200827622 九、發明說明： 【發明所屬之技術領域】 本發明係有關一種熱回收裝置及古、土 直及其方法，尤指-種藉由回收财堯 爐及轉輪廢氣熱能之設計，使得本發明具有提升熱回收效率之功效， 而適於應用處理廢氣之裝置或類似結構者。 〆 【先前技術】 在台灣半導體或光電產業等製程中所產生的揮發性有機物VOCs (Volatile 〇rganic C〇mp〇Unds)0f , ； 燒機燃燒所組合而成的-套系統，其去除效率可達9 5%以上，缺而 t燃燒的過財為了要將V〇CS贿完全峨分解，必_燃燒溫度 k升至約7 Q Q C以上，所以需添加燃料以提升溫度，在目前台灣半 導體廠大部份是添加天減，因此可以想像—年所花f的成本U麼 可觀的，且燃料的燃燒過程中，同時產生了一些副產物，如NOX、S0x 及C〇X等，造成整體環境的污染。 且目前永續發展的觀念-直在企業界推展，在能源科技技術方 面’著重在再生能源、能源新利用及節約能源等關鍵技術之研究開發， 對於處理V〇Cs廢氣過程中，將廢熱回收不但可以降低運轉成本，又 可達環保功效，實為值得鼓勵開發。 然，目前在處理VOCs廢氣的設備中，燃燒機内部已經有考慮到 廢=回收的事宜，也裝設有熱交換器，但是經過實際量測，燃燒機排 出:度仍然南達約2 7 ^，還是值得再次回收並加以應用，若能充 分回收並加以彻這些熱能，則不但具有製程節能的效果，因而降低 6 200827622 燃料成本，且因需要燃燒的燃料減少，可同時達到製程減廢的目的。 有41表貝際仙上所存有之缺失及限制，本案發明人以從事該項 事業多年之經驗，並精心研究，終於設計出—種躺的熱回收裝置及 其方法。 【發明内容】 本發明之主要目的’在提供—種熱回收裝置及其方法，透過熱交 換器將熱能賴給需要加熱麟體或氣體，來提昇細收之效率，以 達降低燃料成本者。 本發明之次—目的，在提供—種細«置及其方法，經由回收 廢熱，以達製程減廢，符合環保永續發展之目的者。 為達成上述目的，本發明係—種熱回收裝置及其方法係包括有一 轉輪、-廢氣域管路、—第—減機、—第二減機、—新鮮空氣 進^路、-燃燒爐以及—煙自；該轉輪係分為吸附區、冷卻區以及 脫附區，且該·區、冷聽以及脫_各設有進氣管路與排氣管路， 該轉輪冷卻及脫附區設有灑水設備，該絲聽管路錢接轉輪吸附 區之進氣管路’該第—抽風機係與轉輪吸附區之排氣管路相連接，該 第二抽風機係'與轉輪脫_之排氣管路相連接，該新鮮空氣進氣管 路’係新鮮空氣提供之管路，並與轉輪冷卻區之進氣管路相連接，該 燃燒爐係設置有第-〜第三熱交換設備與—裂解室，該第—〜第三熱 交換設備錢解室各設麵氣t路與職管路，料—熱交換設備之 排氣管路與做室之進錄料接，而裂解室之職管路再連接至第 一熱交換設備之進氣管路，該第—熱交換設備之另-魏管路係與第 7 200827622 -熱父換雜之進氣管路相連接，該第二熱交銳備之排氣管路係盘 :二熱交換設叙進歸《連接，而該第二贼換設備之另-排氣 吕路_轉輪脫附區之進氣管路相連接，且該第二熱交換設備之另— 進“路係與轉輪冷卻區之排氣管路相連接，以及—煙⑽連接第— 抽風機與第三熱交細_錄路，射，_輪脫_之排氣管 路係連接至賴燒爐，且第三熱交換設備之減管路可與其他裝置相 連接以提供«置熱源，藉此，可達充分賴並純利用者。 本1明之其他特點及具體實施例可於以下配合附圖之詳細說明 中，進一步瞭解。 【實施方式】 睛翏考第1圖所示，係為本發明熱回收裝置之結構示意圖，主要 係匕各有_轉輪2 q、—廢氣進氣管路1q、—第—抽風機3 〇、一 弟一抽風機3 1、一新鮮空氣進氣管路1 5、-燃燒爐5 〇及-煙自 6 〇 ;其中該該轉輪2 〇係分為吸附區2 2、冷卻區2 2以及脫附區 23，且該吸附區21、冷卻區22以及脫附區23各設有進氣管路 與排氣管路，該廢氣進氣管路10係連接轉輪2 〇吸附區21之進氣 盲路5亥第一抽風機3 0係與轉輪2 0吸附區2 ；[之排氣管路相連 接，而該第二抽風機3 i係與轉輪2 〇脫附區2 3之排氣管路相連 接忒新鮮空氣進氣管路1 5係提供新鮮空氣，並與轉輪2 〇冷卻區 2 2之進氣管路相連接，該燃燒爐5 〇係設置有第一〜第三熱交換設 備4 〇〜4 2與一裂解室5 1，該第·—第三熱交換設備4 0〜4 2 8 200827622 與裂解室5丨姆繼綱咖，導戀設備4 〇之 T官路4 0 4與裂解室5丄之進氣f路連接，而藤室5丄之排氣 二路再連接至第一熱交換設備4 〇之進氣管路4 〇 p該第一熱交換 設備4◦之另—排氣管路4 Q 3係與第二熱交換設備41之進氣管路 相連接’ 5亥第一熱父換設備4丄之排氣管路4工3係與第三熱 交換設借4 2權制2丨輪，_鍵設備* 2之另 一進氣管路4 2 2係賴填機3 i而她繼附區2 3之 勵糾峨，呢讓州以_職侧2 4係與 乐一熱交換設備4 Q之另-進氣管路4 〇 2相連接，而第三熱交換設 備4 2之排氣管路4 2 3係可與其他裝置相連接以提供該裝置熱源，200827622 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a heat recovery device and an ancient and soil straight method thereof, and more particularly to a design for recovering thermal energy of a waste gas furnace and a rotary exhaust gas. The invention has the effect of improving heat recovery efficiency, and is suitable for applying a device for treating exhaust gas or the like. 〆[Prior Art] Volatile organic compounds VOCs (Volatile 〇rganic C〇mp〇Unds) 0f produced in Taiwan's semiconductor or optoelectronics industry, and the combination of burner burning, the removal efficiency can be Up to 95% or more, the lack of t-burning in order to completely decompose the V〇CS bribe, the combustion temperature k will rise to about 7 QQC or above, so it is necessary to add fuel to raise the temperature. Part of it is to add sky reduction, so it is conceivable that the cost of the year f is considerable, and in the combustion process of the fuel, some by-products such as NOX, S0x and C〇X are generated at the same time, resulting in the overall environment. Pollution. And the concept of sustainable development is directly in the business world. In energy technology, we focus on the research and development of key technologies such as renewable energy, new energy utilization and energy conservation. In the process of treating V〇Cs waste gas, waste heat recovery Not only can it reduce operating costs, but also achieve environmental protection, it is worth encouraging development. However, in the equipment for treating VOCs exhaust gas, the inside of the burner has been considered to be waste = recycling, and a heat exchanger is also installed, but after actual measurement, the burner is discharged: the degree is still about 2 7 ^ It is worth re-recycling and application. If it can fully recover and fully absorb these heat energy, it will not only have the effect of process energy saving, thus reducing the fuel cost of 200827,226, and the reduction of fuel required for combustion can simultaneously achieve the purpose of process waste reduction. . There are 41 missing and restrictions on the table, and the inventor of this case has carefully studied and researched the heat recovery device and its method. SUMMARY OF THE INVENTION The main object of the present invention is to provide a heat recovery apparatus and a method thereof for transferring heat energy through a heat exchanger to a body or a gas to improve the efficiency of fine collection, thereby reducing fuel cost. The second purpose of the present invention is to provide a fine-grained method and a method for recycling waste heat to achieve process reduction and waste, which is in line with the purpose of sustainable development of environmental protection. In order to achieve the above object, the present invention relates to a heat recovery device and a method thereof, including a runner, an exhaust gas domain pipeline, a first-reduction machine, a second reduction machine, a fresh air inlet, and a combustion furnace. And - the smoke from; the runner is divided into an adsorption zone, a cooling zone and a desorption zone, and the zone, the cold listener and the off_ are each provided with an intake pipe and an exhaust pipe, and the runner cools and decouples The sprinkling device is provided in the attached area, and the wire suction pipe is connected to the intake pipe of the adsorption zone of the runner. The first exhaust fan system is connected with the exhaust pipe of the runner adsorption zone, and the second exhaust fan system is connected. 'Connected to the exhaust line of the runner, which is a line provided by fresh air and connected to the intake line of the runner cooling zone, the burner system is provided with The first to the third heat exchange equipment and the cracking chamber, the first to the third heat exchange equipment, the money dissipating chamber, the surface gas t road and the service pipeline, the material-heat exchange equipment, the exhaust pipeline and the chamber The feed material is connected, and the pipeline of the cracking chamber is connected to the intake pipeline of the first heat exchange equipment, and the first-heat pipeline of the first heat exchange equipment It is connected with the 7200827622 - hot father's alternate intake line, the second hot-spotted exhaust pipe is: the second heat exchange is set to "connect, and the second thief is replaced. The other - the exhaust pipe _ the intake line of the detachment zone of the runner is connected, and the other of the second heat exchange device is connected with the exhaust pipe of the runner cooling zone, and - The smoke (10) is connected to the first exhaust fan and the third heat exchange fine_recording, shooting, _wheeling _ the exhaust pipe is connected to the Lai furnace, and the third heat exchange equipment reducing pipeline can be compared with other devices The connection is provided to provide a heat source, and the other features and specific embodiments of the present invention can be further understood from the following detailed description with reference to the accompanying drawings. 1 is a schematic view of the structure of the heat recovery device of the present invention, which mainly has a _runner 2 q, an exhaust gas intake pipe 1q, a first exhaust fan 3 〇, a younger one exhaust fan 3 1 a fresh air intake line 1 5, a combustion furnace 5 〇 and a smoke from 6 〇; wherein the turret 2 is divided into an adsorption zone 2 2. cooling The zone 2 2 and the desorption zone 23, and the adsorption zone 21, the cooling zone 22 and the desorption zone 23 are respectively provided with an intake pipe and an exhaust pipe, and the exhaust gas intake pipe 10 is connected to the runner 2 Zone 21 inlet blind road 5 Hai first exhaust fan 3 0 system and runner 20 adsorption zone 2; [the exhaust pipe is connected, and the second exhaust fan 3 i is decoupled from the runner 2 〇 The exhaust line of zone 2 3 is connected to the fresh air intake line. The 5 series provides fresh air and is connected to the intake line of the runner 2 〇 cooling zone 22, which is provided with First to third heat exchange device 4 〇~4 2 and a cracking chamber 5 1, the third-to-third heat exchange device 4 0~4 2 8 200827622 with cracking chamber 5 丨姆继纲咖, the guiding device 4 〇之T官路4 0 4 is connected to the air intake f road of the cracking chamber 5丄, and the ventilating two way of the rattan room is connected to the first heat exchange equipment 4 进气 the intake line 4 〇p the first A heat exchange device 4 - the exhaust line 4 Q 3 is connected to the intake line of the second heat exchange device 41 ' 5 Hai first hot father replacement equipment 4 丄 exhaust line 4 3 And the third heat exchange is to borrow 4 2 rights to make 2 rounds. _ key equipment * 2 another intake line 4 2 2 is dependent on the filling machine 3 i and her succession area 2 3 incentives, let the state to _ front side 2 4 series and Leyi heat exchange equipment 4 The other Q-intake line 4 〇 2 is connected, and the exhaust line 4 2 3 of the third heat exchange unit 4 2 can be connected to other devices to provide the heat source of the device.
且該第二熱嫩帛4 梅4 t嫩綱_區 /進孔g路相連接’而該第二熱交換設備4丄之另—進氣管路& :、▲輪2 部區2 2之排氣管路相連接，該煙函6 〇係連接 第一抽風細繼腿·…繼路⑴。 廢礼1 It由廢氣進氣管路1〇進入連接轉輪中之吸附區 2 1及附後’因其氣體濃度降低達縣，故可經由第—減機3 〇而 將氣體抽送錄自6議，其減刪細有電動風 門12、，以控制廢氣11排放之風量；該新鮮空氣峨空氣進氣管 路15進入’係連接至轉輪2 〇冷卻區2 2，提供低溫空氣供轉輪2 0冷部區22降溫用，亦可由廢氣11取代新鮮空氣，經由廢氣進氣 官路10連接至新鮮空氣進氣5提供低溫空氣至轉輪 2 0冷卻 9 200827622 區，含有廢熱的氣體由轉輪2 0冷卻區2 2出來再連接到第二熱交換 設備41的進氣管路412裏，經由該第二熱交換設備41之排氣管 路414連接至該轉輪2 〇脫附區2 3進行脫附，從轉輪2 0脫附區 2 3所脫附出來之濃縮廢氣14，利用該第二抽風機31抽送至第三 熱交換設備4 2之進氣管路4 2 2中，再由第三熱交換設備4 2之排 氣管路4 2 4將濃縮廢氣14送至第一熱交換設備4 0之進氣管路4 〇2中，經由第一熱交換設備4 〇將該濃縮廢氣14送至裂解室51 燃燒，該濃縮廢氣14經裂解室51南溫燃燒反應將有機毒物去除， 燃燒後的南溫氣體再送回至弟一熱交換設備40中’由第一熱交換設 備4 〇再傳送第二熱交換設備41，再由第二熱交換設備41將高溫 氣體傳送至第三熱交換設備4 2，最後由第三熱交換設備4 ；[將回收 後的熱能轉換給需要加熱的流體或氣體，如預熱鍋爐7 〇補充水··· 等，或是經由煙囪6 〇排放至大氣令。 另請爹考*2圖，係為本發明熱回收裝置之另—實施例結構示意 圖，與第1财實施例不_地方在於：從脫附區2 3所脫附出來之 濃細廢孔1 4係利㈣第二抽風機3 i直接抽送至第—熱交換設備4 ◦之進麻4 0 2巾，蝴輯三膽_ 2傳送該濃縮 廢氣1 4 ° ’一種熱回收裝置之方法，係包 第3圖係為本”之步驟流程圖 含下列步驟·· 步驟一 8 0、該廢氣 經由廢氣進氣管路進入轉輪吸附區，經由第 200827622 一抽風機而將氣體抽送至煙®排出； 步驟二8 1、該新鮮空氣由新鮮空氣進氣管路進入，連接至轉輪冷 卻區供轉輪冷卻區降溫用； 步驟三8 2、含有廢熱的氣體由轉輪冷卻區出來再連接到第二熱 交換設備的進氣管路裏，經由第二熱交換設備之排 氣管路連接至該轉輪脫附區進行脫附； 步驟四8 3、從轉輪脫附區所脫附出來之濃縮廢氣，利用該第二 抽風機抽送至燃燒爐中之裂解室進行裂解燃燒； 步驟五8 4、該裂解燃燒後的高溫氣體再送回至第一熱交換設 備； 步驟六8 5、該高溫氣體由第一熱交換設備傳送第二熱交換設 備，再由第二熱交換設備傳送至第三熱交換設備； 以及 ^七8 6由第二熱交換設備41將回收後的熱能轉換給需要 加熱的流體或氣體。 由上可知’本發明之裝置及其方法係具有如下實用優點： 、經^熱回，裝置之第三熱交換設備排氣管路與其他裝置相連接， 以提U衣置熱源，藉此可達充分回收廢熱並加以利用 回收之效率者。 2、透過熱回收裝置’經由·廢熱以達製喊廢，以符合環保永續 發展之目的者。 3利用Λ、、回置，經由回收廢熱可達降低燃料成本者。 11 200827622 、上所述者，僅為本發明之較佳實施例而已，舉凡依本發明申請 專m 做之均等設計變化，均應為本案之技術所涵蓋。 本發明揭示一種可有效回收熱能，並達到永續發展與 紅上所述， 降低燃料費用之裝置，具有新穎性 提出發明專利申請。 以及產業上之利用價值，爰依法 【圖式簡單說明】 第1圖係為本發明熱回收裝置之第一奋 f 第？囝仫i士 貝靶例結構示意圖。 弟2圖係為本發明熱回收裝置之第二實施歹处 第3圖係為本發明熱回收裝置 構“圖。 r 一 ，驟流程圖。 【主要元件符號說明】 1 〇、廢氣進氣管路 1 1、廢氣 1 2、電動風門 13、减水設備 1 4、濃縮廢氣 15、新鮮空氣進氣管路 2 0、轉輪 21、吸附區 2 2、冷卻區 2 3、脫附區 3〇、第一抽風機 3 1、弟^一抽風機 12 200827622 4〇、第一熱交換設備 4〇1、進氣管路 4〇2、進氣管路 4〇3、排氣管路 4〇4、排氣管路 41、第二熱交換設備 41 1、進氣管路 412、 進氣管路 413、 排氣管路 414、 排氣管路 4 2、第三熱交換設備 4 21、進氣管路 4 2 2、進氣管路 4 2 3、排氣管路 4 2 4、排氣管路 5〇、燃燒爐 5 1、裂解室 6〇、煙囪 7〇、鍋爐 8〇、步驟一 81、步驟二 13 200827622 8 2、步驟三 8 3、步驟四 8 4、步驟五 8 5、步驟六 8 6、步驟七And the second heat 帛 4 梅 4 t tender _ zone / inlet hole g road connection 'and the second heat exchange equipment 4 丄 another - intake line & :, ▲ wheel 2 area 2 2 The exhaust pipe is connected, and the cigarette 6 is connected to the first exhausting step (...). Waste 1 It is taken from the exhaust gas intake line 1〇 into the adsorption zone 2 1 in the connecting runner and the attached 'because its gas concentration is reduced to reach the county, the gas can be pumped from the 6th through the 3rd reduction machine. It is proposed that the electric damper 12 is controlled to reduce the amount of air discharged from the exhaust gas 11; the fresh air 峨 air intake line 15 is connected to the turret 2 〇 cooling zone 2 2 to provide a low temperature air supply for the runner 2 0 cold section 22 for cooling, can also replace fresh air by exhaust gas 11, connected to the fresh air intake 5 via the exhaust gas intake official road 5 to provide low temperature air to the runner 20 cooling 9 200827622 zone, the gas containing waste heat is transferred The wheel 20 cooling zone 2 2 is again connected to the intake line 412 of the second heat exchange device 41, and is connected to the runner 2 via the exhaust line 414 of the second heat exchange device 41. 3, the desorption is carried out, and the concentrated exhaust gas 14 desorbed from the recirculation zone 2 of the runner 20 is pumped by the second exhaust fan 31 to the intake line 4 2 2 of the third heat exchange device 4 2 . The concentrated exhaust gas 14 is sent to the first heat exchange device 40 by the exhaust line 4 2 4 of the third heat exchange device 4 2 . In the pipeline 4 〇2, the concentrated exhaust gas 14 is sent to the cracking chamber 51 for combustion via the first heat exchange device 4, and the concentrated exhaust gas 14 is removed by the south-temperature combustion reaction of the cracking chamber 51 to remove the organic poison, and the burned south temperature gas And then sent back to the first heat exchange device 40, 'the second heat exchange device 41 is retransmitted by the first heat exchange device 4, and the high temperature gas is transferred to the third heat exchange device 4 2 by the second heat exchange device 41, and finally By the third heat exchange device 4; [converting the recovered heat energy to a fluid or gas that needs to be heated, such as preheating the boiler 7 〇 make-up water, etc., or discharging it to the atmosphere via the chimney 6 。. Please also refer to the *2 figure, which is a schematic structural view of another embodiment of the heat recovery device of the present invention, and the first financial embodiment is not located in the thick waste hole 1 which is desorbed from the desorption zone 23. 4 series profit (4) second exhaust fan 3 i directly pumped to the first heat exchange equipment 4 进 进 4 4 0 2 towel, butterfly three gallbladder _ 2 transfer the concentrated exhaust gas 1 4 ° 'a method of heat recovery device, The flow chart of the first step of the package includes the following steps: Step 1 80. The exhaust gas enters the runner adsorption zone via the exhaust gas intake line, and the gas is pumped to the smoke® through the 200827622 one exhaust fan. Step 2 8 1. The fresh air enters from the fresh air intake pipe and is connected to the runner cooling zone for cooling of the runner cooling zone; Step 3 8 2. The gas containing waste heat is connected by the runner cooling zone and then connected The intake pipe of the second heat exchange device is connected to the rotor desorption zone via the exhaust pipe of the second heat exchange device for desorption; Step 4 8 3. Desorbing from the decoupling zone of the rotor The concentrated exhaust gas is pumped to the cracking chamber in the combustion furnace by the second exhaust fan Pyrolysis combustion; step 5 8 4. The pyrolysis-burned high-temperature gas is sent back to the first heat exchange device; step 6.8, the high-temperature gas is transferred by the first heat exchange device to the second heat exchange device, and then the second heat The switching device is transferred to the third heat exchange device; and the recovered heat energy is converted by the second heat exchange device 41 to the fluid or gas to be heated. It is known from the above that the device of the present invention and the method thereof have the following Practical advantages: After the heat is returned, the exhaust pipe of the third heat exchange device of the device is connected with other devices to raise the heat source of the U clothes, thereby achieving the efficiency of fully recovering the waste heat and utilizing the recycling efficiency. Through the heat recovery device 'through the waste heat to achieve the shouting, in order to meet the purpose of environmentally sustainable development. 3 use Λ,, back, through the waste heat recovery can reduce fuel costs. 11 200827622, above, It is only the preferred embodiment of the present invention, and the equivalent design changes made by the application in accordance with the present invention should be covered by the technology of the present invention. The present invention discloses an effective recovery of thermal energy, and As for the sustainable development and the red, the device for reducing the fuel cost has the novelty to file the invention patent application, and the industrial use value, according to the law [simple description of the drawing] Figure 1 is the heat recovery device of the present invention. The first embodiment of the heat recovery device of the present invention is the second embodiment of the heat recovery device of the present invention. r one, the flow chart. [Main component symbol description] 1 〇, exhaust gas intake pipe 1 1, exhaust gas 1, electric damper 13, water reducing equipment 14, 4, concentrated exhaust gas 15, fresh air intake pipe 20, runner 21, adsorption zone 2 2, cooling zone 2 3, desorption zone 3 〇, first exhaust fan 3 1 , brother ^ 1 exhaust fan 12 200827622 4 〇, first heat exchange equipment 4 〇 1, intake line 4 〇 2, intake Line 4〇3, exhaust line 4〇4, exhaust line 41, second heat exchange device 41 1 , intake line 412, intake line 413, exhaust line 414, exhaust line 4 2, the third heat exchange equipment 4 21, the intake line 4 2 2, the intake line 4 2 3, the exhaust line 4 2 4, the exhaust line 5 〇, the combustion furnace 5 1 , the cracking chamber 6 〇, chimney 7〇, boiler 8〇, step one 81, step two 13 200827622 8 2, step 3 8 3, step 4 8 4, step 5 8 5, step 6 8 6 , step 7