200815263 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種用於固持及移動一平面型工件之薄玻 璃夾持器，其包括複數個夾持器臂，每一夾持器臂具有配 置於其上之至少一吸盤，該等夾持器臂可經由一共同連接 凸緣連接至一搬運及轉移構件，且該等吸盤可連接至一真 ^ 空管線。 〜 除了傳送帶，亦稱為真空吸盤之薄玻璃夾持器係薄壁破 ⑩ ㉟板製造中之運送鏈之-必要組件。此等薄玻璃夾持器係 在0.3、巴至1.〇巴之一減少的壓力下操作且被配合於能夠進 行空間移動之搬運及轉移構件（特別係工業機器人）上。 【先前技術】 在薄玻璃的製造中，對於更大的玻璃薄片之運送的需求 逐漸增大。此外，對於某些應用薄玻璃之厚度已進一步減 少，以至於當利用已知之薄玻璃夾持器時逐漸超出薄破璃 瞻之負載極限且在運送過程中產生顯著損失。另一缺陷由以 下事實組成：在一利用先前已知之薄玻璃夾持器之已建立 的運送鏈中，對於不同大小玻璃薄片之運送僅有有限之伸 縮性。 因此，本發明之目的係提供一種薄玻璃片夾持器，其可 允許小心搬運各種大小之玻璃薄片。 【發明内容】 根據本發明，該目的藉由一薄玻璃爽持器達成，其中爽 持器臂相對於連接凸緣呈放射狀定向且在其轴方向上可伸 120230.doc 200815263 縮。 連接凸緣係用於緊固該薄玻璃夾持器至搬運及轉移構件 上。此外，該薄玻璃夾持器連接至一真空管線，該真空管 線經由自其分開之管線連接至所有吸盤。 由於該等夾持器臂之放射狀定位，故可使該等吸盤相對 於該薄玻璃表面盡可能均句分布。軸向可調節性確保該薄 玻璃夾持’於不同大小之玻璃薄片的伸縮適應性，同時 保持該等吸盤的均句分^在此過程巾，料吸盤之間距 僅能均勻地增加’使得即使具有大的薄玻填表面區域，仍 能保持大致恆定的負載。應該不斷的進行調節。 對於該等夾持器臂之伸縮調節，夾持器臂較佳各包括一 外部管及-可在該外部管中移位之内部管。根據—第一有 利實施例，該内部管可相對於該外部管手工調節。此可 (例如)藉由旋開一緊固螺釘並接著拉出該内部管之方式而 發生。在-末端位置’該緊固螺釘可再_次手動旋緊。 或者’該㈣管亦可借助—致動馬達而相對於該外部管 而移位’每一夾持器需要具備其自己的致動馬達且由其自 己的致動馬達致動叫晉助一致動馬達之調節使得吸盤的位 置可特別靈活地移動，且因此可斜斟 J針對不同大小的玻璃薄片 而設定。 已證明使该專失持器臂在圓周古 隹W周方向上彼此形成一相同角 度是有利的。若該等内部營虛於η 丨6處於冋樣的延伸狀態，則此配 置使得此等吸盤能夠關於彼此均 J刁刀布，並因此使得均勻 分布的力能夠供給待運送之薄玻璃板中。 120230.doc 200815263 =疋實施例中’在每一情況下，至少一吸盤配置於 矩…益臂之該等外部末端處’此等吸盤在其間描畫-亦即所有内部管相同地延伸。此是合理的，特 '、田而用該薄玻璃夾持器舉起矩形玻璃薄片時理 的。 & 口 二交:圭：，夾持器臂採用多邊形輪廓，尤其較佳地採用具 =形邊緣的大致麵32712 (P4C)輪廓。此輪靡大體由一 口Γ線拉伸側之圈組成。此輪廓截面使得該㈣管 :使在負载的情況下仍能夠相對於該以的外部管進行簡 快速的調節。此外’此輪廟使得能夠以緊凑尺寸傳 :=轉矩’使得該等吸盤可以極高位準之抗扭轉性配 =該4夾持叫^由於該多邊形輪廓，在內部管與外 h之間不產生應力集中且只有極小的運動範圍，因此避 ，了該内部管的偏移。該多邊形輪廓包括一大的中空的内 邛二間，其為（例如）線性驅動器或用於提供壓縮空氣、直 空或電流之管線提供空間。 〃… 該等夾持器f最好由碳製得。此使得該夾持器之靜重相 對於一銘構造大大減少了約50%。用此種方法，由於 玻璃夾持器以相當大的旋轉率進行操作，故整個生產循产 亦可更快的執行。該碳構造尤其適合於產生上述之多逢二 輪磨。首先’產生-基礎多邊形轴，其相對較佳地經製造 而長達麵醜。該外部管係藉由覆蓋該基礎多邊形轴而 產生’且該内部管係藉由襯於該外部管内部而產生。因 此，僅用一工具產生此轴/殼連接，而具有非常好的配人 120230.doc 200815263 且長度長於1000 mm。除了 一次性獲得該基礎多邊形軸 外，此導向構件的製造亦很便宜。 較佳地，在該連接凸緣上配置八個夾持器臂，此等夾持 器臂每一者交替地在一臂之一側展示41。之角度且在該臂 . 之另一側展示5〇。之角度。此產生該等吸盤之緊密間隔， 其中在該薄玻璃上產生相對小的負載，此尤其對於薄壁破 ’ 璃片（諸如觸摸屏）的運送是必要的。 亦已證明以下情況為有利的：在相對於該連接凸緣作為 直徑配置之四個夾持器臂上，一吸盤配置於該外部管上， 且一吸盤配置於該内部管上。 在相對於該連接凸緣作為直徑配置之兩個夾持器臂上， 在每清況下，該内部官可在末端處包括一橫向於該内部 管而定向之具有兩個吸盤之固定支架。此外，另外兩個作 為直徑配置之夾持器臂，其每一者之末端配置一吸盤。後 兩個夾持器臂可交替位於之前的夾持器臂之間。 • 較佳地，複數個吸«集於吸收區域且可個別地使減小 的壓力施加於其上。由於大量避免了堆疊中之個別板在下 部邊緣處散開，故此是有益的，尤其是#放下該薄玻璃板 冑是有益的。否則㈣板在運送過程中滑動並藉此損壞。 .纟u土之發展中’在該薄玻璃夾持器上配置至少一距 離感測器，尤其較佳配置兩個距離感測器。此等距離感測 器係用於偵測距該薄破璃板之距離並辅助進行位置制及 位f控制，藉此在該薄玻璃板上預期位置處達成特別精確 之疋位。此亦有助於小心搬運。 120230.doc 200815263 ’夾持器臂可附接至一配置於甲央之安 ，該等固持臂亦可在一平面中彼此對 【實施方式】 •圖1係在中央配置有連接凸緣4之薄玻璃夾持器之透視側 視圖’該連接凸緣4係用於附接該薄玻璃夾持器至一機器 人臂19(見圖3)。200815263 IX. INSTRUCTIONS OF THE INVENTION: TECHNICAL FIELD The present invention relates to a thin glass holder for holding and moving a planar workpiece, which comprises a plurality of gripper arms, each gripper arm having At least one suction cup disposed thereon, the holder arms being connectable to a handling and transfer member via a common attachment flange, and the suction cups are connectable to a vacuum line. ~ In addition to conveyor belts, thin glass holders, also known as vacuum chucks, are thin-walled and are required for the transport chain in the manufacture of 10 35 plates. These thin glass holders are operated at a reduced pressure of 0.3 to 1. 〇 and are fitted to a handling and transfer member (especially an industrial robot) capable of moving in space. [Prior Art] In the manufacture of thin glass, the demand for transportation of a larger glass sheet is gradually increasing. In addition, the thickness of the thin glass has been further reduced for some applications, so that when the known thin glass holder is utilized, the load limit of the thin glass is gradually exceeded and a significant loss occurs during transportation. Another drawback consists of the fact that in an established conveyor chain utilizing previously known thin glass holders, there is only limited expansion for the transport of glass sheets of different sizes. Accordingly, it is an object of the present invention to provide a thin glass sheet holder that allows for careful handling of glass sheets of various sizes. SUMMARY OF THE INVENTION According to the present invention, this object is achieved by a thin glass holder in which the holder arms are radially oriented with respect to the attachment flange and extend in the axial direction thereof by 120230.doc 200815263. A connecting flange is used to secure the thin glass holder to the handling and transfer member. In addition, the thin glass holder is connected to a vacuum line that is connected to all of the suction cups via a separate line from it. Due to the radial positioning of the gripper arms, the suction cups can be distributed as evenly as possible relative to the thin glass surface. The axial adjustability ensures that the thin glass is clamped to the flexibility of the glass sheets of different sizes, while maintaining the uniform score of the suction cups. In this process, the distance between the suction cups can only be increased evenly' even With a large thin glass filled surface area, it still maintains a substantially constant load. It should be constantly adjusted. For the telescopic adjustment of the gripper arms, the gripper arms preferably each include an outer tube and an inner tube that is displaceable in the outer tube. According to a first advantageous embodiment, the inner tube can be manually adjusted relative to the outer tube. This can occur, for example, by unscrewing a fastening screw and then pulling the inner tube out. At the end position, the fastening screw can be manually tightened again. Or the 'fourth tube' can also be displaced relative to the outer tube by actuating the motor. 'Each gripper needs to have its own actuating motor and be actuated by its own actuating motor. The adjustment of the motor allows the position of the suction cup to be moved particularly flexibly, and therefore the slanting J can be set for different sized glass sheets. It has proven to be advantageous to have the specialized drop arms form at the same angle to each other in the circumferential direction of the circumference. If the internal battalion is in the extended state of η 丨 6 , this configuration enables the suction cups to be squeegee about each other and thus enables a uniformly distributed force to be supplied to the thin glass sheet to be transported. 120230.doc 200815263 = In the embodiment, in each case, at least one suction cup is disposed at the outer ends of the moments of the arms. These suction cups are drawn therebetween - that is, all the inner tubes extend identically. This is reasonable, and it is reasonable to use the thin glass holder to lift the rectangular glass sheet. & Two-way: Gui: The gripper arm adopts a polygonal contour, and it is particularly preferable to use a general surface 32712 (P4C) contour with a =-shaped edge. This rim is generally composed of a loop of the twisted side of the twist line. This profile section allows the (iv) tube to be able to make a quick and easy adjustment with respect to the outer tube in the case of a load. In addition, 'this round of temples enables transmission in a compact size: = torque' so that the suction cups can be extremely high level of torsion resistance = the 4 grips are called due to the polygonal contour, between the inner tube and the outer h There is no stress concentration and only a very small range of motion, thus avoiding the offset of the inner tube. The polygonal profile includes a large hollow inner chamber that provides space for, for example, a linear drive or a line for providing compressed air, direct air or current. 〃... These holders f are preferably made of carbon. This results in a significant reduction in the static weight of the holder relative to a single construction of about 50%. In this way, since the glass holder operates at a relatively high rotation rate, the entire production cycle can be performed more quickly. This carbon construction is particularly suitable for producing the above-mentioned two-wheel grinding. First, the 'general-polygon axis is produced, which is relatively preferably manufactured to be ugly. The outer tube is created by covering the base polygonal shaft and the inner tube is created by lining the interior of the outer tube. Therefore, this shaft/shell connection is produced with only one tool, and has a very good fit 120230.doc 200815263 and a length longer than 1000 mm. In addition to obtaining the basic polygonal shaft at one time, the guide member is also inexpensive to manufacture. Preferably, eight gripper arms are disposed on the attachment flange, each of the gripper arms being alternately shown 41 on one side of the arm. The angle is shown on the other side of the arm. The angle. This creates a close spacing of the suction cups, wherein a relatively small load is created on the thin glass, which is especially necessary for the transport of thin-walled glass sheets, such as touch screens. It has also proven advantageous to have a suction cup disposed on the outer tube on the four holder arms arranged as a diameter relative to the attachment flange, and a suction cup disposed on the inner tube. On each of the two gripper arms which are arranged as diameters with respect to the connecting flange, the inner officer may include, at each end, a fixing bracket having two suction cups oriented transversely to the inner tube. In addition, the other two are holder arms of a diameter configuration, each of which is provided with a suction cup at the end. The rear two gripper arms are alternately located between the previous gripper arms. • Preferably, a plurality of suctions are concentrated in the absorption zone and the reduced pressure can be individually applied thereto. This is beneficial because a large number of individual panels in the stack are prevented from spreading at the lower edge, especially #putting down the thin glass sheet is beneficial. Otherwise (4) the board slides during transport and is thereby damaged. In the development of the soil, at least one distance sensor is disposed on the thin glass holder, and particularly two distance sensors are preferably disposed. The distance sensors are used to detect the distance from the thin glass plate and assist in position control and position f control, thereby achieving a particularly precise position at the desired location on the thin glass sheet. This also helps to handle it carefully. 120230.doc 200815263 'The holder arm can be attached to a central configuration, the holding arms can also be mutually aligned in a plane. [Embodiment] Figure 1 is provided with a connecting flange 4 at the center. A perspective side view of the thin glass holder 'this attachment flange 4 is used to attach the thin glass holder to a robot arm 19 (see Fig. 3).
總共八個夹持器臂2“自連接凸緣4呈放射狀向外部延 伸，該連接凸緣4形成—共同中點。在下部，夾持器臂2a- h—各包括至少一配置於其末端之圓盤形吸盤3…為了穩 定也上升，夾持器臂2a_h以其上側附接至一共同安裝 11 〇A total of eight gripper arms 2 "radiately extend outwardly from the connecting flange 4, the connecting flange 4 forming a common midpoint. At the lower portion, the gripper arms 2a-h each comprise at least one of them The disc-shaped suction cup 3 at the end ... is also raised for stability, and the holder arm 2a_h is attached with its upper side to a common installation 11 〇
為了提高穩定性 裝板。以此種方式 齊0 個別夾持器臂2a-h之結構實施例在圖· 2中尤其容易看 見囷2展示薄玻璃夾持器之仰視圖，該薄玻璃夾持器沿 該前頭之方向繞旋轉軸線2〇(見圖1)轉動。夾持器臂2a_h具 有兩。P刀構造，且包括一延伸至連接凸緣4之固定的外部 管6及一具有較小直徑的經導向而可在該外部管^中移位之 内部官7。此處之外部管6突出而超過該安裝板11，且在圖 之"兒明中’該内部管7係位於一延伸之位置並因此使 件能夠運送或搬運大的薄玻璃板。 、、、*、、八四個夾持器臂、2e、2e、2g相同地配備有吸盤 3a、3b、3d、3e、3i、3h、3k、31，其中在每一情況下， 一吸盤3b、3d、3h、3k均相對於連接凸緣4固定地配置在 外邛官6上，且在每一情況下，一吸盤3a、3e、3i、31固定 120230.doc 200815263 配置在内部管7之外部末端。四個夾持器臂2a、2c、2e、 2g中之兩個夾持n臂係相對於連接凸緣作為直徑而彼此相 對、In order to improve stability, the plate is installed. In this way, the structural embodiment of the individual gripper arms 2a-h is particularly easy to see in Fig. 2, which shows a bottom view of the thin glass holder, which is wound in the direction of the front head. The axis of rotation 2〇 (see Figure 1) rotates. The holder arms 2a_h have two. The P-knob construction includes a fixed outer tube 6 extending to the attachment flange 4 and an inner portion 7 having a smaller diameter that is guided to be displaced in the outer tube. Here, the outer tube 6 protrudes beyond the mounting plate 11, and in the figure " the inner tube 7 is located in an extended position and thus enables the transport or handling of a large thin glass sheet. , , , *, and eight or four gripper arms, 2e, 2e, 2g are identically equipped with suction cups 3a, 3b, 3d, 3e, 3i, 3h, 3k, 31, wherein in each case, a suction cup 3b 3d, 3h, 3k are fixedly disposed on the outer sash 6 with respect to the connecting flange 4, and in each case, a suction cup 3a, 3e, 3i, 31 is fixed 120230.doc 200815263 is disposed outside the inner tube 7. End. Two of the four gripper arms 2a, 2c, 2e, 2g are n-armed relative to each other with respect to the connecting flange as a diameter,
彼此相對之夾持器臂2b、2f在每一情況下包括一在該内 部管7之外部末端處之單一的吸盤3c、。在夾持器臂 2b、2f之各別外部管6上未提供另外的吸盤。 在夾持器臂2a與2g及夾持器臂2c與2e間定位另外的彼此 相對之夾持器臂2d、2h，在每一情況下，夾持器臂之可調 郎内4 ί 7在其末端處承載橫向於該内部管7之軸向延伸部 分而定向之固定支架9a、9b。吸盤3f、3g與固定支架处在 其末端相嚙合，且吸盤3m、3n與固定支架9b在其末端相嚙 合，藉此在吸盤3a與31及吸盤3e與3i之間的自由距離大大 減少，且該待運送之薄玻璃板被供以額外的支撐。 自圖2之仰視圖亦可明顯看出，吸盤3a、3e、3i、31描 晝一矩开> ’其它外部吸盤3C、3f、3g、3j、3m、3n與其對 齊。 距離感測器10插入於該安裝板11中之一孔中，利用該 距離感測器可偵測該薄玻璃夾持器與一工件丨（見圖3)之間 的距離，藉此可使該薄玻璃夾持器尤其精確地停在該工件 上。 圖3展示薄玻璃夾持器之侧視圖，該薄玻璃夾持器借助 其配置於中央之連接凸緣4安裝於機器人臂丨9上。在此視 圖中僅能看見夾持器臂2c、2d、2e及其吸盤3e、3f、3g、 3i。吸盤3e、3f、3g、3i在其下部與一呈薄玻璃板形式之 120230.doc 11 200815263 件1接觸用於固持工件！所必要的減小的麼力係經由一 真空管線5傳輸至薄玻璃夾持器。在連接凸緣4之區域中， 成束的m線5分開’其個別管線至夾持器臂2a_h，並 ，此連接至各別吸盤3a_n，此自（例如）夾持器臂之虛線 可看出。借助吸盤3a<彼此獨立之連《，吸盤3^可個 別地或以組的形式共同使可調節之減小的壓力施加於其或 釋放。The holder arms 2b, 2f opposite each other in each case comprise a single suction cup 3c at the outer end of the inner tube 7. No additional suction cups are provided on the respective outer tubes 6 of the gripper arms 2b, 2f. Positioning the other mutually opposite gripper arms 2d, 2h between the gripper arms 2a and 2g and the gripper arms 2c and 2e, in each case, the gripper arm is adjustable within 4 ί 7 A fixing bracket 9a, 9b oriented transversely to the axial extension of the inner tube 7 is carried at its end. The suction cups 3f, 3g are engaged with the fixing bracket at the ends thereof, and the suction cups 3m, 3n are engaged with the fixing brackets 9b at their ends, whereby the free distance between the suction cups 3a and 31 and the suction cups 3e and 3i is greatly reduced, and The thin glass plate to be transported is provided with additional support. It is also apparent from the bottom view of Fig. 2 that the suction cups 3a, 3e, 3i, 31 are drawn to each other and the other external suction cups 3C, 3f, 3g, 3j, 3m, 3n are aligned therewith. The distance sensor 10 is inserted into one of the holes of the mounting plate 11 , and the distance sensor can detect the distance between the thin glass holder and a workpiece 丨 (see FIG. 3 ), thereby The thin glass holder rests particularly precisely on the workpiece. Figure 3 shows a side view of a thin glass holder mounted to the robot arm 9 by means of its centrally connected connecting flange 4. Only the gripper arms 2c, 2d, 2e and their suction cups 3e, 3f, 3g, 3i can be seen in this view. The suction cups 3e, 3f, 3g, 3i are in contact with a 120230.doc 11 200815263 piece 1 in the form of a thin glass plate at the lower portion for holding the workpiece! The necessary reduced force is transmitted via a vacuum line 5 to the thin glass holder. In the region of the connecting flange 4, the bundled m-lines 5 are separated by 'the individual lines to the gripper arms 2a-h, and this is connected to the respective suction cups 3a-n, which can be seen from the dashed line of, for example, the gripper arms Out. By means of the suction cups 3a < independent of each other, the suction cups 3 can collectively apply an adjustable reduced pressure to them or release them in groups or in groups.
圖3之側視圖亦清楚地展示外部管6及内部管7具有一大 體上呈正方形之橫截面，其中該橫截面具有弧形側及圓形 角。 圖4a係夾持器臂2b、2&透視圖。纟可借助一内部下方 綁^2及-外部下方綁帶13附接至安裝板u(見圖⑼。在 外部官6之外部末端配置緊固螺釘15，該緊固螺釘15之底 端延伸穿過外部管6而遠至内部管緊固螺釘⑽其螺纹 :合於—基底21中之互補切螺紋中，該基仙係一套環上 部部分16之一體式部件。套環上部部分“又與一外部管6 上自底部施加之套環下部部分17上之之凸緣型緊固部分22 #喃。J_經由至少一緊固部分22連接至該套環下部部分 =成一連續組件。若該緊固螺釘15經旋開，則無法與内 部官7進行有效㈣合’使得内部管7可能相對於外部管6 在轴向方向中移位。為了緊固内部管7至外部管6,該緊固 螺釘15又一次被旋緊。 ” 吸盤3a-n借助一上方綁帶14附接至各別内部管7。此可 藉由實例根據吸盤3c、3j看出。在吸盤3a_n之頂部定位一 120230.doc 12· 200815263 連接件18，真空管線5之個別管線可連接該連接件u。 圖4b展示夾持器臂2b、2f之縱向截面，其中内部管7位 於一相對於外部管6之縮進位置。然而，内部管7並不S是手 工移位的，而是借助一伺服馬達8。為 此目的，移除緊The side view of Figure 3 also clearly shows that the outer tube 6 and the inner tube 7 have a generally square cross section with an arcuate side and a rounded corner. Figure 4a is a perspective view of the gripper arms 2b, 2& The cymbal can be attached to the mounting plate u by means of an inner lower strap ^2 and an outer lower strap 13 (see Fig. 9). A fastening screw 15 is disposed at the outer end of the outer officer 6, the bottom end of the fastening screw 15 extending through Through the outer tube 6 and as far as the inner tube fastening screw (10) its thread: fits into the complementary cutting thread in the base 21, which is a one-piece part of the upper part of the ring 16. The upper part of the collar "again A flange-type fastening portion 22 on the outer tube 6 on the lower portion 17 of the collar applied from the bottom. J_ is connected to the lower portion of the collar via at least one fastening portion 22 = a continuous assembly. When the fastening screw 15 is unscrewed, it cannot be effectively (four) engaged with the inner officer 7 so that the inner tube 7 may be displaced in the axial direction with respect to the outer tube 6. In order to tighten the inner tube 7 to the outer tube 6, the tightness The fixing screw 15 is screwed again. The suction cups 3a-n are attached to the respective inner tubes 7 by means of an upper strap 14. This can be seen by the examples according to the suction cups 3c, 3j. A 120230 is positioned on top of the suction cups 3a-n. .doc 12· 200815263 Connector 18, an individual line of vacuum line 5 can be connected to the connector u. Figure 4b shows a longitudinal section of the gripper arms 2b, 2f, wherein the inner tube 7 is in a retracted position relative to the outer tube 6. However, the inner tube 7 is not S manually displaced, but by means of a servo motor 8. For this purpose, remove tight
固螺釘丨5’且替代地，—致動馬達8(較佳—致動氣虹）配置 於夾持器臂2b、2f上。該致動馬達與外部管6上之第一末 端及内部管7上之第二末端相作用，其中該第一末端可配 合於（例如）基底21上。由於薄玻璃夾持器之所有夾持器臂 2a-h之外部管6與内部管7的相同結構，故為每一夾持器臂 2a-h提供一致動馬達8尤其簡單。 圖5說明失持器臂2d、2h之一實施例，一固定支架h、 9b借助一上方綁帶14橫向於内部管7之軸向延伸部分附接 至夾持器臂之末端。兩個連接件18自固定支架9a、外突出 作為内部管7之延伸部分，提供第一連接件18以用於連接 一連接線（未圖示）至吸盤3f、3n，且提供第二連接件18以 用於連接另一連接線（同樣未圖示）至吸盤3g、3m。 【圖式簡單說明】 圖1係薄玻璃夾持器之透視平面圖； 圖2係薄玻璃夾持器之仰視圖； 圖3係薄玻璃夾持器之側視圖； 圖4a係具有配置於其上之吸盤之夾持器臂的透視平面 圖； 圖4b展示具有致動馬達之夾持器臂之縱向截面圖；及 圖5係具有配置於其上之固定支架及兩個吸盤之夾持器 120230.doc • 13 - 200815263 臂的透視平面圖。 【主要元件符號說明】The screw 丨 5' and, alternatively, the actuating motor 8 (preferably actuating the phoenix) is disposed on the gripper arms 2b, 2f. The actuating motor interacts with a first end on the outer tube 6 and a second end on the inner tube 7, wherein the first end can be coupled to, for example, the substrate 21. Since the outer tube 6 of all the holder arms 2a-h of the thin glass holder has the same structure as the inner tube 7, it is particularly simple to provide the actuator motor 2 for each holder arm 2a-h. Figure 5 illustrates an embodiment of the detentor arms 2d, 2h with a fixed bracket h, 9b attached to the end of the gripper arm by an upper strap 14 transversely to the axial extension of the inner tube 7. Two connecting members 18 project from the fixing bracket 9a and protrude as an extension of the inner tube 7, and provide a first connecting member 18 for connecting a connecting wire (not shown) to the suction cups 3f, 3n, and providing a second connecting member 18 for connecting another connection line (also not shown) to the suction cups 3g, 3m. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective plan view of a thin glass holder; Fig. 2 is a bottom view of a thin glass holder; Fig. 3 is a side view of a thin glass holder; Fig. 4a has a configuration thereon Figure 4b shows a longitudinal section of the holder arm with the actuation motor; and Figure 5 is a holder 120230 with a fixed bracket and two suction cups arranged thereon. Doc • 13 - 200815263 Perspective plan view of the arm. [Main component symbol description]
1 工件 2a-h 夾持器臂 3a-n 吸盤 4 連接凸緣 5 真空管線 6 外部管 7 内部管 8 致動馬達 9a ' 9b 固定支架 10 距離感測器 11 安裝板 12 下方綁帶，内部 13 下方綁帶，外部 14 上方綁帶 15 緊固螺釘 16 套環上部部分 17 套環下部部分 18 連接件 19 搬運及轉移構件 20 旋轉轴線 21 基底 22 凸緣型緊固部分 器人臂 120230.doc -14·1 Workpiece 2a-h Gripper arm 3a-n Suction cup 4 Connection flange 5 Vacuum line 6 External tube 7 Internal tube 8 Actuated motor 9a ' 9b Mounting bracket 10 Distance sensor 11 Mounting plate 12 Bottom strap, interior 13 Lower strap, outer 14 upper strap 15 fastening screw 16 collar upper portion 17 collar lower portion 18 connector 19 handling and transfer member 20 axis of rotation 21 base 22 flange type fastening part arm 120230.doc -14·