TW200811450A - Substrate retention device and substrate inspection device - Google Patents
Substrate retention device and substrate inspection device Download PDFInfo
- Publication number
- TW200811450A TW200811450A TW95136439A TW95136439A TW200811450A TW 200811450 A TW200811450 A TW 200811450A TW 95136439 A TW95136439 A TW 95136439A TW 95136439 A TW95136439 A TW 95136439A TW 200811450 A TW200811450 A TW 200811450A
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- movable holding
- driving
- holding member
- movable
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 148
- 238000007689 inspection Methods 0.000 title claims abstract description 24
- 230000014759 maintenance of location Effects 0.000 title abstract description 11
- 230000007246 mechanism Effects 0.000 claims abstract description 86
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006223852 | 2006-08-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200811450A true TW200811450A (en) | 2008-03-01 |
| TWI311202B TWI311202B (enExample) | 2009-06-21 |
Family
ID=44767709
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW95136439A TW200811450A (en) | 2006-08-21 | 2006-09-29 | Substrate retention device and substrate inspection device |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200811450A (enExample) |
-
2006
- 2006-09-29 TW TW95136439A patent/TW200811450A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| TWI311202B (enExample) | 2009-06-21 |
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