TWI288523B - Piezoelectric motor of the adjustable movement direction - Google Patents

Abstract

Piezoelectric motor of a kind of adjustable movement direction, utilize stirring sheath, stir component, electric conduction block, distributed electric conduction block, distributed piezoelectric component, thickness vibration type piezoelectric component, putting spiral shell's pole and component of the base and utilizing the dividing area to offer urging in voltage way closely, it is the horizontal, vertical or oblique efficiency to sports that to reach and change or control the slippery lump or the slide. Piezoelectric motor of this adjustable movement direction, can utilize stirring sheath, stir the component, electric conduction slice, distributed multi-layer layer of forms piezoelectric component, vibration type multi-layer layer of forms piezoelectric component of thickness, putting spiral shell's pole and component of the base too and utilizing the dividing area to offer urging in voltage way closely, it is the horizontal, vertical or oblique efficiency to sports that to reach high actuating force and change or control the slide. Key words: piezoelectric motor, distributed multi-layer layer of forms piezoelectric component. The vibration type multi-layer layer of forms piezoelectric component of thickness, high actuating force.

Description

1288523

Nine, the invention description: 1111. The technical field of the invention relates to a piezoelectric motor that can adjust the direction of motion, which utilizes a thickness-vibration type piezoelectric element to retract and actuate the power, and reuse The distributed piezoelectric element has a distributed electrode layer driving voltage to generate bending moments in different directions to achieve the purpose of dialing the sliding seat and controlling the direction. [Prior Art] The conventional piezoelectric motor (shown in Figure 1) has an infinite stroke, high resolution, wide dynamic range of speed, fast response, fast movement and positioning, compact size, direct drive, and power-off positioning. It has the advantages of no rocking motion, no interference from external magnetic fields, no hysteresis, etc., so it is common in semiconductor factories or high-tech factories. Because of the advantages of the social interference and the small magnetic field interference, the piezoelectric motor is no less than the electromagnetic servo motor in the precision positioning of the lion, and can also be used in the vacuum working environment. Longitudinal) The function of the sliding seat movement, the movement of the sliding seat must not be far from the use of a piezoelectric motor (as shown in Figure 1) can only be done in one direction (horizontal or if you want to do both directions (horizontal and vertical) dial

One-way linear piezoelectric motors cannot achieve multi-directional 5 Ϊ 288523 control purposes. The present invention (4) drives the voltage to generate (4) moments in different directions, and the thickness vibration type piezoelectric element has its telescopic actuation force to solve the problem that the piezoelectric motor cannot achieve multi-directional control. SUMMARY OF THE INVENTION The conventional piezoelectric motor A (as shown in the figure), is the distributed electrode layer A1, the circuit connection line A2, the polarization direction 8.3, the dial guard and the control of the hybrid to achieve the fiber control The horse's pulsating direction. When the distributed electrode layer of the piezoelectric motor (shown in Fig.-) is energized, because of the staggered arrangement, in addition to the electric scale A, the driving force of the telescopic expansion can be reduced. The electric motor A can generate a push-pull force that rotates clockwise or counterclockwise. By the clockwise rotation or the counterclockwise push-pull force, the toggle sheath and the control switch (5), the piezoelectric motor A can cause the ball to rotate clockwise in the latitudinal direction. When the ball is to be twisted in the longitude direction to generate a clock rotation or a clock rotation, the direction in which the piezoelectric motor is set must be adjusted. However, such a large-scale change must be made by manpower to turn the dog to the actual situation unless a separate set of piezoelectric motors is provided. In this way, the cost is increased and the system space is occupied. If the system space is limited, the piezoelectric motor A cannot be used to solve the problem, which is one of the disadvantages of the conventional piezoelectric motor A. 6 1288523 Push-pull force, = female electric motor A is made up of single electric ceramic (10), its: force (four) limit. When you want to push the key and then increase the knowledge of the piezoelectric motor A, then the meaning/page can not be solved. ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, € Disadvantages The multi-viewer is a piezoelectric motor in the direction of _, _ body or slide. Move to see her (4) paste force or drive position This secret - witnessed in the __ series, is based on / / - can adjust the best pre-stress and motivation money motor. The most obvious aspect of the present invention is to provide a piezoelectric motor which is low in manufacturing cost, simple in assembly, easy in assembly of parts, easy to handle, and easy to fix. [Embodiment] For the assembly, perspective, implementation, and possible embodiments of the present invention, please refer to FIG. 2 to FIG. One less piezoelectric motor of the invention with adjustable movement direction (as shown in FIG. 2 to FIG. 3) is a kind of using the sliding sheath 1, the toggle element 2, the conductive sheet 3, the distributed conductive sheet 3', The distributed piezoelectric element 4, the thickness vibration type piezoelectric element 5, the components such as the tightening screw 6 and the base 7, and the manner in which the driving voltage is supplied by the partition, 1288523 曰 repair (gas) front page to achieve adjustment or control of the slider 8 The effect of lateral, longitudinal or oblique movement; wherein the distributed piezoelectric element 4 is used to drive the voltage of the distributed electrode layer to generate bending moments in different directions', and the thickness vibration type piezoelectric element 5 is used to expand and contract The driving force is used to achieve the purpose of shifting the slide and controlling the direction. The distributed multi-layered layered piezoelectric element 4 and the thickness-vibration_multilayer layered piezoelectric element 5' are used to improve the driving force or displacement of the linear piezoelectric motor.

The dialing sheath 1 of the present invention is a wear-resistant material which is tightly sleeved on the dialing member 2 for friction reducing the ball body or the sliding seat 8, as shown in FIG. 2 to FIG. 3 or FIG. 7 to FIG. Show. / The moving component of the sun and the moon 2 can be made of Shao alloy or stainless steel, and the head axis control is smaller. The sleeve has a large tail and is provided with a shaft hole for conveniently arranging the conductive sheet 3&3, the distributed piezoelectric element 4, the thickness vibration type piezoelectric member 5 and the set screw 6 and providing the preload force As shown in Figure 2 to Figure 3. - The conductive sheet 3 & 3 of the present invention is a copper sheet for providing a distributed electro-acoustic 4, thickness vibrating surface electrical component 5 for ink; wherein the distributed conductive sheet 3' can be further divided into a conductive layer 3 , and the insulating layer 3, 2; the conductive layer 3,] is made of copper sheet = insulating layer 3, 2 is made of insulating material, as shown in Figure 9. = The distribution of the electric component 4, the four electrodes of the cloth in the material element 4, and the 4W cloth of the Nagasaki (4) pole layering the distribution element 4 and the conductive sheet 3 7 8 1288523 respectively. Figure 10 to Figure 11 Show. The distributed piezoelectric element 4 of the present invention can be monolithic or double-chip (as shown in Figures 2 to 3) or a plurality of sheets. The divided piezoelectric element 4 of the present invention may also be called a layered layer structure (at least two layers or more 'each layer thickness is between about % micrometers and just micrometers); also known as distributed multilayer layer pressure The electrical component 4, as shown in FIG. 10 to FIG. The distributed piezoelectric element 4 of the present invention mainly functions as a distributed electrode layer 41 & 41 to generate different bending moments, which must be combined with a thickness vibration type piezoelectric element 5 or a thickness vibration type multilayer layered piezoelectric element. Element 5, the telescopic actuation force, can produce - a clockwise rotation or a counterclockwise rotation _ round push pull force (as shown in Figure 4 ~ Figure 8). The thickness vibration type piezoelectric element 5 of the present invention is coated with a whole electrode layer 51 on the front surface and the back surface of the piezoelectric element 5; the thickness vibration type piezoelectric element 5 is respectively attached to the conductive sheet 3, as shown in FIG. Two ~ Figure thirteen. The thickness vibration type piezoelectric element 5 of the present invention may be a single piece, a double piece (as shown in Fig. 2 to Fig. 3) or a plurality of pieces. The thickness vibration type piezoelectric element 5 of the present invention may also have a single-layer multilayer structure (at least two or more layers each having a thickness of about 25 μm to 1 μm); The layered piezoelectric element 5 is shown in Fig. 12 to Fig. 13. The thickness vibration type piezoelectric element 5 of the present invention is mainly used to generate the extension 9 1288523

For the reduction of power, it must cooperate with the distributed piezoelectric element 4 or the distributed bending moment 4 to generate the bending moment to generate the clock rotation or counterclockwise. Rotating elliptical push-pull force (as shown in Figure 4 to Figure 8). The tightening screw 6 of the present invention is used for the clamping element 2, the sputum piece 3 & 3', the distributed piezoelectric element 4 0 Γ 4, the thickness of the thickness vibration type piezoelectric element 5, and the base 7 Use, as shown in Figure 2. - The base 7 of the present invention is used to provide the tightening rod 6 _ as a fixed boundary, as shown in Fig. 2, Fig. 4, and Fig. 6 to 8. In summary, the present invention utilizes a toggle sheathing member 2, a conductive sheet 3, a distributed guide 3, a distributed electrical component 4 or a distributed surface layer piezoelectric component 4', and a thickness vibration type pressure. The electric component 5 or the thickness vibration type multi-layered layered piezoelectric reading 5', the tightly speaking rod 6 and the base 7 #constituting the _ and the _ partition provide a driving electric pattern to achieve adjustment or control of the slider 8 in a lateral, longitudinal or oblique manner The effect of the movement; wherein the thickness vibration surface element 5 or the thickness vibration type multilayer layer piezoelectric 7G piece 5' has its telescopic axial force, and then the distributed element 4 or the distributed layer layer layer > 1 electric element 4 'The distributed electrode layer is used in a way to generate bending moments in different directions to achieve the direction of control and produce high-dynamic power. The utility of the σ industry has been used; The case and the use of the > 1 electric motor has obvious gain and is also in line with the novelty and progress of the patent application requirements, and this member of the committee is responsible for the invention patent! [Simple description of the diagram] 1288523 Figure 1: The implementation of the conventional device. Figure 2: The explosion of this creation. Figure 3: A view of the creation. Figure 4: One of the implementation aspects of this creation. Figure 5: The second form of this creative implementation. Figure 6: The third form of this creative implementation. Figure 7: The fourth form of this creative implementation. • Figure 8: The fifth aspect of this creative implementation. Figure 9: Three views of the distributed conductive sheet of this creation. Figure 10: Three views of a distributed multilayer layered piezoelectric element of the presently feasible embodiment. Figure 11 is a diagram showing the electrode coating and assembly of a distributed multilayer layered piezoelectric element of the presently feasible embodiment. Fig. 12 is a three-dimensional view of a thickness-vibration multi-layered layered piezoelectric element of the presently feasible embodiment. #图十三: The thickness-vibration multilayer piezoelectric element electrode coating and assembly diagram of the presently feasible embodiment. 1288523 [Description of main component symbols] A. Conventional piezoelectric motor, A1. Electrode layer, A2. Circuit connection line, A3. Polarization direction, A4. Toggle sheath, B. Sphere 1. Toggle sheath 2. Dial Moving element 3. Conductive sheet, 3'·distributed conductive sheet, 3'1·conductive layer, 3'2·insulating layer 4. Distributed piezoelectric element, 4'· distributed multilayer layered piezoelectric element, 41& 4'1· φ Distributed electrode layer, 42& 4'2. Polarization direction 5. Thickness vibration type piezoelectric element, 5'·thickness vibration type multilayer layered piezoelectric element, 51&5'1. Distributed electrode Layer, 52 & 5'2 · polarization direction 6. Tightening screw 7. Base 8. Slider on. represents the electrode layer in the energized state, off. represents the electrode layer in the power-off state 12

Claims (1)

1288523 X. Patent application garden: [一^日, 1. - Piezoelectric motor with a healthy movement direction, which is made up of dials, toggle elements, conductive sheets, distributed conductive sheets, distributed piezoelectric trees or Distributed multi-layered layered piezoelectric 7G piece, thick-surface vibrating surface piezoelectric element or thickness county-type multi-layered layered piezoelectric element, compacted screw and base, etc., the main feature of which is that the adjustable moving direction pressure The electric motor uses the thickness-vibration type piezoelectric element to retract the power. The reusable distributed (four) element has a distributed electrode layer driving voltage square wire to generate the f (four) moment of the directional direction to achieve the effect of the fresh direction control. 2. According to the special (4) item mentioned in the special (4) item, the motor can be used as a light-moving direction. The sheath is a kind of wear-resistant material, which is tightly placed on the toggle element for rubbing the push-pull sphere. Or a slider. 3. According to the piezoelectric motor with adjustable movement direction as described in the scope of the special application, the toggle component can be made of alloy or stainless steel. The smaller the head diameter is for the thin m sleeve, and the tail. The shaft register is provided with a shaft hole system for conveniently arranging the conductive sheet-type dust electric component, the thickness vibration type electric component and the tightening screw, and providing the pre-stress. 4. The piezoelectric motor of the adjustable movement direction according to the first aspect of the patent application, wherein the conductive sheet is a copper sheet for providing a distributed piezoelectric element or a thickness vibration type piezoelectric element voltage. 5. Piezoelectric horse with adjustable movement direction according to the scope of patent application. 13 1288523 The distributed conductive sheet can be divided into a conductive layer made of a copper sheet; and the insulating layer is made of an insulating material. 6. The piezoelectric motor of the adjustable movement direction according to the scope of the patent application, wherein the split-type piezoelectric element is coated with four electrode layers on the front side of the piezoelectric ploughing and in the piezoelectric S-piece Coating on the back side - the entire electrode layer; the distributed piezoelectric element is respectively attached to the conductive sheet. 7. The piezoelectric motor of the adjustable motion direction according to the scope of the patent application, wherein the distributed piezoelectric element can be monolithic, double-chip or multi-piece. 8. The piezoelectric motor of the adjustable movement direction according to the scope of the patent application, wherein the distributed piezoelectric layer can be a single-layer multilayer structure. 9. A piezoelectric motor of adjustable movement direction according to the scope of the patent application, wherein the distributed piezoelectric element is mainly a _ distributed electrode layer to generate different _ bending moments, which must be § & thickness The vibrating_piezoelectric element or the thickness-vibration type multi-riding piezoelectric element telescopic actuation force can generate an elliptical push-pull force that rotates clockwise or counterclockwise. The piezoelectric motor of the adjustable movement direction according to the first aspect of the patent application, wherein the thickness vibration type piezoelectric element is coated with a whole electrode layer on the front surface and the back surface of the piezoelectric element; The piezoelectric elements are respectively attached to the conductive sheets. 11. The piezoelectric motor of the adjustable movement direction according to the first aspect of the patent application, wherein the thickness vibration type piezoelectric element can be monolithic, double or multi-piece. 14 1288523 ^ 卞 . . . 12 · · · · · · · · · · 压电 压电 压电 压电 压电 压电 压电 压电 压电 压电 压电 压电 压电 压电 压电 压电 压电 压电 压电 压电 压电 压电 压电 压电 压电 压电 压电 压电 压电 压电 压电For it. 13. The piezoelectric motor of the adjustable movement direction according to the first aspect of the patent application, wherein the main function of the thickness vibration type piezoelectric element is to generate a telescopic force-generating force. The bending and bending moment generated by the electrical component or the distributed multilayer layered piezoelectric transducer can thus produce an elliptical push-pull force that rotates clockwise or counterclockwise. 14. According to the scope of patent application, the piezoelectric horse with adjustable movement direction is mentioned in the first paragraph of the patent application. Electrical components, thick Tang description of the sentence 厥 ^ Thickness vibration type piezoelectric element and base. 15. According to the special purpose of the piezoelectric motor of the adjustable movement direction mentioned in the first item, the base is used to provide the tightening screw and the fixed boundary.