TWI309869B - Wafer carrier and wafer load port system - Google Patents

Description

1309869 IX. Description of the Invention: [Technical Field] The present invention relates to a wafer transfer system, and more particularly to a wafer transfer cassette and a wafer loading and unloading system. [Previous technology #f] In semiconductor manufacturing technology, the main source of pollution in clean rooms comes from machine equipment, the activities of workers, and the pollutants in the process itself. Therefore, the design of the wafer transfer cassette for storing wafers during storage, transfer, and loading and unloading is mainly to prevent the wafer from being in open contact with the surrounding environment to prevent the wafer from being stored inside. The film is contaminated. In general, wafer transfer boxes transport wafers to each machine for processing through automated material handling systems or so-called overhead handling systems. However, during the transportation process, some components of the wafer transfer cassette are likely to fall off due to long service life or incomplete latching, and the dropped components may not only be damaged, but may also be lost. Falling on the rails causes the entire automatic material handling system or overhead > handling system to malfunction. Taking the door panel of the wafer transfer cassette as an example, because the lock is not complete, it is still possible that the weight of the door panel itself is sufficient to support the wafer transfer box without falling off, so the worker is not easy to find such Anomalies, and unless the door panel is loose or dropped by continuous vibration during transport, the door panel is loose and cannot be detected. SUMMARY OF THE INVENTION To solve the above problems, the present invention provides a wafer transfer cassette.

Client's Docket No. :IMI 06-002 TT^s Docket No: 0950-A50674TW/Final/Chad 5 1309869 The door panel cannot be completely latched by the push-out device provided at the frame of the door panel or the loading and unloading port. When loading and unloading the mouth portion, pushing away from the door panel and separating it from the box body, so that the door panel is not fully locked in advance, and the present invention further provides a wafer loading and unloading system, which can be used for sensing A foreign matter sensing signal is emitted when the door panel is pushed away and left on the mechanical interface or the placement table of a wafer loader. In order to achieve the above object, an embodiment of the present invention mainly provides a wafer transfer cassette, comprising: a box body having a loading and unloading portion for loading or unloading a wafer, a door panel, and a door. After loading or unloading the wafer, the door panel is latched on the loading and unloading opening of the box body; and an ejection device is disposed on the frame portion of the door panel or the loading and unloading port portion for failing the latch When the door panel is fully latched, it is pushed away from the door panel. In addition, in another embodiment of the present invention, a wafer loading and unloading system is provided, including: a wafer transfer box, comprising: a box body having a loading and unloading portion for loading or unloading the wafer a door panel; a latch for latching the door panel on the loading and unloading opening of the box body after loading or unloading the wafer; and an ejection device disposed at a frame portion of the door panel or the loading and unloading port portion When the door latch fails to fully lock the door panel to the loading and unloading port portion, and pushes away from the door panel; and a wafer loading machine includes: a placement table for arranging the wafer transfer box; a mechanical interface For controlling the latch to open the door panel to remove the wafer from the wafer transfer cassette, and to lock the door panel on the loading and unloading port after loading the wafer on the wafer transfer box; a foreign object sensor for Foreign matter sensing is performed after the wafer transfer cassette is removed from the table, and a foreign matter sensing signal is emitted when it is sensed that the door panel remains on the mechanical interface or the placement table. [Embodiment]

Client's Docket No.: IMI 06-002 TT's Docket No: 0950-A50674TW/Final/Chad 6 1309869 The present invention will be further illustrated by the following preferred embodiments and drawings, but these specific embodiments are merely illustrative It is not intended to limit the scope of the invention. In addition, for the sake of explanation, similar or identical elements are designated by the same reference numerals. Referring to the preferred embodiment of the wafer loading and unloading system disclosed in FIG. 1, the wafer opening and closing (F0UP) 20 includes a cartridge body 24 having a loading and unloading port portion 31, and a loading and unloading port portion 31. The utility model is used for loading or unloading the wafer; and a latch 33 for latching the door panel 22 on the loading and unloading opening portion 31 of the cartridge body 24 after loading or unloading the wafer. Wherein, since the cartridge body 24 for storing the wafer must have the ability to prevent the wafer from being contaminated by contact with the surrounding environment during the transportation process, the latch 33 is on the loading and unloading port portion 31 of the cartridge body 24 It is necessary to be able to construct a sealed environment. Next, in order to perform the semiconductor manufacturing process, the wafer transfer cassette 20 transports the wafer of the memory to the wafer through an Automated Material Handling System (AMHS) or a so-called Over Head Transportation (OHT) system. The wafer transfer cassette 20 is placed on the placement table 27 of the Load Port Unit (LPU) 25. Then, in a preferred embodiment, the wafer loader 25 opens the door latch 32 disposed in the door panel by a pair of latch keys 32 to remove the door panel 22 so as to be stored in the cartridge body 24. The wafer can be loaded into the processing chamber of the machine equipment via a robot arm for wafer processing. The entire wafer loading and unloading process will be detailed below. First, an automated material handling system (not shown) places the wafer cassette 20 on the placement table 27 and a Kinematic Coupling Pin 29, and then, the placement table.

Client's Docket No.: IMI 06-002 7 TT's Docket No; 0950-A50674TW/Final/Chad 1309869 25 will drive the wafer transfer cassette 2 () to move forward, Latch 33 and wafer loader 25 Door = side tight joint, this mechanical interface = two: and open the door panel 22' and start moving to the position to: out = the wafer in the gold body 24 will be water-by-water by the robot arm; = reverse order of the process, After processing, the 々31 is reinserted into the cartridge body 20. Put out the mouth

Far-end: The mechanical interface is closed by the flash lock 32 and the door flash 33 = overload unloading... newly placed into the body of the box, the same as the second; 2 round 2 is re-locked to the loading and unloading part of the box body 24 On the 31st, it is possible to flash the aging and the plate is not completely locked. Due to its own weight or the residual latching force, the impact will be loose and fall.

In view of the above, a preferred embodiment of the present invention is by means of - 22 or an ejection device on the frame portion 41 of the loading and unloading portion 31, so that when the door flash 33 fails to completely lock the door panel 22 and the cartridge body At 24 o'clock, push the door panel 22 to avoid incomplete locking. Referring to Figures 2 and 3, which show an embodiment of the present invention, a front view and a side view of a wafer transfer cassette 20, respectively. In this example, the device 40 is an elastic body that can be disposed on the door panel 22 or the loading and unloading portion 31 = the bottom surface 42 of the frame portion 41 for attaching the door panel 22 but not completely locked. When the mouth portion 31 is loaded and unloaded, it can be pushed away from the door by the elastic force of the elastic body ^

Client's Docket No.: IMI 06-002 T, SD〇cket No: 095〇-A50674TW/Final/Chad 1309869 In addition, as shown in FIG. 4, the wafer loader sensor 50 can be disposed on the mechanical interface 2 The second foreign matter wafer transfer box 20 is placed on its own. On the 27th, the foreign object is sensed after being removed from the sergeant. For example, the mechanical interface 26 of the 5-day sun loader 25 is loaded after 曰η μ-transfer and borrowed from the revolving door _ door: onto the wafer 31 and the latching is incomplete, due to the bomb = The door panel 22 is directly slid away from each of the #2〇, 廿日# 泮性性的弹力会会詈" 7 body reverse mechanical interface 26 2°, at this time, the foreign object sensor 50 will sense η Also 99 remains on the mechanical interface 26 or the placement table 27, thus issuing a Γ:: two wafer loader alarm for £6°, which is issued when a foreign object sensing signal of ί 3;=° is received Alarm signal: The action of the system, so it can avoid the situation of sending the harmful transportation system during transportation. π The door panel is lost and damaged. It must be noted that although the above embodiment uses an elastic body as an example, the basin is used to limit the present. The launching device of the invention and the location of the invention, Ren Yi = this artist, in the spirit of the invention and the change and refinement of the invention. Tian: ": "In the side view shown in Figure 5 The elastomer may be used as a cushion 47, for example, made of a rubber material. In addition, the bismuth free elastic body is sandwiched between the door panel and the loading and unloading port portion and is difficult to be intimately attached thereto - the preferred embodiment is provided on the bottom surface 42 of the frame portion - for accommodating one portion of the elastic body, and therefore, when the door panel 22 is The bolt can be fully compressed into the recess 48 when the portion 31 is loaded or unloaded. Further, as shown in the side view of Fig. 5B, the elastic body may be a bomb tile 46, for example, made of metal or _ material, whereby E|0cket No-: IMI 06-002

Docket No: 0950-A50674TW/Final/Chad 9 1309869 Elastic deformation force of the reed' If the above-mentioned spring piece 4β J bow is away from the door panel 22 which is not completely locked. For example, the door panel 22 or the loading and unloading portion can be protruded to the outside by the adhesive or screw to protrude from the bottom surface 42 of the frame portion 41, however, in order to generate elastic deformation force. The embodiment provides another d π wash or replacement, one of which is preferred. Wherein, the elastic body may be a view door panel 22 on the j 5C diagram or a multi-turn spiral, a groove 48 in which the bottom surface 42 of the edge joint 41 is merged. The aperture _ is provided, because the groove 48 is divided into several parts in the concave sample, which can be gradually screwed in along the bracket to make the bottom ring 45 smashed; 5 / fall off, and vice versa, when the spring needs to be disassembled or replaced

Hi removes the _ green circle 45 from the bracket out of the groove 48 and removes it. In addition, due to the existence of pores between the Wenlulu and the two grooves, it is easy to dry and it is not easy to cause money rotten. Although it has been disclosed in the above preferred embodiments, it is not intended to be invented, and any person skilled in the art can make some changes and refinements without departing from the spirit of the present invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

Client's Docket No.: TMI 06-002 TT's Docket No: 0950-A50674TW/Final/Chad 1309869 [Schematic Description] FIG. 1 is a schematic view of a wafer loading and unloading system according to an embodiment of the present invention. Figure 2 is a front elevational view of a wafer transfer cassette in accordance with an embodiment of the present invention. Figure 3 is a side view of a wafer transfer cassette in accordance with an embodiment of the present invention. Fig. 4 is a schematic view showing the wafer loading and unloading system of the embodiment of the present invention in which the door panel is pushed away from the placement table. 5A to 5C1I are schematic views of the ejection device of various embodiments of the present invention. [Description of main component symbols] Wafer transfer box~20; Door plate; Load port part~31; Box body~24; Latch~33; Placement table~27; Locating pin~29; Frame part~41; Foreign object sensing ~50; buffer pad ~47; groove ~48; spring ring ~45; aperture ~49a ^ wafer loader ~25; flash lock H mechanical interface,

The bottom surface of the frame is spring piece ~ 46; bracket ~ 49; face ~ 42;

Client’s Docket No.: IMI 06-002 TT’s Docket No: 0950-A50674TW/Final/Chad

Claims (1)

I3〇9869 Patent Application Park: I—a type of wafer transfer cassette, including a body having a load and discharge port for loading or lowering the wafer; after the wafer is used, the door is locked The door panel is 2 on the frame portion of the door panel or the loading and unloading port portion. The door panel is fully latched to the loading and unloading port portion 4, and is pushed away from the bottom of the wafer transfer cassette, wherein the bottom surface of the portion is used to be placed on the frame of the door panel or the loading and unloading port portion. The elastic H-ball but not fully latched to the loading and unloading port is pushed away from the door panel by the elastic force of the flat r body. The frame of the frame: = gold, wherein the inside of the work: when the bolt is locked to the mouth of the mouth, the elastic body (4) is contracted to: the groove 5. As in the scope of claims 2, 3, wherein the elastic body is a spring圈£6_ As claimed in the second and third claims, the elastomer is a spring leaf. 7 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Wafer transfer or wafer transfer as described in item 4, or wafer transfer as described in item 4, or plastic transfer of plastic or rubber. The wafer transfer cassette of claim 3, wherein the TT, S Docket Ν〇Νϋ ϋ ϋ ϋ ϋ ϋ ϋ ϋ ϋ ϋ 弹性 / / / 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性The groove is slotted. The through-circle can be screwed or unscrewed by the bracket. For example, the material of the second patent is metal, plastic or plastic steel.曰曰® transmits a wafer handling system, including a wafer transfer cassette, including: a body 'with-loading port' for loading or unloading the wafer, · in the box Or after 1 piece of the wafer, 'latch the door panel to be placed on the frame of the door panel or the loading and unloading port, and use the door iΓ and _month" to completely lock the door panel to the loading and unloading port. Pushing away from the wafer loader, comprising: a second stage for arranging the wafer transfer cassette; and transmitting to control the door to lock the door panel from the wafer at the loading and unloading On the mouth; and the 阊 丽 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后 后n 中 中 L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L At the time of loading and unloading #, the door panel is pushed away by the elastic force of the elastic body. 13. For the wafer loading and unloading system described in claim 12, the ΤΤνΠη D〇Cket Νο·:ΙΜΙ 06-002 Docket No: 〇950-A50674TW/Final/Chad J3 1309869 . _ 甶 has a groove for accommodating one of the elastomers, and the door is in the groove of the wafer loading and unloading system of the third item. Wang"When the shovel is loaded at the mouth, the elastomer is compressed into the wafer 1Q of the ίhai loading and unloading system ^/中中/^15/ 12 '13' or 14 of which the elastomer is a Cushion gasket. The loading and unloading system, such as the wafer described in claim 13 or 14 of the patent scope, is claimed as: the main straight sea Y body, the material is metal, steel or rubber. The elastomer: one: member: the wafer loading and unloading system', the groove is divided into a plurality of pores: and the bomb; the rack: the recessed groove. In the case of the patent scope, the material of the bracket is metal or plastic? The tamping loading and unloading system, wherein the wafer loading and unloading system described in the item is sensed by the device on the 1st of the day: the device is configured to receive the sensation from the Send an alarm signal. t ^ ^ 1 ^ ^ m ^ ^ ^ ^ ▲ The back includes a latch for erecting with the door η on the door panel, , , . 'The mechanical interface can be rotated to open and close the door panel. Client’s Docket No.:IMl 06-002 XT's Docket No: 〇950-A50674TW/Fmal/Chad 14