JP4405997B2 - Diaphragm pump and low-profile channel structure of diaphragm pump - Google Patents

Diaphragm pump and low-profile channel structure of diaphragm pump Download PDF

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JP4405997B2
JP4405997B2 JP2006285842A JP2006285842A JP4405997B2 JP 4405997 B2 JP4405997 B2 JP 4405997B2 JP 2006285842 A JP2006285842 A JP 2006285842A JP 2006285842 A JP2006285842 A JP 2006285842A JP 4405997 B2 JP4405997 B2 JP 4405997B2
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flow path
suction
discharge
plate
diaphragm pump
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JP2008101566A (en
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人司 大西
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Alps Alpine Co Ltd
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Alps Electric Co Ltd
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Priority to US11/872,225 priority patent/US20080095651A1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1037—Flap valves
    • F04B53/1047—Flap valves the valve being formed by one or more flexible elements
    • F04B53/106—Flap valves the valve being formed by one or more flexible elements the valve being a membrane
    • F04B53/1065—Flap valves the valve being formed by one or more flexible elements the valve being a membrane fixed at its centre

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Description

本発明は、振動するダイヤフラムによってポンプ作用を得るダイヤフラムポンプに関し、特に小型薄型にできるダイヤフラムポンプ及び薄型流路構造に関する。   The present invention relates to a diaphragm pump that obtains a pumping action by a vibrating diaphragm, and more particularly to a diaphragm pump and a thin channel structure that can be made small and thin.

本出願人は、例えば水冷ノート型パソコンの冷却水循環ポンプとして用いるダイヤフラムポンプ（圧電ポンプ）を開発中である。部品の収納スペースが限られているノート型パソコンでは、ポンプの小型化薄型化が求められている。
特開平９-３９２４４号公報 特開２００５-２２９０３８号公報 特開２００５-２８２３８６号公報 特開２００５-２８２３８７号公報 The present applicant is developing a diaphragm pump (piezoelectric pump) used as a cooling water circulation pump of, for example, a water-cooled notebook personal computer. In notebook personal computers with limited storage space for parts, pumps are required to be smaller and thinner.
Japanese Patent Laid-Open No. 9-39244 JP 2005-229038 A JP 2005-282386 A JP 2005-282387 A

しかし従来品は、圧電ポンプの吸入ポートと吐出ポートはハウジングから突出する突起物として形成し、両ポートに接続する管路はフレキシブルチューブを用いるのが一般的であった。このため、圧電ポンプ自体を薄型小型にしても、突起物としての吸入ポートと吐出ポート及び該両ポートへのチューブを含む接続部回りの構成が薄型化小型化の妨げとなっていた。   However, in the conventional product, the suction port and the discharge port of the piezoelectric pump are generally formed as protrusions protruding from the housing, and a flexible tube is used as a conduit connected to both ports. For this reason, even if the piezoelectric pump itself is thin and small, the structure around the connection portion including the suction port and the discharge port as projections and the tube to the two ports has been an obstacle to thinning and miniaturization.

従って本発明は、ダイヤフラムポンプの吸入ポートと吐出ポートに対し、チューブ体を用いることなく管路を接続することができる管路構造を備えたダイヤフラムポンプを得ることを目的とする。   Accordingly, an object of the present invention is to obtain a diaphragm pump having a conduit structure that can connect a conduit to the suction port and the discharge port of the diaphragm pump without using a tube body.

本発明は、ハウジングに突起物としての吸入ポートと吐出ポートを形成することなく、凹部としての吸入流路孔と吐出流路孔を形成し、この孔部に流路を構成する板材に形成した筒状突起を嵌める構成とすれば、小型化薄型化が可能であるとの着眼に基づいてなされたものである。   In the present invention, the suction flow passage hole and the discharge flow passage hole as the recesses are formed in the housing without forming the suction port and the discharge port as the projections, and the hole is formed on the plate material constituting the flow path. If it is set as the structure which fits a cylindrical protrusion, it was made | formed based on the viewpoint that size reduction and thickness reduction are possible.

すなわち、本発明のダイヤフラムポンプは、一対のハウジングの間に、周縁を液密に挟着保持されてポンプ室を構成する、振動するダイヤフラム；一対のハウジングの少なくとも一方に、ポンプ室に連通させて形成した吸入側逆止弁を有する吸入流路孔と吐出側逆止弁を有する吐出流路孔；吸入流路孔に連通する筒状突起を有する吸入側第一流路板と、この吸入流路板に積層結合され上記筒状突起に連通する吸入流路を構成する吸入側第二流路板とを有する吸入流路；及び吐出流路孔に連通する筒状突起を有する吐出側第一流路板と、この吐出側第一流路板に積層結合され上記筒状突起に連通する吐出流路を構成する吐出側第二流路板とを有する吐出流路；を備え、吸入側第一流路板の筒状突起の先端部と吐出側第一流路板の筒状突起の先端部にはそれぞれ、フランジが形成されていることを特徴としている。 That is, the diaphragm pump of the present invention is configured such that the diaphragm is configured to be held in a liquid-tight manner between a pair of housings so as to form a pump chamber. A suction flow path hole having a suction side check valve and a discharge flow path hole having a discharge side check valve; a suction side first flow path plate having a cylindrical projection communicating with the suction flow path hole; and the suction flow path A suction flow path having a suction side second flow path plate constituting a suction flow path that is laminated and connected to a plate and communicates with the cylindrical protrusion; and a discharge side first flow path having a cylindrical protrusion that communicates with a discharge flow path hole A suction flow path including a discharge plate and a discharge flow path second flow path plate that forms a discharge flow path that is laminated and coupled to the discharge protrusion first flow path plate and communicates with the cylindrical protrusion. The tip of the cylindrical protrusion and the tip of the cylindrical protrusion of the discharge-side first flow path plate Is characterized by being respectively, flange formed on.

ハウジングに形成する吸入流路孔と吐出流路孔は互いに平行に形成することが好ましい。   The suction passage hole and the discharge passage hole formed in the housing are preferably formed in parallel to each other.

そして吸入側第一流路板と吐出側第一流路板、及び吸入側第二流路板と吐出側第二流路板はそれぞれ、単一の板材料から構成すると部品点数を削減し組立を容易にすることができる。   The suction-side first flow path plate and the discharge-side first flow path plate, and the suction-side second flow path plate and the discharge-side second flow path plate are each composed of a single plate material, thereby reducing the number of parts and facilitating assembly. Can be.

流路板の筒状突起は、ハウジングの吸入流路孔及び出口流路孔に直接嵌めることも可能であるが、流路突起のピッチとポンプの吸入・吐出流路孔のピッチや径を正確に合わせるのが困難であり、精度よく加工をしようとするとコストアップになることから、ハウジングには、吸入流路孔及び出口流路孔と同心に筒状突起挿入用の環状溝を形成し、この環状溝の内周面と、この環状溝に挿入した筒状突起の外周面との間に、Ｏリングを挿入して液密を図るのが実際的である。   The cylindrical protrusions of the flow path plate can be directly fitted into the suction flow path hole and the outlet flow path hole of the housing, but the pitch of the flow path protrusions and the pitch and diameter of the suction / discharge flow path holes of the pump are accurate. Since it is difficult to match to the above, and the cost increases when trying to process accurately, the housing is formed with an annular groove for inserting a cylindrical projection concentrically with the suction flow path hole and the outlet flow path hole, It is practical to insert an O-ring between the inner peripheral surface of the annular groove and the outer peripheral surface of the cylindrical protrusion inserted into the annular groove to achieve liquid tightness.

吸入流路と吐出流路はそれぞれ、断面非円形で筒状突起の突出方向に直交する方向の幅が広い偏平形状にすると、一層の薄型化を図ることができる。   If the suction flow path and the discharge flow path are each formed in a flat shape having a non-circular cross section and a wide width in the direction perpendicular to the protruding direction of the cylindrical projection, the thickness can be further reduced.

振動するダイヤフラムは、具体的には少なくとも、導電性金属薄板からなるシムの表裏の少なくとも一方に圧電体を積層してなる圧電振動子を用いることができる。   Specifically, the vibrating diaphragm can be a piezoelectric vibrator formed by laminating a piezoelectric body on at least one of the front and back sides of a shim made of a conductive metal thin plate.

本発明は、ダイヤフラムポンプの薄型流路構造の態様では、一対のハウジングの間に、周縁を液密に保持されてポンプ室を構成する、振動するダイヤフラムを挟着し、上記一対のハウジングの少なくとも一方に、吸入側逆止弁を介して上記ポンプ室に連通する吸入流路孔と吐出側逆止弁を介して同ポンプ室に連通する吐出流路孔とを形成したダイヤフラムポンプに用いる流路構造であって、上記吸入流路孔と吐出流路孔にそれぞれ連通する一対の筒状突起を有する第一の板部材；及びこの第一の板部材に積層結合され、上記一対の筒状突起にそれぞれ連通する一対の液流路を形成する第二の板部材；を有し、第一の板部材の一対の筒状突起の先端部にはそれぞれ、フランジが形成されていることを特徴としている。 In the aspect of the thin-film channel structure of the diaphragm pump, the present invention sandwiches a vibrating diaphragm that forms a pump chamber with the periphery held liquid-tight between a pair of housings, and at least the pair of housings. On the other hand, a flow path used for a diaphragm pump in which a suction flow path hole communicating with the pump chamber via a suction check valve and a discharge flow path hole communicating with the pump chamber via a discharge check valve are formed. A first plate member having a pair of cylindrical projections each communicating with the suction flow passage hole and the discharge flow passage hole; and the pair of cylindrical projections stacked and coupled to the first plate member. A pair of liquid passages communicating with each other; and a front end portion of the pair of cylindrical protrusions of the first plate member is formed with a flange, respectively. Yes.

本発明のダイヤフラムポンプは、ハウジングに突起物としての吸入ポートと吐出ポートを形成することなく、凹部としての吸入流路孔と吐出流路孔を形成し、この孔部に流路を構成する板材に形成した筒状突起を嵌める構成としたので、小型化薄型化ができる。   The diaphragm pump of the present invention forms a suction flow path hole and a discharge flow path hole as a recess without forming a suction port and a discharge port as projections in the housing, and a plate material constituting the flow path in this hole part Since the cylindrical projection formed in the configuration is fitted, the size and thickness can be reduced.

この実施形態は、本発明を２バルブ型圧電ポンプ２０に適用した実施形態である。図１ないし図３に示すように、この圧電ポンプ２０は、下方から順にロアハウジング２１とアッパハウジング２２を有している。   In this embodiment, the present invention is applied to a two-valve piezoelectric pump 20. As shown in FIGS. 1 to 3, the piezoelectric pump 20 includes a lower housing 21 and an upper housing 22 in order from the bottom.

ロアハウジング２１には、該ハウジングの板厚平面に直交させて、冷却水（液体）の吸入流路孔２４と吐出流路孔２５が互いに平行に穿設されている。ロアハウジング２１とアッパハウジング２２の間には、Ｏリング２９を介して圧電振動子（ダイヤフラム）２８が液密に挟着支持されていて、該圧電振動子２８とロアハウジング２１との間にポンプ室Ｐを構成している。圧電振動子２８とアッパハウジング２２との間には、大気室Ａが形成される。この実施形態では、吸入流路孔２４及び吐出流路孔２５の軸線と、圧電振動子２８とは互いに直交する位置関係にある。   In the lower housing 21, a cooling water (liquid) suction passage hole 24 and a discharge passage hole 25 are formed in parallel with each other so as to be orthogonal to the plate thickness plane of the housing. A piezoelectric vibrator (diaphragm) 28 is sandwiched and supported between the lower housing 21 and the upper housing 22 via an O-ring 29, and a pump is interposed between the piezoelectric vibrator 28 and the lower housing 21. Chamber P is configured. An atmospheric chamber A is formed between the piezoelectric vibrator 28 and the upper housing 22. In this embodiment, the axes of the suction passage hole 24 and the discharge passage hole 25 and the piezoelectric vibrator 28 are in a positional relationship orthogonal to each other.

圧電振動子２８は、中心部のシム２８ａと、シム２８ａの表裏の一面（図２の上面）に積層形成した圧電体２８ｂとを有するユニモルフタイプを図示している。シム２８ａは、導電性の金属薄板材料、例えば厚さ５０〜３００μｍ程度のステンレス、４２アロイ等により形成された金属製の薄板からなる。圧電体２８ｂは、例えば厚さ３００μｍ程度のＰＺＴ（Ｐｂ（Ｚｒ、Ｔｉ）Ｏ3）から構成されるもので、その表裏方向に分極処理が施されている。このような圧電振動子は周知である。 The piezoelectric vibrator 28 is a unimorph type having a shim 28a at the center and a piezoelectric body 28b formed on the front and back surfaces of the shim 28a (upper surface in FIG. 2). The shim 28a is made of a conductive metal thin plate material, for example, a metal thin plate formed of stainless steel having a thickness of about 50 to 300 μm, 42 alloy, or the like. The piezoelectric body 28b is made of, for example, PZT (Pb (Zr, Ti) O 3 ) having a thickness of about 300 μm, and is polarized in the front and back directions. Such a piezoelectric vibrator is well known.

ロアハウジング２１の吸入流路孔２４と吐出流路孔２５にはそれぞれ、ポンプ室Ｐ側と吐出流路側に位置させて、逆止弁（アンブレラ）３２と３３が設けられている。逆止弁３２は、吸入流路孔２４からポンプ室Ｐへの流体流を許してその逆の流体流を許さない吸入側逆止弁であり、逆止弁３３は、ポンプ室Ｐから吐出流路孔２５への流体流を許してその逆の流体流を許さない吐出側逆止弁である。   Check valves (umbrellas) 32 and 33 are provided in the suction passage hole 24 and the discharge passage hole 25 of the lower housing 21 so as to be positioned on the pump chamber P side and the discharge passage side, respectively. The check valve 32 is a suction-side check valve that allows a fluid flow from the suction passage hole 24 to the pump chamber P and does not allow the reverse fluid flow. The check valve 33 discharges from the pump chamber P. This is a discharge-side check valve that allows fluid flow to the passage hole 25 but does not allow the opposite fluid flow.

逆止弁３２、３３は、同一の形態であり、流路に接着固定される穴あき基板３２ａ、３３ａに、弾性材料からなるアンブレラ３２ｂ、３３ｂを装着してなっている。このような逆止弁（アンブレラ）自体は周知である。穴あき基板３２ａ、３３ａは、本実施形態においては別体で形成されているが、ロアハウジング２１と一体で成型しても良い。   The check valves 32 and 33 have the same configuration, and are provided with umbrellas 32b and 33b made of an elastic material on perforated substrates 32a and 33a that are bonded and fixed to the flow path. Such a check valve (umbrella) itself is well known. The perforated substrates 32 a and 33 a are formed separately in the present embodiment, but may be molded integrally with the lower housing 21.

本実施形態は、以上のようにロアハウジング２１に吸入流路孔２４、吐出流路孔２５を形成した上で、この吸入流路孔２４と吐出流路孔２５に、第一、第二の流路板４０、５０から構成した吸入流路２６と吐出流路２７を接続するものであって、ロアハウジング２１には、吸入流路孔２４と吐出流路孔２５と同心（同軸）に外面が開放された環状溝２４ａ、２５ａ（図２）が形成されている。なお、環状溝２４ａ、２５ａは必要に応じて偏心していても良い。第一流路板４０は、吸入側と吐出側の第一流路板を兼ねる（両者を一体に形成した）もので、環状溝２４ａに嵌まる吸入側筒状突起４１と、環状溝２５ａに嵌まる吐出側筒状突起４２と、吸入側筒状突起４１に連通する吸入流路凹部４３と、吐出側筒状突起４２に連通する吐出流路凹部４４と、吸入流路凹部４３と吐出流路凹部４４を区画する区画部４５とを有している。   In the present embodiment, the suction passage hole 24 and the discharge passage hole 25 are formed in the lower housing 21 as described above, and the first and second passages are formed in the suction passage hole 24 and the discharge passage hole 25. The suction flow path 26 and the discharge flow path 27 constituted by the flow path plates 40 and 50 are connected. The lower housing 21 has an outer surface concentrically (coaxially) with the suction flow path hole 24 and the discharge flow path hole 25. Annular grooves 24a and 25a (FIG. 2) are formed. The annular grooves 24a and 25a may be eccentric as necessary. The first flow path plate 40 serves as both the suction-side and discharge-side first flow path plates (both are formed integrally), and is fitted into the suction-side cylindrical protrusion 41 that fits into the annular groove 24a and the annular groove 25a. The discharge side cylindrical projection 42, the suction flow path recess 43 communicating with the suction side cylindrical projection 41, the discharge flow path recess 44 communicating with the discharge side cylindrical projection 42, the suction flow path recess 43 and the discharge flow path recess And a partition 45 that partitions 44.

第二流路板５０は、第一流路板４０と同様に、吸入側と吐出側の第二流路板を兼ねる（両者を一体に形成した）もので、第一流路板４０の吸入流路凹部４３、吐出流路凹部４４及び区画部４５に対応する吸入流路凹部５３、吐出流路凹部５４及び区画部５５を有している。以上の第一流路板４０と第二流路板５０は、区画部４５を含む接合面４６と区画部５５を含む接合面５６を例えばロー付けで接合することで、吸入側筒状突起４１に連なる吸入流路２６と、吐出側筒状突起４２に連なる吐出流路２７とが形成される。第一・第二流路板はＡｌ、Ｃｕ、ＳＵＳなどの０．１〜０．３ｍｍ程度の薄板を使用し、流路の厚さを１ｍｍ以下とすることで薄型化を実現できる。この吸入流路２６と吐出流路２７は、断面非円形で吸入側筒状突起４１と吐出側筒状突起４２の突出方向に直交する方向の幅が広い偏平形状をなしている。また、凹部５４は第一または第二流路のどちらか一方のみに設けても良い。   Similarly to the first flow path plate 40, the second flow path plate 50 serves as the second flow path plate on the suction side and the discharge side (both are formed integrally), and the suction flow path of the first flow path plate 40. It has a suction channel recess 53, a discharge channel recess 54 and a partition 55 corresponding to the recess 43, the discharge channel recess 44 and the partition 45. The first flow path plate 40 and the second flow path plate 50 described above are joined to the suction side cylindrical protrusion 41 by joining, for example, brazing the joining surface 46 including the partitioning portion 45 and the joining surface 56 including the partitioning portion 55. A continuous suction channel 26 and a discharge channel 27 connected to the discharge-side cylindrical projection 42 are formed. The first and second flow path plates can be thinned by using a thin plate of about 0.1 to 0.3 mm such as Al, Cu, SUS, etc., and the thickness of the flow path is 1 mm or less. The suction flow channel 26 and the discharge flow channel 27 have a flat shape that is non-circular in cross section and wide in the direction perpendicular to the protruding direction of the suction side cylindrical projection 41 and the discharge side cylindrical projection 42. Moreover, you may provide the recessed part 54 only in any one of a 1st or 2nd flow path.

吸入側筒状突起４１と吐出側筒状突起４２はそれぞれ、両突起の外周面と環状溝２４ａ（２５ａ）の内周面の間にＯリング４７（５７）を介在させた状態で、該環状溝２４ａと２５ａに挿入され、液密が保持される。吸入側筒状突起４１と吐出側筒状突起４２の先端部には、内方フランジ４１ａと４２ａが形成されていて、吸入側筒状突起４１と吐出側筒状突起４２が容易に潰れないように機械的に強化されている。なお、内方フランジ４１ａと４２ａは本実施の形態の場合、吸入または吐出流路側筒状突起４１、４２の先端部内側に向くように設けられているが、外側に向けて形成しても良い。この場合、ロアハウジング２１と第一流路板４０の着脱時において、Ｏリング４７、５７の脱落を防止することが可能となる。   The suction-side cylindrical protrusion 41 and the discharge-side cylindrical protrusion 42 are each in the state where an O-ring 47 (57) is interposed between the outer peripheral surface of both protrusions and the inner peripheral surface of the annular groove 24a (25a). Inserted into the grooves 24a and 25a, the liquid tightness is maintained. Inner flanges 41a and 42a are formed at the distal ends of the suction side cylindrical projection 41 and the discharge side cylindrical projection 42 so that the suction side cylindrical projection 41 and the discharge side cylindrical projection 42 are not easily crushed. Has been mechanically strengthened. In the present embodiment, the inner flanges 41a and 42a are provided so as to face the inner end of the suction or discharge flow channel side cylindrical projections 41, 42, but may be formed outward. . In this case, it is possible to prevent the O-rings 47 and 57 from falling off when the lower housing 21 and the first flow path plate 40 are attached and detached.

以上の圧電ポンプは、圧電振動子２８が正逆に弾性変形（振動）すると、ポンプ室Ｐの容積が拡大する行程では、吸入側逆止弁３２が開いて吐出側逆止弁３３が閉じるため、吸入流路２６、吸入流路孔２４からポンプ室Ｐ内に液体が流入する。一方、ポンプ室Ｐの容積が縮小する行程では、吐出側逆止弁３３が開いて吸入側逆止弁３２が閉じるため、ポンプ室Ｐから吐出流路孔２５、吐出流路２７に液体が流出する。したがって、圧電振動子２８を正逆に連続させて弾性変形させる（振動させる）ことで、ポンプ作用が得られる。   In the above-described piezoelectric pump, when the piezoelectric vibrator 28 is elastically deformed (vibrated) in the forward and reverse directions, the suction-side check valve 32 is opened and the discharge-side check valve 33 is closed in the process of expanding the volume of the pump chamber P. Then, the liquid flows into the pump chamber P from the suction channel 26 and the suction channel hole 24. On the other hand, in the process of reducing the volume of the pump chamber P, the discharge-side check valve 33 is opened and the suction-side check valve 32 is closed, so that the liquid flows out from the pump chamber P to the discharge channel hole 25 and the discharge channel 27. To do. Accordingly, the pump action is obtained by elastically deforming (vibrating) the piezoelectric vibrator 28 continuously in the forward and reverse directions.

そして本実施形態では、吸入流路２６からポンプ室Ｐに至る流路及びポンプ室Ｐから吐出流路２７に至る流路が、第一流路板４０と第二流路板５０によって形成されており、第一流路板４０には、吸入流路孔２４、吐出流路孔２５と同軸の環状溝２４ａ、２５ａに挿入される吸入側筒状突起４１、吐出側筒状突起４２が形成されている。このため、小型化薄型化が可能である。すなわち、ハウジング２１、２２には、ポンプ室Ｐを吸入流路２６及び吐出流路２７に連通させるための突起物が存在せず、フレキシブルなチューブ体も存在しない。   In the present embodiment, the flow path from the suction flow path 26 to the pump chamber P and the flow path from the pump chamber P to the discharge flow path 27 are formed by the first flow path plate 40 and the second flow path plate 50. The first flow path plate 40 is formed with a suction side cylindrical protrusion 41 and a discharge side cylindrical protrusion 42 which are inserted into annular grooves 24a and 25a coaxial with the suction flow path hole 24 and the discharge flow path hole 25. . For this reason, size reduction and thickness reduction are possible. That is, the housings 21 and 22 have no protrusions for communicating the pump chamber P with the suction flow path 26 and the discharge flow path 27, and there is no flexible tube body.

以上の実施形態では、第一流路板４０と第二流路板５０で吸入側と吐出側の流路を形成しているが、第一、第二の流路板は、吸入側と吐出側で分ける（つまり、第一、第二の流路板４０と５０を区画部４５と５５で切断して別体とする）ことも可能であり、別体とすれば、吸入流路孔２４と吐出流路孔２５の配置位置及び方向の自由度が高まる。   In the above embodiment, the first flow path plate 40 and the second flow path plate 50 form the flow paths on the suction side and the discharge side, but the first and second flow path plates are formed on the suction side and the discharge side. (That is, the first and second flow path plates 40 and 50 can be cut into separate parts by the partition portions 45 and 55). The degree of freedom of the arrangement position and direction of the discharge flow path hole 25 is increased.

以上の実施形態では、ダイヤフラムとしてユニモルフ型の圧電振動子２８を例示したが、バイモルフ型の圧電振動子を用いることもできる。また、以上の実施形態は、圧電振動子２８の一面のみにポンプ室Ｐを形成する２バルブ型のダイヤフラムポンプに本発明を適用したものであるが、両面にポンプ室を形成するタイプのダイヤフラムポンプにも本発明は適用可能である。さらに、本発明は、ダイヤフラムの振動によりポンプ室の容積を周期的に大小に変化させてポンプ作用を得るダイヤフラムポンプ一般に適用できる。   In the above embodiment, the unimorph type piezoelectric vibrator 28 is exemplified as the diaphragm, but a bimorph type piezoelectric vibrator can also be used. In the above embodiment, the present invention is applied to a two-valve type diaphragm pump in which the pump chamber P is formed only on one surface of the piezoelectric vibrator 28. However, the diaphragm pump in which the pump chamber is formed on both surfaces is used. In addition, the present invention is applicable. Furthermore, the present invention can be applied to a diaphragm pump in general that obtains a pump action by periodically changing the volume of the pump chamber to be larger or smaller by vibration of the diaphragm.

本発明を圧電ポンプに適用した実施形態を示す、一部を切開した平面図である。It is the top view which cut off one part which shows embodiment which applied this invention to the piezoelectric pump. 図１のII-II線に沿う断面図である。It is sectional drawing which follows the II-II line of FIG. 同分解斜視図である。It is the same exploded perspective view.

符号の説明Explanation of symbols

２０ 圧電ポンプ（ダイヤフラムポンプ）
２１ ２２ ハウジング
２４ 吸入流路孔
２５ 吐出流路孔
２４ａ ２５ａ 環状溝
２６ 吸入流路
２７ 吐出流路
２８ 圧電振動子（ダイヤフラム）
２８ａ シム
２８ｂ 圧電体
２９ Ｏリング
３２ 吸入側逆止弁
３３ 吐出側逆止弁
４０ 第一流路板
４１ 吸入側筒状突起
４２ 吐出側筒状突起
４３ 吸入流路凹部
４４ 吐出流路凹部
４５ 区画部
４７ ５７ Ｏリング
５０ 第二流路板
５３ 吸入流路凹部
５４ 吐出流路凹部
５５ 区画部
Ｐ ポンプ室 20 Piezoelectric pump (diaphragm pump)
21 22 Housing 24 Suction passage hole 25 Discharge passage hole 24a 25a Annular groove 26 Suction passage 27 Discharge passage 28 Piezoelectric vibrator (diaphragm)
28a shim 28b piezoelectric body 29 O-ring 32 suction side check valve 33 discharge side check valve 40 first flow path plate 41 suction side cylindrical protrusion 42 discharge side cylindrical protrusion 43 suction flow path recess 44 discharge flow path recess 45 partition 47 57 O-ring 50 Second channel plate 53 Suction channel recess 54 Discharge channel recess 55 Partition P Pump chamber

Claims (7)

一対のハウジングの間に、周縁を液密に挟着保持されてポンプ室を構成する、振動するダイヤフラム；
上記一対のハウジングの少なくとも一方に、上記ポンプ室に連通させて形成した吸入側逆止弁を有する吸入流路孔と吐出側逆止弁を有する吐出流路孔；
上記吸入流路孔に連通する筒状突起を有する吸入側第一流路板と、この吸入流路板に積層結合され上記筒状突起に連通する吸入流路を構成する吸入側第二流路板とを有する吸入流路；及び
上記吐出流路孔に連通する筒状突起を有する吐出側第一流路板と、この吐出側第一流路板に積層結合され上記筒状突起に連通する吐出流路を構成する吐出側第二流路板とを有する吐出流路；
を備え、
上記吸入側第一流路板の筒状突起の先端部と吐出側第一流路板の筒状突起の先端部にはそれぞれ、フランジが形成されていることを特徴とするダイヤフラムポンプ。 An oscillating diaphragm that forms a pump chamber with a peripheral edge held in a liquid-tight manner between a pair of housings;
A suction flow path hole having a suction side check valve and a discharge side check valve formed in communication with the pump chamber in at least one of the pair of housings;
A suction-side first flow path plate having a cylindrical projection communicating with the suction flow path hole, and a suction-side second flow path plate constituting a suction flow path laminated and coupled to the suction flow path plate and communicating with the cylindrical projection. A discharge-side first flow path plate having a cylindrical protrusion communicating with the discharge flow-path hole, and a discharge flow path stacked and coupled to the discharge-side first flow path plate and communicating with the cylindrical protrusion. A discharge flow path having a discharge-side second flow path plate constituting
With
A diaphragm pump , wherein a flange is formed at each of a distal end portion of the cylindrical projection of the suction side first flow path plate and a distal end portion of the cylindrical projection of the discharge side first flow path plate . 請求項１記載のダイヤフラムポンプにおいて、上記吸入流路孔と吐出流路孔は互いに平行をなしているダイヤフラムポンプ。 2. The diaphragm pump according to claim 1, wherein the suction flow path hole and the discharge flow path hole are parallel to each other. 請求項１または２記載のダイヤフラムポンプにおいて、上記吸入側第一流路板と吐出側第一流路板、及び吸入側第二流路板と吐出側第二流路板はそれぞれ、単一の板材料から構成されているダイヤフラムポンプ。 3. The diaphragm pump according to claim 1, wherein the suction side first flow path plate and the discharge side first flow path plate, and the suction side second flow path plate and the discharge side second flow path plate are each a single plate material. Diaphragm pump composed of 請求項１ないし３のいずれか１項記載のダイヤフラムポンプにおいて、ハウジングには、上記吸入流路孔及び出口流路孔と同心に筒状突起挿入用の環状溝が形成されており、この環状溝の内周面と、この環状溝に挿入した筒状突起の外周面との間に、Ｏリングが挿入されているダイヤフラムポンプ。 4. The diaphragm pump according to claim 1, wherein an annular groove for inserting a cylindrical protrusion is formed in the housing concentrically with the suction flow path hole and the outlet flow path hole. A diaphragm pump in which an O-ring is inserted between the inner peripheral surface of the tube and the outer peripheral surface of the cylindrical projection inserted into the annular groove. 請求項１ないし４のいずれか１項記載のダイヤフラムポンプにおいて、上記吸入流路と吐出流路はそれぞれ、断面非円形で筒状突起の突出方向に直交する方向の幅が広い偏平形状をなしているダイヤフラムポンプ。 5. The diaphragm pump according to claim 1 , wherein each of the suction flow path and the discharge flow path has a flat shape that is non-circular in cross section and wide in a direction perpendicular to the protruding direction of the cylindrical protrusion. Diaphragm pump. 請求項１ないし５のいずれか１項記載のダイヤフラムポンプにおいて、上記ダイヤフラムは、導電性金属薄板からなるシムの表裏の少なくとも一方に圧電体を積層してなる圧電振動子であるダイヤフラムポンプ。 6. The diaphragm pump according to claim 1, wherein the diaphragm is a piezoelectric vibrator formed by laminating a piezoelectric body on at least one of the front and back sides of a shim made of a conductive metal thin plate. 一対のハウジングの間に、周縁を液密に保持されてポンプ室を構成する、振動するダイヤフラムを挟着し、上記一対のハウジングの少なくとも一方に、吸入側逆止弁を介して上記ポンプ室に連通する吸入流路孔と吐出側逆止弁を介して同ポンプ室に連通する吐出流路孔とを形成したダイヤフラムポンプに用いる流路構造であって、
上記吸入流路孔と吐出流路孔にそれぞれ連通する一対の筒状突起を有する第一の板部材；及び
この第一の板部材に積層結合され、上記一対の筒状突起にそれぞれ連通する一対の液流路を形成する第二の板部材；
を有し、
上記第一の板部材の一対の筒状突起の先端部にはそれぞれ、フランジが形成されていることを特徴とするダイヤフラムポンプの薄型流路構造。 Between the pair of housings, a vibrating diaphragm that holds the periphery in a liquid-tight manner to form a pump chamber is sandwiched, and the pump chamber is connected to at least one of the pair of housings via a suction-side check valve. A flow path structure used for a diaphragm pump in which a suction flow path hole that communicates with a discharge flow path hole that communicates with the pump chamber via a discharge-side check valve,
A first plate member having a pair of cylindrical protrusions communicating with the suction flow path hole and the discharge flow path hole; and a pair of layers coupled to the first plate member and communicating with the pair of cylindrical protrusions, respectively. A second plate member forming a liquid flow path of
Have
A thin-film channel structure for a diaphragm pump , wherein a flange is formed at each of the tip ends of the pair of cylindrical protrusions of the first plate member .
JP2006285842A 2006-10-20 2006-10-20 Diaphragm pump and low-profile channel structure of diaphragm pump Expired - Fee Related JP4405997B2 (en)

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