CN112320343A - Suction mechanism and substrate transfer machine - Google Patents

Suction mechanism and substrate transfer machine Download PDF

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Publication number
CN112320343A
CN112320343A CN202011212325.8A CN202011212325A CN112320343A CN 112320343 A CN112320343 A CN 112320343A CN 202011212325 A CN202011212325 A CN 202011212325A CN 112320343 A CN112320343 A CN 112320343A
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CN
China
Prior art keywords
connecting piece
slide
sliding
suction mechanism
assembly
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202011212325.8A
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Chinese (zh)
Inventor
徐望红
郑浩旋
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HKC Co Ltd
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HKC Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HKC Co Ltd filed Critical HKC Co Ltd
Priority to CN202011212325.8A priority Critical patent/CN112320343A/en
Publication of CN112320343A publication Critical patent/CN112320343A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02Articles
    • B65G2201/0214Articles of special size, shape or weigh
    • B65G2201/022Flat

Abstract

The application is suitable for the technical field of display panel production, and provides an absorbing mechanism and a substrate transfer machine. The suction mechanism comprises a first slide rail and a second slide rail which are arranged in a crossed manner, a first connecting piece connected to one end of the first slide rail in a sliding manner, a second connecting piece connected to one end of the second slide rail in a sliding manner, a first adsorption component arranged on the first connecting piece and used for adsorbing a substrate, a second adsorption component arranged on the second connecting piece and used for adsorbing the substrate, and a support piece, wherein two ends of the support piece are fixedly connected with the first connecting piece and the second connecting piece respectively; when the supporting piece moves towards the direction close to or far away from the intersection position of the first slide rail and the second slide rail, the supporting piece can do telescopic motion, so that the first adsorption component and the second adsorption component can move in opposite directions or move back to back along the length direction of the supporting piece, and the adsorption mechanism can adapt to substrates of different sizes and specifications.

Description

Suction mechanism and substrate transfer machine
Technical Field
The application belongs to the technical field of display panel production, and particularly relates to a suction mechanism and a substrate transfer machine.
Background
In the production process of liquid crystal panels, it is necessary to transfer substrates from one position to another by transferring the substrates by a substrate transfer machine. However, the conventional substrate transfer machine is difficult to adapt to substrates with different dimensions in the process of picking, placing and transferring the substrates, so that the substrate transfer machine needs to manually adjust the position of the suction cup when the substrates with different dimensions are processed, and the substrate transfer machine can normally work.
Disclosure of Invention
The application aims to provide a suction mechanism and a substrate transfer machine, and aims to solve the technical problem that the conventional substrate transfer machine is difficult to adapt to substrates with different sizes and specifications.
The present application is thus embodied, a suction mechanism, comprising:
the sliding assembly comprises a first sliding rail and a second sliding rail which are arranged in a crossed manner;
the first connecting piece is connected to one end of the first sliding rail in a sliding mode and can slide along the length direction of the first sliding rail;
the second connecting piece is connected to one end of the second sliding rail in a sliding mode and can slide along the length direction of the second sliding rail;
the first adsorption assembly is arranged on the first connecting piece and is used for adsorbing the substrate;
the second adsorption component is arranged on the second connecting piece and is used for adsorbing the substrate; and
one end of the supporting piece is fixedly connected with the first connecting piece, the other end of the supporting piece is fixedly connected with the second connecting piece, and the supporting piece can do telescopic motion.
In one embodiment, the sliding assembly further includes a first sliding block slidably connected to the first sliding rail and a second sliding block slidably connected to the second sliding rail, the first connecting member is fixed to the first sliding block, and the second connecting member is fixed to the second sliding block.
In one embodiment, the support member includes a main rod and an auxiliary rod telescopically connected to the main rod, the first connecting member is disposed on the main rod, and the second connecting member is disposed on the auxiliary rod.
In one embodiment, two first sliding blocks and two first connecting pieces are symmetrically arranged on the first sliding rail, each first sliding block is fixedly connected to the corresponding first connecting piece, and each first connecting piece is provided with the corresponding first adsorption assembly;
two second sliding blocks and two second connecting pieces are symmetrically arranged on the second sliding rail, each second sliding block is fixedly connected to the corresponding second connecting piece, and each second connecting piece is provided with the corresponding second adsorption component;
the suction mechanism comprises two supporting pieces which are respectively arranged on two opposite sides of the sliding assembly, and each supporting piece is respectively connected with the corresponding first connecting piece and the second connecting piece.
In one embodiment, the suction mechanism further comprises a driving assembly for driving the support to move towards a direction close to or away from the crossing position of the first slide rail and the second slide rail.
In one embodiment, the drive assembly includes a motor having an output shaft and a threaded rod connected to the output shaft of the motor, the support member being threadedly engaged on the threaded rod.
In one embodiment, one of the support members is provided with a first fixing seat, the other support member is provided with a second fixing seat, the first fixing seat is provided with a first screw hole for screw thread matching of the screw, the second fixing seat is provided with a second screw hole for screw thread matching of the screw, and the rotation direction of the internal thread of the first screw hole is opposite to that of the internal thread of the second screw hole.
In one embodiment, the screw is disposed perpendicular to the support.
In one embodiment, the suction mechanism further comprises a rotation bearing disposed on the sliding assembly, and a rotation axis of the rotation bearing is perpendicular to the first sliding rail and the second sliding rail.
Another object of the present application is to provide a substrate transfer machine, which includes a frame and the above-mentioned suction mechanism, the suction mechanism is disposed on the frame.
The suction mechanism provided by the embodiment of the application comprises a first slide rail and a second slide rail which are arranged in a crossed manner, a first connecting piece connected to one end of the first slide rail in a sliding manner, a second connecting piece connected to one end of the second slide rail in a sliding manner, a first adsorption component arranged on the first connecting piece and used for adsorbing a substrate, a second adsorption component arranged on the second connecting piece and used for adsorbing the substrate, and a supporting piece, wherein two ends of the supporting piece are fixedly connected with the first connecting piece and the second connecting piece respectively; when the support piece moves towards the direction close to or far away from the intersection position of the first slide rail and the second slide rail, the support piece can move in a telescopic mode, the first connecting piece and the second connecting piece can move in opposite directions or move back to back along the length direction of the support piece, the first adsorption component arranged on the first connecting piece and the second adsorption component arranged on the second connecting piece can move in opposite directions or move back to back along the length direction of the support piece, the distance between the first adsorption component and the second adsorption component is adjusted, and the adsorption mechanism can adapt to substrates of different sizes and specifications.
The substrate moves machine that carries that this application embodiment provided, including the aforesaid move get the mechanism, suction means can adapt to the not base plate of unidimensional specification for the commonality that the base plate moved the machine that carries improves greatly.
Drawings
Fig. 1 is a schematic perspective view of a suction mechanism provided in an embodiment of the present application;
fig. 2 is an exploded schematic view of a suction mechanism provided in an embodiment of the present application;
fig. 3 is a schematic use diagram 1 of a suction mechanism provided in an embodiment of the present application;
fig. 4 is a schematic use diagram 2 of a suction mechanism provided in an embodiment of the present application;
fig. 5 is a schematic cross-sectional structural view of a first slide rail and a first slider according to an embodiment of the present application;
fig. 6 is a schematic cross-sectional structural view of a second slide rail and a second slider provided in the embodiment of the present application;
fig. 7 is a schematic cross-sectional structural diagram of a support provided in an embodiment of the present application.
100-a sliding assembly; 110-a first slide rail; 111-a first runner; 120-a first slider; 121-a first projection; 130-a second slide rail; 131-a second chute; 140-a second slider; 141-a second projection; 210-a first connector; 220-a second connector; 310-a first adsorption component; 311-first chuck column; 312 — a first suction cup; 320-a second adsorption component; 321-a second chuck column; 322-a second suction cup; 400-a support; 410-main rod; 411-a hollow cavity; 420-secondary rod; 500-a drive assembly; 510-a motor; 520-a screw; 610-a first fixed seat; 611-a first screw hole; 620-second fixed seat; 621-a second screw hole; 700-a rotational bearing; 800-a substrate; x-a first direction; y-second direction.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly or indirectly secured to the other element. When an element is referred to as being "connected to" another element, it can be directly or indirectly connected to the other element. The terms "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positions based on the orientations or positions shown in the drawings, and are for convenience of description only and not to be construed as limiting the technical solution. The terms "first", "second" and "first" are used merely for descriptive purposes and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features. The meaning of "plurality" is two or more unless specifically limited otherwise.
The description and claims of this application, and the word "comprise" and any variations thereof, are intended to cover non-exclusive inclusions. For example, a process, method, or system, article, or apparatus that comprises a list of steps or elements is not limited to only those steps or elements listed, but may alternatively include other steps or elements not listed, or inherent to such process, method, article, or apparatus.
In order to explain the technical solutions of the present application, the following detailed descriptions are made with reference to specific drawings and examples.
Referring to fig. 1 to 3, an embodiment of the present application provides an absorbing mechanism, including a sliding assembly 100, a first connecting member 210, a second connecting member 220, a first absorbing assembly 310, a second absorbing assembly 320, and a supporting member 400, where the sliding assembly 100 includes a first sliding rail 110 and a second sliding rail 130 that are arranged in a crossing manner, the first connecting member 210 is slidably connected to one end of the first sliding rail 110, and specifically, the first connecting member 210 can slide along a length direction of the first sliding rail 110; the second connecting member 220 is slidably connected to one end of the second slide rail 130, and the second connecting member 220 can slide along the length direction of the second slide rail 130;
the first adsorption component 310 is disposed on the first connector 210 and is used for adsorbing the substrate 800, and the second adsorption component 320 is disposed on the second connector 220 and is used for adsorbing the substrate 800, that is, the first adsorption component 310 can synchronously slide on the first slide rail 110 along with the first connector 210, and the second adsorption component 320 can synchronously slide on the second slide rail 130 along with the second connector 220;
one end of the supporting member 400 is fixedly connected to the first connecting member 210, and the other end of the supporting member 400 is fixedly connected to the second connecting member 220, so that the supporting member 400 can perform a telescopic motion. When the supporting member 400 moves toward or away from the crossing position of the first slide rail 110 and the second slide rail 130, the supporting member 400 can perform a telescopic motion, such that the first connecting member 210 and the second connecting member 220 can move toward or away from each other along the length direction of the supporting member 400. In this embodiment, the first slide rail 110 and the second slide rail 130 are disposed in an intersecting manner and are in an X shape, the first slide rail 110 extends along the first direction X, and the second slide rail 130 extends along the second direction Y, that is, the first connecting element 210 can slide along the first direction X, and the second connecting element 220 can slide along the second direction Y.
The suction mechanism of the embodiment of the application has the advantages that: as shown in fig. 3, when the support 400 moves away from the crossing position of the first slide rail 110 and the second slide rail 130, the support 400 performs an extending motion, such that the first connection element 210 and the second connection element 220 slide on the first slide rail 110 and the second slide rail 130 along the first direction X and the second direction Y, respectively, at this time, the first connection element 210 and the second connection element 220 move back to back along the length direction of the support 400, the distance between the first connection element 210 and the second connection element 220 increases, such that the distance between the first adsorption element 310 disposed on the first connection element 210 and the second adsorption element 320 disposed on the second connection element 220 increases, and the first adsorption element 310 and the second adsorption element 320 can adsorb the substrate 800 with a larger size; as shown in fig. 4, when the support 400 moves toward a direction close to the crossing position of the first slide rail 110 and the second slide rail 130, the support 400 performs a retracting motion, such that the first connection member 210 and the second connection member 220 slide on the first slide rail 110 and the second slide rail 130 along the first direction X and the second direction Y, respectively, and at this time, the first connection member 210 and the second connection member 220 move toward each other along the length direction of the support 400, and the distance between the first connection member 210 and the second connection member 220 decreases, such that the distance between the first suction assembly 310 disposed on the first connection member 210 and the second suction assembly 320 disposed on the second connection member 220 decreases, such that the first suction assembly 310 and the second suction assembly 320 can suck the substrate 800 with a smaller size; that is, when the supporting member 400 moves toward a direction close to or away from the crossing position of the first slide rail 110 and the second slide rail 130, the supporting member 400 can perform a telescopic motion, so that the first connecting member 210 and the second connecting member 220 can move toward or away from each other along the length direction of the supporting member 400, so that the first adsorption assembly 310 disposed on the first connecting member 210 and the second adsorption assembly 320 disposed on the second connecting member 220 can move toward or away from each other along the length direction of the supporting member 400, and further, the distance between the first adsorption assembly 310 and the second adsorption assembly 320 is adjusted, so that the adsorption mechanism can adapt to substrates 800 with different dimensions.
In an embodiment of the present application, as shown in fig. 1 and fig. 2, the sliding assembly 100 further includes a first sliding block 120 and a second sliding block 140, wherein the first sliding block 120 is slidably connected to the first sliding rail 110, that is, the first sliding block 120 can slide on the first sliding rail 110 along the first direction X; the second sliding block 140 is slidably connected to the second sliding rail 130, that is, the second sliding block 140 can slide on the second sliding rail 130 along the second direction Y. In this embodiment, the first connecting element 210 is fixed on the first sliding block 120, and the second connecting element 220 is fixed on the second sliding block 140, so that the first connecting element 210 can be slidably connected to the first sliding rail 110 through the first sliding block 120, and the second connecting element 220 can be slidably connected to the second sliding rail 130 through the second sliding block 140. It is understood that the first connecting member 210 and the second connecting member 220 can be slidably connected to the first slide rail 110 and the second slide rail 130 respectively in other manners according to the choice and specific requirements of the actual situation, and are not limited herein.
In an embodiment of the present application, as shown in fig. 5, the first sliding rail 110 is provided with first sliding grooves 111 at two opposite sides, the first sliding block 120 is sleeved outside the first sliding rail 110, and the first sliding block 120 is provided with a first protrusion 121 for being inserted into the first sliding grooves 111 and being capable of sliding along the first sliding grooves 111, so that the first sliding block 120 is slidably connected to the first sliding rail 110; as shown in fig. 6, the second slide rail 130 is provided with second slide grooves 131 on opposite sides thereof, the second slider 140 is sleeved outside the second slide rail 130, and the second slider 140 is provided with a second protrusion 141 which is inserted into the second slide grooves 131 and can slide along the second slide grooves 131, so that the second slider 140 is slidably connected to the second slide rail 130. It is understood that the first slider 120 and the second slider 140 can be slidably connected to the first slide rail 110 and the second slide rail 130 respectively in other manners according to the choice of actual situations and specific requirements, which are not limited herein.
In one embodiment of the present application, as shown in fig. 7, the supporting member 400 is a telescopic rod, the telescopic rod includes a main rod 410 and an auxiliary rod 420 telescopically connected to the main rod 410, the first connecting member 210 is disposed on the main rod 410, and the second connecting member 220 is disposed on the auxiliary rod 420. In this embodiment, the main rod 410 is sleeved outside the auxiliary rod 420, specifically, the main rod 410 is provided with a hollow cavity 411 along an axial direction thereof, the auxiliary rod 420 extends into the hollow cavity 411 of the main rod 410 and can make a telescopic motion in the hollow cavity 411 along the axial direction of the main rod 410, the first connecting piece 210 is arranged at one end of the main rod 410 far away from the main rod 410, and the second connecting piece 220 is arranged at one end of the auxiliary rod 420 far away from the main rod 410.
Referring to fig. 3 and 7, when the first link 210 and the second link 220 slide on the first slide rail 110 and the second slide rail 130, respectively, and the auxiliary rod 420 gradually extends out of the hollow cavity 411 of the main rod 410, the first link 210 and the second link 220 move away from each other along the length direction of the support 400, and at this time, the distance between the first link 210 and the second link 220 increases, so that the distance between the first adsorption assembly 310 disposed on the first link 210 and the second adsorption assembly 320 disposed on the second link 220 increases, and the first adsorption assembly 310 and the second adsorption assembly 320 can adsorb the substrate 800 with a larger size; when the first link 210 and the second link 220 slide on the first slide rail 110 and the second slide rail 130, respectively, and the sub-rod 420 gradually extends into the hollow cavity 411 of the main rod 410, the first link 210 and the second link 220 move toward each other along the length direction of the support 400, and at this time, the distance between the first link 210 and the second link 220 decreases, so that the distance between the first adsorption assembly 310 disposed on the first link 210 and the second adsorption assembly 320 disposed on the second link 220 decreases, and thus the first adsorption assembly 310 and the second adsorption assembly 320 can adsorb the substrate 800 having a smaller size. It is understood that the support 400 may be other telescopic structures, selected according to the actual situation and the specific requirements, and is not limited herein.
In an embodiment of the present application, as shown in fig. 1 and fig. 2, two first sliding blocks 120 and two first connecting members 210 are symmetrically disposed on the first sliding rail 110, each first sliding block 120 is fixedly connected to a corresponding first connecting member 210, and each first connecting member 210 is provided with a corresponding first adsorption assembly 310; two second sliders 140 and two second connecting pieces 220 are symmetrically arranged on the second slide rail 130, each second slider 140 is fixedly connected to the corresponding second connecting piece 220, and each second connecting piece 220 is provided with a corresponding second adsorption component 320; the suction mechanism includes two supporting members 400 respectively disposed at two opposite sides of the sliding assembly 100, and each supporting member 400 is connected to the corresponding first connecting member 210 and the second connecting member 220. Under the structure, the suction mechanism is provided with two first suction assemblies 310 and two second suction assemblies 320, so that the substrate 800 can be stably sucked, and the substrate 800 is prevented from falling and being damaged in the transferring process. It is understood that the number of the first adsorption module 310 and the second adsorption module 320 can be properly adjusted according to the selection of the actual situation and the specific requirement, and is not limited herein.
In an embodiment of the present application, as shown in fig. 1 and fig. 2, the suction mechanism further includes a driving assembly 500 for driving the support 400 to move toward or away from the crossing position of the first slide rail 110 and the second slide rail 130, when the support 400 moves toward or away from the crossing position of the first slide rail 110 and the second slide rail 130, the first connection member 210 and the second connection member 220 can respectively slide on the first slide rail 110 and the second slide rail 130, so that the first suction assembly 310 disposed on the first connection member 210 and the second suction assembly 320 disposed on the second connection member 220 can move toward or away from each other along the length direction of the support 400, thereby adjusting the distance between the first suction assembly 310 and the second suction assembly 320, so that the suction mechanism can accommodate substrates 800 with different sizes. Under the structure, the positions of the first adsorption assembly 310 and the second adsorption assembly 320 do not need to be manually adjusted by an operator, the position adjustment of the first adsorption assembly 310 and the second adsorption assembly 320 is avoided being influenced due to the difference of the techniques of the operator, and the substrate 800 can be prevented from being broken due to the fact that at least one of the first adsorption assembly 310 and the second adsorption assembly 320 and the substrate 800 are abnormally vacuum-built.
Alternatively, as shown in fig. 1 and 2, the driving assembly 500 includes a motor 510 having an output shaft and a screw 520 connected to the output shaft of the motor 510, and the support 400 is screw-fitted on the screw 520, in such a structure that, when the motor 510 rotates forward or backward, the support 400 moves toward or away from the crossing position of the first and second rails 110 and 130, and the interval between the first and second adsorption assemblies 310 and 320 can be better adjusted. It is understood that the specific structural components of the driving assembly 500 may be modified as appropriate according to the choice of actual conditions and specific requirements, and are not limited thereto.
In an embodiment of the present application, as shown in fig. 1 and fig. 2, one of the supporting members 400 is provided with a first fixing seat 610, the other supporting member 400 is provided with a second fixing seat 620, the first fixing seat 610 is provided with a first screw hole 611 for the screw rod 520 to be in screw-thread fit, the second fixing seat 620 is provided with a second screw hole 621 for the screw rod 520 to be in screw-thread fit, and a rotation direction of an internal thread of the first screw hole 611 is opposite to a rotation direction of an internal thread of the second screw hole 621. With this structure, when the motor 510 rotates in the forward or reverse direction, the two supporting members 400 move toward or away from each other, so that the distance between the first adsorption assembly 310 and the second adsorption assembly 320 can be adjusted.
In an embodiment of the present application, the screw 520 may be perpendicular to the support 400, and of course, the angle between the screw 520 and the support 400 may be properly adjusted according to the choice of the actual situation and the specific requirement, and is not limited herein.
In one embodiment of the present application, as shown in fig. 1 and 2, the suction mechanism further includes a rotary bearing 700 disposed on the sliding assembly 100, and a rotation axis of the rotary bearing 700 is perpendicular to the first slide rail 110 and the second slide rail 130, so that the suction mechanism can be rotatably connected to a robot or other connection member, and the degree of freedom of the suction mechanism is increased, so as to adjust the positions of the first suction assembly 310 and the second suction assembly 320, thereby stably sucking and transferring the substrate 800.
In one embodiment of the present application, as shown in fig. 1 and 2, the first suction assembly 310 includes a first suction pad column 311 and a first suction pad 312, one end of the first suction pad column 311 is fixed to the first connector 210, and the first suction pad 312 is fixed to the other end of the first suction pad column 311; the second suction assembly 320 includes a second suction cup column 321 and a second suction cup 322, one end of the second suction cup column 321 is fixed on the second connection member 220, the second suction cup 322 is fixed on the other end of the second suction cup column 321, and the first suction cup 312 and the second suction cup 322 are used for communicating with a vacuum source, so that the first suction cup 312 and the second suction cup 322 can suck the substrate 800.
The embodiment of the present application further provides a substrate transfer machine, including the frame and as above the suction mechanism, suction mechanism locates in the frame, suction mechanism can adapt to the substrate 800 of different size specifications for the commonality that substrate 800 transferred the machine improves greatly.
The above description is only exemplary of the present application and should not be taken as limiting the present application, as any modification, equivalent replacement, or improvement made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims (10)

1. A suction mechanism, comprising:
the sliding assembly comprises a first sliding rail and a second sliding rail which are arranged in a crossed manner;
the first connecting piece is connected to one end of the first sliding rail in a sliding mode and can slide along the length direction of the first sliding rail;
the second connecting piece is connected to one end of the second sliding rail in a sliding mode and can slide along the length direction of the second sliding rail;
the first adsorption assembly is arranged on the first connecting piece and is used for adsorbing the substrate;
the second adsorption component is arranged on the second connecting piece and is used for adsorbing the substrate; and
one end of the supporting piece is fixedly connected with the first connecting piece, the other end of the supporting piece is fixedly connected with the second connecting piece, and the supporting piece can do telescopic motion.
2. The extraction mechanism of claim 1, wherein the slide assembly further comprises a first slide slidably coupled to the first slide and a second slide slidably coupled to the second slide, wherein the first connector is secured to the first slide and the second connector is secured to the second slide.
3. The suction mechanism as claimed in claim 2, wherein the support member includes a main rod and an auxiliary rod telescopically coupled to the main rod, the first coupling member is provided on the main rod, and the second coupling member is provided on the auxiliary rod.
4. The suction mechanism as claimed in claim 2, wherein two first sliding blocks and two first connecting members are symmetrically disposed on the first sliding rail, each first sliding block is fixedly connected to the corresponding first connecting member, and each first connecting member is provided with the corresponding first suction assembly;
two second sliding blocks and two second connecting pieces are symmetrically arranged on the second sliding rail, each second sliding block is fixedly connected to the corresponding second connecting piece, and each second connecting piece is provided with the corresponding second adsorption component;
the suction mechanism comprises two supporting pieces which are respectively arranged on two opposite sides of the sliding assembly, and each supporting piece is respectively connected with the corresponding first connecting piece and the second connecting piece.
5. The suction mechanism as set forth in claim 4 further including a drive assembly for driving the support member toward and away from the intersection of the first and second slide rails.
6. The extraction mechanism as claimed in claim 5, wherein the drive assembly includes a motor having an output shaft and a threaded rod connected to the output shaft of the motor, the support member being threadedly engaged on the threaded rod.
7. The suction mechanism as claimed in claim 6, wherein one of the supporting members has a first fixing seat, the other supporting member has a second fixing seat, the first fixing seat has a first screw hole for the screw to be screwed, the second fixing seat has a second screw hole for the screw to be screwed, and the rotation direction of the internal thread of the first screw hole is opposite to the rotation direction of the internal thread of the second screw hole.
8. The suction mechanism as set forth in claim 6 wherein said screw is disposed perpendicular to said support.
9. The suction mechanism as claimed in any one of claims 1 to 8, further comprising a rotation bearing provided on the slide assembly, a rotation axis of the rotation bearing being perpendicular to the first slide rail and the second slide rail.
10. A substrate transfer machine comprising a frame and the suction mechanism according to any one of claims 1 to 9, the suction mechanism being provided on the frame.
CN202011212325.8A 2020-11-03 2020-11-03 Suction mechanism and substrate transfer machine Pending CN112320343A (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
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