CN101362041A - Exhaust emission device and method - Google Patents
Exhaust emission device and method Download PDFInfo
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- CN101362041A CN101362041A CNA2007101438920A CN200710143892A CN101362041A CN 101362041 A CN101362041 A CN 101362041A CN A2007101438920 A CNA2007101438920 A CN A2007101438920A CN 200710143892 A CN200710143892 A CN 200710143892A CN 101362041 A CN101362041 A CN 101362041A
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Abstract
The invention relates to a waste-gas discharging device and a method thereof. The device comprises a waste-gas inlet pipeline, a turning wheel, a lateral ventilation pipe, a fresh-air inlet pipeline, a heat-source pipeline, a heat-source device, a first air door, a second air door, a combustion furnace, a first exhaust fan, a second exhaust fan and a chimney; the waste-gas inlet pipeline is connected with the turning wheel and then connected with the first exhaust fan to the chimney; the waste-gas inlet pipeline is connected with the lateral ventilation pipe; the two ends of the lateral ventilation pipe are connected with the waste-gas inlet pipeline to form a loop; the first air door and the second air door are arranged on the lateral ventilation pipe; a first pipeline in the lateral ventilation pipe is connected to the fresh-air inlet pipeline at the rear end of the cooling area in the turning wheel; the fresh-air inlet pipeline is connected with the cooling area in the turning wheel and is connected to a desorption area in the turning wheel by the heat-source pipeline; the heat-source device is connected with the heat-source pipeline and the second exhaust fan is arranged between the turning wheel and the combustion furnace; the chimney is connected with the combustion furnace so that the gas produced by burning is discharged and the discharging quality is enhanced.
Description
Technical field
The present invention relates to exhaust emission device and method, especially refer to a kind of waste gas that will partly leak in the bypass airduct, pump via first pipeline in the FAI Fresh Air Intake pipeline of the cooled region rear end to the runner, deliver to the design of the desorption zone desorption in the runner again, make the present invention have the effect that promotes exhaust quality, and be suitable for being applied in the place of various semiconductor industries, opto-electronics, other chemistry/chemical industry related industry and related request air quality.
Background technology
Along with the TaiWan, China high-tech industry flourish down, semiconductor industry is day by day grown up rapidly, wherein semiconductor industry can include IC industry and opto-electronics, economy had great influence power, but many waste liquids of in semiconductor subassembly and photoelectric subassembly processing procedure, thereupon having derived, waste water, relevant environmental issue such as waste gas, for example: semiconductor factory has cleaning respectively in the gold-tinted processing procedure, linging, photoresistance covers, soft roasting, exposure, baking, develop, hard roasting or the like step, can use various cleaning fluid, organic solvents such as photoresistance liquid have caused volatile organic matter VOCs (Volatile OrganicCompounds; Be meant that generally under standard state, its vapour pressure is greater than the organic compound more than the 0.1mmHg) generation, and these VOCs overwhelming majority belong to harmful air pollutants (Hazardous Air Pollutants; HAPs), the human body long term exposure has reactions such as producing poisoning and carcinogenicity tumour in the environment that contains high concentration VOCs.In addition, the VOCs meeting photochemical reaction in the atmosphere causes ozone concentration rising and generation high oxidation contact scar thing in the atmosphere.Therefore, the organic solvent steam that these emit must be handled, and can not let alone directly to be discharged in the atmosphere.
And TaiWan, China EPA, Executive Yuan is also in an on January 6, in 999 issue " semiconductor manufacturing industry air pollution control and discharge standard ", according to this standard code, be engaged in IC wafers manufacturing and encapsulation in the semiconductor manufacturing industry, of heap of stone brilliant, operators such as light shield manufacturing and lead frame manufacturing, its full factory volatile organic matter (VOCs) and nitric acid, sulfuric acid, hydrochloric acid, phosphoric acid, inorganic acid year such as hydrofluoric acid, use amount surpassed prescribed limits person, all should include control in, wherein its reduction rate of volatile organic waste gas mandatory requirement should be greater than 90%, or total release is less than 0.6kg/hr.
Generally be engaged at present in the integrated circuit manufacturing industry of manufacturing and foundry, the VOCs prevention and cure of air pollution equipment of implementing running mainly contains the active carbon adsorption tower, runner concentrates incineration, cold plan recovery, wet scrubbing, activated carbon fluidized bed etc., and kind can be said too numerous to enumerate.And existing emission-control equipment has real-world operation experience and mature and stable, how its treatment efficiency can meet the empty dirty rules VOCs exhaust-gas treatment efficient of present domestic semiconductor greater than the requirement more than 90%, even also can meet the requirement of discharge capacity less than 0.6kg/hr simultaneously.
So, handle its volatile organic matter VOCs at present, enter adsorption tower, activated carbon fluidized bed or runner through air inlet pipeline earlier mostly and concentrate devices such as incineration, the clean gas that to pass through again with elder generation's absorption polluter is disposed in the atmosphere, but can concentrate the usefulness of device runnings such as incinerating because of adsorption tower, activated carbon fluidized bed or runner, the gas of discharge can't reach the empty dirty rules VOCs exhaust-gas treatment efficient of semiconductor sometimes greater than the requirement more than 90%.
Because the disappearance and the restriction that are had on actual the use, this case inventor to be being engaged in this cause experience for many years, and studies intensively, and designs a kind of brand-new exhaust emission device and method finally.
Summary of the invention
Main purpose of the present invention, provide a kind of exhaust emission device, its exhaust inlet pipe road is connected with ventilation duct on one side, and be provided with the FAI Fresh Air Intake pipeline that first pipeline is connected to rear end, cooling zone in the runner in the bypass airduct, connect the desorption zone in the runner again, promote the exhaust emission device and the method for air quality.
A time purpose of the present invention, when providing a kind of heat power supply device and being heat-exchange apparatus, the waste gas that this part is leaked can be via after coming preheating in the heat-exchange apparatus, and desorption is come in the desorption zone that is delivered to again in the runner, to promote the efficient of removing waste gas.
For reaching above-mentioned purpose, the present invention is a kind of exhaust emission device and method, consists predominantly of an exhaust inlet pipe road, a runner, one side ventilation duct, a FAI Fresh Air Intake pipeline, a thermal source pipeline, a heat power supply device, first air door, second air door, a combustion furnace, first air exhauster, second air exhauster and a chimney; This exhaust inlet pipe road is the binding domain that connects in the runner, connect first air exhauster again and the chimney that arrives, this exhaust inlet pipe road is connected with ventilation duct on one side, and bypass airduct two ends are connected with the exhaust inlet pipe road and form a loop, this bypass airduct is provided with first air door and second air door, to hinder the but leakage of waste gas, and be provided with the FAI Fresh Air Intake pipeline that first pipeline is connected to rear end, cooling zone in the runner in this bypass airduct, pump to the FAI Fresh Air Intake pipeline for the waste gas that part in the bypass airduct is leaked, this FAI Fresh Air Intake pipeline is the cooled region that connects in the runner, be connected in the desorption zone in the runner through the thermal source pipeline again, this heat power supply device is to connect the thermal source pipeline, so that the waste gas heating by this thermal source pipeline to be provided, and provide the desorption in the runner regional thermal source, this second air exhauster is to be located between runner and combustion furnace, with the concentrated waste gas of pumping the desorption zone desorption in the runner to combustion furnace, and the concentrated waste gas of desorption in the runner is removed through the high-temp combustion reaction, this chimney is to connect combustion furnace, gas after the burning is discharged, by this, promote exhaust quality.
Other characteristics of the present invention and specific embodiment can further be understood in the detailed description of following conjunction with figs..
Description of drawings
Fig. 1 is the structural representation of exhaust emission device of the present invention;
Fig. 2 is the first example structure schematic diagram of exhaust emission device of the present invention;
Fig. 3 is the second example structure schematic diagram of exhaust emission device of the present invention;
Fig. 4 is a steps flow chart schematic diagram of the present invention.
[primary clustering symbol description]
10, exhaust inlet pipe road
11, waste gas
12, MOD
13, non-return air door
14, concentrate waste gas
20, runner
21, binding domain
22, cooled region
23, desorption zone
30, bypass airduct
31, valve
32, first pipeline
40, heat power supply device
51, first air door
52, second air door
53, first air exhauster
54, second air exhauster
55, motor
56, motor
60, FAI Fresh Air Intake pipeline
61, thermal source pipeline
70, combustion furnace
71, the first waste gas burning chamber
72, the second waste gas burning chamber
73, air inlet pipe
74, escape pipe
75, air inlet pipe
76, escape pipe
80, chimney
90, step 1
91, step 2
92, step 3
93, step 4
94, step 5
95, step 6
96, step 7
The specific embodiment
Please refer to shown in Figure 1, being the structural representation of exhaust emission device of the present invention, mainly is to include an exhaust inlet pipe road 10, a runner 20, one side ventilation duct 30, a FAI Fresh Air Intake pipeline 60, a thermal source pipeline 61, a heat power supply device 40, first air door 51, second air door 52, first air exhauster 53, second air exhauster 54, a combustion furnace 70, a chimney 80; This waste gas 11 enters via exhaust inlet pipe road 10, and this exhaust inlet pipe road 10 is the binding domains 21 that connect in the runner 20, connect first air exhauster 53 again and the chimney 80 that arrives, so after binding domain 21 absorption of waste gas 11 in runner 20, its gas is standard up to standard because of concentration reduces, and first air exhauster 53 through connecting pumps gas to chimney 80 discharges.This exhaust inlet pipe road 10 is connected with ventilation duct 30 (By Pass) on one side, these bypass airduct 30 two ends are connected with exhaust inlet pipe road 10 and form a loop, wherein be provided with MOD 12 and first air exhauster, 53 rear ends are provided with non-return air door 13 in runner 20 front ends on this exhaust inlet pipe road 10, air quantity with control waste gas 11, and this bypass airduct 30 is provided with first air door 51 and second air door 52, to hinder the but leakage of waste gas 11, make the waste gas 11 can be because of not passing through the absorption of runner 20, and waste gas 11 directly is disposed in the atmosphere through chimney 80, wherein first air door 51 and second air door 52 respectively are provided with motor 55,56 for rotating speed control, and this first air door 51 and second air door 52 also can be pneumatic type air door or hand air door in addition.So be difficult for airtight because of first air door 51 and second air door 52, cause part waste gas 11 as the same can leakages in other gas ventilation duct 30, make the waste gas 11 that the meeting residual fraction leaks in the bypass airduct 30, so be provided with the FAI Fresh Air Intake pipeline 60 that first pipeline 32 is connected to cooled region 22 rear ends in the runner 20 in the bypass airduct 30, pump to 60 li of FAI Fresh Air Intake pipelines for the waste gas 11 that part in the bypass airduct 30 is leaked, wherein first pipeline 32 in this bypass airduct 30 is provided with a valve 31, the turnover of the waste gas 11 that leaks with control section.This FAI Fresh Air Intake pipeline 60 is the cooled regions 22 that connect in the runner 20, be connected to 23 li in desorption zone in the runner 20 through thermal source pipeline 61 again, be transported to 23 li desorptions in desorption zone in the runner 20 for the waste gas 11 that the parts in the bypass airduct 30 are leaked.This heat power supply device 40 is to connect thermal source pipeline 61, so that waste gas 11 heating by this thermal source pipeline 61 to be provided, and provide the desorption zone in the runner 20 23 thermals source, waste gas 11 desorptions are formed concentrated waste gas 14, wherein this heat power supply device 40 is a steam equipment, by working as thermal source, also can be heating equipment, by working as thermal source by the heat of electric heating by the heat of steam.This second air exhauster 54 is to be located on the pipeline of 70 of desorption zone 23 in the runner 20 and combustion furnaces, to pump the concentrated waste gas 14 of 23 desorptions in desorption zone in the runner 20, to concentrate waste gas 14 delivers in the combustion furnace 70, and will concentrate waste gas 14 removes through the high-temp combustion reaction, and chimney 80 is to connect combustion furnace 70, discharges with the gas after will burning.
Please refer to Fig. 2～shown in Figure 3, two kinds of example structure schematic diagrames in addition for exhaust emission device of the present invention, when wherein this heat power supply device 40 is heat-exchange apparatus, this heat-exchange apparatus is that clean gas is carried out heat exchange as heat-conduction medium, and heat-conduction medium is sent to 23 li in desorption zone in this runner 20, so that the thermal source of runner 20 desorption waste gas 11 to be provided.And former FAI Fresh Air Intake pipeline 60 is 61 (as shown in Figure 1) of connection thermal source pipeline, also can be FAI Fresh Air Intake pipeline 60 and be connected to heat-exchange apparatus one end, gas in the FAI Fresh Air Intake pipeline 60 is delivered to preheating in the heat-exchange apparatus, the other end via heat-exchange apparatus connects thermal source pipeline 61 again, gas after the preheating is delivered to 23 li in desorption zone in the runner 20 through thermal source pipeline 61, and also form the waste gas 11 that the parts in the bypass airduct 30 can be leaked via in the heat-exchange apparatus, be transported to the desorption zone 23 li desorptions (as shown in Figure 2) in the runner 20 again.The inlet end of this FAI Fresh Air Intake pipeline 60 also can be connected (as shown in Figure 3) with exhaust inlet pipe road 10 in addition, make former fresh air for the 22 cooling usefulness of the cooled region in the runner 20, use the waste gas 11 in the exhaust inlet pipe road 10 instead, reach same, and be transported to by FAI Fresh Air Intake pipeline 60 and come preheating to use in the heat-exchange apparatus for desorption for the 22 cooling usefulness of the cooled region in the runner 20.This exhaust inlet pipe road 10 is connected with ventilation duct 30 (By Pass) on one side, these bypass airduct 30 two ends are connected with exhaust inlet pipe road 10 and form a loop, and be provided with the FAI Fresh Air Intake pipeline 60 that first pipeline 32 is connected to cooled region 22 rear ends in the runner 20 in the bypass airduct 30, be connected to heat-exchange apparatus one end again, waste gas 11 is transported to 40 li of heat-exchange apparatus, and this heat-exchange apparatus one end is the desorption zone 23 that connects in the runner 20, makes waste gas 11 be sent to desorption zone 23 desorptions in the runner 20 after preheating.This second air exhauster 54 is to be located on the pipeline of 70 of desorption zone 23 in the runner 20 and combustion furnaces, to pump the concentrated waste gas 14 of 23 desorptions in desorption zone in the runner 20, to concentrate waste gas 14 delivers in the combustion furnace 70, wherein combustion furnace 70 is provided with the first waste gas burning chamber 71 and the second waste gas burning chamber 72, in the first waste gas burning chamber 71 and the second waste gas burning chamber 72 respectively be provided with air inlet pipe 73,75 and escape pipe 74,76, enter the cracking of burning in the combustion furnace 70 for concentrating waste gas 14, and at 90 seconds alternate combustion is come in the changeable first waste gas burning chamber 71 and the second waste gas burning chamber 72, make that to concentrate waste gas 14 cracking of burning even, and burning back gas is discharged through chimney 80, wherein the heat energy after these combustion furnace 70 burnings provides to heat-exchange apparatus and works as heat energy, to promote the heat energy of heat-exchange apparatus.
Please refer to shown in Figure 4ly, be the steps flow chart schematic diagram of the method for a kind of toxic emission of the present invention, it is to comprise the following step:
Step 1 90, this waste gas enter via the exhaust inlet pipe road, behind the binding domain absorption waste gas in runner, are pumped through chimney by first air exhauster and discharge;
The step 3 92 and bypass airduct is provided with first pipeline, the waste gas that part in the bypass airduct is leaked is delivered in the FAI Fresh Air Intake pipeline of rear end, cooling zone in the runner by first pipeline;
Step 4 93 and waste gas that part is leaked are through the FAI Fresh Air Intake pipeline is connected to desorption zone in the runner again through the thermal source pipeline in;
Step 5 94 and heat power supply device are to connect the thermal source pipeline, so that the waste gas heating by this thermal source pipeline to be provided, and provide the thermal source of the desorption zone in the runner, and the waste gas desorption that enters the desorption zone in the runner is formed concentrated waste gas;
Step 6 95 and concentrate waste gas and pump to combustion furnace through second air exhauster is removed through the high-temp combustion reaction; And
Step 7 96 and the burning after gas discharge through chimney.
As from the foregoing, device of the present invention has following practical advantage:
1, a kind of exhaust inlet pipe road is connected with ventilation duct on one side, and is provided with the FAI Fresh Air Intake pipeline that first pipeline is connected to rear end, cooling zone in the runner in the bypass airduct, to promote air quality.
2, this device and see through second air exhauster and waste gas is delivered in the FAI Fresh Air Intake pipeline of rear end, cooling zone in the runner by first pipeline to form negative pressure state at the back of runner is transported in the heat-exchange apparatus, to promote the efficient of removing waste gas again.
3, this device is by being provided with first air door and second air door by bypass airduct (By Pass), to hinder the but leakage of waste gas.
The above only is preferred embodiment of the present invention, the impartial design variation of being done according to the present patent application claim such as, and the technology that all should be this case contains.
In sum, the present invention discloses and a kind ofly can effectively save the energy and reach emission standards and the exhaust emission device of efficient, has novelty, and the value on the industry, proposes application for a patent for invention in accordance with the law.
Claims (12)
1. an exhaust emission device is characterized in that including an exhaust inlet pipe road, a runner, one side ventilation duct, a FAI Fresh Air Intake pipeline, a thermal source pipeline, a heat power supply device, first air door, second air door, a combustion furnace, first air exhauster, second air exhauster and a chimney; This exhaust inlet pipe road is the binding domain that connects in the runner, connect first air exhauster again and the chimney that arrives, this exhaust inlet pipe road is connected with ventilation duct on one side, and bypass airduct two ends are connected with the exhaust inlet pipe road and form a loop, this bypass airduct is provided with first air door and second air door, to hinder the but leakage of waste gas, and be provided with the FAI Fresh Air Intake pipeline that first pipeline is connected to rear end, cooling zone in the runner in this bypass airduct, pump to the FAI Fresh Air Intake pipeline for the waste gas that part in the bypass airduct is leaked, this FAI Fresh Air Intake pipeline is the cooled region that connects in the runner, be connected in the desorption zone in the runner through the thermal source pipeline again, this heat power supply device is to connect the thermal source pipeline, waste gas heating by this thermal source pipeline is provided, and provide the desorption in the runner regional thermal source, this second air exhauster is to be located between runner and combustion furnace, with the concentrated waste gas of pumping the desorption zone desorption in the runner to combustion furnace, and the concentrated waste gas of desorption in the runner is removed through the high-temp combustion reaction, this chimney is to connect combustion furnace, gas after the burning is discharged, by this, promote exhaust quality.
2. exhaust emission device as claimed in claim 1 is characterized in that, is provided with MOD and the first air exhauster rear end is provided with non-return air door in the runner front end on this exhaust inlet pipe road.
3. exhaust emission device as claimed in claim 1 is characterized in that, the inlet end of this FAI Fresh Air Intake pipeline is to be connected with the exhaust inlet pipe road.
4. exhaust emission device as claimed in claim 1 is characterized in that, first pipeline in this bypass airduct is provided with valve, the turnover of the waste gas that leaks with control section.
5. exhaust emission device as claimed in claim 1 is characterized in that, this first air door and second air door respectively are provided with motor, for rotating control.
6. exhaust emission device as claimed in claim 1 is characterized in that, this first air door and second air door are the pneumatic type air door.
7. exhaust emission device as claimed in claim 1 is characterized in that, this first air door and second air door are the hand air door.
8. exhaust emission device as claimed in claim 1 is characterized in that, this heat power supply device is a heat-exchange apparatus.
9. exhaust emission device as claimed in claim 8 is characterized in that, this heat-exchange apparatus is to be connected with combustion furnace.
10. exhaust emission device as claimed in claim 1 is characterized in that, this heat power supply device is a steam equipment.
11. exhaust emission device as claimed in claim 1 is characterized in that, this heat power supply device is a heating equipment.
12. a toxic emission method is characterized in that comprising the following step:
Step 1, this waste gas enter via the exhaust inlet pipe road, behind the binding domain absorption waste gas in runner, are pumped through chimney by first air exhauster and discharge;
Step 2, this exhaust inlet pipe road are connected with the bypass airduct, and the bypass airduct is provided with first air door and second air door, and hindering the but leakage of waste gas, and the waste gas that part is leaked can enter in the bypass airduct;
Step 3 and the bypass airduct is provided with first pipeline, the waste gas that part in the bypass airduct is leaked is delivered in the FAI Fresh Air Intake pipeline of rear end, cooling zone in the runner by first pipeline;
Step 4 and waste gas that part is leaked are through the FAI Fresh Air Intake pipeline is connected to desorption zone in the runner again through the thermal source pipeline in;
Step 5 and heat power supply device are to connect the thermal source pipeline, so that the waste gas heating by this thermal source pipeline to be provided, and provide the thermal source of the desorption zone in the runner, and the waste gas desorption that enters the desorption zone in the runner is formed concentrated waste gas;
Step 6 and concentrate waste gas and pump to combustion furnace through second air exhauster is removed through the high-temp combustion reaction; And
Step 7 and the burning after gas discharge through chimney.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101438920A CN101362041A (en) | 2007-08-06 | 2007-08-06 | Exhaust emission device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101438920A CN101362041A (en) | 2007-08-06 | 2007-08-06 | Exhaust emission device and method |
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| Publication Number | Publication Date |
|---|---|
| CN101362041A true CN101362041A (en) | 2009-02-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007101438920A Pending CN101362041A (en) | 2007-08-06 | 2007-08-06 | Exhaust emission device and method |
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| CN (1) | CN101362041A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102692024A (en) * | 2012-01-14 | 2012-09-26 | 河南科技大学 | Device and method for exhausting waste gas by utilizing industrial waste heat |
| CN103925600A (en) * | 2013-01-15 | 2014-07-16 | 力技科技工程股份有限公司 | Exhaust gas treatment system |
| CN104307363A (en) * | 2014-10-16 | 2015-01-28 | 无锡雪浪环境科技股份有限公司 | Low-temperature NOx enriching and removing system and method |
| CN111457398A (en) * | 2019-01-21 | 2020-07-28 | 华懋科技股份有限公司 | Direct-combustion backflow high-efficiency organic waste gas treatment system and method |
| CN111928278A (en) * | 2020-07-31 | 2020-11-13 | 中国石化北海炼化有限责任公司 | Claus tail gas treatment device |
-
2007
- 2007-08-06 CN CNA2007101438920A patent/CN101362041A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102692024A (en) * | 2012-01-14 | 2012-09-26 | 河南科技大学 | Device and method for exhausting waste gas by utilizing industrial waste heat |
| CN103925600A (en) * | 2013-01-15 | 2014-07-16 | 力技科技工程股份有限公司 | Exhaust gas treatment system |
| CN104307363A (en) * | 2014-10-16 | 2015-01-28 | 无锡雪浪环境科技股份有限公司 | Low-temperature NOx enriching and removing system and method |
| CN111457398A (en) * | 2019-01-21 | 2020-07-28 | 华懋科技股份有限公司 | Direct-combustion backflow high-efficiency organic waste gas treatment system and method |
| CN111928278A (en) * | 2020-07-31 | 2020-11-13 | 中国石化北海炼化有限责任公司 | Claus tail gas treatment device |
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Open date: 20090211 |