TWM549653U - Structure of bypass pipe with heating source for volatile organic exhaust gas treatment system - Google Patents

Description

The bypass line of the volatile organic waste gas treatment system has a heat source structure

The present invention relates to a heat source structure for a bypass line of a volatile organic waste gas treatment system, and more particularly to a method for desorbing a suction and desorption structure capable of supplying hot air generated by an incinerator to the bypass line for desorption. It is an exhaust gas processor for plants in the semiconductor industry, optoelectronics industry or chemical industry, with energy-saving and carbon-saving environmental protection.

As environmental awareness rises, in order to reduce air pollution, the government has set stricter standards for chimney emissions, especially for volatile organic waste gases generated by semiconductor-related industries. The reduction rate should be greater than 90%, or The total emissions are less than 0.6kg/hr.

At present, the industry is dealing with its volatile organic waste gas, which is firstly passed through the exhaust gas line to enter the zeolite runner for adsorption, to concentrate volatile organic pollutants and then burned in the incinerator, and then discharge the cleaned combustion gas to In the atmosphere.

In addition, most of the current desorption methods in the industry are provided by desorption of the desorption zone by the hot air heated by the heater. Although convenient, some energy-saving effects cannot be achieved in terms of energy saving and carbon reduction. .

Therefore, in view of the above-mentioned deficiencies, the creator can propose a heat source structure of a bypass line of a volatile organic waste gas treatment system with environmental protection efficiency of energy saving and carbon reduction, so that the use The operator can easily operate the assembly, and is dedicated to research and design, to provide user convenience, and is the creative motive for the creator.

The main purpose of the present invention is to provide a heat source structure for a bypass line of a volatile organic waste gas treatment system, which comprises an exhaust gas intake pipe, a zeolite runner, a clean gas discharge pipe, a bypass pipe, a combination design of a fresh air intake line, an incinerator, a concentrated exhaust line and a chimney, the main purpose of which is that the suction and desorption structure of the bypass line is provided with a heat source line, and the heat source line is Connecting to the incinerator, thereby using the hot air generated by the incinerator to provide the desorption structure of the bypass line for desorption, thereby having the environmental protection effect of energy saving and carbon reduction, thereby increasing the overall Practicality.

Another object of the present invention is to provide a heat source structure for a bypass line of a volatile organic waste gas treatment system, wherein a heater is disposed on the heat source line to prevent the hot air provided by the incinerator from being insufficient for the bypass pipe The desorption of the suction and desorption structure of the road is used to heat the hot air to the temperature at which the desorption is used, so as to facilitate the desorption, so that the treatment efficiency can be improved, thereby increasing the overall usability.

In order to achieve the above purpose, the present invention is a bypass structure of a volatile organic waste gas treatment system having a heat source structure, the exhaust gas treatment system including an exhaust gas intake pipe, a zeolite runner, a clean gas discharge pipe, and a side. a pipeline, a fresh air intake pipeline, an incinerator, a concentrated exhaust gas pipeline, and a chimney, wherein the zeolite runner is provided with an adsorption zone, a cooling zone and a desorption zone, and the exhaust gas intake pipe Is connected to the adsorption zone of the zeolite runner, and the clean gas discharge pipeline is disposed between the adsorption zone of the zeolite runner and the chimney, and the fresh air intake pipeline is connected to the cooling of the zeolite runner Zone, the concentrated exhaust gas line is disposed in the desorption zone of the zeolite runner and the incineration Between the furnaces, one end of the bypass line is connected to the exhaust gas intake pipe, and the other end of the bypass line is connected to the clean gas discharge pipe, and a suction pipe is arranged on the bypass pipe Attached structure, the suction and desorption structure of the bypass pipeline is provided with a concentrated gas pipeline, and the concentrated gas pipeline is connected to the concentrated exhaust gas pipeline, characterized in that: the suction pipeline of the bypass pipeline The structure is provided with a heat source line that is connected to the incinerator.

In order to further understand the features, features and technical contents of the present invention, please refer to the following detailed description of the present invention and the accompanying drawings, which are only for reference and description, and are not intended to limit the present invention.

10‧‧‧Exhaust air intake pipe

20‧‧‧Zeolite runner

21‧‧‧Adsorption zone

22‧‧‧Cooling area

23‧‧‧Decoupling area

30‧‧‧ clean air discharge pipeline

40‧‧‧ Bypass line

50‧‧‧Fresh air intake line

60‧‧‧Incinerator

70‧‧‧Concentrated exhaust gas pipeline

80‧‧‧ chimney

90‧‧‧heater

100‧‧‧Sucking and detaching structure

110‧‧‧Adsorbed materials

120‧‧‧Concentrated gas pipeline

130‧‧‧Adsorption barrel

1311‧‧‧Intake line

1312‧‧‧Exhaust gas outlet line

1313‧‧‧Clean gas pipeline

1321‧‧‧Intake line

1322‧‧‧Desorbed gas line

140‧‧‧Adsorption barrel

1411‧‧‧Intake line

1412‧‧‧Exhaust gas outlet pipe

1413‧‧‧Clean gas pipeline

1421‧‧‧Intake line

1422‧‧‧Desorbed gas pipeline

1431‧‧‧Intake line

1432‧‧‧Cooling gas pipeline

200‧‧‧Hot source pipeline

210‧‧‧heater

The first figure is a schematic diagram of the main system of the creation and the first embodiment.

Figure 2 is a schematic diagram of the main system of the creation and the second embodiment.

Figure 3 is a schematic diagram of the main system of the creation and the third embodiment.

Figure 4 is a schematic diagram of the main system of the creation and the fourth embodiment.

Please refer to FIG. 1 to FIG. 4 , which are schematic diagrams of the present embodiment, and the best implementation method of the heat source structure of the bypass pipeline of the volatile organic waste gas treatment system of the present invention is applied to the semiconductor industry and the photoelectric industry. Or waste gas treatment in the factories of chemical-related industries to improve treatment efficiency and environmental protection with energy saving and carbon reduction.

The main system of the heat source structure of the bypass line of the volatile organic waste gas treatment system of the present invention comprises an exhaust gas intake pipe 10, a zeolite runner 20, a clean gas discharge pipe 30, and a bypass pipe 40. a fresh air intake line 50, an incinerator 60, a concentrated exhaust gas line 70 and a chimney 80 (as shown in FIG. 1), wherein the zeolite rotating wheel 20 can also be a concentrated rotating wheel using other adsorbing materials, and the zeolite rotating wheel 20 is provided with an adsorption zone 21, The cooling zone 22 and the desorption zone 23 are capable of adsorbing exhaust gas and desorbing the exhaust gas into concentrated exhaust gas, and the incinerator 60 may be any one of a regenerative incinerator (RTO) or a direct combustion furnace (TO). .

The exhaust gas intake pipe 10 is connected to the adsorption zone 21 of the zeolite runner 20, so that the adsorption zone 21 of the zeolite runner 20 can adsorb the exhaust gas in the exhaust gas intake pipe 10, and the zeolite runner 20 The other end of the adsorption zone 21 is connected to a clean gas discharge line 30, which is reconnected to the chimney 80 to adsorb less than the adsorption zone 21 passing through the zeolite runner 20. A standard value of gas (which reaches an emission standard due to a decrease in concentration) can be delivered to the chimney 80 for discharge via the clean gas discharge line 30, wherein the exhaust gas intake line 10 is connected to the adsorption of the zeolite runner 20. The zone 21 can pass through a fan (not shown) to pump the exhaust gas in the exhaust gas intake pipe 10 into the adsorption zone 21 of the zeolite runner 20, and the adsorption zone of the zeolite runner 20 The clean air discharge line 30 between the 21 and the chimney 80 may also be provided with a fan (not shown) through which the gas in the clean gas discharge line 30 is pumped to the stack 80 for discharge.

In addition, the fresh air intake duct 50 is connected to the cooling zone 22 of the zeolite runner 20, and the fresh air intake duct 50 carries fresh air through which the cooling of the zeolite runner 20 is provided. The zone 22 is cooled, and the fresh air intake line 50 is reconnected to a heater 90 so that fresh air in the fresh air intake duct can be sent to the heating zone after passing through the cooling zone 22 of the zeolite runner 20. Heating is performed in the vessel 90, and the heater 90 is reconnected to one end of the desorption zone 23 of the zeolite rotor 20 to enable the heater 9 The hot gas burned by 0 is used as a heat source of the desorption zone 23 of the zeolite runner 20, so that the exhaust gas in the desorption zone 23 of the zeolite runner 20 can be desorbed into concentrated exhaust gas after passing through the hot gas, and the zeolite runner The other end of the desorption zone 23 of 20 is further coupled to the incinerator 60 through the concentrated exhaust gas line 70 to pass the desorbed concentrated exhaust gas passing through the desorption zone 23 of the zeolite reel 20 via the concentration. The exhaust gas line 70 is sent to the incinerator 60 for uniform combustion cracking.

Furthermore, one end of the bypass line 40 is connected to the exhaust gas intake line 10, and the other end of the bypass line 40 is connected to the clean gas discharge line 30, through which the bypass line 40 can The exhaust gas in the exhaust gas intake pipe 10 can be divided into two, and the exhaust gas flow rate of the adsorption zone 21 of the zeolite runner 20 to which the exhaust gas intake pipe 10 is connected can be reduced to increase the zeolite runner 20 The adsorption effect of the adsorption zone 21 can reach an efficiency of more than 95% (assuming that the zeolite runner 20 can achieve 95% efficiency without splitting).

In addition, the bypass line 40 is provided with at least one suction and desorption structure 100, wherein the suction and desorption structure 100 of the bypass line 40 is provided with an adsorbing material 110 (as shown in FIG. 1), and the The adsorbent material 110 is any one of activated carbon, zeolite, tannin, activated alumina, molecular sieve, manganese oxide, calcium hydroxide, graphene or hollow fiber, and is passed through the suction and desorption structure 100 of the bypass line 40. The exhaust gas entering the bypass line 40 is adsorbed, and the gas adsorbed through the suction and desorption structure 100 of the bypass line 40 (the gas has an efficiency of 99% or more due to a decrease in concentration, and thus, the passage is constant. The proportional bypass split allows the total process efficiency to be increased to more than 96%, or even more than 97%, to be delivered to the stack 80 via the purge gas line 30 for discharge.

Furthermore, the suction and desorption structure 100 of the bypass line 40 is provided with a concentrated gas line 120, and the concentrated gas line 120 is connected to the concentrated exhaust gas line 70. The highly concentrated exhaust gas desorbed after being adsorbed through the suction and desorption structure 100 of the bypass line 40 can be delivered to the concentrated exhaust gas line 70 in front of the incinerator 60, and the concentrated exhaust gas line is further 70 is transported into the incinerator 60 to allow the incinerator 60 to perform high-concentration exhaust gas combustion to improve the treatment efficiency, and the incinerator 60 may be a regenerative incinerator (RTO) or a direct-fired furnace. (TO) and any of them.

The main structure of the present invention is that the suction and desorption structure 100 of the bypass line 40 is provided with a heat source line 200 (shown in FIG. 1 ), and the heat source line 200 is connected to the incinerator 60. The hot air generated by the incinerator 60 is supplied to the suction and desorption structure 100 of the bypass line 40 for desorption, and has the environmental protection effect of energy saving and carbon reduction.

In addition, the suction and desorption structure 100 of the bypass line 40 may be provided with two adsorption material barrels 130 (as shown in FIG. 2), and the two adsorption material barrels 130 are used for adsorption and desorption respectively ( For example, switching the adsorption material tank 130 for the original adsorption to the adsorption material barrel 130 for desorption, and the adsorption material barrel 130 for the original desorption is switched to the adsorption material barrel 130 for adsorption, The adsorbent material barrel 130 is designed as a hollow long cylindrical shape, a hollow rectangular parallelepiped shape or a hollow spherical shape, and when the adsorption material barrel 130 is used for adsorption, an intake line 1311 and an exhaust gas outlet line 1312 are provided. And the clean gas line 1313, and when the adsorbent material tank 130 is used for detachment, it is set as the intake line 1321 and the desorption gas line 1322.

Further, the highly concentrated exhaust gas adsorbed by the adsorption material tank 130 for adsorption can be transported to the adsorption material discharge tank 13 through the adsorption material tank 130 for the adsorption time to be used for desorption. Intake line 1321, wherein the adsorbent barrel 1 The intake line 1321 for desorption is connected to a heat source line 200, and the heat source line 200 is connected to the incinerator 60 (as shown in FIG. 2) to be produced through the incinerator 60. The hot air is supplied to the adsorbent material tank 130 for use in desorption, and a heater 210 is added to the heat source line 200 to prevent the hot air provided by the incinerator 60 from being desorbed by the adsorbent material barrel 130. When used, the heater 210 is used to heat the hot air to the temperature at which the desorption is used to facilitate the desorption, and the high-concentration exhaust gas desorbed by the desorption drum 130 for desorption is used for the adsorption. The material barrel 130 is sent to the concentrated gas line 120 for the desorption gas line 1322 for desorption, and the concentrated gas line 120 is sent to the concentrated exhaust gas line 70 before the incinerator 60, and then passed through. The concentrated exhaust gas line 70 is fed into the incinerator 60 to allow the incinerator 60 to perform a highly concentrated exhaust gas combustion operation to uniformly ignite and decompose the highly concentrated exhaust gas.

In addition, the suction and desorption structure 100 of the bypass line 40 may be provided with a plurality of adsorption material barrels 140 (as shown in FIG. 3), and the plurality of adsorption material barrels 140 are respectively used for adsorption and desorption. For the purpose of cooling and cooling (for example, the three types of adsorbing material tanks 140 are switched every one hour to switch the adsorbing material tank 140 for the original adsorption into the adsorbing material tank 140 for desorption, and the adsorption for the original desorption is performed. The material tank 140 is switched to the adsorption material tank 140 for adsorption, or the adsorption material tank 140 for adsorption is switched to the adsorption material barrel 140 for cooling, and the adsorption material barrel 140 is set to have a hollow long cylindrical shape. a hollow rectangular parallelepiped or a hollow spherical shape, and when the adsorbent material tank 140 is used for adsorption, an intake line 1411, an exhaust gas outlet line 1412, and a clean gas line 1413 are provided, and when the adsorbent material tank 140 is used When it is used for desorption, an intake line 1421 and a desorption gas line 1422 are provided. Further, when the adsorbent drum 140 is set to be cooled, an intake line 1431 and a cooling gas line 1432 are provided.

Therefore, when the adsorbent material tank 140 is used for adsorption, the intake line 1411 is connected to the exhaust gas intake line 10, and the adsorbent material tank 140 is an exhaust gas outlet line 1412 for adsorption and the adsorption. The material barrel 140 is connected to the intake line 1421 for desorption, wherein the adsorption line barrel 140 is connected to a heat source line 200 for the desorption time, and the heat source line 200 is connected to The incinerator 60 (shown in FIG. 3) is supplied to the adsorbent drum 140 for desorption by hot air generated by the incinerator 60, and a heater is added to the heat source pipe 200. 210, in order to prevent the hot air provided by the incinerator 60 from being used when the adsorbent material drum 140 is used for desorption, passing through the heater 210 to heat the hot air to a temperature for desorption to facilitate desorption, and The adsorbing material tank 140 is connected to the clean gas discharging line 30 for the cleaning gas line 1413, and the adsorbing material tank 140 is a desorbing gas line 1422 for desorption and the concentrated gas. The pipelines 120 are connected to each other, and the adsorption material tank 140 is connected to the intake pipeline 1431 for cooling. Gas (as shown in Fig. 3) (or connected to the clean gas line 1413) (as shown in Fig. 4) to cool the adsorption material barrel for cooling, and then pass through the adsorption material tank 140 The cooling gas line 1432 for cooling is connected to the bypass line 40 and then connected to the clean gas discharge line 30.

The adsorbent material barrels 130 and 140 disposed in the suction and desorption structure 100 of the bypass line 40 are hollowly provided with an adsorbing material 110, and the adsorbing material 110 is activated carbon, zeolite, tannin, and active oxidation. Any one of aluminum, molecular sieve, manganese oxide, calcium hydroxide, graphene or hollow fiber, and through the suction and desorption structure 100 of the bypass line 40 The adsorption material barrels 130 and 140 for adsorption are used to adsorb the exhaust gas entering the bypass line 40, and then the gas adsorbed by the adsorption material barrels 130 and 140 for adsorption (the The gas has an efficiency of 99% or more due to a decrease in concentration, so that a certain proportion of the bypass split can be used to increase the total treatment efficiency to 96% or more, or even 97% or more) for adsorption by the adsorption material barrels 130 and 140. The clean gas lines 1313, 1413 are then delivered to the clean gas discharge line 30 and sent to the stack 80 for discharge.

By the above detailed description, it will be apparent to those skilled in the art that the present invention can achieve the foregoing objectives, and has been in compliance with the provisions of the Patent Law, and has filed a patent application.

However, the above is only the preferred embodiment of the present invention, and the scope of the creation of the present invention cannot be limited by this; therefore, the simple equivalent changes and modifications made by the scope of the patent application and the content of the creation specification are All should remain within the scope of this creation patent.

10‧‧‧Exhaust air intake pipe

20‧‧‧Zeolite runner

21‧‧‧Adsorption zone

22‧‧‧Cooling area

23‧‧‧Decoupling area

30‧‧‧ clean air discharge pipeline

40‧‧‧ Bypass line

50‧‧‧Fresh air intake line

60‧‧‧Incinerator

70‧‧‧Concentrated exhaust gas pipeline

80‧‧‧ chimney

90‧‧‧heater

100‧‧‧Sucking and detaching structure

110‧‧‧Adsorbed materials

120‧‧‧Concentrated gas pipeline

200‧‧‧Hot source pipeline

210‧‧‧heater

Claims (8)

A bypass line of a volatile organic waste gas treatment system has a heat source structure, the exhaust gas treatment system includes an exhaust gas intake line, a zeolite runner, a clean gas discharge pipeline, a bypass pipeline, and a fresh air inlet. a gas pipeline, an incinerator, a concentrated exhaust gas pipeline and a chimney, wherein the zeolite runner is provided with an adsorption zone, a cooling zone and a desorption zone, and the exhaust gas intake pipe is connected to the zeolite runner An adsorption zone, and the clean gas discharge pipeline is disposed between the adsorption zone of the zeolite runner and the chimney, and the fresh air intake pipeline is connected to the cooling zone of the zeolite runner, and the concentrated exhaust gas pipeline The utility model is disposed between the desorption zone of the zeolite runner and the incinerator, and one end of the bypass pipeline is connected to the exhaust gas intake pipeline, and the other end of the bypass pipeline is connected to the clean gas discharge pipe a suction and desorption structure is arranged on the bypass line, and the suction and desorption structure of the bypass line is provided with a concentrated gas line, and the concentrated gas line is connected to the concentrated exhaust gas line , characterized in that: the suction and desorption structure of the bypass line is provided Heat pipe, which is connected to the source line based incinerator's. The bypass line of the volatile organic waste gas treatment system according to claim 1 is a heat source structure, wherein the incinerator is further a regenerative incinerator (RTO) or a direct combustion furnace (TO). One type, and the heat source pipeline is further provided with a heater. The bypass line of the volatile organic waste gas treatment system according to claim 1 is provided with a heat source structure, wherein the suction and desorption structure of the bypass line is further provided with an adsorbent material, and the adsorbent material is further It is any one of activated carbon, zeolite, tannin, activated alumina, molecular sieve, manganese oxide, calcium hydroxide, graphene or hollow fiber. The bypass line of the volatile organic waste gas treatment system according to claim 1 is provided with a heat source structure, wherein the suction and desorption structure of the bypass line is further provided with two adsorption material barrels. The two adsorption material barrels are used for adsorption and desorption, respectively, and when the adsorption material barrel is used for adsorption, an intake line, an exhaust gas outlet line and a clean gas line are provided, and the adsorbent material is additionally used. When the barrel is used for detachment, it is provided with an intake line and a desorbed gas line. The bypass line of the volatile organic waste gas treatment system according to claim 4 is provided with a heat source structure, wherein the adsorption material barrel of the suction and desorption structure is further provided with an adsorption material, and the adsorption material is further Any of activated carbon, zeolite, tannin, activated alumina, molecular sieve, manganese oxide, calcium hydroxide, graphene or hollow fiber. The bypass line of the volatile organic waste gas treatment system according to claim 1 is provided with a heat source structure, wherein the suction and desorption structure of the bypass line is further provided with a plurality of adsorption material barrels, and The adsorption material barrel is provided with an intake pipe, an exhaust gas outlet pipe and a clean gas pipeline when the adsorption is used, and an intake pipe and a desorbed gas pipe are provided when the adsorption material barrel is used for desorption. Road, and when the adsorption material barrel is set to be cooled, the intake line and the cooling gas line are provided. The bypass line of the volatile organic waste gas treatment system according to claim 6 has a heat source structure, wherein the adsorption material barrel of the suction and desorption structure is further provided with an adsorption material, and the adsorption material is further It is any one of activated carbon, zeolite, tannin, activated alumina, molecular sieve, manganese oxide, calcium hydroxide, graphene or hollow fiber. The bypass line of the volatile organic waste gas treatment system according to claim 4 or 6 has a heat source structure, wherein the adsorption material barrel is further configured to have a hollow long cylindrical shape, a hollow rectangular parallelepiped shape or a hollow spherical shape.