TWM550663U - Improved bypass piping of volatile organic waste gas treatment system - Google Patents

Description

Improved bypass piping for volatile organic waste gas treatment systems

This creation is related to the improvement of the bypass pipeline of a volatile organic waste gas treatment system, especially the ability to reduce the flow rate of the exhaust gas and improve the adsorption effect of the zeolite runner, and is suitable for the semiconductor industry, the photovoltaic industry or the chemical industry. Exhaust gas processor of the industrial plant.

As environmental awareness rises, in order to reduce air pollution, the government has set stricter standards for chimney emissions, especially for volatile organic waste gases generated by semiconductor-related industries. The reduction rate should be greater than 90%, or The total emissions are less than 0.6kg/hr.

At present, the industry is dealing with its volatile organic waste gas, which is firstly passed through the exhaust gas line to enter the zeolite runner for adsorption, to concentrate volatile organic pollutants and then burned through the combustion furnace, and then discharge the cleaned combustion gas to In the atmosphere.

However, in the current practice, since the exhaust gas is adsorbed through the runner, the flow rate of the exhaust gas is likely to cause a decrease in the adsorption effect of the runner, and the emission standard of the gas discharged through the chimney cannot be improved.

Therefore, in view of the above-mentioned shortcomings, the creator can propose a bypass pipeline improvement of a volatile organic waste gas treatment system with environmental protection efficiency of energy saving and carbon reduction, so that the user can easily operate the assembly, and is a research and design group. System, in order to provide user convenience, is the creative motive of the creators.

The main purpose of the present invention is to provide a bypass line improvement of a volatile organic waste gas treatment system, which includes an exhaust gas intake line, a zeolite runner, a clean gas discharge line, and a fresh air intake line. a combination design of a combustion furnace, a concentrated exhaust gas line and a chimney, mainly comprising a bypass line between the exhaust gas intake line and the clean gas discharge line, and the bypass line is connected At least one suction and desorption structure is provided, thereby reducing the flow rate of the exhaust gas, improving the adsorption effect of the zeolite runner, thereby improving the treatment efficiency, and achieving the environmental protection effect of energy saving and carbon reduction, thereby increasing the overall utility.

Another object of the present invention is to provide a bypass line improvement of a volatile organic waste gas treatment system, and an adsorption material is disposed in the adsorption and desorption structure, and the adsorption material is activated carbon. Any one of zeolite, tannin, alumina, manganese oxide, calcium hydroxide or graphene, in order to adsorb and desorb the exhaust gas, so that the concentration of the exhaust gas after adsorption and desorption can be increased and increased, and The suction and desorption structure of the bypass pipeline is provided with a concentrated gas pipeline, and the concentrated gas pipeline is connected to the concentrated exhaust gas pipeline to transport the exhaust gas adsorbed and desorbed through the adsorbent material to In the concentrated exhaust gas line before the combustion furnace, the combustion furnace can perform combustion oxidation of the exhaust gas, so that the treatment efficiency can be improved to improve the use efficiency of the combustion furnace, thereby increasing the overall usability.

In order to achieve the above object, the present invention is a bypass line improvement of a volatile organic waste gas treatment system including an exhaust gas intake line, a zeolite runner, a clean gas discharge line, and a fresh air. An intake line, a combustion furnace, a concentrated exhaust gas line, and a chimney, wherein the zeolite runner is provided with an adsorption zone, a cooling zone and a desorption zone, and the exhaust gas intake pipe is connected to the zeolite runner The adsorption zone, and the clean gas discharge pipe is provided in the suction of the zeolite runner Between the attachment zone and the chimney, and the fresh air intake pipe is connected to the cooling zone of the zeolite runner, and the concentrated exhaust gas pipeline is disposed between the desorption zone of the zeolite runner and the combustion furnace. The utility model is characterized in that: a bypass line is arranged between the exhaust gas inlet pipe and the clean gas discharge pipe, and at least one suction and desorption structure is arranged on the bypass pipe.

In order to further understand the features, features and technical contents of the present invention, please refer to the following detailed description of the present invention and the accompanying drawings, which are only for reference and description, and are not intended to limit the present invention.

10‧‧‧Exhaust air intake pipe

20‧‧‧Zeolite runner

21‧‧‧Adsorption zone

22‧‧‧Cooling area

23‧‧‧Decoupling area

30‧‧‧ clean air discharge pipeline

40‧‧‧Fresh air intake line

50‧‧‧burning furnace

60‧‧‧Concentrated exhaust gas pipeline

70‧‧‧ chimney

80‧‧‧heater

100‧‧‧ bypass line

110‧‧‧Sucking and detaching structure

120‧‧‧Adsorbed materials

130‧‧‧Concentrated gas pipeline

200‧‧‧ bypass line

210‧‧‧Sucking and detaching structure

2100‧‧‧Adsorption barrel

2111‧‧‧Intake line

2112‧‧‧Exhaust gas outlet line

2113‧‧‧Clean gas pipeline

2121‧‧‧Intake line

2122‧‧‧Desorbed gas line

220‧‧‧Adsorbed materials

230‧‧‧Concentrated gas pipeline

240‧‧‧heater

300‧‧‧ bypass line

310‧‧‧Sucking and detaching structure

3100‧‧‧Adsorption barrel

3111‧‧‧Intake line

3112‧‧‧Exhaust gas outlet line

3113‧‧‧Clean gas pipeline

3121‧‧‧Intake line

3122‧‧‧Desorbed gas line

3131‧‧‧Intake line

3132‧‧‧Cooling gas pipeline

320‧‧‧Adsorbed materials

330‧‧‧Concentrated gas pipeline

340‧‧‧heater

The first figure is a schematic diagram of the main system of the creation and the first embodiment.

Figure 2 is a schematic diagram of the main system of the creation and the second embodiment.

Figure 3 is a schematic diagram of the main system of the creation and the third embodiment.

Please refer to FIG. 1 to FIG. 3 , which are schematic diagrams of the present embodiment, and the best implementation method of the bypass pipeline improvement of the volatile organic waste gas treatment system of the present invention is applied to the semiconductor industry, the photoelectric industry or the chemical industry. The exhaust gas treatment of the plant of the related industry enables the exhaust gas flow rate to be reduced, so that the adsorption effect of the zeolite runner and the overall embodiment is improved, thereby improving the treatment efficiency, and achieving the environmental protection efficiency with energy saving and carbon reduction, so that it has practicality.

The main system of the volatile organic waste gas treatment system of the present invention comprises an exhaust gas intake pipe 10, a zeolite runner 20, a clean gas discharge pipe 30, a fresh air intake pipe 40, and a combustion furnace 50. a concentrated exhaust gas line 60 and a chimney 70 (as shown in Figures 1, 2 and 3), wherein the zeolite wheel 20 can also be used with other suctions The concentrating runner is provided with a material, and the zeolite runner 20 is provided with an adsorption zone 21, a cooling zone 22 and a desorption zone 23 to enable adsorption of exhaust gas and desorption of exhaust gas into concentrated exhaust gas.

The exhaust gas intake pipe 10 is connected to the adsorption zone 21 of the zeolite runner 20, so that the adsorption zone 21 of the zeolite runner 20 can adsorb the exhaust gas in the exhaust gas intake pipe 10, and the zeolite runner 20 The other end of the adsorption zone 21 is connected to a clean gas discharge line 30, which is reconnected to the chimney 70 to adsorb less than the adsorption zone 21 passing through the zeolite runner 20. A standard value of gas (which reaches an emission standard due to a decrease in concentration) can be delivered to the chimney 70 for discharge via the clean gas discharge line 30, wherein the exhaust gas intake line 10 is connected to the adsorption of the zeolite runner 20. The zone 21 can pass through a fan (not shown) to pump the exhaust gas in the exhaust gas intake pipe 10 into the adsorption zone 21 of the zeolite runner 20, and the adsorption zone of the zeolite runner 20 The clean air discharge line 30 between the 21 and the chimney 70 may also be provided with a fan (not shown) through which the gas in the clean gas discharge line 30 is pumped to the stack 70 for discharge.

In addition, the fresh air intake duct 40 is connected to the cooling zone 22 of the zeolite runner 20, and the fresh air intake duct 40 carries fresh air through which the cooling of the zeolite runner 20 is provided. The zone 22 is cooled, and the fresh air intake line 40 is reconnected to a heater 80 so that fresh air in the fresh air intake line 40 passes through the cooling zone 22 of the zeolite wheel 20 and can be transported to Heating is performed in the heater 80, and the heater 80 is reconnected to one end of the desorption zone 23 of the zeolite rotor 20 so that the hot gas combusted by the heater 80 can be used as the desorption zone of the zeolite reel 20. The heat source of 23 causes the exhaust gas in the desorption zone 23 of the zeolite rotor 20 to be desorbed into concentrated exhaust gas after passing through the hot gas, and the other end of the desorption zone 23 of the zeolite runner 20 is re-transmitted through the concentrated exhaust pipe. Road 60 to connect to In the combustion furnace 50, the desorbed concentrated exhaust gas passing through the desorption zone 23 of the zeolite rotor 20 can be sent to the combustion furnace 50 via the concentrated exhaust gas line 60 to perform combustion cracking uniformity.

The first embodiment of the present invention is that a bypass line 100 is disposed between the exhaust gas intake line 10 and the clean gas discharge line 30, and the exhaust gas can be passed through the bypass line 100. The exhaust gas in the gas line 10 can be divided into two, and the flow rate of the exhaust gas in the adsorption zone 21 of the zeolite runner 20 to which the exhaust gas intake pipe 10 is connected can be made small to increase the adsorption zone of the zeolite runner 20. The adsorption effect of 21 can reach an efficiency of more than 95% (assuming that the zeolite runner 20 can achieve 95% efficiency without shunting in this embodiment). The bypass line 100 is provided with at least one suction and desorption structure 110, wherein the adsorption and desorption structure 110 is provided with an adsorption material 120 (as shown in FIG. 1), and the adsorption material 120 is active. Any one of carbon, zeolite, tannin, alumina, manganese oxide, calcium hydroxide or graphene, through the absorption and desorption structure 110, adsorbs the exhaust gas entering the bypass line 100, and then passes through the suction and discharge The gas adsorbed by the structure 110 (the gas has an efficiency of more than 99% due to the decrease in concentration, so that a certain proportion of bypass splitting can increase the total processing efficiency to 96% or more, or even 97% or more). The clean air discharge line 30 is sent to the chimney 70 for discharge.

Furthermore, the suction and desorption structure 110 of the bypass line 100 is provided with a concentrated gas line 130, and the concentrated gas line 130 is connected to the concentrated exhaust gas line 60 to be passed through the suction and desorption structure 110. The highly concentrated exhaust gas desorbed after adsorption can be delivered to the fan and concentrated exhaust gas line 60 in front of the combustion furnace 50, and then fed into the combustion furnace 50, so that the combustion furnace 50 can perform combustion of highly concentrated exhaust gas. Work, so that the processing efficiency can be improved, the same When the concentration is increased, the combustion furnace 50 of the present embodiment may be a regenerative combustion furnace (RTO) or a direct combustion furnace (TO).

The second embodiment of the present invention is similar to the design of the main implementation system, and is provided with an exhaust gas intake pipe 10, a zeolite runner 20, a clean gas discharge pipe 30, a fresh air intake pipe 40, and a The main facilities (such as the main implementation system) of the combustion furnace 50, a concentrated exhaust gas line 60 and a chimney 70 are provided with a bypass pipe between the exhaust gas intake pipe 10 and the clean gas discharge pipe 30. The road 200 can pass through the bypass line 200 to divide the exhaust gas in the exhaust gas intake pipe 10 into two, and to make the exhaust gas of the adsorption zone 21 of the zeolite runner 20 to which the exhaust gas intake pipe 10 is connected. The flow rate can be made small to increase the adsorption efficiency of the adsorption zone 21 of the zeolite runner 20 to an efficiency of 95% or more (assuming that the zeolite runner 20 can achieve 95% efficiency without shunting in this embodiment).

The bypass line 20 is provided with at least one suction and desorption structure 210. The suction and desorption structure 210 of the bypass line 200 is provided with a concentrated gas line 230, and the concentrated gas line 230 is connected to the The exhaust gas line 60 is provided, wherein the suction and desorption structure 210 is provided with two adsorption material barrels 2100, and the two adsorption material barrels 2100 are respectively used for adsorption and desorption (for example, switching every hour to separate the original The adsorption material barrel 2100 for adsorption is switched to the adsorption material barrel 2100 for desorption, and the adsorption material barrel 2100 for the original desorption is switched to the adsorption material barrel 2100 for adsorption, and the adsorption material barrel 2100 is designed to be hollow. a long cylindrical shape, a hollow rectangular parallelepiped shape or a hollow spherical shape, and when the adsorption material barrel 2100 is used for adsorption, an intake line 2111, an exhaust gas outlet line 2112, and a clean gas line 2113 are provided. When the adsorption material tank 2100 is used for desorption, it is set as the intake line 2121 and the desorption gas line 2122.

Furthermore, the adsorbent material barrel 2100 of the suction and desorption structure 210 is hollowly provided with an adsorbent material 220, and the adsorbent material 220 is activated carbon, zeolite, tannin, alumina, manganese oxide, calcium hydroxide or graphene. And any one of them, and adsorbing the exhaust gas entering the bypass line 200 through the adsorption material barrel 2100 for adsorption in the suction and desorption structure 210, and then passing the adsorption material for adsorption The gas adsorbed by the barrel 2100 (the efficiency of the gas is more than 99% due to the decrease in concentration, so that a certain proportion of the bypass flow can be increased to 96% or more, or even 97% or more). The adsorption material barrel 2100 is sent to the clean gas line 2113 for adsorption, and is sent to the chimney 70 for discharge, and is adsorbed by the adsorption material barrel 2100 for adsorption. The highly concentrated exhaust gas can be transported to the adsorbent material tank 2100 through the adsorbent material tank 2100 for the adsorption gas supply line 2112 for the desorption time, and the adsorption material barrel 2100 is used for adsorption. Exhaust gas outlet line 2112 and the adsorption The barrel 2100 is provided with a heater 240 between the intake lines 2121 for desorption, and the highly concentrated exhaust gas is heated by the heater 240 to enter the exhaust gas into the adsorption material barrel 2100 for desorption. The desorption is carried out, and the high-concentration exhaust gas desorbed by the desorbing material drum 2100 for desorption is transported to the concentrated gas line 230 by the desorbing gas line 2122 when the adsorbing material tank 2100 is used for desorption. The concentrated gas line 230 is further sent to the concentrated exhaust gas line 60 before the combustion furnace 50, and then sent into the combustion furnace 50 through the concentrated exhaust gas line 60, so that the combustion furnace 50 can be highly concentrated. The combustion of the exhaust gas is performed to uniformly ignite and decompose the highly concentrated exhaust gas. Further, the combustion furnace 50 of the present embodiment may be a regenerative combustion furnace (RTO) or a direct combustion furnace (TO).

The third embodiment of the present invention is similar to the design of the main implementation system, and is provided with an exhaust gas intake pipe 10, a zeolite runner 20, a clean gas discharge pipe 30, a fresh air intake pipe 40, and a The main facilities (such as the main implementation system) of the combustion furnace 50, a concentrated exhaust gas line 60 and a chimney 70 are provided with a bypass pipe between the exhaust gas intake pipe 10 and the clean gas discharge pipe 30. The road 300, through the bypass line 300, can divide the exhaust gas in the exhaust gas intake pipe 10 into two, and make the exhaust gas of the adsorption zone 21 of the zeolite runner 20 to which the exhaust gas intake pipe 10 is connected. The flow rate can be made small to increase the adsorption efficiency of the adsorption zone 21 of the zeolite runner 20 to an efficiency of 95% or more (assuming that the zeolite runner 20 can achieve 95% efficiency without shunting in this embodiment).

The bypass line 300 is provided with at least one suction and desorption structure 310. The suction and desorption structure 310 of the bypass line 300 is provided with a concentrated gas line 330, and the concentrated gas line 330 is connected to the a concentrated exhaust gas line 60, wherein the adsorption and desorption structure 310 is provided with a plurality of adsorption material barrels 3100, and the plurality of adsorption material barrels 3100 are used for adsorption, desorption, and cooling, respectively (for example, one hour apart) The three types of adsorption material barrels 3100 are switched to switch the adsorption material barrel 3100 for the original adsorption to the adsorption material barrel 3100 for desorption, and the adsorption material barrel 3100 for the original desorption is switched to the adsorption material for adsorption. The barrel 3100 is switched between the adsorption material barrel 3100 for adsorption and the adsorption material barrel 3100 for cooling, and the adsorption material barrel 3100 is set to have a hollow long cylindrical shape, a hollow rectangular parallelepiped shape or a hollow spherical shape. When the adsorbent material tank 3100 is used for adsorption, an intake line 3111, an exhaust gas outlet line 3112, and a clean gas line 3113 are provided, and when the adsorbent material tank 3100 is used for desorption, an intake air is provided. The pipeline 3121 and the desorbed gas pipeline 3122, and the adsorbent bucket When the 3100 is set to cool, it is equipped with an intake line. 3131 and a cooling gas line 3132. Therefore, when the adsorbent material tank 3100 is used for adsorption, the intake line 3111 is connected to the exhaust gas intake line 10, and the adsorbent material tank 3100 is used for adsorption. The air outlet line 3112 is connected to the intake line 3121 when the adsorbent material tank 3100 is used for desorption, and the adsorbent material tank 3100 is used for desorption of the exhaust gas outlet line 3112 during adsorption. A heater 340 is disposed between the intake pipe 3121, and the clean gas pipe 3100 for the adsorption is connected to the clean gas discharge pipe 30, and the adsorbent drum 3100 is The desorbing gas line 3122 for desorption is connected to the concentrated gas line 330, and the adsorbing material barrel 3100 is for connecting the external air (for the exhaust gas intake pipe) for cooling. The road 10) is cooled by the adsorbing material tank 3100 for cooling, and is connected to the exhaust gas outlet line 3112 through the adsorbing material tank 3100 as a cooling gas pipe 3132 for cooling.

Furthermore, the adsorbent material barrel 3100 of the suction and desorption structure 310 is hollowly provided with an adsorbing material 320, and the adsorbing material 320 is activated carbon, zeolite, tannin, alumina, manganese oxide, calcium hydroxide or graphene. And any one of them, and adsorbing the exhaust gas entering the bypass line 300 through the adsorption material barrel 3100 for adsorption in the suction and desorption structure 310, and then passing the adsorption material for adsorption The gas adsorbed by the barrel 3100 (the gas has an efficiency of 99% or more due to the decrease in concentration, so that a certain proportion of bypass splitting can increase the total processing efficiency to 96% or more, or even 97% or more). The adsorption material barrel 3100 is sent to the clean gas line 3113 for adsorption, and is sent to the chimney 70 for discharge, and is adsorbed by the adsorption material barrel 3100 for adsorption. The highly concentrated exhaust gas can pass through the adsorption material barrel 3100 for the exhaust gas during the adsorption. The pipeline 3112 is sent to the adsorption material tank 3100 as an intake line 3121 for desorption, and the highly concentrated exhaust gas is heated by the heater 340 to enter the exhaust gas into the adsorption material bucket for desorption. The desorption is carried out in the 3100, and the high-concentration exhaust gas desorbed by the desorbing material drum 3100 for desorption is transported to the concentrated gas pipe by the desorbing gas line 3122 when the adsorbing material tank 3100 is used for desorption. The concentrated gas line 330 is sent to the concentrated exhaust gas line 60 in front of the combustion furnace 50, and then sent into the combustion furnace 50 through the concentrated exhaust gas line 60, so that the combustion furnace 50 can be carried out. The high-concentration exhaust gas is burned to uniformly condense and condense the highly concentrated exhaust gas, and the adsorbent material tank 3100 is used for connecting the external air (or the bypass line 300) for cooling. The adsorbing material tank 3100 for cooling is cooled, and then passed through the adsorbing material tank 3100 as a cooling gas line 3132 for cooling to be connected to the exhaust gas outlet line 3112 to cool the adsorbing material tank 3100. The gas in the cooling gas line 3132 is discharged in time. Further, the combustion furnace 50 of the present embodiment may be a regenerative combustion furnace (RTO) or a direct combustion furnace (TO).

By the above detailed description, it will be apparent to those skilled in the art that the present invention can achieve the foregoing objectives, and has been in compliance with the provisions of the Patent Law, and has filed a patent application.

However, the above is only the preferred embodiment of the present invention, and the scope of the creation of the present invention cannot be limited by this; therefore, the simple equivalent changes and modifications made by the scope of the patent application and the content of the creation specification are All should remain within the scope of this creation patent.

10‧‧‧Exhaust air intake pipe

20‧‧‧Zeolite runner

21‧‧‧Adsorption zone

22‧‧‧Cooling area

23‧‧‧Decoupling area

30‧‧‧ clean air discharge pipeline

40‧‧‧Fresh air intake line

50‧‧‧burning furnace

60‧‧‧Concentrated exhaust gas pipeline

70‧‧‧ chimney

80‧‧‧heater

100‧‧‧ bypass line

110‧‧‧Sucking and detaching structure

120‧‧‧Adsorbed materials

130‧‧‧Concentrated gas pipeline

Claims (8)

The invention relates to a bypass pipeline improvement of a volatile organic waste gas treatment system, which comprises an exhaust gas intake pipeline, a zeolite runner, a clean gas discharge pipeline, a fresh air intake pipeline, and a combustion furnace. a concentrated exhaust gas line and a chimney, wherein the zeolite rotating wheel is provided with an adsorption zone, a cooling zone and a desorption zone, and the exhaust gas intake pipe is connected to the adsorption zone of the zeolite transfer, and the clean gas The discharge line is disposed between the adsorption zone of the zeolite runner and the chimney, and the fresh air intake pipe is connected to the cooling zone of the zeolite runner, and the concentrated exhaust gas pipeline is disposed on the zeolite runner Between the desorption zone and the combustion furnace, a bypass line is disposed between the exhaust gas intake pipe and the clean gas discharge pipe, and the bypass pipe is provided with at least one suction Desorption structure. The bypass pipeline improvement of the volatile organic waste gas treatment system according to claim 1, wherein the suction and discharge structure of the bypass pipeline is further provided with a concentrated gas pipeline, and the concentrated gas pipeline system Connected to the concentrated exhaust line. The bypass pipeline improvement of the volatile organic waste gas treatment system according to claim 1, wherein the adsorption and desorption structure is further provided with an adsorption material, and the adsorption material is further activated carbon, zeolite, silicone Any one of alumina, manganese oxide, calcium hydroxide or graphene. The bypass pipeline improvement of the volatile organic waste gas treatment system according to claim 1, wherein the suction and desorption structure of the bypass pipeline is further provided with two adsorption material barrels, and the two adsorption material barrels The system is used for adsorption and desorption, respectively, and is provided with an intake pipe, an exhaust gas outlet pipe, and a clean gas pipe when the adsorption material barrel is used for adsorption, and the adsorption material barrel is used for desorption. At the time, there are those who have an intake line and a degassing gas line. The improvement of the bypass pipeline of the volatile organic waste gas treatment system according to claim 4, wherein the adsorption material of the adsorption and desorption structure is further provided with an adsorption material, and the adsorption material is further activated carbon. Any one of zeolite, tannin, alumina, manganese oxide, calcium hydroxide or graphene. The bypass pipeline improvement of the volatile organic waste gas treatment system according to claim 1, wherein the suction and desorption structure of the bypass pipeline is further provided with a plurality of adsorption material barrels, and when the adsorption material is When the barrel is used for adsorption, an intake line, an exhaust gas outlet line and a clean gas line are provided, and when the adsorption material barrel is used for desorption, an intake line and a desorbing gas line are provided. In addition, when the adsorption material barrel is set to be cooled, an intake line and a cooling gas line are provided. The improvement of the bypass pipeline of the volatile organic waste gas treatment system according to claim 6, wherein the adsorption tank, the desorption drum and the cooling bucket of the suction and desorption structure are further provided with adsorption materials, and the adsorption material is further provided. The adsorbent material is further one of activated carbon, zeolite, tannin, alumina, manganese oxide, calcium hydroxide or graphene. The bypass line improvement of the volatile organic waste gas treatment system according to claim 4 or 6, wherein the adsorption material barrel is further configured to have a hollow long cylindrical shape, a hollow rectangular parallelepiped shape or a hollow spherical shape.