TWI309869B - Wafer carrier and wafer load port system - Google Patents
Wafer carrier and wafer load port system Download PDFInfo
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- TWI309869B TWI309869B TW95133035A TW95133035A TWI309869B TW I309869 B TWI309869 B TW I309869B TW 95133035 A TW95133035 A TW 95133035A TW 95133035 A TW95133035 A TW 95133035A TW I309869 B TWI309869 B TW I309869B
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Description
1309869 九、發明說明: 【發明所屬之技術領域】 本發明係有關於一種晶圓傳送(Transportation)系統, 且特別有關於一種晶圓傳送盒及晶圓載卸系統。 【先前技#f】 在半導體製造技術中,無塵室的主要污染源來自機台 設備、工作人員的活動以及製程本身的污染物。因此在儲 ^ 存、傳送和載卸過程中存放晶圓片的晶圓傳送盒的設計, 主要即是用來避免晶圓片與週遭環境進行開放式的接 觸,以防止存於内部之晶圓片受到污染。 一般來說,晶圓傳送盒會透過自動物料輸送系統或所 謂的高架式搬運系統來運送晶圓片到各機台設備中以進 行製程處理。然而,在運送過程中,晶圓傳送盒的部分零 組件很有可能因使用期限過久或因栓鎖不完全而發生脫 落的現象,而脫落的零組件不僅可能因此毁損,更有可能 因掉落於導軌上而導致整個自動物料輸送系統或高架式 > 搬運系統故障。 以晶圓傳送盒的門板為例,由於其在栓鎖不完全的情 況下,仍有可能因為門板自身的重量足以支撐於晶圓傳送 盒上而不脫落,因此,工作人員並不易發現此種異常現 象,且除非門板在運送過程中透過持續的震動而發生鬆脫 或掉落,否則在此之前,門板是否鬆脫並無法加以偵測。 【發明内容】 為解決上述問題,本發明係提供一種晶圓傳送盒,其1309869 IX. Description of the Invention: [Technical Field] The present invention relates to a wafer transfer system, and more particularly to a wafer transfer cassette and a wafer loading and unloading system. [Previous technology #f] In semiconductor manufacturing technology, the main source of pollution in clean rooms comes from machine equipment, the activities of workers, and the pollutants in the process itself. Therefore, the design of the wafer transfer cassette for storing wafers during storage, transfer, and loading and unloading is mainly to prevent the wafer from being in open contact with the surrounding environment to prevent the wafer from being stored inside. The film is contaminated. In general, wafer transfer boxes transport wafers to each machine for processing through automated material handling systems or so-called overhead handling systems. However, during the transportation process, some components of the wafer transfer cassette are likely to fall off due to long service life or incomplete latching, and the dropped components may not only be damaged, but may also be lost. Falling on the rails causes the entire automatic material handling system or overhead > handling system to malfunction. Taking the door panel of the wafer transfer cassette as an example, because the lock is not complete, it is still possible that the weight of the door panel itself is sufficient to support the wafer transfer box without falling off, so the worker is not easy to find such Anomalies, and unless the door panel is loose or dropped by continuous vibration during transport, the door panel is loose and cannot be detected. SUMMARY OF THE INVENTION To solve the above problems, the present invention provides a wafer transfer cassette.
Client’s Docket No. :IMI 06-002 TT^s Docket No: 0950-A50674TW/Final/Chad 5 1309869 藉由在門板或載卸口部之邊框部所設置的推出裝置,可在 門板未能完全栓鎖於載卸口部時,推離門板,並使之與盒 本體分離,如此,即可提前發現門板栓鎖不全的情形,而 本發明另提供之一種晶圓載卸系統,則可用以在感測到門 板被推離而留置於一晶圓載入機之機械介面或置放台 時,發出一異物感測信號。 為達上述目的,本發明之一實施例主要係提供一種晶圓 傳送盒,包括:一盒本體,具有一載卸口部,用以載入或卸 下晶圓片,·一門板,一門問,用以於載入或卸下晶圓片後, 栓鎖門板於盒本體之載卸口部上;及一推出裝置,設置於門 板或載卸口部之邊框部,用以當門閂未能完全栓鎖門板於載 卸口部時,推離門板。 另外,在本發明之另一實施例中亦提供一種晶圓載卸系 統,包括:一晶圓傳送盒,包括:一盒本體,具有一載卸口 部,用以載入或卸下晶圓片;一門板;一門閂,用以於載入 或卸下晶圓片後,栓鎖門板於盒本體之載卸口部上;及一推 出裝置,設置於門板或載卸口部之邊框部,用以當門閂未能 > 完全栓鎖該門板於載卸口部時,推離門板;及一晶圓載入機, 包括:一置放台,用以安置晶圓傳送盒;一機械介面,用以 控制門閂開啟門板以自晶圓傳送盒卸下晶圓片,以及於載入 晶圓片於晶圓傳送盒後栓鎖門板於載卸口部上;一異物感測 器,用以在晶圓傳送盒自置放台移出後進行異物感測,並在 感測到門板仍留置於機械介面或置放台上時,發出一異物感 測信號。 【實施方式】Client's Docket No. :IMI 06-002 TT^s Docket No: 0950-A50674TW/Final/Chad 5 1309869 The door panel cannot be completely latched by the push-out device provided at the frame of the door panel or the loading and unloading port. When loading and unloading the mouth portion, pushing away from the door panel and separating it from the box body, so that the door panel is not fully locked in advance, and the present invention further provides a wafer loading and unloading system, which can be used for sensing A foreign matter sensing signal is emitted when the door panel is pushed away and left on the mechanical interface or the placement table of a wafer loader. In order to achieve the above object, an embodiment of the present invention mainly provides a wafer transfer cassette, comprising: a box body having a loading and unloading portion for loading or unloading a wafer, a door panel, and a door. After loading or unloading the wafer, the door panel is latched on the loading and unloading opening of the box body; and an ejection device is disposed on the frame portion of the door panel or the loading and unloading port portion for failing the latch When the door panel is fully latched, it is pushed away from the door panel. In addition, in another embodiment of the present invention, a wafer loading and unloading system is provided, including: a wafer transfer box, comprising: a box body having a loading and unloading portion for loading or unloading the wafer a door panel; a latch for latching the door panel on the loading and unloading opening of the box body after loading or unloading the wafer; and an ejection device disposed at a frame portion of the door panel or the loading and unloading port portion When the door latch fails to fully lock the door panel to the loading and unloading port portion, and pushes away from the door panel; and a wafer loading machine includes: a placement table for arranging the wafer transfer box; a mechanical interface For controlling the latch to open the door panel to remove the wafer from the wafer transfer cassette, and to lock the door panel on the loading and unloading port after loading the wafer on the wafer transfer box; a foreign object sensor for Foreign matter sensing is performed after the wafer transfer cassette is removed from the table, and a foreign matter sensing signal is emitted when it is sensed that the door panel remains on the mechanical interface or the placement table. [Embodiment]
Client's Docket No.:IMI 06-002 TT's Docket No: 0950-A50674TW/Final/Chad 6 1309869 本發明將藉由下列較佳實施例及圖式作進一步地詳 細說明,然而這些具體實施例僅為舉例說明,而非用以限 定本發明之範疇。此外,為便於說明起見,相似或相同之 元件係以相同之標號標示。 請參考第1圖所揭示之晶圓載卸系統的較佳實施例, 其中晶圓傳送盒(Front Opening Unified Pod ; F0UP) 20 包括一具有載卸口部31的盒本體24,載卸口部31係用 以載入或卸下晶圓片;以及一門閂33,用以於載入或卸 下晶圓片後,栓鎖門板22於盒本體24之載卸口部31上。 其中,由於存放晶圓片的盒本體24必須具備避免晶圓片 在傳送過程中與週遭環境接觸而造成污染的能力,因此門 閂33於栓鎖門板22於盒本體24之載卸口部31上時,必 須能夠建構出一密封的環境。 接著,為了執行半導體製程步驟,晶圓傳送盒20會 透過自動物料輸送系統(Automated Material Handling System ; AMHS)或所謂的高架式搬運系統(Over Head Transportation ; 0HT)來運送内存之晶圓片到晶圓載入機 (Load Port Unit ; LPU)25的置放台27上以安置此晶圓 傳送盒20。接著,在一較佳實施例中,晶圓載入機25會 藉由一對閂鎖(Latch Key)32來打開設置於門板内的門閂 33以卸下門板22,使得儲存於盒本體24内之晶圓片得以 經由一機械手臂而載入機台設備的處理室(Chamber )内, 以進行晶圓加工製程。 整個晶圓載卸的過程將詳述如下。首先,自動物料輸 送系統(未顯示)會將晶圓傳送盒20置於置放台27上並對 準定位銷(Kinematic Coupling Pin)29,接著,置放台Client's Docket No.: IMI 06-002 TT's Docket No: 0950-A50674TW/Final/Chad 6 1309869 The present invention will be further illustrated by the following preferred embodiments and drawings, but these specific embodiments are merely illustrative It is not intended to limit the scope of the invention. In addition, for the sake of explanation, similar or identical elements are designated by the same reference numerals. Referring to the preferred embodiment of the wafer loading and unloading system disclosed in FIG. 1, the wafer opening and closing (F0UP) 20 includes a cartridge body 24 having a loading and unloading port portion 31, and a loading and unloading port portion 31. The utility model is used for loading or unloading the wafer; and a latch 33 for latching the door panel 22 on the loading and unloading opening portion 31 of the cartridge body 24 after loading or unloading the wafer. Wherein, since the cartridge body 24 for storing the wafer must have the ability to prevent the wafer from being contaminated by contact with the surrounding environment during the transportation process, the latch 33 is on the loading and unloading port portion 31 of the cartridge body 24 It is necessary to be able to construct a sealed environment. Next, in order to perform the semiconductor manufacturing process, the wafer transfer cassette 20 transports the wafer of the memory to the wafer through an Automated Material Handling System (AMHS) or a so-called Over Head Transportation (OHT) system. The wafer transfer cassette 20 is placed on the placement table 27 of the Load Port Unit (LPU) 25. Then, in a preferred embodiment, the wafer loader 25 opens the door latch 32 disposed in the door panel by a pair of latch keys 32 to remove the door panel 22 so as to be stored in the cartridge body 24. The wafer can be loaded into the processing chamber of the machine equipment via a robot arm for wafer processing. The entire wafer loading and unloading process will be detailed below. First, an automated material handling system (not shown) places the wafer cassette 20 on the placement table 27 and a Kinematic Coupling Pin 29, and then, the placement table.
Client’s Docket No.:IMI 06-002 7 TT's Docket No; 0950-A50674TW/Final/Chad 1309869 25會帶動晶圓傳送盒2()往前移動,直 閂(Latch)33與晶圓载入機25 的門 =侧密連結,此機械介 =二 :而打開門板22’並開始移動至定位以 :出=於金本體24内之晶圓片會被機械手臂逐-水; =過程之反向順序,將處理後 告:々 31重新置入盒本體20内。 认戟卸口部Client's Docket No.: IMI 06-002 7 TT's Docket No; 0950-A50674TW/Final/Chad 1309869 25 will drive the wafer transfer cassette 2 () to move forward, Latch 33 and wafer loader 25 Door = side tight joint, this mechanical interface = two: and open the door panel 22' and start moving to the position to: out = the wafer in the gold body 24 will be water-by-water by the robot arm; = reverse order of the process, After processing, the 々31 is reinserted into the cartridge body 20. Put out the mouth
遠戶:述’機械介面係藉由閃鎖32與門閃33的緊密 =過載卸口…新置入盒本體心,同二;2圓2 巧重新栓鎖於盒本體24之載卸口部31上時, 閃卻有可能·構老化而發生栓鎖不完全的 板或 ,由於自身的重量或所殘存的栓鎖力量導= 影響下才發生鬆贱掉落,進;的持續震動Far-end: The mechanical interface is closed by the flash lock 32 and the door flash 33 = overload unloading... newly placed into the body of the box, the same as the second; 2 round 2 is re-locked to the loading and unloading part of the box body 24 On the 31st, it is possible to flash the aging and the plate is not completely locked. Due to its own weight or the residual latching force, the impact will be loose and fall.
有鑑於此,本發明之一較佳實施例係藉由— ,22或載卸口部31之邊框部41上的推出装置,以在 當門閃33未能完全栓鎖住門板22與盒本體24時 接推離門板22,以避免發生栓鎖不完全的情形。 請參閱第2圖及第3圖,其分別顯示本發明之一實施 ,中晶圓傳送盒20之正視圖及侧視圖。在本例中,二^ 裝置40為一彈性體,其可設置於門板22或载卸口部31 =邊框部41的底表面42上’用以當門板22貼附但°未完 全栓鎖於載卸口部31時,可藉由彈性體之彈力推離門^In view of the above, a preferred embodiment of the present invention is by means of - 22 or an ejection device on the frame portion 41 of the loading and unloading portion 31, so that when the door flash 33 fails to completely lock the door panel 22 and the cartridge body At 24 o'clock, push the door panel 22 to avoid incomplete locking. Referring to Figures 2 and 3, which show an embodiment of the present invention, a front view and a side view of a wafer transfer cassette 20, respectively. In this example, the device 40 is an elastic body that can be disposed on the door panel 22 or the loading and unloading portion 31 = the bottom surface 42 of the frame portion 41 for attaching the door panel 22 but not completely locked. When the mouth portion 31 is loaded and unloaded, it can be pushed away from the door by the elastic force of the elastic body ^
Client's Docket No.:IMI 06-002 T,S D〇cket No: 095〇-A50674TW/Final/Chad 1309869 此外如第4圖所示,晶圓載入機 感測器50,其可設置在機械介面2 更二異物 晶圓傳送盒20自置放a 銘屮尨。27上以在 士,告日鬥番置放口 7移出後進行異物感測。舉例而 5田日日囫载入機25之機械介面26在載入曰η μ 傳削後’並藉旋轉門_門:入晶圓 31上且發生栓鎖不完全的情形時,由於彈= 將門板22直接彈離各本# 2〇,廿日#泮性體之弹力會 或詈放”7 本體 之倒向機械介面26 二 ° 上,此時異物感測器50將會感測到η也99 仍留置於機械介面26或置放台27上,因而發出 Γ::二晶圓載入機之警報裝£ 6°,即可在接收到ί 3;=°之異物感測信號時發出警報信號: 系統的動作,因此可避免在運送過程中發送 害運送系統的情形。 π生門板掉洛而損 必須說明的是,上述實施例雖係以彈性體為例,但盆 用以限定本發明之推出裝置及其所在之位置,任ς =此技藝者,在不麟本發明之精神和 ^ 許之更動與潤飾。 田」作上 ::而言’如第5Α圖之側視圖所示,彈性體可為作 緩衝墊片47,例如是由橡膠材料所構成。此外, 二义免彈性體夾於門板和載卸口部之間而難以緊密貼 發明之—較佳實施例係在邊框部底表面42設置-用以容納彈性體之一部分,因此,當門板22栓 ,貞於载卸:部31時,彈性體即可被完全壓縮於凹槽48内。 另如第5B圖之側視圖所示,上述彈性體亦可為一彈 瓦片46,例如是由金屬或_材質所構成,而藉由此 E|0cketNo-:IMI 06-002Client's Docket No.: IMI 06-002 T, SD〇cket No: 095〇-A50674TW/Final/Chad 1309869 In addition, as shown in FIG. 4, the wafer loader sensor 50 can be disposed on the mechanical interface 2 The second foreign matter wafer transfer box 20 is placed on its own. On the 27th, the foreign object is sensed after being removed from the sergeant. For example, the mechanical interface 26 of the 5-day sun loader 25 is loaded after 曰η μ-transfer and borrowed from the revolving door _ door: onto the wafer 31 and the latching is incomplete, due to the bomb = The door panel 22 is directly slid away from each of the #2〇, 廿日# 泮性性的弹力会会詈" 7 body reverse mechanical interface 26 2°, at this time, the foreign object sensor 50 will sense η Also 99 remains on the mechanical interface 26 or the placement table 27, thus issuing a Γ:: two wafer loader alarm for £6°, which is issued when a foreign object sensing signal of ί 3;=° is received Alarm signal: The action of the system, so it can avoid the situation of sending the harmful transportation system during transportation. π The door panel is lost and damaged. It must be noted that although the above embodiment uses an elastic body as an example, the basin is used to limit the present. The launching device of the invention and the location of the invention, Ren Yi = this artist, in the spirit of the invention and the change and refinement of the invention. Tian: ": "In the side view shown in Figure 5 The elastomer may be used as a cushion 47, for example, made of a rubber material. In addition, the bismuth free elastic body is sandwiched between the door panel and the loading and unloading port portion and is difficult to be intimately attached thereto - the preferred embodiment is provided on the bottom surface 42 of the frame portion - for accommodating one portion of the elastic body, and therefore, when the door panel 22 is The bolt can be fully compressed into the recess 48 when the portion 31 is loaded or unloaded. Further, as shown in the side view of Fig. 5B, the elastic body may be a bomb tile 46, for example, made of metal or _ material, whereby E|0cket No-: IMI 06-002
Docket No: 0950-A50674TW/Final/Chad 9 1309869 簧片之彈性變形力’ 如,上述彈簧片4β J弓早離栓鎖不完全之門板22。例 門板22或载卸口部^兩鸲部可藉由黏著劑或螺絲固定於 端則突出於外以在被靨^^框部41的底表面42上,中間 然而,為了 生彈性變形力。 實施例提供了另—種d π洗或更換,本發明之一較佳 所不。其中,彈性體可為 j 5C圖之上視圖 門板22或載卸口部幻之 ^ 5’—般為多圈螺旋, 凹槽48,其内並机晋^邊卩41的底表面42上則設有 孔隙_,因將凹槽48分割成數個 部位於凹样内可沿著支架逐漸旋入’使其底 圈45時Λ卩了;5 /脫落,反之,當需要拆卸或更換彈簧Docket No: 0950-A50674TW/Final/Chad 9 1309869 Elastic deformation force of the reed' If the above-mentioned spring piece 4β J bow is away from the door panel 22 which is not completely locked. For example, the door panel 22 or the loading and unloading portion can be protruded to the outside by the adhesive or screw to protrude from the bottom surface 42 of the frame portion 41, however, in order to generate elastic deformation force. The embodiment provides another d π wash or replacement, one of which is preferred. Wherein, the elastic body may be a view door panel 22 on the j 5C diagram or a multi-turn spiral, a groove 48 in which the bottom surface 42 of the edge joint 41 is merged. The aperture _ is provided, because the groove 48 is divided into several parts in the concave sample, which can be gradually screwed in along the bracket to make the bottom ring 45 smashed; 5 / fall off, and vice versa, when the spring needs to be disassembled or replaced
Hi 將_菁圈45沿著支架旋出凹槽48 外而取下’此外,由於溫綠 卢兩“士址圈和凹槽間有孔隙術存 可方便烘乾,不易發生腐钱的現象。 雖^本!X明已以較佳實施例揭露如上,然並並非用以 發明,任何熟習此技藝者,在不脫離本發明之精神 ^口辄圍内’虽可作些許之更動與潤飾,因此本發明之保 範圍當視後附之申請專利範圍所界定者為準。 ’'Hi removes the _ green circle 45 from the bracket out of the groove 48 and removes it. In addition, due to the existence of pores between the Wenlulu and the two grooves, it is easy to dry and it is not easy to cause money rotten. Although it has been disclosed in the above preferred embodiments, it is not intended to be invented, and any person skilled in the art can make some changes and refinements without departing from the spirit of the present invention. Therefore, the scope of the invention is defined by the scope of the appended claims.
Client's Docket No.:TMI 06-002 TT's Docket No: 0950-A50674TW/Final/Chad 1309869 【圖式簡單說明】 第1圖為本發明實施例之晶圓載卸系統之示意圖。 第2圖為本發明實施例之晶圓傳送盒之正視圖。 苐3圖為本發明實施例之晶圓傳送盒之側視圖。 第4圖為本發明實施例之晶圓載卸系統中,門板被推離 脫落於置放台之示意圖。 第5A至5C1I為本發明各個實施例之推出裝置之示意圖。 【主要元件符號說明】 晶圓傳送盒〜20 ; 門板; 載卸口部〜31; 盒本體〜24; 門閂〜33 ; 置放台〜27 ; 定位銷〜29 ; 邊框部〜41 ; 異物感測器〜50 ; 緩衝墊片〜47 ; 凹槽〜48 ; 彈簧圈〜45 ; 孔隙〜49a ^ 晶圓载入機〜25; 閃鎖H 機械介面,Client's Docket No.: TMI 06-002 TT's Docket No: 0950-A50674TW/Final/Chad 1309869 [Schematic Description] FIG. 1 is a schematic view of a wafer loading and unloading system according to an embodiment of the present invention. Figure 2 is a front elevational view of a wafer transfer cassette in accordance with an embodiment of the present invention. Figure 3 is a side view of a wafer transfer cassette in accordance with an embodiment of the present invention. Fig. 4 is a schematic view showing the wafer loading and unloading system of the embodiment of the present invention in which the door panel is pushed away from the placement table. 5A to 5C1I are schematic views of the ejection device of various embodiments of the present invention. [Description of main component symbols] Wafer transfer box~20; Door plate; Load port part~31; Box body~24; Latch~33; Placement table~27; Locating pin~29; Frame part~41; Foreign object sensing ~50; buffer pad ~47; groove ~48; spring ring ~45; aperture ~49a ^ wafer loader ~25; flash lock H mechanical interface,
框部底表面 彈簧片〜46; 支架〜49 ; 面〜42 ;The bottom surface of the frame is spring piece ~ 46; bracket ~ 49; face ~ 42;
Client’s Docket No.:IMI 06-002 TT’s Docket No: 0950-A50674TW/Final/ChadClient’s Docket No.: IMI 06-002 TT’s Docket No: 0950-A50674TW/Final/Chad
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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TW95133035A TWI309869B (en) | 2006-09-07 | 2006-09-07 | Wafer carrier and wafer load port system |
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TW95133035A TWI309869B (en) | 2006-09-07 | 2006-09-07 | Wafer carrier and wafer load port system |
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TW200814223A TW200814223A (en) | 2008-03-16 |
TWI309869B true TWI309869B (en) | 2009-05-11 |
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TW95133035A TWI309869B (en) | 2006-09-07 | 2006-09-07 | Wafer carrier and wafer load port system |
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Families Citing this family (2)
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CN113937036B (en) * | 2021-10-15 | 2022-05-31 | 安徽耐科装备科技股份有限公司 | Feeding detection device and automatic packaging system |
CN115050680B (en) * | 2022-08-16 | 2022-10-28 | 江苏邑文微电子科技有限公司 | Quick positioning device and method for wafer box |
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2006
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