TW200801264A - Preparation method of thermal sensing protection layer - Google Patents

Preparation method of thermal sensing protection layer

Info

Publication number
TW200801264A
TW200801264A TW95121489A TW95121489A TW200801264A TW 200801264 A TW200801264 A TW 200801264A TW 95121489 A TW95121489 A TW 95121489A TW 95121489 A TW95121489 A TW 95121489A TW 200801264 A TW200801264 A TW 200801264A
Authority
TW
Taiwan
Prior art keywords
graphite
preparation
titanium nitride
epitaxial
thermal
Prior art date
Application number
TW95121489A
Other languages
English (en)
Chinese (zh)
Other versions
TWI337209B (https=
Inventor
Tsun-Neng Yang
Shan-Ming Lan
Ying-Ru Chen
Jin-Zhen Jiang
Hung-Sheng Chiu
Original Assignee
Atomic Energy Council
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atomic Energy Council filed Critical Atomic Energy Council
Priority to TW95121489A priority Critical patent/TW200801264A/zh
Publication of TW200801264A publication Critical patent/TW200801264A/zh
Application granted granted Critical
Publication of TWI337209B publication Critical patent/TWI337209B/zh

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  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
TW95121489A 2006-06-15 2006-06-15 Preparation method of thermal sensing protection layer TW200801264A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95121489A TW200801264A (en) 2006-06-15 2006-06-15 Preparation method of thermal sensing protection layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95121489A TW200801264A (en) 2006-06-15 2006-06-15 Preparation method of thermal sensing protection layer

Publications (2)

Publication Number Publication Date
TW200801264A true TW200801264A (en) 2008-01-01
TWI337209B TWI337209B (https=) 2011-02-11

Family

ID=44764996

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95121489A TW200801264A (en) 2006-06-15 2006-06-15 Preparation method of thermal sensing protection layer

Country Status (1)

Country Link
TW (1) TW200801264A (https=)

Also Published As

Publication number Publication date
TWI337209B (https=) 2011-02-11

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