TW200825123A - Flexible light guide and laminate board for optical/electrical composite wiring board - Google Patents

Flexible light guide and laminate board for optical/electrical composite wiring board Download PDF

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TW200825123A
TW200825123A TW096125271A TW96125271A TW200825123A TW 200825123 A TW200825123 A TW 200825123A TW 096125271 A TW096125271 A TW 096125271A TW 96125271 A TW96125271 A TW 96125271A TW 200825123 A TW200825123 A TW 200825123A
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optical waveguide
resin
core layer
layer
optical
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TW096125271A
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Chinese (zh)
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TWI415877B (en
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Masatoshi Yuasa
Kiwamu Tokuhisa
Koji Nakamura
Tomofumi Jin
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Nippon Steel Chemical Co
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/1221Basic optical elements, e.g. light-guiding paths made from organic materials
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13Integrated optical circuits characterised by the manufacturing method
    • G02B6/138Integrated optical circuits characterised by the manufacturing method by using polymerisation
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0274Optical details, e.g. printed circuits comprising integral optical means
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0393Flexible materials

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Organic Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Medicinal Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Optical Integrated Circuits (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)

Abstract

A flexible optical/electrical composite wiring board excelling in repeated flexure and ensuring high reliability is obtained through combining of a light guide of polyimide resin with a flexible copper-clad laminate. The light guide has a cladding layer and a core layer. The cladding layer is formed from a light guide material composed mainly of a siloxane-modified polyimide resin. The core layer is formed from a light guide material exhibiting a refractive index different from that of the cladding layer. A material composed mainly of a siloxane-modified polyimide resin is suitable as the light guide material for the core layer. Use of a resin composition containing a photosensitive resin as the light guide material for the core layer would enable easily forming of desired pattern. The optical/electrical composite wiring board can be obtained by superimposing a cladding layer and a core layer on a flexible printed wiring board so that the core layer is surrounded by the cladding layer.

Description

200825123 九、發明說明 【發明所屬之技術領域】 本發明係關於聚醯亞胺樹脂系之材料所形成之具有可 撓性的光波導及形成此光波導的光-電複合配線板用層合 板。 【先前技術】[Technical Field] The present invention relates to a flexible optical waveguide formed of a material of a polyimide resin-based material and a laminate for an optical-electric composite wiring board forming the optical waveguide. [Prior Art]

# 近年來,可高速且大容量數據通訊的光通訊技術進步 顯著,且其光通訊網亦持續擴大。光通訊技術現在已被使 用於長距離通訊和地域內的中距離通訊,但今後則欲應用 於機器內部和機器間的光信號傳送。 於攜帶用機器和小型機器等中,因爲各種構件爲緻密 配置,故必須穿行於構件間的狹窄間隙進行配線。因此, 廣泛使用可撓性印刷配線板作爲電性配線。同樣地,爲了 於此些機器內部和機器間等之短距離傳送光信號,乃期望 可撓性光波導所構成的光配線板(光電路配線板)。 因此,期待開發出此些可撓性光波導所構成的光配線 板與可撓性印刷配線板所構成的電配線板爲一體化的可撓 性光-電複合配線板。 已提案數種使用於光-電複合配線板的光波導材料。 〔專利文獻1〕特開2006-22317號公報 〔專利文獻2〕特開2004-149724號公報 〔專利文獻3〕特開2005-43497號公報 專利文獻1爲指導將光硬化型及熱硬化型環氧樹脂薄 -5- 200825123 膜硬化所形成的光波導。由於此光波導材料爲經由硬化反 應形成交聯構造,故可撓性不夠充分,特別難以應用於行 動電話等之絞鏈部般之必須有耐重複彎曲性的部分。又, 由於環氧樹脂特有的高度吸水率,故擔心於高溫一高濕狀 態的特性惡化。# In recent years, the optical communication technology for high-speed and large-capacity data communication has made remarkable progress, and its optical communication network has continued to expand. Optical communication technology has now been used for long-distance communication and medium-range communication in the region, but in the future it will be applied to optical signal transmission between the inside of the machine and between machines. In portable devices, small machines, and the like, since various members are densely arranged, it is necessary to pass through a narrow gap between the members for wiring. Therefore, a flexible printed wiring board is widely used as an electrical wiring. Similarly, an optical wiring board (optical circuit wiring board) composed of a flexible optical waveguide is desired for transmitting optical signals within a short distance between the inside of the machine and the machine. Therefore, it has been desired to develop a flexible optical-electric composite wiring board in which an optical wiring board composed of such a flexible optical waveguide and an electrical wiring board formed of a flexible printed wiring board are integrated. Several optical waveguide materials have been proposed for use in optical-electric composite wiring boards. [Patent Document 1] JP-A-2004-149724 (Patent Document 3) JP-A-2005-43497 (Patent Document 3) discloses a photocurable type and a thermosetting ring. Oxygen resin thin -5 - 200825123 Optical waveguide formed by film hardening. Since the optical waveguide material forms a crosslinked structure via a hardening reaction, the flexibility is insufficient, and it is particularly difficult to apply to a portion of the hinge portion of a mobile phone or the like which must have repeatability. Further, since the epoxy resin has a high water absorption rate, it is feared that the characteristics of the high temperature and high humidity state deteriorate.

專利文獻2爲提案使用聚醯亞胺樹脂的光波導。此光 波導材料由於在聚醯亞胺構造中含有氟,故進行與可撓性 印刷配線基板的複合化時,擔心與可撓性基板界面的密黏 性差。又’氟系材料一般爲昂貴,於實用化時不利於費用 面。專利文獻3爲提案將上部覆蓋層作爲二層的光波導, 因係爲無機系材料故柔軟性差。 【發明內容】 (發明所欲解決之課題) 本發明爲鑑於上述問題點而完成者,爲了令可撓性光 φ -電複合配線板可實用化,乃以提供柔軟性(低彈性)、 且低吸水性之聚醯亞胺樹脂所形成的光波導及具備此光波 、 導,且重複彎曲性、信賴性優良之光-電複合配線板用層 合板爲其目的。 (解決課題之手段) 本發明者等人發現經由使用具有特定構造之聚醯亞胺 樹脂,則可達成上述目的,並且達到完成本發明。 即,本發明爲於具有覆蓋層和核心層的光波導中,覆 -6 - 200825123 蓋層爲使用具有下述一般式(1)及(2)所示之構成單位 的聚醯亞胺樹脂作爲主成分的光波導材料所形成 之具有可撓性的光波導。 【化1】 Ο 0Patent Document 2 is an optical waveguide in which a polyimide resin is proposed. Since the optical waveguide material contains fluorine in the polyimine structure, when it is composited with the flexible printed wiring board, it is likely to be inferior in adhesion to the flexible substrate interface. Further, the fluorine-based material is generally expensive, and it is disadvantageous in terms of cost when it is put into practical use. Patent Document 3 proposes an optical waveguide in which the upper cladding layer is a two-layer optical layer, and is inferior in flexibility because it is an inorganic material. [Problem to be Solved by the Invention] The present invention has been made in view of the above problems, and in order to make the flexible optical φ-electric composite wiring board practical, it provides flexibility (low elasticity) and An optical waveguide formed of a polyimide resin having a low water absorption property, and a laminate for an optical-electric composite wiring board having such light wave and conductivity and having excellent repeatability and reliability. (Means for Solving the Problem) The inventors of the present invention have found that the above object can be attained by using a polyimine resin having a specific structure, and the present invention has been accomplished. That is, in the present invention, in the optical waveguide having the cover layer and the core layer, the cover layer of the -6 - 200825123 is a polyimine resin having a constituent unit represented by the following general formulas (1) and (2). A flexible optical waveguide formed of an optical waveguide material of a main component. 【化1】 Ο 0

【化2】[Chemical 2]

(3) (4) # (5) (但,An及Ah爲獨立表示式(3 )所示之四價芳香族基 ,Ars爲表示式(4 )或式(5 )所示之二價芳香族基’ R〗 爲獨立表示碳數1〜6個之一價烴基,R3爲獨立表示碳數 2〜6個之二價烴基,汉4爲獨立表示碳數1〜6個之一價烴 基,X及Y爲獨立袠示單鍵或由碳數1〜15個之一價烴基 、0、S、CO、S02^ c〇nh所選出之二價基,111爲表示1 〜5〇之數,η爲獨立表示〇〜4之整數,p及q爲表不各 200825123 構成單位的存在莫耳比,P爲0.05〜0.99之範圍,q爲 0.01〜0.95之範圍)。 本發明之光波導爲滿足下列任一者以上爲佳。 1)核心層爲使用與覆蓋層不同折射率之上述光波導 材料所形成。 2 )聚醯亞胺樹脂的彈性率爲0.2〜3.0 GPa之範圍。(3) (4) # (5) (However, An and Ah are independent expressions of the tetravalent aromatic group represented by formula (3), and Ars is a divalent aromatic group represented by formula (4) or formula (5) The group base 'R〗 is independently represented by a carbon number of 1 to 6 one-valent hydrocarbon groups, R3 is a divalent hydrocarbon group independently representing 2 to 6 carbon atoms, and Han 4 is an independently represented hydrocarbon group having 1 to 6 carbon atoms. X and Y are independently shown as a single bond or a divalent group selected from a carbon number of 1 to 15 one-valent hydrocarbon groups, 0, S, CO, S02^c〇nh, and 111 is a number representing 1 to 5〇, η is an integer representing 〇~4, and p and q are the molar ratios of the constituent units of 200825123, P is a range of 0.05 to 0.99, and q is a range of 0.01 to 0.95. The optical waveguide of the present invention is preferably one or more of the following. 1) The core layer is formed using the above optical waveguide material having a refractive index different from that of the cover layer. 2) The elastic modulus of the polyimide resin is in the range of 0.2 to 3.0 GPa.

3 )形成核心層及覆蓋層之光波導材料的折射率差△ 爲〇 . 0 1以上。 4 )光波導爲具有核心層和覆蓋核心層周圍的覆蓋層 ,且覆蓋層的折射率爲低於核心層。 又,本發明爲將上述之光波導,於可撓性貼銅層合板 上,或可撓性配線板上形成爲其特徵的光-電複合配線板 用層合板或光-電複合可撓性配線板。此處,可撓性貼銅 層合板爲意指形成電路前的層合體,且可撓性配線板爲意 指形成電路的配線板。電路爲經由將可撓性貼銅層合板之 銅箱層予以餓刻則可形成。 本發明之光波導爲具有核心層和覆蓋層。覆蓋層爲使 用具有上述一般式(1)及(2)所示之構造單位的聚醯亞 胺樹脂(以下,亦稱爲矽氧烷改質聚醯亞胺樹脂)作爲主 成分的光波導材料所形成。 本發明所使用之矽氧烷改質聚醯亞胺樹脂爲具有上述 一般式(1)及(2)所示之構造單位。 於一般式(1 )及(2 )中,ΑΓι及Ar2爲獨立表示式 (3 )所示之四價芳香族基,An爲表示式(4 )或式(5 )3) The refractive index difference Δ of the optical waveguide material forming the core layer and the cladding layer is 〇. 0 1 or more. 4) The optical waveguide has a core layer and a cover layer covering the core layer, and the cover layer has a lower refractive index than the core layer. Moreover, the present invention is a laminate for an optical-electric composite wiring board or an optical-electric composite flexible member in which the optical waveguide described above is formed on a flexible copper-clad laminate or a flexible wiring board. Wiring board. Here, the flexible copper clad laminate means a laminate before forming a circuit, and the flexible wiring board is a wiring board which means a circuit. The circuit can be formed by starving the copper box layer of the flexible copper-clad laminate. The optical waveguide of the present invention has a core layer and a cover layer. The cover layer is an optical waveguide material using a polyimine resin having a structural unit represented by the above general formulas (1) and (2) (hereinafter, also referred to as a decane-modified polyimine resin) as a main component. Formed. The alkane-modified polyimine resin used in the present invention has the structural unit represented by the above general formulas (1) and (2). In the general formulae (1) and (2), ΑΓι and Ar2 are independent expressions of the tetravalent aromatic group represented by the formula (3), and An is represented by the formula (4) or (5).

200825123200825123

所示之二價芳香族基,r3爲獨立表示碳數2 烴基,R4爲獨立表示碳數1〜6個之一價烴 1〜50之數。此處,一個構成單位中存在複 之情況,亦可分別於上述範圍中獨立變化。 存在數個構成單位時,Ari、Ar2、Ar3、R3-於上述範圍中獨立變化。又,矽氧烷改質聚 由數個分子所構成時,亦可令各分子分別於 立變化。更且,關於以下說明之Y及X、R 於式(3)、式(4)及式(5)中,X2 示單鍵、或由碳數1〜15個之二價烴基、Ο 或CONH所選出之二價基,I爲獨立表示g 一價烴基,η爲表示0〜4之整數。如上述 )所示之二價芳香族基,且亦可爲式(5) 香族基,且亦可於一分子中或數個分子中具 An及Ar2爲式(3 )所示之四價基,聚 常經由芳香族四羧酸二酐等之芳香族四羧酸 所合成,故Am及Ar2可稱爲芳香族四羧酸 此,A r 1〜A r 2爲經由說明合成所使用之芳香 加以理解。但是,本發明所使用之矽氧烷改 脂,並非限定於經由此類合成方法所得的聚 又,Ar!及Ar2可爲相同或相異,且Ari或 個四價基所構成。The divalent aromatic group shown, r3 is independently a carbon number 2 hydrocarbon group, and R4 is independently a number of carbon atoms of 1 to 6 valence hydrocarbons 1 to 50. Here, the case where there is a constitutive unit may be independently changed in the above range. When there are several constituent units, Ari, Ar2, Ar3, and R3- independently change in the above range. Further, when the oxime is modified by a plurality of molecules, the molecules can be changed independently. Further, in the following description of Y and X, R, in the formula (3), the formula (4) and the formula (5), X2 represents a single bond, or a divalent hydrocarbon group having 1 to 15 carbon atoms, hydrazine or CONH The selected divalent group, I is independently a g-valent hydrocarbon group, and η is an integer representing 0 to 4. a divalent aromatic group as shown in the above), and may also be a fragrant group of the formula (5), and may have an An and Ar2 in one molecule or several molecules as a tetravalent group represented by the formula (3) Since the group is usually synthesized by an aromatic tetracarboxylic acid such as an aromatic tetracarboxylic dianhydride, Am and Ar2 can be referred to as an aromatic tetracarboxylic acid, and A r 1 to A r 2 are used for the synthesis. Aroma is understood. However, the decane reforming agent used in the present invention is not limited to the polycondensation obtained by such a synthesis method, and Ar! and Ar2 may be the same or different and composed of Ari or a tetravalent group.

於式(3)中,Y爲表示單鍵、碳數P :〜6個之二價 基,m爲表示 數R3 、 R4等 又,一分子中 ^ R4亦可分別 醯亞胺樹脂爲 上述範圍中獨 1及η亦同樣 之Υ爲獨立表 、S、CO、S〇2 數1〜6個之 ,Ar3爲式(4 所示之二價芳 有兩者。 醯亞胺樹脂通 類與二胺反應 類之殘基。因 族四羧酸類而 質聚醯亞胺樹 醯亞胺樹脂。 Ar2亦可由數 〜1 5個之二價 -9 - 200825123 烴基、Ο、S、CO、S〇2或CONH所選出之二價基。較佳 爲表τικ單鍵或由0、CO及S〇2所選出之一*價基。—^價煙 基較佳可列舉碳數1〜6個之伸烷基(包含亞烷基之意義 )、伸苯基。 將較佳提供An及Ar2之芳香族四羧酸類以酸二酐爲 代表加以說明。In the formula (3), Y represents a single bond, a carbon number P: ~6 of a divalent group, m represents a number of R3, R4, etc., and a molecule of R4 may also be a bismuth imine resin in the above range The same is true for the 1 and η, and the number is 1 to 6 for the S, CO, and S〇2, and the Ar3 is the divalent aromatic group of the formula (4). Residues of amine reaction type. Poly-imine iminoimine resin due to tetracarboxylic acid. Ar2 may also be from ~15 5 bis-9 - 200825123 Hydrocarbyl, hydrazine, S, CO, S〇2 Or the divalent group selected by CONH. Preferably, the table τικ single bond or one of the valence groups selected by 0, CO and S〇2. The valence of the smoky group is preferably a carbon number of 1 to 6 The alkyl group (inclusive of the meaning of the alkylene group) and the phenyl group are extended. The aromatic tetracarboxylic acid which preferably provides An and Ar2 is represented by acid dianhydride.

# 具體而言,較佳可列舉 2,2’,3,3’-、2,3,3’,4’-或 3,3’,4,4’-二苯酮四羧酸二酐、3,3’,4,4’-聯苯四羧酸二酐 、2,3’,3,4’-聯苯四羧酸二酐、2,2’,3,3’-聯苯四羧酸二酐 、3,3’,4,4’-二苯颯四羧酸酐、3,3’,4,4’-二苯醚四羧酸二 酐、2,3’,3,4’·二苯醚四羧酸二酐、雙(2,3-二羧苯基)醚 二酐等。又,亦可列舉 3,3”,4,4”-、2,3,3”,4”-或 2,2”,3,3”-p-三聯苯四羧酸二酐、2,2-雙(2,3-或3,4-二羧 苯基)·丙烷二酐、雙(2,3-或3,4-二羧苯基)甲烷二酐、 雙(2,3-或3,4-二羧苯基)礪二酐、1,1-雙(2,3_或3,4-二 羧苯基)乙烷二酐。 亦可提供An及Ar2之芳香族四羧酸類,共同使用其 他之四羧酸類。使用其他四羧酸時之使用量爲相對於全芳 香族四羧酸爲50莫耳%以下、較佳爲20莫耳%以下。 此類其他之四羧酸類以酸二酐型式例示。亦可列舉均 苯四甲酸二酐、2,3,5,6-環己烷二野、2,3,6,7-萘四羧酸二 酐、1,2,5,6-萘四羧酸二酐、1,4,5,8-萘四羧酸二酐、4,8-二甲基-1,2,3,5,6,7 -六氫化萘-1,2,5,6·四羧酸二酐、2,6-或 2,7-二氯化萘-1,4,5,8-四羧酸二酐、2,3,6,7-(或 1,4,5,8- -10· 200825123 )四氯化萘“,4,5,8-(或 2,3,6,7-)四羧酸二酐、2,3,8,9-、3,4,9,10-、4,5,10,11-或5,6,11,12-茈-四羧酸二酐、環 戊烷-1,2,3,4-四羧酸二酐、吡哄-2,3,5,6-四羧酸二酐、吡 咯烷-2,3,4,5-四羧酸二酐、噻吩-2,3,4,5-四羧酸二酐、 4,4-雙(2,3-二羧基苯氧基)二苯基甲烷二酐、1,2,7,8-、 1,2,6,7-或1,2,9,10-菲-四羧酸二酐、2,3,6,7-蒽四羧酸二 酐等。 _ 於一般式(1 )中,Ar3所示之二價芳香族基可稱爲二 胺的殘基。因此,Ar3或式(4 )及式(5 )中的X、R!及 η可經由說明合成所使用的二胺加以理解。又,一般式( 1 )所示之構成單位亦可由此二價芳香族基不同的數種構 成單位所形成。 X可同上述Υ,但亦可相異。X可列舉上述Υ所說明 者。較佳者爲單鍵、或由〇、s、co、so2、conh、ch2 、C(CH3)2及9,9’-芴基所選出之二價基。又’ 9,9’-芴基爲 φ 以下述式表示。 【化3】# Specifically, 2,2',3,3'-, 2,3,3',4'- or 3,3',4,4'-benzophenonetetracarboxylic dianhydride is preferably exemplified. 3,3',4,4'-biphenyltetracarboxylic dianhydride, 2,3',3,4'-biphenyltetracarboxylic dianhydride, 2,2',3,3'-biphenyltetracarboxylate Acid dianhydride, 3,3',4,4'-diphenyltetracarboxylic anhydride, 3,3',4,4'-diphenyl ether tetracarboxylic dianhydride, 2,3',3,4'· Diphenyl ether tetracarboxylic dianhydride, bis(2,3-dicarboxyphenyl) ether dianhydride, and the like. Further, 3, 3", 4, 4"-, 2, 3, 3", 4"- or 2, 2", 3, 3"-p-terphenyltetracarboxylic dianhydride, 2, 2 may also be mentioned. - bis(2,3- or 3,4-dicarboxyphenyl)-propane dianhydride, bis(2,3- or 3,4-dicarboxyphenyl)methane dianhydride, double (2,3- or 3 , 4-dicarboxyphenyl) phthalic anhydride, 1,1-bis(2,3_ or 3,4-dicarboxyphenyl)ethane dianhydride. An aromatic tetracarboxylic acid of An and Ar2 may also be provided, and other tetracarboxylic acids may be used in combination. When the other tetracarboxylic acid is used, it is used in an amount of 50 mol% or less, preferably 20 mol% or less based on the total aromatic tetracarboxylic acid. Such other tetracarboxylic acids are exemplified by the acid dianhydride form. Also included are pyromellitic dianhydride, 2,3,5,6-cyclohexane di wild, 2,3,6,7-naphthalenetetracarboxylic dianhydride, 1,2,5,6-naphthalene tetracarboxylic acid Acid dianhydride, 1,4,5,8-naphthalenetetracarboxylic dianhydride, 4,8-dimethyl-1,2,3,5,6,7-hexahydronaphthalene-1,2,5,6 ·Tetracarboxylic dianhydride, 2,6- or 2,7-dichloronaphthalene-1,4,5,8-tetracarboxylic dianhydride, 2,3,6,7- (or 1,4,5 ,8- -10· 200825123 )Tetrachlorinated naphthalene ",4,5,8-(or 2,3,6,7-)tetracarboxylic dianhydride, 2,3,8,9-,3,4, 9,10-, 4,5,10,11- or 5,6,11,12-fluorene-tetracarboxylic dianhydride, cyclopentane-1,2,3,4-tetracarboxylic dianhydride, pyridinium -2,3,5,6-tetracarboxylic dianhydride, pyrrolidine-2,3,4,5-tetracarboxylic dianhydride, thiophene-2,3,4,5-tetracarboxylic dianhydride, 4, 4-bis(2,3-dicarboxyphenoxy)diphenylmethane dianhydride, 1,2,7,8-, 1,2,6,7- or 1,2,9,10-phenanthrene-tetra The carboxylic acid dianhydride, the 2,3,6,7-decansic acid dianhydride, etc. _ In the general formula (1), the divalent aromatic group represented by Ar3 may be referred to as a residue of a diamine. X, R, and η in Ar3 or (4) and (5) can be understood by explaining the diamine used in the synthesis. Further, the constituent unit represented by the general formula (1) may be The valence aromatic group is formed by several constituent units. X may be the same as the above, but may be different. X may be as described above. Preferably, it is a single bond, or 〇, s, co, so2 The divalent group selected by conh, ch2, C(CH3)2 and 9,9'-fluorenyl. The '9,9'-fluorenyl group is represented by the following formula: [Chemical 3]

於含有X之二價芳香族基中’ Ri爲獨立表示碳數1〜 6個之一價烴基,較佳爲碳數1〜6個之院基、烯基、環 垸基或苯基。更佳爲碳數1〜3個之院基、乙燒基或苯基 。η爲表示〇〜4之整數’較佳爲0〜2 ’更佳爲〇。 -11 - 200825123 說明Ar3爲式(5 )所示之二價芳香族基時,提供較 佳Ar3的二胺。 具體而言,可列舉2,2-雙-〔4- ( 4-胺苯氧基)苯基〕 丙烷、2,2-雙-〔4_(3_胺苯氧基)苯基〕丙烷、雙〔4-( 4-胺苯氧基)苯基〕礪、雙〔4-(3-胺苯氧基)苯基〕颯 、雙〔4- ( 4_胺苯氧基)〕聯苯、雙〔4- ( 3-胺苯氧基) 聯苯、雙〔1-(4-胺苯氧基)〕聯苯、雙〔1-(3-胺苯氧 φ 基)〕聯苯、雙〔4- ( 4-胺苯氧基)苯基〕甲烷、雙〔4- (3-胺苯氧基)苯基〕甲烷、雙〔4- (4-胺苯氧基)苯基 〕醚、雙〔4-(3-胺苯氧基)苯基〕醚、雙〔4-(4-胺苯 氧基)苯基〕二苯酮、雙-〔4-(3 -胺苯氧基)二苯酮、 雙〔4- ( 4-胺苯氧基)〕二苯酮、雙〔4_ ( 3-胺苯氧基) 〕二苯酮、雙〔4,4’-(4 -胺苯氧基)〕苯醯苯胺、雙〔 4,4’-(3-胺苯氧基)〕苯醯苯胺、9,9-雙-〔4-(4-胺苯氧 基)苯基〕芴、9,9-雙-〔4- ( 3-胺苯氧基)苯基〕芴等。 φ 說明Ar3爲式(4 )所示之二價芳香族基時,提供較 佳Ar3的二胺。 , 具體而言,可列舉4,4’-亞甲基二-鄰-甲苯胺、4,4’- 亞甲基二-2,6-二甲苯胺、4,4’-亞甲基- 2,6-二乙基苯胺、 4,4’-二胺基二苯基丙烷、3,3’-二胺基二苯基丙烷、4,4、 二胺基二苯基乙烷、3,3’-二胺基二苯基乙烷、4,4’-二胺 基二苯基甲烷、3,3’_二胺基二苯基甲烷、4,4’-二胺基二 硫苯、3,3’-二胺基二硫苯、4,4’-二胺基二苯礪、3,3’-二 胺基二苯礪、4,4’-二胺基二苯醚、3,3’-二胺基二苯醚、 -12- 200825123 ,4 -一妝土〜苯醗、聯苯胺、3,3,·二胺基聯苯、3,3,-二 甲基-4,4’-〜胺基聯苯、3,3、二甲氧基聯苯胺、4,4,,_二胺 基_對_三聯苯、3,3'二胺基-對·三聯苯、9,9_雙(4_胺苯 基)-9H-芴等。 其中’亦以4,4、二胺基二苯醚(DAPE ) 、2,2-雙〔 4-(4-胺苯氧基)苯基〕丙烷、It雙〔4·(3_胺苯氧基 )苯基〕丙院、9,9_雙(4-胺苯基)-911-芴、1,3-雙(4-|| fe苯氧基)苯(TPE_R)等。上述以外之其他芳香族二胺 右爲少量(50莫耳%以下,較佳爲2〇莫耳%以下)則可 倂用。又,如2,2、二乙烯基-4,4,_二胺基-聯苯般之乙烯 基等之不飽和基爲經取代的二胺亦較佳使用。 此類其他之芳香族二胺可列舉例如,間-苯二胺、對_ 苯二胺、2,6-二胺基吡啶、1,4-雙(4-胺苯氧基)苯、1,3-雙(4-胺苯氧基)苯、4,4,-〔 1,4-伸苯基雙(1-甲基亞乙 基)〕雙苯胺、4,4,·〔1,3·伸苯基雙(1-甲基亞乙基)〕 @ 雙苯胺、雙(對-胺基環己基)甲烷、雙(對-/3 ·胺基-第 三丁基苯基)醚、雙(對甲基-6-胺戊基)苯、對-雙 - (2-甲基-4-胺戊基)苯、對-雙(1,1·二甲基胺戊基) • 苯、1,5-二胺基萘、2,6-二胺基萘、2,4-雙(Θ -胺基-第三 丁基)甲苯、2,4-二胺基甲苯、間-二甲苯-2,5_二胺、對_ 二甲苯_ 2,5 -二胺、間-二甲苯二胺、對-二甲本一胺、2,6 · 二胺基吡啶、2,5-二胺基吡啶、2,5-二胺基曙二哩 、哌畊等。 於一般式(2 )中,終端爲含有R3之政氧院構造的二 13-In the divalent aromatic group containing X, ' Ri is independently a hydrocarbon group having 1 to 6 carbon atoms, preferably a group having 1 to 6 carbon atoms, an alkenyl group, a cyclic fluorenyl group or a phenyl group. More preferably, the number of carbon atoms is 1 to 3, the alkyl group or the phenyl group. η is an integer ′ of 〇 〜4, preferably 0 〜 2 ′ is more preferably 〇. -11 - 200825123 When Ar3 is a divalent aromatic group represented by the formula (5), a preferred diamine of Ar3 is provided. Specific examples thereof include 2,2-bis-[4-(4-aminophenoxy)phenyl]propane, 2,2-bis-[4-(3-aminophenoxy)phenyl]propane, and a double [4-(4-Aminophenoxy)phenyl]anthracene, bis[4-(3-aminophenoxy)phenyl]anthracene, bis[4-(4-aminophenoxy)]biphenyl, double [4-(3-Aminophenoxy)biphenyl, bis[1-(4-aminophenoxy)]biphenyl, bis[1-(3-aminophenoxy)yl)biphenyl, bis[4 - (4-Aminophenoxy)phenyl]methane, bis[4-(3-aminophenoxy)phenyl]methane, bis[4-(4-aminophenoxy)phenyl]ether, bis[ 4-(3-Aminophenoxy)phenyl]ether, bis[4-(4-aminophenoxy)phenyl]benzophenone, bis-[4-(3-aminophenoxy)benzophenone , bis[4-(4-aminophenoxy)]benzophenone, bis[4-(3-aminophenoxy)]benzophenone, bis[4,4'-(4-aminophenoxy)] Benzoaniline, bis[4,4'-(3-aminophenoxy)]phenylanilide, 9,9-bis-[4-(4-aminophenoxy)phenyl]anthracene, 9,9- Bis-[4-(3-aminophenoxy)phenyl]anthracene. φ indicates that when Ar3 is a divalent aromatic group represented by the formula (4), a diamine of a preferred Ar3 is provided. Specifically, 4,4'-methylenebis-o-toluidine, 4,4'-methylenebis-2,6-dimethylaniline, 4,4'-methylene-2 ,6-diethylaniline, 4,4'-diaminodiphenylpropane, 3,3'-diaminodiphenylpropane, 4,4, diaminodiphenylethane, 3,3 '-Diaminodiphenylethane, 4,4'-diaminodiphenylmethane, 3,3'-diaminodiphenylmethane, 4,4'-diaminodithiobenzene, 3 , 3'-diaminodithiobenzene, 4,4'-diaminodiphenyl hydrazine, 3,3'-diaminodiphenyl hydrazine, 4,4'-diaminodiphenyl ether, 3,3 '-Diaminodiphenyl ether, -12- 200825123, 4-a makeup soil ~ benzoquinone, benzidine, 3,3, diaminobiphenyl, 3,3,-dimethyl-4,4' -~Aminobiphenyl, 3,3,dimethoxybenzidine, 4,4,,diamino-p-terphenyl, 3,3'diamino-p-terphenyl, 9,9_ Bis(4-aminophenyl)-9H-indole. Among them, '4,4,diaminodiphenyl ether (DAPE), 2,2-bis[4-(4-aminophenoxy)phenyl]propane, It bis [4·(3-aminophenoxy) Phenyl]phenyl], 9,9-bis(4-aminophenyl)-911-anthracene, 1,3-bis(4-||phenoxy)benzene (TPE_R), and the like. Other aromatic diamines other than the above may be used in a small amount (50 mol% or less, preferably 2 mol% or less). Further, an unsaturated group such as 2, 2, divinyl-4,4,-diamino-biphenyl-like vinyl group or the like is preferably a substituted diamine. Examples of such other aromatic diamines include, for example, m-phenylenediamine, p-phenylenediamine, 2,6-diaminopyridine, 1,4-bis(4-aminophenoxy)benzene, 1, 3-bis(4-aminophenoxy)benzene, 4,4,-[1,4-phenylenebis(1-methylethylidene)]diphenylamine, 4,4,·[1,3· Phenyl bis(1-methylethylidene) @ diphenylamine, bis(p-aminocyclohexyl)methane, bis(p-/3 ·amino-t-butylphenyl) ether, bis ( p-Methyl-6-aminepentyl)benzene, p-bis-(2-methyl-4-aminepentyl)benzene, p-bis(1,1·dimethylaminepentyl) • benzene, 1, 5-diaminonaphthalene, 2,6-diaminonaphthalene, 2,4-bis(fluorene-amino-t-butyl)toluene, 2,4-diaminotoluene, m-xylene-2, 5-diamine, p-xylene_ 2,5-diamine, m-xylylenediamine, p-dimethylamine, 2,6-diaminopyridine, 2,5-diaminopyridine, 2,5-diamino hydrazine, piperene, and the like. In the general formula (2), the terminal is a second 13- of the structure of the political oxygen institute containing R3.

200825123 價基,可稱爲二胺的殘基。因此,含有矽氧烷構造 基或一般式(2 )之R3、R4及m爲經由說明與上 合成所使用之含有矽氧烷構造的二胺加以理解。又 式(2)所示之構成單位亦可由含有此矽氧烷構造 基爲不同的數種構成單位所形成。 於一般式(2)之含有矽氧烷構造的二價基中 表不1〜50、較佳爲5〜30之數。此數値若未滿1 彈性率化(彎曲特性)小,若超過5 0,則與四羧 的反應性降低,且聚合物的分子量降低,故彎曲特 。R3爲表示碳數2〜6個之二價烴基,較佳爲碳婁 個之伸烷基。R4爲表示碳數1〜6個之烷基或苯基 爲甲基或苯基。 含有較佳之矽氧烷構造的二胺可列舉例如,ω (2-胺乙基)聚二甲基矽氧烷、ω,ω’-雙(3-胺丙 二甲基矽氧烷、ω,ω’-雙(4-胺苯基)聚二甲基矽 雙(3-胺丙基)聚二苯基矽氧烷、’-雙 丙基)聚二甲基苯基砍氧院等。 本發明所使用之矽氧烷改質聚醯亞胺樹脂爲具 式(1 )和(2 )所示之構成單位,一般式(1 )所 成單位的存在莫耳比q爲0.01〜0.95、較佳爲0.5〜 範圍。一般式(2)所示之構成單位的存在莫耳t丨 0.05〜0.99、較佳爲0.1〜0.8之範圍。此存在莫耳 矽氧烷改質聚醯亞胺樹脂爲僅由一般式(1 )和(2 之構成單位所構成時,或具有其他構成單位時均以 之二價 述同樣 ,一般 之二價 ,m爲 ,則低 酸二酐 性降低 ^ 2〜6 ,較佳 ,-雙 基)聚 氧烷、 (3,胺 有一般 示之構 〆0.8之 :Ρ爲 比,於 )所示 上述範 -14- 200825123 圍爲佳。另外,具有其他構成單位時,P + q爲0.5以上、 較佳爲0.8以上。又,p/ (p + q)爲〇·1〜〇·8之範圍爲佳 。本發明所使用之矽氧烷改質聚醯亞胺樹脂以其彈性率爲 0.2〜3.0GPa、較佳爲0.3〜3.0GPa之範圍爲佳。又,玻璃 態化溫度(Tg )爲120 °C以上、較佳爲140〜3 00 °C之範圍 爲佳。200825123 The valence group, which can be called the residue of a diamine. Therefore, R3, R4 and m containing a decane structure or a general formula (2) are understood to be understood from the description of the diamine structure containing a decane used in the above synthesis. Further, the constituent unit represented by the formula (2) may be formed of a plurality of constituent units containing the naphthene structural group. In the divalent group of the general formula (2) containing a decane structure, the number is from 1 to 50, preferably from 5 to 30. If the number is less than 1, the modulus of elasticity (bending property) is small, and if it exceeds 50, the reactivity with tetracarboxylic acid is lowered, and the molecular weight of the polymer is lowered, so that the bending property is particularly high. R3 is a divalent hydrocarbon group having 2 to 6 carbon atoms, preferably a carbon alkyl group. R4 is an alkyl group having 1 to 6 carbon atoms or a phenyl group being a methyl group or a phenyl group. Examples of the diamine having a preferred oxane structure include ω (2-aminoethyl) polydimethyl siloxane, ω, ω'-bis (3-aminopropyl dimethyl oxane, ω, Ω'-bis(4-aminophenyl)polydimethylindole bis(3-aminopropyl)polydiphenyl fluorene, '-dipropyl) polydimethylphenyl chopping house. The oxime-modified polyimine resin used in the present invention is a constituent unit represented by the formulae (1) and (2), and the molar ratio q of the unit of the general formula (1) is 0.01 to 0.95. It is preferably 0.5 to the range. The constituent unit represented by the general formula (2) has a molar ratio of from 0.05 to 0.99, preferably from 0.1 to 0.8. The presence of the molyoxime-modified polyimine resin is the same as that of the constituent units of the general formulas (1) and (2), or the other constituent units are the same as the two, and the general divalent , m is, the low acid dianhydride lowers ^ 2 ~ 6, preferably, - bis) polyoxyalkylene, (3, the amine has a general structure of 0.8: Ρ is ratio, as shown above) -14- 200825123 Wai is better. Further, when there are other constituent units, P + q is 0.5 or more, preferably 0.8 or more. Further, p/(p + q) is preferably in the range of 〇·1 to 〇·8. The alkane-modified polyimine resin used in the present invention preferably has a modulus of elasticity of 0.2 to 3.0 GPa, preferably 0.3 to 3.0 GPa. Further, the glass transition temperature (Tg) is preferably 120 ° C or higher, preferably 140 to 300 ° C.

本發明中,光波導之核心層亦可由矽氧烷改質聚醯亞 胺所形成,但於核心層有利使用以光微影法可形成任意形 狀圖型的感光性材料。此類感光性材料可列舉令具有下述 一般式(6)及一般式(7)所示之構成單位的聚醯胺酸樹 脂與具有不飽和鍵之單體及光聚合引發劑作爲主成分的感 光性樹脂組成物予以硬化所得的樹脂。本發明之光波導的 核心層,亦以令此感光性樹脂組成物硬化所得之樹脂爲佳 。以下,將此硬化所得之樹脂亦可稱爲矽氧烷改質交聯型 聚醯亞胺樹脂。 【化4】 (6) -N—4. ,Λ-Ν—Ar3-· HO-f Αη)!—OH -0 〇 _NJJ 2—HN—R3-4si-〇}-Si—R3- hS^Voh t r4 (7)In the present invention, the core layer of the optical waveguide may be formed of a fluorene-modified polyimine, but it is advantageous to use a photosensitive material which can form an arbitrary pattern by photolithography in the core layer. Examples of such a photosensitive material include a polyamic acid resin having a constituent unit represented by the following general formula (6) and general formula (7), a monomer having an unsaturated bond, and a photopolymerization initiator as a main component. A resin obtained by curing a photosensitive resin composition. The core layer of the optical waveguide of the present invention is preferably a resin obtained by curing the photosensitive resin composition. Hereinafter, the resin obtained by the hardening may also be referred to as a decane-modified cross-linked polyimine resin. (6) -N—4. ,Λ-Ν—Ar3-· HO-f Αη)!—OH -0 〇_NJJ 2—HN—R3-4si-〇}-Si—R3- hS^ Voh t r4 (7)

P 上述一般式(6)或一般式(7)中’ Ari、Ar2、R3、 及R4爲具有與上述一般式(1)及(2)同樣之意義,期 望以一般式(6)之Ar3(式(4)或式(5)所示之二價 -15- 200825123 芳香族基)中之1^或一般式(7)中之R4的一部分作爲 烯基,賦予光聚合性。烯基爲CH2 = CH-R6-所示之基,R6 爲表示直接鍵結、碳數1〜6個之伸烷基或伸苯基,但以 直接鍵結於反應性方面爲佳。P In the above general formula (6) or general formula (7), 'Ari, Ar2, R3, and R4 have the same meanings as the above general formulas (1) and (2), and it is desirable to use Ar3 of the general formula (6) ( A part of R4 in the divalent-15-200825123 aromatic group represented by the formula (4) or the formula (5) or R4 in the general formula (7) is an alkenyl group, and imparts photopolymerizability. The alkenyl group is a group represented by CH2 = CH-R6-, and R6 represents a direct bond, an alkyl group having 1 to 6 carbon atoms or a phenyl group, but it is preferably bonded directly to the reactivity.

# 具有不飽和鍵之單體可使用具有光聚合性的單體,於 透明性和折射率等方面,較佳可例示多官能丙烯酸酯等之 丙烯酸酯類。其使用量爲相對於聚醯胺酸樹脂1 00重量份 以1〜50重量份、較佳爲5〜40重量份之範圍。 矽氧烷改質聚醯亞胺樹脂可以公知之方法合成。例如 ,於有機溶劑中,令一種以上之芳香族四羧酸二酐與二種 以上之二胺以大約等莫耳之比例反應則可取得。 說明關於含有矽氧烷之聚醯亞胺樹脂之製造方法的一 例。首先,於溶劑中加入芳香族酸二酐,並且溶解。一邊 攪拌、一邊於氮氣圍氣下、冰冷下,慢慢加入含有矽氧烷 二胺之二種以上的二胺。其後攪拌反應2〜8小時則可取 得含有矽氧烷之聚醯胺酸樹脂溶液。上述溶劑必須對於芳 香族聚醯胺酸成分和矽氧烷成分兩者爲惰性。此種溶劑的 代表者爲二乙二醇二甲醚(diglyme )、二乙二醇二乙醚 、四氫呋喃等之醚系溶劑、和N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、N-甲基-2-吡咯烷酮、N-環己基-2-吡咯烷 酮等之醯胺系溶劑等,且此些溶劑可使用一種以上,並且 以二乙二醇二甲醚系溶劑含有10重量%以上、較佳爲30 重量%以上的溶劑爲適當。 將所得之含有矽氧烷的聚醯胺酸樹脂,以加熱處理或 -16- 200825123As the monomer having an unsaturated bond, a photopolymerizable monomer can be used, and in terms of transparency, refractive index, and the like, an acrylate such as a polyfunctional acrylate is preferable. The amount thereof is in the range of 1 to 50 parts by weight, preferably 5 to 40 parts by weight, per 100 parts by weight of the polyamic acid resin. The decane-modified polyimine resin can be synthesized by a known method. For example, in an organic solvent, one or more aromatic tetracarboxylic dianhydrides can be obtained by reacting two or more kinds of diamines in a ratio of about equimolar. An example of a method for producing a polyfluorene-containing resin containing a siloxane. First, an aromatic acid dianhydride is added to a solvent and dissolved. While stirring, two or more kinds of diamines containing a decane diamine were gradually added under a nitrogen atmosphere and under ice cooling. Thereafter, the reaction is stirred for 2 to 8 hours to obtain a polyamine resin solution containing a siloxane. The above solvent must be inert to both the aromatic polyphthalic acid component and the decane component. Representative of such solvents are diethylene glycol dimethyl ether (diglyme), diethylene glycol diethyl ether, tetrahydrofuran and the like ether solvent, and N,N-dimethylformamide, N,N-dimethyl a guanamine-based solvent such as acetalamine, N-methyl-2-pyrrolidone or N-cyclohexyl-2-pyrrolidone, and more than one of these solvents may be used, and a diethylene glycol dimethyl ether solvent may be used. A solvent containing 10% by weight or more, preferably 30% by weight or more is suitable. The resulting polyoxyphthalic acid resin containing a siloxane is heat treated or -16-200825123

β 脫水劑予以處理’則可脫水閉環,作成含有矽氧烷之聚醯 亞胺樹脂。則述加熱處理爲例如於氮氣圍氣中,以7 0〜 3 5 0 °C加熱2〜5小時則可進行。較佳爲於氮氛圍氣中,以 150°C 30分鐘、250°C 30分鐘、32〇°C 1小時之條件予以階 段性加熱。又,經由選擇二胺與四羧酸酐的組合,則可取 得於溶劑中可溶的聚醯亞胺樹脂,且預先予以脫水閉環後 ,於溶劑中溶解作成溶液亦可。含有矽氧烷之聚醯胺酸樹 脂的溶液黏度(二甲基乙醯胺溶液:濃度 25wt% )爲 2000〜5 0000cPa· s之範圍爲佳。 此時,經由調整反應原料的添加順序,則可取得分段 型或無規型之矽氧烷改質聚醯亞胺樹脂。又,經由令含有 矽氧烷構造之二胺的使用量變化,則可控制矽氧烷改質聚 醯亞胺樹脂的折射率。即,若增加含有矽氧烷構造之二胺 的使用量且令一般式(2)和一般式(7)所示之構造單位 增加,則發現折射率降低的現象。 本發明之光波導爲具有核心層和覆蓋層。通常,覆蓋 層爲覆蓋核心的周圍,且覆蓋層的光折射率爲低於核心層 。本發明之光波導爲至少覆蓋層爲由含有上述矽氧烷改質 聚醯亞胺樹脂作爲主成分的光波導材料所形成。核心層亦 可由不含有上述矽氧烷改質聚醯亞胺樹脂之光波導材料所 形成,但爲了賦予柔軟性,由含有此矽氧烷改質聚醯亞胺 樹脂、較佳爲其前體之感光性聚醯胺酸樹脂所生成之矽氧 烷改質交聯型聚醯亞胺樹脂作爲樹脂主成分之光波導材料 所形成爲佳。另外,矽氧烷改質交聯型聚醯亞胺樹脂,係 -17- 200825123 指其不飽和基爲與具有其他不飽和基之單體或樹脂反應所 生成的聚醯亞胺樹脂。此時,由一般式(2)所示之構成 單iu存在旲耳比多之含有矽氧烷改質聚醯亞胺樹脂的光波 導材料形成覆蓋層,且由至少含有矽氧烷改質聚醯亞胺樹 脂或砂氧院改質交聯型聚醯亞胺樹脂(存在莫耳比及聚醯 亞胺樹脂含量之計算爲以前體感光性之聚醯胺酸樹脂作爲 基準進行)之光波導材料形成核心層。以下,將形成覆蓋 0 層的光波導材料稱爲覆蓋材,形成核心層的光波導材料稱 爲核心材。含有矽氧烷改質聚醯亞胺樹脂之光波導材料的 折射率爲1.45〜1.65之範圍爲佳,且覆蓋材與核心材的 折射率差△爲0.01以上、較佳爲〇·〇2以上爲佳。 含有本發明之矽氧烷改質聚醯亞胺樹脂的光導波材料 可含有50wt%以上、較佳爲60wt%以上之矽氧烷改質聚醯 亞胺樹脂。矽氧烷改質聚醯亞胺樹脂以外之其他的配合材 料爲聚丙烯酸酯、環氧樹脂等之透明樹脂和微粉狀之二氧 (· 化矽等之充塡劑等。 形成核心層所較佳使用的感光性樹脂組成物爲以具有 . 上述一般式(6)及一般式(7)所示之構成單位的聚醯胺 . 酸樹脂和光聚合引發劑作爲主成分,且視需要含有丙烯酸 酯等之單體(亦可爲聚合性之樹脂成分)、增感劑及溶劑 等。使用此感光性樹脂組成物(較佳爲其溶液),令其光 硬化及醯亞胺化形成光波導的方法爲佳。另外,此時,聚 合後,含有矽氧烷之聚醯胺酸樹脂之至少一部分的乙烯基 爲與其他單體或樹脂的不飽和基反應,硬化後的樹脂稱爲 -18- 200825123 矽氧烷改質交聯型聚醯亞胺樹脂。When the β dehydrating agent is treated, it can be dehydrated and closed to form a polyfluorene-based resin containing a nonane. The heat treatment is carried out, for example, in a nitrogen atmosphere, and heating at 70 to 350 ° C for 2 to 5 hours. It is preferred to carry out stepwise heating in a nitrogen atmosphere at 150 ° C for 30 minutes, at 250 ° C for 30 minutes, and at 32 ° C for 1 hour. Further, by selecting a combination of a diamine and a tetracarboxylic anhydride, a polyimine resin which is soluble in a solvent can be obtained, and the mixture can be dehydrated and closed in advance, and then dissolved in a solvent to form a solution. The solution viscosity (dimethylammonium solution: concentration: 25 wt%) of the polyamidamide resin containing a siloxane is preferably in the range of 2,000 to 50,000 cPa·s. At this time, by adjusting the order of addition of the reaction raw materials, a segmented or random type of decane-modified polyimine resin can be obtained. Further, by changing the amount of use of the diamine containing a siloxane structure, the refractive index of the siloxane-modified polyimine resin can be controlled. In other words, when the amount of the diamine containing a siloxane structure is increased and the structural unit represented by the general formula (2) and the general formula (7) is increased, a phenomenon in which the refractive index is lowered is found. The optical waveguide of the present invention has a core layer and a cover layer. Typically, the cover layer covers the periphery of the core and the cover layer has a lower refractive index than the core layer. The optical waveguide of the present invention is formed by at least a coating layer comprising an optical waveguide material containing the above-mentioned decane-modified polyimine resin as a main component. The core layer may also be formed of an optical waveguide material which does not contain the above-mentioned decane-modified polyimine resin, but in order to impart flexibility, the phthalocyanine-modified polyimine resin is preferably contained, preferably its precursor The oxime-modified cross-linked polyimine resin produced by the photosensitive polyamine resin is preferably formed as an optical waveguide material which is a main component of the resin. Further, the decane-modified crosslinked polyimine resin, -17-200825123, refers to a polyimine resin which is formed by reacting an unsaturated group with a monomer or a resin having another unsaturated group. At this time, an optical waveguide material containing a fluorene-modified polyimine resin having a fluorene-rich composition represented by the general formula (2) is formed into a coating layer, and is modified by at least a siloxane. An optical waveguide of a ruthenium imine resin or an oxidized ortho-modified cross-linked polyimine resin (having a molar ratio of a molar ratio of a molar ratio of a molar ratio of a precursor and a polyimine resin) The material forms the core layer. Hereinafter, an optical waveguide material forming a layer covering 0 is referred to as a covering material, and an optical waveguide material forming a core layer is referred to as a core material. The refractive index of the optical waveguide material containing the decane-modified polyimine resin is preferably in the range of 1.45 to 1.65, and the refractive index difference Δ between the covering material and the core material is 0.01 or more, preferably 〇·〇2 or more. It is better. The optical waveguide material containing the decane-modified polyimine resin of the present invention may contain 50% by weight or more, preferably 60% by weight or more of the decane-modified polyimine resin. The other materials other than the decane-modified polyimine resin are transparent resins such as polyacrylates and epoxy resins, and micro-powdered dioxins, etc., which form a core layer. The photosensitive resin composition which is preferably used is a polyamine which has a constituent unit represented by the above general formula (6) and general formula (7). An acid resin and a photopolymerization initiator are contained as a main component, and acrylic acid is contained as needed. a monomer such as an ester (may also be a polymerizable resin component), a sensitizer, a solvent, etc. The photosensitive resin composition (preferably a solution thereof) is used to photoharden and yttrium to form an optical waveguide. Further, at this time, after the polymerization, at least a part of the vinyl group of the polyoxyphthalic acid resin containing a siloxane is reacted with an unsaturated group of another monomer or resin, and the resin after hardening is referred to as -18. - 200825123 Alkane modified cross-linked polyimine resin.

此處,可使用之丙烯酸酯例如可使用丙烯酸2-乙基 己酯、丙烯酸2-羥乙酯、丙烯酸2-羥丙酯、丙烯醯磷酸 2-羥乙酯、丙烯酸2-甲氧乙氧乙酯、丙烯酸2-乙氧乙氧 乙酯、丙烯酸四氫糠酯、丙烯酸苯氧乙酯、丙烯酸異癸酯 、丙烯酸硬脂酯、丙烯酸月桂酯、丙烯酸縮水甘油酯、丙 烯酸烯丙酯、丙烯酸乙氧酯、丙烯酸甲氧酯、丙烯酸 N,N’-二甲胺乙酯、丙烯酸苄酯、丙烯醯磷酸2-羥乙酯、 丙烯酸二環戊二烯酯、丙烯酸二環戊二烯乙氧酯等之單丙 烯酸酯、和丙烯酸二環戊二烯酯、丙烯酸二環戊二烯氧乙 酯、1,3-丁二醇二丙烯酸酯、1,4-丁二醇二丙烯酸酯、 1,6-丁二醇二丙烯酸酯、二乙二醇二丙烯酸酯、新戊二醇 二丙烯酸酯、聚乙二醇200二丙烯酸酯、聚乙二醇400二 丙烯酸酯、聚乙二醇600二丙烯酸酯、二乙二醇二丙烯酸 酯、新戊二醇二丙烯酸酯、羥基三甲基乙酸酯新戊二醇二 丙烯酸酯、三乙二醇二丙烯酸酯、雙(丙烯醯氧乙氧基) 雙酚A、雙(丙烯醯氧乙氧基)四溴雙酚a、三丙二醇二 丙烯酸酯、三羥甲基丙烷三丙烯酸酯、季戊四醇三丙烯酸 酯、雙(2-羥乙基)異氰酸酯、季戊四醇四丙烯酸酯、二 季戊四醇六丙烯酸酯、二季戊四醇單羥基五丙烯酸酯等之 多官能丙烯酸酯。 於上述感光性樹脂組成物中,丙烯酸酯爲相對於含有 矽氧烷之聚醯胺酸樹脂100重量份,以1〜50重量份、較 佳爲5〜40重量份之範圍。 -19- 200825123Here, as the acrylate which can be used, for example, 2-ethylhexyl acrylate, 2-hydroxyethyl acrylate, 2-hydroxypropyl acrylate, 2-hydroxyethyl acrylate, 2-methoxyethoxyethyl acrylate can be used. Ester, 2-ethoxyethoxyethyl acrylate, tetrahydrofurfuryl acrylate, phenoxyethyl acrylate, isodecyl acrylate, stearyl acrylate, lauryl acrylate, glycidyl acrylate, allyl acrylate, acrylic acid B Oxygen ester, methoxyacrylate, N,N'-dimethylamine ethyl acrylate, benzyl acrylate, 2-hydroxyethyl phthalate, dicyclopentadienyl acrylate, dicyclopentadienyl acrylate Monoacrylate, and dicyclopentadienyl acrylate, dicyclopentadienyl oxyethyl acrylate, 1,3-butylene glycol diacrylate, 1,4-butanediol diacrylate, 1,6 - Butanediol diacrylate, diethylene glycol diacrylate, neopentyl glycol diacrylate, polyethylene glycol 200 diacrylate, polyethylene glycol 400 diacrylate, polyethylene glycol 600 diacrylate , diethylene glycol diacrylate, neopentyl glycol diacrylate, hydroxytrimethyl Ester neopentyl glycol diacrylate, triethylene glycol diacrylate, bis(propylene oxyethoxy) bisphenol A, bis(propylene oxyethoxy) tetrabromobisphenol a, tripropylene glycol diacrylate Polyfunctional acrylates such as ester, trimethylolpropane triacrylate, pentaerythritol triacrylate, bis(2-hydroxyethyl)isocyanate, pentaerythritol tetraacrylate, dipentaerythritol hexaacrylate, dipentaerythritol monohydroxypentaacrylate . In the photosensitive resin composition, the acrylate is in an amount of from 1 to 50 parts by weight, preferably from 5 to 40 parts by weight, based on 100 parts by weight of the polyphthalic acid resin containing a phthalic acid. -19- 200825123

# 光聚合引發劑例如可使用乙醯苯、2,2-二甲氧基乙醯 苯、對-二甲胺基乙醯苯、蜜蚩酮、苄基、苯偶姻、苯偶 姻甲醚、苯偶姻乙醚、苯偶姻異丙醚、苯偶姻正丙醚、苯 偶姻異丙醚、苯偶姻正丁醚、苄基二甲基縮酮、噻吨酮、 2-氯基噻吨酮、2-甲基噻吨酮、2-羥基-2-甲基-1-苯基-1· 酮、1-(4-異丙基苯基)-2-羥基-2-甲基丙烷-1-酮、甲基 苯甲醯甲酸酯、1-羥基環己基苯基酮等之各種光聚合引發 劑。光聚合引發劑之較佳使用量爲相對於含有矽氧烷之聚 醯胺酸樹脂1〇〇重量份,以1〜20重量份、較佳爲1〜10 重量份。 又,配合增感劑亦爲有利,此時,增感劑可使用二苯 酮等之各種胺。增感劑爲相對於含有矽氧烷之聚醯胺酸樹 脂100重量份,以0.01〜2重量份、較佳爲0.05〜0.5重 量份。 矽氧烷改質聚醯亞胺樹脂或以其作爲主成分之樹脂組 成物以溶液型式使用時,可與感光性樹脂組成物同樣以非 感光性之聚醯胺酸樹脂組成物之溶液型式使用爲佳。又, 此些感光性或非感光性樹脂組成物可經由各種有機溶劑等 調整黏度等。若例示使用時之較佳的有機溶劑,可列舉三 乙二醇二甲醚(triglyme)、二乙二醇二甲醚(diglyme) 、二甲基乙醯胺、N-甲基吡咯烷酮、丙二醇單甲醚醋酸酯 (p e g m i a )、乳酸乙酯或其混合溶劑。溶劑的使用量爲相 對於樹脂組成物之固形成分1〇〇重量份,以1〇〜1〇〇重量 份之範圍爲佳。另外,含有1 〇重量%以上溶劑之常溫下 -20- 200825123 顯示液狀的樹脂組成物,稱爲清漆狀的樹脂組成物。又, 製造聚醯胺酸樹脂時使用作爲反應溶劑之有機溶劑爲殘存 時,以溶劑型式計算。 又,在不會令光波導特性惡化之範圍下,除了上述以 外可倂用如下述的其他樹脂。即,環氧樹脂若爲一分子內 具有數個環氧基者則無特別限定,且可適當使用市售之液 體環氧樹脂和固體環氧樹脂。環氧樹脂之具體例可列舉脂 環式環氧樹脂、雙酚A型環氧樹脂、雙酚F型環氧樹脂 、雙酚S型環氧樹脂、具有聯苯骨架之聯苯型環氧樹脂、 3有奈環之環氧樹脂、具有一環戊二嫌骨架之二環戊二燦 型環氧樹脂、苯酚酚醛清漆型環氧樹脂、甲酚酚醛清漆型 環氧樹脂、三苯基甲烷型環氧樹脂、含有溴之環氧樹脂、 脂肪族系環氧樹脂、三縮水甘油基異氰脲酸酯等,其中可 使用一種以上。其添加量爲相對於聚醯亞胺樹脂或聚醯胺 酸樹脂100重量份,未滿40重量份,較佳爲30重量份以 φ 下。 又,於形成本發明之光波導用材料之樹脂、樹脂組成 - 物或含有其前體樹脂之樹脂溶液中,視需要,於不損害光 _ 波導特性之範圍中亦可添加觸變材、無機充塡劑、消泡劑 等。由上述樹脂組成物所形成之本發明的光波導用材料, 爲令前述矽氧烷改質聚醯亞胺前體醯亞胺化所產生的矽氧 烷改質聚醯亞胺樹脂或以矽氧烷改質交聯型聚醯亞胺樹脂 作爲主成分者。此處,所謂作爲主成分係指含有50wt%以 上、較佳爲60wt%以上。更佳爲相對於主成分100重量份 -21 - 200825123 ,含有15〜35重量份之環氧樹脂或丙烯酸酯。 本發明之光波導爲於下部覆蓋層上,形成指定寬 厚度的核心層,並以覆蓋層其般設置上部覆蓋層等之 則可取得薄膜狀之光波導。本發明之光-電複合配線 層合體爲於可撓性貼銅層合板上設置下部覆蓋層,並 部覆蓋層上形成指定厚度和寬度的核心層,並以覆蓋 設置上部覆蓋層等之方法則可取得。又,經由將本發 光-電複合配線板用層合體之銅箔予以電路加工,則 得光-電複合配線板。 【實施方式】 其次,參照圖1〜5所示之流程圖說明光波導的 方法。 例如,於玻璃等之基板1上塗佈作爲覆蓋材的組 溶液(稱爲覆蓋材用溶液),並以50〜120 °C之溫度 地預乾燥,並將所得之薄膜由基板上剝離,且將剝離 膜再度於基板上以耐熱膠帶等予以暫時黏住,其後以 〜200°C之溫度熱處理20〜120分鐘令其硬化,取得 狀之下部覆蓋層2(圖1)。 其次,如圖2所示般於下部覆蓋層2,將作爲核 之組成物溶液(稱爲核心材用溶液)以網版印刷等形 定的核心層形狀,並以120〜20(TC之溫度熱處理20〃 分鐘令其硬化取得核心層3。形成核心層的核心材爲 成下部覆蓋層2之覆蓋材的折射率更高。 度和 方法 板用 於下 其般 明之 可取 形成 成物 適度 的薄 120 薄膜 心材 成指 ^ 120 比形 -22- 200825123 或者,如圖3所示般於下部覆蓋層2,塗佈核心材用 溶液3’,並以50〜120 °C之溫度適度地預乾燥,其後,使 用形成指定光罩圖型的光罩4予以選擇性曝光,並將未曝 光部以鹼水溶液顯像,以120〜200°C之溫度熱處理20〜 1 20分鐘令其硬化則亦可形成核心層3。 又,將含有感光性基之聚醯亞胺樹脂所構成的核心材 用組成物予以預乾燥所得之薄膜,於上部覆蓋層2上層合 φ ,並且令其選擇曝光、顯像、硬化則亦可形成核心層。 其次,如圖4所示般,於此核心層上,將形成下部覆 蓋層2所用者相同的覆蓋材用溶液予以塗佈,並以1 2 〇〜 200°C之溫度熱處理20〜120分鐘令其硬化形成上部覆蓋 層5’其後由基板1剝離則取得本發明之薄膜狀的光波導 6。下部覆蓋層2與上部覆蓋層5爲相同材料,且兩者爲 以無核心層之部分連接,故呈現一體化,於圖面中無法判 定邊界。 ^ 又’將形成前述下部覆蓋層時所得之預乾燥後的薄膜 於前述核心層上層合,並以指定之溫度予以熱處理亦可形 . 成上部覆蓋層。 . 構成如此所得之光波導的大部分覆蓋層爲具有可撓性 的材料’故重複數萬次以上之彎曲處理後之光傳搬性指標 的光傳搬損失增加量,可期待爲非常低至未滿〇.〇2dB左 右之値。 其次’參照5及6說明關於本發明之具有可撓性光一 電複合配線用層合板的製造方法。可撓性配線用層合板7 -23- 200825123 爲具有銅箔層8和聚醯亞胺層9。聚醯亞胺層9 述設置下部覆蓋層2,其次形成核心層3,並以 設置上部覆蓋層5,取得光-電複合配線用層合: 5之例爲將核心層3予以曝光、顯像、熱硬化等 之核心層形狀的方法,圖6之例爲將核心層3以 等形成指定之核心層形狀的方法。 又’將前述光波導形成方法所得之薄膜狀的 視需要透過接黏劑層,接黏至可撓性配線用層 醯亞胺層9面,亦可取得光一電複合配線用$ 〔實施例〕 以下示出實施例,進一步詳細說明本發明。 實施例所用之縮寫爲表示以下之化合物。 BTDA: 3,3,,4,4,-二苯酮四羧酸二酐 (# ODPA : 3,3’,4,4’-二苯醚四羧酸二酐 DSDA: 3,3’,4,4’-二苯颯四羧酸二酐 . BPDA : 3,3,,4,4,-聯苯四羧酸二酐 BAPP: 2,2 -雙〔4-(4 -胺苯氧基)苯基〕丙垸 DAPE :二胺基二苯醚 DVDABP· 2,2 -一乙嫌-4,4’-二胺基聯苯 PSX-1:數平均分子量約750之聚二甲基矽氧院 一般式(2 )之二胺殘基部分中,r4爲_Ch3 (CH2)3-、m 爲 7〜8 ) 上,同上 覆蓋其般 卜反1 0。圖 形成指定 網版印刷 光波導6 合板7之 i合板10 另外,本 二胺(於 、R3 爲- -24- 200825123 PSX-2:數平均分子量約850之含有乙烯基之聚二甲基矽 氧烷二胺(於一般式(2 )之二胺殘基部分中,R4爲_CH3 或- CH = CH2、R3爲-(CH2:h-、m爲7〜8、一分子中具有平 均1個之乙烯基) BAFL : 9,9-雙(4-胺苯基)-9H·芴 DMAC :二甲基乙醯胺# Photopolymerization initiator, for example, acetophenone, 2,2-dimethoxyethyl benzene, p-dimethylamino acetophenone, candione, benzyl, benzoin, benzoin methyl ether , benzoin ethyl ether, benzoin isopropyl ether, benzoin n-propyl ether, benzoin isopropyl ether, benzoin n-butyl ether, benzyl dimethyl ketal, thioxanthone, 2-chloro group Thioxanthone, 2-methylthioxanthone, 2-hydroxy-2-methyl-1-phenyl-1·one, 1-(4-isopropylphenyl)-2-hydroxy-2-methyl Various photopolymerization initiators such as propan-1-one, methylbenzate, and 1-hydroxycyclohexyl phenyl ketone. The photopolymerization initiator is preferably used in an amount of 1 to 20 parts by weight, preferably 1 to 10 parts by weight, based on 1 part by weight of the phthalic acid-containing polyphthalic acid resin. Further, it is also advantageous to use a sensitizer. In this case, various amines such as benzophenone can be used as the sensitizer. The sensitizer is used in an amount of 0.01 to 2 parts by weight, preferably 0.05 to 0.5 part by weight, per 100 parts by weight of the polyphthalic acid resin containing a siloxane. When the decane-modified polyimine resin or the resin composition containing the same as a main component is used in a solution form, it can be used in the same manner as the photosensitive resin composition in a solution form of a non-photosensitive polyamine resin composition. It is better. Further, such a photosensitive or non-photosensitive resin composition can be adjusted in viscosity or the like via various organic solvents and the like. Preferred examples of the organic solvent used in the case of use include triethylene glycol dimethyl ether, diglyme, dimethyl acetamide, N-methyl pyrrolidone, and propylene glycol. Methyl ether acetate (pegmia), ethyl lactate or a mixed solvent thereof. The solvent is used in an amount of 1 part by weight based on the solid content of the resin composition, preferably in the range of 1 Torr to 1 Torr. Further, at a normal temperature containing 1% by weight or more of the solvent, -20-200825123 shows a liquid resin composition, which is called a varnish-like resin composition. Further, when an organic solvent as a reaction solvent is used in the production of a polyamic acid resin, it is calculated in a solvent type. Further, in the range where the characteristics of the optical waveguide are not deteriorated, other resins as described below can be used in addition to the above. In other words, the epoxy resin is not particularly limited as long as it has a plurality of epoxy groups in one molecule, and commercially available liquid epoxy resins and solid epoxy resins can be suitably used. Specific examples of the epoxy resin include an alicyclic epoxy resin, a bisphenol A epoxy resin, a bisphenol F epoxy resin, a bisphenol S epoxy resin, and a biphenyl epoxy resin having a biphenyl skeleton. 3, epoxy resin with Nai ring, dicyclopentadiene epoxy resin with a cyclopentane skeleton, phenol novolak epoxy resin, cresol novolac epoxy resin, triphenylmethane ring Oxygen resin, bromine-containing epoxy resin, aliphatic epoxy resin, triglycidyl isocyanurate, or the like, and one or more of them may be used. The amount thereof is less than 40 parts by weight, preferably 30 parts by weight or less, based on 100 parts by weight of the polyimine resin or the polyamide resin. Further, in the resin, the resin composition or the resin solution containing the precursor resin of the optical waveguide material of the present invention, if necessary, a thixotropic material or an inorganic layer may be added in a range not impairing the characteristics of the light-waveguide. Filling agent, defoaming agent, etc. The material for an optical waveguide of the present invention formed of the above resin composition is a fluorene-modified polyimine resin or a hydrazine which is produced by imidating the oxime-modified polyimine precursor. An oxane-modified cross-linked polyimine resin is used as a main component. Here, the term "main component" means that it is contained in an amount of 50% by weight or more, preferably 60% by weight or more. More preferably, it is 15 to 35 parts by weight of an epoxy resin or an acrylate with respect to 100 parts by weight of the main component -21 - 200825123. The optical waveguide of the present invention is formed on the lower cladding layer to form a core layer having a specified thickness, and an optical layer waveguide is obtained by providing an upper cladding layer or the like as a cover layer. The optical-electric composite wiring laminate of the present invention is such that a lower cover layer is provided on the flexible copper-clad laminate, and a core layer of a specified thickness and width is formed on the cover layer, and the upper cover layer is covered by a cover, etc. Available. In addition, the optical-electric composite wiring board is obtained by circuit-processing the copper foil of the laminate for the present invention. [Embodiment] Next, a method of an optical waveguide will be described with reference to a flowchart shown in Figs. For example, a group solution (referred to as a coating material for a covering material) as a covering material is applied onto a substrate 1 such as glass, and pre-dried at a temperature of 50 to 120 ° C, and the obtained film is peeled off from the substrate, and The release film was once again adhered to the substrate with a heat-resistant tape or the like, and then heat-treated at a temperature of -200 ° C for 20 to 120 minutes to be cured, and the lower cover layer 2 was obtained ( FIG. 1 ). Next, as shown in FIG. 2, in the lower cladding layer 2, the core composition solution (referred to as a core material solution) is formed into a core layer shape by screen printing or the like, and is 120 to 20 (TC temperature). Heat treatment for 20 minutes to harden the core layer 3. The core material forming the core layer has a higher refractive index of the cover material of the lower cover layer 2. The degree and method of the plate are used to form a moderately thin film. 120 film core material forming finger ^ 120 shape shape -22- 200825123 or, as shown in Figure 3 in the lower cover layer 2, coating the core material solution 3', and pre-drying at a temperature of 50~120 °C, Thereafter, the photomask 4 forming the specified mask pattern is selectively exposed, and the unexposed portion is imaged with an aqueous alkali solution, and heat-treated at a temperature of 120 to 200 ° C for 20 to 20 minutes to harden it. The core layer 3 is formed. Further, a film obtained by pre-drying a core material composed of a photosensitive polyimide-containing polyimide resin layer is laminated on the upper cover layer 2, and is selectively exposed and imaged. Hardening can also form a core layer. Next, as shown in FIG. 4, on the core layer, the same covering material for forming the lower cladding layer 2 is coated with a solution, and heat-treated at a temperature of 1 2 〇 to 200 ° C for 20 to 120 minutes. The film is formed by hardening the upper cover layer 5' and then peeling off the substrate 1 to obtain the film-shaped optical waveguide 6 of the present invention. The lower cover layer 2 and the upper cover layer 5 are made of the same material, and the two are connected by a portion having no core layer. Therefore, it is integrated, and the boundary cannot be determined in the drawing. ^ Further, the pre-dried film obtained by forming the lower cladding layer is laminated on the core layer and heat-treated at a specified temperature. The upper cover layer. The majority of the cover layer of the optical waveguide thus obtained is a flexible material. Therefore, the amount of increase in light transmission loss after repeating the tens of thousands of times of the bending process is expected to be The method for producing a laminate for flexible light-electric composite wiring according to the present invention is described below with reference to 5 and 6. The laminate for flexible wiring 7-23- 20082 5123 is a layer having a copper foil layer 8 and a polyimide layer 9. The polyimide layer 9 is provided with a lower cladding layer 2, the core layer 3 is formed next, and the upper cladding layer 5 is provided to obtain a layer for optical-electric composite wiring. The example of 5 is a method of exposing, developing, thermosetting, or the like of the core layer 3, and the example of FIG. 6 is a method of forming the core layer 3 into a designated core layer shape. The film shape obtained by the optical waveguide forming method is transmitted through the adhesive layer as needed, and is adhered to the surface of the layer 9 of the flexible wiring layer, and the optical-electric composite wiring can be obtained. [Examples] The invention is further illustrated in detail by way of example. The abbreviations used in the examples are the following compounds. BTDA: 3,3,,4,4,-benzophenonetetracarboxylic dianhydride (# ODPA : 3,3',4,4'-diphenyl ether tetracarboxylic dianhydride DSDA: 3,3',4 , 4'-diphenylfluorene tetracarboxylic dianhydride. BPDA : 3,3,,4,4,-biphenyltetracarboxylic dianhydride BAPP: 2,2-bis[4-(4-aminophenoxy) Phenyl]propene oxime DAPE: Diaminodiphenyl ether DVDABP· 2,2-I-Bis-4,4'-diaminobiphenyl PSX-1: Polydimethyl oxime with a number average molecular weight of about 750 In the diamine residue portion of the general formula (2), r4 is _Ch3(CH2)3-, m is 7~8), and the same as above is covered with the same anti-100. The figure forms the i-ply plate 10 of the designated screen printing optical waveguide 6 ply 7. In addition, the diamine (R3 is -24-200825123 PSX-2: a polydimethyl oxime containing a vinyl group having a number average molecular weight of about 850) Alkyldiamine (in the diamine residue portion of the general formula (2), R4 is _CH3 or -CH=CH2, R3 is -(CH2:h-, m is 7-8, and has an average of 1 in one molecule) Vinyl) BAFL : 9,9-bis(4-aminophenyl)-9H·芴DMAC: dimethylacetamide

EOCN:甲酚酚醛清漆型環氧樹脂(環氧當量191§/叫) BrenS :溴化酚醛清漆型環氧樹脂(環氧當量275 g /叫) SR-35 0 :三羥甲基丙烷三甲基丙烯酸酯(日本化藥製) Irg369 :光聚合引發劑(Ciba Geigy製) 製造例1 於裝備氮氣注入管的反應器中令DSDA 35.8克(0.1 莫耳)溶解於DMAC 290克中,並將反應器予以冰冷。於 其中將60克(0.08莫耳)之PSX-1,於氮氛圍氣下歷1 小時滴下。更且’加入BAPP 8·2克(0.02莫耳),滴下 終了後,令反應器內的溫度恢復至室溫,並於氮氛圍氣下 攪拌5小時則取得含有矽氧烷之聚醯胺酸樹脂溶液。此含 有矽氧烷之聚醯胺酸樹脂的二甲基乙醯胺溶液(樹脂濃度 :2 5.1 wt%)於25 °C中的黏度,使用Ε型黏度計測定時爲 2 5 00cPa · s。更且,相對於此含有矽氧烷之聚醯胺酸樹脂 溶液(以含有矽氧烷之聚醯胺酸樹脂計爲1 00重量份), 配合EOCN 2 0重量份取得樹脂組成物之溶液。 -25-EOCN: cresol novolac type epoxy resin (epoxy equivalent 191 § / called) BrenS : brominated novolac type epoxy resin (epoxy equivalent 275 g / called) SR-35 0 : trimethylolpropane trimethyl Acrylate (manufactured by Nippon Kayaku Co., Ltd.) Irg369: photopolymerization initiator (manufactured by Ciba Geigy Co., Ltd.) Production Example 1 30.8 g (0.1 mol) of DSDA was dissolved in DMA 290 g in a reactor equipped with a nitrogen injection tube, and The reactor was iced. 60 g (0.08 mol) of PSX-1 was dropped therein for 1 hour under a nitrogen atmosphere. Furthermore, 'BAPP 8·2 g (0.02 mol) was added, and after the completion of the dropwise addition, the temperature in the reactor was returned to room temperature, and the mixture was stirred under a nitrogen atmosphere for 5 hours to obtain a polyamine containing oxime. Resin solution. The viscosity of the dimethylacetamide solution (resin concentration: 2 5.1 wt%) of the polyamine resin containing the decyl alkoxide at 25 ° C was 2,500 cPa · s measured by a Ε-type viscometer. Further, a solution of a resin composition was obtained by mixing a polyoxyphthalic acid resin solution containing a siloxane (100 parts by weight based on a polyamine resin containing a decyl alkane) with 20 parts by weight of EOCN. -25-

§ 200825123 製造例2〜3 使用製造例1同樣之方法,使用表1所示 取得含有矽氧烷之聚醯胺酸樹脂溶液。更且, 有矽氧烷之聚醯胺酸樹脂溶液中之樹脂100重 BrenS 30重量份、氣溶膠5重量份、二氧化矽 份及消泡劑1 〇重量份取得樹脂組成物之溶液。 製造例4〜6 使用製造例1同樣之方法,使用表1所示 取得含有矽氧烷之聚醯胺酸樹脂溶液。更且, 之含有矽氧烷之聚醯胺酸樹脂溶液之樹脂1 〇〇 合表1所示之添加物取得感光性樹脂組成物之 製造例7〜8 除了未使用矽氧烷二胺以外爲使用製造例 法,使用表1所示之樹脂原料及添加物並進行 ,取得樹脂組成物之溶液。 製造例9 使用製造例1同樣之方法,使用表1所示 取得含有矽氧烷之聚醯胺酸樹脂溶液。更且, 之含有矽氧烷之聚醯胺酸樹脂溶液之樹脂1 〇〇 合表1所示之添加物取得感光性樹脂組成物之 將如上述所得之各樹脂組成物的溶液以下 之樹脂原料 相對於此含 量份’配合 溶膠5重量 之樹脂原料 相對於所得 重量份,配 溶液。 1同樣之方 反應及配合 之樹脂原料 相對於所得 重量份,配 溶液。 列指定之條 -26- 200825123 件予以薄膜化。 製造例10§ 200825123 Production Examples 2 to 3 Using the same method as in Production Example 1, a polyamine resin solution containing a halogenated alkane was obtained as shown in Table 1. Further, a resin of 100 parts by weight of BrenS, a part by weight of an aerosol, 5 parts by weight of cerium oxide, and 1 part by weight of an antifoaming agent in a polyoxyphthalic acid resin solution having a siloxane are obtained as a solution of a resin composition. Production Examples 4 to 6 Using the same method as in Production Example 1, a polyamine resin solution containing a siloxane was obtained as shown in Table 1. Further, the resin 1 containing a polyoxyphthalic acid resin solution of a siloxane was obtained by combining the additives shown in Table 1 to obtain the photosensitive resin composition, and the production examples 7 to 8 were obtained except that no decane diamine was used. Using the production method, the resin raw materials and additives shown in Table 1 were used, and a solution of the resin composition was obtained. Production Example 9 Using the same method as in Production Example 1, a polyamine resin solution containing a siloxane was obtained as shown in Table 1. Further, the resin 1 of the polyamine resin solution containing a siloxane is obtained by combining the additives shown in Table 1 to obtain a resin material of the photosensitive resin composition as a solution of each of the resin compositions obtained as described above. The solution was prepared with respect to the obtained resin component in an amount of 5 parts by weight based on the amount of the sol. 1 In the same manner, the resin raw materials which are reacted and blended are mixed with respect to the obtained parts by weight. The specified column -26- 200825123 is thinned. Manufacturing Example 10

於玻璃基板上,將製造例1〜3及7〜8所得之樹脂組 成物溶液以棒塗層器予以塗佈,並以120°C預乾燥20分 鐘,令所得之薄膜由玻璃基板上剝離。更且,將剝離之薄 膜使用耐熱膠帶(Capton製)於玻璃基板上貼附後,以 180 °C硬化30分鐘形成20 μπι厚之薄膜。 製造例11 於玻璃基板上將製造例4〜6及9所得之感光性樹脂 組成物溶液以棒塗層器予以塗佈,並以 120 °C預乾燥20 分鐘,令所得之薄膜由玻璃基板上剝離。更且,將剝離之 薄膜使用耐熱膠帶(Capton製)於玻璃基板上貼附後, 使用曝光機(Hitech、高壓水銀燈)對薄膜照射UV光, 並以18(TC硬化30分鐘形成20μιη厚之薄膜。 根據上述方法所得薄膜之特性爲如下處理評價。 1 )折射率:各薄膜(20μπι厚)以63 Onm測定折射率。 更且,使用彎曲試驗機,測定於彎曲角度1 70 °、迴轉數 6 0r*pm之條件下進行10萬次之彎曲處理後的折射率。 2)光線穿透率:各薄膜(20μιη厚)以85〇nm測定光線 穿透率。更且,測定以1 )之折射率測定同樣之方法進行 彎曲處理後的光線穿透率。 3 ) Tg :進行各薄膜的動態黏彈性測定,並將tan $的波 -27- 200825123 峰溫度視爲T g。 4)彈性率:以拉伸試驗機Autograph AG-500A (島津製 作所製)測定各薄膜的拉伸彈性率。 5 )吸水率:根據JIS規格,測定各薄膜的吸水率。 樹脂原料之種類和份量、聚醯胺酸樹脂之溶液黏度、 聚醯胺酸樹脂溶液中配合之添加物種類和份量(相對於聚 醯胺酸樹脂溶液中之樹脂1 00重量份的重量份)及薄膜特 性示於表1。 § -28- 200825123 t # 〔1«〕 製造例9 BTDA 80 BPDA 20 DVDABP 20 PSX-1 60 BAFL 20 3000 SR-350 30 Irg369 5 5 § 5 | | S S 製造例8 DSDA 100 DAPE 100 PSX-1 0 25000 4.9 245 0.8 1.568 1.567 96 96 製造例7 BTDA 100 BAPP 100 PSX-1 0 23000 4.58 235 0.6 1.564 1.563 96 95 製造例6 DSDA 100 DVDABP 40 PSX-2 60 _ 9600 SR-350 30 Irg369 5.00 1 1.54 185 0.1 1.506 1.506 99 99 製造例5 ODPA 100 DVDABP 70 PSX-1 30 16000 SR-350 30 Irg369 5 2.76 225 0.1 1.517 1.523 98 98 製造例4 DSDA 100 DVDABP 90 PSX-1 10 17600 SR-350 30 Irg369 5 2.84 230 0.1 1.542 1.534 98 98 製造例3 BTDA 100 BAPP 65 PSX-1 35 _ 8400 Bren-S 30 氣溶膠 5 二氧化矽充塡劑 5 消泡劑 10 1.37 180 0.1 1.579 1.579 99 99 製造例2 DSDA 100 BAPP 80 PSX-1 20 15000 Bren-S 30 氣溶膠 5 二氧化矽充塡劑 5 消泡劑 10 2.65 225 0.1 1.598 1.597 98 98 製造例1 DSDA 100 BAPP 20 PSX-1 80 _1 2500 EOCN 20 0.35 150 0,1 1.496 1.496 98 98 聚醯亞胺樹脂原 料 (莫耳%) 酸酐 二胺 (莫耳%) _ 制2 * % ψ ^ Sg ? 1 - a m 鏃 添加物 (重量份) | η ^踩鹚踩鹚 ° Ρ 运刮运圈 m 螺 ir ir » m _餅 掛掛 脒 | 1 η S i 1 i -29- 200825123 如表1所示般,矽氧烷改質聚醯亞胺樹脂所構成的光 波導材料,可經由矽氧烷成分的含量於廣範圍中控制折射 率差’光線穿透率高,且重複彎曲處理前後之折射率及光 線穿透率的變化小。另一方面,由不含有矽氧烷成分之聚 醯亞胺樹脂所構成的光波導材料爲折射率差小,且光線穿 透率低,故不適於作爲光波導。On the glass substrate, the resin composition solutions obtained in Production Examples 1 to 3 and 7 to 8 were applied by a bar coater, and predried at 120 ° C for 20 minutes to peel off the obtained film from the glass substrate. Further, the peeled film was attached to a glass substrate using a heat-resistant tape (manufactured by Capton), and then cured at 180 ° C for 30 minutes to form a film having a thickness of 20 μm. Production Example 11 The photosensitive resin composition solutions obtained in Production Examples 4 to 6 and 9 were applied on a glass substrate by a bar coater, and predried at 120 ° C for 20 minutes to obtain a film obtained on a glass substrate. Stripped. Further, after the peeled film was attached to a glass substrate using a heat-resistant tape (manufactured by Capton), the film was irradiated with UV light using an exposure machine (Hitech, high-pressure mercury lamp), and a film of 20 μm thick was formed by 18 (TC hardening for 30 minutes). The characteristics of the film obtained by the above method were evaluated as follows: 1) Refractive index: The refractive index of each film (20 μm thick) was measured at 63 Onm. Further, the refractive index after bending treatment of 100,000 times under the conditions of a bending angle of 1, 70 ° and a number of revolutions of 60 μm was measured using a bending tester. 2) Light transmittance: Each film (20 μm thick) was measured for light transmittance at 85 Å. Further, the light transmittance after the bending treatment was measured by the same method as the refractive index measurement of 1). 3) Tg: The dynamic viscoelasticity of each film was measured, and the peak temperature of wave -27-200825123 of tan $ was regarded as T g . 4) Elasticity: The tensile modulus of each film was measured by a tensile tester Autograph AG-500A (manufactured by Shimadzu Corporation). 5) Water absorption rate: The water absorption rate of each film was measured in accordance with JIS specifications. The type and amount of the resin raw material, the solution viscosity of the polyaminic acid resin, and the type and amount of the additive to be added in the polyaminic acid resin solution (relative to 100 parts by weight of the resin in the polyamic acid resin solution) And film properties are shown in Table 1. § -28- 200825123 t # [1«] Manufacturing Example 9 BTDA 80 BPDA 20 DVDABP 20 PSX-1 60 BAFL 20 3000 SR-350 30 Irg369 5 5 § 5 | | SS Manufacturing Example 8 DSDA 100 DAPE 100 PSX-1 0 25000 4.9 245 0.8 1.568 1.567 96 96 Manufacturing Example 7 BTDA 100 BAPP 100 PSX-1 0 23000 4.58 235 0.6 1.564 1.563 96 95 Manufacturing Example 6 DSDA 100 DVDABP 40 PSX-2 60 _ 9600 SR-350 30 Irg369 5.00 1 1.54 185 0.1 1.506 1.506 99 99 Manufacturing Example 5 ODPA 100 DVDABP 70 PSX-1 30 16000 SR-350 30 Irg369 5 2.76 225 0.1 1.517 1.523 98 98 Manufacturing Example 4 DSDA 100 DVDABP 90 PSX-1 10 17600 SR-350 30 Irg369 5 2.84 230 0.1 1.542 1.534 98 98 Manufacturing Example 3 BTDA 100 BAPP 65 PSX-1 35 _ 8400 Bren-S 30 Aerosol 5 cerium oxide cerium 5 Defoamer 10 1.37 180 0.1 1.579 1.579 99 99 Manufacturing Example 2 DSDA 100 BAPP 80 PSX -1 20 15000 Bren-S 30 Aerosol 5 Ceria-filling agent 5 Defoamer 10 2.65 225 0.1 1.598 1.597 98 98 Manufacturing Example 1 DSDA 100 BAPP 20 PSX-1 80 _1 2500 EOCN 20 0.35 150 0,1 1.496 1.496 98 98 Polyimine resin raw material (% by mole) Anhydride diamine (% by mole) _ 2 * % ψ ^ Sg ? 1 - am 镞 Additives (parts by weight) | η ^ 鹚 鹚 鹚 鹚 Ρ 刮 刮 m m m m m m m m m m 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 - 200825123 As shown in Table 1, the optical waveguide material composed of a siloxane-modified polyimine resin can control the refractive index difference through a wide range of the content of the siloxane component, and the light transmittance is high. The change in refractive index and light transmittance before and after the repeated bending treatment is small. On the other hand, an optical waveguide material composed of a polyimine resin which does not contain a decane component has a small refractive index difference and a low light transmittance, and is therefore unsuitable as an optical waveguide.

§ 實施例1 於玻璃基板上將製造例1所得之樹脂組成物的溶液作 爲形成覆蓋層用,以網版印刷機予以塗佈,以1 20°c預乾 燥20分鐘,並將所得之薄膜由玻璃基板上剝離。更且, 將剝離之薄膜,使用耐熱膠帶(Capton製)於玻璃基板 上貼附後,以180°C硬化30分鐘形成20μπι厚之下部覆蓋 層。 其次,將此薄膜狀之覆蓋層安裝至網版印刷機,並將 製造例2所得之樹脂組成物溶液作爲形成核心層用,透過 形成指定印刷圖型(核心層之圖型)的印刷板於此覆蓋層 上的指定處塗佈,其後以180 °C硬化30分鐘,於覆蓋層 上形成核心層(尺寸:膜厚2 〇 μ m、寬1 0 0 μ m )。 其次,於此核心層上,將形成下部覆蓋層用所用之相 同樹脂組成物的溶液以網版印刷機予以塗佈,並以1 80°C 硬化30分鐘形成20 μπι厚之上部覆蓋層。其後,將暫時 黏著的耐熱膠帶剝離,取得薄膜狀之光波導。 -30- 200825123 實施例2 除了使用製造例3所得之樹脂組成物溶液作爲形成核 心層用以外,以實施例1同樣之方法取得薄膜狀之光波導 實施例3§ Example 1 A solution of the resin composition obtained in Production Example 1 was used as a cover layer on a glass substrate, coated with a screen printing machine, pre-dried at 1200 ° C for 20 minutes, and the obtained film was Peel off on the glass substrate. Further, the peeled film was attached to a glass substrate using a heat-resistant tape (manufactured by Capton), and then cured at 180 ° C for 30 minutes to form a lower cover layer of 20 μm thick. Next, the film-like cover layer was attached to a screen printing machine, and the resin composition solution obtained in Production Example 2 was used as a core layer to form a printing plate having a specified printing pattern (a pattern of a core layer). The coating was applied at the designated layer on the cover layer, and then hardened at 180 ° C for 30 minutes to form a core layer (size: film thickness 2 μm, width 100 μm) on the cover layer. Next, on the core layer, a solution of the same resin composition used for forming the lower cover layer was applied by a screen printing machine, and hardened at 180 ° C for 30 minutes to form a 20 μm thick upper cover layer. Thereafter, the heat-resistant adhesive tape which was temporarily adhered was peeled off to obtain a film-shaped optical waveguide. -30-200825123 Example 2 A film-shaped optical waveguide was obtained in the same manner as in Example 1 except that the resin composition solution obtained in Production Example 3 was used as the core layer.

§ 於玻璃基板上將製造例1所得之樹脂組成物溶液以網 版印刷機予以塗佈,以120°C預乾燥20分鐘,並將所得 之薄膜由玻璃基板上剝離。更且,將剝離之薄膜’使用耐 熱膠帶(Capton製)於玻璃基板上貼附後,以180°C硬化 30分鐘形成20 μιη厚之下部覆蓋層。 其次,於此薄膜上將製造例4所得之感光性樹脂組成 物溶液以網版印刷機予以塗佈,以12〇 °C預乾燥1〇分鐘 ,其後,使用形成指定之光罩圖型的光罩且使用曝光機( Hitech、高壓水銀燈)予以曝光。其後,使用1%碳酸鈉 水溶液,以3 0。(:、1 5 0秒之條件進行顯像’並以1 8 0 °C之 溫度熱處理3 0分鐘令其硬化形成核心層。 其次,於此核心層上,將製造例1所得之樹脂組成物 溶液塗佈,並以180。(:硬化30分鐘形成20μιη厚之上部覆 蓋層。其後,將暫時黏著的耐熱膠帶剝離’取得薄膜狀之 光波導。 實施例4 除了使用製造例5所得之樹脂組成物溶液作爲形成核 -31 - 200825123 心層用以外,以實施例3同樣之方法取得薄膜狀之光波導 實施例5 除了使用製造例6所得之樹脂組成物溶液作爲形成核 心層用以外,以實施例3同樣之方法取得薄膜狀之光波導 實施例6 於可撓性印刷配線板用之層合體(新日鐵化學製可撓 性貼銅層合板;ESP AN EX單面類型:聚醯亞胺膜厚25 μιη 、銅箔18μπι)的聚醯亞胺面,將製造例1所得之樹脂組 成物溶液使用網版印刷機予以塗佈,以1 2 0 °C預乾燥,再 以180 °C硬化30分鐘形成20 μπι厚之下部覆蓋層。 § 其次,將製造例2所得之樹脂組成物溶液,透過形成 指定印刷圖型之印刷版於此覆蓋層上的指定處塗佈,並以 1 80 °C硬化30分鐘,於覆蓋層上形成核心層(尺寸:膜厚 20μπι、寬 1 0 0 μιη )。 其次,於此核心層上,將製造例1所得之樹脂組成物 溶液予以塗佈,並以180 °c硬化30分鐘形成20 μιη厚之上 部覆蓋層,取得於可撓性基板上形成光波導的可撓性光-電複合配線板用層合體。 實施例7 -32- 200825123 於上述可撓性印刷配線板用之層合體的聚醯亞胺面, 將製造例1所得之樹脂組成物溶液使用網版印刷機予以塗 佈,以12(TC預乾燥,並再以180°C硬化 30分鐘形成 20μπι厚之下部覆蓋層。§ The resin composition solution obtained in Production Example 1 was applied on a glass substrate by a screen printing machine, pre-dried at 120 ° C for 20 minutes, and the obtained film was peeled off from the glass substrate. Further, the peeled film was attached to a glass substrate using a heat-resistant tape (manufactured by Capton), and then cured at 180 ° C for 30 minutes to form a 20 μm thick lower cover layer. Next, the photosensitive resin composition solution obtained in Production Example 4 was applied onto a film by a screen printing machine, pre-dried at 12 ° C for 1 minute, and thereafter, a pattern of the specified mask was used. The mask is exposed using an exposure machine (Hitech, high pressure mercury lamp). Thereafter, a 1% aqueous solution of sodium carbonate was used, and 30 was used. (:, imaging was performed under conditions of 150 seconds) and heat-treated at a temperature of 180 ° C for 30 minutes to harden it to form a core layer. Next, on the core layer, the resin composition obtained in Production Example 1 was used. The solution was applied and dried at 180°. (: a 20 μm thick upper cover layer was formed by hardening for 30 minutes. Thereafter, the temporarily adhered heat-resistant tape was peeled off to obtain a film-shaped optical waveguide. Example 4 except that the resin obtained in Production Example 5 was used. The composition solution was used to form a film-like optical waveguide in the same manner as in Example 3 except that the core layer was used for forming the core layer. The fifth embodiment was used except that the resin composition solution obtained in Production Example 6 was used as the core layer. In the same manner as in Example 3, a film-like optical waveguide was obtained in the same manner as in the flexible printed wiring board (Sinite Chemical Co., Ltd. flexible copper-clad laminate; ESP AN EX single-sided type: Poly The polyimide composition having an amine film thickness of 25 μm and a copper foil of 18 μm was coated with a screen printing machine using a screen printing machine, pre-dried at 120 ° C, and further at 180 ° C. Hardened for 30 minutes to form 20 Μπι厚下下覆层. § Next, the resin composition solution obtained in Production Example 2 was applied through a printing plate forming a designated printing pattern at a designated portion on the cover layer, and hardened at 180 ° C for 30 minutes. A core layer (size: film thickness: 20 μm, width: 100 μm) was formed on the cover layer. Next, on the core layer, the resin composition solution obtained in Production Example 1 was applied and hardened at 180 ° C. A laminate for a flexible optical-electric composite wiring board having an optical waveguide formed on a flexible substrate was formed by forming a 20 μm thick upper cladding layer in 30 minutes. Example 7 - 32 - 200825123 The above flexible printed wiring board Using the polyimide surface of the laminate, the resin composition solution obtained in Production Example 1 was coated with a screen printing machine, pre-dried with 12 (TC, and then hardened at 180 ° C for 30 minutes to form a 20 μπ thick layer. Lower cover layer.

其次,將製造例4所得之感光性樹脂組成物溶液於上 述下部覆蓋層面上塗佈,以120 °C預乾燥10分鐘,其後 ,使用形成指定之光罩圖型的光罩且使用曝光機(Hitech 、高壓水銀燈)予以曝光。未曝光部使用1 %碳酸鈉水溶 液,以30°C進行150〜200秒顯像,並以180°C之溫度熱 處理30分鐘令其硬化形成核心層(尺寸:膜厚20 μηι、寬 1 0 0 μπι ) 〇 其次,於此核心層上,將製造例1所得之樹脂組成物 溶液予以塗佈,並以1 8 0 °c硬化3 0分鐘形成2 0 μπι厚之上 部覆蓋層,取得於可撓性基板上形成光波導的可撓性光-電複合配線板用層合體。 § 實施例8 於實施例7中,除了使用製造例9之感光性樹脂組成 物溶液代替製造例4之感光性樹脂組成物以外,同樣進行 ,取得於可撓性基板上形成光波導的可撓性光一電複合配 線板用層合體。 〔產業上之可利用性〕 經由聚醯亞胺樹脂所形成之光波導與可撓性貼銅層合 -33- 200825123 板的複合化,則可令重複彎曲性優良之信賴性高的可撓性 光一電複合配線板實用化。 【圖式簡單說明】 圖1爲表示光波導之製造流程圖。 圖2爲表示光波導之製造流程圖。 圖3爲表示光波導之製造流程圖。Next, the photosensitive resin composition solution obtained in Production Example 4 was applied onto the lower cover layer, and pre-dried at 120 ° C for 10 minutes. Thereafter, a mask having a specified mask pattern was used and an exposure machine was used. (Hitech, high pressure mercury lamp) is exposed. The unexposed portion was developed with a 1% sodium carbonate aqueous solution at 150 ° C for 150 to 200 seconds, and heat-treated at 180 ° C for 30 minutes to harden it to form a core layer (size: film thickness 20 μηι, width 100) Next, on the core layer, the resin composition solution obtained in Production Example 1 was applied, and hardened at 180 ° C for 30 minutes to form a top cover layer of 20 μm thick, which was obtained in a flexible manner. A laminate for a flexible optical-electric composite wiring board in which an optical waveguide is formed on a substrate. § Example 8 In the same manner as in Example 7, except that the photosensitive resin composition solution of Production Example 9 was used instead of the photosensitive resin composition of Production Example 4, the optical waveguide was formed on the flexible substrate. A laminate for a light-electric composite wiring board. [Industrial Applicability] The combination of an optical waveguide formed of a polyimide resin and a flexible copper-clad laminate-33-200825123 can provide high reliability with high repeatability and high reliability. Slight light-electric composite wiring board is put into practical use. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a flow chart showing the manufacture of an optical waveguide. Fig. 2 is a flow chart showing the manufacture of an optical waveguide. Fig. 3 is a flow chart showing the manufacture of an optical waveguide.

圖4爲表示光波導之製造流程圖。 圖5爲表示光-電複合配線板用層合板之製造流程圖 圖6爲表示光-電複合配線板用層合板之製造流程圖 【主要元件符號說明】 1 :基板 β 2 :下部覆蓋層 3 :核心層 , 4 :(光)罩 . 5 :上部覆蓋層 6 :光波導 7 :可撓性配線用層合板 8 :銅范層 9 :聚醯亞胺層 10 :光-電複合配線板用層合板 -34-Fig. 4 is a flow chart showing the manufacture of an optical waveguide. 5 is a flow chart showing the manufacture of a laminate for an optical-electric composite wiring board. FIG. 6 is a flow chart showing the manufacture of a laminate for an optical-electric composite wiring board. [Main component symbol description] 1 : Substrate β 2 : lower cladding layer 3 : core layer, 4 : (light) cover. 5 : upper cover layer 6 : optical waveguide 7 : laminate for flexible wiring 8 : copper layer 9 : polyimine layer 10 : for photo-electric composite wiring board Laminate-34-

Claims (1)

200825123 十、申請專利範圍 1 · 一種光波導,其特徵爲於具有覆蓋層和核心層之光 波導中,覆蓋層爲使用具有下述一般式(1)及(2)所示 之構成單位的聚醯亞胺樹脂作爲主成分的光波導材料所形 成, 【化1】200825123 X. Patent Application No. 1 · An optical waveguide characterized in that in an optical waveguide having a cover layer and a core layer, the cover layer is a polymer having a constituent unit represented by the following general formulas (1) and (2) An optical waveguide material having a quinone imine resin as a main component, [Chemical 1] t Ο Q R3 斗 〇W—V ο ο r4 r4 Ρ (2) 【化2t Ο Q R3 斗 〇 W—V ο ο r4 r4 Ρ (2) -35- 200825123 基,X及Y爲獨立表示單鍵或由碳數1〜15個之二價烴基 、Ο、S、CO、S02或CONH所選出之二價基,m爲表示1 〜50之數,η爲獨立表示0〜4之整數,p及q爲表示各 構成單位的存在莫耳比,p爲0.05〜0.99之範圍,q爲 0.01〜0.95之範圍。 2 ·如申請專利範圍第1項之光波導,其中,核心層及 覆蓋層爲使用折射率相互不同之如申請專利範圍第1項記 載之光波導材料所形成。 3 .如申請專利範圍第2項之光波導,其中,形成核心 層及覆蓋層之光波導材料的折射率差△爲0.0 1以上。 4 ·如申請專利範圍第丨項〜第3項中任一項之光波導 ’其中’光波導爲具有核心層和覆蓋核心層周圍的覆蓋層 ,且覆蓋層的折射率爲低於核心層。 5.如申請專利範圍第1項之光波導,其中,聚醯亞胺 樹脂的彈性率爲0.2〜3.OGPa之範圍。 6 .如申g靑專利範圍第1項之光波導,其中,核心層爲 使用令具有下述一般式(6)及一般式(7)所示之構成單 • 位的聚醯胺酸樹脂與具有不飽和鍵之單體及光聚合引發劑 . 作爲主成分的感光性樹脂組成物硬化所得之樹脂作爲主成 分的光波導材料所形成者, -36- (6)200825123 (7) t 【化3】-35- 200825123 Base, X and Y are independently a single bond or a divalent group selected from a divalent hydrocarbon group of 1 to 15 carbon atoms, hydrazine, S, CO, S02 or CONH, and m represents 1 to 50 The number η is an integer representing 0 to 4 independently, and p and q are the molar ratios of the respective constituent units, p is a range of 0.05 to 0.99, and q is a range of 0.01 to 0.95. 2. The optical waveguide of claim 1, wherein the core layer and the cover layer are formed using optical waveguide materials having mutually different refractive indices as recited in claim 1 of the patent application. 3. The optical waveguide of claim 2, wherein the refractive index difference Δ of the optical waveguide material forming the core layer and the cladding layer is 0.01 or more. The optical waveguide of any one of the above-mentioned claims, wherein the optical waveguide is a cover layer having a core layer and a cover core layer, and the cover layer has a refractive index lower than that of the core layer. 5. The optical waveguide of claim 1, wherein the polyamidene resin has an elastic modulus in the range of 0.2 to 3. OGPa. 6. The optical waveguide of claim 1, wherein the core layer is a polyamic acid resin having a composition unit of the following general formula (6) and general formula (7); a monomer having an unsaturated bond and a photopolymerization initiator. The optical waveguide material containing the resin obtained by curing the photosensitive resin composition as a main component as a main component is formed by -36- (6) 200825123 (7) t 3] 但,An及Ar2、Ar3、R3及R4爲具有與上述一般式(1 ) 及(2)同樣之意義,但Ar3中之Ri或一般式(7)中之 R4的至少一部分爲烯基或烯苯基)。 7· —種光-電複合配線板用層合板,其特徵爲令如申 請專利範圍第1項〜第6項中任一項之光波導,於可撓性 貼銅層合板上形成。 8·—種光-電複合可撓性配線板,其特徵爲令如申請 專利範圍第1項〜第6項中任一項之光波導,於可撓性配 線板上形成。 -37-However, An and Ar2, Ar3, R3 and R4 have the same meanings as the above general formulas (1) and (2), but at least a part of R1 in Ar3 or R4 in the general formula (7) is an alkenyl group or an alkene. Phenyl). A laminate for an optical-electric composite wiring board, characterized in that the optical waveguide according to any one of the first to sixth aspects of the invention is formed on a flexible copper-clad laminate. 8. An optical-electric composite flexible wiring board characterized in that the optical waveguide according to any one of the first to sixth aspects of the invention is formed on a flexible wiring board. -37-
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