JP3707380B2 - Diaphragm pump - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a diaphragm pump. Specifically, the present invention relates to a so-called piezoelectric pump that utilizes the action of a diaphragm.
[0002]
[Prior art]
FIG. 20 is an exploded perspective view showing an example of a conventional diaphragm pump X, and FIG. 21 is a schematic sectional view of the diaphragm pump X. The diaphragm pump X includes a casing 100 in which an exhaust path 101 and an intake path 102 are formed, and a diaphragm 110 for forming a pump chamber between the casing 100. The casing 100 is composed of an upper casing 130 and a lower casing 140, and is formed in a substantially square shape in plan view. Further, an exhaust path 101 and an intake path 102 are provided inside the casing 100, and a connection for connecting the exhaust path 101 and the intake path 102 to an external pipe (not shown) is provided on the side of the casing 100. The part is extended.
[0003]
The lower housing 140 is provided with an exhaust passage groove 141 that forms the exhaust passage 101 and an intake passage groove 142 that forms the intake passage 102. One end of the exhaust passage groove portion 141 is extended to a connecting portion forming projection 143 projecting from the side surface of the lower housing 140, and the other end is a substantially cylindrical shape for forming an exhaust valve. A recess 145 is formed. One end of the intake channel groove 142 is also extended to a connecting portion forming projection 144 projecting from the side surface of the lower housing 140, and the other end is a substantially cylindrical shape for forming an intake valve. A concave portion 146 is formed. A cylindrical base 147 is formed at the center of the recess 146 for the intake valve.
[0004]
The upper housing 130 has a shape that can be exactly overlapped with the lower housing 140, and the upper housing 130 has a projection 133 for connecting portion formation facing the projection 143 of the lower housing 140. Is provided. In addition, a recess 135 facing the exhaust valve recess 145 and a recess 136 facing the intake valve recess 146 are formed on the rear surface side of the upper housing 130. A cylindrical pedestal 137 is formed substantially at the center of the recess 135 for the exhaust valve. Further, the upper housing 130 is formed with a through hole 131 penetrating from the exhaust valve recess 135 to the upper surface of the upper housing 130. A through hole 132 is also formed through the upper surface of the upper housing 130 from the recess 136 for the intake valve. Therefore, the upper casing 130 and the lower casing 140 are overlapped to form the exhaust path 101, the intake path 102, and the connection portion in the casing 100. Note that the upper housing 130 and the lower housing 140 are bonded so as not to leak by using an adhesive or the like.
[0005]
A film 120 constituting an exhaust valve and an intake valve is sandwiched between the upper housing 130 and the lower housing 140. In the film 120, two valve forming holes 121 are formed in accordance with the positions of the recesses 145 and 146 formed in the upper housing 130 and the lower housing 140. The hole 121 is designed to be smaller than the two pedestals 137 and 147. Further, the film 120 is in close contact with the exhaust passage groove portion 141 and the intake passage groove portion 142 by, for example, laser welding.
[0006]
As a result, the two exhaust valve recesses 135 and 145 formed in the upper housing 130 and the lower housing 140, the pedestal 137 in the recess 135 formed in the upper housing 130, and the film 120 cause the exhaust. A valve is formed. Further, the intake valve includes two intake valve recesses 136 and 146 formed in the upper housing 130 and the lower housing 140, a base 147 in the recess 146 formed in the lower housing 140, and the film 120. Is formed. Further, an exhaust passage 101, an intake passage 102, and a connection portion are configured in the housing 100.
[0007]
In this way, the casing 100 serving as the pump body is formed. On the upper surface of the casing 100, a thin-film diaphragm 110 having a substantially circular shape is surrounded by an adhesive or the like. It is joined to the upper surface of the upper housing 130. Thus, the diaphragm pump X is configured, and a pump chamber is formed between the upper surface of the housing 100 and the diaphragm 110.
[0008]
In the diaphragm pump X having such a structure, the diaphragm 110 can be bent to vibrate by vibrating the diaphragm 110 up and down, and the function of the pump can be exhibited.
[0009]
[Problems to be solved by the invention]
However, in the diaphragm pump X having such a structure, since the casing 100 is constituted by the two parts of the upper casing 130 and the lower casing 140, the thickness of the casing 100 increases, and the diaphragm pump X itself It was difficult to reduce the size. Further, since the film 120 is sandwiched between the upper housing 130 and the lower housing 140 in the manufacturing process, the flatness and parallelism of the mating surfaces of the upper and lower housings 130 and 140 must be ensured. Moreover, the positioning of the three members was very difficult.
[0010]
Further, due to the presence of the upper casing 130, the distance from the intake valve to the pump chamber and the distance from the pump chamber to the exhaust valve increase, and the dead volume (displacement of the diaphragm 110) with respect to the pump chamber capacity that affects the pump discharge pressure is increased. There is a problem that the capacity (which is not affected by the above) becomes large. On the other hand, it is conceivable to reduce the thickness of the upper casing 130 in consideration of such a viewpoint. However, when the thickness is reduced, distortion occurs during laser welding when the upper casing 130 and the lower casing 140 are joined. There was a fear.
[0011]
In addition, as shown in FIG. 22, in the exhaust passage 101 and the intake passage 102, a gap 103 is formed between the bonded film 120 and the lower surface of the upper housing 130, causing an air leak, and the exhaust passage 101 and the intake passage 102. There is also a problem that it is difficult to form the path 102 with high accuracy.
[0012]
The present invention has been made in view of the above-mentioned problems of the prior art, and provides a diaphragm pump having a highly efficient and compact structure by a simple manufacturing and joining method.
[0013]
[Means for Solving the Problems]
The diaphragm pump of the present invention is a diaphragm in which a pump chamber is formed by a plate-like housing provided with two through holes constituting an intake passage and an exhaust passage, and a diaphragm disposed on the upper surface of the housing. The pump is characterized in that an intake valve is provided in one of the through holes to form an intake passage, and an exhaust valve is provided in the remaining one of the through holes to form an exhaust passage.
[0014]
In this diaphragm pump, as a valve for intake, for example, a film piece disposed on the upper surface of the housing so as to cover the opening of the through hole constituting the intake passage is positioned at a position sandwiching the opening of the through hole. Can be joined to the housing.
[0015]
At this time, the film piece may be sandwiched between the housing and the spacer having a vent hole formed in a wider area than the area corresponding to the opening of the through hole.
[0016]
Further, in these diaphragm pumps, it is preferable to provide the through holes constituting the intake passage so that the opening area on the pump chamber side is larger than the opening area on the opposite side of the pump chamber.
[0017]
In addition, a film piece arranged as an intake valve so as to cover the opening of the through hole constituting the intake passage is provided on the bottom surface of the intake recess formed on the upper surface of the housing. It can also be configured to be joined to the housing at a position sandwiching.
[0018]
Furthermore, a film piece is placed on the bottom surface of the intake recess formed on the lower surface of the housing so as to cover the opening of the through hole constituting the intake passage, and the intake valve is fitted into the intake recess. It is also possible to adopt a configuration in which a spacer is provided in a region narrower than the region corresponding to the opening of the through hole. At this time, the film piece is joined to the side of the pump chamber of the spacer at a position sandwiching the opening of the vent hole, or the opening area of the vent hole on the pump chamber side is larger than the opening area on the opposite side of the pump chamber. It is convenient to make it large.
[0019]
Alternatively, a film piece provided with a recess for suction on the lower surface of the housing and provided with a ventilation hole on the bottom surface of the recess for suction is arranged, and the diameter of the ventilation hole corresponding to the ventilation hole A pedestal having a larger diameter, an annular groove formed in the peripheral edge of the pedestal, a spacer having a vent hole connecting the groove and the outside, and a bottom surface of the intake recess. An intake valve may be configured by sandwiching a film piece.
[0020]
On the other hand, as the exhaust valve, a film piece is disposed on the lower surface of the casing so as to cover the opening of the through-hole constituting the exhaust passage, and the casing is located at a position sandwiching the opening of the through-hole. It can be configured to be joined.
[0021]
At this time, the film piece can be sandwiched between the casing and the spacer having a vent hole formed in a wider area than the area corresponding to the opening of the through hole.
[0022]
Further, in these diaphragm pumps, it is preferable that the through hole constituting the exhaust passage has an opening area on the pump chamber side smaller than an opening area on the opposite side of the pump chamber.
[0023]
In addition, the exhaust valve is configured by joining a film piece disposed on the bottom surface of the exhaust recess formed on the lower surface of the housing to the housing at a position sandwiching the opening of the through hole. You can also.
[0024]
In addition, the lower surface of the housing is provided with an exhaust recess, and a film piece provided with a ventilation hole is disposed on the bottom surface of the exhaust recess, and the housing is provided in correspondence with the ventilation hole. An annular spacer having a pedestal having a diameter larger than the diameter of the ventilation hole, an annular groove formed at the peripheral edge of the pedestal, and a ventilation hole connecting the groove and the pump chamber. Further, an exhaust valve can be configured by sandwiching the film piece between the bottom surface of the exhaust recess.
[0025]
In these diaphragm pumps, it is desirable that a connection pipe is provided on the lower surface of the casing, and the tip of the connection pipe is fitted into the intake recess and / or the exhaust recess.
[0026]
Alternatively, a thin plate-like plate portion in which a connection groove is formed on the lower surface of the housing, and the connection groove connected to the intake passage and / or the exhaust passage by the connection groove and the housing. It is desirable to provide a path.
[0027]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described in detail with reference to the drawings. 1 is a schematic perspective view of a first diaphragm pump A according to an embodiment of the present invention, FIG. 2 is a schematic exploded perspective view of the diaphragm pump A, and FIG. 3 is a cross-sectional structure of the diaphragm pump A. 4 and 4 are enlarged explanatory views showing the intake valve in the diaphragm pump A, and FIGS. 5 and 6 are explanatory views showing the operation of the intake valve.
[0028]
The diaphragm pump A includes a plate-shaped casing 10 and a diaphragm 20, and a peripheral portion of the diaphragm 20 is bonded to the upper surface of the casing 10 by an adhesive 21 or laser bonding. As a result, a pump chamber 25 is formed between the casing 10 and the diaphragm 20.
[0029]
The diaphragm 20 is made of a thin film piezoelectric actuator, and its structure can be used without limitation as long as it can be expanded and contracted by applying a voltage, such as a piezoelectric element (piezo element), brass, or silver. The diaphragm 20 shown in each figure uses a piezoelectric actuator in which electrodes 22 are formed on both surfaces of a thin plate-like piezoelectric element 23. That is, when a voltage in a certain direction is applied to the diaphragm 20, the diaphragm 20 is bent upward to increase the pump chamber capacity, and by applying a voltage in the opposite direction, the diaphragm 20 is moved downward. Bending to reduce pump chamber capacity. Therefore, it is preferable that the diaphragm 20 is designed to have a size that does not contact the casing 10 when the minimum pump chamber capacity is reached, and is joined to the upper surface of the casing 10.
[0030]
Two through holes 11 and 12 are formed in the housing 10, and the intake passage 1 and the exhaust passage 2 are formed in these through holes 11 and 12. A rectangular film piece 30 is disposed on the upper surface of the housing 10 so as to cover the opening 13 of the through hole 11 on the pump chamber 25 side. As shown in FIG. 4, the film piece 30 sandwiches the opening 13 on the pump chamber 25 side and is parallel to the short side of the film piece 30 (the position of the broken line a in FIGS. 2 and 4), for example, It is joined to the upper surface of the housing 10 by laser irradiation to constitute an intake valve. At this time, it is preferable that the film piece 30 is bonded as close as possible to the housing 10, but it is not always necessary to make the film piece 30 contact, and rather, the film piece 30 sufficiently floats above the opening 13, and the opening 13 and the film piece. It is preferable to attach with a sufficient margin so that a sufficient gap can be formed between it and 30. As such a film piece 30, a polyimide film, a polyvinyl chloride film, a polyvinylidene chloride film, a polyethylene film, etc. are used, for example.
[0031]
Moreover, the through-hole 11 which comprises the said intake path 1 is opened by the cross-sectional convex shape, and the opening area by the side of the pump chamber 25 is larger than the opening area of the other side. As a result, the contact area between the film piece 30 and the opening 13 is increased, and the response speed of the intake valve can be increased. Furthermore, compared to the case where the through hole 11 is formed in a cylindrical shape, the so-called dead volume can be reduced, and the pump discharge pressure can be further increased. Therefore, the cross-sectional shape is not questioned as long as the opening area in contact with the film piece 30 is increased.
[0032]
On the other hand, the film piece 30 is also arranged on the lower surface of the housing 10 so as to cover the opening 14 on the opposite side of the through hole 12 to the pump chamber 25. Similarly to the film piece 30 on the intake side, the film piece 30 also has a short side of the film piece 30 at a position sandwiching the opening 14 on the opposite side of the pump chamber 25 (a position indicated by a broken line B in FIGS. 2 and 5). An exhaust valve is configured by being joined to the upper surface of the housing 10 at a parallel position.
[0033]
The through-hole 12 constituting the exhaust passage 2 is also opened in a cross-sectional convex shape, and the opening area on the opposite side of the pump chamber 25 is larger than the opening area on the pump chamber 25 side. As a result, the responsiveness of the exhaust valve is also improved.
[0034]
In the diaphragm pump A configured as described above, the pump chamber volume is changed by driving the diaphragm 20, and the intake valve and the exhaust valve are opened and closed by this change. That is, when a voltage is applied to the diaphragm 20 and the pump chamber capacity is minimized, the film piece 30 of the intake valve closes the opening 13 of the through hole 11 as shown in FIG. Closed state. At this time, the film piece 30 of the exhaust valve is moved away from the opening 14 of the through hole 12, and the exhaust valve is opened.
[0035]
In addition, when a reverse voltage is applied to the diaphragm 20 and the pump chamber capacity is maximized, the film piece 30 of the intake valve is moved away from the opening 13 of the through hole 11 as shown in FIG. The fluid flows from between the opening 13 and the film piece 30, and the intake valve is opened. At this time, although not shown, the film piece 30 of the exhaust valve closes the opening 14 of the through hole 12, and the exhaust valve is closed.
[0036]
As described above, the diaphragm pump A according to the present invention includes the single casing 10 and the diaphragm 20, and thus can be configured very simply. In particular, since the intake valve and the exhaust valve are configured in the single casing 10, the thickness can be reduced. Moreover, as a result, the so-called dead volume from the intake valve to the pump chamber 25 can be reduced, so that the discharge pressure of the pump can be increased. Furthermore, both the valves can be manufactured very easily because the film piece 30 is joined to the upper surface of the housing 10 from above, and can be opened and closed by the phenomenon of the film piece 30 being lifted. For this reason, it is sufficient that the film piece 30 is not easily detached from the housing 10, and the bonding accuracy may be relatively low. On the other hand, both valves can be reliably closed and reliability can be ensured.
[0037]
Next, what is shown in FIG. 7 is an enlarged explanatory view of the intake valve of the second diaphragm pump B which is another embodiment of the present invention. In the intake valve, the film piece 30 constituting the intake valve is sandwiched between the spacer 40 and the housing 10. The spacer 40 is made of a plastic material or the like so as to have a size that can cover the film piece 30 and has a substantially rectangular shape, and a substantially elliptical column-shaped air hole 41 is formed at the center thereof. The vent hole 41 is opened so that the long axis side of the unjoined film piece 30 is exposed from the vent hole 41, and is discharged from the gap between the opening 13 of the through hole 11 and the film piece 30. The fluid can be fed from the vent hole 41 into the pump chamber 25. In addition, the spacer 40 is joined to the upper surface of the housing 10 together with the film piece 30 by laser irradiation, for example, at a position sandwiching the ventilation hole 41 (a position indicated by a broken line B in FIG. 7), and the intake valve is Composed.
[0038]
Thus, by using the spacer 40, the film piece 30 can be inserted | pinched and the valve | bulb for intake can also be comprised. Of course, it goes without saying that the exhaust valve can also be configured using such a spacer 40.
[0039]
FIG. 8 is a schematic exploded perspective view of a third diaphragm pump C according to still another embodiment of the present invention, and FIG. 9 is a sectional structural view of the diaphragm pump C. The diaphragm pump C is different from the first diaphragm pump A only in that the exhaust valve is configured in an exhaust recess 16 formed in the lower surface of the housing 10.
[0040]
The exhaust recess 16 is formed to have a size that can accommodate the film piece 30, and has a width that is at least wider than the width of the film piece 30 in the minor axis direction. That is, it is designed so that a slight gap is formed between the two so that the fluid can pass from between the long side of the floating film piece 30 and the side wall of the recess 16. Further, in order to make the exhaust path 2 as short as possible, the bottom surface thereof is formed close to the top surface of the housing 10 and is formed deeply. Further, the through hole 12 constituting the exhaust passage 2 is formed so as to increase the opening area on the exhaust recess 16 side as much as possible so as to enhance the responsiveness of the exhaust valve. Therefore, the length of the through-hole 12 is short, and the influence on the dead volume by the exhaust passage 2 is very small. In the diaphragm pump C shown in the figure, it is formed in a substantially cylindrical shape. The film piece 30 constituting the exhaust valve is joined to the bottom surface of the exhaust recess 16 by, for example, laser joining as shown in FIG. Of course, a film piece 30 can be sandwiched using a spacer 40 as shown in FIG. 7 to constitute an exhaust valve.
[0041]
Thus, by forming the exhaust recess 16 on the lower surface of the housing 10 and configuring the exhaust valve in the recess 16, the volume of the exhaust path 2, that is, the dead volume can be reduced, and the pump can be further pumped. A highly efficient small diaphragm pump C can be manufactured.
[0042]
FIG. 10 is a schematic exploded perspective view of a fourth diaphragm pump D according to still another embodiment of the present invention, and FIG. 11 is a sectional structural view of the diaphragm pump D. The diaphragm pump D is different from the third diaphragm pump C shown in FIGS. 8 and 9 in that the intake valve is configured in an intake recess 15 formed on the upper surface of the housing 10. There is only.
[0043]
The intake recess 15 is formed to have a width that is at least wider than the width in the short axis direction of the film piece 30 and is designed so that a sufficient gap is formed between the long side of the film piece 30 and the side wall of the recess 15. . Further, the film piece 30 is formed to a depth substantially equal to the thickness of the film piece 30. As a result, the upper surface of the film piece 30 bonded to the bottom surface of the intake recess 15 is positioned substantially the same as the upper surface of the housing 10, and the substantial capacity of the pump chamber 25 can be further secured. In addition, although joining using the spacer 40 shown in FIG. 7 is also considered, in this case, the dead volume increases by the thickness of the spacer 40 and the capacity of the pump chamber 25 decreases. Is not something that can be said.
[0044]
Further, FIG. 12 is a schematic exploded perspective view of a fifth diaphragm pump E according to still another embodiment of the present invention, and FIG. 13 is a sectional structural view of the diaphragm pump E. In the diaphragm pump E, the exhaust valve is configured in an exhaust recess 16 formed on the lower surface of the housing 10, and is substantially the same configuration as the third diaphragm pump C shown in FIGS. However, the intake valve is different in that it is configured in an intake recess 17 formed in the lower surface of the housing 10.
[0045]
The intake recess 17 is designed to have a size such that a slight gap is formed between the film piece 30 and the side wall of the recess 17. In addition, in order to make the intake passage 1 as short as possible, the bottom surface of the intake recess 17 is formed deeply close to the top surface of the housing 10. Further, the through hole 11 constituting the intake passage 1 is formed so that the opening area on the upper surface side of the housing 10 is as large as possible in order to improve the response of the intake valve. At this time, since the casing 10 has a thin plate shape, the length of the through hole 11 is short, and the influence of the intake passage 1 on the dead volume is very small. Therefore, the through hole 11 is formed in a substantially cylindrical shape.
[0046]
The film piece 30 constituting the intake valve is sandwiched between the spacer 50 as shown in FIGS. 12 and 13 and the bottom surface of the intake recess 17. The spacer 50 is manufactured to a size that can be fitted into the intake recess 17 without a gap. In addition, a vent hole 51 having a convex cross section is formed at the center of the spacer 50. In order to improve the responsiveness of the film piece 30, the vent hole 51 is also designed so that the opening area on the film piece 30 side is smaller than the opening area on the opposite side to the film piece 30, but the opening 52 on the film piece 30 side. Is designed to be smaller than the through-hole 11.
[0047]
In addition, the film piece 30 is laser-arced at two or more locations on the upper surface of the spacer 50 so as to be parallel to the periphery of the opening 52 of the vent 51 at a position sandwiching the opening 52 of the vent 51 of the spacer 50. It is joined. Thus, the intake valve is configured.
[0048]
In this diaphragm pump E, the intake valve can be installed from the side opposite to the diaphragm 20, and both the intake valve and the exhaust valve can be manufactured from the lower surface of the housing 10, so that the diaphragm pump E can be easily manufactured. be able to. Moreover, since the film piece 30 can be joined to the spacer 50 in advance, the intake valve can be easily replaced.
[0049]
FIG. 14 is a partially broken sectional view of a sixth diaphragm pump F which is still another embodiment of the present invention. In the diaphragm pump F, the intake valve is configured in an intake recess 17 formed on the lower surface of the housing 10, and the exhaust valve is configured in an exhaust recess 16 formed on the lower surface of the housing 10. ing.
[0050]
The intake recess 17 is designed to have such a size that almost no gap is formed between the recess 17 and the side wall of the recess 17. In addition, in order to make the intake passage 1 as short as possible, the bottom surface of the intake recess 17 is formed deeply close to the top surface of the housing 10. The through hole 11 constituting the intake passage 1 is formed so that the opening area on the upper surface side of the casing 1 is increased as much as possible so as to improve the responsiveness of the intake valve, but the casing 10 has a thin plate shape. Therefore, the length of the through hole 11 is short, and the influence on the dead volume by the intake passage 1 is very small. Therefore, the through hole 11 is formed in a substantially cylindrical shape.
[0051]
The air intake valve is not a structure in which fluid flows from a gap formed around the film piece 30 by the film piece 30 being lifted as in the conventional diaphragm pumps A to E. The working hole 31 has a structure in which fluid flows by floating from the spacer 60. That is, as shown in FIGS. 15A and 15B, the spacer 60 corresponds to the ventilation hole 31 of the film piece 30 and has a pedestal 61 having a diameter larger than the diameter of the ventilation hole 31 and the pedestal 61. An annular groove 62 having substantially the same diameter as that of the through hole 11 is provided at the peripheral edge of the groove, and a vent hole 63 connected to the outside is formed on the lower surface of the groove 62.
[0052]
Also in the intake valve, the film piece 30 is sandwiched between the spacer 60 and the bottom surface of the intake recess 17. At this time, the periphery of the film piece 30 made larger than the spacer 60 is wound around the side surface of the spacer 60. By pushing into the intake recess 17, air leakage is reliably prevented.
[0053]
As a result, when the capacity of the pump chamber is increased, the film piece 30 is lifted from the pedestal 61, the intake valve is opened, and the film piece 30 is vented from the gap between the pedestal 61 and the film piece 30. The fluid flows into the pump chamber 25 through the hole 31. Further, when the pump chamber capacity is reduced, the film piece 30 is brought into close contact with the pedestal 61, the intake valve is closed, and the fluid is prevented from flowing into the pump chamber 25.
[0054]
On the other hand, the exhaust valve has a substantially similar structure, but in the exhaust valve, a base 18 is formed in the housing 10. That is, the pedestal 18 having a diameter larger than the diameter of the ventilation hole 31 in the housing 10 corresponding to the ventilation hole 31 formed in the film piece 30, and the exhaust recess 16 in the peripheral portion of the pedestal 18. An annular groove portion 19 having a diameter smaller than the above-described diameter is provided, and a through-hole 12 that connects the groove portion 19 and the pump chamber 25 is formed on the upper surface of the groove portion 19.
[0055]
In addition, a cylindrical spacer 70 is provided on the lower surface of the film piece 30 and sandwiches the film piece 30. The outer diameter of the spacer 70 is substantially the same as the inner diameter of the exhaust recess 16, and the inner diameter is set to be substantially the same as the diameter of the groove portion 19. Therefore, air leak is reliably prevented by winding the periphery of the film piece 30 produced larger than the spacer 70 around the side surface of the spacer 70 and pushing it into the exhaust recess 16.
[0056]
As a result, when the pump chamber capacity is increased, the film piece 30 is brought into close contact with the pedestal 18, the exhaust valve is closed, and the fluid is prevented from flowing out. When the capacity of the pump chamber is reduced, the film piece 30 is lifted from the pedestal 18 and the exhaust valve is opened, so that the ventilation hole of the film piece 30 is opened from the gap between the pedestal 18 and the film piece 30. Through 31, the fluid flows out.
[0057]
By using the intake valve and the exhaust valve having such a structure, both valves can be configured by work from the lower surface of the housing 10, and the replacement of the valves can be easily performed by attaching and detaching the spacers 60 and 70. Yes.
[0058]
FIG. 16 is a schematic exploded perspective view of a seventh diaphragm pump G which is still another embodiment of the present invention, and FIG. 17 is a sectional structural view of the diaphragm pump G. The diaphragm pump G has substantially the same configuration as the fourth diaphragm pump D shown in FIG. 10, except that an exhaust pipe 80 is provided on the exhaust passage 2 side. A lower surface of the body 10 is provided in a downward direction of the housing 10. A mounting recess 81 for the exhaust pipe 80 is formed in the housing 10, and the exhaust recess 16 is formed in the recess 81. The exhaust pipe 80 may have an end surface provided on the lower surface of the housing 10 with an adhesive or the like. However, the exhaust pipe 80 has one end processed into a convex shape in cross section and a projection 82. Is provided, and can be fitted into the mounting recess 81. Further, the seventh diaphragm pump G is shown with the film piece 30 attached to the bottom surface of the exhaust recess 16 as shown in the figure, but is applicable regardless of the presence or absence of the exhaust recess 16. For example, in the diaphragm pump A shown in FIG. 1, the mounting recess 81 may be provided on the lower surface of the housing 10. Further, the intake recess 17 can be applied as an intake pipe. Although not shown, for example, when the spacer 70 is used as in the sixth diaphragm pump F shown in FIG. 14, the exhaust pipe 80 and the spacer 70 can be used together, or the intake pipe and It can also be used as the spacer 50 shown in FIG.
[0059]
FIG. 18 is a schematic exploded perspective view of an eighth diaphragm pump H according to still another embodiment of the present invention, and FIG. 19 is a sectional structural view of the diaphragm pump H. In the diaphragm pump H, a connection path 3 for connecting to the outside is formed on the lower surface of the housing 10, and two thin plate-like plate portions 90 are provided on the lower surface of the housing 10. . A groove portion 91 for forming the connection path 3 is formed on the upper surface of the plate portion 90, and the tip of the groove portion 91 is positioned at the opening on the side opposite to the pump chamber 25 of the intake passage 1 or the groove portion 91. Is located at the opening of the exhaust recess 16. The entire surface of the plate portion 90 is joined to the lower surface of the housing 10 so that there is no fluid leakage.
[0060]
By configuring the connection path 3 using such a thin plate-shaped plate portion 90, intake / exhaust from below the diaphragm pump G can be avoided. In addition, it becomes easy to connect an intake / exhaust pipe (not shown) from the side of the diaphragm pump G, and it is possible to further contribute to the downsizing of various devices using the diaphragm pump according to the present invention. Of course, the connection path 3 can also be configured using such a plate portion 90 even in a tire fram pump having another structure.
[0061]
Needless to say, the diaphragm pump of the present invention can be used not only for gases but also for other fluids such as liquids.
[0062]
【The invention's effect】
The diaphragm pump of the present invention is a diaphragm in which a pump chamber is formed by a plate-like housing provided with two through holes constituting an intake passage and an exhaust passage, and a diaphragm disposed on the upper surface of the housing. The pump is characterized in that an intake valve is provided in one of the through holes to form an intake passage, and an exhaust valve is provided in the remaining one through hole to form an exhaust passage. With a very simple configuration, a small diaphragm pump can be provided. In particular, since it is composed of a single casing, a thin diaphragm pump can be obtained. Further, since the distance between the pump chamber and the supply / exhaust valve is shortened, so-called dead volume is reduced, and the pump discharge pressure can be increased.
[0063]
In this diaphragm pump, as a valve for intake, for example, a film piece disposed on the upper surface of the housing so as to cover the opening of the through hole constituting the intake passage is positioned at a position sandwiching the opening of the through hole. Can be joined to the housing. Thus, in the diaphragm pump of the present invention, the film piece may be sandwiched between the casing and the spacer having a vent hole in a wider area than the area corresponding to the opening of the through hole. . By adopting such a structure, an intake valve can be easily configured.
[0064]
Further, in these diaphragm pumps, the through holes constituting the intake passage are provided so that the opening area on the pump chamber side is larger than the opening area on the opposite side of the pump chamber. The contact area is widened and the responsiveness of the intake valve can be improved.
[0065]
In addition, a film piece arranged as an intake valve so as to cover the opening of the through hole constituting the intake passage is provided on the bottom surface of the intake recess formed on the upper surface of the housing. The film piece and the upper surface of the housing can be made flush with each other at a position sandwiching the housing, eliminating dead volume and maximizing the pump chamber capacity. .
[0066]
Furthermore, a film piece is placed on the bottom surface of the intake recess formed on the lower surface of the housing so as to cover the opening of the through hole constituting the intake passage, and the intake valve is fitted into the intake recess. It is also possible to adopt a configuration in which a spacer is provided in a region narrower than the region corresponding to the opening of the through hole. By using such a spacer, the intake valve can be operated from the lower surface of the casing, so that the diaphragm pump can be easily manufactured and the intake valve can be easily replaced.
[0067]
At this time, the film piece is joined to the side of the pump chamber of the spacer at a position sandwiching the opening of the vent hole, or the opening area of the vent hole on the pump chamber side is larger than the opening area on the opposite side of the pump chamber. It is convenient to make it large. In this way, if the film piece is joined to the spacer, the intake valve can be more easily produced and replaced, and the responsiveness of the intake valve can be secured.
[0068]
Alternatively, a film piece provided with a recess for suction on the lower surface of the housing and provided with a ventilation hole on the bottom surface of the recess for suction is arranged, and the diameter of the ventilation hole corresponding to the ventilation hole A pedestal having a larger diameter, an annular groove formed in the peripheral edge of the pedestal, a spacer having a vent hole connecting the groove and the outside, and a bottom surface of the intake recess. An intake valve may be configured by sandwiching a film piece. With such a configuration, the intake valve can be configured without joining the film pieces.
[0069]
On the other hand, as the exhaust valve, a film piece is disposed on the lower surface of the casing so as to cover the opening of the through-hole constituting the exhaust passage, and the casing is located at a position sandwiching the opening of the through-hole. It can be configured to be joined. With this configuration, since the exhaust valve can be manufactured from the lower surface of the housing, the exhaust valve can be manufactured very easily.
[0070]
At this time, it is easier to produce an exhaust valve by sandwiching the film piece between the casing and the spacer having a vent hole in a region wider than the region corresponding to the opening of the through hole. Become.
[0071]
Further, in these diaphragm pumps, it is preferable that the through hole constituting the exhaust passage has an opening area on the pump chamber side smaller than an opening area on the opposite side of the pump chamber. Thereby, the responsiveness of the exhaust valve is improved.
[0072]
If the film piece disposed on the bottom surface of the exhaust recess formed on the bottom surface of the casing is joined to the casing at a position sandwiching the opening of the through hole, the pump chamber By reducing the distance from the exhaust valve to the exhaust valve, the so-called dead volume is reduced and the pump discharge pressure can be further increased.
[0073]
In addition, the lower surface of the housing is provided with an exhaust recess, and a film piece provided with a ventilation hole is disposed on the bottom surface of the exhaust recess, and the housing is provided in correspondence with the ventilation hole. An annular spacer having a pedestal having a diameter larger than the diameter of the ventilation hole, an annular groove formed at the peripheral edge of the pedestal, and a ventilation hole connecting the groove and the pump chamber. And the exhaust piece is sandwiched between the bottom of the exhaust recess and the exhaust valve can be used to reduce the dead volume, and the exhaust valve can be configured without joining the film piece. Can be exchanged easily.
[0074]
In these diaphragm pumps, a connection pipe is provided on the lower surface of the casing, and the connection pipe can be easily connected to the outside by fitting the tip of the connection pipe into the intake recess and / or the exhaust recess. .
[0075]
Alternatively, a thin plate-like plate portion in which a connection groove is formed on the lower surface of the housing, and the connection groove connected to the intake passage and / or the exhaust passage by the connection groove and the housing. By providing the passage, intake / exhaust from the lower surface of the diaphragm pump can be avoided, and the diaphragm pump can be easily connected to the outside while being thin.
[0076]
As described above, according to the present invention, it is possible to provide a small diaphragm pump having a high pump discharge force with a very simple configuration.
[Brief description of the drawings]
FIG. 1 is a schematic perspective view of a diaphragm pump according to an embodiment of the present invention.
FIG. 2 is a schematic exploded perspective view of the above diaphragm pump.
FIG. 3 is a sectional structural view of the diaphragm pump of the above.
FIG. 4 is an enlarged explanatory view showing an intake valve in the diaphragm pump.
FIG. 5 is an explanatory view showing the operation of the intake valve of the diaphragm pump of the above, and showing a state in which the valve is closed.
FIG. 6 is an explanatory diagram showing the operation of the intake valve of the diaphragm pump, showing the valve open state.
FIG. 7 is an enlarged explanatory view of an intake valve of a diaphragm pump according to another embodiment of the present invention.
FIG. 8 is a schematic exploded perspective view of a diaphragm pump according to still another embodiment of the present invention.
9 is a cross-sectional structure diagram of the diaphragm pump shown in FIG. 8. FIG.
FIG. 10 is a schematic exploded perspective view of a diaphragm pump according to still another embodiment of the present invention.
11 is a cross-sectional structure diagram of the diaphragm pump shown in FIG.
FIG. 12 is a schematic exploded perspective view of a diaphragm pump according to still another embodiment of the present invention.
13 is a cross-sectional structure diagram of the diaphragm pump shown in FIG.
FIG. 14 is a partially broken sectional view of a diaphragm pump according to still another embodiment of the present invention.
15A and 15B are views showing spacers used in the intake valve of the diaphragm pump shown in FIG. 14, in which FIG. 15A is a plan view thereof, and FIG.
FIG. 16 is a schematic exploded perspective view of a diaphragm pump according to still another embodiment of the present invention.
17 is a cross-sectional structure diagram of the diaphragm pump shown in FIG.
FIG. 18 is a schematic exploded perspective view of a diaphragm pump according to still another embodiment of the present invention.
19 is a cross-sectional structure diagram of the diaphragm pump shown in FIG.
FIG. 20 is a schematic exploded perspective view of a conventional diaphragm pump.
FIG. 21 is a sectional structural view of the diaphragm pump of the above.
FIG. 22 is an explanatory diagram showing problems in the diaphragm pump of the above.
[Explanation of symbols]
1 Air intake passage
2 Exhaust passage
3 connection paths
10 housing
11 Through-holes constituting the intake passage
12 Through-holes constituting exhaust passage
13 Pump chamber side opening of through-hole constituting intake passage
14 Opening side opposite to pump chamber of through-hole constituting exhaust path
15 Intake recess formed on the top surface of the housing
16 Exhaust recess formed on the lower surface of the housing
17 Intake recess formed on the lower surface of the housing
18 Pedestal constituting the exhaust valve formed in the housing
20 Diaphragm
22 electrodes
30 pieces of film
40 Spacer
50 spacer
51 Vent
60 spacer
61 Pedestal constituting the exhaust valve formed in the spacer
70 spacer
80 Connection pipe
90 Plate part constituting the connection path

Claims (3)

A diaphragm pump in which a pump chamber is formed by a plate-like housing having two through holes and a diaphragm disposed on the upper surface of the housing, and an intake valve is provided in one of the through holes An intake passage is formed, and an exhaust valve is formed by providing an exhaust valve in the remaining one through hole ,
In the intake valve, a film piece is arranged on the bottom surface of the recess for intake formed on the lower surface of the casing so as to cover the opening of the through hole constituting the intake passage, and is fitted into the intake recess. A diaphragm pump characterized in that the diaphragm pump is sandwiched by spacers having vent holes formed in a region narrower than a region corresponding to the opening of the through hole . A diaphragm pump in which a pump chamber is formed by a plate-like housing having two through holes and a diaphragm disposed on the upper surface of the housing, and an intake valve is provided in one of the through holes An intake passage is formed, and an exhaust valve is formed by providing an exhaust valve in the remaining one through hole,
The intake valve is provided with an intake recess on the lower surface of the housing, and a film piece provided with a ventilation hole on the bottom surface of the intake recess is disposed corresponding to the ventilation hole. A pedestal having a diameter larger than the diameter of the vent hole, a groove formed in a peripheral portion of the pedestal, a spacer including a vent hole connecting the groove and the outside, and a bottom surface of the intake recess. said film strip is sandwiched, wherein the to holder unpleasant Fram pump that is configured between. A diaphragm pump in which a pump chamber is formed by a plate-like housing having two through holes and a diaphragm disposed on the upper surface of the housing, and an intake valve is provided in one of the through holes An intake passage is formed, and an exhaust valve is formed by providing an exhaust valve in the remaining one through hole,
In the exhaust valve, an exhaust recess is provided on the lower surface of the casing, and a film piece provided with a vent hole is disposed on the bottom surface of the exhaust recess, and the exhaust valve corresponds to the vent hole. The housing is formed with a base having a diameter larger than the diameter of the vent hole, a groove formed at the peripheral edge of the base, and a vent hole for connecting the groove and the pump chamber. The film piece on the bottom surface of the annular spacer and the recess for exhaust
Features and to holder unpleasant Fram pump that is configured sandwiched.

Images