200814223 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種晶圓傳送(Transportation)系統， 且特別有關於一^重晶圓傳送盒及晶圓載卸糸統。 【先前技術】 在半導體製造技術中，無塵室的主要污染源來自機台 設備、工作人員的活動以及製程本身的污染物。因此在儲 存、傳送和載卸過程中存放晶圓片的晶圓傳送盒的設計’ 主要即是用來避免晶圓片與週遭環境進行開放式的接 觸，以防止存於内部之晶圓片受到污染。 一般來說，晶圓傳送盒會透過自動物料輸送系統或所 謂的高架式搬運系統來運送晶圓片到各機台設備中以進 行製程處理。然而，在運送過程中，晶圓傳送盒的部分零 組件很有可能因使用期限過久或因栓鎖不完全而發生脫 落的現象，而脫落的零組件不僅可能因此毁損，更有可能 因掉落於導軌上而導致整個自動物料輸送系統或高架式 搬運系統故障。 以晶圓傳送盒的門板為例，由於其在栓鎖不完全的情 況下，仍有可能因為門板自身的重量足以支撐於晶圓傳送 盒上而不脫落，因此，工作人員並不易發現此種異常現 象，且除非門板在運送過程中透過持續的震動而發生鬆脫 或掉落，否則在此之前，門板是否鬆脫並無法加以偵測。 【發明内容】 為解決上述問題，本發明係提供一種晶圓傳送盒，其200814223 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD The present invention relates to a wafer transfer system, and more particularly to a wafer transfer cassette and a wafer loading and unloading system. [Prior Art] In the semiconductor manufacturing technology, the main pollution source of the clean room comes from the machine equipment, the activities of the workers, and the pollutants of the process itself. Therefore, the design of the wafer transfer cassette for storing wafers during storage, transfer and loading and unloading is mainly used to prevent the wafer from being in open contact with the surrounding environment to prevent the inner wafer from being exposed. Pollution. In general, wafer transfer boxes transport wafers to each machine for processing through automated material handling systems or so-called overhead handling systems. However, during the transportation process, some components of the wafer transfer cassette are likely to fall off due to long service life or incomplete latching, and the dropped components may not only be damaged, but may also be lost. Falling on the rails causes the entire automatic material handling system or overhead handling system to malfunction. Taking the door panel of the wafer transfer cassette as an example, because the lock is not complete, it is still possible that the weight of the door panel itself is sufficient to support the wafer transfer box without falling off, so the worker is not easy to find such Anomalies, and unless the door panel is loose or dropped by continuous vibration during transport, the door panel is loose and cannot be detected. SUMMARY OF THE INVENTION To solve the above problems, the present invention provides a wafer transfer cassette.
Client’s Docket Να:IMI 06-002 TT^ Docket No: 0950-A50674TW/Final/Chad 5 200814223 藉由f::板或載卸口部之邊框部所設置的推出裝置， 能完全栓鎖於载卸口部時，推離門板，並使之與盒 :刀離’3如此，即可提前發現Π板栓鎖不全的情形，而 本啦明另提供之-種日日日圓 W離而留置於、 在 時，發出一異物感測信號。 -飞置放台 目的，本發明之一實施例主要係提供一種晶圓 識本體，具有一載卸口部，用以載入或卸 片，A門板，-門閂，用以於載入或卸下晶圓片後， 王反於I本體之载卸口部上；及-推出裝置，設置於門 板或載卸口。卩之邊框部，用以當門閃未能完全栓鎖門板於載 卸口部時，推離門板。 另外在本^明之另一實施例中亦提供一種晶圓載卸系 統’包括：-晶圓傳送盒，包括：一盒本體，具有一載卸口 部，用以載人或卸下晶圓m __⑽，用以於載入 或卸下晶圓片後，检鎖門板於盒本體之載卸口部上；及一推 出衣置°又置於門板或載卸口部之邊框部，用以當門問未能 完全栓鎖該Η板於载卸σ部時，推離門板；及—晶圓載入機， 包括：一置放台，用以安置晶圓傳送盒；-機械介面，用以 門閃，啟門，以自晶圓傳送盒卸下晶圓片，以及於載入 哭，用以在曰圓值读：？ 於载卸口部上；一異物感測 感測到門板仍留置於機械介而$俊進订吳物^^ 你 測信號。 歲m置仏上時，發出-異物感 【實施方式】Client's Docket Να:IMI 06-002 TT^ Docket No: 0950-A50674TW/Final/Chad 5 200814223 The ejector device provided by the frame of the f:: plate or the loading and unloading port can be completely locked to the loading and unloading port. When the ministry, push away from the door panel and make it and the box: the knife is away from '3, so you can find the situation that the seesaw is incompletely locked in advance, and this is also provided by the Japanese-Japanese yen. At the time, a foreign matter sensing signal is emitted. For the purpose of flying the platform, one embodiment of the present invention mainly provides a wafer identification body having a loading and unloading portion for loading or unloading, an A door panel, a door latch for loading or unloading. After the lower wafer, the king is opposite to the loading and unloading portion of the I body; and - the ejection device is disposed on the door panel or the loading and unloading port. The frame part of the cymbal is used to push the door panel away when the door flash fails to completely lock the door panel at the loading and unloading port. In addition, in another embodiment of the present invention, a wafer loading and unloading system includes: a wafer transfer cassette, comprising: a box body having a loading and unloading portion for carrying or unloading a wafer m__(10) After loading or unloading the wafer, the lock door panel is placed on the loading and unloading port of the box body; and a garment is placed on the door panel or the frame of the loading and unloading port for the door. If the panel is not fully latched, the yoke plate is pushed away from the door panel; and the wafer loader includes: a placement table for arranging the wafer transfer box; - a mechanical interface for the door Flash, open the door, remove the wafer from the wafer transfer cassette, and load the cry to read at the round value: On the loading and unloading mouth; a foreign object sensing senses that the door panel is still left in the mechanical media and the $俊进订吴物^^ you measure the signal. When the age of m is placed on the sputum, the sensation of foreign body is emitted. [Embodiment]
Client’s Docket No.:IMI 06-002 TT's Docket No: 0950-A50674TW/Final/Chad 200814223 本發明將藉由下列較佳實施例及圖式作進一步地詳 細說明，然而這些具體實施例僅為舉例說明，而非用以限 定本發明之範疇。此外，為便於說明起見，相似或相同之 元件係以相同之標號標示。 請參考第1圖所揭示之晶圓載卸系統的較佳實施例， 其中晶圓傳送盒（Front Opening Unified Pod ; FOUP)20 包括一具有載卸口部31的盒本體24，載卸口部31係用 以載入或卸下晶圓片；以及一門閂33，用以於載入或卸 下晶圓片後，栓鎖門板22於盒本體24之載卸口部31上。 其中，由於存放晶圓片的盒本體24必須具備避免晶圓片 在傳送過程中與週遭環境接觸而造成污染的能力，因此門 閂33於栓鎖門板22於盒本體24之載卸口部31上時，必 須能夠建構出一密封的環境。 接著，為了執行半導體製程步驟，晶圓傳送盒20會 透過自動物料輸送系統（Automated Material Handling System ; AMHS)或所謂的高架式搬運系統（Over Head Transportation ; 0ΗΤ)來運送内存之晶圓片到晶圓載入機 (Load Port Uni t ; LPU)25的置放台27上以安置此晶圓 傳送盒2 0。接著，在一較佳實施例中，晶圓載入機2 5會 藉由一對閂鎖（Latch Key)32來打開設置於門板内的門閂 33以卸下門板22,使得儲存於盒本體24内之晶圓片得以 經由一機械手臂而載入機台設備的處理室（Chamber)内， 以進行晶圓加工製程。 整個晶圓載卸的過程將詳述如下。首先，自動物料輸 送系統（未顯示）會將晶圓傳送盒2 0置於置放台2 7上並對 準定位銷（Kinematic Coupling Pin)29，接著，置放台Client's Docket No.: IMI 06-002 TT's Docket No: 0950-A50674TW/Final/Chad 200814223 The present invention will be further illustrated by the following preferred embodiments and drawings, but these specific embodiments are merely illustrative. Rather than limiting the scope of the invention. In addition, for the sake of explanation, similar or identical elements are designated by the same reference numerals. Please refer to the preferred embodiment of the wafer loading and unloading system disclosed in FIG. 1 , wherein the Front Opening Unified Pod (FOUP) 20 includes a box body 24 having a loading and unloading port portion 31, and the loading and unloading port portion 31 The utility model is used for loading or unloading the wafer; and a latch 33 for latching the door panel 22 on the loading and unloading opening portion 31 of the cartridge body 24 after loading or unloading the wafer. Wherein, since the cartridge body 24 for storing the wafer must have the ability to prevent the wafer from being contaminated by contact with the surrounding environment during the transportation process, the latch 33 is on the loading and unloading port portion 31 of the cartridge body 24 It is necessary to be able to construct a sealed environment. Next, in order to perform the semiconductor manufacturing process, the wafer transfer cassette 20 transports the wafer to the wafer through an Automated Material Handling System (AMHS) or a so-called Overhead Transportation System (Overhead Transportation). The wafer loading cassette 20 is placed on the placement table 27 of the Load Port Uni t (LPU) 25. Next, in a preferred embodiment, the wafer loader 25 opens the door latch 32 disposed in the door panel by a pair of latch keys 32 to remove the door panel 22 so as to be stored in the cartridge body 24. The wafer inside can be loaded into the processing chamber of the machine equipment via a robot arm for wafer processing. The entire wafer loading and unloading process will be detailed below. First, an automated material handling system (not shown) places the wafer cassette 20 on the placement table 7 and a Kinematic Coupling Pin 29, and then, the placement table.
Clienfs Docket No.:IMI 06-002 TT*s Docket No: 0950-A50674TW/Final/Chad 7 200814223 2 5會帶動晶圓傳送盒2 0往前移動，直到門板2 2上的門 閂（Latch)33與晶圓載入機25之機械介面26上的閃鎖 (Latch Key)32緊密連結，此機械介面因此得以轉動門閂 33而打開門板22，並開始移動至定位以帶離門板22，最 後，儲存於盒本體24内之晶圓片會被機械手臂逐一水平 移出至固定位置。反之，當完成晶圓加工製程後，則依上 述載入過程之反向順序，將處理後之晶圓片透過載卸口部 31重新置入盒本體20内。 如前所述，機械介面係藉由閂鎖32與門閂33的緊密 連結而可轉動門閂33啟閉門板22。然而當處理後之晶圓 片透過載卸口部31重新置入盒本體20内，同時門板22 也被重新栓鎖於盒本體24之載卸口部31上時，門板或門 閂卻有可能因機構老化而發生栓鎖不完全的異常現象，此 時門板由於自身的重量或所殘存的栓鎖力量導致立即分 離的情形不一定發生，但卻可能是在運送系統的持續震動 影響下才發生鬆脫或掉落，進而導致損害。 有鑑於此，本發明之一較佳實施例係藉由一設置於門 板22或載卸口部31之邊框部41上的推出裝置40，以在 當門閂33未能完全栓鎖住門板22與盒本體24時，可直 接推離門板22，以避免發生栓鎖不完全的情形。 請參閱第2圖及第3圖，其分別顯示本發明之一實施 例中晶圓傳送盒20之正視圖及侧視圖。在本例中，推出 裝置40為一彈性體，其可設置於門板22或載卸口部31 之邊框部41的底表面42上，用以當門板22貼附但未完 全栓鎖於載卸口部31時，可藉由彈性體之彈力推離門板 22。Clienfs Docket No.: IMI 06-002 TT*s Docket No: 0950-A50674TW/Final/Chad 7 200814223 2 5 will drive the wafer transfer box 20 to move forward until the Latch 33 on the door panel 2 The latch key 32 on the mechanical interface 26 of the wafer loader 25 is tightly coupled, and the mechanical interface thus turns the latch 33 to open the door panel 22 and begins to move to position to be carried away from the door panel 22, and finally, stored in The wafers in the cartridge body 24 are horizontally removed one by one by the robot arm to a fixed position. On the other hand, after the wafer processing process is completed, the processed wafer is reinserted into the cartridge body 20 through the loading and unloading port portion 31 in the reverse order of the loading process. As previously mentioned, the mechanical interface can be used to rotate the latch 33 to open and close the door panel 22 by the tight attachment of the latch 32 to the latch 33. However, when the processed wafer is reinserted into the cartridge body 20 through the loading and unloading port portion 31, and the door panel 22 is also re-locked to the loading and unloading portion 31 of the cartridge body 24, the door panel or the latch may be When the mechanism is aging and the latching is incomplete, the door panel may not be separated immediately due to its own weight or the residual latching force, but it may be loose under the influence of the continuous vibration of the transport system. Take off or fall, causing damage. In view of the above, a preferred embodiment of the present invention is provided by a pushing device 40 disposed on the frame portion 41 of the door panel 22 or the loading and unloading port portion 31, so that when the latch 33 fails to completely lock the door panel 22 and When the cartridge body 24 is used, it can be directly pushed away from the door panel 22 to avoid incomplete locking. Referring to Figures 2 and 3, there are shown front and side views, respectively, of a wafer cassette 20 in one embodiment of the present invention. In this example, the ejection device 40 is an elastic body that can be disposed on the bottom surface 42 of the frame portion 22 of the door panel 22 or the loading and unloading port portion 31 for attaching the door panel 22 but not fully latching to the loading and unloading. At the mouth portion 31, the door panel 22 can be pushed away by the elastic force of the elastic body.
Client’s Docket No.:IMI 06-002 TT’s Docket No: 0950-A50674TW/Final/Chad 8 200814223 此外如第4圖所示，晶圓載入機25更 — =°」9其可設置在機械介面26或置放台2= :置放台27 進行異物麵舉例^ 傳送盒J Ϊ入t ^之機械介面2 6在載入晶圓片於晶圓 31上且m’並猎旋轉間而栓鎖門板22於載卸口部 將門板2=Γ貞不完全的情形時’由於彈性體之彈力合 反巧，盒本體2。，並且使之倒向機械介面心 仍留置“村八^5()將會感測到門板22 遠置於械械"面26或置放台27上，因而發出 载入機之警報裝置6°，即可在接收： 以聲音或IS Α之=物感測信號時發出警報信號，例如 系统的動作门# 場工作人員’暫時停止晶圓運送 害運送避免在運送過程中發生門板掉落而損 =須說明的是，上述實施獅細彈性 =::Γ本發明之推出裝置及其所在之位置，任；孰 ’之在不脫離本發明之精神和範圍内，當可作此 井之更動與潤飾。 」π二 牛例而s，如第5Α圖之側視圖所示，彈性 土避输體夾於門板和載卸口部之間而難以緊密貼 48發：之一較佳實施例係在邊框部底表面42設置-凹軋48,用以容納彈性體之一部分，因此，去 鎖於载卸:部31時’彈性體即可被完全I縮於 笼如第5β圖之侧視圖所示，上述彈性體亦可為一彈 =4 6，例如是由金屬或_㈣所構成， entsD〇cketN〇：IMI〇6_〇〇2 丁 〇Cket N〇· 〇950-A50674TW/Final/Chad 9 200814223 即可彈離栓鎖不完全娜22。例 貝片46之兩端部可藉由黏著劑或螺絲固定於 π目，丨作+或載卸口部31之邊框部41的底表面42上，中間 而、犬出於外以在被壓縮時產生彈性變形力。 —然而’ 4了便於拆卸、清洗或更換，本發明之一較佳 :?例ff'另一種彈性體之設計，如第5C圖之上視圖 門：22’W:性體可為一彈簧圈仏，—般為多圈螺旋， L Π fΓΓ1之邊框部4】的底表面42上則設有 孔‘ 49 ' 1*並°又置有支架49以將凹槽48分割成數個 =隙49a’因此彈簧圈45可沿著支架逐漸旋入，使並底 =於凹槽内而不會脫落，反之，要 菩 圈45犄，即可反向將此彈箬圈奶沪 、手” Γ:Γ此外，由於彈簧圈45和 雖然本發明已以較佳實施例揭露如上==象° 限定本發明，任何熟習此技藝者， :…、並非用以 和範圍内，當可作些許之更動與潤飾，：：之精神 範圍當視後附之申請專利範圍所界定者為準月之保護Client's Docket No.: IMI 06-002 TT's Docket No: 0950-A50674TW/Final/Chad 8 200814223 Also as shown in Figure 4, the wafer loader 25 is more -=°"9 which can be placed in the mechanical interface 26 or Placement table 2 = : Placement table 27 for foreign object example ^ Transfer box J t t ^ mechanical interface 2 6 Load the wafer on the wafer 31 and m' and hunt the rotating room to lock the door panel 22 When the door panel 2 = Γ贞 is incomplete in the loading and unloading port portion, the box body 2 is closed due to the elastic force of the elastic body. And reversing the mechanical interface to the center of the heart, "Village 8^5() will sense that the door panel 22 is placed far above the mechanical device" face 26 or the table 27, thus issuing a warning device for the loader 6 °, you can receive the alarm signal when the signal is sensed by sound or IS, for example, the action door of the system # field staff temporarily stops the wafer transportation and avoids the door panel falling during the transportation. Loss = It should be noted that the above-mentioned implementation of the lion's fine elasticity =:: 推出 the device of the present invention and its location, any of them can be used as the change of the well without departing from the spirit and scope of the present invention. And the retouching. π 二牛例和s, as shown in the side view of Figure 5, the elastic soil avoidance body is sandwiched between the door panel and the loading and unloading mouth portion and it is difficult to closely attach 48 hair: one preferred embodiment is A concave groove 48 is provided on the bottom surface 42 of the frame portion for accommodating one portion of the elastic body. Therefore, when the loading and unloading portion 31 is unlocked, the elastic body can be completely collapsed into the cage as shown in the side view of the fifth β-graph. It can be noted that the above elastic body may also be a bomb = 4 6, for example, composed of metal or _ (four), entsD〇cke tN〇: IMI〇6_〇〇2 Ding Cket N〇· 〇950-A50674TW/Final/Chad 9 200814223 It is possible to bounce off the lock and not complete Na 22. The ends of the example of the vane 46 can be fixed to the π mesh by an adhesive or a screw, and the bottom surface 42 of the frame portion 41 of the loading and unloading portion 31 can be compressed in the middle. At the time, elastic deformation force is generated. - However, '4' is easy to disassemble, clean or replace, one of the preferred embodiments of the invention: ff' another design of the elastomer, such as the view of the upper view of the 5C: 22'W: the body can be a coil仏, generally a multi-turn spiral, the bottom surface 42 of the frame portion 4 of the L Π fΓΓ1 is provided with a hole '49' 1* and a bracket 49 is further provided to divide the groove 48 into a plurality of slots 49a' Therefore, the coil 45 can be gradually screwed in along the bracket, so that the bottom is in the groove and does not fall off. On the contrary, if the circle is 45 犄, the 箬 箬 奶 、 、 、 、 、 、 、 、 Γ Γ Γ Γ Γ Γ In addition, due to the coils 45 and although the invention has been described above with respect to preferred embodiments, the invention is defined by the above-described <RTI ID=0.0>= </ RTI> </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; , :: The scope of the spirit is defined as the protection of the quasi-month defined by the scope of the patent application attached
Client's Docket No.:IMI 06-002 TTss Docket No: 0950-A50674TW/Final/Chad 10 200814223 【圖式簡單說明】 第1圖為本發明實施例之晶圓载卸系統之示意圖。 第2圖為本發明實施例之晶圓傳送盒之正視圖。 第3圖為本發明實施例之晶圓傳送盒之侧視圖。 第4圖為本發明實施例之晶圓載卸系統中，門板被推離 脫落於置放台之示意圖。 第5A至5C圖為本發明各個實施例之推出裝置之示意圖 【主要元件符號說明】 晶圓傳送盒〜20 ; 門板〜22 ; 載卸口部〜31 ; 盒本體〜24 ; 門閂〜33 ; 晶圓载入機〜25 置放台〜27 ; 閃鎖〜32 ; 定位銷〜29 ; 機械介面〜％ ; 邊框部〜41 ; 推出骏置〜40; 異物感測器〜50 ; 警報1置〜60 ; 緩衝墊片〜47 ; 邊框部底表面〜 凹槽〜48 ; 彈簧片〜46 ; 彈簧圈〜45 ; 支架〜49 ; 孔隙〜49a。Client's Docket No.: IMI 06-002 TTss Docket No: 0950-A50674TW/Final/Chad 10 200814223 [Simplified Schematic] FIG. 1 is a schematic view of a wafer loading and unloading system according to an embodiment of the present invention. Figure 2 is a front elevational view of a wafer transfer cassette in accordance with an embodiment of the present invention. Figure 3 is a side view of a wafer transfer cassette in accordance with an embodiment of the present invention. Fig. 4 is a schematic view showing the wafer loading and unloading system of the embodiment of the present invention in which the door panel is pushed away from the placement table. 5A to 5C are schematic views of the ejection device according to various embodiments of the present invention [main element symbol description] wafer transfer cassette 〜20; door plate 〜22; load port portion 〜31; case body 〜24; door latch 〜33; Round loader ~ 25 placement table ~ 27; flash lock ~ 32; locating pin ~ 29; mechanical interface ~%; frame part ~ 41; push jun ~ 40; foreign object sensor ~ 50; alarm 1 set ~ 60 ; cushioning pad ~ 47; bottom surface of the frame part ~ groove ~ 48; spring piece ~ 46; spring ring ~ 45; bracket ~ 49; aperture ~ 49a.
Client’s Docket No. :IMI 06-002 TT5s Docket No: 0950-A50674TW/Final/Chad 11Client’s Docket No. :IMI 06-002 TT5s Docket No: 0950-A50674TW/Final/Chad 11