1289000 九、發明說明： 【發明所屬之技術領域】 饰 的 本發明係指-種·交又驅動多層層狀壓電元件或分 式多層層狀壓電元倾不同分佈之電㈣緑生高致動力 橢圓形單方向或雙方向_之結n 【先前技術】1289000 IX. Description of the invention: [Technical field to which the invention pertains] The invention of the invention refers to a type of cross-driving and driving a multi-layered layered piezoelectric element or a fractional multi-layered layered piezoelectric element having different distributions of electricity (4) green growth Dynamic elliptical one-way or two-direction _ knot n [prior art]
一般習賴電馬達1(如圖—〜三所示)具有無限行程、高 騎度、速度之㈣變化範圍寬廣、反触速、快速移動與 疋位、外型輕巧、直接鶴、斷電定位鱗、無搖擺運動、 不受外部磁場干擾、無舞縣等優點，_常見於半導體 廉或高科技廠射。_具社鑛肋及林外部磁場干 擾與體積小之優勢，使得㈣騎在精較奴朝上並不 亞於電磁式舰馬達，而且也可以在真㈣工作環境中。 $不過該自㈣電馬達丨僅驗單方向(橫向或縱向)撥動 *運動之功此，如果要做雙方向(橫向與縱向)撥動滑座運 動則必須改Ή用遷電馬達1配置方向或配置雙組線性屢 電馬達。這種情況如果尚有容置雜，咖不職心改變習 用壓電馬達1配置方向或配置雙組習用壓電馬達卜但是， ^ ^到/又有白用壓電馬達1的迴旋空間或不允許配置雙組 白用壓電馬達1時1賴電馬達1便無法達到多動向控制 之目的。 1289000 本發明即係彻交又麟多層層狀壓電元件4或分佈式 多層層狀㈣元件4,與不同分佈之電極層4，1來產生高致動 力的侧形單方向或雙方向之運動來解決-般抑壓電馬達 低致動力以及無法作雙方向運動之缺點。 【發明内容】 習用壓電馬達1(如圖—〜三所示），係糊撥輯套u、 赛X動凸塊12、極化方向13、電極層14與電路連接線15以及 控制開關(SI&S2)來達到控麵電馬達j的單方向撥動運動。 該t用壓電馬達1之分佈式電極層14通電時，因為利用交錯 排列方式，除了可以讓習用壓電馬達i產生彎曲力矩之外，尚 可以產生伸縮致動力，所以該習用壓電馬達i可以產生順時鐘 _或逆時鐘旋轉的推挽力量。而該習用壓電馬達！藉由該 順日寸鐘㈣或逆時鐘的推挽力量、撥動護套η與控制開關 (^&s2) ’便可以讓滑座a在單—方向上產生順時鐘旋轉或逆 4旋轉運動。惟該習職電馬達丨雖然構造簡單易於實 施’但是在有限的系統空間内需要高致動力時，該習用壓電馬 達1恐怕有力有未逮之虞，此即f㈣電馬達i無法提供高致 動力的缺點之一。 另外則是，要讓滑座A在另一方向上產生順時鐘旋轉或 逆日寸鐘旋轉運動時，則必須調整習用壓電馬達1的設置方向。 但是，這種改變固定邊界或組裝方式的做法並不切實際，除非 1289000 另外設置一套壓電馬達。滅—來反而增添構置成本以及佔 據系統工間’如果系統空間有限則無法利用增添習用壓電馬達 1來解決問題，這也是習職電馬達1的缺點之二。 本發明即係針對如壓電馬達1無法提供高致動力與必 須改變固定邊界或組裝方式等缺點，而著手提出改善的。 本發明主要目的是在於提供—種高致動力 以及可以單方 向控制之壓電馬達者。 本毛明另目的是在於提供—種具有高致動力以及可以 做雙方向控制之壓電馬達者。 【實施方式】 本發明之組立圖、立體圖、實施樣態以及可行變化例請參 考圖四〜圖九。 本么明係由座體2、多層層狀壓電元件4與驅動電路5所 組成’如圖四〜五所示；其特徵在於：該座體2上設有撥動凸 塊21與嵌入槽22，其中該撥動凸塊21係供撥動護套3套置 之用；而該嵌入槽22係供多層層狀壓電元件4嵌入之用；該 壓電馬達係藉由交叉驅動多層層狀壓電元件4來產生高致動 力的橢圓形運動，如圖五〜七所示。 本發明之高致動力壓電馬達，其交叉驅動方式係指嵌入座 體2之四個嵌入槽22内之交叉排列(如4，LU與4"RD之交叉 排列’或4，LD與4，RU之交叉排列)之多層層狀壓電元件4(如 1289000 4，LU、4，RD、4’LD與4’RU)，施以驅動電壓。當該交又排列 之多層層狀壓電元件4被驅麟，其所產生之錯位應力或振動 位移，足以促使壓電馬達產生橢圓形推挽力量之運動，而藉此 來推動滑塊A做水平位移滑動，如圖四〜八所示。 本毛月之座體2可為銘合金或不鑛鋼材料，如圖四〜九所 示。 本务明之肷入槽22有四個，係為鏤空體且平均配置在座 體2上，如圖四或圖八所示。 本發明之撥動護套3為耐磨材料，如圖四或圖八所示。 本發明之多層層狀壓電元件4,其層數至少大於2層以上。 本發明之電極層41為薄銀層，如圖五〜七所示。 本發明之高致動力壓電馬達，該高致動力壓電馬達係由座 體2、分佈式多層層狀壓電元件4,與驅動電路5所組成，如圖 八所示；其特徵在於：該座體2上設有撥動凸塊21與嵌入槽 22 ’其中該撥動凸塊21係供撥動護套3套置之用；而該嵌入 槽22係供分佈式多層層狀壓電元件4,嵌入之用；該壓電馬達 係藉由交又驅動分佈式多層層狀壓電元件4,與不同分佈之電 極層4’1來產生高致動力以及雙方向的橢圓形運動，如圖九所 不。 本發明之高致動力壓電馬達，其交叉驅動方式係指嵌入座 體2之四個嵌入槽22内之交叉排列(如4，LU與4，RD之交叉 1289000 排歹J或4 LD與4 ru之交叉排列)之多層層狀塵電元件％如 4’LU、4，RD、4，LD與4，RU)，施以驅動電壓。當該交叉排列 之多層層狀壓電元件4被驅_，其所產生之錯位應力或振動 位移’足以促使壓電馬達產生橢圓形推挽力量之運動，而藉此 來推動滑塊A做水平位移滑動，如圖四〜八所示。 本發明之分佈式多騎狀壓電元件4，，其中該分佈式多層 層狀壓電元件4,之層數至少大於2層以上，如圖八所示。 本發明之分佈❹層躲壓電元件4，，其中該分佈式多層 層狀[電元件4之電極層4’；ι係沿厚度方向採左右對稱塗佈 之’如圖八所示。 本發明之分佈式多層層狀壓電元件4，，其巾該分佈式多層 層狀壓電元件4’對;^電極層^與交叉驅動時可產生左右偏 擺或上下偏擺之運動，如圖八所示。 本發明之最大驅動位移係習用壓電馬達的1.48〜29.62 表所示。而隶大驅動應力則是習用壓電馬達的 1.82〜36.39倍，如表一〜表二所示。 本發明利用交又驅動多層層狀壓電元件4即可產生高致 動力的橢圓形與單方向運動，如圖五〜七所示。 " 本么明利用乂又驅動分佈式多層層狀壓電元件4,與不同 分佈之電極層4,1即可產生高致動力以及雙方向的橢圓形運 動，如圖九所示。 1289000 综上所述本發明利用交叉驅動多層層狀屋電元件4或八 佈式多層層狀《電元件4’與不同分佈之電極層4，丨來產生4 動力的橢_單方向錢方向物，已符合產红之:. :=無相Γ置或發明前案且較習簡馬達有明顯之, ^性亦於專射請餅中之_性舆 靖 委貝賜予以發明專利為荷！ 叉C而明 1289000 表一：本創作與習用壓電馬達最大驅動位移比較表。 案例分析 Δχ最大位移(_) 倍率(倍） 習用前案 0.131 1.0 本創作（2層層狀結構） 0.194 1.48 本創作（5層層狀結構） 0.485 3.70 本創作（10層層狀結構） 0.97 7.40 本創作（20層層狀結構） 1.94 14.81 本創作（30層層狀結構） 2.91 22.21 本創作（40層層狀結構） 3.88 29.62 ※壓電陶瓷型式：PZT5H ※驅動電壓：l〇(K〇Vac ※壓電馬達分析尺寸L : W : H=6 : 4 : 2。Generally, the electric motor 1 (shown in Figure-~3) has unlimited stroke, high riding speed, speed (4) wide range of variation, anti-touch speed, fast moving and clamping position, light weight, direct crane, power-off positioning Scales, no swinging motion, no interference from external magnetic fields, no dance county, etc., _ common in semiconductors or high-tech factory shots. _ The advantages of the external magnetic field interference and small volume of the ribs and forests make the (4) riding in the finer slaves than the electromagnetic ship motors, but also in the real (4) working environment. $However, since the (four) electric motor 丨 only checks the direction of one direction (horizontal or vertical), the movement of the movement *, if you want to do the two-way (horizontal and vertical) to move the carriage, you must change the configuration of the motor 1 Direction or configuration of two sets of linear electric motors. In this case, if there is still a miscellaneous situation, the coffee does not change the position of the piezoelectric motor 1 or configures the two sets of conventional piezoelectric motors. However, there is a space for the piezoelectric motor 1 to be rotated or not. When the two-group white piezoelectric motor 1 is allowed to be configured, the electric motor 1 cannot achieve the purpose of multi-directional control. 1289000 The present invention is a cross-layered multi-layered layered piezoelectric element 4 or a distributed multi-layered layered (four) element 4, with differently distributed electrode layers 4, 1 to produce highly actuating lateral unidirectional or bidirectional motion. To solve the shortcomings of the piezoelectric motor with low actuation force and the inability to make bidirectional motion. SUMMARY OF THE INVENTION A piezoelectric motor 1 (shown in FIG. 3 to FIG. 3) is used, which is a paste set u, a race X-bump 12, a polarization direction 13, an electrode layer 14 and a circuit connecting line 15, and a control switch ( SI&S2) to achieve the one-way toggle motion of the control surface motor j. When the current is distributed by the distributed electrode layer 14 of the piezoelectric motor 1, since the staggered arrangement can be used to generate the bending moment of the conventional piezoelectric motor i, the telescopic actuation force can be generated, so the conventional piezoelectric motor i It can produce a push-pull force that rotates clockwise or counterclockwise. And the conventional piezoelectric motor! By sliding the force of the clock (four) or the counterclock, pushing the sheath η and the control switch (^&s2) ', the slider a can be rotated clockwise or reversed in the single direction. motion. However, the conventional electric motor 丨 is simple and easy to implement. However, when the high power is required in a limited system space, the conventional piezoelectric motor 1 may be powerful and unsuccessful, and the f (four) electric motor i cannot provide high performance. One of the shortcomings of power. In addition, in order to cause the carriage A to rotate clockwise or reverse clockwise in the other direction, it is necessary to adjust the setting direction of the conventional piezoelectric motor 1. However, this practice of changing the boundaries or assembly is not practical unless the 1289000 is additionally equipped with a piezo motor. Elimination—increases the cost of configuration and the occupation of the system. If the system space is limited, it is impossible to solve the problem by adding a conventional piezoelectric motor. This is also the second disadvantage of the electric motor 1. The present invention is directed to improvements such as the inability of the piezoelectric motor 1 to provide high actuation force and the necessity to change the fixed boundary or the manner of assembly. SUMMARY OF THE INVENTION A primary object of the present invention is to provide a high power and a piezoelectric motor that can be controlled in one direction. Another purpose of the present invention is to provide a piezoelectric motor that has high actuation force and can be controlled in both directions. [Embodiment] Refer to Figure 4 to Figure 9 for the group diagram, perspective view, implementation mode and possible variations of the present invention. The present invention is composed of a base 2, a multi-layered layered piezoelectric element 4 and a driving circuit 5, as shown in FIG. 4 to FIG. 5; characterized in that the base body 2 is provided with a toggle projection 21 and an insertion groove. 22, wherein the toggle projection 21 is for arranging the toggle sheath 3; and the insertion groove 22 is for embedding the multilayer laminated piezoelectric component 4; the piezoelectric motor is driven by the cross layer The piezoelectric element 4 is used to generate a highly actuated elliptical motion, as shown in Figures 5-7. In the high-powered piezoelectric motor of the present invention, the cross-drive mode refers to the cross arrangement of the four embedded grooves 22 embedded in the base 2 (for example, 4, LU and 4 " RD cross arrangement ' or 4, LD and 4, The multi-layered piezoelectric element 4 (such as 1289000 4, LU, 4, RD, 4'LD, and 4'RU) of the RU cross arrangement is applied with a driving voltage. When the multi-layered piezoelectric element 4 of the cross-aligned layer is driven, the displacement stress or vibration displacement generated by the multi-layered piezoelectric element 4 is sufficient to cause the piezoelectric motor to generate the movement of the elliptical push-pull force, thereby pushing the slider A to do The horizontal displacement slides, as shown in Figures 4-8. The seat 2 of this month may be an alloy of inscription or non-mineral steel, as shown in Figures 4-9. There are four slots in the slot 22, which are hollow bodies and are evenly arranged on the base 2, as shown in Figure 4 or Figure 8. The toggle sheath 3 of the present invention is a wear resistant material as shown in FIG. 4 or FIG. The multi-layered layered piezoelectric element 4 of the present invention has a layer number of at least two or more layers. The electrode layer 41 of the present invention is a thin silver layer as shown in FIGS. In the high-induction piezoelectric motor of the present invention, the high-power piezoelectric motor is composed of a base body 2, a distributed multi-layered piezoelectric element 4, and a driving circuit 5, as shown in FIG. The seat body 2 is provided with a toggle protrusion 21 and an insertion groove 22', wherein the toggle protrusion 21 is for arranging the toggle sheath 3; and the insertion groove 22 is for distributing a multilayer multilayer piezoelectric layer The element 4 is embedded for use; the piezoelectric motor drives the distributed multi-layered layered piezoelectric element 4 to produce high-dynamic and bi-directional elliptical motion with differently distributed electrode layers 4'1, such as Figure 9 is not. In the high-powered piezoelectric motor of the present invention, the cross-driving mode refers to the cross arrangement of the four embedded grooves 22 embedded in the base 2 (for example, 4, LU and 4, RD cross 1289000, 歹 J or 4 LD and 4 The multi-layered dust-electric elements such as 4' LU, 4, RD, 4, LD and 4, RU) of the cross arrangement of ru are applied with a driving voltage. When the cross-arranged multi-layered piezoelectric element 4 is driven, the displacement stress or vibration displacement generated by it is sufficient to cause the piezoelectric motor to generate an elliptical push-pull force, thereby pushing the slider A horizontally. The displacement slides as shown in Figures 4-8. The distributed multi-riding piezoelectric element 4 of the present invention, wherein the distributed multi-layered piezoelectric element 4 has a layer number of at least two or more layers as shown in FIG. The distributed layer of the present invention hides the piezoelectric element 4, wherein the distributed multilayer layer [electrode layer 4' of the electric element 4; ι is applied symmetrically in the thickness direction" as shown in Fig. 8. The distributed multi-layered layered piezoelectric element 4 of the present invention has a distributed multi-layered layered piezoelectric element 4'; the electrode layer and the cross-drive can generate left and right yaw or up and down yaw motion, such as Figure 8 shows. The maximum drive displacement of the present invention is shown in the 1.48 to 29.62 table of the conventional piezoelectric motor. The driving force of the large-scale drive is 1.82~36.39 times that of the conventional piezoelectric motor, as shown in Table 1 to Table 2. The present invention utilizes the cross-drive and multi-layered piezoelectric element 4 to produce highly dynamic elliptical and unidirectional motion, as shown in Figures 5-7. " Benming uses the 乂 and drives the distributed multi-layered layered piezoelectric element 4, and the electrode layers 4,1 of different distributions can produce high-dynamic and two-direction elliptical motion, as shown in Fig. 9. 1289000 In summary, the present invention utilizes a cross-driving multi-layered layered electrical component 4 or an eight-layer multi-layered layered "electric component 4" and a differently distributed electrode layer 4 to produce a 4-power ellipsoidal-unidirectional directional direction. , has been in line with the production of red: . : = no phase or pre-invention case and more obvious than the simple motor, ^ sex is also in the special shot of the cake _ 舆 舆 委 贝 予以 予以 予以 予以 予以 予以 予以 予以 予以 予以 予以! Fork C and Ming 1289000 Table 1: Comparison table of the maximum driving displacement of the piezoelectric motor. Case Study Δχ Maximum Displacement (_) Magnification (times) Conventional Example 0.131 1.0 This creation (2-layered structure) 0.194 1.48 This creation (5-layered structure) 0.485 3.70 The creation (10-layered structure) 0.97 7.40 This creation (20-layer layer structure) 1.94 14.81 The creation (30-layer layer structure) 2.91 22.21 The creation (40-layer layer structure) 3.88 29.62 ※Piezoelectric ceramic type: PZT5H ※Drive voltage: l〇(K〇Vac ※ Piezoelectric motor analysis size L : W : H = 6 : 4 : 2.
12 1289000 ’表二：本創作與習用壓電馬達最大驅動應力比較表。 案例分析 最大應力(MPa) 倍率(倍） 習用前案 2.05 1.0 本創作（2層層狀結構） 3.73 1.82 本創作（5層層狀結構） 9.33 4.55 本創作（10層層狀結構） 18.65 9.10 本創作（20層層狀結構） 37.30 18.20 本創作（30層層狀結構） 55.90 27.27 本創作（40層層狀結構） 74.60 36.39 ※壓電陶瓷型式：PZT5H ※驅動電壓：l〇〇.〇Vae。 ※壓電馬達分析尺寸L : W : H=6 : 4 : 2。12 1289000 ‘Table 2: Comparison table of the maximum driving stress of the piezoelectric motor in this creation and practice. Case study Maximum stress (MPa) Magnification (times) Pre-use case 2.05 1.0 This creation (2-layered structure) 3.73 1.82 This creation (5-layered structure) 9.33 4.55 This creation (10-layered structure) 18.65 9.10 Creation (20-layer layered structure) 37.30 18.20 This creation (30-layer layered structure) 55.90 27.27 This creation (40-layer layered structure) 74.60 36.39 ※Piezoelectric ceramic type: PZT5H ※Drive voltage: l〇〇.〇Vae. ※ Piezoelectric motor analysis size L : W : H = 6 : 4 : 2.
13 1289000 【圖式簡單說明】 圖一：習用裝置組立圖。 圖二：習用裝置實施樣態之一。 圖三：習用裝置實施樣態之二。 圖四：本創作組立圖。 圖五：本創作電路連接示意圖。 圖六：本創作實施樣態之一。 • 圖七：本創作實施樣態之二。 圖八：本創作另一可行變化例。 圖九：本創作另一可行變化例之致動樣態。 【主要元件符號說明】 「習用裝置符號簡單說明」 1.習用壓電馬達 11.撥動護套 • 12.撥動凸塊 13. 極化方向 14. 電極層 15. 電路連接線 A.滑座 S】，S2.開關 on.代表電極層在通電狀態 14 1289000 * off.代表電極層在斷電狀態 「本創作符號簡單說明」 2. 座體 21. 撥動凸塊 22. 嵌入槽 3. 撥動護套 4. 多層層狀壓電元件 鲁 41·電極層 42.極化方向 4’.分佈式多層層狀壓電元件 4’1.電極層 4’2.極化方向 5. 驅動電路 A.滑座 • SbS2.開關 on.代表電極層在通電狀態 off.代表電極層在斷電狀態 LU.代表左上方 LD.代表左下方 RU.代表右上方 RD.代表右下方13 1289000 [Simple description of the diagram] Figure 1: Vertical diagram of the conventional device. Figure 2: One of the implementations of the conventional device. Figure 3: The second implementation of the conventional device. Figure 4: This creative group is a picture. Figure 5: Schematic diagram of the circuit connection of this creation. Figure 6: One of the implementation aspects of this creation. • Figure 7: The second form of this creative implementation. Figure 8: Another possible variation of this creation. Figure 9: Actuation of another possible variation of this creation. [Explanation of main component symbols] "Simplified description of conventional device symbols" 1. Conventional piezoelectric motor 11. Toggle sheath • 12. Trigger bump 13. Polarization direction 14. Electrode layer 15. Circuit connection line A. Slider S], S2. Switch on. Represents the electrode layer in the energized state 14 1289000 * off. Represents the electrode layer in the power-off state. "This is a simple description of the symbol" 2. Seat 21. Toggle the bump 22. Insert the slot 3. Dial Moving sheath 4. Multilayer layered piezoelectric element Lu 41 · Electrode layer 42. Polarization direction 4'. Distributed multilayer layered piezoelectric element 4'1. Electrode layer 4'2. Polarization direction 5. Drive circuit A Slider • SbS2. Switch on. Represents the electrode layer in the energized state off. It represents the electrode layer in the power-off state LU. It represents the upper left LD. It represents the lower left RU. It represents the upper right RD. It represents the lower right.