (51), a slider (52), a supporting pre-compression mechanism (53), and a motor base ( 54); wherein the supporting pre-compression mechanism (53) is positioned on the motor base (54), and an elliptical stator (51) is set on the supporting pre-compression mechanism (53), please refer to the fifteenth figure together The elliptical stator structure (51) is composed of piezoelectric actuating elements (511), (512) and an elliptical elastic body (513), which is illustrated by a schematic diagram of an elliptical stator structure of a conventional ultrasonic motor. The elements (511) and (512) are disposed inside the elliptical 5 200826468 elastic body (513), and a protruding portion is provided on the outer circumference of the elliptical elastic body (513) corresponding to the end face of the slider (52) of the object to be driven. The action block (514); such that when applied to the piezoelectric actuators (511), (512) of the elliptical stator (51), a high-frequency sinusoidal voltage is applied to the elliptical elastomer (513) at the action block (514) produces an elliptical motion trace, and by supporting the preload mechanism 53) The elastic biasing force of the elliptical shape of the stator (51) toward the slider element (52) for linear movement. However, although the above-mentioned "ultrasonic motor" can achieve its intended function, it is also found in its actual implementation that the structure is driven mainly by the high-frequency deformation motion of the elliptical stator structure, with an elliptical stator. The friction between the slider and the slider pushes the slider to move linearly. The amount of force transmitted between the elliptical stator and the slider directly affects the load capacity of the ultrasonic motor. The elliptical stator and slider of the existing ultrasonic motor are used. It is not ideal to use only a single point of contact; therefore, if the contact between the original elliptical stator and the slider can be changed, the load capacity or output force of the ultrasonic motor can be greatly improved, and the ultrasonic wave can be increased. The static retention of the motor improves the performance of the ultrasonic motor. On the other hand, the above-mentioned "supersonic motor" is composed of an elliptical stator and a supporting pre-compression mechanism on one side of the slider, so that the structure of the entire ultrasonic motor is complicated, and the entire ultrasonic motor is It is quite bulky and has considerable inconvenience in application. From the perspective of the user, it is hoped that the manufacturer of the ultrasonic motor can combine the elliptical stator and the slider from the two units on the original structure. One unit, on the one hand, makes the structure of the ultrasonic motor simple, small and easy to apply; on the other hand, it can also be regarded as an improved design of a commercially available sliding table, so that the sliding table has no driving ability. The state is upgraded to the inner 6 200826468 with the sliding table of the drive motor, and does not add too much change in the volume. [Inventory] Now, the inventor is in view of the lack of actual implementation of the above-mentioned existing ultrasonic motor. Where, with corrections and improvements, and with the spirit and philosophy of seeking good, and with the help of professional knowledge and experience, After many ingenuity and experimentation, the linear ultrasonic motor of the present invention is set up to provide a structure which is simpler in structure, easier to miniaturize, does not generate electromagnetic waves, and has no noise compared with the conventional electromagnetic motor, and is superior to The previous ultrasonic motor has the characteristics of high thrust, high static holding force, and simple structure, and can be used for a single-phase signal-driven linear ultrasonic motor that directly drives an object without a speed reduction mechanism. ^ The object of the present invention is to reduce the elliptical shape of the linear ultrasonic motor and the combination of the mover into a structure which is combined into a simple structure to effectively reduce the overall volume of the motor structure. In order to increase the contact between the elliptical stator and the sliding and the sub-parallel in the linear ultrasonic motor, it is hoped that the linear super-k motor can be driven by the improved structure in a way that allows the elliptical stator to The sinusoidal electric surface is in, and the method is executed. The elliptical motion trajectory can be honed at the same time: the inner edge of the two sides of the moving i: the linear super-oil is pushed, the moon movement: static retention; "Sound and higher-direction linear motion, the elliptical stator, the front, the reverse, and the b-synchronous rotation can be reversed in addition to the two-phase voltage signal. == Trace: Forward and reverse: driven piezoelectric actuator Simple (four) action of the object; 7 200826468 The purpose of the present invention, including the motor function, is achieved by the following techniques: wherein the elliptical seat, the elliptical stator, the pre-compression mechanism and the sliding are located on the motor base, Fixed to the center of the slider The pre-pressing mechanism fixes the ellipse on the slider to the pre-compression mechanism of the motor base and clamps the 圯 stator required for the friction movement from both sides, so that the two corresponding outer edge receiving elements of the elliptical stator and a two-round force; the ellipse The stator system is composed of two piezoelectric elliptical elastomers; %, a body, and the piezoelectric actuator is disposed on a high frequency sinusoidal voltage field to apply an ellipse to the piezoelectric actuator of the elliptical stator. The shape of the moving rail can act on the opposite ends of the elliptical elastic body, through the elliptical opening, ... the trace 'and then by the elastic force of the two sides of the pre-compression mechanism, push the slider into the 'tweezers and pre- The friction of the baffles on both sides of the pressing mechanism is r and green. In addition, the two-phase #2 is used to make the slider positive; in the case of the linear ultrasonic motor, the positive component of the actuating element is (4)^7 In the case of linear motion, the reverse rotation of the input piezoelectric force can be used: the motion, the phase, the motion of the elliptical stator is reversed, and the object driven by the object is superimposed by the mover; Under the condition of 'to make two piezoelectric actuators in the sliding structure Knife-changing is applied to the elliptical stator joint. [Embodiment] It is sufficient to return the sinusoidal voltage of the member. In order to make the internal function of the technology used in the present invention more complete and clear, #毛毛目芩 所 所 所 ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; Linear Ultrasonic Horse 8 200826468 The system consists of a motor base (1), an elliptical stator (2), a slider (3) and a preloading mechanism (4); wherein: the motor base (1) is used as Supporting the base of the entire linear ultrasonic motor system, a recess seat (11) is arranged at the center of the motor base (1), and two corresponding recesses are respectively disposed on the central surface below the recess seat (11). The recessed area (12) is separately provided with a corresponding penetrating groove (13) on the left and right sides of the center of the groove seat (11), and the phase is respectively disposed on both sides of the upper end surface of the groove seat (11). Corresponding to the slide rail seat (14). The elliptical stator (2) is composed of a corresponding piezoelectric actuating element (21), an elliptical elastic body (22) and a fixing column (23), and the piezoelectric actuating element (21) is in phase Correspondingly, it is set inside the elliptical elastomer (22) and a fixing post (23) is established between the piezoelectric actuating elements (21). The slider (3) is set above the corresponding motor base d), and the sliding seat (μ) corresponding to the motor base (1) at the lower end of the slider (3) is provided with a long sliding (31) In order to be able to fit between the long slide (31) and the motor base (1), and at the bottom end of the slider (3), the fixed column (23) of the elliptical stator (2) can be fixedly coupled. . The pre-compression mechanism (4) has two corresponding baffles (41) and (42), and a sliding handle (411) is fixed on both ends of the bottom surfaces of the baffles (41) and (42), respectively. 421) for fitting with the recessed area (12) of the motor base (1), and the elliptical stator (2) corresponding to the inner side of the baffles (41) and (42) are attached with wear resistance Consumables (43), (44) to reduce the wear between the elliptical stator (2) and the corresponding through holes (412) at both ends of the baffles (41) and (42), (422), the penetration holes (412), (422) are adapted to penetrate the guiding rod (45), and the guiding rod (45) is screwed by the nut (46), and the pre-stressing elastic element ( 47) the assembly is positioned on the guiding rod (45), and the baffle 9 200826468 (41), (42) is pushed by the elastic pushing of the pre-stressed elastic member (47) to have a pre-pressure, and can borrow The pre-pressure value is adjusted by the nut (46). In this way, the sliding seat (14) of the motor base (1) can be engaged with the long sliding handle (31) of the slider (3), and at the same time, the elliptical stator (2) can be The fixing post (23) is fixedly coupled to the bottom end surface of the slider (3), and the baffles (41) and (42) of the pre-pressing mechanism (4) are supplied to the motor base by sliding (411) and (421). (1) The recessed areas (12) are correspondingly fitted to each other such that the baffles (41) and (42) are disposed in the through slots (a) of the motor base (1), and the board (41), (42) The wear-resistant consumables (43) and (44) attached to the inner side correspond exactly to the elliptical stator (2), and the re-guide rod (45) passes through the penetration holes (412), (422) and has a nut ( 46) screwing the guiding rod (45) and positioning the pre-stressing elastic member (47) on the guiding rod (45), so that the baffles (41), (42) are subjected to the pre-stressing elasticity The elastic pushing of the component (47) is provided with a pre-pressure and can be applied to the elliptical stator by adjusting the position of the nut (46) on the guiding rod (45) while adjusting the pre-stressing elastic element (47) (2) Pre-pressure on both sides, it is easy to adjust the pre-pressure value and adjust. In the pre-compression mechanism (4) of the present invention, the baffles (41) and (42) can simultaneously frictionally contact the elliptical stator (2), and the force transmitted between the elliptical stator (2) and the slider (3) is further The load capacity state retention of the present invention is improved. 〃 In addition, please refer to the third figure of the elliptical stator disc slider combination diagram (4) of the present invention. The slider (3) can be designed as a single ( (2) bet according to the desired performance of the present invention. The combination design of the mover ' can be designed as a combination of two separate elliptical stators (2) material sliders (3) [please - see also the fourth figure of the present invention, the rounded Λ-shaped stator and the Laizi, the combination of the diagram (4)] Or can be designed into a combination of two 200826468 overlapping elliptical stators (2) and the sliders (3) (please refer to the fifth figure, the elliptical stator and the slider in the present invention are shown in another perspective view) Or designed as two sets of two overlapping elliptical stators (2) and the combination of the sliders (3) [please refer to the sixth figure of the present invention, the elliptical stator and the slider are further combined stereograms In order to improve the contact between the elliptical stator (2) and the slider (3), the output performance of the motor of the present invention is effectively improved. Moreover, the main design object of the present invention is to enable the piezoelectric actuator (21) to generate periodic micro-deformation motion due to the periodic driving voltage, thereby squeezing the elliptical elastomer (22) to cause deformation, and At the two outer end faces of the elliptical elastomer (22), an elliptical motion trace of sufficient size can be generated, so that the forward direction can be applied inwardly from both sides of the elliptical stator (2) through the pre-compression mechanism (4) Force, the deformation motion of the two outer sides of the elliptical stator (2) is used to push the baffles (41), (42) of the pre-compression mechanism (4), and the sliding force (3) is linearly moved by a reaction force. . Referring to FIG. 7 again, a schematic diagram of a two-phase signal-driven elliptical stator structure of the present invention and an eighth diagram of the single-phase signal-driven elliptical stator structure of the present invention are shown as applying a voltage to an elliptical stator. (2) Two methods of forming an elliptical deformation motion, the seventh diagram showing the simultaneous driving of the two piezoelectric actuator elements (21), and the eighth figure is the same The direction of motion drives only the pattern of a single piezoelectric actuator (21); this simultaneously drives the pattern of two piezoelectric actuators (21) that are driven by a sinusoidal voltage with a phase difference of 90 degrees. a respective piezoelectric actuating element (21) for exciting an elliptical motion trajectory on both sides of the elliptical elastomer (22), when the direction of rotation of the elliptical motion track is to be changed, as long as the two drives are Power swap or change the phase difference 11 200826468, so that you can control the direction of movement of the slider (3) by controlling the phase difference of 90 degrees and the phase difference of 90 degrees. Please refer to the ninth figure. The elliptical stator driven by the two-phase signal-driven elliptical stator of the present invention shows the phase difference of the two voltage signals one by one under the same voltage driving. As the phase difference changes from 0 degrees through 90 degrees, 180 degrees, 270 degrees to the original 0 degrees, the inclination angle of the elliptical main axis of the elliptical motion trajectory changes sequentially, and the linear ultrasonic motor of the present invention adopts The driving condition of the phase difference of 90 degrees and 270 degrees is used as the driving voltage of the linear ultrasonic motor in the forward and reverse movement, mainly because the direction of rotation of the motion track is opposite. Please refer to the eleventh and eleventh drawings. The single-phase signal-driven elliptical stator of the present invention is shown in the experimental data chart of the elliptical motion under driving, and the respective piezoelectric actuators (21) are respectively applied. When the voltage is driven, when the voltage of the applied sinusoidal voltage becomes large, the elliptical motion trace of the end point of the elliptical stator (2) expands; when a voltage is applied to the first piezoelectric actuator (21) [ In the case of PZT1, the rotation direction of the upper end of the elliptical stator (2) is counterclockwise, and the rotation direction of the lower end motion is clockwise; when a voltage is applied to the second piezoelectric actuator (21) When [PZT2], the result is just the opposite. The direction of rotation of the upper end motion is clockwise, and the direction of rotation of the lower end motion is counterclockwise. Therefore, the single-phase signal drive can change the linear motion direction of the linear ultrasonic motor by switching the applied voltage. In addition, the linear ultrasonic motor driving method of the present invention has the advantages of adopting two-phase signal driving and single-phase signal driving. When driving with a single-phase signal, only one piezoelectric actuating element (21) is driven at a time. The linear ultrasonic motor can be made to move, so that the 12 200826468 drive circuit that generates the drive voltage signal is relatively simplified. As for the linear super-Luo of this creation, the *effect circuit analysis method is more suitable for the analysis of the electromechanical system and the linear supersonic horse. The linear supersonic of the invention, /, and the tenth The two-expansion circular stator (2) is mainly represented by the circuit diagram of ^^, etc., which should convert the electric energy into mechanical energy, such as:==21_) Electric energy (electric power: current / thrust with the stator (2) contact point, and change _, 纟 is a circular shape due to the second generation of the piezoelectric actuator, so that the low voltage drive coefficient is not high with the expansion of the circular stator (2) The structure of the shape of the shape, the common method of the benefit. The resistance in the equivalent circuit ^ vibration deformation coefficient / 7 value determines the elliptical stator capacitance C and the transfer design is adjusted; P, Z, H, Therefore, the dynamic characteristics 'and the number of turns of f and z in the equivalent circuit to obtain the preferred piezoelectric actuator (21) parameters and dimensions are derived from: green ultrasonic motor electromechanical system The heart that occurs in the middle: the strip means that the circuit is represented by the skin small r. Equivalent ^Please refer to the thirteenth figure of the present invention, the green batch" political circuit model diagram, elliptical stator (a knows, chopper motor and other 3 super f wave motor, the slider (3) will be electrically (3 combined to form the mechanical impedance ^ and the entire linear ultrasonic wave ^ Μ 所示 到 到 所示 的 的 的 到 椭 椭 椭 椭 椭 椭 椭 椭 椭 椭 椭 椭 椭 椭 椭 椭 椭 椭 椭 椭 椭 椭 椭 椭 椭 椭 椭 椭 椭 椭 椭 椭The wheeling force and moving speed of the motor of the motor that affects the resistance and the slider (3), and the amount of conversion of the 200826468 that affects the linear supercharger 13 and the ultrasonic motor. The mechanical impedance in the equivalent circuit model厶Due to the frictional contact between the elliptical stator (2) and the slider (3), it is actually non-linear. If the interaction between the pre-stress applied by the pre-stressed spring and the contact state is fully expressed, A more complicated equivalent circuit is formed, which is only indicated by 厶 for the sake of simplification of the description. In summary, the embodiment of the present invention can achieve the intended use efficiency, and the specific structure disclosed therein is not only Never seen in similar products, nor It has been disclosed before the application, Cheng has fully complied with the requirements and requirements of the Patent Law, and has filed an application for an invention patent in accordance with the law. If you wish to apply for a review and grant a patent, you will feel it. 14 200826468 [Simple description] f Fig.: An exploded perspective view of the structure of the present invention. Fig.: A perspective view of the combination of the three-dimensional combination of the structure and the slider of the present invention =. ΓΓ ΓΓ elliptical stator and slider, another combined perspective view =: = elliptical stator and slider - Combined stereo: Fig. The ellipse_stator 舆 slider of the present invention re-^, Fig. · The biphasic signal-driven elliptical stator of the present invention; = 弟八图: The single 姊 drive type elliptical nine figure of the present invention :tInvented biphasic signal-driven ellipse eleventh figure elliptical motion obstruction experimental data graph θ single-phase domain-driven expansion of circular stator driven by elliptical motion - Figure: Single-phase (four) data map of the present invention [ρζτι] 椭圆-driven elliptical stator in the =] _-shaped motion-existing experiment number twelfth: this / figure linear ultrasonic motor stator equivalent circuit Model Thirteenth Diagram: The Invention Linear supersonic ί t = = wave motor structure schematic ^ «circuit model diagram component symbol ^ single description] super 曰 'skin motor picking circular stator structure diagram (1) (12) (14) (21) (11) (13) (2) (22) Motor base recessed area sliding seat piezoelectric actuating element 15 groove seat penetration groove elliptical stator elliptical elastomer 200826468 (23) (31) (41) (412) (421 ) (43) (45) (47) (511) (513) (52) (54) Fixed column (3) Slider length slipper (4) Preload mechanism baffle (411) Sliding piercing hole (42 Baffle Slides (422) Penetration Hole Wear Consumables (44) Richness Consumable Guide (46) Nut Preloading Elastic (51) Elliptical Stator Piezo Actuator (512) Piezo Actuated Element Elliptical Elastomer (514) Acting Block Slider Motor Base (53) Support Preloading Mechanism 16