200821269 九、發明說明： 【發明所屬之技術領域】 本發明係關於玻璃基板之裂痕拓展系統及裂痕拓展 方法，具體而言，係關於玻璃基板之裂痕拓展系統及其裂 痕拓展方法方法，其係對劃刻線作一般且重複性的氣動式 脈衝，以拓展劃刻線中所形成的裂痕。 【先前技術】 一般而言，在平面顯示器的技藝中，液晶顯示器 (LCD)、電漿顯示面板(PDP)、場發射顯示器(FED)以及有 機發光二極體顯示器(OLED)皆為習知技術。 在此等習知技術中，LCD係由利用易碎材質所組成的 玻璃基板製造而成。再者，在LCD中，根據不同的影像 資訊，資難息侧立地提供給呈矩陣狀排觸液晶胞， 以调整每個液晶胞的光透射度。接著，得以顯示理想中的 影像。LCD之所以被廣泛的運用，即係因為其輕薄的外 型’且具有低功率及操作電壓。 -般適用於鱗LCD的液晶面板包含—上面板以及 -下面板，上面板的上玻璃基板上圖樣化—彩色滅光片， 而下面減下綱基板上·化—賴電晶體(tft)，而 Ϊ晶則係被填充於上下面板之間。在上下面«填入液晶 後’上下面板會相互對齊。完成對齊後，上下面板會相互 200821269 結合在一起，並接著被切割。 在液晶面板的製程中個其上形成有複數個單位面 板的母玻璃面板可以增加生產率，其中每個單位面板係用 於-個液日日日顯示裝置中。接著，在填人液晶之前，母玻璃 面板會透過切酿序而被_為複數個單位面板，而此複 數個單位面板係分別與母玻璃面板分離。在此，切割程序 包含劃刻程序及破裂程序。在劃刻程序中，具有預設深度 的劃刻線會形成於上下玻璃面板的各個表面或相互結合 之上下玻璃基板之任一基板的表面，其係利用如超硬合 金、鑽石或其類似者之堅硬構件所製成之輪形切割器。在 破裂程序中，裂痕會隨著外部衝擊，而沿著_線擴展， 進而切割母玻璃面板。 圖1顯示切割結合在一起之母板所使用之劃刻裝置。 圖1係為習知劃刻裝置之示意圖。劃刻裝置95〇包含 一桌體951，而結合在一起的母板908的任一角落係負載 於其上。桌體951具有一钳夾單元952與其相連，鉗夾單 元952係負責錐夾結合在一起的母板908之每個角落。書^ 刻裝置950具有一對切割頭953及954,係安裝於母板908 之上下處。 每個切割頭953及954係以面對面的方式設置，且結 7 200821269 合在一起的母板908係插入於其間。切割頭953及954具 有-個切割輪，負責在基板表面形成垂直的深型裂痕。 以此方式建構劃職置謂，即可在母玻璃面板上形成一 條劃刻線:形成劃刻線後，即可運用破裂程序，此程序中 會應用如氨基鉀_旨（urethane)之刀片或其類似者的破 4棒。亦即，隨著其上形成有_、_賴基板被破裂棒 敲擊’裂痕會沿著_線擴展而切割玻璃基板。然而，當 使用此等破裂棒時，因為蝴到玻板的實體，因此; 產生碎粒。再者’破裂棒會影響玻璃基板的其他部分而i 致缺陷的發生。因此，液晶面板的品質會下降。 再者，為分離在分離面板時未完整破裂的部分，習知 技術利用針狀物拓展裂痕。 為解決以上問題’在破裂程序時會使用高溫蒸氣。缺 而，當使用蒸氣破裂程序時，濕氣會殘留在母板上，導= 玻璃基板上可能會有汙點。 解決此類問題的技術之一，係揭露於韓國專利註 第10-0586821號(於2006年6月8日公開）以及第 10-0582506號(於2006年5月22日公開）。 揭露一種具有真 所示。真空吸入 在韓國專利註冊案第10-0586821中， 空吸入器於其中的裂痕拓展單元，如圖2200821269 IX. Description of the Invention: [Technical Field] The present invention relates to a crack propagation system and a crack expansion method for a glass substrate, and more particularly to a crack propagation system for a glass substrate and a method for expanding the crack thereof, which are The scribe line is used as a general and repetitive pneumatic pulse to expand the cracks formed in the scribe line. [Prior Art] In general, in the art of flat panel display, liquid crystal display (LCD), plasma display panel (PDP), field emission display (FED), and organic light emitting diode display (OLED) are conventional technologies. . In these prior art, the LCD is manufactured from a glass substrate composed of a fragile material. Furthermore, in the LCD, depending on the image information, the inconvenience is provided laterally to the matrix-shaped liquid crystal cell to adjust the light transmittance of each liquid crystal cell. Then, the desired image is displayed. LCDs are widely used because of their thin and light appearance and low power and operating voltage. Generally, the liquid crystal panel suitable for the scale LCD includes an upper panel and a lower panel, and the upper glass substrate is patterned on the upper glass substrate, and the color extinction film is removed, and the lower substrate is reduced to a tft. The twins are filled between the upper and lower panels. The upper and lower panels will align with each other in the upper and lower «fill in the LCD. Once alignment is complete, the upper and lower panels are combined with each other 200821269 and then cut. The mother glass panel on which a plurality of unit panels are formed in the process of the liquid crystal panel can increase productivity, wherein each unit panel is used in a liquid day and day display device. Then, before filling the liquid crystal, the mother glass panel is _ a plurality of unit panels through the cutting order, and the plurality of unit panels are separated from the mother glass panel, respectively. Here, the cutting program includes a scribe procedure and a rupture program. In the scribing procedure, a scribe line having a predetermined depth may be formed on each surface of the upper and lower glass panels or on the surface of any of the substrates on the lower glass substrate, such as a superhard alloy, a diamond or the like. A wheel cutter made of a hard member. In the rupture process, cracks expand along the _ line with external impact, which in turn cuts the mother glass panel. Figure 1 shows the scribing device used to cut the bonded motherboard. Figure 1 is a schematic illustration of a conventional scoring apparatus. The scribing device 95A includes a table body 951 to which any corner of the bonded mother board 908 is loaded. The table body 951 has a jaw unit 952 connected thereto, and the jaw unit 952 is responsible for each corner of the mother board 908 where the cone clips are joined together. The book engraving device 950 has a pair of cutting heads 953 and 954 mounted above the motherboard 908. Each of the cutting heads 953 and 954 is disposed in a face-to-face manner, and a mother board 908 that is joined together with a knot 7 200821269 is inserted therebetween. The cutting heads 953 and 954 have a cutting wheel that is responsible for the formation of vertical deep cracks on the surface of the substrate. By constructing a deed in this way, a scribe line can be formed on the mother glass panel: after the scribe line is formed, the rupture program can be applied, and a blade such as urethane or urethane is applied in this procedure. The similar ones broke 4 sticks. That is, as the substrate is formed thereon, the substrate is struck by a rupture bar, and the crack is cut along the _ line to cut the glass substrate. However, when such a rupture rod is used, the granules are generated because of the entity that is caught on the glass sheet. Furthermore, the 'fracture rod affects other parts of the glass substrate and the occurrence of defects. Therefore, the quality of the liquid crystal panel will decrease. Furthermore, in order to separate the portion that is not completely broken when the panel is separated, the conventional technique utilizes a needle to expand the crack. In order to solve the above problem, high temperature steam is used in the rupture process. Insufficient, when using the vapor rupture program, moisture will remain on the mother board, and there may be stains on the glass substrate. One of the techniques for solving such problems is disclosed in Korean Patent Publication No. 10-0586821 (published on Jun. 8, 2006) and No. 10-0582506 (published on May 22, 2006). Reveal one that has the true meaning. Vacuum inhalation In Korean Patent Registration No. 10-0586821, a crack expansion unit in which an air inhaler is located, as shown in Fig. 2
ϋ 200821269 以轉fr卿動的方向為準的方向設置於上流端的 在此轅it產生真空_移帶上，使得玻縣板會依附 ίΖΐ〇!ϊ。糾卩’為轉移具有綱線形成於其上的玻 ς 供一種輸运器’其包含-對滾輪121與122、 著無止境的軌道移朗轉移帶140。轉移帶 4〇一形成讀個通風孔，對應負載玻璃基板的部分。圖2 :的裂痕拓展單元包含真空吸人器與氣流裝置。真空吸 二”、有吸人^分’貞責將玻璃基板1G附著於轉移帶 ’玻璃基板1。係、負载於轉移帶14。’並接著被轉移， 工幫絲負貝提供真空到吸人部分⑹。氣流裝置具 一流動部分171以及—壓織，以將壓縮過的氣體提供 =流動部分m。在圖2卜參考號162代表真空埠，而 參考號172代表流動埠。 在韓國專利第l〇_OS825〇6號中，以易碎材質製造而成 ，母玻璃基板的表面，係由第—t_加熱及降溫。接 著’此表©會由第二雷射點加熱，以可靠地形成裂痕。亦 即’當母賴基板的表畴續由第—雷咖沿著欲劃刻的 線作加熱日夺，第-雷射點鄰近的區域會持續沿著欲劃刻的 線作降溫。再者’在帛n帅對撇降㈣區域鄰近 的區域會持續沿著欲咖的線由第二雷射點作加熱。 然而，在上述文件所揭露的技術中，使用其上具有真 空吸入$的裂痕拓展單元時，玻絲板的破裂裝置需要增 9 200821269 再者’母玻縣㈣表轉續由雷射點沿著欲 w刻的線作加熱時，需要有非常精準的控制。 再者，利用真空吸人器運作破裂程序時，若未以相同 冰度形成_線，财能f要蝴欲被_ 他部公。 ^ ，者彳W雷射切剔細彳線時，雷射的輸出應維持在 相同等級，且其位置應在精準的掌控下。 【發明内容】 本發明之-目的，係提供—種玻璃基板之職拓展系 、、先及4痕拓展方法，其制—般且持續地施加氣動式脈衝 U刻線’簡單地拓展形成於細線上的裂痕。 /本發明之另-目的，係提供—種玻璃基板的裂痕拓展 系、、先及妓痕拓展方法，其可藉由調整氣流喷嘴與具有劃刻 線形成於其上之玻璃基板表面間的距離，簡單地調整施加 晨動的衝擊量。 本發明之一面向，係提供一種玻璃基板之裂痕拓展系 其包含·轉移具有劃刻線形成於其上之玻璃基板的轉 移，兀，將氣動式脈衝施加於玻璃基板的姻線，以拓展 玻^基板之裂痕的裂痕拓展單元；以及供應高壓氣體給裂 200821269 痕拓展單讀氣體供應單元。祕拓展單元係設置於玻璃 基板上，以直接施加氣動式脈衝於劃刻線。 裂痕拓展單70可包含··吸入氣體供應單元所供應的氣 體的氣體吸入埠，施加脈衝到氣體吸入埠所吸入的氣體的 風扇；將風扇所軸的氣動式脈衝施加於_線的氣流喷 嘴。 此風扇可週期性地透過風扇的旋轉而阻擔氣體吸入 埠所供應的氣體。 广氣體吸入埠所供應的某些氣體持續且直接地提供給 氣流喷鳴’同時隨著風扇哺動，氣體吸人埠所供應的某 些氣體可週期性地提供給氣流喷嘴。 氣體吸入埠所提供的氣體可能為高溫且高壓氣體。 氣M L噴鳴與具有劃刻線於其上之玻璃基板間的距離 可作調整。 抑裂痕拓展彡敵可&含以X或Υ轴方肖移動裂痕拓 展單兀的移鱗元。裂痕拓展單元係設置於雜單元，以 沿者劃刻線移動。 200821269 元：ί展系=可包ί以x轴方向移動裂痕拓展單 μ ㈣拓展早70係設置於鶴單元之上，而 乳/’丨L噴嘴具有對應劃刻線的長度。 美板之ίΓ、、面向係利㈣餘I⑽的一種玻璃 f ί璃Α::編-法’其包含·移動其上形成有劃刻線之 ^基板之移動早70 ;職動式脈衝施加於玻璃基板的劃 :靜二if玻璃基板之裂痕的裂痕單元;以及供應高壓 1、以雜鮮元崎雜應單元。此拓展方法包含以 利用移動單元’透過劃刻程序，移動其上形成有 ^、，之_基板；畔難拓展單元醜时嘴，使氣 ::贺:係對準劃刻線;以及驅動|^痕拓展單元的風扇，並 透過氣流喷嘴施加氣動式脈衝於劃刻線。ϋ 200821269 Set the direction of the direction of the direction of the move to the upper end. Here, the vacuum is generated on the _ it, so that the glass plate will be attached to the 县 Ζΐ〇! The entanglement is a transfer of a glass having a line formed thereon for a transporter' which includes a pair of rollers 121 and 122 and an endless orbital transfer belt 140. The transfer belt is formed into a vent hole corresponding to the portion of the load glass substrate. Figure 2: The crack expansion unit contains a vacuum inhaler and airflow device. Vacuum suction 2", there is a suction ^ 贞 贞 将 将 将 将 将 玻璃 玻璃 玻璃 玻璃 玻璃 玻璃 玻璃 玻璃 玻璃 附着 附着 附着 附着 附着 附着 附着 附着 附着 附着 附着 附着 附着 附着 附着 附着 附着 附着 附着 附着 附着 附着 附着 附着 附着 附着 附着 附着 附着 附着 附着Part (6). The air flow device has a flow portion 171 and - weaving to provide a compressed gas to the flow portion m. In Fig. 2, reference numeral 162 represents a vacuum crucible, and reference numeral 172 represents a flow crucible. l〇_OS825〇6, made of fragile material, the surface of the mother glass substrate is heated and cooled by the first -t_. Then this table will be heated by the second laser point to reliably Forming a crack. That is, when the surface of the mother substrate continues to be heated by the line of the first ray, the area adjacent to the first laser point will continue to cool down along the line to be scribed. In addition, the area adjacent to the area where the 帅n handsome pair 撇 ( (4) region continues to be heated by the second laser point along the line of the coffee. However, in the technique disclosed in the above document, the vacuum suction is used thereon. When the crack expansion unit of $, the rupture device of the glass plate needs to increase 9 2008 21269 In addition, the 'mother glass county (four) table needs to have very precise control when the laser is heated along the line to be etched. Moreover, if the vacuum absorbing device is used to operate the rupture program, if it is not the same Ice formation _ line, financial energy f wants to be _ his department. ^, when 彳W laser cuts the fine line, the output of the laser should be maintained at the same level, and its position should be in precise control [Explanation] The object of the present invention is to provide a glass substrate job development system, a first and a four-mark expansion method, which is generally and continuously applied with a pneumatic pulse U-line" to simply expand and form A crack on a thin wire. / Another object of the present invention is to provide a crack propagation system for a glass substrate, and a method for expanding a scar, which can be formed by adjusting a gas flow nozzle and having a scribe line thereon. The distance between the surfaces of the glass substrates is simply adjusted to the amount of impact applied to the morning motion. One aspect of the present invention is to provide a crack extension of a glass substrate, which comprises transferring and transferring a glass substrate having a scribe line formed thereon. Hey, pneumatic pulse A stranding line added to the glass substrate to expand the cracking expansion unit of the crack of the glass substrate; and a supply of high-pressure gas to crack the 200821269 trace extended single-reading gas supply unit. The secret expansion unit is disposed on the glass substrate to directly apply the pneumatic type The pulse is drawn on the scribe line. The crack extension unit 70 may include a gas suction 埠 of the gas supplied from the suction gas supply unit, a fan that applies a pulse to the gas sucked by the gas suction ;; and applies a pneumatic pulse of the shaft of the fan to _ line airflow nozzle. This fan can periodically block the gas supplied by the gas inhalation through the rotation of the fan. Some of the gas supplied by the wide gas suction port is continuously and directly supplied to the airflow squirting' The fan feeds, and some of the gas supplied by the gas suction can be periodically supplied to the airflow nozzle. The gas supplied by the gas suction port may be a high temperature and a high pressure gas. The distance between the gas M L squirt and the glass substrate having the scribe line thereon can be adjusted. Suppression of cracks and expansion of the enemy can be combined with the X or the axis of the axis to move the crack to expand the single scale of the scale element. The crack expansion unit is placed in the miscellaneous unit to move along the scribe line. 200821269 元: ί展系=可包ί Move the crack extension in the x-axis direction μ (4) Expand the early 70 series on the crane unit, and the milk / '丨L nozzle has the length corresponding to the scribe line. A glass fr ί Α : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : The marking of the glass substrate: the cracking unit of the crack of the static glass substrate; and the supply of the high pressure 1. The expansion method includes: using the mobile unit to “move the stencil on the substrate through the scribe process; the ugly mouth of the unit is difficult to expand, so that the gas::He: is aligned with the scribe line; and the drive| The trace expands the unit's fan and applies a pneumatic pulse to the scribe line through the airflow nozzle.
在移動玻璃基板的步驟中，氣流噴嘴及玻璃基板間的 距離可根據_線中所形成之裂痕的空間賊度作調整。 在施加氣動式脈衝的步驟中，風扇的旋轉速度或裂痕 扭展單元的轉移速度，係根據劃刻線中所形成裂痕的空間 及深度調整。 【實施方式】 接著，本發明之示範實施例將參考伴隨圖式描述。在 本發明之詳述中，類似參考號代表類似構件，且將不贅述 12 200821269 其細節 統圖 圖3係本發明之示範實_巾玻璃絲的裂痕拓展系 在圖3巾’參考號1G代表具有賊A小且欲被割刻 之玻璃基板，而參考號2〇代表形成劃刻線的裂痕。 號400代表移轉透過劃刻程序而形成劃刻線於其上之玻璃 基板10的輸送器’輸送器4〇〇具有-對滾輪、馬達以及 轉移帶。 使用分離，如同切割玻璃之—般輸送器所 的㈣°§水平義玻板時，雜會成水平方式 ^列’並以職_方式分職餘支撐物上。馬達 ^轉軸’以軸趣接驅騎輪，以提供轉矩給滾輪 係軸式耦接任一滾輪。透過動力傳輸帶，轉矩 絲、攸’動滑輪傳輸到被驅動的滑輪。再者，轉移帶係 馬達=矩袞輪，過 麼氣體。單元500係從油愿幫浦(未圖示)收到高 13 200821269 如圖3所示，裂痕拓展單元500係設置於玻璃基板100 之上’直接以垂直於劃刻線的方向朝劃刻線施加氣動式脈 衝。 以下描述裂痕拓展單元500的建構。 友本發明之裂痕拓展單元5〇〇包含吸入油壓幫浦所供應 之乳體的氣體吸入埠5〇卜對氣體吸入埠5〇1所吸入的氣 體，加脈衝之第—風扇51G、以及將第-風扇510所形成 之氣動式脈衝施加於劃刻線的氣流喷嘴5〇2。 如圖3所示，第一風扇51〇係設置於裂痕拓展單元5〇〇 々几扇λ又體彳5〇3 ’且以馬達(未圖示)所預定的速度轉動。 第一，扇510的轉動會週期性地阻擋氣體吸入埠5〇1所供 應的氣體。接著，勤會施加於供應到氣流喷嘴502的氣 體’進而施加脈衝。 ，即，為沿形成於玻璃基板1〇表面之劃刻線增長裂 痕’第-風扇510 t以垂直於劃刻線的方向施加均勻且重 複性的外力。 接著，圖4描述本發明之另一實施例的裂痕拓展系統。 圖4鱗示本發明之另—實施射玻璃基板_痕拓展系 、先圖4中，類似的參考號係代表圖3所示之類似構件， 14 .200821269 其細節不再贅述 圖4中，參考號520代表對氣體吸入埠5〇1所吸入之 氣體增加脈衝之第二風扇。如圖4所示，與第—風扇51〇 柯的是’第二風扇52G的設置方式係會在第二風扇52〇 與裂痕拓展單元500的内壁間提供一預定空間。 产因此，將第二風扇520設置於裂痕拓展單元5〇〇中， 氣體吸入埠501所供應的某些氣體會沿 =側之箭精示之方向，直接且重複地供 吸人埠5G1所供應的某些氣體會以週 乂 、工’㈣第二風扇520的轉動而供應給氣流喷嘴 502 〇 、 透過圖4所示的架構，氣動歧衝可作進—步的變化。 接著’圖5描述圖4中所示的裂痕拓展單元500的架 圖5係玻璃基板之裂痕拓展系統的 設有本發明之裂痕拓展單元5〇〇。 ϋ八系統中 在圖5中’參考號_代表以χ或 痕拓展單元的鶴科。裂雜展單元 15 200821269 移動單元600 ’且係沿著玻璃基板1〇的劃刻線u移動。 ，時’裂痕拓展單元5GG向玻璃基板1G的_線u施加 氣動式脈衝’以拓展玻璃基板1〇的裂痕。 亦即’根據劃刻線11上所形成的裂痕2〇之空間盘深 =氣流喷嘴5〇2與具有姻線形成於其上之玻璃基板1〇 =距離可跟著作調整，第一及第二風扇別與520的旋 ，度也跟著作調整，或者是調整裂餘展單元的轉 。因此’本發·以最_狀脉展_ 之裂痕20。 流噴=㈠A U將描述裂痕拓展單元500之氣In the step of moving the glass substrate, the distance between the gas flow nozzle and the glass substrate can be adjusted according to the space thief of the crack formed in the _ line. In the step of applying a pneumatic pulse, the rotational speed of the fan or the transfer speed of the crack twisting unit is adjusted according to the space and depth of the crack formed in the scribe line. [Embodiment] Next, an exemplary embodiment of the present invention will be described with reference to the accompanying drawings. In the detailed description of the present invention, similar reference numerals denote similar components, and will not be described in detail. 12 200821269 Detailed description of the drawings FIG. 3 is an exemplary embodiment of the present invention. The crack extension of the glass filament is shown in FIG. The thief A is a small glass substrate to be cut, and the reference number 2〇 represents a crack that forms a scribe line. No. 400 represents a conveyor 'conveyor 4' that transfers the glass substrate 10 scribed by the scribing process to have a pair of rollers, a motor, and a transfer belt. When using separation, as in the case of a glass-cutting conveyor, the miscellaneous will be leveled in a row and placed on the support. The motor ^shaft 'shaft is used to drive the wheel to provide torque to the roller to be coupled to any roller. Through the power transmission belt, the torque wire and the 攸' movable pulley are transmitted to the driven pulley. Furthermore, the transfer belt system motor = moment wheel, gas. The unit 500 receives the high 13 from the oil pump (not shown). 200821269 As shown in FIG. 3, the crack expanding unit 500 is disposed on the glass substrate 100' directly toward the scribe line in a direction perpendicular to the scribe line. Apply a pneumatic pulse. The construction of the crack expansion unit 500 will be described below. The crack expansion unit 5 of the present invention includes a gas inhalation of the milk supplied by the suction pump, and a gas inhaled by the gas inhalation 埠5〇1, a pulsed first fan 51G, and The pneumatic pulse formed by the first fan 510 is applied to the airflow nozzle 5〇2 of the scribe line. As shown in Fig. 3, the first fan 51 is disposed on the crack expanding unit 5 々 several λ and 彳 5 〇 3 ′ and is rotated at a speed predetermined by a motor (not shown). First, the rotation of the fan 510 periodically blocks the gas from being drawn into the gas supplied by the crucible 5〇1. Next, the diligence is applied to the gas supplied to the air flow nozzle 502' to apply a pulse. That is, a uniform and repetitive external force is applied in a direction perpendicular to the scribe line in order to grow cracks along the scribe line formed on the surface of the glass substrate 1 第. Next, Figure 4 depicts a crack propagation system in accordance with another embodiment of the present invention. Figure 4 is a plan view showing another embodiment of the present invention. The same reference numerals are used to refer to the similar members shown in Fig. 3. 14 200821269 The details of which are not described in detail in FIG. No. 520 represents a second fan that increases the pulse of the gas inhaled by the gas inhalation 埠5〇1. As shown in Fig. 4, the arrangement of the second fan 52G with the first fan 51 is provided with a predetermined space between the second fan 52A and the inner wall of the crack expanding unit 500. Therefore, the second fan 520 is disposed in the crack expanding unit 5, and some of the gas supplied by the gas suction port 501 is directly and repeatedly supplied to the inhaler 5G1 in the direction indicated by the arrow on the side. Some of the gas will be supplied to the airflow nozzle 502 by the rotation of the second fan 520, and through the structure shown in Fig. 4, the aerodynamic differential can be changed stepwise. Next, Fig. 5 depicts the crack propagation unit 500 shown in Fig. 4. Fig. 5 is a crack extension system of the glass substrate provided with the crack expansion unit 5 of the present invention. In the ϋ8 system, in Fig. 5, 'reference number _ represents the crane family with the χ or mark expansion unit. The split-mold unit 15 200821269 moves the unit 600' and moves along the scribe line u of the glass substrate 1〇. The time-fracture expanding unit 5GG applies a pneumatic pulse ' to the _ line u of the glass substrate 1G to expand the crack of the glass substrate 1'. That is, 'the space depth according to the crack 2 上 formed on the scribe line 11 = the air flow nozzle 5 〇 2 and the glass substrate having the line formed thereon 〇 = distance can be adjusted with the work, first and second Fans and 520 spins, degrees are also adjusted with the book, or adjust the rotation of the expansion unit. Therefore, 'this hair · the most _ shape of the pulse _ crack 20 . Flowing spray = (a) A U will describe the gas of the crack expansion unit 500
7B 之係朗基板的歸拓展纟統之平賴，在本發明 =另:貝施例中其系統内設有裂餘展單元。圖？A與 、、會不乳流贺嘴的形狀。 以xltt’裂痕拓展單元500’係安装於移動單元600上， 劃刻線11 ㈣痕祕單元的5G_嘴具有對應 所妒圖6所示’噴嘴的長度大於賴基板10上 料成之4_11辭H餘展單元·，具有複數 16 200821269 個圓形氣流孔5020 ’相互間具有預設的距離，如圖 不’或者具有複數個長方形氣流孔5〇3 的距離，如圖7B所示。 H、有預设 圖7A所示圓形氣流孔5〇2〇之數量 孔5㈣之數量，係可根據劃刻線 :: 裂痕20輕間及深度而作調整或設定。 抓成之 琿從ft緖氣體之油壓幫浦提供給氣體吸入 、米—’係為咼溫兩壓以啟動裂痕2〇的拓展。 參照圖8，其描述利用圖3到7所示之玻璃 痕拓展系統的裂痕拓展方法。 土 ^ 圖 圖 系解釋本發明之玻璃基板的裂痕拓展方法流程 書牛IT 1所示之裝置，在破璃基㈣上形成 里谓線η(步驟sio)。 a板辦’其上形成销職11的玻璃 轉轉移咖或4所顯示的 17 200821269 接著，裂痕拓展單元500的氣流噴嘴5〇2的位置，係 透過位置控制裝置(未圖示)轉移到圖5所示之玻璃基板的 最上部’而裂痕拓展單元5〇〇的氣流噴嘴5〇2係對準刻 線11(步驟S30)。此時，氣流喷嘴5〇2與其上形成有割刻 線11之玻璃基板10間的距離，係根據劃刻線u中^ 20的空間與深度而作調整。 乂又In the invention of the present invention, another method is provided with a crack-extension unit in the system. Figure? A and , will not milk the shape of the mouth. The xltt' crack expansion unit 500' is mounted on the mobile unit 600, and the scribe line 11 (4) of the 5G_ nozzle of the trace unit has a corresponding length of the nozzle shown in FIG. 6 that is longer than the 4_11 of the substrate 10 The H-extension unit has a plurality of 16 200821269 circular airflow holes 5020' having a predetermined distance from each other, as shown in the figure or having a plurality of rectangular airflow holes 5〇3, as shown in Fig. 7B. H. There are presets. The number of circular airflow holes 5〇2〇 shown in Fig. 7A The number of holes 5 (4) can be adjusted or set according to the scribe line :: crack 20 light and depth. The 抓 之 珲 珲 ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft ft Referring to Figure 8, a crack propagation method utilizing the glass mark expansion system illustrated in Figures 3 through 7 is described. The soil pattern diagram explains the flow of the crack propagation method of the glass substrate of the present invention. The apparatus shown in the book IT 1 forms a riddle η on the glass base (4) (step sio). a board office 'the glass transfer transfer coffee on which the sales job 11 is formed or the four displays 17 200821269 Next, the position of the air flow nozzle 5〇2 of the crack expansion unit 500 is transferred to the map through the position control device (not shown). The uppermost portion of the glass substrate shown in Fig. 5 and the airflow nozzle 5〇2 of the crack expanding unit 5〇〇 are aligned with the score line 11 (step S30). At this time, the distance between the airflow nozzle 5〇2 and the glass substrate 10 on which the scribe line 11 is formed is adjusted in accordance with the space and depth of the scribe line u.乂又
Ο 當氣流喷嘴502的位置對準劃刻線u的位置時 發明會驅動裂痕拓展單元5〇〇的第—或第二風扇51 520 ’以透過氣流噴嘴5〇2向劃刻線u施加氣動式脈衝。 同時’如圖5所示，裂痕拓展單元5〇〇係沿著形綱刻線 11之Y軸方向轉移(步驟S40)。再者，根據劃刻線u内裂 痕20的空間或深度’第一或第二風扇5ι〇或別^ ，，或裂痕拓展單WGG的轉移速係透過裂痕拓展單元5〇〇 的控制裝置(未圖示)作調整，以拓展裂痕2〇。 · ㈣後，即沿著咖線11切割玻 雖穌Μ已透财倾晰 1本I㈣之崎贼下巾請專利細及其均等 18 200821269 依照玻璃基板之·減魏及·減方法，改變 氣流的速度可將脈衝加錢㈣，魏流速麟持續射出 一定壓力’而氣體接著會流到玻縣板上靖Μ的劃刻線 中。藉此’可簡單地由外部物理力作拓展。 再者’隨著氣流噴嘴與玻璃基板之表面間距離的調 整，施加震_衝擊量亦可姆地作罐。由於玻璃基板 與耽體接觸，因而得以避免分子或外部物f所造成 響。 【圖式簡單說明】 以下詳述伴隨圖式將更易明瞭本發日狀上述及其他 目的、特徵及優勢，其中： 圖1係習知劃刻裝置的示意圖；发明 When the position of the airflow nozzle 502 is aligned with the position of the scribe line u, the first or second fan 51 520' that drives the crack expansion unit 5〇〇 is applied to the scribe line u by the airflow nozzle 5〇2. pulse. Meanwhile, as shown in Fig. 5, the crack expanding unit 5 is transferred along the Y-axis direction of the outline line 11 (step S40). Furthermore, according to the space or depth of the crack 20 in the scribe line u, the first or second fan 5 〇 or other, or the crack expands the transfer speed of the single WGG through the crack expansion unit 5 〇〇 control device (not Figure) Make adjustments to expand the crack 2〇. · (4) After cutting the glass along the coffee line 11, although it has been thoroughly clarified, 1 I (4), the thief under the towel, please patent and its uniform 18 200821269 According to the glass substrate, reduce the Wei and reduce the method, change the airflow The speed can add money to the pulse (four), Wei flow Lin continues to shoot a certain pressure 'and the gas will then flow to the scribe line of the glass plate on Jingxian. This can be simply extended by external physical forces. Furthermore, as the distance between the airflow nozzle and the surface of the glass substrate is adjusted, the amount of shock applied can be used as a can. Since the glass substrate is in contact with the crucible body, it is possible to avoid the occurrence of molecules or foreign matter f. BRIEF DESCRIPTION OF THE DRAWINGS The above and other objects, features and advantages of the present invention will become more apparent from the following detailed description. FIG. 1 is a schematic diagram of a conventional scribe device;
圖2係繪示玻璃基板的習知破裂裝置具有真空吸入器 之裂痕拓展單元的圖式； /' W 圖3係本發明之-實施例中玻璃基板之裂痕拓展系統 圖； 圖4係本發明之另一實施例中玻璃基板之裂痕拓展系 統圖； 圖5係玻璃基板的裂痕拓展系統平面圖，其中設置有 本發明之裂痕拓展單元5〇〇 ; 圖6係玻璃基板的裂痕拓展系統平面圖，其中設置有 本發明之另一實施例之裂痕拓展單元； 19 200821269 圖7A及7B係顯示氣流喷嘴形狀圖；以及 圖8係解釋本發明之玻璃基板的裂痕拓展方法流程 Γ2 is a view showing a conventional rupture device of a glass substrate having a crack expansion unit of a vacuum inhaler; FIG. 3 is a diagram showing a crack expansion system of a glass substrate in the embodiment of the present invention; FIG. 4 is a view of the present invention. FIG. 5 is a plan view showing a crack expansion system of a glass substrate, in which a crack expansion unit 5 of the present invention is provided; FIG. 6 is a plan view of a crack expansion system of a glass substrate, wherein A crack expansion unit provided with another embodiment of the present invention; 19 200821269 FIGS. 7A and 7B are views showing a flow nozzle shape; and FIG. 8 is a flowchart for explaining a crack expansion method of the glass substrate of the present invention.
【主要元件符號說明】 10 玻璃基板 11 劃刻線 20 裂痕 121 > 122 滾輪 140 轉移帶 161 吸入部分 162 真空埠 171 流動部分 172 流動埠 400 輸送器 500 裂痕拓展單元 500， 裂痕拓展單元 501 氣體吸入埠 502 氣流喷嘴 503 風扇殼體部 510 第一風扇 520 第二風扇 600 移動單元 908 母板 20 200821269 950 劃刻裝置 951 桌體 952 鉗夾單元 953 、 954 切割頭 5020 圓形氣流孔 5030 長方形氣流孔[Description of main component symbols] 10 Glass substrate 11 Scribe line 20 Crack 121 > 122 Roller 140 Transfer belt 161 Suction part 162 Vacuum 埠 171 Flow part 172 Flow 埠 400 Conveyor 500 Crack extension unit 500, Crack extension unit 501 Gas suction埠 502 air flow nozzle 503 fan housing part 510 first fan 520 second fan 600 moving unit 908 mother board 20 200821269 950 scribing device 951 table body 952 jaw unit 953, 954 cutting head 5020 circular air flow hole 5030 rectangular air flow hole