TW200811617A - Metallic chrome film processing method of recycled photo mask - Google Patents
Metallic chrome film processing method of recycled photo mask Download PDFInfo
- Publication number
- TW200811617A TW200811617A TW95131574A TW95131574A TW200811617A TW 200811617 A TW200811617 A TW 200811617A TW 95131574 A TW95131574 A TW 95131574A TW 95131574 A TW95131574 A TW 95131574A TW 200811617 A TW200811617 A TW 200811617A
- Authority
- TW
- Taiwan
- Prior art keywords
- mask
- photo mask
- pure water
- recycled
- chrome film
- Prior art date
Links
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 title claims abstract description 14
- 238000003672 processing method Methods 0.000 title claims abstract description 4
- 238000000034 method Methods 0.000 claims abstract description 19
- 238000007689 inspection Methods 0.000 claims abstract description 11
- 238000001035 drying Methods 0.000 claims abstract description 9
- 238000005530 etching Methods 0.000 claims abstract description 6
- 239000000126 substance Substances 0.000 claims abstract description 6
- 238000004140 cleaning Methods 0.000 claims abstract description 5
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 238000004064 recycling Methods 0.000 claims description 8
- 238000000227 grinding Methods 0.000 claims description 7
- 238000005406 washing Methods 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 6
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 239000011651 chromium Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 4
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 claims description 4
- 238000011084 recovery Methods 0.000 claims description 4
- 238000002791 soaking Methods 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 230000003472 neutralizing effect Effects 0.000 claims description 3
- 238000006386 neutralization reaction Methods 0.000 claims description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims 2
- GGOAIKUPVAYXFM-UHFFFAOYSA-N [O-2].[K+].[Ar].[K+] Chemical compound [O-2].[K+].[Ar].[K+] GGOAIKUPVAYXFM-UHFFFAOYSA-N 0.000 claims 1
- 239000002253 acid Substances 0.000 claims 1
- 238000007654 immersion Methods 0.000 claims 1
- 239000012535 impurity Substances 0.000 abstract description 2
- 239000000203 mixture Substances 0.000 abstract description 2
- 238000005498 polishing Methods 0.000 abstract 1
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 241000772413 Lutrogale perspicillata Species 0.000 description 1
- 230000006750 UV protection Effects 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 150000004696 coordination complex Chemical class 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- YNKVVRHAQCDJQM-UHFFFAOYSA-P diazanium dinitrate Chemical compound [NH4+].[NH4+].[O-][N+]([O-])=O.[O-][N+]([O-])=O YNKVVRHAQCDJQM-UHFFFAOYSA-P 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW95131574A TW200811617A (en) | 2006-08-28 | 2006-08-28 | Metallic chrome film processing method of recycled photo mask |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW95131574A TW200811617A (en) | 2006-08-28 | 2006-08-28 | Metallic chrome film processing method of recycled photo mask |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200811617A true TW200811617A (en) | 2008-03-01 |
| TWI342465B TWI342465B (enrdf_load_stackoverflow) | 2011-05-21 |
Family
ID=44767762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW95131574A TW200811617A (en) | 2006-08-28 | 2006-08-28 | Metallic chrome film processing method of recycled photo mask |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200811617A (enrdf_load_stackoverflow) |
-
2006
- 2006-08-28 TW TW95131574A patent/TW200811617A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| TWI342465B (enrdf_load_stackoverflow) | 2011-05-21 |
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