TW200806092A - Atmospheric-pressure low-temperature plasma generator - Google Patents

Abstract

An atmospheric-pressure, low-temperature plasma apparatus comprises a chamber, a first electrode plate and a second electrode plate. The chamber provides a plasma passage, which has an input terminal and an output terminal. A reaction gas is introduced from the input terminal, and the first electrode plate and the second electrode plate are mounted at the output terminal. Each of the first electrode plate and the second electrode plate are formed with a plurality of microholes, and a plasma-generating space is formed between the first electrode plate and the second electrode plate. An intermediate or high frequency current is injected into the first electrode plate and the second electrode plate for facilitating a reaction performed by the reaction gas in the plasma-generating space. According the plasma can be discharged from the microholes of the second electrode plate.

Description

200806092 IX. Description of the Invention: [Technical Field] The present invention relates to an atmospheric pressure low-temperature plasma product in which a plurality of micropores are formed on a two-electrode plate, and the sub-adjacent and adjacent human face are formed. The current, the money in the _= two-electrode plate is placed under normal pressure and low temperature. ι ^Low-temperature plasma [Prior Art] "plasma" is a gas-like octapole species that is reactive and can be applied to the surface modification of knives, ions or media: wafers or substrates. Quality or table = ^ (such as dissociation into charged electrons, neutrons and ions, • gas molecules 1 continue to impact another gas molecules and then form other electricity two = electricity electrons will continue to chain reaction, resulting in _ ^ It can be produced in a warm or vacuum environment. The vacuum belt will: use " water must be used in the high-environment system to increase the gas molecules by the vacuum environment, and the principle of generating two voltages into the DC, so that the reaction chamber is thousands of miles, I When the reaction is re-reacted, it will reach a collapse state and generate electropolymerization. l The i-collision will form a chain point. It must be kept under vacuum to make electricity. , the material is not resistant to b or contains water vapor and solvent, etc., as of the rain, vacuum plasma production, medium operation. Therefore, only a few parts of the industrial process are applicable to all kinds of C:\Linda\PK Pat \PK10I09. Beben technology industry in the process Got up

9. doc J 200806092 for purchase and application. Conventional plasma generating devices, as described by L. Bardos et al. in 2004 [L. Bardos, H. Barankova, LE Gustavsson, DG Teer a New microwave and Hollow Cathode Hybrid Plasma Sources^ Surface and Coatings Technology 177-178 (2004) P-651-656], which proposes a microwave and hollow cathode composite plasma generating source to improve the microwave plasma generating device developed in 1985, but basically still needs to pump a reaction zone first. The vacuum program, after introducing the gas, still has the technical problems associated with the above vacuuming. Another conventional plasma generating device, as described by H. Barankova et al. in 2004 (H. Barankova, L. Bardos "New Hybrid Source of Cold Atmospheric Plasma 55 Surface and Coatings" Technology 177-178 (2004) ρ · 688-692], which proposes a low-temperature atmospheric plasma generating source. Although the device does not need to be evacuated, it is a pulsed DC high voltage, although the pulsed DC high voltage can achieve the effect of generating plasma, but the pulse The high voltage of DC requires a voltage value of hundreds to thousands of volts to convert the gas into an ionic state, so there is a problem of high energy consumption and high temperature.

Another conventional plasma generating device, as described by Andreas ScMtze et al. in 1998 [Andreas ScMtze, James Y. Jeong, Steven Ε Babayan, Jaeyoung Park, Gary S. Selwyn, and Robert F. Hicks u The Atmospheric -Pressure Plasma Jet: A Review and Comparison to Other Plasma Sources55 IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL· 26, NO· 6, C:\Linda\P8 Pat\PK10109. doc —7 —

06/07/05/11:47 AN 200806092 • DECEMBER (1998)], which compares various types of atmospheric plasma devices in recent years and proposes its own new plasma nozzles, among which Plasma Torch Designs such as Corona Discharge and Dielectric Barrier Discharge use DC voltage to generate plasma. However, the plasma temperature generated by the plasma flame method is not suitable for the sample to be processed which is generally not resistant to high temperature; the plasma generated by the corona discharge type uses the method of reducing the current to reduce the energy consumption and the degree _ However, due to structural limitations, the plasma is generated as a non-uniform filament discharge; and the plasma generated by the dielectric layer discharge method is better in voltage improvement than the above two methods, but it is required The voltage is also high, and the generated plasma is not uniform, so it can only be used to process samples to be processed that have lower processing quality requirements. In addition, the dielectric/layer discharge plasma generator is not suitable for precision electronic original applications because it generates large static electricity between the two layers and the cladding. Furthermore, the new plasma nozzles conceived by Andreas ScMtze have been able to produce electrical equipment under normal pressure, normal temperature and low voltage conditions, but their overall structure is still secret, and there is a structure of water-cooled cooling 4 and Exercise, etc. Other related conventional plasma generating devices, such as the Republic of China Announcement No. 366^677, "The Plasma Generation Device and the Electron Source Using the Same", No. 4947-8, the RF power source for generating the inductive surface-effect plasma", No. '"A device for generating low-temperature plasma under atmospheric pressure", No. 264037 No. "Nozzle", No. 285165 "Plastic generating device (I)", No. 285166" "Plastic generating device (II)", and Inventions and novel patents such as the publication No. 200400781 atmospheric private pulp generator, which include the same technical defects of 200806092 = the above related art. In the above patent, the thoracic =-plasma nozzle comprises a nozzle peak body, a squirt outer cone and a metal cover body, a hip hop, an HD body and a nozzle outer cone. Then j into a reaction room. Inside the tube of the plasma spray head, the reaction space is formed in a narrow and tapered loop shape (four) along the direction of the tube body. When the reaction gas: flows into the reaction space, the reaction between the nozzle peak body and the official wall of the outer cone forms an electrical installation. However, in the reaction empty

The secret of the premature generation (4), the Lai can be the electric power of the silk (4) The sound of the sound has been depleted with the internal wall, so do not work = plasma efficiency and wave # reaction gas, and may also shorten The use of plasma head is * life. In addition, in the above patent, the i2th No. 9 reveals that the counter electrode plate, the discharge gap, and the electric substance (4) generate low temperature plasma at atmospheric pressure, and the specific flow direction of the gas is perpendicular to the electrode 'by (4) The high production line _ exposure to the outside 'causes the risk of flashover or electric shock. Moreover, the range of plasma produced by the device is very small and therefore has no practical value. For the above reasons, it is indeed necessary to further improve the above conventional plasma generating apparatus. In view of the above, the present invention improves the above-mentioned disadvantages by fixing two electrode plates at the end of a hollow body, each of which forms a plurality of micropores, and adjacent to each other to form a plasma generating gap. At the time of actuation, a reactive gas is introduced from the other end of a hollow body, and a medium-high frequency alternating current is applied to the two electrode plates, so that the plasma generating gap rapidly and stably generates a low/3^ slurry under normal pressure, and The low C:\Linda\PKPat\PK1010adoc~9-200806092=^water° is uniformly derived from the micropores of one of the electrode plates. Since the plasma is generated at the outlet end of the device, the density of the body is The highest Wei is also the highest. In addition, the device is completely violent. [The book is extremely outside the device, so it can ensure safe operation. Thereby, the invention can effectively improve the effective utilization rate of the plasma, save the amount of the reaction gas, improve the discharge efficiency, simplify the plasma generating device, and reduce the cost of manufacturing, purchasing, mixing and consumption. Furthermore, since the low-temperature plasma can be applied to various surface heat-resistant fields to be subjected to surface modification, or biological samples are processed from time to time, the present invention can also relatively broaden the scope of application and reduce the sample processing procedure. SUMMARY OF THE INVENTION The main object of the present invention is to provide an atmospheric pressure low-temperature plasma generating device, which is formed on the two electrode plates to form a plurality of micropores, and the two electrode plates are adjacent to each other to form a plasma to generate a gap. In order to produce low temperature plasma under normal pressure, the invention has the advantages of simplifying the plasma generating device, increasing the safety of operation and widening the applicable range. φ The secondary object of the present invention is to provide an atmospheric pressure low-temperature electric power generating device which applies medium-high frequency alternating current to the electrode plate, and the plasma generating gap is extremely small, and the electrode arrangement is parallel to the surface to be treated. The plasma generated by the device is generated at the foremost end of the device by the shortest distance and the largest area, so that the invention has the advantages of improving the effective utilization rate of the plasma, saving the amount of the reaction gas, improving the discharge efficiency, and improving the workpiece processing. Effectiveness, increase the area of plasma generation and reduce energy consumption. Another object of the present invention is to provide an atmospheric pressure low-temperature plasma generating device which is simple in structure and is advantageous for miniaturizing the entire structure or the output end of an electric device C:\Linde\PK Pat\PS10109. doc

06/07/05/11:47 AN -10 - 200806092, for processing small-sized samples to be processed, so that the present invention has the effect of augmenting the range, the atmospheric-pressure low-temperature plasma generating device according to the present invention, which comprises — an empty body, a first electrode plate and a second electrode plate. The hollow engraving portion forms a gas passage having a round end and a round out of Shanghai. The input end is for introducing a reactive gas, and the output end is for fixing the two-and second electrode plates. The first and second electrode plates each form a plurality of brothers

And adjacent to each other to form a plasma generating gap. The first and the first electrode plates are configured to pass a medium-high frequency alternating current to cause the reaction gas in the plasma generating gap to be converted into a low temperature plasma, and the micropores of the second electrode plate are guided by In a preferred embodiment of the present invention, the atmospheric pressure low-temperature plasma generating device comprises a hollow body, a first electrode plate and a second electrode plate, and is combined with a reactive gas source and a medium-high frequency alternating current power source. The inside of the hollow body forms a gas passage, and the gas passage has a wheel end and an output end. The input is coupled to the source of reactive gas to direct at least one reaction gas to the gas passage. The output end is provided with a first fixing portion and a second fixing portion for respectively fixing the first and second electrode plates. The height difference between the first and second fixing portions is such that a plasma gap is formed between the first electrode plate and the second electrode plate, and the plasma generating gap is communicated through the micro holes of the first electrode plate. The gas passage. The first and second electrode plates each form a plurality of micropores. The medium-high frequency power source has two wires electrically connected to the first and second electrode plates respectively to supply a medium-high frequency alternating current, thereby causing the reaction gas in the gap generated by the plasma to be converted into a low temperature plasma, C:\ Linda\PS Pat\PK10109.doc - 11 - 06/07/05/11:47 Α» 200806092 Further, the micropores of the second electrode plate are led out to the outside. The above and other objects, features and advantages of the present invention will become more <RTIgt; As shown in FIGS. 1 and 2, the atmospheric pressure low-temperature plasma generating apparatus according to the first embodiment of the present invention comprises a towel body 1, a first electrode plate 2 and a first electrode plate 3, which are used in combination with a reactive gas. Source 4 and a medium high = parent flow power supply 5. The reaction gas source 4 supplies a reaction gas into the main body 1, and the power source 5 supplies a medium-high frequency alternating current to the first electrode plate 2 and the second electrode plate 3. Thereby, the reaction gas passing between the first electrode plate 2 and the first electrode plate 3 is converted into a low temperature plasma to supply the surface modification or surface cleaning sterilization for various articles to be processed. Referring again to Figures 1 and 2, in more detail, the hollow body 1 of the present invention includes an outer cylinder 11, an inner cylinder 12 and a spacer 13. The outer cylinder 11 is made of a conductive material, for example, a material selected from a metal or an alloy such as copper, iron or stainless steel. The inner cylinder 12 is made of an insulating material, for example, selected from non-metallic materials such as plastic, phenolic resin (commonly known as bakelite) or ceramic. The outer cylinder 11 and the inner cylinder 12 have corresponding shapes, such as a hollow cylindrical shape, a triangular prism shape, a conical shape or a pyramid shape, and the like, so that the inner cylinder body 12 can correspond to the outer sleeve body 11 in a proper sleeve shape. A gas passage 1 is formed inside the outer cylinder 11, and the inner cylinder 12 is for blocking the first electrode plate 2 and the outer cylinder n. The gas suppression 10 has an input terminal 101 and an output terminal 102. The outer cylinder n is at C:\Linda\PK 吆 doc 12

06/07/05/11:47 AM 200806092 The side of the wheel end 101 is formed in a closed shape, and has an air inlet m and a wire inlet 112. The wire inlet 112 preferably has an insulating sleeve (not labeled). . The outer cylinder 11 is open on the side of the output end 102 and has an end surface 113. The spacer 13 is also made of the above-mentioned insulating material and has an annular shape, and is sleeved on the side of the rounded end 102 of the inner cylinder 12 to space the first electrode plate 2 and the second electrode plate 3. Referring to Figures 1, 2 and 3, the first electrode plate 2 and the second electrode plate 3 of the first embodiment of the present invention are made of a conductive material, for example, metal selected from copper, Syrian or non-ferrous steel. Or alloy material. The first electrode plate 2 and the second electrode plate 3 are in the form of a thin plate, and each of the plurality of micro holes 21 and 31 is formed to form an array. The present invention does not limit the size, density and number of the two electrode plates 2 and 3 and the microwell array, but mainly depends on the size of the outer cylinder η and the inner cylinder 12 and the plasma generation. The default use. Further, in the extending direction of the hollow tube body i, the micropores 21 and 31 are preferably arranged in a staggered arrangement relationship with each other, but an alignment arrangement _ may also be selected. When assembled, the first electrode plate 2 is fixed in the inner body 12, and the spacer 13 is adjacent to an end surface of the input end (not labeled, that is, the first fixing portion), and the second electrode is The plate 3 is fixed to the end surface 113 (i.e., the second fixing portion) of the outer same body 11 # slight wheel end. The spacers 13 are used to separate the first electrode plate 2 and the second electrode plate 3, and form a gap 100 between the second and second electrode plates 3. The plasma generation gap is preferably equal to or less than 1 cm (cm). Please refer to the first embodiment of the present invention as shown in Figures 1 and 2, the reverse C:\Linda\PK fttSPKlCIOadoc

〇Π/07/05/Μ:47 AM 13~ 200806092 . The source 4 is selected from various _ gas storage bottle regenerative devices, etc., which are connected to the intake of the outer cylinder u via a line 41. The mouths u, ρ introduce at least one kind of reaction gas into the gas passage of the outer cylinder u. The wire _ degraction gamma or money of the present invention is limited, but it mainly depends on the surface to be added. The anti-employment 5 body may be generally selected from the group consisting of helium, oxygen, hydrogen, nitrogen, chlorine or a mixture thereof, and may be directly selected from atmospheric gases. ▲Please refer to FIGS. 1 and 2 again. In the first embodiment of the present invention, the high frequency AC power source 5 is provided with a first wire 51 and a second wire 52. The first wire 51 passes through the wire inlet 112 of the outer cylinder U and is electrically connected to the first electrode plate 2. The second wire 52 is electrically connected to the appropriate position of the outer cylinder 11, and the outer cylinder u and the second electrode plate 3 are electrically connected by a suitable joint structure, such as a welded joint layer, a screw, and a card. Connect the buckle structure or the grounding method. Thereby, the first wire 51 and the second wire 52 can be used to supply a medium-high frequency alternating current to the first φ electrode plate 2 and the second electrode plate 3. The medium-high frequency alternating current voltage may be equal to or lower than 200 volts (V), and its power may be equal to or lower than 1 watt (w). Generally, the second wire 52 is preferably designed as a grounding terminal. Referring to Figures 2 and 4, when the atmospheric pressure low-temperature plasma generating apparatus of the first embodiment of the present invention is used, the operator can set a workpiece to be processed or placed under atmospheric pressure at atmospheric pressure. Below the hollow body 1, 'and the output end 1G2 of the empty body 1 is preferably kept at a distance equal to or less than 1 cm from the object 6 or 6 to be added, for example, G 65 cm. When the to-be-worked object 6 or 6' is selected from a plastic substrate, for example, selected from the group consisting of polyacrylonitrile C:\Linda\PK Pat\PK10lD9.doc — 14 —

06/07/05/11:47 AH 200806092 Methyl ester (poly_methylmetliacrylate, PMMA, commonly known as plexiglass or acrylic), polystyrene (PS), polycarbonate (PC) or poly For p〇lyethylene terephthalate (PET), etc., the power source 5 can select between 200V and 20W to 30W medium and high frequency alternating current, and the reaction gas source 4 can optionally provide helium or The helium/oxygen mixed gas (mixing ratio of about 5::), the total amount of which is only about 5 liters per minute (L/min). That is, if a helium/oxygen mixed gas is used, Φ is only required to be used in an amount of 100 ml/min (mL/min). Referring to FIGS. 2 and 4 again, in the hollow body 1, the gas passage 10 is communicated to the plasma generating gap 100 via the micro holes 21 of the first electrode plate 2, so that the air inlet ln is The introduced reaction gas can continuously enter the plasma generation gap according to a predetermined flow rate (5 liters/min). At this time, since the gap between the plasma generation gaps (〇·65 cm) is very small, The medium-high frequency alternating current of the first electrode plate 2 and the second electrode plate 3 can oscillate across the plasma generating gap 100 and oscillate back and forth, and the reaction gas rushes to the high frequency alternating current of the towel, thereby causing collapse and molecular state. It is converted into an ionic state, which in turn produces a low temperature electricity. Finally, the low-temperature electropolymer is led out from the micropores 31 of the second electrode plate 3 to supply a surface for the object to be processed 6 or 6, a surface of 6〇 or 6〇, for surface The modified action. At this time, since the low-temperature electropolymer is immediately released to the outside via the -micropores>31, the electric enthalpy does not cause a gap-1 in the electropolymerization (the temperature stays for a long time), so the plasma is relatively lowered. - the probability of improper reaction of the electrode plate 2 or the first plate 3, thereby increasing the effective utilization of the plasma and reducing the amount of reaction gas. In particular, since the present invention is at C: Uinda\Pi PatNPKIOiM. doc-15 ——

06/07/05/11:47 AM 200806092 The resulting switch is turned over to handle various heat-resistant materials over 1^ or 6, so it can be relatively widened. As shown in Fig. 4 and Fig. 4, regardless of the joint surface 6〇 or 6() of the present invention, the bonding surface 6 is improved. Or 60, the hydrophilicity or the combination of the object 6 or 6 to be processed, can be cleaned in the following manner by ^ =:::== - thousand JC, ,, „5 faces 60 or 6〇, cleaning Γ 在 该 该 该 该 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 60 The contact angle of the water droplets is 60 and the above detection means that the object to be processed 6 or 6 can be activated by the f-pressure of the plasma generating device of the present invention to substantially activate the surface of the bonding surface 60 or 60 and enhance The hydrophilicity or the bonding property, etc., so that when the object to be processed 6 or 6 is selected from the plastic substrate of the biochip, the treatment by the atmospheric pressure low temperature plasma of the present invention will greatly enhance the biochip. The plastic substrate is subsequently bonded to each other by thermocompression bonding. Referring to Figures 5 and 6, the atmospheric pressure low-temperature plasma generating apparatus of the second embodiment of the present invention is disclosed. The example also includes a hollow body!, a first electrode plate 2 and a second electrode plate i_ The working body is selected from a single-hollow cylinder, and its shape may be selected from the group consisting of a cylindrical open y, a double-column, a cone or a pyramid, and is made of an insulating material C:\Unda\PK PMAPKlDlOa doc 200806092^. For example, a non-metallic material such as plastic, phenolic resin (commonly known as bakelite) or ceramic is selected. The inside of the hollow body 1 forms a gas passage 10. The gas passage 10 has an input end 101 and an output end 102. The hollow body 1 is formed in a closed shape on the side of the input end 101, and defines an air inlet 103 and a wire inlet 104. The hollow body 形成 is open on the side of the output end 102 and has a shoulder 1〇5 (ie, the first fixing portion) and a ring groove 1〇6 (ie, the second fixing portion), and the shoulder portion 105 and the ring groove 1〇6 10 have a height difference. The eye is further referred to the fifth and sixth figures, The first electrode plate 2 and the second electrode plate 3 of the second embodiment of the invention are also made of a conductive material, and are respectively provided with micro holes 21 and 31, and the micro holes 21 and 31 are also selected to form a misaligned array or pair according to requirements. Arrangement relationship of the array of bits. The first electrode plate 2 can be fixed to the hollow body The shoulder portion of the first electrode plate 3 is bent toward the hollow body 1 to form a flange 32. The flange 32 of the second electrode plate 3 is embedded. It is fixed in the ring groove i〇6 (ie, the second fixing portion) of the hollow body 1. A plasma gap is formed between the first electrode plate 2 and the second electrode plate 3. The conduit 41 of the reactive gas source 4 introduces at least one reactive gas through the inlet port 1〇3 of the hollow body 1. The first wire 51 of the power source 5 enters the gas passage 10 via the wire inlet 104 of the hollow body 1. And applying the medium high frequency ♦ alternating current to the first electrode plate 2, and the second wire 52 is directly connected to the second electrode plate 3 by the external ▲ to apply the alternating current to the second electrode plate 3°, thereby The second embodiment of the invention can not only generate atmospheric pressure low temperature plasma, but also provide different assembly methods to further increase the assembly design allowance C:\Linda\PK Pat\P£10109.doc

—17 — 06/07/05/11:47 AM 200806092 degrees and simplify the overall construction. As described above, compared with various conventional atmospheric pressure low-temperature plasma generating devices, it is impossible to produce normal-pressure low-temperature plasma, or it can produce atmospheric pressure low-temperature plasma, but has the disadvantages of complicated structure or low effective utilization rate of plasma. In the present invention, the first electrode plate 2 and the second electrode plate 3 are fixed on the output end 102 of the hollow body, and the plurality of micro holes 21 and 31 are formed on the two electrode plates 2 and 3, respectively. Adjacent to each other, the plasma creates a gap. At the time of operation, at least the reaction gas is introduced from the inlet end 101 of the hollow body 1, and a medium-high frequency alternating current is applied to the two electrode plates 2 and 3, so that the plasma gap is fast and stable under normal pressure. Producing a low-temperature electrical device, such that the low-temperature plasma is led out from the micropores 31 of the second electrode plate 3 for surface modification of the object to be processed 6 or 6' (H). Utilization, saving reaction gas usage, increasing operational safety, increasing discharge efficiency, simplifying plasma generation devices, and reducing manufacturing, placement, operation, maintenance, and energy costs. Furthermore, since the low-temperature electric device has (10) and low temperature hiding, it is possible to surface-modify various heat-resistant objects to be processed 6 or 6', so that the invention can also broaden the scope of application and reduce sample processing. program. In addition, since the structure of the present invention is simple, it is advantageous to miniaturize the overall structure or the size of the output end 1 2 (for example, down to the millimeter or micron size) for processing a small sample to be processed 6 - or 6 (For example, the plastic substrate of biochip), it can also be relatively wide-ranging. Although the invention has been touched by the above-mentioned preferred implementation, it is not recorded by Lin, and any skilled person in this stomach, Lin Lin, C of the invention :Uinda\PK Pat\PK10109.doc

06/07/05/11:47 AX 200806092 The scope of protection of the present invention is subject to the definition of the scope of the appended patent application.

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C:\Linda\H Pat\PS10109.doc —19 — 06/07/05/11:47 ΑΧ 200806092 [Simplified description of the drawings] FIG. 1 : The atmospheric pressure low-temperature plasma generating apparatus of the first embodiment of the present invention Sub-anatomical view. Fig. 2 is a sectional view showing the combination of the atmospheric pressure low-temperature plasma generating apparatus of the first embodiment of the present invention. Fig. 3 is a plan view showing the first and second electrode plates of the first embodiment of the present invention.

Fig. 4 is a schematic view showing the use of the atmospheric pressure low-temperature plasma generating apparatus of the first embodiment of the present invention. Fig. 5 is an exploded sectional view showing the atmospheric pressure low-temperature plasma generating apparatus of the second embodiment of the present invention. Fig. 6 is a sectional view showing the combination of the atmospheric pressure low-temperature plasma generating apparatus of the second embodiment of the present invention. [Main component symbol description] 10 Gas passage 101 Input end 103 Air inlet 105 shoulder 11 Outer cylinder 112 Wire inlet 12 Inner cylinder 2 First electrode plate 3 Second electrode plate

C:\Unda\ra PBt\PK10109.d〇c

06/07/05/11:47 AM —20 — 1 Hollow body 2 1 〇〇 plasma generation gap 102 wheel end 104 wire inlet 106 ring groove ill air inlet 113 end face 13 spacer 21 micro hole 200806092 31 micro hole 32 Flange 4 Reactive gas source 41 Piping 5 Power supply 51 First conductor 52 Second conductor 6 Object to be machined 60 Bonding surface 6, Object to be machined 60, Bonding surface

06/07/05/11:47 AM

Claims (1)

200806092 X. Applicable Patent Range: An atmospheric pressure low-temperature plasma generating device, comprising: a gas passage with a reaction gas = an empty body, a gas passage formed therein, the input end and an output end, the The input end is for the body; the first pen plate is fixed on the hollow body to form a plurality of micro holes; a second plate, which is fixed to the hollow body to form a plurality of micropores. The second electrode plate is adjacent to the second plate and is formed in the first and second electrode plates. :^ by = - the micropores of the electrode plate are connected to the gas passage; ! The eight-day and the second electrode plates are used to pass a power source to convert the reaction gas in the plasma gap into a low temperature The plasma is introduced into the micropores of the second electrode plate. 2. The atmospheric pressure low-temperature plasma generating device according to the application of the above-mentioned application (4), wherein the output end of the hollow body is provided with a first fixing portion and a first fixing portion for respectively fixing the first and second electrodes The plate has a height difference between the first and second fixing portions to form a gap between the first electrode plate and the second electrode plate. 3. The atmospheric pressure low-temperature plasma generating device according to the first aspect of the patent application, wherein the hollow system comprises a conductive outer cylinder and an inner insulating cylinder, wherein the inner cylinder is sleeved on the outer cylinder in vivo. 4. The atmospheric pressure low-temperature plasma generating device according to item 3 of the patent application scope C:\Linda\PK PSat\PK10I09. doc —22 a 06/07/05/11:47 AM 200806092 • , wherein the outer cylinder The body is provided with an air inlet on the input end side to introduce the reaction gas. 5. The atmospheric pressure low-temperature plasma generating device of claim 3, wherein the outer cylinder is provided with a wire inlet on the input end side for connecting a first wire to the first electrode plate . 6. The atmospheric pressure low-temperature plasma generating device according to claim 3, wherein the outer cylinder is formed in an open shape at the side of the wheel end, and has an end surface φ for fixing the second Electrode plate. 7. The atmospheric pressure low-temperature plasma generating apparatus according to claim 6 of the patent application, wherein the second embodiment further comprises a second wire connected to the outer cylinder. The atmospheric pressure low-temperature electric power generating device according to the third aspect of the invention, wherein the hollow body further comprises a spacer sleeve disposed in the inner cylinder body, the spacer member has an end surface for The first electrode plate is fixed and used to space the first and second electrode plates. [9] The atmospheric pressure low-temperature plasma generating apparatus according to the above-mentioned item of the present invention, wherein the micropores of the first and second electrode plates are arrayed and arranged in a staggered arrangement with each other. 10 according to the application of the patent range! The atmospheric-pressure low-temperature electric device for generating the apparatus / wherein the micropores of the first and second electrode plates are formed _ and are aligned with each other. According to the invention, the atmospheric pressure low-temperature electrical equipment generating device is in accordance with the invention, and the system is connected to the first side, and the first conductor is connected to the first The present invention relates to an atmospheric pressure low-temperature electric paddle generating device according to claim 1, wherein the hollow body system is an insulating cylinder which is on the side of the input end. An air inlet is provided to introduce the reaction gas. 13. The atmospheric pressure low-temperature plasma generating apparatus according to claim 1, wherein the hollow body is formed in an open shape on the output end side and has a shoulder to fix the first electrode plate. 14. The atmospheric pressure low-temperature plasma generating device according to claim 13, wherein the hollow body further has a ring groove on the output end side to fix the second electrode plate, and the shoulder groove There is a high degree of difference between the two. 15 ME is fixed to the hollow body edge to form an extension-flange', according to the patent application scope f2, which further comprises a first, between the atmospheric pressure low temperature plasma generating device plate and the power source. ‘The wire is electrically connected to the second electrode 17, and the scope of the patent is claimed. Wherein the power source is provided by the alternating current to the stepper in the atmospheric pressure low temperature plasma generating device. C:\Linda\PS Pat\PK10l09. doc 0G/07/05/H:47 AM 24 —