TW200819200A - Chemical reagent delivery system utilizing ionic liquid storage medium - Google Patents

Chemical reagent delivery system utilizing ionic liquid storage medium Download PDF

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Publication number
TW200819200A
TW200819200A TW96116935A TW96116935A TW200819200A TW 200819200 A TW200819200 A TW 200819200A TW 96116935 A TW96116935 A TW 96116935A TW 96116935 A TW96116935 A TW 96116935A TW 200819200 A TW200819200 A TW 200819200A
Authority
TW
Taiwan
Prior art keywords
liquid
group
reagent
chemical
chemical reagent
Prior art date
Application number
TW96116935A
Other languages
English (en)
Chinese (zh)
Inventor
Jose I Arno
Luping Wang
Emanuel I Cooper
Original Assignee
Advanced Tech Materials
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Tech Materials filed Critical Advanced Tech Materials
Publication of TW200819200A publication Critical patent/TW200819200A/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C11/00—Use of gas-solvents or gas-sorbents in vessels

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
TW96116935A 2006-05-13 2007-05-11 Chemical reagent delivery system utilizing ionic liquid storage medium TW200819200A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US79987706P 2006-05-13 2006-05-13

Publications (1)

Publication Number Publication Date
TW200819200A true TW200819200A (en) 2008-05-01

Family

ID=38694707

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96116935A TW200819200A (en) 2006-05-13 2007-05-11 Chemical reagent delivery system utilizing ionic liquid storage medium

Country Status (2)

Country Link
TW (1) TW200819200A (fr)
WO (1) WO2007134183A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115485047A (zh) * 2020-05-11 2022-12-16 普莱克斯技术有限公司 将含锑材料储存和输送到离子注入机

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI520905B (zh) 2005-08-30 2016-02-11 安特格利斯公司 利用選擇性氟化硼前驅物之硼離子植入方法，及供植入用之大群氫化硼之形成方法
US20110021011A1 (en) 2009-07-23 2011-01-27 Advanced Technology Materials, Inc. Carbon materials for carbon implantation
US8598022B2 (en) 2009-10-27 2013-12-03 Advanced Technology Materials, Inc. Isotopically-enriched boron-containing compounds, and methods of making and using same
US8779383B2 (en) 2010-02-26 2014-07-15 Advanced Technology Materials, Inc. Enriched silicon precursor compositions and apparatus and processes for utilizing same
TWI689467B (zh) 2010-02-26 2020-04-01 美商恩特葛瑞斯股份有限公司 用以增進離子植入系統中之離子源的壽命及性能之方法與設備
EP3267470A3 (fr) 2012-02-14 2018-04-18 Entegris, Inc. Gaz dopant de carbone et co-écoulement pour faisceau d'implant et amélioration de performances de source de vie
KR102138400B1 (ko) * 2013-03-05 2020-07-27 엔테그리스, 아이엔씨. 이온 주입 조성물, 시스템 및 방법
MY173480A (en) * 2013-05-02 2020-01-28 Praxair Technology Inc Supply source and method for enriched selenium ion implantation
CN105637616A (zh) 2013-08-16 2016-06-01 恩特格里斯公司 基板中的硅注入及提供其硅前体组合物

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5620524A (en) * 1995-02-27 1997-04-15 Fan; Chiko Apparatus for fluid delivery in chemical vapor deposition systems
US20020144642A1 (en) * 2000-12-26 2002-10-10 Hariprasad Sreedharamurthy Apparatus and process for the preparation of low-iron single crystal silicon substantially free of agglomerated intrinsic point defects
US20020179848A1 (en) * 2001-06-02 2002-12-05 Ilya Feygin Apparatus comprising a reagent atomization and delivery system
US6924376B2 (en) * 2002-04-17 2005-08-02 Cytokinetics, Inc. Compounds, compositions and methods
US7172646B2 (en) * 2003-04-15 2007-02-06 Air Products And Chemicals, Inc. Reactive liquid based gas storage and delivery systems
WO2004112184A1 (fr) * 2003-05-30 2004-12-23 Fujikura Ltd. Composition electrolytique et convertisseur photo-electrolytique utilisant cette composition
US7329536B2 (en) * 2003-06-05 2008-02-12 Oakland University Piezoimmunosensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115485047A (zh) * 2020-05-11 2022-12-16 普莱克斯技术有限公司 将含锑材料储存和输送到离子注入机

Also Published As

Publication number Publication date
WO2007134183A3 (fr) 2008-01-17
WO2007134183A2 (fr) 2007-11-22

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