200823412 九、發明說明： 【發明所屬之技術領域】 本發明係有關一種廢氣排放裝置及方法，尤指一種藉由將部份茂 漏在旁通風管内的廢氣，經由第一管路抽送至轉輪中之冷卻區域後端 之新鮮空氣進氣管路裏，再送至轉輪中之脫附區域脫附之設計，使得 本發明具有提升排氣品質之功效，而適於應用在各種半導體業、光電 產業、其他化學/化工相關產業和相關要求空氣品質之場所者。 _ 【先前技術】 隨著台灣高科技產業的蓬勃發展下，半導體產業日漸成長迅速， 其中半導體產業可以包含有積體電路產業與光電產業，對國内經濟具 有極大的影響力，但在半導體元件及光電元件製程中隨之衍生了許多 廢液、廢水、廢氣等有關環保問題，例如：半導體廠於黃光製程中分 另J有π洗塗底、光阻覆盍、軟烤、曝光、烘烤、顯影、硬烤等等步 驟’會使闕各式清洗液、光崎等有機溶劑，造成有揮發性有機物 鲁 VOCsaolatile Organic Compounds ; —般係指在標準狀態下，其蒸汽 壓大於0. ImniHg以上之有機化合物）的產生，而這些v〇Cs絕大部份屬200823412 IX. Description of the Invention: [Technical Field] The present invention relates to an exhaust gas discharge device and method, and more particularly to an exhaust gas that is partially leaked in a side vent pipe and pumped to a runner via a first pipe The design of the desorption zone in the fresh air intake pipe at the rear end of the cooling zone and the desorption zone in the runner makes the invention have the effect of improving the exhaust quality, and is suitable for application in various semiconductor industries and optoelectronics. Industry, other chemical/chemical related industries and related places that require air quality. _ [Prior Art] With the rapid development of Taiwan's high-tech industry, the semiconductor industry is growing rapidly. The semiconductor industry can include the integrated circuit industry and the optoelectronic industry, which has great influence on the domestic economy, but in semiconductor components. In the process of optoelectronic components, many environmental problems such as waste liquid, waste water, and exhaust gas have been derived. For example, semiconductor factories in the process of yellow light are divided into J π washing base, photoresist coating, soft baking, exposure, and baking. The steps of baking, developing, hard baking, etc., will cause various organic solvents such as various cleaning liquids and gamma, to cause volatile organic compounds, VOCsolatile Organic Compounds; generally, the vapor pressure is greater than 0. ImniHg or more under standard conditions. Production of organic compounds), and most of these v〇Cs are
Air Pollutants ； HAPs) ^ 期暴路於⑼展度VGGs的環境巾，會有產生巾毒及致癌性腫瘤等反 - 應、。除此之外，大氣中的V0Cs會光化學反應，導致大氣中臭氧濃度昇 - 间及產生n氧化性污染物。目此，這些排放絲的有機溶劑蒸氣，必 需加以處理，不可任其直接排放到大氣中。 而行政保署也於民國八十八年—月六日發佈「半導體製造業 6 200823412 空氣污染管概排放鮮」，依麟鮮規定，匈半物製" 事積體電路晶圓製造及封裝、蠢晶、光罩製造及導線架製造等=業中從 其全廠揮發性有機物⑽s)及顧、雜、鹽酸 =者’ ， ， ％ 風氟酸望& 機酸年制量超過規定限值者，皆應納人管制，其中揮發性廢:、 強制要求制減率獻於9Q%、或麟放量小㈣為如。、％Air Pollutants ; HAPs) ^ The environmental towel in the (9) spread VGGs will have anti-drug and carcinogenic tumors. In addition, V0Cs in the atmosphere undergo photochemical reactions, resulting in an increase in the concentration of ozone in the atmosphere and the production of n-oxidative contaminants. Therefore, the organic solvent vapors of these discharge wires must be disposed of and must not be directly discharged into the atmosphere. The Administrative Insurance Agency also issued the "Semiconductor Manufacturing Industry 6 200823412 Air Pollution Control Emissions" from the 88th to the 6th of the Republic of China. According to the regulations of Lin Lin, the Hungarian Half-Material System is manufactured and packaged. , stupid crystal, reticle manufacturing and lead frame manufacturing, etc. = from the whole plant volatile organic compounds (10) s) and Gu, miscellaneous, hydrochloric acid = ', '% of the fluorinated acid & the annual acid production exceeds the specified limit The value of the person should be controlled by the person, in which the volatile waste:, the mandatory rate of reduction is offered at 9Q%, or the amount of lining is small (4). %
目前國内-般從事製造與代，積體電路製造料，實施運轉的 v〇cs空氣污_治設備主要搞性碳吸附塔、轉輪濃縮焚化、冷擬回 收、座式絲、活性碳流體化床等，麵可說不勝枚舉。而^喝廢 «理裝置具有實際_歸、且颇敎，聽觀衫可符合目t 财國内半導體空污法規船廢氣處理鱗大於_以上之要求，甚至 亦月匕同日寸付合排放量小於〇·故g/hr之要求。 然，在目前處理其揮發性有機物vocs，大多先經進氣管路來進入 吸附塔、活性碳流體化床或轉輪濃縮焚化等裝置，以先_污染物質 再將經過的乾淨氣體排放至錢巾，但會因麵塔、活性碳流體化床 或轉輪濃縮焚轉裝置轉的效能，排出之氣體树無法達到半導體 空污法規VOCs廢氣處理效率大於90%以上之要求。 有鑑於實際使用上所存有之缺失及限制，本案發明人以從事該項 事業多年之經驗，並精心研究，終於設計出一種嶄新的廢氣排放裝置 及方法。 【發明内容】 本發明之主要目的，在提供一種廢氣進氣管路連有一旁通風管，而 旁通風管中設有第一管路連接至轉輪中冷卻區後端之新鮮空氣進氣管 7 200823412 路’再連接轉輪中之脫附區域’來提昇空氣品質之廢氣排放裝置及方法 者。 . 本發明之次-目的’在提供—種熱難置係為熱交換設備時，該 部份茂漏的廢氣可經由熱交換設備裏來預_，再輸送至轉輪中之脫 附區域來脫附’以提昇去除廢氣之效率者。 為達成上述目的，本發明係一種廢氣排放裝置及方法，主要包含 有—廢氣進氣管路…轉輪、-旁通風f、_新鮮空氣進氣管路、一 …、源f路、熱源I置、第-風門、第二風門、_燃燒爐、第一減 機、第二抽風機及一煙自；該廢氣進氣管路係連接轉輪中之吸附區域， 再連接第一抽風機而至煙囪，該廢氣進氣管路連有一旁通風管，而旁 L風言兩‘與廢氣進氣管路相連接形成一迴路，該旁通風管上設有第 風門及第二風門，以阻卻廢氣的洩漏，而該旁通風管中設有第一管 路連接至轉輪中冷卻區後端之新鮮空氣進氣管路，以供將旁通風管内 部份洩漏的廢氣抽送至新鮮空氣進氣管路裏，該新鮮空氣進氣管路係 連接轉輪中之冷卻區域，再經過熱源管路連接到轉輪中之脫附區域 裏，該熱源裝置係連接熱源管路，以提供通過該熱源管路之廢氣加熱， 並提供轉輪中之脫附區域熱源，該第二抽風機係設於轉輪及燃燒爐 間’以抽送轉輪中之脫附區域脫附的濃縮廢氣至燃燒爐中，且將轉輪 中脫附的濃縮廢氣經高溫燃燒反應去除，該煙_係連接燃燒爐，將燃 ▲ 燒後之氣體排出，藉此，提昇排氣品質者。 本發明之其他特點及具體實施例可於以下配合附圖之詳細說明 8 200823412 中，進一步瞭解。 【實施方式】 清參考第1圖所示，係為本發明廢氣排放裝置之結構示意圖，主 要係包含有~廢氣進氣管路10、-轉輪2 0、-旁通風管3 0、一 新鮮空氣進氣管路6 G、-熱源管路61、-熱源裝置4 0、第-風 門5 1、第二風門52、第一抽風機53、第二抽風機54、一燃燒 煙自8 0，該廢氣11經由廢氣進氣管路1〇進入，而該 震氣進氣官路10係連接轉輪2 0中之吸附區域21，再連接第一抽 風機5 3而至煙自8 〇，故廢氣11經轉輪2 0中之吸附區域21吸 ρ付後’其赠因濃度降低達標#，經連接之第—抽風機5 3將氣體抽 至煙_ 8 0排出。該廢氣進氣管路1 0連有一旁通風管3 0 (ByAt present, the domestic-general manufacturing and generation, integrated circuit manufacturing materials, the implementation of the operation of v〇cs air pollution _ treatment equipment mainly engaged carbon adsorption tower, runner concentration incineration, cold recovery, seat wire, activated carbon fluid Chemical beds, etc., can be said to be numerous. And ^ drink waste «the device has the actual _ return, and quite awkward, listening to the shirt can meet the requirements of the domestic semiconductor air pollution regulations, the ship's exhaust gas treatment scale is greater than _ above, even the same day and the same day Less than 〇 · Therefore g / hr requirements. However, in the current processing of volatile organic compounds vocs, most of them first enter the adsorption tower, activated carbon fluidized bed or rotary enrichment and incineration through the intake pipeline, so that the _ pollutants will then pass the clean gas to the money. Towels, but due to the efficiency of the surface tower, activated carbon fluidized bed or runner concentrated incineration device, the gas tree discharged can not meet the requirements of the semiconductor air pollution regulations VOCs exhaust gas treatment efficiency of more than 90%. In view of the lack of limitations and limitations in actual use, the inventor of this case has designed and developed a new exhaust emission device and method with years of experience in this business. SUMMARY OF THE INVENTION The main object of the present invention is to provide an exhaust gas intake pipe connected to a bypass pipe, and a bypass pipe is provided with a first pipe connected to a fresh air intake pipe at the rear end of the cooling zone in the runner. 7 200823412 The road 'reconnecting area in the re-connecting wheel' to improve the air quality of the exhaust system and method. The second-purpose object of the present invention is that when a heat-dissipating device is provided as a heat exchange device, the partially exhausted exhaust gas can be pre-processed through the heat exchange device and then delivered to the desorption region in the runner. Desorbing 'to improve the efficiency of removing exhaust gas. In order to achieve the above object, the present invention is an exhaust gas discharge device and method, which mainly comprises an exhaust gas intake pipe, a runner, a side ventilation f, a fresh air intake pipe, a..., a source f, a heat source I. a first, a damper, a second damper, a _combustion furnace, a first reduction machine, a second exhaust fan, and a smoke from; the exhaust gas intake pipe is connected to the adsorption zone in the runner, and then connected to the first exhaust fan To the chimney, the exhaust gas inlet pipe is connected with a side air pipe, and the side L is said to be connected with the exhaust gas intake pipe to form a circuit, and the side air pipe is provided with a first air door and a second air door to block However, the exhaust gas leaks, and the bypass pipe is provided with a first pipe connected to the fresh air intake pipe at the rear end of the cooling zone in the runner, so that the exhaust gas leaking from the internal portion of the bypass pipe is pumped to the fresh air. In the gas pipeline, the fresh air intake pipeline is connected to the cooling zone in the runner, and then connected to the desorption area in the runner through the heat source pipeline, and the heat source device is connected to the heat source pipeline to provide the The exhaust gas of the heat source pipe is heated and provides desorption in the runner a regional heat source, the second exhaust fan is disposed between the runner and the combustion furnace to extract the concentrated exhaust gas desorbed in the desorption region of the pump to the combustion furnace, and burn the concentrated exhaust gas desorbed in the runner through high temperature The reaction is removed, and the smoke is connected to the combustion furnace to discharge the gas after burning, thereby improving the exhaust quality. Other features and embodiments of the present invention can be further understood in the following detailed description of the accompanying drawings. [Embodiment] As shown in Fig. 1, it is a schematic structural view of the exhaust gas discharge device of the present invention, which mainly includes an exhaust gas intake pipe 10, a runner 20, a side air pipe 30, and a fresh The air intake pipe 6 G, the heat source pipe 61, the heat source device 40, the first damper 51, the second damper 52, the first exhaust fan 53, the second exhaust fan 54, a combustion smoke from the 80, The exhaust gas 11 enters through the exhaust gas intake pipe 1 , and the seismic air intake official road 10 connects the adsorption region 21 in the runner 20 , and then connects the first exhaust fan 5 3 to the smoke from 8 〇, so After the exhaust gas 11 is sucked by the adsorption region 21 in the runner 20, the concentration of the exhaust gas is reduced to the standard #, and the connected first air blower 5 3 draws the gas to the smoke _80. The exhaust gas intake pipe 10 is connected with a side air pipe 3 0 (By
Pass) ’ 4旁通風管3 〇兩端與廢氣進氣管路1 〇相連接形成一迴路， ”中該廢乳進氣管路10上於轉輪20前端設有電動風門12及第一 風機5 3後端設有逆止風門13，以控制廢氣1 1之風量，而該旁 、& 3〇上没有第一風門51及第二風門52，以阻卻廢氣11的 线漏，使廢^ 1。 式乳1 1不會因未經過轉輪2 0之吸附，而將廢氣1 1直接 煙1118 0排放至大氣中，其中第-風Η 5 1及第二風Η 5 2各設 有馬達5 a j-- ^ 0、b 6供轉速控制，另該第一風門51及第二風門5 2亦 可為氣動式簡辭動式風門。 然因第一風門51及第二風門5 2不 易氣资 、 管 〃在’造成部分廢氣11亦然會洩漏進旁氣通風管3 0裏，使旁通 β 3 〇内會殘留部份洩漏的廢氣11，故旁通風管3 0中設有第一 路3 2連接至轉輪2 〇中之冷卻區域2 2後端之新鮮空氣進氣管路 9 200823412 60，以供將旁通風管3G内部份浅漏的廢氣i i抽送至新鮮空氣進 氣管路6 0裏，其中該旁通風管3 0中之第一管路3 2上設有一閥門 31 ’以控制部伤线漏的廢氣1 1之進出。該新鮮空氣進氣管路6 〇 係連接轉輪2 G中之冷卻H域2 2，再經過熱源管路6以接到轉輪 2 0中之脫附區域2 3裏’以供將旁通風管3 q内的部份麟的廢氣 11輸送到轉輪2 0中之脫附區域2 3裏脫附。該熱源裝置4 〇係連 接熱源管路61，以提供通過該熱源管路61之廢氣丄^加熱，並提 供轉輪2 0中之脫附區域2 3熱源，來將廢氣丄丄脫附形成濃驗氣 1 4 ’其中_熱源裝置4 0係為条氣設備，藉由蒸氣的熱量來當熱源， 亦可為電熱設備，藉由電熱的熱量來當熱源。該第二抽風機5 4係設 於轉輪2 0中之脫附區域2 3及燃燒爐7 〇間之管路上，以抽送轉輪 2 0中之脫附區域2 3所脫附之濃縮廢氣14，將濃縮廢氣14送至 燃燒爐7 0中，且將濃細廢氣14經高溫燃燒反應去除，而煙_8 〇 係連接燃燒爐7 0，以將燃燒後之氣體排出。 請參考第2〜3圖所示，係為本發明廢氣排放裝置之另兩種實施 例結構示意圖，其中該熱源裝置4 〇係為熱交換設備時，該熱交換設 備係將乾淨氣體作為熱傳導介質來進行熱交換，並將熱傳導介質傳送 至該轉輪2 0中之脫附區域23裏，以提供轉輪2 0脫附廢氣i丄之 熱源。而原新鮮空氣進氣管路6 0係連接熱源管路61 (如第1圖所 示）’亦可為新鮮空氣進氣管路6 0連接至熱交換設備一端，將新鮮空 氣進氣管路6 0中的氣體送至熱交換設備中預熱，再經由熱交換設備 200823412 的另連接熱源官路6 1 ’將預熱後之氣體經熱源管路6 1輸送至 轉輪2 〇中之脫附區域2 3裏，並亦形成可將旁通風管3 〇内的部份 洩漏的廢氣11經由熱交換設備裏，再輸送到轉輪2 〇中之脫附區域 23裏脫附（如第2圖所示）。另該新鮮空氣進氣管路6〇之進氣端 亦可與廢氣進氣管路1 〇連接(如第3圖所示），使原供轉輪2 0中之 冷卻區域2 2降溫用之新鮮空氣，改用廢氣進氣管路i 0中之廢氣工 1 ’來達到同樣供轉輪2 0中之冷卻區域2 2降溫用，及藉新鮮空氣 進氣管路6 0輸送到熱交換設備裏來預熱供脫附用。該廢氣進氣管路 1 0連有一旁通風管3 〇 (By Pass)，該旁通風管3 0兩端與廢氣進氣 管路10相連接形成一迴路，而旁通風管3 0中設有第一管路3 2連 接至轉輪2 〇中冷卻區域2 2後端之新鮮空氣進氣管路6 0，再連接 至熱交換設備一端，以將廢氣11輸送到熱交換設備4 0裏，而該熱 交換設備一端係連接轉輪2 0中之脫附區域2 3，使廢氣11經預熱 後送往轉輪2 0中之脫附區域2 3脫附。該第二抽風機5 4係設於轉 輪2 0中之脫附區域2 3及燃燒爐7 0間之管路上，以抽送轉輪2 0 中之脫附區域2 3所脫附之濃縮廢氣14，將濃縮廢氣14送至燃燒 爐7 0中，其中燃燒爐7 0設有第一廢氣燃燒室71及第二廢氣燃燒 室7 2，在第一廢氣燃燒室71及第二廢氣燃燒室7 2各設有進氣管 7 3、7 5及出氣管7 4、7 6，供濃縮廢氣14進入燃燒爐7 〇中 燃燒裂解，並在9 0秒可切換第一廢氣燃燒室71及第二廢氣燃燒室 7 2來交替燃燒，使濃縮廢氣14能燃燒裂解均勻’而燃燒後氣體經 200823412 煙囪80排出，其中該燃燒爐7〇嫩 ， “、、麂後之熱此係提供給熱交換設備 當熱能，以提升熱交換設備的熱能者。 請參考第4圖所示，係為本發明_插兹#u , 一 種苽氣排放之方法的步驟流程 示意圖，其係包含下列步驟·· 步驟-9Q、該廢氣經由廢氣進氣管路進入，經轉輪中之吸附區 域吸附廢氣後，再由第—抽風機抽送經煙自排出； 步驟二91、該廢氣進氣管路連有旁通風管，旁通風管上設有第 -風門及第二風門，以阻卻廢氣的朗，而部份泡 漏的廢氣會進入旁通風管内； 步驟三9 2、而旁通風管上設有第一管路，將旁通風管内部㈣ 漏的廢氣藉第-轉輸送進轉輪巾冷卻區後端之新 鮮空氣進氣管路裏； 步驟四9 3、而部份、搞的廢氣經新鮮空氣進氣管路再經過熱源 管路連接到轉輪中之脫附區域裏； 步驟五9 4、而熱職置係連接熱源管路，以提供通過該熱源管 路之廢氣加熱，並提供轉輪中之脫附區域熱源，將 進入轉輪中之脫附區域的廢氣脫附形成濃縮廢氣； 步驟六9 5、而濃縮廢氣經第二抽風機抽送至燃燒爐中，經高溫 燃燒反應去除；以及 步驟七9 6、而燃燒後之氣體經煙自排出。 由上可知，本發明之裝置係具有如下實用優點： 1、一種廢氣進氣管路連有一旁通風管，而旁通風管中設有第一管路連 12 200823412 接至轉輪中冷卻區後端之新鮮空氣進氣管路，以提昇空氣品質者。 2、 本，置亚透過第二抽風機在轉輪之後以形成負壓狀態，將廢氣藉 1路輸送轉輪巾冷卻區後端之麟空氣進氣管路巾，再輸 熱交換設備裏，以提昇去除廢氣之效率者。 」、 3、 本裝置藉由旁通風管(By咏牡設有設有第一風門及第二風門， 以阻卻廢氣的洩漏。 以上所述者，僅為本發明之較佳實施例而已，舉凡依本發明申請 專利細所做之均等設計變化，均應為本案之技術所涵蓋。 綜上所述，本發明揭示一種可有效節省能源、並達到排放之桿準 及效率之魏排放裝置，具有_性，以及產紅之_價值，^依 法提出發明專利申請。 13 200823412 【圖式簡單說明】 第1圖係為本發明廢氣排放裝置之結構示意圖。 第2圖係為本發明廢氣排放裝置之第一實施例結構示意圖。 第3圖係為本發明廢氣排放裝置之第二實施例結構示意圖。 第4圖係為本發明步驟流程示意圖。 【主要元件符號說明】 10、廢氣進氣管路 1 1、廢氣 1 2、電動風門 13、 逆止風門 14、 濃縮廢氣 2 0、轉輪 21、吸附區域 ' 2 2、冷卻區域 23、脫附區域 3 0、旁通風管 3 1、閥門 3 2、第一管路 40、熱源裝置 51、第一風門 5 2、第二風門 200823412 、第一抽風機 、第二抽風機 、馬達 、馬達 、新鮮空氣進氣管路 、熱源管路 、燃燒爐Pass) '4 side ventilation pipe 3 〇 both ends are connected with the exhaust gas intake pipe 1 形成 to form a circuit,” the waste milk intake pipe 10 is provided with an electric damper 12 and a first fan at the front end of the runner 20 5 3 The rear end is provided with a reverse damper 13 to control the air volume of the exhaust gas 1 1 , and the first damper 51 and the second damper 52 are not provided on the side, & 3 , to block the line leakage of the exhaust gas 11 ^ 1. The milk 1 1 does not discharge the exhaust gas 1 1 direct smoke 1118 0 into the atmosphere because it has not been adsorbed by the runner 20, wherein the first wind Η 5 1 and the second wind Η 5 2 are respectively provided. The motor 5 a j-- ^ 0, b 6 is used for the speed control, and the first damper 51 and the second damper 52 can also be a pneumatic simple damper. However, the first damper 51 and the second damper 5 2 It is not easy to get gas and pipe, and some of the exhaust gas 11 will leak into the side air venting pipe 30, so that some of the leaking exhaust gas 11 will remain in the bypass β 3 ,, so the side vent pipe 30 is provided. The first passage 3 2 is connected to the fresh air intake line 9 at the rear end of the cooling zone 2 2 of the runner 2 2008 200823412 60 for pumping the exhaust gas ii which is shallow inside the bypass vent pipe 3G to the fresh air In the intake line 60, the first line 3 2 of the side air duct 30 is provided with a valve 31' to control the entry and exit of the exhaust gas 11 leaking from the line. The fresh air intake line 6 The raft is connected to the cooling H-zone 2 2 in the runner 2 G, and then passes through the heat source pipeline 6 to be connected to the detachment zone 2 3 in the runner 20 for the part of the ventilating pipe 3 q The exhaust gas 11 is delivered to the desorption region 23 in the rotor 20 for desorption. The heat source device 4 is connected to the heat source conduit 61 to provide exhaust gas through the heat source conduit 61, and provides a runner In the desorption area of 2 0, the heat source is used to desorb the exhaust gas to form a concentrated gas. 1 4 ' Among them, the heat source device 40 is a gas gas device, and the heat of the steam is used as a heat source, and may be electric heat. The device is used as a heat source by the heat of the electric heat. The second exhaust fan 54 is disposed on the pipeline between the desorption region 23 of the runner 20 and the crucible 7 to pump the reel 20 The concentrated exhaust gas 14 desorbed in the desorption region 23, the concentrated exhaust gas 14 is sent to the combustion furnace 70, and the concentrated exhaust gas 14 is removed by the high-temperature combustion reaction, and the smoke _8 is connected to the combustion The furnace 70 is discharged to discharge the gas after combustion. Referring to Figures 2 to 3, it is a schematic structural view of two other embodiments of the exhaust gas discharge device of the present invention, wherein the heat source device 4 is a heat exchange device. When the heat exchange device uses a clean gas as a heat transfer medium for heat exchange, and transfers the heat transfer medium to the desorption region 23 in the runner 20 to provide a heat source for the rotor 20 to desorb the exhaust gas The original fresh air intake line 60 is connected to the heat source line 61 (as shown in Fig. 1). It can also be a fresh air intake line 60 connected to one end of the heat exchange device, and the fresh air intake pipe The gas in the road 60 is sent to the heat exchange equipment for preheating, and then the preheated gas is sent to the runner 2 through the heat source pipeline 6 1 via the other connected heat source official road 6 1 ' of the heat exchange device 200823412. In the desorption region 23, and also forming an exhaust gas 11 which can leak a part of the side vent pipe 3 经由 through the heat exchange device, and then transported to the desorption region 23 in the turret 2 脱 to desorb (such as 2 is shown). In addition, the intake end of the fresh air intake line 6〇 can also be connected to the exhaust gas intake line 1 (as shown in FIG. 3), so that the cooling area 2 2 of the original supply wheel 20 is cooled. Fresh air, use the exhaust gas 1 ' in the exhaust gas intake pipe i 0 to reach the cooling zone 2 2 in the same supply wheel 20 to cool down, and transport the fresh air intake pipe 60 to the heat exchange device Preheated for desorption. The exhaust gas intake pipe 10 is connected with a bypass pipe 3 〇 (By Pass), and the two sides of the bypass air pipe 30 are connected with the exhaust gas intake pipe 10 to form a circuit, and the bypass air pipe 30 is provided with The first line 3 2 is connected to the fresh air intake line 60 at the rear end of the cooling zone 2 2 of the runner 2, and is connected to one end of the heat exchange device to transport the exhaust gas 11 into the heat exchange device 40. One end of the heat exchange device is connected to the desorption region 23 in the reel 20, and the exhaust gas 11 is preheated and sent to the desorption region 23 in the reel 20 for desorption. The second exhaust fan 54 is disposed on the pipeline between the desorption region 23 of the runner 20 and the combustion furnace 70, and is used to extract the concentrated exhaust gas desorbed from the desorption region 2 in the reel 20. 14. The concentrated exhaust gas 14 is sent to the combustion furnace 70, wherein the combustion furnace 70 is provided with a first exhaust gas combustion chamber 71 and a second exhaust gas combustion chamber 72, in the first exhaust gas combustion chamber 71 and the second exhaust gas combustion chamber 7. 2 each is provided with an intake pipe 7 3, 7 5 and an outlet pipe 7 4, 7 6 for the concentrated exhaust gas 14 to enter the combustion furnace 7 燃烧 combustion cracking, and can switch the first exhaust gas combustion chamber 71 and the second at 90 seconds The exhaust gas combustion chamber 7 2 is alternately combusted, so that the concentrated exhaust gas 14 can be burned and cracked uniformly, and the burned gas is discharged through the 200823412 chimney 80, wherein the combustion furnace 7 is tender, and the heat after the heat is supplied to the heat exchange equipment. When heat is used to increase the heat capacity of the heat exchange equipment, please refer to Fig. 4, which is a schematic flow chart of the method of the method for removing helium gas, which comprises the following steps: Steps - 9Q, the exhaust gas enters through the exhaust gas intake pipe, and after adsorbing the exhaust gas through the adsorption region in the runner, The first-exhaust fan is pumped out and discharged through the smoke; Step 2: 91. The exhaust gas inlet pipe is connected with a side ventilation pipe, and the side air damper is provided with a first damper and a second damper to block the exhaust gas. The exhaust gas of the bubble will enter the side air duct; Step 3 9 2. The first pipeline is provided on the side air duct, and the exhaust gas inside the side air duct (4) is transported into the rear end of the cooling zone of the rotating towel by the first-rotation In the fresh air intake line; Step 4: 3, and part of the exhaust gas is connected to the desorption area in the runner through the fresh air intake line and through the heat source line; Step 5: 4, and heat The job is connected to the heat source pipeline to provide exhaust gas heating through the heat source pipeline, and provides a heat source in the desorption area of the runner to desorb the exhaust gas entering the desorption region in the runner to form concentrated exhaust gas; Step 6:9 5. The concentrated exhaust gas is pumped to the combustion furnace through the second exhaust fan, and is removed by the high temperature combustion reaction; and the step VII, and the burned gas is discharged through the smoke. As can be seen from the above, the device of the present invention has the following practicalities. Advantages: 1. One exhaust gas intake pipe has one The side air duct is provided with a first pipeline connection 12 200823412 connected to the fresh air intake pipeline at the rear end of the cooling zone in the runner to improve the air quality. 2. Ben, through the second After the runner is in the negative pressure state, the exhaust gas is transported by the exhaust air to the air intake pipe of the rear end of the cooling zone of the rotating towel, and then transferred to the heat exchange equipment to improve the efficiency of removing the exhaust gas. 3. The device is provided with a first damper and a second damper to prevent leakage of the exhaust gas by the side venting pipe. The above is only a preferred embodiment of the present invention. The uniform design changes made according to the patent application of the present invention should be covered by the technology of the present invention. In summary, the present invention discloses a Wei discharge device which can effectively save energy and achieve the emission standard and efficiency. _ Sex, and the value of red, _ value, ^ legally filed a patent application. 13 200823412 [Simple description of the drawings] Fig. 1 is a schematic view showing the structure of the exhaust gas discharge device of the present invention. Figure 2 is a schematic view showing the structure of the first embodiment of the exhaust gas discharge device of the present invention. Figure 3 is a schematic view showing the structure of a second embodiment of the exhaust gas discharge device of the present invention. Figure 4 is a schematic flow chart of the steps of the present invention. [Main component symbol description] 10. Exhaust gas intake pipe 1 1. Exhaust gas 1 2. Electric damper 13, reverse damper 14, concentrated exhaust gas 20, runner 21, adsorption zone '2, cooling zone 23, desorption Zone 30, side vent pipe 3 1, valve 3 2, first pipeline 40, heat source device 51, first damper 5 2, second damper 200823412, first exhaust fan, second exhaust fan, motor, motor, fresh Air intake pipe, heat source pipe, combustion furnace
P 、第一廢氣燃燒室 、第二廢氣燃燒室 、進氣管 、出氣管 、進氣管 、出氣管 、煙囪 、步驟一 、步驟二 、步驟三 、步驟四 、步驟五 、步驟六 、步驟七 15P, first exhaust gas combustion chamber, second exhaust gas combustion chamber, intake pipe, gas outlet pipe, intake pipe, gas outlet pipe, chimney, step one, step two, step three, step four, step five, step six, step seven 15