200821470 九、發明說明 【發明所屬之技術領域】 本發明係關於利用膜片的振動來產生泵作用之膜片泵 ，特別是關於可小型化且薄型化之膜片泵及薄型流路構造 【先前技術】 本案申請人，正在開發適用於例如水冷筆記型電腦之 冷卻水循環泵之膜片泵（壓電泵）。在零件的收容空間有 限之筆記型電腦，係要求泵之小型化且薄型化。目前已有 下列的先前技術存在。 〔專利文獻 1〕 US2005/0231914A1 〔專利文獻2〕日本特開2005-229038號公報 〔專利文獻3〕日本特開2005-282386號公報 習知的技術，壓電泵的吸入口及排出口係形成從殼體 突出之突出物，連接該兩口之管路一般是採用可撓軟管。 因此，即使壓電泵本身形成薄型小型化，突出物之吸入口 和排出口以及包含該兩口的連接軟管之連接部周圍的構造 ，都會對薄型小型化造成阻礙。 【發明內容】 本發明之目的係提供一種膜片泵，其所具備之管路構 造，對於膜片泵之吸入口及排出口，不須使用軟管體即可 連接管路。 -4- 200821470 本發明係著眼於，在殻體上不是 成吸入口及排出口，而是以凹部的方 及排出流路孔，並在該孔部嵌入板材 所形成之筒狀突起，藉此可謀求小型 亦即，本發明之膜片泵，係具備 體不會洩漏的方式挾持保持在一對殼 振動的膜片； 以連通於泵室的方式形成於一對 入流路孔（具有吸入側止回閥）和排 側止回閥）； 具有吸入側第一流路板和吸入側 路，該吸入側第一流路板係具有連通 突起，該吸入側第二流路板係積層結 路板而構成連通於上述筒狀突起之吸 具有排出側第一流路板和排出側 路，該排出側第一流路板係具有連通 突起，該排出側第二流路板係積層結 路板而構成連通於上述筒狀突起之排 較佳爲，形成於殼體之吸入流路 成互相平行。 此外，若吸入側第一流路板和排 及吸入側第二流路板和排出側第二流 所構成，則可減少零件數目且容易進 流路板之筒狀突起雖可直接嵌合 以突起物的方式來形 式來形成吸入流路孔 (用來構成流路）上 化且薄型化。 :以將周緣密封成液 體間而構成泵室之可 殼體的至少一方之吸 出流路孔（具有排出 第二流路板之吸入流 於吸入流路孔之筒狀 合於該吸入側第一流 入流路；以及 第二流路板之排出流 於排出流路孔之筒狀 合於該排出側第一流 出流路。 孔和排出流路孔係形 出側第一流路板、以 路板都是由單一板材 行組裝。 於殻體之吸入流路孔 -5- 200821470 及排出流路孔，但要使筒狀突起之間距（pitch )和泵的吸 入、排出流路孔的間距與直徑完全一致並不容易，若進行 更高精度的加工則會造成成本上昇，因此較實際的做法， 係在殼體上以和吸入流路孔和排出流路孔同心的方式形成 筒狀突起插入用之環狀槽，並在該環狀槽的內周面和插入 該環狀槽後之筒狀突起的外周面之間插入〇型環來形成液 密狀態。 在各筒狀突起的前端部可分別形成凸緣以提昇機械強 度。 吸入流路和排出流路各個，若形成截面非圓形且在與 筒狀突起的突出方向正交的方向之寬度大之扁平形狀，則 可謀求更加薄型化。 可振動之膜片，具體而言可使用：在導電性金屬薄板 構成之彈性補強板的表裏至少一面積層壓電體而構成之壓 電振動元件。 本發明之薄型流路構造的態樣，係具備：形成有流路 孔之流路塊體、具有連通於該流路塊體的流路孔之筒狀突 起之第一板構件、以及積層結合於該第一板構件，用來形 成連通於上述筒狀突起之液流路之第二板構件。 【實施方式】 本實施形態，係將本發明運用於2閥型壓電泵2 0的 實施形態。如第1圖至第3圖所示，該壓電泵20，從下往 上係具備下殼體21和上殼體22。 -6- 200821470 在下殼體21，以和該殼體的板厚平面正交的方式’穿 設有互相平行之冷卻水（液體）的吸入流路孔24和排出 流路孔25。在下殼體21和上殼體22之間’透過〇型環 2 9挾持支承著壓電振動元件（膜片）2 8 ’且密封成液體不 致洩漏。該壓電振動元件28和下殼體2 1之間係構成泵室 P，壓電振動元件2 8和上殼體2 2之間則形成大氣室A。 在本實施形態，吸入流路孔24和排出流路孔25的軸線係 與壓電振動元件28互相正交。 壓電振動元件2 8，如圖所示，係具有：中心部的彈性 補強板2 8 a、積層形成於彈性補強板2 8 a的表面或裏面（ 在第2圖爲上面）之壓電體28b之單層壓電樑型（ u n i m 〇 r p h t y p e )。彈性補強板2 8 a係由導電性金屬薄板材 料（例如厚50〜3 00 μπι左右之不鏽鋼、42合金等）所形 成之金屬製薄板。壓電體28b，例如由厚300 μιη左右之 PZT ( Pb ( Zr、Ti ) 03 )所構成，在其表裏方向實施極化 處理。這種壓電振動元件爲周知者。 在下殼體2 1之吸入流路孔24和排出流路孔25，分別 在泵室P側和排出流路側設有止回閥（傘狀閥）3 2、3 3。 止回閥32，係容許從吸入流路孔24朝泵室P之流體流但 不容許相反的流體流之吸入側止回閥；止回閥3 3，係容許 從泵室P朝排出流路孔25之流體流但不容許相反的流體 流之排出側止回閥。 止回閥3 2、3 3具有相同的構造，係在接合固定於流 路之穿孔基板3 2 a、3 3 a上，裝設彈性材料構成之傘狀體 -7- 200821470 32b、33b而構成。這種止回閥（傘狀閥）本身爲周知的 關於穿孔基板3 2 a、3 3 a ’在本實施形態雖是另外形成’ 也能和下殼體2 1形成一體。 本實施形態，除了上述般在下殼體2 1形成吸入流 孔2 4和排出流路孔2 5，又爲了使該吸入流路孔2 4和排 流路孔2 5連接於吸入流路2 6和排出流路2 7 (由第一、 二流路板4 0、5 0所構成）’係在下殼體2 1上’以與吸 流路孔24和排出流路孔2 5同心（同軸）的方式形成外 開放之環狀槽24a、25a (第2圖）。環狀槽24a、25a 需要也能成偏心。第一流路板4 0，係兼作爲吸入側和排 側之第一流路板而將兩者結合爲一體者，其具備：嵌合 環狀槽24a之吸入側筒狀突起42、嵌合於環狀槽25a之 出側筒狀突起42、連通於吸入側筒狀突起4 1之吸入流 凹部43、連通於排出側筒狀突起42之排出流路凹部44 用來區隔吸入流路凹部43和排出流路凹部44之區隔部 〇 第二流路板5 0，和第一流路板40同樣的，係兼作 吸入側和排出側之第二流路板而將兩者結合爲一體者， 對應於第一流路板40之吸入流路凹部43、排出流路凹 44以及區隔部45而具有：吸入流路凹部53、排出流路 部54以及區隔部55。以上之第一流路板40和第二流路 5 〇，係將包含區隔部4 5之接合面4 6和包含區隔部5 5 接合面5 6例如用焊料等焊接，而形成連通於吸入側筒 突起41之吸入流路26以及連通於排出側筒狀突起42 但 路 出 第 入 面 視 出 於 排 路 4 5 爲 其 部 凹 板 之 狀 之 -8- 200821470 排出流路27。第一、第二流路板係使用鋁、銅、不鏽鋼等 之0.1〜03mm左右的薄板並將流路厚度形成1mm以下， 藉此可實現薄型化。該吸入流路26和排出流路27，係呈 截面非圓形，且形成在與吸入側筒狀突起4 1和排出側筒 狀突起42的突出方向正交的方向之寬度大之扁平形狀。 此外，也能省略排出流路凹部44、5 4之任一方，而在第 一流路板40或第二流部板50之任一方設置排出流路凹部 〇 吸入側筒狀突起4 1和排出側筒狀突起42各個，係在 兩突起的外周面和環狀槽24a ( 25a)之內周面之間介入Ο 型環47(57)的狀態下，插入該環狀槽24a(25a)，而 保持不致產生液體洩漏之密封狀態。在吸入側筒狀突起4 1 和排出側筒狀突起42之前端部，形成有內方凸緣4 1 a、 42a來提昇機械強度，以避免吸入側筒狀突起4 1和排出側 筒狀突起42容易發生變形。內方凸緣41a、42a在本實施 形態的情形，雖設置成朝向吸入或排出流路側筒狀突起4 1 、42之前端部內側，但也能形成朝向外側。在這個情況， 當底殼體2 1和第一流路板40進行拆裝時，可防止〇型環 4 7、5 7的脫落。 以上的壓電泵，若壓電振動元件28產生正逆方向的 彈性變形（振動），在泵室P容積擴大的行程，由於吸入 側止回閥3 2打開且排出側止回閥3 3關閉，液體會從吸入 流路26、吸入流路孔24流入泵室P內。另一方面，在泵 室P容積縮小的行程，由於排出側止回閥3 3打開且吸入 -9- 200821470 側止回閥32關閉’液體會從泵室P流出至排出流路孔25 、流出流路27。因此，藉由使壓電振動元件29朝正逆方 向連續產生彈性變形（振動）’即可發揮栗作用。 在本實施形態，從吸入流路2 6至泵室P的流路、以 及從泵室P至排出流路27的流路，係藉由第一流路板40 和第二流路板50來形成，且在第一流路板40上形成有： 供插入環狀槽24a、25a (與吸入流路孔24、排出流路孔 25形成同軸）之吸入側筒狀突起4 1、排出側筒狀突起42 。因此可謀求小型化且薄型化。亦即，在殼體2 1、22上 ，並不存在用來使泵室P連通於吸入流路26及排出流路 27之突起物，而且也不存在可撓軟管。 在以上的實施形態，係用第一流路板40和第二流路 板5 0來形成吸入側和排出側的流路’但也能將第一、第 二流路板分成吸入側和排出側（亦即’將第一、第二流路 板40、50在區隔部45、55切斷分開），若將兩側分開， 則可提昇吸入流路孔2 4和排出流路孔2 5之配置位置及方 向之自由度。 在以上的實施形態，作爲膜片雖是採用單層壓電樑型 的壓電振動元件，但也能使用雙層壓電樑型的壓電振動元 件。在以上的實施形態，係將本發明運用於僅在壓電振動 元件2 8的一面形成泵室P之2閥型膜片泵，但本發明也 能適用於在兩面都形成泵室之膜片泵。此外’本發明係適 用於：利用膜片的振動來使泵室容積產生週期性的大小變 化而發揮泵作用之膜片泵。 -10- 200821470 【圖式簡單說明】 第1圖係顯示將本發明適用於壓電泵之實施形態之俯 視圖，爲了透視其內部係除去一部分的表面。 第2圖係沿著第1圖之II· II線之截面圖。 第3圖係本發明的實施形態之分解立體圖。 【主要元件符號說明】 20 :壓電泵 21 :下殼體 22 :上殼體 24 :吸入流入孔 24a、25a:環狀槽 2 5 :排出流路孔 2 6 :吸入流路 27 :排出流路 2 8 :壓電振動元件 28a :彈性補強板 28b :壓電體 29 : Ο型環 3 2、3 3 :止回閥 32a、32b :穿孔基板 32b、33b :傘狀體 40 :第一流路 -11 - 200821470 4 1 :吸入側筒狀突起 41a、42a:內方凸緣 42 :排出側筒狀突起 43、 53 :吸入流路凹部 44、 54 :排出流路凹部 4 5、5 5 :區隔部 4 6、5 6 :接合面 47、57 : Ο 型環 5 0 :第一流路 A :大氣室 P :泵室 -12200821470 IX. INSTRUCTIONS OF THE INVENTION [Technical Field] The present invention relates to a diaphragm pump that utilizes vibration of a diaphragm to generate a pump, and more particularly to a diaphragm pump and a thin flow path structure that can be miniaturized and thinned [previously Technology] The applicant of this case is developing a diaphragm pump (piezoelectric pump) suitable for a cooling water circulation pump such as a water-cooled notebook computer. A notebook computer with a limited space for housing parts requires a small and thin pump. The following prior art exists. [Patent Document 1] US 2005/0231914 A1 [Patent Document 2] JP-A-2005-229038 (Patent Document 3) Japanese Laid-Open Patent Publication No. 2005-282386, the suction port and the discharge port of the piezoelectric pump are formed. The protrusion protruding from the housing is generally a flexible hose for connecting the two ports. Therefore, even if the piezoelectric pump itself is formed to be thin and compact, the structure around the suction port and the discharge port of the protrusion and the connection portion of the connection hose including the two ports can impede thinning and miniaturization. SUMMARY OF THE INVENTION An object of the present invention is to provide a diaphragm pump having a piping structure for connecting a suction line and a discharge port of a diaphragm pump without using a hose body. -4- 200821470 The present invention is directed to a casing which is formed not by a suction port and a discharge port but by a recessed portion and a discharge passage hole, and a cylindrical projection formed by inserting a plate material into the hole portion. In the diaphragm pump of the present invention, the diaphragm pump of the present invention is provided with a diaphragm that is held by the pair of housings in a manner that does not leak, and is formed in a pair of inflow passage holes (having a suction side) so as to communicate with the pump chamber. a check valve) and a row side check valve; having a suction side first flow path plate and a suction side path, the suction side first flow path plate having a communication protrusion, and the suction side second flow path plate is a laminated formation plate The discharge-side first flow passage plate and the discharge side passage are connected to the cylindrical projection, and the discharge-side first flow passage plate has a communication projection, and the discharge-side second flow passage plate is formed to be connected to the junction plate. Preferably, the rows of the cylindrical projections are formed such that the suction flow paths formed in the casing are parallel to each other. Further, if the first flow path plate on the suction side and the second flow path plate on the suction side and the second flow path on the discharge side are formed, the number of parts can be reduced, and the cylindrical protrusion which is easy to enter the flow path plate can be directly fitted to protrude. The form of the material forms a suction flow path hole (used to constitute a flow path) and is made thinner and thinner. : a suction flow path hole constituting at least one of the casings of the pump chamber by sealing the periphery into a liquid chamber (the cylindrical flow having the suction flow from the second flow path plate to the suction flow path hole and the first flow on the suction side) The inflow path; and the discharge of the second flow path plate to the discharge flow path hole is combined with the discharge side first outflow flow path. The hole and the discharge flow path hole form the first flow path plate and the road plate It is assembled from a single sheet. The suction flow hole in the housing is -5 to 200821470 and the flow path hole is discharged, but the pitch between the cylindrical protrusions and the distance between the pump suction and discharge flow holes and the diameter are completely It is not easy to achieve the same. If the processing is performed with higher precision, the cost will increase. Therefore, it is more practical to form the cylindrical protrusion into the housing so as to be concentric with the suction flow path hole and the discharge flow path hole. An annular groove is formed in a liquid-tight state by inserting a serpentine ring between the inner circumferential surface of the annular groove and the outer circumferential surface of the cylindrical projection inserted into the annular groove. The front end portions of the respective cylindrical projections are respectively separable. Form a flange to increase mechanical strength. Each of the road and the discharge flow path can be formed into a flat shape having a non-circular cross section and a large width in a direction orthogonal to the protruding direction of the cylindrical projection, thereby making it possible to further reduce the thickness of the diaphragm. A piezoelectric vibration element comprising at least one layer of a piezoelectric layer in the front and back of an elastic reinforcing plate made of a conductive metal thin plate. The thin flow path structure of the present invention includes a flow path in which a flow path hole is formed. a block, a first plate member having a cylindrical protrusion connected to the flow path hole of the flow path block, and a layer laminated to the first plate member for forming a liquid flow path communicating with the cylindrical protrusion [Embodiment] In the present embodiment, the present invention is applied to an embodiment of a two-valve piezoelectric pump 20. As shown in Figs. 1 to 3, the piezoelectric pump 20 is driven from the bottom to the bottom. The upper casing is provided with a lower casing 21 and an upper casing 22. -6- 200821470 In the lower casing 21, a suction flow of cooling water (liquid) parallel to each other is formed in a manner orthogonal to the plane of the thickness of the casing a road hole 24 and a discharge flow path hole 25. In the lower case 21 and The piezoelectric vibration element (diaphragm) 2 8 ' is held between the upper casing 22 by the 〇-type ring 29 and sealed so that the liquid does not leak. The piezoelectric vibration element 28 and the lower casing 2 1 are formed. In the pump chamber P, the piezoelectric vibrating element 28 and the upper casing 22 form an atmospheric chamber A. In the present embodiment, the axis of the suction flow path hole 24 and the discharge flow path hole 25 and the piezoelectric vibration element 28 are mutually connected. The piezoelectric vibrating element 2, as shown in the figure, has an elastic reinforcing plate 28 8 a at the center portion, and a laminated layer formed on the surface or the inside of the elastic reinforcing plate 28 8 a (in the second figure, the top) A single-layer piezoelectric beam type (unim 〇rphtype) of the piezoelectric body 28b. The elastic reinforcing plate 28 8 a metal formed of a conductive metal thin plate material (for example, stainless steel having a thickness of about 50 to 300 μπι, a 42 alloy, etc.) Making a thin plate. The piezoelectric body 28b is made of, for example, PZT (Pb (Zr, Ti) 03 ) having a thickness of about 300 μm, and is subjected to polarization treatment in the front and back directions. Such piezoelectric vibration elements are well known. In the suction flow path hole 24 and the discharge flow path hole 25 of the lower casing 21, check valves (umbrella valves) 3, 3 3 are provided on the pump chamber P side and the discharge flow path side, respectively. The check valve 32 is a suction side check valve that allows fluid flow from the suction flow path hole 24 toward the pump chamber P but does not allow the opposite fluid flow; the check valve 3 3 allows the flow path from the pump chamber P toward the discharge flow path The fluid flow of the orifice 25 does not allow for the discharge side check valve of the opposite fluid flow. The check valves 3 2, 3 3 have the same structure, and are formed by attaching an umbrella body -7-200821470 32b, 33b made of an elastic material to the perforated substrates 3 2 a, 3 3 a fixed to the flow path. . Such a check valve (umbrella valve) is well known in the prior art. The perforated substrates 3 2 a and 3 3 a ' can be formed separately from the lower casing 21 in the present embodiment. In the present embodiment, the suction flow hole 24 and the discharge flow path hole 25 are formed in the lower casing 21 in addition to the above, and the suction flow path hole 24 and the discharge path hole 25 are connected to the suction flow path 26 in order to connect the suction flow path hole 24 and the discharge flow path hole 25 to the suction flow path 26. And the discharge flow path 27 (consisting of the first and second flow path plates 40, 50) is attached to the lower casing 21 to be concentric (coaxial) with the suction passage hole 24 and the discharge flow path hole 25. In this manner, annular grooves 24a and 25a which are open outside are formed (Fig. 2). The annular grooves 24a, 25a need to be eccentric as well. The first flow path plate 40 is a first flow path plate that serves as both a suction side and a discharge side, and is integrated with the suction plate side 42 of the fitting annular groove 24a, and is fitted to the ring. The outlet side cylindrical projection 42 of the groove 25a, the suction flow concave portion 43 communicating with the suction side cylindrical projection 41, and the discharge flow path concave portion 44 communicating with the discharge side cylindrical projection 42 are used to partition the suction flow path concave portion 43 and The second flow path plate 50 of the discharge flow path concave portion 44 is the same as the first flow path plate 40, and serves as the second flow path plate on the suction side and the discharge side, and the two are integrated. The suction flow path concave portion 43 , the discharge flow path concave portion 44 , and the partition portion 45 of the first flow path plate 40 include a suction flow path concave portion 53 , a discharge flow path portion 54 , and a partition portion 55 . In the above first flow path plate 40 and second flow path 5, the joint surface 46 including the partition portion 45 and the joint surface portion 5 5 are welded, for example, by solder or the like, to form a communication with the suction. The suction flow path 26 of the side tube projection 41 and the discharge flow path 27 of the -8-200821470 which is connected to the discharge side cylindrical projection 42 but which is formed as a concave plate by the discharge path 4 is formed. The first and second flow passage plates are made of a thin plate of about 0.1 to 03 mm such as aluminum, copper or stainless steel, and the thickness of the flow path is made 1 mm or less, whereby the thickness can be reduced. The suction flow path 26 and the discharge flow path 27 are formed in a flat shape having a non-circular cross section and having a large width in a direction orthogonal to the direction in which the suction side cylindrical projection 4 1 and the discharge side cylindrical projection 42 are perpendicular to each other. Further, any one of the discharge flow path concave portions 44 and 54 may be omitted, and the discharge flow path concave portion, the suction side cylindrical projection 4 1 and the discharge side may be provided in either one of the first flow path plate 40 or the second flow portion plate 50. Each of the cylindrical projections 42 is inserted into the annular groove 24a (25a) while being interposed between the outer circumferential surface of the projections and the inner circumferential surface of the annular groove 24a (25a). Maintain a sealed state that does not cause liquid leakage. At the front ends of the suction side cylindrical projections 4 1 and the discharge side cylindrical projections 42, inner flanges 4 1 a, 42a are formed to increase the mechanical strength to prevent the suction side cylindrical projections 4 1 and the discharge side cylindrical projections 42 from being easy. Deformation occurred. In the case of the present embodiment, the inner flanges 41a and 42a are provided so as to face the inner side of the front end portion of the suction or discharge flow path side cylindrical projections 4 1 and 42 , but may be formed to face outward. In this case, when the bottom case 21 and the first flow path plate 40 are detached, the detachment of the 〇-shaped rings 47, 57 can be prevented. In the piezoelectric pump described above, when the piezoelectric vibration element 28 is elastically deformed (vibrated) in the forward and reverse directions, the stroke of the pump chamber P is expanded, and the suction side check valve 32 is opened and the discharge side check valve 3 is closed. The liquid flows into the pump chamber P from the suction flow path 26 and the suction flow path hole 24. On the other hand, in the stroke in which the volume of the pump chamber P is reduced, since the discharge side check valve 3 is opened and the suction -9-200821470 side check valve 32 is closed, the liquid flows out from the pump chamber P to the discharge flow path hole 25, and flows out. Flow path 27. Therefore, the chestnut action is exerted by continuously causing the piezoelectric vibration element 29 to elastically deform (vibrate) in the forward and reverse directions. In the present embodiment, the flow path from the suction flow path 26 to the pump chamber P and the flow path from the pump chamber P to the discharge flow path 27 are formed by the first flow path plate 40 and the second flow path plate 50. The first flow passage plate 40 is formed with a suction side cylindrical projection 4 1 for inserting the annular grooves 24a and 25a (coaxial with the suction flow passage hole 24 and the discharge flow passage hole 25), and a discharge side cylindrical projection. 42. Therefore, it is possible to reduce the size and thickness. That is, on the casings 2 1 and 22, there are no projections for communicating the pump chamber P to the suction flow path 26 and the discharge flow path 27, and there is no flexible hose. In the above embodiment, the flow path of the suction side and the discharge side is formed by the first flow path plate 40 and the second flow path plate 50. However, the first and second flow path plates can also be divided into the suction side and the discharge side. (That is, 'the first and second flow passage plates 40, 50 are cut apart at the partition portions 45, 55." If the two sides are separated, the suction flow path hole 24 and the discharge flow path hole 2 can be lifted. The degree of freedom in the configuration of the position and direction. In the above embodiment, a piezoelectric vibrating element of a single-layer piezoelectric beam type is used as the diaphragm, but a piezoelectric vibrating element of a double-layer piezoelectric beam type can also be used. In the above embodiment, the present invention is applied to a two-valve diaphragm pump in which the pump chamber P is formed only on one surface of the piezoelectric vibrating element 28, but the present invention is also applicable to a diaphragm in which a pump chamber is formed on both sides. Pump. Further, the present invention is applied to a diaphragm pump which utilizes vibration of a diaphragm to cause a periodic change in the volume of the pump chamber to function as a pump. -10- 200821470 [Brief Description of the Drawings] Fig. 1 is a plan view showing an embodiment in which the present invention is applied to a piezoelectric pump, in order to see through the surface of a part thereof. Fig. 2 is a cross-sectional view taken along line II·II of Fig. 1. Fig. 3 is an exploded perspective view showing an embodiment of the present invention. [Description of main component symbols] 20: Piezoelectric pump 21: Lower case 22: Upper case 24: Suction inflow holes 24a, 25a: Annular groove 2 5: Discharge flow path hole 6 6: Suction flow path 27: Discharge flow Road 2 8 : Piezoelectric vibration element 28 a : Elastic reinforcing plate 28 b : Piezoelectric body 29 : Ο type ring 3 2 , 3 3 : Check valves 32 a , 32 b : Perforated substrate 32 b , 33 b : Umbrella 40 : First flow path -11 - 200821470 4 1 : suction side cylindrical projections 41 a and 42 a : inner flange 42 : discharge side cylindrical projections 43 , 53 : suction flow path concave portions 44 , 54 : discharge flow path concave portions 4 5 , 5 5 : division portion 4 6, 5 6 : joint surface 47, 57 : Ο type ring 5 0 : first flow path A : air chamber P : pump chamber -12