TWI452819B - The stator of the ultrasonic motor and the ultrasonic motor using the stator - Google Patents

The stator of the ultrasonic motor and the ultrasonic motor using the stator Download PDF

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TWI452819B
TWI452819B TW100100955A TW100100955A TWI452819B TW I452819 B TWI452819 B TW I452819B TW 100100955 A TW100100955 A TW 100100955A TW 100100955 A TW100100955 A TW 100100955A TW I452819 B TWI452819 B TW I452819B
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stator
driving mechanism
ultrasonic motor
base
piezoelectric actuator
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TW201230655A (en
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Univ Nat Kaohsiung Applied Sci
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Description

超音波馬達的定子及運用該定子的超音波馬達Ultrasonic motor stator and ultrasonic motor using the same

本發明是有關於一種定子,特別是指一種超音波馬達的定子及運用該定子的超音波馬達。The present invention relates to a stator, and more particularly to a stator of an ultrasonic motor and an ultrasonic motor using the same.

隨著工業技術的發展,超精密定位系統在半導體產業、光通訊產業、超精密加工...等高精密度產業領域的應用愈來愈廣泛,其中,又以微定位平台(Micro-position stage)、尺蠖式馬達(Inchworm motor),以及超音波馬達(Ultrasonic motor)較為常見。With the development of industrial technology, ultra-precision positioning systems are becoming more and more widely used in high-precision industrial fields such as semiconductor industry, optical communication industry, ultra-precision processing, etc., among them, micro-position stage ), Inchworm motors, and Ultrasonic motors are more common.

微定位平台是藉由壓電材料配合撓性結構(Flexure structure),利用施加電壓使壓電材料產生微小變形,再配合撓性結構的彈性變形達到高精度定位的目的,但是,微定位平台的行程短,在應用上較為不便;而尺蠖式馬達是利用施加電壓使壓電材料產生伸縮位移,以進行長距離的移動,改善微定位平台行程短應用上較為不便的缺點,但是,尺蠖式馬達的移動速度緩慢,使得作業時間增長。The micro-positioning platform is made up of a piezoelectric material with a flexure structure, which uses a voltage to cause a slight deformation of the piezoelectric material, and then cooperates with the elastic deformation of the flexible structure to achieve high-precision positioning, but the micro-positioning platform The short stroke is inconvenient in application; while the ruler motor uses the applied voltage to make the piezoelectric material expand and contract, so as to carry out long-distance movement, and it is inconvenient to improve the short positioning of the micro-positioning platform. However, the ruler motor The movement speed is slow, which makes the working time increase.

超音波馬達則是利用壓電材料的共振頻率進行精密定位,當施加低頻電壓時可以得到高解析度的位移量,而當施加高頻電壓時則可得到較高的移動速度。The ultrasonic motor is precisely positioned by the resonant frequency of the piezoelectric material, and a high-resolution displacement can be obtained when a low-frequency voltage is applied, and a high moving speed can be obtained when a high-frequency voltage is applied.

參閱圖1、2,發明人先前申請獲准之中華民國公告第M286995號「超音波馬達」新型專利,包含一馬達底座11、一橢圓形定子12、一支撐預壓機構13,及一對象物14。其中,該橢圓形定子12包括一橢圓形彈性體121、二對應設置於該橢圓形彈性體121中的壓電致動元件122,及一設置於所述壓電致動元件122之間的固定柱123。藉由施加電壓使所述壓電致動元件122產生周期性微小變形運動,進而擠壓橢圓形彈性體121產生變形,使橢圓形彈性體121的作用塊124產生足夠大小的橢圓形運動軌跡以驅動對象物14。Referring to Figures 1 and 2, the inventors previously applied for a new patent of the "Supersonic Motor" of the Republic of China Announcement No. M286995, comprising a motor base 11, an elliptical stator 12, a supporting pre-compression mechanism 13, and an object 14 . The elliptical stator 12 includes an elliptical elastic body 121, two piezoelectric actuating elements 122 correspondingly disposed in the elliptical elastic body 121, and a fixing disposed between the piezoelectric actuating elements 122. Column 123. The piezoelectric actuator element 122 is subjected to a periodic micro-deformation motion by applying a voltage, thereby squeezing the elliptical elastic body 121 to deform, so that the action block 124 of the elliptical elastic body 121 generates an elliptical motion trajectory of sufficient size to The object 14 is driven.

但是,該超音波馬達仍具有下列缺點有待改善:However, the ultrasonic motor still has the following disadvantages to be improved:

1.強度低:由於該彈性體121是呈橢圓環狀,必須利用該固定柱123與支撐預壓機構13的支撐座131相互結合,但是由於該彈性體121並未與該支撐座131相接觸,造成該彈性體121的結構強度較低,容易發生變形而影響驅動該對象物14的精確度。1. Low strength: Since the elastic body 121 is in an elliptical ring shape, the fixing post 123 must be coupled to the support base 131 supporting the pre-compression mechanism 13, but the elastic body 121 is not in contact with the support base 131. The structural strength of the elastic body 121 is low, and deformation is easily caused to affect the accuracy of driving the object 14.

2.結構複雜:續上述,由於該橢圓形定子12的彈性體121是呈橢圓環狀,因此必須另外利用該支撐座131才能將該橢圓形定子12定位於該馬達底座11上,因此,在製造組裝上較為複雜繁瑣,相對亦使得製造組裝成本增加。2. Complicated structure: Since the elastic body 121 of the elliptical stator 12 is in an elliptical ring shape, the support base 131 must be additionally used to position the elliptical stator 12 on the motor base 11, and therefore, The manufacturing assembly is more complicated and cumbersome, and the manufacturing assembly cost is relatively increased.

3.精度較差:續上述,由於在製造組裝上較為複雜繁瑣,比較容易產生組裝誤差,而且如前所述該彈性體121的強度低,因此,造成該超音波馬達的精度較差。3. Poor accuracy: Since the above is complicated and complicated in manufacturing and assembly, assembly errors are relatively easy to occur, and the strength of the elastic body 121 is low as described above, so that the accuracy of the ultrasonic motor is poor.

因此,本發明之目的,即在提供一種強度高且結構簡單之超音波馬達的定子。Accordingly, it is an object of the present invention to provide a stator of an ultrasonic motor having a high strength and a simple structure.

而本發明的另一目的,即在提供一種強度高、結構簡單且精度高之超音波馬達。Another object of the present invention is to provide an ultrasonic motor which has high strength, simple structure and high precision.

於是,本發明超音波馬達的定子,包含一固定座,及一個一體連設於該固定座上的驅動單元。Therefore, the stator of the ultrasonic motor of the present invention comprises a fixing base and a driving unit integrally connected to the fixing base.

該驅動單元包括一與該固定座一體成型且概呈半橢圓環狀的驅動機構,及兩個間隔設置於該固定座與該驅動機構之間的壓電致動器,其中,每一個壓電致動器具有一頂抵於該驅動機構上的第一端,及一相反於該第一端而頂抵於該固定座上的第二端。The driving unit includes a driving mechanism integrally formed with the fixing seat and having a substantially semi-elliptical ring shape, and two piezoelectric actuators disposed between the fixing seat and the driving mechanism, wherein each piezoelectric device The actuator has a first end that abuts against the drive mechanism and a second end that abuts against the first end against the fixed seat.

而本發明之超音波馬達包含一基座、一活動地設置於該基座上的被動件、至少一可拆卸地設置於該基座上的定子,及一推抵該定子的推動單元。The ultrasonic motor of the present invention comprises a base, a passive member movably disposed on the base, at least one stator detachably disposed on the base, and a pushing unit pushed against the stator.

該定子包括一可拆卸地設置於該基座上的固定座,及一與該固定座一體連設的驅動單元,其中,該驅動單元包括一與該固定座一體成型且概呈半橢圓環狀的驅動機構,及兩個間隔設置於該固定座與該驅動機構之間的壓電致動器,其中,每一個壓電致動器具有一頂抵於該驅動機構上的第一端,及一相反於該第一端而頂抵於該固定座上的第二端。The stator includes a fixing base detachably disposed on the base, and a driving unit integrally connected with the fixing base, wherein the driving unit includes a semi-elliptical ring integrally formed with the fixing base a driving mechanism, and two piezoelectric actuators disposed between the fixing base and the driving mechanism, wherein each piezoelectric actuator has a first end that abuts against the driving mechanism, and a Conversely opposite the first end and abutting against the second end of the mount.

該推動單元包括一可拆卸地設置於該基座上的固定塊,及一活動地穿置於該固定塊中並推抵於該固定座的彈性推抵機構。所述壓電致動器通電後能使該驅動機構產生變形,而驅動該被動件相對該固定座運動。The pushing unit includes a fixing block detachably disposed on the base, and a resilient pushing mechanism movably inserted into the fixing block and pushed against the fixing seat. The piezoelectric actuator energizes the drive mechanism to deform, and drives the passive member to move relative to the fixed seat.

本發明的有益效果在於藉由概呈半橢圓環狀的驅動機構與該固定座是一體成型的設計,可以提高該驅動機構的強度,避免因外力而產生變形,同時還可以簡化該定子的結構,以降低製造組裝的複雜度與成本,並減少組裝誤差的產生,進而提高該驅動機構驅動該被動件的精準度。The invention has the advantages that the design of the driving mechanism of the semi-elliptical ring shape and the fixing base can improve the strength of the driving mechanism, avoid deformation due to external force, and simplify the structure of the stator. In order to reduce the complexity and cost of manufacturing assembly, and reduce the assembly error, thereby improving the accuracy of the driving mechanism to drive the passive component.

有關本發明之前述及其他技術內容、特點與功效,在以下配合參考圖式之三個較佳實施例的詳細說明中,將可清楚的呈現。The above and other technical contents, features and advantages of the present invention will be apparent from the following detailed description of FIG.

在本發明被詳細描述之前,要注意的是,在以下的說明內容中,類似的元件是以相同的編號來表示。Before the present invention is described in detail, it is noted that in the following description, similar elements are denoted by the same reference numerals.

參閱圖3,本發明超音波馬達的定子2之較佳實施例包含一固定座21,及一個一體連設於該固定座21上的驅動單元22。Referring to FIG. 3, a preferred embodiment of the stator 2 of the ultrasonic motor of the present invention includes a mounting base 21 and a drive unit 22 integrally coupled to the mounting base 21.

該固定座21具有一安裝部211,及一自該安裝部211向外凸出的定位部212,而使該固定座21整體概呈一凸字形。The fixing base 21 has a mounting portion 211 and a positioning portion 212 protruding outward from the mounting portion 211, so that the fixing base 21 has a convex shape as a whole.

該驅動單元22包括一與該固定座21一體成型且概呈半橢圓環狀的驅動機構221,及兩個間隔嵌設於該固定座21與該驅動機構221之間的壓電致動器227。The driving unit 22 includes a driving mechanism 221 integrally formed with the fixing base 21 and having a substantially semi-elliptical ring shape, and two piezoelectric actuators 227 interposed between the fixing base 21 and the driving mechanism 221 . .

該固定座21與該驅動機構221可以是由鋁合金或不銹鋼等金屬材料一體成型所製成,於本較佳實施例中,該固定座21與該驅動機構221是由鋁合金一體成型所製成。The fixing base 21 and the driving mechanism 221 may be integrally formed of a metal material such as aluminum alloy or stainless steel. In the preferred embodiment, the fixing base 21 and the driving mechanism 221 are integrally formed of an aluminum alloy. to make.

該驅動機構221的兩端是一體連設於該安裝部211上,且該驅動機構221具有相間隔的一內環面222與一外環面223,及一凸出於該外環面223上的接觸件224。而且該接觸件224具有一個一體連設於該外環面223上的連接部225,及一設置於該連接部225上的耐磨部226。當然,在實際應用上可以不需要該接觸件224,依然可以達到相同的效果。The two ends of the driving mechanism 221 are integrally connected to the mounting portion 211, and the driving mechanism 221 has an inner annular surface 222 and an outer annular surface 223 spaced apart from each other, and a protruding portion of the outer annular surface 223 Contact 224. Moreover, the contact member 224 has a connecting portion 225 integrally connected to the outer ring surface 223, and a wear portion 226 disposed on the connecting portion 225. Of course, the contact 224 may not be needed in practical applications, and the same effect can still be achieved.

參閱圖5,而每一個壓電致動器227具有一頂抵於該驅動機構221之內環面222上的第一端228,及一相反於該第一端228而頂抵於該固定座21之定位部212上的第二端229。Referring to FIG. 5, each of the piezoelectric actuators 227 has a first end 228 that abuts against the inner annular surface 222 of the driving mechanism 221, and a top end 228 opposite to the fixed end. The second end 229 on the positioning portion 212 of FIG.

參閱圖3,由於該概呈半橢圓環狀的驅動機構221與該固定座21是一體成型的設計,因此,可以提高該定子2之驅動機構221的強度,避免因外力而產生變形,同時還可以簡化該定子2的整體結構,以降低製造組裝的複雜度與成本並減少組裝誤差的產生。Referring to FIG. 3, since the semi-elliptical annular driving mechanism 221 and the fixing base 21 are integrally formed, the strength of the driving mechanism 221 of the stator 2 can be improved, and deformation due to external force can be avoided. The overall structure of the stator 2 can be simplified to reduce the complexity and cost of manufacturing assembly and reduce the occurrence of assembly errors.

參閱圖4,本發明超音波馬達的第一較佳實施例包含一基座3、一可活動地設置於該基座3上的被動件4、一可拆卸地設置於該基座3上的定子2,及一推抵該定子2的推動單元5。於本較佳實施例中,該被動件4是可相對該定子2作直線移動的平台。Referring to FIG. 4, a first preferred embodiment of the ultrasonic motor of the present invention includes a base 3, a passive member 4 movably disposed on the base 3, and a detachably disposed on the base 3. The stator 2, and a pushing unit 5 that pushes against the stator 2. In the preferred embodiment, the passive member 4 is a platform that is linearly movable relative to the stator 2.

由於本實施例之定子2的結構,即是圖3中之定子2的較佳實施例,所以不在此加以贅述,其中,該定子2之固定座21的安裝部211是可拆卸地設置於該基座3上,而該定位部212則是自該安裝部211向該被動件4方向凸出,而該接觸件224是觸抵於該被動件4的側緣上。Since the structure of the stator 2 of the present embodiment, that is, the preferred embodiment of the stator 2 in FIG. 3, is not described herein, wherein the mounting portion 211 of the fixing base 21 of the stator 2 is detachably disposed therein. The locating portion 212 protrudes from the mounting portion 211 toward the passive member 4, and the contact member 224 is in contact with the side edge of the passive member 4.

該推動單元5包括一可拆卸地設置於該基座3上的固定塊51,及一活動地穿置於該固定塊51中並推抵於該固定座21的彈性推抵機構52,其中,該彈性推抵機構52具有一螺旋穿置於該固定塊51中的外筒521、一穿置於該外筒521中並推頂於該固定座21之安裝部211的推桿522,及一兩端分別頂抵於該外筒521與該推桿522上的壓縮彈簧523。The pushing unit 5 includes a fixing block 51 detachably disposed on the base 3, and a resilient pushing mechanism 52 movably inserted into the fixing block 51 and pushed against the fixing seat 21, wherein The elastic pushing mechanism 52 has an outer cylinder 521 which is spirally inserted into the fixing block 51, a push rod 522 which is inserted into the outer cylinder 521 and is pushed up to the mounting portion 211 of the fixing base 21, and a push rod 522 The two ends are respectively abutted against the outer tube 521 and the compression spring 523 on the push rod 522.

由於該概呈半橢圓環狀的驅動機構221與該固定座21是一體成型的設計,使得包含有該定子2的超音波馬達也能夠達成前述降低製造組裝的複雜度與成本,與減少組裝誤差等功效,而且,因為組裝誤差少且該定子2的強度高,因此,還可以有效提升該超音波馬達之被動件4的定位精確度。Since the semi-elliptical annular driving mechanism 221 and the fixing base 21 are integrally formed, the ultrasonic motor including the stator 2 can also achieve the aforementioned complexity and cost of manufacturing assembly and reduce assembly error. The efficiency is also improved, and since the assembly error is small and the strength of the stator 2 is high, the positioning accuracy of the passive member 4 of the ultrasonic motor can be effectively improved.

而當對所述壓電致動器227通電後能使該驅動機構221產生變形,而驅動該被動件4相對該定子2的固定座21運動,以下將針對驅動該超音波馬達的運作進行說明:參閱圖5、6、7,該半橢圓環狀的驅動機構221分別具有如圖5、6所示相互垂直的法向振動模態與切向振動模態(假想線為該驅動機構221的原始位置)。而且由圖7可知,該半橢圓環狀的驅動機構221之法向振動模態與切向振動模態的自然頻率相近,因此,可以對所述壓電致動器227施加相同頻率不同相位的驅動電壓,而同時激發該驅動機構221之法向振動與切向振動以驅動該接觸件224運行。When the piezoelectric actuator 227 is energized, the driving mechanism 221 can be deformed, and the passive member 4 is driven to move relative to the fixing base 21 of the stator 2. Hereinafter, the operation of driving the ultrasonic motor will be described. Referring to Figures 5, 6, and 7, the semi-elliptical annular drive mechanism 221 has a normal vibration mode and a tangential vibration mode perpendicular to each other as shown in Figures 5 and 6 (the imaginary line is the drive mechanism 221). Original location). Moreover, as can be seen from FIG. 7, the normal vibration frequency of the semi-elliptical annular driving mechanism 221 is similar to the natural frequency of the tangential vibration mode. Therefore, the piezoelectric actuator 227 can be applied with the same frequency and different phases. The driving voltage is applied while exciting the normal and tangential vibrations of the drive mechanism 221 to drive the contact 224 to operate.

參閱圖8,並回顧圖3,而且發明人分析發現,當該驅動機構221的寬度與厚度固定時,其切向與法向振動態的自然頻率是如圖8所示隨著概呈半橢圓環狀之驅動機構221的長、短軸L1、L2比值變化,其中,切向振動模態的自然頻率會隨長、短軸L1、L2比值的增加而快速上升,而法向振動模態的自然頻率則會隨之減少,並且在其長、短軸L1、L2比值約為2.0時,切向振動模態與法向振動模態的自然頻率為最接近。Referring to FIG. 8 and reviewing FIG. 3, and the inventors have found that when the width and thickness of the driving mechanism 221 are fixed, the natural frequency of the tangential and normal vibration dynamics is as shown in FIG. The ratio of the lengths of the long and short axes L1 and L2 of the ring-shaped driving mechanism 221 changes, wherein the natural frequency of the tangential vibration mode rapidly rises as the ratio of the long and short axes L1 and L2 increases, and the normal vibration mode The natural frequency is reduced, and the natural frequency of the tangential vibration mode is the closest to the normal vibration mode when the ratio of the long and short axes L1 and L2 is about 2.0.

為了使驅動壓電致動器227的驅動電壓能夠在一個週期內,同時激發該驅動機構221之切向振動模態與法向振動模態各自完成一個週期振動運動,因此,該驅動機構221必須具有相同自然頻率的切向振動模態與法向振動模態,所以,該概呈半橢圓環狀的驅動機構221之長軸L1與短軸L2的比值是介於1.9~2.1之間,於本較佳實施例中,該長軸L1與短軸L2的比值是2。In order to enable the driving voltage of the driving piezoelectric actuator 227 to simultaneously excite the tangential vibration mode and the normal vibration mode of the driving mechanism 221 to perform one periodic vibration motion in one cycle, the driving mechanism 221 must The tangential vibration mode and the normal vibration mode have the same natural frequency. Therefore, the ratio of the long axis L1 to the short axis L2 of the semi-elliptical annular drive mechanism 221 is between 1.9 and 2.1. In the preferred embodiment, the ratio of the major axis L1 to the minor axis L2 is two.

參閱圖9、10,當對所述壓電致動器227施加如圖9所示具相同頻率但存在有90°相位差的正弦波驅動電壓時,即會使該驅動機構221的接觸件224對應地產生如圖10所示的橢圓形運動軌跡。為了方便對照驅動電壓與該驅動機構221之接觸件224的橢圓形運動軌跡之間的關係,因此,將圖9之電壓波形一個週期區分為成A、B、C、D、E、F、G、H等時間點加以說明,而圖10中的假想線即為尚未對所述壓電致動器227施加驅動電壓時該驅動機構221的啟始位置。Referring to FIGS. 9 and 10, when a sinusoidal driving voltage having the same frequency as shown in FIG. 9 but having a phase difference of 90° is applied to the piezoelectric actuator 227, the contact member 224 of the driving mechanism 221 is caused. Correspondingly, an elliptical motion trajectory as shown in FIG. 10 is generated. In order to facilitate the comparison between the driving voltage and the elliptical motion trajectory of the contact member 224 of the driving mechanism 221, the voltage waveform of FIG. 9 is divided into one cycle, A, B, C, D, E, F, G. The time point of H, etc. is explained, and the imaginary line in FIG. 10 is the starting position of the drive mechanism 221 when the driving voltage is not applied to the piezoelectric actuator 227.

在A點時,圖10(A)右側的壓電致動器227受到-10伏特電壓而縮短,而左側的壓電致動器227因未受到電壓而不變形,使得該接觸件224如圖10(A)所示稍向左上方變形;在B點時,圖10(B)右側的壓電致動器227受到-5√2伏特電壓而縮短,而左側的壓電致動器227受到+5√2伏特電壓而伸長,使得該接觸件224如圖10(B)所示向左方變形;到C點時,圖10(C)右側的壓電致動器227未受到電壓而不變形,而左側的壓電致動器227受到+10伏特電壓而伸長,使得該接觸件224如圖10(C)所示稍向左下變形;到D點時,圖10(D)右側的壓電致動器227與左側的壓電致動器227皆受到+5√2伏特電壓而伸長,使得該接觸件224如圖10(D)所示向下變形;到E點時,圖10(E)右側的壓電致動器227受到+10伏特電壓而伸長,左側的壓電致動器227因未受到電壓而不變形,使得該接觸件224如圖10(E)所示略為向右下方變形;在F點時,圖10(F)右側的壓電致動器227受到+5√2伏特電壓而伸長,而左側的壓電致動器227受到-5√2伏特電壓而縮短,使得該接觸件224如圖10(F)所示向右方變形;在G點時,圖10(G)右側的壓電致動器227未受到電壓而不變形,而左側的壓電致動器227受到-10伏特電壓而縮短,使得該接觸件224如圖10(G)所示向右上方變形;在H點時,圖10(H)右側的壓電致動器227與左側的壓電致動器227皆受到-5√2伏特電壓而縮短,使得該接觸件224如圖10(H)所示向上變形,經過A、B、C、D、E、F、G、H的週期性變化後,即可使該接觸件224形成一橢圓形運動軌跡。在此要特別說明的是,圖9、10是以左側的壓電致動器227的驅動電壓領先右側的壓電致動器227的驅動電壓90°相位角作說明,因此,該接觸件224的橢圓形運動軌跡是呈逆時針方向運行,若是,右側的壓電致動器227的驅動電壓領先左側的壓電致動器227的驅動電壓90°相位角,則該接觸件224的橢圓形運動軌跡即呈順時針方向運行,因此,可藉由改變左側的壓電致動器227與右側的壓電致動器227之驅動電壓的相位差,控制該接觸件224的橢圓形運動軌跡,進而如圖11所示,控制該接觸件224驅動該被動件4如圖11中箭頭所示相對該固定座211往復移動,配合該推動單元5之壓縮彈簧523的彈性回復力推頂該推桿522(顯示於圖4),使該驅動機構221的接觸件224能確實觸抵於該被動件4上,而該接觸件224的耐磨部226能減少接觸磨耗的現象。At point A, the piezoelectric actuator 227 on the right side of FIG. 10(A) is shortened by a voltage of -10 volts, and the piezoelectric actuator 227 on the left side is not deformed by the voltage, so that the contact 224 is as shown in FIG. 10(A) is slightly deformed to the upper left; at point B, the piezoelectric actuator 227 on the right side of FIG. 10(B) is shortened by a voltage of -5 √ 2 volts, and the piezoelectric actuator 227 on the left side is subjected to +5√2 volts is elongated, so that the contact 224 is deformed to the left as shown in Fig. 10(B); when it is point C, the piezoelectric actuator 227 on the right side of Fig. 10(C) is not subjected to voltage Deformation, while the piezoelectric actuator 227 on the left side is elongated by a voltage of +10 volts, so that the contact 224 is slightly deformed to the lower left as shown in Fig. 10(C); when it is point D, the pressure on the right side of Fig. 10(D) Both the electric actuator 227 and the piezoelectric actuator 227 on the left side are elongated by a voltage of +5 √ 2 volts, so that the contact 224 is deformed downward as shown in Fig. 10(D); when it is point E, Fig. 10 ( E) The piezoelectric actuator 227 on the right side is elongated by a voltage of +10 volts, and the piezoelectric actuator 227 on the left side is not deformed by the voltage, so that the contact 224 is slightly rightward as shown in Fig. 10(E). Deformation below; at point F The piezoelectric actuator 227 on the right side of Fig. 10(F) is elongated by a voltage of +5 √ 2 volts, and the piezoelectric actuator 227 on the left side is shortened by a voltage of -5 √ 2 volts, so that the contact 224 is as shown in Fig. 10. (F) is deformed to the right; at the G point, the piezoelectric actuator 227 on the right side of FIG. 10(G) is not subjected to voltage without deformation, and the piezoelectric actuator 227 on the left side is subjected to -10 volts. The shortening is such that the contact member 224 is deformed to the upper right as shown in FIG. 10(G); at the H point, the piezoelectric actuator 227 on the right side of FIG. 10(H) and the piezoelectric actuator 227 on the left side are both subjected to - The voltage of 5 √ 2 volts is shortened, so that the contact 224 is deformed upward as shown in FIG. 10(H), and after periodic changes of A, B, C, D, E, F, G, and H, the Contact 224 forms an elliptical motion trajectory. Specifically, FIG. 9 and FIG. 10 show that the driving voltage of the piezoelectric actuator 227 on the left side leads the driving voltage of the piezoelectric actuator 227 on the right side by a phase angle of 90°. Therefore, the contact 224 is used. The elliptical motion trajectory is operated in a counterclockwise direction. If the driving voltage of the piezoelectric actuator 227 on the right side leads the driving voltage of the piezoelectric actuator 227 on the left side by a phase angle of 90°, the elliptical shape of the contact member 224 The motion trajectory is operated in a clockwise direction. Therefore, the elliptical motion trajectory of the contact member 224 can be controlled by changing the phase difference between the driving voltages of the piezoelectric actuator 227 on the left side and the piezoelectric actuator 227 on the right side. Further, as shown in FIG. 11 , the contact member 224 is driven to drive the passive member 4 to reciprocate relative to the fixed seat 211 as indicated by an arrow in FIG. 11 , and the elastic restoring force of the compression spring 523 of the pushing unit 5 is used to push the push rod. 522 (shown in FIG. 4) enables the contact member 224 of the drive mechanism 221 to reliably contact the passive member 4, and the wear portion 226 of the contact member 224 can reduce contact wear.

除了如圖10所示,對所述壓電致動器227施加雙相高頻驅動電壓的方式可以使該接觸件224產生橢圓形運動軌跡外,也可以如圖12或圖13所示,僅對其中一壓電致動器227施加單相高頻驅動電壓也可達成相同的效果。In addition to the two-phase high-frequency driving voltage applied to the piezoelectric actuator 227, as shown in FIG. 10, the contact member 224 may have an elliptical motion trajectory, as shown in FIG. 12 or FIG. The same effect can be achieved by applying a single-phase high-frequency driving voltage to one of the piezoelectric actuators 227.

當對圖12中右側的壓電致動器227施加一個正弦波驅動電壓時,即可使右側的壓電致動器227產生週期性的伸張與收縮,使該接觸件224呈現如圖12中箭頭所示傾斜角度的橢圓形運動軌跡;當對圖13中左側的壓電致動器227施加一個正弦波驅動電壓時,即可使左側的壓電致動器227產生週期性的伸張與收縮,使該接觸件224呈現如圖13中箭頭所示傾斜角度的橢圓形運動軌跡。When a sine wave driving voltage is applied to the piezoelectric actuator 227 on the right side of FIG. 12, the piezoelectric actuator 227 on the right side can be periodically stretched and contracted, so that the contact member 224 is as shown in FIG. An elliptical motion locus of an oblique angle indicated by an arrow; when a sine wave driving voltage is applied to the piezoelectric actuator 227 on the left side of FIG. 13, the piezoelectric actuator 227 on the left side can be periodically stretched and contracted. The contact 224 is rendered in an elliptical motion trajectory at an oblique angle as indicated by the arrow in FIG.

對所述壓電致動器227施加如圖10所示的雙相高頻驅動電壓或是圖12、13所示的單相高頻驅動電壓可以產生較高的驅動速度。當需要較高的定位精度時,則可改採如圖14、15所示的低頻率驅動方式。Applying the two-phase high-frequency driving voltage as shown in FIG. 10 to the piezoelectric actuator 227 or the single-phase high-frequency driving voltage shown in FIGS. 12 and 13 can generate a higher driving speed. When higher positioning accuracy is required, the low frequency driving method as shown in Figs.

參閱圖14、15,當對所述壓電致動器227施加如圖14所示的低頻率驅動電壓時,即會使該驅動機構221的接觸件224對應地產生如圖15所示的運動軌跡。當在圖14的(a)點位置時,所述壓電致動器227所受驅動電壓為零,因此,該驅動機構221的接觸件224是如圖15(a)所示未產生變形;隨著由圖14的(a)點位置至(b)點位置,所述壓電致動器227受到相同的負驅動電壓,而產生相同的變形量,使該驅動機構221的接觸件224如圖15(b)所示向外凸伸;而當由圖14的(b)點位置至(c)點位置時,圖15(b)中左側壓電致動器227持續受到負驅動電壓,而圖15(b)中右側壓電致動器227所受的負驅動電壓逐漸減少至0,使該驅動機構221的接觸件224如圖15(c)所示向右上凸伸,而推動圖11中的該被動件4向右移動一小步;最後再由圖14的(c)點位置到(a)點位置,圖15(c)中左側壓電致動器227所受的負驅動電壓逐漸減少至0,而圖15(c)中右側壓電致動器227則保持0電壓,使該驅動機構221的接觸件224回復至如圖15(a)所示位置。經過如圖14中(a)、(b)、(c)、(a)之驅動電壓的時序變化,即可使被動件4進行如尺蠖式馬達一樣之低移動速度且高位移解析度的移動。Referring to Figures 14 and 15, when a low frequency driving voltage as shown in Fig. 14 is applied to the piezoelectric actuator 227, the contact 224 of the driving mechanism 221 is caused to correspondingly generate the motion as shown in Fig. 15. Track. When the position of the (a) point of FIG. 14 is that the piezoelectric actuator 227 is subjected to a driving voltage of zero, the contact member 224 of the driving mechanism 221 is not deformed as shown in FIG. 15(a); With the position from the (a) point to the (b) point of FIG. 14, the piezoelectric actuator 227 receives the same negative driving voltage, and generates the same amount of deformation, so that the contact 224 of the driving mechanism 221 is as 15(b) is outwardly convex; and when from the point (b) to the position (c) of FIG. 14, the left piezoelectric actuator 227 in FIG. 15(b) continues to receive a negative driving voltage. The negative driving voltage of the right piezoelectric actuator 227 in FIG. 15(b) is gradually reduced to 0, so that the contact member 224 of the driving mechanism 221 protrudes upward to the right as shown in FIG. 15(c), and the driving diagram is pushed. The passive member 4 in 11 moves to the right for a small step; finally, from the position (c) of Fig. 14 to the position of (a), the negative drive of the left piezoelectric actuator 227 in Fig. 15(c). The voltage is gradually reduced to 0, and the right piezoelectric actuator 227 in Fig. 15(c) maintains a voltage of 0, causing the contact 224 of the drive mechanism 221 to return to the position shown in Fig. 15(a). After the timing change of the driving voltages of (a), (b), (c), and (a) of FIG. 14, the passive member 4 can be moved at a low moving speed and high displacement resolution like a ruler motor. .

參閱圖16,本發明超音波馬達的第二較佳實施例大致是與該第一較佳實施例相同,不相同的地方在於:該被動件4是一可相對該定子2轉動的轉子,由於本較佳實施例大致與該第一較佳實施例相同,因此,除了可以達成該第一較佳實施例的功效外,利用如上述對所述壓電致動器227施加雙相高頻驅動電壓、單相高頻驅動電壓,或是低頻率驅動電壓,即能利用該驅動機構221之接觸件224的運動軌跡驅動該被動件4依據圖16中的箭頭方向轉動。Referring to Figure 16, the second preferred embodiment of the ultrasonic motor of the present invention is substantially the same as the first preferred embodiment, except that the passive member 4 is a rotor rotatable relative to the stator 2 due to The preferred embodiment is substantially the same as the first preferred embodiment, and therefore, in addition to the effect of the first preferred embodiment, the two-phase high frequency drive is applied to the piezoelectric actuator 227 as described above. The voltage, the single-phase high-frequency driving voltage, or the low-frequency driving voltage can drive the passive member 4 to rotate according to the direction of the arrow in FIG. 16 by the trajectory of the contact member 224 of the driving mechanism 221 .

參閱圖17,本發明超音波馬達的第三較佳實施例大致是與該第一較佳實施例相同,不相同的地方在於:超音波馬達包含4個定子2,而該被動件4是一環繞所述定子2的轉動環,利用如上述對所述定子2的壓電致動器227施加雙相高頻驅動電壓、單相高頻驅動電壓,或是低頻率驅動電壓,即能利用該驅動機構221之接觸件224的運動軌跡驅動該轉子依據圖17中的箭頭方向轉動。Referring to Figure 17, a third preferred embodiment of the ultrasonic motor of the present invention is substantially the same as the first preferred embodiment. The difference is that the ultrasonic motor includes four stators 2, and the passive member 4 is a The rotating ring surrounding the stator 2 can be utilized by applying a two-phase high-frequency driving voltage, a single-phase high-frequency driving voltage, or a low-frequency driving voltage to the piezoelectric actuator 227 of the stator 2 as described above. The trajectory of the contact 224 of the drive mechanism 221 drives the rotor to rotate in accordance with the direction of the arrow in FIG.

綜上所述,本發明超音波馬達的定子2及運用該定子2的超音波馬達,藉由概呈半橢圓環狀的驅動機構221與該固定座21是一體成型的設計,可以提高該驅動機構221的強度避免因外力而產生變形,同時還可以簡化該定子2的結構,以降低製造組裝的複雜度與成本並減少組裝誤差的產生,進而提高該驅動機構221驅動該被動件4的精準度,故確實能達成本發明之目的。In summary, the stator 2 of the ultrasonic motor of the present invention and the ultrasonic motor using the stator 2 can be improved by the design of the semi-elliptical annular drive mechanism 221 and the fixed seat 21 The strength of the mechanism 221 avoids deformation due to external force, and the structure of the stator 2 can be simplified, thereby reducing the complexity and cost of manufacturing assembly and reducing the assembly error, thereby improving the accuracy of the driving mechanism 221 driving the passive component 4. Therefore, the object of the present invention can be achieved.

惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定本發明實施之範圍,即大凡依本發明申請專利範圍及發明說明內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent.

2...定子2. . . stator

21...固定座twenty one. . . Fixed seat

211...安裝部211. . . Installation department

212...定位部212. . . Positioning department

22...驅動單元twenty two. . . Drive unit

221...驅動機構221. . . Drive mechanism

222...內環面222. . . Inner annulus

223...外環面223. . . Outer torus

224...接觸件224. . . Contact

225...連接部225. . . Connection

226...耐磨部226. . . Wear part

227...壓電致動器227. . . Piezoelectric actuator

228...第一端228. . . First end

229...第二端229. . . Second end

3...基座3. . . Pedestal

4...被動件4. . . Passive part

5...推動單元5. . . Push unit

51...固定塊51. . . Fixed block

52...彈性推抵機構52. . . Elastic push mechanism

521...外筒521. . . Outer tube

522...推桿522. . . Putt

523...壓縮彈簧523. . . compressed spring

L1...長軸L1. . . Long axis

L2...短軸L2. . . Short axis

圖1是一立體分解圖,說明中華民國公告第M286995號「超音波馬達」新型專利;Figure 1 is an exploded perspective view showing the new patent of the "Supersonic Motor" of the Republic of China Announcement No. M286995;

圖2是一示意圖,輔助說明圖1;Figure 2 is a schematic view, assistance to illustrate Figure 1;

圖3是一立體圖,說明本發明超音波馬達的定子之較佳實施例;Figure 3 is a perspective view showing a preferred embodiment of the stator of the ultrasonic motor of the present invention;

圖4是一立體圖,說明本發明超音波馬達之第一較佳實施例;Figure 4 is a perspective view showing a first preferred embodiment of the ultrasonic motor of the present invention;

圖5是一示意圖,說明該定子的法向振動模態;Figure 5 is a schematic view showing the normal vibration mode of the stator;

圖6是一示意圖,說明該定子的切向振動模態;Figure 6 is a schematic view showing the tangential vibration mode of the stator;

圖7是一響應圖,說明該定子工作點的位移與自然頻率間的關係;Figure 7 is a response diagram illustrating the relationship between the displacement of the stator operating point and the natural frequency;

圖8是一曲線圖,說明該定子之法向振動模態與切向振動模態的自然頻率與該驅動結構之長、短軸比值間的關係;Figure 8 is a graph illustrating the relationship between the natural frequency of the normal vibration mode and the tangential vibration mode of the stator and the ratio of the long and short axes of the drive structure;

圖9是一示意圖,說明該定子在受到雙相高頻驅動電壓時的變形軌跡順序;Figure 9 is a schematic view showing the sequence of deformation trajectories of the stator when subjected to a two-phase high-frequency driving voltage;

圖10是一示意圖,說明該定子受到雙相高頻驅動電壓時的動作順序;Figure 10 is a schematic view showing the sequence of operations when the stator is subjected to a biphasic high frequency driving voltage;

圖11是一示意圖,說明該超音波馬達的等效結構;Figure 11 is a schematic view showing the equivalent structure of the ultrasonic motor;

圖12是一示意圖,說明該定子的其中一壓電致動器受到單相高頻驅動電壓時的動作順序;Figure 12 is a schematic view showing the sequence of operations when one of the piezoelectric actuators of the stator is subjected to a single-phase high-frequency driving voltage;

圖13是一示意圖,說明該定子的另一壓電致動器受到單相高頻驅動電壓時的動作順序;Figure 13 is a schematic view showing the sequence of operations when another piezoelectric actuator of the stator is subjected to a single-phase high-frequency driving voltage;

圖14是一信號圖;說明施加於該定子之所述壓電致動器上之一低頻驅動電壓的型態;Figure 14 is a signal diagram showing the mode of a low frequency driving voltage applied to the piezoelectric actuator of the stator;

圖15是一示意圖,說明該定子受到低頻驅動電壓時的動作順序;Figure 15 is a schematic view showing the sequence of operations when the stator is subjected to a low frequency driving voltage;

圖16是一示意圖,說明本發明超音波馬達之第二較佳實施例;及Figure 16 is a schematic view showing a second preferred embodiment of the ultrasonic motor of the present invention; and

圖17是一示意圖,說明本發明超音波馬達之第三較佳實施例。Figure 17 is a schematic view showing a third preferred embodiment of the ultrasonic motor of the present invention.

2...定子2. . . stator

21...固定座twenty one. . . Fixed seat

211...安裝部211. . . Installation department

212...定位部212. . . Positioning department

22...驅動單元twenty two. . . Drive unit

221...驅動機構221. . . Drive mechanism

222...內環面222. . . Inner annulus

223...外環面223. . . Outer torus

224...接觸件224. . . Contact

225...連接部225. . . Connection

226...耐磨部226. . . Wear part

227...壓電致動器227. . . Piezoelectric actuator

228...第一端228. . . First end

229...第二端229. . . Second end

L1...長軸L1. . . Long axis

L2...短軸L2. . . Short axis

Claims (9)

一種超音波馬達的定子,包含:一固定座;及一驅動單元,包括一與該固定座一體成型且概呈半橢圓環狀的驅動機構,及兩個間隔設置於該固定座與該驅動機構之間的壓電致動器,其中,每一個壓電致動器具有一頂抵於該驅動機構上的第一端,及一相反於該第一端而頂抵於該固定座上的第二端。A stator of an ultrasonic motor comprising: a fixing base; and a driving unit comprising a driving mechanism integrally formed with the fixing seat and having a substantially semi-elliptical ring shape, and two spacers disposed on the fixing base and the driving mechanism Piezoelectric actuators, wherein each piezoelectric actuator has a first end that abuts against the drive mechanism, and a second opposite the first end that abuts against the mount end. 根據申請專利範圍第1項所述超音波馬達的定子,其中,該固定座具有一安裝部,及一自該安裝部向外凸出的定位部,而該驅動機構的兩端是一體連設於該安裝部上,所述壓電致動器的每一個第一端是頂抵於該驅動機構上,而每一個第二端是頂抵於該定位部上。The stator of the ultrasonic motor according to the first aspect of the invention, wherein the fixing base has a mounting portion and a positioning portion protruding outward from the mounting portion, and the two ends of the driving mechanism are integrally connected On the mounting portion, each of the first ends of the piezoelectric actuators is abutted against the driving mechanism, and each of the second ends is abutted against the positioning portion. 根據申請專利範圍第2項所述超音波馬達的定子,其中,該驅動機構具有相間隔的一內環面與一外環面,及一凸出於該外環面上的接觸件,其中,所述壓電致動器的每一個第一端是頂抵於該驅動機構的內環面上。The stator of the ultrasonic motor according to the second aspect of the invention, wherein the driving mechanism has an inner annular surface and an outer annular surface, and a contact protruding from the outer annular surface, wherein Each of the first ends of the piezoelectric actuators is abutted against an inner annular surface of the drive mechanism. 根據申請專利範圍第3項所述超音波馬達的定子,其中,該驅動機構的接觸件具有一個一體連設於該外環面上的連接部,及一設置於該連接部上的耐磨部。The stator of the ultrasonic motor according to claim 3, wherein the contact member of the driving mechanism has a connecting portion integrally connected to the outer ring surface, and a wear portion disposed on the connecting portion . 根據申請專利範圍第1至4項中任一項所述超音波馬達的定子,其中,該概呈半橢圓環狀的驅動機構之長軸與短軸的比值是介於1.9~2.1之間。The stator of the ultrasonic motor according to any one of claims 1 to 4, wherein the ratio of the major axis to the minor axis of the substantially semi-elliptical ring drive mechanism is between 1.9 and 2.1. 一種超音波馬達,包含:一基座;一被動件,可活動地設置於該基座上;至少一定子,包括一可拆卸地設置於該基座上的固定座,及一與該固定座一體連設的驅動單元,其中,該驅動單元包括一與該固定座一體成型且概呈半橢圓環狀的驅動機構,及兩個間隔設置於該固定座與該驅動機構之間的壓電致動器,其中,每一個壓電致動器具有一頂抵於該驅動機構上的第一端,及一相反於該第一端而頂抵於該固定座上的第二端;以及一推動單元,包括一可拆卸地設置於該基座上的固定塊,及一活動地穿置於該固定塊中並推抵於該固定座的彈性推抵機構;所述壓電致動器通電後能使該驅動機構產生變形,而驅動該被動件相對該固定座運動。An ultrasonic motor comprising: a base; a passive member movably disposed on the base; at least a stator, including a fixed seat detachably disposed on the base, and a fixed seat An integrated driving unit, wherein the driving unit comprises a driving mechanism integrally formed with the fixing seat and having a substantially semi-elliptical ring shape, and two piezoelectric plates spaced apart between the fixing base and the driving mechanism The piezoelectric actuator has a first end abutting against the driving mechanism, and a second end opposite to the first end against the fixing seat; and a pushing unit The utility model comprises a fixing block detachably disposed on the base, and an elastic pushing mechanism movably inserted in the fixing block and pushing against the fixing seat; the piezoelectric actuator can be energized The drive mechanism is deformed to drive the passive member to move relative to the fixed seat. 根據申請專利範圍第6項所述之超音波馬達,其中,該固定座具有一可拆卸地設置於該基座上的安裝部,及一自該安裝部向該被動件方向凸出的定位部,而該驅動機構的兩端是一體連設於該安裝部上並具有相間隔的一內環面與一外環面,及一凸出於該外環面並觸抵於該被動件上的接觸件,所述壓電致動器的每一個第一端是頂抵於該驅動件的內環面上,而每一個第二端是頂抵於該定位部上。The ultrasonic motor according to claim 6, wherein the fixing base has a mounting portion detachably disposed on the base, and a positioning portion protruding from the mounting portion toward the passive member And the two ends of the driving mechanism are integrally connected to the mounting portion and have an inner annular surface and an outer annular surface, and a protruding from the outer annular surface and contacting the passive member And a contact member, each of the first ends of the piezoelectric actuator is abutted against an inner annular surface of the driving member, and each of the second ends is abutted against the positioning portion. 根據申請專利範圍第7項所述之超音波馬達,其中,該概呈半橢圓環狀的驅動機構之長軸與短軸的比值是介於1.9~2.1之間,且該驅動機構的接觸件具有一個一體連設於該外環面上的連接部,及一設置於該連接部上並觸抵該被動件的耐磨部。 The ultrasonic motor according to claim 7, wherein the ratio of the major axis to the minor axis of the semi-elliptical ring-shaped driving mechanism is between 1.9 and 2.1, and the contact of the driving mechanism The utility model has a connecting portion integrally connected to the outer ring surface, and a wear portion disposed on the connecting portion and contacting the passive member. 根據申請專利範圍第8項所述之超音波馬達,其中,該推動單元的彈性推抵機構具有一螺旋穿置於該固定塊中的外筒、一穿置於該外筒中並推頂於該固定座之安裝部的推桿,及一兩端分別頂抵於該外筒與該推桿上的壓縮彈簧。The ultrasonic motor of claim 8, wherein the elastic pushing mechanism of the pushing unit has an outer cylinder that is threaded into the fixing block, is placed in the outer cylinder, and is pushed into the outer cylinder. The push rod of the mounting portion of the fixing seat and a pair of two ends respectively abut against the outer tube and the compression spring on the push rod.
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TWM286995U (en) * 2005-10-19 2006-02-01 Univ Nat Kaohsiung Applied Sci Ultrasonic motor
TWI327813B (en) * 2006-12-14 2010-07-21 Univ Nat Kaohsiung Applied Sci Linear ultrasonic motor

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM286995U (en) * 2005-10-19 2006-02-01 Univ Nat Kaohsiung Applied Sci Ultrasonic motor
TWI327813B (en) * 2006-12-14 2010-07-21 Univ Nat Kaohsiung Applied Sci Linear ultrasonic motor

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